TW202128231A - Ultraviolet irradiation device - Google Patents

Abstract

Provided is an ultraviolet irradiation device having a significantly smaller size than structures of the prior art. The ultraviolet irradiation device is provided with: a lamp house having a light extraction surface formed thereon; an excimer lamp housed at a position away from the light extraction surface in a first direction; a first electrode block disposed in contact with the outer surface of an arc tube of the excimer lamp from the opposite side from the light extraction surface in the first direction; a second electrode block disposed in contact with the outer surface of the arc tube of the excimer lamp from the opposite side from the light extraction surface in the first direction at a position away from the first electrode block in a second direction parallel to the tube axis of the excimer lamp; and a restraining member which is disposed at a position farther away from the second electrode block than the first electrode block in the second direction and/or at a position farther away from the first electrode block than the second electrode block in the second direction and abuts against the excimer lamp.

Description

Ultraviolet irradiation device

The present invention relates to an ultraviolet irradiation device.

Previously, a compact ultraviolet irradiation device equipped with an excimer lamp as a light source has been developed (refer to Patent Document 1 described later). In addition, the ultraviolet irradiation device disclosed in Patent Document 1 described below is mainly assumed to be used for the treatment of skin diseases. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] JP 2017-164417 A

[The problem to be solved by the invention]

FIG. 23 is a diagram schematically showing the structure of the compact ultraviolet irradiation device disclosed in Patent Document 1. FIG. The ultraviolet irradiation device 100 includes a lamp tube accommodating part 103 housed in a housing 102 including a holding part 101, and a light irradiation window 104. An excimer lamp 110 that emits ultraviolet rays is housed in the tube receiving portion 103.

FIG. 24 is a schematic diagram showing the structure of the excimer lamp 110. The excimer lamp 110 has a cylindrical outer tube 121, which is arranged on the inner side of the outer tube 121 coaxially with the outer tube 121 and has an inner diameter smaller than that of the cylindrical inner tube 122 of the outer tube 121. The outer tube 121 and the inner tube 122 are sealed in the ends in the direction d1, and an annular light-emitting space is formed between them, and the light-emitting gas 123G is enclosed in the space.

The outer wall surface of the outer tube 121 is provided with a mesh or mesh outer electrode 124, and the inner wall surface of the inner tube 122 is provided with a film-shaped inner electrode 125 made of stainless steel or aluminum. The outer electrode 124 and the inner electrode 125 are respectively electrically connected to a power supply unit 126 capable of generating a high frequency AC voltage.

A high-frequency AC voltage is applied between the outer electrode 124 and the inner electrode 125 by the power supply unit 126, and a voltage is applied to the luminous gas 123G via the tube body of the outer tube 121 and the inner tube 122, and the discharge space is enclosed in the luminous gas 123G Generate discharge plasma. This excites the atoms of the luminescent gas 123G and becomes an excimer state. When the atoms transfer to the base state, excimer light will be generated.

However, the excimer lamp 110 illustrated in FIG. 24 is formed by arranging two types of tubes (121, 122) coaxially as described above. Therefore, the housing 102 that houses the excimer lamp 110 must ensure a certain size. As described above, the ultraviolet irradiation device 100 described in Patent Document 1 is assumed to be used for the treatment of skin diseases, restricting users and usage conditions, so even the shape and size shown in FIG. 23 have not become large in practice. problem.

However, for example, for general consumers in their homes, to sterilize places where bacteria are more likely to multiply, such as toilets, kitchens, bathrooms, shoes, etc., the size and weight that can be easily carried are better. If it is used for such an application, the structure of the ultraviolet irradiation device 100 including the excimer lamp 110 shown in FIG. 23 as a light source may cause practical problems.

In addition, the use of sterilization is mentioned in the above content, but it is not limited to the medical field. Even if it is used in general industrial applications, as long as a small ultraviolet irradiation device is realized, the installation place and the available place can be expanded. The range is very effective.

The subject of the present invention is in view of the foregoing subject, and the object is to provide an ultraviolet irradiation device that is significantly downsized compared to the previous structure. [Means to solve the problem]

Regarding the ultraviolet irradiation device of the present invention, it is characterized by having: The lamp room forms the light extraction surface; The excimer lamp is located in the lamp chamber, and is housed in a position spaced apart from the light extraction surface in a first direction, and emits ultraviolet rays; The first electrode block is arranged in such a way that it contacts the outer surface of the arc tube of the excimer lamp from the opposite side of the light extraction surface in the first direction; The second electrode block is spaced apart from the first electrode block in a second direction parallel to the tube axis of the excimer lamp. The configuration of the outer surface of the luminous tube of the molecular lamp; and The fixing member is arranged at a position farther from the second electrode block than the first electrode block in the second direction, and a position farther from the first electrode block than the second electrode block in the second direction At least one of them is in contact with the aforementioned excimer lamp.

The aforementioned ultraviolet irradiation device includes a first electrode block and a second electrode block contacting the outer surface of the arc tube of the excimer lamp. The electrode blocks are in contact with the outer surface of the luminous tube of the excimer lamp in positions separated from the tube axis direction of the excimer lamp, respectively. Therefore, the excimer lamp can be discharged by a simple straight tube structure, so there is no need to use a concentric tube that is generally used as a conventional excimer lamp. The structure in which the luminescent gas is sealed is the so-called "double tube structure".

As an example, the size of the tube body of the excimer lamp included in the ultraviolet irradiation device is such that the length in the tube axis direction (second direction) is 15 mm or more and 200 mm or less, and the outer diameter is 2 mm or more and 16 mm or less.

When a voltage is applied between the first electrode block and the second electrode block, light is mainly emitted in the tube of the excimer lamp located between the electrode blocks. If the ultraviolet rays generated by the light emission travel to the light extraction surface side, they will pass through the light extraction surface and be extracted to the outside of the ultraviolet irradiation device. At this time, the first electrode block and the second electrode block are both in the first direction from the opposite side of the light extraction surface in contact with the outer surface of the light emitting tube of the excimer lamp, so these electrode blocks can suppress light extraction. The travel of the ultraviolet rays on the surface.

However, as described above, the ultraviolet irradiation device of the present invention is assumed to be a small device, and transportation by the user can also be considered. At this time, when both the first electrode block and the second electrode block have a structure that contacts the outer surface of the arc tube of the excimer lamp from the opposite side of the light extraction surface in the first direction, it is assumed that the accurate The position of the molecular lamp will deviate. For example, if the position of the excimer lamp is shifted in the first direction, the contact with the electrode block cannot be sufficiently ensured, and a sufficient discharge may not be formed when a voltage is applied, or the discharge state may change. In addition, the related problem is not limited to the time of transportation, and even in a situation where it is installed in another machine, it may occur due to vibration or the like generated during the operation of the machine.

In view of the related issues, the inventor of the present application first conducted a review on the installation of the fixing member in order to press the excimer lamp from the opposite side of the electrode block in the first direction. However, in the first direction, the position on the opposite side of the electrode block is a part on the light extraction surface side. If the fixing member is attached to this position, it may hinder the progress of ultraviolet rays.

In contrast, according to the ultraviolet irradiation device of the present invention, the fixing member is arranged at a position farther from the second electrode block than the first electrode block in the second direction, and further from the first electrode than the second electrode block in the second direction. Block at least one of the farther positions. When a voltage is applied to the two electrode blocks, in the excimer lamp, the position pinched by the two electrode blocks in the second direction emits the strongest light. The fixing member is arranged on the outside of the light-emitting area, so it is possible to greatly suppress the obstruction of ultraviolet rays from the relevant light-emitting area toward the light extraction surface.

Therefore, according to the aforementioned structure, it is possible to realize a compact ultraviolet irradiation device that suppresses a decrease in light extraction efficiency while maintaining stable light emission.

The aforementioned fixing member is composed of an elastic member made of metal; The arrangement may be such that the outer surface of the arc tube of the excimer lamp is contacted from the opposite side of the first electrode block and the second electrode block in the first direction.

According to the related structure, the excimer lamp can be given stress from opposite sides of the two electrode blocks in the first direction by the elastic force of the elastic member. As a result, the contact state between the excimer lamp and the electrode block can be stabilized. In addition, by configuring the fixing member with a metal member, it is possible to suppress deterioration with respect to ultraviolet rays.

The fixing member may be arranged at a position separated from the first electrode block and the second electrode block in the second direction.

According to the aforementioned structure, the fixing member is arranged at a position separated from the electrode block, so that the fixing member can be prevented from becoming the starting point of discharge. As a result, the discharge state can be suppressed from becoming unstable.

The aforementioned fixing member is formed by bending a part of a metal plate and having a flat portion and a curved portion, and the aforementioned curved portion constitutes the aforementioned elastic member; The aforementioned lamp room may also have: The first housing is formed by forming a groove that can be inserted into the flat portion of the fixing member, and the light extraction surface; and The second housing is formed by installing the first electrode block and the second electrode block.

According to the foregoing configuration, in a state where the excimer lamp is arranged in such a way that the first housing is fitted into the flat portion of the fixing member, and the second housing where the electrode block is mounted, the outer surface of the arc tube is in contact with the two electrode blocks. The shell is integrated, and the excimer lamp can be installed in the lamp chamber while stably contacting the electrode block. That is, it is possible to manufacture a compact ultraviolet irradiation device with a stable discharge state by simple operations. In addition, the fixing member can be attached to the first housing without using an adhesive. Therefore, even if the light-emitting state continues, the fixing member can be prevented from being detached from the first housing.

The fixing member forms a slit in a part of the curved portion, and pinches two or more positions of the slit in a third direction orthogonal to the first direction and the second direction, and is in contact with the light emission of the excimer lamp. The outer surface of the tube can also be used.

According to the related structure, the excimer lamp can be pressed toward the electrode block at a plurality of positions from the light extraction surface side. Thereby, the effect of stably contacting the excimer lamp with the electrode block is improved.

The aforementioned fixing member has: The fastening portion is for fastening at least one of the first electrode block and the second electrode block from the light extraction surface side in the first direction; In a position on the outside of the fastening portion in the second direction, the outer surface of the arc tube of the excimer lamp may be contacted from the light extraction surface side.

Even with the related structure, the fixing member is located outside the electrode block and contacts the outer surface of the arc tube of the excimer lamp, so it is difficult to hinder the ultraviolet rays traveling toward the light extraction surface. Therefore, it is possible to realize a compact ultraviolet irradiation device that suppresses a decrease in light extraction efficiency while maintaining stable light emission.

As a more specific example, the fixing member has a concave portion in which a part of a metal plate is bent and inserted into the excimer lamp, and a connecting portion extending from the fastening portion side to the concave portion side in the second direction Made The connecting portion may be formed at a position where the concave portion is displaced in a third direction orthogonal to the first direction and the second direction.

In addition, the ultraviolet irradiation device has a plurality of the excimer lamps arranged in a manner of being spaced apart in a third direction orthogonal to the first direction and the second direction; At least one of the aforementioned fixing members may be configured to be in contact with a plurality of the aforementioned excimer lamps.

According to the related structure, a plurality of excimer lamps are installed in the lamp chamber, so high-output ultraviolet rays can be emitted from the light extraction surface. Then, at least one fixing member is arranged in a manner to suppress the displacement of the plurality of excimer lamps in the first direction, so it is possible to realize an ultraviolet irradiation device that can reduce the number of parts while maintaining stable light emission. [Effects of the invention]

According to the present invention, it is possible to realize a compact ultraviolet irradiation device that suppresses a decrease in light extraction efficiency while maintaining stable light emission.

The embodiment of the ultraviolet irradiation device of the present invention will be described with reference to the drawings as appropriate. In addition, each of the following drawings is a schematic diagram, and the size ratio on the drawing does not necessarily match the actual size ratio. In addition, the size ratios are not necessarily the same among the drawings.

[First Embodiment] Fig. 1 is a perspective view schematically showing the appearance of the ultraviolet irradiation device. FIG. 2 is a perspective view of the main body housing portion 22 and the cover portion 23 of the lamp chamber 2 of the ultraviolet irradiation device 1 disassembled from FIG. 1. Furthermore, in this embodiment, as described later, the main body housing portion 22 further includes a first housing 22a and a second housing 22b.

In each of the following figures, the description will be made with reference to the X direction as the extraction direction of the ultraviolet rays L1, the YZ plane as the plane orthogonal to the X direction, and the X-Y-Z coordinate system. In more detail, as will be described later with reference to the drawings following FIG. 2, the tube axis direction of the excimer lamp 3 is set to the Y direction, and the direction orthogonal to the X direction and the Y direction is set to the Z direction. The X direction corresponds to the "first direction", the Y direction corresponds to the "second direction", and the Z direction corresponds to the "third direction".

In addition, in the following description, when the direction of expression is distinguished between positive and negative directions, it is described with positive and negative signs like "+X direction" and "-X direction". In addition, when expressing directions without distinguishing between positive and negative directions, only the "X direction" is described. That is, in this specification, when only the "X direction" is described, both the "+X direction" and the "-X direction" are included. The same applies to the Y direction and the Z direction.

As shown in FIGS. 1 and 2, the ultraviolet irradiation device 1 includes a lamp chamber 2 in which a light extraction surface 10 is formed on one surface. The lamp chamber 2 is provided with a main body housing portion 22 and a cover portion 23, and the excimer lamp 3 and electrode blocks (11, 12) are housed in the main body housing portion 22. In addition, in the present embodiment, a situation where four excimer lamps 3 (3a, 3b, 3c, 3d) are housed in the lamp chamber 2 will be described as an example (refer to FIG. 3). However, the excimer lamp 3 The number can be one, two, three, or more than five. The electrode blocks (11, 12) constitute electrodes for supplying power to each excimer lamp 3.

In this embodiment, as shown in FIG. 2, an optical filter 21 is provided in a region constituting the light extraction surface 10 of the cover part 23. The characteristics of the optical filter 21 will be described later.

3 and 4 are perspective views of the main body housing portion 22 omitted from FIG. 2 and only the electrode blocks (11, 12) and the excimer lamp 3 (3a, 3b, 3c, 3s) are shown. Figure 3 and Figure 4 differ only in viewing angles. Moreover, FIG. 5 is a perspective view in which the illustration of the excimer lamp 3 is further omitted from FIG. 4.

As shown in FIGS. 3 and 4, the ultraviolet irradiation device 1 of the present embodiment includes four excimer lamps 3 (3a, 3b, 3c, 3d) arranged in the Z direction. In addition, two electrode blocks (11, 12) are arranged so as to contact the outer surface of the arc tube of each excimer lamp 3. Hereinafter, the electrode block 11 located on the -Y side is appropriately referred to as the "first electrode block 11", and the electrode block 12 located on the +Y side is referred to as the "second electrode block 12" as appropriate.

The first electrode block 11 and the second electrode block 12 are arranged at positions spaced apart in the Y direction. In the example shown in FIG. 5, the first electrode block 11 has a curved shape along the outer surface of the luminous tube of the excimer lamp 3 and the placement area 11a where the excimer lamp 3 is placed, and is formed in the opposite The excimer lamp 3 is isolated from a position in the Z direction, and a tapered surface 11b inclined with respect to the YZ plane. Similarly, the second electrode block 12 also has a mounting area 12a and a tapered surface 12b.

Furthermore, the first electrode block 11 and the second electrode block 12 are made of a conductive material, and more desirably are made of a material showing reflectivity to ultraviolet rays emitted from the excimer lamp 3. As an example, both the first electrode block 11 and the second electrode block 12 are made of Al, Al alloy, stainless steel, or the like.

The first electrode block 11 and the second electrode block 12 are both in contact with the outer surface of the luminous tube of each excimer lamp 3 (3a, 3b, 3c, 3d) while straddling each excimer lamp 3 in the Z direction. Way to configure.

Fig. 6 is a schematic diagram showing the positional relationship between the excimer lamp 3 and the electrode blocks (11, 12), and corresponds to a schematic plan view of the excimer lamp 3 when viewed from the +Z direction. In Figure 6, only the four excimer lamps 3 (3a, 3b, 3c, 3d) are shown, the excimer lamp 3a located on the most -Z side, and the other excimer lamps (3b, 3c, 3d) are omitted. As shown in the figure, as described above, the excimer lamps (3b, 3c, 3d) are arranged in the +Z direction.

The excimer lamp 3 has a tube body with the Y direction as the tube axis direction, and the outer surface of the arc tube of the excimer lamp 3 is in contact with each electrode block (11, 12) in a position separated from the Y direction. In the tube body of the excimer lamp 3, a luminous gas 3G is enclosed. If a high-frequency AC voltage of, for example, about 10 kHz to 5 MHz is applied between the electrode blocks (11, 12), the tube body of the excimer lamp 3 is passed through, and the aforementioned voltage is applied to the luminous gas 3G. At this time, discharge plasma is generated in the discharge space enclosed with the luminescent gas 3G, and the atoms of the luminescent gas 3G are excited to be in an excimer state. When the atoms are transferred to the base state, excimer light emission is generated.

The wavelength of the ultraviolet light L1 emitted from the excimer lamp 3 is determined depending on the substance of the luminescent gas 3G. For example, when KrCl is included as the luminescent gas 3G, the ultraviolet light L1 emitted from the excimer lamp 3 shows a spectrum with a main peak wavelength around 222 nm (see FIG. 7).

As the luminescent gas 3G, in addition to KrCl, KeBr, ArF, etc. can be used. When the luminescent gas 3G contains KrBr, ultraviolet rays L1 with a main peak wavelength around 207 nm are emitted from the excimer lamp 3 system. When the luminescent gas 3G contains ArF, ultraviolet rays L1 with a main peak wavelength around 193 nm are emitted from the excimer lamp 3 system. In any of these gas species, the excimer lamp 3 generates ultraviolet light L1 whose main peak wavelength belongs to a wavelength band of 190 nm or more and 225 nm or less. Furthermore, in addition to the aforementioned gas species, an inert gas such as argon (Ar) and neon (Ne) may be mixed.

When the luminous gas 3G contains KrCl, as shown in Fig. 7, in the spectrum of ultraviolet L1, the light output is almost concentrated near 222nm, which is the main peak wavelength. However, the wavelength band above 240nm, which is concerned about the effect on the human body, is only The light output was also confirmed for a small amount. Therefore, in the region constituting the light extraction surface 10, an optical filter 21 is provided for the purpose of blocking light components in the relevant wavelength band. In other words, the optical filter 21 has a function of blocking ultraviolet rays of 240 nm or more and 300 nm or less.

As described above, the excimer lamps 3 (3a, 3b, 3c, 3d) included in the ultraviolet irradiation device 1 of this embodiment are arranged such that the outer surface of the arc tube contacts the electrode blocks (11, 12). However, if these contact states are unstable, the application state of the voltage to each excimer lamp 3 fluctuates, or a sufficient voltage cannot be applied as a result, and the discharge may become unstable. According to a related point of view, the ultraviolet irradiation device 1 is equipped with a fixing member 5 for stabilizing the contact state of the excimer lamp 3 (3a, 3b, 3c, 3d) and the electrode block (11, 12) (refer to Figures 8 to 14) . Hereinafter, the structure of the fixing member 5 will be described with reference to each of FIGS. 8 to 14.

FIG. 8 is a schematic plan view when the surface on the -X side of the main body casing 22, that is, the surface on the opposite side of the light extraction surface 10, is viewed from the +X direction. Fig. 9 is a perspective view showing only the excimer lamp 3, the fixing member 5, and the electrode blocks (11, 12) and is shown schematically. Fig. 10 is viewed from the +X side and the light extraction direction in the opposite direction (toward the -X direction). The top view of the mode at the time of the state. FIG. 11 is a schematic perspective view of the fixing member 5.

FIG. 12 is a schematic perspective view for explaining the contact state of the fixing member 5 and the excimer lamp 3, and for the convenience of description, the illustration of the excimer lamp 3c is omitted. Fig. 13 is a schematic plan view of the state of Fig. 9 when viewed in the +Y direction. Fig. 14 is a schematic plan view when the state of Fig. 8 is viewed in the +Z direction. However, in FIG. 14 for convenience of description, the illustration of the wall surface of the main body housing 22 located on the most -Z side is omitted.

The electrode blocks (11, 12) are in contact with the excimer lamp 3 from the opposite side of the light extraction direction, that is, the -X side. On the other hand, the fixing member 5 is arranged so as to be in contact with the excimer lamp 3 from the +X side.

The fixing member 5 is made of an elastic member, and more specifically, made of a metal member such as stainless steel. In particular, as shown in FIG. 11, it is desirable that the fixing member 5 is formed by bending a part of a plate material, having a flat portion 5a and a curved portion 5b, and the curved portion 5b forms an elastic member. The bent portion 5b of the fixing member 5 has an elastic force toward the -X direction, so the excimer lamp 3, which is in contact with the outer surface of the arc tube by the bent portion 5b, faces the electrode block (11, 12 ) Is pushed in the direction. As a result, the outer surface of the arc tube of the excimer lamp 3 is in stable contact with the electrode blocks (11, 12).

Furthermore, the fixing member 5 is arranged in the Y direction, and is positioned more outside than the electrode blocks (11, 12) (refer to FIGS. 8 and 11). Therefore, although the fixing member 5 is located closer to the +X side than the excimer lamp 3, that is, the light extraction side, in the tube body of the excimer lamp 3, the discharge space is mainly composed of the electrode blocks (11, 12) Therefore, it is difficult to hinder the ultraviolet rays L1 traveling in the +X direction from the discharge space.

Furthermore, the fixing member 5 is arranged to be spaced apart from the electrode blocks (11, 12) in the Y direction, and is electrically insulated from the electrode blocks (11, 12). As a result, even if a voltage is applied to the electrode blocks (11, 12) for light emission, the fixing member 5 is not energized, so that it is possible to suppress the fixing member 5 from becoming a starting point of discharge. Therefore, by providing the fixing member 5, instability of the discharge is difficult to occur.

As shown in FIG. 11, it is preferable that the fixing member 5 is tied to a part of the curved portion 5b to form a slit 5c. The outer surface of the arc tube of the excimer lamp 3 whose shape is circular when viewed in the tube axis direction (Y direction) is formed by forming the related slit 5c, and contacts the fixing member 5 at a plurality of positions pinching the slit 5c (refer to FIG. 13 ). According to FIG. 13, at two locations (A1, A2) related to the Z direction, the outer surface of the arc tube of the excimer lamp 3 is in contact with the fixing member 5. Thereby, the contact between the excimer lamp 3 and the fixing member 5 is stabilized.

The fixing member 5 is preferably configured to be able to be attached to the main body case 22 without using an adhesive. Suppose that if the fixing member 5 is attached to the main body housing 22 with an adhesive, the universal adhesive has low resistance to ultraviolet light L1, so because the lighting state of the excimer lamp 3 continues, ultraviolet light L1 is irradiated to the adhesive This leads to the risk of deterioration of the adhesive. If the adhesive performance is reduced due to the deterioration of the adhesive, there is a possibility that the fixing member 5 may be detached from the main body housing 22.

As a specific example of a method of attaching the fixing member 5 to the main body housing 22 without using an adhesive, the main body housing 22 has a first housing 22a and a second housing 22b, which are formed on the side of the first housing 22a so as to be insertable. The groove part 6 of the flat part 5a of the fixing member 5 (refer FIG. 16). 15 is a schematic plan view of the first housing 22a in a state where the fixing member 5 is installed, and FIG. 16 is a schematic perspective view of the first housing 22a before the fixing member 5 is installed. Furthermore, a perspective view of the fixing member 5 is also shown in FIG. 16.

As shown in FIG. 16, by fitting the flat part 5a of the fixing member 5 to the groove part 6 attached to the 1st housing 22a, the fixing member 5 is attached to the predetermined position of the 1st housing 22a. Here, as described above, it is preferable to attach the fixing member 5 to the end side in the Y direction so that the fixing member 5 does not hinder the advancement of the ultraviolet rays L1. Therefore, it is preferable that the groove 6 is also formed on the end side in the Y direction of the first housing 22a.

Furthermore, the electrode blocks (11, 12) may be attached to the second case 22b other than the first case 22a (refer to FIG. 17). Fig. 17 is a schematic perspective view of a state where the excimer lamps 3 (3a, 3b, 3c, 3d) are arranged in a manner of contacting the electrode blocks (11, 12) with respect to the second housing 22b where the electrode blocks (11, 12) are installed. The first housing 22a in the state shown in FIG. 15 and the second housing 22b in the state shown in FIG. 3c, 3d) Stable contact with the electrode blocks (11, 12). FIG. 14 is a schematic plan view of the state in which the first housing 22a and the second housing 22n are integrated as seen in the +Z direction in this way.

[Second Embodiment] Regarding the second embodiment of the ultraviolet irradiation device, the difference from the first embodiment will be mainly described.

Fig. 18 is a schematic perspective view of the second embodiment of the ultraviolet irradiation device. In this embodiment, as in the first embodiment, the electrode blocks (11, 12) are in contact with the outer surface of the arc tube of the excimer lamp 3 from the -X side, and the fixing member 5 is in contact from the +X side. However, in this embodiment, compared with the first embodiment, the shape of the fixing member 5 is different. In this regard, description will be made with reference to FIGS. 19 to 21.

Fig. 19 is a perspective view showing only the excimer lamp (3a, 3b), the electrode blocks (11, 12), and the fixing member 5 are drawn out and schematically disclosed. FIG. 20 is a perspective view schematically showing the fixing member 5 of this embodiment. Fig. 21 is a schematic cross-sectional view of the XZ plane at the determined position in the state of Fig. 18.

In this embodiment, as shown in FIG. 19, the fixing member 5 is fixed to the electrode blocks (11, 12). In more detail, the fixing member 5 has a fastening portion 5d (refer to FIG. 20), through which the fastening portion 5d, the fixing member 5 and the electrode blocks (11, 12) are fastened by screws, for example.

As shown in FIG. 20, the fixing member 5 has a recess 5 e in a shape corresponding to the shape of the outer surface of the arc tube of the excimer lamp 3. Therefore, as shown in Fig. 21, after placing the excimer lamp 3 on the electrode block (11, 12) on the +X side, the outer surface of the arc tube of the excimer lamp 3 is embedded in the recess 5e from the +X side When the fixing member 5 is installed, the fixing member 5 and the electrode block (11, 12) can be fastened through the fastening portion 5d. As a result, the excimer lamp 3 is pushed from the +X side to the -X direction by the fixing member 5, that is, the electrode block (11, 12) side is pressed, so the excimer lamp 3 and the electrode block (11, 12) can be secured Stable contact.

Furthermore, in this embodiment, unlike the first embodiment, the fixing member 5 is spaced apart from the electrode blocks (11, 12) in the Y direction. However, the recess 5e of the fixing member 5 embedded in the excimer lamp 3, that is, the fixing member 5 is located in an area closer to +X than the excimer lamp 3, and is located closer to the Y direction than the electrode block (11, 12) Ends. More specifically, the fixing member 5 has a connecting portion 5f extending in the Y direction from the fastening portion 5d toward the recess 5e. Therefore, as in the first embodiment, it is possible to suppress the obstruction of the ultraviolet rays L1 that become the fixing member 5 emitted from the excimer lamp 3 and travel in the +X direction.

[Other embodiments] Hereinafter, other embodiments will be described.

<1> In the foregoing embodiment, it has been described that both the first electrode block 11 and the second electrode block 12 have tapered surfaces (11a, 11b). However, in the present invention, whether or not each electrode block has a tapered surface can be arbitrarily set. For example, in the first electrode block 11 shown in FIG. 22, the portion other than the groove 11g of the excimer lamp 3 may be formed with a flat surface. The same applies to the second electrode block 12.

<2> In a situation where the ultraviolet irradiation device 1 includes a plurality of excimer lamps 3, the arrangement positions of two or more excimer lamps 3 in the X direction may be displaced.

<3> In the foregoing embodiment, it has been described that the ultraviolet irradiation device 1 is provided with the optical filter 21 on the light extraction surface 10. However, in the present invention, whether the ultraviolet irradiation device 1 is equipped with the optical filter 21 can be arbitrarily set. . In particular, when the ultraviolet irradiation device 1 is installed in a situation where the possibility of irradiating the ultraviolet L1 to the human body is infinitely low, the optical filter 21 may not be installed.

In addition, in the foregoing embodiment, the situation in which the main emission wavelength of the ultraviolet light L1 emitted from the ultraviolet irradiation device 1 belongs to the wavelength band of 190 nm or more and 225 nm or less has been described. However, the present invention does not exclude that the main emission wavelength exceeds 225 nm. The ultraviolet ones. For example, the ultraviolet irradiation device 1 may include an excimer lamp 3 that uses XeCl as a luminescent gas 3G, and emits ultraviolet light L1 with a main peak wavelength of 308 nm.

<4> In the above-mentioned embodiment, it is assumed that one fixing member 5 is in contact with the plurality of excimer lamps 3 adjacently arranged in the Z direction from the +X side. However, each excimer lamp 3 may be provided with an individual fixing member 5 as a structure.

In addition, in the foregoing embodiment, it is assumed that the fixing members 5 are provided at the positions of the two ends relative to the tube axis direction (Y direction) of the excimer lamp 3. However, the present invention does not exclude a structure in which the fixing member 5 is provided only at one end of the Y direction. Even in the relevant situation, compared with the situation where the fixing member 5 is not present, it can also play a role in stabilizing the contact state of the excimer lamp 3 and the electrode blocks (11, 12).

1: Ultraviolet irradiation device 2: Light room 3: Excimer lamp 3a, 3b, 3c, 3d: Excimer lamp 3G: luminous gas 5: Fixed components 5a: flat part 5b: Bend 5c: gap 5d: Fastening part 5e: recess 5f: Connection part 6: Groove 11: The first electrode block 11a: Placement area 11b: Cone 11g: groove 12: The second electrode block 12a: Placement area 12b: Cone 22: body shell part 22a: first shell 22b: second housing 23: Lid part 100: Ultraviolet irradiation device 101: Grip 102: Frame 103: Light tube receiving part 104: light irradiation window 110: Excimer light 121: Outer tube 122: Inside tube 123G: Luminous gas 124: Outer electrode 125: inner electrode 126: Power Supply Department L1: Ultraviolet

[FIG. 1] A perspective view schematically showing the appearance of the ultraviolet irradiation device of the first embodiment. [Fig. 2] A perspective view of the main body housing part and the cover part of the lamp chamber of the ultraviolet irradiation device disassembled from Fig. 1. [Fig. 3] A schematic perspective view showing the structure of an electrode block and an excimer lamp included in the ultraviolet irradiation device. [Fig. 4] A perspective view with a changed viewpoint from Fig. 3. [Fig. 5] The illustration of the excimer lamp is omitted from Fig. 4, and a perspective view schematically showing the structure of the electrode block. [Fig. 6] A schematic plan view when the perspective view of Fig. 3 is viewed in the +Z direction. [Fig. 7] An example of the emission spectrum of an excimer lamp in which the luminescent gas contains KrCl is revealed. [Fig. 8] A schematic plan view when viewed toward the surface opposite to the light extraction surface of the main body casing. [Fig. 9] A perspective view showing only the excimer lamp, the fixing member, and the electrode block are drawn out and schematically revealed. [Fig. 10] A schematic plan view of the state of Fig. 9 when viewed from the -X direction. [Fig. 11] A schematic perspective view of the fixing member. [Fig. 12] A schematic perspective view for explaining the contact state of the fixing member and the excimer lamp. [Fig. 13] A schematic plan view of the state in Fig. 9 when viewed in the +Y direction. [Fig. 14] A schematic plan view of the state in Fig. 8 when viewed in the +Z direction. [Fig. 15] A schematic plan view of the first housing in a state where the fixing member is installed. [Fig. 16] A schematic perspective view of the first housing before the fixing member is installed. [Fig. 17] A schematic perspective view of the second housing with the electrode block installed. [Fig. 18] A schematic perspective view of the second embodiment of the ultraviolet irradiation device. [Fig. 19] A perspective view showing schematically only the excimer lamp, electrode block, and fixing member extracted from the structure of Fig. 18. [Fig. [Fig. 20] A perspective view schematically showing the fixing member in Fig. 18. [Fig. [Fig. 21] In the state of Fig. 18, a schematic cross-sectional view of the XZ plane at the predetermined position. [Fig. 22] A perspective view schematically showing another structure of the electrode block. [Fig. 23] A schematic diagram showing the structure of a conventional compact ultraviolet irradiation device. [FIG. 24] A schematic diagram showing the structure of an excimer lamp mounted on the ultraviolet irradiation device shown in FIG. 23.

2: Light room

3a, 3b, 3c, 3d: Excimer lamp

5: Fixed components

11: The first electrode block

12: The second electrode block

22: body shell part

Claims (8)

An ultraviolet irradiation device, which is characterized by having: The lamp room forms the light extraction surface; The excimer lamp is located in the lamp chamber, and is housed in a position spaced apart from the light extraction surface in a first direction, and emits ultraviolet rays; The first electrode block is arranged in such a way that it contacts the outer surface of the arc tube of the excimer lamp from the opposite side of the light extraction surface in the first direction; The second electrode block is spaced apart from the first electrode block in a second direction parallel to the tube axis of the excimer lamp. The configuration of the outer surface of the luminous tube of the molecular lamp; and The fixing member is arranged at a position farther from the second electrode block than the first electrode block in the second direction, and a position farther from the first electrode block than the second electrode block in the second direction At least one of them is in contact with the aforementioned excimer lamp. The ultraviolet irradiation device described in claim 1, wherein: The aforementioned fixing member is composed of an elastic member made of metal; It is arranged in such a manner that the outer surface of the arc tube of the excimer lamp is contacted from the opposite side of the first electrode block and the second electrode block in the first direction. The ultraviolet irradiation device described in claim 2, wherein: The fixing member is arranged at a position separated from the first electrode block and the second electrode block in the second direction. The ultraviolet irradiation device described in claim 3, wherein: The aforementioned fixing member is formed by bending a part of a metal plate and having a flat portion and a curved portion, and the aforementioned curved portion constitutes the aforementioned elastic member; The aforementioned lamp room has: The first housing is formed by forming a groove that can be inserted into the flat portion of the fixing member, and the light extraction surface; and The second housing is formed by installing the first electrode block and the second electrode block. The ultraviolet irradiation device described in claim 4, wherein: The fixing member forms a slit in a part of the curved portion, and pinches two or more positions of the slit in a third direction orthogonal to the first direction and the second direction, and is in contact with the light emission of the excimer lamp The outer surface of the tube. The ultraviolet irradiation device described in claim 2, wherein: The fixing member has: a fastening portion for fastening at least one of the first electrode block and the second electrode block from the light extraction surface side in the first direction; In the second direction, the outer surface of the arc tube of the excimer lamp is contacted from the light extraction surface side at a position outside the fastening portion. The ultraviolet irradiation device described in claim 6, wherein: The aforementioned fixing member is formed by using a part of a metal plate to bend into the recessed portion of the excimer lamp, and a connecting portion extending from the side of the fastening portion toward the side of the recessed portion in the second direction; The connecting portion is formed at a position displaced to the third direction orthogonal to the first direction and the second direction with respect to the concave portion. The ultraviolet irradiation device described in any one of claims 1 to 7, wherein: Having a plurality of the aforementioned excimer lamps arranged in a manner of being spaced apart in a third direction orthogonal to the aforementioned first direction and the aforementioned second direction; At least one of the aforementioned fixing members is configured to be in contact with the plurality of aforementioned excimer lamps.

Images