TW202129290A - Press testing mechanism, testing apparatus and testing method - Google Patents

Abstract

A press testing mechanism includes a pressure device, a chuck, an adapter, at least a support structure and a force sensor. The chuck is spaced apart from the pressure device. The adapter is disposed between the pressure device and the chuck. The support structure connects the pressure device and the chuck. The force sensor is disposed between the adapter and the pressure device.

Description

Pressure testing mechanism, testing equipment and testing method

The present invention relates to a pressure testing mechanism, testing equipment and testing method, and more specifically, to a pressure testing mechanism, testing equipment and testing method for electrical testing.

The current pressure testing method for semiconductor wafers or semiconductor packaging structures is mainly to first suck the semiconductor wafer or semiconductor packaging structure onto the test seat of the test board through the picking head, and then adjust the floating air bag to apply pressure to the semiconductor wafer or semiconductor packaging structure to make the semiconductor The chip or semiconductor package structure is pressed against the corresponding probe on the test board for electrical testing. However, the pressure exerted by the floating airbag is not equal to the actual pressure of the semiconductor chip or semiconductor package structure. Therefore, when the semiconductor chip or semiconductor package structure is damaged after pressure testing, it is impossible to determine whether it is caused by excessive pressure testing. Damaged.

In one embodiment, a pressure measuring mechanism includes a pressure device, a suction jig, an adapter, at least one supporting structure, and a pressure sensor. The suction jig is spaced apart from the pressure device. The adapter is arranged between the pressure device and the suction jig. The supporting structure connects the pressure device and the suction jig. The pressure sensor is arranged between the adapter and the pressure device.

In one embodiment, a test equipment includes a material distributing device, a pressure test mechanism, a test circuit board, and at least one test seat. The pressure measuring mechanism is installed in the material distributing device. The pressure measurement mechanism includes a pressure device, a suction jig, an adapter, at least one supporting structure and a pressure sensor. The pressure device is connected to the material distributing device. The suction jig is spaced apart from the pressure device. The adapter is arranged between the pressure device and the suction jig. The supporting structure connects the pressure device and the suction jig. The pressure sensor is arranged between the adapter and the pressure device. The test circuit board corresponds to the pressure test mechanism and is used to test an object under test. The test seat is arranged on the test circuit board for accommodating the object to be tested, and the test seat corresponds to the suction jig of the pressure test mechanism.

In one embodiment, a test method includes: providing a pressure test mechanism, a test circuit board, and at least one test seat, the pressure test mechanism including a pressure device, a suction jig, an adapter, and a pressure sensor The suction jig and the pressure device are arranged at intervals, the adapter is arranged between the pressure device and the suction jig, and the pressure sensor is arranged between the adapter and the pressure device. Between the pressure devices, the test circuit board corresponds to the pressure test mechanism, the test seat is disposed on the test circuit board, and the test seat corresponds to the suction jig of the pressure test mechanism; The suction jig sucks an object to be tested into the test seat; and a motor is used to move the pressure device, the adapter and the suction jig downward to apply a pressure on the pressure sensor On the device and the object under test, and make the object under test contact a plurality of measuring probes of the test circuit board, and the pressure applied to the object under test is measured by the pressure sensor value.

Common reference numbers are used throughout the drawings and embodiments to indicate the same or similar components. It will be easier to understand the embodiments of the present invention from the following detailed description in conjunction with the accompanying drawings.

The following disclosure provides many different embodiments or examples for implementing different features of the provided subject matter. Specific examples of components and configurations are described below to clarify specific aspects of the invention. Of course, these components, values, operations, materials, and configurations are only examples and are not intended to be limiting. For example, in the description provided herein, the formation of the first feature on or on the second feature may include an embodiment in which the first feature and the second feature are formed or arranged in direct contact, and may also include additional features An embodiment may be formed or disposed between the first feature and the second feature so that the first feature and the second feature may not directly contact. In addition, the present invention may repeat reference numbers and/or letters in various examples provided herein. This repetition is for the purpose of simplification and clarity, and does not in itself indicate the relationship between the various embodiments and/or configurations discussed.

Fig. 1 shows a three-dimensional exploded view of a pressure measuring mechanism 1 according to an embodiment of the present invention. FIG. 2 shows a three-dimensional exploded view of the pressure measuring mechanism 1 of an embodiment of the present invention in different viewing angles (the viewing angle opposite to FIG. 1 ). Figure 3 shows the combined diagram of Figure 1. Fig. 4 shows the top view of Fig. 3. With reference to FIGS. 1 to 4, the pressure measuring mechanism 1 of the present invention includes a pressure device 10, a suction jig 20, an adapter 30, at least one supporting structure 40, a pressure sensor 50 and a sealing member 60.

The pressure device 10 includes a first seat body 11, a second seat body 12, a pneumatic member 13, a moving member 14 and a coupling seat 15. The first base body 11 has an air pressure hole 115, the air pressure hole 115 penetrates the first base body 11, and the air pressure hole 115 can be connected to an air pressure source for an air pressure input. The second seat body 12 is combined with the first seat body 11. In one embodiment, the second base body 12 can be fixed to the first base body 11 by screws or bolts.

The air pressure member 13 is disposed between the first seat body 11 and the second seat body 12. In one embodiment, the air pressure hole 115 of the first seat 11 corresponds to the air pressure member 13 so that the air pressure input through the air pressure hole 115 can directly push the air pressure member 13. In one embodiment, the air pressure member 13 may be an elastic sheet (for example, a silicone elastic sheet or a rubber elastic sheet). Therefore, the air pressure member 13 (ie, elastic sheet) can be bent downward when pushed by air pressure. action. That is, the middle part of the air pressure member 13 (ie, the elastic sheet) will bulge when pushed by air pressure to form an arc-shaped protrusion.

The moving part 14 is connected to the second base 12, and the moving part 14 corresponds to the air pressure part 13. In one embodiment, the moving member 14 penetrates the second base 12, and one end (or a surface) of the moving member 14 can abut the air pressure member 13, so that the air pressure member 13 When pushed by air pressure, the moving part 14 can be pushed synchronously. For example, when the middle part of the air pressure member 13 is pushed by air pressure to bulge, the middle part of the air pressure member 13 can abut against the middle part of the moving part 14 to push the moving part 14.

The coupling base 15 is connected to the moving part 14. In one embodiment, the coupling base 15 has a first surface 151, a second surface 152 and a plurality of accommodating grooves 153. The first surface 151 faces the second seat body 12. The second surface 152 is opposite to the first surface 151. The receiving groove 153 is recessed on the second surface 152.

The suction jig 20 and the pressure device 10 are spaced apart to suck an object to be tested. In one embodiment, the suction jig 20 has a surface 21, a suction hole 23 and a ring groove 25. The surface 21 faces the pressure device 10. The suction hole 23 penetrates the suction jig 20, and the suction hole 23 has a first opening 231 and a second opening 232. The first opening 231 is exposed on the surface 21. The second opening 232 is opposite to the first opening 231. The ring groove 25 is recessed on the surface 21, and the ring groove 25 surrounds the first opening 231 of the suction hole 23.

The adapter 30 is arranged between the pressure device 10 and the suction jig 20 to connect the pressure device 10 and the suction jig 20, and the adapter 30 can be connected to different The suction jig 20 of different sizes or specifications. In one embodiment, the adapter 30 has a first surface 31, a second surface 32, a side surface 33, a receiving groove 34 and an air suction channel 37. The first surface 31 faces the pressure device 10 (for example, the second surface 152 of the coupling base 15). The second surface 32 is opposite to the first surface 31. The side surface 33 extends between the first surface 31 and the second surface 32. The accommodating groove 34 is recessed on the first surface 31, and the accommodating groove 34 has a bottom surface 35 therein. The accommodating groove 34 is a blind hole, which does not penetrate the adapter 30.

The suction passage 37 communicates with the second surface 32 and the side surface 33, and the suction passage 37 has a first passage opening 371 and a second passage opening 372. The first passage opening 371 corresponds to the suction hole 23 of the suction jig 20 (for example, the first opening 231). The second passage opening 372 is exposed on the side surface 33. In one embodiment, the second passage opening 372 of the suction channel 37 can be connected to a suction device so that the vacuum suction force generated by the suction device can pass through the suction channel 37 and the suction device. The suction hole 23 of the suction jig 20 acts on the object to be tested. In an embodiment, the coupling seat 15 may be disposed between the second seat body 12 and the adapter 30.

FIG. 5 shows a three-dimensional schematic diagram of a supporting structure 40 according to an embodiment of the present invention. Referring to FIGS. 1, 4 and 5 for cooperation, the at least one supporting structure 40 connects the pressure device 10 and the suction jig 20, and the at least one supporting structure 40 penetrates the adapter 30. In one embodiment, the at least one supporting structure 40 includes a supporting sleeve 41 and a connecting member 42. The supporting sleeve 41 penetrates the adapter 30 so that the adapter 30 can move up and down along the supporting sleeve 41. The connecting member 42 (for example, a screw) penetrates the suction jig 20 and the supporting sleeve 41, and one end 421 of the connecting member 42 is connected to the coupling seat 15 of the pressure device 10, so as to The adapter 30 is limited between the pressure device 10 and the suction jig 20. Since the adapter 30 can move up and down along the support sleeve 41, the tightness problem of the connecting member 42 (for example, a screw) can be further eliminated.

Referring again to FIGS. 1, 2 and 4, the pressure sensor 50 is disposed between the adapter 30 and the pressure device 10. In one embodiment, the pressure sensor 50 may be disposed in the receiving groove 34 of the adapter 30. In addition, the pressure sensor 50 has a sensing protrusion 52, which faces the pressure device 10 (for example, the coupling base 15), and can be pressed by pressing the sensing protrusion 52. A pressure value is measured. In one embodiment, the pressure sensor 50 may be a load cell.

The sealing member 60 is disposed between the suction jig 20 and the adapter 30 to maintain the air suction hole 23 of the suction jig 20 and the adapter 30 The degree of vacuum between channels 37. In one embodiment, the sealing member 60 can be disposed in the ring groove 25 of the suction jig 20, and the sealing member 60 surrounds the air suction hole 23 of the suction jig 20 (for example: The first opening 231). In one embodiment, the sealing member 60 can be a sponge sealing ring or a plastic sealing ring.

In the present invention, the pressure sensor 50 is installed in the pressure measurement mechanism 1, which can measure the pressure value applied to the object under test in real time during the pressure measurement process, thereby avoiding the object under test due to excessive pressure of the pressure measurement. Damaged. And if the object under test is damaged after the pressure test, it can also be judged whether the damage of the object under test is caused by the excessive pressure of the pressure test or caused by the object's own factors.

Fig. 6 shows a three-dimensional exploded view of a pressure measuring mechanism 1a according to an embodiment of the present invention. The pressure measurement mechanism 1a of FIG. 6 is substantially the same as the pressure measurement mechanism 1 of FIGS. 1 to 5, and the difference is that the pressure measurement mechanism 1a of FIG. As shown in FIG. 6, the buffer member 70 is disposed between the pressure sensor 50 and the pressure device 10, and the sensing protrusion 52 of the pressure sensor 50 abuts the buffer member 70 . In one embodiment, at least a part of the buffer member 70 is disposed in the accommodating groove 34 of the adapter member 30. The buffer member 70 can prevent the pressure device 10 (for example: the coupling seat 15) from directly pressing against the sensing protrusion 52 of the pressure sensor 50, causing wear of the sensing protrusion 52 .

FIG. 7 shows a three-dimensional exploded view of a pressure measuring mechanism 1b according to an embodiment of the present invention. The pressure measuring mechanism 1b of FIG. 7 is substantially the same as the pressure measuring mechanism 1a of FIG. 6, and the difference lies in the configuration of the pressure sensor 50a of FIG. As shown in FIG. 7, the sensing protrusion 52 of the pressure sensor 50a is located in the accommodating groove 34 of the adapter 30, and the sensing protrusion 52 abuts against the container. The bottom surface 35 in the slot 34 is placed.

Fig. 8 shows a three-dimensional exploded view of a pressure measuring mechanism 1c according to an embodiment of the present invention. The pressure measuring mechanism 1c of FIG. 8 is substantially the same as the pressure measuring mechanism 1 of FIGS. 1 to 5, except that the adaptor 30a of FIG. As shown in FIG. 8, the adapter 30 a has a protruding portion 36, and the protruding portion 36 protrudes from the first surface 31. The pressure sensor 50c is disposed between the protruding portion 36 of the adapter 30a and the pressure device 10 (for example, the coupling seat 15). In one embodiment, the pressure sensor 50c can be attached to the protruding portion 36 of the adapter 30a, and the pressure sensor 50c can be a thin film pressure sensor (Thin film pressure sensor).

Fig. 9 shows a schematic diagram of a testing device 9 according to an embodiment of the present invention. FIG. 10 shows a top view of the arrangement of the test circuit board 4, the test socket 5, and the object under test 8 according to an embodiment of the present invention. With reference to Figures 9 and 10, the testing equipment 9 of the present invention includes a distributing device 2, a pressure measuring mechanism (for example: pressure measuring mechanism 1), a testing machine 3, a testing circuit board 4, and at least one testing seat 5 .

The pressure measuring mechanism (for example, the pressure measuring mechanism 1) is installed in the material distributing device 2. The pressure measuring mechanism may be the pressure measuring mechanism 1 to FIG. 4, the pressure measuring mechanism 1a of FIG. 6, the pressure measuring mechanism 1b of FIG. 7, or the pressure measuring mechanism 1c of FIG. As shown in FIG. 9, the pressure device 10 of the pressure measuring mechanism 1 is connected to a motor 6 of the distributing device 2.

9 and 10 again, the testing machine 3 corresponds to the motor 6 of the distributing device 2. In one embodiment, the testing machine 3 is arranged under the motor 6. The test machine 3 can set and adjust the test conditions for a test object 8 (for example, a semiconductor chip or a semiconductor package structure).

The test circuit board 4 is disposed on the test machine 3 and is electrically connected to the test machine 3. In addition, the test circuit board 4 corresponds to the pressure test mechanism 1 for testing the object 8 under test. In one embodiment, the test circuit board 4 has a plurality of measurement probes 7 for testing the object 8 under test.

The at least one test socket 5 is disposed on the test circuit board 4 for accommodating and positioning the object 8 to be tested, and the test socket 5 corresponds to the suction jig 20 of the pressure test mechanism 1 .

In one embodiment, the testing machine 3 can use a programming language to control the data acquisition action of the measurement probe 7 (including but not limited to: controlling the action of the pressure device 10 and receiving the measurement probe 7 test signal data).

The test method of the present invention is described in detail as follows, but it does not mean that the present invention is only limited to the content disclosed in these embodiments.

Refer to FIG. 11, which is a side view showing the configuration of the pressure test mechanism, the test board, and the test seat in the test method of the present invention. The step (a) of the test method of the present invention is to provide a pressure test mechanism, a test circuit board 4 and at least one test seat 5. The pressure measuring mechanism may be the pressure measuring mechanism 1 to FIG. 4, the pressure measuring mechanism 1a of FIG. 6, the pressure measuring mechanism 1b of FIG. 7, or the pressure measuring mechanism 1c of FIG. The following is a description of the testing method with the pressure testing mechanism 1 shown in FIGS. 1 to 4, but not limited to this.

As shown in FIGS. 1 to 4, the pressure measurement mechanism 1 includes a pressure device 10, a suction jig 20, an adapter 30, at least one supporting structure 40, a pressure sensor 50 and a sealing member 60.

The pressure device 10 includes a first seat body 11, a second seat body 12, a pneumatic member 13, a moving member 14 and a coupling seat 15. The first base body 11 has an air pressure hole 115, the air pressure hole 115 penetrates the first base body 11, and the air pressure hole 115 can be connected to an air pressure source for an air pressure input. The second seat body 12 is combined with the first seat body 11. The air pressure member 13 is disposed between the first seat body 11 and the second seat body 12. In one embodiment, the air pressure hole 115 of the first seat 11 corresponds to the air pressure member 13 so that the air pressure input through the air pressure hole 115 can directly push the air pressure member 13. The moving part 14 is connected to the second base 12, and the moving part 14 corresponds to the air pressure part 13. In one embodiment, one end of the moving member 14 can abut against the air pressure member 13 so that when the air pressure member 13 is pushed by air pressure, the moving member 14 can be pushed synchronously. The coupling base 15 is connected to the moving part 14.

The suction jig 20 and the pressure device 10 are spaced apart to suck an object to be tested. The adapter 30 is arranged between the pressure device 10 and the suction jig 20 to connect the pressure device 10 and the suction jig 20, and the adapter 30 can be connected to different The suction jig 20 of different sizes or specifications. The at least one supporting structure 40 connects the pressure device 10 and the suction jig 20, and the at least one supporting structure 40 penetrates the adapter 30.

The pressure sensor 50 is disposed between the adapter 30 and the pressure device 10. In one embodiment, the pressure sensor 50 may be disposed in a receiving groove 34 of the adapter 30. In addition, the pressure sensor 50 has a sensing protrusion 52, which faces the pressure device 10 (for example, the coupling base 15), and can be pressed by pressing the sensing protrusion 52. A pressure value is measured. In one embodiment, the pressure sensor 50 is a load cell. The sealing member 60 is disposed between the suction jig 20 and the adapter 30 to maintain the air suction hole 23 of the suction jig 20 and the adapter 30 The degree of vacuum between channels 37.

Referring again to FIG. 11, the pressure measuring mechanism 1 can be connected to a motor 6, and the motor 6 is used to move the pressure measuring mechanism 1. The test circuit board 4 corresponds to the pressure test mechanism 1. The at least one test socket 5 is disposed on the test circuit board 4, and the test socket 5 corresponds to the suction jig 20 of the pressure test mechanism 1. In one embodiment, as shown in FIG. 9, the test circuit board 4 can be set on a test machine 3 and is electrically connected to the test machine 3. In one embodiment, the test circuit board 4 has a plurality of measurement probes 7 for obtaining test data.

Refer to FIG. 12, which shows a schematic diagram of the suction fixture in the test method of the present invention sucking a test object into the test seat. The step (b) of the testing method of the present invention is to suck a test object 8 (for example, a semiconductor chip or a semiconductor package structure) into the test seat 5 by the sucking jig 20. In this step (b), the sucking and placing operation of the test object 8 is completed in cooperation with the motor 6 and the pressure device 10.

Refer to FIG. 13, which shows a schematic diagram of using a motor to move the pressure device, the adapter and the suction jig downward and apply a pressure on the pressure sensor and the object under test in the testing method of the present invention. Step (c) of the testing method of the present invention is to use the motor 6 to move the pressure device 10, the adapter 30, and the suction jig 20 downward to apply a pressure to the pressure sensor 50 (for example, the sensing protrusion 52) and the object to be measured 8, and the object to be measured 8 is brought into contact with the measuring probe 7 of the test seat 5, and by the pressure The sensor 50 measures the pressure value applied to the test object 8. In this step (c), an air pressure 92 can be used to drive the air pressure part 13 and the moving part 14 so that the moving part 14 moves the adapter part 30 and the suction jig 20 downward. , And then adjust the pressure value applied to the test object 8. Since the adapter 30 can move up and down along the at least one supporting structure 40 (for example: the supporting sleeve 41), the tightness problem of the connecting member 42 (for example: screws) can be further eliminated .

In one embodiment, the air pressure member 13 may be an elastic sheet (for example, a silicone elastic sheet or a rubber elastic sheet). Therefore, the air pressure member 13 (ie, the elastic sheet) will downward when pushed by the air pressure 92. Bending, and then pushing one end of the moving part 14 to move the moving part 14.

During the pressure measurement process, the pressure sensor 50 can instantly measure the pressure value applied to the object 8 to be measured, so as to avoid damage to the object 8 due to excessive pressure measurement. If the test object 8 is still found to be damaged after the test is completed, it can be determined that the test object 8 is caused by its own factors, rather than the excessive pressure of the pressure test.

The above-mentioned embodiments only illustrate the principles and effects of the present invention, and do not limit the present invention. Therefore, those skilled in the art can modify and change the above-mentioned embodiments without departing from the spirit of the present invention. The scope of rights of the present invention should be listed in the scope of patent application described later.

1: Pressure testing mechanism 2: Distributing device 3: Test machine 4: Test the circuit board 5: Test seat 6: Motor 7: Measuring probe 8: Object to be tested 9: Test equipment 10: Pressure device 11: The first block 12: The second block 13: pneumatic parts 14: Moving parts 15: Combination seat 20: draw fixture 21: Surface 23: Exhaust hole 25: ring groove 30: Adapter 30a: Adapter 31: The first surface 32: second surface 33: side 34: accommodating slot 35: Bottom 36: Protruding part 37: Exhaust channel 40: Supporting structure 41: Support sleeve 42: Connector 50: pressure sensor 50a: pressure sensor 50c: pressure sensor 52: Sensing convex part 60: Seal 70: Buffer 92: air pressure 115: Air pressure hole 151: First Surface 152: second surface 153: Containment Slot 231: The first opening 232: second opening 371: First Channel Port 372: Second Channel Port 421: One end of the connecting piece

When read in conjunction with the accompanying drawings, it is easy to understand the aspects of some embodiments of the present invention from the following detailed description. It should be noted that the various structures may not be drawn to scale, and the size of the various structures may be increased or decreased arbitrarily for clarity of discussion.

Fig. 1 shows a three-dimensional exploded view of a pressure measuring mechanism according to an embodiment of the present invention.

FIG. 2 shows a three-dimensional exploded view of a pressure measuring mechanism in an embodiment of the present invention in different viewing angles (a viewing angle opposite to that of FIG. 1).

Figure 3 shows the combined diagram of Figure 1.

Fig. 4 shows the top view of Fig. 3.

Fig. 5 shows a three-dimensional schematic diagram of a supporting structure according to an embodiment of the present invention.

Fig. 6 shows a three-dimensional exploded view of a pressure measuring mechanism according to an embodiment of the present invention.

Fig. 7 shows a three-dimensional exploded view of a pressure measuring mechanism according to an embodiment of the present invention.

Fig. 8 shows a three-dimensional exploded view of a pressure measuring mechanism according to an embodiment of the present invention.

Fig. 9 shows a schematic diagram of a test device according to an embodiment of the present invention.

FIG. 10 shows a top view of the arrangement of the test circuit board, the test socket, and the object under test according to an embodiment of the present invention.

Fig. 11 shows a side view of the arrangement of the pressure test mechanism, the test board and the test seat in the test method of the present invention.

FIG. 12 shows a schematic diagram of the suction fixture in the test method of the present invention sucking a test object into the test seat.

FIG. 13 shows a schematic diagram of using a motor to move the pressure device, the adapter and the suction jig downward and apply a pressure on the pressure sensor and the object under test in the testing method of the present invention.

1: Pressure testing mechanism

10: Pressure device

11: The first block

12: The second block

13: pneumatic parts

14: Moving parts

15: Combination seat

20: draw fixture

21: Surface

23: Exhaust hole

25: ring groove

30: Adapter

31: The first surface

32: second surface

33: side

34: accommodating slot

35: Bottom

37: Exhaust channel

40: Supporting structure

41: Support sleeve

42: Connector

50: pressure sensor

52: Sensing convex part

60: Seal

115: Air pressure hole

151: First Surface

152: second surface

231: The first opening

371: First Channel Port

372: Second Channel Port

421: One end of the connecting piece

Claims (19)

A pressure measurement mechanism, including: A pressure device; A suction jig, which is arranged spaced apart from the pressure device; An adapter, arranged between the pressure device and the suction jig; At least one supporting structure is connected to the pressure device and the suction jig; and a pressure sensor is arranged between the adapter and the pressure device. The pressure measurement mechanism of claim 1, wherein the pressure device includes a first seat body, a second seat body, an air pressure member, and a moving member, the first seat body has an air pressure hole, and the air pressure hole Through the first seat body, the second seat body is combined with the first seat body, the air pressure member is disposed between the first seat body and the second seat body, and the air pressure hole Corresponding to the pneumatic element, the moving element is connected to the second base body, and the moving element corresponds to the pneumatic element. Such as the pressure measurement mechanism of claim 2, wherein the pressure device further includes a coupling seat, the coupling seat is disposed between the second seat body and the adapter, and the coupling seat is connected to the mobile Pieces. Such as the pressure measurement mechanism of claim 3, wherein the coupling base has a surface and a plurality of accommodating grooves, the surface faces the adapter, and the accommodating groove is recessed on the surface. The pressure measurement mechanism of claim 1, wherein the adapter has a first surface and an accommodating groove, the first surface faces the pressure device, and the accommodating groove is recessed on the first surface , The pressure sensor is arranged in the accommodating groove of the adapter. The pressure measurement mechanism of claim 5, wherein the pressure sensor has a sensing protrusion, and the sensing protrusion is located in the accommodating groove of the adapter. For example, the pressure measurement mechanism of claim 5 further includes a buffer member, and the buffer member is arranged between the pressure sensor and the pressure device. The pressure measurement mechanism of claim 1, wherein the adapter has a first surface and a protruding portion, the first surface faces the pressure device, and the protruding portion protrudes from the first surface , The pressure sensor is arranged between the protruding part of the adapter and the pressure device. The pressure measurement mechanism of claim 1, wherein the adapter has a first surface, a second surface, a side surface, and a suction channel, the first surface faces the pressure device, and the second surface Relative to the first surface, the side surface extends between the first surface and the second surface, and the air suction channel communicates with the second surface and the side surface. According to the pressure measurement mechanism of claim 1, wherein the at least one supporting structure penetrates the adapter. The pressure measurement mechanism of claim 1, wherein the at least one supporting structure includes a supporting sleeve and a connecting piece, the supporting sleeve penetrates the adapter piece, and the connecting piece penetrates the suction jig and the connecting piece. The supporting sleeve, and one end of the connecting piece is connected with the pressure device. For example, the pressure measurement mechanism of claim 1 further includes a sealing element, and the sealing element is arranged between the suction jig and the adapter. A test equipment including: A feeding device; A pressure measuring mechanism installed in the material distributing device, the pressure measuring mechanism comprising: A pressure device connected to the distributing device; A suction jig, which is arranged spaced apart from the pressure device; An adapter, which is arranged between the pressure device and the suction jig; at least one support structure, which connects the pressure device and the suction jig; and a pressure sensor, which is arranged on the adapter Between the pressure device and the pressure device; a test circuit board corresponding to the pressure test mechanism for testing an object to be tested; and At least one test socket is arranged on the test circuit board for accommodating the object to be tested, and the test socket corresponds to the suction jig of the pressure test mechanism. The test equipment of claim 13, wherein the adapter has a first surface and a receiving groove, the first surface faces the pressure device, and the receiving groove is recessed on the first surface, The pressure sensor is arranged in the accommodating groove of the adapter. The test equipment of claim 13, wherein the adapter has a first surface and a protruding part, the first surface faces the pressure device, and the protruding part protrudes from the first surface, The pressure sensor is arranged between the protruding part of the adapter and the pressure device. The test equipment of claim 13, wherein the adapter has a first surface, a second surface, a side surface, and a suction channel, the first surface faces the pressure device, and the second surface is opposite On the first surface, the side surface extends between the first surface and the second surface, and the air suction channel communicates with the second surface and the side surface. A test method including: (a) Provide a pressure test mechanism, a test circuit board and at least one test seat. The pressure test mechanism includes a pressure device, a suction fixture, an adapter, and a pressure sensor. The pressure device is arranged at intervals, the adapter is arranged between the pressure device and the suction jig, the pressure sensor is arranged between the adapter and the pressure device, and the test The circuit board corresponds to the pressure test mechanism, the test seat is disposed on the test circuit board, and the test seat corresponds to the suction jig of the pressure test mechanism; (b) Use the suction jig to suck a test object into the test seat; and (c) Use a motor to move the pressure device, the adapter, and the suction jig downward to apply a pressure on the pressure sensor and the object to be measured, and make the The test object contacts a plurality of measurement probes of the test circuit board, and the pressure value applied to the test object is measured by the pressure sensor. Such as the test method of claim 17, wherein in the step (a), the pressure measurement mechanism further includes at least one support structure, and the at least one support structure connects the pressure device and the suction jig; in this step In (c), the adaptor moves up and down along the at least one supporting structure. The test method of claim 17, wherein in the step (a), the pressure device includes a first seat body, a second seat body, a pneumatic member, and a moving member, and the second seat body is coupled to the The first seat body, the air pressure member is disposed between the first seat body and the second seat body, the movable member is connected to the second seat body, and the movable member corresponds to the air pressure member ; And step (c) includes: (c1) Using an air pressure to drive the air pressure member and the moving member, so that the moving member moves the adapter and the suction jig downward.

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