TW202215499A - 模擬方法、模擬設備、成膜設備、物品製造方法和非暫態性儲存媒體 - Google Patents
模擬方法、模擬設備、成膜設備、物品製造方法和非暫態性儲存媒體 Download PDFInfo
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- TW202215499A TW202215499A TW110126053A TW110126053A TW202215499A TW 202215499 A TW202215499 A TW 202215499A TW 110126053 A TW110126053 A TW 110126053A TW 110126053 A TW110126053 A TW 110126053A TW 202215499 A TW202215499 A TW 202215499A
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- curable composition
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/20—Design optimisation, verification or simulation
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/20—Design optimisation, verification or simulation
- G06F30/28—Design optimisation, verification or simulation using fluid dynamics, e.g. using Navier-Stokes equations or computational fluid dynamics [CFD]
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/20—Design optimisation, verification or simulation
- G06F30/25—Design optimisation, verification or simulation using particle-based methods
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2113/00—Details relating to the application field
- G06F2113/08—Fluids
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2113/00—Details relating to the application field
- G06F2113/22—Moulding
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Computer Hardware Design (AREA)
- Evolutionary Computation (AREA)
- Geometry (AREA)
- General Engineering & Computer Science (AREA)
- Algebra (AREA)
- Computing Systems (AREA)
- Fluid Mechanics (AREA)
- Mathematical Analysis (AREA)
- Mathematical Optimization (AREA)
- Mathematical Physics (AREA)
- Pure & Applied Mathematics (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020128506A JP2022025595A (ja) | 2020-07-29 | 2020-07-29 | シミュレーション方法、シミュレーション装置、膜形成装置、物品の製造方法及びプログラム |
JP2020-128506 | 2020-07-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW202215499A true TW202215499A (zh) | 2022-04-16 |
Family
ID=80003054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW110126053A TW202215499A (zh) | 2020-07-29 | 2021-07-15 | 模擬方法、模擬設備、成膜設備、物品製造方法和非暫態性儲存媒體 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220035969A1 (ja) |
JP (1) | JP2022025595A (ja) |
KR (1) | KR20220014828A (ja) |
CN (1) | CN114063394A (ja) |
TW (1) | TW202215499A (ja) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8851638B2 (en) * | 2010-11-11 | 2014-10-07 | Eastman Kodak Company | Multiple resolution continuous ink jet system |
JP5599356B2 (ja) * | 2011-03-31 | 2014-10-01 | 富士フイルム株式会社 | シミュレーション方法、プログラムおよびそれを記録した記録媒体、並びに、それらを利用した液滴配置パターンの作成方法、ナノインプリント方法、パターン化基板の製造方法およびインクジェット装置。 |
US20200394349A1 (en) * | 2019-06-11 | 2020-12-17 | Canon Kabushiki Kaisha | Simulation method, simulation apparatus, storage medium film forming method, and method of producing cured product |
SG10202005345XA (en) * | 2019-06-11 | 2021-01-28 | Canon Kk | Simulation method, simulation apparatus, and program |
-
2020
- 2020-07-29 JP JP2020128506A patent/JP2022025595A/ja active Pending
-
2021
- 2021-07-14 US US17/375,117 patent/US20220035969A1/en active Pending
- 2021-07-15 TW TW110126053A patent/TW202215499A/zh unknown
- 2021-07-21 KR KR1020210095298A patent/KR20220014828A/ko active Search and Examination
- 2021-07-28 CN CN202110854290.6A patent/CN114063394A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
US20220035969A1 (en) | 2022-02-03 |
CN114063394A (zh) | 2022-02-18 |
KR20220014828A (ko) | 2022-02-07 |
JP2022025595A (ja) | 2022-02-10 |
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