TW201929062A - Device for dividing substrate capable of maintaining the parallelism of a breaking bar with respect to a substrate while the device for dividing substrate rotates the breaking bar and changes its direction of the extension - Google Patents

Abstract

The object of the present invention is to maintain the parallelism of a breaking bar with respect to a substrate in a device for dividing a substrate which rotates the breaking bar and changes its direction of the extension. A device for dividing the substrate 1 is configured to divide a substrate 100A formed with a plurality of first scribing lines S1 and a plurality of second scribing lines S2, both of which are orthogonal to each other. The breaking bar is a component configured to divide the substrate 100A by moving downward from a base 22, and has a base member 21 detachably supporting the base 22 and a bar member 23 coupled to the base member and configured to contact the substrate 100A. A second sliding drive mechanism 89 is configured to move the base in a first horizontal direction. A first sliding drive mechanism 85 is configured to move the base 22 in a second horizontal direction orthogonal to the first horizontal direction. A rotation mechanism 83 is configured to rotate the breaking bar 19 between a first posture extending in the first horizontal direction with respect to the base 22 and a second posture extending in the second horizontal direction. A tilt adjustment mechanism 27 is configured to adjust the tilt of the bar member 23 by moving at least one of the two ends of the bar member 23 up and down with respect to the base member 21.

Description

Substrate breaking device

The present invention relates to a substrate breaking device, and more particularly to a substrate breaking device for dividing a substrate made of a brittle material such as glass, ceramics, or a semiconductor wafer.

Conventionally, it has been known to use a cutter wheel (also referred to as a scribing wheel) or a laser beam on the surface of a brittle material substrate (hereinafter simply referred to as "substrate") to form mutually orthogonal X and Y directions. A method of dividing a substrate into a unit substrate by applying an external force along the scribe line to perform cracking (for example, refer to Patent Document 1).

The cracking device A described in Patent Document 1 includes a stage 1 on which the substrate W is placed. The platform 1 is rotatable in a horizontal plane and is movable in the Y direction. Above the platform 1, a beam 23 extending horizontally in the X direction is provided. The beam 23 is attached with a split rod 10 extending in the X direction, and is lifted and lowered by a lifting shaft driven by a cylinder.

When the substrate W is broken, first, the substrate W is placed on the stage 1 so that the scribe line S1 is parallel to the X direction. At this time, the score line S1 is disposed on the lower side. Then, the split rod 10 is lowered from the upper side of the substrate W toward the score line S1, whereas the hammer which is the impact member is dropped to give an impact. As a result, the crack of the score line S1 is stretched, and the substrate is broken. Further, after all the scribe lines S1 are broken, the stage 1 is rotated by 90 degrees, and the scribe lines S2 are sequentially broken by the split bars 10 in the same manner as described above.
[Prior Art Literature]
[Patent Literature]

[Patent Document 1] JP-A-2017-039271

[Questions to be solved by the invention]

In recent years, a substrate breaking device that is freely rotatable relative to a beam and movable in the X direction has been developed. In this apparatus, when the scribe line S2 is divided, the split rod is rotated in the Y direction, and then the slash line S2 is sequentially moved while moving the split rod along the beam in the X direction. Broken.
In general, the front end ridge line of the pressing blade of the splitting bar is required to apply a pressing force equally to the entire length of the score line in parallel with respect to the substrate. The reason for this is that if an error occurs in the parallelism, it is impossible to cover the entire length of the score line and press it uniformly with an appropriate pressing force, resulting in a decrease in the accuracy of the crack.
However, in the above-described substrate breaking device for rotating the split bar, the split bar is rotated by 90 degrees when the score line S1 is divided and the score line S2 is divided, so that it is difficult to maintain the crack bar relative to the substrate surface. Parallelism. The reason for this is that the inclination of the substrate which is usually placed on the stage is different from the Y direction in the X direction.

An object of the present invention is to maintain the parallelism of the split rod with respect to the substrate in the substrate breaking device that changes the direction of the extension by rotating the split rod.
[Means to solve the problem]

Hereinafter, a plurality of aspects will be described as means for solving the problem. These aspects can be combined arbitrarily as needed.

A substrate breaking device according to an aspect of the present invention is for dividing a substrate formed with a plurality of first scribe lines and a plurality of second scribe lines which are orthogonal to each other, and has a pedestal, a split rod, a first drive mechanism, a second drive mechanism, a rotation mechanism, and a tilt adjustment mechanism.
The split bar is divided into a base member that is detachably supported by the base by moving downward from the base, and a rod member coupled to the base member for contacting the substrate.
The first driving mechanism moves the base in the first horizontal direction.
The second driving mechanism moves the base in a second horizontal direction orthogonal to the first horizontal direction.
The rotating mechanism rotates the split bar between a first posture extending in a first horizontal direction relative to the base and a second posture extending in a second horizontal direction.
The tilt adjustment mechanism adjusts the tilt of the rod member by moving at least one of both ends of the rod member up and down with respect to the base member.
With this device, for example, the split bar is divided into a plurality of first scribe lines while moving in the second horizontal direction in the state of the first posture, and then the split bar is in the second posture state, The plurality of second scribe lines are divided while moving in the first horizontal direction.
With this device, the inclination of the split rod can be maintained high by changing the inclination of the split rod when the first score line is divided and the second score line is divided by the tilt adjustment mechanism.

The tilt adjustment mechanism may include a motor fixed to the base member and a power transmission mechanism that converts the rotational force of the motor into the vertical direction and transmits the force to the rod member.
With this device, the rod member can be moved relative to the base member in a simple configuration.

The substrate cutting device may further include a guiding portion that guides the rod member in the vertical direction with respect to the base member.
With this device, the posture of the rod member with respect to the base member is stabilized.

The substrate cutting device may further include: an up-and-down driving mechanism that moves the split bar up and down with respect to the base.
With this device, the split rod can contact the substrate by lowering relative to the base.

The substrate cutting device may further include a hammer body that is attached to the susceptor and that is broken from the susceptor to collide with the rupture rod from above to break the substrate.
With this device, the substrate can be broken by the hammer colliding with the split rod in a state in which the rod member of the split rod abuts against the substrate.

1. First Embodiment (1) Substrate Breaking Apparatus A substrate cutting apparatus 1 according to a first embodiment will be described with reference to Fig. 1 . Fig. 1 is a perspective view showing a substrate cutting device according to a first embodiment of the present invention. In addition, in each figure, the arrow X is the first horizontal direction, and the arrow Y is the second horizontal direction.
The substrate cutting device 1 is formed by pressing the substrate 100A (FIG. 15) in which the scribe line (grooving) is formed in the previous step, from the opposite side of the scribe line, to bend the substrate 100A. A device for cutting the substrate 100A by scribe lines. Specifically, on the substrate 100A, a plurality of first scribe lines S1 and a plurality of second scribe lines S2 which are orthogonal to each other are formed.

The substrate cutting device 1 has a belt conveyor device 3 having a mounting surface 3a on which the substrate 100A is placed. The belt conveyor device 3 can transport the substrate 100A in the second horizontal direction.
The substrate breaking device 1 has a beam (beam) 9 extending in the first direction. The beam 9 is disposed above the mounting surface 3a of the belt conveyor device 3, and is movable in the second horizontal direction along the rail 15 by the second sliding drive mechanism 89 (an example of the second driving mechanism) .

(2) Split-bar lifting device The split-bar lifting device 11 will be described with reference to Figs. 2 to 8 . Fig. 2 is a partially enlarged view of Fig. 1 and is a perspective view of the split rod lifting device. Figure 3 is a front view of the split-bar lifting device. Figure 4 is a rear view of the split bar lifting device. Figure 5 is a perspective view of a split bar. Figure 6 is a partial enlarged view of Figure 5. Figure 7 is a side elevational view of the split bar lifting device. Figure 8 is a cross-sectional view of the front end portion of the splitting bar.

The split rod lifting device 11 has a split rod 19. The split rod 19, held in the beam 9, extends along, for example, the first horizontal direction. The split rod 19 is stationary at a position contacting the surface of the substrate 100A, and in this state, the hammer 29 as the impact member is dropped on the split rod 19, and the substrate 100A is broken along the score line by the impact (described later). ).
The split rod 19 is a member that can divide the substrate 100A by moving downward from the beam 9, and has a support member 21 (an example of a base member) that is detachably supported by the beam 9 and is coupled to the support member 21 and used. The rod member 23 of the substrate 100A and the tilt adjustment mechanism 27 (an example of the tilt adjustment mechanism) are brought into contact.

The support member 21 is supported to be movable in the vertical direction with respect to the support portion 22 of the beam 9. The support member 21 can be raised and lowered by the lifting device 81 (Fig. 13, an example of the upper and lower drive mechanisms). The support portion 22 is supported by the beam 9 via a rotation mechanism 83 (Fig. 13, an example of a rotation mechanism). The rotation mechanism 83 rotates the split rod between a first posture (Fig. 15) extending in the first horizontal direction with respect to the beam 9 and a second posture (Fig. 19) extending in the second horizontal direction. The rotation mechanism 83 is movable in the first horizontal direction along the beam 9 by the first slide drive mechanism 85 (Fig. 13, an example of the first drive mechanism).
The support member 21 has a plate member 21a. The plate-like member 21a extends, for example, in the first horizontal direction and faces the main surface in the second horizontal direction.

The rod member 23 has a support plate 23a, a pressing plate 23b, and a plurality of connecting plates 23c. The pressing plate 23b is inserted into the plurality of connecting plates 23c, and is attached to the support plate 23a so as to be vertically adjustable. The pressing plate 23b has a pressing blade 23d extending linearly in the first horizontal direction at its lower end, for example.
The connecting plate 23c is attached so as to be movable in the vertical direction along the dovetail groove formed on the support plate 23a so as to extend up and down, and the vertical position can be adjusted by rotating the upper and lower adjusting bolts.

The tilt adjustment mechanism 27 is a mechanism for adjusting the parallelism of the pressing blade 23d of the rod member 23 with respect to the substrate 100A by adjusting the inclination of the rod member 23 with respect to the support member 21. The tilt adjustment mechanism 27 will be described later.
The hammer body 29 is a member that is attached to the support portion 22 and that causes the rod member 23 to break the substrate 100A by dropping from the support portion 22 and colliding the rod member 23 from above. The hammer body 29 is supported by the support portion 22 through the lock mechanism 87 (Fig. 13). When the locking of the lock mechanism 87 (Fig. 13) is released, the hammer body 29 will fall downward and collide with the rod member 23. Further, when the split rod 19 moves upward, the hammer 29 rises by being lifted by the split rod 19, and is locked by the lock mechanism 87 (Fig. 13).

(3) Tilt Adjustment Mechanism The tilt adjustment mechanism 27 will be described with reference to Figs. 9 to 12 . Figure 9 is a perspective view of the split bar tilt adjustment mechanism. Figure 10 is a front view of the split bar tilt adjustment mechanism. Figure 11 is a cross-sectional view taken along line XI-XI of Figure 10. Figure 12 is a cross-sectional view taken along line XII-XII of Figure 10.
The tilt adjustment mechanism 27 has a pair of mechanisms for adjusting the position in the up-down direction of the support member 21 with respect to the rod member 23 on both sides in the first horizontal direction. That is, the rod member 23 can independently raise and lower the both ends in the longitudinal direction with respect to the support member 21, whereby the inclination can be adjusted.

Hereinafter, one of the pair of mechanisms of the tilt adjustment mechanism 27 will be described.
The tilt adjustment mechanism 27 includes a motor 53, a speed reduction mechanism 55, a pinion 57, a rack 59, a plate 63, a block 65, a slider block 67, and a slide base plate 71.

The motor 53 has a rotating shaft extending in the first direction and is fixed to the support member 21.
The speed reduction mechanism 55 is fixed to the support member 21, and a torque from the motor 53 is input.
The pinion gear 57 is coupled to the output shaft of the speed reduction mechanism 55. The rack 59 extends in the up and down direction and is engaged with the pinion 57. The pinion gear 57 and the rack 59 constitute a power transmission mechanism that converts the rotational force of the motor 53 into the vertical direction and transmits the force to the rod member 23.

The plate body 63 is movable in the vertical direction with respect to the support member 21, and is fixed to the rack 59.
Further, the plate body 63 is guided by the LM guide portion 64 (an example of the guide portion) so as to move in the vertical direction with respect to the support member 21. Therefore, the posture of the plate body 63 with respect to the support member 21 is stabilized.

The block 65 is disposed close to the plate body 63.
The sliding block 67 is fixed to the upper and lower ends of the block 65 and extends in the hole of the plate 63.

The slide base plate 71 is disposed to be close to the block 65. The rod member 23 is fixed to the slide base plate 71 by a fixing portion 75. According to the above configuration, the plate body 63, the block body 65, the slide block body 67, the slide base plate body 71, and the rod member 23 are integrated, and can be relatively moved up and down with respect to the support member 21.
Among these, the rod member 23 and the slide base plate 71 are relatively movable up and down within a predetermined range, and the LM guide portion 70 is provided therebetween.
The shaft portion 73 is fixed to the slide base plate body 71 and inserted into the hole of the block body 65. Thereby, the slide base plate body 71 is rotatable relative to the block body 65 about a rotation axis extending, for example, in the first horizontal direction.

According to the above configuration, when the motor 53 rotates, the pinion gear 57, the plate body 63, the block body 65, the slide block body 67, and the slide base plate body 71 move up and down, and the one end of the rod member 23 in the longitudinal direction also follows.
As described above, both ends in the longitudinal direction of the rod member 23 can be moved in the vertical direction by the pair of mechanisms of the tilt adjusting mechanism 27. In order to adjust the inclination of the rod member 23, both of a pair of mechanisms may be driven, or one of them may be fixed as a reference side and the other may be moved as a correction side. In the latter method, the control of the tilt adjustment becomes simple.

(4) Control Configuration of Substrate Breaking Device The control configuration of the substrate breaking device 1 will be described with reference to Fig. 13 . Figure 13 is a block diagram showing the control structure of the substrate breaking device.
The substrate breaking device 1 has a controller 50. The controller 50 has a processor (for example, a CPU), a memory device (for example, a ROM, a RAM, an HDD, an SSD, etc.), various interfaces (for example, an analog/digital converter, a digital/analog converter, a communication interface, etc.). Computer system. The controller 50 performs various control operations by executing a program stored in the memory unit (corresponding to part or all of the memory area of the memory device).

The controller 50 may be constituted by a single processor or may be composed of a plurality of independent processors for each control.
A part or all of the functions of the respective elements of the controller 50 may be implemented as a program executable by the computer system constituting the controller 50. Further, a part of the functions of the respective elements of the controller 50 may be configured by a custom IC (Custom IC).

The controller 50 is connected to a lifting device 81, a rotating mechanism 83, a first sliding drive mechanism 85, a locking mechanism 87, and a second sliding drive mechanism 89.
The controller 50 is connected to a sensor for detecting the size, shape, and position of the substrate, a sensor and a switch for detecting the state of each device, and an information input device, although not shown.

(5) Substrate Breaking Operation (5-1) Principle of Substrate Breaking The principle of substrate breaking will be described using FIG. Fig. 14 is a view showing the breaking operation of the substrate.
Initially, the splitting bar 19 is placed directly above the score line.
Next, the split rod 19 is lowered from the support portion 22 of the beam 9 by the lifting device 81, and the pressing blade 23d of the rod member 23 contacts the surface of the substrate.

Next, the support member 21 is moved downward by the lifting device 81, and is separated downward from the rod member 23.
Next, the hammer body 29 is lowered by the lock mechanism 87 to give an impact to the rod member 23. Thereby, the score line is broken.
Finally, the support member 21 is moved upward by the lifting device 81, and abuts against the rod member 23 from below. Thereafter, the rise of the split rod 19 is performed.

(5-2) Operation of Substrate Breaking The substrate breaking operation will be described with reference to Figs. 15 to 20 . 15 to 20 are plan views showing one state of the substrate breaking operation. Hereinafter, the operation will be described with respect to each drawing.
In the state shown in Fig. 15, the splitting bar 19 is in a state of the first posture extending in the first horizontal direction.
First, by changing the inclination of the split rod 19 by the tilt adjustment mechanism 27, the pressing edge 23d of the split rod 19 is made parallel with respect to the surface of the substrate 100A.
As shown in Fig. 16, the beam 9 is moved in the second horizontal direction by the second slide driving mechanism 89, and the split bar 19 sequentially divides the plurality of first scribe lines S1 in the state of the first posture. Thereby, the short strip substrate 111 is formed. Further, as described above, since the parallelism between the pressing blade 23d of the splitting bar 19 and the surface of the substrate 100A is high, the first scribe line S1 is accurately divided.

As shown in FIG. 17, the beam 9 is moved in the second horizontal direction by the second slide drive mechanism 89, and the split rod 19 is disposed in the middle of the second horizontal direction of the substrate 100A.
As shown in Fig. 18, the split rod 19 is rotated by 90 degrees by the rotating mechanism 83, and is taken in the second posture extending in the second horizontal direction.
As shown in FIG. 19, the split rod 19 is moved to the one side in the first horizontal direction by the first slide driving mechanism 85. Next, in this state, the inclination of the split rod 19 is changed by the tilt adjustment mechanism 27. Therefore, the parallelism of the split rod 19 and the plurality of short strip substrates 111 can be made high.

As shown in FIG. 20, the split rod 19 is moved in the first horizontal direction by the first slide driving mechanism 85, and then the split rod 19 sequentially divides the plurality of second score lines S2 in the state of the second posture. Broken. Thereby, the unit substrate 113 is formed. Further, as described above, since the parallelism between the pressing blade 23d of the splitting bar 19 and the surface of the substrate 100A is high, the second scribe line S2 is accurately divided.
With this device, by the inclination adjustment mechanism 27 changing the inclination of the split rod 19 at the time of division of the first scribe line S1 and the division of the second scribe line S2, the split rod 19 can be parallel to the substrate 100A. The degree becomes higher. In the conventional technique, when the scribe line S1 is divided and the scribe line S2 is divided, the rupture rod is rotated by 90 degrees, so that it is difficult to maintain the parallelism of the rupture rod with respect to the substrate surface. The reason for this is that the inclination of the substrate which is usually placed on the placing portion is different from the Y direction in the X direction.

2. Other Embodiments Although the embodiments of the present invention have been described above, the present invention is not limited to the embodiments described above, and various modifications can be made without departing from the scope of the invention. In particular, the plurality of embodiments and modifications described in the present specification can be arbitrarily combined as needed.

[Industrial availability]

The present invention can be widely applied to a substrate breaking device that breaks a substrate made of a brittle material such as glass, ceramics, or a semiconductor wafer.

1‧‧‧Substrate breaking device

3‧‧‧Band conveyor device

9‧‧‧ beams

11‧‧‧Cracking rod lifting device

19‧‧‧Break

21‧‧‧Support components

21a‧‧‧Plate members

22‧‧‧Support Department

23‧‧‧ rod components

27‧‧‧ tilt adjustment mechanism

29‧‧‧ Hammer

50‧‧‧ Controller

71‧‧‧Slider base plate

75‧‧‧Fixed Department

100A‧‧‧Substrate

Fig. 1 is a perspective view showing a substrate cutting device according to a first embodiment of the present invention.

Fig. 2 is a partially enlarged view of Fig. 1 and is a perspective view of the split rod lifting device.

Figure 3 is a front view of the split-bar lifting device.

Figure 4 is a rear view of the split bar lifting device.

Figure 5 is a perspective view of a split bar.

Figure 6 is a partial enlarged view of Figure 5.

Figure 7 is a side elevational view of the split bar lifting device.

Figure 8 is a cross-sectional view of the front end portion of the splitting bar.

Figure 9 is a perspective view of the split bar tilt adjustment mechanism.

Figure 10 is a front view of the split bar tilt adjustment mechanism.

Figure 11 is a cross-sectional view taken along line XI-XI of Figure 10.

Figure 12 is a cross-sectional view taken along line XII-XII of Figure 10.

Figure 13 is a block diagram showing the control structure of the substrate breaking device.

Fig. 14 is a view showing the breaking operation of the substrate.

Fig. 15 is a plan view showing one state of the substrate breaking operation.

Fig. 16 is a plan view showing one state of the substrate breaking operation.

Fig. 17 is a plan view showing one state of the substrate breaking operation.

Fig. 18 is a plan view showing one state of the substrate breaking operation.

Fig. 19 is a plan view showing one state of the substrate breaking operation.

Fig. 20 is a plan view showing one state of the substrate breaking operation.

Claims (6)

A substrate breaking device for dividing a substrate formed with a plurality of first scribe lines and a plurality of second scribe lines orthogonal to each other, wherein: Pedestal a split bar that can be divided by a base member that is detachably supported by the base by moving downward from the base, and a rod that is coupled to the base member and that contacts the substrate member; a first driving mechanism that moves the base in a first horizontal direction; a second driving mechanism, the base is moved in a second horizontal direction orthogonal to the first horizontal direction; a rotating mechanism that rotates the split bar between a first posture extending in a first horizontal direction relative to the base and a second posture extending in a second horizontal direction; The tilt adjustment mechanism adjusts the tilt of the rod member by moving at least one of both ends of the rod member up and down with respect to the base member. The substrate breaking device according to the first aspect of the patent application, wherein The aforementioned tilt adjustment mechanism has: a motor fixed to the aforementioned base member; The power transmission mechanism converts the rotational force of the motor into a vertical direction and transmits the torque to the rod member. The substrate breaking device according to claim 1, further comprising: The guide portion guides the rod member in the vertical direction with respect to the base member. The substrate breaking device according to claim 2, further comprising: The guide portion guides the rod member in the vertical direction with respect to the base member. The substrate breaking device according to any one of claims 1 to 4, further comprising: The upper and lower drive mechanisms move the split rod up and down with respect to the base. The substrate breaking device according to claim 5, further comprising: The hammer body is mounted on the susceptor, and is dropped from the susceptor to collide with the rupture rod from above, and the rupture rod is divided into the substrate.