TW201944473A - Holder unit having a plurality of highly abrasion-resistant particles on the peripheral surface of the scribing wheel - Google Patents

Abstract

The holder unit of the present invention improves the quality of the workpiece to be scribed. The holder unit 100 includes: a holder 110, a pin 200 supported by the holder 110, and a scribing wheel 120 supported by the pin 200. The scribing wheel 120 has a second insertion hole 121 into which the pin 200 is inserted. The in-wheel peripheral surface 122 of the scribing wheel 120 defining the second insertion hole 121 is made of a highly abrasion-resistant material. The arithmetic average roughness Ra of the in-wheel peripheral surface 122 is 0.01 [mu]m or less. The pin 200 includes a pin body and a protective layer 220 for protecting the outer surface of the pin body. The protective layer 220 contains a plurality of highly abrasion-resistant particles having high abrasion resistance to the in-wheel peripheral surface 122.

Description

Holder unit

The present invention relates to a holder unit for scoring.

The scoring device is used to form a score line for a workpiece such as a brittle material substrate. The scoring device includes a holder unit. The holder unit includes a scoring wheel for scoring the workpiece. In the scoring process, when the scoring wheel is pressed against the surface of the workpiece, the workpiece and the scoring wheel move relatively to form a scribe line on the workpiece. Further, as an example of a prior scoring device, Patent Document 1 can be cited.
[Prior technical literature]
[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2017-119348

[Problems to be solved by the invention]

When using the existing scoring device to scribe the workpiece, the cracks in the thickness direction of the workpiece, which are generated along with the scribe line formation, are the vertical cracks. The related quality is degraded. As an example of the case where the quality is low, a crack formation depth is different from the formation state of each part of the scribe line. It is considered that this is related to the unstable rotation of the scribe wheel during the scribe process.
[Means for solving problems]

(1) The holder unit of the present invention includes a holder, a pin supported on the holder, and a scoring wheel supported on the pin; the scoring wheel includes an insertion hole into which the pin is inserted, and provides The inner peripheral surface of the scoring wheel of the insertion hole is formed of a highly wear-resistant material, and the arithmetic average roughness Ra is 0.01 μm or less. The pin includes a pin body and a protective layer for protecting the outer peripheral surface of the pin body. The protective layer includes a plurality of highly abrasion-resistant particles having high abrasion resistance to the inner peripheral surface.

The rotation state of the scoring wheel during the scoring process affects the formation state of the cracks formed on the workpiece with the scoring process. As one of the methods for improving the quality of the scribed object, a method of stabilizing the rotation of the scribe wheel during the scribe process can be cited. The state in which the rotation of the scribing wheel is stable refers to, for example, a state in which the rotation impedance of the scribing wheel does not change, or a state in which the fluctuation range of the rotation impedance is small. The impedance generated at the contact portion between the inner peripheral surface of the scribe wheel and the outer peripheral surface of the pin affects the rotation state of the scribe wheel. It is considered that the smaller the impedance, the more stable the rotation state of the scribe wheel, and the higher the quality of the object to be processed after the scribe process.

As a method of reducing the impedance generated by the above-mentioned contact portion, for example, reducing the inner peripheral surface of the scoring wheel (hereinafter referred to as "wheel inner peripheral surface") and the outer surface of the pin (hereinafter referred to as "pin outer peripheral surface" ”) 'S respective methods of surface roughness. The inventor of this case observed the quality of the to-be-processed object using the holder unit based on this method (henceforth a "reference holder unit"). The specific structure of the reference holder unit is as follows. The scoring wheel and pin are diamond sintered bodies, respectively. In order to sufficiently reduce the surface roughness of the inner peripheral surface of the wheel and the surface roughness of the outer peripheral surface of the pin, the respective surfaces are polished. The inner peripheral surface of the wheel is mirror-finished in order to further reduce the surface roughness.

As a result of scoring the workpiece under various processing conditions, it was confirmed that the quality of the actual workpiece had poor quality expected from the smaller surface roughness of the wheel inner peripheral surface and the pin outer peripheral surface. situation. Specifically, in a state where the walking distance of the scoring wheel with respect to the workpiece exceeds a certain walking distance, a scribe line with microcracks extending in a direction different from the thickness direction of the workpiece is formed on The situation on the processed object. This crack is called a horizontal crack. In the part where horizontal cracks occur in the workpiece, the surface of the workpiece may peel off. The state where the surface of the workpiece is peeled is called a fiber. In the state where the walking distance of the scoring wheel relative to the workpiece exceeds a certain walking distance, an example of insufficient progress of the vertical cracks formed on the workpiece is also found. When the workpiece is divided along the scribe line, the quality of the divided portion may be reduced. Even if the surface roughness that greatly affects the impedance of the contact portion between the inner circumferential surface of the wheel and the outer circumferential surface of the pin is small, the reason why the quality of the workpiece is reduced is considered as follows, for example.

The surface roughness of the inner peripheral surface of the wheel and the outer peripheral surface of the pin are extremely small. Because of the small difference, the diamond particles contained in the sintered diamond are in contact with the friction surface of the inner peripheral surface of the wheel and the outer peripheral surface of the pin at the beginning of the scoring. The area is enlarged, and the area contacted by the sintering aid containing metals such as cobalt or tungsten, which gradually appears on the friction surface due to abrasion, is enlarged, and aggregation is easy to occur. The part condensed on the friction surface imparts resistance to the rotation of the scribe wheel. Due to the instability of the rotation state of the scribe wheel caused by the impedance, the conditions used to form a normal scribe line formation are considered unstable. The quality of the processed object decreases.

Based on the knowledge that the smaller the surface roughness is, the smaller the resistance of rotation is, and it is considered that the method of mirror-polishing the inner peripheral surface of the wheel in order to reduce the rotational resistance of the scoring wheel is effective in itself. However, based on the problem with the combination of the outer peripheral surface of the pin that is the object to be in contact with the inner peripheral surface, it is estimated that the cause is caused between the inner peripheral surface of the wheel and the outer peripheral surface of the pin, and the rotation resistance changes due to wear. It is considered that the occurrence of this phenomenon is that: the surface roughness of both the inner peripheral surface of the wheel forming the friction surface and the outer peripheral surface of the pin is sufficiently small; and that the scoring wheel and the pin are diamond sintered bodies and have the same hardness.

The inventor of the present case maintains a method of mirror-processing the inner peripheral surface of the wheel, instead of the pin of a diamond sintered body with a small surface roughness on the outer peripheral surface of the pin, the pin used as a base material has a protective layer formed on the outer peripheral surface of the pin body. A holder unit constituting the present invention. The protective layer contains a plurality of highly abrasion-resistant particles having high abrasion resistance to the inner circumferential surface of the wheel. The state of high abrasion resistance on the inner circumferential surface of the wheel means that when abrasion occurs due to contact with the inner circumferential surface of the wheel formed of a highly wear-resistant material, the pin also has a predetermined life. And the state of wear slowly, or the state of substantially no wear.

As a result of observing the quality of the work to be scored using the holder unit of the present invention, it was confirmed that the quality of the work was improved. The reason for obtaining such a result is considered as follows, for example. On the outer peripheral surface of the pin of the holder unit of the present invention, different from the outer peripheral surface of the pin of the reference holder unit, a gap is formed between a plurality of highly abrasion-resistant particles constituting a protective layer, and the high-abrasion-resistant particles occupy the same. The proportion is increasing. Therefore, the state of the friction surface between the inner peripheral surface of the wheel and the outer peripheral surface of the pin composed of the protective layer is different from the state of the friction surface between the inner peripheral surface of the wheel and the outer peripheral surface of the pin of the reference holder unit. Due to this difference, it is difficult to produce strong agglutination on the friction surface, an increase in the rotation resistance of the scribe wheel during the scoring process is suppressed, and the rotation state of the scribe wheel is stable. In addition, since the arithmetic average roughness Ra of the inner peripheral surface of the wheel is 0.01 μm or less, the increase in frictional resistance due to the surface roughness on the friction surface between the inner peripheral surface of the wheel and the outer peripheral surface of the pin is suppressed. In other words, the stability of the rotation state of the scribing wheel is also improved.

(2) In one example of the holder unit, the high wear-resistant material includes at least one of diamond, cubic carbon nitride, hexagonal white carbonite, ultra-hard nanometer tube, and cubic boron nitride.
Therefore, the wear resistance of the wheel inner peripheral surface is further improved.

(3) In one example of the above-mentioned holder unit, the above-mentioned plurality of highly abrasion-resistant particles include diamond particles, cubic carbon nitride particles, hexagonal carbonite particles, ultra-hard nanometer tube particles, and cubic nitrogen. At least one of boronized particles.
Therefore, the abrasion resistance of the protective layer is further improved.

(4) In one example of the holder unit, the highly abrasion-resistant particles are abrasive particles.
Since the protective layer can be manufactured by using the abrasive particles used in the abrasive stone, the manufacturing cost is reduced.

(5) In one example of the holder unit, the protective layer includes a layer of a bonding agent that binds the high-wear-resistant particles to the outer peripheral surface of the pin body, and the high-wear-resistant particles include: a layer located on the bonding agent A particle coating portion inside the particle and a particle protruding portion protruding from the surface of the layer of the binder.
The highly abrasion-resistant particles are bonded to the outer peripheral surface of the pin body via a layer of a bonding agent in the particle coating portion. Therefore, the outer peripheral surface of the pin body is appropriately protected. The particle protrusions contact the inner peripheral surface of the wheel. Therefore, abrasion of the protective layer is difficult to proceed.

(6) In one example of the holder unit, a front end of the particle protruding portion is flat.
The inner peripheral surface of the wheel is in contact with the particle protruding portion of the protective layer. During the scoring process, the scoring wheel rotates relative to the pin, and the inner peripheral surface of the wheel and the front end of the particle protruding portion form a friction surface. As the scoring wheel rotates, the particle protrusions wear out. In the holder unit described above, since the front end of the particle projection is flat, the wear is performed more slowly than when the front end of the particle projection is sharp. Therefore, in the initial state, compared with the case where a sharp pin with a particle protruding portion is used, the wear amount of the pin is smaller when the travel distance of the scoring wheel reaches a certain walking distance, and it is difficult to form a deeper pin on the outer peripheral surface. groove.

(7) In one example of the holder unit, the bonding agent is nickel.
Therefore, a protective layer can be manufactured using electrical plating.

(8) In one example of the holder unit, the scoring wheel is a diamond sintered body.
Therefore, high-quality scoring processing can be performed on various kinds of workpieces.

(9) In one example of the holder unit, a diameter of an intermediate portion of the insertion hole in a direction along a center axis of the insertion hole is larger than a diameter of the insertion hole in a direction along a center axis of the insertion hole. The diameter of the ends is narrower.
Since the contact area between the inner peripheral surface of the wheel and the outer peripheral surface of the pin becomes narrower, the inclination of the scoring wheel caused by the surface properties of the inner peripheral surface of the wheel is suppressed.

(10) In an example of the holder unit, in a cross section of the scoring wheel that is parallel to the direction along the center axis of the insertion hole and passes through the center axis of the insertion hole, the shape of the inner peripheral surface is Drum shape.
There are cases in which a scoring wheel generates a reaction force including a component in a direction along the center axis of the insertion hole during the scoring process. This reaction force works to incline the scoring wheel with respect to the pin. In the above-mentioned holder unit, since the shape of the inner peripheral surface of the insertion hole is a drum shape, it is also difficult to cause the inclination of the scribe wheel when a reaction force including a component along the center axis direction is generated on the scribe wheel. .

An example of a technique related to the holder unit of the present invention will be described.
(A) A pin of a scribing wheel, which supports the scribing wheel. The pin includes a pin body and a protective layer that protects the outer peripheral surface of the pin body. The protective layer includes a majority of abrasion resistance to the inner peripheral surface. High-wear-resistant particles, the protective layer includes a layer of a binding agent that combines the high-wear-resistant particles to the outer peripheral surface of the pin body, and the high-wear-resistant particles include: particles located inside the layer of the binder The covering portion and the particle protruding portion protruding from the surface of the layer of the bonding agent, and the front end of the particle protruding portion is flat.
(B) In one example of the pin of the scoring wheel, the above-mentioned high-wear-resistant particles include diamond particles, cubic carbon nitride particles, hexagonal white carbonite particles, ultra-hard nano-tube particles, and cubes. At least one of the particles of crystalline boron nitride.
(C) In an example of the pin of the scoring wheel, the highly abrasion-resistant particles are abrasive particles.
(D) A method for manufacturing a pin of a scribing wheel, wherein the pin supports the scribing wheel; the manufacturing method includes a step of forming a protective layer that protects the outer peripheral surface of the pin body of the pin and includes abrasion resistance A high number of highly abrasion-resistant particles and a layer of a bonding agent that binds the high-abrasion particles to the outer peripheral surface of the pin body; and protrudes from the surface of the layer of the bonding material of the high-abrasion particles A step of polishing the particle protrusions.
[Inventive effect]

According to the present invention, the quality of the processed object is improved, and the holder unit can be used for a longer period of time.

(Implementation form)
The scoring device moves the scoring wheel and the workpiece relatively in a state where the scoring wheel is pressed on the workpiece, and forms a score line on the surface of the workpiece. This action of the scoring device is called scanning of the scoring wheel. The scanning method of the scribing wheel is mainly divided into three methods. In the first scanning method, the position of the scoring wheel is maintained during the scoring process, and the workpiece is transported to the scoring wheel. As the processed object is conveyed, the scribe wheel scans the surface of the processed object relatively in the predetermined scanning direction. In the second scanning method, the position of the workpiece is maintained during the scribe process, and the scribe wheel scans the workpiece in a predetermined scanning direction. In the third scanning method, the first scanning method and the second scanning method are combined, and the scribe wheel scans the workpiece in a predetermined scanning direction.

An example of the object to be processed is a brittle material substrate. Examples of the brittle material substrate are a glass substrate and a ceramic substrate. An example of the glass substrate is a substrate of alkali-free glass. An acrylic glass-free substrate formed from a brittle material substrate is used, for example, in a flat panel display. Examples of the flat panel display are a display of a television receiver and a display of a smart phone.

FIG. 1 shows an example of a scoring device 10 configured so that a processed object such as a brittle material substrate can be scribed with an appropriate quality. The scoring device 10 forms a score line on the workpiece W by transferring the workpiece W to the scoring wheel 120. The main elements constituting the scoring device 10 are a transport device 20 and a processing device 30. The transfer device 20 includes a rail 21, a platform 22, a linear drive mechanism 23, a rotation drive mechanism 24, and a vacuum suction device 25. In the following description, a direction in which the workpiece W is conveyed is referred to as a conveying direction DA, a direction orthogonal to the conveying direction DA in the plan view of the scoring device 10 is referred to as a width direction DB, and the conveying direction DA and the width direction are referred to. The direction orthogonal to DB is called the height direction DC. The conveyance direction DA includes a first conveyance direction and a second conveyance direction opposite thereto. The width direction DB includes a first width direction and a second width direction opposite thereto. The height direction DC includes the upper and lower sides.

In the example shown in the figure, a pair of rails 21 are arranged on a base (not shown) of the scoring device 10. The shape of the track 21 is a straight line defining the conveying direction DA. One of the rails 21 and the other rail 21 are arranged at a certain interval in the width direction DB. The platform 22 is divided into a slider 22A, a pillar 22B, and a top plate 22C. The slider 22A is connected to each of the rails 21 so as to be movable along the rails 21. The pillar 22B constitutes a hollow portion in such a manner that other elements can be arranged inside, and is provided on the slider 22A. The top plate 22C is a part for arranging the workpiece W, and is provided on the support pillar 22B.

The linear drive mechanism 23 moves the platform 22 relative to the rail 21. The linear drive mechanism 23 is composed of, for example, a motor 23A and a feed screw 23B. The motor 23A is disposed on a base (not shown) of the scoring device 10. The output shaft of the motor 23A is connected to the feed screw 23B so that the feed screw 23B rotates around the rotation center axis of the motor 23A. The feed screw 23B is disposed between the pair of rails 21. The longitudinal direction of the feed screw 23B is parallel to the longitudinal direction of the rail 21. The slider 22A is connected to the feed screw 23B so as to move in the longitudinal direction of the feed screw 23B as the feed screw 23B rotates. When the motor 23A rotates, the feed screw 23B rotates, and according to the rotation direction of the feed screw 23B, the stage 22 moves to the first conveyance direction or the second conveyance direction with respect to the rail 21.

The rotation driving mechanism 24 and the vacuum suction device 25 are arranged in the pillar 22B. The rotation driving mechanism 24 rotates the top plate 22C relative to the pillar 22B around a central axis parallel to the height direction DC. The vacuum suction device 25 sucks the workpiece W disposed on the top plate 22C on the top plate 22C. The scribe process is performed in a state where the workpiece W is adsorbed by the vacuum suction device 25.

The processing device 30 includes a vertical frame 31, a horizontal frame 32, a scoring head 33, a holder joint 34, a holder unit 100, a horizontal drive mechanism 35, and a vertical drive mechanism 36. The vertical frame 31, the horizontal frame 32, the scoring head 33, and the holder joint 34 are made of, for example, metal suitable for various functions.

In the example shown in the figure, a pair of vertical frames 31 are arranged on a base (not shown) of the scoring device 10. The longitudinal direction of the vertical frame 31 is parallel to the height direction DC. The pair of vertical frames 31 are arranged outside the respective rails 21 in the width direction DB so as to sandwich the pair of rails 21. The horizontal frame 32 is provided between a pair of vertical frames 31. The longitudinal direction of the horizontal frame 32 is parallel to the width direction DB. The horizontal frame 32 is fixed to each vertical frame 31. A guide 32A is provided on the horizontal frame 32. The guide 32A is, for example, a groove parallel to the longitudinal direction of the horizontal frame 32.

The scoring head 33 is a base supporting the holder joint 34. The scoring head 33 is connected to the guide 32A so as to be movable in the width direction DB along the horizontal frame 32. The holder joint 34 is connected to the lower part of the scoring head 33. The holder joint 34 is configured so that the holder unit 100 can be detached.

The horizontal driving mechanism 35 moves the scoring head 33 in the width direction DB with respect to the horizontal frame 32. The horizontal drive mechanism 35 is composed of, for example, a motor 35A and a feed screw 35B. The motor 35A is provided on one of the vertical frames 31. The output shaft of the motor 35A is connected to the feed screw 35B so that the feed screw 35B rotates around the rotation center axis of the motor 35A. The feed screw 35B is arranged in the horizontal frame 32. The longitudinal direction of the feed screw 35B is parallel to the longitudinal direction of the horizontal frame 32. The scoring head 33 is connected to the feed screw 35B so as to move in the longitudinal direction of the feed screw 35B as the feed screw 35B rotates. When the motor 35A rotates, the feed screw 35B rotates, and according to the rotation direction of the feed screw 35B, the scoring head 33 moves in the first width direction or the second width direction relative to the horizontal frame 32. The holder joint 34 and the holder unit 100 are moved integrally with the scoring head 33 in the width direction DB.

The longitudinal driving mechanism 36 is provided on the scoring head 33. The vertical drive mechanism 36 includes, for example, a motor and a feed screw (both are not shown). The motor is disposed in the scoring head 33. The output shaft of the motor is connected to the feed screw in such a manner that the feed screw rotates around the rotation center axis of the motor. The feed screw is arranged in the scoring head 33. The longitudinal direction of the feed screw is parallel to the height direction DC. The holder joint 34 is connected to the feed screw so as to move in the longitudinal direction of the feed screw as the feed screw rotates. When the motor rotates, the feed screw rotates, and the holder joint 34 moves upward or downward relative to the scoring head 33 according to the rotation direction of the feed screw. The holder unit 100 moves in the height direction DC integrally with the holder joint 34.

FIG. 2 shows the structure of the holder unit 100 in a cross section parallel to the width direction DB and the height direction DC. The main elements constituting the holder unit 100 are a holder 110, a scoring wheel 120, and a pin 200. The base 111 is detachable from the holder joint 34. The pin 200 is supported by the holder 110 and is prevented from falling off by, for example, a falling prevention mechanism such as a housing 140. The scoring wheel 120 is supported on the pin 200. An example of a material constituting the holder 110 and the case 140 is a magnetic metal. The materials constituting the holder 110 and the case 140 can be selected individually. An example of a material constituting the scoring wheel 120 is: sintered diamond (Poly Crystalline Diamond), cemented carbide, single crystal diamond, and polycrystalline diamond. The materials constituting the scoring wheel 120 may be individually selected.

The holder 110 is divided into a base 111 and a pair of arms 112. The shape of the base 111 is a cylinder or a corner post. A pair of arms 112 extend downward from the lower portion of the base 111. The longitudinal direction of the arm 112 is parallel to the height direction DC. In the width direction DB, a space 113 is formed between the inner surface 112A of one arm 112 and the inner surface 112A of the other arm 112 to arrange the scoring wheel 120. The interval between the inner surface 112A of one arm 112 and the inner surface 112A of the other arm 112 in the width direction DB is slightly wider than the thickness of the scoring wheel 120. A first insertion hole 114 into which the pin 200 is inserted is formed in each arm 112. The first insertion hole 114 is a circular hole penetrating the arm 112 in the width direction DB. The inner peripheral surface 115 formed on the arm 112 defines a first insertion hole 114. The first insertion hole 114 includes an inner opening portion 114A opened on the inner surface 112A of the arm 112 and an outer opening portion 114B opened on the outer surface 112B of the arm 112.

The scoring wheel 120 is disposed in a space 113 between the pair of arms 112. A second insertion hole 121 into which the pin 200 is inserted is formed in the scoring wheel 120. The second insertion hole 121 is a circular hole penetrating the scribe wheel 120 in the thickness direction. An inner peripheral surface 122 (hereinafter referred to as “wheel inner peripheral surface 122”) formed on the scoring wheel 120 defines a second insertion hole 121. The wheel inner peripheral surface 122 is formed of a highly wear-resistant material. The wheel inner peripheral surface 122 is mirror-finished. The arithmetic average roughness Ra of the inner peripheral surface 122 of the mirror-finished wheel is smaller than the arithmetic average roughness Ra of the surface subjected to ordinary finishing. In one example, the arithmetic average roughness Ra of the wheel inner peripheral surface 122 is 0.01 μm or less. In a preferred example, the arithmetic average roughness Ra of the wheel inner peripheral surface 122 is 0.005 μm or less, and the maximum height Rz is 0.05 μm or less. The highly wear-resistant material includes at least one of diamond, cubic carbon nitride, hexagonal white carbonite, ultra-hard nanometer tube, and cubic boron nitride. In one example, the scoring wheel 120 is a diamond sintered body, and the entire scoring wheel 120 including a highly wear-resistant material forming the wheel inner peripheral surface 122 includes the diamond sintered body.

The pin 200 is inserted into the first insertion hole 114 of each arm 112 and the second insertion hole 121 of the scoring wheel 120 in a non-pressed state with respect to each of the holder 110 and the scoring wheel 120. The thickness RC of the pin 200 is smaller than the diameter RA of the first insertion hole 114 and the diameter RB of the second insertion hole 121. The length of the pin 200 is slightly shorter than the interval between the opening portion 114B outside one of the first insertion holes 114 and the opening portion 114B outside the other first insertion hole 114 in the width direction DB.

The shape of the wheel inner peripheral surface 122 can be arbitrarily selected. In one example, the diameter of the middle portion 121A of the second insertion hole 121 in the direction of the center axis CB of the second insertion hole 121 of the scoring wheel 120 is larger than that of the center axis CB of the second insertion hole 121. The diameter of the end portion 121B of the second insertion hole 121 in the direction is narrow. In the cross section of the scribe wheel parallel to the thickness direction of the scribe wheel and passing through the center axis of the insertion hole, the shape of the inner peripheral surface is a drum shape. Specifically, the wheel inner peripheral surface 122 is curved so as to expand toward the center axis CB from each side surface 123 toward the center of the scoring wheel 120 in a direction along the center axis CB. The relationship between the wheel inner peripheral surface 122 and the pin outer peripheral surface 201 is substantial line contact or surface contact with a small contact area. During the scoring process, the scoring wheel 120 generates a reaction force including a component along the center axis CB. This reaction force works to incline the scoring wheel 120 with respect to the pin 200. In a state where the scoring wheel 120 is inclined, the rotation center plane of the scoring wheel 120 orthogonal to the central axis CB is not orthogonal to the central axis CC of the pin 200. In the holder unit 100, since the wheel inner peripheral surface 122 is a curved surface as described above, it is difficult to cause the inclination of the scribe wheel 120 during the scribe process.

The case 140 is configured separately from the holder 110. The case 140 is fixed to the holder 110 by a fixing mechanism so that the opening portion 114B other than the first insertion hole 114 can be opened and closed. An example of the fixing mechanism is a screw. The casing 140 partially or completely closes one of the openings 114B outside the first insertion hole 114 so that the front end 202 of the pin 200 does not fly out of the first insertion hole 114. In the example shown in the figure, the case 140 closes a part of the opening portion 114B other than the first insertion hole 114.

The scoring device 10 can replace the scoring wheel 120. Examples of the method for replacing the scoring wheel 120 include a first replacement method and a second replacement method. In the first replacement method, the housing 140 is removed from the holder 110 first. Then, the pin 200 is pulled out from the holder 110, and the scoring wheel 120 is taken out from the space 113 of the holder 110. Next, the new scoring wheel 120 is arranged in the space 113 of the holder 110, and the pin 200 is inserted into the first insertion hole 114 of the arm 112 and the second insertion hole 121 of the scoring wheel 120. The thickness of the scoring wheel 120 is thinner than the interval between the arms 112, so the operation of replacing the scoring wheel 120 can be easily performed. When the pin 200 must be replaced, the pin 200 is not pulled out from the holder 110 but a new pin 200 is inserted into the first insertion hole 114 and the second insertion hole 121. Since the pin 200 is configured so that it can be inserted into the holder 110 and the scoring wheel 120 in a non-pressed state, the pin 200 can be easily pulled out and inserted into the holder 110.

The second replacement method is selected in the case where the pin 200 is held on the holder 110 by using a different fall prevention mechanism instead of the case 140. For example, the fall-off prevention mechanism includes a claw portion coupled to the holder 110. In a state where the claw portion and the holder 110 are coupled, the fall-off prevention mechanism is fixed to the holder 110 and cannot be opened and closed with respect to the holder 110. In the second replacement method, the scoring wheel 120 and the pin 200 are held on the holder 110 and replaced as an integrated holder unit 100. Specifically, the holder unit 100 is initially removed from the holder joint 34. The new holder unit 100 is then mounted on the holder joint 34.

In a state before the scoring processing step, the scoring wheel 120 does not contact the workpiece W, the vertical driving mechanism 36 holds the holder unit 100 at a predetermined position in the height direction DC. The vertical drive mechanism 36 moves the holder unit 100 downward from a predetermined position in the height direction DC so that the scoring wheel 120 contacts the surface of the workpiece W as the scoring processing step starts. In a state where the scoring wheel 120 is in contact with the surface of the workpiece W, the vertical drive mechanism 36 determines the height DC of the holder unit 100 in such a manner that a predetermined load is applied to the workpiece W by the scoring wheel 120. position.

FIG. 3 is a cross-sectional view of the pin 200. The pin 200 includes a pin body 210 and a protective layer 220 that protects the outer peripheral surface 211 of the pin body 210. The surface 221 of the protective layer 220 constitutes the outer peripheral surface of the pin 200, that is, the outer peripheral surface 201 of the pin. The pin body 210 is cylindrical. The protective layer 220 covers the outer peripheral surface 211 of the pin body 210. In a preferred example, in the outer peripheral surface 211 of the pin body 210, a protective layer 220 is provided on the entirety of a portion that has a possibility of contacting the inner peripheral surface 122 of the wheel of the scoring wheel 120. In the example shown in FIG. 2, a protective layer 220 is provided on the entire outer peripheral surface 211 of the pin body 210.

The protective layer 220 includes a plurality of high abrasion resistant particles 230 (see FIG. 4) having high abrasion resistance against the wheel inner peripheral surface 122. In a preferred example, the protective layer 220 is formed so that the pin 200 has a predetermined life. The predetermined life is defined by, for example, the distance traveled by the scoring wheel 120 on the workpiece W by scoring. The state of high abrasion resistance to the wheel inner peripheral surface 122 means that even when abrasion occurs due to contact with the wheel inner peripheral surface 122 made of diamond, the pin 200 has a predetermined value. The state of wear and tear, or the state of substantially no wear.

FIG. 4 is a model diagram of the pin 200 related to a state where the protective layer 220 is formed on the pin body 210 as a base material and the protective layer 220 has not been ground (hereinafter referred to as “unprocessed state of the pin 200”). In the example shown in the figure, most of the high abrasion resistant particles 230 have the same shape, and the plurality of high abrasion resistant particles 230 are arranged on the outer peripheral surface 211 of the pin body 210. However, in the actual protective layer 220, each of the high abrasion resistant particles 230 has high abrasion resistance. The particles 230 have different shapes, and a plurality of highly abrasion-resistant particles 230 are irregularly present on the outer peripheral surface 211 of the pin body 210.

The type of the high abrasion resistant particles 230 can be arbitrarily selected. In one example, the plurality of highly wear-resistant particles 230 include at least one of diamond particles, cubic carbon nitride particles, hexagonal white carbonite particles, ultra-hard nanometer tube particles, and cubic boron nitride particles By. In the example shown in the figure, the plurality of highly abrasion-resistant particles 230 are particles of diamond. Examples of the material constituting the diamond particles are single crystal diamond and polycrystalline diamond. The material constituting the pin body 210 can be arbitrarily selected. In one example, the hardness of the material constituting the pin body 210 is lower than that of the high abrasion resistant particles 230. One example is cemented carbide, steel and stainless steel. The kind of hardness is, for example, Knoop hardness.

The protective layer 220 further includes a layer 240 (hereinafter referred to as a “bonding layer 240”) of a binding agent that binds the high wear-resistant particles 230 to the outer peripheral surface 211 of the pin body 210. The bonding layer 240 covers the outer peripheral surface 211 of the pin body 210. The structure of the bonding layer 240 can be arbitrarily selected. In one example, the bonding layer 240 is an electroplated layer formed by electrical plating. An example of the type of the binder is nickel and an alloy containing nickel. In the example shown, the bonding layer 240 is made of nickel. The bonding layer 240 is an electroplated layer formed by electrolytic nickel plating.

The high abrasion resistant particles 230 are bonded to the outer peripheral surface 211 of the pin body 210 via the bonding layer 240. This combination is such that the high abrasion resistant particles 230 can protect the pin body 210, and the high abrasion resistant particles 230 are held on the outer peripheral surface 211. The highly abrasion-resistant particles 230 include a particle coating portion 231 located inside the bonding layer 240 and a particle protruding portion 232 protruding from the surface 241 of the bonding layer 240. In one example, the high abrasion resistant particles 230 are abrasive particles. There are a plurality of corners 234 and a plurality of planes 235 on the surface 233 of the high wear-resistant particles 230. In the unprocessed state of the pin 200, most of the highly abrasion-resistant particles 230 mostly adopt a posture in which the angle 234 is located at the front end of the particle protruding portion 232.

The initial state of the pins 200 constituting the holder unit 100 can be arbitrarily selected. The initial state of the pin 200 refers to the state of the pin 200 in the unused holder unit 100. An example of the selected initial state is a processed state in which the protective layer 220 has been subjected to a grinding process, and an unprocessed state in which the protective layer 220 has not been subjected to a grinding process. For a layer containing abrasive particles, a grinding process for sharpening is usually performed, but a grinding process for the protective layer 220 of the pin 200 is a process for reducing the surface roughness of the protective layer 220. As the polishing process, for example, a grinding process in which the protective layer 220 is polished while the center of the pin 200 is held by a jig or the like, and a grinding process in which the protective layer 220 is not polished while the center of the pin 200 is not held, may be selected. No central grinding.

FIG. 5 is a model diagram of the protective layer 220 after grinding. In the polished protective layer 220, the front end of the particle protruding portion 232 is a flat surface 235. During the grinding process, the high wear-resistant particles 230 change the posture of the high wear-resistant particles 230 by the force received from the grinding stone. Most of the high wear-resistant particles 230 adopt a flat surface 235 and are located at the front end of the particle protrusion 232 Pose. Alternatively, the corners 234 of the particle protrusions 232 are removed by grinding to form a flat surface 235 on the particle protrusions 232. The surface 221 of the protective layer 220 is composed of a plurality of planes 235 by one or both of changes in the posture of the highly wear-resistant particles 230 and formation of the planes 235 in the particle protrusions 232. In addition, a part of the plurality of highly abrasion-resistant particles 230 is squeezed into the pin body 210 by grinding. The posture of the highly wear-resistant particles 230 is substantially the same as that before the grinding process, and the angle 234 is located at the front end of the particle protruding portion 232.

The amount of the highly abrasion-resistant particles 230 whose plane 235 is located at the front end of the particle protrusions 232 protrudes from the bonding layer 240 compared to the grinding-resistant front angle 234 of the high-wear-resistant particles 230 located at the front end of the particle protrusions 232 protruding from the bonding layer 240 The amount is small. The amount of the highly abrasion-resistant particles 230 whose plane 235 is located at the front end of the particle protrusions 232 protrudes from the bonding layer 240, and the high-wear-resistant particles 230 at the front end of the particle protrusions 232 after grinding processing 234 protrudes from the bonding layer 240 The amounts are roughly equal.

FIG. 6 is an example of a result of measuring the contour of the protective layer 220 in a raw state using a three-dimensional measuring machine. FIG. 7 is an example of a result of measuring the contour of the protective layer 220 in a processed state using a three-dimensional measuring machine. According to the measurement results shown in FIG. 6, it can be confirmed that there are a plurality of corners 234 of the particle protrusions 232 on the surface of the protective layer 220 in the unprocessed state. According to the measurement result in FIG. 7, it can be confirmed that there are a plurality of planes 235 of the particle protrusions 232 on the surface of the protective layer 220 in the processed state.

The use form of the holder unit 100 can be selected from, for example, a first use form and a second use form. The first use mode is a use mode in which an unprocessed state is selected as an initial state of the pin 200. The second usage pattern is a processing pattern in which the processed state is selected as the initial state of the pin 200. The use form of the holder unit 100 can be selected according to the type of the pin 200 provided on the holder 110.

FIG. 8 shows a state in which the scoring wheel 120 of the first use form has a short running distance. The state in which the walking distance is short refers to, for example, a state in which the walking distance is 0 m or more and less than the reference distance. The reference distance is, for example, a walking distance of about 10% of the life required for a normal pin. In a state where the scoring wheel 120 has a short walking distance, the wheel inner peripheral surface 122 is in contact with the corners 234 of the plurality of particle protrusions 232. By the rotation of the scoring wheel 120 during the scoring process, the inner circumferential surface 122 of the wheel rubs against the corner 234 of the particle protrusion 232, so that the angle 234 of the particle protrusion 232 wears, and the particle protrusion 232 and the wheel The contact portion of the peripheral surface 122 gradually changes according to the shape of the inner peripheral surface 122 of the wheel.

FIG. 9 shows a state where the scoring wheel 120 of the first use form has a long running distance. The state in which the walking distance is long refers to, for example, a state in which the walking distance is equal to or greater than the reference distance. In a state where the running distance of the scribing wheel 120 is long, the contact portion of the particle protruding portion 232 with the wheel inner peripheral surface 122 is modeled on the surface 236 of the wheel inner peripheral surface 122. The contact area between the high-wear-resistant particles 230 in the surface 236 and the wheel inner peripheral surface 122 is increased compared to a state in which the scoring wheel 120 has a short walking distance. Therefore, as the walking distance of the scoring wheel 120 becomes longer, the amount of wear of the high wear-resistant particles 230 with respect to the increase in the walking distance gradually decreases. In addition, when the amount of wear of the particle protrusions 232 is large, a part of the bonding layer 240 is also worn. Compared with the high abrasion resistant particles 230, the bonding layer 240 has a sufficiently low hardness, and is removed by contact with the scoring wheel 120. Among the plurality of particle protrusions 232, the state of the particle protrusions 232 not in contact with the wheel inner peripheral surface 122 is the same as the initial state.

FIG. 10 shows a state where the scoring wheel 120 of the second use form has a short running distance. In a state where the scoring wheel 120 has a short walking distance, the wheel inner peripheral surface 122 is in contact with the planes 235 of the plurality of particle protrusions 232. When the particle protrusion 232 including the corner 234 at the front end is included, there is also the case where the wheel inner peripheral surface 122 contacts the corner 234. By following the rotation of the scoring wheel 120 during the scoring process, the wheel inner peripheral surface 122 rubs against the particle protruding portion 232, so that the contact portion of the particle protruding portion 232 with the wheel inner peripheral surface 122 wears, but is The use form is different, and the surface of the protective layer 220 is composed of a plurality of flat surfaces 235. Therefore, compared with the first use form, the amount of change in shape due to abrasion is less.

FIG. 11 shows a state in which the scoring wheel 120 of the second use form has a long running distance. Since the amount of wear of the particle protrusions 232 is small, the relationship between the wheel inner peripheral surface 122 and the protective layer 220 is substantially the same as the state where the scoring wheel 120 has a short running distance when the scoring wheel 120 has a long running distance.

The size of each part of the holder unit 100 is determined as follows, for example. The outer diameter of the scoring wheel 120 is selected from a range of 1 mm to 7 mm. In one example, the outer diameter of the scoring wheel 120 is 2 mm. The thickness of the scoring wheel 120 is selected from the range of 0.4 mm to 1.2 mm. In one example, the thickness of the scoring wheel 120 is 0.64 mm. The interval of the arms 112 in the width direction DB is selected from a range of 0.4 mm to 1.3 mm. In one example, the interval between the arms 112 is 0.66 mm. The diameter RA of the first insertion hole 114 is selected from a range of 0.4 mm to 1.5 mm. In one example, the diameter RA of the first insertion hole 114 is 0.8 mm. The diameter RB of the second insertion hole 121 is selected from a range of 0.4 mm to 1.5 mm. In one example, the diameter RB of the second insertion hole 121 is 0.8 mm. The thickness RC of the pin 200 is selected from the range of 0.4 mm to 1.5 mm. In one example, the RC of the thickness of the pin 200 is 0.77 mm.

In one example, the specifications of the protective layer 220 are determined as follows. The layer structure of the high abrasion resistant particles 230 is selected from one, two, and three or more layers. The particle size of the high abrasion resistant particles 230 is marked by the size of the sieve mesh, and is selected from the range of # 800 to # 1500. The particle diameter of the high abrasion resistant particles 230 is selected from the range of 5 μm to 30 μm. Among the binders, nickel or an alloy containing nickel is preferably used. The thickness of the protective layer 220 is selected from a range of 5 μm to 30 μm.

(Example)
A test was performed to evaluate the performance of the holder unit 100 and the reference holder unit of the embodiment. In the following description, the symbols associated with the holder unit 100 according to the embodiment are omitted. The travel distance of the scribing wheel is described as the wheel travel distance.

In this test, the sound level of the sound generated by the friction between the inner peripheral surface of the wheel and the outer peripheral surface of the pin and the amount of wear of the outer peripheral surface of the pin are measured, and the performance of the holder unit is comprehensively evaluated based on the respective results. The types of comprehensive evaluation are X and Y. Based on the comprehensive evaluation of the holder unit of X, even when the wheel travels a long distance, a workpiece of appropriate quality can also be obtained. Based on the comprehensive evaluation of the holder unit of Y, there is a concern that the quality of the workpiece will be reduced when the wheel travel distance is long. However, when grasping the relationship between the wheel travel distance and the quality of the workpiece, and using the holder unit that is comprehensively evaluated as Y based on the processing conditions of the workpiece to obtain the appropriate quality, it will not occur during the actual scribe process Special obstacles.

In the test, a test machine capable of scanning the scribe wheel is used in a condition similar to that of the scribe wheel walking on the surface of the workpiece. A holder unit of a measurement object is set on the testing machine. The scoring wheel of the provided holder unit contacts the roller of the testing machine. By rotating the roller, the scribe wheel is rotated, and the scribe wheel is scanned under a condition similar to the scanning of the scribe wheel during the actual scribe process.

For sound level measurement, a vibration sensor installed on a test machine and a data logger that analyzes the measurement results of the vibration sensor are used. The vibration sensor measures the sound generated by the friction between the inner peripheral surface of the wheel and the outer peripheral surface of the pin. The measurement result of the vibration sensor is input into the data logger. The data logger performs frequency analysis on the measurement results of the vibration sensor and converts them into sound levels. The sound level is relative to the reference. As a reference, the sound level at the time point when the fiber is generated during the scoring process using the reference holder unit is set. In this test, the reference sound level was set to 5 which is the maximum level. The sound level is related to the stability of the rotation state of the scoring wheel. The higher the stability of the rotation state of the scoring wheel, the lower the sound level. The rotation state of the scribe wheel corresponding to the sound level of 4 and 5 is similar to the rotation state of the scribe wheel when the fiber is formed during the scoring process.

When measuring the amount of wear on the outer peripheral surface of the pin, a three-dimensional measuring machine was used. In order to measure the amount of wear, in each state where the wheel running distance is 0 m and the state where the wheel running distance reaches a predetermined running distance, a pin is pulled out from the holder unit, and the pin is set in a three-dimensional measuring machine. The contour of the outer peripheral surface of the pin was measured using a three-dimensional measuring machine. In the test using the reference holder unit, the predetermined walking distance is 3000 m. In the test using the holder unit of the embodiment, the predetermined walking distance was 11,000 m.

The amount of wear on the outer peripheral surface of the pin is confirmed based on the measurement result of the contour of the outer peripheral surface of the pin. Specifically, the abrasion of the pin outer peripheral surface is determined based on the difference between the contour of the pin outer peripheral surface when the wheel travel distance is 0 m and the contour of the pin outer peripheral surface when the wheel travel distance is a predetermined travel distance. the amount. The life of a pin is related to the amount of wear on the outer surface of the pin. In the case where the amount of wear on the outer peripheral surface of the pin is equal to or less than the reference amount, it can be determined that the pin has a predetermined life. Since the pins of the reference holder unit and the pins of the holder unit according to the embodiment are different in structure, the method of setting the reference wear amount is different. The reference abrasion amount related to the pin of the holder of the embodiment is mainly set based on the relationship with the predetermined walking distance and the thickness of the protective layer in the initial state of the pin. For example, when the predetermined walking distance corresponds to the predetermined life, the reference wear amount is at least less than the thickness of the protective layer in the initial state of the pin. When the predetermined walking distance is shorter than the predetermined life, the reference wear amount is set to be smaller.

Figure 12 shows an example of the test results. The holder units used in the test were two types of reference holder units and two holder units of two embodiments. The two types of reference holder units are described as measurement target A1 and measurement target A2, respectively. The holder units of the two embodiments are described as measurement target B1 and measurement target B2, respectively. The dimensions of the corresponding components in each of the measurement objects A1 to B2 are the same. Mirror surface processing was performed on the inner peripheral surfaces of the wheels for all measurement objects so that the arithmetic average roughness Ra of the inner peripheral surfaces of the wheels became 0.005 μm or less and the maximum height Rz became 0.05 μm or less. There is no lubrication between the inner peripheral surface of the wheel and the outer peripheral surface of the pin.

The test conditions related to the reference holder unit are as follows. The difference between the measurement objects A1 and A2 is the particle size and composition of the diamond particles constituting the pin. The other conditions related to the measurement targets A1 and A2 are the same. The scoring wheel and pin are diamond sintered bodies, respectively. The particle size of the diamond particles of the measurement object A1 is 1 μm or less. The particle size of the diamond particles of the measurement object A2 is 1 μm to 3 μm.

The test conditions related to the holder unit 100 according to the embodiment are as follows. The difference between the measurement objects B1 and B2 is the particle diameter of the high wear-resistant particles 230 and the initial state of the pin 200. The other conditions related to the measurement targets B1 and B2 are the same. The material of the pin body 210 is carbon tool steel. The type of the high wear-resistant particles 230 is diamond particles. The bonding layer 240 is a layer of nickel formed by electrolytic nickel plating. The particle diameter of the high abrasion resistant particle 230 of the pin 200 of the measurement object B1 was expressed as a particle size of # 1500. The initial state of the pin 200 of the measurement object B1 is an unprocessed state. The particle diameter of the high abrasion resistant particle 230 of the pin 200 of the measurement object B2 was expressed as a particle size of # 800. The initial state of the pin 200 of the measurement object B2 is a processed state. The grinding method is centerless processing using diamond abrasive particles.

The test results related to the measurement target A1 are as follows. When the wheel travels a distance of 100 m, the sound level is 1. When the wheel travels a distance of 1500 m, the sound level is 4. When the wheel travels a distance of 3000 m, the sound level is 5. When the wheel travels at a distance of 3000 m, the amount of wear on the outer peripheral surface of the pin is equal to or less than the standard amount of wear. However, the shape of the outer peripheral surface of the pin changes slightly according to the shape of the inner peripheral surface of the wheel. In the measurement object A1, the sound level may reach 4, 5; therefore, the comprehensive evaluation related to the performance of the holder unit is Y. In addition, since it was confirmed that the sound level reached 5 when the wheel traveling distance was 3000 m, the sound level was not measured for the case where the wheel traveling distance was longer than 3000 m. The diagonal lines in the figure indicate this situation.

The test results related to the measurement target A2 are as follows. When the wheel travels a distance of 100 m, the sound level is 2. When the wheel travel distance is 1500 m, the sound level is 3.5. When the wheel travels a distance of 3000 m, the sound level is 5. When the wheel travels at a distance of 3000 m, the amount of wear on the outer peripheral surface of the pin is equal to or less than the standard amount of wear. However, the shape of the outer peripheral surface of the pin changes slightly according to the shape of the inner peripheral surface of the wheel. In the measurement object A2, there may be a case where the sound level reaches 5, so the comprehensive evaluation related to the performance of the holder unit is Y. In addition, since it was confirmed that the sound level reached 5 when the wheel traveling distance was 3000 m, the sound level was not measured for the case where the wheel traveling distance was longer than 3000 m. The diagonal lines in the figure indicate this situation.

The test results related to the measurement target B1 are as follows. When the wheel travels a distance of 100 m, the sound level is 2. When the wheel travels a distance of 1500 m, the sound level is 1. When the wheel travels a distance of 3000 m, the sound level is 1. At wheel travel distances of 5000 m, 8000 m, and 11,000 m, the sound level is 0.5. When the wheel running distance is 11,000 m, the wear amount of the pin outer peripheral surface is equal to or less than the reference wear amount. Compared with the measurement objects A1 and A2, the shape of the pin outer peripheral surface changes little. In the measurement object B1, the maximum value of the sound level is 2, and the amount of wear on the outer peripheral surface of the pin is equal to or less than the amount of wear based on the reference. Therefore, the comprehensive evaluation related to the performance of the holder unit is X.

The reason why the sound level when the wheel travel distance is 5000 m, 8000 m, and 11000 m is lower than that when the wheel travel distance is 100 m, 1500 m, 3000 m is considered as follows. By contact with the inner peripheral surface of the wheel, the corners of the protruding portions of the particles wear, and the contact portion of the highly abrasion-resistant particles with the inner peripheral surface of the wheel changes in accordance with the shape of the inner peripheral surface of the wheel. The surface contact area is increased. Thereby, even if the scoring wheel rotates, it is changed to a state in which abrasion of highly abrasion-resistant particles does not substantially occur, or abrasion of high-abrasion-resistant particles is difficult to progress. decline.

The test results related to the measurement target B2 are as follows. For wheel travel distances of 100 m, 1500 m, 3000 m, 5000 m, 8000 m, and 11,000 m, the sound level is 0.5. When the wheel running distance is 11000 m, the wear amount of the pin outer peripheral surface is equal to or less than the reference wear amount. Compared with the measurement objects A1 and A2, the change in the shape of the pin outer peripheral surface is small. In the measurement object B2, the maximum value of the sound level is 0.5, and the amount of wear on the outer peripheral surface of the pin is equal to or less than the amount of wear based on the reference. Therefore, the comprehensive evaluation related to the performance of the holder unit is X.

(Modification)
The embodiment described above is an example of a form that the holder unit of the present invention can take, and is not intended to limit the form. The holder unit of the present invention may take a form different from that exemplified in the embodiment. One example is a form in which a part of the structure of the embodiment is replaced, changed, or omitted, or a new structure is added to the embodiment.

・ The cross-sectional shape of the pin 200 can be arbitrarily changed. In one example, the cross-sectional shape of the pin 200 is a polygon. Examples of the polygon are a quadrangle, a hexagon, and an octagon. The protective layer 220 is formed so as to cover the outer peripheral surface 211 of the polygonal pin body 210.

・ The shape of the high abrasion resistant particles 230 can be arbitrarily changed. In one example, the shape of the high wear-resistant particles 230 is a sphere.
・ The structure of the scoring wheel 120 can be changed arbitrarily. The portion other than the wheel inner peripheral surface 122 of the scoring wheel 120 is made of a material different from the highly wear-resistant material constituting the wheel inner peripheral surface 122. An example of the different materials is a highly wear-resistant material different from the highly wear-resistant material constituting the inner circumferential surface 122 of the wheel, or a super-hard alloy.

10‧‧‧ scoring device

100‧‧‧ holder unit

110‧‧‧ holder

111‧‧‧ base

112‧‧‧arm

112A‧‧‧Inner surface

112B‧‧‧ Outer surface

113‧‧‧space

114‧‧‧1st insertion hole

114A‧‧‧Inner opening

114B‧‧‧Outer opening

115‧‧‧Inner peripheral surface

120‧‧‧ Scribing Wheel

121‧‧‧ 2nd insertion hole (insertion hole of scoring wheel)

121A‧‧‧Middle

121B‧‧‧End

122‧‧‧Inner peripheral surface

123‧‧‧ side

140‧‧‧shell

200‧‧‧pin

201‧‧‧pin outer surface

202‧‧‧Front

210‧‧‧pin body

211‧‧‧outer surface

220‧‧‧ protective layer

221‧‧‧ surface

230‧‧‧High abrasion resistant particles

231‧‧‧ particle coating

232‧‧‧ particle protrusion

233‧‧‧ surface

235‧‧‧plane

240‧‧‧ bonding layer (layer of bonding agent)

241‧‧‧ surface

CB‧‧‧Center Axis (Center Axis of Insertion Hole)

CC‧‧‧center axis (center axis of pin)

RA, RB‧‧‧ diameter

RC‧‧‧Coarseness

DB‧‧‧Width direction

DC‧‧‧ height direction

FIG. 1 is a perspective view of a scoring device according to an embodiment.

FIG. 2 is a cross-sectional view of the holder unit of FIG. 1. FIG.

FIG. 3 is a sectional view of the pin of FIG. 2.

FIG. 4 is a model diagram of the protective layer in an unprocessed state.

FIG. 5 is a model diagram of the protective layer in a processed state.

FIG. 6 is a diagram showing a measurement result of the contour of the protective layer of FIG. 4 obtained by a three-dimensional measuring machine.

FIG. 7 is a diagram showing a measurement result of the contour of the protective layer of FIG. 5 obtained by a three-dimensional measuring machine.

FIG. 8 is a model diagram of the protective layer and the like in a state where the walking distance of the first use form is short.

FIG. 9 is a model diagram of the protective layer and the like in a state where the walking distance of the first use form is long.

FIG. 10 is a model diagram of the protective layer and the like in a state where the walking distance of the second use form is short.

FIG. 11 is a model diagram of the protective layer and the like in a state where the walking distance of the second use form is long.

FIG. 12 is a diagram showing an example of test results.

Claims (10)

A holder unit having: Holder A pin supported by the holder; and A scoring wheel supported by the pin; The scoring wheel includes an insertion hole into which the pin is inserted; The inner peripheral surface of the scoring wheel defining the insertion hole is formed of a highly wear-resistant material, and the arithmetic average roughness Ra is 0.01 μm or less; The pin includes a pin body and a protective layer for protecting the outer surface of the pin body; The protective layer includes a plurality of highly abrasion-resistant particles having high abrasion resistance to the inner peripheral surface. A holder unit as described in claim 1, wherein The high-wear-resistant material includes at least one of diamond, cubic carbon nitride, hexagonal white carbonite, ultra-hard nanometer tube, and cubic boron nitride. The holder unit according to claim 1 or 2, wherein The plurality of high abrasion-resistant particles include at least one of diamond particles, cubic carbon nitride particles, hexagonal white carbonite particles, ultra-hard nanometer tube particles, and cubic boron nitride particles. The holder unit according to claim 1 or 2, wherein The highly abrasion resistant particles are abrasive particles. The holder unit according to claim 1 or 2, wherein The protective layer includes a layer of a binding agent that binds the highly abrasion-resistant particles to the outer peripheral surface of the pin body; The highly abrasion-resistant particles include a particle coating portion located inside the layer of the bonding agent, and a particle protruding portion protruding from the surface of the layer of the bonding agent. A holder unit as described in claim 5, wherein The front end of the particle protrusion is flat. A holder unit as described in claim 5, wherein The binder is nickel. The holder unit according to claim 1 or 2, wherein The scoring wheel is a diamond sintered body. The holder unit according to claim 1 or 2, wherein The diameter of the middle portion of the insertion hole in the direction along the center axis of the insertion hole is narrower than the diameter of the end portion of the insertion hole in the direction along the center axis of the insertion hole. A holder unit as described in claim 9, wherein In a cross section of the scoring wheel that is parallel to the direction along the center axis of the insertion hole and passes through the center axis of the insertion hole, the shape of the inner peripheral surface is a drum shape.