TW202128249A - Ultraviolet irradiation device - Google Patents

Abstract

Provided is an ultraviolet irradiation device having a significantly smaller size than structures of the prior art. The ultraviolet irradiation device is provided with: a lamp house having a light extraction surface formed on at least one surface thereof; an excimer lamp housed inside the lamp house at a position away from the light extraction surface in a first direction and emitting ultraviolet light; a first electrode block disposed in contact with the outer surface of an arc tube of the excimer lamp; a second electrode block disposed in contact with the outer surface of the arc tube of the excimer lamp at a position away from the first electrode block in a second direction parallel to the tube axis of the excimer lamp; and a reflection member which is disposed inside the lamp house at a position located on the opposite side from the light extraction surface in the first direction and between the first electrode block and the second electrode block in the second direction and contains a material which is reflective with respect to the ultraviolet light emitted from the excimer lamp.

Description

Ultraviolet irradiation device

The present invention relates to an ultraviolet irradiation device.

Previously, a compact ultraviolet irradiation device equipped with an excimer lamp as a light source has been developed (refer to Patent Document 1 described later). In addition, the ultraviolet irradiation device disclosed in Patent Document 1 described below is mainly assumed to be used for the treatment of skin diseases. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] JP 2017-164417 A

[The problem to be solved by the invention]

FIG. 15 is a diagram schematically showing the structure of the small ultraviolet irradiation device disclosed in Patent Document 1. As shown in FIG. The ultraviolet irradiation device 100 includes a lamp tube accommodating part 103 housed in a housing 102 including a holding part 101, and a light irradiation window 104. An excimer lamp 110 that emits ultraviolet rays is housed in the tube receiving portion 103.

FIG. 16 is a schematic diagram showing the structure of the excimer lamp 110. The excimer lamp 110 has a cylindrical outer tube 121, which is arranged on the inner side of the outer tube 121 coaxially with the outer tube 121 and has an inner diameter smaller than that of the cylindrical inner tube 122 of the outer tube 121. The outer tube 121 and the inner tube 122 are sealed in the ends in the direction d1, and an annular light-emitting space is formed between them, and the light-emitting gas 123G is enclosed in the space.

The outer wall surface of the outer tube 121 is provided with a mesh or mesh outer electrode 124, and the inner wall surface of the inner tube 122 is provided with a film-shaped inner electrode 125 made of stainless steel or aluminum. The outer electrode 124 and the inner electrode 125 are respectively electrically connected to a power supply unit 126 capable of generating a high frequency AC voltage.

A high-frequency AC voltage is applied between the outer electrode 124 and the inner electrode 125 by the power supply unit 126, and a voltage is applied to the luminous gas 123G via the tube body of the outer tube 121 and the inner tube 122, and the discharge space is enclosed in the luminous gas 123G Generate discharge plasma. This excites the atoms of the luminescent gas 123G and becomes an excimer state. When the atoms transfer to the base state, excimer light will be generated.

However, the excimer lamp 110 illustrated in FIG. 16 is formed by arranging two types of tubes (121, 122) coaxially as described above. Therefore, the housing 102 that houses the excimer lamp 110 must ensure a certain size. As described above, the ultraviolet irradiation device 100 described in Patent Document 1 is assumed to be used in the treatment of skin diseases, restricting users and usage conditions, so even the shape and size shown in FIG. 15 have not become large in practice. problem.

However, for example, for general consumers in their homes, to sterilize places where bacteria are more likely to multiply, such as toilets, kitchens, bathrooms, shoes, etc., the size and weight that can be easily carried are better. If it is used for such an application, the structure of the ultraviolet irradiation device 100 including the excimer lamp 110 shown in FIG. 16 as a light source may cause practical problems.

In addition, the use of sterilization is mentioned in the above content, but it is not limited to the medical field. Even if it is used in general industrial applications, as long as a small ultraviolet irradiation device is realized, the installation place and the available place can be expanded. The range is very effective.

The subject of the present invention is in view of the foregoing subject, and the object is to provide an ultraviolet irradiation device that is significantly downsized compared to the previous structure. [Means to solve the problem]

The ultraviolet irradiation device of the present invention is characterized by having: The lamp room is connected to at least one side to form a light extraction surface; The excimer lamp is located in the lamp chamber, and is housed in a position spaced apart from the light extraction surface in a first direction, and emits ultraviolet rays; The first electrode block is arranged in such a way as to contact the outer surface of the luminous tube of the aforementioned excimer lamp; The second electrode block is arranged in a position spaced apart from the first electrode block in a second direction parallel to the tube axis of the excimer lamp and in contact with the outer surface of the light-emitting tube of the excimer lamp; and The reflecting member is arranged in the lamp chamber on the opposite side of the light extraction surface in the first direction, and at a position between the first electrode block and the second electrode block in the second direction, including the display The reflective material of the ultraviolet rays emitted by the excimer lamp.

The aforementioned ultraviolet irradiation device includes a first electrode block and a second electrode block contacting the outer surface of the arc tube of the excimer lamp. The electrode blocks are in contact with the outer surface of the luminous tube of the excimer lamp in positions separated from the tube axis direction of the excimer lamp, respectively. Therefore, the excimer lamp can be discharged by a simple straight tube structure, so there is no need to use a concentric tube that is generally used as a conventional excimer lamp. The structure in which the luminescent gas is sealed is the so-called "double tube structure".

As an example, the size of the arc tube of the excimer lamp included in the aforementioned ultraviolet irradiation device is such that the length in the tube axis direction (second direction) is 15 mm or more and 200 mm or less, and the outer diameter is 2 mm or more and 16 mm or less.

When a voltage is applied between the first electrode block and the second electrode block, light is mainly emitted in the arc tube of the excimer lamp located between the electrode blocks. If the ultraviolet rays generated by the light emission travel to the light extraction surface side, they will pass through the light extraction surface and be extracted to the outside of the ultraviolet irradiation device.

However, not all of the generated ultraviolet rays travel toward the light extraction surface, and some ultraviolet rays travel in the opposite direction of the light extraction surface. This ultraviolet system is not taken out from the light extraction surface, and if it is irradiated to the frame of the lamp house, the frame may be degraded.

On the other hand, the aforementioned ultraviolet irradiation device is installed in the lamp chamber, and a reflection member is provided at a position between the electrode blocks on the opposite side of the light extraction surface. Therefore, in the region sandwiched by the electrode block in the second direction, the ultraviolet rays generated by the excimer lamp and traveling to the opposite side of the light extraction surface are reflected by the reflective member, and the traveling direction is changed to the light extraction surface side. Therefore, the light extraction efficiency can be improved, and the deterioration of the frame of the lamp chamber can be suppressed.

The reflection member may have a plate shape, or may have a curved surface along the outer surface of the arc tube of the excimer lamp.

The reflective member is made of an insulating material so as to contact both the surface of the first electrode block facing the second electrode block and the surface of the second electrode block facing the first electrode block. The configuration is also possible.

According to the related structure, the amount of ultraviolet light reflected by the reflective member can be increased.

As the material of the reflective member exhibiting insulation and reflectivity to ultraviolet rays, fluororesin, ceramics, etc. can be used. As a more specific example of the reflective member, a member made of ceramic material, a member made of polytetrafluoroethylene (PTFE), a member made of ceramic or resin formed on the surface of SiO ₂ , Al ₂ O _3, etc. can be used The components of ceramic fine particles, the components of ceramic reflective layers such as dielectric multilayer films formed on the surface of substrates such as glass, etc.

The reflecting member covers the part of the excimer lamp in the region sandwiched between the first electrode block and the second electrode block in the second direction in the first direction from the side opposite to the light extraction surface The configuration is also possible.

According to the related structure, it is possible to substantially prevent ultraviolet rays from being irradiated to the area of the frame of the lamp chamber located on the opposite side of the light extraction surface. In addition, the space between the two electrode blocks is filled with an insulating reflective member. Therefore, it is very difficult for discharge to occur between the two electrodes on the outside of the arc tube of the excimer lamp, which has the effect of suppressing the generation of ozone. If ozone is generated, the generated ozone may degrade the frame of the lamp house. According to the aforementioned structure, the generation of ozone can be suppressed, and therefore, the progress of the deterioration of the frame can be suppressed more.

There are a plurality of the excimer lamps arranged in a third direction orthogonal to the first direction and the second direction; the first electrode block and the second electrode block are in contact with the plurality of standard The outer surfaces of the respective luminous tubes of the molecular lamps are arranged in such a way that one side crosses the plurality of the aforementioned excimer lamps; the aforementioned reflecting member is arranged to cover the positions opposite to all the plurality of the aforementioned excimer lamps in the first direction The area sandwiched by the first electrode block and the second electrode block in the second direction may also be arranged.

According to the related structure, a plurality of excimer lamps are installed in the lamp chamber, so high-output ultraviolet rays can be emitted from the light extraction surface. Then, in each excimer lamp, a reflective member is provided to cover an area facing the first direction with respect to the area sandwiched by the two electrode blocks, so that a larger amount of light can be guided to the light extraction surface.

The reflecting member may be arranged so as to contact the surfaces orthogonal to the first direction of both the first electrode block and the second electrode block.

According to the related structure, even when the ultraviolet irradiation device is transported, it is difficult for the reflecting member to deviate in position in the lamp chamber.

The aforementioned excimer lamp may emit ultraviolet light that belongs to the wavelength band above 190nm and below 225nm.

It is known that DNA exhibits the highest absorption characteristics around a wavelength of 260 nm. Therefore, ultraviolet light with a wavelength of 254 nm emitted from a low-pressure mercury lamp or the like has a bactericidal effect. On the other hand, it may have an adverse effect on the human body.

However, ultraviolet rays whose main emission wavelengths belong to the wavelength band of 190 nm or more and 225 nm or less are assumed to be absorbed in the stratum corneum of the skin even if they are irradiated to the skin of the human body and do not travel to the inner side (basal layer side). The keratinocyte cell line contained in the stratum corneum is in a dead state as a cell, so for example, when irradiated with ultraviolet light with a wavelength of 254nm, there is almost no risk of being absorbed by living cells such as the spinous layer, granular layer, and dermis, leading to damage to DNA. .

In addition, the ultraviolet rays in the wavelength band of 190 nm or more and 225 nm or less have a sterilization effect on the irradiated object. Therefore, the excimer lamp that emits ultraviolet light in the relevant wavelength band can be used for sterilization treatment of objects while minimizing the impact on the human body. Ultraviolet rays in this wavelength band can be generated by an excimer lamp containing luminescent gas containing KrCl, KrBr, or ArF.

Furthermore, in this specification, the "main emission wavelength" refers to a situation where the emission spectrum specifies the wavelength region Z(λ) for a certain wavelength λ±10nm, and all the integrated intensity in the emission spectrum shows an integral of more than 40% The wavelength λi of the intensity wavelength zone Z(λi). For example, an excimer lamp with luminous gas containing KrCl, KrBr, ArF, etc., has a very narrow half-width and only displays light intensity at a specific wavelength. Usually, the wavelength with the highest relative intensity (the main peak wavelength) is used as The main emission wavelength is also acceptable.

The reflecting member may be arranged at a position separated from both the first electrode block and the second electrode block in the first direction. [Effects of the invention]

The ultraviolet irradiation device according to the present invention can be greatly miniaturized compared with the previous structure.

The embodiment of the ultraviolet irradiation device of the present invention will be described with reference to the drawings as appropriate. In addition, each of the following drawings is a schematic diagram, and the size ratio on the drawing does not necessarily match the actual size ratio. Moreover, the size ratios are not necessarily the same among the various drawings.

Fig. 1 is a perspective view schematically showing the appearance of the ultraviolet irradiation device. Fig. 2 is a perspective view of the main body housing portion 2a and the cover portion 2b of the lamp chamber 2 of the ultraviolet irradiation device 1 disassembled from Fig. 1.

In each of the following figures, the description will be made with reference to the X direction as the extraction direction of the ultraviolet rays L1, the YZ plane as the plane orthogonal to the X direction, and the X-Y-Z coordinate system. In more detail, as will be described later with reference to the drawings following FIG. 2, the tube axis direction of the excimer lamp 3 is set to the Y direction, and the direction orthogonal to the X direction and the Y direction is set to the Z direction. The X direction corresponds to the "first direction", the Y direction corresponds to the "second direction", and the Z direction corresponds to the "third direction".

In addition, in the following description, when the direction of expression is distinguished between positive and negative directions, it is described with positive and negative signs like "+X direction" and "-X direction". In addition, when expressing directions without distinguishing between positive and negative directions, only the "X direction" is described. That is, in this specification, when only the "X direction" is described, both the "+X direction" and the "-X direction" are included. The same applies to the Y direction and the Z direction.

As shown in FIGS. 1 and 2, the ultraviolet irradiation device 1 includes a lamp chamber 2 in which a light extraction surface 10 is formed on one surface. The lamp chamber 2 includes a main body housing portion 2a and a cover portion 2b, and an excimer lamp 3, electrode blocks (11, 12), and a reflecting member 8 are housed in the main body housing portion 2a. In addition, in the present embodiment, a situation where four excimer lamps 3 (3a, 3b, 3c, 3d) are housed in the lamp chamber 2 will be described as an example (refer to FIG. 3). However, the excimer lamp 3 The number can be one, two, three, or more than five. The electrode blocks (11, 12) constitute electrodes for supplying power to each excimer lamp 3.

In the present embodiment, as shown in FIG. 2, an optical filter 21 is provided in a region constituting the light extraction surface 10 of the cover portion 2 b constituting a part of the lamp chamber 2. The characteristics of the optical filter 21 will be described later.

Figures 3 and 4 omit the illustration of the main body portion 2a constituting a part of the lamp chamber 2 from Figure 2 and only show the electrode blocks (11, 12) and the excimer lamp 3 (3a, 3b, 3c, 3d) And a perspective view of the reflective member 8. Figure 3 and Figure 4 differ only in viewing angles. In addition, FIG. 5 is a perspective view of the excimer lamp 3 and the reflection member 8 further omitted from FIG. 4.

As shown in FIGS. 3 and 4, the ultraviolet irradiation device 1 of the present embodiment includes four excimer lamps 3 (3a, 3b, 3c, 3d) arranged in the Z direction. In addition, two electrode blocks (11, 12) are arranged so as to contact the outer surface of the arc tube of each excimer lamp 3. Hereinafter, the electrode block 11 is appropriately referred to as the "first electrode block 11", and the electrode block 12 is referred to as the "second electrode block 12".

The first electrode block 11 and the second electrode block 12 are arranged at positions spaced apart in the Y direction. In the example shown in FIG. 5, the first electrode block 11 has a curved shape along the outer surface of the luminous tube of the excimer lamp 3 and the placement area 11a where the excimer lamp 3 is placed, and is formed in the opposite The excimer lamp 3 is isolated from a position in the Z direction, and is constituted by a tapered surface 11b inclined with respect to the YZ plane. Similarly, the second electrode block 12 also has a mounting area 12a and a tapered surface 12b.

Furthermore, the first electrode block 11 and the second electrode block 12 are made of a conductive material, and more desirably are made of a material showing reflectivity to ultraviolet rays emitted from the excimer lamp 3. As an example, both the first electrode block 11 and the second electrode block 12 are made of Al, Al alloy, stainless steel, or the like.

The first electrode block 11 and the second electrode block 12 are both in contact with the outer surface of the luminous tube of each excimer lamp 3 (3a, 3b, 3c, 3d) while straddling each excimer lamp 3 in the Z direction. Way to configure.

FIG. 6 is a schematic diagram showing the positional relationship of the excimer lamp 3, the electrode blocks (11, 12), and the reflective member 8, and corresponds to a schematic plan view of the excimer lamp 3 when viewed from the +Z direction. 7 is a schematic diagram showing the positional relationship of the excimer lamp 3, the electrode blocks (11, 12), and the reflective member 8, and corresponds to a schematic plan view when the excimer lamp 3 is viewed from the +X direction.

Furthermore, in FIG. 6, only the four excimer lamps 3 (3a, 3b, 3c, 3d) are shown, the excimer lamp 3a located on the most -Z side, and the other excimer lamps (3b, 3c, As shown in 3d), the excimer lamps (3b, 3c, 3d) are arranged in the +Z direction as described above.

The reflective member 8 includes a material showing reflectivity to ultraviolet rays L1 emitted from the excimer lamp. The reflective member 8 system further preferably exhibits insulation and high resistance to ultraviolet rays L1. As the reflecting member 8 that expresses such characteristics, for example, a member made of ceramic materials, a member made of fluororesin such as polytetrafluoroethylene (PTFE), and a member made of ceramic or resin can be formed with SiO on the surface. _2. Ceramic fine particles made of Al ₂ O _3, etc., and a ceramic reflective layer such as a dielectric multilayer film formed on the surface of a substrate such as glass.

In this embodiment, the reflecting member 8 is arranged so that a part of the position between the electrode blocks (11, 12) in the Y direction contacts the outer surface of the arc tube of the excimer lamp 3. In more detail, as shown in FIG. 7, the reflective member 8 is arranged so as to straddle all the excimer lamps 3 in the Z direction in a region sandwiched by the electrode blocks (11, 12) in the Y direction. Thereby, when the excimer lamp 3 is viewed in the +X direction, the area pinched by the electrode blocks (11, 12) is shielded by the reflective member 8, and the outer surface of the luminous tube of the excimer lamp 3 will not be exposed.

In addition, the reflective member 8 is arranged so as to contact both the surface 11c of the first electrode block 11 on the second electrode block 12 side and the surface 12c of the second electrode block 12 on the first electrode block 11 side. However, as described above, the reflective member 8 is made of an insulating material, so there is no short circuit between the first electrode block 11 and the second electrode block 12.

The excimer lamp 3 has a luminous tube with the Y direction as the tube axis direction. In a position spaced apart from the Y direction, the outer surface of the luminous tube of the excimer lamp 3 is in contact with each electrode block (11, 12). In the luminous tube of the excimer lamp 3, luminous gas 3G is enclosed. If a high-frequency AC voltage of, for example, about 10 kHz to 5 MHz is applied between the electrode blocks (11, 12), the arc tube of the excimer lamp 3 is passed through, and the aforementioned voltage is applied to the luminous gas 3G. At this time, discharge plasma is generated in the discharge space enclosed with the luminescent gas 3G, and the atoms of the luminescent gas 3G are excited to be in an excimer state. When the atoms are transferred to the base state, excimer light emission is generated.

The wavelength of the ultraviolet light L1 emitted from the excimer lamp 3 is determined depending on the substance of the luminescent gas 3G. For example, when KrCl is included as the luminescent gas 3G, the ultraviolet light L1 emitted from the excimer lamp 3 shows a spectrum with a main peak wavelength around 222 nm (see FIG. 8).

As the luminescent gas 3G, in addition to KrCl, KrBr, ArF, etc. can be used. When the luminescent gas 3G contains KrBr, ultraviolet rays L1 with a main peak wavelength around 207 nm are emitted from the excimer lamp 3 system. When the luminescent gas 3G contains ArF, ultraviolet rays L1 with a main peak wavelength around 193 nm are emitted from the excimer lamp 3 system. In any of these gas species, the excimer lamp 3 generates ultraviolet light L1 whose main peak wavelength belongs to a wavelength band of 190 nm or more and 225 nm or less. Furthermore, in addition to the aforementioned gas species, an inert gas such as argon (Ar) and neon (Ne) may be mixed.

When the luminescent gas 3G contains KrCl, as shown in Fig. 8, in the spectrum of ultraviolet L1, the light output is almost concentrated near 222nm, which is the main peak wavelength. However, the wavelength band above 240nm, which is concerned about the effect on the human body, is only The light output was also confirmed for a small amount. Therefore, in the region constituting the light extraction surface 10, an optical filter 21 is provided for the purpose of blocking light components in the relevant wavelength band. In other words, the optical filter 21 has a function of blocking ultraviolet rays of 240 nm or more and 300 nm or less.

Fig. 9 is a partial enlarged view of Fig. 6. Furthermore, in the mode of FIG. 9, the progress of the ultraviolet light L1 is added.

When a voltage is applied between the two electrode blocks (11, 12), as described above, the luminous gas 3G enclosed in the arc tube of the excimer lamp 3 emits light. Among the ultraviolet rays L1 generated by this light emission, the ultraviolet rays L1a traveling in the +X direction are directly emitted from the light extraction surface 10 to the outside of the ultraviolet irradiation device 1. On the other hand, the ultraviolet rays L1b traveling in the −X direction among the ultraviolet rays L1 are reflected by the reflecting member 8 and the traveling direction is changed to the +X direction, and then similarly emitted from the light extraction surface 10 to the outside of the ultraviolet irradiation device 1.

Assuming that in a situation where the reflecting member 8 is not provided, the ultraviolet rays L1b travel in the -X direction, and all are irradiated to the frame of the lamp house 2. As a result, the ultraviolet rays L1b are not taken out from the ultraviolet irradiation device 1 and may promote the deterioration of the frame of the lamp chamber 2. According to the ultraviolet irradiation device 1, the reflective member 8 is provided, so the extraction efficiency of the ultraviolet L1 extracted from the light extraction surface 10 can be improved, and the deterioration of the frame of the lamp chamber 2 can be suppressed.

[Example] The reflection member 8 is installed in the area pinched by the electrode blocks (11, 12) in the Y direction to verify the influence on the illuminance of the ultraviolet L1 taken out from the ultraviolet irradiation device 1.

Prepare 4 tubes with a length of 70 mm and an outer diameter of ϕ 6 mm in the tube axis direction (Y direction) as the luminous gas 3G, and an excimer lamp 3 _{filled with a mixed gas of Kr, Cl 2, Ar, and Ne.} Then, the four excimer lamps 3 were brought into contact with the electrode blocks (11, 12) made of Al which were arranged 7 mm apart in the Y direction. In addition, the distance between each excimer lamp 3 in the Z direction is set to 14 mm.

Under the aforementioned conditions, an AC voltage with a peak value of about 4kV and a frequency of 70kHz was applied between the electrode blocks (11, 12) to cause each excimer lamp 3 to generate a dielectric barrier discharge. The illuminance at the center of the 4 excimer lamps 3 that is 20mm away from the +X direction.

Under relevant conditions, in a situation where the reflecting member 8 made of PTFE with dimensions of 21mm×7mm×65mm in the X direction×Y direction×Z direction is arranged in the above-mentioned position with reference to Figs. 3-7, and In a situation where the reflecting member 8 is not arranged, the illuminance is compared. The results are shown in Table 1.

According to Table 1, it can be seen that by providing the reflective member 8, the light extraction efficiency is improved, and the illuminance on the irradiated surface is increased by 24%.

Furthermore, the reflecting member 8 may be arranged at a position separated from the outer surface of the arc tube of the excimer lamp 3 in the −X direction. As an example, as shown in FIG. 10, the reflective member 8 may be arranged so as to straddle the surface 11d on the -X side of the first electrode block 11 and 12d between the -X side of the second electrode block 12. As another example, as shown in FIG. 11, the electrode blocks (11, 12) have cutouts (11e, 12e), respectively, and may be arranged such that the reflective member 8 is inserted into the position of the cutouts (11e, 12e).

As another example, the reflective member 8 is shown in FIG. 12, and the same as the electrode blocks (11, 12), it may have a curved surface along the outer surface of the luminous tube of the excimer lamp 3. According to Fig. 12, the reflective member 8 can be embedded in each excimer lamp 3 (3a, 3b, 3c, 3d), and has a shape along the excimer lamp 3 (3a, 3b, 3c, 3d) outside the luminous tube Concavities (8a, 8b, 8c, 8d) of the shape of the surface. The reflecting member 8 is arranged between the electrode blocks (11, 12) in the Y direction. The reflecting member 8 ( Refer to Figure 13). FIG. 13 is a plan view which imitates FIG. 10 and FIG. 11 and schematically shows the state when the reflection member 8 of the shape shown in FIG. 12 is arranged.

In this way, between the electrode blocks (11, 12) closely contacted with the reflective member 8 made of an insulating member, the discharge can be suppressed between the electrode blocks (11, 12) in a position outside the excimer lamp 3 , Which can prevent the generation of ozone.

Furthermore, according to the configuration of the reflecting member 8 shown in FIGS. 6, 10, and 11, the effect of suppressing the occurrence of discharge at a position outside the excimer lamp 3 is compared to the configuration shown in FIG. 12 The effect is reduced, but it can be confirmed to a certain extent.

[Other embodiments] Hereinafter, other embodiments will be described.

<1> In the foregoing embodiment, it has been described that both the first electrode block 11 and the second electrode block 12 have tapered surfaces (11a, 11b). However, in the present invention, whether or not each electrode block has a tapered surface can be arbitrarily set. That is, in the shape of the reflecting member 8 shown in FIG. 12, the part other than the place where the excimer lamp 3 is inserted may be formed with a flat surface.

<2> In a situation where the ultraviolet irradiation device 1 includes a plurality of excimer lamps 3, the arrangement positions of two or more excimer lamps 3 in the X direction may be displaced.

<3> In the foregoing embodiment, it has been described that the ultraviolet irradiation device 1 is provided with the optical filter 21 on the light extraction surface 10. However, in the present invention, whether the ultraviolet irradiation device 1 is equipped with the optical filter 21 can be arbitrarily set. . In particular, when the ultraviolet irradiation device 1 is installed in a situation where the possibility of irradiating the ultraviolet L1 to the human body is infinitely low, the optical filter 21 may not be installed.

In addition, in the foregoing embodiment, the situation in which the main emission wavelength of the ultraviolet light L1 emitted from the ultraviolet irradiation device 1 belongs to the wavelength band of 190 nm or more and 225 nm or less has been described. However, the present invention does not exclude that the main emission wavelength exceeds 225 nm. The ultraviolet ones. For example, the ultraviolet irradiation device 1 may include an excimer lamp 3 that emits ultraviolet light L1 with a main peak wavelength of 307 nm using XeCl as the luminous gas 3G.

<4> In the foregoing embodiment, the situation in which the reflective member 8 contacts both the first electrode block 11 and the second electrode block 12 has been described. However, the present invention does not exclude the situation that the reflective member 8 does not contact the electrode blocks (11, 12).

For example, in FIG. 6, the reflective member 8 may be arranged in a position between the two electrode blocks (11, 12) so as not to contact the surfaces 11c and 12c.

As another example, as shown in FIG. 14, the reflective member 8 may be arranged at a position spaced apart from each electrode block (11, 12) in the -X direction. At this time, the reflection member 8 may be fixed to the inner side of the frame of the lamp house 2.

1: Ultraviolet irradiation device 2: Light room 2a: body shell part 2b: Lid 3: Excimer lamp 3a, 3b, 3c, 3d: Excimer lamp 3G: luminous gas 8: Reflective member 8a, 8b, 8c, 8d: recess 10: Light take-out surface 11: The first electrode block 11a: Placement area 11b: Cone 11c, 11d: the surface of the first electrode block 11e: Cutout of the first electrode block 12: The second electrode block 12a: Placement area 12b: Cone 12c, 12d: the surface of the second electrode block 12e: Cut out of the second electrode block 21: Optical filter 100: Ultraviolet irradiation device 101: Grip 102: Frame 103: Light tube receiving part 104: light irradiation window 110: Excimer light 121: Outer tube 122: Inside tube 123G: Luminous gas 124: Outer electrode 125: inner electrode 126: Power Supply Department L1: Ultraviolet L1a: Ultraviolet L1b: Ultraviolet

[Fig. 1] A schematic perspective view showing the appearance of the ultraviolet irradiation device. [Fig. 2] A perspective view of the main body housing part and the cover part of the lamp chamber of the ultraviolet irradiation device disassembled from Fig. 1. [FIG. 3] A perspective view schematically showing the structure of an electrode block, an excimer lamp, and a reflective member included in the ultraviolet irradiation device. [Fig. 4] A perspective view with a changed viewpoint from Fig. 3. [Fig. 5] The illustration of the excimer lamp and the reflecting member is omitted from Fig. 4, and a perspective view schematically showing the structure of the electrode block. [Fig. 6] A schematic plan view when the perspective view of Fig. 3 is viewed in the Z direction. [FIG. 7] A schematic plan view when the perspective view of FIG. 3 is viewed from the X direction on the opposite side of the light extraction surface. [Figure 8] An example of the emission spectrum of an excimer lamp in which the luminescent gas contains KrCl. [Fig. 9] A diagram showing the progress of ultraviolet rays is added to a part of the enlarged view of Fig. 6. [Fig. 10] A top view schematically showing other configurations of the reflective member. [FIG. 11] A top view schematically showing another configuration of the reflective member. [Fig. 12] A schematic perspective view showing other aspects of the reflective member. [FIG. 13] A plan view schematically showing the state of the reflective member in the shape of FIG. 12. [FIG. 14] A top view schematically showing another configuration of the reflective member. [Fig. 15] A schematic diagram showing the structure of a conventional compact ultraviolet irradiation device. [FIG. 16] A schematic diagram showing the structure of an excimer lamp mounted on the ultraviolet irradiation device shown in FIG. 15.

1: Ultraviolet irradiation device

2: Light room

10: Light take-out surface

L1: Ultraviolet

Claims (10)

An ultraviolet irradiation device, which is characterized by having: The lamp room is connected to at least one side to form a light extraction surface; The excimer lamp is located in the lamp chamber, and is housed in a position spaced apart from the light extraction surface in a first direction, and emits ultraviolet rays; The first electrode block is arranged in such a way as to contact the outer surface of the luminous tube of the aforementioned excimer lamp; The second electrode block is arranged in a position spaced apart from the first electrode block in a second direction parallel to the tube axis of the excimer lamp and in contact with the outer surface of the light-emitting tube of the excimer lamp; and The reflecting member is arranged in the lamp chamber on the opposite side of the light extraction surface in the first direction, and at a position between the first electrode block and the second electrode block in the second direction, including the display The reflective material of the ultraviolet rays emitted by the excimer lamp. The ultraviolet irradiation device described in claim 1, wherein: The reflective member is made of an insulating material so as to contact both the surface of the first electrode block facing the second electrode block and the surface of the second electrode block facing the first electrode block. Mode configuration. The ultraviolet irradiation device described in claim 2, wherein: The reflecting member covers the part of the excimer lamp in the region sandwiched between the first electrode block and the second electrode block in the second direction in the first direction from the side opposite to the light extraction surface Configuration. The ultraviolet irradiation device described in claim 3, wherein: Having a plurality of the aforementioned excimer lamps arranged in a manner of being spaced apart in a third direction orthogonal to the aforementioned first direction and the aforementioned second direction; The first electrode block and the second electrode block are arranged in such a way that they touch the outer surfaces of the respective luminous tubes of the plurality of excimer lamps while straddling the plurality of excimer lamps; The reflecting member is arranged in a position opposite to all of the excimer lamps in the first direction to cover an area sandwiched by the first electrode block and the second electrode block in the second direction. The ultraviolet irradiation device described in any one of claims 2 to 4, wherein: The reflecting member is arranged so as to contact a surface orthogonal to the first direction of both the first electrode block and the second electrode block. The ultraviolet irradiation device described in any one of claims 2 to 4, wherein: The reflecting member is arranged at a position separated from both the first electrode block and the second electrode block in the first direction. The ultraviolet irradiation device described in any one of claims 1 to 6, wherein: The aforementioned reflecting member is in the shape of a plate. The ultraviolet irradiation device described in any one of claims 1 to 4, wherein: The reflecting member has a curved surface along the outer surface of the arc tube of the excimer lamp. The ultraviolet irradiation device described in any one of claims 1 to 8, wherein: The aforementioned reflecting member is made of fluororesin or ceramics. The ultraviolet irradiation device described in any one of claims 1 to 9, wherein: The aforementioned excimer lamp emits ultraviolet rays whose main emission wavelength belongs to the wavelength band above 190nm and below 225nm.

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