TW202128231A - Ultraviolet irradiation device - Google Patents

Ultraviolet irradiation device Download PDF

Info

Publication number
TW202128231A
TW202128231A TW109131786A TW109131786A TW202128231A TW 202128231 A TW202128231 A TW 202128231A TW 109131786 A TW109131786 A TW 109131786A TW 109131786 A TW109131786 A TW 109131786A TW 202128231 A TW202128231 A TW 202128231A
Authority
TW
Taiwan
Prior art keywords
electrode block
excimer lamp
fixing member
irradiation device
ultraviolet irradiation
Prior art date
Application number
TW109131786A
Other languages
Chinese (zh)
Other versions
TWI841786B (en
Inventor
柳生英昭
森学
Original Assignee
日商牛尾電機股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商牛尾電機股份有限公司 filed Critical 日商牛尾電機股份有限公司
Publication of TW202128231A publication Critical patent/TW202128231A/en
Application granted granted Critical
Publication of TWI841786B publication Critical patent/TWI841786B/en

Links

Images

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00Radiation therapy
    • A61N5/06Radiation therapy using light
    • A61N5/0613Apparatus adapted for a specific treatment
    • A61N5/0616Skin treatment other than tanning
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00Radiation therapy
    • A61N5/06Radiation therapy using light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122Incoherent waves
    • B01J19/123Ultraviolet light
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00Radiation therapy
    • A61N5/06Radiation therapy using light
    • A61N2005/0635Radiation therapy using light characterised by the body area to be irradiated
    • A61N2005/0642Irradiating part of the body at a certain distance
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00Radiation therapy
    • A61N5/06Radiation therapy using light
    • A61N2005/065Light sources therefor
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61NELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00Radiation therapy
    • A61N5/06Radiation therapy using light
    • A61N2005/0658Radiation therapy using light characterised by the wavelength of light used
    • A61N2005/0661Radiation therapy using light characterised by the wavelength of light used ultraviolet

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Toxicology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Electromagnetism (AREA)
  • Animal Behavior & Ethology (AREA)
  • Plasma & Fusion (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biophysics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Radiation-Therapy Devices (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

Provided is an ultraviolet irradiation device having a significantly smaller size than structures of the prior art. The ultraviolet irradiation device is provided with: a lamp house having a light extraction surface formed thereon; an excimer lamp housed at a position away from the light extraction surface in a first direction; a first electrode block disposed in contact with the outer surface of an arc tube of the excimer lamp from the opposite side from the light extraction surface in the first direction; a second electrode block disposed in contact with the outer surface of the arc tube of the excimer lamp from the opposite side from the light extraction surface in the first direction at a position away from the first electrode block in a second direction parallel to the tube axis of the excimer lamp; and a restraining member which is disposed at a position farther away from the second electrode block than the first electrode block in the second direction and/or at a position farther away from the first electrode block than the second electrode block in the second direction and abuts against the excimer lamp.

Description

紫外線照射裝置Ultraviolet irradiation device

本發明係關於紫外線照射裝置。The present invention relates to an ultraviolet irradiation device.

先前,開發有作為光源具備準分子燈,小型的紫外線照射裝置(參照後述專利文獻1)。再者,後述專利文獻1中揭示的紫外線照射裝置係主要假定皮膚疾病的治療的用途。 [先前技術文獻] [專利文獻]Previously, a compact ultraviolet irradiation device equipped with an excimer lamp as a light source has been developed (refer to Patent Document 1 described later). In addition, the ultraviolet irradiation device disclosed in Patent Document 1 described below is mainly assumed to be used for the treatment of skin diseases. [Prior Technical Literature] [Patent Literature]

[專利文獻1]日本特開2017-164417號公報[Patent Document 1] JP 2017-164417 A

[發明所欲解決之課題][The problem to be solved by the invention]

圖23係模式揭示專利文獻1所揭示之小型的紫外線照射裝置的構造的圖面。紫外線照射裝置100係具備收容於包含握持部101之框體102內的燈管收容部103,與光照射窗104。於燈管收容部103內,內藏射出紫外線的準分子燈110。FIG. 23 is a diagram schematically showing the structure of the compact ultraviolet irradiation device disclosed in Patent Document 1. FIG. The ultraviolet irradiation device 100 includes a lamp tube accommodating part 103 housed in a housing 102 including a holding part 101, and a light irradiation window 104. An excimer lamp 110 that emits ultraviolet rays is housed in the tube receiving portion 103.

圖24係模式揭示準分子燈110的構造的圖面。準分子燈110係具有圓筒狀的外側管121,與於外側管121的內側中配置於與外側管121的同軸上,內徑小於外側管121之圓筒狀的內側管122。外側管121與內側管122係於方向d1的端部中被密封,兩者之間構成圓環狀的發光空間,於該空間內封入發光氣體123G。FIG. 24 is a schematic diagram showing the structure of the excimer lamp 110. The excimer lamp 110 has a cylindrical outer tube 121, which is arranged on the inner side of the outer tube 121 coaxially with the outer tube 121 and has an inner diameter smaller than that of the cylindrical inner tube 122 of the outer tube 121. The outer tube 121 and the inner tube 122 are sealed in the ends in the direction d1, and an annular light-emitting space is formed between them, and the light-emitting gas 123G is enclosed in the space.

於外側管121的外壁面,設置有網狀或網格狀的外側電極124,於內側管122的內壁面,設置有由不鏽鋼或鋁所成之膜狀的內側電極125。外側電極124及內側電極125係分別與可產生高頻之交流電壓的電源部126電性連接。The outer wall surface of the outer tube 121 is provided with a mesh or mesh outer electrode 124, and the inner wall surface of the inner tube 122 is provided with a film-shaped inner electrode 125 made of stainless steel or aluminum. The outer electrode 124 and the inner electrode 125 are respectively electrically connected to a power supply unit 126 capable of generating a high frequency AC voltage.

藉由電源部126對外側電極124與內側電極125之間施加高頻之交流電壓,隔著外側管121與內側管122的管體對於發光氣體123G施加電壓,在封入發光氣體123G的放電空間內產生放電電漿。藉此激發發光氣體123G的原子,成為準分子狀態,該原子轉移至基底狀態時,會產生準分子發光。A high-frequency AC voltage is applied between the outer electrode 124 and the inner electrode 125 by the power supply unit 126, and a voltage is applied to the luminous gas 123G via the tube body of the outer tube 121 and the inner tube 122, and the discharge space is enclosed in the luminous gas 123G Generate discharge plasma. This excites the atoms of the luminescent gas 123G and becomes an excimer state. When the atoms transfer to the base state, excimer light will be generated.

然而,圖24所圖示的準分子燈110係如上所述,2種類的管體(121,122)配置於同軸上所成。因此,收容準分子燈110的框體102必須確保某種程度的大小。如上所述,專利文獻1所記載之紫外線照射裝置100係假定利用於皮膚疾病的治療,限制利用者及利用狀況,故至今即使是圖23所示的形狀、大小,實用上也不會成為大問題。However, the excimer lamp 110 illustrated in FIG. 24 is formed by arranging two types of tubes (121, 122) coaxially as described above. Therefore, the housing 102 that houses the excimer lamp 110 must ensure a certain size. As described above, the ultraviolet irradiation device 100 described in Patent Document 1 is assumed to be used for the treatment of skin diseases, restricting users and usage conditions, so even the shape and size shown in FIG. 23 have not become large in practice. problem.

但是,例如,一般消費者在家庭內,以對於廁所、廚房、浴室、鞋子中等,細菌比較容易繁殖的場所進行殺菌處理來說,可容易搬運程度的大小及重量為佳。假定利用於此種用途的話,作為光源具備圖23所示之準分子燈110的紫外線照射裝置100的構造中,有發生實用上問題的可能性。However, for example, for general consumers in their homes, to sterilize places where bacteria are more likely to multiply, such as toilets, kitchens, bathrooms, shoes, etc., the size and weight that can be easily carried are better. If it is used for such an application, the structure of the ultraviolet irradiation device 100 including the excimer lamp 110 shown in FIG. 23 as a light source may cause practical problems.

再者,在前述內容中有提到殺菌的用途,但是,不限於醫療現場,即使是利用於一般產業上的用途,只要實現小型的紫外線照射裝置的話,也可擴大可安裝處、可利用場所的範圍,故非常有效果。In addition, the use of sterilization is mentioned in the above content, but it is not limited to the medical field. Even if it is used in general industrial applications, as long as a small ultraviolet irradiation device is realized, the installation place and the available place can be expanded. The range is very effective.

本發明的課題係有鑑於前述的課題,目的為提供相較於先前構造大幅小型化的紫外線照射裝置。 [用以解決課題之手段]The subject of the present invention is in view of the foregoing subject, and the object is to provide an ultraviolet irradiation device that is significantly downsized compared to the previous structure. [Means to solve the problem]

關於本發明的紫外線照射裝置,其特徵為具備: 燈室,係形成光取出面; 準分子燈,係於前述燈室內,收容於對於前述光取出面隔開於第一方向的位置,發出紫外線; 第一電極塊,係以前述第一方向中從前述光取出面的相反側接觸前述準分子燈的發光管之外表面的方式配置; 第二電極塊,係以於對於前述第一電極塊隔開於與前述準分子燈之管軸平行的第二方向的位置中,前述第一方向中從前述光取出面的相反側接觸前述準分子燈的發光管之外表面的方式配置;及 固定構件,係配置於前述第二方向中比前述第一電極塊離前述第二電極塊更遠的位置、及前述第二方向中比前述第二電極塊離前述第一電極塊更遠的位置之至少一方,且抵接於前述準分子燈。Regarding the ultraviolet irradiation device of the present invention, it is characterized by having: The lamp room forms the light extraction surface; The excimer lamp is located in the lamp chamber, and is housed in a position spaced apart from the light extraction surface in a first direction, and emits ultraviolet rays; The first electrode block is arranged in such a way that it contacts the outer surface of the arc tube of the excimer lamp from the opposite side of the light extraction surface in the first direction; The second electrode block is spaced apart from the first electrode block in a second direction parallel to the tube axis of the excimer lamp. The configuration of the outer surface of the luminous tube of the molecular lamp; and The fixing member is arranged at a position farther from the second electrode block than the first electrode block in the second direction, and a position farther from the first electrode block than the second electrode block in the second direction At least one of them is in contact with the aforementioned excimer lamp.

前述紫外線照射裝置,係具備接觸準分子燈的發光管之外表面的第一電極塊與第二電極塊。該等電極塊係分別於隔開於準分子燈之管軸方向的位置中與準分子燈的發光管之外表面接觸。因此,準分子燈係可藉由簡單之直管型的構造來進行放電,故不需要採用作為先前的準分子燈所一般利用之同心圓狀地管體被雙重設置而在內側管與外側管之間密封發光氣體的構造,即所謂「雙重管構造」。The aforementioned ultraviolet irradiation device includes a first electrode block and a second electrode block contacting the outer surface of the arc tube of the excimer lamp. The electrode blocks are in contact with the outer surface of the luminous tube of the excimer lamp in positions separated from the tube axis direction of the excimer lamp, respectively. Therefore, the excimer lamp can be discharged by a simple straight tube structure, so there is no need to use a concentric tube that is generally used as a conventional excimer lamp. The structure in which the luminescent gas is sealed is the so-called "double tube structure".

作為一例,前述紫外線照射裝置所具備之準分子燈的管體的大小,係分別管軸方向(第二方向)的長度為15mm以上、200mm以下,外徑為2mm以上16mm以下。As an example, the size of the tube body of the excimer lamp included in the ultraviolet irradiation device is such that the length in the tube axis direction (second direction) is 15 mm or more and 200 mm or less, and the outer diameter is 2 mm or more and 16 mm or less.

對第一電極塊與第二電極塊之間施加電壓的話,主要在位於該電極塊之間的準分子燈的管體內發光。藉由該發光所生成的紫外線,係行進於光取出面側的話,會通過光取出面,被取出至紫外線照射裝置的外側。此時,第一電極塊與第二電極塊係都是在第一方向中從光取出面的相反側接觸準分子燈的發光管之外表面的構造,故該等電極塊可抑制朝向光取出面行進之紫外線的行進。When a voltage is applied between the first electrode block and the second electrode block, light is mainly emitted in the tube of the excimer lamp located between the electrode blocks. If the ultraviolet rays generated by the light emission travel to the light extraction surface side, they will pass through the light extraction surface and be extracted to the outside of the ultraviolet irradiation device. At this time, the first electrode block and the second electrode block are both in the first direction from the opposite side of the light extraction surface in contact with the outer surface of the light emitting tube of the excimer lamp, so these electrode blocks can suppress light extraction. The travel of the ultraviolet rays on the surface.

然而,如上所述,關於本發明的紫外線照射裝置係假定是小型的裝置,也可考量藉由利用者搬運。此時,第一電極塊與第二電極塊的雙方為在第一方向中從光取出面的相反側接觸準分子燈的發光管之外表面的構造時,假定在搬運時,燈室內的準分子燈的位置會偏離。例如,準分子燈的位置往第一方向偏離的話,無法充分確保與電極塊的接觸,有在施加電壓時無法形成充分的放電,或放電狀態變化之虞。又,相關問題並不限定於搬運時,即使在安裝於其他機械的狀況中,也可能因為該機械的運轉時所產生的振動等而發生。However, as described above, the ultraviolet irradiation device of the present invention is assumed to be a small device, and transportation by the user can also be considered. At this time, when both the first electrode block and the second electrode block have a structure that contacts the outer surface of the arc tube of the excimer lamp from the opposite side of the light extraction surface in the first direction, it is assumed that the accurate The position of the molecular lamp will deviate. For example, if the position of the excimer lamp is shifted in the first direction, the contact with the electrode block cannot be sufficiently ensured, and a sufficient discharge may not be formed when a voltage is applied, or the discharge state may change. In addition, the related problem is not limited to the time of transportation, and even in a situation where it is installed in another machine, it may occur due to vibration or the like generated during the operation of the machine.

有鑑於相關課題,本案發明者係首先為了在第一方向中從電極塊的相反側按壓準分子燈,針對安裝固定構件進行檢討。但是,在第一方向中對於電極塊之相反側的位置,係成為光取出面側的部分,於該位置安裝固定構件的話,有成為紫外線之行進的妨礙之虞。In view of the related issues, the inventor of the present application first conducted a review on the installation of the fixing member in order to press the excimer lamp from the opposite side of the electrode block in the first direction. However, in the first direction, the position on the opposite side of the electrode block is a part on the light extraction surface side. If the fixing member is attached to this position, it may hinder the progress of ultraviolet rays.

相對於此,依據本發明的紫外線照射裝置,固定構件配置於第二方向中比第一電極塊離第二電極塊更遠的位置、及第二方向中比第二電極塊離前述第一電極塊更遠的位置之至少一方。對兩電極塊施加電壓的話,於準分子燈內,在第二方向中被兩電極塊挾持的位置最強烈發光。固定構件係配置於比該發光區域更靠外側,故可大幅抑制成為從相關發光區域朝向光取出面之紫外線的妨礙之狀況。In contrast, according to the ultraviolet irradiation device of the present invention, the fixing member is arranged at a position farther from the second electrode block than the first electrode block in the second direction, and further from the first electrode than the second electrode block in the second direction. Block at least one of the farther positions. When a voltage is applied to the two electrode blocks, in the excimer lamp, the position pinched by the two electrode blocks in the second direction emits the strongest light. The fixing member is arranged on the outside of the light-emitting area, so it is possible to greatly suppress the obstruction of ultraviolet rays from the relevant light-emitting area toward the light extraction surface.

因此,依據前述構造,可實現一邊維持穩定的發光,一邊抑制光取出效率的降低之小型的紫外線照射裝置。Therefore, according to the aforementioned structure, it is possible to realize a compact ultraviolet irradiation device that suppresses a decrease in light extraction efficiency while maintaining stable light emission.

前述固定構件,係包含金屬製的彈性構件所成; 以前述第一方向中從前述第一電極塊及前述第二電極塊的相反側接觸前述準分子燈的發光管之外表面的方式配置亦可。The aforementioned fixing member is composed of an elastic member made of metal; The arrangement may be such that the outer surface of the arc tube of the excimer lamp is contacted from the opposite side of the first electrode block and the second electrode block in the first direction.

依據相關構造,可藉由彈性構件的彈性力,對於準分子燈,在第一方向中從兩電極塊的相反側賦予應力。結果,可讓準分子燈與電極塊的接觸狀態穩定化。又,利用以金屬製的構件構成固定構件,可抑制對於紫外線的劣化。According to the related structure, the excimer lamp can be given stress from opposite sides of the two electrode blocks in the first direction by the elastic force of the elastic member. As a result, the contact state between the excimer lamp and the electrode block can be stabilized. In addition, by configuring the fixing member with a metal member, it is possible to suppress deterioration with respect to ultraviolet rays.

前述固定構件,係配置於前述第二方向中對於前述第一電極塊及前述第二電極塊隔開的位置亦可。The fixing member may be arranged at a position separated from the first electrode block and the second electrode block in the second direction.

依據前述的構造,固定構件配置在對於電極塊隔開的位置,故可防止固定構件成為放電的起點一事。結果,可抑制放電狀態成為不穩定之狀況。According to the aforementioned structure, the fixing member is arranged at a position separated from the electrode block, so that the fixing member can be prevented from becoming the starting point of discharge. As a result, the discharge state can be suppressed from becoming unstable.

前述固定構件,係利用金屬製的板材之一部分彎曲,具有平坦部與彎曲部所成,並且前述彎曲部構成前述彈性構件; 前述燈室,亦可具有: 第一殼體,係形成可嵌入前述固定構件的前述平坦部的溝部,及前述光取出面所成;及 第二殼體,係安裝前述第一電極塊及前述第二電極塊所成。The aforementioned fixing member is formed by bending a part of a metal plate and having a flat portion and a curved portion, and the aforementioned curved portion constitutes the aforementioned elastic member; The aforementioned lamp room may also have: The first housing is formed by forming a groove that can be inserted into the flat portion of the fixing member, and the light extraction surface; and The second housing is formed by installing the first electrode block and the second electrode block.

依據前述構造,以對於第一殼體嵌入固定構件的平坦部,並且對於安裝電極塊的第二殼體,發光管的外表面接觸兩電極塊之方式配置準分子燈的狀態下,利用使兩殼體一體化,可在讓準分子燈穩定接觸電極塊的狀態下,安裝於燈室內。亦即,可藉由簡易的作業,製造放電狀態穩定之小型的紫外線照射裝置。又,可不使用接著劑,將固定構件安裝於第一殼體,故即使發光狀態持續,也可抑制固定構件從第一殼體脫離。According to the foregoing configuration, in a state where the excimer lamp is arranged in such a way that the first housing is fitted into the flat portion of the fixing member, and the second housing where the electrode block is mounted, the outer surface of the arc tube is in contact with the two electrode blocks. The shell is integrated, and the excimer lamp can be installed in the lamp chamber while stably contacting the electrode block. That is, it is possible to manufacture a compact ultraviolet irradiation device with a stable discharge state by simple operations. In addition, the fixing member can be attached to the first housing without using an adhesive. Therefore, even if the light-emitting state continues, the fixing member can be prevented from being detached from the first housing.

前述固定構件,係於前述彎曲部的一部分形成縫隙,在與前述第一方向及前述第二方向正交的第三方向中挾持前述縫隙之2處以上的位置,接觸於前述準分子燈之發光管的外表面亦可。The fixing member forms a slit in a part of the curved portion, and pinches two or more positions of the slit in a third direction orthogonal to the first direction and the second direction, and is in contact with the light emission of the excimer lamp. The outer surface of the tube can also be used.

依據相關構造,可對於準分子燈從光取出面側在複數處朝向電極塊按壓。藉此,提升使準分子燈對於電極塊穩定接觸的效果。According to the related structure, the excimer lamp can be pressed toward the electrode block at a plurality of positions from the light extraction surface side. Thereby, the effect of stably contacting the excimer lamp with the electrode block is improved.

前述固定構件,係具有: 緊固部,係對於前述第一電極塊及前述第二電極塊的至少一方,在前述第一方向中從前述光取出面側緊固; 於前述第二方向中比前述緊固部更靠外側的位置中,從前述光取出面側接觸於前述準分子燈的發光管的外表面亦可。The aforementioned fixing member has: The fastening portion is for fastening at least one of the first electrode block and the second electrode block from the light extraction surface side in the first direction; In a position on the outside of the fastening portion in the second direction, the outer surface of the arc tube of the excimer lamp may be contacted from the light extraction surface side.

即使是相關構造,固定構件係為在比電極塊更靠外側的位置,接觸準分子燈的發光管之外表面的構造,故難以妨礙朝向光取出面行進之紫外線。因此,可實現一邊維持穩定的發光,一邊抑制光取出效率的降低之小型的紫外線照射裝置。Even with the related structure, the fixing member is located outside the electrode block and contacts the outer surface of the arc tube of the excimer lamp, so it is difficult to hinder the ultraviolet rays traveling toward the light extraction surface. Therefore, it is possible to realize a compact ultraviolet irradiation device that suppresses a decrease in light extraction efficiency while maintaining stable light emission.

作為更具體的一例,前述固定構件,係具有利用金屬製的板材之一部分彎曲,嵌入前述準分子燈的凹部,與在前述第二方向中從前述緊固部側朝向前述凹部側延伸的連結部所成; 前述連結部,係形成於對於前述凹部,往與前述第一方向及前述第二方向正交的第三方向變位的位置亦可。As a more specific example, the fixing member has a concave portion in which a part of a metal plate is bent and inserted into the excimer lamp, and a connecting portion extending from the fastening portion side to the concave portion side in the second direction Made The connecting portion may be formed at a position where the concave portion is displaced in a third direction orthogonal to the first direction and the second direction.

又,前述紫外線照射裝置係具有以隔開於與前述第一方向及前述第二方向正交的第三方向之方式配置的複數前述準分子燈; 至少一個前述固定構件以對於複數前述準分子燈接觸之方式構成亦可。In addition, the ultraviolet irradiation device has a plurality of the excimer lamps arranged in a manner of being spaced apart in a third direction orthogonal to the first direction and the second direction; At least one of the aforementioned fixing members may be configured to be in contact with a plurality of the aforementioned excimer lamps.

依據相關構造,於燈室內搭載複數準分子燈,故可從光取出面射出高輸出的紫外線。然後,至少一個固定構件以抑制對於複數準分子燈往第一方向的變位之方式設置,故可實現可一邊減少零件數量,一邊維持穩定之發光的紫外線照射裝置。 [發明的效果]According to the related structure, a plurality of excimer lamps are installed in the lamp chamber, so high-output ultraviolet rays can be emitted from the light extraction surface. Then, at least one fixing member is arranged in a manner to suppress the displacement of the plurality of excimer lamps in the first direction, so it is possible to realize an ultraviolet irradiation device that can reduce the number of parts while maintaining stable light emission. [Effects of the invention]

依據本發明,可實現一邊維持穩定的發光,一邊抑制光取出效率的降低之小型的紫外線照射裝置。According to the present invention, it is possible to realize a compact ultraviolet irradiation device that suppresses a decrease in light extraction efficiency while maintaining stable light emission.

針對本發明的紫外線照射裝置的實施形態,適當參照圖面來進行說明。再者,以下的各圖面係模式圖示者,圖面上的尺寸比與實際的尺寸比不一定一致。又,於各圖面之間,尺寸比不一定一致。The embodiment of the ultraviolet irradiation device of the present invention will be described with reference to the drawings as appropriate. In addition, each of the following drawings is a schematic diagram, and the size ratio on the drawing does not necessarily match the actual size ratio. In addition, the size ratios are not necessarily the same among the drawings.

[第一實施形態] 圖1係模式揭示紫外線照射裝置之外觀的立體圖。圖2係從圖1分解紫外線照射裝置1的燈室2之本體殼體部22與蓋子部23的立體圖。再者,在本實施形態中,如後述般,本體殼體部22係更包含第一殼體22a與第二殼體22b所構成。[First Embodiment] Fig. 1 is a perspective view schematically showing the appearance of the ultraviolet irradiation device. FIG. 2 is a perspective view of the main body housing portion 22 and the cover portion 23 of the lamp chamber 2 of the ultraviolet irradiation device 1 disassembled from FIG. 1. Furthermore, in this embodiment, as described later, the main body housing portion 22 further includes a first housing 22a and a second housing 22b.

在以下的各圖中,參照將紫外線L1的取出方向設為X方向,將與X方向正交的平面設為YZ平面,參照X-Y-Z座標系進行說明。更詳細來說,如參照圖2之後的圖面所後述般,將準分子燈3的管軸方向設為Y方向,將與X方向及Y方向正交的方向設為Z方向。X方向對應「第一方向」,Y方向對應「第二方向」,Z方向對應「第三方向」。In each of the following figures, the description will be made with reference to the X direction as the extraction direction of the ultraviolet rays L1, the YZ plane as the plane orthogonal to the X direction, and the X-Y-Z coordinate system. In more detail, as will be described later with reference to the drawings following FIG. 2, the tube axis direction of the excimer lamp 3 is set to the Y direction, and the direction orthogonal to the X direction and the Y direction is set to the Z direction. The X direction corresponds to the "first direction", the Y direction corresponds to the "second direction", and the Z direction corresponds to the "third direction".

又,在以下的說明中,在表現方向時區別正負的朝向時,如「+X方向」、「-X方向」般,附加正負的符號記載。又,在不區別正負的朝向來表現方向時,僅記載為「X方向」。亦即,於本說明書中,在僅記載為「X方向」時,包含「+X方向」與「-X方向」雙方。關於Y方向及Z方向也相同。In addition, in the following description, when the direction of expression is distinguished between positive and negative directions, it is described with positive and negative signs like "+X direction" and "-X direction". In addition, when expressing directions without distinguishing between positive and negative directions, only the "X direction" is described. That is, in this specification, when only the "X direction" is described, both the "+X direction" and the "-X direction" are included. The same applies to the Y direction and the Z direction.

如圖1及圖2所示,紫外線照射裝置1係具備於一方之面形成光取出面10的燈室2。燈室2係具備本體殼體部22與蓋子部23,於本體殼體部22內,收容準分子燈3與電極塊(11,12)。再者,在本實施形態中,舉出於燈室2內收容4根準分子燈3(3a,3b,3c,3d)之狀況為例進行說明(參照圖3),但是,準分子燈3的數量即使1根亦可,2根、3根或5根以上亦可。電極塊(11,12)係構成用以對於各準分子燈3供電的電極。As shown in FIGS. 1 and 2, the ultraviolet irradiation device 1 includes a lamp chamber 2 in which a light extraction surface 10 is formed on one surface. The lamp chamber 2 is provided with a main body housing portion 22 and a cover portion 23, and the excimer lamp 3 and electrode blocks (11, 12) are housed in the main body housing portion 22. In addition, in the present embodiment, a situation where four excimer lamps 3 (3a, 3b, 3c, 3d) are housed in the lamp chamber 2 will be described as an example (refer to FIG. 3). However, the excimer lamp 3 The number can be one, two, three, or more than five. The electrode blocks (11, 12) constitute electrodes for supplying power to each excimer lamp 3.

在本實施形態中,如圖2所示,於構成蓋子部23的光取出面10的區域,設置光學濾光片21。關於該光學濾光片21的特性,於後敘述。In this embodiment, as shown in FIG. 2, an optical filter 21 is provided in a region constituting the light extraction surface 10 of the cover part 23. The characteristics of the optical filter 21 will be described later.

圖3及圖4係從圖2省略本體殼體部22的圖示,僅圖示電極塊(11,12)及準分子燈3(3a,3b,3c,3s)的立體圖。圖3與圖4僅觀察角度不同。又,圖5係從圖4進而省略準分子燈3的圖示的立體圖。3 and 4 are perspective views of the main body housing portion 22 omitted from FIG. 2 and only the electrode blocks (11, 12) and the excimer lamp 3 (3a, 3b, 3c, 3s) are shown. Figure 3 and Figure 4 differ only in viewing angles. Moreover, FIG. 5 is a perspective view in which the illustration of the excimer lamp 3 is further omitted from FIG. 4.

如圖3及圖4所示,本實施形態的紫外線照射裝置1係具備隔開於Z方向配置的4根準分子燈3(3a,3b,3c,3d)。又,以接觸各準分子燈3的發光管之外表面的方式,配置2個電極塊(11,12)。以下,適當將位於-Y側的電極塊11稱為「第一電極塊11」,將位於+Y側的電極塊12稱為「第二電極塊12」。As shown in FIGS. 3 and 4, the ultraviolet irradiation device 1 of the present embodiment includes four excimer lamps 3 (3a, 3b, 3c, 3d) arranged in the Z direction. In addition, two electrode blocks (11, 12) are arranged so as to contact the outer surface of the arc tube of each excimer lamp 3. Hereinafter, the electrode block 11 located on the -Y side is appropriately referred to as the "first electrode block 11", and the electrode block 12 located on the +Y side is referred to as the "second electrode block 12" as appropriate.

第一電極塊11與第二電極塊12係配置於隔開於Y方向的位置。在圖5所示的範例中,第一電極塊11係具有呈沿著準分子燈3的發光管之外表面的曲面的形狀且載置準分子燈3的載置區域11a,與形成於對於準分子燈3隔離於Z方向的位置,對於YZ平面傾斜的錐面11b。同樣地,關於第二電極塊12,也具有載置區域12a與錐面12b。The first electrode block 11 and the second electrode block 12 are arranged at positions spaced apart in the Y direction. In the example shown in FIG. 5, the first electrode block 11 has a curved shape along the outer surface of the luminous tube of the excimer lamp 3 and the placement area 11a where the excimer lamp 3 is placed, and is formed in the opposite The excimer lamp 3 is isolated from a position in the Z direction, and a tapered surface 11b inclined with respect to the YZ plane. Similarly, the second electrode block 12 also has a mounting area 12a and a tapered surface 12b.

再者,第一電極塊11與第二電極塊12係由導電性材料所成,更理想為顯示對於從準分子燈3射出的紫外線之反射性的材料所成。作為一例,第一電極塊11與第二電極塊12都以Al、Al合金、不鏽鋼等構成。Furthermore, the first electrode block 11 and the second electrode block 12 are made of a conductive material, and more desirably are made of a material showing reflectivity to ultraviolet rays emitted from the excimer lamp 3. As an example, both the first electrode block 11 and the second electrode block 12 are made of Al, Al alloy, stainless steel, or the like.

第一電極塊11與第二電極塊12係任一都以一邊接觸各準分子燈3(3a,3b,3c,3d)的發光管之外表面,一邊在Z方向中跨越各準分子燈3的方式配置。The first electrode block 11 and the second electrode block 12 are both in contact with the outer surface of the luminous tube of each excimer lamp 3 (3a, 3b, 3c, 3d) while straddling each excimer lamp 3 in the Z direction. Way to configure.

圖6係模式揭示準分子燈3及電極塊(11,12)的位置關係的圖面,對應從+Z方向觀察準分子燈3時的模式俯視圖。在圖6中,僅圖示4根準分子燈3(3a,3b,3c,3d)中,位於最靠-Z側的準分子燈3a,省略其他準分子燈(3b,3c,3d)的圖示,如上所述,關於準分子燈(3b,3c,3d),並排於+Z方向。Fig. 6 is a schematic diagram showing the positional relationship between the excimer lamp 3 and the electrode blocks (11, 12), and corresponds to a schematic plan view of the excimer lamp 3 when viewed from the +Z direction. In Figure 6, only the four excimer lamps 3 (3a, 3b, 3c, 3d) are shown, the excimer lamp 3a located on the most -Z side, and the other excimer lamps (3b, 3c, 3d) are omitted. As shown in the figure, as described above, the excimer lamps (3b, 3c, 3d) are arranged in the +Z direction.

準分子燈3係具有將Y方向設為管軸方向的管體,於隔開於Y方向的位置中,準分子燈3的發光管之外表面接觸於各電極塊(11,12)。於準分子燈3的管體,封入發光氣體3G。對各電極塊(11,12)之間施加例如10kHz~5MHz程度之高頻的交流電壓的話,則會透過準分子燈3的管體,對於發光氣體3G施加前述電壓。此時,在封入發光氣體3G的放電空間內產生放電電漿,而激發發光氣體3G的原子,成為準分子狀態,該原子轉移至基底狀態時,會產生準分子發光。The excimer lamp 3 has a tube body with the Y direction as the tube axis direction, and the outer surface of the arc tube of the excimer lamp 3 is in contact with each electrode block (11, 12) in a position separated from the Y direction. In the tube body of the excimer lamp 3, a luminous gas 3G is enclosed. If a high-frequency AC voltage of, for example, about 10 kHz to 5 MHz is applied between the electrode blocks (11, 12), the tube body of the excimer lamp 3 is passed through, and the aforementioned voltage is applied to the luminous gas 3G. At this time, discharge plasma is generated in the discharge space enclosed with the luminescent gas 3G, and the atoms of the luminescent gas 3G are excited to be in an excimer state. When the atoms are transferred to the base state, excimer light emission is generated.

從準分子燈3射出之紫外線L1的波長係依存於發光氣體3G的物質來決定。例如,作為發光氣體3G而包含KrCl時,從準分子燈3射出之紫外線L1係表示主要峰值波長為222nm附近的光譜(參照圖7)。The wavelength of the ultraviolet light L1 emitted from the excimer lamp 3 is determined depending on the substance of the luminescent gas 3G. For example, when KrCl is included as the luminescent gas 3G, the ultraviolet light L1 emitted from the excimer lamp 3 shows a spectrum with a main peak wavelength around 222 nm (see FIG. 7).

作為發光氣體3G,除了KrCl之外,可利用KeBr、ArF等。在發光氣體3G包含KrBr時,從準分子燈3係射出主要峰值波長為207nm附近的紫外線L1。在發光氣體3G包含ArF時,從準分子燈3係射出主要峰值波長為193nm附近的紫外線L1。於該等任一氣體種中,從準分子燈3係生成主要峰值波長屬於190nm以上、225nm以下的波長帶的紫外線L1。再者,除了前述的氣體種之外,混合氬(Ar)、氖(Ne)等的惰性氣體亦可。As the luminescent gas 3G, in addition to KrCl, KeBr, ArF, etc. can be used. When the luminescent gas 3G contains KrBr, ultraviolet rays L1 with a main peak wavelength around 207 nm are emitted from the excimer lamp 3 system. When the luminescent gas 3G contains ArF, ultraviolet rays L1 with a main peak wavelength around 193 nm are emitted from the excimer lamp 3 system. In any of these gas species, the excimer lamp 3 generates ultraviolet light L1 whose main peak wavelength belongs to a wavelength band of 190 nm or more and 225 nm or less. Furthermore, in addition to the aforementioned gas species, an inert gas such as argon (Ar) and neon (Ne) may be mixed.

於發光氣體3G包含KrCl時,如圖7所示,於紫外線L1的光譜,光輸出幾乎集中於主要峰值波長即222nm附近,但是,關於被掛念對於人體的影響之240nm以上的波長帶,雖然只有微量也確認到光輸出。因此,於構成光取出面10的區域,以遮斷相關波長帶之光成分為目的,設置光學濾光片21。也就是說,光學濾光片21具有遮斷240nm以上、300nm以下之紫外線的功能。When the luminous gas 3G contains KrCl, as shown in Fig. 7, in the spectrum of ultraviolet L1, the light output is almost concentrated near 222nm, which is the main peak wavelength. However, the wavelength band above 240nm, which is concerned about the effect on the human body, is only The light output was also confirmed for a small amount. Therefore, in the region constituting the light extraction surface 10, an optical filter 21 is provided for the purpose of blocking light components in the relevant wavelength band. In other words, the optical filter 21 has a function of blocking ultraviolet rays of 240 nm or more and 300 nm or less.

如上所述,本實施形態的紫外線照射裝置1所具備之準分子燈3(3a,3b,3c,3d)係以其發光管的外表面接觸電極塊(11,12)之方式配置。但是,該等接觸狀態不穩定的話,對於各準分子燈3之電壓的施加狀態變動,或無法施加充分的電壓之結果,有放電成為不穩定之虞。根據相關觀點,紫外線照射裝置1係具備用以穩定化準分子燈3(3a,3b,3c,3d)與電極塊(11,12)的接觸狀態的固定構件5(參照圖8~圖14)。以下,參照圖8~圖14的各圖,針對固定構件5的構造進行說明。As described above, the excimer lamps 3 (3a, 3b, 3c, 3d) included in the ultraviolet irradiation device 1 of this embodiment are arranged such that the outer surface of the arc tube contacts the electrode blocks (11, 12). However, if these contact states are unstable, the application state of the voltage to each excimer lamp 3 fluctuates, or a sufficient voltage cannot be applied as a result, and the discharge may become unstable. According to a related point of view, the ultraviolet irradiation device 1 is equipped with a fixing member 5 for stabilizing the contact state of the excimer lamp 3 (3a, 3b, 3c, 3d) and the electrode block (11, 12) (refer to Figures 8 to 14) . Hereinafter, the structure of the fixing member 5 will be described with reference to each of FIGS. 8 to 14.

圖8係從+X方向觀察本體殼體22的-X側之面,亦即光取出面10之相反側的面時的模式俯視圖。圖9係僅抽出準分子燈3、固定構件5、及電極塊(11,12)並模式揭示的立體圖,圖10係從+X側,光取出方向相反方向(往-X方向)觀察圖9的狀態時的模式俯視圖。圖11係固定構件5的模式立體圖。FIG. 8 is a schematic plan view when the surface on the -X side of the main body casing 22, that is, the surface on the opposite side of the light extraction surface 10, is viewed from the +X direction. Fig. 9 is a perspective view showing only the excimer lamp 3, the fixing member 5, and the electrode blocks (11, 12) and is shown schematically. Fig. 10 is viewed from the +X side and the light extraction direction in the opposite direction (toward the -X direction). The top view of the mode at the time of the state. FIG. 11 is a schematic perspective view of the fixing member 5.

圖12係用以說明固定構件5與準分子燈3的接觸狀態的模式立體圖,為了方便說明,省略準分子燈3c的圖示。圖13係+Y方向觀察圖9之狀態時的模式俯視圖。圖14係+Z方向觀察圖8之狀態時的模式俯視圖。但是在圖14中為了便利說明,省略位於最靠-Z側的本體殼體22之壁面的圖示。FIG. 12 is a schematic perspective view for explaining the contact state of the fixing member 5 and the excimer lamp 3, and for the convenience of description, the illustration of the excimer lamp 3c is omitted. Fig. 13 is a schematic plan view of the state of Fig. 9 when viewed in the +Y direction. Fig. 14 is a schematic plan view when the state of Fig. 8 is viewed in the +Z direction. However, in FIG. 14 for convenience of description, the illustration of the wall surface of the main body housing 22 located on the most -Z side is omitted.

電極塊(11,12)係對於準分子燈3從光取出方向的相反側,亦即-X側接觸。相對於此,固定構件5係以對於準分子燈3從+X側接觸之方式配置。The electrode blocks (11, 12) are in contact with the excimer lamp 3 from the opposite side of the light extraction direction, that is, the -X side. On the other hand, the fixing member 5 is arranged so as to be in contact with the excimer lamp 3 from the +X side.

固定構件5係由彈性構件所成,更詳細來說由不鏽鋼等的金屬製構件所成。尤其,理想為如圖11所示,固定構件5係利用板材的一部分彎曲,具有平坦部5a與彎曲部5b所成,並且藉由該彎曲部5b形成彈性構件。固定構件5的彎曲部5b具有朝向-X方向的彈性力,故於彎曲部5b接觸發光管的外表面的準分子燈3朝向比準分子燈3更位於-X側的電極塊(11,12)的方向被推壓。結果,準分子燈3的發光管的外表面對於電極塊(11,12)穩定接觸。The fixing member 5 is made of an elastic member, and more specifically, made of a metal member such as stainless steel. In particular, as shown in FIG. 11, it is desirable that the fixing member 5 is formed by bending a part of a plate material, having a flat portion 5a and a curved portion 5b, and the curved portion 5b forms an elastic member. The bent portion 5b of the fixing member 5 has an elastic force toward the -X direction, so the excimer lamp 3, which is in contact with the outer surface of the arc tube by the bent portion 5b, faces the electrode block (11, 12 ) Is pushed in the direction. As a result, the outer surface of the arc tube of the excimer lamp 3 is in stable contact with the electrode blocks (11, 12).

進而,該固定構件5係在Y方向中,被至於比電極塊(11,12)更靠外側(參照圖8、圖11)。因此,固定構件5係雖然位於比準分子燈3更靠+X側,亦即光取出側,但是,準分子燈3的管體中,主要構成放電空間的是電極塊(11,12)之間的位置,故難以成為從該放電空間行進於+X方向之紫外線L1的妨礙。Furthermore, the fixing member 5 is arranged in the Y direction, and is positioned more outside than the electrode blocks (11, 12) (refer to FIGS. 8 and 11). Therefore, although the fixing member 5 is located closer to the +X side than the excimer lamp 3, that is, the light extraction side, in the tube body of the excimer lamp 3, the discharge space is mainly composed of the electrode blocks (11, 12) Therefore, it is difficult to hinder the ultraviolet rays L1 traveling in the +X direction from the discharge space.

進而,固定構件5係以對於電極塊(11,12)隔開於Y方向之方式配置,對於電極塊(11,12)電性絕緣。結果,即使為了發光而對於電極塊(11,12)施加電壓,也不會對於固定構件5通電,故可抑制固定構件5成為放電的起點一事。因此,藉由設置固定構件5,讓放電不穩定難以發生。Furthermore, the fixing member 5 is arranged to be spaced apart from the electrode blocks (11, 12) in the Y direction, and is electrically insulated from the electrode blocks (11, 12). As a result, even if a voltage is applied to the electrode blocks (11, 12) for light emission, the fixing member 5 is not energized, so that it is possible to suppress the fixing member 5 from becoming a starting point of discharge. Therefore, by providing the fixing member 5, instability of the discharge is difficult to occur.

如圖11所示,固定構件5係於彎曲部5b的一部分形成縫隙5c為佳。利用形成相關的縫隙5c,於管軸方向(Y方向)觀察時的形狀顯現圓形之準分子燈3的發光管的外表面,在挾持縫隙5c的複數處與固定構件5接觸(參照圖13)。依據圖13,在Z方向相關的2處(A1,A2),準分子燈3的發光管的外表面與固定構件5接觸。藉此,使準分子燈3與固定構件5的接觸穩定化。As shown in FIG. 11, it is preferable that the fixing member 5 is tied to a part of the curved portion 5b to form a slit 5c. The outer surface of the arc tube of the excimer lamp 3 whose shape is circular when viewed in the tube axis direction (Y direction) is formed by forming the related slit 5c, and contacts the fixing member 5 at a plurality of positions pinching the slit 5c (refer to FIG. 13 ). According to FIG. 13, at two locations (A1, A2) related to the Z direction, the outer surface of the arc tube of the excimer lamp 3 is in contact with the fixing member 5. Thereby, the contact between the excimer lamp 3 and the fixing member 5 is stabilized.

固定構件5係構成為可對於本體殼體22不使用接著劑來安裝更佳。假設,固定構件5對於本體殼體22藉由接著劑安裝的話,因為萬用的接著劑對於紫外線L1的耐性低,故因為準分子燈3的點燈狀態持續,有紫外線L1被照射至接著劑而導致接著劑劣化之虞。因為接著劑的劣化而接著性能降低的話,會有固定構件5從本體殼體22脫離的可能性。The fixing member 5 is preferably configured to be able to be attached to the main body case 22 without using an adhesive. Suppose that if the fixing member 5 is attached to the main body housing 22 with an adhesive, the universal adhesive has low resistance to ultraviolet light L1, so because the lighting state of the excimer lamp 3 continues, ultraviolet light L1 is irradiated to the adhesive This leads to the risk of deterioration of the adhesive. If the adhesive performance is reduced due to the deterioration of the adhesive, there is a possibility that the fixing member 5 may be detached from the main body housing 22.

作為不使用接著劑而將固定構件5對於本體殼體22安裝之方法的具體一例,本體殼體22具有第一殼體22a與第二殼體22b,於第一殼體22a側,形成可嵌入固定構件5的平坦部5a的溝部6(參照圖16)。圖15係安裝固定構件5之狀態的第一殼體22a的模式俯視圖,圖16係安裝固定構件5之前的第一殼體22a的模式立體圖。再者,於圖16一併圖示固定構件5的立體圖。As a specific example of a method of attaching the fixing member 5 to the main body housing 22 without using an adhesive, the main body housing 22 has a first housing 22a and a second housing 22b, which are formed on the side of the first housing 22a so as to be insertable. The groove part 6 of the flat part 5a of the fixing member 5 (refer FIG. 16). 15 is a schematic plan view of the first housing 22a in a state where the fixing member 5 is installed, and FIG. 16 is a schematic perspective view of the first housing 22a before the fixing member 5 is installed. Furthermore, a perspective view of the fixing member 5 is also shown in FIG. 16.

如圖16所示,利用對於安裝於第一殼體22a的溝部6,嵌入固定構件5的平坦部5a,於第一殼體22a的所定處安裝固定構件5。在此,如上所述,以固定構件5不成為紫外線L1的行進的妨礙之方式,在Y方向中於端部側安裝固定構件5為佳。因此,溝部6也在第一殼體22a的Y方向中形成於端部側為佳。As shown in FIG. 16, by fitting the flat part 5a of the fixing member 5 to the groove part 6 attached to the 1st housing 22a, the fixing member 5 is attached to the predetermined position of the 1st housing 22a. Here, as described above, it is preferable to attach the fixing member 5 to the end side in the Y direction so that the fixing member 5 does not hinder the advancement of the ultraviolet rays L1. Therefore, it is preferable that the groove 6 is also formed on the end side in the Y direction of the first housing 22a.

進而,電極塊(11,12)作為安裝於第一殼體22a之外的第二殼體22b者亦可(參照圖17)。圖17係對於安裝電極塊(11,12)之第二殼體22b,以接觸電極塊(11,12)之方式配置準分子燈3(3a,3b,3c,3d)之狀態的模式立體圖。將圖15所示之狀態的第一殼體22a,對於圖17所示之狀態的第二殼體22b,從+X側覆蓋以進行一體化,藉此可使準分子燈(3a,3b,3c,3d)對於電極塊(11,12)穩定地接觸。圖14係如此對應+Z方向觀察將第一殼體22a與第二殼體22n一體化之狀態時的模式俯視圖。Furthermore, the electrode blocks (11, 12) may be attached to the second case 22b other than the first case 22a (refer to FIG. 17). Fig. 17 is a schematic perspective view of a state where the excimer lamps 3 (3a, 3b, 3c, 3d) are arranged in a manner of contacting the electrode blocks (11, 12) with respect to the second housing 22b where the electrode blocks (11, 12) are installed. The first housing 22a in the state shown in FIG. 15 and the second housing 22b in the state shown in FIG. 3c, 3d) Stable contact with the electrode blocks (11, 12). FIG. 14 is a schematic plan view of the state in which the first housing 22a and the second housing 22n are integrated as seen in the +Z direction in this way.

[第二實施形態] 針對紫外線照射裝置的第二實施形態,主要說明與第一實施形態不同之處。[Second Embodiment] Regarding the second embodiment of the ultraviolet irradiation device, the difference from the first embodiment will be mainly described.

圖18係紫外線照射裝置的第二實施形態的模式立體圖。於本實施形態中,也與第一實施形態相同,對於準分子燈3的發光管的外表面,電極塊(11,12)從-X側接觸,固定構件5從+X側接觸。但是,在本實施形態中,相較於第一實施形態,固定構件5的形狀不同。針對此點,參照圖19~圖21來進行說明。Fig. 18 is a schematic perspective view of the second embodiment of the ultraviolet irradiation device. In this embodiment, as in the first embodiment, the electrode blocks (11, 12) are in contact with the outer surface of the arc tube of the excimer lamp 3 from the -X side, and the fixing member 5 is in contact from the +X side. However, in this embodiment, compared with the first embodiment, the shape of the fixing member 5 is different. In this regard, description will be made with reference to FIGS. 19 to 21.

圖19係僅抽出準分子燈(3a,3b)、電極塊(11,12),及固定構件5並模式揭示的立體圖。圖20係模式揭示本實施形態的固定構件5的立體圖。圖21係於圖18的狀態中,所定位置之XZ平面的模式剖面圖。Fig. 19 is a perspective view showing only the excimer lamp (3a, 3b), the electrode blocks (11, 12), and the fixing member 5 are drawn out and schematically disclosed. FIG. 20 is a perspective view schematically showing the fixing member 5 of this embodiment. Fig. 21 is a schematic cross-sectional view of the XZ plane at the determined position in the state of Fig. 18.

在本實施形態中,如圖19所示,固定構件5係對於電極塊(11,12)固定。更詳細來說,固定構件5係具有緊固部5d(參照圖20),透過該緊固部5d,例如藉由螺絲緊固固定構件5與電極塊(11,12)。In this embodiment, as shown in FIG. 19, the fixing member 5 is fixed to the electrode blocks (11, 12). In more detail, the fixing member 5 has a fastening portion 5d (refer to FIG. 20), through which the fastening portion 5d, the fixing member 5 and the electrode blocks (11, 12) are fastened by screws, for example.

固定構件5係如圖20所示,具有呈依據準分子燈3的發光管之外表面的形狀之形狀的凹部5e。因此,圖21所示,以對於電極塊(11,12)於+X側載置準分子燈3之後,進而從+X側,於凹部5e嵌入準分子燈3之發光管的外表面之方式,安裝固定構件5之狀態下,可透過緊固部5d緊固固定構件5與電極塊(11,12)。結果,準分子燈3係從+X側藉由固定構件5往-X方向,亦即電極塊(11,12)側被推壓,故可確保準分子燈3與電極塊(11,12)的穩定接觸。As shown in FIG. 20, the fixing member 5 has a recess 5 e in a shape corresponding to the shape of the outer surface of the arc tube of the excimer lamp 3. Therefore, as shown in Fig. 21, after placing the excimer lamp 3 on the electrode block (11, 12) on the +X side, the outer surface of the arc tube of the excimer lamp 3 is embedded in the recess 5e from the +X side When the fixing member 5 is installed, the fixing member 5 and the electrode block (11, 12) can be fastened through the fastening portion 5d. As a result, the excimer lamp 3 is pushed from the +X side to the -X direction by the fixing member 5, that is, the electrode block (11, 12) side is pressed, so the excimer lamp 3 and the electrode block (11, 12) can be secured Stable contact.

再者,在本實施形態中,不同於第一實施形態,固定構件5係在Y方向中與電極塊(11,12)隔開。但是,嵌入準分子燈3之固定構件5的凹部5e,亦即固定構件5位於比準分子燈3更靠+X測的區域,係位於比電極區塊(11,12)更靠Y方向的端部。更詳細來說,固定構件5係具有從緊固部5d朝向凹部5e延伸於Y方向的連結部5f。因此,與第一實施形態相同,可抑制成為固定構件5從準分子燈3射出而行進於+X方向之紫外線L1的妨礙。Furthermore, in this embodiment, unlike the first embodiment, the fixing member 5 is spaced apart from the electrode blocks (11, 12) in the Y direction. However, the recess 5e of the fixing member 5 embedded in the excimer lamp 3, that is, the fixing member 5 is located in an area closer to +X than the excimer lamp 3, and is located closer to the Y direction than the electrode block (11, 12) Ends. More specifically, the fixing member 5 has a connecting portion 5f extending in the Y direction from the fastening portion 5d toward the recess 5e. Therefore, as in the first embodiment, it is possible to suppress the obstruction of the ultraviolet rays L1 that become the fixing member 5 emitted from the excimer lamp 3 and travel in the +X direction.

[其他實施形態] 以下,針對其他實施形態進行說明。[Other embodiments] Hereinafter, other embodiments will be described.

<1>在前述實施形態中,已說明第一電極塊11及第二電極塊12都具有錐面(11a,11b)。但是,於本發明中,各電極塊是否具有錐面可設為任意。例如,如圖22所示之第一電極塊11,嵌入準分子燈3之溝11g以外的部分以平坦面構成亦可。關於第二電極塊12也相同。<1> In the foregoing embodiment, it has been described that both the first electrode block 11 and the second electrode block 12 have tapered surfaces (11a, 11b). However, in the present invention, whether or not each electrode block has a tapered surface can be arbitrarily set. For example, in the first electrode block 11 shown in FIG. 22, the portion other than the groove 11g of the excimer lamp 3 may be formed with a flat surface. The same applies to the second electrode block 12.

<2>於紫外線照射裝置1具備複數根準分子燈3的狀況中,2根以上的準分子燈3的X方向相關之配置位置變位亦可。<2> In a situation where the ultraviolet irradiation device 1 includes a plurality of excimer lamps 3, the arrangement positions of two or more excimer lamps 3 in the X direction may be displaced.

<3>於前述實施形態中,已說明紫外線照射裝置1係於光取出面10設置光學濾光片21者,但是,於本發明中紫外線照射裝置1是否具備光學濾光片21可設為任意。尤其,在對於人體照射紫外線L1的可能性無限低的狀況中設置紫外線照射裝置1時,不設置光學濾光片21亦可。<3> In the foregoing embodiment, it has been described that the ultraviolet irradiation device 1 is provided with the optical filter 21 on the light extraction surface 10. However, in the present invention, whether the ultraviolet irradiation device 1 is equipped with the optical filter 21 can be arbitrarily set. . In particular, when the ultraviolet irradiation device 1 is installed in a situation where the possibility of irradiating the ultraviolet L1 to the human body is infinitely low, the optical filter 21 may not be installed.

又,在前述實施形態中,已針對從紫外線照射裝置1射出之紫外線L1的主要發光波長屬於190nm以上、225nm以下的波長帶之狀況進行說明,但是,本發明並不排除發出主要發光波長超過225nm的紫外線者。例如,紫外線照射裝置1係具備發光氣體3G使用XeCl,發出顯示主要峰值波長為308nm之紫外線L1的準分子燈3者亦可。In addition, in the foregoing embodiment, the situation in which the main emission wavelength of the ultraviolet light L1 emitted from the ultraviolet irradiation device 1 belongs to the wavelength band of 190 nm or more and 225 nm or less has been described. However, the present invention does not exclude that the main emission wavelength exceeds 225 nm. The ultraviolet ones. For example, the ultraviolet irradiation device 1 may include an excimer lamp 3 that uses XeCl as a luminescent gas 3G, and emits ultraviolet light L1 with a main peak wavelength of 308 nm.

<4>在前述實施形態中,設為1個固定構件5對於鄰接配置於Z方向的複數準分子燈3,從+X側接觸的構造者。但是,作為於各準分子燈3,設置個別的固定構件5的構造亦可。<4> In the above-mentioned embodiment, it is assumed that one fixing member 5 is in contact with the plurality of excimer lamps 3 adjacently arranged in the Z direction from the +X side. However, each excimer lamp 3 may be provided with an individual fixing member 5 as a structure.

又,在前述實施形態中,設為在準分子燈3的管軸方向(Y方向)相關之兩端的位置設置固定構件5者。但是,本發明並不排除僅在Y方向相關之一方的端部設置固定構件5的構造。即使在相關狀況中,相較於不存在固定構件5的狀況,也可發揮讓準分子燈3與電極塊(11,12)的接觸狀態穩定化的作用。In addition, in the foregoing embodiment, it is assumed that the fixing members 5 are provided at the positions of the two ends relative to the tube axis direction (Y direction) of the excimer lamp 3. However, the present invention does not exclude a structure in which the fixing member 5 is provided only at one end of the Y direction. Even in the relevant situation, compared with the situation where the fixing member 5 is not present, it can also play a role in stabilizing the contact state of the excimer lamp 3 and the electrode blocks (11, 12).

1:紫外線照射裝置 2:燈室 3:準分子燈 3a,3b,3c,3d:準分子燈 3G:發光氣體 5:固定構件 5a:平坦部 5b:彎曲部 5c:縫隙 5d:緊固部 5e:凹部 5f:連結部 6:溝部 11:第一電極塊 11a:載置區域 11b:錐面 11g:溝 12:第二電極塊 12a:載置區域 12b:錐面 22:本體殼體部 22a:第一殼體 22b:第二殼體 23:蓋子部 100:紫外線照射裝置 101:握持部 102:框體 103:燈管收容部 104:光照射窗 110:準分子燈 121:外側管 122:內側管 123G:發光氣體 124:外側電極 125:內側電極 126:電源部 L1:紫外線1: Ultraviolet irradiation device 2: Light room 3: Excimer lamp 3a, 3b, 3c, 3d: Excimer lamp 3G: luminous gas 5: Fixed components 5a: flat part 5b: Bend 5c: gap 5d: Fastening part 5e: recess 5f: Connection part 6: Groove 11: The first electrode block 11a: Placement area 11b: Cone 11g: groove 12: The second electrode block 12a: Placement area 12b: Cone 22: body shell part 22a: first shell 22b: second housing 23: Lid part 100: Ultraviolet irradiation device 101: Grip 102: Frame 103: Light tube receiving part 104: light irradiation window 110: Excimer light 121: Outer tube 122: Inside tube 123G: Luminous gas 124: Outer electrode 125: inner electrode 126: Power Supply Department L1: Ultraviolet

[圖1]模式揭示第一實施形態的紫外線照射裝置之外觀的立體圖。 [圖2]從圖1分解紫外線照射裝置的燈室之本體殼體部與蓋子部的立體圖。 [圖3]模式揭示紫外線照射裝置所具備之電極塊及準分子燈的構造的立體圖。 [圖4]從圖3變更視點的立體圖。 [圖5]從圖4省略準分子燈的圖示,模式揭示電極塊的構造的立體圖。 [圖6]+Z方向觀察圖3的立體圖時的模式俯視圖。 [圖7]揭示發光氣體包含KrCl的準分子燈的發射光譜之一例。 [圖8]朝向本體殼體的光取出面之相反側的面觀察時的模式俯視圖。 [圖9]僅抽出準分子燈、固定構件、及電極塊並模式揭示的立體圖。 [圖10]-X方向觀察圖9之狀態時的模式俯視圖。 [圖11]固定構件的模式立體圖。 [圖12]用以說明固定構件與準分子燈的接觸狀態的模式立體圖。 [圖13]+Y方向觀察圖9之狀態時的模式俯視圖。 [圖14]+Z方向觀察圖8之狀態時的模式俯視圖。 [圖15]安裝固定構件之狀態的第一殼體的模式俯視圖。 [圖16]安裝固定構件之前的第一殼體的模式立體圖。 [圖17]安裝電極塊之第二殼體的模式立體圖。 [圖18]紫外線照射裝置的第二實施形態的模式立體圖。 [圖19]從圖18的構造僅抽出準分子燈、電極塊、及固定構件並模式揭示的立體圖。 [圖20]模式揭示圖18內的固定構件的立體圖。 [圖21]於圖18的狀態中,所定位置之XZ平面的模式剖面圖。 [圖22]模式揭示電極塊的其他構造的立體圖。 [圖23]模式揭示先前之小型的紫外線照射裝置的構造的圖面。 [圖24]模式揭示搭載於圖23所示之紫外線照射裝置的準分子燈之構造的圖面。[FIG. 1] A perspective view schematically showing the appearance of the ultraviolet irradiation device of the first embodiment. [Fig. 2] A perspective view of the main body housing part and the cover part of the lamp chamber of the ultraviolet irradiation device disassembled from Fig. 1. [Fig. 3] A schematic perspective view showing the structure of an electrode block and an excimer lamp included in the ultraviolet irradiation device. [Fig. 4] A perspective view with a changed viewpoint from Fig. 3. [Fig. 5] The illustration of the excimer lamp is omitted from Fig. 4, and a perspective view schematically showing the structure of the electrode block. [Fig. 6] A schematic plan view when the perspective view of Fig. 3 is viewed in the +Z direction. [Fig. 7] An example of the emission spectrum of an excimer lamp in which the luminescent gas contains KrCl is revealed. [Fig. 8] A schematic plan view when viewed toward the surface opposite to the light extraction surface of the main body casing. [Fig. 9] A perspective view showing only the excimer lamp, the fixing member, and the electrode block are drawn out and schematically revealed. [Fig. 10] A schematic plan view of the state of Fig. 9 when viewed from the -X direction. [Fig. 11] A schematic perspective view of the fixing member. [Fig. 12] A schematic perspective view for explaining the contact state of the fixing member and the excimer lamp. [Fig. 13] A schematic plan view of the state in Fig. 9 when viewed in the +Y direction. [Fig. 14] A schematic plan view of the state in Fig. 8 when viewed in the +Z direction. [Fig. 15] A schematic plan view of the first housing in a state where the fixing member is installed. [Fig. 16] A schematic perspective view of the first housing before the fixing member is installed. [Fig. 17] A schematic perspective view of the second housing with the electrode block installed. [Fig. 18] A schematic perspective view of the second embodiment of the ultraviolet irradiation device. [Fig. 19] A perspective view showing schematically only the excimer lamp, electrode block, and fixing member extracted from the structure of Fig. 18. [Fig. [Fig. 20] A perspective view schematically showing the fixing member in Fig. 18. [Fig. [Fig. 21] In the state of Fig. 18, a schematic cross-sectional view of the XZ plane at the predetermined position. [Fig. 22] A perspective view schematically showing another structure of the electrode block. [Fig. 23] A schematic diagram showing the structure of a conventional compact ultraviolet irradiation device. [FIG. 24] A schematic diagram showing the structure of an excimer lamp mounted on the ultraviolet irradiation device shown in FIG. 23.

2:燈室 2: Light room

3a,3b,3c,3d:準分子燈 3a, 3b, 3c, 3d: Excimer lamp

5:固定構件 5: Fixed components

11:第一電極塊 11: The first electrode block

12:第二電極塊 12: The second electrode block

22:本體殼體部 22: body shell part

Claims (8)

一種紫外線照射裝置,其特徵為具備: 燈室,係形成光取出面; 準分子燈,係於前述燈室內,收容於對於前述光取出面隔開於第一方向的位置,發出紫外線; 第一電極塊,係以前述第一方向中從前述光取出面的相反側接觸前述準分子燈的發光管之外表面的方式配置; 第二電極塊,係以於對於前述第一電極塊隔開於與前述準分子燈之管軸平行的第二方向的位置中,前述第一方向中從前述光取出面的相反側接觸前述準分子燈的發光管之外表面的方式配置;及 固定構件,係配置於前述第二方向中比前述第一電極塊離前述第二電極塊更遠的位置、及前述第二方向中比前述第二電極塊離前述第一電極塊更遠的位置之至少一方,且抵接於前述準分子燈。An ultraviolet irradiation device, which is characterized by having: The lamp room forms the light extraction surface; The excimer lamp is located in the lamp chamber, and is housed in a position spaced apart from the light extraction surface in a first direction, and emits ultraviolet rays; The first electrode block is arranged in such a way that it contacts the outer surface of the arc tube of the excimer lamp from the opposite side of the light extraction surface in the first direction; The second electrode block is spaced apart from the first electrode block in a second direction parallel to the tube axis of the excimer lamp. The configuration of the outer surface of the luminous tube of the molecular lamp; and The fixing member is arranged at a position farther from the second electrode block than the first electrode block in the second direction, and a position farther from the first electrode block than the second electrode block in the second direction At least one of them is in contact with the aforementioned excimer lamp. 如請求項1所記載之紫外線照射裝置,其中, 前述固定構件,係包含金屬製的彈性構件所成; 以前述第一方向中從前述第一電極塊及前述第二電極塊的相反側接觸前述準分子燈的發光管之外表面的方式配置。The ultraviolet irradiation device described in claim 1, wherein: The aforementioned fixing member is composed of an elastic member made of metal; It is arranged in such a manner that the outer surface of the arc tube of the excimer lamp is contacted from the opposite side of the first electrode block and the second electrode block in the first direction. 如請求項2所記載之紫外線照射裝置,其中, 前述固定構件,係配置於前述第二方向中對於前述第一電極塊及前述第二電極塊隔開的位置。The ultraviolet irradiation device described in claim 2, wherein: The fixing member is arranged at a position separated from the first electrode block and the second electrode block in the second direction. 如請求項3所記載之紫外線照射裝置,其中, 前述固定構件,係利用金屬製的板材之一部分彎曲,具有平坦部與彎曲部所成,並且前述彎曲部構成前述彈性構件; 前述燈室,係具有: 第一殼體,係形成可嵌入前述固定構件的前述平坦部的溝部,及前述光取出面所成;及 第二殼體,係安裝前述第一電極塊及前述第二電極塊所成。The ultraviolet irradiation device described in claim 3, wherein: The aforementioned fixing member is formed by bending a part of a metal plate and having a flat portion and a curved portion, and the aforementioned curved portion constitutes the aforementioned elastic member; The aforementioned lamp room has: The first housing is formed by forming a groove that can be inserted into the flat portion of the fixing member, and the light extraction surface; and The second housing is formed by installing the first electrode block and the second electrode block. 如請求項4所記載之紫外線照射裝置,其中, 前述固定構件,係於前述彎曲部的一部分形成縫隙,在與前述第一方向及前述第二方向正交的第三方向中挾持前述縫隙之2處以上的位置,接觸於前述準分子燈之發光管的外表面。The ultraviolet irradiation device described in claim 4, wherein: The fixing member forms a slit in a part of the curved portion, and pinches two or more positions of the slit in a third direction orthogonal to the first direction and the second direction, and is in contact with the light emission of the excimer lamp The outer surface of the tube. 如請求項2所記載之紫外線照射裝置,其中, 前述固定構件,係具有:緊固部,係對於前述第一電極塊及前述第二電極塊的至少一方,在前述第一方向中從前述光取出面側緊固; 於前述第二方向中比前述緊固部更靠外側的位置中,從前述光取出面側接觸於前述準分子燈的發光管的外表面。The ultraviolet irradiation device described in claim 2, wherein: The fixing member has: a fastening portion for fastening at least one of the first electrode block and the second electrode block from the light extraction surface side in the first direction; In the second direction, the outer surface of the arc tube of the excimer lamp is contacted from the light extraction surface side at a position outside the fastening portion. 如請求項6所記載之紫外線照射裝置,其中, 前述固定構件,係具有利用金屬製的板材之一部分彎曲,嵌入前述準分子燈的凹部,與在前述第二方向中從前述緊固部側朝向前述凹部側延伸的連結部所成; 前述連結部,係形成於對於前述凹部,往與前述第一方向及前述第二方向正交的第三方向變位的位置。The ultraviolet irradiation device described in claim 6, wherein: The aforementioned fixing member is formed by using a part of a metal plate to bend into the recessed portion of the excimer lamp, and a connecting portion extending from the side of the fastening portion toward the side of the recessed portion in the second direction; The connecting portion is formed at a position displaced to the third direction orthogonal to the first direction and the second direction with respect to the concave portion. 如請求項1至7中任一項所記載之紫外線照射裝置,其中, 具有以隔開於與前述第一方向及前述第二方向正交的第三方向之方式配置的複數前述準分子燈; 至少一個前述固定構件以對於複數前述準分子燈接觸之方式構成。The ultraviolet irradiation device described in any one of claims 1 to 7, wherein: Having a plurality of the aforementioned excimer lamps arranged in a manner of being spaced apart in a third direction orthogonal to the aforementioned first direction and the aforementioned second direction; At least one of the aforementioned fixing members is configured to be in contact with the plurality of aforementioned excimer lamps.
TW109131786A 2019-10-07 2020-09-16 UV irradiation device TWI841786B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019184839A JP7335547B2 (en) 2019-10-07 2019-10-07 UV irradiation device
JP2019-184839 2019-10-07

Publications (2)

Publication Number Publication Date
TW202128231A true TW202128231A (en) 2021-08-01
TWI841786B TWI841786B (en) 2024-05-11

Family

ID=

Also Published As

Publication number Publication date
CN114423493A (en) 2022-04-29
WO2021070784A1 (en) 2021-04-15
JP2021061177A (en) 2021-04-15
JP7335547B2 (en) 2023-08-30

Similar Documents

Publication Publication Date Title
JP7327932B2 (en) UV irradiation device
WO2020129650A1 (en) Ultraviolet irradiation device
WO2013081054A1 (en) Excimer lamp
JPH11345598A (en) Electrodeless lamp
JP2010205618A (en) Rotary straight tube type led lamp
JP4544204B2 (en) External electrode type discharge lamp and its lamp device
TW202128231A (en) Ultraviolet irradiation device
KR101821898B1 (en) a xenon flash lamp
TWI841786B (en) UV irradiation device
US20220367171A1 (en) Light irradiation device
JP2013118072A (en) Ultraviolet discharge lamp
JP5898891B2 (en) Light emitting device
WO2021070781A1 (en) Ultraviolet irradiation device
JP7207511B2 (en) UV irradiation device
JP5387633B2 (en) Discharge tube and light emitting device including the discharge tube
KR100850795B1 (en) Electrodeless fluorescent lamp
JPH1154090A (en) Electrodeless discharge lamp device
JP3102430B2 (en) Dielectric barrier discharge lamp
TW202123977A (en) Ultraviolet ray radiation device
JP5640966B2 (en) Excimer lamp
JP2007042290A (en) Fluorescent lamp device and luminaire
JP2007287534A (en) Rare gas fluorescent lamp and rare gas fluorescent lamp lighting equipment
CN113658847A (en) Excimer lamp
MXPA02004066A (en) Circular fluorescent lamp unit and lighting apparatus.
JP2009032486A (en) Fixture for electrodeless discharge lamp, and luminaire