TW202213656A - Double side cooling power package - Google Patents

Double side cooling power package Download PDF

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Publication number
TW202213656A
TW202213656A TW110129753A TW110129753A TW202213656A TW 202213656 A TW202213656 A TW 202213656A TW 110129753 A TW110129753 A TW 110129753A TW 110129753 A TW110129753 A TW 110129753A TW 202213656 A TW202213656 A TW 202213656A
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Taiwan
Prior art keywords
double
cooling
cooling substrate
package structure
power package
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TW110129753A
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Chinese (zh)
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TWI766791B (en
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資重興
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敦南科技股份有限公司
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Publication of TWI766791B publication Critical patent/TWI766791B/en

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Abstract

A double side cooling power package includes a first cooling substrate, a second cooling substrate, at least one semiconductor chip, and a plurality of first conduction ribbons. The second cooling substrate is disposed opposite to the first cooling substrate. The semiconductor chip is bonded on one of the first cooling substrate and the second cooling substrate. The first conduction ribbons are disposed between the first cooling substrate and the second cooling substrate, wherein each of the first conduction ribbons includes a first portion, a second portion and a bendable portion connecting the first portion and the second portion. The bendable portion forms a closed loop with the edge of the first portion. One of the first portion and the second portion is in direct contact with the semiconductor chip, and another of the first portion and the second portion extends away from the semiconductor chip.

Description

雙面冷卻功率封裝結構Double-sided cooling power package structure

本發明是有關於一種功率封裝結構，且特別是有關於一種雙面冷卻功率封裝結構。The present invention relates to a power package structure, and particularly, to a double-sided cooling power package structure.

功率元件一般在操作期間會產生大量的熱，因此散熱問題是待改善的主要議題之一。Power components generally generate a lot of heat during operation, so heat dissipation is one of the main issues to be improved.

近來，一種雙面冷卻功率封裝結構已被廣泛應用為有效的散熱器（heat sink）。例如，在功率元件的兩面上設置兩個散熱器，因此能提高散熱效率。Recently, a double-sided cooling power package structure has been widely used as an effective heat sink. For example, two heat sinks are provided on both sides of the power element, so that the heat dissipation efficiency can be improved.

然而，如果雙面冷卻功率封裝結構因為熱膨脹係數的差異而遭遇壓應力以及/或是熱應力，則其可能會被破裂或損壞。However, if the double-sided cooled power package structure experiences compressive and/or thermal stress due to differences in thermal expansion coefficients, it may be cracked or damaged.

本發明提供一種雙面冷卻功率封裝結構，能解決壓應力以及/或是熱應力所導致的問題。The present invention provides a double-sided cooling power package structure, which can solve the problems caused by compressive stress and/or thermal stress.

本發明的雙面冷卻功率封裝結構包括第一冷卻基板、第二冷卻基板、至少一半導體晶片以及多個第一導電帶。所述第二冷卻基板與所述第一冷卻基板相對設置。所述半導體晶片接合在第一冷卻基板和第二冷卻基板其中一個上。所述第一導電帶設置於第一冷卻基板與第二冷卻基板之間，其中每個所述第一導電帶包括第一部分、第二部分以及連接所述第一部分和所述第二部分的可彎折部分（bendable portion）。所述可彎折部分於所述第一部分的邊緣形成閉環（closed loop）。第一部分和第二部分中的一個與所述半導體晶片直接接觸，而第一部分和第二部分中的另一個遠離所述半導體晶片延伸。The double-sided cooling power package structure of the present invention includes a first cooling substrate, a second cooling substrate, at least one semiconductor chip, and a plurality of first conductive strips. The second cooling substrate is disposed opposite to the first cooling substrate. The semiconductor wafer is bonded to one of the first cooling substrate and the second cooling substrate. The first conductive strips are disposed between the first cooling substrate and the second cooling substrate, wherein each of the first conductive strips includes a first portion, a second portion, and a switchable connection connecting the first portion and the second portion. bendable portion. The bendable portion forms a closed loop at the edge of the first portion. One of the first portion and the second portion is in direct contact with the semiconductor wafer, while the other of the first portion and the second portion extends away from the semiconductor wafer.

在本發明的一實施例中，所述第一導電帶是不連續結構。In an embodiment of the present invention, the first conductive strip is a discontinuous structure.

在本發明的一實施例中，所述第一導電帶是連續結構。In an embodiment of the present invention, the first conductive strip is a continuous structure.

在本發明的一實施例中，所述第一部分與所述半導體晶片直接接觸。In an embodiment of the invention, the first portion is in direct contact with the semiconductor wafer.

在本發明的一實施例中，所述第一部分經由第一焊料耦接至所述半導體晶片。In an embodiment of the invention, the first portion is coupled to the semiconductor die via a first solder.

在本發明的一實施例中，所述半導體晶片接合在所述第一冷卻基板上，且每個第一導電帶的所述第二部分與所述第二冷卻基板直接接觸。In one embodiment of the invention, the semiconductor wafer is bonded to the first cooling substrate, and the second portion of each first conductive strip is in direct contact with the second cooling substrate.

在本發明的一實施例中，所述半導體晶片接合在所述第一冷卻基板上，且每個第一導電帶的所述第二部分經由第二焊料耦接至所述第二冷卻基板。In one embodiment of the invention, the semiconductor die is bonded on the first cooling substrate, and the second portion of each first conductive strip is coupled to the second cooling substrate via a second solder.

在本發明的一實施例中，所述第二部分與所述半導體晶片直接接觸。In an embodiment of the invention, the second portion is in direct contact with the semiconductor wafer.

在本發明的一實施例中，所述第二部分經由第一焊料耦接至所述半導體晶片。In an embodiment of the invention, the second portion is coupled to the semiconductor die via a first solder.

在本發明的一實施例中，所述半導體晶片接合在所述第一冷卻基板上，且每個第一導電帶的所述第一部分與所述第二冷卻基板直接接觸。In one embodiment of the invention, the semiconductor wafer is bonded to the first cooling substrate, and the first portion of each first conductive strip is in direct contact with the second cooling substrate.

在本發明的一實施例中，所述半導體晶片接合在所述第一冷卻基板上，且每個第一導電帶的所述第一部分與所述第二冷卻基板直接接觸。In one embodiment of the invention, the semiconductor wafer is bonded to the first cooling substrate, and the first portion of each first conductive strip is in direct contact with the second cooling substrate.

在本發明的一實施例中，所述封裝結構更包括多個金屬預成型體設置於所述第二冷卻基板與所述半導體晶片之間，其中所述金屬預成型體與所述第二冷卻基板直接接觸，且第一部分和第二部分中的一個設置在所述金屬預成型體與所述半導體晶片之間。In an embodiment of the present invention, the package structure further includes a plurality of metal preforms disposed between the second cooling substrate and the semiconductor wafer, wherein the metal preforms and the second cooling The substrates are in direct contact, and one of the first portion and the second portion is disposed between the metal preform and the semiconductor wafer.

在本發明的一實施例中，所述封裝結構更包括至少一第二導電帶設置於所述第一冷卻基板與所述第二冷卻基板之間，其中所述第二導電帶具有與每個所述第一導電帶相同的形狀，且所述第二導電帶不接觸所述半導體晶片。In an embodiment of the present invention, the package structure further includes at least one second conductive strip disposed between the first cooling substrate and the second cooling substrate, wherein the second conductive strip has a The first conductive strips are the same shape, and the second conductive strips do not contact the semiconductor wafer.

在本發明的一實施例中，所述第二導電帶與所述第一導電帶是不連續結構。In an embodiment of the present invention, the second conductive strip and the first conductive strip are discontinuous structures.

在本發明的一實施例中，所述第二導電帶與所述第一導電帶是連續結構。In an embodiment of the present invention, the second conductive strip and the first conductive strip are continuous structures.

在本發明的一實施例中，所述第一冷卻基板與所述第二冷卻基板是直接覆銅陶瓷（DBC）基板。In an embodiment of the present invention, the first cooling substrate and the second cooling substrate are direct copper clad ceramic (DBC) substrates.

基於上述，本發明在雙面冷卻功率封裝結構中提供了一種特定的導電帶。具體而言，所述導電帶的可彎折部分在熱壓縮過程中會發生彈性變形，因此能吸收不同材料之間的熱壓縮與熱應力所產生的應力。因此，可改善封裝結構和半導體晶片的堅固性（robustness）。此外，本發明在製程成本(僅需一次或兩次迴焊步驟)和理想的散熱性能方面也具有優勢。Based on the above, the present invention provides a specific conductive tape in the double-sided cooling power package structure. Specifically, the bendable portion of the conductive tape is elastically deformed during the thermal compression process, so that the stress generated by thermal compression and thermal stress between different materials can be absorbed. Therefore, the robustness of the package structure and the semiconductor wafer can be improved. In addition, the present invention also has advantages in terms of process cost (only one or two reflow steps are required) and ideal heat dissipation performance.

為使前述內容更易於理解，以下結合附圖對數個實施例進行詳細說明。In order to make the foregoing content easier to understand, several embodiments are described in detail below with reference to the accompanying drawings.

所附圖式提供對本發明的進一步理解，並且被併入並構成說明書的一部分。所附圖式顯示了本發明的示例性實施例並且與描述一起用於解釋本發明的原理。The accompanying drawings provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The accompanying drawings illustrate exemplary embodiments of the invention and together with the description serve to explain the principles of the invention.

以下將參考實施例和圖式來充分理解本發明。然而，本發明仍可以按照多種不同形式來實施，且不應被解釋為限於下文描述的實施例。在圖式中，為了清楚起見，元件及其相對尺寸可能不按比例縮放。為便於理解，以下實施例中相同的元件可採用相同的元件符號表示。The present invention will be fully understood below with reference to the examples and drawings. However, the present invention may be embodied in many different forms and should not be construed as limited to the embodiments described below. In the drawings, elements and their relative sizes may not be to scale for clarity. For ease of understanding, the same elements in the following embodiments may be represented by the same element symbols.

圖1A是依照本發明的第一實施例的一種雙面冷卻功率封裝結構的側視示意圖。圖1B是圖1A的雙面冷卻功率封裝結構中的第一導電帶的立體圖。1A is a schematic side view of a double-sided cooling power package structure according to the first embodiment of the present invention. FIG. 1B is a perspective view of the first conductive strip in the double-sided cooling power package structure of FIG. 1A .

請參照圖1A與圖1B，第一實施例的雙面冷卻功率封裝結構10包括第一冷卻基板100、第二冷卻基板102、至少一半導體晶片104以及多個第一導電帶106。所述第二冷卻基板102與所述第一冷卻基板100相對設置。在本實施例中，所述第一冷卻基板100與所述第二冷卻基板102例如是直接覆銅陶瓷（DBC）基板。第一冷卻基板100至少包括上金屬層100a、下金屬層100b以及位在上金屬層100a與下金屬層100b之間的介電板100c。第二冷卻基板102至少包括上金屬層102a、下金屬層102b以及位在上金屬層102a與下金屬層102b之間的介電板102c。所述半導體晶片104經由一焊料108接合在第一冷卻基板100上，但本發明並不限於此；在另一實施例中，半導體晶片104是通過超音波壓合（ultrasonic compression，UC）接合在第一冷卻基板100上。所述半導體晶片104例如是IGBT、MOSFET、FRD（fast recovery diode）或寬帶隙晶片。所述第一導電帶106設置於第一冷卻基板100與第二冷卻基板102之間，其中每個第一導電帶106包括第一部分106a、第二部分106b以及連接所述第一部分106a和所述第二部分106b的可彎折部分（bendable portion）106c。第一導電帶106以與圖1A-1B所示的相同幾何形狀沿Y方向延伸。導電帶104的材料例如銅。具體而言，第一實施例中有兩條第一導電帶106，且為連續結構，其中連接部是其第二部分106，而且由於採用連續結構，預期可進一步提高所述雙面冷卻功率封裝結構10的電流量（current capacity）和熱容量（thermal capacity）。所述可彎折部分106c於第一部分106a的邊緣E形成閉環（closed loop），且可彎折部分106c為可彈性變形的結構，因此當雙面冷卻功率封裝結構10受到熱膨脹或壓縮應力的影響時，可吸收應力或壓力。在本實施例中，所述第一部分106a通過UC接合與半導體晶片104直接接觸，但本發明並不限於此；在另一實施例中，第一部分106a可通過焊料（未繪示）接合至半導體晶片104。所述第二部分106b遠離所述半導體晶片104延伸，且每個第一導電帶106的第二部分106b直接接觸第二冷卻基板102。由於第一導電帶106與下金屬層102b的材料可相同，所以所述第二部分106b與第二冷卻基板102的接合方法包括UC接合或雷射焊接等。然而本發明並不限於此；在另一實施例中，第二部分106b可通過焊料（未繪示）接合至第二冷卻基板102。另外，每個第一導電帶106的尺寸可根據需求改變；例如，第一導電帶106的厚度t1、半導體晶片104的厚度t2以及第二部分106b和第一部分106a之間的高度差h可以根據需要而改變。Referring to FIGS. 1A and 1B , the double-sided cooling power package structure 10 of the first embodiment includes a first cooling substrate 100 , a second cooling substrate 102 , at least one semiconductor chip 104 and a plurality of first conductive strips 106 . The second cooling substrate 102 is disposed opposite to the first cooling substrate 100 . In this embodiment, the first cooling substrate 100 and the second cooling substrate 102 are, for example, direct copper clad ceramic (DBC) substrates. The first cooling substrate 100 at least includes an upper metal layer 100a, a lower metal layer 100b, and a dielectric plate 100c located between the upper metal layer 100a and the lower metal layer 100b. The second cooling substrate 102 at least includes an upper metal layer 102a, a lower metal layer 102b, and a dielectric plate 102c located between the upper metal layer 102a and the lower metal layer 102b. The semiconductor chip 104 is bonded to the first cooling substrate 100 via a solder 108, but the invention is not limited thereto; in another embodiment, the semiconductor chip 104 is bonded to the first cooling substrate 100 by ultrasonic compression (UC). on the first cooling substrate 100 . The semiconductor wafer 104 is, for example, an IGBT, a MOSFET, an FRD (fast recovery diode) or a wide band gap wafer. The first conductive strips 106 are disposed between the first cooling substrate 100 and the second cooling substrate 102, wherein each first conductive strip 106 includes a first portion 106a, a second portion 106b and connects the first portion 106a and the A bendable portion 106c of the second portion 106b. The first conductive strip 106 extends in the Y direction with the same geometry as shown in Figures 1A-1B. The material of the conductive strip 104 is, for example, copper. Specifically, there are two first conductive strips 106 in the first embodiment, and it is a continuous structure, wherein the connecting part is the second part 106 thereof, and due to the continuous structure, it is expected that the double-sided cooling power package can be further improved The current capacity and thermal capacity of the structure 10 . The bendable portion 106c forms a closed loop at the edge E of the first portion 106a, and the bendable portion 106c is an elastically deformable structure, so when the double-sided cooling power package structure 10 is affected by thermal expansion or compressive stress can absorb stress or pressure. In this embodiment, the first portion 106a is in direct contact with the semiconductor wafer 104 through UC bonding, but the invention is not limited thereto; in another embodiment, the first portion 106a may be bonded to the semiconductor chip 104 through solder (not shown). wafer 104 . The second portion 106b extends away from the semiconductor wafer 104 and the second portion 106b of each first conductive strip 106 directly contacts the second cooling substrate 102 . Since the materials of the first conductive strip 106 and the lower metal layer 102b can be the same, the bonding method of the second portion 106b and the second cooling substrate 102 includes UC bonding or laser welding. However, the present invention is not limited thereto; in another embodiment, the second portion 106b may be bonded to the second cooling substrate 102 by solder (not shown). In addition, the dimensions of each first conductive strip 106 may vary as desired; for example, the thickness t1 of the first conductive strip 106, the thickness t2 of the semiconductor wafer 104, and the height difference h between the second portion 106b and the first portion 106a may be based on change as needed.

圖2是依照本發明的第二實施例的一種雙面冷卻功率封裝結構的側視示意圖，其中使用與第一實施例相同的元件符號來表示相同或近似的構件。相同或近似的構件內容也可參照上述第一實施例的相關說明，不再贅述。2 is a schematic side view of a double-sided cooling power package structure according to a second embodiment of the present invention, wherein the same reference numerals as those in the first embodiment are used to denote the same or similar components. For the content of the same or similar components, reference may also be made to the relevant descriptions of the above-mentioned first embodiment, which will not be repeated.

請參照圖2，第一與第二實施例的差異在於半導體晶片104與每個第一導電帶106的第一部分106a之間設置有一個額外的焊料200。如果焊料200的成分與焊料108的成分相同，則第二實施例的雙面冷卻功率封裝結構20的製造過程中可以進行單一迴焊製程（reflow process）。舉例來說，先將焊料108施加在第一冷卻基板100上，再將半導體晶片104附著在焊料108b上，然後將額外的焊料200施加在第一部分106a上，層壓所述第一冷卻基板100和所述第二冷卻基板102，以將半導體晶片104接合到焊料200，並且執行上述單一迴焊製程。在另一實施例中，如果焊料200的成分與焊料108的成分不同，則焊料108可以具有比焊料200更高的熔點，並且可以在製造第二實施例的雙面冷卻功率封裝結構20的過程中進行二次迴焊製程。舉例來說，先將焊料108施加在第一冷卻基板100上，再將半導體晶片104附著在焊料108b上，然後進行第一迴焊製程，並於第一迴焊製程後將額外的焊料200施加在第一部分106a上，再層壓所述第一冷卻基板100和所述第二冷卻基板102，以將半導體晶片104接合到焊料200，並執行第二迴焊製程。由於焊料108的熔點高於焊料200的熔點，因此焊料108在第二迴焊製程期間不會熔化變形。Referring to FIG. 2 , the difference between the first and second embodiments is that an additional solder 200 is disposed between the semiconductor wafer 104 and the first portion 106 a of each of the first conductive strips 106 . If the composition of the solder 200 is the same as the composition of the solder 108 , a single reflow process can be performed in the manufacturing process of the double-sided cooling power package structure 20 of the second embodiment. For example, the first cooling substrate 100 is laminated by applying the solder 108 on the first cooling substrate 100, attaching the semiconductor die 104 on the solder 108b, and then applying additional solder 200 on the first portion 106a. and the second cooling substrate 102 to bond the semiconductor die 104 to the solder 200 and perform the single reflow process described above. In another embodiment, if the composition of the solder 200 is different from the composition of the solder 108, the solder 108 may have a higher melting point than the solder 200 and may be cooled during the process of manufacturing the double-sided cooling power package structure 20 of the second embodiment In the second reflow process. For example, the solder 108 is first applied on the first cooling substrate 100, and then the semiconductor chip 104 is attached to the solder 108b, then a first reflow process is performed, and additional solder 200 is applied after the first reflow process On the first portion 106a, the first cooling substrate 100 and the second cooling substrate 102 are further laminated to bond the semiconductor wafer 104 to the solder 200, and a second reflow process is performed. Since the melting point of the solder 108 is higher than the melting point of the solder 200 , the solder 108 will not melt and deform during the second reflow process.

圖3是依照本發明的第三實施例的一種雙面冷卻功率封裝結構的側視示意圖，其中使用與第一實施例相同的元件符號來表示相同或近似的構件。相同或近似的構件內容也可參照上述第一實施例的相關說明，不再贅述。3 is a schematic side view of a double-sided cooling power package structure according to a third embodiment of the present invention, wherein the same or similar components are represented by the same reference numerals as in the first embodiment. For the content of the same or similar components, reference may also be made to the relevant descriptions of the above-mentioned first embodiment, which will not be repeated.

請參照圖3，第三實施例的雙面冷卻功率封裝結構30中的第一導電帶106是不連續結構，其中不同的第一導電帶106的第二部分106b是分開的。因此，根據電路的容量，半導體晶片104以及第一導電帶106的位置可以改變。在另一實施例中，雙面冷卻功率封裝結構30中的第一導電帶106可以是連續結構和不連續結構的組合。Referring to FIG. 3 , the first conductive strips 106 in the double-sided cooling power package structure 30 of the third embodiment are discontinuous structures, wherein the second portions 106b of different first conductive strips 106 are separated. Therefore, depending on the capacity of the circuit, the positions of the semiconductor wafer 104 and the first conductive strip 106 may vary. In another embodiment, the first conductive strip 106 in the double-sided cooling power package structure 30 may be a combination of continuous and discontinuous structures.

圖4是依照本發明的第四實施例的一種雙面冷卻功率封裝結構的側視示意圖，其中使用與第一實施例相同的元件符號來表示相同或近似的構件。相同或近似的構件內容也可參照上述第一實施例的相關說明，不再贅述。4 is a schematic side view of a double-sided cooling power package structure according to a fourth embodiment of the present invention, wherein the same reference numerals as those in the first embodiment are used to denote the same or similar components. For the content of the same or similar components, reference may also be made to the relevant descriptions of the above-mentioned first embodiment, which will not be repeated.

請參照圖4，第一與第四實施例的差異在於第四實施例的雙面冷卻功率封裝結構40中還有第二導電帶400。第二導電帶400設置於所述第一冷卻基板100與所述第二冷卻基板102之間，其中所述第二導電帶400具有與每個第一導電帶106相同的形狀，但尺寸上可能有一點差異。舉例來說，第二導電帶400包括第一部分400a、第二部分400b以及連接第一部分400a和第二部分400b的可彎折部分400c，其中第一部分400a與第一冷卻基板100直接接觸，而第二部分400b與第二冷卻基板102直接接觸。所述第二導電帶400不接觸半導體晶片104，因此根據電路或拓撲的設計，其可為電流和熱量提供額外的路徑。在本實施例中，所述第二導電帶400與所述第一導電帶106是連續結構，其中第二部分400b連接到一個第二部分106b。Referring to FIG. 4 , the difference between the first and fourth embodiments is that there is a second conductive strip 400 in the double-sided cooling power package structure 40 of the fourth embodiment. A second conductive strip 400 is disposed between the first cooling substrate 100 and the second cooling substrate 102, wherein the second conductive strip 400 has the same shape as each of the first conductive strips 106, but may be in size There is a little difference. For example, the second conductive strip 400 includes a first portion 400a, a second portion 400b, and a bendable portion 400c connecting the first portion 400a and the second portion 400b, wherein the first portion 400a is in direct contact with the first cooling substrate 100, and the second portion 400a is in direct contact with the first cooling substrate 100. The second portion 400b is in direct contact with the second cooling substrate 102 . The second conductive strip 400 does not contact the semiconductor wafer 104 and thus may provide additional paths for current and heat depending on the design of the circuit or topology. In this embodiment, the second conductive strip 400 and the first conductive strip 106 are continuous structures, wherein the second portion 400b is connected to one second portion 106b.

圖5是依照本發明的第五實施例的一種雙面冷卻功率封裝結構的側視示意圖，其中使用與第四實施例相同的元件符號來表示相同或近似的構件。相同或近似的構件內容也可參照上述第四實施例的相關說明，不再贅述。5 is a schematic side view of a double-sided cooling power package structure according to a fifth embodiment of the present invention, wherein the same reference numerals as those in the fourth embodiment are used to denote the same or similar components. For the content of the same or similar components, reference may also be made to the relevant descriptions of the above-mentioned fourth embodiment, which will not be repeated.

請參照圖5，第五與第四實施例的差異在於第五實施例的雙面冷卻功率封裝結構50中的第二導電帶400與第一導電帶106是不連續結構，其中第二部分106b和400b是分開的。因此，根據電路的容量，可以改變半導體晶片104的位置以及第一導電帶106與第二導電帶400的位置。Referring to FIG. 5 , the difference between the fifth embodiment and the fourth embodiment is that the second conductive strip 400 and the first conductive strip 106 in the double-sided cooling power package structure 50 of the fifth embodiment are discontinuous structures, wherein the second portion 106 b and 400b are separate. Therefore, depending on the capacity of the circuit, the position of the semiconductor wafer 104 and the positions of the first conductive strip 106 and the second conductive strip 400 can be changed.

圖6是依照本發明的第六實施例的一種雙面冷卻功率封裝結構的側視示意圖，其中使用與第一實施例相同的元件符號來表示相同或近似的構件。相同或近似的構件內容也可參照上述第一實施例的相關說明，不再贅述。6 is a schematic side view of a double-sided cooling power package structure according to a sixth embodiment of the present invention, wherein the same or similar components are represented by the same reference numerals as in the first embodiment. For the content of the same or similar components, reference may also be made to the relevant descriptions of the above-mentioned first embodiment, which will not be repeated.

請參照圖6，第一與第六實施例的差異在於第六實施例的雙面冷卻功率封裝結構60中還有多個金屬預成型體600。所述金屬預成型體600設置於第二冷卻基板102與半導體晶片104之間，且金屬預成型體600較佳是對應形成於每個半導體晶片104的中央。所述金屬預成型體600例如通過雷射焊接或UC接合（也稱為超音波焊接）如超音波熱壓接合（thermal ultrasonic compression），與第二冷卻基板102的下金屬層102b直接接觸。此外，第一導電帶106的第一部分106a設置在金屬預成型體600與半導體晶片104之間，而第一部分106a可通過焊料602接合至金屬預成型體600。在一實施例中，金屬預成型體600的厚度小於或等於第二部分106b和第一部分106a之間的高度差。由於金屬預成型體600例如由具有優異熱傳導性的銅製得，因此半導體晶片104產生的熱可通過金屬預成型體600有效地傳遞至第二冷卻基板102。Referring to FIG. 6 , the difference between the first and sixth embodiments is that there are a plurality of metal preforms 600 in the double-sided cooling power package structure 60 of the sixth embodiment. The metal preform 600 is disposed between the second cooling substrate 102 and the semiconductor wafer 104 , and the metal preform 600 is preferably formed corresponding to the center of each semiconductor wafer 104 . The metal preform 600 is in direct contact with the lower metal layer 102b of the second cooling substrate 102, eg, by laser welding or UC bonding (also called ultrasonic welding) such as thermal ultrasonic compression. Additionally, the first portion 106a of the first conductive strip 106 is disposed between the metal preform 600 and the semiconductor wafer 104 , and the first portion 106a may be bonded to the metal preform 600 by solder 602 . In one embodiment, the thickness of the metal preform 600 is less than or equal to the height difference between the second portion 106b and the first portion 106a. Since the metal preform 600 is made of, for example, copper having excellent thermal conductivity, the heat generated by the semiconductor wafer 104 can be efficiently transferred to the second cooling substrate 102 through the metal preform 600 .

圖7是依照本發明的第七實施例的一種雙面冷卻功率封裝結構的側視示意圖，其中使用與第一實施例相同的元件符號來表示相同或近似的構件。相同或近似的構件內容也可參照上述第一實施例的相關說明，不再贅述。7 is a schematic side view of a double-sided cooling power package structure according to a seventh embodiment of the present invention, wherein the same or similar components are represented by the same reference numerals as in the first embodiment. For the content of the same or similar components, reference may also be made to the relevant descriptions of the above-mentioned first embodiment, which will not be repeated.

請參照圖7，第七實施例的雙面冷卻功率封裝結構70同樣包括第一冷卻基板100、第二冷卻基板102、至少一半導體晶片104以及多個第一導電帶106。然而，第一導電帶106的第二部分106b通過焊料700耦接至半導體晶片104，但本發明不限於此。在另一實施例中，可通過超音波壓合(UC)接合，將半導體晶片104接合在第二部分106b上。第一導電帶106的第一部分106a則與第二冷卻基板102直接接觸。由於第一導電帶106和下金屬層102b的材料可以相同，因此第一部分106a與第二冷卻基板102的接合方法包括UC接合或雷射焊接等。然而本發明並不限於此；在另一實施例中，第一部分106a可通過其他焊料（未繪示）接合至第二冷卻基板102。Referring to FIG. 7 , the double-sided cooling power package structure 70 of the seventh embodiment also includes a first cooling substrate 100 , a second cooling substrate 102 , at least one semiconductor chip 104 and a plurality of first conductive strips 106 . However, the second portion 106b of the first conductive strip 106 is coupled to the semiconductor die 104 through the solder 700, but the invention is not limited thereto. In another embodiment, the semiconductor wafer 104 may be bonded to the second portion 106b by ultrasonic compression (UC) bonding. The first portion 106a of the first conductive strip 106 is in direct contact with the second cooling substrate 102 . Since the materials of the first conductive strip 106 and the lower metal layer 102b may be the same, the bonding method of the first portion 106a and the second cooling substrate 102 includes UC bonding or laser welding. However, the present invention is not limited thereto; in another embodiment, the first portion 106a may be bonded to the second cooling substrate 102 by other solders (not shown).

圖8是依照本發明的第八實施例的一種雙面冷卻功率封裝結構的側視示意圖，其中使用與第七實施例相同的元件符號來表示相同或近似的構件。相同或近似的構件內容也可參照上述第七實施例的相關說明，不再贅述。8 is a schematic side view of a double-sided cooling power package structure according to an eighth embodiment of the present invention, wherein the same reference numerals as those in the seventh embodiment are used to denote the same or similar components. For the content of the same or similar components, reference may also be made to the related descriptions of the above seventh embodiment, which will not be repeated.

請參照圖8，第八與第七實施例的差異在於第八實施例的雙面冷卻功率封裝結構80中還包括第二導電帶800。第二導電帶800設置於所述第一冷卻基板100與所述第二冷卻基板102之間，其中所述第二導電帶800具有與第一導電帶106相同的形狀，但尺寸上可能有一點差異。舉例來說，第二導電帶800包括第一部分800a、第二部分800b以及連接第一部分800a和第二部分800b的可彎折部分800c。第一部分106a與800a可通過焊料802接合至第二冷卻基板102。第二導電帶800不接觸半導體晶片104，因此根據電路或拓撲的設計，其可為電流和熱量提供額外的路徑。在本實施例中，所述第二導電帶800與所述第一導電帶106是不連續結構，其中第二部分800b與106b是分開的。或者，第二導電帶800與第一導電帶106是連續結構，或是連續結構和不連續結構的組合。Referring to FIG. 8 , the difference between the eighth embodiment and the seventh embodiment is that the double-sided cooling power package structure 80 of the eighth embodiment further includes a second conductive strip 800 . A second conductive strip 800 is disposed between the first cooling substrate 100 and the second cooling substrate 102 , wherein the second conductive strip 800 has the same shape as the first conductive strip 106 , but may be slightly different in size difference. For example, the second conductive strip 800 includes a first portion 800a, a second portion 800b, and a bendable portion 800c connecting the first portion 800a and the second portion 800b. The first portions 106a and 800a may be bonded to the second cooling substrate 102 by solder 802 . The second conductive strip 800 does not contact the semiconductor wafer 104 and thus may provide additional paths for current and heat depending on the design of the circuit or topology. In this embodiment, the second conductive strip 800 and the first conductive strip 106 are discontinuous structures, wherein the second portions 800b and 106b are separated. Alternatively, the second conductive strip 800 and the first conductive strip 106 are continuous structures, or a combination of continuous and discontinuous structures.

圖9是依照本發明的第九實施例的一種雙面冷卻功率封裝結構的側視示意圖，其中使用與第七實施例相同的元件符號來表示相同或近似的構件。相同或近似的構件內容也可參照上述第七實施例的相關說明，不再贅述。9 is a schematic side view of a double-sided cooling power package structure according to a ninth embodiment of the present invention, wherein the same reference numerals as those in the seventh embodiment are used to denote the same or similar components. For the content of the same or similar components, reference may also be made to the related descriptions of the above seventh embodiment, which will not be repeated.

請參照圖9，第九與第七實施例的差異在於第九實施例的雙面冷卻功率封裝結構90中還有多個金屬預成型體900。所述金屬預成型體900設置於第二冷卻基板102與半導體晶片104之間，其中金屬預成型體900與第二冷卻基板102的下金屬層102b直接接觸。所述金屬預成型體9可通過UC接合或雷射焊接等形成。此外，第一導電帶106的第二部分106b設置在金屬預成型體900與半導體晶片104之間，而第二部分106b可通過焊料902接合至金屬預成型體900。由於金屬預成型體900例如由具有優異熱傳導性的銅製得，因此半導體晶片104產生的熱可通過金屬預成型體900有效地傳遞至第二冷卻基板102，進而有利於雙面冷卻功率封裝結構90的散熱。Referring to FIG. 9 , the difference between the ninth embodiment and the seventh embodiment is that there are a plurality of metal preforms 900 in the double-sided cooling power package structure 90 of the ninth embodiment. The metal preform 900 is disposed between the second cooling substrate 102 and the semiconductor wafer 104 , wherein the metal preform 900 is in direct contact with the lower metal layer 102 b of the second cooling substrate 102 . The metal preform 9 can be formed by UC bonding or laser welding or the like. Furthermore, the second portion 106b of the first conductive strip 106 is disposed between the metal preform 900 and the semiconductor wafer 104 , and the second portion 106b may be bonded to the metal preform 900 by solder 902 . Since the metal preform 900 is made of, for example, copper having excellent thermal conductivity, the heat generated by the semiconductor wafer 104 can be efficiently transferred to the second cooling substrate 102 through the metal preform 900 , thereby facilitating the double-sided cooling of the power package structure 90 of heat dissipation.

綜上所述，根據本發明的雙面冷卻功率封裝結構可以通過特定的導電帶吸收不同材料之間的熱壓縮與熱應力所產生的應力。具體而言，導電帶的可彎折部分在熱壓縮過程中會發生彈性變形，從而提高封裝和半導體晶片的堅固性。此外，本發明在製程成本(僅需一次或兩次迴焊步驟)方面以及通過導電帶的理想散熱性能方面也具有優勢。To sum up, the double-sided cooling power package structure according to the present invention can absorb the stress caused by thermal compression and thermal stress between different materials through specific conductive strips. Specifically, the bendable portion of the conductive tape undergoes elastic deformation during thermal compression, thereby improving the robustness of the package and semiconductor wafer. In addition, the present invention has advantages in terms of process cost (only one or two reflow steps are required) and in terms of ideal heat dissipation through the conductive tape.

雖然本發明已以實施例揭露如上，然其並非用以限定本發明，任何所屬技術領域中具有通常知識者，在不脫離本發明的精神和範圍內，當可作些許的更動與潤飾，故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed as above with examples, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the appended patent application.

10、20、30、40、50、60、70、80、90:雙面冷卻功率封裝結構 100:第一冷卻基板 100a、102a:上金屬層 100b、102b:下金屬層 100c、102c:介電板 102:第二冷卻基板 104:半導體晶片 106:第一導電帶 106a、400a、800a:第一部分 106b、400b、800b:第二部分 106c、400c、800c:可彎折部分 108、200、602、700、802、902:焊料 400、800:第二導電帶 600、900:金屬預成型體 E:邊緣 h:高度差 t1、t2:厚度 10, 20, 30, 40, 50, 60, 70, 80, 90: Double-sided cooling power package structure 100: First cooling substrate 100a, 102a: upper metal layer 100b, 102b: lower metal layer 100c, 102c: Dielectric plate 102: Second cooling substrate 104: Semiconductor wafer 106: First Conductive Tape 106a, 400a, 800a: Part 1 106b, 400b, 800b: Part II 106c, 400c, 800c: Bendable part 108, 200, 602, 700, 802, 902: Solder 400, 800: The second conductive strip 600, 900: metal preforms E: edge h: height difference t1, t2: thickness

圖1A是依照本發明的第一實施例的一種雙面冷卻功率封裝結構的側視示意圖。 圖1B是圖1A的雙面冷卻功率封裝結構中的第一導電帶的立體圖。 圖2是依照本發明的第二實施例的一種雙面冷卻功率封裝結構的側視示意圖。 圖3是依照本發明的第三實施例的一種雙面冷卻功率封裝結構的側視示意圖。 圖4是依照本發明的第四實施例的一種雙面冷卻功率封裝結構的側視示意圖。 圖5是依照本發明的第五實施例的一種雙面冷卻功率封裝結構的側視示意圖。 圖6是依照本發明的第六實施例的一種雙面冷卻功率封裝結構的側視示意圖。 圖7是依照本發明的第七實施例的一種雙面冷卻功率封裝結構的側視示意圖。 圖8是依照本發明的第八實施例的一種雙面冷卻功率封裝結構的側視示意圖。 圖9是依照本發明的第九實施例的一種雙面冷卻功率封裝結構的側視示意圖。 1A is a schematic side view of a double-sided cooling power package structure according to the first embodiment of the present invention. FIG. 1B is a perspective view of the first conductive strip in the double-sided cooling power package structure of FIG. 1A . 2 is a schematic side view of a double-sided cooling power package structure according to a second embodiment of the present invention. 3 is a schematic side view of a double-sided cooling power package structure according to a third embodiment of the present invention. 4 is a schematic side view of a double-sided cooling power package structure according to a fourth embodiment of the present invention. 5 is a schematic side view of a double-sided cooling power package structure according to a fifth embodiment of the present invention. 6 is a schematic side view of a double-sided cooling power package structure according to a sixth embodiment of the present invention. 7 is a schematic side view of a double-sided cooling power package structure according to a seventh embodiment of the present invention. 8 is a schematic side view of a double-sided cooling power package structure according to an eighth embodiment of the present invention. 9 is a schematic side view of a double-sided cooling power package structure according to a ninth embodiment of the present invention.

10:雙面冷卻功率封裝結構 10: Double-sided cooling power package structure

100:第一冷卻基板 100: First cooling substrate

100a、102a:上金屬層 100a, 102a: upper metal layer

100b、102b:下金屬層 100b, 102b: lower metal layer

100c、102c:介電板 100c, 102c: Dielectric plate

102:第二冷卻基板 102: Second cooling substrate

104:半導體晶片 104: Semiconductor wafer

106:第一導電帶 106: First Conductive Tape

106a:第一部分 106a: Part 1

106b:第二部分 106b: Part II

106c:可彎折部分 106c: Bendable part

108:焊料 108: Solder

t2:厚度 t2: thickness

Claims (16)

一種雙面冷卻功率封裝結構，包括： 第一冷卻基板； 第二冷卻基板，與所述第一冷卻基板相對設置； 至少一半導體晶片，接合在所述第一冷卻基板和所述第二冷卻基板其中一個上；以及 多個第一導電帶，設置於所述第一冷卻基板與所述第二冷卻基板之間，其中每個所述第一導電帶包括第一部分、第二部分以及連接所述第一部分和所述第二部分的可彎折部分，所述可彎折部分於所述第一部分的邊緣形成閉環，所述第一部分和所述第二部分中的一個與所述半導體晶片直接接觸，而所述第一部分和所述第二部分中的另一個遠離所述半導體晶片延伸。 A double-sided cooling power package structure, comprising: a first cooling substrate; a second cooling substrate, disposed opposite to the first cooling substrate; at least one semiconductor wafer bonded to one of the first cooling substrate and the second cooling substrate; and a plurality of first conductive strips disposed between the first cooling substrate and the second cooling substrate, wherein each of the first conductive strips includes a first portion, a second portion and a connection between the first portion and the a bendable part of the second part, the bendable part forms a closed loop at the edge of the first part, one of the first part and the second part is in direct contact with the semiconductor wafer, and the first part The other of one portion and the second portion extends away from the semiconductor wafer. 如請求項1所述的雙面冷卻功率封裝結構，其中所述第一導電帶是不連續結構。The double-sided cooling power package structure of claim 1, wherein the first conductive strip is a discontinuous structure. 如請求項1所述的雙面冷卻功率封裝結構，其中所述第一導電帶是連續結構。The double-sided cooling power package structure of claim 1, wherein the first conductive strip is a continuous structure. 如請求項1所述的雙面冷卻功率封裝結構，其中所述第一部分與所述半導體晶片直接接觸。The double-sided cooled power package structure of claim 1, wherein the first portion is in direct contact with the semiconductor die. 如請求項1所述的雙面冷卻功率封裝結構，其中所述第一部分經由第一焊料耦接至所述半導體晶片。The double-sided cooled power package structure of claim 1, wherein the first portion is coupled to the semiconductor die via a first solder. 如請求項1所述的雙面冷卻功率封裝結構，其中所述半導體晶片接合在所述第一冷卻基板上，且每個所述第一導電帶的所述第二部分與所述第二冷卻基板直接接觸。The double-sided cooled power package structure of claim 1, wherein the semiconductor die is bonded to the first cooling substrate, and the second portion of each of the first conductive strips is connected to the second cooling substrate The substrate is in direct contact. 如請求項1所述的雙面冷卻功率封裝結構，其中所述半導體晶片接合在所述第一冷卻基板上，且每個所述第一導電帶的所述第二部分經由第二焊料耦接至所述第二冷卻基板。The double-sided cooled power package structure of claim 1, wherein the semiconductor die is bonded on the first cooling substrate, and the second portion of each of the first conductive strips is coupled via a second solder to the second cooling substrate. 如請求項1所述的雙面冷卻功率封裝結構，其中所述第二部分與所述半導體晶片直接接觸。The double-sided cooling power package structure of claim 1, wherein the second portion is in direct contact with the semiconductor die. 如請求項1所述的雙面冷卻功率封裝結構，其中所述第二部分經由第一焊料耦接至所述半導體晶片。The double-sided cooled power package structure of claim 1, wherein the second portion is coupled to the semiconductor die via a first solder. 如請求項1所述的雙面冷卻功率封裝結構，其中所述半導體晶片接合在所述第一冷卻基板上，且每個所述第一導電帶的所述第一部分與所述第二冷卻基板直接接觸。The double-sided cooled power package structure of claim 1, wherein the semiconductor die is bonded to the first cooling substrate, and the first portion of each of the first conductive strips is connected to the second cooling substrate direct contact. 如請求項1所述的雙面冷卻功率封裝結構，其中所述半導體晶片接合在所述第一冷卻基板上，且每個所述第一導電帶的所述第二部分經由第二焊料耦接至所述第二冷卻基板。The double-sided cooled power package structure of claim 1, wherein the semiconductor die is bonded on the first cooling substrate, and the second portion of each of the first conductive strips is coupled via a second solder to the second cooling substrate. 如請求項1所述的雙面冷卻功率封裝結構，更包括多個金屬預成型體，設置於所述第二冷卻基板與所述半導體晶片之間，其中所述金屬預成型體與所述第二冷卻基板直接接觸，且所述第一部分和所述第二部分中的所述一個設置在所述金屬預成型體與所述半導體晶片之間。The double-sided cooling power package structure of claim 1, further comprising a plurality of metal preforms disposed between the second cooling substrate and the semiconductor wafer, wherein the metal preforms and the first The two cooling substrates are in direct contact, and the one of the first portion and the second portion is disposed between the metal preform and the semiconductor wafer. 如請求項1所述的雙面冷卻功率封裝結構，更包括至少一第二導電帶，設置於所述第一冷卻基板與所述第二冷卻基板之間，其中所述第二導電帶具有與每個所述第一導電帶相同的形狀，且所述第二導電帶不接觸所述半導體晶片。The double-sided cooling power package structure of claim 1, further comprising at least one second conductive strip disposed between the first cooling substrate and the second cooling substrate, wherein the second conductive strip has a Each of the first conductive strips is the same shape, and the second conductive strips do not contact the semiconductor wafer. 如請求項13所述的雙面冷卻功率封裝結構，其中所述第二導電帶與所述第一導電帶是不連續結構。The double-sided cooling power package structure of claim 13, wherein the second conductive strip and the first conductive strip are discontinuous structures. 如請求項13所述的雙面冷卻功率封裝結構，其中所述第二導電帶與所述第一導電帶是連續結構。The double-sided cooling power package structure of claim 13, wherein the second conductive strip and the first conductive strip are continuous structures. 如請求項1所述的雙面冷卻功率封裝結構，其中所述第一冷卻基板與所述第二冷卻基板包括直接覆銅陶瓷（DBC）基板。The double-sided cooling power package structure of claim 1, wherein the first cooling substrate and the second cooling substrate comprise direct copper clad ceramic (DBC) substrates.
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