TW202011125A - Laminating apparatus and laminating method - Google Patents

Abstract

The present disclosure relates to a laminating apparatus and a laminating method for aligning a first attaching member with a second attaching member and attaching the first attaching member to the second attaching member by including an upper wall part, lower wall part, a driving part for relatively moving the upper wall part and the lower wall part, and a control part for aligning the upper wall part with the lower wall part on the basis of position information on the upper and lower wall parts.

Description

Laminating equipment and laminating method

The present invention relates to a laminating apparatus and a laminating method, and particularly to a lamination for aligning an upper wall member and a lower wall member and attaching a first attachment member to a second attachment member Equipment and lamination method.

Generally speaking, various display devices including liquid crystal displays (LCDs), plasma display panels (PDPs), and organic light-emitting diodes (OLEDs) have experienced The process of attaching substrates to each other in a vacuum state because display devices are usually formed in a multilayer structure.

When attaching the first substrate to the second substrate in the prior art, the markers of the first substrate and the markers of the second substrate are identified by using a visual alignment camera, and the markers of the first substrate and the second substrate are matched Markers of the substrate, thereby aligning the first substrate with the second substrate. However, it is difficult to align the first substrate and the second substrate, because when the first substrate and the second substrate are both transparent (for example, when attaching the window glass and the display panel), they cannot be on the first substrate and the second substrate Form a marker.

In addition, in the prior art, the first substrate is only horizontally aligned with the second substrate. In this case, if the first substrate or the second substrate is not horizontal when the first substrate is attached to the second substrate, various defects including non-uniformity of the attachment surfaces of the first substrate and the second substrate occur . Therefore, the overall reliability of the display device is reduced.

That is, when the upper wall member is not aligned with the lower wall member, the tilt error between the upper wall member and the lower wall member causes the first substrate not to be parallel to the second substrate. When the first substrate is attached to the second substrate without the first substrate being parallel to the second substrate, the mounting surface of the first substrate and the mounting surface of the second substrate are not opposed to each other. Therefore, the first substrate is attached to the second substrate in the misaligned state.

Therefore, there is an urgent need to develop a technology that can ensure the accuracy of the attachment operation through the process of accurately aligning the first substrate and the second substrate, while solving when the first substrate is attached to the second substrate The problem is that the first substrate and the second substrate are not parallel to each other. [Prior Art Literature] [Patent Literature] Korean Patent No. 10-1073558

The present disclosure provides a laminating apparatus and a laminating method for aligning the first attachment member and the second attachment member by aligning the upper wall member and the lower wall member, To attach the first attachment member to the second attachment member.

According to an exemplary embodiment, a laminating apparatus for attaching a first attachment member to a second attachment member includes: an upper wall member having a first support member, the first attachment member being supported by the first support member A lower wall member having a second support member, the second attachment member opposite the first attachment member is supported by the second support member, and the lower wall member is configured to form a processing chamber by connecting to the upper wall member; The information acquiring part is configured to acquire position information about the upper wall part and position information about the lower wall part, and is configured to operate based on the acquired position information about the upper wall part and the acquired position information about the lower wall part Relative position information between the upper wall part and the lower wall part; the control part is configured to generate for aligning the upper wall part and the lower wall part based on the relative position information between the upper wall part and the lower wall part The control message; the drive member configured to receive the control message from the control member to move at least one of the upper wall member and the lower wall member relative to the other; and the gap adjustment member configured to adjust the upper wall member and the lower part There is a gap between the wall members, and the upper wall member is connected to the lower wall member in the aligned state.

The position information acquiring part may include: an upper marking plate and a lower marking plate, each including a pattern surface, the pattern surface has a marking pattern, and the upper marking plate and the lower marking plate are respectively provided on the upper wall part and the lower wall part; the upper camera and the lower part The camera is arranged to face the upper wall part and the lower wall part respectively to take pictures of the upper marking plate and the lower marking plate respectively, the upper marking plate and the lower marking plate are opposite to the upper camera and the lower camera, respectively; and the position information analysis part, It is configured to acquire the position information about the upper wall member and the position information about the lower wall member by analyzing the marking pattern images of the upper marking plate and the lower marking plate respectively captured by the upper camera and the lower camera, and is configured to obtain Based on the position information about the upper wall part and the acquired position information about the lower wall part, the relative position information between the upper wall part and the lower wall part is generated.

The upper camera can photograph the characteristic points of the first attachment member, the lower camera can photograph the characteristic points of the second attachment member, and the position information analysis component can analyze the first point of the first attachment member by analyzing the first A feature point image and a second feature point image photographing the feature points of the second attachment member to obtain relative position information between the feature points of the first attachment member and the feature points of the second attachment member, And the control part can generate the control message by reflecting the relative position information between the feature points acquired by the position information analysis part in the relative position information between the upper wall part and the lower wall part.

The position information may include: first axis linear position information and second axis linear position information determined according to the first axis and the second axis existing on a plane; and tilt information indicating the inclination of the plane.

The gap adjusting part may attach the first attachment member to the second attachment member when the upper wall member is connected to the lower wall member.

At least one of the first support member and the second support member may include a pressing member configured to apply the first attachment member by applying pressure to the first attachment member or the second attachment member corresponding to the first attachment member The attachment member is attached to the second attachment member.

The mark pattern may include: a mark matrix having a plurality of marks arranged in the form of a matrix; and a plurality of circular trajectory marks (circular trajectory marks) arranged outside the mark matrix and positioned on a circular trajectory.

The position information analysis part may calculate the rotation center of at least one of the upper wall part and the lower wall part by measuring the positions of the plurality of circular trajectory marks based on the mark pattern image.

The upper marking plate may be placed outside the first support member, and the lower marking plate may be placed outside the second support member.

The upper marking plate and the lower marking plate may be formed of quartz material, and the marking pattern may be formed by printing.

According to another exemplary embodiment, a lamination method for attaching a first attachment member to a second attachment member includes the following operations: (a) disposing the first attachment on the first support member of the upper wall member Connection member, and a second attachment member is provided on the second support member of the lower wall member; (b) acquiring position information about the upper wall member and position information about the lower wall member, and according to the acquired information about the upper wall member Calculate the relative position information between the upper wall part and the lower wall part; (c) on the basis of the relative position information between the upper wall part and the lower wall part Align the upper wall member with the lower wall member; and (d) connect the upper wall member to the lower wall member by adjusting the gap between the aligned upper wall member and the lower wall member.

The laminating method may further include the operation of providing an upper marking plate and a lower marking plate each including a pattern surface on the upper wall member and the lower wall member, the pattern surface having a marking pattern. The operation (b) may include: an operation of taking pictures of the upper marker plate and the lower marker plate respectively opposite to the upper camera and the lower camera by using the upper camera and the lower camera arranged to face the upper wall member and the lower wall member, respectively The operation of analyzing the marking pattern images of the upper marking plate and the lower marking plate captured by the upper camera and the lower camera, respectively; the operations of obtaining the position information about the upper wall member and the position information about the lower wall member, respectively; The operation of generating relative position information between the upper wall part and the lower wall part based on the position information about the upper wall part and the acquired position information about the lower wall part.

The laminating method may further include: an operation of photographing the feature points of the first attachment member and the feature points of the second attachment member by using the upper camera and the lower camera, respectively; and analyzing the features of the first attachment member by analysis The first feature point image for taking a picture and the second feature point image for taking a picture of the characteristic point of the second attachment member to obtain between the characteristic point of the first attachment member and the characteristic point of the second attachment member The operation of the relative position information. Operation (c) can be performed by reflecting the relative position between the feature points acquired from the first feature point image and the second feature point image in the relative position information between the upper wall part and the lower wall part Location information.

Operation (b) may include: with respect to each of the upper wall member and the lower wall member, extracting the first axis linear position information and the second axis determined based on the first axis and the second axis existing on a plane, respectively The operation of the sexual position information; and the operation of extracting the inclination information indicating the inclination of the plane with respect to each of the upper wall part and the lower wall part.

The first attachment member may be attached to the second attachment member during operation (d).

The laminating method may further include the operation of attaching the first attachment member to the second attachment member after operation (d).

The mark pattern may include: a mark matrix having a plurality of marks arranged in the form of a matrix; and a plurality of circular track marks, which are arranged outside the mark matrix and positioned on a circular track, and the operation of analyzing the mark pattern image may be Including: an operation of measuring the positions of a plurality of circular trajectory marks based on the mark pattern image; and an operation of calculating the rotation center of at least one of the upper wall member and the lower wall member.

Repeat operation (a) to operation (d). The laminating method may further include the following operation: before repeating the operation (a), identifying the attachment state of the first attachment member and the second attachment member. When the aligned attachment of the first attachment member and the second attachment member is recognized, operation (b) may be omitted, and the relative position information between the upper wall member and the lower wall member calculated previously may be used Proceed to operation (c). When the misaligned attachment of the first attachment member and the second attachment member is recognized, operation (b) may be performed, and the relative position information between the upper wall member and the lower wall member may be recalculated by using To proceed to operation (c).

Hereinafter, specific embodiments will be described in detail with reference to the accompanying drawings. However, the present invention can be implemented in different forms and should not be interpreted as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and these embodiments will fully convey the scope of the present invention to those of ordinary skill in the art. In the drawings, the same components are denoted by the same reference numerals, and the size of the drawings may be partially enlarged for clarity of explanation. Throughout the text, the same reference numerals refer to the same elements.

FIG. 1 is a schematic perspective view showing a laminating apparatus according to an exemplary embodiment. 2(a) and 2(b) are conceptual diagrams for describing connection and separation of an upper wall member and a lower wall member according to an exemplary embodiment. Fig. 2(a) shows the separated state of the upper wall member and the lower wall member. FIG. 2(b) shows the connection state of the upper wall member and the lower wall member.

1 and 2(a) and 2(b), the laminating apparatus 100 for attaching the first attachment member 11 to the second attachment member 12 according to an exemplary embodiment may include: an upper wall The part 110 has a first support part 111 by which the first attachment member 11 is supported; the lower wall part 120 has a second support part 121 and a second attachment opposite to the first attachment member 11 The connecting member 12 is supported by the second supporting member 121, and the lower wall member 120 forms a processing chamber by being connected to the upper wall member 110; a position information acquiring part (not shown) for acquiring information about the upper wall member 110 Position information and position information about the lower wall part 120, and calculate between the upper wall part 110 and the lower wall part 120 based on the obtained position information about the upper wall part 110 and the obtained position information about the lower wall part 120 Relative position information; a control part (not shown), based on the relative position information between the upper wall part 110 and the lower wall part 120, generates a control for aligning the upper wall part 110 and the lower wall part 120 Message; the driving part (not shown) receives control messages from the control part (not shown) to move at least one of the upper wall part 110 and the lower wall part 120 relative to the other; and the gap adjustment part (not shown) (Shown), the gap between the upper wall member 110 and the lower wall member 120 is adjusted and the upper wall member 110 is connected to the lower wall member 120 in the aligned state.

The upper wall member 110 may have a first support member 111 (the first attachment member 11 is supported by the first support member), may be an assembly forming an upper portion of a processing chamber (or vacuum chamber), and may include forming The upper wall portion of the upper wall of the processing chamber and the side wall portion forming the upper portion of the side wall of the processing chamber. Here, the upper wall portion may have an overall rectangular plate shape, and the side wall portion may form a side wall of the processing chamber by bending down along the edge of the upper wall portion. In this case, the side wall portion may be formed integrally with the upper wall portion, and may also have a structure that is additionally produced and connected.

The first support member 111 may support the first attachment member 11 and may support at least a part or some surfaces of the remaining surface of the first attachment member 11 except the mounting surface or the attachment surface to expose the first attachment member 11 Installation surface. The structure of the first support member 111 is not particularly limited, and any structure is sufficient as long as the structure can stably support the first attachment member 11 when the mounting surface of the first attachment member 11 is exposed. And, the first supporting member 111 may include an upper marking plate supporting member 112 that supports the upper marking plate 130a. Here, the first attachment member 11 may include window glass or cover glass.

The lower wall member 120 may have a second support member 121 (the second attachment member 12 opposed to the first attachment member 11 is supported by the second support member), and may pass as an assembly forming a lower portion of the processing chamber Connected to the upper wall member 110 to form a processing chamber, and may have an overall rectangular container shape. For example, the lower wall member 120 may include a lower wall portion forming a lower wall of the processing chamber and a side wall portion forming a lower portion of the side wall.

The second support part 121 may support the second attachment member 12 and may support at least a part of the remaining surface of the second attachment member 12 except the installation surface to expose the installation surface of the second attachment member 12. The structure of the second support member 121 is not particularly limited, and any structure is sufficient as long as the structure can stably support the second attachment member 12 when the mounting surface of the second attachment member 12 is exposed. And, the second supporting member 121 may include a lower marking plate supporting member 122 that supports the lower marking plate 130b. Here, the second attachment member 12 may include a display panel or a touch screen panel, and may also be a flexible display panel.

The position information acquiring part (not shown) can acquire the position information about the upper wall part 110 and the position information about the lower wall part 120, and can be based on the position information about the upper wall part 110 and the position information about the lower wall part 120 The relative position information between the upper wall member 110 and the lower wall member 120 is calculated. The calculated relative position information between the upper wall part 110 and the lower wall part 120 may be transmitted to a control part (not shown) that controls the driving part (not shown).

The control part (not shown) may generate a control message for aligning the upper wall part 110 and the lower wall part 120 based on the relative position information between the upper wall part 110 and the lower wall part 120. The control part (not shown) may transmit a control message to the driving part (not shown) to control the driving part (not shown) and align the upper wall part 110 and the lower wall part 120. For example, the control part (not shown) may control the driving part (not shown) so that, based on the relative position information between the upper wall part 110 and the lower wall part 120, one wall part 110 or wall The part 120 moves relatively so that the upper wall part 110 and the lower wall part 120 are aligned. The control part (not shown) may receive the position information about the upper wall part 110 and the position information about the lower wall part 120 and generate a control message so that the upper wall part 110 and the lower wall part 120 (the first attachment to be attached to each other) The connection member 11 and the second attachment member 12 are supported by the upper wall member and the lower wall member, respectively, and may be aligned with each other. Here, the control part (not shown) may receive position information about the upper wall part 110 and position information about the lower wall part 120 through various methods.

The driving part (not shown) may receive a control message from the control part (not shown) to move at least one of the upper wall part 110 and the lower wall part 120, and to move the at least one wall part in front, rear, and left And horizontal movement and rotation in the horizontal direction in the right direction. In this case, the driving member can also move one wall member 110 or wall member 120 relative to the other wall member 110 or wall member 120. For example, the driving member can move the lower wall member 120 relative to the upper wall member 110 when the upper wall member 110 is fixed. Here, the detailed configuration of the driving part (not shown) may have a structure that can be generally adopted, and a detailed description thereof will be omitted.

A gap adjusting member (not shown) can adjust the gap between the upper wall member 110 and the lower wall member 120. Here, the gap adjusting member (not shown) may connect the upper wall member 110 to the lower wall member 120 in the aligned state of the upper wall member 110 and the lower wall member 120 in order to attach the first attachment member 11 to The second attachment member 12 can also separate the upper wall part 110 from the lower wall part 120. For example, the gap adjusting member (not shown) may be configured in the form of a lifting device for lifting the upper wall member 110 and/or the lower wall member 120, thereby adjusting the gap between the upper wall member 110 and the lower wall member 120 .

The processing chamber may be formed by connecting the upper wall member 110 to the lower wall member 120, and a vacuum may be formed inside the processing chamber for the attachment process. The first attachment member 11 and the second attachment member 12 may be in contact with each other, and may also be attached to each other by connecting the upper wall member 110 to the lower wall member 120 using a gap adjusting member (not shown). Meanwhile, after the upper wall member 110 is connected to the lower wall member 120, the first support member 111 and/or the second support member 121 may be lifted to attach the first attachment member 11 to the second attachment member 12.

At least one of the first support member 111 and the second support member 121 may include a pressing member applied by the first attachment member 11 or the second attachment member 12 corresponding to the first attachment member The pressure attaches the first attachment member 11 to the second attachment member 12. The pressing part may attach the first attachment member 11 to the second attachment by driving the first support member 111 and/or the second support member 121 by pressing the first attachment member 11 and/or the second attachment member 12 Member 12. The pressing member may also attach the first attachment member 11 to the second attachment member by lifting the upper wall member 110 and/or the lower wall member 120 by pressing the first attachment member 11 and/or the second attachment member 12 12.

For example, the first attachment member 11 and the second attachment member 12 are brought into contact with each other by connecting the upper wall member 110 to the lower wall member 120. Then, the first attachment member 11 and/or the second attachment member 12 may be pressed by expanding the pressing member via a supply fluid (for example, water or air). In addition, the pressing member has elasticity and therefore can be pressed by connecting the upper wall member 110 to the lower wall member 120 to elastically press the first attachment member 11 and/or the second attachment member 12.

Meanwhile, a gap adjusting member (not shown) may attach the first attachment member 11 to the second attachment member 12 when the upper wall member 110 is connected to the lower wall member 120. Therefore, the first attachment member 11 can be attached to the second attachment member 12 at a time when the force for connecting the upper wall member 110 to the lower wall member 120 is driven, and can be reduced for the first attachment member 11 Processing time for attaching to the second attachment member 12.

In the related art, when the upper wall member 110 is not aligned with the lower wall member 120, the first attachment member 11 is not parallel to the second attachment member 12 due to a tilt error between the upper wall member 110 and the lower wall member 120 This is because the first attachment member 11 is horizontally aligned with the second attachment member 12 only through the feature points (eg, markers) of the first attachment member 11 and the second attachment member 12. When the first attachment member 11 is attached to the second attachment member 12 without the first attachment member 11 being parallel to the second attachment member 12, the mounting surface of the first attachment member 11 is The mounting surfaces of the connecting members 12 are not opposed to each other, or have different directions. Therefore, the first attachment member 11 is attached to the second attachment member 12 in the misaligned state.

However, in the exemplary embodiment, by relatively moving one of the upper wall member 110 and the lower wall member 120 relative to the other based on the position information about the upper wall member 110 and the lower wall member 120, the The upper wall part 110 and the lower wall part 120 are aligned, the first attachment member 11 and the second attachment member 12 may be horizontally aligned with each other and may be parallel to each other, and the mounting surface of the first attachment member 11 and the second attachment The mounting surfaces of the members 12 may be opposed to each other. Therefore, the first attachment member 11 and the second attachment member 12 can be accurately aligned with each other, and can be accurately with each other without an alignment error between the first attachment member 11 and the second attachment member 12 Attach.

The position information acquiring part (not shown) may further include: an upper marking plate 130a and a lower marking plate 130b, each including a pattern surface having a marking pattern 131, and the upper marking plate and the lower marking plate are respectively Are provided on the upper wall member 110 and the lower wall member 120; the upper camera 140a and the lower camera 140b are arranged to face the upper wall member 110 and the lower wall member 120 respectively to take pictures of the upper marking plate 130a and the lower marking plate 130b, The upper marking plate 130a and the lower marking plate 130b are respectively opposed to the upper camera 140a and the lower camera 140b; and a position information analysis part (not shown) to analyze the upper marks captured by the upper camera 140a and the lower camera 140b respectively The marking pattern images of the board 130a and the lower marking board 130b to obtain the position information about the upper wall member 110 and the position information about the lower wall member 120 respectively, and the position information about the upper wall member 110 and the obtained Based on the position information of the lower wall member 120, the relative position information between the upper wall member 110 and the lower wall member 120 is generated.

Each of the upper marking plate 130a and the lower marking plate 130b may include a pattern surface having a marking pattern 131, and may be provided on the upper wall member 110 and the lower wall member 120, respectively. The upper marking plate 130a may be disposed on the upper wall part 110 so that the pattern surface with the marking pattern 131 faces downward, and the pattern surface of the upper marking plate 130a may be aligned with or parallel to the support surface of the first attachment member 11. For example, the upper marking plate 130a may be disposed in alignment with the upper wall portion of the upper wall member 110, and may be supported by being connected to the upper wall member 110.

The lower marking plate 130b may be disposed on the lower wall part 120 such that the pattern surface faces upward, and the pattern surface of the lower marking plate 130b may be aligned with the support surface of the second attachment member 12. For example, the lower marking plate 130b may be disposed in alignment with the lower wall portion of the lower wall member 120, and may be supported by being connected to the lower wall member 120.

The upper camera 140a and the lower camera 140b may be disposed to face the upper wall member 110 and the lower wall member 120, respectively, to take pictures of the upper marking plate 130a and the lower marking plate 130b, respectively, the upper marking plate and the lower marking plate respectively Opposite the upper camera 140a and the lower camera 140b. In this case, the upper camera 140a and the lower camera 140b may be assembled to face up and face down to form a camera assembly, respectively, and may be provided between the upper wall member 110 and the lower wall member 120.

The upper camera 140a may be disposed to face the upper wall member 110, may face the upper marking plate 130a and take a picture of the upper marking plate 130a in a direction facing the pattern surface (for example, a direction perpendicular to the pattern surface), and obtain The mark pattern image of the upper mark plate 130a.

The lower camera 140b may be disposed to face the lower wall member 120, may face the lower marking plate 130b and photograph the lower marking plate 130b in a direction facing the pattern surface, and a marking pattern image of the lower marking plate 130b may be obtained.

The position information analysis part (not shown) may obtain information about the upper wall part 110 by analyzing the marking pattern image of the upper marking plate 130a captured by the upper camera 140a and the marking pattern image of the lower marking plate 130b captured by the lower camera 140b Position information about the lower wall part 120. The position information analyzing part (not shown) may generate between the upper wall part 110 and the lower wall part 120 based on the obtained position information about the upper wall part 110 and the obtained position information about the lower wall part 120 Relative location information. The misalignment (eg, tilt) between the upper wall member 110 and the lower wall member 120 can be obtained by analyzing the shape of the marking pattern 131 from the marking pattern image, because the shape of the marking pattern 131 in the marking pattern image depends on the upper part The angle or tilt between the optical axis of the camera 140a and/or the lower camera 140b and the pattern surface changes. Therefore, position information about the upper wall member 110 and position information about the lower wall member 120 can be acquired. The relative position information between the upper wall member 110 and the lower wall member 120 can be calculated by calculating the difference between the acquired position information about the upper wall member 110 and the acquired position information about the lower wall member 120.

The high-precision position information about the upper wall member 110 and the lower wall member 120 can be obtained simply by the following steps: by using the upper camera 140a and the lower camera 140b respectively provided on the upper wall member 110 and the lower wall member 120 Taking pictures of the upper marking board 130a and the lower marking board 130b; and analyzing the captured marking pattern images.

3(a), 3(b), and 3(c) are conceptual diagrams for describing characteristic points of the first attachment member and the second attachment member according to an exemplary embodiment. Fig. 3(a) shows the characteristic points of the first attachment member. FIG. 3(b) shows the characteristic points of the second attachment member. FIG. 3(c) shows the relative position between the feature points of the first attachment member and the second attachment member.

Referring to FIGS. 3( a ), 3 (b ), and 3 (c ), the upper camera 140 a may photograph the characteristic point 11 a of the first attachment member 11, and the lower camera 140 b may photograph the second attachment member 12. Feature point 12a is taken for photography. The misalignment or misalignment between the feature point 11a of the first attachment member 11 and the feature point 12a of the second attachment member 12 can be achieved by comparing the first attachment via the first feature point image and the second feature point image The positions of the feature points 11a of the member 11 and the feature points 12a of the second attachment member 12 are recognized, and the first feature point image is obtained by photographing the feature points 11a of the first attachment member 11, the first The two feature point images are obtained by photographing the feature points 12a of the second attachment member 12.

Here, the feature point may be a marker or may be a point of intersection between vertices or edges of attachment members (first attachment member and/or second attachment member). For example, the first attachment member 11 may be a window glass or cover glass, and may include a transparent member and an opaque or black bezel. The second attachment member 12 may be formed transparent as a display panel or a touch screen panel. In this case, the intersection between the edges of each of the first attachment member 11 and the second attachment member 12 may be used as a feature point because the marker may not be marked on the first attachment On the member 11 and/or the second attachment member 12. In this case, the marker is not present, and therefore it is important to align the first attachment member 11 with the second attachment member 12 and attach the first attachment member 11 to the second attachment member 12, This is because the first attachment member 11 may not be aligned with the second attachment member 12 when the marker is recognized. Therefore, in an exemplary embodiment, the first attachment member 11 and the second attachment member 12 may not be attached to the second attachment member 11 by aligning the upper wall member 110 and the lower wall member 120 The members 12 are attached to each other with alignment.

The position information analysis component (not shown) may acquire the relative position information between the feature points of the first attachment member 11 and the second attachment member 12 by analyzing the first feature point image and the second feature point image, The feature point 11a of the first attachment member 11 is photographed in the first feature point image, and the feature point 12a of the second attachment member 12 is photographed in the second feature point image. The control part (not shown) may generate the control information by reflecting the relative position information between the feature points acquired by the position information analysis part in the relative position information between the upper wall part 110 and the lower wall part 120. The position information analysis part (not shown) may analyze the first feature point image obtained by photographing the feature point 11a of the first attachment member 11 and by photographing the feature point 12a of the second attachment member 12 The obtained second feature point image. Therefore, the position information about the characteristic point of the first attachment member 11 and the position information about the characteristic point of the second attachment member 12 can be derived. The relative position information between the characteristic points of the first attachment member 11 and the second attachment member 12 can be calculated by calculating the position (information) of the characteristic point of the first attachment member 11 and the characteristic point of the second attachment member 12 To get the difference between the locations (messages).

Here, the feature point 11a of the first attachment member 11 and the feature point 12a of the second attachment member 12 can be set to a plurality of feature points 11a and a plurality of feature points 12a, respectively, and the first attachment member 11 can be calculated The misalignment between the plane formed by the plurality of feature points 11a and the plane formed by the plurality of feature points 12a of the second attachment member 12. Therefore, rotational position information indicating the misalignment between the plane formed by the plurality of feature points 11 a of the first attachment member 11 and the plane formed by the plurality of feature points 12 a of the second attachment member 12 can be obtained, For example, θ value. Here, the relative position information between the characteristic points of the first attachment member 11 and the second attachment member 12 may include rotational position information. In this case, each of the first attachment member 11 and the second attachment member 12 may have a total of four feature points 11a or four feature points 12a, each vertex or edge of the attachment member One, so that the misalignment between the first attachment member 11 and the second attachment member 12 can be accurately calculated.

The control part (not shown) may generate the control information by reflecting the relative position information between the acquired feature points in the relative position information between the upper wall part 110 and the lower wall part 120, and may generate the control Message to control the drive unit (not shown). For example, the control part (not shown) may control the driving part (not shown) so that the upper wall part 110 and the lower wall part 120 are aligned and moved by relatively moving one wall part 110 or the wall part 120 The first attachment member 11 is aligned with the second attachment member 12. It is necessary to align the first attachment member 11 and the second attachment member 12 with each other or horizontally, and to align the first attachment member 11 with the second attachment by aligning the upper wall member 110 and the lower wall member 120 The attachment members 12 are parallel to each other so as to accurately attach the first attachment member 11 to the second attachment member 12 without an alignment error between the first attachment member 11 and the second attachment member 12. Therefore, one wall part 110 or the wall part 120 can be relatively moved by reflecting the relative position information between the acquired feature point of the first attachment member 11 and the feature point of the second attachment member 12. Therefore, the first attachment member 11 and the second attachment member 12 can be accurately aligned with each other, and can be accurately with each other without an alignment error between the first attachment member 11 and the second attachment member 12 Attach.

4(a) and 4(b) are conceptual diagrams for describing shape changes and misalignment of mark patterns in a mark pattern image according to an exemplary embodiment. FIG. 4(a) shows a state where the optical axis of the camera is perpendicular to the pattern surface. FIG. 4(b) shows a state where the pattern surface is inclined with respect to the optical axis of the camera.

Referring to FIGS. 4( a) and 4 (b ), the position information analysis part (not shown) may obtain information about the upper wall part by measuring the shape change and misalignment of the mark pattern 131 shown in the mark pattern image The position information of 110 and the position information about the lower wall part 120. The position information analysis part (not shown) can measure the shape change and misalignment of the mark pattern 131 shown in the mark pattern image. Therefore, position information about the upper wall member 110 and position information about the lower wall member 120 can be acquired. When the mark pattern image is captured in a state where the optical axis of the upper camera 140a and/or the lower camera 140b is perpendicular to the pattern surface, the mark pattern 131 appears well in its original shape in two dimensions (two -dimensional; 2D) on the plane, as shown in Figure 4(a). However, when the mark pattern image is captured in a state where the pattern surface is inclined with respect to the optical axis of the upper camera 140a and/or the lower camera 140b, the mark pattern 131 does not appear in the mark pattern image in its original shape, and the mark The shape of the pattern 131 changes, as shown in FIG. 4(b).

The shape of the marking pattern 131 in the marking pattern image changes according to the angle between the optical axis of the upper camera 140a and/or the lower camera 140b and the pattern surface. Therefore, the angle between the optical axis of the upper camera 140a and/or the lower camera 140b and the pattern surface can be calculated by measuring the shape change and misalignment of the marking pattern 131 shown in the marking pattern image. The upper wall part relative to the reference axis can be obtained based on the angle between the optical axis of the upper camera 140a and/or the lower camera 140b and the pattern surface and the positioning coordinates of the upper marking plate 130a and/or the lower marking plate 130b The position information of 110 and the position information about the lower wall part 120.

The position information may include: first axis linear position information and second axis linear position information determined according to the first axis and the second axis existing on a plane; and tilt information indicating the inclination of the plane. The first axial linear position information (eg, first axis coordinate value), the second axial linear position information (eg, second axis coordinate value), and the inclination can be extracted with respect to each of the upper wall member 110 and the lower wall member 120 Message (for example, φ value). The position information about the upper wall member 110 and the lower wall member 120 may be obtained through the extracted first axial linear position information, second axial linear position information, and tilt information. By using the first axis linear position information, the second axis linear position information, and the tilt information, one wall member 110 or wall member 120 is linearly moved in the first axis direction and the second axis direction. The upper wall member 110 and the lower wall member 120 may be aligned by rotating one wall member 110 or the wall member 120 such that the plane misalignment is adjusted, the misalignment is determined by the first axis of the upper wall member 110 The position information and the second axis linear position information and the first axis linear position information and the second axis linear position information about the lower wall member 120 are determined. Here, the first axis linear position information and the second axis linear position information may include direction information and distance information. At the same time, it is also possible to tilt one wall member 110 or wall member 120 by using the tilt information so that the upper wall member 110 and the lower wall member 120 are parallel to each other by adjusting the inclination of the plane.

The position information may further include rotational position information (eg, θ value) indicating the misalignment of the plane, and may be based on the first and second axial linear position information about the upper wall member 110 and about the lower wall member The first axis linear position information and the second axis linear position information of 120 are calculated. In this case, the rotational position information may be calculated by calculating the misalignment between the plane formed by the upper mark plate 130a and the plane formed by the lower mark plate 130b via the upper mark plate 130a and the lower mark plate 130b. Here, each of the upper marking plate 130a and the lower marking plate 130b may be a total of four marking plates, one for each vertex or edge of each of the upper wall member 110 and the lower wall member 120, so that it is possible to accurately The misalignment between the upper wall member 110 and the lower wall member 120 is calculated.

For example, a driving member (not shown) can relatively move a wall member 110 or a wall member 120 in three axis directions (x direction, y direction, and θ direction), and can cause a wall member 110 or a wall member The part 120 is aligned with the other wall part 110 or the wall part 120 in the θ direction (and in the x and y directions). When the upper wall member 110 is not aligned with the lower wall member 120, the driving member (not shown) may perform the following alignment operation: when one wall member 110 or wall member 120 is finely adjusted in the x direction, y direction, and θ direction When moving, the upper wall member 110 and the lower wall member 120 are aligned. After the alignment operation is completed, the first attachment member 11 and the second attachment member 12 may not move or rotate horizontally, and their alignment positions are unlikely to change. The driving member (not shown) may include a first shaft driving member, a second shaft driving member, and an axial rotating member. The first axis driving member may align one wall member 110 or wall member 120 in the first axis direction by moving one wall member 110 or wall member 120 linearly in the first axis direction, and the second axis driving member may One wall member 110 or wall member 120 is aligned in the second axis direction by linearly moving one wall member 110 or wall member 120 in the second axis direction. The axially rotating member may align the upper wall member 110 and the lower wall member 120 by rotating one wall member 110 or the wall member 120 in the θ direction, so that the upper wall member 110 is not aligned with the lower wall member 120 in the θ direction alignment.

At the same time, the driving member (not shown) can also make one wall member 110 or wall member 120 relatively move in the φ direction, and can further include an inclined member. By relatively moving or rotating one wall member 110 or wall member 120 in the φ direction, one wall member 110 or wall member 120 may be inclined, and the upper wall member 110 and the lower wall member 120 (for example, the first An attachment member 11 and a second attachment member 12) are parallel to each other.

When the upper wall member 110 is connected to the lower wall member 120, the upper camera 140a and the lower camera 140b may be movably provided outside the space between the upper wall member 110 and the lower wall member 120. The upper camera 140a and the lower camera 140b may be movably provided. When the upper marking plate 130a and/or the lower marking plate 130b are provided as a plurality of upper marking plates 130a and/or a plurality of lower marking plates 130b, the upper camera 140a and the lower camera 140b may move the upper marking plate 130a and the lower portion respectively when moving The marking board 130b takes a picture. In addition, when the upper wall member 110 is connected to the lower wall member 120, the upper camera 140a and the lower camera 140b may leave the space outside the space between the upper wall member 110 and the lower wall member 120 or by moving so as not to Interfere with the connection. In this case, the upper camera 140a and the lower camera 140b may not interfere with the connection of the upper wall member 110 and the lower wall member 120. Therefore, the connection of the upper wall part 110 and the lower wall part 120 can well form a vacuum inside thereof, and can well attach the first attachment member 11 to the second attachment member 12.

In addition, the upper mark plate 130a and the lower mark plate 130b may be provided as a plurality of upper mark plates 130a and a plurality of lower mark plates 130b, because only the upper mark plate 130a and the lower mark plate 130b are provided as the plurality of upper mark plates 130a It can be aligned with multiple axes (for example, the first axis and the second axis) only when multiple lower marking plates 130b are used.

The mark pattern 131 may include: a mark matrix having a plurality of marks 131a arranged in a matrix; and a plurality of circular track marks 131b, which are arranged outside the mark matrix and positioned on one circular track. The mark matrix may have a plurality of marks 131a having the same shape and arranged in a matrix form, a gap between the plurality of marks 131a may be the same in the first direction, and a gap between the plurality of marks 131a may intersect the first direction The same in the second direction. When the mark pattern image is acquired by photographing the mark pattern 131 including the mark matrix, the upper camera 140a and/or the lower portion can be calculated by measuring the shape change and misalignment of the mark 131a in the acquired mark pattern image The angle between the optical axis of the camera 140b and the pattern surface. In addition, based on the angle between the optical axis of the upper camera 140a and/or the lower camera 140b and the pattern surface and the positioning coordinates of the upper marking plate 130a and/or the lower marking plate 130b, the upper part relative to the reference axis can be obtained Position information of the wall member 110 and the lower wall member 120. Therefore, the dislocation between the upper wall member 110 and the lower wall member 120 can be calculated.

In addition, the upper camera 140a and the lower camera 140b (which has photographed the acquired marking pattern image) can be calculated by measuring the size of the marking 131a from the acquired marking pattern image or the gap between the markings The magnification and resolution of the one. Therefore, when the position of the feature point 11a of the first attachment member 11 in the first feature point image is different from the position of the feature point 12a of the second attachment member 12 in the second feature point image, the first The distance that one attachment member 11 or the second attachment member 12 needs to move for alignment.

Meanwhile, when the mark matrix having a plurality of marks 131a is arranged in a matrix form, the coordinates of the equation forming the plane can be acquired, and the transformation matrix can be obtained.

FIG. 5 is a conceptual diagram for describing circular trajectory marks according to an exemplary embodiment.

Referring to FIG. 5, a plurality of circular track marks 131b may be disposed outside the mark matrix and may be positioned on one circular track. A circle may be formed by connecting a plurality of circular track marks 131b formed on the same marking plate 130a or the marking plate 130b in the upper marking plate 130a and the lower marking plate 130b. The center of rotation of one of the upper wall member 110 and the lower wall member 120 (on which the same marking plate 130a or the marking plate 130b is provided) can be extracted through the center of the formed circle. In this case, the center of the circle formed by the plurality of circular trajectory marks 131b may be the same as the center of rotation of one wall member 110 or wall member 120 on which the same mark plate 130a or mark plate 130b is provided. In this case, the change in the inclination caused by rotating one wall member 110 or wall member 120 (the same mark plate 130a or mark plate 130b is disposed thereon) can be well reflected in the same mark plate 130a or mark plate 130b The inclination angle is changing, and the θ direction can be calculated well.

The position information analysis part (not shown) may calculate the rotation center of at least one of the upper wall part 110 and the lower wall part 120 by measuring the positions of the plurality of circular trajectory marks 131b according to the mark pattern image. Therefore, the position information may further include position information about the rotation center of the plane, and may be used to rotate one wall member 110 or wall member 120 in the θ direction or tilt one wall member 110 or wall member 120 in the φ direction. When the center of a circle formed by a plurality of circular track marks 131b is the same as the center of rotation of one wall member 110 or wall member 120 (the same marking plate 130a or marking plate 130b is disposed thereon), multiple circles can be extracted The center of the circle formed by the shaped track mark 131b serves as the center of rotation of one wall member 110 or the wall member 120 on which the same mark plate 130a or mark plate 130b is provided. When the center of a circle formed by a plurality of circular trajectory marks 131b is different from the center of rotation of one wall member 110 or wall member 120 (the same mark plate 130a or mark plate 130b is disposed thereon), the The difference between the position of the center of the circle formed by the shaped track mark 131b and the position of the rotation center of at least one of the upper wall member 110 and the lower wall member 120 (the same marker plate 130a or marker plate 130b is provided thereon) comes from The rotation center of at least one of the upper wall member 110 and the lower wall member 120 is calculated. When at least one wall member 110 or wall member 120 rotates around its rotation center, the position of the center of the circle formed by a plurality of circular trajectory marks 131b is the same as that of one wall member 110 or wall member 120 (same marking plate 130a or marking plate 130b is set thereon) the difference between the positions of the rotation centers may change. By reflecting the position difference, the rotation center of at least one of the upper wall member 110 and the lower wall member 120 can be calculated even when the at least one wall member 110 or the wall member 120 rotates around its rotation center. Therefore, the inclination angle change of one wall member 110 or the wall member 120 (the same marking plate 130a or the marking board 130b is provided thereon) can be calculated by the rotation center of at least one wall member 110 or the wall member 120, and can be calculated well θ direction. One wall member 110 or wall member 120 may be rotated in the θ direction and/or inclined in the φ direction by aligning or matching the rotation centers of the upper wall member 110 and the lower wall member 120.

The upper marking plate 130a may be disposed outside the first support member 111, and the lower marking plate 130b may be disposed outside the second support member 121. Therefore, interference may not occur when the upper wall part 110 is connected to the lower wall part 120, and interference may be prevented from occurring in the attachment process for the first attachment member 11 and the second attachment member 12. The upper marking plate 130a and the lower marking plate 130b may be provided to be fixed to the upper wall member 110 and the lower wall member 120, respectively. Therefore, assembly errors, movement errors, and vibrations can be prevented depending on the movement and installation of the upper marking plate 130a and the lower marking plate 130b, and the occurrence of errors can be further improved with respect to the upper wall member 110 and the lower wall member 120 The accuracy of the location information. In addition, by arranging the upper and lower marking plates 130a and 130b to be fixed to the upper and lower wall members 110 and 120, respectively, the upper and lower marking plates 130a and 130b can be photographed in real time during the continuous attachment process, and The position information about the upper wall part 110 and the lower wall part 120 may be acquired and updated again or repeatedly.

The upper marking plate 130a and the lower marking plate 130b may be formed of a quartz material, and the marking pattern 131 may be formed by printing. When a metal material is used for the upper marking plate 130a and the lower marking plate 130b, a clear marking pattern image may not be obtained because light is reflected from the marking plate when the upper marking plate 130a and the lower marking plate 130b are photographed . When the mark pattern 131 is formed by defining a hole by machining the upper mark plate 130a and the lower mark plate 130b, the accuracy of the mark pattern 131 is reduced due to processing errors.

However, the accuracy of the marking pattern 131 can be improved by printing the marking pattern 131 on the upper marking plate 130a and the lower marking plate 130b formed of quartz material using ink or the like. In addition, the mark pattern 131 with high accuracy can improve the resolution or resolution of the mark pattern image, and can also significantly improve the accuracy of the position information about the upper wall member 110 and the lower wall member 120. When the marking pattern 131 is formed by printing, the accuracy of printing can be improved, and thus the accuracy of the marking pattern 131 can be improved. When the quartz material is printed, it can be better printed, and the mark pattern 131 may not be separated from the quartz material. In addition, the color of the marking pattern 131 can be easily adjusted at the time of printing, and when the color of the marking pattern 131 is determined to be black, the marking pattern 131 absorbs light. Therefore, the visibility of the mark pattern 131 can be further improved. One part on which the marking pattern 131 is printed absorbs light, and the other part on which the marking pattern 131 is not printed is transparent and transmits light, and therefore, the boundary of the marking pattern 131 in the marking pattern image can be made clear Or very different.

FIG. 6 is a flowchart illustrating a lamination method according to another exemplary embodiment.

Referring to FIG. 6, the lamination method according to another exemplary embodiment will be described in more detail, and description overlapping with the description described above in conjunction with the lamination apparatus according to the exemplary embodiment will be omitted.

According to another exemplary embodiment, the lamination method for attaching the first attachment member to the second attachment member may include the following operations: (a) disposing the first attachment on the first support member of the upper wall member Connection member, and a second attachment member (S100) is provided on the second support member of the lower wall member; (b) acquiring position information about the upper wall member and position information about the lower wall member, and according to the acquired information Calculate the relative position information between the upper wall part and the lower wall part using the position information of the upper wall part and the acquired position information about the lower wall part (S200); (c) between the upper wall part and the lower wall part Align the upper wall part with the lower wall part based on the relative position information (S300); and (d) connect the upper wall part to the lower part by adjusting the gap between the aligned upper wall part and lower wall part Wall parts (S400).

First, a first attachment member is provided on the first support member of the upper wall member, and a second attachment member is provided on the second support member of the lower wall member (S100). The first attachment member may be provided on or supported by the first support member of the upper wall member, and the second attachment member may be provided on the second support member of the lower wall member to attach the first The member is attached to the second attachment member. In this case, the first attachment member may be supported first, or the second attachment member may be supported first, and the first attachment member and the second attachment member may be simultaneously supported.

Next, obtain position information about the upper wall part and position information about the lower wall part, and calculate the upper wall part and the lower part according to the obtained position information about the upper wall part and the obtained position information about the lower wall part Relative position information between wall parts (S200). The position information about the upper wall part and the position information about the lower wall part can be acquired to align the upper wall part and the lower wall part based on the relative position information about the upper wall part and the lower wall part. The relative position information between the upper wall part and the lower wall part can be calculated according to the acquired position information about the upper wall part and the acquired position information about the lower wall part.

At the same time, operation (b) (S200) may also be performed before operation (a) (S100), and operation (a) (S100) and operation (b) (S200) may also be performed simultaneously.

Next, based on the relative position information between the upper wall member and the lower wall member, the upper wall member and the lower wall member are aligned (S300). The upper wall member and the lower wall member can be aligned by relatively moving one of the upper wall member and the lower wall member relative to the other based on the relative position information between the upper wall member and the lower wall member. Therefore, the first attachment member and the second attachment member may be horizontally aligned with each other and may be parallel to each other, and the mounting surface of the first attachment member and the second attachment member may be opposed to each other. Therefore, the first attachment member and the second attachment member can be accurately aligned with each other, and can be accurately attached to each other without an alignment error between the first attachment member and the second attachment member.

The upper wall member may be connected to the lower wall member by adjusting the gap between the aligned upper wall member and the lower wall member (S400). A processing chamber for attaching the first attachment member to the second attachment member may be formed by connecting the aligned upper wall member and the lower wall member, and the first attachment member and the second attachment member may Attach to each other. Here, the first attachment member may also be attached to the second attachment member by adjusting the gap between the upper wall member and the lower wall member by connecting the upper wall member to the lower wall member. In addition, after the processing chamber is formed by connecting the upper wall member to the lower wall member, the first attachment member may be attached by performing an additional attachment process by lifting the first support member and/or the second support member To the second attachment member.

The first attachment member may be attached to the second attachment member during operation (d) (S400). Therefore, the first attachment member can be attached to the second attachment member at the time of driving the force for connecting the upper wall member to the lower wall member, and can be reduced for attaching the first attachment member to the first 2. Processing time of attached components.

After operation (d) (S400), it may further include an operation of attaching the first attachment member to the second attachment member (S450).

After operation (d) (S400), the first attachment member may be attached to the second attachment member (S450). The first attachment member can also be attached to the second attachment member by driving the first support member and/or the second support member by pressing the first attachment member and/or the second attachment member.

For example, the first attachment member and the second attachment member are brought into contact with each other by connecting the upper wall member to the lower wall member. Then, the first attachment member and/or the second attachment member may be pressed by expanding the pressing member or the like via the supply fluid (for example, water or air).

According to another exemplary embodiment, the laminating method may further include an operation of providing an upper marking plate and a lower marking plate each including a pattern surface having a marking pattern on the upper wall member and the lower wall member, respectively (S150). The operation (b) (S200) may include an operation of taking pictures of the upper marking plate and the lower marking plate, respectively, by using the upper camera and the lower camera arranged to face the upper wall part and the lower wall part, respectively (S210), The upper marking board and the lower marking board are respectively opposed to the upper camera and the lower camera; the operation of analyzing the marking pattern images of the upper marking board and the lower marking board captured by the upper camera and the lower camera, respectively (S220); The operation of the position information of the wall part and the position information about the lower wall part (S230); and the generation of the upper wall part based on the obtained position information about the upper wall part and the obtained position information about the lower wall part Operation of relative position information with the lower wall part (S240).

An upper marking plate and a lower marking plate each including a pattern surface having a marking pattern may be provided on the upper wall member and the lower wall member, respectively (S150). The upper marking plate and the lower marking plate may be provided on the upper wall member and the lower wall member, respectively, so that position information about the upper wall member and the lower wall member can be easily obtained.

After the operation (S150), the upper marking plate and the lower marking plate can be photographed respectively (S210) by using the upper camera and the lower camera arranged to face the upper and lower wall members, respectively (S210). The lower marking plate is opposed to the upper camera and the lower camera, respectively. The upper marking plate and the lower marking plate (which are opposite to the upper camera and the lower camera respectively) can be photographed by using the upper camera and the lower camera, respectively, in order to analyze the upper marking plate and the lower marking plate captured by the upper camera and the lower camera, respectively Mark pattern image.

The marking pattern images of the upper marking plate and the lower marking plate captured by the upper camera and the lower camera, respectively, may be analyzed (S220). The high-precision position information about the upper wall part and the lower wall part can be obtained simply by the following steps: by using the upper camera and the lower camera to mark the upper marking plate (which are respectively provided on the upper wall part and the lower wall part) Take a picture with the lower marking board; and analyze the picture of the marking pattern taken.

Next, position information about the upper wall part and position information about the lower wall part can be acquired (S230). The position information about the upper wall part and the position information about the lower wall part can be obtained by analyzing the mark pattern image, and the position information about the upper wall part and the position information about the lower wall part can be obtained Based on this, the relative position information between the upper wall part and the lower wall part is calculated. The shape of the marking pattern in each of the marking pattern images changes according to the angle or tilt between the optical axis of the upper camera and/or the lower camera and the pattern surface. Therefore, by analyzing the shape of the marking pattern from the marking pattern image, it is possible to derive the misalignment between the upper wall member and the lower wall member, for example, tilt. Therefore, position information about the upper wall member and position information about the lower wall member can be obtained.

Next, relative position information between the upper wall member and the lower wall member may be generated based on the acquired position information on the upper wall member and the acquired position information on the lower wall member (S240). The relative position information between the upper wall part and the lower wall part can be calculated by calculating the difference between the obtained position information about the upper wall part and the obtained position information about the lower wall part.

According to another exemplary embodiment, the laminating method may further include: an operation of taking photographs of the feature points of the first attachment member and the feature points of the second attachment member by using the upper camera and the lower camera, respectively (S250); And by analyzing the first feature point image that photographed the feature point of the first attachment member and the second feature point image that photographed the feature point of the second attachment member, to obtain the first attachment member and the first The operation of relative position information between the feature points of the two attachment members (S260) is in the second feature point image. The operation can be performed by reflecting the relative position information between the feature points acquired from the first feature point image and the second feature point image in the relative position information between the upper wall part and the lower wall part (c) ( S300).

The feature point of the first attachment member and the feature point of the second attachment member may be photographed by using the upper camera and the lower camera, respectively (S250). The feature point of the first attachment member and the feature point of the second attachment member may be photographed to obtain the first feature point image obtained by photographing the feature point of the first attachment member and by the second The feature point of the attachment member is photographed to obtain a second feature point image to compare the positions of the feature point of the first attachment member and the feature point of the second attachment member.

Next, the first feature point image obtained by photographing the feature points of the first attachment member and the second feature point image obtained by photographing the feature points of the second attachment member, To obtain the relative position information between the feature points of the first attachment member and the second attachment member (S260). The misalignment between the feature point of the first attachment member and the feature point of the second attachment member can be identified by analyzing the first feature point image and the second feature point image. The feature point of the first attachment member is obtained by taking a picture, and the second feature point image is taken by photographing the feature point of the second attachment member and by comparing the feature point of the first attachment member and the second attachment member The position of the feature point is obtained.

For example, the position information about the characteristic point of the first attachment member and the characteristic point about the second attachment member relative to the reference axis can be obtained by analyzing the first characteristic point image and the second characteristic point image Location information. The relative position information between the feature points of the first attachment member and the second attachment member can be obtained according to the difference between the positions of the feature points of the first attachment member and the feature points of the second attachment member .

The operation (c) may be performed by reflecting the relative position information between the acquired feature points in the relative position information between the upper wall part and the lower wall part (S300). The first attachment member and the second attachment member need to be parallel to each other, and the first attachment member and the second attachment member are horizontally aligned by aligning the upper wall member and the lower wall member so that Without an alignment error between the attachment member and the second attachment member, the first attachment member is accurately attached to the second attachment member. Therefore, one wall member can be relatively moved by reflecting the relative position information between the acquired feature point of the first attachment member and the acquired feature point of the second attachment member. Therefore, the first attachment member and the second attachment member can be accurately aligned with each other, and can be accurately attached to each other without an alignment error between the first attachment member and the second attachment member.

Operation (b) (S200) may include: extracting the first axis linear position information and the first axis determined from the first axis and the second axis existing on a plane with respect to each of the upper wall member and the lower wall member, respectively The operation of the two-axis linear position information (S225); and the operation of extracting the inclination information indicating the inclination of the plane with respect to each of the upper wall part and the lower wall part (S226).

The first axial linear position information and the second axial linear position information determined according to the first axis and the second axis existing on a plane can be extracted with respect to each of the upper wall part and the lower wall part, respectively (S225). The position information about the upper wall member and the lower wall member can be obtained from the extracted first and second axis linear position information.

The inclination information indicating the inclination of the plane may be extracted with respect to each of the upper wall part and the lower wall part (S226). The inclination information indicating the inclination of the plane can be obtained from the position information about the upper wall member and the lower wall member.

Meanwhile, operation (b) (S200) may further include an operation of extracting rotational position information indicating misalignment of the plane with respect to each of the upper wall member and the lower wall member (S227).

The rotation position information indicating the misalignment of the plane may also be extracted with respect to each of the upper wall part and the lower wall part (S227). The extracted rotational position information indicating the misalignment of the plane can be obtained from the position information about the upper wall member and the lower wall member.

By using the first axis linear position information, the second axis linear position information, and the tilt information, one wall member is linearly moved in the first axis direction and the second axis direction. The upper wall member and the lower wall member can be aligned by rotating one wall member so that the misalignment of the plane determined by the first axial linear position information, the second axial linear position information, and the tilt information can be adjusted. In this case, it is also possible to rotate a wall part by using the rotation position information. In addition, it is also possible to tilt a wall member by using the tilt information so that the tilt angle of the plane can be adjusted.

Meanwhile, operation (c) (S300) may include: an operation of calculating the moving direction and moving distance of a wall member based on the relative position information between the upper wall member and the lower wall member (S310); and making a wall The operation of the component relatively moving the calculated moving distance in the calculated moving direction (S320).

The moving direction and moving distance of a wall part can be calculated on the basis of the relative position information between the upper wall part and the lower wall part (S310). The moving direction and moving distance of a wall part can be calculated on the basis of the position information about the upper wall part and the lower wall part obtained by analyzing the mark pattern image. It can be derived how much distance one wall member needs to move relatively in any direction. For example, the relative position information between the upper wall part and the lower wall part can be calculated based on the position information about the upper wall part and the lower wall part, and the relative position between the upper wall part and the lower wall part can be calculated. Based on the position information, the moving direction and moving distance of a wall component are calculated.

One wall member may be relatively moved in the calculated moving direction by the calculated moving distance (S320). Therefore, the upper wall member and the lower wall member can be aligned. The moving direction and moving distance of a wall part can be calculated on the basis of the relative position information between the upper wall part and the lower wall part. One wall member may be relatively moved in the calculated movement direction by the calculated movement distance, so that the upper wall member and the lower wall member are aligned.

By relatively moving one wall member in three axis directions (x direction, y direction, and θ direction), an operation of relatively moving one wall member is performed (S320). One wall member can be relatively moved in three axis directions (x direction, y direction, and θ direction), and one wall member can be relative to another wall in the θ direction (and in x direction and y direction) Parts are aligned. When the upper wall member is not aligned with the lower wall member, the following alignment operation may be performed: when finely adjusting one wall member in the x direction, y direction, and θ direction, the upper wall member and the lower wall member are aligned. After the alignment operation is completed, the first attachment member and the second attachment member may not move or rotate horizontally, and their alignment positions are unlikely to change.

It is also possible to relatively move one wall member in the φ direction during the operation of relatively moving one wall member (S320). One wall member can be inclined by relatively moving in the φ direction, and can make the first attachment member and the second attachment member parallel to each other.

According to another exemplary embodiment, the laminating method may further include moving the upper camera and the lower camera so that the upper camera and the lower camera are outside the space between the upper wall member and the lower wall member (S270).

Before the upper wall member is connected to the lower wall member, the upper camera and the lower camera may be moved so that the upper camera and the lower camera are outside the space between the upper wall member and the lower wall member (S270). When the upper camera and the lower camera are outside the space between the upper wall member and the lower wall member, the upper camera and the lower camera may not interfere with the connection of the upper wall member and the lower wall member. Therefore, the connection of the upper wall part and the lower wall part can well form a vacuum inside thereof, and can well attach the first attachment member to the second attachment member 12.

The mark pattern may include: a mark matrix having a plurality of marks arranged in the form of a matrix; and a plurality of circular track marks, which are arranged outside the mark matrix and positioned on one circular track. The mark matrix may have a plurality of marks having the same shape and arranged in a matrix form, the gap between the plurality of marks may be the same in the first direction, and the gap between the plurality of marks may be in the second intersecting the first direction The direction is the same. When a mark pattern image is obtained by photographing a mark pattern containing a mark matrix, the light of the upper camera and/or the lower camera can be calculated by measuring the shape change and misalignment of the marks from the acquired mark pattern image The angle between the axis and the pattern surface. In addition, based on the angle between the optical axis of the upper camera and/or the lower camera and the pattern surface and the positioning coordinates of the upper marking plate and/or the lower marking plate, the upper wall member and the lower part relative to the reference axis can be obtained Wall position information. Therefore, the misalignment between the upper wall member and the lower wall member can be calculated.

Multiple circular track marks can be placed outside the mark matrix and can be positioned on one circular track. A circle can be formed by connecting a plurality of circular track marks formed on the same marking plate in the upper marking plate and the lower marking plate. The center of rotation of one wall member in the upper wall member and the lower wall member (on which the same marking plate is provided) can be extracted through the center of the formed circle. In this case, the center of a circle formed by a plurality of circular track marks may be the same as the center of rotation of one wall member on which the same mark plate is provided. In this case, the change in the inclination angle caused by rotating one wall member (the same mark plate is disposed thereon) can be well reflected in the change in the inclination angle of the same mark plate, and the θ direction can be calculated well.

The operation of analyzing the mark pattern image may include: an operation of measuring the positions of the plurality of circular trajectory marks from the mark pattern image (S221); and an operation of calculating the rotation center of at least one of the upper wall part and the lower wall part (S222) ).

The positions of a plurality of circular trajectory marks can be measured according to the mark pattern image (S221). The positions of the plurality of circular trajectory marks can be measured according to the mark pattern image to obtain the center of the circle formed by the plurality of circular trajectory marks. The center of the circle formed by the plurality of circular trajectory marks can be identified by measuring the positions of the plurality of circular trajectory marks according to the mark pattern image.

The rotation center of at least one of the upper wall member and the lower wall member may be calculated (S222). When the center of a circle formed by a plurality of circular track marks is the same as the center of rotation of a wall member on which the same marking plate is provided, the center of the circle formed by a plurality of circular track marks can be extracted as a The center of rotation of the wall part on which the same marking plate is provided. When the center of a circle formed by a plurality of circular trajectory marks is different from the center of rotation of a wall member on which the same marking plate is provided, the position of the center of the circle formed by a plurality of circular trajectory marks can be passed The center of rotation of at least one of the upper wall member and the lower wall member is calculated from the difference between the positions of the rotation centers of one wall member on which the same marking plate is provided. When at least one wall member rotates around its center of rotation, the difference between the position of the center of a circle formed by a plurality of circular trajectory marks and the position of the center of rotation of one wall member (on which the same marking plate is provided) change. By reflecting the position difference, the rotation center of at least one of the upper wall member and the lower wall member can be calculated even when at least one wall member rotates around its rotation center. Therefore, the change in the inclination angle of one wall member (on which the same marking plate is provided) can be calculated by the rotation center of at least one wall member, and the θ direction can be well calculated.

According to another exemplary embodiment, the laminating method may further include: an operation of separating the upper wall member and the lower wall member from each other by adjusting the gap between the upper wall member and the lower wall member (S500); and implementing the first The operation of attaching the attachment member to the attachment assembly of the second attachment member (S600).

Next, the upper wall member and the lower wall member may be separated from each other by adjusting the gap between the upper wall member and the lower wall member (S500). The upper wall member and the lower wall member may be separated by adjusting the gap between the upper wall member and the lower wall member after the first attachment member is attached to the second attachment member.

An attachment assembly in which the first attachment member is attached to the second attachment member may be implemented (S600). The attachment assembly where the first attachment member is attached to the second attachment member may be implemented by an upper wall member or a lower wall member in order to attach a new or another first attachment member to a new or another second Attach the member.

The operations (a) (S100) to (d) (S400) can be repeated. Therefore, a continuous attachment process can be performed, and the attachment components can be continuously produced.

According to another exemplary embodiment, the laminating method may further include an operation of identifying an attachment state of the first attachment member and the second attachment member (S700) before repeating operation (a) (S100). When the aligned attachment of the first attachment member and the second attachment member is recognized, operation (b) (S200) may be omitted, and the relative between the upper wall member and the lower wall member calculated previously may be used Use location information to perform operation (c) (S300). When the misaligned attachment of the first attachment member and the second attachment member is recognized, operation (b) (S200) may be performed, and the recalculated between the upper wall member and the lower wall member may be used Perform operation (c) relative to the position information (S300).

The attachment state of the first attachment member and the second attachment member may be identified (S700). For example, the attachment state of the attachment component can be identified. When the positions of the upper wall part and the lower wall part change due to a longer process, the position information about the upper wall part and the lower wall part (for example, the relative position information between the upper wall part and the lower wall part) needs to be changed. Therefore, when a misaligned attachment of the first attachment member and the second attachment member is identified, by identifying the attachment of the first attachment member and the second attachment member from the attachment assembly during the continuous attachment process The connection status and repetitive operation (b) (S200) can recalculate and update the relative position information between the upper wall component and the lower wall component in real time, and the continuous attachment process can be performed.

When the aligned attachment of the first attachment member and the second attachment member is recognized, operation (b) (S200) may be omitted, and the relative between the upper wall member and the lower wall member calculated previously may be used Use location information to perform operation (c) (S300). When the subsequent first attachment member is attached to the subsequent second attachment member, operation (b) may be omitted (S200). The continuous attachment process can be performed without recalculating the relative position information between the upper wall part and the lower wall part.

When the misaligned attachment of the first attachment member and the second attachment member is recognized, operation (b) (S200) may be repeated, and the recalculated between the upper wall part and the lower wall part may be used Perform operation (c) relative to the position information (S300). In addition, the relative position information between the upper wall part and the lower wall part may be updated so that when the subsequent first attachment member is attached to the subsequent second attachment member, the subsequent first is repeated by repeating operation (b) (S200) The attachment member is aligned with the subsequent second attachment member.

For example, after calculating the relative position information between the upper wall part and the lower wall part, the attached components can be continuously produced by repeating the following operations: operation (a) (S100), separate photo operation (S250), and obtaining features Operation of relative position information between points (S260), operation (c) (S300), operation (d) (S400), operation of separating the upper wall part and the lower wall part from each other (S500), and implementation of the attachment assembly Operation (S600). After the upper marking plate and the lower marking plate are set to be fixed to the upper wall part and the lower wall part respectively and the relative position information between the upper wall part and the lower wall part is calculated once, the continuous attachment process can be performed by repeating the following operations: Operation (a) (S100), photographing operation (S250), operation to obtain relative position information between feature points (S260), operation (c) (S300), operation (d) (S400), the upper wall part The operation of separating the lower wall part from each other (S500) and the operation of attaching the assembly (S600). Therefore, the attachment component can be continuously produced, and the productivity of the attachment component can be improved.

In other words, the attachment state of the first attachment member and the second attachment member can be periodically or instantly recognized, and when the attachment state of the first attachment member and the second attachment member is poor, it can be performed immediately And apply the calibration of upper camera and lower camera. Therefore, the relative position information between the upper wall member and the lower wall member can be updated.

Meanwhile, according to another exemplary embodiment, the laminating method may further include an operation of identifying a fastened state of the upper camera and the lower camera and/or a screw loosening state (S710). Defects in the tightened state of the upper camera and the lower camera (for example, the screw is not tightened) may occur, and the tightened state of the upper camera and the lower camera and/or the screwed state may be checked periodically or immediately. Therefore, the tightened state of the upper camera and the lower camera and/or the unscrewed state of the screw can be maintained, and the first attachment can be indirectly recognized by the defect of the tightened state of the upper camera and the lower camera and/or the unscrewed state of the screw Defects in the attached state of the member and the second attachment member.

In this way, in an exemplary embodiment, one of the upper wall member and the lower wall member can be relatively moved relative to the other based on the relative position information between the upper wall member and the lower wall member, by Aligning the upper wall part and the lower wall part to accurately align the first attachment member and the second attachment member, the relative position information by acquiring position information about the upper wall part and position information about the lower wall part To calculate. In addition, the first attachment member and the second attachment member may be accurately attached to each other without an alignment error between the first attachment member and the second attachment member. The high-precision position information on the upper wall part and the lower wall part can be obtained simply by the following steps: by using the upper camera and the lower camera pair (respectively provided on the upper wall part and the lower wall part) the upper marking plate and The lower marking board is used to take pictures, and the photographed marking pattern images are analyzed. In addition, by arranging the upper marking plate outside the first support member and the lower marking plate outside the second support member, interference may not occur when the upper wall member is connected to the lower wall member. Therefore, the upper marking plate and the lower marking plate may be provided to be fixed to the upper and lower wall members, respectively, and may prevent assembly errors, movement errors, and vibrations depending on the movement and installation of the upper and lower marking plates. Therefore, the accuracy of the position information about the upper wall member and the lower wall member can be further improved. Meanwhile, the accuracy of the marking pattern can be improved by printing the marking pattern on each of the upper and lower marking plates formed of quartz material. In addition, the mark pattern with high accuracy can improve the resolution or resolution of the mark pattern image, and can also significantly improve the accuracy of the position information about the upper wall member and the lower wall member.

The term "on" used in the above description means "in direct contact with" and "opposite to the upper part or the lower part without direct contact with", and also means "Opposite the entire upper surface or the lower surface", "partially opposed to the upper surface or the lower surface", "opposite the upper surface or the lower surface at different positions" or "directly in contact with the upper surface or the lower surface".

According to an exemplary embodiment, the laminating apparatus may attach the first attachment member and the second attachment by aligning the upper wall member and the lower wall member based on the relative position information between the upper wall member and the lower wall member The components are precisely aligned, and the relative position information is calculated by acquiring position information about the upper wall part and position information about the lower wall part. In addition, the first attachment member may be accurately attached to the second attachment member without an alignment error between the first attachment member and the second attachment member.

The high-precision position information on the upper wall part and the lower wall part can be obtained simply by the following steps: by using the upper camera and the lower camera pair (respectively provided on the upper wall part and the lower wall part) the upper marking plate and The lower marking board is used to take pictures, and the photographed marking pattern images are analyzed.

In addition, by arranging the upper marking plate outside the first support member and the lower marking plate outside the second support member, interference may not occur when the upper wall member is connected to the lower wall member. Therefore, the upper marking plate and the lower marking plate may be provided to be fixed to the upper wall member and the lower wall member, respectively, and may prevent assembly errors, movement errors, and vibrations depending on the movement and installation of the upper marking plate and the lower marking plate. Therefore, the accuracy of the position information about the upper wall member and the lower wall member can be further improved.

Meanwhile, the accuracy of the marking pattern can be improved by printing the marking pattern on each of the upper and lower marking plates formed of quartz material. In addition, the mark pattern with high accuracy can improve the resolution or resolution of the mark pattern image, and can also significantly improve the accuracy of the position information about the upper wall member and the lower wall member.

Although the exemplary embodiments of the present invention have been shown and described, the present invention should not be construed as being limited to the embodiments. Those of ordinary skill in the art should understand that various modifications and equivalent solutions can be made to the present invention without departing from the spirit and scope of the present invention defined by the scope of the appended patent application. Therefore, the technical scope of the present invention should be defined by the scope of the attached patent application.

11: The first attachment member 11a, 12a: feature points 12: Second attachment member 100: Laminating equipment 110: upper wall part 111: the first support member 112: Upper marking plate support part 120: Lower wall parts 121: Second support member 122: lower marking plate support member 130a: upper marking plate 130b: Lower marking plate 131: Mark pattern 131a: multiple markers 131b: Multiple circular track marks 140a: upper camera 140b: Lower camera S100, S200, S300, S400: Operation

Exemplary embodiments can be understood in more detail by the following description in conjunction with the accompanying drawings, in which: FIG. 1 is a schematic perspective view showing a laminating apparatus according to an exemplary embodiment. 2(a) and 2(b) are conceptual diagrams for describing connection and separation of an upper wall member and a lower wall member according to an exemplary embodiment. 3(a), 3(b), and 3(c) are conceptual diagrams for describing characteristic points of the first attachment member and the second attachment member according to an exemplary embodiment. 4(a) and 4(b) are conceptual diagrams for describing shape changes and misalignment of mark patterns in a mark pattern image according to an exemplary embodiment. FIG. 5 is a conceptual diagram for describing circular trajectory marks according to an exemplary embodiment. FIG. 6 is a flowchart illustrating a lamination method according to another exemplary embodiment.

100: Laminating equipment

110: upper wall part

111: the first support member

112: Upper marking plate support part

120: Lower wall parts

121: Second support member

122: lower marking plate support member

130a: upper marking plate

130b: Lower marking plate

131: Mark pattern

131a: multiple markers

131b: Multiple circular track marks

140a: upper camera

140b: Lower camera

Claims (18)

A laminating apparatus for attaching a first attachment member to a second attachment member, the laminating apparatus includes: An upper wall member, including a first support member, the first attachment member being supported by the first support member; The lower wall part includes a second support part, the second attachment member opposite to the first attachment member is supported by the second support part, and the lower wall part is configured to be connected to the upper part by Wall parts to form a processing chamber; A position information acquiring part configured to acquire position information regarding the upper wall part and position information regarding the lower wall part, and configured to obtain position information regarding the upper wall part and the acquired Calculating relative position information between the upper wall member and the lower wall member with respect to the position information of the lower wall member; A control component configured to generate a control message for aligning the upper wall component and the lower wall component based on the relative position information between the upper wall component and the lower wall component; A driving part configured to receive the control message from the control part to move at least one of the upper wall part and the lower wall part relative to the other; and The gap adjusting member is configured to adjust the gap between the upper wall member and the lower wall member, and connect the upper wall member to the lower wall member in the aligned state. The laminating device according to item 1 of the patent application scope, wherein the position information acquisition component includes: The upper marking plate and the lower marking plate each include a pattern surface, and the pattern surface includes a marking pattern, and the upper marking plate and the lower marking plate are provided on the upper wall member and the lower wall member, respectively; An upper camera and a lower camera arranged to face the upper wall member and the lower wall member, respectively, to take pictures of the upper marking plate and the lower marking plate, respectively, the upper marking plate and the lower marking The plate is opposite to the upper camera and the lower camera, respectively; and The position information analysis part is configured to acquire the respective ones of the upper wall part by analyzing the marking pattern images of the upper marking plate and the lower marking plate respectively captured by the upper camera and the lower camera Position information and the position information about the lower wall part, and is configured to be based on the obtained position information about the upper wall part and the obtained position information about the lower wall part In the above, the relative position information between the upper wall member and the lower wall member is generated. The laminating apparatus according to item 2 of the patent application scope, wherein the upper camera photographs the characteristic points of the first attachment member, The lower camera photographs the characteristic points of the second attachment member, The position information analyzing part analyzes a first feature point image that photographs the feature point of the first attachment member and a second feature that photographs the feature point of the second attachment member Point image to obtain the relative position information between the feature point of the first attachment member and the feature point of the second attachment member, and The control part reflects the relative position information between the feature points acquired by the position information analysis part in the relative position information between the upper wall part and the lower wall part Generate the control message. The laminating equipment as described in item 1 of the patent application, wherein the location information includes: The first axis linear position information and the second axis linear position information are determined based on the first axis and the second axis existing on a plane; and The tilt message indicates the tilt of the plane. The laminating apparatus according to item 1 of the patent application range, wherein the gap adjusting member attaches the first attachment member to the first when attaching the upper wall member to the lower wall member 2. Attach the member. The laminating apparatus according to item 1 of the patent application range, wherein at least one of the first support member and the second support member includes a pressing member configured to attach to the first A member or the second attachment member corresponding to the first attachment member applies pressure to attach the first attachment member to the second attachment member. The laminating device according to item 2 of the patent application scope, wherein the marking pattern includes: Marking matrix, including multiple markers arranged in a matrix; and A plurality of circular track marks are arranged outside the mark matrix and positioned on one circular track. The laminating apparatus according to item 7 of the patent application range, wherein the position information analysis part calculates the upper wall part and the upper part by measuring the positions of the plurality of circular trajectory marks from the mark pattern image The center of rotation of at least one of the lower wall members. The laminating apparatus according to item 2 of the patent application scope, wherein the upper marking plate is disposed outside the first support member, and the lower marking plate is disposed outside the second support member. The laminating apparatus according to item 2 of the patent application range, wherein the upper marking plate and the lower marking plate are formed of a quartz material, and the marking pattern is formed by printing. A lamination method for attaching a first attachment member to a second attachment member, the lamination method includes the following operations: Operation a: a first attachment member is provided on the first support member of the upper wall member, and a second attachment member is provided on the second support member of the lower wall member; Operation b: Obtain position information about the upper wall part and position information about the lower wall part, and according to the obtained position information about the upper wall part and the obtained position about the lower wall part Information to calculate the relative position information between the upper wall member and the lower wall member; Operation c: aligning the upper wall member and the lower wall member based on the relative position information between the upper wall member and the lower wall member; and Operation d: The upper wall member is connected to the lower wall member by adjusting the gap between the aligned upper wall member and the lower wall member. The lamination method as described in item 11 of the scope of the patent application further includes the following operations: providing an upper marking plate and a lower marking plate each including a pattern surface on the upper wall member and the lower wall member, the pattern The surface includes marking patterns, The operation b includes: By using the upper camera and the lower camera arranged to face the upper wall member and the lower wall member, respectively, the upper marking plate and the lower part respectively opposed to the upper camera and the lower camera Marking board for taking pictures; An operation of analyzing the marking pattern images of the upper marking board and the lower marking board captured by the upper camera and the lower camera, respectively; An operation of separately acquiring the position information about the upper wall member and the position information about the lower wall member; and Based on the acquired position information on the upper wall member and the acquired position information on the lower wall member, a position between the upper wall member and the lower wall member is generated Describe the operation of relative position information. The lamination method as described in item 12 of the patent application scope further includes: An operation of photographing the characteristic points of the first attachment member and the characteristic points of the second attachment member by using the upper camera and the lower camera, respectively; and Obtained by analyzing a first feature point image that photographs the feature point of the first attachment member and a second feature point image that photographs the feature point of the second attachment member The operation of the relative position information between the characteristic point of the first attachment member and the characteristic point of the second attachment member, The operation c is performed by the following operation: reflecting the first feature point image and the second feature point image in the relative position information between the upper wall member and the lower wall member Like the relative position information between the acquired feature points. The laminating method as described in item 11 of the patent application scope, wherein the operation b includes: With respect to each of the upper wall member and the lower wall member, the first axial linear position information and the second axial linear position information determined according to the first axis and the second axis existing on a plane are extracted, respectively Operations; and With respect to each of the upper wall part and the lower wall part, an operation of extracting a tilt message indicating the tilt of the plane. The laminating method according to item 11 of the patent application scope, wherein the first attachment member is attached to the second attachment member during the operation d. The lamination method as described in item 11 of the patent application scope further includes the operation of attaching the first attachment member to the second attachment member after the operation d. The laminating method as described in item 12 of the patent application scope, wherein the marking pattern includes: Marking matrix, including multiple markers arranged in a matrix; and A plurality of circular trajectory marks, arranged outside the marking matrix, and positioned on a circular trajectory, and The operation of analyzing the mark pattern image includes: An operation of measuring the positions of the plurality of circular trajectory marks from the mark pattern image; and The operation of calculating the rotation center of at least one of the upper wall member and the lower wall member is calculated. The laminating method according to item 11 of the patent application scope, wherein the operation a to the operation d are repeated, The laminating method further includes the following operations: before repeating the operation a, identifying the attachment state of the first attachment member and the second attachment member, When the aligned attachment of the first attachment member and the second attachment member is recognized, the operation b is omitted, and by using the previously calculated between the upper wall member and the lower wall member The relative position information between them to perform the operation c, and When the misaligned attachment of the first attachment member and the second attachment member is recognized, the operation b is performed, and the upper wall member and the lower wall member are recalculated by using The relative position information between them to perform the operation c.

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