TW202134177A - 多晶矽的製造裝置及多晶矽的製造方法 - Google Patents

多晶矽的製造裝置及多晶矽的製造方法 Download PDF

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Publication number
TW202134177A
TW202134177A TW109138532A TW109138532A TW202134177A TW 202134177 A TW202134177 A TW 202134177A TW 109138532 A TW109138532 A TW 109138532A TW 109138532 A TW109138532 A TW 109138532A TW 202134177 A TW202134177 A TW 202134177A
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TW
Taiwan
Prior art keywords
valve
gas
corrosion
reaction furnace
discharge
Prior art date
Application number
TW109138532A
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English (en)
Chinese (zh)
Inventor
箱守明
梶田岳司
Original Assignee
日商德山股份有限公司
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Publication date
Application filed by 日商德山股份有限公司 filed Critical 日商德山股份有限公司
Publication of TW202134177A publication Critical patent/TW202134177A/zh

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
    • F16K5/06—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having spherical surfaces; Packings therefor

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Silicon Compounds (AREA)
TW109138532A 2019-11-21 2020-11-05 多晶矽的製造裝置及多晶矽的製造方法 TW202134177A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019210568 2019-11-21
JP2019-210568 2019-11-21

Publications (1)

Publication Number Publication Date
TW202134177A true TW202134177A (zh) 2021-09-16

Family

ID=75981185

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109138532A TW202134177A (zh) 2019-11-21 2020-11-05 多晶矽的製造裝置及多晶矽的製造方法

Country Status (3)

Country Link
JP (1) JPWO2021100415A1 (fr)
TW (1) TW202134177A (fr)
WO (1) WO2021100415A1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009123795A (ja) * 2007-11-13 2009-06-04 Hitachi Kokusai Electric Inc 半導体装置の製造方法及び基板処理装置
JP5616029B2 (ja) * 2009-03-17 2014-10-29 株式会社フジキン 調整弁装置
EP2583943B1 (fr) * 2010-06-16 2022-08-31 Shin-Etsu Chemical Co., Ltd. Procédé de fabrication de silicium polycristallin
CN102120577A (zh) * 2011-03-24 2011-07-13 天津大学 一种多晶硅还原炉预升温系统及预升温方法
CN203360011U (zh) * 2013-07-15 2013-12-25 青海黄河上游水电开发有限责任公司新能源分公司 一种氢还原炉尾气输送装置
CN104999732A (zh) * 2015-06-17 2015-10-28 苏州市大力电器有限公司 用于密封阀门的抗氧化合金材料

Also Published As

Publication number Publication date
WO2021100415A1 (fr) 2021-05-27
JPWO2021100415A1 (fr) 2021-05-27

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