TW202004877A - Holder unit and scribing method capable of keeping the scribing wheel stable and enhancing quality of the workpiece to be scribed - Google Patents

Abstract

The invention enhances the quality of a workpiece to be scribed. A holder unit 100 includes a holder 110, a pin supported by the holder 110, and a scribing wheel 120 supported to the pin 200. The scribing wheel 120 includes a second insertion hole 121 inserted by the pin 200. A wheel inner circumferential surface 122 of the scribing wheel 120 defining the second insertion hole 121 is formed by high-abrasion resistant material. A diameter of an intermediate portion of the second insertion hole 121 is narrower than a diameter of an end portion of the second insertion hole 121. The pin 200 comprises a pin body and a protection layer 220 for protecting the outer periphery surface of the pin body. The protection layer 220 comprises a plurality of highly abrasion-resistant particles having high abrasion resistance with respect to the wheel inner circumferential surface 122.

Description

Retainer unit and scoring method

The invention relates to a holder unit and a scoring method used for scoring processing.

The scribing device is used to form a scribing line for a workpiece such as a brittle material substrate. The scoring device includes a holder unit. The holder unit is provided with a scoring wheel for scoring the workpiece. In the scoring process, in a state where the scoring wheel is pressed against the surface of the object to be processed, the object to be processed and the scoring wheel relatively move to form a scribe line on the object to be processed. In addition, as an example of a conventional scribing device, Patent Document 1 can be cited. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2017-119348

[Problems to be solved by the invention]

When a conventional scoring device is used to scribe a workpiece, the thickness of the workpiece in the thickness direction of the workpiece that is generated along with the formation of the scribe line is the vertical crack formation state. The relevant quality is reduced. As an example of a case where the quality is low, a different formation state may be cited for the depth of the crack at the position of the score line. It is believed that this is related to the unstable rotation of the scoring wheel during the scoring process. [Technical means to solve the problem]

(1) The holder unit of the present invention includes: a holder, a pin supported by the holder, and a scoring wheel supported by the pin; the scoring wheel includes an insertion hole into which the pin is inserted, along the above The diameter of the middle portion of the insertion hole in the direction of the center axis of the insertion hole is narrower than the diameter of the end portion of the insertion hole in the direction along the center axis of the insertion hole, and the pin includes the pin body And a protective layer that protects the outer peripheral surface of the pin body, and the protective layer includes a plurality of highly wear-resistant particles with high wear resistance to the inner peripheral surface of the scoring wheel that defines the insertion hole.

The rotation state of the scoring wheel during the scoring process affects the formation state of the crack formed on the workpiece with the scoring process. As one of the methods for improving the quality of the processed object subjected to the scoring process, a method of stabilizing the rotation of the scoring wheel during the scoring process can be cited. The state in which the rotation of the scoring wheel is stable refers to, for example, a state in which the rotational impedance of the scoring wheel does not change, or a state in which the variation range of the rotational impedance is small. The resistance generated by the contact portion between the inner peripheral surface of the scoring wheel and the outer peripheral surface of the pin affects the rotation state of the scoring wheel. It is believed that the smaller the impedance, the more stable the rotation state of the scoring wheel, and the higher the quality of the processed object after scoring.

As a method of reducing the impedance generated by the contact portion, for example, the inner peripheral surface of the scribing wheel (hereinafter referred to as "wheel inner peripheral surface") and the outer peripheral surface of the pin (hereinafter referred to as "pin outer peripheral surface" may be cited ") The method of the respective surface roughness, or the method of reducing the contact area between the inner peripheral surface of the wheel and the outer peripheral surface of the pin. The inventor of the present application observed the quality of the workpiece to be scribed according to the method using the holder unit (hereinafter referred to as "reference holder unit"). The specific structure of the reference holder unit is as follows. The scoring wheel and pin are respectively diamond sintered body. In order to sufficiently reduce the surface roughness of the inner peripheral surface of the wheel and the surface roughness of the outer peripheral surface of the pin, the respective surfaces are polished. For the inner circumferential surface of the wheel, mirror surface processing is performed to further reduce the surface roughness, and the shape of the inner circumferential surface of the wheel is such that the diameter of the middle portion of the insertion hole is narrower than the diameter of the end portion of the insertion hole.

As a result of scoring the workpiece under various processing conditions, it was confirmed that the actual quality of the workpiece is inferior to the expected quality of the surface roughness of the wheel inner peripheral surface and the pin outer peripheral surface. Specifically, in a state where the running distance of the scoring wheel relative to the workpiece exceeds a certain walking distance, there is a scoring accompanied by minute cracks extending in a direction different from the thickness direction of the workpiece The case where the thread is formed on the workpiece. This crack is called a horizontal crack. In parts where horizontal cracks occur in the workpiece, the surface of the workpiece may peel off. The state where the surface of the workpiece is peeled is called fiber. In the state where the running distance of the scoring wheel relative to the workpiece exceeds a certain walking distance, an example where the progress of vertical cracks formed on the workpiece is insufficient is also found. When the object to be processed is cut along the scribe line, the quality of the cut part may be deteriorated. Even if the surface roughness which greatly affects the impedance of the contact portion between the inner peripheral surface of the wheel and the outer peripheral surface of the pin is small, the reason why the quality of the workpiece is degraded is considered as follows, for example.

Since the surface roughness of the inner circumferential surface of the wheel and the outer circumferential surface of the pin are extremely small, and the contact area is also small, at the beginning of scoring, at the friction surface of the inner circumferential surface of the wheel and the outer circumferential surface of the pin, the diamond particles contained in the sintered diamond The contact area is enlarged, and the area contacted by the sintering aid containing metal such as cobalt or tungsten, which appears slowly on the friction surface due to abrasion, is enlarged, and aggregation is likely to occur. The part condensed on the friction surface imparts resistance to the rotation of the scoring wheel. Due to the instability of the rotation state of the scoring wheel due to the impedance, it is considered that the conditions for forming a normal scoring line are unstable, The quality of the processed object is reduced.

According to the view that the smaller the surface roughness and the smaller the contact area, the smaller the resistance to rotation. It is considered that the method of mirror processing the inner circumferential surface of the wheel in order to reduce the rotation resistance of the scoring wheel itself is effective. However, it is estimated that the cause of the change in the rotational resistance due to wear is caused between the inner circumferential surface of the wheel and the outer circumferential surface of the pin based on the problem of the combination with the outer circumferential surface of the pin that is in contact with its inner circumferential surface. It is believed that this phenomenon occurs because: the surface roughness of both the inner peripheral surface of the wheel forming the friction surface and the outer peripheral surface of the pin is sufficiently small; and the scoring wheel and pin are diamond sintered bodies, respectively, and have the same degree of hardness.

The inventor of the present application maintains a method of mirror-finishing the inner peripheral surface of the wheel, instead of using a pin of a diamond sintered body with a small surface roughness on the outer peripheral surface of the pin, and uses a protective layer formed on the outer peripheral surface of the pin body as a base material The pin constitutes the holder unit of the present invention. The protective layer contains a plurality of highly wear-resistant particles with high wear resistance to the inner circumferential surface of the wheel. The state of high wear resistance to the inner circumferential surface of the wheel means that when the wear is caused by contact with the inner circumferential surface of the wheel formed of a highly wear-resistant material, the pin also has a predetermined life And the state of being worn slowly, or the state of not wearing at all.

As a result of observing the quality of the workpiece to be scribed using the holder unit of the present invention, it was confirmed that the quality of the workpiece was improved. The reasons for obtaining such results are considered as follows, for example. On the outer peripheral surface of the pin of the holder unit of the present invention, unlike the outer peripheral surface of the pin of the reference holder unit, a gap is formed between a plurality of high wear-resistant particles constituting the protective layer, and the high wear-resistant particles account for The proportion increases. Therefore, the state of the friction surface between the inner circumferential surface of the wheel and the outer circumferential surface of the pin made of the protective layer is different from the state of the friction surface of the inner circumferential surface of the wheel of the reference holder unit and the outer circumferential surface of the pin. Due to this difference, it is difficult to produce strong agglomeration on the friction surface, the increase in the rotational resistance of the scoring wheel during the scoring process is suppressed, and the rotational state of the scoring wheel is stable. In addition, since the contact area between the inner circumferential surface of the wheel and the outer circumferential surface of the pin becomes narrow, the inclination of the scoring wheel caused by the surface properties of the inner circumferential surface of the wheel is suppressed. In this respect, the stability of the rotation state of the scoring wheel is also improved.

(2) In one example of the holder unit, in the cross section of the scoring wheel parallel to the direction along the center axis of the insertion hole and passing through the center axis of the insertion hole, the shape of the inner peripheral surface is Drum shape. There are cases where, during the scoring process, a reaction force is generated on the scoring wheel that includes components along the direction of the center axis of the insertion hole. This reaction force acts to tilt the scoring wheel relative to the pin. In the above-mentioned holder unit, since the shape of the inner peripheral surface of the insertion hole is a drum shape, it is difficult to produce a scoring wheel when a reaction force including a component along the direction of the center axis is generated on the scoring wheel tilt.

(3) In one example of the holder unit, the high-wear-resistant material includes at least one of diamond, cubic carbon nitride, hexagonal white carbon, ultra-hard nanotube, and cubic boron nitride. Therefore, the wear resistance of the inner circumferential surface of the wheel is further improved.

(4) In one example of the above-mentioned retainer unit, the plurality of high wear-resistant particles include diamond particles, cubic carbon nitride particles, hexagonal white carbon particles, ultra-hard nanotube particles, and cubic nitrogen At least one of the particles of boron. Therefore, the wear resistance of the protective layer is further improved.

(5) In one example of the above-mentioned holder unit, the high-wear-resistant particles are abrasive particles. Since the abrasive particles used in the grinding stone can be used to manufacture the protective layer, the manufacturing cost is reduced.

(6) In one example of the retainer unit, the protective layer includes a layer of a bonding agent that bonds the high wear-resistant particles to the outer peripheral surface of the pin body, and the high wear-resistant particles include a layer located on the bonding agent The particle coating part inside and the particle protrusion part protruding from the surface of the above-mentioned binder layer. The high-abrasion resistant particles are bound to the outer peripheral surface of the pin body by the particle coating portion through the layer of the bonding agent. Therefore, the outer peripheral surface of the pin body is properly protected. The particle protrusion contacts the inner circumferential surface of the wheel. Therefore, it is difficult to wear the protective layer.

(7) In one example of the holder unit, the front end of the particle protrusion is flat. The inner peripheral surface of the wheel contacts the particle protrusion of the protective layer. During the scoring process, the scoring wheel rotates relative to the pin, and the inner peripheral surface of the wheel and the front end of the particle protrusion form a friction surface. As the scoring wheel rotates, the particle protrusions wear out. In the holder unit described above, since the front end of the particle protruding portion is a flat surface, the abrasion proceeds slowly compared to the case where the front end of the particle protruding portion is sharp. Therefore, in the initial state, compared with the case where the pin with the sharp protrusion of the particle is used, when the running distance of the scoring wheel reaches a certain walking distance, the pin wears less, and it is difficult to form a deep surface on the outer surface of the pin groove.

(8) In one example of the holder unit, the bonding agent is nickel. Therefore, electroplating can be used to manufacture the protective layer.

(9) In one example of the holder unit, the scoring wheel is a diamond sintered body. Therefore, high-quality scoring processing can be performed on various workpieces.

(10) In addition, the scoring method of the present invention is a scoring method that scans the scoring wheel supported on the pin on the surface of the workpiece, characterized in that the scoring wheel includes an insertion hole into which the pin is inserted, The diameter of the middle portion of the insertion hole in the direction of the center axis of the insertion hole is narrower than the diameter of the end portion of the insertion hole in the direction of the center axis of the insertion hole, and the outer peripheral surface of the pin It includes a plurality of highly wear-resistant particles, and when the scoring wheel rotates with respect to the pin, the front end of the high-wear-resistant particle forms a friction surface with the inner circumferential surface of the scoring wheel. In the scoring method of the present invention, since the front end of the highly wear-resistant particles on the outer peripheral surface of the pin and the highly wear-resistant material on the inner peripheral surface of the wheel form a friction surface, it is difficult to produce strong agglomeration, and the scoring wheel during the scoring process The increase in the rotation resistance is suppressed, and the rotation state of the scoring wheel is stable.

An example of technology related to the holder unit of the present invention will be described. (A) A pin for a scoring wheel, which supports a scoring wheel. The pin includes a pin body and a protective layer that protects the outer peripheral surface of the pin body. The protective layer includes a majority of the wear resistance to the inner peripheral surface. High abrasion resistant particles, the protective layer includes a layer of a bonding agent that binds the high abrasion resistant particles to the outer peripheral surface of the pin body, and the high abrasion resistant particles include particles located inside the layer of the bonding agent The covering portion and the particle protrusion portion protruding from the surface of the bonding agent layer, and the front end of the particle protrusion portion is flat. (B) In an example of the pin of the scoring wheel described above, the plurality of high wear-resistant particles include diamond particles, cubic carbon nitride particles, hexagonal white carbon particles, ultra-hard nanotube particles and cubic particles At least one of the particles of crystalline boron nitride. (C) In one example of the pin of the scoring wheel, the high-wear-resistant particles are abrasive particles. (D) A method of manufacturing a pin for a scoring wheel. The pin supports the scoring wheel. The method includes: forming a protective layer that protects the outer peripheral surface of the pin body of the pin and includes wear resistance A plurality of high wear-resistant particles and a layer of a bonding agent that binds the high wear-resistant particles to the outer peripheral surface of the pin body; and protrudes from the surface of the layer of the bonding material of the high wear-resistant particles The step of grinding the particle protrusions. [Effect of invention]

According to the present invention, the quality of the workpiece to be scribed can be improved, and the holder unit can be used for a longer period of time.

(Implementation form) The scoring device moves the scoring wheel and the workpiece relatively while pressing the scoring wheel against the workpiece to form a scoring line on the surface of the workpiece. This action of the scoring device is called scanning of the scoring wheel. The scanning method of the scribing wheel is mainly divided into three methods. In the first scanning method, the position of the scoring wheel is maintained during the scoring process, and the workpiece is conveyed to the scoring wheel. As the workpiece is transported, the scoring wheel scans relatively on the surface of the workpiece in a predetermined scanning direction. In the second scanning method, the position of the processed object is maintained during the scoring process, and the scoring wheel scans the processed object in a predetermined scanning direction. In the third scanning method, the first scanning method and the second scanning method are combined, and the scoring wheel scans the workpiece in a predetermined scanning direction.

An example of the workpiece is a brittle material substrate. An example of a brittle material substrate is a glass substrate and a ceramic substrate. An example of a glass substrate is an alkali-free glass substrate. The alkali-free glass substrate formed of the brittle material substrate is used for flat panel displays, for example. An example of a flat panel display is the display of a television receiver and the display of a smartphone.

FIG. 1 shows an example of a scoring device 10 configured so that a workpiece such as a brittle material substrate can be scribed with an appropriate quality. The scoring device 10 forms a scribe line on the workpiece W by transporting the workpiece W to the scoring wheel 120. The main components constituting the scoring device 10 are the conveying device 20 and the processing device 30. The conveying device 20 includes a rail 21, a platform 22, a linear drive mechanism 23, a rotary drive mechanism 24, and a vacuum suction device 25. In the following description, the direction in which the workpiece W is transported is referred to as the transport direction DA, and the direction orthogonal to the transport direction DA in the plan view of the scoring device 10 is referred to as the width direction DB, and the transport direction DA and the width direction The direction orthogonal to DB is called the height direction DC. The transport direction DA includes a first transport direction and a second transport direction opposite thereto. The width direction DB includes the first width direction and the opposite second width direction. The height direction DC includes above and below.

In the illustrated example, a pair of rails 21 are arranged on the base (not shown) of the scribing device 10. The shape of the rail 21 is a straight line that defines the transport direction DA. One of the rails 21 and the other rail 21 are arranged at a certain interval in the width direction DB. The platform 22 is divided into a slider 22A, a pillar 22B, and a top plate 22C. The slider 22A is connected to each rail 21 so as to be movable along the rail 21. The pillar 22B forms a hollow part in such a manner that other elements can be arranged inside, and is provided on the slider 22A. The top plate 22C is a part for arranging the workpiece W, and is provided on the pillar 22B.

The linear drive mechanism 23 moves the platform 22 relative to the rail 21. The linear drive mechanism 23 is composed of, for example, a motor 23A and a feed screw 23B. The motor 23A is arranged on the base (not shown) of the scribing device 10. The output shaft of the motor 23A is connected to the feed screw 23B so that the feed screw 23B rotates around the rotation center axis of the motor 23A. The feed screw 23B is arranged between the pair of rails 21. The longitudinal direction of the feed screw 23B is parallel to the longitudinal direction of the rail 21. The slider 22A is connected to the feed screw 23B so as to move in the longitudinal direction of the feed screw 23B as the feed screw 23B rotates. When the motor 23A rotates, the feed screw 23B rotates, and the table 22 moves in the first conveyance direction or the second conveyance direction relative to the rail 21 according to the rotation direction of the feed screw 23B.

The rotation drive mechanism 24 and the vacuum suction device 25 are arranged in the pillar 22B. The rotation driving mechanism 24 rotates the top plate 22C relative to the support 22B around a center axis parallel to the height direction DC. The vacuum suction device 25 attracts the workpiece W arranged on the top plate 22C to the top plate 22C. The scoring process is performed in a state where the workpiece W is adsorbed by the vacuum suction device 25.

The processing device 30 includes a vertical frame 31, a horizontal frame 32, a scoring head 33, a holder joint 34, a holder unit 100, a horizontal drive mechanism 35, and a vertical drive mechanism 36. The vertical frame 31, the horizontal frame 32, the scoring head 33, and the holder joint 34 are made of metal suitable for various functions, for example.

In the example shown in the figure, a pair of vertical frames 31 are arranged on a base (not shown) of the scribing device 10. The longitudinal direction of the vertical frame 31 is parallel to the height direction DC. The pair of vertical frames 31 are arranged on the outer side of each rail 21 in the width direction DB so as to sandwich the pair of rails 21. The horizontal frame 32 is provided between the pair of vertical frames 31. The longitudinal direction of the horizontal frame 32 is parallel to the width direction DB. The horizontal frame 32 is fixed to each vertical frame 31. The guide 32A is provided on the horizontal frame 32. The guide 32A is, for example, a groove parallel to the longitudinal direction of the horizontal frame 32.

The scoring head 33 is a base that supports the holder joint 34. The scoring head 33 is connected to the guide 32A so as to be movable in the width direction DB along the lateral frame 32. The holder joint 34 is connected to the lower part of the scoring head 33. The retainer joint 34 is configured so that the retainer unit 100 can be detached.

The horizontal drive mechanism 35 moves the scoring head 33 relative to the horizontal frame 32 in the width direction DB. The horizontal drive mechanism 35 includes, for example, a motor 35A and a feed screw 35B. The motor 35A is provided on one of the vertical frames 31. The output shaft of the motor 35A is connected to the feed screw 35B so that the feed screw 35B rotates around the rotation center axis of the motor 35A. The feed screw 35B is arranged in the lateral frame 32. The longitudinal direction of the feed screw 35B is parallel to the longitudinal direction of the lateral frame 32. The scoring head 33 is connected to the feed screw 35B so as to move in the longitudinal direction of the feed screw 35B as the feed screw 35B rotates. When the motor 35A rotates, the feed screw 35B rotates, and the scoring head 33 moves in the first width direction or the second width direction relative to the horizontal frame 32 according to the rotation direction of the feed screw 35B. The holder joint 34 and the holder unit 100 move integrally with the scoring head 33 in the width direction DB.

The vertical drive mechanism 36 is provided on the scoring head 33. The vertical drive mechanism 36 includes a first drive mechanism 36A and a second drive mechanism 36B. The first drive mechanism 36A moves the scoring head 33 in the height direction DC. The second driving mechanism 36B moves the holder joint 34 relative to the scoring head 33 to apply a scoring load to the workpiece W. The first drive mechanism 36A includes, for example, a motor and a feed screw. The output shaft of the motor is connected to the feed screw in such a manner that the feed screw rotates around the rotation central axis of the motor. The longitudinal direction of the feed screw is parallel to the height direction DC. The scoring head 33 is connected to the feed screw so as to move in the longitudinal direction of the feed screw as the feed screw rotates. By the rotation of the motor, the feed screw rotates, and the scoring head 33 moves above or below the guide 32A according to the rotation direction of the feed screw. The holder unit 100 moves in the height direction DC integrally with the holder joint 34. The second drive mechanism 36B includes, for example, an air cylinder or a servo motor, and a linear motion mechanism. The second drive mechanism 36B is arranged in the scoring head 33. The cylinder or servo motor moves the linear motion mechanism in the height direction DC. The retainer joint 34 is mounted on the linear motion mechanism. The linear motion mechanism and the holder joint 34 move integrally in the height direction DC.

FIG. 2 shows the structure of the holder unit 100 in a cross section parallel to the width direction DB and the height direction DC. The main components constituting the holder unit 100 are the holder 110, the scoring wheel 120, and the pin 200. The base 111 is detachable with respect to the holder joint 34. The pin 200 is supported on the holder 110, and is prevented from falling off, for example, by a fall prevention mechanism such as a housing 140. The scoring wheel 120 is supported on the pin 200. An example of the material constituting the holder 110 and the housing 140 is magnetic metal. The materials constituting the holder 110 and the housing 140 can be individually selected. An example of the materials constituting the scoring wheel 120 are: sintered diamond (Poly Crystalline Diamond), cemented carbide, single crystal diamond and polycrystalline diamond. The materials constituting the scoring wheel 120 can be individually selected.

The holder 110 is divided into a base 111 and a pair of arms 112. The shape of the base 111 is a cylinder or a corner post. A pair of arms 112 extend downward from the lower part of the base 111. The longitudinal direction of the arm 112 is parallel to the height direction DC. In the width direction DB, between the inner surface 112A of one arm 112 and the inner surface 112A of the other arm 112, a space 113 for forming the scoring wheel 120 is formed. The distance between the inner surface 112A of one arm 112 and the inner surface 112A of the other arm 112 in the width direction DB is slightly wider than the thickness of the scoring wheel 120. The first insertion hole 114 into which the pin 200 is inserted is formed in each arm 112. The first insertion hole 114 is a circular hole penetrating the arm 112 in the width direction DB. The inner peripheral surface 115 formed on the arm 112 defines the first insertion hole 114. The first insertion hole 114 has an inner opening 114A opened on the inner surface 112A of the arm 112 and an outer opening 114B opened on the outer surface 112B of the arm 112.

The scoring wheel 120 is disposed in the space 113 between the pair of arms 112. A second insertion hole 121 into which the pin 200 is inserted is formed in the scoring wheel 120. The second insertion hole 121 is a circular hole penetrating the scoring wheel 120 in the thickness direction. The inner circumferential surface 122 (hereinafter referred to as “wheel inner circumferential surface 122 ”) formed on the scoring wheel 120 defines the second insertion hole 121. The inner circumferential surface 122 of the wheel is formed of a highly wear-resistant material. The wheel inner peripheral surface 122 is mirror-finished. The arithmetic average roughness Ra of the mirror-processed wheel inner peripheral surface 122 is smaller than the arithmetic average roughness Ra of the surface subjected to normal finishing. In one example, the arithmetic average roughness Ra of the wheel inner circumferential surface 122 is 0.01 μm or less. In a preferred example, the arithmetic average roughness Ra of the inner circumferential surface 122 of the wheel is 0.005 μm or less, and the maximum height Rz is 0.05 μm or less. The high wear resistance material includes at least one of diamond, cubic carbon nitride, hexagonal white carbonite, ultra-hard nanotubes, and cubic boron nitride. In one example, the scoring wheel 120 is a diamond sintered body, and the entire scoring wheel 120 including a high wear-resistant material forming the inner circumferential surface 122 of the wheel includes a diamond sintered body.

The pin 200 is inserted into the first insertion hole 114 of each arm 112 and the second insertion hole 121 of the scoring wheel 120 in a non-pressed state with respect to each of the holder 110 and the scoring wheel 120. The thickness RC of the pin 200 is smaller than the diameter RA of the first insertion hole 114 and the diameter RB of the second insertion hole 121. The length of the pin 200 is slightly shorter than the distance between the opening 114B outside one of the first insertion holes 114 and the opening 114B outside the other first insertion hole 114 in the width direction DB.

The shape of the inner circumferential surface 122 of the wheel can be arbitrarily selected. In one example, the diameter of the middle portion 121A of the second insertion hole 121 in the direction of the center axis CB of the second insertion hole 121 of the scoring wheel 120 is smaller than that of the center axis CB of the second insertion hole 121 The diameter of the end 121B of the second insertion hole 121 in the direction is narrow. In this embodiment, the diameter of the middle portion 121A of the second insertion hole 121 which is the smallest diameter portion of the wheel inner peripheral surface 122 and the diameter of the end portion 121B of the second insertion hole 121 which is the largest diameter portion of the wheel inner peripheral surface 122 The difference is, for example, 0.1 μm or more and 1.0 μm or less, and more preferably 0.1 μm or more and 0.5 μm or less. In the cross section of the scoring wheel parallel to the thickness direction of the scoring wheel and passing through the center axis of the insertion hole, the shape of the inner peripheral surface is a drum shape. Specifically, the wheel inner peripheral surface 122 is curved so as to swell toward the center axis center CB as it goes from each side surface 123 toward the center of the scoring wheel 120 in the direction along the center axis center CB. The relationship between the inner circumferential surface 122 of the wheel and the outer circumferential surface 201 of the pin is substantially linear contact, or surface contact with a small contact area. During the scoring process, a reaction force is generated on the scoring wheel 120 that includes components along the direction of the center axis CB. This reaction force acts to incline the scoring wheel 120 relative to the pin 200. When the scoring wheel 120 is inclined, the rotation center plane of the scoring wheel 120 orthogonal to the center axis CB is not orthogonal to the center axis CC of the pin 200. In the holder unit 100, since the inner circumferential surface 122 of the wheel is a curved surface as described above, it is difficult to cause the inclination of the scoring wheel 120 during the scoring process.

The housing 140 is formed separately from the holder 110. The housing 140 is fixed to the holder 110 by a fixing mechanism so that the opening 114B outside the first insertion hole 114 can be opened and closed. An example of a fixing mechanism is a screw. The housing 140 closes part or all of the opening 114B except the first insertion hole 114 in such a manner that the front end 202 of the pin 200 does not fly out of the first insertion hole 114. In the illustrated example, the housing 140 closes a part of the opening 114B outside the first insertion hole 114.

The scoring device 10 can replace the scoring wheel 120. Examples of the replacement method of the scoring wheel 120 include the first replacement method and the second replacement method. In the first replacement method, the housing 140 is first removed from the holder 110. Next, the pin 200 is pulled out of the holder 110, and the scoring wheel 120 is taken out of the space 113 of the holder 110. Next, the new scoring wheel 120 is arranged in the space 113 of the holder 110, and the pin 200 is inserted into the first insertion hole 114 of the arm 112 and the second insertion hole 121 of the scoring wheel 120. The thickness of the scoring wheel 120 is thinner than the interval between the arms 112, so the operation of replacing the scoring wheel 120 can be easily performed. When it is necessary to replace the pin 200, the pin 200 is not pulled out from the holder 110, but a new pin 200 is inserted into the first insertion hole 114 and the second insertion hole 121. Since the pin 200 is constructed in such a manner that it can be inserted into the holder 110 and the scoring wheel 120 in a non-pressed state, the pin 200 can be easily pulled out and inserted relative to the holder 110.

The second replacement method is selected when the pin 200 is held on the holder 110 by using an anti-dropping mechanism with a different structure instead of the housing 140. For example, the anti-falling mechanism includes a claw part coupled with the holder 110. In a state where the claw portion is combined with the holder 110, the anti-dropping mechanism is fixed to the holder 110, and the opening and closing operation with respect to the holder 110 cannot be performed. In the second replacement method, in a state where the scoring wheel 120 and the pin 200 are held on the holder 110, they are replaced as an integrated holder unit 100. Specifically, initially, the holder unit 100 is removed from the holder joint 34. Next, the new holder unit 100 is mounted on the holder joint 34.

In the state before the start of the scoring process step, the vertical drive mechanism 36 holds the holder unit 100 at a predetermined position in the height direction DC so that the scoring wheel 120 does not contact the workpiece W. With the start of the scoring process step, the scoring wheel 120 contacts the surface of the workpiece W, and the vertical drive mechanism 36 moves the holder unit 100 downward from a predetermined position in the height direction DC. In a state where the scoring wheel 120 contacts the surface of the workpiece W, the vertical drive mechanism 36 determines the position of the holder unit 100 in the height direction DC by applying a predetermined load to the workpiece W by the scoring wheel 120 .

FIG. 3 is a cross-sectional view of the pin 200. The pin 200 includes a pin body 210 and a protective layer 220 that protects the outer peripheral surface 211 of the pin body 210. The surface 221 of the protective layer 220 constitutes the outer peripheral surface 201 of the pin 200, that is, the outer peripheral surface 201 of the pin. The pin body 210 is cylindrical. The protective layer 220 covers the outer peripheral surface 211 of the pin body 210. In a preferred example, in the outer peripheral surface 211 of the pin body 210, a protective layer 220 is provided over the entire portion where there is a possibility of contact with the inner peripheral surface 122 of the scoring wheel 120. In the example shown in FIG. 2, a protective layer 220 is provided on the entire outer peripheral surface 211 of the pin body 210.

The protective layer 220 includes a plurality of highly wear-resistant particles 230 with high wear resistance to the wheel inner circumferential surface 122 (see FIG. 4 ). In a preferred example, the protective layer 220 is formed so that the pin 200 has a predetermined life. The predetermined life is defined by, for example, the distance that the scoring wheel 120 travels on the workpiece W by scoring. The state of high wear resistance to the inner circumferential surface 122 of the wheel means that when the abrasion occurs due to contact with the inner circumferential surface 122 of the wheel formed of diamond, the pin 200 has a predetermined life. The state of being worn slowly, or the state of not being substantially worn.

FIG. 4 is a model diagram of a pin 200 related to a state where a protective layer 220 is formed on a pin body 210 as a base material, and the protective layer 220 is not polished (hereinafter referred to as “unprocessed state of the pin 200”). In the example shown in the figure, the shape of the plurality of highly wear-resistant particles 230 is the same, and the plurality of highly wear-resistant particles 230 are arranged on the outer peripheral surface 211 of the pin body 210. However, in the actual protective layer 220, each high-wear resistance The shapes of the particles 230 are different, and there are many highly wear-resistant particles 230 on the outer peripheral surface 211 of the pin body 210 irregularly.

The type of high wear-resistant particles 230 can be selected at will. In one example, the plurality of high wear-resistant particles 230 includes at least one of particles of diamond, particles of cubic carbon nitride, particles of hexagonal white carbonite, particles of ultra-hard nanotubes, and particles of cubic crystal boron nitride By. In the example shown in the figure, many of the highly wear-resistant particles 230 are particles of diamond. An example of a material constituting diamond particles is single crystal diamond and polycrystalline diamond. The material constituting the pin body 210 can be arbitrarily selected. In one example, the hardness of the material constituting the pin body 210 is lower than the hardness of the high wear resistant particles 230. One example is super hard alloy, steel and stainless steel. The type of hardness is, for example, Knoop hardness.

The protective layer 220 further includes a layer 240 of a bonding agent (hereinafter referred to as a “bonding layer 240”) that bonds the highly wear-resistant particles 230 to the outer peripheral surface 211 of the pin body 210. The bonding layer 240 covers the outer peripheral surface 211 of the pin body 210. The structure of the bonding layer 240 can be arbitrarily selected. In one example, the bonding layer 240 is an electroplated layer formed by electrical plating. One example of the type of bonding agent is nickel, and alloys containing nickel. In the illustrated example, the bonding layer 240 is made of nickel. The bonding layer 240 is an electroplated layer formed by electrolytic nickel plating.

The high wear resistant particles 230 are bonded to the outer peripheral surface 211 of the pin body 210 by the bonding layer 240. In this connection, the high wear resistant particles 230 are retained on the outer peripheral surface 211 in such a way that the high wear resistant particles 230 can protect the pin body 210. The high-abrasion-resistant particles 230 include a particle coating portion 231 inside the bonding layer 240 and a particle protrusion 232 protruding from the surface 241 of the bonding layer 240. In one example, the high-wear-resistant particles 230 are abrasive particles. There are many corners 234 and many planes 235 on the surface 233 of the highly wear-resistant particles 230. In the unprocessed state of the pin 200, most of the high-abrasion-resistant particles 230 take a posture where the angle 234 is located at the front end of the particle protrusion 232.

The initial state of the pin 200 constituting the holder unit 100 can be arbitrarily selected. The initial state of the pin 200 refers to the state of the pin 200 in the unused holder unit 100. An example of the selected initial state is a processed state in which the protective layer 220 has been polished, and an unprocessed state in which the protective layer 220 has not been polished. For the layer containing abrasive grains, the grinding process for fast grinding is usually performed, but the grinding process for the protective layer 220 of the pin 200 is a process for reducing the surface roughness of the protective layer 220. As the grinding process, for example, a grinding process for grinding the protective layer 220 while holding the center of the pin 200 with a jig or the like, and a grinding process for the protective layer 220 without holding the center of the pin 200 No central grinding.

FIG. 5 is a model diagram of the protective layer 220 after grinding. In the polished protective layer 220, the front end of the particle protrusion 232 is a flat surface 235. During the grinding process, the high-abrasion resistance particles 230 change the posture of the high-abrasion resistance particles 230 by the force received from the grinding stone. Most of the high-abrasion resistance particles 230 take the plane 235 and are located at the front end of the particle protrusion 232 Pose. Alternatively, the corner 234 of the particle protrusion 232 is removed by grinding to form a plane 235 on the particle protrusion 232. The surface 221 of the protective layer 220 is composed of a plurality of planes 235 by generating one or both of the change in posture of the highly wear-resistant particles 230 and the formation of the plane 235 in the particle protrusion 232. In addition, by grinding, a part of the plurality of highly wear-resistant particles 230 is squeezed into the pin body 210. The posture of the high-abrasion-resistant particles 230 is substantially the same as before the grinding process, and the angle 234 is located at the front end of the particle protrusion 232.

The amount of the high-wear-resistant particles 230 at the front end of the particle protrusion 232 protruding from the bonding layer 240 is greater than the amount of the high-wear-resistant particles 230 at the front end of the particle protrusion 232 from the bonding before the grinding process The amount of protrusion in layer 240 is small. The amount of the high-wear-resistant particles 230 at the front end of the particle protrusion 232 protruding from the bonding layer 240 and the high-wear-resistant particles 230 at the front end of the particle protrusion 232 from the bonding layer 240 after the grinding process The amount of protrusion is roughly equal.

FIG. 6 is an example of a result of measuring the contour of the protective layer 220 in a raw state using a three-dimensional measuring machine. FIG. 7 is an example of a result of measuring the contour of the protective layer 220 in a finished state using a three-dimensional measuring machine. According to the measurement results shown in FIG. 6, it can be confirmed that there are many corners 234 of the particle protrusions 232 on the surface of the protective layer 220 in the unprocessed state. According to the measurement result of FIG. 7, it can be confirmed that there are a plurality of flat surfaces 235 of the particle protrusions 232 on the surface of the protective layer 220 in the finished state.

The use form of the holder unit 100 can be selected from, for example, the first use form and the second use form. The first use form is to select the unprocessed state as the use form of the initial state of the pin 200. The second usage form selects the finished state as the usage form of the initial state of the pin 200. The use form of the holder unit 100 can be selected according to the type of the pin 200 provided on the holder 110.

FIG. 8 shows a state where the running distance of the scoring wheel 120 in the first usage form is short. The state where the walking distance is short means, for example, a state where the walking distance is 0 m or more and less than the reference distance. The reference distance is, for example, a walking distance of about 10% of the life required by a normal pin. In a state where the running distance of the scoring wheel 120 is short, the inner circumferential surface 122 of the wheel is in contact with the corner 234 of the plurality of particle protrusions 232. With the rotation of the scoring wheel 120 during the scoring process, the inner circumferential surface 122 of the wheel rubs against the corner 234 of the particle protrusion 232, the corner 234 of the particle protrusion 232 wears out, and the particle protrusion 232 and the wheel The contact portion of the circumferential surface 122 gradually changes in accordance with the shape of the inner circumferential surface 122 of the wheel.

FIG. 9 shows a state where the scoring wheel 120 in the first use form has a long walking distance. The state in which the walking distance is long refers to, for example, a state in which the walking distance is greater than the reference distance. In the state where the running distance of the scoring wheel 120 is long, the contact portion of the particle protrusion 232 with the wheel inner circumferential surface 122 is modeled on the surface 236 of the wheel inner circumferential surface 122. The contact area between the highly wear-resistant particles 230 in the surface 236 and the wheel inner peripheral surface 122 is increased compared to the state where the running distance of the scoring wheel 120 is short. Therefore, as the running distance of the scoring wheel 120 becomes longer, the amount of wear of the high-abrasion resistant particles 230 gradually decreases with increasing travel distance. In addition, when the amount of wear of the particle protrusion 232 is large, a part of the bonding layer 240 is also worn. The bonding layer 240 is sufficiently low in hardness compared to the highly wear-resistant particles 230, and is removed by contact with the scoring wheel 120. Among the plurality of particle protrusions 232, the state of the particle protrusions 232 not in contact with the wheel inner peripheral surface 122 is the same as the initial state.

FIG. 10 shows a state where the running distance of the scoring wheel 120 in the second usage form is short. In a state where the running distance of the scoring wheel 120 is short, the inner circumferential surface 122 of the wheel is in contact with the plane 235 of the plurality of particle protrusions 232. In the case where the particle protrusion 232 including the angle 234 at the front end is included, there is also a case where the inner circumferential surface 122 of the wheel contacts the angle 234. With the rotation of the scoring wheel 120 during the scoring process, the wheel inner circumferential surface 122 rubs against the particle protrusion 232, the contact portion of the particle protrusion 232 with the wheel inner circumferential surface 122 wears, but the The use form is different, and the surface of the protective layer 220 is composed of a plurality of planes 235, so compared with the first use form, the amount of change in shape due to wear is smaller.

FIG. 11 shows a state where the scoring wheel 120 in the second usage form has a long walking distance. Since the amount of wear of the particle protrusion 232 is small, the relationship between the inner circumferential surface 122 of the wheel and the protective layer 220 is also substantially the same as the state where the running distance of the scoring wheel 120 is short when the running distance of the scoring wheel 120 is long.

The dimensions of each part of the holder unit 100 are determined as follows, for example. The outer diameter of the scoring wheel 120 is selected from the range of 1 mm to 7 mm. In one example, the outer diameter of the scoring wheel 120 is 2 mm. The thickness of the scoring wheel 120 is selected from the range of 0.4 mm to 1.2 mm. In one example, the thickness of the scoring wheel 120 is 0.64 mm. The interval of the arms 112 in the width direction DB is selected from the range of 0.4 mm to 1.3 mm. In one example, the interval between the arms 112 is 0.66 mm. The diameter RA of the first insertion hole 114 is selected from the range of 0.4 mm to 1.5 mm. In one example, the diameter RA of the first insertion hole 114 is 0.8 mm. The diameter RB of the second insertion hole 121 is selected from the range of 0.4 mm to 1.5 mm. In one example, the diameter RB of the second insertion hole 121 is 0.8 mm. The thickness RC of the pin 200 is selected from the range of 0.4 mm to 1.5 mm. In one example, the thickness RC of the pin 200 is 0.77 mm.

In one example, the specifications of the protective layer 220 are determined as follows. The layer structure of the high-abrasion resistant particles 230 is selected from among multiple layers of one layer, two layers, and three or more layers. The particle size of the high-abrasion resistant particles 230 is marked by the size of the sieve, and is selected from the range of #800 to #1500. The particle size of the high wear-resistant particles 230 is selected from the range of 5 μm to 30 μm. Nickel or an alloy containing nickel is preferably used as the binder. The thickness of the protective layer 220 is selected from the range of 5 μm to 30 μm.

(Example) A test was performed to evaluate the performance of the holder unit 100 and the reference holder unit of the embodiment. In the following description, the symbols associated with the holder unit 100 of the embodiment are omitted. In addition, the traveling distance of the scribing wheel is described as the traveling distance of the wheel.

In this test, the sound level of the sound generated by the friction between the inner peripheral surface of the wheel and the outer peripheral surface of the pin and the amount of wear of the outer peripheral surface of the pin are measured, and based on the respective results, the performance of the retainer unit is comprehensively evaluated. The types of comprehensive evaluation are X and Y. According to the cage unit with comprehensive evaluation of X, the workpiece with proper quality can be obtained even when the wheel travel distance is long. According to the cage unit with a comprehensive evaluation of Y, there is a concern that the quality of the workpiece will be degraded when the wheel travel distance is long. However, when grasping the relationship between the wheel travel distance and the quality of the workpiece, and using the cage unit with a comprehensive evaluation of Y based on the processing conditions of the workpiece with the appropriate quality, it does not occur during the actual scoring process Special obstacles.

In the test, a test machine that can scan the scoring wheel is used under conditions similar to the situation where the scoring wheel walks on the surface of the workpiece. Install the holder unit of the measurement object on the testing machine. The scoring wheel of the set holder unit contacts the roller of the testing machine. By the rotation of the roller, the scoring wheel rotates, and the scoring wheel is scanned under conditions similar to the scanning of the scoring wheel during actual scoring processing.

In the measurement of the sound level, a vibration sensor installed on the testing machine and a data recorder that analyzes the measurement result of the vibration sensor are used. The vibration sensor measures the sound generated by the friction between the inner circumferential surface of the wheel and the outer circumferential surface of the pin. The measurement result of the vibration sensor is input into the data recorder. The data recorder performs frequency analysis on the measurement results of the vibration sensor and converts them into sound levels. The sound level is relative to the reference. For reference, set the sound level at the time point when the fiber is generated during the scoring process of the reference holder unit. In this test, the reference sound level was set to 5 as the maximum level. The sound level is related to the stability of the rotating state of the scoring wheel. The higher the stability of the rotating state of the scoring wheel, the lower the sound level. The rotation state of the scoring wheel corresponding to the sound levels of 4 and 5 is similar to the rotation state of the scoring wheel when the fiber is formed during the scoring process.

A three-dimensional measuring machine is used to measure the amount of wear on the outer surface of the pin. In order to measure the amount of wear, in each state where the wheel travel distance is 0 m and the wheel travel distance reaches the predetermined travel distance, the pin is pulled out from the holder unit and the pin is set in the three-dimensional measuring machine. A three-dimensional measuring machine is used to measure the contour of the outer peripheral surface of the pin. In the test using the reference holder unit, the predetermined walking distance was 3000 m. In the test using the retainer unit of the embodiment, the predetermined walking distance was 11000 m.

Confirm the amount of wear on the outer peripheral surface of the pin based on the measurement results of the contour of the outer peripheral surface of the pin. Specifically, based on the difference between the contour of the outer peripheral surface of the pin when the wheel travel distance is 0 m and the contour of the outer peripheral surface of the pin when the wheel travel distance is a predetermined travel distance, the wear of the outer peripheral surface of the pin is obtained the amount. The life of the pin is related to the amount of wear on the outer surface of the pin. When the wear amount of the outer peripheral surface of the pin is equal to or less than the reference wear amount, it can be determined that the pin has a predetermined life. Since the pin of the reference holder unit and the pin of the holder unit of the embodiment have different structures, the setting method of the reference wear amount is different. The reference wear amount related to the pin of the retainer unit of the embodiment is mainly set according to the relationship with the predetermined walking distance and the thickness of the protective layer in the initial state of the pin. For example, when the predetermined walking distance corresponds to the predetermined life, the reference wear amount is at least less than the thickness of the protective layer in the initial state of the pin. When the predetermined walking distance is shorter than the predetermined life, the reference wear amount is set to be smaller.

Figure 12 shows an example of the test results. The holder unit used in the test is a total of four types of two types of reference holder units and two types of holder units. The two types of reference holder units are described as measurement target A1 and measurement target A2, respectively. The holder units of the two embodiments are described as measurement target B1 and measurement target B2, respectively. The dimensions of the corresponding elements in the measurement objects A1 to B2 are the same. Mirror surface processing was performed on the inner circumferential surfaces of all the measurement objects so that the arithmetic average roughness Ra of the inner circumferential surfaces of the wheels became 0.005 μm or less and the maximum height Rz became 0.05 μm or less. There is no lubrication between the inner circumferential surface of the wheel and the outer circumferential surface of the pin.

The test conditions related to the reference holder unit are as follows. The difference between the measurement objects A1 and A2 is the particle size and composition of the diamond particles constituting the pin. Other conditions related to the measurement objects A1 and A2 are the same. The scoring wheel and pin are respectively diamond sintered body. The diameter of the diamond particles of the measurement object A1 is 1 μm or less. The diameter of the diamond particles of the measurement object A2 is 1 μm to 3 μm.

The test conditions related to the holder unit 100 of the embodiment are as follows. The differences between the measurement objects B1 and B2 are the particle size of the high-wear-resistant particles 230 and the initial state of the pin 200. The other conditions related to the measurement objects B1 and B2 are the same. The material of the pin body 210 is carbon tool steel. The type of high wear-resistant particles 230 is diamond particles. The bonding layer 240 is a layer of nickel formed by electrolytic nickel plating. The particle size of the highly wear-resistant particles 230 of the pin 200 of the measurement object B1 is represented by the particle size as #1500. The initial state of the pin 200 of the measurement object B1 is an unprocessed state. The particle size of the high wear-resistant particles 230 of the pin 200 of the measurement object B2 is expressed as the particle size #800. The initial state of the pin 200 of the measuring object B2 is the finished state. The method of grinding processing is centerless processing using diamond abrasive grains.

The test results related to the measurement object A1 are as follows. When the wheel travel distance is 100 m, the sound level is 1. When the wheel travel distance is 1500 m, the sound level is 4. When the wheel travel distance is 3000 m, the sound level is 5. The wear amount of the outer peripheral surface of the pin when the wheel travel distance is 3000 m is less than the reference wear amount, but the shape of the outer peripheral surface of the pin changes slightly according to the shape of the inner peripheral surface of the wheel. In the measurement object A1, there are cases where the sound level reaches 4 or 5, so the comprehensive evaluation related to the performance of the holder unit is Y. In addition, since it is confirmed that the sound level reaches 5 when the wheel travel distance is 3000 m, the sound level is not measured for the case where the wheel travel distance is longer than 3000 m. The diagonal lines in the figure indicate this situation.

The test results related to the measurement object A2 are as follows. When the wheel travel distance is 100 m, the sound level is 2. When the wheel travel distance is 1500 m, the sound level is 3.5. When the wheel travel distance is 3000 m, the sound level is 5. The wear amount of the outer peripheral surface of the pin when the wheel travel distance is 3000 m is less than the reference wear amount, but the shape of the outer peripheral surface of the pin changes slightly according to the shape of the inner peripheral surface of the wheel. In the measurement object A2, the sound level may reach 5, so the comprehensive evaluation related to the performance of the holder unit is Y. In addition, since it is confirmed that the sound level reaches 5 when the wheel travel distance is 3000 m, the sound level is not measured for the case where the wheel travel distance is longer than 3000 m. The diagonal lines in the figure indicate this situation.

The test results related to the measurement object B1 are as follows. When the wheel travel distance is 100 m, the sound level is 2. When the wheel travel distance is 1500 m, the sound level is 1. When the wheel travel distance is 3000 m, the sound level is 1. When the wheel travel distance is 5000 m, 8000 m, and 11000 m, the sound level is 0.5. When the wheel travel distance is 11000 m, the wear amount of the outer peripheral surface of the pin is equal to or less than the reference wear amount, and the change in the shape of the outer peripheral surface of the pin is small compared with the measurement objects A1 and A2. In the measurement object B1, the maximum value of the sound level is 2, and the wear amount of the outer peripheral surface of the pin is equal to or less than the reference wear amount, so the comprehensive evaluation related to the performance of the holder unit is X.

The reason why the sound level when the wheel travel distance is 5000 m, 8000 m, and 11000 m is lower than the wheel travel distance of 100 m, 1500 m, and 3000 m is considered as follows. By contact with the inner peripheral surface of the wheel, the corner of the particle protrusion wears out, and the contact portion of the highly wear-resistant particles with the inner peripheral surface of the wheel changes in accordance with the shape of the inner peripheral surface of the wheel. The contact area of the surface is increased. By this, the state is changed to a state in which the wear of the high-wear-resistant particles is not substantially produced even if the scoring wheel rotates, or the state in which the wear of the high-wear-resistant particles is difficult to proceed. decline.

The test results related to the measurement object B2 are as follows. When the wheel travel distance is 100 m, 1500 m, 3000 m, 5000 m, 8000 m, or 11000 m, the sound level is 0.5. When the wheel travel distance is 11000 m, the wear amount of the outer peripheral surface of the pin is equal to or less than the reference wear amount, and the change in the shape of the outer peripheral surface of the pin is small compared with the measurement objects A1 and A2. In the measurement object B2, the maximum value of the sound level is 0.5, and the wear amount on the outer peripheral surface of the pin is equal to or less than the reference wear amount, so the comprehensive evaluation related to the performance of the retainer unit is X.

(Modification) The above-mentioned embodiments are examples of the forms that the holder unit of the present invention can take, and are not intended to limit the forms. The holder unit of the present invention may take a form different from the form exemplified in the embodiments. An example of this is a configuration in which a part of the configuration of the embodiment is replaced, changed, or omitted, or a configuration in which a new configuration is added to the embodiment.

・The cross-sectional shape of the pin 200 can be changed arbitrarily. In one example, the cross-sectional shape of the pin 200 is a polygon. An example of a polygon is a quadrangle, hexagon, and octagon. The protective layer 220 is formed to cover the outer peripheral surface 211 of the polygonal pin body 210.

・The shape of high wear resistant particles 230 can be changed arbitrarily. In one example, the shape of the highly wear-resistant particles 230 is a ball. ・The structure of the scribing wheel 120 can be changed arbitrarily. The part other than the inner circumferential surface 122 of the scoring wheel 120 is made of a material different from the highly wear-resistant material constituting the inner circumferential surface 122 of the wheel. An example of a different material is a highly wear-resistant material different from the highly wear-resistant material constituting the inner circumferential surface 122 of the wheel, or a cemented carbide.

10‧‧‧scoring device 100‧‧‧Cage unit 110‧‧‧Retainer 111‧‧‧Dock 112‧‧‧arm 112A‧‧‧Inner surface 112B‧‧‧Outer surface 113‧‧‧Space 114‧‧‧First insertion hole 114A‧‧‧Inner opening 114B‧‧‧Outer opening 115‧‧‧Inner peripheral surface 120‧‧‧Scribe wheel 121‧‧‧Second insertion hole (insert hole for scoring wheel) 121A‧‧‧Middle 121B‧‧‧End 122‧‧‧Inner peripheral surface 123‧‧‧Side 140‧‧‧Housing 200‧‧‧pin 201‧‧‧pin outer peripheral surface 202‧‧‧ Front 210‧‧‧pin body 211‧‧‧Perimeter 220‧‧‧Protective layer 221‧‧‧Surface 230‧‧‧High wear resistance particles 231‧‧‧Particle coating 232‧‧‧Particle protrusion 233‧‧‧surface 235‧‧‧plane 240‧‧‧Combination layer (layer of bonding agent) 241‧‧‧Surface CB‧‧‧Center axis (center axis of insertion hole) CC‧‧‧Center axis (center axis of pin) RA, RB‧‧‧ Diameter RC‧‧‧Coarseness DB‧‧‧Width direction DC‧‧‧ Height direction W‧‧‧Worked

Fig. 1 is a perspective view of a scoring device according to an embodiment. 2 is a cross-sectional view of the holder unit of FIG. 1. FIG. 3 is a cross-sectional view of the pin of FIG. 2. Fig. 4 is a model diagram of a protective layer in an unprocessed state. Figure 5 is a model diagram of the protective layer in the finished state. 6 is a graph showing the measurement results of the contour of the protective layer of FIG. 4 obtained by a three-dimensional measuring machine. 7 is a graph showing the measurement results of the contour of the protective layer of FIG. 5 obtained by a three-dimensional measuring machine. FIG. 8 is a model diagram of a protective layer and the like in a state where the walking distance in the first usage form is short. FIG. 9 is a model diagram of a protective layer and the like in a state where the walking distance in the first usage form is long. Fig. 10 is a model diagram of a protective layer and the like in a state where the walking distance in the second usage form is short. Fig. 11 is a model diagram of a protective layer and the like in a state where the walking distance in the second usage form is long. Fig. 12 is a diagram showing an example of test results.

100‧‧‧Cage unit

110‧‧‧Retainer

111‧‧‧Dock

112‧‧‧arm

112A‧‧‧Inner surface

112B‧‧‧Outer surface

113‧‧‧Space

114‧‧‧First insertion hole

114A‧‧‧Inner opening

114B‧‧‧Outer opening

115‧‧‧Inner peripheral surface

120‧‧‧Scribe wheel

121‧‧‧Second insertion hole (insert hole for scoring wheel)

121A‧‧‧Middle

121B‧‧‧End

122‧‧‧Inner peripheral surface

123‧‧‧Side

140‧‧‧Housing

200‧‧‧pin

201‧‧‧pin outer peripheral surface

202‧‧‧ Front

220‧‧‧Protective layer

221‧‧‧Surface

CB‧‧‧Center axis (center axis of insertion hole)

CC‧‧‧Center axis (pin center axis)

RA, RB‧‧‧ Diameter

RC‧‧‧Coarseness

DB‧‧‧Width direction

DC‧‧‧ Height direction

W‧‧‧Worked

Claims (10)

A retainer unit with: Retainer Sales, supported by the above holder; and Scribing wheel, supported by the above pin; and The scoring wheel includes an insertion hole into which the pin is inserted; The diameter of the middle portion of the insertion hole in the direction of the center axis of the insertion hole is narrower than the diameter of the end of the insertion hole in the direction of the center axis of the insertion hole, The pin includes a pin body and a protective layer protecting the outer peripheral surface of the pin body, The protective layer includes a plurality of highly wear-resistant particles having high wear resistance to the inner peripheral surface of the scoring wheel that defines the insertion hole. The holder unit according to claim 1, wherein In a cross section of the scoring wheel parallel to the direction along the center axis of the insertion hole and passing through the center axis of the insertion hole, the shape of the inner peripheral surface is a drum shape. The holder unit according to claim 1 or 2, wherein The inner peripheral surface of the scoring wheel that defines the insertion hole is formed of a high-wear-resistant material including diamond, cubic carbon nitride, hexagonal white carbonite, ultra-hard nanotubes, and cubic At least one of crystalline boron nitride. The holder unit according to claim 1 or 2, wherein The plurality of high wear-resistant particles include at least one of particles of diamond, particles of cubic carbon nitride, particles of hexagonal white carbonite, particles of ultra-hard nanotubes, and particles of cubic crystal boron nitride. The holder unit according to claim 1 or 2, wherein The high wear-resistant particles are abrasive particles. The holder unit according to claim 1 or 2, wherein The protective layer includes a layer of a bonding agent that bonds the highly wear-resistant particles to the outer peripheral surface of the pin body, The high-abrasion-resistant particles include a particle coating part located inside the layer of the bonding agent, and a particle protrusion part protruding from the surface of the layer of the bonding agent. The holder unit according to claim 6, wherein The front end of the particle protrusion is flat. The holder unit according to claim 6, wherein The binding agent is nickel. The holder unit according to claim 1 or 2, wherein The scoring wheel is a diamond sintered body. A scoring method that scans the scoring wheel supported on the pin on the surface of the object to be processed, characterized by: The scoring wheel includes an insertion hole into which the pin is inserted, The diameter of the middle portion of the insertion hole along the direction of the center axis of the insertion hole is narrower than the diameter of the end portion of the insertion hole along the direction of the center axis of the insertion hole, The outer peripheral surface of the above pin contains many highly wear-resistant particles, When the scoring wheel rotates with respect to the pin, the front end of the high-wear-resistant particles forms a friction surface with the inner peripheral surface of the scoring wheel.

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