JP3759363B2 - Inspection repair method and inspection repair device for reflective liquid crystal display device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for inspecting a transparent liquid crystal display device in which a transparent circuit element on a circuit board in a reflective liquid crystal display device is inspected with the naked eye, and irradiating a defective portion of the transparent circuit element detected by this inspection method with a laser beam. The present invention relates to a method for repairing a reflective liquid crystal display device that is more accurately and efficiently repaired, and a repair device for a reflective liquid crystal display device that can be used for the repair.
[0002]
[Prior art]
Liquid crystal display devices are roughly classified into a transmission type and a reflection type. Among these, as shown in FIG. 4 for an example of the reflective type, a light-reflective reflective-side circuit board 10 and a light-transmissive display-side circuit board 20 are disposed opposite to each other with the liquid crystal layer 1 interposed therebetween. A display surface is formed on the display side circuit board 20, and a reflective layer 12 is formed on the reflection side circuit board 10. In this liquid crystal display device, external light incident from the display surface passes through the display side circuit board 20 and the liquid crystal layer 1 and is reflected by the reflection layer 12 of the reflection side circuit board 10, and the reflected light is emitted from the display surface. It is like that.
In FIG. 4, the reflective circuit board 10 is made of a glass substrate 11, a reflective layer 12, an intervening layer 13, a color filter layer 14, a planarizing layer 15, an ITO (indium tin oxide) film, a nesa film, or the like in order from the bottom. The display-side circuit board 20 in which the electrode 16 and the alignment layer 17 are laminated and opposed to the display surface side with the liquid crystal layer 1 interposed therebetween has an alignment layer 21, an insulating layer 22, an ITO film in order from the liquid crystal layer 1 side. Alternatively, a transparent electrode 23 made of a nesa film or the like, a glass substrate 24, and a polarizing plate (including a diffusion sheet) 25 are laminated.
[0003]
In this liquid crystal display device, the color filter layer 14 of the reflection-side circuit board 10 is formed by alternately arranging R (red), G (green), and B (blue) colored films formed in stripes. Striped transparent electrodes 16 are arranged in parallel corresponding to the respective colored films. Further, in the display side circuit board 20, the transparent electrode 23 is arranged in parallel so as to be orthogonal to the transparent electrode 16 of the reflection side circuit board, and the display side transparent electrode 23 and the reflection side transparent electrode 16 intersect the liquid crystal layer 1. The portion forms a pixel corresponding to each color.
[0004]
The reflection layer 12 of the reflection side circuit board 10 can be roughly classified into a smooth reflection type and a diffuse reflection type. In the smooth reflection type shown in FIG. 5 (a), the reflection surface of the reflection layer 12 (a) has a smooth finish, and the incident angle and the emission angle of light sandwiching the normal line are equal. Therefore, when the display surface is observed, the brightness of the display surface is uneven due to the positional relationship between the light source and the viewpoint. In order to solve this problem, in the diffuse reflection type shown in FIG. 5B, the reflective surface of the reflective layer 12 (b) is formed in an uneven shape. For this reason, in the diffuse reflection type, a so-called wide viewing angle reflection type liquid crystal display device can be obtained in which incident light diffuses in a certain range and the brightness does not change much even when the viewpoint is changed.
[0005]
[Problems to be solved by the invention]
In the process of manufacturing the reflection type liquid crystal display device, the transparent electrode 16 forms a transparent conductive film such as ITO on the entire surface of the substrate, and the transparent conductive film is cut into stripes by photolithography or laser beam irradiation. Formed. At this time, there are cases where the cutting is incomplete and adjacent transparent electrodes are short-circuited, the outline of the transparent electrode is disturbed, or cutting waste adheres. Therefore, the edge portion of the transparent electrode 16 is inspected, and if there is the above-described defect portion, for example, repair such as irradiating a processing laser beam to burn out the short-circuit portion is performed.
However, in the inspection of the reflection side circuit board 10, since the transparent electrode 16 is a thin transparent film, it is very difficult to observe the outline with a conventional optical microscope. For example, even when using a bright-field mode, a dark-field mode, a stereoscopic microscope, a polarizing microscope, or the like of a visible light microscope, it is hardly observable with the naked eye, and particularly when the color filter layers 14 appear to overlap each other or diffuse reflection type reflection. When layer 12 (b) was used, it was almost impossible to inspect the outline by visual observation. Therefore, the conventional method for inspecting the transparent electrode 16 on the reflection side circuit board is to irradiate the sample with infrared rays and observe the monitor image obtained by receiving the reflected light by the CCD camera.
In addition, when a defective portion of the transparent electrode is found by the method of irradiating the infrared ray, a repair work called “trimming” is performed to irradiate the laser beam for processing to the defective portion and to adjust the outline of the transparent electrode. However, since the monitor image by infrared rays is a black and white image, special skill is required for discrimination when image noise such as the color filter layer 14 is mixed, and accurate repair by laser beam and confirmation of the completed shape are required. It was difficult.
[0006]
SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems. Accordingly, the object of the present invention is to inspect a reflective liquid crystal display device that can easily inspect transparent circuit elements in the reflective liquid crystal display device with visible light. Method, a repair method of a reflective liquid crystal display device capable of accurately and easily repairing a defective portion of the transparent circuit element detected by the inspection method by irradiation of a laser beam, and a reflective type which can be used for the repair An object of the present invention is to provide a repair device for a liquid crystal display device.
[0007]
[Means for Solving the Problems]
  In order to solve the above-described problems, the present invention inspects a transparent circuit element on the circuit board in a reflective liquid crystal display device having a circuit board on which a transparent circuit element is formed on the reflective layer.RepairWhen doingA laser beam for processing from a processing light source and linearly polarized light from an inspection light source can be selectively irradiated to the circuit board via an optical path including a light source switching mirror, a half mirror type inspection light switching mirror, a Nomarski prism, and an objective lens. The reflected light from the circuit board can enter the analyzer freely by the action of the inspection light switching mirror, and from the inspection light source during the inspection,The linearly polarized light having a visible wavelength is split into two light beams that are coherent and orthogonal to each other through a Nomarski prism and intersect the two light beams. At the intersection of the two light beams, the formula NA = n sinθ (where n is The refractive index, θ is the focal angle with respect to the optical axis in the imaging side focal point), and the imaging side focal point of the objective lens having a numerical aperture NA (numerical aperture) of 0.24 or less is matched. Two luminous fluxes are irradiated onto the circuit board, and the reflected light passes through the objective lens and the Nomarski prism.Due to the action of the inspection light switching mirrorForm an image on the analyzer, generate an interference image based on the phase difference of the two light beams, and inspect the interference imageIn addition, with respect to repairing the transparent circuit element according to the inspection result, the Nomarski prism is retracted from the optical path, and the light source switching mirror and the inspection are provided in a defective portion of the transparent circuit element detected by the inspection. A laser beam for processing is irradiated through the objective lens by the action of the optical switching mirror, and the defect portion is repaired by the laser beam.It is characterized by that.
[0008]
The Nomarski prism splits light that has been linearly polarized from a light source through a polarizing plate into linearly polarized light of two light beams that are coherent and orthogonal to each other at a certain distance, and intersects the optical axes of the two light beams. There is an effect. In general, one of the two linearly polarized light beams is called “normal light” and the other is called “abnormal light”. Further, when the back focal point of the objective lens is arranged at the intersection where the optical axes of the two light beams emitted from the Nomarski prism intersect, and the sample is irradiated through the objective lens, the reflected light of the two light beams has a gradient or a step on the surface of the sample. When the light passes through the Nomarski prism, the two light beams are combined into elliptically polarized light. When this light is imaged on an analyzer (polarizing plate), the phase difference between the two light beams is An interference image based on This inspection method is generally called “differential interferometry” and has been conventionally used for measuring a minute thickness gradient or a step on the specimen surface. However, even if this method is applied to the inspection of the transparent circuit element on the circuit board in the reflection type liquid crystal display device, generally the outline of the transparent circuit element made of ITO or the like cannot be clearly seen. As a result of diligent research to solve this problem, the inventor selects an objective lens having a numerical aperture of 0.24 or less in combination with the differential interferometry inspection system, so that a transparent circuit in a reflective liquid crystal display device is obtained. It has been found that the visibility of the outline of the element is remarkably improved, and the present invention has been achieved. As a comparative example, the numerical aperture of an objective lens in a differential interference method inspection system that has been conventionally used is 0.25 or more.
[0009]
The numerical aperture will be described below with reference to FIG. The numerical aperture NA
NA = n sinθ
(Where n is the refractive index, θ is the expected angle with respect to the optical axis at the focal point F on the imaging side)
This is a general characteristic value of the lens defined by. The above equation can be rewritten as follows:
NA = nd / √ (d²+ F²)
(Where d is the effective radius of the lens and f is the focal length)
That is, making the numerical aperture NA of the objective lens smaller than the value conventionally used in the differential interference inspection system increases the focal length f if the refractive index n and effective radius d of the lens are constant. It corresponds to that. Since the focal point F which is a problem in the present invention is an imaging side focal point generally called a rear focal point (retro focus), in the inspection method of the reflection type liquid crystal display device of the present invention, the focal length f of the rear focal point F is the conventional focal length f. A lens longer than the objective lens used in the differential interferometry inspection system is selected.
[0010]
By making the rear focal length f of the objective lens longer than that of the conventional lens, the interference distance between the normal light and the extraordinary light reflected from the specimen circuit board is extended. As a result, the interference intensity is enhanced and the analyzer surface is increased. It is considered that the contrast of the edge of the appearing interference image is improved and the visibility of the outline of the transparent circuit element is improved. According to the inspection method of the present invention, the outline of the transparent circuit element on the circuit board in the reflective liquid crystal display device can be clearly inspected with the naked eye as a color image.
From this point of view, it is desirable that the numerical aperture NA of the objective lens is small. However, if the focal length f on the imaging side is excessively long, the size of the apparatus becomes large, and the magnification is reduced, so that the practicality is lowered. A practically preferred numerical aperture NA is therefore in the range of 0.19 to 0.24, more preferably in the range of 0.21 to 0.24.
[0011]
In the inspection method for the reflective liquid crystal display device of the present invention, it is preferable that the interference image is inspected through a green visibility correction filter. This further improves the visibility of the transparent circuit elements on the circuit board in the reflective liquid crystal display device.
[0012]
  The present invention also providesSince the inspection process and the repair process can be performed by switching between the inspection light source and the processing light source using the Nomarski prism and the objective lens at the same position in the inspection process and the repair process, the inspected circuit board is inspected as it is. Can be used in the repair process.
  thisInspectionAccording to the repair method, since the relative position of the objective lens and the circuit board does not change between the inspection process and the repair process, the laser beam is immediately applied to the defective portion of the transparent circuit element whose repair location is determined by inspection of the interference image. Irradiation can be performed accurately, and the repair accuracy and efficiency can be greatly improved.
[0013]
  The present invention further provides a transparent circuit element on the circuit board in a reflective liquid crystal display device having a circuit board on which a transparent circuit element is formed on the reflective layer.Inspect andRepairInspectionA repair device,A processing light source capable of irradiating a processing laser beam, an inspection light source capable of irradiating inspection light, a polarizing plate for converting light from the inspection light source into linearly polarized light, and processing from the processing light source Light source switching mirror for switching linearly polarized light from a laser beam for inspection and a light source for inspection, a half mirror type inspection light switching mirror provided on the rear side of the light source switching mirror, a Nomarski prism, an objective lens, and an analyzer In the inspection process, linearly polarized light via an inspection light source and a polarizing plate is irradiated to the circuit board through the Nomarski prism and the objective lens by the inspection light switching mirror, and the Nomarski prismThe linearly polarized light having a visible wavelength is branched into two light beams that are coherent with each other and whose polarization directions are orthogonal to each other, and the two light beams are crossed so that the focal point on the imaging side coincides with the intersection of the two light beams.Arranging the objective lens, and in the objective lensA numerical aperture NA (numerical aperture) represented by the formula NA = n sin θ (where n is the refractive index and θ is the expected angle with respect to the optical axis at the image-forming focal point) is 0.24 or less.And reflected light from the circuit board is incident on the analyzer through the objective lens and the Nomarski prism by the action of the half mirror type inspection light switching mirror.An interference image based on the phase difference between the two light beams is generated by an analyzer, and the circuit board is inspected by monitoring the interference image.it canWithIn the repairing process, the Nomarski prism is retracted from the optical path leading to the objective lens, and the laser beam from the processing light source is applied to the circuit board via the objective lens by the action of the light source switching mirror and the inspection light switching mirror. Irradiated and configured to repair the transparent circuit element according to the inspection result of the inspection processIt is characterized by that.
[0014]
  Of this reflective LCDInspectionAccording to the repair device, the defective part of the transparent circuit element can be examined with the naked eye, and the optical axis of the processing laser beam can be made to coincide with the optical axis of the inspection system so that the laser beam can be irradiated. There is an advantage that the repaired part can be repaired immediately and accurately.
  In addition, since the relative position between the objective lens and the circuit board does not change between the inspection process and the repair process, the laser beam is immediately and accurately applied to the defective portion of the transparent circuit element whose repair location is determined by inspection of the interference image. The repair accuracy and efficiency can be greatly improved as compared with the prior art.
[0015]
In the above, it is preferable that a green visibility correction filter is inserted in the optical path for inspecting the interference image. As a result, the contour line of the transparent circuit element can be clearly seen, so that the repair accuracy and work efficiency of the repair device can be further improved.
[0016]
  Of the present inventionInspectionThe repairing device is preferably provided with a monitor means for visualizing the state in which the transparent circuit element is irradiated with the laser beam. While the sample circuit board was irradiated with the laser beam, for example, a CCD camera was used to avoid the reflected light from directly entering the eye and to monitor the progress of the repair by the laser beam in real time. It is preferable to attach the monitor means to the optical system of the repair apparatus. Infrared rays are generally used as the laser beam, and the transparent circuit elements on the circuit board can be detected by infrared rays. Therefore, if an infrared sensitive monitor means is used, the progress of the repair of the transparent circuit elements by the laser beam is indicated. It can be monitored in real time.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be specifically described with reference to the drawings. However, the following embodiments do not limit the present invention.
FIG. 1 shows a specific example of a repair device for a reflection type liquid crystal display device of the present invention (hereinafter referred to as “the repair device”). In FIG. 1, the repair device includes a Nomarski prism 31, an objective lens 32, an analyzer 33, a visibility correction filter 34, an eyepiece lens 35, an inspection light source 36, a polarizing plate 37, a processing light source 41, a monitor camera 42, and a monitor control device. 43, a monitor 44, a light source switching mirror 51, an inspection light switching mirror 52, a laser beam shutter 53, and a sample fixing base 61. Further, this repairing apparatus has means for switching between the inspection mode indicated by (1) and the processing mode indicated by (2) in FIG. 1, and by this mode switching, the Nomarski prism 31, the light source switching mirror 51, the inspection light. The arrangement of the switching mirror 52 and the laser beam shutter 53 is changed between an inspection mode (1) indicated by a solid line and a processing mode (2) indicated by a dotted line.
[0018]
The object to be repaired by this repairing apparatus is the reflection side circuit board 10 in the reflection type liquid crystal display device shown in detail in FIG. 5B, and although the details are omitted in FIG. 1, the transparent circuit element 16 made of ITO. And a reflective layer 12 (b) having a diffuse reflection type uneven reflection surface disposed in the lower layer. A target portion to be repaired by the repair device is an edge portion of the transparent circuit element 16.
[0019]
In this repair device, the Nomarski prism 31 is a prism formed by cutting and bonding uniaxial crystals such as quartz and calcite at a fixed angle, and when linearly polarized light is incident, the light is separated by a fixed distance. There is an effect of branching into two linearly polarized light beams composed of normal light and extraordinary light that are coherent with each other and whose polarization directions are orthogonal to each other, and intersect the optical axes of the two light beams.
The Nomarski prism 31 moves in the inspection mode {circle around (1)} and the processing mode {circle around (2)}. In the inspection mode {circle around (1)}, the Nomarski prism 31 is arranged at a position for receiving light from the inspection light source 36. In the processing mode {circle around (2)}, the light beam moves from the processing light source 41 to a position outside the optical path.
[0020]
The objective lens 32 has a formula
NA = n sinθ
(Where n is the refractive index, θ is the expected angle with respect to the optical axis at the focal point on the imaging side)
The numerical aperture NA represented by is set to 0.24 or less. In this embodiment, the numerical aperture NA is 0.22.
The objective lens 32 does not change the relative position with respect to the circuit board 10 in the inspection mode (1) and the processing mode (2). In the inspection mode (1), the inspection light and its reflected light are used, and in the processing mode (2). It passes through the processed light and its reflected light.
[0021]
The analyzer 33 is composed of a polarizing plate, and receives the light reflected by the circuit board 10 and passed through the objective lens 32 and the Nomarski prism 31 in the inspection mode {circle around (1)} to be elliptically polarized, and generates an interference image.
The visibility correction filter 34 is a green optical filter that increases the color contrast of the interference image and improves the visibility of the edge of the transparent circuit element.
The eyepiece 35 is adjusted so that the light image that has passed through the lens 35 forms an image on the retina of the observer's eye.
[0022]
The inspection light source 36 comprises a combination of a white lamp, preferably a halogen lamp or xenon lamp, and a condenser lens.
The polarizing plate 37 converts light emitted from the inspection light source 36 into linearly polarized light.
In this embodiment, the processing light source 41 is a combination of a neon helium laser and a collimator lens, and emits near-infrared rays as parallel rays.
The monitor camera 42 is a CCD camera sensitive to the wavelength of the laser beam, and the monitor control device 43 processes the video signal provided from the monitor camera 42 and projects it on the monitor 44 as a field image of the objective lens 32.
[0023]
The light source switching mirror 51 is a mirror plate that swings between the inspection mode (1) and the processing mode (2) around the upper side, and reflects light from the inspection light source 36 in the inspection mode (1). It is arranged at a position to be sent toward the circuit board 10 and moves to a position off the optical path of the processing light source 41 in the processing mode (2).
The inspection light switching mirror 52 is a half mirror that rotates between the inspection mode (1) and the processing mode (2) about the center line. In the inspection mode (1), the light from the inspection light source 36 is emitted. The light passes through and is sent to the circuit board 10 and the reflected light from the circuit board 10 is reflected and sent to the analyzer 33. In the processing mode {circle around (2)}, the light from the processing light source 41 is transmitted toward the circuit board 10 and the reflected light from the circuit board 10 is reflected and transmitted toward the monitor camera 42.
The laser beam shutter 53 blocks the optical path from the inspection light switching mirror 52 to the analyzer 33 only in the processing mode (2).
[0024]
The sample fixing base 61 fixes the circuit board 10 as a specimen without loosening and can be freely attached and detached by suction, and in the X-axis and Y-axis directions perpendicular to the optical axis of the objective lens 32 and the objective lens 32. The movement is free in the Z-axis direction parallel to the optical axis.
[0025]
The work of repairing the circuit board 10 using the repair device includes an inspection process and a repair process.
(Inspection process)
First, the circuit board 10 to be repaired is fixed to the sample fixing base 61 by suction, and the Nomarski prism 31, the light source switching mirror 51, the inspection light switching mirror 52, and the laser beam shutter 53 are set to the position of the inspection mode (1). To do. Next, when the inspection light source 36 is turned on, the emitted white light is converted into linearly polarized light by the polarizing plate 37, reflected by the light source switching mirror 51, passes through the inspection light switching mirror 52, and enters the Nomarski prism 31.
[0026]
As shown in FIG. 2, the linearly polarized light P incident on the Nomarski prism 31 is split into a normal light O and an extraordinary light E which are separated by a certain distance s and are coherent and orthogonal in polarization direction. The normal light O and the extraordinary light E intersect at the point F after the emission.
The objective lens 32 is arranged so that this point F is the back focal point. The normal light O and the extraordinary light E emitted from the Nomarski prism 31 cross each other, pass through the objective lens 32, and irradiate the circuit board 10, respectively.
[0027]
In this state, the sample fixing base 61 is appropriately moved in the X, Y, and Z directions within the field of view of the objective lens 32 to focus on the edge of the transparent circuit element 16 and search for a defective portion while moving. During this time, the reflected light from the circuit board 10 enters the objective lens 32, passes through the Nomarski prism 31 and is converted into elliptically polarized light, at least a part of which is reflected by the inspection light switching mirror 52 and reaches the analyzer 33, The analyzer 33 forms an interference image based on the phase difference between the normal light O and the extraordinary light E, reinforces the color contrast through the visibility correction filter 34, and visually recognizes the edge of the transparent circuit element 16 through the eyepiece 35 as a color image. become able to.
[0028]
(Repair process)
When a defective portion of the transparent circuit element 16 is detected by visual inspection, the defect fixing portion 61 is placed at the center of the visual field and the movement of the sample fixing base 61 is stopped, and the Nomarski prism 31, the light source switching mirror 51, and the inspection light switching mirror 52 are stopped. , And the laser beam shutter 53 is switched to the processing mode (2), and the processing light source 41 emits the laser beam. The laser beam passes through the inspection light switching mirror 52 and the objective lens 32 and is focused on the defective portion of the transparent circuit element 16 to burn out this portion. At this time, the reflected light of the laser beam passes through the objective lens 32 and is at least partially reflected by the inspection light switching mirror 52 and enters the monitor camera 42. The video signal provided from the monitor camera 42 is subjected to image processing by the monitor control device 43 and projected on the monitor 44 as a visual field image of the objective lens 32. During this time, the laser beam shutter 53 is closed, and the laser beam is prevented from entering the visual field of the eyepiece lens 35.
During this time, the sample fixing base 61 can be moved along the edge of the transparent circuit element 16 while monitoring the monitor 44 to perform trimming (framing processing) of the transparent circuit element.
[0029]
This repair device can easily detect the defective portion of the transparent circuit element in the circuit board of the reflective liquid crystal display device by the naked eye only by switching between the inspection mode and the processing mode, and can also detect the relative relationship between the objective lens and the circuit board. Since the defective portion can be repaired immediately by the laser beam without moving the position, the accuracy and efficiency of the repair work is greatly improved over the conventional method.
[0030]
【The invention's effect】
  Inspection of the reflective liquid crystal display device of the present inventionrepairIn this method, linearly polarized light is irradiated onto a circuit board serving as a specimen through a Nomarski prism and an objective lens having a numerical aperture of 0.24 or less, and the reflected light is imaged on an analyzer to inspect the generated interference image. As a result, the visibility of the transparent circuit element on the circuit board is high, and the defect portion can be easily detected by visible light.Following further inspectionA repairing step of irradiating the circuit board with a processing laser beam through the objective lens and repairing the transparent circuit element of the circuit board with the laser beam.I doTherefore, not only the defective part of the transparent circuit element in the circuit board of the reflective liquid crystal display device can be easily detected with the naked eye, but also the defect part by the laser beam can be instantly detected without changing the relative position between the objective lens and the circuit board. Since repairs can be performed, the accuracy and efficiency of repair work is significantly improved over conventional methods.
  Furthermore, according to the inspection / repair method of the present invention, the relative position between the objective lens and the circuit board does not change between the inspection process and the repair process. The laser beam can be irradiated immediately and accurately, and the repair accuracy and efficiency can be greatly improved as compared with the prior art.
  According to the inspection and repair apparatus of the present invention, the defective portion of the transparent circuit element can be inspected with the naked eye, and the optical axis of the processing laser beam can be aligned with the optical axis of the inspection system so that the laser beam can be irradiated. There is an advantage that the repaired part of the transparent circuit element can be repaired immediately and accurately.
  Further, according to the inspection / repair device of the present invention, the relative position between the objective lens and the circuit board does not change between the inspection process and the repair process. The laser beam can be irradiated immediately and accurately, and the repair accuracy and efficiency can be greatly improved as compared with the prior art.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing an embodiment of the repair device.
FIG. 2 is an optical path diagram showing a part of an optical system of the repair device.
FIG. 3 is an optical path diagram for explaining the numerical aperture of an objective lens.
FIG. 4 is a cross-sectional view illustrating a configuration of a reflective liquid crystal display device.
5A is a cross-sectional view showing a configuration of a smooth reflection type circuit board and FIG. 5B is a configuration of a diffuse reflection type circuit board.
[Explanation of symbols]
10 ... Reflection side circuit board
12, 12 (a), 12 (b) ... reflective layer
16 ... Transparent circuit element
31 ... Nomarski prism
32 ... Objective lens
33 ... Analyzer
34. Visibility correction filter
35 ... Eyepiece
36 ... Light source for inspection
37 ... Polarizing plate
41 ... Light source for processing
42. Monitor camera
43. Monitor control device
44 ... Monitor
51. Light source switching mirror
52 ... Inspection light switching mirror
53 ... Laser beam shutter
61 ... Sample fixing base

Claims (6)

When inspecting and repairing a transparent circuit element on a circuit board in a reflective liquid crystal display device having a circuit board on which a transparent circuit element is formed on the reflective layer, a processing laser beam and an inspection light source from the processing light source The circuit board can be selectively irradiated with the linearly polarized light from the light path including a light source switching mirror, a half mirror type inspection light switching mirror, a Nomarski prism, and an objective lens, and reflected light from the circuit board is switched to the inspection light. By the action of the mirror, it can enter the analyzer outside the optical path,
In the inspection, the linearly polarized light having a visible wavelength from the inspection light source is split into two light beams that are coherent and orthogonal in the polarization direction through a Nomarski prism, and the two light beams are crossed. NA = n sinθ (where n is the refractive index, θ is the expected angle with respect to the optical axis at the focal point on the imaging side) and the imaging side of the objective lens having a numerical aperture NA (numerical aperture) of 0.24 or less The circuit board is irradiated with the two light fluxes through the objective lens through focusing, and the reflected light is imaged on the analyzer through the objective lens and the Nomarski prism by the action of the inspection light switching mirror. Generate an interference image based on the phase difference of the light beam, inspect the interference image ,
With respect to repairing the transparent circuit element according to the inspection result, the Nomarski prism is retracted from the optical path, and the light source switching mirror and the inspection light switching are provided in a defective portion of the transparent circuit element detected by the inspection. A method of inspecting and repairing a reflective liquid crystal display device, wherein a laser beam for processing is irradiated through the objective lens by the action of a mirror, and the defect portion is repaired by the laser beam . 2. The inspection and repair method for a reflective liquid crystal display device according to claim 1, wherein an interference image obtained through the analyzer is inspected through a green visibility correction filter. 2. A monitor camera and monitor means, wherein reflected light from the circuit board under repair is incident on the monitor camera by the action of the inspection light switching mirror and is monitored by the monitor means. 2. A method for inspecting and repairing a reflective liquid crystal display device according to item 2. The transparent circuit elements on the circuit board in the reflection type liquid crystal display device having a circuit board having a transparent circuit elements in the upper layer is formed of a reflective layer were examined, there is provided an inspection repair device for repairing, capable of irradiating the processing laser beam Light source for processing, inspection light source capable of irradiating inspection light, polarizing plate for converting light from the inspection light source into linearly polarized light, processing laser beam and inspection light source from the processing light source A light source switching mirror for switching the linearly polarized light from, a half mirror type inspection light switching mirror provided on the rear side of the light source switching mirror, a Nomarski prism, an objective lens, and an analyzer,
In the inspection step, the circuit board is irradiated with linearly polarized light via the inspection light source and the polarizing plate by the inspection light switching mirror through the Nomarski prism and the objective lens,
The Bruno at Mar Ski prism is split into two light beams that coherent a and polarization directions of the linearly polarized light in the visible wavelength perpendicular and intersects the two beams, the objective as imaged side focal point at the intersection of the two beams are matched A numerical aperture NA (numerical aperture) represented by the formula NA = n sinθ (where n is the refractive index and θ is the expected angle with respect to the optical axis at the image-forming focal point) of the objective lens. The reflected light from the circuit board passes through the objective lens and the Nomarski prism and is incident on the analyzer by the action of the half mirror type inspection light switching mirror so that the interference is based on the phase difference between the two light beams. to produce an image at analyzer, it is possible to inspect the circuit board monitors the interference image,
In the repairing process, the Nomarski prism is retracted from the optical path leading to the objective lens, and the laser beam from the processing light source is applied to the circuit board via the objective lens by the action of the light source switching mirror and the inspection light switching mirror. An inspection / repair apparatus for a reflective liquid crystal display device, characterized in that the transparent circuit element can be repaired according to an inspection result of the inspection process . 5. The inspection and repair apparatus for a reflective liquid crystal display device according to claim 4, wherein a green visibility correction filter is inserted in an optical path for inspecting an interference image obtained through the analyzer . A monitor camera and monitor means, and the reflected light from the circuit board under repair is incident on the monitor camera by the action of the inspection light switching mirror, and the laser light is irradiated to the circuit board by the monitor means; 6. The inspection and repair device for a reflective liquid crystal display device according to claim 4, wherein the inspection and repair device is configured to be capable of visualizing the current state.

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