KR20190122556A - Holder unit - Google Patents

Abstract

The present invention provides a holder unit capable of improving the quality of an object to be processed by being scribed. The holder unit (100) includes: a holder (110); a pin (200) supported by the holder (110); and a scribing wheel (120) supported on the pin (200). The scribing wheel (120) includes a second insertion hole (121) in which the pin (200) is inserted. The wheel′s inner circumference (122) of the scribing wheel (120) defining the second insertion hole (121) is formed of a high wear-resistant material. An arithmetic mean illumination (Ra) of the wheel′s inner circumference (122) is equal to or less than 0.01 μm. The pin (200) includes: a pin body; and a protection layer (220) protecting the outer circumference of the pin body. The protection layer (220) includes multiple high wear-resistant particles with the high wear resistance on the wheel′s inner circumference (122).

Description

Holder unit {HOLDER UNIT}

The present invention relates to a holder unit used for scribing.

A scribe device is used to form scribe lines for workpieces such as brittle material substrates. The scribe device has a holder unit. The holder unit has a scribing wheel for scribing the workpiece. In scribing, the workpiece and the scribing wheel are relatively moved while the scribing wheel is pressed against the surface of the workpiece, and a scribe line is formed on the workpiece. Moreover, patent document 1 is mentioned as an example of the conventional scribe apparatus.

JP 2017-119348 A

When the workpiece is scribed by a conventional scribing apparatus, the quality of the vertical crack, which is a crack in the thickness direction of the workpiece generated in the workpiece, may decrease depending on the formation of the scribe line. As an example in the case of low quality, the formation state in which the crack depth differs for every site | part of a scribe line is mentioned. This is considered to be related to the instability of rotation of the scribing wheel during scribing.

(1) The holder unit according to the present invention includes a holder, a pin supported on the holder, and a scribing wheel supported on the pin, wherein the scribing wheel includes an insertion hole into which the pin is inserted, The inner circumferential surface of the scribing wheel defining the insertion hole is formed of a high wear resistant material, and has an arithmetic mean roughness Ra of 0.01 µm or less, and the pin protects the pin body and the outer circumferential surface of the pin body. And a protective layer including a plurality of high wear resistant particles having high wear resistance with respect to the inner circumferential surface.

The rotation state of the scribing wheel at the time of scribing process affects the formation state of the crack formed in a to-be-processed object according to scribing process. As a method for improving the quality of the scribed workpiece, a method of stabilizing rotation of the scribing wheel during scribing may be mentioned. The stable rotation of the scribing wheel is, for example, a state in which the rotational resistance of the scribing wheel does not vary, or a state in which the variation in the rotational resistance is minute. Resistance generated at the contact portion between the inner circumferential surface of the scribing wheel and the outer circumferential surface of the pin affects the rotational state of the scribing wheel. The smaller this resistance is, the more stable the rotation state of the scribing wheel is, and it is believed that the quality of the scribed workpiece is improved.

As a method of reducing the resistance generated in the contact portion, for example, the surface roughness of each of the inner circumferential surface of the scribing wheel (hereinafter referred to as "wheel inner circumferential surface") and the outer circumferential surface of the pin (hereinafter referred to as "pin outer circumferential surface") The method of making small can be mentioned. The inventors observed the quality of the scribed workpiece using a holder unit (hereinafter referred to as "reference holder unit") following this method. The specific configuration of the reference holder unit is as follows. The scribing wheel and the pin are each diamond sintered body. Polishing was performed on each surface so that the surface roughness of the inner peripheral surface of the wheel and the surface roughness of the outer peripheral surface of the pin were sufficiently small. For the inner circumferential surface of the wheel, mirror processing was performed to make the surface roughness smaller.

As a result of scribing the workpiece under various processing conditions, it was confirmed that the quality of the actual workpiece may be inferior to the quality expected for the small surface roughness of the wheel inner circumferential surface and the pin outer circumferential surface. Specifically, in a state in which the mileage of the scribing wheel with respect to the workpiece exceeds a certain mileage, a scribe line accompanying minute cracks extending in a direction different from the thickness direction of the workpiece may be formed in the workpiece. There was a case. This crack is called a horizontal crack. In the part where the horizontal crack generate | occur | produced in the to-be-processed object, the surface of a to-be-processed object may peel. The state where the surface of the workpiece is peeled off is called fiber. In the state where the traveling distance of the scribing wheel with respect to the workpiece exceeded a certain traveling distance, the progress of the vertical crack formed in the workpiece was also insufficient. When this workpiece is segmented along the scribe line, the quality of the segmented part may be degraded. In spite of the small surface roughness which greatly affects the resistance of the contact portion between the wheel inner circumferential surface and the pin outer circumferential surface, the quality of the workpiece is considered as follows.

Due to the extremely small surface roughness of the inner circumferential surface of the wheel and the outer circumferential surface of the pin, and the difference is small, the area where the diamond particles contained in the sintered diamond contact at the friction surface of the inner circumferential surface of the wheel and the outer circumferential surface of the pin is large at the time of scribing start. Due to the abrasion, the area where the sintering aid containing metal such as cobalt and tungsten gradually appear on the friction surface is in contact, and adhesion is likely to occur. Since the portion adhered to the friction surface imparts resistance to the rotation of the scribing wheel and the instability of the rotation state of the scribing wheel due to this resistance, the conditions for forming a normal scribe line formation are not stable. As a result, the quality of the workpiece is deteriorated.

According to the finding that the smaller the surface roughness, the lower the resistance to rotation, the approach itself of mirror processing the inner circumferential surface of the wheel to reduce the rotational resistance of the scribing wheel is considered effective. However, from the problem of the combination of the pin outer peripheral surface which is the object which contacts the inner peripheral surface, it is estimated that the factor which changes rotational resistance by abrasion between a wheel inner peripheral surface and a pin outer peripheral surface has arisen. The occurrence of this phenomenon is related to the fact that the surface roughness of both the inner circumferential surface of the wheel and the outer circumferential surface forming the friction surface is sufficiently small, and that the scribing wheel and the pin are diamond sintered bodies and have the same hardness. Is considered.

The inventor of this invention maintains the method of mirror-processing the inner peripheral surface of a wheel, and uses the pin which provided the protective layer in the outer peripheral surface of the pin main body which is a base material instead of the pin of the diamond sintered compact whose surface roughness of a pin outer peripheral surface is small, The holder which concerns on this invention The unit was configured. The protective layer includes a plurality of high wear resistant particles having high wear resistance with respect to the inner circumferential surface of the wheel. The high wear resistance of the inner circumferential surface of the wheel means that the wear progresses smoothly so as to have a predetermined life even when abrasion occurs due to contact with the inner circumferential surface of the wheel formed of a high wear-resistant material, or substantially no wear. Means status.

As a result of observing the quality of the workpiece scribed using the holder unit according to the present invention, it was confirmed that the quality of the workpiece was improved. The reason why such a result was obtained is considered as follows, for example. In the pin outer peripheral surface of the holder unit according to the present invention, unlike the pin outer peripheral surface of the reference holder unit, a gap is formed between a large number of high wear resistant particles constituting the protective layer, and the ratio of the high wear resistant particles is increased. For this reason, the shape of the friction surface of the pin outer peripheral surface comprised by the wheel inner peripheral surface and a protective layer differs from the shape of the friction surface of the wheel inner peripheral surface and the pin outer peripheral surface of a reference holder unit. From this difference, strong adhesion hardly occurs on the friction surface, an increase in the rotational resistance of the scribing wheel at the time of scribing is suppressed, and the rotation state of the scribing wheel is stable. In addition, since the arithmetic mean roughness Ra of the inner circumferential surface of the wheel is 0.01 µm or less, an increase in the frictional resistance due to the surface roughness is suppressed in the friction surface of the inner circumferential surface of the wheel and the outer circumferential surface of the pin, and the rotation of the scribing wheel is also suppressed. The stability of the state is increased.

(2) In one example of the holder unit, the high wear resistant material contains at least one of diamond, cubic carbon nitride, lonsdaleite, superhard nanotubes and cubic boron nitride.

For this reason, wear resistance of the inner peripheral surface of a wheel becomes higher.

(3) In one example of the holder unit, the plurality of high wear resistant particles include at least one of diamond particles, cubic carbon nitride particles, lonsdalite particles, superhard nanotube particles, and cubic boron nitride particles.

For this reason, the wear resistance of a protective layer becomes higher.

(4) In an example of the said holder unit, the said high wear resistant particle is an abrasive grain.

Since a protective layer can be manufactured using the abrasive grain used for a grindstone, manufacturing cost falls.

(5) In one example of the holder unit, the protective layer includes a layer of a binder that binds the high wear resistant particles to the outer circumferential surface of the fin body, wherein the high wear resistant particles are located inside the layer of the binder. An abdomen, and particle protrusions protruding from the surface of the layer of binder.

The high wear resistant particles are bonded to the outer circumferential surface of the pin body via the layer of the binder in the particle covering portion. For this reason, the outer peripheral surface of a pin main body is suitably protected. The particle protrusions contact the inner circumferential surface of the wheel. For this reason, abrasion of a protective layer is hard to advance.

(6) In an example of the said holder unit, the front-end | tip of the said particle | grain protrusion part is flat. The inner circumferential surface of the wheel contacts the particle protrusion of the protective layer. In scribing, the scribing wheel rotates with respect to the pin, and the inner circumferential surface of the wheel and the tip of the particle protrusion form a friction surface. Rotation of the scribing wheel wears out the particle protrusions. In the holder unit, since the tip of the particle protrusion is flat, wear progresses more smoothly than when the tip of the particle protrusion is sharp. For this reason, compared with the case where the particle | grain protrusion part used the pointed pin in the initial state, when the traveling distance of the scribing wheel reached | attached a fixed running distance, the amount of abrasion of the pin was small and a deep groove | channel on the outer peripheral surface of a pin was made. It is difficult to form.

(7) In one example of the holder unit, the binder is nickel.

For this reason, a protective layer can be manufactured using electroplating.

(8) In an example of the said holder unit, the said scribing wheel is a diamond sintered compact.

For this reason, high quality scribe processing can be performed with respect to various to-be-processed objects.

(9) In the example of the said holder unit, the diameter of the intermediate part of the said insertion hole in the direction along the center axis center of the said insertion hole is the diameter of the edge part of the said insertion hole in the direction along the center axis center of the said insertion hole. Narrower than

Since the contact area between the wheel inner circumferential surface and the pin outer circumferential surface becomes narrow, the inclination of the scribing wheel due to the surface properties of the wheel inner circumferential surface is suppressed.

(10) In the example of the said holder unit, in the cross section of the said scribing wheel parallel to the direction along the center axis center of the said insertion hole, and passing through the center axis center of the said insertion hole, the shape of the said inner peripheral surface is a drum shape. .

In the scribing process, a reaction force may be generated in the scribing wheel including the component in the direction along the center axis of the insertion hole. This reaction forces the scribing wheel to tilt against the pin. In the holder unit, since the shape of the inner circumferential surface of the insertion hole is in the shape of a book, the inclination of the scribing wheel is less likely to occur even when a reaction force including a component in the direction along the central axis occurs on the scribing wheel.

An example of the technique which concerns on the holder unit of this invention is described.

(A) a pin of a scribing wheel for supporting a scribing wheel, the pin including a pin body and a protective layer protecting an outer circumferential surface of the pin body, wherein the protective layer has high wear resistance to the inner circumferential surface. A plurality of high wear resistant particles, wherein the protective layer comprises a layer of a binder for bonding the high wear resistant particles to the outer peripheral surface of the fin body, the high wear particles are a particle coating portion located inside the layer of the binder And particle projections protruding from the surface of the layer of binder, the tip of the particle projections being planar.

(B) In one example of the fin of the scribing wheel, the plurality of highly wear resistant particles comprise at least one of diamond particles, cubic carbon nitride particles, lonsdalite particles, superhard nanotube particles, and cubic boron nitride particles. .

(C) In an example of the pin of the scribing wheel, the highly wear-resistant particles are abrasive grains.

(D) A method of manufacturing a pin of a scribing wheel for supporting a scribing wheel, wherein the outer peripheral surface of the pin body of the pin is protected, and a large number of high wear resistance particles and the high wear resistance particles are formed in the pin body. Forming a protective layer comprising a layer of a binder bonded to an outer circumferential surface, and polishing a particle protrusion protruding from the surface of the layer of the bonding material among the high wear resistant particles.

According to the present invention, the quality of the workpiece to be scribed is improved, and the holder unit can be used for a longer period of time.

1 is a perspective view of a scribe device of an embodiment;
2 is a cross-sectional view of the holder unit of FIG. 1.
3 is a cross-sectional view of the pin of FIG.
4 is a model diagram of a protective layer in a raw state.
5 is a model diagram of a protective layer in a process completed state;
6 is a view showing a measurement result of the profile of the protective layer of FIG. 4 by a three-dimensional measuring instrument.
7 is a view showing a measurement result of the profile of the protective layer of FIG. 5 by a three-dimensional measuring instrument.
Fig. 8 is a model diagram of a protective layer or the like in which a travel distance according to a first use form is short.
Fig. 9 is a model diagram of a protective layer or the like in which the mileage according to the first use mode is long.
Fig. 10 is a model view of a protective layer or the like in which the mileage according to the second use mode is short.
Fig. 11 is a model diagram of a protective layer or the like in which the mileage according to the second use mode is long.
12 shows an example of a test result.

Embodiment

The scribing apparatus forms a scribe line on the surface of the workpiece by relatively moving the scribing wheel and the workpiece while the scribing wheel is pressed against the workpiece. This operation in the scribe device is referred to as scanning of the scribing wheel. The scanning method of the scribing wheel is mainly classified into three methods. In the first scanning method, the position of the scribing wheel is maintained at the time of scribing, and the workpiece is conveyed with respect to the scribing wheel. By conveying the workpiece, the scribing wheel is scanned in a relatively predetermined scanning direction on the surface of the workpiece. In the second scanning method, the position of the workpiece is maintained during scribing, and the scribing wheel is scanned in the predetermined scanning direction with respect to the workpiece. In the third scanning method, the first scanning method and the second scanning method are combined, and the scribing wheel is scanned in the predetermined scanning direction with respect to the workpiece.

One example of the workpiece is a brittle material substrate. Examples of brittle material substrates are glass substrates and ceramic substrates. An example of a glass substrate is an alkali free glass substrate. An alkali free glass substrate formed of a brittle material substrate is used for a flat panel display, for example. Examples of flat panel displays are displays of television receivers and displays of smartphones.

FIG. 1 shows an example of a scribing apparatus 10 configured to scribe a workpiece such as a brittle material substrate to an appropriate quality. The scribing apparatus 10 forms a scribe line in the to-be-processed object W by conveying the to-be-processed object W with respect to the scribing wheel 120. FIG. The central elements constituting the scribe device 10 are the conveying device 20 and the processing device 30. The conveying apparatus 20 is comprised by the rail 21, the table 22, the straight drive mechanism 23, the rotation drive mechanism 24, and the vacuum suction apparatus 25. As shown in FIG. In the following description, the direction in which the to-be-processed object W is conveyed is called conveyance direction DA, and the direction orthogonal to conveyance direction DA is called width direction DB when it sees from the plane of the scribing apparatus 10, The direction orthogonal to the conveyance direction DA and the width direction DB is called height direction DC. The conveyance direction DA includes a first conveyance direction and a second conveyance direction opposite to this. The width direction DB includes a first width direction and a second width direction opposite thereto. The height direction DC includes the upper side and the lower side.

In the example shown, a pair of rails 21 are arrange | positioned at the base (not shown) of the scribe apparatus 10. FIG. The shape of the rail 21 is a straight line which defines a conveyance direction DA. One rail 21 and the other rail 21 are arranged at regular intervals in the width direction DB. The table 22 is divided into a slider 22A, a strut 22B, and a top plate 22C. The slider 22A is connected to each rail 21 so that it can move along the rail 21. The strut 22B is a hollow part configured to be able to arrange other elements therein, and is installed on the slider 22A. The upper plate 22C is a portion for arranging the workpiece W and is provided on the support post 22B.

The linear drive mechanism 23 moves the table 22 with respect to the rail 21. The linear drive mechanism 23 is comprised by the motor 23A and the feed screw 23B, for example. The motor 23A is disposed at the base (not shown) of the scribe device 10. The output shaft of the motor 23A is connected to the feed screw 23B so that the feed screw 23B rotates around the rotation center axis of the motor 23A. The feed screw 23B is disposed between the pair of rails 21. The longitudinal direction of the feed screw 23B is parallel to the longitudinal direction of the rail 21. The slider 22A is connected to the feed screw 23B so as to move in the longitudinal direction of the feed screw 23B in accordance with the rotation of the feed screw 23B. As the motor 23A rotates, the feed screw 23B rotates, and the table 22 moves in the first conveying direction or the second conveying direction with respect to the rail 21 in accordance with the rotational direction of the feed screw 23B.

The rotary drive mechanism 24 and the vacuum suction device 25 are disposed in the strut 22B. The rotation drive mechanism 24 rotates the upper plate 22C with respect to the support 22B around the center axis center parallel to the height direction DC. The vacuum suction device 25 adsorbs the workpiece W disposed on the upper plate 22C to the upper plate 22C. The scribing is performed in a state where the workpiece W is adsorbed by the vacuum suction device 25.

The processing apparatus 30 includes a vertical frame 31, a horizontal frame 32, a scribe head 33, a holder joint 34, a holder unit 100, a horizontal drive mechanism 35, and a vertical drive mechanism 36. It is composed by. The vertical frame 31, the horizontal frame 32, the scribe head 33 and the holder joint 34 are made of metal suitable for each function, for example.

In the example shown, a pair of vertical frames 31 are arranged in the base (not shown) of the scribe device 10. The longitudinal direction of the vertical frame 31 is parallel to the height direction DC. The pair of vertical frames 31 is disposed outside the rails 21 in the width direction DB so as to sandwich the pair of rails 21 therebetween. The horizontal frame 32 is provided between a pair of vertical frames 31. The longitudinal direction of the horizontal frame 32 is parallel to the width direction DB. The horizontal frame 32 is fixed to each vertical frame 31. The horizontal frame 32 is provided with a guide 32A. The guide 32A is a groove parallel to the longitudinal direction of the horizontal frame 32, for example.

The scribe head 33 is a base that supports the holder joint 34. The scribe head 33 is connected to the guide 32A to be able to move along the horizontal frame 32 in the width direction DB. The holder joint 34 is connected to the lower part of the scribe head 33. The holder joint 34 is configured to attach or detach the holder unit 100.

The horizontal drive mechanism 35 moves the scribe head 33 in the width direction DB with respect to the horizontal frame 32. The horizontal drive mechanism 35 is comprised by the motor 35A and the feed screw 35B, for example. The motor 35A is provided on one vertical frame 31. The output shaft of the motor 35A is connected to the feed screw 35B so that the feed screw 35B rotates around the rotational center axis of the motor 35A. The feed screw 35B is disposed in the horizontal frame 32. The longitudinal direction of the feed screw 35B is parallel to the longitudinal direction of the horizontal frame 32. The scribe head 33 is connected to the feed screw 35B to move in the longitudinal direction of the feed screw 35B in accordance with the rotation of the feed screw 35B. As the motor 35A rotates, the feed screw 35B rotates, and the scribe head 33 moves in the first width direction or the second width direction with respect to the horizontal frame 32 in accordance with the rotation direction of the feed screw 35B. do. The holder joint 34 and the holder unit 100 move in the width direction DB integrally with the scribe head 33.

The vertical drive mechanism 36 is installed in the scribe head 33. The vertical drive mechanism 36 is configured by, for example, a motor and a feed screw (both not shown). The motor is disposed in the scribe head 33. The output shaft of the motor is connected to the feed screw so that the feed screw rotates around the central axis of rotation of the motor. The feed screw is disposed in the scribe head 33. The longitudinal direction of the feed screw is parallel to the height direction DC. The holder joint 34 is connected to the feed screw to move in the longitudinal direction of the feed screw in accordance with the rotation of the feed screw. As the motor rotates, the feed screw rotates, and the holder joint 34 moves up or down with respect to the scribe head 33 in accordance with the rotation direction of the feed screw. The holder unit 100 moves in the height direction DC integrally with the holder joint 34.

2 shows the structure of the holder unit 100 in the cross section parallel to the width direction DB and the height direction DC. The central elements constituting the holder unit 100 are the holder 110, the scribing wheel 120 and the pin 200. The base 111 may be detachable with respect to the holder joint 34. The pin 200 is supported by the holder 110 and is prevented from falling off by the fall prevention mechanisms, such as the cover 140, for example. The scribing wheel 120 is supported by the pin 200. One example of the material constituting the holder 110 and the cover 140 is a magnetic metal. The materials constituting the holder 110 and the cover 140 can be selected individually. Examples of materials constituting the scribing wheel 120 are sintered diamond (Poly Crystalline Diamond), cemented carbide, monocrystalline diamond and polycrystalline diamond. The materials constituting the scribing wheel 120 can be selected individually.

The holder 110 is divided into a base 111 and a pair of arms 112. The shape of the base 111 is a cylinder or a prism. The pair of arms 112 extend downward from the bottom of the base 111. The longitudinal direction of the arm 112 is parallel to the height direction DC. A space 113 for arranging the scribing wheel 120 is formed between the inner surface 112A of the one arm 112 and the inner surface 112A of the other arm 112 in the width direction DB. . The interval between the inner surface 112A of the one arm 112 and the inner surface 112A of the other arm 112 in the width direction DB is slightly wider than the thickness of the scribing wheel 120. Each arm 112 is formed with a first insertion hole 114 into which the pin 200 is inserted. The first insertion hole 114 is a circular hole penetrating the arm 112 in the width direction DB. An inner circumferential surface 115 formed in the arm 112 defines the first insertion hole 114. The first insertion hole 114 has an inner opening 114A that opens in the inner surface 112A of the arm 112, and an outer opening 114B that opens in the outer surface 112B of the arm 112.

The scribing wheel 120 is disposed in the space 113 between the pair of arms 112. The scribing wheel 120 is formed with a second insertion hole 121 into which the pin 200 is inserted. The second insertion hole 121 is a circular hole penetrating the scribing wheel 120 in the thickness direction. An inner circumferential surface 122 (hereinafter referred to as “wheel inner circumferential surface 122”) formed in the scribing wheel 120 defines the second insertion hole 121. The wheel inner circumferential surface 122 is formed of a high wear resistant material. Mirror processing is performed on the wheel inner circumferential surface 122. The arithmetic mean roughness Ra of the mirror inner peripheral surface 122 processed is smaller than the arithmetic mean roughness Ra of the surface on which the normal finishing process was performed. In one example, the arithmetic mean roughness Ra of the wheel inner circumferential surface 122 is 0.01 μm or less. In a preferable example, the arithmetic mean roughness Ra of the wheel inner peripheral surface 122 is 0.005 micrometer or less, and the maximum height Rz is 0.05 micrometer or less. The high wear resistant material includes at least one of diamond, cubic carbon nitride, lonsdaleite, superhard nanotubes and cubic boron nitride. In one example, the scribing wheel 120 is a diamond sintered body, and the entirety of the scribing wheel 120 including the high wear resistant material forming the wheel inner circumferential surface 122 is composed of the diamond sintered body.

The pin 200 is indented with respect to each of the holder 110 and the scribing wheel 120 with a first insertion hole 114 of each arm 112 and a second insertion of the scribing wheel 120. It is inserted into the hole 121. The thickness RC of the pin 200 is smaller than the diameter RA of the first insertion hole 114 and the diameter RB of the second insertion hole 121. The length of the pin 200 is slightly shorter than the distance between the outer opening 114B of the first insertion hole 114 and the outer opening 114B of the other first insertion hole 114 in the width direction DB. .

The shape of the wheel inner circumferential surface 122 can be arbitrarily selected. In one example, the diameter of the middle portion 121A of the second insertion hole 121 in the direction along the central axis CB of the second insertion hole 121 of the scribing wheel 120 is the second insertion. It is narrower than the diameter of the edge part 121B of the 2nd insertion hole 121 in the direction along the center axis center CB of the hole 121. As shown in FIG. In the cross section of the scribing wheel parallel to the thickness direction of the scribing wheel and passing through the central axis of the insertion hole, the shape of the inner circumferential surface is a drum shape. Specifically, the wheel inner circumferential surface 122 is curved to bulge toward the central axis CB from each side 123 toward the center of the scribing wheel 120 in the direction along the central axis CB. do. The relationship between the wheel inner circumferential surface 122 and the pin outer circumferential surface 201 is substantial line contact or surface contact with a small contact area. In the scribing process, a reaction force is generated in the scribing wheel 120 that includes the component in the direction along the central axis CB. This reaction force acts to incline the scribing wheel 120 with respect to the pin 200. In the state where the scribing wheel 120 is inclined, the rotation center plane of the scribing wheel 120 orthogonal to the center axis center CB is not orthogonal to the center axis center CC of the pin 200. In the holder unit 100, since the wheel inner peripheral surface 122 is a curved surface as mentioned above, inclination of the scribing wheel 120 at the time of scribing process is hard to produce.

The cover 140 is configured separately from the holder 110. The cover 140 is fixed to the holder 110 by fixing means to open and close the outer opening 114B of the first insertion hole 114. One example of the fixing means is a screw. The cover 140 closes some or all of the outer opening 114B of the first insertion hole 114 so that the tip 202 of the pin 200 does not protrude from the first insertion hole 114. In the example shown, cover 140 closes a portion of outer opening 114B of first insertion hole 114.

In the scribe device 10, the scribing wheel 120 may be replaced. As a replacement method of the scribing wheel 120, a 1st replacement method and a 2nd replacement method are mentioned, for example. In the first exchange method, the cover 140 is first separated from the holder 110. Next, the pin 200 is removed from the holder 110, and the scribing wheel 120 is taken out of the space 113 of the holder 110. A new scribing wheel 120 is then placed in the space 113 of the holder 110, and the first insertion hole 114 of the arm 112 and the second insertion hole of the scribing wheel 120 ( The pin 200 is inserted into 121. Since the thickness of the scribing wheel 120 is thinner than the space | interval of each arm 112, the operation which replaces the scribing wheel 120 can be performed easily. When the pin 200 needs to be replaced, the new pin 200 is inserted into the first insertion hole 114 and the second insertion hole 121, not the pin 200 taken out of the holder 110. . Since the pin 200 is configured to be inserted into the holder 110 and the scribing wheel 120 in a non-pressing state, the pin 200 may be easily taken out and inserted into the holder 110. .

The second replacement method is selected when the pin 200 is held in the holder 110 by a fall prevention mechanism of another configuration instead of the cover 140. For example, the dropout prevention mechanism includes a click portion coupled to the holder 110. In the state where the click part is coupled to the holder 110, the fall prevention mechanism is fixed to the holder 110 and cannot open and close with respect to the holder 110. FIG. In the second replacement method, the scribing wheel 120 and the pin 200 are exchanged as an integrated holder unit 100 while being held by the holder 110. Specifically, the holder unit 100 is first separated from the holder joint 34. A new holder unit 100 is then attached to the holder joint 34.

In the state before the start of the scribing process, the vertical drive mechanism 36 holds the holder unit 100 at a predetermined position in the height direction DC so that the scribing wheel 120 does not contact the workpiece W. FIG. Let's do it. In accordance with the start of the scribing process, the vertical drive mechanism 36 moves the holder unit 100 downward from a predetermined position in the height direction DC so that the scribing wheel 120 contacts the surface of the workpiece W. FIG. Move it. In the state where the scribing wheel 120 is in contact with the surface of the workpiece W, the longitudinal drive mechanism 36 is configured such that a predetermined load is applied to the workpiece W by the scribing wheel 120. The position of the height direction DC of the holder unit 100 is determined.

3 is a cross-sectional view of the pin 200. The pin 200 is constituted by the pin body 210 and the protective layer 220 protecting the outer circumferential surface 211 of the pin body 210. The surface 221 of the protective layer 220 constitutes a fin outer circumferential surface 201, which is an outer circumferential surface of the fin 200. The pin body 210 is a cylinder. The protective layer 220 covers the outer circumferential surface 211 of the pin body 210. In a preferable example, the protective layer 220 is provided in the whole part of the outer peripheral surface 211 of the pin main body 210 which may contact with the wheel inner peripheral surface 122 of the scribing wheel 120. FIG. In the example shown in FIG. 2, the protective layer 220 is provided on the entire outer circumferential surface 211 of the pin body 210.

The protective layer 220 includes a plurality of high wear resistant particles 230 (see FIG. 4) having high wear resistance with respect to the wheel inner circumferential surface 122. In a preferred example, the protective layer 220 is configured such that the fin 200 has a predetermined lifetime. The predetermined lifetime is defined as the distance that the scribing wheel 120 travels on the workpiece W by, for example, scribing. The state of high wear resistance with respect to the wheel inner circumferential surface 122 is a state in which wear progresses gently so that the pin 200 has a predetermined life even when abrasion occurs due to contact with the wheel inner circumferential surface 122 formed by diamond. Or a state that is not substantially worn.

4 is a pin in a state in which a protective layer 220 is formed on a pin body 210 that is a base material, and the protective layer 220 is not polished (hereinafter referred to as a "raw state of the pin 200"). 200 is a model diagram. In the illustrated example, although the shape of the plurality of high wear particles 230 is the same, and the plurality of high wear particles 230 are aligned on the outer circumferential surface 211 of the fin body 210, in the actual protective layer 220 Each of the highly wear resistant particles 230 has a different shape, and a plurality of highly wear resistant particles 230 are irregularly disposed on the outer circumferential surface 211 of the pin body 210.

The type of high wear resistant particle 230 can be arbitrarily selected. In one example, the plurality of high wear resistant particles 230 includes at least one of diamond particles, cubic carbon nitride particles, lonsdaleite particles, superhard nanotube particles, and cubic boron nitride particles. In the example shown, the plurality of highly wear resistant particles 230 are diamond particles. Examples of materials constituting the diamond particles are monocrystalline diamond and polycrystalline diamond. The material constituting the pin body 210 can be arbitrarily selected. In one example, the hardness of the material constituting the pin body 210 is lower than that of the high wear resistant particle 230. Examples are cemented carbide, steel and stainless steel. The kind of hardness is Knoop Hardness, for example.

The protective layer 220 further includes a layer 240 of binder (hereinafter referred to as “bonding layer 240”) for bonding the high wear resistant particles 230 to the outer circumferential surface 211 of the fin body 210. The bonding layer 240 covers the outer circumferential surface 211 of the pin body 210. The structure of the bonding layer 240 can be arbitrarily selected. In one example, the bonding layer 240 is an electrodeposition layer formed by electroplating. One example of a type of binder is nickel, and an alloy comprising nickel. In the example shown, the bonding layer 240 is made of nickel. This bonding layer 240 is an electrodeposition layer formed by electrolytic nickel plating.

The high wear resistant particles 230 are bonded to the outer circumferential surface 211 of the fin body 210 by the bonding layer 240. This bonding is to maintain the high wear resistant particles 230 on the outer circumferential surface 211 so that the high wear resistant particles 230 can protect the fin body 210. The high wear resistant particle 230 includes a particle coating part 231 positioned inside the bonding layer 240, and a particle protrusion 232 protruding from the surface 241 of the bonding layer 240. In one example, the high wear resistant particles 230 are abrasive grains. At the surface 233 of the high wear resistant particle 230, there are a plurality of edges 234 and a plurality of planes 235. In the raw state of the pin 200, the majority of the high wear resistant particles 230 are in the same posture as the edge 234 is located at the tip of the particle protrusion 232.

The initial state of the pin 200 constituting the holder unit 100 can be arbitrarily selected. The initial state of the pin 200 is a state of the pin 200 in the unused holder unit 100. One example of the initial state selected is a finished state in which the protective layer 220 has been polished and a unprocessed state in which the protective layer 220 has not been polished. A layer containing abrasive grains is generally subjected to polishing to raise the blade, but polishing performed to the protective layer 220 of the pin 200 is for reducing the surface roughness of the protective layer 220. . As the polishing process, for example, the polishing process for polishing the protective layer 220 while the center of the pin 200 is held by a jig or the like, and the protective layer 220 in the state where the center of the pin 200 is not maintained. Centerless polishing may be chosen to polish the metal.

5 is a model diagram of the protective layer 220 polished. In the protective layer 220 polished, the tip of the particle protrusion 232 is the plane 235. In the polishing process, the attitude of the high wear resistant particles 230 is changed by the force that the high wear resistant particles 230 receive from the grindstone, and most of the high wear resistant particles 230 have a flat surface 235 with the particle protrusion 232. Take the same position as you would be at the tip of. Alternatively, the edge 234 of the particle protrusion 232 is removed by polishing, so that a plane 235 is formed in the particle protrusion 232. The surface 221 of the protective layer 220 is formed in a plurality of planes by changing one of the postures of the highly wear-resistant particles 230 and the formation of the plane 235 in the particle protrusion 232. 235). In addition, a part of many highly wear-resistant particles 230 may be press-fit into the pin body 210 by the polishing process. The posture of this highly wear-resistant particle 230 is substantially the same as before the polishing process, and the edge 234 is located at the tip of the particle protrusion 232.

The amount of the high wear-resistant particles 230 protruding from the bonding layer 240 where the plane 235 is located at the tip of the particle protrusion 232 is such that the edge 234 is located at the tip of the particle protrusion 232 before polishing. The high wear resistant particles 230 are smaller than the amount protruding from the bonding layer 240. The amount of high wear-resistant particles 230 whose plane 235 is located at the tip of the particle protrusion 232 protrudes from the bonding layer 240, and the edge 234 is at the tip of the particle protrusion 232 after polishing. The amount of high wear resistant particles 230 protruding from the bonding layer 240 is substantially equal.

6 is an example of the result of measuring the profile of the protective layer 220 which is in a raw state by a three-dimensional measuring instrument. 7 is an example of the result of measuring the profile of the protective layer 220 which has been processed by a three-dimensional measuring instrument. From the measurement results shown in FIG. 6, it can be confirmed that a large number of corners 234 of the particle protrusion 232 exist on the surface of the protective layer 220 in the unprocessed state. From the measurement results in FIG. 7, it can be seen that a large number of planes 235 of the particle protrusion 232 exist on the surface of the protective layer 220 in the finished state.

The use form of the holder unit 100 can be selected from a 1st use form and a 2nd use form, for example. The first use form is a use form in which a raw state is selected as the initial state of the pin 200. The second use form is the use form in which the finished state is selected as the initial state of the pin 200. The use form of the holder unit 100 can be selected according to the type of the pin 200 set in the holder 110.

8 shows a state in which the mileage of the scribing wheel 120 according to the first use mode is short. The short driving distance is a state in which the traveling distance is, for example, 0 m or more and less than the reference distance. The reference distance is, for example, a mileage of the life required for a typical pin. In a state where the mileage of the scribing wheel 120 is short, the wheel inner circumferential surface 122 contacts the edge 234 of the plurality of particle protrusions 232. The edge 234 of the particle protrusion 232 is worn by friction between the wheel inner circumferential surface 122 and the edge 234 of the particle protrusion 232 according to the rotation of the scribing wheel 120 during scribing. The contact portion with the wheel inner circumferential surface 122 in the particle protrusion 232 is gradually changed to follow the shape of the wheel inner circumferential surface 122.

9 shows a state in which the mileage of the scribing wheel 120 according to the first use mode is long. The long distance traveled is a state in which the travel distance is equal to or greater than the reference distance, for example. In the state where the scribing wheel 120 has a long traveling distance, the contact portion with the wheel inner circumferential surface 122 in the particle protrusion 232 is the surface 236 along the wheel inner circumferential surface 122. The contact area of the high wear-resistant particle 230 and the wheel inner peripheral surface 122 on the surface 236 is increasing compared with the state in which the scribing wheel 120 has a short traveling distance. For this reason, as the mileage of the scribing wheel 120 becomes longer, the wear amount of the high wear-resistant particle 230 with respect to the mileage increase increases gradually. In addition, when the wear amount of the particle protrusion 232 is large, part of the bonding layer 240 is also worn. The bonding layer 240 is sufficiently low in hardness as compared with the high wear resistant particles 230 and is removed by contact with the scribing wheel 120. Among the plurality of particle protrusions 232, the state of the particle protrusion 232 which is not in contact with the wheel inner circumferential surface 122 is the same as the initial state.

FIG. 10 shows a short driving distance of the scribing wheel 120 according to the second use form. In a state where the mileage of the scribing wheel 120 is short, the wheel inner circumferential surface 122 contacts the plane 235 of the plurality of particle protrusions 232. When the tip includes the particle protrusion 232 having the edge 234, the wheel inner circumferential surface 122 may contact the edge 234. Due to the friction between the wheel inner circumferential surface 122 and the particle protrusion 232 caused by the rotation of the scribing wheel 120 during scribing, the contact portion of the wheel inner circumferential surface 122 on the particle protrusion 232 is worn out. However, unlike the first use form, since the surface of the protective layer 220 is constituted by a plurality of planes 235, the amount of change in shape due to wear is smaller than that of the first use form.

11 shows a state in which the mileage of the scribing wheel 120 according to the second use mode is long. Since the amount of wear of the particle protrusion 232 is small, the relationship between the wheel inner circumferential surface 122 and the protective layer 220 is such that even if the mileage of the scribing wheel 120 is long, the mileage of the scribing wheel 120 is increased. It's almost like a short state.

The dimension of each part of the holder unit 100 is determined as follows, for example. The outer diameter of the scribing wheel 120 is selected in the range of 1 mm to 7 mm. In one example, the outer diameter of the scribing wheel 120 is 2 mm. The thickness of the scribing wheel 120 is selected in the range of 0.4 mm to 1.2 mm. In one example, the thickness of the scribing wheel 120 is 0.64 mm. The interval of the arm 112 in the width direction DB is selected in the range of 0.4 mm to 1.3 mm. In one example, the spacing of the arms 112 is 0.66 mm. The diameter RA of the first insertion hole 114 is selected in the range of 0.4 mm to 1.5 mm. In one example, the diameter RA of the first insertion hole 114 is 0.8 mm. The diameter RB of the second insertion hole 121 is selected in the range of 0.4 mm to 1.5 mm. In one example, the diameter RB of the second insertion hole 121 is 0.8 mm. The thickness RC of the pin 200 is selected in the range of 0.4 mm to 1.5 mm. In one example, the thickness RC of the pin 200 is 0.77 mm.

In one example, the specifications of the protective layer 220 are determined as follows. The layer configuration of the high wear resistant particles 230 is selected from one, two, and three or more multilayers. The particle size of the high wear resistant particle 230 is selected in the range of # 800 to # 1500 in the mesh size notation. The particle diameter of the high wear resistant particle 230 is selected in the range of 5 μm to 30 μm. It is preferable to use nickel or an alloy containing nickel as the binder. The thickness of the protective layer 220 is selected in the range of 5 μm to 30 μm.

(Example)

The test which evaluated the performance of the holder unit 100 and the reference holder unit of embodiment was implemented. In the following description, the code | symbol which concerns on the holder unit 100 of embodiment is abbreviate | omitted. In addition, the mileage of the scribing wheel is described as the wheel mileage.

In this test, the sound level of the sound produced by the friction between the wheel inner circumferential surface and the pin outer circumferential surface, and the wear amount of the pin outer circumferential surface were measured, and the performance of the holder unit was comprehensively evaluated based on each result. The type of comprehensive evaluation is X and Y. According to the holder unit whose comprehensive evaluation is X, the to-be-processed object is obtained even if the wheel driving distance is long. According to the holder unit whose comprehensive evaluation is Y, when the wheel travel distance is long, there exists a possibility that the quality of a to-be-processed object may fall. However, when the relationship between the wheel mileage and the quality of the workpiece is understood, and the holder unit with a comprehensive evaluation of Y is used on the basis of the processing conditions at which the workpiece of the appropriate quality is obtained, no particular trouble occurs during actual scribing. Do not.

In the test, a tester capable of injecting the scribing wheel in a situation similar to the situation in which the scribing wheel travels on the surface of the workpiece was used. In the tester, a holder unit to be measured is set. The scribing wheel of the set holder unit contacts the roller of the tester. As the roller rotates, the scribing wheel rotates, and the scribing wheel is scanned in a situation similar to the scanning of the scribing wheel in actual scribing.

For the measurement of the sound level, a vibration sensor installed in the tester and a data recorder for analyzing the measurement result of the vibration sensor were used. The vibration sensor measures the sound produced by the friction between the wheel inner circumferential surface and the pin outer circumferential surface. The measurement result of the vibration sensor is input to the data recorder. The data recorder interprets the measurement results of the vibration sensor and converts them into sound levels. Sound level is relative to a reference. As a reference value, the sound level at the time of fiber generation during scribing using the reference holder unit was set. In this test, the sound level of the reference value was set to 5, the maximum level. The sound level correlates to the stability of the rotating state of the scribing wheel. The higher the stability of the rotation of the scribing wheel, the lower the sound level. The rotation state of the scribing wheel whose sound levels correspond to 4 and 5 is similar to the rotation state of the scribing wheel when a fiber is formed at the time of scribing.

A three-dimensional measuring instrument was used to measure the amount of wear on the outer peripheral surface of the pin. For the measurement of the amount of wear, in each of the states where the wheel travel distance is 0 m and the wheel travel distance reaches a predetermined travel distance, the pins are removed from the holder unit and the pins are set in the three-dimensional measuring instrument, The profile of the outer peripheral surface of the pin was measured by the dimensional measuring device. In the test using the reference holder unit, the predetermined travel distance is 3000 m. In the test using the holder unit of the embodiment, the predetermined traveling distance is 11000 m.

The abrasion amount of the pin outer peripheral surface was confirmed from the measurement result of the profile of the pin outer peripheral surface. Specifically, the wear amount of the pin outer circumferential surface is obtained from the difference between the profile of the pin outer circumferential surface in the state where the wheel travel distance is 0 m and the profile of the pin outer circumferential surface in the state where the wheel travel distance is the predetermined travel distance. The life of the pin is related to the amount of wear on the outer peripheral surface of the pin. When the amount of wear on the outer peripheral surface of the pin is equal to or less than the reference amount of wear, it can be determined that the pin has a predetermined life. Since the pins of the reference holder unit and the pins of the holder unit of the embodiment differ in structure, the method of setting the reference wear amount is different. The reference wear amount on the pin of the holder unit of the embodiment is mainly set according to the relationship with the predetermined travel distance and the thickness of the protective layer in the initial state of the pin. For example, when the predetermined traveling distance corresponds to the predetermined lifetime, the reference wear amount is at least smaller than the thickness of the protective layer in the initial state of the pin. When the predetermined traveling distance is shorter than the predetermined lifetime, the reference wear amount is set smaller.

12 is an example of test results. The holder units used for the test are four types in total, two types of reference holder units and two types of holder units. Two reference holder units are described as measurement object A1 and measurement object A2, respectively. The holder unit of 2 types of embodiment is described as measurement object B1 and measurement object B2, respectively. In each measurement object A1-B2, the magnitude | size of the element corresponding to each other is the same. On the inner circumferential surface of all the measurement targets, mirror processing was performed so that the arithmetic mean roughness Ra of the inner circumferential surface of the wheel was 0.005 µm or less and the maximum height Rz was 0.05 µm or less. There is no lubrication between the wheel inner circumference and the pin outer circumference.

The test conditions for the reference holder unit are as follows. The difference between the measurement targets A1 and A2 is the particle diameter and composition of the diamond particles constituting the fin. Other conditions regarding the measurement targets A1 and A2 are the same. The scribing wheel and the pin are each diamond sintered body. The particle diameter of the diamond particle of measurement object A1 is 1 micrometer or less. The particle diameter of the diamond particle of measurement object A2 is 1 micrometer-3 micrometers.

Test conditions regarding the holder unit 100 of the embodiment are as follows. The difference between the measurement targets B1 and B2 is the particle diameter of the high wear resistant particle 230 and the initial state of the pin 200. The other conditions regarding the measurement targets B1 and B2 are the same. The material of the pin body 210 is carbon steel ball. The high wear resistant particles 230 are diamond particles. The bonding layer 240 is a nickel layer formed by electrolytic nickel plating. The particle diameter of the highly wear-resistant particle 230 of the pin 200 of the measurement target B1 is # 1500 by particle size display. The initial state of the pin 200 of the measurement target B1 is a raw state. The particle diameter of the highly wear-resistant particle 230 of the pin 200 of the measurement target B2 is # 800 by particle size display. The initial state of the pin 200 of the measurement target B2 is a machining completed state. The method of grinding processing is centerless processing using diamond abrasive grains.

The test result about the measurement object A1 is as follows. At 100m wheel mileage, the sound level is one. At 1500m wheel mileage, the sound level is 4. At 3000m wheel mileage, the sound level is five. Although the wear amount of the pin outer peripheral surface at the wheel traveling distance 3000m is below the reference wear amount, the shape of the pin outer peripheral surface is slightly changed as follows the shape of the wheel inner peripheral surface. In the measurement target A1, since the sound level may reach 4 and 5, the comprehensive evaluation regarding the performance of a holder unit is Y. In addition, since it was confirmed that the sound level reached 5 at the wheel driving distance 3000m, the sound level was not measured when the wheel driving distance was longer than 3000m. The diagonal line in the figure shows this.

The test result about the measurement object A2 is as follows. At 100m wheel mileage, the sound level is two. At 1500m wheel mileage, the sound level is 3.5. At 3000m wheel mileage, the sound level is five. Although the wear amount of the pin outer peripheral surface at the wheel traveling distance 3000m is below the reference wear amount, the shape of the pin outer peripheral surface is slightly changed to follow the shape of the wheel inner peripheral surface. In the measurement target A2, since the sound level may reach 5, the comprehensive evaluation regarding the performance of a holder unit is Y. In addition, since it was confirmed that the sound level reached 5 at the wheel driving distance 3000m, the sound level was not measured when the wheel driving distance was longer than 3000m. The diagonal line in the figure shows this.

The test result about the measurement object B1 is as follows. At 100m wheel mileage, the sound level is two. At 1500m wheel mileage, the sound level is one. At 3000m wheel mileage, the sound level is one. At wheel mileage 5000m, 8000m and 11000m the sound level is 0.5. The wear amount of the pin outer peripheral surface at 11000m of wheel travel distances is below a reference wear amount, and the change of the shape of the pin outer peripheral surface is small compared with the measurement targets A1 and A2. In the measurement target B1, since the maximum value of a sound level is 2 and the wear amount of a pin outer peripheral surface is below a reference wear amount, the comprehensive evaluation regarding the performance of a holder unit is X.

The reason why the sound level at the wheel travel distances of 5000m, 8000m, and 11000m is lower than the sound level at the wheel travel distances of 100m, 1500m, and 3000m is considered as follows. The contact with the wheel inner circumference caused the edges of the particle protrusions to wear out, so that the contact portion with the wheel inner circumferential surface in the high wear-resistant particles was changed to follow the shape of the wheel inner circumferential surface, and the contact area between the high wear-resistant particles and the wheel inner circumferential surface increased. . As a result, even when the scribing wheel rotates, the wear of the high wear-resistant particles does not substantially occur, or the wear of the high wear-resistant particles does not easily progress, and the rotation state of the scribing wheel is stable, and the sound It is believed that the level has fallen.

The test result about the measurement object (B2) is as follows. The sound level is 0.5 for any of the wheel mileage 100m, 1500m, 3000m, 5000m, 8000m, 11000m. The wear amount of the pin outer peripheral surface at 11000m of wheel travel distances is below a reference wear amount, and the change of the shape of the pin outer peripheral surface is small compared with the measurement targets A1 and A2. In the measurement target B2, since the maximum value of a sound level is 0.5 and the wear amount of a pin outer peripheral surface is below a reference wear amount, the comprehensive evaluation regarding the performance of a holder unit is X.

(Variation)

The said embodiment is an illustration of the form which the holder unit which concerns on this invention can take, and it does not intend to limit the form. The holder unit concerning this invention can take a form different from the form illustrated by embodiment. An example is the form which substituted, changed, or omitted some of the structure of embodiment, or the form which added a new structure to embodiment.

The cross-sectional shape of the pin 200 can be arbitrarily changed. In one example, the cross-sectional shape of the pin 200 is polygonal. Examples of polygons are squares, hexagons and octagons. The protective layer 220 is formed to cover the outer circumferential surface 211 of the pin body 210 which is a polygon.

The shape of the high wear resistant particle 230 can be arbitrarily changed. In one example, the shape of the high wear resistant particle 230 is a sphere.

The structure of the scribing wheel 120 can be arbitrarily changed. Portions other than the wheel inner circumferential surface 122 of the scribing wheel 120 are made of a material different from the high wear-resistant material constituting the wheel inner circumferential surface 122. One example of another material is a high wear resistant material or a cemented carbide that is different from the high wear resistant material constituting the wheel inner circumferential surface 122.

10: scribe device 100: holder unit
110: holder 120: scribing wheel
121: second insertion hole (insertion hole of the scribing wheel)
121A: Middle 122: Inner circumference
200: pin 210: pin body
211: outer peripheral surface 220: protective layer
230: high wear resistant particles 231: particle coating
232: particle projection 233: surface
235: plane 240: bonding layer (layer of binder)
241: surface CB: center shaft center (center shaft center of insertion hole)

Claims (10)

As a holder unit,
holder;
A pin supported by the holder; And
Including a scribing wheel supported on the pin,
The scribing wheel includes an insertion hole into which the pin is inserted,
The inner circumferential surface of the scribing wheel that defines the insertion hole is formed of a high wear resistant material, and has an arithmetic mean roughness Ra of 0.01 µm or less,
The pin includes a pin body and a protective layer protecting an outer circumferential surface of the pin body,
The protective layer includes a plurality of high wear resistant particles having high wear resistance with respect to the inner circumferential surface. The holder unit of claim 1, wherein the high wear resistant material comprises at least one of diamond, cubic carbon nitride, lonsdaleite, superhard nanotubes, and cubic boron nitride. The holder unit of claim 1, wherein the plurality of highly wear resistant particles comprise at least one of diamond particles, cubic carbon nitride particles, lonsdaleite particles, superhard nanotube particles, and cubic boron nitride particles. The holder unit according to claim 1, wherein the highly wear-resistant particles are abrasive grains. The method of claim 1, wherein the protective layer comprises a layer of a binder for bonding the high wear-resistant particles to the outer peripheral surface of the fin body,
And wherein said high wear resistant particle comprises a particle coating located inside of said layer of binder and a particle protrusion protruding from the surface of said layer of binder. 6. The holder unit of claim 5, wherein the tip of the particle protrusion is flat. 6. The holder unit of claim 5, wherein the binder is nickel. The holder unit according to any one of claims 1 to 7, wherein the scribing wheel is a diamond sintered body. The diameter of the intermediate part of the said insertion hole in the direction along the center axis of the said insertion hole is the said insertion hole in the direction along the center axis of the said insertion hole. Holder unit narrower than the diameter of the end of the. The holder unit according to claim 9, wherein in the cross section of the scribing wheel parallel to the direction along the central axis of the insertion hole and passing through the central axis of the insertion hole, the shape of the inner circumferential surface is a drum shape.

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