TW202009083A - Laser repair and inspection method for display device panel and repair and inspection apparatus suitable for the same - Google Patents

Abstract

Disclosed is a laser repair apparatus, an inspection method and an apparatus appropriate thereto, in which a laser beam is radiated from a panel repair apparatus using a laser; an infrared light source for radiating infrared light, which can pass through the panel, on a corresponding area is prepared on the back side of the panel area, which is a photographing target, to confirm a state, and the infrared light is radiated on the back side of the panel after or at the same time as radiating the laser beam for repair, without radiating illumination light or visible light on the surface of the panel; photographing for inspection of the corresponding area is performed; and success of the repair process in the corresponding area is verified by confirming an image photographed by the photographing device. According to the present invention, since the burden of reinspection with regard to the achievement of a laser repairing process performed on a panel can be reduced and the achievement of the repair process can be easily and immediately confirmed with high accuracy, efficiency and usability of the laser repairing process can be enhanced.

Description

Laser repair and detection method of display panel and repair and detection equipment suitable for it

The present invention relates to laser repair of a display panel. More specifically, it relates to a laser repair and detection method and a repair and detection device suitable for the laser repair and detection method that can immediately confirm the results of the laser repair of the display panel and can reduce the detection burden.

Laser processing means that a single-wavelength light with a high degree of synchronization and a high-density energy obtained by collecting light from a condenser is directed to a very small part of the workpiece to perform cutting and removal (Ablation) ), processing methods for evaporation, melting and other operations.

The laser beam used for this type of laser processing is relatively easy to control its shape or size. Therefore, it is suitable for the processing of complex shapes or precision processing by the digital control device.

A general laser processing device consists of a laser oscillator that generates a laser; an optical unit that guides the laser beam generated from the laser oscillator to a processing operation position and collects it; so that the laser beam bundled by the optical unit reaches to The position controller and the like of the desired position of the workpiece are constituted.

FIG. 1 schematically shows a configuration conceptual diagram of a configuration example of a conventional laser repair device.

The laser beam from the laser source 10 passes through the slit 20, the first beam splitter 91, the lens barrel lens 40, the second beam splitter 81, the third beam splitter 51, and the objective lens 60 to reach the processing area of the substrate 70 that is the object to be processed.

At this time, the slit is a concept including a generalized photomask, and its role is to determine the size and shape of the laser beam that reaches the substrate processing area through the slit. The lens barrel lens 40 and the objective lens 60 work together so that the laser beam reaches the processing area of the substrate 70 at a required concentration and the substrate processing is performed.

The image light source 53 irradiates the third beam splitter 51 with light, so that the reflected light irradiates the processing area of the substrate through the objective lens 60. The light reflected and scattered from the processing area is image light, and the image information carrying the processing area reversely passes through the objective lens 60, and reversely passes through the third beam splitter 51, the second beam splitter 81, and the lens barrel lens 40, from the first beam The separator 91 reflects and projects the imaging device 93, so that the imaging device can obtain an image about the processing area.

Therefore, in such a configuration, the lens barrel lens 40 and the objective lens 60 together constitute a path for the substrate processing laser to reach the substrate and a path through which the image information of the substrate processing area is transmitted to the imaging device, and play a role in determining the laser beam bundling The role of imaging and imaging light through the objective lens of the infinite optical system and several corrections.

In addition, part of the image light is reflected from the second beam splitter 81 and is projected to the lateral autofocus sensor 83 to confirm the pattern processed in the corresponding area of the substrate 70 of the processed object by the imaging device 93 In the processing process and results, etc., the focus sensor 83 automatically aligns the focus of the objective lens 60 according to the respective magnifications of the objective lens 60 confirming the pattern processed on the upper surface (surface) of the substrate 70 by laser.

The laser repair device or laser processing device configured as described above is widely used in the field of flat panel display manufacturing due to the above convenience and precision workability. In particular, it is widely used in the field of flat panel displays including LCD or OLED for the repair of picture elements. For example, bad primitives can be divided into bright-point primitives and dark-point primitives, and the benchmarks of normally-accepted bright-point primitives are stricter than those of dark-point primitives. Improve the profitability of the display panel.

As a general method of darkening the bright point primitives as described above, the black matrix is irradiated with laser light to melt the black matrix, and the melted black matrix material is guided to the foreign matter side, and the bright point primitives are darkened. The method and the method of directly passing the color filter through the light area, so that the color of the color filter becomes black, and the method of darkening the bright point primitive.

In addition, when performing laser repair, in order to prevent damage to other layers or parts of the panel, and to concentrate energy on a darkened specific layer such as a black matrix or a color filter layer, the nature of polarized light and the focal length of the focusing lens can be used.

For example, Patent No. 0981306 registered in Korea discloses a method of repairing a liquid crystal display panel using polarized light. It discloses a repairing method of using a polarizing plate provided on the liquid crystal display panel to darken the defective part of the picture element.

In the past, when the defect of the substrate was detected by lighting on the main production line after the panel was completed, if the defect of the substrate was detected, the panel was moved to the laser repair device to repair, and it was moved to the main production line again, through the lighting detection Check whether the defect of the panel is eliminated. At this time, in many cases, it is necessary to re-check whether complete repair is complete through lighting detection after repair, and whether the panel defect is repaired as a whole, especially when the success rate of defective repair is reduced. . Therefore, the panel is moved and loaded from the repairing processing device to the detection equipment, and it is burdened with time-consuming and process-efficiency such as new installation as necessary.

In order to solve the above-mentioned problems, a technology has been developed to directly perform laser repair and re-test if a defect occurs during the lighting inspection of the main production line, or to combine process equipment for re-testing in the laser repair device.

FIG. 2 is a conceptual diagram schematically illustrating a partial configuration of a portion of a repair apparatus capable of performing repair and re-detection simultaneously with the repair apparatus of FIG. 1.

At this time, when the re-detection is performed, the lighting detection is performed again. Under the illumination light of the image light source as shown in FIG. 1, a visible light transmission light source 310 under the panel 70 (rear side) is also formed, and from this transmission light source The light in the visible light area or white light is irradiated to the entire panel.

At this time, before the repair lighting test, if the problem graphic element is a forced light-emitting graphic element that often allows light to pass, so that the entire graphic element cannot be easily found through the light, but after the repair, the lighting test is performed to illuminate the image light and transmission In light time, when the corresponding problem primitives are not completely repaired, it is difficult to distinguish exactly as before.

In addition, at this time, a voltage or current is applied to the electrode or liquid crystal of the corresponding picture element for lighting detection, thereby increasing the possibility of damage to the liquid crystal layer and the electrode during the detection. In particular, when a problematic picture element is found automatically or manually for repair at the time of detection, the image light and transmitted light are irradiated and laser light is irradiated under the lighting state to darken the corresponding picture element. In the process, the occurrence of liquid crystals increases. The possibility of foam or material denaturation increases the possibility of creating new problem points for the corresponding primitives or adjacent primitives.

Eventually, due to the above problems, the repair success rate and the process yield of the display panel are reduced. Therefore, an appropriate solution to it is needed.

The present invention relates to the above-mentioned conventional panel repair processing and re-inspection method using laser, and aims to provide a reduction in the burden of re-inspection, and, during panel repair and processing, immediately maintains a high accuracy and facilitates confirmation Laser repair and detection method for repairing and processing achievements and suitable device.

The object of the present invention is to provide a laser repairing and detecting method and a device suitable for the repairing process and the results thereof, which can also perform repairing and reprocessing if necessary, at the same time.

The technical solution of the present invention is that in order to achieve the above-mentioned object, the laser repair and detection method of the present invention irradiates laser from a panel repair device using a conventional laser, and is provided in the lower part (rear side) of the panel area of the photographed object to confirm the state The infrared transmission light source that illuminates the corresponding area and passes through the panel, so that at the same time or after laser irradiation for repair, the surface of the panel is not irradiated with image light, and the ultraviolet light is irradiated from the reverse side of the panel to perform shooting for detecting the corresponding area , And confirm the shooting image in the shooting device to confirm the success of the repair process in the corresponding area.

In the method of the present invention, after the success or failure is confirmed, if the judgment is not successful, the corresponding area is irradiated with laser light, and a process of re-detection is irradiated with ultraviolet light.

In the method of the present invention, the following method can be used: the laser irradiation and ultraviolet irradiation for repair can be performed simultaneously, and the irradiation of ultraviolet light can be performed for a sufficient time for re-detection, or the ultraviolet light can continuously irradiate infrared rays independently of the laser irradiation. Transmitted light source lights up.

The method of the present invention can be performed by the in-situ method for the lighting inspection of the entire panel to which the polarizing film is attached and for the laser repair of the problem element confirmed in the lighting inspection and only in the environment of infrared transmitted light to confirm the repair result Non-lighting detection conducted under

In the method of the present invention, the step of darkening a bad pixel is to adjust the focal distance of the polarizing film attached to the surface side of the panel and the objective lens system, so that the laser energy is concentrated in the color filter layer of the panel.

The device of the present invention is formed with an infrared transmission light source as a transmission light source that illuminates the panel from the reverse side of the panel in addition to the normal repair device.

The imaging device of the present invention can recognize ultraviolet light with sufficient sensitivity when viewed as a whole, and an infrared filter or a filter substance is not formed on the path from the infrared transmission light source to the imaging device such as a camera or can be replaced.

The device of the present invention is formed with at least one display device or analysis device capable of displaying the corresponding area or automatic analysis in real time. Preferably, the display device or analysis device operates in real time.

10,110‧‧‧Laser light source

20,120‧‧‧ gap

40‧‧‧tube lens

51,81,91,127,151,281‧‧‧‧beam splitter

53,153‧‧‧Light source (image light source)

60,160‧‧‧objective lens (objective lens system)

70,170‧‧‧Panel

83‧‧‧Auto focus sensor

93,193‧‧‧ shooting device

125‧‧‧Reflecting mirror

140‧‧‧The first lens barrel lens

240‧‧‧The second lens barrel lens

310‧‧‧Visible light transmission light source

330‧‧‧Infrared transmission light source

Hereinafter, the present invention will be described in more detail through embodiments of the present invention with reference to the drawings.

FIG. 1 is a conceptual diagram showing the configuration of a general laser repair device; FIG. 2 is a conceptual diagram showing the configuration of a part compared with FIG. 1 in the configuration of a conventional laser repair and re-inspection device; 3 is a conceptual diagram schematically showing the configuration of the laser repair and detection device suitable for the present invention; FIG. 4 is a flowchart showing an embodiment of the laser repair and detection method of the present invention; FIG. 5 is a photograph based on the conventional Re-detection method The problem is that when the image light and visible transmitted light are irradiated, the photo of the panel surface side of the picture element part and the state of the ultraviolet light from the rear (back side) to the panel after laser repair according to the laser repair detection method of the present invention Next, take a comparison photo of the panel surface side of the problem primitive.

Hereinafter, the present invention will be described in more detail through embodiments of the present invention with reference to the drawings.

FIG. 3 is a conceptual diagram schematically showing the configuration of a laser repair processing and detection device suitable for implementing the method of the present invention.

The laser repairing and testing equipment (hereinafter referred to as a device) according to this embodiment includes: a laser source 110 that emits laser; a slit 120 that allows the laser to pass through and adjusts the size and shape of the laser; the first lens barrel lens 140 will A one-time adjustment through the laser of the slit; the objective lens system 160 receives the light passing through the first barrel lens and passes it, performs a secondary adjustment of the bundling degree, irradiates the processed object, that is, the panel, and makes the processed object The image light passes in the reverse direction to adjust the concentration of the image light; the illumination light source (image light source: 153) radiates the illumination light that illuminates the display panel that is the object to be processed through the objective lens system; the imaging device 193 receives the second lens barrel lens 240. Receive image light passing through the second lens barrel lens to obtain an image of the processed object.

Here, the laser source 110 is a concept including all components necessary for laser radiation, such as a laser oscillator and a shutter.

The slit 120 is a broad concept including a part that forms a slit through which a laser passes and determines the size of the laser, and a pattern mask that determines the form of the laser, and defines the size and the form of the passing laser.

Here, the laser beam passing through the slit is reflected toward the mirror 125, and the replacement path is projected toward the first barrel lens 140. For the first barrel lens 140, a focal length of 200 mm is generally used. A slit illumination 120a that provides illumination to the slit 120 may be formed at the front end on the light path of the slit 120.

The laser beam that has passed through the first barrel lens is reflected from the beam splitter 127 here, is collected by the objective lens system 160 again, and is irradiated to a predetermined position of the display panel. Thus, the color layer material of the corresponding picture element of the color filter can be blackened.

Then, the illumination light is radiated from the illumination light source 153, reflected from the beam splitter 151 through the optical system, and the transmitted beam splitter 127 passes through the objective lens system 160 toward the display panel 170 repaired by laser, and is reflected and scattered to generate the Image light of image information in processing state.

The image light is condensed through the objective lens system 160 from the reverse direction, and passes through the beam splitters 127 and 151 toward the second barrel lens 240.

The second barrel lens passes the projected image light, adjusts the image light, and projects it to the imaging device 193. As a result, the imaging device can acquire an image with an accurate focus. The shooting device displays images through the computer and monitor connected to it, and the displayed images can confirm the processing status of the corresponding area in the laser repair process.

A filter 197 or a polarizing filter 195 may be provided between the second lens barrel lens and the imaging device. When the amount of light is excessive, the amount of light may be reduced, or the image may be limited to a wavelength range suitable for the imaging device.

In addition, unlike the conventional case of FIG. 2, an infrared transmission light source 330 is provided together with the visible light transmission light source 310 at the lower part of the display panel rear surface side). The infrared transmission light source 330 is provided together with the visible light transmission light source 310 that generates visible transmission light, and irradiates only visible transmission light, or only infrared transmission light, or both transmission lights as needed. The transmission light source may illuminate only a partial area of the panel, but here, a transmission light source that illuminates the panel integrally is used.

Moreover, when the infrared transmission light is irradiated, the image light and laser light may not illuminate the panel surface.

In addition, in the above-mentioned device configuration, in order to clearly confirm the repair result on the panel surface when irradiating infrared transmitted light, it is a matter of course to prevent ultraviolet light from being blocked or seriously deteriorated from the substrate surface side to the imaging device in the state where the transmitted light transmits the panel problem.

For this reason, each optical element on the path should be replaced with a filter function layer that does not exclude infrared rays, or the position can be changed to be removed on the path when necessary, or it can be replaced, which is special for infrared lighting, and In particular, the optical elements that allow infrared rays to pass through better to make them perform corresponding functions. For example, there is no infrared filter in the screening program, the lens coating attached to the lens forming the shooting device or the screening program also has no infrared filter, and the beam splitter should not have an infrared filter coating or the component mixed in the main component in.

Also, although not explicitly shown in FIG. 3, an automatic focus adjustment device is usually formed on the image light path, and preferably, the automatic focus adjustment device must also be able to easily recognize and drive infrared images passing through the transmitted light .

In addition, the present invention is considered to be performed together with laser repair. In the overall structure of the optical system, when performing the repair operation by laser, it is necessary to prevent the laser from affecting the infrared transmission light source or other layer structures in the panel and the optics in the device to the greatest extent. Factors have an impact.

A series of processes performed in the laser repair and inspection equipment of the above-mentioned configuration can be organized in a simple manner by the flowchart of FIG. 4.

The repair and inspection equipment is installed on the path of lighting inspection after the display panel is first manufactured (refer to FIG. 3). The completed display panel with the surface polarizing film attached in the previous step is loaded into the device.

First, the overall lighting detection of the panel is performed (S10). When performing this detection, visible light or white light is irradiated from the visible light transmission light source 310 on the reverse side of the panel, and image light is irradiated from the panel surface side, so that the image seen from the panel surface side is transmitted to the imaging device.

At this time, when the voltage cannot be applied to all the picture elements by light, the overall screen appears black, but the defective picture element still passes light and can be clearly recognized. Therefore, this process enables the identification of poorly illuminated primitives. Recognition of the image is performed by the naked eye, or by image processing using an automatic image analysis method (S20).

Since the device is provided with a laser repair device, the panel is not moved even if it is sensed poorly, and the laser repair device is driven in situ to darken and blacken the defective pixels (S30).

That is, the position of such a defective picture element is confirmed, and laser light is irradiated to each of the positions, so that the position manner in which the color filter layer is formed at the position is thermally denatured. In this case, it is preferable to increase the laser beam concentration in the color filter layer by an objective lens or the like, to improve the processing efficiency of the laser, and to use the properties of the polarizing filter and polarized light to prevent the heating of other components of the panel to the greatest extent.

Usually the substance forms a black non-transparent layer that is thermally denatured, making it impossible for light to pass through. However, when laser repair is not performed correctly, some light leakage is found.

Such problems can be found in the next step of the laser repair result detection step. In the result detection, unlike the initial detection step, only an infrared transmission light source is used as the transmission light source, and unopened detection is performed in a state where no image light (illumination light) is irradiated on the surface side. Therefore, the electric load is not turned on at the panel, but the light passing through the infrared light transmission source is transmitted through the liquid crystal layer in each picture element (S40).

Ultraviolet light passes through the material layer of the color filter in the normal picture element, and shows a brighter shape in the image recognized by the camera device that can better sense infrared rays, but cannot pass the thermal denaturation in the picture element darkened by laser repair The layer is darker, so that the difference between the normal area and the bad primitive area is more clearly presented.

The above situation can be confirmed by comparing the photographs of a and b in FIG. 5. 5 a is a comparative example, and b is this example. In addition, the photo of a in FIG. 5 is that when the conventional repair is performed and re-detection is performed, the visible transmitted light is irradiated, and the surface-side image light is still irradiated. In this state, the difference between the brightness of the problem picture element and the normal picture element does not clearly appear .

According to the method of the present invention as described above, lighting detection is not performed after the darkening process of the pixel repaired by laser, therefore, it is possible to prevent the application of voltage or the voltage or the voltage to the electrode or liquid crystal of the corresponding pixel for lighting detection after repair The current causes the liquid crystal layer and the electrode to be damaged during the detection, and can prevent the problem that occurs when the lighting is continued during the laser repair process for the subsequent lighting test after the repair.

According to the method of the present invention as described above, it is possible to perform panel lighting detection, laser repair processing, and post-repair detection in situ, thereby reducing process burden, and using an infrared transmission light source to accurately confirm whether repair processing is a problem The primitives are fully darkened, and additional repairs can be performed when needed, and the overall repair success rate can be improved to ultimately increase the panel profitability.

The present invention has been described above through limited embodiments, but it is only exemplified to help understand the present invention, and this description is not limited to the above specific embodiments. That is, a person of ordinary skill in the technical field of the present invention can make various changes or implement application examples based on the present invention, and such modifications or application examples all fall within the scope of the appended claims.

The beneficial effects of the present invention are: according to the present invention, when performing laser repair processing on a panel, the burden of re-detecting its results is reduced, and the results of the repair processing can be easily confirmed immediately with high accuracy, thereby improving the laser The effectiveness and utilization of the repair process, and can macroscopically increase the manufacturing yield of LCD or OLED display panels.

Claims (6)

A laser repairing and testing equipment, including: a laser source that emits a laser; a slit that allows the laser to pass through and adjusts the size and shape of the laser; a lens barrel lens that allows the laser that passes through the slit to pass through once Adjust the bundling degree so that the image light for a panel passes; an objective lens system receives and passes the laser beam passing through the lens of the lens barrel, performs a secondary adjustment of the bundling degree, irradiates the panel, and makes The image light of the panel is passed in the reverse direction to adjust the concentration of the image light; an illumination light source radiates an illumination light illuminating the panel through the objective lens; a photographing device receives the light passing through the lens barrel lens The image light obtains an image for the panel; and an infrared transmission light source, which is arranged on the opposite side of the objective lens system with the panel as a reference, and illuminates the panel. The laser repair and detection device according to item 1 of the scope of the patent application, wherein a visible light transmission light source is provided with the infrared transmission light source on the opposite side of the objective lens system, thereby, alternatively or together with the infrared transmission light source One side of the panel is irradiated with visible light. A laser repair and detection method, which utilizes the laser repair and detection equipment of claim 2 of the patent scope, includes the following steps: for a panel to illuminate the illumination light passing through the illumination light source to one surface side thereof, Illuminating transmitted light from the visible light transmitting light source to the reverse side of the panel to perform lighting detection on the panel; by detecting an image obtained from the photographing device by means of the lighting, confirm that the panel often transmits light Forced luminous defective pixels; illuminate the laser on the confirmed defective pixels of the panel, so that the defective pixels are darkened; the panel is not illuminated by the illumination light source and the visible light transmission light source Next, infrared rays are irradiated from the infrared transmission light source, and by the image obtained from the imaging device, it is confirmed whether darkening of the defective picture element is correctly performed. According to the laser repair and detection method described in item 3 of the patent application scope, wherein the steps are performed in an in situ manner without movement of the panel. According to the laser repair and detection method described in item 3 of the patent application scope, wherein the step of darkening the defective pixel is through a polarizing film attached to the surface side of the panel and a focal distance of the objective lens system The adjustment is performed so that the laser energy is concentrated on a color filter layer of the panel. A laser repair and detection method, as a laser repair and detection method using the laser repair and detection equipment of claim 1 or 2, includes the following steps: irradiating a laser to a detected defective image element of the panel, Then, the defective picture element is darkened; for the panel, infrared rays are irradiated from the infrared transmission light source, and it is confirmed whether the darkening of the defective picture element is correctly performed.

Images