JP6885765B2 - Discharge lamp and ozone generation method - Google Patents

Discharge lamp and ozone generation method Download PDF

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JP6885765B2
JP6885765B2 JP2017063805A JP2017063805A JP6885765B2 JP 6885765 B2 JP6885765 B2 JP 6885765B2 JP 2017063805 A JP2017063805 A JP 2017063805A JP 2017063805 A JP2017063805 A JP 2017063805A JP 6885765 B2 JP6885765 B2 JP 6885765B2
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discharge
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electrodes
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JP2018166091A (en
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小林　剛
剛 小林
今井　正人
正人 今井
芹澤　和泉
和泉 芹澤
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Orc Manufacturing Co Ltd
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Description

本発明は、エキシマランプなどの放電ランプに関し、特に、人に対して安全に低濃度オゾンを生成可能なランプ構成に関する。 The present invention relates to a discharge lamp such as an excimer lamp, and more particularly to a lamp configuration capable of safely generating low-concentration ozone for humans.

エキシマランプでは、放電容器の外表面などに電極対を配置し、放電容器内に希ガスなどを封入する、電極間に電圧を印加させることで誘電体バリア放電が生じ、放電容器からランプ外に向けて紫外線を放射する。紫外線照射によって生じるオゾンは、殺菌能力（酸化力）があるため、脱臭装置、除菌／殺菌装置などの光源としてエキシマランプを使用することができる。 In excimer lamps, electrode pairs are placed on the outer surface of the discharge container, and rare gas is sealed in the discharge container. By applying a voltage between the electrodes, dielectric barrier discharge occurs, and the discharge container moves out of the lamp. It emits ultraviolet rays toward it. Since ozone generated by ultraviolet irradiation has a sterilizing ability (oxidizing power), an excimer lamp can be used as a light source for a deodorizing device, a sterilizing / sterilizing device, and the like.

例えば、２つのエキシマランプを容器内に配置し、第１のエキシマランプから紫外線を照射してオゾンを生成させるとともに、第２のエキシマランプから異なる波長の紫外線を照射することで、活性酸素を生成する（特許文献１参照）。 For example, two excimer lamps are placed in a container, and the first excimer lamp irradiates ultraviolet rays to generate ozone, and the second excimer lamp irradiates ultraviolet rays of different wavelengths to generate active oxygen. (See Patent Document 1).

特開２００２−３１６０４１号公報Japanese Unexamined Patent Publication No. 2002-316041

殺菌、脱臭などを行う場合、その対象物に対して効果のある範囲でオゾンを生成すればよい。したがって、対象物のサイズや構成によっては、エキシマランプを小型化するのが望ましい。しかしながら、従来のエキシマランプでは、必要以上に高濃度（多量）のオゾンが生成されるので、低濃度（少量）のオゾンを生成するためには複雑なランプ点滅制御回路を必要としている。そのため、装置故障により連続点灯状態や過電力点灯状態となったときには、高濃度のオゾンが流出するおそれがある。また、高濃度オゾンの流出を防ぐために、オゾンセンサを用いる等の安全対策が必要となり、装置が大型化して大きな消費電力を伴う。 When sterilizing, deodorizing, etc., ozone may be generated within a range that is effective for the object. Therefore, it is desirable to reduce the size of the excimer lamp depending on the size and configuration of the object. However, since a conventional excimer lamp generates ozone having a higher concentration (a large amount) than necessary, a complicated lamp blinking control circuit is required to generate ozone having a low concentration (small amount). Therefore, there is a risk that high-concentration ozone will flow out when the device is in a continuous lighting state or an overpowered lighting state due to a device failure. Further, in order to prevent the outflow of high-concentration ozone, safety measures such as using an ozone sensor are required, and the device becomes large in size and consumes a large amount of power.

したがって、余剰なオゾンを生成させないように紫外線を照射することが可能なエキシマランプなどの放電ランプが求められる。 Therefore, a discharge lamp such as an excimer lamp capable of irradiating ultraviolet rays so as not to generate excess ozone is required.

本発明の放電ランプは、放電ガスが封入された筒状の放電容器と、放電容器の外周面に沿って、それぞれ軸方向に延びる一対の電極とを備える。例えば、放電容器の外径は、３ｍｍ〜１０ｍｍの範囲であり、放電容器の軸方向長さが、１０ｍｍ〜３０ｍｍの範囲であり、放電ガスが、０．１ｋＰａ〜３０ｋＰａの範囲内に定められた希ガスで構成することが可能である。 The discharge lamp of the present invention includes a tubular discharge container in which a discharge gas is sealed, and a pair of electrodes extending in the axial direction along the outer peripheral surface of the discharge container. For example, the outer diameter of the discharge container is in the range of 3 mm to 10 mm, the axial length of the discharge container is in the range of 10 mm to 30 mm, and the discharge gas is defined in the range of 0.1 kPa to 30 kPa. It can be composed of a rare gas.

本発明の放電ランプでは、放電容器内において局所的に生じた放電から放射された紫外線が、少なくとも一方の電極により遮られる。ここで、「局所的に生じた放電」とは、電極軸に関して、両端部側などに偏った放電を示す。 In the discharge lamp of the present invention, the ultraviolet rays radiated from the discharge locally generated in the discharge container are blocked by at least one electrode. Here, the “locally generated discharge” refers to a discharge that is biased toward both ends with respect to the electrode shaft.

本発明では、偏った放電による紫外線が電極によって遮光されるため、余剰のオゾン生成を抑えることができる。例えば、少なくとも一方の電極が、放電容器の軸方向もしくは径方向に関して偏って強い放電が生じる空間領域に対向する位置に配置されている。 In the present invention, since ultraviolet rays due to uneven discharge are blocked by the electrodes, excess ozone generation can be suppressed. For example, at least one of the electrodes is arranged at a position facing the spatial region where a strong discharge is generated in an axial direction or a radial direction of the discharge container.

例えば一対の電極が、放電容器の軸方向に沿って対向配置され、それぞれ、放電容器と面接触する筒状電極で構成され、筒状電極の電極軸方向長さが２ｍｍ〜１５ｍｍの範囲に定めることが可能である。 For example, a pair of electrodes are arranged so as to face each other along the axial direction of the discharge container, each of which is composed of a tubular electrode that makes surface contact with the discharge container, and the electrode axial length of the tubular electrode is defined in the range of 2 mm to 15 mm. It is possible.

本発明の他の態様のおける放電ランプは、放電ガスが封入された放電容器内で放電容器の軸方向もしくは径方向に関して偏って生じた強い放電から放電容器の外部に向けて放射された紫外線の少なくとも一部を遮ることによって局所的にオゾンを生成する。 The discharge lamp in another aspect of the present invention is a discharge lamp in which ultraviolet rays emitted toward the outside of the discharge container from a strong discharge generated unevenly in the axial direction or the radial direction of the discharge container in the discharge container filled with the discharge gas. It produces ozone locally by blocking at least part of it.

本発明の他の態様におけるオゾン生成方法は、放電ガスが封入された筒状の放電容器の外周面に沿ってそれぞれ軸方向に延びる一対の電極を配置し、局所的にオゾンが生成されるように、一対の電極の間に高周波電圧を印加することによって放電容器内において生じた放電から放射された紫外線を少なくとも一方の電極により遮る。 In the ozone generation method in another aspect of the present invention, a pair of electrodes extending in the axial direction are arranged along the outer peripheral surface of the tubular discharge container filled with the discharge gas so that ozone is locally generated. In addition, by applying a high-frequency voltage between the pair of electrodes, the ultraviolet rays radiated from the discharge generated in the discharge container are blocked by at least one electrode.

本発明によれば、不要なオゾンを生成させないように、局所的に紫外線を照射して、局所的にオゾンを生成することで、高濃度のオゾンが生成されて流出することを防ぐことができる。 According to the present invention, by locally irradiating ultraviolet rays to generate ozone locally so as not to generate unnecessary ozone, it is possible to prevent high-concentration ozone from being generated and flowing out. ..

本発明の実施形態である放電ランプの概略的側面図である。It is a schematic side view of the discharge lamp which is an embodiment of this invention. 放電ランプを端部側から見た概略的正面図である。It is a schematic front view which looked at the discharge lamp from the end side. 図２のラインＡ−Ａ’に沿った放電ランプの概略的断面図である。It is a schematic sectional view of the discharge lamp along the line AA'in FIG.

以下では、図面を参照して本発明の実施形態について説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図１は、本発明の実施形態である放電ランプの概略的側面図である。図２は、放電ランプを端部側から見た概略的正面図である。 FIG. 1 is a schematic side view of a discharge lamp according to an embodiment of the present invention. FIG. 2 is a schematic front view of the discharge lamp as viewed from the end side.

放電ランプ１０は、内部に放電空間Ｓを形成し、石英ガラスなどで成形される筒状の放電容器２０を備える。放電容器２０の両端部２０Ｔ１、２０Ｔ２側には、互いに極性の異なる一対の電極３０、４０が配置されている。放電ランプ１０は、ここでは小型エキシマランプとして構成されており、放電容器の軸方向長さＷは、１０ｍｍ〜３０ｍｍの範囲、放電容器２０の外径Ｄは、３ｍｍ〜１０ｍｍの範囲であり、一対の電極３０、４０の間の軸方向距離（電極間距離Ｌ）は、２ｍｍ〜１５ｍｍの範囲にそれぞれ設定することが可能である。 The discharge lamp 10 includes a tubular discharge container 20 having a discharge space S formed therein and formed of quartz glass or the like. A pair of electrodes 30 and 40 having different polarities are arranged on both ends 20T1 and 20T2 of the discharge container 20. The discharge lamp 10 is configured here as a small excimer lamp, and the axial length W of the discharge container is in the range of 10 mm to 30 mm, and the outer diameter D of the discharge container 20 is in the range of 3 mm to 10 mm. The axial distance between the electrodes 30 and 40 (distance L between the electrodes) can be set in the range of 2 mm to 15 mm, respectively.

例えば、放電容器の軸方向長さＷを２０ｍｍ、放電容器２０の外径Ｄを５．２ｍｍ、電極間距離Ｌを１０ｍｍに定めることができる。ただし、放電容器２０の軸方向長さＷは、一対の電極３０、４０の外側両端間の距離を表す。また、一対の電極３０、４０は同じ形状であり、例えば各電極の軸方向長さＭを３ｍｍ〜１０ｍｍ未満の範囲（例えば５ｍｍ）に定めることができる。 For example, the axial length W of the discharge container can be set to 20 mm, the outer diameter D of the discharge container 20 can be set to 5.2 mm, and the distance between electrodes L can be set to 10 mm. However, the axial length W of the discharge container 20 represents the distance between the outer ends of the pair of electrodes 30 and 40. Further, the pair of electrodes 30 and 40 have the same shape, and for example, the axial length M of each electrode can be set in a range of less than 3 mm to 10 mm (for example, 5 mm).

放電容器２０の放電空間Ｓには、キセノンガス１Ｔｏｒｒ〜２２５Ｔｏｒｒ（０．１ｋＰａ〜３０ｋＰａ、更に好ましくは７ｋＰａ〜２０ｋＰａ）が封入されている。一対の電極３０、４０には、直流電源部（図示せず）と接続される一対の導線（図示せず）が接続されており、一対の電極３０、４０間には高周波（１ｋＨｚ〜５００ｋＨｚ、更に好ましくは１ｋＨｚ〜１００ｋＨｚの範囲であり、例えば６０ｋＨｚ）の高電圧（５ｋＶ〜１０ｋＶ）が印加される。放電容器２０と電極３０、４０は、図示しない保持部材によってそれぞれ保持されている。 The discharge space S of the discharge container 20 is filled with xenon gas 1 Torr to 225 Torr (0.1 kPa to 30 kPa, more preferably 7 kPa to 20 kPa). A pair of conducting wires (not shown) connected to a DC power supply unit (not shown) are connected to the pair of electrodes 30 and 40, and a high frequency (1 kHz to 500 kHz) is connected between the pair of electrodes 30 and 40. More preferably, it is in the range of 1 kHz to 100 kHz, and a high voltage (5 kV to 10 kV) of, for example, 60 kHz) is applied. The discharge container 20 and the electrodes 30 and 40 are held by holding members (not shown), respectively.

図２に示すように、一対の電極３０、４０は、放電容器２０の外周面２０Ｓに沿って周方向全体に渡り密接する筒状電極として構成されており、光を透過するような隙間が設けられていない曲面状の電極部材によって構成されている。一対の電極３０、４０は、放電容器の軸方向Ｘに沿って対向配置されており、軸方向Ｘに対して互いに異なる極性をもつ電極配置となっている。なお、図２では、放電容器２０の肉厚部分を省略しているが、肉厚については、０．２ｍｍ〜４ｍｍの範囲（例えば１．５ｍｍ）に定めることができる。 As shown in FIG. 2, the pair of electrodes 30 and 40 are configured as tubular electrodes that are in close contact with each other along the outer peripheral surface 20S of the discharge container 20 in the entire circumferential direction, and are provided with a gap for transmitting light. It is composed of curved electrode members that are not discharged. The pair of electrodes 30 and 40 are arranged so as to face each other along the axial direction X of the discharge container, and have electrode arrangements having different polarities with respect to the axial direction X. Although the wall thickness portion of the discharge container 20 is omitted in FIG. 2, the wall thickness can be set in the range of 0.2 mm to 4 mm (for example, 1.5 mm).

一対の電極３０、４０に対して高周波電圧を印加すると、放電容器２０内において誘電体バリア放電が生じ、紫外線が放電容器２０の外部へ向けて放射される。本実施形態では、一対の電極３０、４０が放電容器２０の中央部を間に挟んで軸方向Ｘに沿って対向配置されていることによって、放電容器２０内において局所的な放電が生じる。以下、これについて説明する。 When a high-frequency voltage is applied to the pair of electrodes 30 and 40, a dielectric barrier discharge is generated in the discharge container 20, and ultraviolet rays are radiated to the outside of the discharge container 20. In the present embodiment, the pair of electrodes 30 and 40 are arranged to face each other along the axial direction X with the central portion of the discharge container 20 sandwiched between them, so that a local discharge occurs in the discharge container 20. This will be described below.

図３は、図２のラインＡ−Ａ’に沿った放電ランプの概略的断面図である。 FIG. 3 is a schematic cross-sectional view of the discharge lamp along the lines AA'of FIG.

図３に示すように、放電容器２０の中央部付近においては、細い領域（放電容器の中心軸付近のみ）で微弱な放電ＣＣが生じる。一方、一対の電極３０、４０で覆われている空間領域では、太い領域（放電容器の径方向全体）で強い放電ＣＣが生じる。放電容器２０内において、放電状態が電極３０、４０付近の空間領域と中央部付近の空間領域との間で相違して、放電が放電容器２０の両端部側に偏っていることにより、局所的な放電が放電容器２０内において生じる。 As shown in FIG. 3, in the vicinity of the central portion of the discharge container 20, a weak discharge CC is generated in a narrow region (only in the vicinity of the central axis of the discharge container). On the other hand, in the spatial region covered by the pair of electrodes 30 and 40, a strong discharge CC is generated in a thick region (the entire radial direction of the discharge container). In the discharge container 20, the discharge state differs between the space region near the electrodes 30 and 40 and the space region near the central portion, and the discharge is biased toward both ends of the discharge container 20 so that it is locally localized. Discharge occurs in the discharge container 20.

一対の電極３０、４０に覆われていない放電容器２０の中央部付近では、細い領域で微弱な放電が生じて、放射される紫外線の照度が低い。一方、放電容器２０の両端部側では、太い領域で強い放電ＣＣが生じて、放射される紫外線の照度は高いが、一対の電極３０、４０が放電容器の外周面２０Ｓを覆う位置に対向配置されて、放電から放射される紫外線を遮る遮光部となるため、強い放電ＣＣから放射された紫外線の一部が一対の電極３０、４０によって遮光される。電極以外の非導電性部材により紫外線を遮る遮光部として、放電容器の外周面を覆っても良い。 In the vicinity of the central portion of the discharge container 20 not covered by the pair of electrodes 30 and 40, a weak discharge occurs in a narrow region, and the illuminance of the emitted ultraviolet rays is low. On the other hand, on both ends of the discharge container 20, a strong discharge CC is generated in a thick region, and the radiated ultraviolet rays have high illuminance, but the pair of electrodes 30 and 40 are arranged to face each other at positions covering the outer peripheral surface 20S of the discharge container. Therefore, since it becomes a light-shielding portion that blocks the ultraviolet rays radiated from the discharge, a part of the ultraviolet rays radiated from the strong discharge CC is shielded by the pair of electrodes 30 and 40. The outer peripheral surface of the discharge container may be covered as a light-shielding portion that blocks ultraviolet rays by a non-conductive member other than the electrode.

その結果、放電容器２０の中央部付近から、局所的に紫外線が放電容器２０外へ放射される。これにより、中央部付近においてのみオゾンが生成し、不要なオゾンが生成されず、局所的にオゾンが生成される。 As a result, ultraviolet rays are locally radiated to the outside of the discharge container 20 from the vicinity of the central portion of the discharge container 20. As a result, ozone is generated only in the vicinity of the central portion, unnecessary ozone is not generated, and ozone is locally generated.

このように本実施形態によれば、筒状の放電容器２０を備えた放電ランプ１０に対して、互いに極性の異なる一対の電極３０、４０が放電容器２０の両端部２０Ｔ１、２０Ｔ２の外周面に沿って配置され、電圧を印加することにより、放電容器２０内において局所的な放電が生じ、局所的にオゾンが生成される。その結果、放電ランプを最大電力で点灯させ続けたとしても、生成できるオゾンの最大濃度は制限されているので、高濃度のオゾンが生成されて流出することを防ぐことができる。よって、安全で信頼性の高い放電ランプを提供することができる。 As described above, according to the present embodiment, with respect to the discharge lamp 10 provided with the tubular discharge container 20, a pair of electrodes 30 and 40 having different polarities are provided on the outer peripheral surfaces of both ends 20T1 and 20T2 of the discharge container 20. By being arranged along the line and applying a voltage, a local discharge is generated in the discharge container 20, and ozone is locally generated. As a result, even if the discharge lamp is continuously lit with the maximum power, the maximum concentration of ozone that can be generated is limited, so that it is possible to prevent high-concentration ozone from being generated and flowing out. Therefore, it is possible to provide a safe and highly reliable discharge lamp.

１０ 放電ランプ
２０ 放電容器
３０ 電極
４０ 電極 10 Discharge lamp 20 Discharge container 30 Electrode 40 Electrode

Claims (9)

放電ガスが封入された筒状の放電容器と、
それぞれ、前記放電容器の外周面に沿って軸方向に延び、前記放電容器の外周面を覆う一対の電極とを備え、
前記放電容器中央部を挟んで軸方向に沿って対向する前記一対の電極に対して高周波電圧が印加されると、前記放電容器内において、前記一対の電極の間の空間領域で相対的に弱い放電が生じ、各電極で覆われる空間領域で相対的に強い放電が生じることを特徴とする放電ランプ。 A tubular discharge container filled with discharge gas and
Each is provided with a pair of electrodes extending axially along the outer peripheral surface of the discharge container and covering the outer peripheral surface of the discharge container.
When a high-frequency voltage is applied to the pair of electrodes facing each other along the axial direction with the central portion of the discharge vessel in between, the space region between the pair of electrodes is relatively weak in the discharge vessel. A discharge lamp characterized in that an electric discharge is generated and a relatively strong electric discharge is generated in a space area covered with each electrode. 前記放電容器内において、前記一対の電極の間の空間領域では、軸付近に相対的に弱い放電が生じ、各電極で覆われる空間領域では、容器径方向全体の空間領域で相対的に強い放電が生じることを特徴とする請求項１に記載の放電ランプ。 In the discharge container, a relatively weak discharge occurs near the axis in the space region between the pair of electrodes, and in the space region covered by each electrode, a relatively strong discharge occurs in the entire space region in the radial direction of the container. discharge lamp according to claim 1, characterized in that occur. 前記一対の電極が、それぞれ、前記放電容器の外周面に対し周方向全体に渡って隙間がないように面接触する筒状電極で構成されることを特徴とする請求項１または２に記載の放電ランプ。 Said pair of electrodes, respectively, according to claim 1 or 2, characterized in said throughout the circumferential direction with respect to the outer peripheral surface of the discharge vessel consists of a cylindrical electrode to surface contact so that no gap Turkey Discharge lamp. 前記放電容器の外径が、３ｍｍ〜１０ｍｍの範囲であり、
前記放電容器の軸方向長さが、１０ｍｍ〜３０ｍｍの範囲であり、
前記放電ガスが、０．１ｋＰａ〜３０ｋＰａの範囲内に定められた希ガスであることを特徴とする請求項１乃至３のいずれかに記載の放電ランプ。 The outer diameter of the discharge container is in the range of 3 mm to 10 mm.
The axial length of the discharge container is in the range of 10 mm to 30 mm.
The discharge lamp according to any one of claims 1 to 3, wherein the discharge gas is a rare gas defined in the range of 0.1 kPa to 30 kPa. 放電ガスが封入された筒状の放電容器と、
それぞれ、前記放電容器の外周面に沿って軸方向に延び、前記放電容器の外周面を覆う一対の電極とを備え、
前記放電容器中央部を挟んで軸方向に沿って対向する前記一対の電極に対して高周波電圧が印加されることによって生じる、偏った放電によって、前記一対の電極の間の空間領域から前記放電容器外部へ向けて放射される紫外線照度が相対的に低く、各電極で覆われる空間領域から前記放電容器外部へ向けて放射される紫外線照度が相対的に高いことを特徴とするオゾン生成装置。 A tubular discharge container filled with discharge gas and
Each is provided with a pair of electrodes extending axially along the outer peripheral surface of the discharge container and covering the outer peripheral surface of the discharge container.
Due to the biased discharge generated by applying a high-frequency voltage to the pair of electrodes facing each other along the axial direction with the central portion of the discharge container in between, the discharge container is formed from the space region between the pair of electrodes. An ozone generator characterized in that the illuminance of ultraviolet rays radiated to the outside is relatively low, and the illuminance of ultraviolet rays radiated from a space area covered with each electrode to the outside of the discharge container is relatively high. 放電ガスが封入された筒状の放電容器の外周面に沿ってそれぞれ軸方向に延びる一対の電極を、前記放電容器中央部を挟んで軸方向に沿って対向するように、配置し、
前記一対の電極の間に高周波電圧を印加することによって、前記一対の電極の間の空間領域から前記放電容器外部へ向けて放射される紫外線照度が相対的に低く、各電極で覆われる空間領域から前記放電容器外部へ向けて放射される紫外線照度が相対的に高くなるように、偏った放電を生じさせることを特徴とするオゾン生成方法。 A pair of electrodes extending in the axial direction along the outer peripheral surface of the tubular discharge container filled with the discharge gas are arranged so as to face each other along the axial direction with the central portion of the discharge container interposed therebetween .
By applying a high frequency voltage between the front Symbol pair of electrodes, the ultraviolet irradiance emitted toward the discharge vessel from outside the space area between the pair of electrodes is relatively low, the space covered by each electrode An ozone generation method characterized in that a biased discharge is generated so that the illuminance of ultraviolet rays radiated from a region to the outside of the discharge container becomes relatively high. 前記放電容器の外周面を覆い、前記放電容器外部へ向けて放射される紫外線を遮る非導電性部材をさらに備えることを特徴とする請求項５に記載のオゾン生成装置。The ozone generator according to claim 5, further comprising a non-conductive member that covers the outer peripheral surface of the discharge container and further blocks ultraviolet rays radiated to the outside of the discharge container. 前記一対の電極に対し、１ｋＨｚ〜５００ｋＨｚの範囲の周波数で５ｋＶ〜１０ｋＶの範囲の電圧が印加されることを特徴とする請求項１乃至４のいずれかに記載の放電ランプ。The discharge lamp according to any one of claims 1 to 4, wherein a voltage in the range of 5 kV to 10 kV is applied to the pair of electrodes at a frequency in the range of 1 kHz to 500 kHz. エキシマランプであることを特徴とする請求項１乃至４のいずれかに記載の放電ランプ。The discharge lamp according to any one of claims 1 to 4, wherein the discharge lamp is an excimer lamp.
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