TW202146903A - Connector for electrical connection - Google Patents

Abstract

Provided is an electrical connection connector arranged between an inspection device and a device to be inspected. The electrical connection connector includes at least one conductive part for transferring a signal in the vertical direction. The conductive part includes: a central conductive part including a first elastic material and enabling conduction in the vertical direction; and a first peripheral part including a second elastic material and encompassing the central conductive part in the vertical direction. The first elastic material and the second elastic material have different rates of expansion in a pressurized state in the vertical direction of the conductive part.

Description

connector for electrical connection

The present invention relates to a connector for electrically connecting an inspection apparatus to a device under inspection.

In order to inspect a device under inspection, such as a semiconductor device, a connector for electrically connecting an inspection device to the device under inspection is used in the art. The connector is arranged between the inspection device and the device to be inspected. The connector transmits the electrical test signal of the inspecting device to the inspected device, and transmits the electrical response signal of the inspected device to the inspecting device. As an example of such a connector, a conductive rubber sheet is known in the art.

The conductive rubber sheet has a plurality of elastic conductive parts, the elastic conductive parts are formed of silicone rubber, and the silicone rubber maintains the plurality of metal particles and the plurality of metal particles in contact along the vertical direction in a conductive manner along the vertical direction. The plurality of elastic conductive parts perform signal transmission between the inspection device and the device under inspection. The elastic conductive portion can be formed by including a plurality of metal particles dispersed in liquid silicone rubber and liquid silicone rubber. By applying a magnetic field to the liquid molding material, a plurality of metal particles can be assembled in the up-down direction, whereby the elastic conductive portion can be formed.

The conductive rubber sheet may constitute a part of the conductive rubber sheet, and the insulating portion formed of silicone rubber may support a plurality of elastic conductive portions in the up-down direction. Alternatively, the conductive rubber sheet does not include the above-described insulating portion, and the insulating film coupled to the upper and lower end portions of the plurality of elastic conductive portions may support the plurality of elastic conductive portions in the vertical direction.

When a semiconductor device is inspected, a pressure is applied to the conductive rubber sheet by the semiconductor device so that the conductive rubber sheet is in close contact with the semiconductor device. This pressure elastically deforms the elastic conductive portion. When the pressure is removed, the elastic conductive portion is restored to its original state by the elastic restoring force. In order to prevent damage to the semiconductor device or the conductive rubber sheet, a small amount of pressure is required, and the elastic conductive portion needs to have a good elastic restoring force under a small amount of pressure.

The semiconductor device can be inspected in a temperature environment ranging from a temperature completely lower than normal temperature (eg, 25° C.) to a temperature completely higher than normal temperature. The silicone rubber or the conductive rubber sheet constituting the conductive rubber sheet expands to different degrees according to the inspection temperature.

In the case of inspecting semiconductor devices in a high-temperature environment, silicone rubber expands more excessively than at normal temperature. Due to the excessive expansion of the silicone rubber or the elastic conductive portion, a pressing amount larger than that of the elastic conductive portion at normal temperature occurs under the pressure at room temperature and the same pressure. Excessive expansion in a high temperature environment may cause deformation of the conductive rubber sheet, which cannot guarantee the inspection reliability of the inspection at room temperature.

When a semiconductor device is inspected in a low temperature environment, the degree of expansion of silicone rubber is lower than that at normal temperature, and there is a possibility of excessive shrinkage compared with the expansion at normal temperature. Due to excessive shrinkage of the silicone rubber or the elastic conductive portion, it is necessary to apply a large pressure to the elastic conductive portion in order to obtain a pressing amount similar to that at normal temperature. If the pressure during normal temperature inspection is applied, the elastic conductive portion will not be easily pressed, and the electrical conductivity of the elastic conductive portion will not reach the required level. Therefore, in order to obtain proper electrical conductivity of the elastic conductive portion, it is necessary to apply a large pressure to the elastic conductive portion during inspection in a low temperature environment, and the large pressure may damage the semiconductor device and the conductive rubber socket.

In the conductive rubber sheet of the prior art having the elastic conductive portion formed of a plurality of metal particles and silicone rubber, good inspection reliability cannot be exhibited in the above-mentioned various temperature ranges. When performing inspection in a high-temperature environment, that is, in a low-temperature environment, in order to improve inspection reliability, a pressure and a pressing amount that do not greatly change from the pressure and pressing amount in the inspection at normal temperature are required.

[Problems to be Solved by Invention]

Embodiments of the present invention provide a connector for electrical connection that, when inspected in a low temperature environment, exhibits an exact elastic restoring force under an appropriate pressure and has cold resistance. An embodiment of the present invention provides a connector for electrical connection that prevents excessive expansion and deformation and has heat resistance when inspected in a high temperature environment. An embodiment of the present invention provides a connector for electrical connection that has cold resistance and heat resistance, and thus has good inspection reliability in various temperature ranges. [Technical means to solve problems]

Embodiments of the present invention relate to a connector configured between two electronic devices for electrically connecting the two electronic devices. The structural elements of the connectors of the various embodiments include one of a first elastic material and a second elastic material, and the first elastic material and the second elastic material have different expansion ratios under pressure in the up-down direction. The region containing the first elastic substance and the region containing the second elastic substance may be alternately arranged. One of the first elastic material and the second elastic material can improve the cold resistance, and the other of the first elastic material and the second elastic material can improve the heat resistance. The elastic material having cold resistance may have a high expansion rate compared to the elastic material not having cold resistance, and the elastic material having heat resistance may have a low expansion rate compared to the elastic material not having heat resistance.

A connector for electrical connection according to an embodiment of the present invention includes at least one conductive portion that transmits signals in an up-down direction. The conductive portion includes a central conductive portion and a first peripheral portion, the central conductive portion contains a first elastic material and can conduct electricity in the up-down direction, and the first peripheral portion contains a second elastic material and surrounds the central conductive portion in the up-down direction. The first elastic material and the second elastic material have different expansion ratios in a pressurized state in the vertical direction of the conductive portion.

In one embodiment, in the pressurized state in the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is smaller than the expansion rate of the other, and in the second temperature range lower than the first temperature range In a pressurized state within the temperature range, the expansion rate of one of the first elastic material and the second elastic material is greater than the expansion rate of the other. In the pressurized state in the first temperature range or the pressurized state in the second temperature range, the central conductive portion and the first peripheral portion can expand to different degrees.

In one embodiment, one of the first elastic material and the second elastic material includes one of iron oxide, boron nitride and aluminum nitride, and silicon rubber, and the other of the first elastic material and the second elastic material includes Fluorine and silicone rubber.

In one embodiment, the central conductive portion includes a plurality of first conductive materials that are in contact with and are maintained in the up-down direction by the first elastic material, and the first peripheral portion includes a plurality of first conductive materials capable of conducting electricity in the up-down direction. The plurality of second conductive substances in the up-down direction are contacted and maintained by the second elastic substance in a conductive manner.

In one embodiment, the conductive portion further includes a second peripheral portion, the second peripheral portion surrounds the first peripheral portion along an up-down direction, and includes a first elastic substance. The second peripheral portion may include a plurality of third conductive substances that are in contact with each other in a manner capable of conducting electricity in the up-down direction and are maintained in the up-down direction by the first elastic substance.

In one embodiment, the present invention further includes: a support portion combined with a lower end portion of the central conductive portion to support the conductive portion in an up-down direction; and an insulating film combined with an upper end portion of the first peripheral portion.

In one embodiment, the connector includes a plurality of the above-mentioned conductive parts, and the plurality of conductive parts are separated along a horizontal direction orthogonal to the vertical direction by gaps as hollow spaces.

A connector for electrical connection according to another embodiment of the present invention includes at least one conductive portion and an insulating portion, and the at least one conductive portion transmits signals along the up-down direction. The conductive part includes: a central conductive part containing a first elastic material and capable of conducting electricity in an up-down direction; and a first peripheral part containing a second elastic material and surrounding the central conductive part in an up-down direction. The insulating portion has at least one through hole into which the conductive portion can be inserted in the up-down direction, and contains the first elastic substance. The first elastic material and the second elastic material have different expansion ratios in a pressurized state in the vertical direction of the conductive portion.

In one embodiment, in the pressurized state in the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is smaller than the expansion rate of the other, and in the second temperature range lower than the first temperature range In a pressurized state within the temperature range, the expansion rate of one of the first elastic material and the second elastic material is greater than the expansion rate of the other. In the pressurized state in the first temperature range or the pressurized state in the second temperature range, the central conductive portion and the first peripheral portion can expand to different degrees.

In one embodiment, one of the first elastic material and the second elastic material includes one of iron oxide, boron nitride and aluminum nitride, and silicon rubber, and the other of the first elastic material and the second elastic material includes Fluorine and silicone rubber.

In one embodiment, the central conductive portion includes a plurality of first conductive materials that are in contact with and are maintained in the up-down direction by the first elastic material, and the first peripheral portion includes a plurality of first conductive materials capable of conducting electricity in the up-down direction. The plurality of second conductive substances in the up-down direction are contacted and maintained by the second elastic substance in a conductive manner.

In one embodiment, the insulating portion includes a through portion, the through portion surrounds the first peripheral portion along the up-down direction, defines a through hole on the inner peripheral surface, and contains the second elastic substance.

In one embodiment, a gap as a hollow space formed by at least a portion of the inner peripheral surface and at least a portion of the outer peripheral surface is formed between the inner peripheral surface of the through hole and the outer peripheral surface of the first peripheral portion.

In one embodiment, the present invention may further include: a support portion combined with a lower end portion of the central conductive portion to support the central conductive portion in an up-down direction; and an insulating film combined with an upper end portion of the first peripheral portion.

A connector for electrical connection according to another embodiment of the present invention includes at least one conductive portion and an insulating portion, and the conductive portion includes: a plurality of first conductive substances that are in contact in a manner capable of conducting electricity in the up-down direction; and a first conductive material. The elastic material maintains the first conductive material in the up-down direction, the connector includes an insulating portion having at least one through hole into which the conductive portion can be inserted in the up-down direction, and contains the second elastic material. The first elastic material and the second elastic material have different expansion ratios in a pressurized state in the vertical direction of the conductive portion.

In one embodiment, in the pressurized state in the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is smaller than the expansion rate of the other, and in the second temperature range lower than the first temperature range In a pressurized state within the temperature range, the expansion rate of one of the first elastic material and the second elastic material is greater than the expansion rate of the other.

In one embodiment, one of the first elastic material and the second elastic material includes one of iron oxide, boron nitride and aluminum nitride, and silicon rubber, and the other of the first elastic material and the second elastic material includes Fluorine and silicone rubber.

In one embodiment, a gap as a hollow space formed by at least a part of the outer peripheral surface and at least a part of the inner peripheral surface is formed between the outer peripheral surface of the conductive portion and the inner peripheral surface of the through hole. [Compared to the efficacy of the prior art]

According to an embodiment of the present invention, the conductive portion contains an elastic substance with cold resistance, so when the inspection is performed in a low temperature or extremely low temperature environment, the connector can exhibit the exact elastic restoring force and the required conductivity. Therefore, it is not necessary to apply excessive pressure to the connector during inspection in a low temperature environment, compared with a general connector that does not contain an elastic substance having cold resistance. According to an embodiment of the present invention, the conductive portion includes an elastic material having heat resistance, so that the connector can be prevented from excessive expansion and deformation when inspected in a high temperature or extremely high temperature environment. According to an embodiment of the present invention, the conductive portion or the conductive portion and the insulating portion contain an elastic material with cold resistance and heat resistance. Therefore, compared with the pressure under normal temperature inspection and the amount of pressing of the conductive portion, the connector does not have much use. Varying pressure and pressing amount, in a variety of temperature ranges, with good inspection reliability to achieve the inspection of the device under inspection.

The embodiments of the present invention are exemplified for the purpose of explaining the technical idea of the present invention. The claimed protection scope of the present invention is not limited to the embodiments disclosed below or the specific descriptions of the embodiments.

Unless otherwise defined, all technical and scientific terms used in the present invention have the meanings commonly understood by those of ordinary skill in the art to which this invention belongs. All terms used in the present invention are used to further and clearly describe the present invention, and are not used to limit the claimed protection scope of the present invention.

Unless otherwise specified in a sentence or article including the following expressions, expressions such as "comprising", "providing", "having" and the like used in the present invention should be understood in open-ended terms, There are possibilities to include other embodiments.

Unless otherwise defined, the singular expression described in the present invention may include the plural meaning, which is also applicable to the singular expression described in the protection scope of the invention.

Expressions such as "first" and "second" used in the present invention are used to distinguish a plurality of structural elements from each other, and do not limit the order or importance of the corresponding structural elements.

In the present invention, when a certain structural element is "connected" or "combined" with another structural element, it should be understood that the above-mentioned certain structural element can be directly connected or combined with the above-mentioned other structural element, or, with other new structural elements Structural elements are connected or combined by media.

The directional term "above" as used in the present invention is based on the orientation in which the connector is positioned relative to the inspection device, while the directional term "below" refers to the opposite direction from above. Although the directional indicator "up and down direction" used in the present invention includes the upper direction and the lower direction, it should be understood that it does not mean a specific one of the upper direction and the lower direction.

Hereinafter, embodiments will be described with reference to examples shown in the drawings. In the drawings, the same reference numerals are assigned to the same or corresponding structural elements. Also, in the description of the following embodiments, descriptions of the same or corresponding structural elements are omitted. However, even if the description of related components is omitted, it does not mean that such components do not belong to a certain embodiment.

The embodiments described below and the examples shown in the drawings relate to connectors for electrically connecting two electronic devices. In application examples such as the connector of the embodiment, one of the two electronic devices may be an inspection device, and the other of the two electronic devices may be a device under inspection to be inspected by the inspection device. The connector of the embodiment can be used to electrically connect the inspection apparatus with the device under inspection during electrical inspection of the device under inspection. As an example, the connector of the embodiment can be used for the final electrical inspection of the semiconductor device in a subsequent step in the manufacturing process of the semiconductor device, but the example to which the connector of the embodiment is applied is not limited to this.

FIG. 1 shows an example of a connector to which an embodiment is applied. FIG. 1 schematically shows an electronic device in which a connector is in contact with the connector, and the shape shown in FIG. 1 is only an example selected for understanding of the embodiment.

Referring to Figure 1, a connector in one of the various embodiments of the present invention may be configured between two electronic devices. The connectors of various embodiments are sheet-shaped structures. One of the two electronic devices may be the inspection device 10 , and the other may be the device under inspection 20 to be inspected by the inspection device 10 . FIG. 1 shows that a connector 100 according to an embodiment of the present invention is disposed between the inspection apparatus 10 and the device under inspection 20 for inspecting the device under inspection 20 .

The connector 100 can be mounted on the test socket 30 , and is positioned on the inspection device 10 by the test socket 30 . The test socket 30 is removably mounted to the inspection device 10 . The test socket 30 accommodates the device under test 20 to be transported to the inspection apparatus 10 by manual work or by a transport device, and the device under test 20 can be arranged on the connector 100 . When the device under inspection 20 is inspected, the connector 100 contacts the inspection device 10 and the device under inspection 20 along the vertical direction VD, and the inspection device 10 and the device under inspection 20 are electrically connected to each other.

The device under inspection 20 may be a semiconductor device that uses a resin material to package a semiconductor integrated circuit (IC) chip and a plurality of terminals in a hexahedral shape. The device under inspection 20 has a plurality of terminals 21 on the lower side. The terminal 21 of the device under inspection 20 may be a ball-type terminal.

The inspection apparatus 10 can inspect various operating characteristics of the device 20 under inspection. The inspection device 10 may have a board for performing inspection, which may include an inspection circuit 11 for inspecting the device under inspection. Further, the inspection circuit 11 includes a plurality of terminals 12 that are electrically connected to the terminals 21 of the device under inspection via the connector 100 . The terminal 12 of the inspection device 10 can send and receive electrical test signals and receive response signals.

The connector 100 can be contacted with the terminals 12 of the inspection device 10 through the test socket 30 . When the device under inspection 20 is inspected, the connector 100 electrically connects the respective terminals 21 of the device under inspection and the respective terminals 12 of the inspection device corresponding thereto in the vertical direction VD, and the inspection device 10 performs the pairing of the inspection device 10 through the connector 100 . Inspection of the device under inspection 20 .

At least a portion of the connector 100 may be formed of an elastic substance. When the device under inspection 20 is inspected, the device under inspection 20 is placed on the upper side of the connector 100 . In order to inspect the device under test 20, a pressure P may be applied to the connector 100 along the lower side in the up-down direction VD by mechanical means or manually. With the pressure P, the terminal 21 of the device under inspection and the connector 100 can be brought into contact in the up-down direction VD, and the connector 100 and the terminal 12 of the inspection device can be brought into contact in the up-down direction VD. Also, by the pressure P, a part of the structural elements of the connector 100 can be elastically deformed in the downward and horizontal directions HD. When the pressure P is removed, the above-mentioned part of the components of the connector 100 can be restored to their original shapes.

Referring to FIG. 1 , the connector 100 of an embodiment includes at least one conductive portion 110 , which transmits signals along the vertical direction VD when the device under inspection 20 is inspected. The conductive part 110 may include: a central conductive part 111 , which can conduct electricity along the vertical direction VD; and a first peripheral part 112 , which surrounds the central conductive part 111 . Also, the connector 100 may include: a support part 121 integrated with the vicinity of the lower end of the conductive part 110 to support the conductive part 110 along the vertical direction VD; and an insulating film 130 combined with the upper end of the conductive part 110 .

A part of the conductive part 110 is formed of an elastic material, and the conductive part 110 has elasticity. The conductive portion 110 can be elastically deformed along the vertical direction VD and the horizontal direction HD orthogonal to the vertical direction VD by the pressure P.

In the state where the pressure P is applied, the upper end of the conductive portion 110 is in contact with the terminal 21 of the device under inspection, and the lower end is in contact with the terminal 12 of the inspection device. Thereby, between the terminal 21 of the test device corresponding to one conductive part 110 and the terminal 12 of the inspection apparatus, a conductive path in the vertical direction is formed using the conductive part 110 as a medium. The test signal of the inspection device can be transmitted from the terminal 12 to the terminal 21 of the device under inspection 20 through the conductive part 110 , and the response signal of the device under inspection 20 can be transmitted from the terminal 21 to the terminal 12 of the inspection device 10 through the conductive part 110 .

Under the action of the pressure P, the conductive portion 110 is pressed downward between the device under inspection 20 and the inspection device 10, and the conductive portion 110 transmits electrical signals along the vertical direction VD. Hereinafter, the state in which the conductive portion 110 is pressed downward by the pressure P and elastically deformed in the vertical and horizontal directions is referred to as the pressurized state in the vertical direction of the conductive portion or the pressurized state of the connector.

If the pressure P is removed from the connector 100, the conductive portion 110 can elastically return to its original shape. Hereinafter, the pressure P is not applied to the conductive portion 110, and the state in which the conductive portion 110 maintains its original shape refers to the non-pressurized state in the vertical direction of the conductive portion or the non-pressurized state of the connector. In the connector of the embodiment, the conductive portion 110 is reversibly elastically deformed between the above-described non-pressurized state and the above-described pressurized state.

For example, the device under inspection may be inspected in a temperature range such as -60°C to 160°C. When inspected within the above temperature range, the connectors of various embodiments can ensure inspection reliability similar to that of normal temperature inspection. When inspected in a relatively high temperature range, the structural elements of the connectors of various embodiments can expand from the expansion degree at normal temperature to a slightly larger degree. When inspected in a relatively low temperature range, the structural elements of the connectors of the various embodiments can expand to a somewhat lesser degree, ie, to a lesser extent, compared to the degree of expansion at normal temperature. When performing inspection in a relatively high temperature range and a relatively low temperature range, in order to ensure the inspection reliability of normal temperature inspection, the connectors of various embodiments may have two different types of elastic substances interacting under pressure. Configuration structure.

In an embodiment of the present invention, one of the above-mentioned two types of elastic substances contains a cold-resistant material, and the other contains a heat-resistant material. The elastic material including the cold-resistant material can exhibit a high expansion rate in a pressurized state in a relatively low temperature range. The elastic material including the heat-resistant material can exhibit a low expansion rate in a pressurized state in a relatively high temperature range. Therefore, in a pressurized state at a relatively low temperature and a relatively high temperature, the connector of one embodiment expands to a degree similar to that at normal temperature, so that inspection reliability similar to that of normal temperature inspection can be ensured .

In an embodiment of the present invention, one of the above-mentioned two types of elastic substances refers to the first elastic substance, and the other refers to the second elastic substance. If the first elastic substance includes a cold-resistant material, the second elastic substance may include a heat-resistant material. If the first elastic substance includes a heat-resistant material, the second elastic substance may include a cold-resistant material. The above-mentioned cold-resistant material may be fluorine, but is not limited thereto. The above-mentioned heat-resistant material may be one of iron oxide, boron nitride and aluminum nitride, but is not limited thereto. Therefore, in the embodiment of the present invention, the first elastic material can be selected from the first group and the second group, the first group includes one of iron oxide, boron nitride and aluminum nitride and silicone rubber, the second group The group includes fluorine and silicone rubber, and the second elastic substance can be selected from the rest of the first group and the second group.

Referring to FIG. 1 , in the connector 100 of an embodiment, the elastic material constituting the central conductive portion 111 and the elastic material constituting the first peripheral portion 112 have different expansion ratios in a pressurized state.

The connector of an embodiment may include a plurality of conductive portions 110 . The planar arrangement of the plurality of conductive parts 110 may be changed according to the planar arrangement of the terminals 21 of the device under test 20 . For example, the plurality of conductive parts may be arranged in a single row or a pair or more than one row in the connector.

In the connector of the embodiment, the conductive portion 110 and the support portion 121 can be formed into one piece to form a conductive module 120 . In this type of conductive module 120 , a plurality of conductive parts 110 protrude upward from one support part 121 , so the conductive module 120 has one support part 121 and multiple conductive parts 110 .

2 to 15 are referred to in order to explain the connector of the embodiment. 2 to 15 schematically illustrate the shape of the connector, the shape of the conductive portion, and the shapes of the components of the connector other than the conductive portion. The shapes shown in FIGS. 2 to 15 are only selected examples for understanding the embodiment.

FIG. 2 is a cross-sectional view showing a part of the connector according to the first embodiment of the present invention, and FIG. 3 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 2 . The connector of the first embodiment will be described with reference to FIGS. 2 and 3 together.

In the connector 100, the conductive portion 110 transmits signals along the vertical direction VD between the inspection device and the device under inspection. The connector 100 may include a plurality of conductive parts 110 spaced apart from each other along at least one conductive part 110 or a horizontal direction HD orthogonal to the up-down direction VD.

The conductive portion 110 may have a cylindrical shape extending along the vertical direction VD, and the shape of the conductive portion is not limited to the cylindrical shape. In one embodiment, the conductive portion 110 adopts a dual structure including a central conductive portion 111 and a first peripheral portion 112 .

The central conductive portion 111 may conduct electricity along the vertical direction VD. The central conductive portion 111 includes a first conductive material 113 and a first elastic material 114 . The plurality of first conductive substances 113 are in contact with each other in a manner that can conduct electricity along the up-down direction VD, and are assembled in, for example, a cylindrical shape along the up-down direction VD. The plurality of first conductive substances 113 that are in contact with each other in a manner that can conduct electricity along the vertical direction VD form a conductor that performs signal transmission along the vertical direction VD in the conductive portion 110 .

As shown in FIG. 2 , the first conductive substance 113 may be particles. The particles of the first conductive substance 113 may be formed of a highly conductive metal material. Alternatively, the particles of the first conductive substance 113 may have a form in which the above-mentioned highly conductive metal material is coated on a core formed of an elastic resin material or a metal material. As another example, the first conductive substance 113 may be an elongated fiber or metal wire, and the fiber or metal wire may be formed of metal or carbon.

The first elastic substance 114 is in a cured state and has elasticity. In the first elastic material 114, the plurality of first conductive materials 113 are maintained in the vertical direction VD so that the plurality of first conductive materials 113 have the above-described conductor shape. A first elastic substance 114 may be filled between the plurality of first conductive substances 113 . The first elastic material 114 and the plurality of first conductive materials 113 are integrally formed to constitute the central conductive portion 111 . In the central conductive portion 111 , the first elastic substance 114 is mixed with the first conductive substance 113 .

The first elastic material 114 may be an insulating elastic material or a conductive elastic material. The first elastic substance 114 includes a cold resistant material. As an example, the first elastic material 114 may include fluorine and silicone rubber, and may also have a cold-resistant material having a relatively high expansion rate in a relatively low temperature range. Fluorine can be present in silicone rubber as an additive. The first elastic substance 114 formed of fluorine and silicone rubber can exhibit a higher expansion rate than that of ordinary silicone rubber in a relatively low temperature range, so it can be compressed in a relatively low temperature range. Has cold resistance.

The first peripheral portion 112 surrounds the central conductive portion 111 along the vertical direction VD. As an example, as shown in FIG. 3 , the first peripheral portion 112 can surround the central conductive portion 111 in a ring shape. The first peripheral portion 112 may be formed of only the second elastic substance 115 . The second elastic material 115 may be an insulating elastic material or a conductive elastic material. The second elastic substance 115 contains a heat-resistant material. As an example, the second elastic material 115 may include one of iron oxide, boron nitride, and aluminum nitride, and silicon rubber, and may also include a heat-resistant material having a low expansion rate in a relatively high temperature range. Iron oxide, boron nitride or aluminum nitride can be present in silicone rubber as additives. The second elastic substance 115 comprising one of iron oxide, boron nitride and aluminum nitride and silicone rubber can exhibit a lower expansion rate than that of general silicone rubber in a relatively high temperature range. Therefore, in comparison It can have heat resistance in a pressurized state in a high temperature range.

In the connector 100, the support portion 121 is located on the side facing the inspection device. The support portion 121 functions as a support body that supports one conductive portion or a plurality of conductive portions along the vertical direction VD. In the connector of the embodiment, at least one conductive portion 110 and the support portion 121 or a plurality of the conductive portions 110 and the support portion 121 may be an integral structure. Therefore, the plurality of conductive parts 110 and the supporting parts 121 formed as one body can constitute a conductive module 120 that transmits signals in the up-down direction.

The support portion 121 is arranged along the horizontal direction HD, and is integrated with the lower end portion of the central conductive portion 111 of the conductive portion 110 . The support portion 121 may be integrally formed with the lower end portion of the central conductive portion 111 of the conductive portion 110 . The support portion 121 separates and insulates the plurality of conductive portions 110 along the horizontal direction HD. The lower end of the lower end center conductive portion 111 of the conductive portion 110 protrudes further downward than the lower surface of the support portion 121 . Alternatively, the lower end of the conductive portion 110 may not protrude from the lower surface of the support portion 121 .

The support portion 121 may be formed of an insulating material or a material having insulating properties and elasticity. As an example, the support portion 121 may be one film arranged on the horizontal plane of the connector perpendicular to the vertical direction VD. The film constituting the support portion 121 may contain polyimide, and the material constituting the support portion 121 is not limited thereto.

In the connector 100, the insulating film 130 is located on the side facing the device under inspection. The insulating film 130 may be combined with the upper end portion of the conductive part 110 . As an example, the insulating film 130 may be a film that is combined with the upper end portion of the first peripheral portion 112 of the conductive portion 110 to form the upper surface of the connector 100 . The insulating film 130 can insulate the plurality of conductive parts 110 and can support the plurality of conductive parts 110 along the vertical direction VD. As an example, the insulating film 130 may include an insulating polyimide film or a film formed of an insulating polymer.

In the connector 100 , the plurality of conductive parts 110 are separated by the gaps 150 along the horizontal direction HD orthogonal to the vertical direction VD. The gap 150 may be a hollow space between the outer peripheral surfaces of the first peripheral portions 112 of the adjacent plurality of conductive portions 110 . The gap 150 may be filled with air.

In a pressurized state in the up-down direction of the conductive portion 110, the first elastic material 114 of the central conductive portion 111 and the second elastic material 115 of the first peripheral portion 112 have different properties depending on the temperature environment used for the inspection of the device under inspection. expansion rate. In a pressurized state within a predetermined temperature range, the expansion coefficient may be changed according to the degree of expansion of the conductive portion. When the conductive portion is pressed up and down by pressure, the conductive portion can contract in the up-down direction VD and expand in the horizontal direction HD or diametrically expanded with respect to the central axis of the diametrically conductive portion in the up-down direction. When the conductive portion expands, it elastically deforms in such a manner that the area of the cross-sectional shape of the conductive portion increases. The volume or diameter of the conductive portion in the pressurized state may be larger than that in the non-pressurized state. Considering such deformation of the conductive portion, the expansion ratio may be the ratio of the volume or diameter of the conductive portion in the non-pressurized state to the volume or diameter of the conductive portion in the pressurized state.

The device under inspection can be inspected in a relatively high first temperature range and a relatively low second temperature range. The above-mentioned first temperature range may be a temperature range of 25°C to 160°C. The above-mentioned second temperature range is a temperature range lower than the above-mentioned first temperature range, and may be a temperature range of -60°C to 25°C. In a pressurized state within the above-mentioned first temperature range, the first elastic material 114 may have a first expansion rate, and the second elastic material 115 may have a second expansion rate different from the first expansion rate. In a pressurized state within the above-mentioned second temperature range, the first elastic substance 114 may have a third expansion rate, and the second elastic substance 115 may have a fourth expansion rate different from the third expansion rate.

In a pressurized state within the above-mentioned first temperature range, the second elastic material 115 containing a heat-resistant material has a second expansion rate lower than the first expansion rate of the first elastic material 114 or an expansion rate higher than that of general silicone rubber low expansion rate. In a pressurized state within the above-mentioned second temperature range, the first elastic material 114 including the cold-resistant material has a third expansion rate higher than the fourth expansion rate of the second elastic material 115 or an expansion rate higher than that of general silicone rubber high expansion rate. As described above, in the pressurized state in the above-mentioned first temperature range, the second elastic material 115 has an expansion coefficient lower than that of the first elastic material 114, and in the pressurized state in the above-mentioned second temperature range, The first elastic substance 114 has an expansion ratio higher than that of the second elastic substance 115 .

The elastic material constituting the central conductive portion 111 has cold resistance, and the elastic material constituting the first peripheral portion 112 has heat resistance. The central conductive portion 111 and the first peripheral portion 112 can expand to different degrees in a pressurized state within the first temperature range or a pressurized state within the second temperature range. It can expand at a good level under pressure. Therefore, in the pressurized state in the first temperature range or in the pressurized state in the second temperature range, the conductive portion 110 can not change much compared to the expansion degree in the pressurized state at normal temperature degree of expansion. Therefore, the connector of the above-described embodiment can prevent excessive expansion of the conductive portion 110 to have improved heat resistance in a relatively high-temperature pressurized state (eg, a pressurized state within the above-described first temperature range). In addition, the connector of the above embodiment can have improved cold resistance by preventing excessive shrinkage of the conductive portion 110 in a pressurized state at a relatively low temperature (eg, a pressurized state in the second temperature range). In a pressurized state at a relatively low temperature, if the conductive portion 110 contracts excessively (ie, expands to a small extent), the conductive portion 110 needs to apply excessive pressure to the conductive portion 110 in order to exhibit proper conductivity. However, when the inspection is carried out at a relatively low temperature, the connector 100 of the above-mentioned embodiment can obtain a precise elastic restoring force of the conductive portion under an appropriate pressure without applying a strong pressure.

In the pressurized state within the above-described first temperature range, the conductive portion 110 may further expand compared to the pressurized state at normal temperature. The first peripheral portion 112 including the heat-resistant material improves the heat resistance of the conductive portion 110 in a pressurized state within the above-described first temperature range. Compared with the case where a pressure is applied to a conductive portion including a general silicone rubber that does not have the above-described heat-resistant material in the above-described first temperature range, the conductive portion 110 can expand less, and thus, can have a lower expansion ratio . In the pressurized state within the above-described second temperature range, the conductive portion 110 may expand less than in the pressurized state at normal temperature. In the pressurized state within the above-mentioned second temperature range, the central conductive portion 111 including the above-mentioned cold-resistant material improves the cold resistance of the conductive portion 110 . Therefore, the conductive portion 110 can expand less, and thus, can have higher expansion rate.

The expansion coefficient can be based on the relationship between the stroke and the pressure at a specific limit temperature (for example, -60°C or 150°C), for general conductive parts and The degree of expansion of the conductive portion including the above-mentioned cold-resistant or heat-resistant material was compared and measured. The stroke may be the difference between the height of the conductive portion in the non-pressurized state and the height of the conductive portion in the pressurized state in which current flows in a checkable manner.

As an example, a plurality of pressures applied so that the above-described general conductive portion and the conductive portion of the embodiment may exhibit the same stroke are compared, and the expansion ratios are compared and measured. In order to generate the same stroke at an extreme temperature such as -60° C., it is necessary to apply a higher pressure to the above-mentioned general conductive portion that does not have a cold-resistant material than the conductive portion of the embodiment. This means that in the pressurized state in the above-mentioned second temperature range, the conductive portion of the embodiment expands more than the general conductive portion described above and the conductive portion of the embodiment has a higher expansion rate.

As another example, the expansion ratio can be compared and measured by comparing a plurality of strokes exhibited by the above-mentioned general conductive portion and the conductive portion of the embodiment under the same pressure. Under the condition of applying the same pressure at an extreme temperature such as -60° C., the stroke exhibited by the above-mentioned general conductive portion may be smaller than that exhibited by the conductive portion of the embodiment. This means that in the pressurized state in the above-mentioned second temperature range, the conductive portion of the embodiment expands more than the general conductive portion described above and the conductive portion of the embodiment has a higher expansion rate.

When the same pressure is applied to the conductive portion at a specific temperature, the expansion rate can be measured as a ratio of the length or volume of the conductive portion extending in the horizontal direction. For the ratio of the lengths, the dimension of the outermost surface of the expanded outermost surface of the conductive portion in the pressurized state can be obtained based on the diameter dimension of the outermost surface of the conductive portion in the non-pressurized state. Regarding the volume ratio, the size of the expanded volume of the conductive portion in the pressurized state can be obtained based on the size of the volume of the conductive portion in the non-pressurized state.

In the connector of the embodiment described with reference to FIGS. 2 and 3 , the central conductive portion 111 has cold resistance, and the first peripheral portion 112 has heat resistance. As an alternative, the central conductive portion 111 may have heat resistance, and the first peripheral portion 112 may have cold resistance. That is, the first elastic material 114 may include one of iron oxide, boron nitride and aluminum nitride, and silicone rubber, and the second elastic material 115 may include fluorine and silicone rubber. In this case, the first elastic substance 114 has an expansion ratio lower than that of the second elastic substance 115 in the pressurized state in the above-mentioned first temperature range, and in the pressurized state in the above-mentioned second temperature range , the second elastic substance 115 has a higher expansion rate than the first elastic substance 114 .

FIG. 4 shows an alternative example of the connector of the above-described embodiment. Referring to FIG. 4 , the first peripheral portion 112 includes a second elastic substance 115 and a plurality of second conductive substances 116 . The plurality of second conductive substances 116 are in contact with each other in a manner that can conduct electricity along the vertical direction VD, and the shape of the first peripheral portion 112 is maintained along the vertical direction VD by the second elastic substances 115 . In the first peripheral portion 112 , the second elastic substance 115 is mixed with the second conductive substance 116 . The second conductive substance 116 may be the same as or different from the first conductive substance 113 of the central conductive portion 111 .

As an example, the conductive portion 110 and the support portion 121 can be manufactured by injecting a liquid molding material into a molding die, and applying a magnetic field to assemble a plurality of conductive substances in the vertical direction and perform curing treatment. The liquid molding material may contain a liquid elastic substance for heat resistance or cold resistance, and a conductive substance may be dispersed in the liquid elastic substance. The above-mentioned forming mold may be disposed in a forming cavity corresponding to the shape of the conductive portion at each position where the conductive portion is formed. The above-mentioned molding die may include a magnet capable of applying a magnetic field to the molding cavity in an up-down direction. Then, the film member constituting the support portion 121 is put into the molding die, and the film member has a through hole formed at each position where the central conductive portion 111 is formed. With the magnetic field applied by the magnet, a plurality of conductive substances are assembled and contacted in the up-down direction, thereby forming a conductor that is provided in the central conductive portion and transmits signals in the up-down direction. After that, the plurality of central conductive portions 111 and the support portion 121 may be integrally formed by a predetermined curing process. After that, from the liquid elastic substance for heat resistance or cold resistance, another molding die is used to mold the conductive portion formed with the first periphery surrounding the central conductive portion. In this case, the liquid elastic substance for molding the first peripheral portion may contain the above-mentioned second conductive substance.

5 is a cross-sectional view showing a part of a connector according to a second embodiment of the present invention, and FIG. 6 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 5 . The connector of the second embodiment will be described with reference to FIGS. 5 and 6 together.

Compared with the connector of the first embodiment described above, the connector 200 of this embodiment is similar in structure to the connector of the first embodiment described above except that the conductive portion includes an additional peripheral portion.

The conductive portion 210 of the connector 200 adopts a triple structure including a central conductive portion 111 , a first peripheral portion 112 , and a second peripheral portion 217 . The first peripheral portion 112 may only include the aforementioned second elastic substance. The second peripheral portion 217 surrounds the first peripheral portion 112 along the vertical direction VD. As an example, as shown in FIG. 6 , the second peripheral portion 217 can surround the first peripheral portion 112 in a ring shape. The second peripheral portion 217 may include only the first elastic substance 114 of the central conductive portion 111 . The plurality of conductive parts 110 may be separated along the horizontal direction HD by gaps 150 , and the gaps 150 may be formed by hollow spaces between outer peripheral surfaces of the second peripheral parts 217 of the adjacent plurality of conductive parts 110 .

In the conductive portion 110 of the triple structure, the first elastic material 114 is arranged in the center, the second elastic material 115 is arranged outside the first elastic material 114 , and the first elastic material 114 is arranged outside the second elastic material 115 . Therefore, in the conductive portion 110 of the above embodiment, the central conductive portion 111 includes the above-mentioned cold-resistant material, the first peripheral portion 112 includes the above-mentioned heat-resistant material, and the second peripheral portion 217 includes the above-mentioned cold-resistant material. As an alternative, the central conductive portion 111 may include the above-mentioned heat-resistant material, the first peripheral portion 112 may include the above-mentioned cold-resistant material, and the second peripheral portion 217 may include the above-mentioned heat-resistant material.

In the above-described embodiment, the central conductive portion 111 of the conductive portion 110 has the upper end portion 218 protruding from the upper surface of the insulating film 130 . The upper end of the central conductive portion 111 may not protrude from the upper surface of the insulating film 130 . The upper end portion 218 of the central conductive portion 111 may be integrally formed with the body of the central conductive portion 111 , and the insulating film 130 may be combined with the upper end portion 218 . Alternatively, the upper end portion 218 of the central conductive portion 111 may contain the above-mentioned first conductive material and the above-mentioned first elastic material and be pre-disposed on the insulating film 130 , and the upper end portion 218 may be combined with the body of the central conductive portion 111 .

FIG. 7 shows an alternative example of the connector of the second embodiment described above. Referring to FIG. 7 , the second peripheral portion 217 includes the first elastic substance 114 and a plurality of third conductive substances 219 . The plurality of third conductive substances 219 are in contact with each other in a manner that can conduct electricity along the vertical direction VD, and the shape of the second peripheral portion 217 is maintained along the vertical direction VD by the first elastic substances 114 . In the second peripheral portion 217 , the first elastic substance 114 is mixed with the plurality of third conductive substances 219 . The third conductive substance 219 may be the same as or different from the first conductive substance of the central conductive portion 111 .

8 is a cross-sectional view showing a part of a connector according to a third embodiment of the present invention, and FIG. 9 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 8 . The connector of the third embodiment will be described with reference to FIGS. 8 and 9 together.

Compared with the connector of the first embodiment described above, the connector 300 of the present embodiment is different from the connector of the first embodiment described above, except that the connector 300 includes an insulating portion that separates and insulates the plurality of conductive portions 110 along the horizontal direction. structure is similar.

In the above-mentioned embodiment, the conductive portion 110 has the same structure as that of the above-mentioned first embodiment. The central conductive portion 111 of the conductive portion 110 includes the first conductive material 113 and the first elastic material 114 described above. The first peripheral portion 112 of the conductive portion 110 includes the aforementioned second elastic substance 115 . Therefore, in the pressurized state of the conductive portion 110 , the first elastic material 114 and the second elastic material 115 of the conductive portion 110 have different expansion rates.

The insulating portion 340 separates and insulates the plurality of conductive portions 110 along the horizontal direction. The insulating portion 340 is located between the support portion 121 and the insulating film 130 . The support portion 121 is combined with the lower end portion of the central conductive portion 111 to support the central conductive portion 111 along the vertical direction VD. The conductive portion 110 and the support portion 121 can be formed into one piece to form a conductive module 120 . The connector 300 of the above-mentioned embodiment may include more than one conductive module 120 . The support part 121 is combined with the insulating part 340 in a removable manner. For example, the upper surface of the support portion 121 is bonded to the lower surface of the insulating portion 340, whereby the support portion 121 and the insulating portion 340 can be bonded. The bonding method of the support portion 121 and the insulating portion 340 is not limited to the bonding method using an adhesive. . The insulating film 130 is combined with the upper end portion of the first peripheral portion 112 to form the upper surface of the connector 300 . The lower surface of the insulating film 130 may be combined with the upper surface of the insulating portion 340 by means of bonding.

The insulating part 340 may be formed of an elastic body. The insulating portion 340 is formed of the first elastic substance 114 of the central conductive portion 111 . The insulating portion 340 has at least one through hole 341 into which the conductive portion 110 is inserted along the vertical direction VD. The through-hole 341 is formed by perforating the insulating portion 340 along the through-hole 341 , and extends from the upper surface of the insulating portion 340 to the lower surface of the insulating portion 340 along the vertical direction VD. The conductive portion 110 is inserted into the through hole 341 from bottom to top in a state where the conductive portion 110 is supported by the support portion 121 . The shape in the horizontal direction of the through hole 341 may correspond to the cross-sectional shape of the conductive portion 110 . If the conductive portion 110 has a cylindrical shape, the shape in the horizontal direction of the through hole 341 may be substantially circular.

In the conductive portion 110 formed of the dual structure, the first elastic material 114 is arranged in the center, and the second elastic material 115 is arranged outside the first elastic material 114 . The first elastic substance is arranged on the insulating portion 340 arranged outside the conductive portion 110 . The first elastic material 114 includes fluorine and silicone rubber, and the second elastic material 115 includes one of iron oxide, boron nitride and aluminum nitride, and silicone rubber. Therefore, the central conductive portion 111 includes the above-mentioned cold-resistant material, the first peripheral portion 112 includes the above-mentioned heat-resistant material, and the insulating portion 340 includes the above-mentioned cold-resistant material. In a pressurized state within the above-mentioned first temperature range, the second elastic substance 115 containing the heat-resistant material has an expansion rate lower than that of the first elastic substance 114 or an expansion rate lower than that of the silicone rubber not containing the heat-resistant material Rate. In a pressurized state within the above-mentioned second temperature range, the first elastic material 114 containing the cold-resistant material has an expansion rate higher than that of the second elastic material 115 and a higher expansion rate than that of the silicone rubber not containing the cold-resistant material Rate.

In the connector 300 of the above embodiment, the elastic material constituting the central conductive portion 111 has cold resistance, the elastic material constituting the first peripheral portion 112 has heat resistance, and the insulating portion 340 includes the elastic material constituting the central conductive portion 111 . Therefore, compared with the expansion degree of the pressurized state at normal temperature, the conductive portion 110 does not change much in the pressurized state in the above-mentioned first temperature range or in the pressurized state in the above-mentioned second temperature range degree of expansion. In addition, the insulating portion 340 has cold resistance or heat resistance, does not expand excessively in a pressurized state at a relatively high temperature, and does not shrink excessively in a pressurized state at a relatively low temperature. Therefore, the connector of the above embodiment can prevent excessive expansion of the conductive portion 110 and the insulating portion 340 under a relatively high temperature pressurized state (for example, a pressurized state within the above-mentioned first temperature range), and can prevent excessive expansion of the conductive portion 110 and the insulating portion 340 in a relatively low temperature pressurized state. In a pressurized state (for example, a pressurized state in the above-mentioned second temperature range), the conductive portion 110 and the insulating portion 340 can be prevented from shrinking excessively. Therefore, the connector 100 of the above-described embodiment can prevent the deformation of the connector when the inspection is performed at a relatively high temperature without applying a strong pressure when the inspection is performed at a relatively low temperature.

As an alternative example, the central conductive portion 111 may include the above-mentioned heat-resistant material, the first peripheral portion 112 may include the above-mentioned cold-resistant material, and the insulating portion 340 may include the above-mentioned heat-resistant material. That is, the first elastic material 114 includes one of iron oxide, boron nitride and aluminum nitride and silicone rubber, and the second elastic material 115 includes fluorine and silicone rubber. In the above-mentioned case, the first elastic substance 114 including the heat-resistant material has an expansion coefficient lower than that of the second elastic substance 115 in the pressurized state in the above-mentioned first temperature range. The second elastic substance 115 including the cold-resistant material has an expansion ratio higher than that of the first elastic substance 114 in a pressurized state within the above-described second temperature range.

As another alternative example, in the connector 300 of the above-mentioned embodiment, the first peripheral portion 112 may include the second conductive material, and the second conductive material may be in contact with the up-down direction VD in a conductive manner, by The second elastic material 115 maintains the shape of the first peripheral portion 112 along the vertical direction VD.

An insulating member such as a film or a block constituting the insulating portion 340 is prepared, and the through-hole 34 is formed in the insulating member by a laser or a drill, thereby manufacturing the insulating portion 340 . Afterwards, the conductive portion 110 and the conductive module 120 of the support portion 121 are combined with the insulating portion 340 by a bonding method using an adhesive to form the connector of the above embodiment.

FIG. 10 shows a part of a connector according to a fourth embodiment of the present invention, and FIG. 11 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 10 . The connector of the fourth embodiment will be described with reference to FIGS. 10 and 11 together.

Compared with the connector of the third embodiment described above, the connector 400 of the present embodiment is similar in structure to the connector of the third embodiment described above except that the insulating portion includes two types of elastic substances.

The insulating portion 340 includes a through portion 442 for defining the through hole 341 , and a body portion 443 as a portion of the insulating portion 340 other than the through portion 442 . The through portion 442 may have a ring shape extending in the vertical direction VD, and the through hole 341 may be defined on the cylindrical inner peripheral surface. The through portion 442 surrounds the first peripheral portion 112 of the conductive portion 110 along the vertical direction VD. The through portion 442 includes the same second elastic material 115 as the elastic material of the first peripheral portion 112 of the conductive portion 110 . The body portion 443 of the insulating portion 340 includes the same first elastic material 114 as the elastic material of the central conductive portion 111 .

In the connector 400 of the above-mentioned embodiment, the elastic material constituting the central conductive portion 111 and the elastic material constituting the first peripheral portion 112 have different expansions respectively under the pressurized state in the first temperature range and the second temperature range. Rate. In addition, the penetration portion 442 of the insulating portion 340 includes an elastic material constituting the first peripheral portion 112 , and the body portion 443 of the insulating portion 340 includes an elastic material constituting the central conductive portion 111 . The central conductive portion 111 includes the above-mentioned cold-resistant material, and the first peripheral portion 112 includes the above-mentioned heat-resistant material. The penetration portion 442 of the insulating portion 340 includes the above-mentioned heat-resistant material, and the main body portion 443 of the insulating portion 340 includes the above-mentioned cold-resistant material.

Therefore, in the pressurized state within the first temperature range or the pressurized state within the second temperature range, the center conductive portion 111 and the first peripheral portion are provided compared to the degree of expansion in the pressurized state at normal temperature. The conductive portion 110 of 112 expands to an extent that does not change much. In addition, the insulating portion 340 includes the above-mentioned cold-resistant material and the above-mentioned heat-resistant material, and corresponds to excessive expansion at a relatively high temperature and excessive shrinkage at a relatively low temperature. Therefore, the connector of the above embodiment can prevent excessive expansion of the conductive portion 110 and the insulating portion 340 under a relatively high temperature pressurized state (for example, a pressurized state within the above-mentioned first temperature range), and can prevent excessive expansion of the conductive portion 110 and the insulating portion 340 in a relatively low temperature pressurized state. The conductive portion 110 and the insulating portion 340 can be prevented from shrinking excessively in a state (eg, a pressurized state within the above-mentioned second temperature range).

As an alternative, the central conductive portion 111 may include the above-mentioned heat-resistant material, the first peripheral portion 112 may include the first peripheral portion 112 , the through portion 442 of the insulating portion 340 may include the above-mentioned cold-resistant material, and the body portion 443 of the insulating portion 340 may include the above-mentioned cold-resistant material. Contains the above-mentioned heat-resistant material.

As another alternative, in the connector 400 of the above-mentioned embodiment, the first peripheral portion 112 may also include the above-mentioned second conductive material and second elastic material.

12 is a cross-sectional view showing a part of a connector according to a fifth embodiment of the present invention, and FIG. 13 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 12 . The connector of the fifth embodiment will be described with reference to FIGS. 12 and 13 together.

Compared with the connector of the third embodiment described above, the connector 500 of this embodiment is similar in structure to the connector of the third embodiment described above except that a gap is formed between the conductive portion and the insulating portion.

In the connector 500, the conductive portion 110 has the same structure as the conductive portion of the third or fifth embodiment described above. As an alternative example, the first peripheral portion 112 of the conductive portion 110 may also include the second elastic substance 115 and the above-mentioned second conductive substance. The insulating portion 340 has the same structure as that of the insulating portion of the third embodiment described above. That is, the insulating portion 340 includes the same first elastic material 114 as the first elastic material of the central conductive portion 111 .

In the connector 500 , the size of the through hole 341 in the horizontal direction is larger than the size of the conductive portion 110 in the horizontal direction. Thereby, a part or the whole of the inner peripheral surface of the through hole 341 and the conductive portion 110 are formed between the inner peripheral surface of the through hole 341 and the outer peripheral surface of the conductive portion 110 (specifically, the outer peripheral surface of the first peripheral portion 112 ). The gap 550 is formed by a part or the whole of the outer peripheral surface. The gap 550 is filled with air. The gap 550 is a hollow space between the inner peripheral surface of the through hole 341 and the outer peripheral surface of the first peripheral portion 112 . In the non-pressurized state of the conductive portion, the shape in the horizontal direction of the gap 550 may be a doughnut shape (for example, a shape in which an inner circle and an outer surface are formed concentrically).

In the non-pressurized state of the conductive portion 110 , a portion of the outer peripheral surface of the one conductive portion 110 located in the one through hole 341 where the gap 550 is located is not in contact with the through hole 341 . In the case where the gap 550 has the above-described doughnut shape, the conductive portion 110 is not in contact with the through hole 341 in the entire gap 550 . In the non-pressurized state of the conductive portion, one conductive portion 110 is separated from the insulating portion 340 by the gap 550 formed between the one through hole 341 and the corresponding conductive portion 110 . The gap 550 allows elastic deformation of each conductive portion 110 within each through hole 341 in a pressurized state of the conductive portion. The gaps 550 allow the respective conductive portions 110 to be elastically deformed in the vertical direction and the horizontal direction without being restricted by the through holes 341 of the insulating portion 340 . That is, in the pressurized state, the conductive portion 110 is free to elastically deform in the through hole 341 at the portion other than the portion fixed to the support portion 121 and the insulating film 130 . The dimensions of the conductive portion 110 , the through hole 341 , and the gap 550 may be determined for smooth elastic deformation of the conductive portion 110 .

14 is a cross-sectional view showing a part of a connector according to a sixth embodiment of the present invention, and FIG. 15 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 14 . The connector of the sixth embodiment will be described with reference to FIGS. 14 and 15 together.

Compared with the connector of the fifth embodiment, the connector 600 of the present embodiment is connected to the fifth embodiment except that the conductive portion adopts a single structure and the insulating portion includes an elastic material different from the elastic material of the conductive portion. The structure of the device is similar.

The connector 600 includes at least one conductive portion 610 for transmitting signals along the vertical direction VD. The conductive portion 610 may have a cylindrical shape extending in the vertical direction VD, but the shape of the conductive portion is not limited to a cylindrical shape. The conductive portion 610 includes the plurality of first conductive substances 113 and the first elastic substances 114 described above. The plurality of first conductive substances 113 are in contact with each other so as to be electrically conductive along the vertical direction VD, and the first elastic substances 114 allow the plurality of first conductive substances 113 to form the shape of the conductive portion 610 . The substance 113 maintains the vertical direction VD. In the conductive portion 610 , the first elastic substance 114 is mixed with the plurality of first conductive substances 113 .

The support portion 121 functions to support one conductive portion 610 or a plurality of conductive portions 610 along the vertical direction VD. The support portion 121 may be disposed along the horizontal direction HD and integrated with the lower end portion of the conductive portion 610 . The support portion 121 separates and insulates the plurality of conductive portions 610 along the horizontal direction HD. At least one conductive portion 610 and the supporting portion 121 or a plurality of conductive portions 610 and the supporting portion 121 are integrally formed and constitute a conductive module 120 for performing signal transmission in the up-down direction. The insulating film 130 may be combined with the upper end portion of the conductive portion 610 to form the upper surface of the connector 600 . The insulating film 130 can insulate the plurality of conductive parts 610 and can support the plurality of conductive parts 610 along the vertical direction VD.

The insulating portion 640 separates and insulates the plurality of conductive portions 610 in the horizontal direction. The insulating portion 640 is located between the support portion 121 and the insulating film 130 . The support part 121 is combined with the insulating part 640 in a removable manner. For example, the upper surface of the support portion 121 and the lower surface of the insulating portion 640 are bonded, whereby the support portion 121 and the insulating portion 640 can be combined. The lower surface of the insulating film 130 may be combined with the upper surface of the insulating portion 640 by means of bonding.

The insulating part 640 may be formed of an elastic body. The insulating portion 340 is formed of the second elastic material 115 described above. The insulating portion 640 has at least one through hole 341 into which the conductive portion 610 is inserted along the vertical direction VD. The through hole 341 is formed by perforating the insulating portion 640 along the vertical direction VD, and extends from the upper surface of the insulating portion 640 to the lower surface of the insulating portion 640 along the vertical direction VD. The conductive portion 610 is inserted into the through hole 341 from bottom to top in a state where the conductive portion 610 is supported by the support portion 121 . The shape in the horizontal direction of the through hole 341 may correspond to the cross-sectional shape of the conductive portion 610 .

The first elastic material 114 is arranged on the conductive portion 610 , and the second elastic material 115 is arranged on the insulating portion 640 . The first elastic material 114 may contain fluorine and silicone rubber and has cold resistance. The second elastic material may include one of iron oxide, boron nitride and aluminum nitride and silicone rubber and has heat resistance. In a pressurized state within the above-mentioned first temperature range, the second elastic substance 115 containing the heat-resistant material has an expansion rate lower than that of the first elastic substance 114 or an expansion rate lower than that of the silicone rubber not containing the heat-resistant material Rate. In the above-mentioned second temperature range pressurized state, the first elastic substance 114 including the cold-resistant material has an expansion coefficient lower than that of the second elastic substance 115 or higher than that of the silicone rubber not including the cold-resistant material.

As an alternative, the conductive portion 610 may include the above-mentioned heat-resistant material, and the insulating portion 640 may include the above-mentioned cold-resistant material. That is, the first elastic material 114 of the conductive portion 610 may include one of iron oxide, boron nitride and aluminum nitride, and silicone rubber, and the second elastic material 115 of the insulating portion 640 may include fluorine and silicone rubber. In this case, in the pressurized state within the above-mentioned first temperature range, the first elastic substance 114 including the heat-resistant material has an expansion ratio lower than that of the second elastic substance 115 or has a lower expansion ratio than that which does not include heat-resistant material Material of silicone rubber with low expansion rate. In addition, in a pressurized state within the above-mentioned second temperature range, the second elastic material 115 containing the cold-resistant material has an expansion coefficient higher than that of the first elastic material 114 or is higher than that of the silicone rubber that does not contain the cold-resistant material. high expansion rate.

In the connector 600 of the above-described embodiment, the elastic material constituting the conductive portion 610 includes the above-mentioned cold-resistant material, and the elastic material constituting the insulating portion 640 includes the above-mentioned heat-resistant material. Alternatively, the elastic material constituting the conductive portion 610 includes the aforementioned heat-resistant material, and the elastic material constituting the insulating portion 640 includes the aforementioned cold-resistant material.

Therefore, in a relatively high temperature pressurized state (for example, in the above-mentioned first temperature range), the conductive part 610 and the insulating part 640 can be prevented from over-expanding, and in a relatively low temperature pressurized state (for example, in the above-mentioned first temperature range) In a pressurized state within the second temperature range), the conductive portion 610 and the insulating portion 640 can be prevented from shrinking excessively. Therefore, the connector 100 of the above-described embodiment may not need to apply a strong pressure when the inspection is performed at a relatively low temperature, and can prevent deformation when the inspection is performed at a relatively high temperature.

As another alternative example, both the conductive portion 610 and the insulating portion 640 can include the above-mentioned cold-resistant material, and both the conductive portion 610 and the insulating portion 640 can include the above-mentioned heat-resistant material. In this case, the connector 600 may have one of cold resistance and heat resistance.

In the connector 600 , the through-hole 341 of the insulating portion 640 can be formed so that the size of the through-hole 341 in the horizontal direction is larger than the size of the through-hole 341 in the horizontal direction of the conductive portion 110 . In this case, as shown in FIGS. 14 and 15 , between the inner peripheral surface of the through hole 341 and the outer peripheral surface of the conductive portion 610 , a part or the whole of the inner peripheral surface of the through hole 341 and the conductive portion 610 are formed. The gap 550 is formed by a part or the whole of the outer peripheral surface. The gap 550 is a hollow space between the inner peripheral surface of the through hole 341 and the outer peripheral surface of the conductive portion 610 . In the non-pressurized state of the conductive portion 610 , one conductive portion 610 is separated from the insulating portion 640 by the gap 550 formed between the one through hole 341 and the corresponding conductive portion 610 . In the pressurized state of the conductive portion 610 , the gap 550 allows the electrical portion 610 to elastically deform in the vertical and horizontal directions without being restricted by the through holes 341 of the insulating portion 640 . Thereby, in addition to the improvement of the cold resistance by the above-mentioned cold resistance material, the conductive portion 610 can exhibit sufficient conductivity under a low pressure.

In the above, although the technical idea of the present invention has been described with reference to some embodiments and examples shown in the drawings, it should be understood that those with ordinary knowledge in the technical field to which the present invention pertains can do so without departing from the technical idea and scope of the present invention. Various modifications, variants and changes are made. Moreover, such modifications, deformations and alterations all fall within the protection scope of the appended invention claims.

10: Check the device 11: Check the circuit 12: Terminals 20: Tested equipment 21: Terminal 30: Test socket 100: Connector 110: Conductive part 111: Center conductive part 112: The first peripheral part 113: The first conductive substance 114: First elastic substance 115: Second elastic substance 116: Second Conductive Substance 120: Conductive module 121: Support Department 130: insulating film 150: Clearance 200: Connector 210: Conductive part 217: Second Peripheral Department 218: Upper end 219: The third conductive substance 300: Connector 340: Insulation part 341: Through hole 400: Connector 442: Penetration 443: Main body 500: Connector 550: Clearance 600: Connector 610: Conductive part 640: Insulation part P: pressure VD: up and down direction HD: Horizontal orientation

FIG. 1 schematically shows an example of a connector to which an embodiment is applied. 2 is a cross-sectional view showing a part of the connector of the first embodiment of the present invention. FIG. 3 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 2 . FIG. 4 is a cross-sectional view showing an alternative example of the connector of the first embodiment. 5 is a cross-sectional view showing a part of a connector of a second embodiment of the present invention. FIG. 6 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 5 . FIG. 7 shows a cross-sectional view of an alternative example of the connector of the second embodiment. 8 is a cross-sectional view showing a part of a connector of a third embodiment of the present invention. FIG. 9 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 8 . 10 is a cross-sectional view showing a part of a connector of a fourth embodiment of the present invention. FIG. 11 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 10 . 12 is a cross-sectional view showing a part of a connector of a fifth embodiment of the present invention. FIG. 13 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 12 . 14 shows a cross-sectional view of a portion of a connector of a sixth embodiment of the present invention. FIG. 15 schematically shows a cross-sectional shape in the horizontal direction of the connector shown in FIG. 14 .

100: Connector

110: Conductive part

111: Center conductive part

112: The first peripheral part

113: The first conductive substance

114: First elastic substance

115: Second elastic substance

120: Conductive module

121: Support Department

130: insulating film

150: Clearance

VD: up and down direction

HD: Horizontal orientation

Claims (21)

A connector for electrical connection, comprising at least one conductive portion, the conductive portion comprising: a central conductive portion, including a first elastic substance, capable of conducting electricity in the up-down direction; and a first peripheral portion, comprising a second elastic substance, surrounding the central conductive portion along the up-down direction, The first elastic material and the second elastic material have different expansion ratios in a pressurized state in the up-down direction of the conductive portion. The connector of claim 1, wherein, in the pressurized state in the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is smaller than the expansion rate of the other In the pressurized state in the second temperature range lower than the first temperature range, the expansion ratio of one of the first elastic substance and the second elastic substance is greater than the expansion ratio of the other . The connector of claim 2, wherein in the pressurized state in the first temperature range or the pressurized state in the second temperature range, the central conductive portion and the The first peripheral portion expands to different degrees. The connector of claim 1, wherein one of the first elastic material and the second elastic material comprises one of iron oxide, boron nitride and aluminum nitride and silicone rubber, The other of the first elastic substance and the second elastic substance includes fluorine and silicone rubber. The connector according to claim 1, wherein the central conductive portion further comprises a plurality of first conductive parts that are in contact with the up-down direction in a manner capable of conducting electricity and are maintained in the up-down direction by the first elastic material conductive substances, The first peripheral portion further includes a plurality of second conductive substances that are in contact with each other in a manner capable of conducting electricity along the up-down direction and are maintained in the up-down direction by the second elastic substance. The connector of claim 1, wherein the conductive portion further comprises a second peripheral portion, the second peripheral portion surrounds the first peripheral portion along the up-down direction, and includes the first elastic substance . The connector according to claim 6, wherein the second peripheral portion further comprises a plurality of first and second peripheral portions that are in contact with and are maintained in the up-down direction by the first elastic material in a manner capable of conducting electricity along the up-down direction. Three conductive substances. The connector of claim 1, further comprising: a support portion, combined with a lower end portion of the central conductive portion, to support the conductive portion along the up-down direction; and An insulating film is combined with the upper end portion of the first peripheral portion. The connector according to claim 1, wherein a plurality of the conductive parts are included, The plurality of the conductive portions are spaced apart in a horizontal direction orthogonal to the vertical direction by gaps that are hollow spaces. A connector for electrical connection, comprising at least one conductive portion, the conductive portion comprising: a central conductive portion, including a first elastic substance, capable of conducting electricity in the up-down direction; and a first peripheral portion, comprising a second elastic substance, surrounding the central conductive portion along the up-down direction, The connector further includes an insulating portion, the insulating portion has at least one through hole through which the conductive portion can be inserted along the up-down direction, and includes the first elastic substance, The first elastic material and the second elastic material have different expansion ratios in a pressurized state in the up-down direction of the conductive portion. The connector of claim 10, wherein, in the pressurized state in the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is smaller than the expansion rate of the other In the pressurized state in the second temperature range lower than the first temperature range, the expansion ratio of one of the first elastic substance and the second elastic substance is greater than the expansion ratio of the other . The connector of claim 11, wherein in the pressurized state in the first temperature range or the pressurized state in the second temperature range, the central conductive portion and the The first peripheral portion expands to different degrees. The connector of claim 10, wherein one of the first elastic material and the second elastic material comprises one of iron oxide, boron nitride and aluminum nitride and silicone rubber, The other of the first elastic substance and the second elastic substance includes fluorine and silicone rubber. The connector according to claim 10, wherein the central conductive portion further comprises a plurality of first contacts in a manner capable of conducting electricity along the up-down direction and maintained in the up-down direction by the first elastic substance conductive substances, The first peripheral portion further includes a plurality of second conductive substances that are in contact with each other in a manner capable of conducting electricity along the up-down direction and are maintained in the up-down direction by the second elastic substance. The connector of claim 10, wherein the insulating portion further comprises a through portion, the through portion surrounds the first peripheral portion along the up-down direction, and defines the through hole on the inner peripheral surface, including the second elastic substance. The connector according to claim 10, wherein at least a part of the inner peripheral surface and the outer peripheral surface are formed between the inner peripheral surface of the through hole and the outer peripheral surface of the first peripheral portion. At least a part of the gap is formed as a hollow space. The connector of claim 10, further comprising: a support portion, combined with a lower end portion of the central conductive portion, to support the central conductive portion along the up-down direction; and An insulating film is combined with the upper end portion of the first peripheral portion. A connector for electrical connection, comprising at least one conductive portion, the conductive portion comprising: a plurality of first conductive substances in contact in a manner capable of conducting electricity in the up-down direction; and a first elastic substance that maintains the first conductive substance along the up-down direction, The connector further includes an insulating portion, the insulating portion has at least one through hole through which the conductive portion can be inserted along the up-down direction, and includes a second elastic substance, The first elastic material and the second elastic material have different expansion ratios in a pressurized state in the up-down direction of the conductive portion. The connector of claim 18, wherein, in the pressurized state in the first temperature range, the expansion rate of one of the first elastic material and the second elastic material is smaller than the expansion rate of the other In the pressurized state in the second temperature range lower than the first temperature range, the expansion ratio of one of the first elastic substance and the second elastic substance is greater than the expansion ratio of the other . The connector of claim 18, wherein one of the first elastic material and the second elastic material comprises one of iron oxide, boron nitride and aluminum nitride and silicone rubber, The other of the first elastic substance and the second elastic substance includes fluorine and silicone rubber. The connector according to claim 18, wherein at least a portion of the outer peripheral surface and at least a portion of the inner peripheral surface are formed between the outer peripheral surface of the conductive portion and the inner peripheral surface of the through hole. A gap is formed as a hollow space.

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