TW202138817A - Probe and electrical connection device - Google Patents

Abstract

An objective of the present invention is to provide a probe and an electrical connection device that reduce friction between the probe and its surroundings during sliding.

A probe 10 includes: a tubular barrel 11 which has a tension spring 12 that is extractable along a central axis direction; and a plunger 13 which has a base end disposed inside the barrel 11 and a front end exposed from an open end at one side of the barrel 11. One end of the tension spring 12 is fixed to the base end of the plunger 13, and the other end of the tension spring 12 is fixed to the barrel 11 at a position closer to the front end than the base end of the plunger 13.

Description

Probe and electrical connection device

The invention relates to a probe and an electrical connection device used for measuring the electrical characteristics of an object to be inspected.

In order to measure the electrical characteristics of the test object such as a semiconductor integrated circuit without being separated from the wafer, an electrical connection device with a probe contacting the test object is used. In the measurement using the probe, it is necessary to ensure the electrical connection between the inspected body and the probe. For example, a probe having a pressing spring that expands and contracts in the direction of the central axis is used, and overdrive is applied to press the probe against the object to be inspected (see Patent Document 1).

The probe system is arranged corresponding to the position of the inspection pad of the object to be inspected. Therefore, as the miniaturization of the semiconductor integrated circuit progresses and the arrangement interval of the inspection connection pads becomes narrow, the arrangement interval of the probes also becomes narrow. The probe system is progressing toward narrower diameter along with the narrower pitch of the connection pads for inspection.

[Prior Technical Literature]

[Patent Literature]

Patent Document 1: JP 2013-53931 A

When the diameter of the probe with the pressing spring is reduced, the pressing spring will snake when contracted due to insufficient lateral rigidity. Therefore, the probe will rub against the surroundings when sliding, causing the probe to wear or be scraped. As a result, insufficient sliding of the probe or breakage of the probe occurs.

The object of the present invention is to provide a probe and an electrical connection device, which reduce the friction between the probe and the surroundings during sliding.

According to one aspect of the present invention, a probe can be provided, which is provided with: a tube-shaped probe barrel with a tension spring that expands and contracts along the central axis; and a plunger, a base The end is located inside the probe barrel, and the front end is exposed from one of the open ends of the probe barrel. One end of the extension spring is fixed to the base end of the plunger; the other end of the extension spring is fixed to the probe barrel at a position closer to the tip than the base end of the plunger.

According to the present invention, it is possible to provide a probe and an electrical connection device that reduce the friction between the probe and its surroundings during sliding.

1: Electrical connection device

2: Subject

10, 10a: Probe

10B: Fixed length probe

11: Probe tube

12: Extension spring

13: Plunger

14: conductive film

15: Metal ball

16: leaf spring

20: Probe head

21: The first main surface

22: The second main surface

30: Wiring board

31: connecting plate

40: fixed plunger

100: Comparison probe

101: The first probe

102: second probe

110: Probe tube

120: Push spring

131: First plunger

132: second plunger

F: thrust

P1, P2: fixed point

P10, P20, P40: junction

FIG. 1 is a schematic diagram showing the structure of the electrical connection device of the first embodiment of the present invention.

2 is a schematic diagram showing the state after the probe of the electrical connection device of the first embodiment of the present invention is in contact with the object to be inspected.

Fig. 3 is a schematic diagram showing the configuration of the probe of the comparative example.

Fig. 4 is a schematic diagram showing the state after the spring portion of the probe of the comparative example is compressed.

FIG. 5 is a schematic diagram showing the structure of the electrical connection device of the first modification of the first embodiment of the present invention.

6 is a schematic diagram showing the state after the probe of the electrical connection device of the first modification of the first embodiment of the present invention is in contact with the object to be inspected.

FIG. 7 is a schematic diagram showing another structure of the electrical connection device of the first modification of the first embodiment of the present invention.

FIG. 8 is a schematic diagram showing the structure of the electrical connection device of the second modification of the first embodiment of the present invention.

9 is a schematic diagram showing the state after the probe of the electrical connection device of the second modification of the first embodiment of the present invention is in contact with the object to be inspected.

FIG. 10 is a schematic diagram showing the structure of the probe of the second embodiment of the present invention.

FIG. 11 is a schematic diagram showing the state after the probe of the second embodiment of the present invention is in contact with the object to be inspected.

Next, the implementation mode of the present invention will be explained with reference to the drawings. In the description of the following drawings, the same or similar symbols are attached to the same or similar parts. However, the drawings are schematic, and the ratio of the thickness of each part may be different from the real thing. Moreover, even among the drawings, there are still parts with different dimensional relationships or ratios. The embodiments shown below are examples of devices or methods for embodying the technical idea of the invention. The embodiments of the invention do not take into account the materials, shapes, and structures of the components. The structure, arrangement, etc. are limited to the following.

[First Implementation Type]

FIG. 1 shows an electrical connection device 1 using the probe of the first embodiment of the present invention as the first probe 101 and the second probe 102. Hereinafter, the probe of the first embodiment is referred to as "probe 10". The electrical connection device 1 is used for the measurement of the object 2 to be inspected.

As shown in FIG. 1, the probe 10 is provided with: a tube-shaped probe barrel 11; and a plunger 13. Exposed. The probe barrel 11 has a tension spring 12 that expands and contracts along the central axis of the probe barrel 11. One end of the tension spring 12 is fixed to the base end of the plunger 13. In addition, the other end of the tension spring 12 is fixed to the probe barrel 11 at a position closer to the tip than the base end of the plunger 13. In FIG. 1, the fixed point P1 shows the position where the tension spring 12 is fixed to the plunger 13, and the fixed point P2 shows the position where the tension spring 12 is fixed to the probe barrel 11 (the same applies hereinafter).

The extension spring 12 of the probe 10 shown in FIG. The area where the cutout is formed serves as a spring portion, and the probe 10 is stretchable in the direction of the central axis. In the probe 10 shown in FIG. 1, the fixed point P2 refers to the position where the probe barrel 11 starts to form the incision. Then, the base end of the plunger 13 and the probe barrel 11 are joined at a fixed point P1 set in an area of the probe barrel 11 where there is no cutout. For example, the base end of the plunger 13 and the probe barrel 11 are joined by point welding, crimping, adhesive material, or the like.

As shown in FIG. 1, the electrical connection device 1 includes: a probe head 20 that holds a first probe 101 and a second probe 102; and a wiring board 30 that is provided with a probe head 20.

The probe head 20 has a through hole penetrating from the first main surface 21 to the second main surface 22 facing the first main surface 21. The first probe 101 exposes the tip portion on the first main surface 21 and is inserted In the through hole of the probe head 20. The second probe 102 exposes its tip on the second main surface 22 and is inserted into the through hole of the probe head 20.

The opening end of the probe barrel 11 through which the front end of the plunger 13 is exposed is fixed to the opening of the through hole of the probe head 20. Furthermore, the open end of the probe barrel 11 where the front end of the plunger 13 is exposed is the part exposed from the probe head 20, and has an outer diameter larger than the inner diameter of the opening of the through hole of the probe head 20 The flange part. The flange portion hooks the opening of the through hole of the probe head 20 to prevent the probe barrel 11 from being pressed into the through hole of the probe head 20.

The tip portion of the first probe 101 exposed from the probe head 20 faces the subject 2 to be inspected. The tip portion of the second probe 102 exposed from the probe head 20 is connected to a land 31 arranged on the wiring board 30. The connection pad 31 is made of a conductive material such as a metal material, and an inspection device (not shown) such as a tester is electrically connected to the connection pad 31. Via the electrical connection device 1, electrical signals are transmitted between the inspection device and the inspected body 2.

The electrical connection device 1 is a vertical-acting probe card, and the front end of the first probe 101 contacts the inspection connection pad (not shown) of the inspection object 2 when the inspection object 2 is measured. FIG. 1 shows a state where the first probe 101 is not in contact with the object 2 to be inspected.

In the measurement of the inspected body 2, the probe head 20 moves relative to the inspected body 2, and as shown in FIG. 2, the front end of the first probe 101 will contact the inspected body 2. At this time, the front end of the second probe 102 is in contact with the connecting plate 31, and the plunger 13 of the first probe 101 and the plunger 13 of the second probe 102 move toward the central axis. Therefore, the extension spring 12 of the first probe 101 and the extension spring 12 of the second probe 102 will extend. Thereby, the first probe 101 is pressed against the subject 2 by a predetermined pressure by the tensile load received by the tensile spring 12.

When the measurement of the subject 2 ends and the first probe 101 and the second probe 102 are separated, The extension spring 12 of the first probe 101 and the extension spring 12 of the second probe 102 will contract. In this way, the first probe 101 or the second probe 102 slides inside the through hole of the probe head 20 when measuring the subject 2.

In the above description, the first probe 101 and the second probe 102 held by the probe head 20 are each shown as one for easy understanding of the description. The probe head 20 holds a plurality of pairs of the first probe 101 and the second probe 102 corresponding to the number of inspection connection pads of the object 2 to be inspected.

Compared with the operation of the probe 10 described above, the operation of the probe of the comparative example in which the spring portion shown in FIG. 3 is the urging spring 120 (hereinafter referred to as "comparative probe 100") will be reviewed. The area of the comparison probe 100 where the spiral cutout is formed through the side surface of the probe barrel 110 is a spring portion. The front end of the first plunger 131 in contact with the subject is exposed from one of the open ends of the probe barrel 110, and the base end of the first plunger 131 is arranged inside the probe barrel 110. The first plunger 131 is connected to the probe barrel 110 at a junction point P10 adjacent to the open end of the probe barrel 110. The front end of the second plunger 132 is exposed from the other open end of the probe barrel 110, and the base end of the second plunger 132 is arranged inside the probe barrel 110. The second plunger 132 is connected to the probe barrel 110 at a junction point P20 adjacent to the open end of the probe barrel 110. Although not shown, the front end of the second plunger 132 is connected to, for example, the land 31 of the wiring board 30.

When measuring the object to be inspected, the pressing spring 120 of the comparison probe 100 is compressed by the pushing force F received by the first plunger 131 by abutting against the object to be inspected. At this time, when the diameter of the comparison probe 100 is small, the pressing spring 120 will snake like FIG. 4 due to the insufficient rigidity of the comparison probe 100. As a result, when the comparison probe 100 expands and contracts, the comparison probe 100 and the probe head 20 rub against each other.

When the comparison probe 100 rubs against the probe head 20, the comparison probe 100 is slowly scraped at the contact portion of the comparison probe 100 and the probe head 20 by repeatedly performing the measurement of the object to be inspected. because Therefore, for example, the side surface of the comparison probe 100 is cracked into burrs, which hooks on the probe head 20 and the like, and a frictional force is generated between the comparison probe 100 and the probe head 20. As a result, due to the obstruction of the expansion and contraction of the comparison probe 100, insufficient sliding of the comparison probe 100 may occur, or the comparison probe 100 may be damaged.

In contrast, in the probe 10 in which the spring portion is the extension spring 12, when the measurement of the subject 2 is performed, the spring portion is extended rather than compressed. Therefore, even if the diameter of the probe 10 is reduced, the spring portion does not meander during measurement. Therefore, the probe 10 and the probe head 20 do not rub against when the spring portion expands and contracts. In this way, according to the probe 10, the insufficient sliding of the probe 10 or the damage of the probe 10 will be reduced.

Furthermore, a conductive material is used for the probe 10 which electrically connects the connection pad 31 and the object 2 to be inspected. For example, a nickel (Ni) material or the like is used for the probe barrel 11 and an AgPdCu (silver palladium copper) material or the like is used for the plunger 13. In addition, a non-conductive material is used for the probe head 20. For example, a ceramic material or the like is used for the probe head 20.

The first probe 101 and the second probe 102 are electrically connected inside the probe head 20. For example, in the probe head 20 shown in FIG. 1, the conductive film 14 covers the wall surface of the through hole. The side surface of the probe barrel 11 is in contact with the conductive film 14, and the first probe 101 and the second probe 102 are electrically connected through the conductive film 14. The conductive film 14 has a laminated structure in which a copper (Cu) film with a film thickness of about 2 μm, a Ni film with a film thickness of about 1 μm, and a gold (Au) film are laminated, for example. The thickness of the conductive film 14 is about several μm, which is the thickness of a general hole plating.

As described above, in the probe 10 of the first embodiment, the front end of the probe 10 is contacted with the subject 2 under a predetermined pressure by the tensile load received by the stretched spring 12 after extension. Then, the extension spring 12 is used for the probe 10 of the spring portion to reduce the meandering of the spring portion when the probe 10 slides inside the through hole of the probe head 20. Therefore, according to the probe 10, the probe 10 and the probe head 20 are prevented from rubbing. Therefore, the probe 10 reduces the damage of the probe 10 or insufficient sliding of the probe 10 during measurement.

In addition, when the spring portion is provided as a pressing spring, the spring portion will not be compressed below the contact height. Therefore, the length of the probe is limited so that the probe may contact the inspection object 2 in a state where the spring portion is longer than the contact height. On the other hand, when the tension spring 12 has been used for the spring portion, there is no such restriction, and the design freedom is high.

[First modification example]

In FIG. 1, an example in which the first probe 101 and the second probe 102 are electrically connected by the conductive film 14 covering the wall surface of the through hole of the probe head 20 has been shown. In addition to the method shown in FIG. 1, various methods can be used to electrically connect the first probe 101 and the second probe 102.

For example, a connecting member having conductivity may be arranged inside the through hole of the probe head 20. The connecting member is arranged so that the base end of the first probe 101 and the base end of the second probe 102 will clamp the connecting member when the extension spring 12 of the probe 10 is extended. Thereby, the first probe 101 and the second probe 102 are electrically connected via the connecting member.

FIG. 5 shows an example in which the connecting member electrically connecting the first probe 101 and the second probe 102 is a metal ball 15. The metal ball 15 is a spherical body that can move freely along the inner wall of the through hole. When the tension spring 12 is extended by the thrust F received by the plunger 13 by abutting against the inspected body 2, as shown in FIG. 6, the metal ball 15 will be sandwiched on the base end of the first probe 101 Between the base end of the second probe 102. In this way, the first probe 101 and the second probe 102 are electrically connected.

Furthermore, the shape of the connecting member is not limited to the spherical shape. For example, it is also possible to use a conductive columnar connecting member instead of the metal ball 15. Alternatively, as shown in FIG. 7, a conductive leaf spring 16 may be used as a connecting member to be arranged inside the probe head 20. In addition, a metal material processed into a mesh shape or the like and having elasticity can also be used for the connection material.

[Second modification example]

In the electrical connection device 1 shown in FIG. 1, the first probe 101 and the second probe 102 are both probes 10 with tension springs 12. However, one of the first probe 101 and the second probe 102 may be set as the probe 10, and the other may be set as a probe having a fixed length along the central axis direction (hereinafter referred to as "fixed length Probe"). Even if a fixed-length probe without a spring part is used for one of the first probe 101 and the second probe 102, the first probe 101 will still be stretched by the extension spring 12 of the other probe 10 to a predetermined value. Press it to touch the object to be inspected.

FIG. 8 shows an example of the electrical connection device 1 in which the probe 10 is used for the first probe 101 and the fixed-length probe 10B is used for the second probe 102. The state of measuring the object 2 using the electrical connection device 1 shown in FIG. 8 is shown in FIG. 9. As shown in FIG. 9, the tension spring 12 of the first probe 101 is extended by the thrust force received by the plunger 13 of the first probe 101 by abutting against the inspected body 2, and the first probe 101 and the first probe 101 The two probes 102 are electrically connected via the metal ball 15.

As the tension spring 12 of the first probe 101 is extended, the first probe 101 will contact the subject 2 with a predetermined pressing force. At this time, since the spring portion of the first probe 101 is the tension spring 12, the spring portion does not meander, and friction between the first probe 101 and the probe head 20 can be prevented.

By setting one of the first probe 101 and the second probe 102 as a fixed-length probe that is easy to manufacture, the cost of the electrical connection device 1 can be reduced. Furthermore, the second probe 102 may be the probe 10, and the first probe 101 may be a fixed-length probe. In addition, in the electrical connection between the first probe 101 and the second probe 102, a connecting member other than the metal ball 15 may be used, and the conductive film 14 may also be used as shown in FIG. 1.

[Second Implementation Type]

As shown in FIG. 10, the probe 10a of the second embodiment of the present invention is a pogo pin type in which a tension spring 12 is arranged inside the probe barrel 11. In the probe 10a, one end of the tension spring 12 is fixed to the base end of the plunger 13 arranged inside the probe barrel 11 at the fixing point P1. Extension spring The other end of 12 is fixed to the probe barrel 11 at a fixing point P2 closer to the tip of the plunger 13 than the base end of the plunger 13.

In addition, the probe 10a is further provided with a fixed plunger 40 whose tip portion is exposed from the other open end of the probe barrel 11. The fixed plunger 40 does not have a spring, and the length along the central axis direction is fixed. The fixed plunger 40 is connected to the probe barrel 11 at the junction point P40. The plunger 13 and the fixed plunger 40 are electrically connected inside the probe barrel 11. For example, the plunger 13 and the fixed plunger 40 are electrically connected via the probe barrel 11 having conductivity. The front end of the fixed plunger 40 is connected to the connection pad 31 of the wiring board 30.

The extension spring 12 of the probe 10a is a coil type extension spring. The plunger 13 passes through the inside of the tension spring 12 inside the probe barrel 11.

As shown in FIG. 11, the plunger 13 is pressed into the probe barrel 11 due to the thrust force F received by the plunger 13 by abutting against the object to be inspected by the tip portion. At this time, the tension spring 12 will expand, and the front end of the plunger 13 will come into contact with the subject under a predetermined pressure.

When the plunger 13 slides inside the probe barrel 11, the probe 10a that the extension spring 12 stretches and retracts prevents friction with the inner wall of the probe barrel 11 due to the snaking of the extension spring 12. Therefore, damage or insufficient sliding of the probe 10a can be reduced. The other parts are substantially the same as the first embodiment, and repeated descriptions are omitted.

[Other implementation types]

As mentioned above, although the present invention has been described in the form of implementation, the descriptions and drawings constituting a part of the disclosure should not be construed as limiting the present invention. Those with ordinary knowledge in the technical field to which the present invention pertains can understand various alternative implementation types, embodiments, and application technologies based on the disclosed content.

For example, in the first embodiment, although it has been described that the spring portions of the first probe 101 and the second probe 102 are examples of the tension spring 12, the spring portion of the first probe 101 can also be set to The extension spring 12 sets the spring portion of the second probe 102 as a pressing spring. In the measurement of the subject 2, due to contact The position of the base end of the second probe 102 on the connecting plate 31 is fixed, so the length of the spring portion of the second probe 102 that is stretched and retracted is short. Therefore, even if the pressing spring is used for the spring portion of the second probe 102, the spring portion still has less snaking, and the friction between the second probe 102 and the probe head 20 is less.

In this way, the present invention certainly covers various implementation types that are not described here.

1: Electrical connection device

2: Subject

10: Probe

11: Probe tube

12: Extension spring

13: Plunger

14: conductive film

20: Probe head

21: The first main surface

22: The second main surface

30: Wiring board

31: connecting plate

101: The first probe

102: second probe

P1, P2: fixed point

Claims (10)

A probe with: The tube-shaped probe barrel has a tension spring that expands and contracts along the central axis; and The plunger, the base end is located inside the probe barrel, and the front end is exposed from one of the open ends of the probe barrel; One end of the aforementioned tension spring is fixed to the base end of the aforementioned plunger; The other end of the tension spring is fixed to the probe barrel at a position closer to the tip than the base end of the plunger. The probe according to claim 1, wherein the extension spring is a region formed with a spiral cut through the side surface of the probe barrel. The probe according to claim 1, wherein the extension spring is arranged inside the probe barrel. The probe according to claim 3, wherein the extension spring is a coil type extension spring; the plunger is passed through the inside of the extension spring inside the probe barrel. The probe according to claim 3 or 4 is further provided with: a fixed plunger, the front end of which is exposed from the open end of the other side of the probe barrel, and the base end is located inside the probe barrel and runs along The length in the direction of the central axis is fixed; The plunger and the fixed plunger are electrically connected inside the probe barrel. An electrical connection device, which is provided with: At least one of the first probe and the second probe is the probe described in claim 1 or 2; and The probe head has a through hole that penetrates from the first main surface to the second main surface opposite to the first main surface, and the first probe is exposed to the first main surface in such a manner Insert the aforementioned through hole, and the aforementioned second probe is inserted into the aforementioned through hole in such a way that the front end portion is exposed on the aforementioned second main surface; The open end of the probe barrel for exposing the front end of the plunger is fixed to the opening of the through hole of the probe head; The first probe and the second probe are electrically connected inside the probe head. The electrical connection device according to claim 6, wherein a conductive film covers the wall surface of the through hole of the probe head; the first probe and the second probe are electrically connected via the conductive film. The electrical connection device according to claim 6, further comprising: a connection member having conductivity, which is arranged inside the through hole of the probe head; The base end of the first probe and the base end of the second probe are electrically connected via the connecting member in a state where the tension spring is extended. The electrical connection device according to claim 8, wherein the connection member is a spherical body that can freely move along the inner wall of the through hole. The electrical connection device according to claim 8, wherein the aforementioned connection member is a leaf spring.

Images