TW201945446A - Roll of biaxially oriented release polyester film - Google Patents

Roll of biaxially oriented release polyester film Download PDF

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TW201945446A
TW201945446A TW108107976A TW108107976A TW201945446A TW 201945446 A TW201945446 A TW 201945446A TW 108107976 A TW108107976 A TW 108107976A TW 108107976 A TW108107976 A TW 108107976A TW 201945446 A TW201945446 A TW 201945446A
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film
thickness
biaxially oriented
polyester film
polyester
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TWI823907B (en
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高木順之
多持洋孝
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日商東麗股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/36Layered products comprising a layer of synthetic resin comprising polyesters
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L67/00Compositions of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Compositions of derivatives of such polymers
    • C08L67/02Polyesters derived from dicarboxylic acids and dihydroxy compounds
    • C08L67/03Polyesters derived from dicarboxylic acids and dihydroxy compounds the dicarboxylic acids and dihydroxy compounds having the carboxyl- and the hydroxy groups directly linked to aromatic rings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/50Properties of the layers or laminate having particular mechanical properties
    • B32B2307/514Oriented
    • B32B2307/518Oriented bi-axially
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/30Stacked capacitors

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Shaping By String And By Release Of Stress In Plastics And The Like (AREA)
  • Laminated Bodies (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)

Abstract

A biaxially oriented release polyester film characterized by having a width of 400 mm or greater and a thickness deviation [sigma] ([sigma]MD) with respect to the average value, determined through a continuous measurement over 10,000 m in the machine direction of the film, of 0.15 [mu]m or less. The release polyester film can give a less rigid support for green sheet forming and can reduce strain amounts during electrode printing. The release polyester film is optimal for ceramic-slurry application in forming thin green sheets.

Description

脫模用雙軸配向聚酯薄膜卷    Biaxially oriented polyester film roll for demolding   

本發明係關於一種薄膜漿料塗布時之膜厚均勻性優異之脫模用雙軸配向聚酯薄膜經捲取而成之脫模用雙軸配向聚酯薄膜卷。 The present invention relates to a biaxially oriented polyester film roll for demolding, which is obtained by rolling a biaxially oriented polyester film for demolding, which is excellent in film thickness uniformity when film slurry is applied.

從機械特性或熱特性、勁度(stiffness)或成本之觀點而言,雙軸配向聚酯薄膜係作為工業材料用途而使用於各種用途。尤其近來其係作為電子構件關聯的工程紙而使用於:積層陶瓷電容器坯片(green sheet)成型用的脫模薄膜、或液晶偏光板的隔離膜、乾膜光阻用基材、層間絕緣樹脂脫模用基材等。 From the viewpoints of mechanical properties, thermal properties, stiffness, and cost, biaxially oriented polyester films are used for various applications as industrial material applications. Especially recently, it is used as engineering paper related to electronic components for release films for forming green sheet of laminated ceramic capacitors, or isolation films for liquid crystal polarizers, substrates for photoresist for dry films, and interlayer insulating resins. Release substrate and the like.

隨著最近的智慧型手機的功能進步、或智慧型手錶、穿戴式裝置(wearable equipment)的普及,積層陶瓷電容器的小型高容量化正進一步發展中。關於積層陶瓷電容器之製造所使用的脫模薄膜,隨著坯片的薄膜化,而對於平滑性高、薄膜表面及內部沒有缺陷、薄膜的平面性優異之聚酯薄膜的需求持續增長。另一方面,因電動車生產量擴大、汽車IoT(Internet Of Things)化、為了對汽車搭載自動駕駛功能,而對於搭載於汽車的積層陶瓷電容器的需求急速擴大。對於該等汽車用積層陶瓷電容器,企求較以往的要求更嚴格的可靠度。特別是在作為積層陶瓷電容器的介電質零件的坯片成型 時,要更嚴格地管理因薄膜的厚度不均、或薄膜的平面特性,所導致在將薄膜作為基材使用之際,積層於其上的漿料厚度的不均度。 With the recent advancement of the functions of smart phones, or the popularization of smart watches and wearable equipment, the miniaturization and high capacity of multilayer ceramic capacitors are being further developed. Regarding the release film used in the manufacture of multilayer ceramic capacitors, with the thinning of the green sheet, the demand for polyester films with high smoothness, no defects on the surface and inside of the film, and excellent flatness of the film continues to grow. On the other hand, the demand for multilayer ceramic capacitors mounted on automobiles has grown rapidly due to the expansion of electric vehicle production, the development of automotive IoT (Internet of Things), and the introduction of autonomous driving functions to automobiles. For these automotive multilayer ceramic capacitors, more stringent reliability is required than in the past. In particular, when forming a green sheet of a dielectric component of a multilayer ceramic capacitor, it is necessary to strictly control the uneven thickness of the thin film or the planar characteristics of the thin film. When the thin film is used as a substrate, it is laminated on the Unevenness of slurry thickness thereon.

薄膜的厚度不均,已知如專利文獻1所示,在長邊方向實施15m之測定而判定、或對1m長進行每5mm之測定而判定的手法,係為周知的手法。又,如專利文獻2所示,在檢查偏光板之正交尼寇稜鏡法中,自偏光板洩漏之光的強度不均變強,會成為檢查的障礙,所以必須將厚度不均設為規定的範圍。已知如專利文獻3所示,藉由實施同時雙軸延伸並提高面配向而達成。 It is known that the thickness of the film is uneven, as shown in Patent Document 1, by measuring 15 m in the longitudinal direction, or by measuring every 5 mm for a length of 1 m, which are known methods. In addition, as shown in Patent Document 2, in the orthogonal Nicolson method for inspecting a polarizing plate, the intensity unevenness of light leaked from the polarizing plate becomes strong and becomes an obstacle to inspection. Therefore, it is necessary to set the thickness unevenness to a predetermined value. range. As shown in Patent Document 3, it is known that this is achieved by performing simultaneous biaxial extension and improving the surface alignment.

先前技術文獻Prior art literature 專利文獻Patent literature

專利文獻1 日本特開2008-246685號公報 Patent Document 1 Japanese Patent Application Publication No. 2008-246685

專利文獻2 日本特開2017-007175號公報 Patent Document 2 Japanese Patent Laid-Open No. 2017-007175

專利文獻3 日本特開2004-291240號公報 Patent Document 3 Japanese Patent Laid-Open No. 2004-291240

近年對於電容器之要求,傾向除了小型化、大容量化之外,還有高可靠度化。小型化,即可藉由電極之縮小化而達成。大容量化,即可藉由坯片之薄膜化而達成,此外,高可靠度化,可藉由設置電極或坯片之際提升相對於寬、長度、厚度方向的尺寸精度而達成。其中,漿料塗布時之塗布厚度均勻性,因在隨後實施電極印刷的步驟中,每個電極面積會變微小,因此作為決 定電容器的介電常數偏差(即電容器的靜電電容偏差)的重大要因之一可舉出電極圖案的歪斜和偏移的最小化。因此,對於薄膜之關於厚度不均最小化的要求變嚴格。尤其,發現到:在電容器製造時,持續監視漿料厚度,一邊修正模具之傾斜度等一邊以漿料實施薄膜塗布的步驟,係受到卷整個長度上的基底薄膜(base film)厚度不均影響的可能性高。因此,在本發明中,課題是減低特別是作為坯片成型時的支撐體使用之際的卷整個長度的薄膜厚度不均。 In recent years, requirements for capacitors have tended to be highly reliable in addition to miniaturization and large capacity. Miniaturization can be achieved by reducing the size of the electrodes. Larger capacity can be achieved by thinning the green sheet. In addition, high reliability can be achieved by improving the dimensional accuracy with respect to the width, length, and thickness directions when electrodes or green sheets are provided. Among them, the uniformity of the coating thickness during slurry coating, because the area of each electrode will become smaller in the subsequent step of electrode printing, so it is a major factor that determines the dielectric constant deviation of the capacitor (that is, the capacitance deviation of the capacitor). One example is the minimization of skew and offset of the electrode pattern. As a result, the requirements for the thickness unevenness of the thin film become stricter. In particular, it has been found that the steps of continuously monitoring the thickness of the slurry during capacitor manufacturing, and applying thin film to the slurry while correcting the inclination of the mold, etc., are affected by the uneven thickness of the base film over the entire length of the roll. The probability is high. Therefore, an object of the present invention is to reduce the uneven thickness of the film over the entire length of the roll when it is used as a support, particularly when forming a green sheet.

本案發明人等鑑於上述實情仔細探討的結果發現:藉由將薄膜的特性予以最佳化,而長邊、寬、厚度方向上的漿料的尺寸安定性優異之脫模用雙軸配向聚酯薄膜經捲取而成的脫模用雙軸配向聚酯薄膜卷,進而完成本發明。亦即,本發明的特徵為一種脫模用雙軸配向聚酯薄膜卷,其薄膜寬為400mm以上,且相對於連續測定薄膜長邊方向10,000m所得之厚度的平均值之偏差σ值(σMD)為0.15μm以下。 In view of the above facts, the inventors have carefully studied the results and found that by optimizing the characteristics of the film, the biaxially oriented polyester for mold release having excellent dimensional stability of the slurry in the long, wide, and thickness directions The biaxially oriented polyester film roll for demolding formed by rolling the film into a roll, thereby completing the present invention. That is, the present invention is characterized by a biaxially oriented polyester film roll for demolding, which has a film width of 400 mm or more and a deviation σ value (σ MD ) is 0.15 μm or less.

根據本發明,可提供一種可減低坯片成型時之厚度偏差,且超薄膜坯片成型時之陶瓷漿料的塗布性最佳化之脫模用雙軸配向聚酯薄膜經捲取而成的脫模用雙軸配向聚酯薄膜卷。 According to the present invention, it is possible to provide a biaxially oriented polyester film for demolding, which can reduce the thickness deviation during green sheet molding and optimize the coating performance of ceramic slurry during super film green sheet molding. A roll of biaxially oriented polyester film for demolding.

實施發明的形態Implementation of the invention

以下針對本發明更詳細地說明。 The present invention is described in more detail below.

本發明的脫模用雙軸配向聚酯薄膜卷係脫模用雙軸配向聚酯薄膜(以下有時簡稱為雙軸配向聚酯薄膜)經捲取至芯部等芯材而成者。在此,雙軸配向,係指將未延伸(未配向)薄膜,藉由常法,朝二維方向延伸的狀態,且意指以廣角X射線繞射表示雙軸配向的圖案者。延伸,可採用逐次雙軸延伸或同時雙軸延伸之任一方法。逐次雙軸延伸,可將朝長邊方向(縱向)及寬方向(橫向)延伸的步驟,實施縱向-橫向之各1次,也可實施縱向-橫向-縱向-橫向等之各2次。 The biaxially oriented polyester film roll for release of the present invention is obtained by winding a biaxially oriented polyester film for release (hereinafter sometimes referred to as a biaxially oriented polyester film) to a core material such as a core. Here, biaxial alignment refers to a state in which an unstretched (unaligned) film is extended in a two-dimensional direction by a conventional method, and means a pattern in which biaxial alignment is expressed by wide-angle X-ray diffraction. For extension, either one of sequential biaxial extension or simultaneous biaxial extension can be used. Sequential biaxial extension can extend the steps in the longitudinal direction (longitudinal direction) and the wide direction (horizontal direction), one time each in the vertical direction, and two times each in the vertical direction, the horizontal direction, and the vertical direction.

本發明的雙軸配向聚酯薄膜中之聚酯為將二元酸與二醇作為構成成分的聚酯,作為芳香族二元酸,可使用對苯二甲酸、間苯二甲酸、鄰苯二甲酸、萘二羧酸、二苯基碸二羧酸、二苯醚二羧酸、二苯酮二羧酸、苯基茚烷二羧酸、間苯二甲酸磺酸鈉、二溴對苯二甲酸等。作為脂環族二元酸,可使用草酸、琥珀酸、己二酸、壬二酸、癸二酸、二聚酸等。就二醇而言,作為脂肪族二醇,可使用乙二醇、丙二醇、四亞甲二醇、丙二醇、四亞甲二醇、六亞甲二醇、新戊二醇、二乙二醇等,作為芳香族二醇,可使用萘二醇、2,2-雙(4-羥基二苯基)丙烷、2,2-雙(4-羥基乙氧苯基)丙烷、雙(4-羥苯基)碸、氫醌等,作為脂環族二醇,可使用環己烷二甲醇、環己烷二醇等。 The polyester in the biaxially oriented polyester film of the present invention is a polyester containing a dibasic acid and a diol as constituent components. As the aromatic dibasic acid, terephthalic acid, isophthalic acid, and phthalic acid can be used. Formic acid, naphthalenedicarboxylic acid, diphenylphosphonium dicarboxylic acid, diphenyl ether dicarboxylic acid, benzophenone dicarboxylic acid, phenylindane dicarboxylic acid, sodium isophthalate sulfonate, dibromoterephthalic acid Formic acid and so on. Examples of the alicyclic dibasic acid include oxalic acid, succinic acid, adipic acid, azelaic acid, sebacic acid, and a dimer acid. As for the diol, as the aliphatic diol, ethylene glycol, propylene glycol, tetramethylene glycol, propylene glycol, tetramethylene glycol, hexamethylene glycol, neopentyl glycol, diethylene glycol, and the like can be used. As the aromatic diol, naphthalene glycol, 2,2-bis (4-hydroxydiphenyl) propane, 2,2-bis (4-hydroxyethoxyphenyl) propane, and bis (4-hydroxybenzene) can be used. Group), hydrazone, hydroquinone, etc. As the alicyclic diol, cyclohexanedimethanol, cyclohexanediol, etc. can be used.

上述聚酯,可採用周知的方法進行製造,固有黏度,較佳為使用下限0.5上限0.8者。更佳為下限0.55上限0.70。再者,固有黏度之測定係使用由在鄰氯酚中、25℃測定的溶液黏度,以下式計算的數值。 The above polyester can be produced by a known method, and its inherent viscosity is preferably a lower limit of 0.5 and an upper limit of 0.8. The lower limit is more preferably 0.55 and the upper limit is 0.70. In addition, the measurement of intrinsic viscosity is a value calculated by the following formula using the viscosity of a solution measured in o-chlorophenol at 25 ° C.

ηsp/C=[η]+K[η]2‧C ηsp / C = [η] + K [η] 2 ‧C

在此,ηsp=(溶液黏度/溶劑黏度)-1,C為溶劑每100ml的溶解聚合物質量(g/100ml,通常為1.2),K為赫金斯常數(定為0.343)。又,溶液黏度、溶劑黏度係使用奧士華黏度計進行測定。單位以[dl/g]表示。 Here, ηsp = (solution viscosity / solvent viscosity) -1, C is the mass of the dissolved polymer per 100 ml of the solvent (g / 100 ml, usually 1.2), and K is the Herkins constant (defined as 0.343). In addition, solution viscosity and solvent viscosity were measured using an Oschva viscosity meter. The unit is expressed in [dl / g].

本發明的雙軸配向聚酯薄膜,可為單層薄膜,也可為2層以上的積層構成。2層積層時包含聚酯A層及聚酯B層,3層的情況為包含聚酯A層及聚酯B層及聚酯C層之3層、或聚酯A層及聚酯B層及聚酯A層之3層的積層薄膜。此時,藉由控制構成表層的層(積層部)所含有的粒子量,可在不對內層部造成薄膜表面特性之不良影響的範圍,將在製膜步驟所產生的邊緣部分的回收原料、或其它製膜步驟的再生原料等適時混合而使用,能夠減少石油資源之消耗,同時還能夠得到成本優點,因此具有3層以上之層構係為最佳的實施形態。 The biaxially oriented polyester film of the present invention may be a single-layer film or a laminated structure of two or more layers. Polyester A layer and polyester B layer are included in the two-layer lamination. In the case of three layers, there are three layers including polyester A layer, polyester B layer, and polyester C layer, or polyester A layer and polyester B layer. Laminated film of 3 layers of polyester A layer. At this time, by controlling the amount of particles contained in the layer (laminated portion) constituting the surface layer, the raw materials can be recovered at the edge portion generated in the film forming process in a range that does not adversely affect the surface properties of the film on the inner layer portion, It can be used in a timely manner by mixing and recycling the recycled raw materials in other film-forming steps, which can reduce the consumption of petroleum resources and also obtain the cost advantage. Therefore, it has the best structure with a layer structure of three or more layers.

又,本發明的雙軸配向聚酯薄膜,較佳為在C層含有回收原料及/或再生原料。據此,C層,較佳為層構成之中,厚度最厚的層。又,A層(更平滑的層)所含有的原料之熔融比電阻,較佳為1.0×106Ω‧cm以上1.0×108Ω‧cm以下,更佳為5.0×108Ω‧cm以下。具有如前述的熔融比電阻值之原料亦較佳為聚酯樹脂。作為 A層,較佳為構成後述之SRa(A)為1nm以上且小於15nm之表面的層。又,較佳為兼具上述之C層的原料組成或厚度相關特徴、及A層的原料相關特徴或表面形狀相關特徴之態樣。 Moreover, it is preferable that the biaxially-oriented polyester film of the present invention contains a recycled material and / or a recycled material in the C layer. Accordingly, the C layer is preferably the thickest layer among the layer configurations. The melting specific resistance of the raw material contained in layer A (a smoother layer) is preferably 1.0 × 10 6 Ω · cm or more and 1.0 × 10 8 Ω · cm or less, and more preferably 5.0 × 10 8 Ω · cm or less. . The raw material having a specific resistance value as described above is also preferably a polyester resin. The A layer is preferably a layer constituting a surface where SRa (A) described later is 1 nm or more and less than 15 nm. Moreover, it is preferable to have both the raw material composition or thickness-related characteristics of layer C and the raw material-related characteristics or surface shape-related characteristics of layer A.

本發明的雙軸配向聚酯薄膜,其2層以上之構成之中,構成表層的2層(即聚酯A層及聚酯B層)的表面,為了兼具表面的平滑性、及輸送或捲取等操控性,較佳為粗度不同的構成。亦即,較佳為一方的薄膜表面之中心線粗度SRa(A)為1nm以上且小於15nm,另一方的薄膜表面之中心線粗度SRa(B)為20nm以上40nm以下。若SRa(A)低於1nm,則在該表面積層脫模層,且在其上積層陶瓷漿料後之剝離步驟中,會變得難以進行剝離。又,若SRa(A)成為15nm以上,則漿料的表面狀態會變差且會產生厚度不均,結果變得容易在電容器的特性上產生偏差。若SRa(B)低於20nm,則在脫模層塗布後之捲取、或將陶瓷漿料塗布後之捲取,會變得容易產生黏結(blocking),且在繞出之際會產生靜電。聚酯A層及聚酯B層的表面,更佳為一方的薄膜表面之中心線粗度SRa(A)為2nm以上且小於12nm,另一方的薄膜表面之中心線粗度SRa(B)為25nm以上35nm以下。 In the biaxially oriented polyester film of the present invention, among the two or more layers, the surface of the two layers (that is, the polyester A layer and the polyester B layer) constituting the surface layer has both surface smoothness and transportation or Controllability such as winding is preferably a structure having a different thickness. That is, it is preferable that the center line thickness SRa (A) of one film surface is 1 nm or more and less than 15 nm, and the center line thickness SRa (B) of the other film surface is 20 nm or more and 40 nm or less. If SRa (A) is less than 1 nm, it will become difficult to perform peeling in the peeling step after the surface layer release layer and the ceramic slurry is laminated thereon. Moreover, if SRa (A) is 15 nm or more, the surface state of a slurry will worsen and thickness unevenness will generate | occur | produce, As a result, it will become easy to generate | occur | produce the dispersion | variation in the characteristic of a capacitor. If SRa (B) is less than 20 nm, the coiling after coating the release layer or the ceramic slurry after coiling will easily cause blocking, and static electricity will be generated when it is wound out. The surface of the polyester A layer and the polyester B layer is more preferably the center line thickness SRa (A) of one film surface is 2 nm or more and less than 12 nm, and the center line thickness SRa (B) of the other film surface is 25nm to 35nm.

本發明之雙軸配向聚酯薄膜的厚度,較佳為12μm以上,更佳為20μm以上,再佳為25μm以上。又,較佳為188μm以下,更佳為50μm以下,再佳為40μm以下。若厚度變得較12μm更薄,則用以保持陶瓷漿料的勁度會消失,在陶瓷漿料之塗布時變得無法支撐陶瓷 漿料,且有無法在後續步驟均勻地乾燥、或熱皺褶之抑制變不足的情況。若厚度超過188μm,則雖然對於熱皺褶之耐久性格外優異,但隨著卷長度變少,有作為形成陶瓷漿料的基材之每單位面積的單價變高的傾向,而且,縱向延伸中之升溫或延伸難以進行,成為使厚度不均惡化的主因。厚度之較佳的範圍為12μm以上188μm以下,更佳為20μm以上50μm以下,再佳為25μm以上40μm以下。 The thickness of the biaxially oriented polyester film of the present invention is preferably 12 μm or more, more preferably 20 μm or more, and even more preferably 25 μm or more. The thickness is preferably 188 μm or less, more preferably 50 μm or less, and even more preferably 40 μm or less. If the thickness becomes thinner than 12 μm, the stiffness used to maintain the ceramic slurry will disappear, it will become impossible to support the ceramic slurry during the coating of the ceramic slurry, and it may not be uniformly dried or hot-wrinkled in the subsequent steps. When the suppression of pleats becomes insufficient. When the thickness exceeds 188 μm, the durability against thermal wrinkles is particularly excellent, but as the roll length decreases, the unit price per unit area as a base material for forming the ceramic slurry tends to increase, and during longitudinal extension, It is difficult to increase the temperature or extend the temperature, and it is the main cause of worsening the thickness unevenness. The preferable range of the thickness is 12 μm or more and 188 μm or less, more preferably 20 μm or more and 50 μm or less, and even more preferably 25 μm or more and 40 μm or less.

本發明的雙軸配向聚酯薄膜,也可含有粒子。此時含有的粒子之體積平均粒徑較佳為1.3μm以下。若粒子的體積平均粒徑超過1.3μm,則在延伸時於粒子與聚合物之界面產生空隙(即孔隙)的機會變高,因此有時也會在表面結構產生凹凸之偏差,有漿料的厚度偏差變大的情況。此外,本發明中之超薄膜坯片,係指厚度小於1μm者。 The biaxially oriented polyester film of the present invention may contain particles. The volume average particle diameter of the particles contained at this time is preferably 1.3 μm or less. If the volume average particle diameter of the particles exceeds 1.3 μm, there is a high chance that voids (ie, pores) will be generated at the interface between the particles and the polymer during elongation. Therefore, the unevenness of the surface structure may also occur. When thickness deviation becomes large. In addition, the ultra-thin green sheet in the present invention refers to a thickness of less than 1 μm.

在本發明使用的粒子,可使用球狀二氧化矽、凝聚二氧化矽、碳酸鈣、氧化鋁、鈦酸鋇、氧化鈦等無機粒子、交聯聚苯乙烯樹脂粒子、交聯矽酮樹脂粒子、交聯丙烯酸樹脂粒子、交聯苯乙烯-丙烯酸樹脂粒子、交聯聚酯粒子、聚醯亞胺粒子、三聚氰胺樹脂粒子等有機粒子。該等粒子,除了有在薄膜表面形成突起的作用之外,也可成為形成孔隙的核材料,因此較理想為同時選定粒徑與其種類。較佳為使用粒子之彈性高的有機粒子。有機粒子,特佳為前述的有機粒子之中,選自交聯聚苯乙烯樹脂粒子、交聯矽酮樹脂粒子、交聯丙烯 酸樹脂粒子、交聯苯乙烯-丙烯酸樹脂粒子、交聯聚酯粒子之中的有機粒子。在無機粒子方面,特佳為球狀二氧化矽、氧化鋁。 As the particles used in the present invention, inorganic particles such as spherical silica, agglomerated silica, calcium carbonate, alumina, barium titanate, titanium oxide, crosslinked polystyrene resin particles, and crosslinked silicone resin particles can be used. , Organic particles such as cross-linked acrylic resin particles, cross-linked styrene-acrylic resin particles, cross-linked polyester particles, polyimide particles, and melamine resin particles. These particles have the effect of forming protrusions on the surface of the film, and can also be used as a core material for forming pores. Therefore, it is preferable to select the particle size and the type at the same time. It is preferable to use organic particles having high elasticity. Organic particles, particularly preferably among the aforementioned organic particles, selected from the group consisting of crosslinked polystyrene resin particles, crosslinked silicone resin particles, crosslinked acrylic resin particles, crosslinked styrene-acrylic resin particles, and crosslinked polyester particles Among the organic particles. In terms of inorganic particles, spherical silica and alumina are particularly preferred.

粒子的形狀、粒徑分布,較佳為均勻者,特佳為粒子形狀近似球形者。體積形狀係數(volume shape factor),較佳為f=0.3~π/6,更佳為f=0.4~π/6。體積形狀係數f係以下述式表示。 The shape and particle size distribution of the particles are preferably uniform, and particularly preferably, the shape of the particles is approximately spherical. The volume shape factor is preferably f = 0.3 ~ π / 6, and more preferably f = 0.4 ~ π / 6. The volume shape factor f is expressed by the following formula.

f=V/Dm3 f = V / Dm 3

在此,V為粒子體積(μm3),Dm為粒子的投影面中之最大徑(μm)。 Here, V is the particle volume (μm 3 ), and Dm is the maximum diameter (μm) on the projection plane of the particles.

再者,體積形狀係數f,在粒子為球時,係取最大的π/6(=0.52)。又,較佳為視需要藉由進行過濾等,而除去凝聚粒子或粗大粒子等。其中,可適當使用以乳化聚合法等合成之交聯聚苯乙烯樹脂粒子、交聯矽酮樹脂粒子、交聯丙烯酸樹脂粒子,從體積形狀係數接近真球、粒徑分布極為均勻、均勻地形成薄膜表面突起之觀點而言,特佳為交聯聚苯乙烯粒子、交聯矽酮、甚至球狀二氧化矽等。 In addition, the volume shape coefficient f takes the largest π / 6 (= 0.52) when the particle is a sphere. Moreover, it is preferable to remove agglomerated particles, coarse particles, and the like by filtering or the like as necessary. Among them, cross-linked polystyrene resin particles, cross-linked silicone resin particles, and cross-linked acrylic resin particles synthesized by an emulsion polymerization method or the like can be suitably used, and have a volume shape coefficient close to a true sphere, and the particle size distribution is extremely uniform and uniformly formed. From the viewpoint of film surface protrusions, particularly preferred are crosslinked polystyrene particles, crosslinked silicone, and even spherical silica.

本發明的雙軸配向聚酯薄膜,其薄膜寬為400mm以上,且相對於連續測定薄膜長邊方向10,000m所得之厚度的平均值之偏差σ值(σMD)為0.15μm以下。 The biaxially oriented polyester film of the present invention has a film width of 400 mm or more, and a deviation σ value (σ MD ) from an average value of a thickness obtained by continuously measuring a film length direction of 10,000 m is 0.15 μm or less.

以下依序進行說明。 The following description will be made in order.

本發明的雙軸配向聚酯薄膜,其薄膜寬為400mm以上,且相對於連續測定薄膜長邊方向10,000m所得之厚度的平均值之偏差σ值(σMD)為0.15μm以下。在此所言 之連續測定薄膜長邊方向10,000m所得之厚度為將薄膜連續地進行非接觸測定之際的厚度。薄膜寬及長邊方向的長度表示支撐體的尺寸,該支撐體係以一定的批次製造積層陶瓷電容器之際所需者。亦即,發現:坯片的成型性,可藉由抑制在該尺寸內的厚度之偏差,而變良好。又,在下述中,有時將σMD值視為長邊方向的薄膜厚度不均。 The biaxially oriented polyester film of the present invention has a film width of 400 mm or more, and a deviation σ value (σ MD ) from an average value of a thickness obtained by continuously measuring a film length direction of 10,000 m is 0.15 μm or less. The thickness obtained by continuously measuring 10,000 m in the longitudinal direction of the film is the thickness when the film is continuously subjected to non-contact measurement. The width of the film and the length in the long-side direction indicate the size of the support. This support system is required when manufacturing multilayer ceramic capacitors in a certain batch. That is, it was found that the moldability of the green sheet can be improved by suppressing the variation in thickness within this size. In the following description, the σ MD value may be regarded as a film thickness unevenness in the longitudinal direction.

以往雙軸配向聚酯薄膜的厚度,係在製膜中,使非接觸厚度計朝寬方向掃描薄膜而進行測定、或是以接觸式的厚度計測定自薄膜卷於長邊方向採取20m左右而得的試料,但在本發明中係藉由如上述在長邊方向10,000m進行連續測定,而發現以往無法確認之厚度不均現象。對於該厚度不均現象,藉由減低偏差,本發明可發揮下述效果:可減低薄膜陶瓷漿料塗布時之漿料厚度不均,減低靜電電容之偏差,而且,可抑制短路之機率。此外,若σMD超過0.15μm,則在薄膜陶瓷漿料之塗布中,漿料的厚度不均會變大,上述的效果將減少。 Conventionally, the thickness of biaxially oriented polyester film is measured by scanning the film with a non-contact thickness meter in a wide direction during film formation, or with a contact thickness meter to measure the thickness of the film from the roll to the long side by about 20 m. The obtained sample was measured continuously at 10,000 m in the long side direction as described above, and a thickness unevenness that could not be confirmed in the past was found. Regarding this uneven thickness phenomenon, by reducing the deviation, the present invention can exert the following effects: it can reduce the uneven thickness of the slurry when the thin-film ceramic slurry is applied, reduce the deviation of the electrostatic capacitance, and can reduce the probability of short circuit. In addition, if σ MD exceeds 0.15 μm, in the application of the thin-film ceramic slurry, the thickness unevenness of the slurry will increase, and the above-mentioned effects will be reduced.

本發明的雙軸配向聚酯薄膜,較佳為一方的薄膜表面之中心線粗度SRa(A)為1nm以上且小於15nm,另一方的薄膜表面之中心線粗度SRa(B)為20nm以上40nm以下。本發明的雙軸配向聚酯薄膜,考慮漿料塗布厚度與操控性之平衡,在任一表面皆可實施脫模處理,而且,在進行脫模處理之前也可進行平坦化處理,減低脫模層表面的粗度。 In the biaxially oriented polyester film of the present invention, it is preferable that the center line thickness SRa (A) of one film surface is 1 nm or more and less than 15 nm, and the center line thickness SRa (B) of the other film surface is 20 nm or more. Below 40nm. In the biaxially oriented polyester film of the present invention, in consideration of the balance between the coating thickness of the slurry and the handleability, a mold release treatment can be performed on any surface, and a flattening treatment can also be performed before the mold release treatment to reduce the mold release layer. The roughness of the surface.

以下針對本發明的雙軸配向聚酯薄膜之製造方法進行說明,但本發明不應被解釋為限於該等例。 The manufacturing method of the biaxially oriented polyester film of the present invention is described below, but the present invention should not be construed as being limited to these examples.

作為使聚酯含有非活性粒子的方法,例如,將非活性粒子依規定比例以漿料的形態分散於二醇成分之乙二醇中,且將該乙二醇漿料在聚酯聚合結束前之任意階段進行添加。此時,在添加粒子之際,例如,若不先將在合成粒子時所得之水溶膠或醇溶膠乾燥而添加,則粒子的分散性良好,可抑制粗大突起之產生,而為較佳。又,將粒子的水漿料直接與規定的聚酯丸粒混合,並供給至排氣形式的雙軸混練擠製機而使其與聚酯揉合的方法,也對本發明之製造為有效。 As a method for making the polyester contain inactive particles, for example, the inactive particles are dispersed in the form of a slurry in ethylene glycol having a diol component at a predetermined ratio, and the ethylene glycol slurry is used before the polyester polymerization is completed. Add at any stage. At this time, when adding particles, for example, if the hydrosol or alcohol sol obtained during the synthesis of the particles is not dried and added first, the dispersibility of the particles is good, and the generation of coarse protrusions is preferably suppressed. Further, a method of directly mixing the aqueous slurry of particles with a predetermined polyester pellet and supplying it to a biaxial kneading extruder in a vented form to knead it with polyester is also effective for the production of the present invention.

將如前述進行所準備的含粒子之母粒與實質上未含粒子等之丸粒,以規定的比例混合,乾燥之後,供給至周知的熔融積層用擠製機。本發明之雙軸配向聚酯薄膜的製造時之擠製機,可使用單軸、雙軸的擠製機。又,為了省略丸粒的乾燥步驟,也可使用在擠製機設置抽真空管線之排氣式擠製機。又,對於擠製量最多的C層,可使用將熔融丸粒的功能、及保持經熔融的丸粒在一定溫度的功能以各別的擠製機分擔之所謂的串列式擠製機。串列式擠製機,係使高吐出時之聚合物溫度安定化,結果可減少聚合物之黏度偏差,因此適宜作為減低厚度不均的製程。 The mother granules containing particles and pellets substantially free of particles and the like prepared as described above are mixed at a predetermined ratio, dried, and then supplied to a well-known extruder for melt-lamination. The extruder used in the production of the biaxially oriented polyester film of the present invention may be a uniaxial or biaxial extruder. In addition, in order to omit the drying step of the pellets, an exhaust-type extruder having a vacuum line in the extruder may be used. For the C layer with the largest extrusion amount, a so-called tandem extruder can be used, which shares the function of the molten pellets and the function of maintaining the molten pellets at a constant temperature with separate extrusion machines. The tandem extruder stabilizes the polymer temperature during high discharge. As a result, the viscosity deviation of the polymer can be reduced, so it is suitable as a process for reducing uneven thickness.

用擠製機進行熔融並擠製而得的聚合物,係藉由過濾器進行過濾。即使是極小的異物進到薄膜中也會成為粗大突起缺陷,因此就過濾器而言,使用例如 3μm以上的異物可捕捉95%以上之高精度的捕捉效率者較為有效。另一方面,若過濾器的捕捉效率過高,則將造成壓力上升之程度變高,因此小於3μm的異物可捕捉95%以上之更高精度之捕捉效率的過濾器之使用,有時在厚度不均之抑制方面為較不佳的實施形態。接著,從狹縫狀的縫模擠出成薄片狀,在鑄模輥(casting roll)上進行冷卻固化,製作未延伸薄膜。例如,3層積層的情況,係使用3台的擠製機、3層的歧管或匯流器(例如具有矩形匯流部的匯流器)積層為3層,從模頭擠出薄片。此時的模頭,較佳為可利用加熱器自動調整模頭的間隙。從模頭擠出的薄片係以鑄模輥進行冷卻,製作未延伸薄膜。此時,從背壓的安定化及厚度變動的抑制之觀點而言,在聚合物流路設置靜態混合器、齒輪泵的方法,係作為抑制本發明中之長邊方向的厚度不均之手段為有效。齒輪泵,有阻斷擠製步驟中之壓力變動的功能,故其係為了均勻地控制長邊方向厚度所必需,藉由將內建在齒輪泵的齒輪之轉速設為一定,可將長邊方向的厚度不均抑制為小。在本發明中,將捲好的中間製品之重量換算的厚度回饋而控制齒輪泵的轉速也較為有效。其係因為伴隨過濾器壓力之上升,吐出會減少,因此薄膜厚度相對於長邊方向而言會逐漸地變薄。 The polymer melted and extruded with an extruder was filtered through a filter. Even if very small foreign matter enters the film, it will become a coarse protrusion defect. Therefore, for a filter, it is effective to use a foreign matter of 3 μm or more to capture 95% or more high-precision capture efficiency. On the other hand, if the capture efficiency of the filter is too high, the pressure will increase. Therefore, the use of a filter with a capture efficiency of more than 95% with a higher accuracy of catching foreign objects smaller than 3 μm, sometimes in thickness The aspect of suppressing unevenness is a poor embodiment. Next, it is extruded into a sheet shape from a slit-shaped slit die, and is cooled and solidified on a casting roll to produce an unstretched film. For example, in the case of a three-layer laminate, three extruders, a three-layer manifold, or a manifold (such as a manifold with a rectangular manifold) are laminated into three layers, and the sheet is extruded from the die. In this case, it is preferable that the gap of the die can be automatically adjusted by a heater. The sheet extruded from the die was cooled by a mold roll to produce an unstretched film. At this time, from the viewpoints of stabilization of back pressure and suppression of thickness variation, a method of installing a static mixer and a gear pump in a polymer flow path is a means for suppressing thickness unevenness in the longitudinal direction in the present invention. effective. The gear pump has the function of blocking the pressure fluctuation in the extrusion step, so it is necessary to uniformly control the thickness in the long side direction. By setting the speed of the gear built in the gear pump to be constant, the long side can be set. The thickness unevenness in the direction is suppressed to be small. In the present invention, it is also effective to control the rotation speed of the gear pump by feeding back the thickness converted from the weight of the rolled intermediate product. This is because the discharge is reduced as the pressure of the filter increases, so the thickness of the film becomes gradually thinner with respect to the longitudinal direction.

關於鑄模輥的旋轉精度,鑄模輥偏心等所致之鑄模輥表面的速度變動或表面的凹凸有時會影響長邊方向的厚度不均。以往鑄模輥表面的速度變動係大幅影響長邊方向的厚度不均,因此為了減低前述而在鑄模 輥端面任意圓周上的處所貼附平衡錘來控制偏心之不均係為較佳的實施形態。又,將用以使鑄模鼓輪(casting drum)旋轉的馬達定為2台,依驅動與制動將功能劃分開等,在以抑制長邊方向的厚度不均為前提下,亦為較佳的實施形態。在本發明中,為了控制σMD值,需要更進一步提升精度,因此在評價鑄模輥的旋轉精度時,將感測器至鑄模表面為止的距離在整個鑄模圓周上測定1圈之際的凹凸狀態之最大值與最小值的差作為變位(deflection),該感測器至鑄模表面為止的距離係藉由設置在設有鑄模鼓輪的地面的感測器所測得。此數值,為50μm以內較理想,為30μm以內是更理想的形態,因可使本發明中之長邊方向的厚度不均(σMD)變良好。此時的鑄模圓周上之凹凸的變位,具體而言係在設有鑄模裝置的地面設置雷射位移計,來測量鑄模輥與雷射位移計的測定部之距離。 Regarding the rotation accuracy of the mold roll, the speed fluctuation of the surface of the mold roll or the unevenness of the surface due to the eccentricity of the mold roll may affect the thickness unevenness in the longitudinal direction. In the past, the speed variation of the surface of the mold roll greatly affected the thickness unevenness in the longitudinal direction. Therefore, in order to reduce the foregoing, attaching a balance weight to any place on the circumference of the mold roll end surface to control the unevenness of the eccentricity is a preferred embodiment. In addition, the motor for rotating the casting drum is set to two, and the functions are divided according to driving and braking, etc. It is also preferable under the premise that the thickness in the longitudinal direction is not uniform. Implementation form. In the present invention, in order to control the σ MD value, it is necessary to further improve the accuracy. Therefore, when evaluating the rotation accuracy of the mold roll, the distance from the sensor to the surface of the mold is measured over the entire circumference of the mold. The difference between the maximum value and the minimum value is defined as a deflection. The distance from the sensor to the mold surface is measured by a sensor provided on the floor where the mold drum is provided. This value is preferably within 50 μm, and more preferably within 30 μm, because the thickness unevenness (σ MD ) in the longitudinal direction in the present invention can be improved. The displacement of the unevenness on the circumference of the mold at this time is specifically a laser displacement meter installed on the floor where the mold device is installed to measure the distance between the mold roller and the measurement portion of the laser displacement meter.

落在鑄模輥的未延伸薄膜,係使用釘扎裝置,利用靜電力使其與鑄模密合。釘扎裝置,係對未延伸薄膜整個寬,將電荷由靜電施加導線賦予至鑄模輥上,藉由對於鑄模輥與薄膜之界面的靜電,使薄膜與鑄模輥密合。此時,為了將電荷的強度設成於寬方向為一定,較佳為靜電施加導線至薄膜的距離在未延伸薄膜整個寬上相等。又,為了保持鑄模輥與薄膜之密合性為適當的強度,較佳為調整靜電施加之電流的強度。 The unstretched film that falls on the mold roll uses a pinning device to make it adhere to the mold with electrostatic force. The pinning device is the entire width of the unstretched film. The charge is imparted to the mold roller by the electrostatic application wire, and the film and the mold roller are brought into close contact by the static electricity at the interface between the mold roller and the film. At this time, in order to set the strength of the electric charge constant in the width direction, it is preferable that the distance from the static electricity application lead to the film is equal over the entire width of the unstretched film. In addition, in order to maintain the adhesion between the mold roll and the film to an appropriate strength, it is preferable to adjust the strength of the current applied by static electricity.

又,雖會為了提高藉由橫向延伸機進行延伸之際的夾子之握持力,而將未延伸薄膜端部調整成端 部的厚度變得較中央更厚,但端部的密合性差,利用鑄模輥之冷卻效率變差,結果,導致端部結晶化,成為破裂的原因,因此較理想的步驟為除了附加整個寬的釘扎裝置之外,還額外附加僅於端部附加釘扎裝置之所謂的邊緣釘扎裝置,藉此使未延伸薄膜的端部與鑄模密合,並抑制邊緣部分之冷卻不均,因其可抑制在鑄模之落點上的振動,使長邊方向的厚度不均變良好。再者,在將邊緣釘扎裝置應用於未延伸薄膜之際,只要從與未延伸薄膜的邊緣部分端部距離5mm以上的處所開始實施,即可進行有效的釘扎。其原因為在由邊緣釘扎裝置施加靜電時,可預防洩漏電流對鑄模輥進行異常放電。又,邊緣釘扎的處理寬度,隨著未延伸薄膜的邊緣厚度輪廓進行調整,而其範圍設定為20mm以上且小於100mm時,可進行有效的邊緣部之成型。 Also, although the end portion of the unstretched film is adjusted so that the thickness of the end portion becomes thicker than that of the center in order to increase the gripping force of the clip when extending by the horizontal stretcher, the adhesion of the end portion is poor. The cooling efficiency of the mold roll becomes worse. As a result, the end portion crystallizes and becomes a cause of cracking. Therefore, in addition to the entire wide pinning device, an additional pinning device is only added to the end portion. The so-called edge pinning device makes the end of the unstretched film close to the mold and suppresses uneven cooling of the edge. It can suppress the vibration at the falling point of the mold and make the thickness in the long side direction. The unevenness becomes better. Furthermore, when an edge pinning device is applied to an unstretched film, effective pinning can be performed as long as it is carried out from a place at a distance of 5 mm or more from the edge portion of the unstretched film. The reason is that when static electricity is applied by the edge pinning device, the leakage current can be prevented from abnormally discharging the mold roll. In addition, the processing width of the edge pinning is adjusted according to the edge thickness profile of the unstretched film, and when the range is set to 20 mm or more and less than 100 mm, effective edge portion molding can be performed.

與鑄模輥密合而冷卻的薄膜,係使用抽離輥,自鑄模輥剝離薄膜,導入其次的延伸步驟。可對於此時的抽離輥通水以冷卻薄膜,也可驅動抽離輥。 The film which is in close contact with the mold roller and cooled is a peeling film from the mold roller using a take-off roller, and the subsequent stretching step is introduced. Water can be passed to the extraction roller at this time to cool the film, or the extraction roller can be driven.

延伸方法,可為同時雙軸延伸,也可為逐次雙軸延伸。在同時雙軸延伸中,同時實施縱向橫向的延伸之際,風速不均或沿著薄膜流動的氣流(伴隨氣流)會作為外部擾動而於寬方向的延伸時造成影響,還有對長邊方向也造成影響,因此逐次雙軸延伸係為較合宜適用的形態。 The extension method can be simultaneous biaxial extension or sequential biaxial extension. In the simultaneous biaxial extension, when the longitudinal and lateral extensions are performed at the same time, the uneven wind speed or the air flow (with the air flow) flowing along the film will affect the wide extension as an external disturbance, and also affect the long side direction. It also affects, so the successive biaxial extension system is a more suitable form.

使用逐次延伸製造本發明的聚酯薄膜之際,最初的長邊方向之延伸,在以抑制傷痕之產生為前 提、及以抑制長邊方向的厚度不均為前提下是較為重要的,延伸溫度為90℃以上130℃以下,較佳為100℃以上120℃以下。若延伸溫度變得較90℃更低,則薄膜容易斷裂,若延伸溫度變得較130℃更高,則薄膜表面變得容易受到熱損傷。又,從防止延伸不均、及損傷之觀點而言,延伸較佳為分成2階段以上進行,總倍率,係朝長度方向2.8倍以上5.0倍以下,較佳為3.3倍以上4.0倍以下,朝寬方向3.5倍以上5倍以下,較佳為4.0倍以上4.5倍以下。在將縱向延伸倍率設定為前述數值之際,較理想為設定多個延伸區間,藉此設為不易引起延伸輥與薄膜打滑的狀態,因其可抑制打滑所致的延伸張力之變動。此時,較佳為在1個延伸區間之延伸倍率設為3.0倍以下,因其可確保適當的延伸張力。若超出該溫度、倍率範圍,則會引起延伸不均或薄膜斷裂等之問題,難以得到作為本發明特徵的薄膜。 When the polyester film of the present invention is produced by successive stretching, the initial stretching in the longitudinal direction is important on the premise of suppressing the generation of scratches and the thickness of the longitudinal direction is not all the same. The stretching temperature The temperature is from 90 ° C to 130 ° C, preferably from 100 ° C to 120 ° C. When the extension temperature becomes lower than 90 ° C, the film is easily broken, and when the extension temperature becomes higher than 130 ° C, the surface of the film becomes vulnerable to thermal damage. From the viewpoint of preventing uneven stretching and damage, stretching is preferably performed in two or more stages. The total magnification is 2.8 times to 5.0 times in the length direction, and preferably 3.3 times to 4.0 times. 3.5 times to 5 times in the width direction, preferably 4.0 times to 4.5 times. When the longitudinal stretching magnification is set to the aforementioned value, it is preferable to set a plurality of stretching intervals so as to prevent slipping of the stretching roller and the film, since it can suppress the change in stretching tension caused by the slipping. At this time, it is preferable to set the stretching magnification in one stretching section to 3.0 times or less, because it can secure an appropriate stretching tension. If the temperature and the magnification range are exceeded, problems such as uneven stretching and film breakage are caused, and it is difficult to obtain a film that is a feature of the present invention.

在逐次延伸中,長邊方向的延伸過程,因薄膜與輥接觸時,輥的圓周速率與薄膜的速度差,而在薄膜打滑之際容易產生傷痕,而且也是長邊方向厚度不均之要因,故較佳為輥圓周速率可依每個輥個別地設定之驅動方式。在長邊方向之延伸過程中,輸送輥的材質,可依以下任一者而作選擇:在延伸前將未延伸薄膜加熱至玻璃轉移點以上;或者以保持在小於玻璃轉移點的溫度之狀態輸送至延伸區,在延伸時一口氣加熱。在延伸前將未延伸薄膜加熱至玻璃轉移點以上之際,加熱所致的黏著會誘發延伸不均,因此以防止前述為前提下,較 佳為選自非黏著性矽酮輥、陶瓷、鐵氟龍(註冊商標)。又,升溫過程中之輸送輥的溫度,較佳為以材質與輸送溫度的組合進行選定,在至未延伸薄膜超過玻璃轉移點為止,為了抑制加熱所致的黏著,較佳為將輸送輥設為鍍硬鉻的金屬輥且將輸送溫度設定為小於80℃。此時,較佳為在延伸步驟使用紅外線加熱器來補全熱量。 In the successive stretching, the process of stretching in the longitudinal direction, because of the difference between the peripheral speed of the roller and the speed of the film when the film is in contact with the roller, is easy to cause scratches when the film slips, and it is also the main reason for the uneven thickness in the longitudinal direction. Therefore, it is preferable that the driving method of the roller peripheral speed can be set individually for each roller. In the process of stretching in the long side direction, the material of the conveying roller can be selected according to any of the following: heating the unstretched film above the glass transfer point before stretching; or keeping the temperature lower than the glass transfer point Conveyed to the extension zone, heated in one breath during extension. When the unstretched film is heated above the glass transition point before stretching, the adhesion caused by heating will induce uneven stretching. Therefore, under the premise of preventing the foregoing, it is preferably selected from non-adhesive silicone rollers, ceramics, and iron. Fluon (registered trademark). In addition, the temperature of the conveying roller in the heating process is preferably selected by a combination of material and conveying temperature. Until the unstretched film exceeds the glass transfer point, in order to suppress the adhesion caused by heating, it is preferable to set the conveying roller. It is a hard chromium-plated metal roller and the conveying temperature is set to less than 80 ° C. In this case, it is preferable to use an infrared heater in the extending step to supplement the heat.

又,延伸輥對薄膜施加的負荷最多,且係在該製程造成傷痕和長邊方向厚度不均之原因的延伸不均較容易產生的步驟,因此延伸輥的表面粗度Ra較佳為0.005μm以上1.0μm以下,更佳為0.1μm以上0.6μm以下。若Ra較1.0μm更大,則延伸時輥表面的凸凹變得容易轉印於薄膜表面,另一方面,若較0.005μm更小,則輥與薄膜表面黏著,且薄膜容易受到熱損傷。為了控制表面粗度,適當調整研磨劑的粒度、研磨次數等係較為有效的。 In addition, the stretching roller exerts the most load on the film, and it is a step that is easy to occur due to the unevenness of the stretching caused by the flaws in the process and the thickness in the longitudinal direction. Therefore, the surface roughness Ra of the stretching roller is preferably 0.005 μm. It is 1.0 μm or less, more preferably 0.1 μm or more and 0.6 μm or less. If Ra is larger than 1.0 μm, the protrusions and depressions on the surface of the roller are easily transferred to the film surface during stretching. On the other hand, if it is smaller than 0.005 μm, the roller is adhered to the film surface, and the film is easily damaged by heat. In order to control the surface roughness, it is effective to appropriately adjust the particle size and the number of times of polishing.

在逐次延伸中,在以減低長邊方向的厚度不均為前提下,將縱向延伸倍率設定為低於橫向延伸倍率係為較佳的延伸條件。 In successive stretching, it is a better stretching condition to set the longitudinal stretching magnification to be lower than the lateral stretching magnification on the premise that the thickness in the long side direction is not uniform.

接著,是將未延伸薄膜以保持在小於玻璃轉移點的溫度之狀態輸送至延伸區,而在延伸時一口氣加熱之際,預熱區的輸送輥,較佳為使用以硬鉻或碳化鎢進行表面處理之表面粗度Ra為0.2μm以上0.6μm以下的金屬輥,以抑制造成熱皺褶或長邊方向的厚度不均之原因的黏著。 Next, the unstretched film is transported to the stretching zone while maintaining a temperature lower than the glass transition point, and the heating rollers in the preheating zone are preferably heated with hard chromium or tungsten carbide when stretched in one breath. A metal roller having a surface roughness Ra of 0.2 μm or more and 0.6 μm or less for surface treatment is used to suppress adhesion due to thermal wrinkles or uneven thickness in the longitudinal direction.

接著,將該朝長邊方向延伸的單軸延伸薄膜,以橫向延伸機加熱至90℃以上且小於120℃後,朝寬方向延伸3倍以上且小於6倍,作為雙軸延伸(雙軸配向)薄膜。該橫向延伸機,係在烘箱的每個房間實施自我循環,將溫風噴吹至薄膜,藉以使薄膜升溫,實施延伸和熱固定。此時,為了防止由在烘箱內進行熱處理的薄膜析出的寡聚物附著於冷卻的烘箱,可在烘箱內實施供氣、排氣而置換空氣。此時,在供氣至烘箱內的空氣與循環氣流匯流之際,若空氣的溫度接近室外空氣,則匯流後的空氣會產生溫度不均,使長邊方向、及寬方向的厚度不均惡化,因此較佳為供氣氣流與循環氣流相同,或是用與加熱循環氣流的熱交換器之能力匹配的溫度進行加熱。 Next, the uniaxially stretched film extended in the long direction is heated to 90 ° C or higher and lower than 120 ° C by a transverse stretcher, and then stretched 3 or more times and 6 times or less in the wide direction as a biaxially stretched (biaxially oriented) )film. The horizontal stretching machine is self-circulating in each room of the oven, and blows warm air to the film, so that the film is heated, and the film is stretched and thermally fixed. At this time, in order to prevent oligomers precipitated from the thin film heat-treated in the oven from adhering to the cooled oven, air supply and exhaust may be performed in the oven to replace the air. At this time, when the air supplied to the oven and the circulating air flow converge, if the temperature of the air is close to the outdoor air, the temperature of the converged air will be uneven, and the thickness unevenness in the longitudinal direction and the width direction will be worsened. Therefore, it is preferable that the air supply flow is the same as the circulating air flow, or is heated at a temperature that matches the capacity of the heat exchanger that heats the circulating air flow.

又,在以調節烘箱內的供氣、排氣量為前提下,在被輸送的薄膜上下流動之空氣的方向,較佳為相對於薄膜的移動方向為同一方向。在烘箱之各室中,自我循環的空氣、還有由上游往與薄膜輸送方向同一方向流動的伴隨氣流、對烘箱外進行的供氣或排氣,會導致STN內部的空氣之流動複雜地變化。此時,室間的空氣之流動,例如,由上游至下游之流動,會因為室間的壓力差,而變成由下游至上游之流動。在空氣的溫度依室間而不同時,室間的空氣之流動也與薄膜的伸縮不均相關聯。因此,關於烘箱之吸氣量、排氣量的條件,可藉由使排氣量多於供氣量,而誘導空氣朝同一方向流動。 In addition, on the premise of adjusting the air supply and exhaust volume in the oven, the direction of the air flowing up and down the conveyed film is preferably the same direction with respect to the moving direction of the film. In the chambers of the oven, the self-circulating air, the accompanying airflow flowing from the upstream to the same direction as the film conveying direction, and the supply or exhaust of air outside the oven will cause complicated changes in the air flow inside the STN. . At this time, the flow of air between the rooms, for example, the flow from upstream to downstream, will become the flow from downstream to upstream due to the pressure difference between the rooms. When the temperature of the air varies from room to room, the flow of air between the rooms is also related to the uneven stretching of the film. Therefore, as for the conditions of the intake air volume and exhaust air volume of the oven, the air volume can be induced to flow in the same direction by increasing the exhaust air volume over the air supply volume.

本發明的雙軸配向聚酯薄膜,可進一步對於各方向進行1次以上再度延伸,也可以同時雙軸進行再度延伸。作為抑制長邊方向厚度不均的方法,可舉出利用長邊方向的再度延伸步驟,減緩在之前的橫向延伸步驟所產生的曲折(bowing)。此時,可利用長邊方向再度縱向延伸前的輸送輥,在80℃~100℃的溫度進行加熱,也可使用未加熱的輥進行輸送。再者,亦可不施加延伸倍率地通過再度縱向延伸步驟。再度縱向延伸後,進一步實施橫向延伸,且在延伸之後進行薄膜的熱處理,而該熱處理,可在烘箱中、加熱的輥上等以往周知的任意方法和位置進行。熱處理溫度,通常可設為150℃以上且小於245℃之任意的溫度,熱處理時間,通常較佳為在1秒鐘以上60秒鐘以下進行。可在使薄膜朝其長邊方向及/或寬方向進行鬆弛的同時進行熱處理。又,熱處理後,可在0℃以上150℃以下之低於熱處理溫度的溫度,使其朝寬方向鬆弛0%以上10%以下。 The biaxially-oriented polyester film of the present invention may be further re-stretched more than once in each direction, or may be simultaneously bi-axially re-stretched. As a method of suppressing the thickness unevenness in the long-side direction, a re-extension step in the long-side direction can be used to reduce the bowing caused by the previous horizontal extension step. At this time, the conveying rollers before the longitudinal extension in the longitudinal direction can be heated again at a temperature of 80 ° C to 100 ° C, or can be conveyed using unheated rollers. In addition, the longitudinal stretching step may be repeated without applying an stretching magnification. After the longitudinal stretching is performed again, the transverse stretching is further performed, and the film is subjected to a heat treatment after the stretching. The heat treatment may be performed in any conventionally known method and position such as in an oven or on a heated roll. The heat treatment temperature can be generally set to any temperature from 150 ° C. to 245 ° C., and the heat treatment time is usually preferably from 1 second to 60 seconds. The film may be subjected to heat treatment while relaxing the film in its longitudinal direction and / or width direction. In addition, after the heat treatment, the temperature can be relaxed from 0% to 10% in a wide direction at a temperature lower than the heat treatment temperature of 0 ° C to 150 ° C.

熱處理後的薄膜,可設置例如中間冷卻區和除冷區,而調整尺寸變化率或平面性。又,尤其是為了賦予特定的熱收縮性,也可在熱處理時或之後的中間冷卻區和除冷區中,朝縱方向及/或橫方向進行鬆弛。此時,在以使寬方向的厚度不均變良好為前提下,烘箱內部之寬方向的溫度差較佳為控制在5℃以內。 The heat-treated film may be provided with, for example, an intermediate cooling zone and a cooling zone, and the dimensional change rate or planarity may be adjusted. Moreover, especially in order to provide specific heat shrinkability, relaxation may be performed in the longitudinal direction and / or the lateral direction in the intermediate cooling zone and the decooling zone during or after the heat treatment. At this time, on the premise that the thickness unevenness in the width direction is made good, the temperature difference in the width direction inside the oven is preferably controlled within 5 ° C.

雙軸延伸後的薄膜,在輸送步驟進行冷卻後,切割邊緣後進行捲取,得到中間製品。在該輸送步驟,可測定寬方向的薄膜厚度,將該數據回饋而使用, 來調整模具厚度等,藉此進行薄膜厚度之調整,而且,可利用缺點檢測器進行異物偵測。厚度之測定,可利用β射線、X射線、光干涉式進行。測定可為:使1個測定裝置在寬方向橫向行進,而測定整個寬的厚度之方法;或使多個測定裝置在寬方向分割的區間內橫向行進,而測定整個寬的厚度之方法;在測定範圍較廣之際,係在寬方向固定多個測定裝置,而測定整個寬的厚度。又,關於測定的時點,可在上述輸送步驟內測定、或使用將中間製品分切後之雙軸配向聚酯薄膜卷而在離線實施。 After the biaxially stretched film is cooled in the conveying step, the edge is cut and then wound up to obtain an intermediate product. In this conveying step, the thickness of the film in the wide direction can be measured, and this data can be used for feedback to adjust the thickness of the mold, etc., thereby adjusting the thickness of the film, and the defect detector can be used for foreign object detection. The thickness can be measured by β-ray, X-ray, or light interference. The measurement may be: a method in which one measuring device travels laterally in a wide direction and the entire thickness is measured; or a method in which a plurality of measuring devices travel laterally in an interval divided in the wide direction to measure the entire wide thickness; When the measurement range is wide, a plurality of measurement devices are fixed in a wide direction, and the entire thickness is measured. The timing of the measurement may be measured in the above-mentioned conveying step or performed offline using a biaxially oriented polyester film roll obtained by slitting an intermediate product.

中間製品係藉由分切步驟,分切為適當的寬、長度,並捲取至芯部,而得到雙軸配向聚酯薄膜的卷。芯部為塑膠或紙構成之圓筒形的捲芯部。由於對於厚度不均而言亦較佳使用溫濕度所致的伸縮少且捲取壓力所致的變形少之芯部,故較佳為使用塑膠製者。更佳為使用將塑膠以玻璃纖維或碳纖維強化的芯部。又,使用紙作為芯部之際,也可藉由在表面含浸樹脂而提高強度。分切步驟中之薄膜的切割步驟,係為用以去除中間製品之不需要的部分,而得到具有所需的製品寬之聚酯薄膜卷的步驟。在該切割步驟,對於中間製品的寬方向,同時切割3處至10處。使用於該切割的方式,可自以下的方式選定:以下刀片與上刀片的剪切而進行切割之方式、或在行經路線間之空中進行切割之切割方式。 The intermediate product is cut into a suitable width and length through a slitting step, and wound up to the core to obtain a biaxially oriented polyester film roll. The core is a cylindrical roll core made of plastic or paper. For uneven thickness, it is also preferable to use a core with less expansion and contraction due to temperature and humidity and less deformation due to coiling pressure, so it is preferable to use a plastic one. It is more preferable to use a glass fiber or carbon fiber reinforced plastic core. When paper is used as the core, the surface can be impregnated with a resin to increase the strength. The cutting step of the film in the slitting step is a step for removing unnecessary portions of the intermediate product to obtain a polyester film roll having a desired product width. In this cutting step, for the wide direction of the intermediate product, 3 to 10 positions are cut simultaneously. The method used for this cutting can be selected from the following methods: cutting method by cutting the following blades and upper blades, or cutting method by cutting in the air between passing routes.

薄膜寬,係利用該分切步驟分切後之薄膜的寬,藉由將前述切割步驟中之切割位置於寬方向進行 調節,可得到具有所需的製品寬之聚酯薄膜卷。又,本發明中之薄膜長邊方向的長度,係以設置於分切步驟之任意的卷上的測長器而進行測量。如前述,將中間製品在寬方向切割,並以任意的長度捲取至芯部而成者,於本發明中稱為聚酯薄膜卷。 The film width refers to the width of the film cut by the slitting step. By adjusting the cutting position in the foregoing cutting step in the wide direction, a polyester film roll having a desired product width can be obtained. The length in the longitudinal direction of the film in the present invention is measured by a length measuring device provided on an optional roll in the slitting step. As described above, the intermediate product is cut in a wide direction and wound up to a core at an arbitrary length, and is referred to as a polyester film roll in the present invention.

藉由上述方法得到的脫模用雙軸配向聚酯薄膜卷係將長邊方向厚度不均少的薄膜捲取而成,因此該薄膜,可適當地使用作為脫模用途,特別是作為積層陶瓷電容器的成型用構件,甚至作為汽車用積層陶瓷電容器的成型用構件。再者,本發明中之脫模用途,係指將自本發明的雙軸配向聚酯薄膜卷所得到的薄膜作為成型用構件而使用於基材,並將構件成型,自成型後的構件剝離之用途。在此所言之構件,可舉出積層陶瓷電容器中之坯片、多層電路基板中之層間絕緣樹脂(電氣絕緣樹脂)、光學關聯構件中之聚碳酸酯(此時係在溶液製膜中使用)等。 The biaxially oriented polyester film roll obtained by the above method is obtained by rolling up a film having a small thickness variation in the longitudinal direction. Therefore, the film can be suitably used as a mold release application, especially as a laminated ceramic. Capacitor molding members are even used as automotive multilayer ceramic capacitor molding members. In addition, the mold release application in the present invention refers to using a film obtained from the biaxially oriented polyester film roll of the present invention as a molding member and using it as a base material, molding the member, and peeling the member after molding. Of its purpose. The components mentioned here include green sheets in multilayer ceramic capacitors, interlayer insulating resins (electrical insulating resins) in multilayer circuit boards, and polycarbonates in optical-related components (in this case, used in solution filming) )Wait.

[實施例]     [Example]    

以下採用實施例詳細地說明本發明。 Hereinafter, the present invention will be described in detail using examples.

關於本發明的測定方法、評價方法係如下所述。 The measurement method and evaluation method of the present invention are as follows.

(1)長邊方向之薄膜厚度不均(σMD) (1) Uneven film thickness in the longitudinal direction (σ MD )

使用設置於回捲檢查機的基恩斯公司製SI-T80,針對製品卷寬方向中央部,測定10,000m長邊方向的厚度。回捲速度為50m/分鐘、採樣周期為20毫秒,根據 此厚度數據,求出相對於平均值之偏差σ,並將其作為長邊方向的薄膜厚度不均。 Using a SI-T80 manufactured by Keynes Corporation installed in a rewind inspection machine, the thickness in the longitudinal direction of 10,000 m was measured at the center in the width direction of the product. The rewinding speed was 50 m / minute and the sampling period was 20 milliseconds. Based on the thickness data, the deviation σ from the average value was determined, and this was taken as the film thickness unevenness in the longitudinal direction.

(2)薄膜表面粗度表面的中心線粗度(SRa值) (2) Roughness of film surface centerline roughness (SRa value)

使用三維細微表面形狀測定器(小坂製作所製ET-350K)進行測定,由得到之表面的輪廓曲線,依據JIS‧B0601(1994),求出算術平均粗度(中心線粗度)SRa值。測定條件係如下所述。 The measurement was performed using a three-dimensional fine surface shape measuring device (ET-350K manufactured by Kosaka Manufacturing Co., Ltd.), and an arithmetic average roughness (centerline thickness) SRa value was obtained from the obtained surface profile curve in accordance with JIS · B0601 (1994). The measurement conditions are as follows.

X方向測定長度:0.5mm Measuring length in X direction: 0.5mm

X方向進給速度:0.1mm/秒鐘 X direction feed rate: 0.1mm / s

Y方向進給節距(pitch):5μm Y-direction feed pitch: 5μm

Y方向線數:40條 Number of Y-direction lines: 40

截斷(cutoff):0.25mm Cutoff: 0.25mm

觸針壓:0.02mN Stylus pressure: 0.02mN

高度(Z方向)擴大倍率:5萬倍 Height (Z direction) magnification: 50,000 times

再者,X方向係於樣本的寬方向進行測定,Y方向係於樣本的長邊方向進行測定。 The X direction is measured in the width direction of the sample, and the Y direction is measured in the length direction of the sample.

(3)聚酯樹脂之熔融比電阻 (3) Melt specific resistance of polyester resin

將聚酯樹脂150g投入至經純水置換的50φ試驗管,在180℃減壓乾燥3小時。之後,在290℃、50鐘氮氣流通下進行熔融,將電極插入至熔融聚合物中。從對電極間施加5,000V的電壓時之電流量,算出電阻值,藉此求出熔融比電阻。此外,在2片銅板(22cm2)之間夾持鐵氟龍(註冊商標)的間隔物,使銅板間成為9mm而作成電極。 150 g of the polyester resin was put into a 50φ test tube replaced with pure water, and dried under reduced pressure at 180 ° C for 3 hours. Thereafter, melting was performed at 290 ° C. under a nitrogen gas flow of 50 minutes, and an electrode was inserted into the molten polymer. From the amount of current when a voltage of 5,000 V was applied across the electrodes, the resistance value was calculated, thereby obtaining the specific melting resistance. In addition, a Teflon (registered trademark) spacer was sandwiched between two copper plates ( 22 cm 2 ) so that the copper plates became 9 mm between each other and electrodes were formed.

(實施例1) (Example 1)

(1)聚酯丸粒之作成 (1) Preparation of polyester pellets

(聚酯A之作成) (Production of polyester A)

在255℃將對苯二甲酸86.5質量份與乙二醇37.1質量份,一邊餾出水,一邊進行酯化反應。酯化反應結束後,添加三甲基磷酸0.02質量份、乙酸鎂0.06質量份、乙酸鋰0.01質量份、三氧化二銻0.0085質量份,接著,在減壓下,加熱而升溫至290℃,並進行聚縮合反應,得到固有黏度0.63dl/g的聚酯丸粒A。測定該料片之熔融比電阻的結果為7.0×107Ω‧cm。 86.5 parts by mass of terephthalic acid and 37.1 parts by mass of ethylene glycol were subjected to an esterification reaction while distilling off water at 255 ° C. After the completion of the esterification reaction, 0.02 parts by mass of trimethylphosphoric acid, 0.06 parts by mass of magnesium acetate, 0.01 parts by mass of lithium acetate, and 0.0085 parts by mass of antimony trioxide were added, and then heated to 290 ° C under reduced pressure, and The polycondensation reaction was performed to obtain a polyester pellet A having an intrinsic viscosity of 0.63 dl / g. As a result of measuring the melting specific resistance of the tablet, it was 7.0 × 10 7 Ω · cm.

(聚酯B之作成) (Production of polyester B)

與上述同樣地製造聚酯時,在進行酯交換後,添加體積平均粒徑0.2μm、體積形狀係數f=0.51、莫氏硬度7的球狀二氧化矽,進行聚縮合反應,得到相對於聚酯含有1質量%的粒子之含二氧化矽的母粒(聚酯B)。 When the polyester is produced in the same manner as described above, after transesterification, spherical silica having a volume average particle diameter of 0.2 μm, a volume shape coefficient f = 0.51, and a Mohs hardness of 7 is added to perform a polycondensation reaction to obtain a polycondensation reaction. The ester contains 1% by mass of silica-containing master batches (polyester B).

再者,聚酯B所使用的球狀二氧化矽係為單分散二氧化矽粒,其係一邊攪拌乙醇與矽酸乙酯之混合溶液,一邊對該混合溶液添加包含乙醇、純水、及作為鹼性觸媒之氨水的混合溶液,將得到的反應液攪拌並進行矽酸乙酯之水解反應及該水解生成物之聚縮合反應後,進行反應後之攪拌而得到的。 In addition, the spherical silica used in the polyester B is a monodispersed silica particle, which is added to the mixed solution including ethanol, pure water, and while stirring a mixed solution of ethanol and ethyl silicate, and As a mixed solution of an alkaline catalyst in ammonia water, the obtained reaction solution was stirred and subjected to a hydrolysis reaction of ethyl silicate and a polycondensation reaction of the hydrolysis product, followed by stirring after the reaction.

(聚酯C、D之作成) (Made of polyester C, D)

再者,另外,利用晶種法使包含二乙烯苯80質量%、乙基乙烯苯15質量%、苯乙烯5質量%的單體進行吸附,使藉此方法所得到之體積平均粒徑0.3μm、體積形狀係數f=0.51、莫氏硬度3之二乙烯苯/苯乙烯共聚合交聯粒子(交聯度80%)的水漿料,利用排氣式雙軸混練機而包含於上述之實質上未含有粒子之均聚酯丸粒,分別得到體積平均粒徑各為0.3μm、0.8μm之相對於聚酯含有1質量%的二乙烯苯/苯乙烯共聚合交聯粒子的母粒(聚酯C、聚酯D)。 In addition, a monomer containing 80% by mass of divinylbenzene, 15% by mass of ethyl vinylbenzene, and 5% by mass of styrene was adsorbed by a seed method, so that the volume average particle diameter obtained by this method was 0.3 μm The volume shape factor f = 0.51, the aqueous slurry of divinylbenzene / styrene copolymerized crosslinked particles (crosslinking degree 80%) with Mohs hardness 3 is included in the above essence by using a vented biaxial kneader Homogeneous polyester pellets containing no particles on the surface, master batches (polyvinylbenzene / styrene copolymer crosslinked particles containing 1% by mass of polyester with a volume average particle diameter of 0.3 μm and 0.8 μm, respectively) Ester C, polyester D).

(聚酯E之作成) (Made of polyester E)

製造聚酯A時,在進行酯交換後,將以碳酸氣體法作成之(體積平均粒徑體積平均粒徑1.1μm、莫氏硬度3)碳酸鈣10質量份與乙二醇90質量份進行濕式粉碎,得到碳酸鈣/乙二醇分散漿料。該碳酸鈣的體積平均粒徑為1.1μm。另一方面,對於對苯二甲酸二甲酯100質量份、及乙二醇64質量份,加入作為觸媒之乙酸錳0.04質量份、及三氧化二銻0.03質量份,進行酯交換反應,之後,對於反應生成物,加入作為磷化合物之磷酸三甲酯0.04質量份,之後,進一步加入之前製備的漿料1質量份,進行聚縮合反應,得到相對於聚酯含有1質量%的碳酸鈣的母粒(聚酯E)。 In the production of polyester A, after transesterification, 10 parts by mass of calcium carbonate and 90 parts by mass of ethylene glycol were prepared by the carbonic acid gas method (volume average particle diameter, volume average particle diameter 1.1 μm, Mohs hardness 3). It was pulverized by a method to obtain a calcium carbonate / ethylene glycol dispersion slurry. The volume average particle diameter of this calcium carbonate was 1.1 μm. On the other hand, to 100 parts by mass of dimethyl terephthalate and 64 parts by mass of ethylene glycol, 0.04 parts by mass of manganese acetate and 0.03 parts by mass of antimony trioxide were added as catalysts, and then a transesterification reaction was performed. For the reaction product, 0.04 parts by mass of trimethyl phosphate as a phosphorus compound was added, and then 1 part by mass of the previously prepared slurry was further added to perform a polycondensation reaction to obtain a polyester containing 1% by mass of calcium carbonate relative to the polyester. Masterbatch (polyester E).

另一方面,將下述處方之薄膜製得後的薄膜加以回收並丸粒化者,作為回收原料A。此外,以下 所記載的比率,表示相對於薄膜全體質量之質量比(質量%)。 On the other hand, a film obtained by preparing the film of the following prescription was recovered and pelletized as the recovery raw material A. In addition, the ratios described below represent mass ratios (% by mass) to the mass of the entire film.

聚酯A:93.4 Polyester A: 93.4

聚酯D:0.6 Polyester D: 0.6

聚酯G:6.0 Polyester G: 6.0

(2)聚酯丸粒之調合 (2) Blending of polyester pellets

供給於A層、B層、C層之各層擠製機的聚酯丸粒,係採用以下的比率進行調合。此外,以下所記載的比率,係為相對於構成各層之聚酯丸粒的質量比(單位:質量%)。 The polyester pellets supplied to the extruder of each of the A, B, and C layers were blended at the following ratios. In addition, the ratio described below is a mass ratio (unit: mass%) with respect to the polyester pellet which comprises each layer.

A層 A layer

聚酯A:87.5 Polyester A: 87.5

聚酯B:12.5 Polyester B: 12.5

B層 B layer

聚酯A:60.0 Polyester A: 60.0

回收原料A:40.0 Recovered raw material A: 40.0

C層 C layer

聚酯A:65.0 Polyester A: 65.0

聚酯C:30.0 Polyester C: 30.0

聚酯D:5.0 Polyester D: 5.0

(3)雙軸配向聚酯薄膜之製造 (3) Manufacturing of biaxially oriented polyester film

將前述之針對各層進行調合的原料在摻合機內進行攪拌後,關於A層及C層的原料,係將攪拌後的原料供 給至A層及C層用之附有排氣口的雙軸擠製機,而關於B層的原料,係在160℃減壓乾燥8小時,並供給至B層用的單軸擠製機。此外,B層係以串列式擠製機於275℃進行熔融擠製,並利用3μm以上的異物可捕捉95%以上之高精度的過濾器進行過濾後,以矩形之不同種3層用匯流器進行匯流積層,作成包含層A、層B、層C的3層積層。之後,使用經由保持在285℃之縫模對於未延伸薄膜之整個寬進行靜電施加之靜電施加鑄模法,並捲繞於表面溫度30℃之鑄模鼓輪而冷卻固化,而得到未延伸積層薄膜。此時,鑄模係進行對準調整,變位為25μm。 After mixing the aforementioned raw materials prepared for each layer in the blender, the raw materials of the A and C layers are supplied to the A and C layers of the twin shaft with exhaust ports. The extruder was dried under reduced pressure at 160 ° C. for 8 hours, and was supplied to a uniaxial extruder for the B layer. In addition, layer B is melt-extruded by a tandem extruder at 275 ° C, and is filtered by a filter that can capture more than 95% of high-precision filters using foreign matter of 3 μm or more. The device performs confluence layering to form three layered layers including layer A, layer B, and layer C. Thereafter, an electrostatically-applied casting method in which static electricity was applied to the entire width of the unstretched film through a slit die maintained at 285 ° C was wound and solidified by being wound around a casting drum having a surface temperature of 30 ° C to obtain an unstretched laminated film. At this time, the mold system was adjusted for alignment, and the displacement was 25 μm.

對該未延伸積層薄膜實施逐次延伸(長邊方向、寬方向)。首先,實施長邊方向之延伸,在105℃進行輸送後,於120℃朝長邊方向延伸3.8倍而成為單軸延伸薄膜。 This unstretched laminated film was sequentially stretched (long-side direction, wide direction). First, the film was stretched in the longitudinal direction. After being conveyed at 105 ° C, it was stretched 3.8 times in the longitudinal direction at 120 ° C to become a uniaxially stretched film.

將該單軸延伸薄膜,在拉幅機內朝橫方向以115℃延伸4.0倍,接著,在230℃進行熱固定,此時,朝寬方向鬆弛5%,以輸送步驟進行冷卻後,在切割邊緣後進行捲取,得到厚度31μm之雙軸延伸薄膜的中間製品。拉幅機的烘箱,係對來自烘箱外之供氣、排氣進行調整,使空氣朝一定方向流動。將該中間製品以分切機進行分切,得到厚度31μm之雙軸延伸薄膜的卷。測定該雙軸延伸薄膜之積層厚度的結果為A層:6.5μm、B層:23.5μm、C層:1.0μm。由得到的製品採取數據,將其特性評價結果示於表1。 This uniaxially stretched film was stretched 4.0 times at 115 ° C in a transverse direction in a tenter, and then heat-fixed at 230 ° C. At this time, it was relaxed by 5% in a wide direction, cooled in a conveying step, and then cut After the edge was wound, an intermediate product of a biaxially stretched film having a thickness of 31 μm was obtained. The oven of the tenter is to adjust the air supply and exhaust from outside the oven to make the air flow in a certain direction. This intermediate product was slit with a slitter to obtain a roll of a biaxially stretched film having a thickness of 31 μm. As a result of measuring the laminated thickness of this biaxially stretched film, it was A layer: 6.5 μm, B layer: 23.5 μm, and C layer: 1.0 μm. Data were collected from the obtained products, and the results of the characteristic evaluation are shown in Table 1.

(4)脫模層之塗布 (4) Coating of release layer

其次,對於該雙軸延伸薄膜的卷,塗布交聯底漆層(Dow Corning Toray(股)製商品名BY24-846)經調整為固體成分1質量%的塗布液並且乾燥,使乾燥後的塗布厚度成為0.1μm的方式利用凹版塗布機進行塗布,且在100℃進行20秒鐘乾燥硬化。之後,在1小時以內,將加成反應型矽酮樹脂(Dow Corning Toray(股)製商品名LTC750A)100質量份、及鉑觸媒(Dow Corning Toray(股)製商品名SRX212)2質量份經調整為固體成分5質量%的塗布液,使乾燥後的塗布厚度成為0.1μm的方式利用凹版塗布進行塗布,且在120℃進行30秒鐘乾燥硬化後進行捲取,得到脫模薄膜。 Next, a crosslinked primer layer (Dow Corning Toray (trade name: BY24-846)) was applied to the roll of the biaxially stretched film to adjust the coating liquid with a solid content of 1% by mass and dried to apply the dried coating. Coating was performed with a gravure coater so that the thickness became 0.1 μm, and drying and curing were performed at 100 ° C. for 20 seconds. Thereafter, within 1 hour, 100 parts by mass of the addition reaction type silicone resin (trade name LTC750A manufactured by Dow Corning Toray Co., Ltd.) and 2 parts by mass of platinum catalyst (trade name SRX212 manufactured by Dow Corning Toray Co., Ltd.) The coating liquid was adjusted to a solid content of 5% by mass, and the coating was applied by gravure coating so that the coating thickness after drying became 0.1 μm. After drying and curing at 120 ° C. for 30 seconds, the coating was taken up to obtain a release film.

(5)坯片之成型塗布 (5) Form coating of green sheet

對於鈦酸鋇(Fuji Titanium Industry(股)製商品名HPBT-1)100質量份、聚乙烯醇縮丁醛(積水化學(股)製商品名BL-1)10質量份、鄰苯二甲酸二丁酯5質量份及甲苯-乙醇(質量比30:30)60質量份,加入數量平均粒徑2mm的玻璃珠,以噴射磨機混合、分散20小時後,進行過濾,而製備糊狀的陶瓷漿料。將得到的陶瓷漿料,使乾燥後的厚度成為0.5μm的方式在脫模薄膜上利用模塗布機進行塗布並且乾燥,並於塗布的中央部以非接觸方式連續測定乾燥後的漿料厚度。之後進行捲取,得到坯片。此時,評價漿料厚度不均σ值,將小於0.13定為良 好,將0.13以上且小於0.15定為尚可,將超過0.15者定為不良。實施例1的實施形態中之漿料厚度不均為坯片的成型性為良好。此時,良好為實用上沒有問題的等級。 100 parts by mass of barium titanate (brand name HPBT-1 manufactured by Fuji Titanium Industry), 10 parts by mass of polyvinyl butyral (brand name BL-1 manufactured by Sekisui Chemical Co., Ltd.) 5 parts by mass of butyl ester and 60 parts by mass of toluene-ethanol (mass ratio 30:30), glass beads with a number average particle diameter of 2 mm were added, mixed and dispersed in a jet mill for 20 hours, and then filtered to prepare a paste-like ceramic Slurry. The obtained ceramic slurry was applied and dried on a release film with a die coater so that the thickness after drying was 0.5 μm, and the thickness of the dried slurry was continuously measured in a non-contact manner at the center of the coating. Then, it is wound up to obtain a green sheet. At this time, the value σ of the thickness unevenness of the slurry was evaluated as good, less than 0.13, good, 0.13 or more and less than 0.15 as acceptable, and more than 0.15 as bad. The thickness of the slurry in the embodiment of Example 1 was not all good, and the moldability of the green sheet was good. In this case, good is a grade that is practically free of problems.

(實施例2~4) (Examples 2 to 4)

改變延伸倍率或厚度的製膜條件,除此以外係與實施例1同樣地實施,且將得到的結果示於表1。 Except that the film forming conditions for changing the stretching magnification and thickness were implemented in the same manner as in Example 1, the results obtained are shown in Table 1.

(實施例5) (Example 5)

因應聚合物過濾器壓力之上升,降低齒輪泵的轉速控制,修正厚度的中心值。改變延伸倍率和厚度的製膜條件,除此以外係與實施例1同樣地實施,且將得到的結果示於表1。 In response to the increase in the pressure of the polymer filter, the speed control of the gear pump is reduced, and the central value of the thickness is corrected. Except that the film forming conditions for changing the stretching ratio and thickness were changed in the same manner as in Example 1, the results obtained are shown in Table 1.

(實施例6) (Example 6)

將邊緣釘扎裝置應用於鑄模薄片。釘扎係於未延伸薄片的5mm內側至50mm內側的範圍進行靜電施加。製膜條件係採用與實施例1相同的條件實施製膜。將得到的結果示於表。 An edge pinning device is applied to a mold sheet. The pinning is performed by applying static electricity in a range of 5 mm inside to 50 mm inside of the unstretched sheet. Film formation conditions were performed under the same conditions as in Example 1. The obtained results are shown in the table.

(比較例1、2) (Comparative Examples 1, 2)

改變延伸倍率和厚度的製膜條件,除此以外係與實施例1同樣地實施,且將得到的結果示於表2。漿料厚度不均與實施例1~4相比惡化,且評價成為尚可。 Except that the film forming conditions for changing the stretching ratio and thickness were changed in the same manner as in Example 1, the results obtained are shown in Table 2. The uneven thickness of the slurry was worse than that of Examples 1 to 4, and the evaluation was acceptable.

(比較例3) (Comparative example 3)

將縱向延伸倍率及橫向延伸倍率各自變更為4.5倍、4.5倍,除此以外係與實施例1同樣地實施。雖目的是藉由設定成高倍率,而平坦化在步驟以前所產生的不均,但結果為σMD惡化。σMD,實施厚度不均的頻率解析,結果確認到:似乎是縱向延伸所致之延伸不均的周期。 Except that the longitudinal stretching magnification and the lateral stretching magnification were changed to 4.5 times and 4.5 times, respectively, the same procedure was performed as in Example 1. Although the purpose is to flatten the unevenness that occurred before the step by setting it to a high magnification, the result is that σ MD deteriorates. σ MD , a frequency analysis of uneven thickness was performed, and as a result, it was confirmed that it appears to be a period of uneven extension due to longitudinal extension.

(比較例4) (Comparative Example 4)

冷卻水之流路劣化,結果,鑄模之變位成為50μm。採用該鑄模,改變延伸倍率和厚度的製膜條件,除此以外係與實施例1同樣地實施,且將得到的結果示於表2。漿料厚度不均的評價為不良。 The flow path of the cooling water deteriorates, and as a result, the displacement of the mold becomes 50 μm. Except that this casting mold was used to change the film formation conditions of the stretching ratio and thickness, it was carried out in the same manner as in Example 1, and the results obtained are shown in Table 2. The evaluation of the uneven thickness of the slurry was defective.

(比較例5) (Comparative example 5)

作為A層所含有的原料,使用熔融比電阻為5.0×108者。以反射光觀察鑄模後的薄片,結果,有橫段狀的延伸不均。在測定長邊方向的薄膜厚度不均σMD時,看到原數據之波形有周期性的厚度不均。因為其係顯著的厚度不均,所以未實施矽酮塗布及漿料塗布。 As a raw material contained in the layer A, a melt specific resistance of 5.0 × 10 8 was used. Observation of the flakes after casting with the reflected light revealed that there was unevenness in the horizontal section. When measuring the film thickness unevenness σ MD in the longitudinal direction, it is seen that the waveform of the original data has a periodic thickness unevenness. Since the thickness is significantly uneven, silicone coating and slurry coating were not performed.

(比較例6) (Comparative Example 6)

採用比較例5的實施形態,應用邊緣釘扎裝置,但沒有在比較例5所看到的針對鑄模不良之改善效果。 In the embodiment of Comparative Example 5, an edge pinning device was applied. However, the improvement effect against the mold failure seen in Comparative Example 5 was not obtained.

(比較例7) (Comparative Example 7)

藉由增加在熱固定區的空氣之換氣次數,而除去烘箱內的寡聚物,所以在熱固定區各室進行吸排氣,但其它的製膜條件係與實施例1相同。結果,周期為不定,但看到薄膜厚度不均惡化的狀態。漿料的厚度不均為尚可。 The oligomers in the oven are removed by increasing the number of air exchanges in the heat-fixed zone, so the air is sucked and exhausted in each room of the heat-fixed zone, but other film-forming conditions are the same as in Example 1. As a result, the cycle was indefinite, but a state in which the uneven thickness of the film was deteriorated was observed. The thickness of the slurry is not acceptable.

產業上的利用可能性Industrial availability

本發明的雙軸配向聚酯薄膜,整個長邊方向的平面特性優異,因此可適當地用於脫模用途。尤其,可與加工時之張力對抗,在面內之伸縮行為經均勻化,因此可特別適當地用於將多層陶瓷電容器中之坯片作為構件使用的脫模用途。 The biaxially oriented polyester film of the present invention is excellent in planar characteristics over the entire longitudinal direction, and therefore can be suitably used for mold release applications. In particular, it can counteract the tension during processing, and the in-plane expansion and contraction behavior is uniformized. Therefore, it can be particularly suitably used for demolding the use of a green sheet in a multilayer ceramic capacitor as a component.

Claims (6)

一種脫模用雙軸配向聚酯薄膜卷,其特徵為:薄膜寬為400mm以上,且相對於連續測定薄膜長邊方向10,000m所得之厚度的平均值之偏差σ值(σ MD)為0.15μm以下。 A biaxially oriented polyester film roll for demolding, characterized in that the film width is 400 mm or more, and the deviation σ value (σ MD ) from the average value of the thickness obtained by continuously measuring the length 10,000 m of the film in the longitudinal direction is 0.15 μm. the following. 如請求項1之脫模用雙軸配向聚酯薄膜卷,其中脫模用雙軸配向聚酯薄膜之一方的薄膜表面之中心線粗度SRa(A)為1nm以上且小於15nm,另一方的薄膜表面之中心線粗度SRa(B)為20nm以上40nm以下。     For example, the biaxially oriented polyester film roll for demolding in claim 1, wherein the center line thickness SRa (A) of one of the film surfaces of the biaxially oriented polyester film for demolding is 1 nm or more and less than 15 nm, and the other The center line thickness SRa (B) of the film surface is 20 nm or more and 40 nm or less.     如請求項1或2之脫模用雙軸配向聚酯薄膜卷,其中該脫模用雙軸配向聚酯薄膜具有3層以上之層構成。     For example, the biaxially oriented polyester film roll for demolding according to claim 1 or 2, wherein the biaxially oriented polyester film for demolding has a layer structure of three or more layers.     如請求項2或3之脫模用雙軸配向聚酯薄膜卷,其中構成該SRa(A)為1nm以上且小於15nm之薄膜表面的層(A層)含有熔融比電阻為1.0×10 6Ω‧cm以上1.0×10 8Ω‧cm以下的聚酯樹脂。 For example, the biaxially oriented polyester film roll for release of item 2 or 3, wherein the layer (layer A) constituting the film surface of the SRa (A) of 1 nm or more and less than 15 nm contains a melting specific resistance of 1.0 × 10 6 Ω Polyester resin of ‧cm or more and 1.0 × 10 8 Ω‧cm or less 如請求項1至4中任一項之脫模用雙軸配向聚酯薄膜卷,其中該脫模用雙軸配向聚酯薄膜係作為積層陶瓷電容器的成型用構件使用。     The biaxially oriented polyester film roll for demolding according to any one of claims 1 to 4, wherein the biaxially oriented polyester film for demolding is used as a member for forming a laminated ceramic capacitor.     如請求項5之脫模用雙軸配向聚酯薄膜卷,其中該脫模用雙軸配向聚酯薄膜係作為汽車用積層陶瓷電容器的成型用構件使用。     The biaxially oriented polyester film roll for demolding according to claim 5, wherein the biaxially oriented polyester film for demolding is used as a member for molding a laminated ceramic capacitor for an automobile.    
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