TWI777427B - Connector - Google Patents

Abstract

A connector for electrical connection is provided, which is arranged between a detection device and a device to be detected. The connector includes at least one elastic conductive part extending in a vertical direction; a supporting part supporting the elastic conductive part; an insulating part having at least one through hole and being combined with the supporting part, the elastic conductive part is inserted into the vertical direction in the vertical direction. in the through hole. A gap formed by at least a part of the inner surface and at least a part of the outer surface is formed between the inner surface of the through hole and the outer surface of the elastic conductive part.

Description

Connector

The present invention relates to a connector for electrically connecting a detection device with a device to be detected.

In order to inspect a device under test such as a semiconductor device, a connector for electrically connecting a test device and the device under test is used in the art. The connector is arranged between the detection device and the device to be detected. The connector transmits the electrical measurement signal of the detection device to the device to be detected, and transmits the electrical response signal of the device to be detected to the detection device. As an example of such a connector, a conductive rubber sheet is known in the art.

The conductive rubber sheet has a plurality of elastic conductive parts in which a plurality of metal particles are conductively aggregated in a vertical direction. The plurality of elastic conductive parts transmit signals between the detection device and the equipment to be detected. A plurality of elastic conductive portions are maintained in the vertical direction by insulating portions composed of silicone rubber.

The elastic conductive portion and the insulating portion may be molded together with a liquid molding material in which a plurality of metal particles are mixed in a liquid insulating substance. The elastic conductive portion can be formed by applying a magnetic field to the liquid molding material and assembling a plurality of metal particles in a vertical direction. In the process of forming the elastic conductive part and the insulating part together, the metal particles of one elastic conductive part and the metal particles of the adjacent elastic conductive part can be connected, so that the insulation of the elastic conductive part cannot be realized.

As a solution for achieving insulation between elastic conductive parts, Korean Laid-Open Patent Publication No. 10-2009-0077991 proposes a manufacturing method in which a through hole is formed in the insulating part, a plurality of The elastic insulating parts are respectively inserted into the through holes.

The aforementioned manufacturing method of inserting the pin-shaped elastic conductive parts into the through holes of the insulating part is complicated because it requires the separate manufacture of a plurality of elastic conductive parts and the assembly between each elastic conductive part and the insulating part. In addition, this manufacturing method increases the time required to manufacture the conductive rubber sheet, increases the manufacturing cost, and reduces the mass productivity of the conductive rubber sheet. In addition, since the operability of each elastic conductive portion is low, the conductive properties of the conductive rubber sheet are lowered.

In the inspection using the conductive rubber sheet, in order for the elastic conductive portion of the conductive rubber sheet to exhibit electrical conductivity (low resistance) above a certain level, the pressure applied by the device to be inspected must be above a predetermined level. However, in the conventional conductive rubber sheet, the elastic conductive portion cannot be elastically deformed or elastically restored to a desired level or more because the elastic conductive portion is restrained by the insulating portion. Accordingly, a strong pressure needs to be applied to the elastic conductive portion by the device to be detected. Strong pressure can damage the device to be tested. In addition, the service life of the conductive rubber sheet that performs repetitive inspections under strong pressure will be reduced. As described above, the conventional conductive rubber sheet cannot have the elastic conductive portion that can be elastically deformed flexibly even under low pressure, and cannot operate with high reliability under low force.

An embodiment of the present invention provides a connector for electrical connection, which has an elastic conductive portion, and the elastic conductive portion is flexibly elastically deformed under low force and has high operability. An embodiment of the present invention provides a connector for electrical connection, which has high operability and a plurality of modular elastic conductive parts.

Embodiments of the present invention relate to a connector disposed between two electronic devices to electrically connect the two electronic devices. A connector for electrical connection according to an embodiment includes: at least one elastic conductive part extending in a vertical direction; a supporting part supporting the elastic conductive part; an insulating part having at least one through hole and being combined with the supporting part, The elastic conductive portion is inserted into the through hole in the vertical direction. A gap formed by at least a part of the inner surface and at least a part of the outer surface is formed between the inner surface of the through hole and the outer surface of the elastic conductive part.

In one embodiment, the support portion is a film disposed on a horizontal plane perpendicular to the vertical direction, and the upper surface of the support portion is adhered to the lower surface of the insulating portion. The membrane may include polyimide.

In one embodiment, the connector further includes an insulating film with terminal guide holes corresponding to the through holes drilled and attached to the upper surface of the insulating portion.

In one embodiment, the insulating portion includes a polyimide film.

In one embodiment, the ratio of the diameter of the through hole to the diameter of the elastic conductive portion in the diameter direction relative to the central axis of the through hole is in the range of 1:0.8 to 1:0.95.

In one embodiment, the upper end of the elastic conductive portion is located below the upper surface of the insulating portion, and the ratio of the thickness of the insulating portion to the thickness difference between the upper surface of the insulating portion and the upper end of the elastic conductive portion is 1:0.1 to 1:0.3. within the range.

In one embodiment, the elastic conductive portion includes a plurality of conductive substances that can be conductively contacted in the vertical direction and an elastic substance that maintains the plurality of conductive substances in the vertical direction.

In one embodiment, the elastic conductive portion further includes an insulating protection portion that surrounds a plurality of conductive substances in a vertical direction and a horizontal direction. The ratio of the diameter of the elastic conductive portion to the diameter of a part of the elastic conductive portion occupied by the plurality of conductive substances in the diameter direction with respect to the central axis of the through hole is in the range of 1:0.6 to 1:0.9.

In one embodiment, the elastic conductive portion further includes a conductive spring capable of elastically deforming in a vertical direction.

In one embodiment, the elastic conductive portion and the support portion are integrally formed to form at least one conductive module, and the conductive module is detachably coupled to the insulating portion.

In one embodiment, at least one conductive module includes a first conductive module, the first conductive module includes an elastic conductive portion, and the elastic conductive portion is formed in a manner that does not protrude from the insulating portion in the vertical direction.

In one embodiment, at least one conductive module includes a second conductive module, the second conductive module includes an elastic conductive portion, and the elastic conductive portion is formed to protrude from the insulating portion in a vertical direction.

In one embodiment, the support portion of the first conductive module and the support portion of the second conductive module are close to each other in a horizontal direction orthogonal to the vertical direction, and can be combined with the insulating portion.

In one embodiment, the support portion of the first conductive module and the support portion of the second conductive module may partially overlap in the vertical direction.

According to an embodiment of the present invention, since the elastic conductive portion is separated from the through hole of the insulating portion by a gap, the elastic conductive portion can be elastically deformed and elastically restored without being restricted by the insulating portion. Therefore, the elastic conductive portion has improved operability and elastic restoring force, and can exhibit high conductivity under low pressure. In addition, since the elastic conductive parts in the connector of an embodiment can be operated independently, the connector of an embodiment can correspond to devices to be inspected having terminals of different heights due to bending of the device to be inspected or problems in the manufacturing method terminal. That is, each elastic conductive portion can properly contact a plurality of terminals having different heights.

In addition, according to an embodiment of the present invention, since the at least one elastic conductive part and the support part form a conductive module, and the conductive module is combined with the insulating part, an efficient connector manufacturing method can be realized and the manufacturing cost can be reduced . In addition, due to the combined structure between the conductive module and the insulating portion, the connector can be constructed in a manner that matches the terminal shape of the device to be tested. In addition, the combined structure between the conductive module and the insulating portion makes it possible to replace only a plurality of damaged elastic conductive portions.

In order to explain the technical idea of the present invention, the embodiments of the present invention are illustrated. The scope of rights according to the present invention is not limited to the embodiments presented below or the specific descriptions of these embodiments.

Unless otherwise defined, all technical and scientific terms used in the present invention have the meanings commonly understood by one of ordinary skill in the art. All terms used in the present invention are chosen to more clearly describe the present invention, rather than to limit the scope of rights according to the present invention.

Expressions such as "comprising", "having", "having" and the like used in the present invention should be understood to include an openness to the possibility of including other embodiments unless otherwise stated in the phrase or sentence that includes the expression Sexual terms (open-ended terms).

Unless otherwise specified, the expressions in the singular form described in the present invention may include the meaning in the plural form, and the same applies to the expressions in the singular form described in the claims.

Expressions such as "first", "second" and the like used in the present invention are used to distinguish a plurality of constituent elements from each other, and do not limit the order or importance of the corresponding constituent elements.

In the present invention, when a constituent element is described as being "connected" or "coupled" to another constituent element, it should be understood that the certain constituent element can be directly connected or coupled to the other constituent element, or can be represented by a new Another constituent element of is the intermediary connection or combination.

The directional term "above" as used in the present invention is based on the direction in which the connector is located relative to the detection device, and the directional term "below" means the opposite direction above. It should be understood that the directional term "vertical direction" used in the present invention includes the upper direction and the lower direction, and does not indicate a specific one of the upper direction and the lower direction.

Embodiments are described with reference to the examples shown in the accompanying drawings. In the drawings, the same or corresponding constituent elements are assigned the same reference numerals. In addition, in the description of the following embodiments, repeated descriptions of the same or corresponding constituent elements may be omitted. However, even if the description of a constituent element is omitted, it does not mean that the constituent element is not included in a certain embodiment.

The embodiments described below and the examples shown in the drawings relate to a connector for electrically connecting two electronic devices. In an applicable example of the connector of the embodiment, one of the two electronic devices may be a detection device, and the other of the two electronic devices may be a device to be detected to be inspected by the detection device. The connector of the embodiment can be used for electrical connection between the testing device and the device to be tested during electrical inspection of the device to be tested. For example, the connector of the embodiment may be used for final electrical inspection of a semiconductor device in post-processing in a manufacturing method of the semiconductor device, but an example to which the connector of the embodiment is applied is not limited thereto.

FIG. 1 shows an example of a suitable connector according to an embodiment. FIG. 1 schematically shows a connector and an electronic device in contact with the connector, and the shapes shown in FIG. 1 are only examples selected for understanding of the embodiments.

Referring to FIG. 1 , a connector 10 according to an embodiment is a sheet-like structure disposed between two electronic devices. In the example shown in FIG. 1 , one of the two electronic devices may be the detection device 20 , and the other may be the device to be detected 30 detected by the detection device 20 .

For example, the connector 10 may be mounted on the test socket 40 and may be disposed on the detection device 20 through the test socket 40 . The test socket 40 may be removably mounted on the detection device 20 . The test socket 40 accommodates therein the device to be tested 30 that is transported to the testing device 20 manually or by a transport device, and the device to be tested 30 can be aligned relative to the connector 10 . When inspecting the device to be inspected 30, the connector 10 contacts the inspection device 20 and the device to be inspected 30 in the vertical direction VD, and electrically connects the inspection device 20 and the device to be inspected 30 to each other.

The device 30 to be inspected may be a semiconductor device in which a semiconductor IC chip and a plurality of terminals are packaged into a hexahedral shape using a resin material. The device to be inspected 30 has a plurality of terminals on its lower side. The terminals of the device to be inspected 30 may be ball-shaped terminals and land-shaped terminals having a height smaller than that of the ball terminals. For example, the device to be detected 30 may only have the spherical first terminal 31 . Alternatively, the device to be detected 30 may have a spherical first terminal 31 and a land-shaped second terminal 32 . Alternatively, the device to be detected 30 may only have the land-shaped second terminal 32 .

The inspection device 20 may check various operational characteristics of the device 30 to be inspected. The inspection apparatus 20 may have a board that performs inspection, and an inspection circuit 21 for inspecting a device to be inspected may be provided on the board. Furthermore, the inspection circuit 21 has a plurality of terminals 22 that are electrically connected to the terminals of the device to be inspected through the connector 10 . The terminal 22 of the detection device 20 can send electrical test signals and can receive response signals.

The connector 10 may be arranged in such a manner that it contacts the terminals 22 of the detection device 20 through the test socket 40 . When inspecting the device 30 to be inspected, the connector 10 electrically connects the terminals 31 and 32 of the device to be inspected and the respective terminals 22 of the corresponding inspection device in the vertical direction VD. Inspection of the device 30 to be inspected.

At least a portion of the connector 10 may be composed of a resilient substance. In order to check the device 30 to be inspected, a pressure P may be applied downwardly on the connector 10 in the vertical direction VD by mechanical means or manually. Through the pressure P, the terminals 31 and 32 of the device to be tested and the connector 10 can contact in the vertical direction VD, and the connector 10 and the terminal 22 of the detection device can contact in the vertical direction VD. In addition, some components of the connector 10 can be elastically deformed by the pressure P in the downward direction and the horizontal direction HD. When the pressure P is removed, this portion of the constituent elements of the connector 10 can return to its original shape.

Referring to FIG. 1 , the connector 10 includes at least one elastic conductive portion 110 , a support portion 120 and an insulating portion 130 . The elastic conductive portion 110 extends in the vertical direction VD, and can be conductively formed in the vertical direction VD. The support portion 120 is disposed in the horizontal direction HD orthogonal to the vertical direction VD. The support portion 120 constitutes one surface (eg, the lower surface of the connector) of the connector 10 in the vertical direction VD. The support portion 120 extends in the horizontal direction HD, and supports and maintains the elastic conductive portion 110 in the vertical direction VD. The insulating part 130 is combined with the supporting part 120 in the vertical direction VD. For example, the insulating part 130 is provided on the upper side of the supporting part 120 . The thickness of the insulating part 130 in the vertical direction may be smaller or larger than the protruding height of the elastic conductive part 110 protruding from the supporting part 120 . The insulating part 130 has at least one through hole 133 in the vertical direction VD into which the elastic conductive part 110 is inserted, and the through hole 133 is drilled in the insulating part 130 along the vertical direction VD. The elastic conductive part 110 and the insulating part 130 are formed in the through hole 133 and separated by a gap 140 which enables the elastic conductive part 110 to be elastically deformed.

The upper end of the elastic conductive portion 110 is in contact with the first terminal 31 or the second terminal 32 of the device to be detected, and the lower end thereof is in contact with the terminal 22 of the detection device. Accordingly, a conductive path is formed in the vertical direction between the terminal of the device to be detected corresponding to one elastic conductive portion 110 and the terminal 22 of the detection device using the elastic conductive portion 110 as a medium. Therefore, the test signal of the detection device can be transmitted from the terminal 22 to the first terminal 31 or the second terminal 32 of the device to be tested 30 through the elastic conductive part 110 , and the response signal of the device to be tested 30 can be transmitted from the first terminal 30 to the device to be tested through the elastic conductive part 110. A terminal 31 and a second terminal 32 are transmitted to the terminal 22 of the detection device 20 . The upper end of the elastic conductive part 110 may form the same plane as the upper surface 131 of the insulating part 130 , or may slightly protrude from the upper surface of the insulating part 130 , or may be located below the upper surface of the insulating part 130 .

The connector 10 may include a plurality of elastic conductive parts 110 . The plane arrangement of the plurality of elastic conductive parts 110 may be various according to the arrangement of the first terminals 31 and the second terminals 32 of the device to be detected 30 . For example, the elastic conductive parts 110 may be arranged in the insulating part 130 in a row-column form or a pair or more than a row-column form.

A connector according to an embodiment is described with reference to FIGS. 2 to 17 . 2 to 17 schematically show the shape of the connector, the shape of the elastic conductive portion, the shapes of elements constituting the elastic conductive portion, the shape of the support portion, and the shape of the insulating portion. The shapes shown in FIGS. 2 to 17 are examples selected for understanding of the embodiments only.

2 is a cross-sectional view schematically showing a part of the connector according to the first embodiment of the present invention, and FIG. 3 is an exploded cross-sectional view schematically showing a part of the connector shown in FIG. 2 . FIG. 4 is a top view showing a part of the connector shown in FIG. 2 , and FIG. 5 is a cross-sectional view schematically showing an operation state of the part of the connector shown in FIG. 4 . The connector according to the first embodiment is explained with reference to FIGS. 2 to 5 .

In the connector 10, the elastic conductive portion 110 performs signal transmission in the vertical direction VD between the detection device and the device to be detected. The elastic conductive part 110 may have a cylindrical shape extending in the vertical direction VD, but the shape of the elastic conductive part is not limited to the cylindrical shape.

The elastic conductive portion 110 is in contact with the terminal of the device to be detected at its upper end, and is in contact with the terminal of the detection device at its lower end. Accordingly, between the terminal of the device to be detected and the terminal of the detection device corresponding to one elastic conductive portion 110 , a vertical conductive path is formed by using the elastic conductive portion 110 as a medium. The test signal of the detection device can be transmitted from the terminal of the detection device to the terminal of the device to be detected through the elastic conductive part 110, and the response signal of the device to be detected can be transmitted from the terminal of the device to be detected to the terminal of the detection device through the elastic conductive part 110 .

In one embodiment, each elastic conductive portion 110 includes a plurality of conductive substances 111 and elastic substances 112 . The plurality of conductive substances 111 are conductively contactable in the vertical direction VD, and are assembled in the vertical direction VD, for example, in a cylindrical shape. A plurality of conductive substances 111 that can be conductively contacted in the vertical direction VD form a conductor, and the conductor performs signal transmission in the vertical direction VD in the elastic conductive portion 110 . For example, the conductor composed of the plurality of conductive substances 111 may have a cylindrical shape, and in this cylindrical shape, the size of the lower end may be larger than the size of the middle.

As an example, as shown in FIG. 2 , the conductive substances 111 may be particles. The particles of the conductive substance 111 may be composed of a highly conductive metal material. Alternatively, the particles of the conductive substance 111 may have a form in which the highly conductive metal material is coated on a core composed of an elastic resin material or a metal material. As another example, the conductive substance 111 may be an elongated fiber or wire, and the fiber or wire may be composed of metal or carbon.

The elastic substance 112 is in a cured state and has elasticity. The elastic substance 112 maintains the plurality of conductive substances 111 in the vertical direction VD, so that the plurality of conductive substances 111 form the shape of the conductor. An elastic substance 112 may be filled between the plurality of conductive substances 111 . The elastic material 112 and the plurality of conductive materials 111 are integrally formed to constitute the elastic conductive portion 110 . The elastic substance 112 may have insulating properties. For example, the elastic substance 112 may comprise cured silicone rubber. Alternatively, an elastic substance having conductivity may be used as the elastic substance 112 .

The elastic conductive portion 110 including the elastic substance 112 has elasticity and can be elastically deformed in the vertical direction VD and the horizontal direction HD. As with reference to FIG. 1 , pressure P is applied on the connector 10 , that is, when the device to be tested is inspected, the first terminal 31 or the second terminal 32 (refer to FIG. 1 ) of the device to be tested presses the elastic conductive portion 110 downward. Hereinafter, the state in which the elastic conductive portion 110 is pressed by the terminal of the device to be detected is referred to as the pressurized state of the elastic conductive portion. The pressed state of the elastic conductive portion may represent a state in which the elastic conductive portion is pressed and elastically deformed by the terminal of the device to be detected in the vertical direction. In a pressurized state of the elastic conductive portion, the elastic conductive portion 110 may be elastically deformed to be compressed downward while slightly expanding in the horizontal direction HD. When the pressure applied to the connector by the device to be detected is removed, the elastic conductive portion 110 can elastically return to its original shape from the pressurized state. Hereinafter, the free state in which pressure is not applied to the elastic conductive portion 110 is referred to as the non-pressurized state of the elastic conductive portion. This non-pressurized state of the elastic conductive portion may indicate a state in which the terminal of the device to be detected does not press the elastic conductive portion in the vertical direction, that is, the elastically deformed portion maintains its original shape without applying pressure in the vertical direction to the elastic conductive portion status. In the connector of the embodiment, the elastic conductive portion 110 can be reversibly deformed into a non-pressurized state and a pressurized state.

In the connector 10, the support portion 120 is located on the side facing the detection device. The support portion 120 is disposed in the horizontal direction HD to constitute the horizontal plane of the connector 10, and serves as a support for supporting one elastic conductive portion or a plurality of elastic conductive portions in the vertical direction VD. In the connector of the embodiment, at least one elastic conductive part 110 and the supporting part 120 or a plurality of elastic conductive parts 110 and the supporting part 120 may be formed as an integral structure. Therefore, the plurality of elastic conductive parts 110 and the supporting parts 120 that are integrated into one body can constitute one conductive module that conducts electricity in the vertical direction. The connector of the embodiment may have more than one of the conductive modules.

The support portion 120 extends in the horizontal direction HD, and is integrated with a part of the vicinity of the lower end of the elastic conductive portion 110 in the horizontal direction HD. The support portion 120 is coupled to the lower end of the elastic conductive portion 110 such that the thickness of the support portion 120 in the vertical direction spans a portion of the vertical length region of the elastic conductive portion 110 near the lower end of the elastic conductive portion 110 . The support portion 120 separates and insulates the plurality of elastic conductive portions 110 in the horizontal direction HD. The interval between the elastic conductive parts 110 supported by the support part 120 may correspond to the interval (ie, pitch) between the terminals of the device to be detected. The lower end of the elastic conductive portion 110 protrudes downward from the lower surface 121 of the support portion 120 . Alternatively, the elastic conductive part 110 may be formed in such a manner that its lower end does not protrude from the lower surface of the support part 120 .

The support portion 120 may be composed of a substance having insulating properties or a substance having insulating properties and elasticity. As an example, the support portion 120 may be a film disposed on a horizontal plane orthogonal to the vertical direction VD. As an example, the film constituting the support part 120 may include polyimide, but the material constituting the support part 120 is not limited thereto. As another example, the support part 120 may include the same substance as the elastic substance 112 of the elastic conductive part 110 .

As described above, the integrally formed elastic conductive portion 110 and the support portion 120 constitute a conductive module, and the connector of the embodiment may have more than one conductive module. These conductive modules can be removably combined with the insulating portion 130 . In this embodiment, the plurality of elastic conductive parts 110 and the supporting parts 120 constitute the first conductive module 151 . The plurality of elastic conductive parts 110 in the first conductive module 151 protrude upward from one support part 120 , so the first conductive module 151 has one support part 120 and a plurality of elastic conductive parts 110 . As shown in FIG. 2 , the elastic conductive portion 110 in the first conductive module 151 is formed so as not to protrude upward from the insulating portion 130 .

In the connector 10, the insulating portion 130 is located on the side facing the device to be tested. The insulating part 130 may be formed as an elastic body. The insulating part 130 may be removably coupled to the supporting part 120 . For example, as shown in FIG. 3 , the support portion 120 and the insulating portion 130 may be combined by adhering the upper surface 122 of the support portion 120 and the lower surface 132 of the insulating portion 130 . The combination of the support part 120 and the insulating part 130 may be performed by an adhesion method using an adhesive, but is not limited thereto.

The insulating part 130 may be formed in a film form or a block form having a predetermined thickness. The insulating portion 130 may be composed of an insulating material or a material having insulating properties and elasticity. As an example, the insulating part 130 may be composed of polyimide. In detail, the insulating part 130 may include a polyimide film. The insulating portion 130 made of polyimide has cold resistance and heat resistance, and thus can effectively prevent deformation due to temperature changes. As another example, the insulating part 130 may be composed of silicone rubber. The insulating portion 130 composed of silicone rubber may have better elastic restoring force. The material constituting the insulating portion 130 is not limited to the foregoing examples, and any material having insulating properties and elasticity may be used as the material of the insulating portion 130 .

The insulating portion 130 has a plurality of through holes 133 in which the elastic conductive portion 110 is inserted in the vertical direction VD. The through hole 133 is drilled in the insulating portion 130 in the vertical direction VD, and extends from the upper surface 131 of the insulating portion 130 to the lower surface 132 of the insulating portion 130 in the vertical direction VD. The thickness of the insulating part 130 in the vertical direction may correspond to most of the length of the elastic conductive part 110 in the vertical direction VD. The elastic conductive portion 110 is inserted into the through hole 133 from bottom to top in a state supported by the support portion 120 . Accordingly, when the elastic conductive portion 110 is accommodated in the through hole 133 in the vertical direction VD, the insulating portion 130 faces the device to be tested.

The shape of the through hole 133 in the horizontal direction may correspond to the cross-sectional shape of the elastic conductive part 110 . When the elastic conductive part 110 has a cylindrical shape, the shape of the through hole 133 in the horizontal direction may be approximately circular.

In the connector of the embodiment, the size of the through hole 133 in the horizontal direction is larger than the size of the elastic conductive portion 110 in the horizontal direction. A gap 140 is formed between the inner surface of the through hole 133 and the outer surface of the elastic conductive part 110 as a space formed by part or all of the inner surface of the through hole 133 and part or all of the outer surface of the elastic conductive part 110 . In the non-pressurized state of the elastic conductive portion, the shape of the gap 140 in the horizontal direction may be an annular shape (for example, the inner circle and the outer circle are arranged in a concentric shape). Alternatively, in the non-pressurized state of the elastic conductive portion, the shape of the gap 140 in the horizontal direction may be a shape in which the inner circle in the annular shape is inscribed with the outer circle. This shape may occur when a part of the elastic conductive portion is slightly inclined in the horizontal direction in an actual product of the connector, and a portion of the outer surface of such an elastic conductive portion contacts a portion of the inner surface of the through hole.

In the non-pressurized state of the elastic conductive portion 110 , one elastic conductive portion 110 located in one through hole 133 is not in contact with the through hole 133 in the diameter direction DD and the peripheral direction CD in a portion of its outer surface where the gap 140 is located. When the gap 140 has the aforementioned annular shape, the elastic conductive portion 110 does not contact the through hole 133 in the entire gap 140 . In the non-pressurized state of the elastic conductive part, one elastic conductive part 110 and the insulating part 130 are separated in the region where the gap 140 is formed between the one through hole 133 and the corresponding elastic conductive part 110, that is, in the area of the elastic conductive part In the non-pressurized state, the gap 140 separates the through hole 133 and the corresponding elastic conductive portion 110 in the diameter direction DD along the peripheral direction CD, and is substantially fixed in the vertical direction (VD). On the contrary, in the pressurized state of the elastic conductive portion, the gap 140 may have an unfixed shape in the vertical direction VD. As shown in FIGS. 3 and 4 , the diameter direction DD represents the diameter direction of the central axis CA passing through the center of one through hole in the vertical direction, and the peripheral direction CD represents the peripheral direction with respect to the central axis CA. The gap 140 may be formed between the through hole 133 and the corresponding elastic conductive portion 110 in the vertical direction (VD) and the horizontal direction HD, and in the diameter direction DD and the peripheral direction CD, and along the outer surface of the elastic conductive portion 110 . The surface extends in the peripheral direction CD. The gap 140 may be filled with air.

In the connector 10 , the gap 140 allows elastic deformation of each elastic conductive portion 110 in each through hole 133 . The gap 140 allows each elastic conductive part 110 to elastically deform in the vertical direction and the horizontal direction without being restricted by the through hole 133 of the insulating part 130 . That is, the elastic conductive portion 110 can be freely elastically deformed in the through hole 133 except for the portion fixed on the support portion 120 . The dimensions of the elastic conductive portion 110 , the through hole 133 and the gap 140 may be specified so that the elastic conductive portion 110 can be elastically deformed flexibly.

FIG. 4 schematically shows the elastic conductive portion 110 , the through hole 133 and the gap 140 , and FIG. 5 schematically shows an example of the operation state of the elastic conductive portion 110 . The left side of FIG. 4 and FIG. 5 illustrate the aforementioned non-pressurized state of the elastic conductive portion. The right side of FIG. 5 illustrates the aforementioned pressurized state of the elastic conductive portion. 4 and 5 , the elastic deformation and the gap of the elastic conductive portion 110 will be described.

The through hole 133 may have a circular shape in the horizontal direction HD, and the inner surface of the through hole 133 may have a cylindrical shape extending in the vertical direction VD. The maximum width of the through hole 133 may be defined as a diameter D1 passing through the central axis CA in the diameter direction DD. The elastic conductive part 110 may have a circular shape in the horizontal direction HD, and thus the outer surface of the elastic conductive part 110 may have a cylindrical shape extending in the vertical direction VD. The maximum width of the elastic conductive part 110 may be defined as a diameter D2 passing through the center of the elastic conductive part in the diameter direction DD. Therefore, in the non-pressurized state of the elastic conductive portion, the gap 140 formed between the outer surface of the elastic conductive portion 110 and the inner surface of the through hole 133 may have a ring shape or a cylindrical shape extending in the vertical direction VD.

In such a ring-shaped or cylindrical-shaped gap, the gap 140 may have a width W1 in the diameter direction DD of the central axis CA of the through hole 133 . In the non-pressurized state of the elastic conductive portion, the width W1 of the gap 140 in the diametrical direction can be practically kept constant along the vertical direction VD. That is, in the non-pressurized state of the elastic conductive portion, the width W1 of the gap in the diameter direction may be along the vertical direction VD between the upper end portion of the elastic conductive portion 110 and the joint portion between the elastic conductive portion 110 and the support portion 120 actually remain fixed. Furthermore, in the non-pressurized state of the elastic conductive portion, the diametrical width W1 of the gap may remain substantially constant in the peripheral direction CD, or may be narrowed or widened in the peripheral direction CD. On the other hand, in the actual product of the connector, due to manufacturing errors or assembly problems, some points or surfaces on the outer surface of the elastic conductive portion 110 may be in contact with some points or surfaces on the inner surface of the through hole 133, and the gap 140 The dimensions of the can vary in the vertical direction VD, the diameter direction DD or the peripheral direction CD. It should be understood, however, that this contact and change is equivalent to a situation in which the gap remains virtually fixed in the non-pressurized state of the elastic conductive portion.

The width W1 of the gap 140 in the diameter direction can be defined in consideration of flexible deformation and elastic recovery of the elastic conductive portion 110 in the vertical direction (VD) and the horizontal direction HD. For example, in the diameter direction DD with respect to the central axis CA of the through hole 133, the ratio of the diameter D1 of the through hole 133 to the diameter D2 of the elastic conductive portion 110 is 1:0.8 to 1:0.95. Accordingly, the ratio of the diameter D1 of the through hole 133 to the width W1 of the gap 140 may be in the range of 1:0.025 to 1:0.1 in the diameter direction DD with respect to the central axis CA of the through hole 133 . In the actual product of the connector, by calculating the average diameter of the through hole 133 as the diameter D1 and the average diameter of the elastic conductive portion 110 as the diameter D2, the presence or absence of the gap 140 and the numerical range of the gap 140 can be confirmed . In this case, in the calculation of the average diameter, the method of calculation by measuring the volumes of the through hole 133 and the elastic conductive portion 110 may be applied.

As shown on the left side of FIG. 5 , in the non-pressurized state of the elastic conductive portion 110 , the width W1 of the gap 140 in the diametrical direction may be fixed along the vertical direction VD. Within the gap 140, most of the elastic conductive parts 110 that are not combined with the support part 120 can be elastically deformed in vertical and horizontal directions. As shown on the right side of FIG. 5 , in a pressurized state in which the elastic conductive portion 110 is pressed by the first terminal 31 of the device to be detected 30 , the elastic conductive portion 110 can be shrunk in the vertical direction and can be shrunk in the horizontal direction HD (or the aforementioned diametrical direction) expansion. However, since the elastic conductive portion 110 and the insulating portion 130 are separated on the outer surface of the elastic conductive portion 110 where the gap 140 is located, the elastic conductive portion 110 can be elastically deformed flexibly without being restricted by the insulating portion 130 . That is, the gap 140 provides a space allowing the elastic conductive portion 110 to elastically deform in the vertical and horizontal directions. When the terminal of the device to be detected presses the elastic conductive part 110 , the width W1 of the gap 140 in the diametrical direction may be the smallest in the middle part of the vertical direction of the gap 140 . When the force pressing the device to be detected is strong, the width W1 may hardly exist in the middle portion of the gap 140 in the vertical direction. When the device to be detected is removed from the elastic conductive part 110 , the elastic conductive part 110 can elastically recover from the pressurized state shown on the right side of FIG. 5 to the non-pressurized state shown on the left side of FIG. 5 .

As mentioned above, since the gap 140 separates the elastic conductive part 110 and the insulating part 130 from each other, the gap 140 improves the operability of the elastic conductive part 110 and the elastic restoring force of the elastic conductive part 110 when inspecting the device to be inspected. In addition, even when the device to be detected is pressed against the elastic conductive portion 110 with a small pressure, the elastic conductive portion 110 can be easily elastically deformed and exhibit high conductivity. In addition, since the plurality of elastic conductive parts 110 can work independently, the plurality of elastic conductive parts 110 can appropriately contact the terminals of a plurality of devices to be inspected with terminals of different heights.

In one embodiment, when the elastic conductive portion 110 is inserted into the through hole 133 , the upper end of the elastic conductive portion 110 is located below the upper surface 131 of the insulating portion 130 . Accordingly, for example, since the ball-shaped first terminal 31 (refer to FIG. 1 ) of the device to be inspected can be guided to the elastic conductive portion 110 through the upper end portion of the through hole 133 , the insulating portion 130 can be used to connect the device to be inspected. The first terminal leads to the elastic conductive portion. In some embodiments, an inclined surface may be formed between the upper surface 131 of the insulating part 130 and the through hole 133 to guide the first terminal of the device to be inspected.

The dimensions of the elastic conductive portion 110 and the through hole 133 in the vertical direction can be specified, so that the elastic conductive portion 110 can be elastically deformed flexibly in the presence of the gap 140 . As shown in FIG. 2 , an upper end of a part of the elastic conductive part 110 may be located below the upper surface 131 of the insulating part 130 . The insulating part 130 may have a thickness T1 in the vertical direction (VD), the elastic conductive part 110 may have an insertion thickness T2, which is equivalent to a length from the upper surface 122 of the supporting part 120 to the upper end of the elastic conductive part 110, and may be formed from The thickness difference T3 in the vertical direction VD from the upper surface 131 of the insulating portion 130 to the upper end of the elastic conductive portion 110 . The ratio of the thickness T1 of the insulating part 130 to the insertion thickness T2 of the elastic conductive part 110 may be 1:0.7 to 1:0.9. Therefore, the ratio of the thickness T1 of the insulating portion 130 to the thickness difference T3 may be in the range of 1:0.1 to 1:0.3. That is, when the thickness of the insulating portion 130 is 100%, the thickness difference T3 may be selected within a range of 10% to 30% of the thickness of the insulating portion 130 .

The connector according to the aforementioned embodiment can be manufactured by combining a conductive module composed of a plurality of elastic conductive parts and supporting parts with an insulating part formed by a through hole. An example of manufacturing a connector according to an embodiment will be described with reference to Figures 3, 6a and 6b.

The conductive module and the insulating part composed of the elastic conductive part and the support part are manufactured and prepared respectively. Referring to Fig. 6a, a forming die 51 and a liquid forming material 52 can be used to manufacture a conductive module (eg, the first conductive module shown in Figs. 2 and 3). The liquid molding material 52 includes a liquid substance constituting the elastic substance 112 of the elastic conductive portion and a plurality of conductive substances 111 dispersed in the liquid substance. The molding die 51 has molding cavities 53 corresponding to the shapes of the plurality of elastic conductive parts 110 at each position where the elastic conductive parts 110 are formed. In addition, the molding die 51 is provided with a molding cavity 53 for molding the elastic conductive portion 110 in the vertical direction, and may include a magnet 54 that applies a magnetic field in the vertical direction. The liquid molding material 52 is injected into the molding cavity 53 of the molding die 51 . In addition, the film member 55 constituting the support portion 120 is put into a molding die, and in this film member, a through hole is drilled at each position where the elastic conductive portion 110 is formed. By the magnetic field applied by the magnet 54 , the plurality of conductive substances 111 are assembled and contacted in the vertical direction VD, thereby forming an electrical conductor that performs conduction in the vertical direction on the elastic conductive portion 110 . Then, the elastic substance of the liquid molding material 52 is cured by a predetermined curing process. Accordingly, the first conductive module 151 having a plurality of elastic conductive portions 110 is formed, and the elastic conductive portions 110 and the supporting portion 120 are formed integrally and protrude from the supporting portion 120 . Then, the conductive module will be separated from the forming die 51 .

Next, referring to FIG. 6b, an insulating member 61, such as a film or a block, is prepared, the insulating member 61 is composed of an insulating substance constituting the insulating portion 130, and the through holes 133 on the insulating member 61 are formed by laser or by drilling, Thus, the insulating portion 130 of the connector is manufactured.

Next, referring to FIG. 3 , the first conductive module 151 is combined with the insulating portion 130 , so that each elastic conductive portion 110 is inserted into the corresponding through hole 133 . As an example, the combination of the first conductive module 151 and the insulating portion 130 may be performed by an adhesive method using an adhesive. The first conductive module 151 and the insulating portion 130 combined with each other constitute the connector 10 as shown in FIG. 2 . The plurality of elastic conductive portions 110 protruding from the support portion 120 are combined with the insulating portion 130, so that the efficiency of the manufacturing method can be improved and the manufacturing cost can be reduced. In addition, if necessary, the first conductive module 151 is removed from the insulating portion 130 so that only a conductive module having a damaged elastic conductive portion among the plurality of elastic conductive portions provided in the connector can be replaced.

7 is an exploded cross-sectional view showing a part of a connector according to a second embodiment of the present invention. 7 , the connector 10 further includes an insulating film 160 attached to the upper surface of the insulating portion 130 .

In the embodiment shown in FIG. 7 , the insulating portion 130 may be composed of silicone rubber. An insulating film 160 is attached on the upper surface of the insulating part 130 to cover the upper surface of the insulating part 130 , and terminal guide holes 161 corresponding to the through holes 133 are drilled in the insulating film 160 in the vertical direction VD. As an example, the insulating film 160 may include a film composed of a polyimide film having insulating properties or a polymer having insulating properties. The insulating film 160 can prevent deformation of the insulating portion 130 composed of silicone rubber and improve the durability of the insulating portion 130 . In addition, the insulating film 160 can prevent the device to be tested from sticking to the insulating portion 130 composed of silicone rubber. As another example, the insulating film 160 may be applied to the insulating part 130 composed of polyimide.

8 is an exploded cross-sectional view showing a part of a connector according to a third embodiment of the present invention, and FIG. 9 is a top view showing a part of the connector shown in FIG. 8 .

Referring to FIGS. 8 and 9 , the elastic conductive portion 110 further includes an insulating protection portion 113 that protects and insulates a plurality of conductive substances 111 that can be conductively contacted in the vertical direction VD. The insulating protection portion 113 is formed so as to surround the plurality of conductive substances 111 assembled in the vertical direction VD in the peripheral direction along the vertical direction VD. Alternatively, the insulating protection portion 113 is formed so as to surround the conductor composed of the conductive substances 111 assembled in the vertical direction VD in the peripheral direction. The height of the insulating protection portion 113 in the vertical direction VD is the same as the height of the conductor composed of the conductive substance 111 in the vertical direction VD. The insulating protection portion 113 may be composed of the same material as the elastic material 112 of the elastic conductive portion 110 , or may be composed of an elastic insulating material different from the elastic material 112 .

As shown in FIG. 9 , the cross-sectional shape of the insulating protection portion 113 may be approximately a circular ring shape. Therefore, the insulating protection part 113 may have a ring shape extending in the vertical direction VD. FIG. 9 shows that the conductor and the insulating protective portion of the conductive substance have concentric shapes with respect to the central axis CA, but the shapes shown in FIG. 9 are merely exemplary. In an actual product of the connector, a part of the insulating protection part of the plurality of elastic conductive parts 110 may have an eccentric shape with respect to the central axis CA.

Referring to FIG. 9 , the outer surface of the insulating protection portion 113 becomes the outer surface of the elastic conductive portion 110 . The insulating protection portion 113 has a width W2 in the diameter direction DD of the through hole 133 with respect to the central axis CA. The width W2 of the insulating protection portion 113 may or may not be fixed in the peripheral direction CD. In the elastic conductive portion 110 having the insulating protection portion 113 , in the diameter direction relative to the central axis CA of the through hole 133 , the diameter D2 of the elastic conductive portion 110 and a portion of the elastic conductive portion occupied by the plurality of conductive substances 111 The ratio of the diameters D3 can be specified in the range of 1:0.6 to 1:0.9. In relation to this, a part of the elastic conductive portion occupied by the plurality of conductive substances 111 represents a conductor composed of a plurality of conductive substances 111 assembled in the vertical direction. Accordingly, in the diameter direction relative to the central axis CA of the through hole 133 , the ratio of the diameter D2 of the elastic conductive portion 110 to the width W2 of the insulating protection portion 113 may be in the range of 1:0.05 to 1:0.2. The width W2 of the insulating protection portion can be defined in consideration of the electrical conductivity of the conductor of the conductive material 111 and the elastic deformation of the elastic conductive portion 110 .

When forming the conductive module of the elastic conductive portion and the supporting portion, the insulating protection portion 113 may be formed on the elastic conductive portion 110 . In order to form the insulating protection part 113, the size of the forming cavity in the forming mold for forming the elastic conductive part may be larger than that of the forming cavity in the embodiment shown in FIG. 6a. Alternatively, the size of the magnet for applying the magnetic field to the liquid molding material may be smaller than the size of the magnet for the collection of conductive substances in the vertical direction in the embodiment shown in FIG. 6a. When a magnetic field is applied to the liquid molding material in the vertical direction, in the molding cavity for forming the elastic conductive part provided in the molding die, a plurality of conductive substances will be collected in the middle along the vertical direction by the magnetic field, and collected in the middle. The elastic material existing around the plurality of conductive materials can form the insulating protection portion 113 .

10 is a cross-sectional view showing a part of a connector according to a fourth embodiment of the present invention. Referring to FIG. 10 , the elastic conductive portion 110 of the connector includes a conductive spring 114 .

The conductive spring 114 is disposed on the elastic conductive portion 110 so that the direction of its elastic deformation is the vertical direction VD. The conductive spring 114 may have the shape of a compression coil spring, for example. The conductive spring 114 is maintained in the vertical direction by the elastic material 112 , and when the elastic conductive portion 110 is elastically deformed, it can be elastically deformed together with the elastic material 112 and elastically restored.

In the embodiment shown in FIG. 10 , the conductive springs 114 are provided so as to be in contact with the plurality of conductive substances 111 in the elastic conductive portion 110 . As another embodiment, the elastic conductive part 110 may only include the elastic substance 112 and the conductive spring 114 . As described above, the elastic conductive portion 110 including the conductive spring 114 that can elastically deform in the vertical direction can have more improved elastic restoring force, electrical conductivity, and durability.

In the example shown in FIG. 10 , the insulating portion 130 may be composed of polyimide or silicone rubber. In addition, the upper end of the elastic conductive portion 110 may protrude upward from the upper surface of the insulating portion 130 , but may also be located below the upper surface of the insulating portion 130 .

The conductive module having the elastic conductive portion 110 including the conductive spring 114 can be manufactured by a method similar to that described with reference to FIG. 6a. For example, the conductive spring 114 may be inserted into each molding cavity for molding the elastic conductive portion. Then, the liquid molding material including the conductive substance and the liquid elastic substance or the liquid molding material including only the liquid elastic substance may be injected into the molding cavity. A magnetic field may be applied to the liquid molding material including the conductive substance in a vertical direction. After the liquid molding material is solidified, the conductive module having a plurality of elastic conductive parts 110 can be separated from the molding die, and the elastic conductive parts 110 respectively include conductive springs 114 .

11 is a cross-sectional view schematically showing a part of a connector according to a fifth embodiment of the present invention, and FIG. 12 is an exploded cross-sectional view showing a part of the connector shown in FIG. 11 .

The connector 10 shown in FIGS. 11 and 12 can be applied to a device to be tested having a land-shaped second terminal (refer to FIG. 1 ). The elastic conductive portion 210 of the connector has a structure similar to the aforementioned elastic conductive portion 110 . The elastic conductive portion 210 has an upper end portion 215 that protrudes upward from the upper surface 131 of the insulating portion 130 so as to be in contact with the land-shaped second terminal. The upper end portion 215 is composed of the conductive material and the elastic material. The portion of the elastic conductive portion 210 other than the upper end portion 215 is separated from the through hole 133 by a gap 140 formed by a part or all of the outer surface of the elastic conductive portion 210 and a part or all of the inner surface of the through hole 133 Space. The ratio of the diameter of the portion of the elastic conductive portion 210 other than the upper end portion 215 to the diameter of the through hole 133 may be specified within the range of the aforementioned ratio. The ratio of the diameter of the through hole 133 to the width in the diameter direction of the gap 140 may be specified within the range of the aforementioned ratio. The support portion 120 is configured similarly to the support portion of the previous embodiment, the support portion supports the elastic conductive portion 210 , is bonded to the vicinity of the lower end of the elastic conductive portion 210 , and is integrated with the elastic conductive portion 210 . That is, the support portion 120 and the elastic conductive portion 210 are integrally formed, and the elastic conductive portion 210 protrudes upward from the support portion 120 . The elastic conductive portion 210 and the support portion 120 can be formed into one piece to form a second conductive module 152 , and the second conductive module 152 can be removably combined with the insulating portion 130 .

13 is an exploded cross-sectional view showing a part of a connector according to a sixth embodiment of the present invention. 13 , in the connector 10 , the elastic conductive portion 210 in contact with the land-shaped second terminal includes the aforementioned insulating protection portion 113 . In this embodiment, the insulating protection portion 113 may be provided on a portion of the elastic conductive portion 210 other than the upper end portion 215 .

As explained with reference to FIG. 1 , the device 30 to be inspected has only the spherical first terminal 31 or only the land-shaped second terminal 32 . Alternatively, the device 30 to be inspected has a spherical first terminal 31 in some areas and a land-shaped second terminal 32 in another area. The connector of an embodiment can be applied to a device to be inspected having both a ball-shaped first terminal and a land-shaped second terminal. Such an example connector is illustrated in FIGS. 14-17 .

14 is a cross-sectional view showing a part of a connector according to a seventh embodiment of the present invention, and FIG. 15 is an exploded cross-sectional view showing a part of the connector shown in FIG. 14 . 16a to 16c are top views for explaining an example of manufacturing the connector shown in FIG. 14 .

Referring to FIG. 14 , the connector 10 includes the aforementioned elastic conductive portion 110 that can conduct electricity in the vertical direction and the aforementioned elastic conducting portion 210 that can conduct electricity in the vertical direction. The elastic conductive portion 110 is in contact with the spherical first terminal 31 shown in FIG. 1 in the vertical direction VD, and the elastic conductive portion 210 is in contact with the land-shaped second terminal shown in FIG. 1 in the vertical direction VD. Therefore, the connector 10 shown in FIG. 14 can be applied to inspect a device to be inspected, which has both a spherical first terminal and a land-shaped second terminal. That is, the connector 10 can be used to inspect a device to be inspected that has a ball-shaped first terminal in a partial area and a land-shaped second terminal in another partial area. The elastic conductive portion 110 of this embodiment may be constructed in the same way as the elastic conductive portion 110 described with reference to FIGS. 2 to 4 , and the elastic conductive portion 210 of this embodiment may be the same as the elastic conductive portion 210 described with reference to FIGS. 11 and 12 . constitute.

The connector of this embodiment is configured such that the plurality of elastic conductive portions correspond to the first terminal and the second terminal according to the terminal positions. In the connector 10 , the plurality of elastic conductive portions 110 and the supporting portion 120 integrally formed with the plurality of elastic conductive portions 110 constitute the first conductive module 151 . The first conductive module 151 includes the elastic conductive portion 110 , and the elastic conductive portion 110 is formed so as not to protrude from the insulating portion 130 in the vertical direction. In addition, in the connector 10 , the plurality of elastic conductive portions 210 and the supporting portion 120 integrally formed with the plurality of elastic conductive portions 210 constitute the second conductive module 152 . The second conductive module 152 includes an elastic conductive portion 210 , and the elastic conductive portion 210 is formed to protrude from the insulating portion 130 in a vertical direction. The insulating portion 130 may be constructed as one component, and a through hole 133 is drilled in the insulating portion 130 in the vertical direction VD, and the elastic conductive portions 110 and 210 are inserted and accommodated in the through hole 133 .

As shown in FIG. 14 and FIG. 15 , in order to electrically connect the ball first terminal, the elastic conductive portion 110 of the first conductive module 151 is inserted into the through hole 133 from bottom to top, and the support portion 120 of the first conductive module 151 Combined with the lower surface 132 of the insulating part 130 . A gap 140 is formed between the outer surface of the elastic conductive part 110 and the inner surface of the through hole 133 , which allows elastic deformation of the elastic conductive part 110 . In addition, in order to electrically connect the land-shaped second terminal, the elastic conductive portion 210 of the second conductive module 152 is inserted into the through hole 133 from bottom to top and accommodated in the through hole 133 . The support of the second conductive module 152 The portion 120 is combined with the lower surface 132 of the insulating portion 130 . A gap 140 is formed between the outer surface of the elastic conductive part 210 and the inner circumferential surface of the through hole 133 , which allows elastic deformation of the elastic conductive part 210 . The supporting portion 120 of the first conductive module 151 and the supporting portion 120 of the second conductive module 152 may be at the same level with respect to the lower surface of the insulating portion 130 . In addition, the support portion 120 of the first conductive module 151 and the support portion 120 of the second conductive module 152 may be disposed adjacent to each other in the horizontal direction HD. Since the first conductive module 151 and the second conductive module 152 are coupled to the insulating portion 130, the connector 10 can be constructed in a manner corresponding to desired positions of different types of terminals.

The first conductive module 151 including the elastic conductive portion 110 and the support portion 120 and the second conductive module 152 including the elastic conductive portion 210 and the support portion 120 can be formed by the molding method described with reference to FIG. 6a. The separately formed first conductive module and second conductive module can be applied to the connector according to the desired position of the terminal of the device to be inspected. Figures 16a to 16c show examples of applying different conductive modules according to the desired position of the terminals of the device to be inspected.

16a, the first area A1 is the area of the elastic conductive portion 110 for electrical connection with the spherical first terminal, and the second area A2 is the area of the elastic conductive portion 110 for electrical connection with the land-shaped second terminal. Referring to FIG. 16b, the first conductive module having the elastic conductive part 110 may be manufactured separately and combined with the insulating part 130 to be disposed in the first area A1. Referring to FIG. 16c, the second conductive module having the elastic conductive part 210 may be manufactured separately and combined with the insulating part 130 to be disposed in the second area A2. The plurality of first conductive modules for the first area A1 and the plurality of second conductive modules for the second area A2 are bonded to the insulating portion 130, thereby providing the connector 10 for inspection to be inspected The device to be tested has spherical and land-shaped terminals as shown in Figure 16a.

As mentioned above, in the connector 10 of an embodiment, a plurality of conductive modules are used, and the conductive modules are provided with a plurality of elastic conductive parts, and the elastic conductive parts have characteristics required by each area of the equipment to be tested. Since the conductive module is bonded to the insulating portion to constitute the connector, the connector can be manufactured with an efficient manufacturing method and reduced manufacturing cost. In addition, when a part of the elastic conductive portion of the connector is damaged, the corresponding conductive module is separated from the insulating portion, and a new conductive module can be combined with the insulating portion. Therefore, the elastic conductive portion belonging to the partially damaged area can be easily replaced.

17 is an exploded cross-sectional view showing a part of a connector according to an eighth embodiment of the present invention. Referring to FIG. 17 , the connector 10 may be constructed in such a manner that the supporting portion 120 of the first conductive module 151 and the supporting portion 120 of the second conductive module 152 are partially overlapped in the vertical direction VD. As an example, the support portion 120 of the second conductive module 152 may be disposed on the support portion 120 of the first conductive module 151 . The support portion 120 of the second conductive module may be combined with the lower surface 132 of the insulating portion 130 , and the support portion 120 of the first conductive module may be combined with the lower surface 121 of the support portion 120 of the second conductive module. In the overlapping structure of the plurality of supporting portions in the vertical direction, the elastic conductive portion 110 and the elastic conductive portion 210 may only be located in the respective conductive modules. Alternatively, in a structure in which a plurality of support parts are vertically overlapped, the support parts may be overlapped in a horizontal direction. In this example, the elastic conductive portion 110 can be inserted into the through hole 133 through the support portion 120 of the second conductive module, and the elastic conductive portion 210 can also be inserted into the support portion 120 of the first conductive module at its lower end . As mentioned above, the first conductive module 151 and the second conductive module 152 can be arranged in such a way that the supporting parts supporting the elastic conductive parts overlap in the vertical direction, and the spherical first terminals and the land-shaped second terminals can be arranged correspondingly Equipment to be inspected in a narrow area.

Although the technical idea of the present invention has been described through the examples shown in the above part of the embodiments and the accompanying drawings, various substitutions and modifications can be made without departing from the technical idea and scope of the present invention that can be understood by those skilled in the art and change. In addition, such substitutions, modifications and changes should be considered to be within the scope of the appended rights.

10: Connector 20: Detection device 21: Check the circuit 22: Terminals 30: Equipment to be tested 31: Terminal 32: Terminal 40: Test socket 51: Forming mold 52: Liquid molding material 53: Forming voids 54: Magnets 55: Membrane parts 61: Insulation parts 110: Elastic conductive part 210: Elastic conductive part 111: Conductive substances 112: elastic material 113: Insulation protection department 114: Conductive spring 120: Support Department 121: Lower surface 122: upper surface 130: Insulation part 131: Upper surface 132: Lower surface 133: Through hole 140: Clearance 151: The first conductive module 152: The second conductive module 160: insulating film 161: Terminal guide hole 210: Elastic conductive part 215: Upper end P: pressure CA: Center axis of through hole D1: Diameter of through hole D2: Diameter of elastic conductive part D3: Part of the diameter of the elastic conductive part T1: Thickness of insulating part T2: Insert Thickness T3: Thickness difference A1: The first area A2: The second area W1: The width of the gap W2: Width of insulation protection part VD: vertical direction HD: Horizontal orientation DD: Diameter direction CD: Peripheral direction

Figure 1 schematically shows an example of applying a connector according to an embodiment; 2 is a cross-sectional view schematically showing a part of the connector according to the first embodiment; 3 is an exploded cross-sectional view schematically showing a portion of the connector shown in FIG. 2; 4 is a top view showing a portion of the connector shown in FIG. 2; 5 is a cross-sectional view schematically showing an operation state of a part of the connector shown in FIG. 4; Figure 6a schematically illustrates an example of a conductive module for manufacturing a connector according to an embodiment; Figure 6b schematically illustrates an example of manufacturing an insulating portion of a connector according to an embodiment; 7 is an exploded cross-sectional view schematically showing a part of a connector according to a second embodiment; 8 is an exploded cross-sectional view showing a part of a connector according to a third embodiment; 9 is a top view showing a portion of the connector shown in FIG. 8; 10 is a cross-sectional view showing a part of a connector according to a fourth embodiment; 11 is a cross-sectional view schematically showing a part of a connector according to a fifth embodiment; 12 is an exploded cross-sectional view schematically showing a portion of the connector shown in FIG. 11; 13 is an exploded cross-sectional view schematically showing a part of a connector according to a sixth embodiment; 14 is a cross-sectional view schematically showing a part of a connector according to a seventh embodiment; 15 is an exploded cross-sectional view schematically showing a portion of the connector shown in FIG. 14; Figure 16a is a top view showing a connector according to an embodiment; Figure 16b shows the area of the conductive module for the ball terminal in the connector shown in Figure 16a; Figure 16c shows the area of the conductive module for land terminals in the connector shown in Figure 16a; 17 is an exploded cross-sectional view schematically showing a part of a connector according to an eighth embodiment.

10: Connector

110: Elastic conductive part

111: Conductive substances

112: elastic material

120: Support Department

121: Lower surface

122: upper surface

130: Insulation part

131: Upper surface

132: Lower surface

133: Through hole

140: Clearance

151: The first conductive module

T1: Thickness of insulating part

T2: Insert Thickness

T3: Thickness difference

VD: vertical direction

HD: Horizontal orientation

Claims (16)

A connector, comprising: at least one elastic conducting part extending in a vertical direction; a supporting part supporting the elastic conducting part; Inserted into the through hole in the vertical direction, a gap separating the through hole and the elastic conductive part along the peripheral direction of the through hole is formed between the inner surface of the through hole and the outer surface of the elastic conductive part, and the gap is A space formed by at least a portion of the inner surface and at least a portion of the outer surface and filled with air. The connector of claim 1, wherein the support portion is a film disposed on a horizontal plane perpendicular to the vertical direction, and the upper surface of the support portion is adhered to the lower surface of the insulating portion. The connector of claim 2, wherein the film comprises polyimide. The connector of claim 2, further comprising an insulating film having a terminal guide hole corresponding to the through hole drilled and attached to the upper surface of the insulating portion. The connector of claim 1, wherein the insulating portion comprises a polyimide film. The connector of claim 1, wherein a ratio of the diameter of the through hole to the diameter of the elastic conductive portion in a diametrical direction relative to the central axis of the through hole is in the range of 1:0.8 to 1:0.95. The connector of claim 1, wherein the upper end of the elastic conductive portion is located below the upper surface of the insulating portion, and the ratio of the thickness of the insulating portion to the thickness difference between the upper surface of the insulating portion and the upper end of the elastic conductive portion is 1:0.1 to 1:0.3 range. The connector of claim 1, wherein the elastic conductive portion includes a plurality of conductive substances assembled along the vertical direction and an elastic substance that maintains the plurality of conductive substances in the vertical direction. The connector of claim 8, wherein the elastic conductive portion further comprises an insulating protection portion surrounding the plurality of conductive substances in the horizontal direction along the vertical direction. The connector of claim 9, wherein the ratio of the diameter of the elastic conductive portion relative to the diameter of the central axis of the through hole to the diameter of a portion of the elastic conductive portion occupied by the plurality of conductive substances is 1 : in the range of 0.6 to 1: 0.9. The connector of claim 1 or 8, wherein the elastic conductive portion comprises a conductive spring capable of elastically deforming in the vertical direction. The connector of claim 1, wherein the elastic conductive portion and the support portion are formed into one piece to form at least one conductive module, and the conductive module is detachably coupled to the insulating portion. The connector of claim 12, wherein the at least one conductive module includes a first conductive module, and the first conductive module includes the elastic conductive portion, the elastic conductive portion not protruding from the insulating portion in the vertical direction out of the way constituted. The connector of claim 13, wherein the at least one conductive module comprises a second conductive module, the second conductive module comprises the elastic conductive portion, the elastic conductive portion protrudes from the insulating portion in the vertical direction manner of composition. The connector of claim 14, wherein the support portion of the first conductive module and the support portion of the second conductive module are close to each other in a horizontal direction orthogonal to the vertical direction, and are in phase with the insulating portion combine. The connector of claim 14, wherein the support portion of the first conductive module and the support portion of the second conductive module partially overlap in the vertical direction.

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