CN114423493A

CN114423493A - Ultraviolet irradiation device

Info

Publication number: CN114423493A
Application number: CN202080064896.3A
Authority: CN
Inventors: 柳生英昭; 森学
Original assignee: Ushio Denki KK
Current assignee: Ushio Denki KK
Priority date: 2019-10-07
Filing date: 2020-10-05
Publication date: 2022-04-29
Also published as: TW202128231A; WO2021070784A1; JP2021061177A; JP7335547B2

Abstract

The invention provides an ultraviolet irradiation device which is greatly miniaturized compared with the prior structure. The ultraviolet irradiation device includes: a lamp cover formed with a light extraction surface; an excimer lamp accommodated at a position separated in a first direction with respect to the light extraction surface; a first electrode block disposed in contact with an outer surface of the light emitting tube of the excimer lamp from a side opposite to the light extraction surface in the first direction; a second electrode block disposed in contact with an outer surface of the arc tube of the excimer lamp from a side opposite to the light extraction surface in the first direction at a position separated from the first electrode block in a second direction parallel to a tube axis of the excimer lamp; and a pressing member disposed at least one of a position farther from the second electrode block than the first electrode block in the second direction and a position farther from the first electrode block than the second electrode block in the second direction, and abutting against the excimer lamp.

Description

Ultraviolet irradiation device

Technical Field

The present invention relates to an ultraviolet irradiation apparatus.

Background

Conventionally, a small-sized external-ray irradiation device having an excimer lamp as a light source has been developed (see patent document 1 below). The ultraviolet irradiation device disclosed in patent document 1 is mainly assumed to be used for treatment of skin diseases.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2017-164417

Disclosure of Invention

Problems to be solved by the invention

Fig. 23 is a view schematically showing the structure of the small ultraviolet irradiation device disclosed in patent document 1. The ultraviolet irradiation device 100 includes a lamp housing 103 and a light emission window 104 housed in a case 102 including a grip 101. An excimer lamp 110 for emitting ultraviolet light is built in the lamp housing 103.

Fig. 24 is a view schematically showing the structure of the excimer lamp 110. The excimer lamp 110 has: a cylindrical outer tube 121; and a cylindrical inner tube 122 disposed coaxially with the outer tube 121 inside the outer tube 121 and having a smaller inner diameter than the outer tube 121. The outer tube 121 and the inner tube 122 are sealed at their ends in the direction d1, and an annular light emitting space is formed therebetween, and the light emitting gas 123G is sealed in the space.

A mesh-like or mesh-like outer electrode 124 is provided on the outer wall surface of the outer tube 121, and a membrane-like inner electrode 125 made of stainless steel or aluminum is provided on the inner wall surface of the inner tube 122. The outer electrode 124 and the inner electrode 125 are electrically connected to a power supply unit 126 capable of generating a high-frequency ac voltage.

By applying a high-frequency ac voltage between the outer electrode 124 and the inner electrode 125 by the power supply unit 126, a voltage is applied to the light-emitting gas 123G via the tube bodies of the outer tube 121 and the inner tube 122, and a discharge plasma is generated in the discharge space in which the light-emitting gas 123G is sealed. As a result, atoms of the luminescent gas 123G are excited to an excimer state, and excimer light emission is generated when the atoms transition to a ground state.

However, the excimer lamp 110 shown in fig. 24 is formed by arranging two kinds of tubes (121, 122) coaxially as described above. Therefore, the housing 102 for housing the excimer lamp 110 has to be secured in a certain size. As described above, the ultraviolet irradiation device 100 described in patent document 1 is expected to be used for treatment of skin diseases, and the user and the use situation are limited, and therefore, the shape and size shown in fig. 23 have not been a significant problem in practical use.

However, for example, in order for a general consumer to perform a sterilization treatment at home in a place where bacteria are considered to be relatively liable to grow, such as a toilet, a kitchen, a bathroom, and shoes, it is preferable that the size and weight be such that the bacteria can be easily carried. If the excimer lamp 110 shown in fig. 23 is assumed to be used for such an application, a practical problem may occur in the structure of the ultraviolet irradiation apparatus 100 including the excimer lamp 110 as a light source.

Further, although the use of sterilization is mentioned above, the use is not limited to medical practice, and even in general industrial use, it is effective to realize an ultraviolet irradiation device that is smaller than conventional ones, because the range of mountable sites and usable places can be enlarged.

In view of the above problems, an object of the present invention is to provide an ultraviolet irradiation device which is significantly smaller than a conventional structure.

Means for solving the problems

The ultraviolet irradiation apparatus according to the present invention is characterized by comprising:

a lamp cover formed with a light extraction surface;

an excimer lamp which is accommodated in the lamp shade at a position separated from the light extraction surface in a first direction and emits ultraviolet rays;

a first electrode block disposed in contact with an outer surface of the light emitting tube of the excimer lamp from a side opposite to the light extraction surface in the first direction;

a second electrode block disposed in contact with an outer surface of the light emitting tube of the excimer lamp from a side opposite to the light extraction surface in the first direction at a position separated from the first electrode block in a second direction parallel to a tube axis of the excimer lamp; and

and a pressing member disposed at least one of a position farther from the second electrode block than the first electrode block in the second direction and a position farther from the first electrode block than the second electrode block in the second direction, and abutting against the excimer lamp.

The ultraviolet irradiation device comprises a first electrode block and a second electrode block which are in contact with the outer surface of a luminous tube of the excimer lamp. The electrode blocks are respectively in contact with the outer surface of the light emitting tube of the excimer lamp at positions separated in the tube axis direction of the excimer lamp. Therefore, the excimer lamp can discharge by a simple straight tube structure, and therefore, it is not necessary to adopt a structure in which a tube body is provided in two concentric circles and the luminescent gas is sealed between the inner tube and the outer tube, which is a structure generally used in the conventional excimer lamp, that is, it is not necessary to adopt a so-called "double tube structure".

For example, the excimer lamp provided in the ultraviolet irradiation apparatus has a tube body with a length in the tube axis direction (second direction) of 15mm to 200mm, and an outer diameter of 2mm to 16 mm.

When a voltage is applied between the first and second electrode blocks, light is emitted mainly in the tube of the excimer lamp located between the electrode blocks. When ultraviolet rays generated by this light emission travel toward the light extraction surface, they are extracted to the outside of the ultraviolet irradiation device through the light extraction surface. In this case, since the first electrode block and the second electrode block are both configured to contact the outer surface of the arc tube of the excimer lamp from the side opposite to the light extraction surface in the first direction, it is suppressed that these electrode blocks interfere with the ultraviolet light traveling toward the light extraction surface.

However, as described above, when the ultraviolet irradiation device according to the present invention is assumed to be a small device, it is also considered to be carried by a user. In this case, when both the first electrode block and the second electrode block are configured to contact the outer surface of the arc tube of the excimer lamp from the side opposite to the light extraction surface in the first direction, it is assumed that the position of the excimer lamp in the globe is shifted during transportation. For example, if the position of the excimer lamp is shifted in the first direction, sufficient contact with the electrode block cannot be secured, and there is a possibility that sufficient discharge is not formed or the discharge state changes when a voltage is applied. This problem is not limited to the case of transportation, but may occur due to vibrations or the like generated during operation of the machine even when the machine is mounted on another machine.

In view of the above problem, the present inventors have first studied a case where a pressing member is attached to press the excimer lamp from the side opposite to the electrode block in the first direction. However, if the position opposite to the electrode block in the first direction is the light extraction surface side, if the pressing member is attached to this position, the travel of the ultraviolet light may be hindered.

In contrast, according to the ultraviolet irradiation device of the present invention, the pressing member is disposed at least one of a position farther from the second electrode block than the first electrode block in the second direction and a position farther from the first electrode block than the second electrode block in the second direction. When a voltage is applied to the two electrode blocks, light is emitted most intensely at a position sandwiched by the two electrode blocks in the second direction within the excimer lamp. Since the pressing member is disposed outside the light emitting region, the ultraviolet rays that would otherwise interfere with the light extraction surface from the light emitting region are greatly suppressed.

Therefore, according to the above configuration, a small ultraviolet irradiation device is realized which maintains stable light emission and suppresses a decrease in light extraction efficiency.

The pressing member may include a metal elastic member,

the pressing member is configured to contact an outer surface of a light emitting tube of the excimer lamp from a side opposite to the first electrode block and the second electrode block in the first direction.

According to this configuration, the excimer lamp can be stressed in the first direction from the side opposite to the two electrode blocks by the elastic force of the elastic member. As a result, the contact state between the excimer lamp and the electrode block can be stabilized. Further, by constituting the pressing member by a metal member, deterioration with respect to ultraviolet rays can be suppressed.

The pressing member may be disposed at a position separated from the first electrode block and the second electrode block in the second direction.

According to the above configuration, since the pressing member is disposed at a position separated from the electrode block, the pressing member is prevented from becoming a starting point of the discharge. As a result, the discharge state is suppressed from becoming unstable.

The pressing member may have a flat portion and a curved portion formed by bending a part of a metal plate material, and the curved portion may constitute the elastic member,

the lamp cover has:

a first housing in which a groove portion into which the flat portion of the pressing member can be fitted and the light extraction surface are formed; and

and the second shell is provided with the first electrode block and the second electrode block.

According to the above configuration, the excimer lamp can be mounted in the globe in a state of being stably in contact with the electrode block by integrating the two casings in a state where the flat portion of the pressing member is fitted into the first casing and the excimer lamp is disposed in the second casing to which the electrode block is attached so that the outer surface of the arc tube is in contact with the two electrode blocks. That is, a small ultraviolet irradiation device with a stable discharge state can be manufactured by a simple operation. Further, since the pressing member can be attached to the first housing without using an adhesive, even if the light emission state continues, the pressing member can be prevented from being detached from the first housing.

The pressing member may have a slit formed in a part of the curved portion, and may be in contact with an outer surface of the arc tube of the excimer lamp at two or more positions across the slit in a third direction orthogonal to the first direction and the second direction.

With this configuration, the excimer lamp can be pressed against the electrode block at a plurality of positions from the light extraction surface side. This improves the effect of stably contacting the excimer lamp to the electrode block.

The pressing member may have a fastening portion fastened from the light extraction surface side in the first direction with respect to at least one of the first electrode block and the second electrode block,

the pressing member is in contact with an outer surface of the arc tube of the excimer lamp from the light extraction surface side at a position outside the fastening portion in the second direction.

Even with this configuration, since the pressing member is in contact with the outer surface of the arc tube of the excimer lamp at a position outside the electrode block, the ultraviolet light traveling toward the light extraction surface is less likely to be obstructed. Therefore, a small ultraviolet irradiation device is realized which maintains stable light emission and suppresses a decrease in light extraction efficiency.

As a more specific example, the pressing member may include: a recess into which the excimer lamp is fitted by bending a part of a metal plate; and a coupling portion extending from the fastening portion side toward the recess portion side in the second direction,

the coupling portion is formed at a position displaced in a third direction orthogonal to the first direction and the second direction with respect to the recess.

Further, the ultraviolet irradiation apparatus may include a plurality of the excimer lamps which are arranged to be separated from each other in a third direction orthogonal to the first direction and the second direction,

at least one of the pressing members is configured to contact with respect to the plurality of excimer lamps.

According to this configuration, since the plurality of excimer lamps are mounted in the lamp housing, high-output ultraviolet rays can be emitted from the light extraction surface. Further, since one pressing member is provided to suppress displacement in the first direction with respect to the plurality of excimer lamps, the ultraviolet irradiation apparatus can be realized in which the number of components is reduced and stable light emission can be maintained.

Effects of the invention

According to the present invention, a small ultraviolet irradiation device is realized which maintains stable light emission and suppresses a decrease in light extraction efficiency.

Drawings

Fig. 1 is a perspective view schematically showing the external appearance of an ultraviolet irradiation device according to a first embodiment.

Fig. 2 is a perspective view of the main body case and the lid of the globe of the ultraviolet irradiation device exploded from fig. 1.

FIG. 3 is a perspective view schematically showing the structure of an electrode block and an excimer lamp provided in an ultraviolet irradiation apparatus.

Fig. 4 is a perspective view from which the viewpoint is changed from fig. 3.

Fig. 5 is a perspective view of the excimer lamp from fig. 4, in which the illustration thereof is omitted, and schematically shows the structure of the electrode block.

Fig. 6 is a schematic plan view of the perspective view of fig. 3 viewed from the + Z direction.

FIG. 7 shows an example of an emission spectrum of an excimer lamp containing KrCl in the emission gas.

Fig. 8 is a schematic plan view when viewed from a surface of the main body case opposite to the light extraction surface.

Fig. 9 is a perspective view schematically showing only the excimer lamp, the pressing member, and the electrode block.

Fig. 10 is a schematic plan view of the state of fig. 9 as viewed from the-X direction.

Fig. 11 is a schematic perspective view of the pressing member.

Fig. 12 is a schematic perspective view for explaining a contact state between the pressing member and the excimer lamp.

Fig. 13 is a schematic plan view of the state of fig. 9 as viewed from the + Y direction.

Fig. 14 is a schematic plan view of the state of fig. 8 as viewed from the + Z direction.

Fig. 15 is a schematic plan view of the first housing in a state where the pressing member is attached.

Fig. 16 is a schematic perspective view of the first housing before the pressing member is mounted.

Fig. 17 is a schematic perspective view of the second housing to which the electrode block is attached.

Fig. 18 is a schematic perspective view of a second embodiment of the ultraviolet irradiation device.

Fig. 19 is a perspective view schematically showing only the excimer lamp, the electrode block, and the pressing member extracted from the structure of fig. 18.

Fig. 20 is a perspective view schematically showing the pressing member in fig. 18.

Fig. 21 is a schematic cross-sectional view of the XZ plane at a predetermined position in the state of fig. 18.

Fig. 22 is a perspective view schematically showing another structure of the electrode block.

Fig. 23 is a view schematically showing the structure of a conventional small ultraviolet irradiation device.

FIG. 24 is a view schematically showing the structure of an excimer lamp mounted on the ultraviolet irradiation apparatus shown in FIG. 23.

Detailed Description

Embodiments of the ultraviolet irradiation device according to the present invention will be described with reference to the accompanying drawings as appropriate. The drawings described below are schematically illustrated, and the dimensional ratio in the drawings does not necessarily match the actual dimensional ratio. In addition, the dimensional ratio is not necessarily uniform between the drawings.

[ first embodiment ]

Fig. 1 is a perspective view schematically showing the external appearance of an ultraviolet irradiation device. Fig. 2 is a perspective view of the ultraviolet irradiation device 1 in which the main body case 22 and the lid 23 of the globe 2 are exploded from fig. 1. In the present embodiment, the main body case 22 further includes a first case 22a and a second case 22b, as described later.

In the following drawings, the description will be made with reference to an X-Y-Z coordinate system in which the extracting direction of the ultraviolet ray L1 is defined as an X direction and a plane orthogonal to the X direction is defined as a YZ plane. More specifically, as will be described later with reference to the drawings below in fig. 2, the tube axis direction of the excimer lamp 3 is defined as the Y direction, and the direction orthogonal to the X direction and the Y direction is defined as the Z direction. The X direction corresponds to a "first direction", the Y direction corresponds to a "second direction", and the Z direction corresponds to a "third direction".

In the following description, when directions are indicated, positive and negative signs are given as "+ X direction" and "— X direction" when directions are distinguished. In addition, when directions are indicated without distinguishing between positive and negative directions, only the directions are described as "X directions". That is, in the present specification, when only "X direction" is described, both "+ X direction" and "— X direction" are included. The same applies to the Y direction and the Z direction.

As shown in fig. 1 and 2, the ultraviolet irradiation device 1 includes a globe 2 having a light extraction surface 10 formed on one surface. The globe 2 includes a main body case 22 and a lid 23, and the excimer lamp 3 and the electrode blocks (11, 12) are housed in the main body case 22. In the present embodiment, the case where four excimer lamps 3(3a, 3b, 3c, 3d) are accommodated in the globe 2 is described as an example (see fig. 3), but the number of excimer lamps 3 may be one, or two, three, or five or more. The electrode blocks (11, 12) constitute electrodes for supplying power to the excimer lamps 3.

In the present embodiment, as shown in fig. 2, an optical filter 21 is provided in a region constituting the light extraction surface 10 of the lid 23. The characteristics of the optical filter 21 will be described later.

Fig. 3 and 4 are perspective views of fig. 2, in which the main body case 22 is omitted and only the electrode blocks (11, 12) and the excimer lamps 3(3a, 3b, 3c, 3d) are shown. Fig. 3 and 4 differ only in the angle of observation. Fig. 5 is a perspective view of the excimer lamp 3, which is not shown in fig. 4.

As shown in fig. 3 and 4, the ultraviolet irradiation apparatus 1 of the present embodiment includes four excimer lamps 3(3a, 3b, 3c, 3d) arranged separately in the Z direction. Two electrode blocks (11, 12) are disposed so as to be in contact with the outer surface of the arc tube of each excimer lamp 3. Hereinafter, the electrode block 11 located on the-Y side is referred to as a "first electrode block 11", and the electrode block 12 located on the + Y side is referred to as a "second electrode block 12", as appropriate.

The first electrode block 11 and the second electrode block 12 are disposed at positions separated in the Y direction. In the example shown in fig. 5, the first electrode block 11 is configured to have: a mounting region 11a having a shape along the curved surface of the outer surface of the arc tube of the excimer lamp 3 and on which the excimer lamp 3 is mounted; and a tapered surface 11b formed at a position separated from the excimer lamp 3 in the Z direction and inclined with respect to the YZ plane. Similarly, the second electrode block 12 also has a mounting region 12a and a tapered surface 12 b.

The first electrode block 11 and the second electrode block 12 are made of a conductive material, and preferably made of a material that exhibits reflectivity with respect to ultraviolet rays emitted from the excimer lamp 3. For example, the first electrode block 11 and the second electrode block 12 are made of Al, Al alloy, stainless steel, or the like.

The first electrode block 11 and the second electrode block 12 are each in contact with the outer surface of the arc tube of each excimer lamp 3(3a, 3b, 3c, 3d), and are arranged so as to straddle each excimer lamp 3 in the Z direction.

FIG. 6 is a schematic view showing the positional relationship between the excimer lamp 3 and the electrode blocks (11, 12), and corresponds to a schematic plan view of the excimer lamp 3 viewed from the + Z direction. In fig. 6, only the excimer lamp 3a located on the most-Z side among the four excimer lamps 3(3a, 3b, 3c, 3d) is shown, and the other excimer lamps (3b, 3c, 3d) are not shown, but the excimer lamps (3b, 3c, 3d) are also arranged in the + Z direction as described above.

The excimer lamp 3 has a tube body with the Y direction as the tube axis direction, and the outer surface of the arc tube of the excimer lamp 3 is in contact with each electrode block (11, 12) at the position separated along the Y direction. The tube of the excimer lamp 3 is filled with a luminescent gas 3G. When a high-frequency ac voltage of, for example, about 10kHz to 5MHz is applied between the electrode blocks (11, 12), the voltage is applied to the light-emitting gas 3G via the tube body of the excimer lamp 3. At this time, discharge plasma is generated in the discharge space in which the luminescent gas 3G is sealed, atoms of the luminescent gas 3G are excited to an excimer state, and excimer light emission is generated when the atoms transition to a ground state.

The wavelength of the ultraviolet light L1 emitted from the excimer lamp 3 depends on the substance of the luminescent gas 3G. For example, when KrCl is contained as the luminescent gas 3G, the ultraviolet light L1 emitted from the excimer lamp 3 exhibits a spectrum having a main peak wavelength of around 222nm (see fig. 7).

As the luminescent gas 3G, in addition to KrCl, KrBr, ArF, or the like can be used. When KrBr is contained in the luminescent gas 3G, ultraviolet L1 having a main peak wavelength of around 207nm is emitted from the excimer lamp 3. When ArF is contained in the light-emitting gas 3G, ultraviolet light L1 having a main peak wavelength of about 193nm is emitted from the excimer lamp 3. In any of these gas types, ultraviolet light L1 having a main emission wavelength falling within a wavelength range of 190nm to 225nm is generated from the excimer lamp 3. In addition to the above-described gas species, an inert gas such as argon (Ar) or neon (Ne) may be mixed.

When KrCl is contained in the luminescent gas 3G, as shown in fig. 7, the light output is substantially concentrated in the vicinity of 222nm, which is the main peak wavelength, in the spectrum of the ultraviolet light L1, but a very small light output is observed even in a wavelength band of 240nm or more where there is a concern about the influence on the human body. Therefore, in the region constituting the light extraction surface 10, an optical filter 21 is provided for the purpose of blocking the light component in the wavelength band. That is, the optical filter 21 has a function of blocking ultraviolet rays of 240nm to 300 nm.

As described above, the excimer lamp 3(3a, 3b, 3c, 3d) included in the ultraviolet irradiation device 1 of the present embodiment is disposed such that the outer surface of the arc tube thereof is in contact with the electrode blocks (11, 12). However, if the contact state is unstable, the voltage applied to each excimer lamp 3 may fluctuate or a sufficient voltage may not be applied, resulting in unstable discharge. From this viewpoint, the ultraviolet irradiation apparatus 1 includes the pressing member 5 (see fig. 8 to 14) for stabilizing the contact between the excimer lamp 3(3a, 3b, 3c, 3d) and the electrode blocks (11, 12). The structure of the pressing member 5 will be described below with reference to fig. 8 to 14.

Fig. 8 is a schematic plan view of a surface on the-X side of the main body case 22, that is, a surface on the opposite side of the light extraction surface 10, when viewed from the + X direction. Fig. 9 is a perspective view schematically showing only the excimer lamp 3, the pressing member 5, and the electrode blocks (11, 12) drawn out, and fig. 10 is a schematic plan view of the state of fig. 9 as viewed from the + X side in the direction opposite to the light extraction direction (the-X direction). Fig. 11 is a schematic perspective view of the pressing member 5.

Fig. 12 is a schematic perspective view for explaining a contact state between the pressing member 5 and the excimer lamp 3, and the excimer lamp 3c is not shown for convenience of explanation. Fig. 13 is a schematic plan view of the state of fig. 9 as viewed from the + Y direction. Fig. 14 is a schematic plan view of the state of fig. 8 as viewed from the + Z direction. However, in fig. 14, for convenience of explanation, the wall surface of the main body case 22 located on the most-Z side is not shown.

The electrode blocks (11, 12) are in contact with the excimer lamp 3 from the side opposite to the light extraction direction, i.e., the-X side. On the other hand, the pressing member 5 is disposed in contact with the excimer lamp 3 from the + X side.

The pressing member 5 is made of an elastic member, and more specifically, a metal member such as stainless steel. Particularly preferably, as shown in fig. 11, the pressing member 5 has a flat portion 5a and a bent portion 5b by bending a part of the plate material, and an elastic member is formed by the bent portion 5 b. Since the bent portion 5b of the pressing member 5 has an elastic force directed in the-X direction, the excimer lamp 3, which has the outer surface of the arc tube in contact with the bent portion 5b, is pressed in the direction of the electrode blocks (11, 12) located on the-X side of the excimer lamp 3. As a result, the outer surface of the arc tube of the excimer lamp 3 is stably in contact with the electrode blocks (11, 12).

The pressing member 5 is disposed outside the electrode blocks (11, 12) in the Y direction (see fig. 8 and 10). Therefore, although the pressing member 5 is located on the + X side, i.e., the light extraction side, of the excimer lamp 3, the ultraviolet light L1 traveling from the discharge space in the + X direction is not easily obstructed because the discharge space is mainly formed between the electrode blocks (11, 12) in the tube body of the excimer lamp 3.

The pressing member 5 is disposed apart from the electrode blocks (11, 12) in the Y direction, and is electrically insulated from the electrode blocks (11, 12). As a result, even if a voltage is applied to the electrode blocks (11, 12) for light emission, the pressing member 5 is not energized, and thus the pressing member 5 is prevented from becoming a starting point of discharge. Therefore, the discharge is less likely to be unstable due to the provision of the pressing member 5.

As shown in fig. 11, the pressing member 5 preferably has a slit 5c formed in a part of the bent portion 5 b. By forming the slit 5c, the outer surface of the arc tube of the excimer lamp 3 having a circular shape when viewed in the tube axis direction (Y direction) is in contact with the pressing member 5 at a plurality of locations across the slit 5c (see fig. 13). According to fig. 13, the outer surface of the light emitting tube of the excimer lamp 3 is in contact with the pressing member 5 at two locations (a1, a2) in the Z direction. This stabilizes the contact between the excimer lamp 3 and the pressing member 5.

The pressing member 5 is more preferably configured to be attachable to the main body case 22 without using an adhesive. If the pressing member 5 is attached to the main body case 22 with an adhesive, the resistance of the general-purpose adhesive to the ultraviolet light L1 is low, and therefore, the lighting state of the excimer lamp 3 continues, and the ultraviolet light L1 is irradiated to the adhesive, which may deteriorate the adhesive. If the adhesive performance is reduced due to deterioration of the adhesive, the pressing member 5 may be detached from the main body case 22.

As a specific example of a method of attaching the pressing member 5 to the main body case 22 without using an adhesive, the main body case 22 includes a first case 22a and a second case 22b, and a groove portion 6 into which the flat portion 5a of the pressing member 5 can be fitted is formed on the first case 22a side (see fig. 16). Fig. 15 is a schematic plan view of the first housing 22a in a state where the pressing member 5 is mounted,

fig. 16 is a schematic perspective view of the first housing 22a before the pressing member 5 is attached. Fig. 16 also shows a perspective view of the pressing member 5.

As shown in fig. 16, the pressing member 5 is attached to a predetermined portion of the first housing 22a by fitting the flat portion 5a of the pressing member 5 into the groove portion 6 attached to the first housing 22 a. Here, as described above, in order that the pressing member 5 does not interfere with the travel of the ultraviolet light L1, it is preferable that the pressing member 5 is attached to the end portion side in the Y direction. Therefore, the groove 6 is also preferably formed on the end portion side in the Y direction of the first housing 22 a.

The electrode blocks (11, 12) may be attached to a second casing 22b (see fig. 17) other than the first casing 22 a. Fig. 17 is a schematic perspective view of the second case 22b to which the electrode blocks (11, 12) are attached, in a state in which the excimer lamps 3(3a, 3b, 3c, 3d) are arranged in contact with the electrode blocks (11, 12). By covering and integrating the first casing 22a in the state shown in fig. 15 with respect to the second casing 22b in the state shown in fig. 17 from the + X side, the excimer lamps (3a, 3b, 3c, 3d) can be stably brought into contact with the electrode blocks (11, 12). Fig. 14 corresponds to a schematic plan view when the first casing 22a and the second casing 22b are integrated as viewed from the + Z direction.

[ second embodiment ]

The second embodiment of the ultraviolet irradiation apparatus will be mainly explained with differences from the first embodiment.

Fig. 18 is a schematic perspective view of a second embodiment of the ultraviolet irradiation device. In the present embodiment, as in the first embodiment, the electrode blocks (11, 12) are in contact with the outer surface of the arc tube of the excimer lamp 3 from the-X side, and the pressing member 5 is in contact with the outer surface of the arc tube of the excimer lamp 3 from the + X side. However, in the present embodiment, the shape of the pressing member 5 is different from that of the first embodiment. This point will be described with reference to fig. 19 to 21.

Fig. 19 is a perspective view schematically showing only the excimer lamps (3a, 3b), the electrode blocks (11, 12), and the pressing member 5. Fig. 20 is a perspective view schematically showing the pressing member 5 of the present embodiment. Fig. 21 is a schematic cross-sectional view of the XZ plane at a predetermined position in the state of fig. 18.

In the present embodiment, as shown in fig. 19, the pressing member 5 is fixed to the electrode blocks (11, 12). More specifically, the pressing member 5 has a fastening portion 5d (see fig. 20), and the pressing member 5 and the electrode blocks (11, 12) are fastened, for example, by screws, via the fastening portion 5 d.

As shown in fig. 20, the pressing member 5 has a recess 5e having a shape corresponding to the outer surface of the arc tube of the excimer lamp 3. Thus, as shown in fig. 21, the pressing member 5 can be fastened to the electrode blocks (11, 12) via the fastening portion 5d in a state where the excimer lamp 3 is placed on the + X side with respect to the electrode blocks (11, 12), and then the pressing member 5 is attached so that the outer surface of the arc tube of the excimer lamp 3 is fitted into the recess 5e from the + X side. As a result, the excimer lamp 3 is pressed by the pressing member 5 from the + X side toward the-X direction, that is, from the electrode blocks (11, 12), thereby ensuring stable contact between the excimer lamp 3 and the electrode blocks (11, 12).

In the present embodiment, unlike the first embodiment, the pressing member 5 is not separated from the electrode blocks (11, 12) in the Y direction. However, the recess 5e of the pressing member 5 into which the excimer lamp 3 is fitted, that is, the region of the pressing member 5 located on the + X side of the excimer lamp 3, is located at the end in the Y direction of the electrode blocks (11, 12). More specifically, the pressing member 5 has a coupling portion 5f extending in the Y direction from the fastening portion 5d toward the recess 5 e. Therefore, as in the first embodiment, the pressing member 5 prevents the ultraviolet light L1 emitted from the excimer lamp 3 and traveling in the + X direction from being obstructed.

[ other embodiments ]

Other embodiments will be described below.

<1> in the above embodiment, the description has been made on the case where both the first electrode block 11 and the second electrode block 12 have the tapered surfaces (11a, 11 b). However, in the present invention, it is arbitrary whether or not each electrode block has a tapered surface. For example, as in the first electrode block 11 shown in fig. 22, the portion other than the groove 11g into which the excimer lamp 3 is fitted may be formed of a flat surface. The same applies to the second electrode block 12.

<2> in the case where the ultraviolet irradiation apparatus 1 includes a plurality of excimer lamps 3, the arrangement positions of two or more excimer lamps 3 in the X direction may be displaced.

<3> in the above embodiment, the case where the ultraviolet irradiation device 1 is provided with the optical filter 21 on the light extraction surface 10 was explained, but in the present invention, it is arbitrary whether or not the ultraviolet irradiation device 1 is provided with the optical filter 21. In particular, when the ultraviolet irradiation device 1 is installed in a situation where the possibility of irradiating the human body with the ultraviolet L1 is extremely low, the optical filter 21 may not be provided.

In the above-described embodiment, the case where the main emission wavelength of the ultraviolet light L1 emitted from the ultraviolet irradiation device 1 falls within the wavelength range of 190nm to 225nm has been described, but the present invention does not exclude the case where the main emission wavelength of the ultraviolet light exceeding 225nm is emitted. For example, the ultraviolet irradiation apparatus 1 may be provided with an excimer lamp 3 which uses XeCl as the light-emitting gas 3G and emits ultraviolet L1 having a main peak wavelength of 308 nm.

<4> in the above embodiment, one pressing member 5 is configured to contact the plurality of excimer lamps 3 arranged adjacent to each other in the Z direction from the + X side. However, a structure may be adopted in which a separate pressing member 5 is provided for each excimer lamp 3.

In the above embodiment, the pressing members 5 are provided at the positions of both ends of the excimer lamp 3 in the tube axis direction (Y direction). However, the present invention does not exclude a structure in which the pressing member 5 is provided only at one end in the Y direction. Even in this case, the excimer lamp 3 can be stabilized in the contact state with the electrode blocks (11, 12) as compared with the case where the pressing member 5 is not present.

Description of the reference symbols

1: ultraviolet irradiation device

2: lamp shade

3: excimer lamp

3a, 3b, 3c, 3 d: excimer lamp

3G: luminous gas

5: pressing member

5 a: flat part

5 b: bending part

5 c: slit

5 d: fastening part

5 e: concave part

5 f: connecting part

6: trough part

11: first electrode block

11 a: carrying area

11 b: conical surface

11 g: trough

12: second electrode block

12 a: carrying area

12 b: conical surface

22: main body casing part

22 a: first shell

22 b: second shell

23: cover part

100: ultraviolet irradiation device

101: gripping part

102: shell body

103: lamp housing part

104: light irradiation window

110: excimer lamp

121: outer pipe

122: inner pipe

123G: luminous gas

124: outer electrode

125: inner side electrode

126: power supply unit

L1: ultraviolet ray

Claims

1. An ultraviolet irradiation apparatus, comprising:

a lamp cover formed with a light extraction surface;

and a pressing member disposed in at least one of a position farther from the second electrode block than the first electrode block in the second direction and a position farther from the first electrode block than the second electrode block in the second direction, and abutting against the excimer lamp.

2. The ultraviolet irradiation apparatus according to claim 1,

the pressing member includes an elastic member made of metal,

3. The ultraviolet irradiation apparatus according to claim 2,

the pressing member is disposed at a position separated from the first electrode block and the second electrode block in the second direction.

4. The ultraviolet irradiation apparatus according to claim 3,

the pressing member has a flat portion and a curved portion by bending a part of a metal plate material, and the curved portion constitutes the elastic member,

the lamp cover has:

5. The ultraviolet irradiation apparatus according to claim 4,

the pressing member has a slit formed in a part of the bent portion, and contacts an outer surface of the light-emitting tube of the excimer lamp at two or more positions across the slit in a third direction orthogonal to the first direction and the second direction.

6. The ultraviolet irradiation apparatus according to claim 2,

the pressing member has a fastening portion fastened from the light extraction surface side in the first direction with respect to at least one of the first electrode block and the second electrode block,

7. The ultraviolet irradiation apparatus according to claim 6,

the pressing member has: a recess into which the excimer lamp is fitted by bending a part of a metal plate; and a coupling portion extending from the fastening portion side toward the recess portion side in the second direction,

8. The ultraviolet irradiation apparatus according to any one of claims 1 to 7,

the ultraviolet irradiation apparatus includes a plurality of excimer lamps arranged separately in a third direction orthogonal to the first direction and the second direction,