TW202200816A - 濺鍍靶材及光學功能膜 - Google Patents

濺鍍靶材及光學功能膜 Download PDF

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Publication number
TW202200816A
TW202200816A TW110119051A TW110119051A TW202200816A TW 202200816 A TW202200816 A TW 202200816A TW 110119051 A TW110119051 A TW 110119051A TW 110119051 A TW110119051 A TW 110119051A TW 202200816 A TW202200816 A TW 202200816A
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TW
Taiwan
Prior art keywords
film
less
component
optical functional
functional film
Prior art date
Application number
TW110119051A
Other languages
English (en)
Chinese (zh)
Inventor
金子大亮
梅本啓太
杉內幸也
岡野晋
大友健志
Original Assignee
日商三菱綜合材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2021086830A external-priority patent/JP2021188133A/ja
Application filed by 日商三菱綜合材料股份有限公司 filed Critical 日商三菱綜合材料股份有限公司
Publication of TW202200816A publication Critical patent/TW202200816A/zh

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
TW110119051A 2020-05-28 2021-05-26 濺鍍靶材及光學功能膜 TW202200816A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2020-093236 2020-05-28
JP2020093236 2020-05-28
JP2021086830A JP2021188133A (ja) 2020-05-28 2021-05-24 スパッタリングターゲット、および、光学機能膜
JP2021-086830 2021-05-24

Publications (1)

Publication Number Publication Date
TW202200816A true TW202200816A (zh) 2022-01-01

Family

ID=78744928

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110119051A TW202200816A (zh) 2020-05-28 2021-05-26 濺鍍靶材及光學功能膜

Country Status (2)

Country Link
TW (1) TW202200816A (fr)
WO (1) WO2021241687A1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003321771A (ja) * 2002-02-28 2003-11-14 Tosoh Corp スパッタリングターゲットおよびその製造方法
JP4519431B2 (ja) * 2003-08-26 2010-08-04 株式会社東芝 酸化膜形成用スパッタリングターゲットとそれを用いた酸化膜の製造方法
JP4443958B2 (ja) * 2004-03-05 2010-03-31 日本板硝子株式会社 鏡およびその製造方法
KR101731847B1 (ko) * 2011-07-01 2017-05-08 우베 마테리알즈 가부시키가이샤 스퍼터링용 MgO 타겟
DE102018112335A1 (de) * 2018-05-23 2019-11-28 Hartmetall-Werkzeugfabrik Paul Horn Gmbh Magnetronsputtervorrichtung
JP2020041217A (ja) * 2018-09-07 2020-03-19 三菱マテリアル株式会社 光学機能膜、スパッタリングターゲット、及び、スパッタリングターゲットの製造方法

Also Published As

Publication number Publication date
WO2021241687A1 (fr) 2021-12-02

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