TW201943889A - Plating jig for hard disk substrate - Google Patents

Plating jig for hard disk substrate

Info

Publication number
TW201943889A
TW201943889A TW108113140A TW108113140A TW201943889A TW 201943889 A TW201943889 A TW 201943889A TW 108113140 A TW108113140 A TW 108113140A TW 108113140 A TW108113140 A TW 108113140A TW 201943889 A TW201943889 A TW 201943889A
Authority
TW
Taiwan
Prior art keywords
hard disk
disk substrate
groove
substrate
plating
Prior art date
Application number
TW108113140A
Other languages
Chinese (zh)
Other versions
TWI796470B (en
Inventor
迎展彰
大井聡史
Original Assignee
日商東洋鋼鈑股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商東洋鋼鈑股份有限公司 filed Critical 日商東洋鋼鈑股份有限公司
Publication of TW201943889A publication Critical patent/TW201943889A/en
Application granted granted Critical
Publication of TWI796470B publication Critical patent/TWI796470B/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

The present invention addresses the problem of providing a plating jig for a hard disk substrate, capable of supporting the hard disk substrate in a stable orientation and suppressing flapping of the hard disk substrate during plating of the hard disk substrate. This plating jig 10 for the hard disk substrate P is to be inserted into a through-hole h of the hard disk substrate P having the through-hole h at the center thereof and is provided with a groove 30 for supporting the hard disk substrate P during plating. The groove 30 is formed in a predetermined width W2 in an orthogonal direction to the axial direction of the plating jig 10 and to a predetermined depth DP2 and is formed in such a manner that the difference (clearance C (W2 - t)) between the thickness t of the hard disk substrate P and the width W2 of the groove 30 is 0.04 mm to 0.3 mm in a state in which the hard disk substrate P is supported by the groove 30.

Description

硬碟用基板的電鍍支架Plating bracket for hard disk substrate

本發明是關於在硬碟用基板電鍍時使用的電鍍支架。The present invention relates to a plating stand used when plating a substrate for a hard disk.

此種硬碟用基板的電鍍支架,揭示有在硬碟用基板電鍍時,插入硬碟用基板的中心的貫穿孔並以垂吊的狀態支撐硬碟用基板的電鍍軸(參閱專利文獻1及專利文獻2)。電鍍軸是與硬碟用基板一起浸漬於電鍍液,在電鍍液內旋轉驅動,構成使垂吊支撐於電鍍軸的硬碟用基板在電鍍液內從動旋轉。在電鍍軸的外圍面沿著周圍方向設有溝槽,限制垂吊於電鍍軸之硬碟用基板的軸向移動。Such a plating stand for a hard disk substrate is disclosed in a plating shaft inserted into a through hole in the center of the hard disk substrate and supporting the hard disk substrate in a suspended state during plating of the hard disk substrate (see Patent Document 1 and Patent Document 2). The plating shaft is immersed in the plating solution together with the substrate for the hard disk, and is driven and rotated in the plating solution, so that the hard disk substrate suspended and supported by the plating shaft is driven to rotate in the plating solution. Grooves are provided on the peripheral surface of the plating shaft along the peripheral direction to restrict the axial movement of the hard disk substrate suspended from the plating shaft.

專利文獻1記載的溝槽是形成剖面為V字形狀,從電鍍軸的外圍面的深度為5mm以下。硬碟用基板的厚度是使用0.8mm或1.3mm。專利文獻2記載的溝槽為剖面呈方形,從電鍍軸的外圍面具有寬度0.5mm~1.5mm,且深度為1.5mm~3mm的尺寸。尤其是相對於硬碟用基板的厚度0.8mm,具有溝槽的寬度1mm,深度為2.5mm的尺寸。
[先前技術文獻]
[專利文獻]
The groove described in Patent Document 1 is formed in a V-shaped cross section, and the depth from the outer peripheral surface of the plating shaft is 5 mm or less. The thickness of the hard disk substrate is 0.8 mm or 1.3 mm. The groove described in Patent Document 2 has a square cross section, and has a width of 0.5 mm to 1.5 mm and a depth of 1.5 mm to 3 mm from the outer peripheral surface of the plating shaft. In particular, it has a size of 0.8 mm with respect to the thickness of the substrate for a hard disk, a width of a groove of 1 mm, and a depth of 2.5 mm.
[Prior technical literature]
[Patent Literature]

專利文獻1:日本特開平9-157857號公報
專利文獻2:日本特開平9-71869號公報
Patent Document 1: Japanese Patent Application Laid-Open No. 9-157857 Patent Document 2: Japanese Patent Application Laid-Open No. 9-71869

[發明所欲解決之課題][Problems to be Solved by the Invention]

但是,專利文獻1記載的溝槽為剖面是以V字形狀所形成,所以垂吊支撐於電鍍軸的硬碟用基板僅使得形成硬碟用基板之貫穿孔的內壁的角部點接觸於溝槽的內壁面。因此,以穩定的姿勢狀態支撐硬碟用基板困難,使硬碟用基板的支撐變得不足。剖面為V字形狀的溝槽具體是如第7圖表示,具備形成在電鍍軸J的外圍面g的一方的傾斜面a,及具有與一方的傾斜面a相對的另一方的傾斜面b的傾斜部K。專利文獻1記載的溝槽中,藉著電動軸從動旋轉硬碟用基板時,如第8(a)圖表示,在硬碟用基板P產生大的振動,會切削傾斜部K的傾斜面a、b成為異物而混入電鍍液,附著於電鍍表面導致電鍍不良的所謂的小結塊產生的問題。However, the groove described in Patent Document 1 is formed in a V-shape in cross section. Therefore, the hard disk substrate suspended and supported on the plating shaft is only brought into point contact with the corners of the inner wall forming the through hole of the hard disk substrate. The inner wall surface of the groove. Therefore, it is difficult to support the hard disk substrate in a stable posture state, and the support of the hard disk substrate becomes insufficient. Specifically, as shown in FIG. 7, the groove having a V-shaped cross section is provided with one inclined surface a formed on the peripheral surface g of the plating axis J, and the other having an inclined surface b facing the other inclined surface a. Inclined part K. In the groove described in Patent Document 1, when the hard disk substrate is driven to rotate by the electric shaft, as shown in FIG. 8 (a), a large vibration is generated in the hard disk substrate P, and the inclined surface of the inclined portion K is cut. a and b become foreign matter and are mixed into the plating solution and adhere to the plating surface, causing problems such as so-called small clumps caused by poor plating.

又,如第8(b)圖表示,在硬碟用基板P彼此之間,設有襯墊S的場合,會有因硬碟用基板P的振動使硬碟用基板P的外圍面部與襯墊S衝突,切削襯墊S,而成為異物混入電鍍液,附著於硬碟用基板P的電鍍面導致電鍍不良的所謂的小結塊產生的問題。As shown in FIG. 8 (b), when the pads S are provided between the hard disk substrates P, the peripheral surface of the hard disk substrate P and the backing may be caused by the vibration of the hard disk substrate P. The pads S collide and the pads S are cut, and foreign matter is mixed into the plating solution and adheres to the plating surface of the hard disk substrate P, causing a problem of so-called small clumps due to poor plating.

專利文獻2記載的溝槽也是與專利文獻1記載的溝槽的場合相同,硬碟用基板的支撐不足,在從動旋轉硬碟用基板時會有對應碟用基板產生大的振動之虞。因此,會有因與其他的零組件衝突而傷及硬碟用基板的電鍍表面之虞,或切削電鍍軸成為異物混入電鍍液內,附著於電鍍表面成為電鍍不良的所謂的小結塊產生的問題。尤其是厚度為0.5mm~0.63mm左右的薄的硬碟用基板的場合,會有振動的產生顯著形成的問題。The groove described in Patent Document 2 is also the same as the case described in Patent Document 1. The support for the hard disk substrate is insufficient, and when the hard disk substrate is driven to rotate, a large vibration may be generated in response to the disk substrate. Therefore, there is a problem that the plated surface of the hard disk substrate may be damaged due to conflict with other components, or the so-called small clumps caused by cutting the plated shaft and foreign matter mixed in the plating solution and adhering to the plated surface may cause poor plating. . In particular, in the case of a thin hard disk substrate having a thickness of about 0.5 mm to 0.63 mm, there is a problem that significant generation of vibration occurs.

本發明是為解決如以上的問題所研創而成,提供一種可以穩定的姿勢狀態支撐硬碟用基板,在硬碟用基板電鍍時可抑制硬碟用基板的振動產生的硬碟用基板的電鍍支架為課題。

[用於解決課題的手段]
The present invention has been developed to solve the problems described above, and provides a hard disk substrate plating that can support a hard disk substrate in a stable posture, and can suppress the vibration of the hard disk substrate when the hard disk substrate is electroplated. The bracket is the subject.

[Means for solving problems]

(1) 本發明相關的硬碟用基板的電鍍支架,具備:插入中心具有貫穿孔的硬碟用基板之上述貫穿孔的軸主體,及凹設於該軸主體的表面並將上述硬碟用基板以垂吊支撐於上述軸主體的狀態使上述硬碟用基板的一部分進入的溝槽之硬碟用基板的電鍍支架,其特徵為:上述溝槽是在與上述軸主體的軸線方向正交的方向以預定的寬度及預定的深度所形成,以在上述硬碟用基板的一部分進入上述溝槽的狀態,使上述硬碟用基板的厚度與上述溝槽的寬度的差成為0.04mm以上,且0.3mm以下的方式,形成上述溝槽的寬度。(1) A plating stand for a hard disk substrate according to the present invention includes a shaft body inserted into the through hole of the hard disk substrate having a through hole in the center, and a shaft body recessed on the surface of the shaft body and used for the hard disk. A plated bracket for a hard disk substrate in which a substrate is suspended and supported by the shaft body, and a part of the hard disk substrate enters, wherein the groove is orthogonal to an axial direction of the shaft body. The direction is formed with a predetermined width and a predetermined depth, in a state where a part of the hard disk substrate enters the groove, so that the difference between the thickness of the hard disk substrate and the width of the groove becomes 0.04 mm or more. In addition, the width of the groove is formed in a manner of 0.3 mm or less.

(2) 本發明相關的硬碟用基板的電鍍支架,係於(1)記載的硬碟用基板的電鍍支架中,其特徵為:上述溝槽的深度為0.1mm以上,且為1.0mm以下。(2) The plated bracket for a hard disk substrate according to the present invention is a plated bracket for a hard disk substrate according to (1), wherein the depth of the groove is 0.1 mm or more and 1.0 mm or less .

(3) 本發明相關的硬碟用基板的電鍍支架,係於(1)或(2)記載的硬碟用基板的電鍍支架中,其特徵為:上述溝槽的開口部的角具有圓形的形狀。(3) The plated bracket for a hard disk substrate according to the present invention is a plated bracket for a hard disk substrate according to (1) or (2), wherein the corner of the opening of the groove has a circular shape shape.

(4) 本發明相關的硬碟用基板的電鍍支架,係於(1)~(3)的其中任一記載的硬碟用基板的電鍍支架中,其特徵為:上述溝槽的底面為平坦,上述底面與上述溝槽的內壁面是成正交。(4) The plated bracket for a hard disk substrate according to the present invention is a plated bracket for a hard disk substrate according to any one of (1) to (3), wherein the bottom surface of the groove is flat The bottom surface is orthogonal to the inner wall surface of the groove.

(5) 本發明相關的硬碟用基板的電鍍支架,係於(1)~(4)的其中任一記載的硬碟用基板的電鍍支架中,其特徵為:硬碟用基板的電鍍支架的材質是選擇聚四氟乙烯(PTFE)、聚偏二氟乙烯(PVDF)、聚醚醚酮(PEEK)及聚醚醚銅(PEEK)與聚四氟乙烯(PTFE)的混合材料的其中之一。(5) The plated bracket for a hard disk substrate according to the present invention is a plated bracket for a hard disk substrate according to any one of (1) to (4), and is characterized in that it is a plated bracket for a hard disk substrate. The material is selected from among polytetrafluoroethylene (PTFE), polyvinylidene fluoride (PVDF), polyether ether ketone (PEEK), and a mixture of polyether ether copper (PEEK) and polytetrafluoroethylene (PTFE). One.

(6) 本發明相關的硬碟用基板的製造方法,其特徵為:使用(1)~(5)的其中任一記載的硬碟用基板的電鍍支架。(6) The method for manufacturing a hard disk substrate according to the present invention is characterized by using the plated holder of the hard disk substrate according to any one of (1) to (5).

上述(1)記載之本發明相關的硬碟用基板的電鍍支架是與硬碟用基板之間的寬方向的餘隙以成為0.04mm以上,且0.3mm以下的寬度形成溝槽。藉此構成,抑制起因於超過0.3mm的大間隙之硬碟用基板的振動產生。並且,也可防止起因於振動之內徑附近的刮痕。並且,防止起因於成為小於0.04mm的小間隙之電鍍厚度的薄膜化。The plated holder for a hard disk substrate according to the present invention described in the above (1) is formed with a gap in a width direction from the hard disk substrate to be 0.04 mm or more and 0.3 mm or less in width. With this configuration, occurrence of vibration of the hard disk substrate caused by a large gap exceeding 0.3 mm is suppressed. Furthermore, it is also possible to prevent scratches caused near the inner diameter of the vibration. Furthermore, it is possible to prevent thinning of the plating thickness due to a small gap of less than 0.04 mm.

上述(2)記載之本發明相關的硬碟用基板的電鍍支架,形成深度0.1mm以上,且1.0mm以下的溝槽。藉此構成,抑制起因於深度小於0.1mm的淺溝槽之硬碟用基板的振動產生。並且,防止起因於深度大於1.0mm的深溝槽之電鍍厚度的薄膜化。The electroplated holder for a hard disk substrate according to the present invention described in (2) above, has grooves having a depth of 0.1 mm or more and 1.0 mm or less. With this configuration, occurrence of vibration of the hard disk substrate due to shallow grooves having a depth of less than 0.1 mm is suppressed. In addition, a reduction in the thickness of the plating due to a deep trench having a depth of more than 1.0 mm is prevented.

上述(3)記載之本發明相關的硬碟用基板的電鍍支架為溝槽的開口部的角具有圓形。藉此構成,防止在開口部的角有毛刺的產生,防止刮痕附著在支撐於溝槽的硬碟用基板。The plated holder of the hard disk substrate according to the present invention described in (3) above has a rounded corner at the opening of the groove. With this configuration, burrs are prevented from being generated at the corners of the openings, and scratches are prevented from being attached to the hard disk substrate supported by the grooves.

上述(4)記載之本發明相關的硬碟用基板的電鍍支架是溝槽的底面為平坦,使得底面與溝槽的內壁面正交。藉此構成,可以穩定的姿勢狀態支撐硬碟用基板,抑制振動的產生。In the plating bracket for the hard disk substrate according to the present invention described in the above (4), the bottom surface of the groove is flat so that the bottom surface is orthogonal to the inner wall surface of the groove. With this configuration, the substrate for a hard disk can be supported in a stable posture, and generation of vibration can be suppressed.

上述(5)記載之本發明相關的硬碟用基板的電鍍支架是硬碟用基板的電鍍支架的材質為聚四氟乙烯(PTFE)、聚偏二氟乙烯(PVDF)、聚醚醚酮(PEEK)或聚醚醚銅(PEEK)及聚四氟乙烯(PTFE)的混合材料。藉此構成,確保電鍍支架的高耐磨損性、對於酸及鹼的高抗藥性、高電絕緣性及高機械強度。又,藉此構成,抑制異物從電鍍支架的產生。The plated bracket for a hard disk substrate according to the present invention described in the above (5) is a plated bracket for a hard disk substrate. The material of the plated bracket is polytetrafluoroethylene (PTFE), polyvinylidene fluoride (PVDF), and polyetheretherketone ( PEEK) or a mixture of polyetherethercopper (PEEK) and polytetrafluoroethylene (PTFE). With this structure, high abrasion resistance, high resistance to acids and alkalis, high electrical insulation, and high mechanical strength are ensured. With this configuration, generation of foreign matter from the plated stent is suppressed.

上述(6)記載之本發明相關的硬碟用基板的製造方法是使用(1)~(5)其中任一記載的電鍍支架製造硬碟用基板,因此可以穩定的姿勢狀態支撐硬碟用基板,在硬碟用基板電鍍時可抑制硬碟用基板的振動產生,也可抑制起因於振動之內徑附近的刮痕,並且,防止起因於小間隙之電鍍厚度的薄膜化。

[發明效果]
The method for manufacturing a hard disk substrate according to the present invention described in (6) above is to manufacture the hard disk substrate using the electroplated bracket described in any one of (1) to (5), so that the hard disk substrate can be supported in a stable posture. When the substrate for a hard disk is plated, vibration of the substrate for the hard disk can be suppressed, and scratches caused near the inner diameter of the vibration can be suppressed, and the thickness of the plated film due to a small gap can be prevented.

[Inventive effect]

根據本發明,提供一種硬碟用基板的電鍍支架,可以穩定的姿勢狀態支撐硬碟用基板,在硬碟用基板電鍍時可抑制硬碟用基板的振動產生。According to the present invention, there is provided a plating stand for a hard disk substrate, which can support the hard disk substrate in a stable posture state, and can suppress the generation of vibration of the hard disk substrate when the hard disk substrate is plated.

針對運用本發明相關的硬碟用基板的電鍍支架之實施形態相關的硬碟用基板的電鍍支架10參閱圖示進行說明。The plated holder 10 of the hard disk substrate according to the embodiment using the plated holder of the hard disk substrate according to the present invention will be described with reference to the drawings.

首先,裝設在硬碟用基板的電鍍支架10的硬碟用基板P說明。硬碟用基板P是如第1(a)圖、第1(b)圖表示,以厚度為t、外徑為D、中心的貫穿孔h的內徑為d的圓盤所構成。具有厚度t為0.5mm~2mm左右、外徑D為30mm~ 270mm左右、內徑d為10mm~70mm左右的尺寸。First, the hard disk substrate P mounted on the plating stand 10 mounted on the hard disk substrate will be described. The hard disk substrate P is constituted by a disk having a thickness t, an outer diameter D, and an inner diameter d of the through-hole h at the center as shown in Figs. 1 (a) and 1 (b). The thickness t has a size of about 0.5 mm to 2 mm, an outer diameter D of about 30 mm to 270 mm, and an inner diameter d of about 10 mm to 70 mm.

硬碟用基板P的材料是由鋁合金、玻璃、陶磁等的板材所構成。硬碟用基板P具有高精度的平滑性與表面硬度,也具有可抑制因高速旋轉導致振動產生的高剛性及耐衝擊性。為具備該等的特性硬碟用基板P是以硬的原材形成。The material of the hard disk substrate P is made of a plate material such as aluminum alloy, glass, or ceramic. The hard disk substrate P has high-precision smoothness and surface hardness, and also has high rigidity and impact resistance that can suppress vibration caused by high-speed rotation. In order to have such characteristics, the hard disk substrate P is formed of a hard raw material.

又,硬碟用基板P是進行基底的表面處理,在表面處理之後進行電鍍處理,在電鍍處理後,研磨表面與以鏡面化所構成。作為電鍍處理,本實施形態進行無電解鎳-磷(NiP)電鍍。In addition, the hard disk substrate P is formed by subjecting the surface of the substrate to surface treatment, and then performing plating treatment after the surface treatment. After the plating treatment, the surface is polished and mirror-finished. As the plating treatment, the present embodiment performs electroless nickel-phosphorus (NiP) plating.

硬碟用基板P的電鍍支架10是如第2圖、第3(a)圖、第3(b)圖表示,具備插入硬碟用基板P的貫穿孔h的電鍍軸20。電鍍軸20是如第3(b)圖表示,具有軸主體21、芯材22及一對的蓋子23。在軸主體21形成有貫穿軸線方向的貫穿孔21a,貫穿孔21a插入有芯材22。在將芯材22插入之後安裝蓋子23以封閉貫穿孔21a兩側的開口端。The plated holder 10 of the hard disk substrate P is a plated shaft 20 having a through-hole h inserted into the hard disk substrate P as shown in FIGS. 2, 3 (a), and 3 (b). As shown in FIG. 3 (b), the plated shaft 20 includes a shaft body 21, a core material 22, and a pair of covers 23. The shaft body 21 is formed with a through hole 21 a penetrating in the axial direction, and a core material 22 is inserted into the through hole 21 a. After inserting the core material 22, a cover 23 is attached to close the open ends on both sides of the through hole 21a.

軸主體21是以合成樹脂製材料所構成,較佳是以聚四氟乙烯(PTFE),更佳是以聚偏二氟乙烯(PVDF),最好是以聚醚醚酮(PEEK)或聚醚醚銅(PEEK)及聚四氟乙烯(PTFE)的混合材料所構成。該等的材料具有對於酸及鹼的高抗藥性,從耐磨損性、電絕緣性及機械強度等觀點由其平衡可選擇其中之一。又,該等的合成樹脂製材料在不妨礙硬碟用基板的製造的範圍也可以是其他成分的混合材料。The shaft body 21 is made of a synthetic resin material, preferably polytetrafluoroethylene (PTFE), more preferably polyvinylidene fluoride (PVDF), and most preferably polyetheretherketone (PEEK) or poly It is composed of a mixed material of ether ether copper (PEEK) and polytetrafluoroethylene (PTFE). These materials have high resistance to acids and alkalis, and one of them can be selected from the balance of wear resistance, electrical insulation, and mechanical strength. In addition, such a synthetic resin material may be a mixed material of other components so long as it does not interfere with the production of the hard disk substrate.

軸主體21具有比硬碟用基板P的貫穿孔h小徑的外圍面部21b,在其外圍面部21b凹設有溝槽30。溝槽30具有以將硬碟用基板P垂吊支撐於軸主體21的狀態使硬碟用基板P的一部分進入至內周圍端部的大小。溝槽30是在與軸主體21的軸線方向正交的方向以預定的寬度及預定的深度所形成,在硬碟用基板P的內周圍端部進入溝槽30的狀態,以與硬碟用基板P之間的寬方向的餘隙C成為0.04mm以上,且0.3mm以下的方式,形成溝槽30的寬度。The shaft body 21 has a peripheral surface portion 21b having a smaller diameter than the through-hole h of the hard disk substrate P, and a groove 30 is recessed in the peripheral surface portion 21b. The groove 30 has a size such that a part of the hard disk substrate P enters the inner peripheral end portion in a state where the hard disk substrate P is suspended and supported on the shaft body 21. The groove 30 is formed in a direction orthogonal to the axial direction of the shaft body 21 with a predetermined width and a predetermined depth. The groove 30 enters the groove 30 at the inner peripheral end portion of the hard disk substrate P, and is formed in a manner similar to the hard disk. The width C between the substrates P in the width direction is 0.04 mm or more and 0.3 mm or less, so that the width of the trench 30 is formed.

複數的溝槽30是如第3(a)圖、第3(b)圖表示,分別沿著軸主體21的周圍方向呈周圍狀連續地設置,在軸主體21的軸向隔著預定間隔例如設置60個左右。溝槽30是如第4(a)圖、第4(b)圖表示,具有:從外圍面部21b朝著軸主體21的軸心傾斜的傾斜部31;從傾斜部31的軸心側的端部朝軸心形成垂直的垂直部32;及傾斜部31與垂直部32交叉的角部33。As shown in FIGS. 3 (a) and 3 (b), the plurality of grooves 30 are continuously provided in a peripheral shape along the peripheral direction of the shaft main body 21, and a predetermined interval is arranged in the axial direction of the shaft main body 21, for example. Set about 60. The groove 30 has, as shown in FIGS. 4 (a) and 4 (b), an inclined portion 31 inclined from the peripheral surface portion 21 b toward the axial center of the shaft main body 21, and an end from the axial center side of the inclined portion 31. The portion forms a vertical portion 32 perpendicular to the axis; and a corner portion 33 where the inclined portion 31 intersects the vertical portion 32.

傾斜部31具有:一方的傾斜面31a,及與一方的傾斜面31a相對的另一方的傾斜面31b,傾斜面31a與傾斜面31b所成的角是以θ(度)所形成,傾斜部31的開口是以寬度W1(mm)所形成。所成的角θ及寬度W1是可根據電鍍軸10的構造、大小、形狀等的設定諸條件或實驗值等的數據適當選擇。The inclined portion 31 includes one inclined surface 31a and the other inclined surface 31b opposite to the one inclined surface 31a. The angle formed by the inclined surface 31a and the inclined surface 31b is formed by θ (degrees). The inclined portion 31 The opening is formed by a width W1 (mm). The formed angle θ and width W1 can be appropriately selected based on data such as conditions, experimental values, and the like of the structure, size, and shape of the plating shaft 10.

在將軸主體21插穿於硬碟用基板P的貫穿孔h垂吊支撐於硬碟用基板P的場合,以使得硬碟用基板P的內周圍端部容易進入溝槽30之垂直部32的方式,以所成角θ是例如100度左右、寬度W1為6mm左右、從外圍面部21b到傾斜部31與垂直部32交叉的角部33為止的深度DP1為2.2mm左右所形成。並且,也可以不形成此傾斜部31,而是從軸主體21的外圍面部21b直接形成垂直部32。When the shaft body 21 is inserted through the through-hole h of the hard disk substrate P, and is suspended and supported on the hard disk substrate P, so that the inner peripheral end portion of the hard disk substrate P can easily enter the vertical portion 32 of the groove 30. The angle θ is, for example, about 100 degrees, the width W1 is about 6 mm, and the depth DP1 from the peripheral surface portion 21b to the corner portion 33 where the inclined portion 31 intersects the vertical portion 32 is about 2.2 mm. In addition, instead of forming the inclined portion 31, the vertical portion 32 may be directly formed from the peripheral surface portion 21 b of the shaft body 21.

垂直部32是如第4(b)圖表示,具有:一方的內壁面32a;與一方的內壁面32a相對的另一方的內壁面32b;及底面32c。一方的內壁面32a與另一方的內壁面32b之間是以寬度W2(mm)(參閱第4(a)圖)所形成,垂直部32是以深度DP2(mm)所形成。此寬度W2是形成使硬碟用基板P的厚度t與寬度W2的差(W2-t),即與硬碟用基板P之間的寬方向的餘隙C成為0.04mm以上,且0.3mm以下。並且,當餘隙C在硬碟用基板P位於寬度W2的中心部的場合,成為間隙C1與間隙C2的合計。As shown in FIG. 4 (b), the vertical portion 32 includes: one inner wall surface 32a; the other inner wall surface 32b opposite the one inner wall surface 32a; and a bottom surface 32c. One inner wall surface 32a and the other inner wall surface 32b are formed with a width W2 (mm) (see FIG. 4 (a)), and the vertical portion 32 is formed with a depth DP2 (mm). This width W2 is formed so that the difference (W2-t) between the thickness t of the hard disk substrate P and the width W2, that is, the clearance C in the wide direction from the hard disk substrate P is 0.04 mm or more and 0.3 mm or less. . When the clearance C is at the center of the width W2 of the hard disk substrate P, the clearance C becomes the total of the clearance C1 and the clearance C2.

因此,包括硬碟用基板P的厚度t,寬度W2是形成為t+C。並且,硬碟用基板P的厚度t為0.63mm的場合,寬度W2是以0.67mm~0.75mm為佳。並且,藉此垂直部32,如第5(b)圖表示,支撐硬碟用基板P的貫穿孔h的內周圍端部。Therefore, the width W2 including the thickness t of the hard disk substrate P is formed as t + C. When the thickness t of the hard disk substrate P is 0.63 mm, the width W2 is preferably 0.67 mm to 0.75 mm. Then, as shown in FIG. 5 (b), the vertical portion 32 supports the inner peripheral end portion of the through hole h of the hard disk substrate P.

並且,餘隙C小於0.04mm時,朝間隙之電鍍液的侵入不足而會使電鍍厚度變薄,硬碟用基板P的貫穿孔h的角部,即ID槽附近會有刮痕產生。餘隙C超過0.3mm時,會因溝槽30對硬碟用基板P的支撐變得不足,在以電鍍軸20從動旋轉硬碟用基板P時會有在硬碟用基板P產生大的振動。In addition, when the clearance C is less than 0.04 mm, the penetration of the plating solution into the clearance is insufficient to reduce the thickness of the plating, and scratches may occur at the corners of the through holes h of the hard disk substrate P, that is, near the ID grooves. When the clearance C exceeds 0.3 mm, the support 30 for the hard disk substrate P becomes insufficient due to the groove 30. When the hard disk substrate P is driven by the electroplating shaft 20, a large amount of the hard disk substrate P is generated. vibration.

垂直部32的深度DP2是以從垂直部32與傾斜部31的交叉角部33到底面32c為止的距離(mm)表示。具體而言,在角部33形成有後述的倒角R,深度DP2是以從角部33的倒角R的中心到底面32c為止的距離表示。The depth DP2 of the vertical portion 32 is represented by the distance (mm) from the bottom surface 32c of the intersection angle portion 33 between the vertical portion 32 and the inclined portion 31. Specifically, a chamfer R to be described later is formed in the corner portion 33, and the depth DP2 is a distance from the center of the chamfer R of the corner portion 33 to the bottom surface 32c.

並且,深度DP2是以0.1mm以上,且1.0mm以下為佳,以0.3mm以下更佳。深度DP2小於0.1mm時,藉溝槽30對硬碟用基板P的支撐變得不足,會有大的振動產生。深度DP2超過1.0mm時,朝間隙之電鍍液的侵入不足而會使電鍍厚度變薄,在ID槽附近會有刮痕產生。The depth DP2 is preferably 0.1 mm or more and 1.0 mm or less, and more preferably 0.3 mm or less. When the depth DP2 is less than 0.1 mm, the support of the hard disk substrate P by the groove 30 becomes insufficient, and large vibrations may occur. When the depth DP2 exceeds 1.0 mm, the penetration of the plating solution into the gap is insufficient to make the plating thickness thin, and scratches may occur near the ID groove.

底面32c是沿著軸主體21的軸心形成為平坦,使底面32c與垂直部32的一方的內壁面32a正交,並使得底面32c與垂直部32的另一方的內壁面32b正交。並且,底面32c與一方的內壁面32a及另一方的內壁面32b正交的角部,也可以是硬碟用基板P的貫穿孔h的角部不干涉範圍的小的圓形或小的傾斜。The bottom surface 32c is formed flat along the axis of the shaft body 21, the bottom surface 32c is orthogonal to one inner wall surface 32a of the vertical portion 32, and the bottom surface 32c is orthogonal to the other inner wall surface 32b of the vertical portion 32. In addition, a corner portion of the bottom surface 32c orthogonal to one of the inner wall surfaces 32a and the other inner wall surface 32b may be a small circle or a small inclination of a non-interference range of a corner portion of the through hole h of the hard disk substrate P. .

角部33的倒角R只要是帶圓形的即可,在角部33形成圓形,藉此除去角部產生的毛刺,防止硬碟用基板P的刮痕產生。The chamfer R of the corner portion 33 only needs to be rounded, and a round shape is formed in the corner portion 33, thereby removing burrs generated at the corner portion and preventing scratches of the hard disk substrate P from being generated.

芯材22是由纖維強化樹膠或金屬等具有高剛性的材料所構成,插入軸主體21,可提升電鍍軸20的機械強度。一對蓋子23是以和軸主體21相同的材料所構成,單方的蓋子23是如第2圖表示,插入設置於電鍍設備的齒輪,藉此齒輪構成使電鍍軸20旋轉。The core material 22 is made of a material having high rigidity such as fiber-reinforced gum or metal, and is inserted into the shaft body 21 to improve the mechanical strength of the plated shaft 20. The pair of covers 23 are made of the same material as the shaft body 21, and the unilateral cover 23 is inserted into a gear provided in the plating equipment as shown in FIG. 2, whereby the gear structure rotates the plating shaft 20.

朝電鍍軸20,如第5(a)圖表示,對應複數個,例如形成於軸主體21的溝槽30,插入60個左右的硬碟用基板P。此外,電鍍軸20是將設置於電鍍設備的襯墊S設定在各硬碟用基板P之間所構成。As shown in FIG. 5 (a), the plating shaft 20 corresponds to a plurality of grooves 30 formed in the shaft body 21, for example, and about 60 hard disk substrates P are inserted. In addition, the plating shaft 20 is configured by setting a spacer S provided in a plating apparatus between each hard disk substrate P.

電鍍軸20是以設定著硬碟用基板P與襯墊S的狀態,裝設於電鍍設備,以浸漬在浴液內的狀態旋轉驅動。垂吊支撐於電鍍軸20的硬碟用基板P是藉電鍍軸20在浴內從動旋轉施以表面處理,在表面處理的結束後與電鍍軸20一起從浴內提起。The plating shaft 20 is mounted on the plating equipment in a state where the hard disk substrate P and the spacer S are set, and is rotationally driven while being immersed in the bath. The hard disk substrate P suspended from the plating shaft 20 is surface-treated by the plating shaft 20 following rotation in the bath, and is lifted from the bath together with the plating shaft 20 after the surface treatment is completed.

硬碟用基板P是藉著在(1)脫脂、(2)酸蝕刻、(3)脫垢、(4)1st鋅酸鹽、(5)脫鋅酸鹽、(6)2nd鋅酸鹽、(7)無電解NiP電鍍及各步驟間的水洗之浸漬於各步驟的浴液對硬碟用基板P的表面施以表面處理。電鍍軸20不限於上述(1)~(7),可將硬碟用基板P浸漬於浴液,在浴內使用於從動旋轉的步驟,例如也可使用於上述(1)~(7)的一部分的步驟,但是以使用所有的步驟為佳。The hard disk substrate P is obtained by (1) degreasing, (2) acid etching, (3) descaling, (4) 1st zincate, (5) dezincate, (6) 2nd zincate, (7) The surface of the surface of the hard disk substrate P is subjected to surface treatment with the bath solution immersed in each step by electroless NiP plating and water washing between the steps. The plating shaft 20 is not limited to the above (1) to (7), and the substrate P for a hard disk can be immersed in a bath liquid and used in the step of driven rotation in the bath. For example, it can also be used in the above (1) to (7) Part of the steps, but it is better to use all the steps.

接著,針對本實施形態相關之硬碟用基板P的電鍍支架10的實施例及比較例說明。製作本實施形態相關之硬碟用基板P的電鍍支架10的實施例相關的電鍍支架及比較例的相關電鍍支架,將硬碟用基板P安裝於電鍍支架,針對第6(a)圖的表的各項目進行評估。針對實施例1~15與比較例1~3分別評估。以下,針對各實施例及各比較例說明。Next, examples and comparative examples of the plated holder 10 of the hard disk substrate P according to this embodiment will be described. The plated bracket 10 for the hard disk substrate P according to this embodiment is prepared. The plated bracket for the example and the related plated bracket for the comparative example are prepared. The hard disk substrate P is mounted on the plated bracket. The table in FIG. 6 (a) is shown. Evaluation of each project. Evaluation was performed for Examples 1 to 15 and Comparative Examples 1 to 3, respectively. Hereinafter, each Example and each comparative example are demonstrated.

(實施例1)
實施例1是如第6(a)圖表示,作為硬碟用基板P,使用厚度t為0.63mm、外徑D為95mm、內徑d為25mm的鋁合金製的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.70mm。因此,溝槽30與硬碟用基板P之間的寬方向的餘隙C是成為W2-t,即0.70mm-0.63mm= 0.07mm。溝槽30的角部33的倒角R為0.2mm。設溝槽30之垂直部32的深度DP2為0.8mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 1)
In Example 1, as shown in FIG. 6 (a), as the hard disk substrate P, an aluminum substrate made of an aluminum alloy having a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm was used. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.70 mm. Therefore, the clearance C in the wide direction between the groove 30 and the hard disk substrate P becomes W2-t, that is, 0.70 mm to 0.63 mm = 0.07 mm. The chamfer R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the trench 30 is set to 0.8 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

在實施例1中,將電鍍軸20形成長度比構成實際之電鍍設備的電鍍軸20短,可支撐10個左右的硬碟用基板P。電鍍軸20以外的其他構成是藉著與構成實際之電鍍設備的構成元件同樣所構成的實驗機進行評估。硬碟用基板P進行基底的表面處理,在表面處理之後進行與實際的電鍍設備之電鍍處理相同的無電解鎳-磷(NiP)電鍍的電鍍處理。In Example 1, the plating shaft 20 is formed to have a length shorter than that of the plating shaft 20 constituting the actual plating equipment, and can support about 10 hard disk substrates P. The components other than the plating shaft 20 were evaluated by an experimental machine configured in the same manner as the components constituting the actual plating equipment. The hard disk substrate P is subjected to a surface treatment of the base, and after the surface treatment, the same electroless nickel-phosphorus (NiP) plating as the plating treatment of the actual plating equipment is performed.

相對於如以上構成之實施例1相關的硬碟用基板P,針對基板的振動、內徑附近(內周圍端部)的刮痕、內徑附近(內周圍端部)的電鍍厚度的3項目進行評估。基板的振動是以目視觀察藉實驗機施以電鍍處理的硬碟用基板P。以◎表示幾乎不存在有硬碟用基板P的搖動。在與裝設於第7圖表示習知的電鍍軸J的實施例1相同之硬碟用基板P產生的振動比較,硬碟用基板P的振動有相當改善的是以○表示。With respect to the hard disk substrate P according to the above-mentioned structure of Example 1, three items regarding the vibration of the substrate, scratches near the inner diameter (inner peripheral end), and plating thickness near the inner diameter (inner peripheral end) are provided. to evaluate. The substrate vibration was visually observed on the hard disk substrate P subjected to the plating treatment by an experimental machine. ◎ indicates that there is almost no shaking of the hard disk substrate P. In comparison with the vibration generated in the hard disk substrate P, which is the same as that in Example 1 in which the conventional plated shaft J is installed in FIG. 7, the vibration of the hard disk substrate P is markedly improved by ○.

並且,習知的電鍍軸J是構成與實施形態相關的電鍍軸20相同,僅形成在電鍍軸的溝槽不同。具體而言,習知的電鍍軸J的溝槽是如第7圖表示,具備傾斜部K。傾斜部K具有:一方的傾斜面a,及與一方的傾斜面a相對的另一方的傾斜面b,傾斜面a與傾斜面b所成的角度是以100度形成,傾斜部K的開口是以寬度6.6mm形成。又,從傾斜部K的外圍面部g的深度是以2.2mm形成,在傾斜部的底部以0.2mm形成倒角R。The conventional plating shaft J has the same configuration as the plating shaft 20 according to the embodiment, and only the grooves formed in the plating shaft are different. Specifically, as shown in FIG. 7, the groove of the conventional plated shaft J is provided with an inclined portion K. The inclined portion K has one inclined surface a and the other inclined surface b opposite to the one inclined surface a. The angle formed by the inclined surface a and the inclined surface b is 100 degrees. The opening of the inclined portion K is It is formed with a width of 6.6mm. The depth from the peripheral surface g of the inclined portion K is 2.2 mm, and the chamfer R is formed at the bottom of the inclined portion 0.2 mm.

又,與裝設於習知之電鍍軸J的硬碟用基板P產生的振動比較,硬碟用基板P的振動稍有改善的是以△表示。並且,與裝設在習知的電鍍軸J之硬碟用基板P產生的振動相同振動的是以×表示。The vibration of the hard disk substrate P slightly improved compared to the vibration generated by the hard disk substrate P mounted on the conventional plating axis J is represented by Δ. In addition, the same vibration as that generated on the hard disk substrate P mounted on the conventional plated shaft J is indicated by ×.

內徑附近(內周圍端部)的刮痕是以光顯微鏡觀察硬碟用基板P的貫穿孔h的角部附近,即ID槽附近,使用習知的電鍍軸J與硬碟用基板P之ID槽附近的刮痕比較來判定刮痕的程度。以○表示與習知同等的刮痕,與習知比較刮痕稍微多的是以△表示,與習知比較有多數存在刮痕的是以×表示。The scratches near the inner diameter (inner peripheral end) are observed with a light microscope near the corners of the through holes h of the hard disk substrate P, that is, near the ID grooves, using a conventional plating axis J and the hard disk substrate P. Compare the scratches near the ID grooves to determine the degree of scratches. ○ indicates scratches equivalent to the conventional ones, and slightly more scratches than the conventional ones are indicated by △, and those that have a lot of scratches compared to the conventional ones are indicated by ×.

內徑附近(內周圍端部)的電鍍厚度是以雷射顯微鏡測量從硬碟用基板P的外圍附近朝貫穿孔h的平面部到ID槽附近為止的高度,即厚度。針對ID槽附近的厚度變薄的觀察剖面,與平面部比較驗證電鍍厚度是否變薄。與使用習知的電鍍軸J電鍍的硬碟用基板P之ID槽附近的電鍍厚度比較進行評估。The plating thickness near the inner diameter (the inner peripheral end portion) is measured by a laser microscope from the vicinity of the periphery of the hard disk substrate P toward the flat portion of the through-hole h to the vicinity of the ID groove, that is, the thickness. The observation section in which the thickness near the ID groove becomes thinner is compared with the flat portion to verify whether the plating thickness has become thinner. The evaluation was performed by comparison with the plating thickness near the ID groove of the hard disk substrate P plated with the conventional plating axis J.

以○表示與習知同等的厚度,與習知比較雖顯示變薄,但是剖面觀察的結果電鍍厚度與平面部比較以△表示確保有80%的厚度,剖面觀察的結果電鍍厚度與平面部比較不能確保有80%厚度的則以×表示。○ indicates the same thickness as the conventional one. Although it shows thinner compared with the conventional one, the results of the cross-section observation show that the plating thickness is compared with the flat part. The △ indicates that 80% of the thickness is ensured. If the thickness cannot be guaranteed to be 80%, it is indicated by ×.

評估實施例1相關之硬碟用基板P的結果,基板的振動為◎,內徑附近的刮痕為△,內徑附近的電鍍厚度為△。因此,可確認實施例1相關的電鍍軸20為良好。As a result of evaluating the substrate P for a hard disk related to Example 1, the vibration of the substrate was ◎, the scratches near the inner diameter were Δ, and the plating thickness near the inner diameter was Δ. Therefore, it can be confirmed that the plated shaft 20 according to Example 1 is good.

(實施例2)
實施例2是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.70mm,餘隙C為0.07mm。溝槽30的角部33的倒角部R為1.0mm。設溝槽30的垂直部32的深度DP2為0.1mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 2)
Example 2 is an aluminum substrate made of an aluminum alloy having a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.70 mm, and the clearance C is set to 0.07 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 1.0 mm. The depth DP2 of the vertical portion 32 of the trench 30 is set to 0.1 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例2相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, the plating process was performed by an experimental machine. For the substrate P for a hard disk related to Example 2, three items of the plate thickness for the vibration of the substrate, scratches near the inner diameter, and plating thickness near the inner diameter were compared with Example 1. Evaluate the same.

評估實施例2相關之硬碟用基板P的結果,基板的振動為○,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例2相關的電鍍軸20為良好。As a result of evaluating the hard disk substrate P according to Example 2, the vibration of the substrate was ○, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it can be confirmed that the plated shaft 20 according to Example 2 is good.

(實施例3)
實施例3是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.70mm,餘隙C為0.07mm。溝槽30的角部33的倒角部R為0.4mm。設溝槽30的垂直部32的深度DP2為0.15mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 3)
Example 3 is an aluminum substrate made of an aluminum alloy having a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.70 mm, and the clearance C is set to 0.07 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.4 mm. The depth DP2 of the vertical portion 32 of the groove 30 is 0.15 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例3相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。As in Example 1, the plating process was performed by an experimental machine. For the substrate P for a hard disk related to Example 3, three items of the substrate vibration, scratches near the inner diameter, and plating thickness near the inner diameter were compared with Example 1. Evaluate the same.

評估實施例3相關之硬碟用基板P的結果,基板的振動為○,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例3相關的電鍍軸20為良好。As a result of evaluating the substrate P for a hard disk related to Example 3, the vibration of the substrate was ○, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it can be confirmed that the plated shaft 20 according to Example 3 is good.

(實施例4)
實施例4是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.70mm,餘隙C為0.07mm。溝槽30的角部33的倒角部R為0.4mm。設溝槽30的垂直部32的深度DP2為0.25mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 4)
Example 4 is the same as Example 1. The hard disk substrate P is an aluminum substrate made of an aluminum alloy with a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.70 mm, and the clearance C is set to 0.07 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.4 mm. The depth DP2 of the vertical portion 32 of the trench 30 is set to 0.25 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例4相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, an electroplating process was performed by an experimental machine. For the substrate P for a hard disk related to Example 4, the three items of the substrate vibration for the substrate, the scratches near the inner diameter, and the plating thickness near the inner diameter were the same as in Example 1. Evaluate the same.

評估實施例4相關之硬碟用基板P的結果,基板的振動為○,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例4相關的電鍍軸20為良好。As a result of evaluating the hard disk substrate P according to Example 4, the vibration of the substrate was ○, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it can be confirmed that the plated shaft 20 according to Example 4 is good.

(實施例5)
實施例5是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.70mm,餘隙C為0.07mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.3mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 5)
Example 5 is an aluminum substrate made of an aluminum alloy with a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.70 mm, and the clearance C is set to 0.07 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the groove 30 is 0.3 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例5相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, an electroplating process was performed by an experimental machine. For the substrate P for a hard disk related to Example 5, the three items of the substrate vibration for the substrate, the scratches near the inner diameter, and the plating thickness near the inner diameter were the same as in Example 1. Evaluate the same.

評估實施例5相關之硬碟用基板P的結果,基板的振動為◎,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例5相關的電鍍軸20為良好。As a result of evaluating the hard disk substrate P according to Example 5, the vibration of the substrate was 基板, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it can be confirmed that the plated shaft 20 according to Example 5 is good.

(實施例6)
實施例6是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.70mm,餘隙C為0.07mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.3mm。以聚四氟乙烯(PTFE)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 6)
Example 6 is an aluminum substrate made of an aluminum alloy having a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.70 mm, and the clearance C is set to 0.07 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the groove 30 is 0.3 mm. The shaft body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polytetrafluoroethylene (PTFE).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例6相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, the plating process was performed by an experimental machine. For the substrate P for a hard disk related to Example 6, the three items of the substrate vibration, scratches near the inner diameter, and plating thickness near the inner diameter were compared with Example 1. Evaluate the same.

評估實施例6相關之硬碟用基板P的結果,基板的振動為◎,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例6相關的電鍍軸20為良好。As a result of evaluating the substrate P for a hard disk related to Example 6, the vibration of the substrate was ◎, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it was confirmed that the plated shaft 20 according to Example 6 is good.

(實施例7)
實施例7是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.70mm,餘隙C為0.07mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.3mm。以聚醚醚酮(PEEK)及聚四氟乙烯(PTFE)的混合材料形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 7)
Example 7 is the same as Example 1. The hard disk substrate P is an aluminum substrate made of an aluminum alloy with a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.70 mm, and the clearance C is set to 0.07 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the groove 30 is 0.3 mm. A shaft body 21 and a pair of covers 23 constituting the plated shaft 20 are formed of a mixed material of polyetheretherketone (PEEK) and polytetrafluoroethylene (PTFE).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例7相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。As in Example 1, the plating process was performed by an experimental machine. For the hard disk substrate P according to Example 7, three items of the plate thickness and the thickness of the plating near the inner diameter with respect to the vibration of the substrate, scratches near the inner diameter, and the first embodiment Evaluate the same.

評估實施例7相關之硬碟用基板P的結果,基板的振動為◎,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例7相關的電鍍軸20為良好。As a result of evaluating the substrate P for a hard disk related to Example 7, the vibration of the substrate was ◎, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it was confirmed that the plated shaft 20 according to Example 7 is good.

(實施例8)
實施例8是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.70mm,餘隙C為0.07mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.3mm。以聚偏二氟乙烯(PVDF)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 8)
Example 8 is the same as Example 1. The hard disk substrate P is an aluminum substrate made of an aluminum alloy with a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.70 mm, and the clearance C is set to 0.07 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the groove 30 is 0.3 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyvinylidene fluoride (PVDF).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例8相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。As in Example 1, the plating process was performed by an experimental machine. For the substrate P for a hard disk related to Example 8, the three items of the substrate vibration for the substrate, the scratches near the inner diameter, and the plating thickness near the inner diameter were the same as in Example 1. Evaluate the same.

評估實施例8相關之硬碟用基板P的結果,基板的振動為◎,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例8相關的電鍍軸20為良好。As a result of evaluating the hard disk substrate P according to Example 8, the vibration of the substrate was 基板, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it can be confirmed that the plated shaft 20 according to Example 8 is good.

(實施例9)
實施例9是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.67mm,餘隙C為0.04mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.3mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 9)
Example 9 is the same as Example 1. The hard disk substrate P is an aluminum substrate made of an aluminum alloy with a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.67 mm, and the clearance C is set to 0.04 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the groove 30 is 0.3 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例9相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。As in Example 1, the plating process was performed by an experimental machine. For the hard disk substrate P according to Example 9, three items of the plate thickness for vibrating the substrate, scratches near the inner diameter, and plating thickness near the inner diameter were compared with Example 1. Evaluate the same.

評估實施例9相關之硬碟用基板P的結果,基板的振動為◎,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例9相關的電鍍軸20為良好。As a result of evaluating the substrate P for a hard disk related to Example 9, the vibration of the substrate was ◎, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it can be confirmed that the plated shaft 20 according to Example 9 is good.

(實施例10)
實施例10是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.80mm,餘隙C為0.17mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.2mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 10)
Example 10 is an aluminum substrate made of an aluminum alloy having a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.80 mm, and the clearance C is set to 0.17 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the trench 30 is set to 0.2 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例10相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, the plating process was performed by an experimental machine. For the substrate P for a hard disk related to Example 10, the three items of the substrate vibration for the substrate, scratches near the inner diameter, and plating thickness near the inner diameter were the same as in Example 1. Evaluate the same.

評估實施例10相關之硬碟用基板P的結果,基板的振動為○,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例10相關的電鍍軸20為良好。As a result of evaluating the hard disk substrate P according to Example 10, the vibration of the substrate was ○, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it can be confirmed that the plated shaft 20 according to Example 10 is good.

(實施例11)
實施例11是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.90mm,餘隙C為0.27mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.2mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 11)
Example 11 is an aluminum substrate made of an aluminum alloy having a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.90 mm, and the clearance C is set to 0.27 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the trench 30 is set to 0.2 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例11相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。As in Example 1, the plating process was performed by an experimental machine. For the hard disk substrate P according to Example 11, three items of the plate thickness for vibrating the substrate, scratches near the inner diameter, and plating thickness near the inner diameter were compared with Example 1. Evaluate the same.

評估實施例11相關之硬碟用基板P的結果,基板的振動為△,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例11相關的電鍍軸20為良好。As a result of evaluating the substrate P for a hard disk related to Example 11, the vibration of the substrate was Δ, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it can be confirmed that the plated shaft 20 according to Example 11 is good.

(實施例12)
實施例12是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.90mm,餘隙C為0.27mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.8mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 12)
Example 12 is an aluminum substrate made of an aluminum alloy having a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.90 mm, and the clearance C is set to 0.27 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the trench 30 is set to 0.8 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例12相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, an electroplating process was performed by an experimental machine. For the substrate P for a hard disk related to Example 12, the three items of the substrate vibration for the substrate, the scratches near the inner diameter, and the plating thickness near the inner diameter were the same as in Example 1. Evaluate the same.

評估實施例12相關之硬碟用基板P的結果,基板的振動為◎,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例12相關的電鍍軸20為良好。As a result of evaluating the substrate P for a hard disk related to Example 12, the vibration of the substrate was ◎, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it was confirmed that the plated shaft 20 according to Example 12 is good.

(實施例13)
實施例13是與實施例1同樣,硬碟用基板P是厚度t為0.50mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.55mm,餘隙C為0.05mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.3mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 13)
Example 13 is an aluminum substrate made of an aluminum alloy having a thickness t of 0.50 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.55 mm, and the clearance C is set to 0.05 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the groove 30 is 0.3 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例13相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, an electroplating process was performed by using an experimental machine. For the substrate P for a hard disk related to Example 13, three items of the vibration of the substrate, scratches near the inner diameter, and plating thickness near the inner diameter were compared with Example 1. Evaluate the same.

評估實施例13相關之硬碟用基板P的結果,基板的振動為◎,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例13相關的電鍍軸20為良好。As a result of evaluating the hard disk substrate P according to Example 13, the vibration of the substrate was 基板, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it can be confirmed that the plated shaft 20 according to Example 13 is good.

(實施例14)
實施例14是與實施例1同樣,硬碟用基板P是厚度t為0.50mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.57mm,餘隙C為0.07mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.3mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 14)
Example 14 is the same as Example 1. The hard disk substrate P is an aluminum substrate made of an aluminum alloy with a thickness t of 0.50 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. It is assumed that the width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is 0.57 mm, and the clearance C is 0.07 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the groove 30 is 0.3 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例14相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, the plating process was performed by an experimental machine. For the substrate P for a hard disk related to Example 14, three items of the substrate vibration, scratches near the inner diameter, and plating thickness near the inner diameter were compared with Example 1. Evaluate the same.

評估實施例14相關之硬碟用基板P的結果,基板的振動為◎,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例14相關的電鍍軸20為良好。As a result of evaluating the hard disk substrate P according to Example 14, the vibration of the substrate was 基板, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it can be confirmed that the plated shaft 20 according to Example 14 is good.

(實施例15)
實施例15是與實施例1同樣,硬碟用基板P是厚度t為0.80mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.87mm,餘隙C為0.07mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.3mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Example 15)
Example 15 is an aluminum substrate made of an aluminum alloy having a thickness t of 0.80 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.87 mm, and the clearance C is set to 0.07 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the groove 30 is 0.3 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於實施例15相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, the plating process was performed by an experimental machine. For the hard disk substrate P according to Example 15, three items of the substrate vibration for the substrate, scratches near the inner diameter, and plating thickness near the inner diameter were compared with Example 1. Evaluate the same.

評估實施例15相關之硬碟用基板P的結果,基板的振動為◎,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認實施例15相關的電鍍軸20為良好。As a result of evaluating the hard disk substrate P according to Example 15, the vibration of the substrate was 基板, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it can be confirmed that the plated shaft 20 according to Example 15 is good.

(比較例1)
比較例1是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。電鍍軸是使用第7圖的習知的電鍍軸J。因此,如第6(a)圖表示,未形成與實施例1相同的溝槽30的垂直部32,顯示不具有溝槽。以聚醚醚酮(PEEK)形成構成電鍍軸J的軸主體及一對蓋子。
(Comparative example 1)
Comparative Example 1 is an aluminum substrate made of an aluminum alloy having a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The plating shaft is a conventional plating shaft J shown in FIG. 7. Therefore, as shown in FIG. 6 (a), the vertical portion 32 having no groove 30 similar to that of the first embodiment is formed, and it is shown that there is no groove. A shaft body and a pair of covers constituting the plated shaft J are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於比較例1相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, the plating process was performed by an experimental machine. For the substrate P for a hard disk related to Comparative Example 1, three items of the plate thickness, the scratches near the inner diameter, and the plating thickness near the inner diameter were compared with Example 1. Evaluate the same.

評估比較例1相關之硬碟用基板P的結果,基板的振動為×,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認比較例1相關的電鍍軸J之基板的振動大,不適合於電鍍軸。As a result of evaluating the substrate P for a hard disk related to Comparative Example 1, the vibration of the substrate was ×, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it was confirmed that the vibration of the substrate of the plated shaft J according to Comparative Example 1 was large, and it was not suitable for the plated shaft.

(比較例2)
比較例2是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為1.00mm,餘隙C為0.37mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為0.2mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Comparative example 2)
Comparative Example 2 is the same as in Example 1. The hard disk substrate P is an aluminum substrate made of an aluminum alloy with a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 1.00 mm, and the clearance C is set to 0.37 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the trench 30 is set to 0.2 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於比較例2相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, the plating process was performed by an experimental machine. For the hard disk substrate P according to Comparative Example 2, three items of the vibration of the substrate, scratches near the inner diameter, and plating thickness near the inner diameter were compared with Example 1. Evaluate the same.

評估比較例2相關之硬碟用基板P的結果,基板的振動為×,內徑附近的刮痕為○,內徑附近的電鍍厚度為○。因此,可確認比較例2相關的電鍍軸J之基板的振動大,不適合於電鍍軸。As a result of evaluating the substrate P for a hard disk related to Comparative Example 2, the vibration of the substrate was ×, the scratches near the inner diameter were ○, and the plating thickness near the inner diameter was ○. Therefore, it was confirmed that the vibration of the substrate of the plated shaft J according to Comparative Example 2 was large, and it was not suitable for the plated shaft.

(比較例3)
比較例3是與實施例1同樣,硬碟用基板P是厚度t為0.63mm、外徑D為95mm、內徑d為25mm,使用鋁合金構成的鋁基板。設構成電鍍軸20的軸主體21之溝槽30的垂直部32的寬度W2為0.70mm,餘隙C為0.07mm。溝槽30的角部33的倒角部R為0.2mm。設溝槽30的垂直部32的深度DP2為1.1mm。以聚醚醚酮(PEEK)形成構成電鍍軸20的軸主體21及一對蓋子23。
(Comparative example 3)
In Comparative Example 3, as in Example 1, the hard disk substrate P is an aluminum substrate made of an aluminum alloy having a thickness t of 0.63 mm, an outer diameter D of 95 mm, and an inner diameter d of 25 mm. The width W2 of the vertical portion 32 of the groove 30 constituting the shaft body 21 of the plated shaft 20 is set to 0.70 mm, and the clearance C is set to 0.07 mm. The chamfered portion R of the corner portion 33 of the groove 30 is 0.2 mm. The depth DP2 of the vertical portion 32 of the trench 30 is set to 1.1 mm. The shaft main body 21 and the pair of covers 23 constituting the plated shaft 20 are formed of polyetheretherketone (PEEK).

與實施例1同樣,藉實驗機進行電鍍處理,對於比較例3相關的硬碟用基板P,針對基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目與實施例1同樣地進行評估。In the same manner as in Example 1, the plating process was performed by an experimental machine. For the hard disk substrate P according to Comparative Example 3, three items of the substrate vibration, scratches near the inner diameter, and plating thickness near the inner diameter were compared with Example 1. Evaluate the same.

評估比較例3相關之硬碟用基板P的結果,基板的振動為◎,內徑附近的刮痕為×,內徑附近的電鍍厚度為×。因此,可確認比較例3相關的電鍍軸J之基板的振動雖然良好,但由於內徑附近的刮痕為×,內徑附近的電鍍厚度為×,可確認不適合於電鍍軸。As a result of evaluating the substrate P for a hard disk related to Comparative Example 3, the vibration of the substrate was ◎, the scratches near the inner diameter were ×, and the plating thickness near the inner diameter was ×. Therefore, it can be confirmed that although the vibration of the substrate of the plated shaft J according to Comparative Example 3 is good, the scratches near the inner diameter are ×, and the plating thickness near the inner diameter is ×, which confirms that it is not suitable for the plated shaft.

並且,如第6(b)圖表示,相對於實施例5、實施例7、實施例9、實施例15及比較例1,以實際的電鍍設備進行電鍍,針對小節塊產生率(個/面)進行驗證。小結塊產生率是藉光學式表面檢查裝置,檢查硬碟用基板P的表面,以掃描電子顯微鏡(SEM)或原子間力顯微鏡(AFM)算出成為缺點的突起的個數。判定基準為0.003個/面。並且,光學式表面檢查裝置是使用日立先端科技精密系統(Hitachi High-Tech Fine Systems)公司製的型式RS1390。In addition, as shown in FIG. 6 (b), relative to Example 5, Example 7, Example 9, Example 15 and Comparative Example 1, electroplating was performed using an actual electroplating equipment, and the generation rate (number / surface) of the nodule was measured. )authenticating. The small clump generation rate is determined by inspecting the surface of the hard disk substrate P with an optical surface inspection device, and calculating the number of protrusions that are defective with a scanning electron microscope (SEM) or an atomic force microscope (AFM). The determination criterion was 0.003 pieces / surface. The optical surface inspection apparatus uses a model RS1390 manufactured by Hitachi High-Tech Fine Systems.

小結塊產生率在實施例5為0.002,實施例7、實施例9及實施例15為0.001,符合判定基準,確認可適合於電鍍軸。相對於此,比較例1的小結塊產生率為0.010,不符合判定基準,可確認不適合於電鍍軸。並且,第6(b)表示的「-」是表示未實施驗證,但針對其他未實施的各實施例,針對硬碟用基板P的基板的振動、內徑附近的刮痕、內徑附近的電鍍厚度的3項目獲得良好的評估結果,因此可推定小結塊產生率也符合判定基準。The small clump generation rate was 0.002 in Example 5, and was 0.001 in Example 7, Example 9, and Example 15, which met the judgment criteria and was confirmed to be suitable for plating shafts. On the other hand, the small clump generation rate of Comparative Example 1 was 0.010, which did not meet the determination criteria, and it was confirmed that it was not suitable for the plating shaft. In addition, the "-" shown in 6 (b) indicates that verification has not been performed, but for other examples not implemented, the vibration of the substrate of the hard disk substrate P, scratches near the inner diameter, and The 3 items of plating thickness obtained good evaluation results, so it can be estimated that the occurrence rate of small clumps is also in line with the judgment criteria.

以下,針對本實施形態相關硬碟用基板P之電鍍支架10的效果說明。The effect of the plated holder 10 of the hard disk substrate P according to this embodiment will be described below.

本實施形態相關之硬碟用基板P的電鍍支架10是以硬碟用基板P的厚度t與溝槽30的寬度W2的餘隙C為0.04mm以上,且0.3mm以下的寬度W2形成溝槽30。藉此構成,抑制起因於超過0.3mm的餘隙C之硬碟用基板的振動產生,獲得起因於成為小於0.04mm的餘隙C之電鍍厚度的薄膜化的效果。並且,也可獲得起因於振動的內徑附近之刮痕的防止效果。The plated support 10 of the hard disk substrate P according to this embodiment is such that the clearance C between the thickness t of the hard disk substrate P and the width W2 of the groove 30 is 0.04 mm or more, and the width W2 of 0.3 mm or less forms a groove. 30. With this configuration, the occurrence of vibration of the hard disk substrate caused by the clearance C exceeding 0.3 mm is suppressed, and the effect of reducing the thickness of the plating due to the thickness C of the clearance C smaller than 0.04 mm is obtained. In addition, the effect of preventing scratches near the inner diameter due to vibration can also be obtained.

又,本實施形態相關之硬碟用基板P的電鍍支架10是以深度為0.1mm以上,且1.0mm以下形成溝槽30。藉此溝槽,可獲得抑制起因於深度形成小於0.1mm的溝槽30之硬碟用基板P的振動產生的效果。並且,可獲得起因於深度超過1.0mm之溝槽30的電鍍厚度薄膜化的效果。In addition, the plating bracket 10 of the hard disk substrate P according to this embodiment is formed with a groove 30 having a depth of 0.1 mm or more and 1.0 mm or less. With this groove, it is possible to obtain the effect of suppressing the vibration of the hard disk substrate P caused by the groove 30 having a depth of less than 0.1 mm. In addition, it is possible to obtain the effect of reducing the thickness of the plating thickness of the trench 30 having a depth exceeding 1.0 mm.

又,本實施形態相關之硬碟用基板P的電鍍支架10為溝槽30的開口部的角具有圓形。藉此構成,防止在開口部的角有毛刺產生,可防止在支撐於溝槽30的硬碟用基板P有刮痕附著的效果。In the plated holder 10 of the hard disk substrate P according to the present embodiment, the corners of the openings of the grooves 30 have circular shapes. With this configuration, the occurrence of burrs at the corners of the openings can be prevented, and the effect of scratches on the hard disk substrate P supported by the grooves 30 can be prevented.

又,本實施形態相關之硬碟用基板P的電鍍支架10是溝槽30的底面32c為平坦,底面32c與溝槽30的一方的傾斜面31a及另一方的傾斜面31b為正交。藉此構成,在溝槽30的底面32c以穩定的姿勢狀態支撐硬碟用基板P,可獲得抑制振動產生的效果。In the plated holder 10 of the hard disk substrate P according to this embodiment, the bottom surface 32c of the groove 30 is flat, and the bottom surface 32c is orthogonal to one of the inclined surfaces 31a and the other inclined surface 31b of the groove 30. With this configuration, the hard disk substrate P is supported on the bottom surface 32c of the groove 30 in a stable posture state, and the effect of suppressing the occurrence of vibration can be obtained.

又,本實施形態相關之硬碟用基板P的電鍍支架10為硬碟用基板P的電鍍支架10的材質是以聚四氟乙烯(PTFE)為佳,更佳為聚偏二氟乙烯(PVDF),最佳為聚醚醚酮(PEEK),或聚醚醚銅(PEEK)及聚四氟乙烯(PTFE)的混合材料所構成。藉此構成,獲得確保電鍍支架10的高耐磨損性、對於酸及鹼的高抗藥性、高電絕緣性及高機械強度的效果。又,本實施形態相關之硬碟用基板P的電鍍支架10,由於具有高耐磨損性、抗藥性,可獲得抑制異物從電鍍支架10產生的效果。In addition, the plated bracket 10 of the hard disk substrate P according to this embodiment is a plated bracket 10 of the hard disk substrate P. The material is preferably polytetrafluoroethylene (PTFE), and more preferably polyvinylidene fluoride (PVDF). ), Preferably composed of polyetheretherketone (PEEK), or a mixed material of polyetherethercopper (PEEK) and polytetrafluoroethylene (PTFE). With this configuration, the effects of securing high abrasion resistance, high chemical resistance to acids and alkalis, high electrical insulation, and high mechanical strength are obtained. In addition, the plated holder 10 of the hard disk substrate P according to this embodiment has high abrasion resistance and chemical resistance, so that the effect of suppressing the generation of foreign matter from the plated holder 10 can be obtained.

以上,雖已詳述本發明的實施形態,但本發明不限於上述的實施形態,在不脫離申請專利範圍記載的本發明之精神的範圍內,可進行種種的設計變更。Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-mentioned embodiments, and various design changes can be made without departing from the spirit of the present invention described in the scope of the patent application.

10‧‧‧電鍍支架10‧‧‧Plating bracket

20‧‧‧電鍍軸(電鍍支架) 20‧‧‧Plating shaft (plating bracket)

21‧‧‧軸主體 21‧‧‧axis body

21a、h‧‧‧貫穿孔 21a, h‧‧‧through hole

21b‧‧‧外圍面部 21b‧‧‧ Peripheral face

22‧‧‧芯材 22‧‧‧Core material

23‧‧‧蓋子 23‧‧‧ Cover

30‧‧‧溝槽 30‧‧‧ Trench

31‧‧‧傾斜部 31‧‧‧inclined

31a‧‧‧一方的傾斜面 31a‧‧‧one inclined surface

31b‧‧‧另一方的傾斜面 31b‧‧‧ the other side of the inclined surface

32‧‧‧垂直部 32‧‧‧ vertical section

32a‧‧‧一方的內壁面 32a‧‧‧one inner wall surface

32b‧‧‧另一方的內壁面 32b‧‧‧ the other side's inner wall surface

32c‧‧‧底面 32c‧‧‧ Underside

33‧‧‧角部 33‧‧‧ Corner

C、C1、C2‧‧‧餘隙 C, C1, C2 ‧‧‧ clearance

D‧‧‧外徑 D‧‧‧ outer diameter

d‧‧‧內徑 d‧‧‧inner diameter

DP1、DP2‧‧‧深度 DP1, DP2‧‧‧depth

P‧‧‧硬碟用基板 P‧‧‧ Hard disk substrate

t‧‧‧厚度 t‧‧‧thickness

R‧‧‧倒角 R‧‧‧ Chamfer

W1、W2‧‧‧寬度 W1, W2‧‧‧Width

第1圖是藉本發明實施形態相關之硬碟用基板的電鍍支架所支撐的硬碟用基板的圖,第1(a)圖表示硬碟用基板的透視圖,第1(b)圖表示硬碟用基板的剖面圖。FIG. 1 is a view of a hard disk substrate supported by a plating support of a hard disk substrate according to an embodiment of the present invention. FIG. 1 (a) shows a perspective view of the hard disk substrate, and FIG. 1 (b) shows A cross-sectional view of a hard disk substrate.

第2圖為本發明實施形態相關之硬碟用基板的電鍍支架的透視圖。 Fig. 2 is a perspective view of a plated holder of a hard disk substrate according to an embodiment of the present invention.

第3圖為本發明實施形態相關之硬碟用基板的電鍍支架的圖,第3(a)圖表示硬碟用基板之電鍍支架的側面圖,第3(b)圖表示在第3(a)圖的A-A切斷的剖面圖。 Fig. 3 is a view of a plated support for a hard disk substrate according to an embodiment of the present invention. Fig. 3 (a) is a side view of the plated support for a hard disk substrate. Fig. 3 (b) is shown in Fig. 3 (a). ) AA cut section.

第4圖為本發明實施形態相關之硬碟用基板的電鍍支架的側面圖,第4(a)圖表示溝槽的傾斜部及垂直部,第4(b)圖表示將溝槽的垂直部放大後的放大側面圖。 Fig. 4 is a side view of a plated support for a hard disk substrate according to an embodiment of the present invention. Fig. 4 (a) shows the inclined portion and vertical portion of the groove, and Fig. 4 (b) shows the vertical portion of the groove. Zoomed in side view.

第5圖是在本發明實施形態相關之硬碟用基板的電鍍支架裝設有硬碟用基板的狀態之硬碟用基板的電鍍支架的圖,第5(a)圖表示硬碟用基板的電鍍支架的透視圖,第5(b)圖表示在硬碟用基板的電鍍支架之溝槽部分切斷後的部分橫剖面圖。 FIG. 5 is a view of a hard disk substrate plating stand in a state where the hard disk substrate is mounted on a plating stand of a hard disk substrate according to an embodiment of the present invention, and FIG. 5 (a) shows a hard disk substrate. FIG. 5 (b) is a perspective view of the plated bracket, and a partial cross-sectional view of the plated bracket of the hard disk substrate after the groove portion is cut.

第6圖為本發明實施形態相關之硬碟用基板的電鍍支架的實施例及比較例的表,第6(a)圖表示硬碟用基板的厚度與電鍍支架的構成,第6(b)圖表示實施例及比較例的小結塊產生率。 FIG. 6 is a table of an example and a comparative example of a plated holder for a hard disk substrate according to an embodiment of the present invention. FIG. 6 (a) shows the thickness of the hard disk substrate and the configuration of the plated holder. FIG. 6 (b) The figure shows the small clumping rate of the examples and comparative examples.

第7圖是將習知之硬碟用基板的電鍍支架的溝槽放大後的側面圖。 FIG. 7 is an enlarged side view of a groove of a plating stand of a conventional hard disk substrate.

第8圖為習知之硬碟用基板的電鍍支架的圖,第8(a)圖表示溝槽的放大側面圖,第8(b)圖表示硬碟用基板裝設後的狀態之硬碟用基板的電鍍支架的放大側面圖。 Fig. 8 is a view of a conventional plated support for a hard disk substrate. Fig. 8 (a) shows an enlarged side view of the groove, and Fig. 8 (b) shows the hard disk substrate after the hard disk substrate is installed. An enlarged side view of a plated bracket of a substrate.

Claims (6)

一種硬碟用基板的電鍍支架,具備:插入中心具有貫穿孔的硬碟用基板之上述貫穿孔的軸主體,及凹設於該軸主體的表面並將上述硬碟用基板以垂吊支撐於上述軸主體的狀態使上述硬碟用基板的一部分進入的溝槽,其特徵為: 上述溝槽是在與上述軸主體的軸線方向正交的方向以預定的寬度及預定的深度所形成,以在上述硬碟用基板的一部分進入上述溝槽的狀態,使上述硬碟用基板的厚度與上述溝槽的寬度的差成為0.04mm以上,且0.3mm以下的方式,形成上述溝槽的寬度。A plating support for a hard disk substrate includes a shaft body inserted into the through hole of the hard disk substrate having a through hole in the center, and a shaft body recessed on the surface of the shaft body and supporting the hard disk substrate in a suspended manner. The groove in which the state of the shaft body allows a part of the hard disk substrate to enter is characterized in that: The groove is formed with a predetermined width and a predetermined depth in a direction orthogonal to the axial direction of the shaft body, and a part of the hard disk substrate enters the groove, so that the hard disk substrate The difference between the thickness and the width of the groove is 0.04 mm or more and 0.3 mm or less so that the width of the groove is formed. 如申請專利範圍第1項記載的硬碟用基板的電鍍支架,其中,上述溝槽的深度為0.1mm以上,且為1.0mm以下。The plated bracket for a hard disk substrate according to item 1 of the patent application scope, wherein the depth of the groove is 0.1 mm or more and 1.0 mm or less. 如申請專利範圍第1項或第2項記載的硬碟用基板的電鍍支架,其中,上述溝槽的開口部的角具有圓形的形狀。The plated holder for a hard disk substrate according to item 1 or 2 of the scope of patent application, wherein the corner of the opening of the groove has a circular shape. 如申請專利範圍第1項至第3項中任一項記載的硬碟用基板的電鍍支架,其中,上述溝槽的底面為平坦,上述底面與上述溝槽的內壁面是成正交。According to the electroplated bracket for a hard disk substrate according to any one of the claims 1 to 3, the bottom surface of the groove is flat, and the bottom surface is orthogonal to the inner wall surface of the groove. 如申請專利範圍第1項至第4項中任一項記載的硬碟用基板的電鍍支架,其中,硬碟用基板的電鍍支架的材質是選自聚四氟乙烯(PTFE)、聚偏二氟乙烯(PVDF)、聚醚醚酮(PEEK)及聚醚醚銅(PEEK)與聚四氟乙烯(PTFE)的混合材料的其中之一。The plated bracket for a hard disk substrate according to any one of claims 1 to 4, wherein the material of the plated bracket for a hard disk substrate is selected from the group consisting of polytetrafluoroethylene (PTFE) and polyvinylidene fluoride. One of polyvinyl fluoride (PVDF), polyetheretherketone (PEEK), and a mixture of polyetherethercopper (PEEK) and polytetrafluoroethylene (PTFE). 一種硬碟用基板的製造方法,其特徵為:使用申請專利範圍第1項至第5項中任一項記載的硬碟用基板的電鍍支架。A method for manufacturing a substrate for a hard disk, characterized in that it uses a plated holder of the substrate for a hard disk as described in any one of claims 1 to 5 of the scope of patent application.
TW108113140A 2018-04-18 2019-04-16 Plating support for substrates for hard disks TWI796470B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-079908 2018-04-18
JP2018079908A JP7161821B2 (en) 2018-04-18 2018-04-18 Hard disk substrate plating jig

Publications (2)

Publication Number Publication Date
TW201943889A true TW201943889A (en) 2019-11-16
TWI796470B TWI796470B (en) 2023-03-21

Family

ID=68240199

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108113140A TWI796470B (en) 2018-04-18 2019-04-16 Plating support for substrates for hard disks

Country Status (3)

Country Link
JP (1) JP7161821B2 (en)
TW (1) TWI796470B (en)
WO (1) WO2019203212A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62291725A (en) * 1986-06-10 1987-12-18 Seiko Epson Corp Manufacture of hard disk
JPS63100614A (en) * 1986-10-17 1988-05-02 Fuji Electric Co Ltd Substrate plating jig for magnetic disk
JP3091050B2 (en) * 1993-04-28 2000-09-25 富士電機株式会社 Support for disk-shaped substrate
JP2011231347A (en) * 2010-04-23 2011-11-17 Showa Denko Kk Electroless plating device and magnetic rotation transmission mechanism

Also Published As

Publication number Publication date
JP7161821B2 (en) 2022-10-27
TWI796470B (en) 2023-03-21
WO2019203212A1 (en) 2019-10-24
JP2019189886A (en) 2019-10-31

Similar Documents

Publication Publication Date Title
KR102477941B1 (en) Deposition mask, method of manufacturing deposition mask and metal plate
US7322098B2 (en) Method of simultaneous two-disk processing of single-sided magnetic recording disks
US20090304976A1 (en) Method for manufacturing glass substrate for magnetic disc
TWI691619B (en) Substrate holding device
JP2016510364A (en) Method for improving adhesion of aluminum film
JP6577636B2 (en) Polishing or grinding carrier manufacturing method, polishing or grinding carrier, and substrate manufacturing method
JP5633776B2 (en) Manufacturing method of composite ball for electronic parts
CN1910013A (en) Production method for pattern-worked porous molding or nonwoven fabric, and electric circuit components
TW201512430A (en) Tin-plated copper-alloy material for terminal having excellent insertion/extraction performance
JP2010037585A (en) Copper foil and copper foil manufacturing method
TW201943889A (en) Plating jig for hard disk substrate
JP2010236072A (en) Stacked copper foil and method for manufacturing the same
JP2007022866A (en) Method of cleaning disc-shaped glass substrate, and magnetic disc
US9217468B2 (en) Sliding member
JP2019173057A (en) Plated metallic material
JP2009101441A (en) Electrocast carrier and method of manufacturing the same
KR20220134545A (en) Metal foil, its manufacturing method, and processing method of electrodeposition drum used therefor
KR102610216B1 (en) The manufacturing method of the upright diamond conditioner using the pressing process
TWI754693B (en) Plating treatment jig and plating treatment device
JP2019069429A (en) cassette
JP2015035945A (en) Spindle motor and hard disk device
JP5957451B2 (en) Surface treatment method for metal parts
CN1799090A (en) Substrate for a stamper and preparing method for a substrate for a stamper
JP7172583B2 (en) Terminal materials for connectors
JPH09157857A (en) Jig for plating substrate for magnetic disk