TW202206804A - 檢查裝置 - Google Patents

檢查裝置 Download PDF

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Publication number
TW202206804A
TW202206804A TW110108569A TW110108569A TW202206804A TW 202206804 A TW202206804 A TW 202206804A TW 110108569 A TW110108569 A TW 110108569A TW 110108569 A TW110108569 A TW 110108569A TW 202206804 A TW202206804 A TW 202206804A
Authority
TW
Taiwan
Prior art keywords
light
inspected
inspection
conveying
lighting mechanism
Prior art date
Application number
TW110108569A
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English (en)
Chinese (zh)
Inventor
佐佐木浩一
松田晋也
加藤秋久
Original Assignee
日商第一實業Ｖｉｓｗｉｌｌ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 日商第一實業Ｖｉｓｗｉｌｌ股份有限公司 filed Critical 日商第一實業Ｖｉｓｗｉｌｌ股份有限公司
Publication of TW202206804A publication Critical patent/TW202206804A/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW110108569A 2020-03-30 2021-03-10 檢查裝置 TW202206804A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020059464A JP2021156808A (ja) 2020-03-30 2020-03-30 検査装置
JP2020-059464 2020-03-30

Publications (1)

Publication Number Publication Date
TW202206804A true TW202206804A (zh) 2022-02-16

Family

ID=77868576

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110108569A TW202206804A (zh) 2020-03-30 2021-03-10 檢查裝置

Country Status (3)

Country Link
JP (1) JP2021156808A (ja)
CN (1) CN113466260A (ja)
TW (1) TW202206804A (ja)

Also Published As

Publication number Publication date
CN113466260A (zh) 2021-10-01
JP2021156808A (ja) 2021-10-07

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