TW201928532A - Light-source device, discharge lamp and manufacturing method therefor, and exposure device - Google Patents

Abstract

A light-source device (30) for making a discharge lamp (1) emit light, the discharge lamp having a glass tube in which an anode and a cathode are provided and a base part (28, 26) provided, for a light-emitting part of the discharge lamp (1), to each of the anode side and cathode side, wherein the light source device is provided with: a storage part (54) for storing the discharge lamp (1); a support member (33) for removably supporting the base parts (26) of the discharge lamp (1); a clamp mechanism (52) for removably coupling power cables (24) to the base parts (28) of the discharge lamp (1) that are supported by the support member (33); and a lamp conveyance system (56) for conveying the discharge lamp (1), by holding the base parts (28), between the storage part (54) and the support member (33) while the support of the base parts (26) by the support member (33) and the coupling of the power cables (24) to the base parts (28) by the clamp mechanism (52) are released. The discharge lamp (1) can be efficiently replaced.

Description

   Replacement method and lighting method of discharge lamp, discharge lamp and manufacturing method thereof   

The present invention relates to a discharge lamp, a manufacturing method of the discharge lamp, a replacement method and a lighting method of the discharge lamp, a light source device provided with the discharge lamp, an exposure device provided with the light source device, and a method of manufacturing an element using the exposure device.

In the lithography process for manufacturing various elements (liquid crystal display elements or semiconductor elements, etc.), it is used to transfer the pattern formed on the photomask to a substrate (glass plate or semiconductor wafer, etc.) coated with a photosensitive material. Among exposure apparatuses such as a single exposure type projection exposure apparatus and a scanning exposure type projection exposure apparatus, there is an exposure apparatus equipped with an exposure light source device constituted by a combination of a discharge lamp such as an ultra-high pressure mercury lamp and a condenser lens.

In the conventional light source device, there is a flange portion and a stepped portion provided on a side of a discharge lamp. In a state where a surface of a base portion provided with an opening is loaded on the flange portion, the opening is placed in the opening. The stepped portion fixes the discharge lamp with a downward force by a lever member or the like (for example, refer to Patent Document 1). In addition, when a discharge lamp used for an exposure device exceeds a predetermined allowable time, exposure performance (resolution, etc.) may be deteriorated due to a decrease in illumination. Therefore, in the past, when the cumulative use time of the discharge lamp exceeded its allowable time, the operator replaced the discharge lamp with an unused discharge lamp by manual operation.

Advance technical literature

[Patent Document 1] International Publication No. 2007/066947

Due to the high temperature of the discharge lamp used in the exposure device, in the past, when the operator wanted to replace the discharge lamp by manual operation, after the discharge lamp was turned off, it was necessary to wait for more than 30 minutes before performing the operation. Therefore, the downtime of the exposure apparatus is long and the throughput (productivity) of the exposure process is low.

In addition, recent scanning exposure type exposure devices have been required to illuminate a wider area of the photomask with exposure light and to scan the photomask at a higher speed in order to improve productivity. Therefore, it is necessary to supply light with higher illuminance from the light source device. For this reason, it is considered that, for example, a plurality of discharge lamps are provided, and the light from the plurality of discharge lamps is synthesized and used. However, when the light source device has a plurality of discharge lamps, the replacement frequency of the discharge lamp is increased, which may cause the downtime of the exposure device to be longer, thereby suppressing the improvement of productivity.

According to a first aspect of the present invention, there is provided a light source device for a glass member having a first electrode and a second electrode for forming a light-emitting portion provided therein, and the first and second electrodes respectively provided on the glass member to the light-emitting portion. The discharge lamp of the first mouthpiece member and the second mouthpiece member on the first electrode side and the second electrode side emits light, and is characterized by comprising: a storage section for storing the discharge lamp; and the second section of the discharge lamp. A support portion where the lamp mouth member is detachably supported; a member which transmits power is detachably connected to the connection portion of the first lamp mouth member of the discharge lamp supported by the support portion; and In a state where the support portion supports the second lamp mouth member and the connection portion releases the connection between the power transmitting member and the first lamp mouth member, the first lamp mouth member holds the discharge lamp in the state A transfer unit that transfers between the storage unit and the support unit.

A second aspect provides a method for replacing a discharge lamp, which comprises replacing a glass member having a light-emitting portion, and a discharge lamp provided with a first lamp mouth member and a second lamp mouth member provided to hold the glass member, comprising: : The action of disengaging the surface contacting the connected portion of the first lamp mouth member of the discharge lamp and the member transmitting the power from the connected portion; the second lamp mouth member of the discharge lamp being detachable from the supporting member An operation of holding the held portion including the non-planar portion or the inclined portion of the first nozzle member of the discharge lamp, and transferring the discharge lamp to the storage unit.

A third aspect provides a method for lighting a discharge lamp, which is to illuminate a discharge lamp having a glass member forming a light emitting portion, and a first nozzle member and a second nozzle member provided to sandwich the glass member, It includes: an operation of bringing a member that transmits power into contact with the connected portion of the first lamp mouth member of the discharge lamp; an operation of supporting the second lamp mouth member of the discharge lamp by a support member that can supply power; and The electric power is transmitted to the discharge lamp through the member for transmitting electric power and the support member, so that the discharge lamp is turned on.

A fourth aspect provides a discharge lamp having a glass member having a first electrode and a second electrode formed therein to form a light emitting portion, and a first electrode side and a first electrode provided on the glass member opposite to the light emitting portion, respectively. The first lamp mouth member and the second lamp mouth member on the two-electrode side are characterized in that: the first lamp mouth member has a member capable of transmitting electric power that can be contacted, and can reduce the electrical contact resistance with the member, so that The to-be-connected portion in which the member is in surface contact, and the to-be-held portion including a non-planar portion or an inclined portion that can be held by the transport portion.

A fifth aspect provides a method for manufacturing a discharge lamp according to the aspect of the present invention, which includes: manufacturing the glass member having a conductive member connected at one end thereof; and manufacturing a coating member having the connected portion and the held portion formed. An action; and an action of fixing the covering member so as to cover the conductive member on one end side of the glass member. .

A sixth aspect provides a method for manufacturing a discharge lamp according to an aspect of the present invention, including: preparing the glass member at one end of a first conductive member electrically connected to the first electrode or the second electrode; preparing An operation of forming the second conductive member of the connected portion and the held portion; and an operation of connecting the second conductive member to the first conductive member at one end side of the glass member.

A seventh aspect provides an exposure device including the light source device according to the aspect of the present invention, an illumination system for illuminating a mask with light emitted from the discharge lamp of the light source device, and a projection image of the pattern of the mask on a substrate Projection optics.

An eighth aspect provides a method for manufacturing a device, which includes an operation of forming a pattern of a photosensitive layer on a substrate using the exposure apparatus of the aspect of the present invention, and an operation of processing the substrate on which the pattern is formed.

1, 1A, 1B‧‧‧ discharge lamp

1N‧‧‧Unused discharge lamp

2‧‧‧ oval mirror

2a‧‧‧ opening

3‧‧‧ Bending Mirror

4‧‧‧ window components

5‧‧‧ interference filter

6‧‧‧ fly-eye lens

7‧‧‧ variable aperture diaphragm

8‧‧‧ 1st relay lens

9‧‧‧Mask

10‧‧‧ 2nd relay lens

11‧‧‧Reflector

12‧‧‧ condenser lens

13‧‧‧ Department of Lighting Optics

14‧‧‧Master Control Department

17R, 17W‧‧‧Mobile mirror

18R, 18W‧‧‧laser interferometer

19R, 19W‧‧‧Drive

20‧‧‧Power Supply Department

21‧‧‧ alignment system

22‧‧‧Aerial Image Surveying Department

23, 24‧‧‧ cable

25, 25A‧‧‧ glass tube

25a, 25Aa‧‧‧ Bulb Department

25b, 25c, 25Ab, 25Ac‧‧‧

26, 126‧‧‧ cathode side lamp mouth

26a‧‧‧ flange

26b‧‧‧Shaft

26d‧‧‧Slot

26e, 26i‧‧‧ to corner

26f‧‧‧Concave (Segment)

26g‧‧‧ pressed surface

26h‧‧‧Fixed

26k‧‧‧ Trail

26p‧‧‧Connection Department

26q‧‧‧ opening

27A, 27B‧‧‧Opening (Positioning section)

28, 128, 128A‧‧‧‧Anode side light mouth

28A, 28D‧‧‧‧Light mouth

28a, 28Aa, 28Ba, 28Ca, 28Da‧‧‧Terminals

28b, 28c, 28Ab, 28Ac, 28Bb, 28Bc, 28Cb, 28Cc ‧‧‧ Flat

28d, 28Ad, 28Bd, 28Cd ‧‧‧ recess

28e‧‧‧ Being held

28f, 28g, 28h, 28Cf, 28Cg, 28Ch‧‧‧ flat

28i, 128i, 128Ai‧‧‧ Radiator

28j, 128j, 128Aj‧‧‧ heat sink

29A, 29B, 29C‧‧‧1st ~ 3rd light boxes

30, 30A, 30B, 30D‧‧‧light source device

31‧‧‧light box

31A, 31B‧‧‧shell

31Aa‧‧‧Opening

31Ab‧‧‧Open

32‧‧‧Light source control system

33‧‧‧ support member

34‧‧‧Drive unit

34A‧‧‧Clamp mechanism

36‧‧‧ Pull-out

36c‧‧‧ Linked Department

38, 38A‧‧‧ Leverage

38Aa‧‧‧End

39‧‧‧ Coil Spring

40‧‧‧Driver

41‧‧‧Guide

42‧‧‧Shading member

43‧‧‧Connecting components

45, 45A‧‧‧ Light Replacement Door

50, 50C‧‧‧ Replacement device

51, 51A ~ 51C‧‧‧ Chassis

51a‧‧‧ opening

51b‧‧‧Window

52, 52A, 52B ‧ ‧ ‧ clamp mechanism

54‧‧‧Storage Department

56,56A, 56B, 56C, 56D

60, 60A‧‧‧ Pull out the drive unit

61‧‧‧Guide

62, 62A‧‧‧ abutment

62a, 62Aa ‧‧‧ front end

63‧‧‧Driver

64‧‧‧ relay component

65‧‧‧ support member

66, 66A‧‧‧ Power supply block

66a‧‧‧Slot

67‧‧‧ benchmark leverage

68‧‧‧Tension coil spring

69‧‧‧Drive lever

70‧‧‧roller

71, 71H, 71V‧‧‧ linear guide

71S‧‧‧Guide

72, 72A, 72B ‧‧‧ Clamp mechanism drive unit

72C‧‧‧Drive unit for power socket replacement

73‧‧‧Guide

74‧‧‧ Slider

75, 75A‧‧‧ mobile station

75Aa‧‧‧long hole

75B‧‧‧Base member

75C‧‧‧Support

76‧‧‧Driver

76a, 76b‧‧‧ connector

76L‧‧‧ Linear Actuator

77‧‧‧Driver

79‧‧‧rotating table

79a‧‧‧ opening

79b‧‧‧rotation axis

80‧‧‧Driver

82‧‧‧ support

83‧‧‧ Winding shaft

84, 84A, 84B‧‧‧Z axis drive mechanism

85, 85A, 85B ‧‧‧ holding claw opening and closing mechanism

85D‧‧‧Hand

86, 86A, 86B ‧ ‧ ‧ claw

86a‧‧‧pin

86D‧‧‧ Finger

87‧‧‧Positioning member

88‧‧‧ leaf spring

89A‧‧‧Movable lever

89B‧‧‧Mounting member

89C‧‧‧Pulley

89D‧‧‧Steel rope

89E‧‧‧Stretched coil spring

89F‧‧‧ Wheel

89G‧‧‧pole

90B‧‧‧X-axis guide

90C‧‧‧Support member

90D‧‧‧Spiral drive unit

90E‧‧‧Turning section

90F‧‧‧ support member

90G‧‧‧Turning section

90I‧‧‧Y-axis drive unit

90R‧‧‧Storage

90X‧‧‧X-axis drive mechanism

92‧‧‧ Chamber

94‧‧‧ Lifting Department

95‧‧‧Elevator

126a‧‧‧ flange

126b, 128c‧‧‧Shaft

126h‧‧‧Fixed section

126i‧‧‧to corner

126j, 128d‧‧‧ front end

126k, 128k, 128Ak‧‧‧ Connection

128Ae‧‧‧Ball Division

128a‧‧‧Terminal

128b‧‧‧Connecting section

128m, 128Am‧‧‧Middle

152‧‧‧Power Outlet

153‧‧‧Connection Department

153a‧‧‧contact surface

153c‧‧‧Fastener Department

154‧‧‧Outer tube

154a‧‧‧ flange

154c‧‧‧Vent

155‧‧‧Push button switch section

155a‧‧‧step difference

155b‧‧‧taper

156‧‧‧Compression coil spring

160, 162‧‧‧

164‧‧‧The first link part

164a, 164b, 164c‧‧‧ wrist

165‧‧‧Piston

166a‧‧‧open

167A, 167B, 167C‧‧‧ 2nd connecting rod

168A, 168B, 168C‧‧‧3rd connecting rod

169A, 169B, 169C‧‧‧arm

172‧‧‧Cage

173a‧‧‧frame member

173b‧‧‧ Lower plate

173c‧‧‧small frame-shaped member

174‧‧‧ cylindrical member

174a‧‧‧ flange

174b‧‧‧head

175‧‧‧Mounting member

176‧‧‧ boot block

177‧‧‧ on board

178‧‧‧ rod-shaped member

179‧‧‧tension coil spring

180‧‧‧Compression coil spring

181‧‧‧guide rod

226, 228‧‧‧‧light mouth tube

226a‧‧‧End

226b‧‧‧clamping part

226c‧‧‧Screw hole

228a‧‧‧small projection

228b‧‧‧screw hole

e2‧‧‧To corner

EL1‧‧‧Anode

EL2‧‧‧ cathode

EX‧‧‧Exposure device

h1, h2, h3, h4‧‧‧ hole

IL‧‧‧Exposure light

M‧‧‧Photomask

MST‧‧‧Photomask Stage

P‧‧‧ Plate

PL‧‧‧ Projection Optics

PST‧‧‧Substrate Stage

RT‧‧‧ Roof

FIG. 1 is a diagram showing a schematic configuration of an exposure apparatus according to a first embodiment.

FIG. 2 (A) is a diagram showing the discharge lamp in FIG. 1, (B) is an enlarged perspective view showing the mouth portion of the anode side lamp of FIG. 2 (A), and (C) is a view taken along the line CC of FIG. 2 (A). Sectional view.

Fig. 3 (A) is a view of the anode-side lamp mouth portion viewed from two directions, (B), (C), (D), and (E) are viewed from two directions of the first, second, third, and A diagram of an anode-side mouthpiece of a fourth modification.

FIG. 4 (A) is a partially cut-away plan view showing the light source device in FIG. 1, and (B) is a partially cut-away side view showing the light source device in FIG.

Fig. 5 is a perspective view showing an anode-side lamp mouth portion and a clamp mechanism of a discharge lamp.

FIG. 6 (A) is a plan view showing a partially cutaway portion of the light source device in the moving sliding portion, and (B) is a side view showing a partially cutaway portion of the light source device in FIG. 5 (A).

FIG. 7 (A) is a diagram showing a state of an anode-side lamp mouth portion of a clamp discharge lamp, and (B) is a diagram showing a state of releasing a clamp at the lamp mouth portion.

FIG. 8 is a side view showing a partially cutaway light source device.

FIG. 9 (A) is a plan view showing a state where the anode-side lamp mouth portion is held by the lamp holding claw, and (B) is a side view of FIG. 9 (A).

FIG. 10 (A) is a plan view showing a part of the light source device in the mobile discharge lamp, and (B) is a side view showing a part of the light source device in FIG. 10 (A).

Fig. 11 is a view showing a positioning portion of a rotating disk for lamp storage.

Fig. 12 is an exploded view showing a part of the discharge lamp in manufacture.

FIG. 13 (A) is a plan view showing a part of a clamp mechanism of an anode-side lamp mouth portion according to a modification, and (B) is a side view of FIG. 13 (A).

Fig. 14 (A) is a side view showing a part of the clamp mechanism of the anode-side lamp mouth part according to another modification, and (B) is a part view showing the state of the clamper with the anode-side lamp mouth part removed; Side view.

Fig. 15 is a partially cutaway side view showing a state in which the clamp on the cathode-side lamp mouth portion is removed.

Fig. 16 is a partially cutaway side view showing a light source device according to a second embodiment.

FIG. 17 is a partially cutaway side view showing a state where the sliding portion is pulled out.

Fig. 18 is a side view showing a part of a light source device according to a modification of the second embodiment.

FIG. 19 (A) is a view showing a discharge lamp according to a third embodiment, and (B) is a cross-sectional view showing a state where a mouth portion of an anode side lamp is clamped in FIG. 19 (A).

FIG. 20 (A) is a partially cut-away plan view showing the light source device of the third embodiment, and (B) is a partially cut-away side view showing the light source device of FIG. 20 (A).

Fig. 21 is a partially cutaway side view showing a state where the sliding portion is pulled out.

FIG. 22 (A) is a partially enlarged sectional view showing a power supply socket and a socket holding portion that are engaged with the anode-side lamp mouth portion, and (B) is a partially enlarged sectional view showing a state in which the power supply socket is held by the socket holding portion.

FIG. 23 (A) is a partially enlarged sectional view showing the action of removing the power supply socket engaged with the lamp mouth, and (B) is a partially enlarged sectional view showing the state immediately before the power socket is removed.

FIG. 24 is a partially enlarged cross-sectional view showing a state where the power supply socket engaged with the lamp mouth portion is removed.

FIG. 25 (A) is a partially cut-away plan view showing the light source device of the third embodiment, and (B) is a partially cut-away side view showing the light source device of FIG. 25 (A).

FIG. 26 (A) is a plan view showing the main parts of the exposure apparatus of the fourth embodiment, and (B) is a plan view showing the main parts of the state in which the discharge lamp is being replaced.

Fig. 27 is a partially cutaway side view showing an exposure apparatus according to a fourth embodiment.

Fig. 28 is a view showing a discharge lamp according to a fifth embodiment.

FIG. 29 (A) is a cross-sectional view showing a lamp replacement holding mechanism according to a fifth embodiment, and (B) is a cross-sectional view of the holding mechanism of FIG. 29 (A) viewed from the front.

FIG. 30 (A) is a diagram showing the main parts of the discharge lamp and the lamp replacement hand, and (B) is a diagram showing the main part of the state immediately before the mouth portion of the anode side lamp is clamped by the hand.

FIG. 31 (A) is a view showing a main part of a state where the anode-side light mouth part is held by a hand, and (B) is a view showing a main part of a state where the anode-side light mouth part is held by a hand.

FIG. 32 (A) is a flowchart showing an example of a method for replacing a discharge lamp, and (B) is a flowchart showing an example of a method for manufacturing a discharge lamp.

FIG. 33 is a flowchart showing a manufacturing example of an electronic component.

    [First Embodiment]    

Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. 1 to 12. FIG. 1 shows a schematic configuration of an exposure device EX including a light source device 30 according to this embodiment. The exposure device EX is, for example, a scanning exposure type projection exposure device. In FIG. 1, the light source device 30 includes a discharge lamp 1 composed of an arc-discharge type ultra-high pressure mercury lamp, a support member 33 that holds the cathode-side mouthpiece 26 of the discharge lamp 1, and a pull-out portion 36 of the movable support member 33 (see FIG. 4 (B)), a driving unit 34 for fixing and releasing the support member 33 of the lamp mouth portion 26, and an elliptical mirror 2 (condensing mirror) arranged so as to surround the glass tube 25 (bulb) of the discharge lamp 1. And a box-shaped light box 31 that houses the discharge lamp 1 and the oval mirror 2 during exposure (when the discharge lamp 1 is used). At the time of exposure, the light-emitting part in the glass tube 25 of the discharge lamp 1 is, for example, arranged near the first focus of the elliptical mirror 2.

The light source device 30 includes a flexible cable 24 that is detachably connected to the anode-side mouthpiece 28 of the discharge lamp 1 and is connected to the cathode-side mouthpiece 26 of the discharge lamp 1 through a support member 33. Flexible cable 23, power supply unit 20 for supplying electric power (current) to discharge lamp 1 through cables 23, 24 to cause discharge lamp 1 to emit light, and fully automatic replacement device 50 for replacing discharge lamp 1 after use . The replacement device 50 includes a clamp mechanism 52 for attaching and detaching the cable 24 to the anode-side lamp mouth portion 28, a storage portion 54 storing the discharge lamp 1, and a lamp transfer to transfer the discharge lamp 1 between the support member 33 and the storage portion 54. The box 56 is a box-shaped case 51 with the storage section 54 and the lamp transfer box 56.

Further, as shown in FIG. 4 (B), the support member 33 is actually a substantially cylindrical metal (conductive) member having an endless belt-shaped flange portion formed on the upper portion. The support member 33 is fixed to the center of the pull-out portion 36 supported by the flange 41 so as to be movable along the guide 41 on the inner surface of the light box 31 as described later. The support member 33 and the pull-out portion 36 are electrically insulated from each other. . A drive unit 34 for the lamp mouth portion 26 is provided on the bottom surface of the pull-out portion 36.

In FIG. 1, the light source device 30 includes a power source unit 20, a drive unit 34, and a light source control system 32 that controls operations of the lamp transport system 56 and the like. The light source control system 32 monitors the accumulated use time of the discharge lamp 1, and when the accumulated use time reaches a preset allowable time, even if the replacement device 50 operates, the used discharge lamp 1 is replaced with an unused discharge lamp. The detailed structure and operation of the light source device 30 will be described later.

The exposure device EX is provided with an illumination optical system 13 that illuminates the mask M using the exposure light IL selected from the light beams supplied from the light source device 30, and projects an image of the pattern of the mask M on the coating film under the exposure light IL A projection optical system PL on the surface of a plate P (photosensitive substrate) made of a glass substrate with a resist, a reticle stage MST of the moving mask M, a substrate stage PST of the moving plate P, and overall control including a light source device The main control system 14 composed of a computer operates the entire exposure device of 30.

For example, the exposure device EX is an exposure device for manufacturing liquid crystal display elements. The main body of the exposure device EX (including the mask stage MST, the projection optical system PL, and the substrate stage PST) is installed in a box-shaped cavity located in a manufacturing plant. Inside the chamber (not shown), the light source device 30 is provided on the roof RT of the chamber. When the cumulative use time of the discharge lamp 1 reaches the allowable time, the light source device 30 supplies the information of the intention to the main control system 14. Accordingly, the main control system 14 stops the exposure operation of the exposure device EX until the information that the replacement of the discharge lamp 1 is supplied from the light source device 30 is completed. In the following, the axis parallel to the optical axis AX of the projection optical system PL is the Z axis, and the X axis is parallel to the plane of the paper in FIG. 1 in a plane perpendicular to the Z axis (a substantially horizontal plane in this embodiment) and FIG. 1 Take the Y-axis for illustration.

The light beam emitted from the discharge lamp 1 converges in the vicinity of the second focal point by the elliptical mirror 2 and passes through a shutter (not shown) near the mirror 3 for diverging light to enter the optical path bending. The reflecting mirror 3 is also contained in the light box 31. The light beam reflected by the reflector 3 passes through the light-transmissive window member 4 of the light box 31 and enters the interference filter 5. The interference filter 5 only selects a predetermined bright line (for example, an i-line with a wavelength of 365 nm). Exposure light IL. In addition, as the exposure light IL, in addition to the i-line, a g-line, an h-line, or a mixed light thereof, or a glow line of a lamp other than a mercury lamp may be used. The selected exposure light IL enters the fly-eye lens 6 (optical integrator), and a plurality of secondary apertures 7 (hereinafter referred to as illumination σ stops) 7 arranged on the exit surface of the fly-eye lens 6 are formed twice. light source. The exposure light IL after passing through the variable σ diaphragm 7 passes through the first relay lens 8 and enters the mask curtain (variable field diaphragm) 9. The arrangement surface of the photomask shade 9 and the pattern surface of the photomask M are substantially conjugated, and the opening shape of the photomask shade 9 is set by the driving device 9a, so that the illumination area on the photomask M is specified. In addition, in order to prevent unnecessary exposure light, such as during stepwise movement of the plate P, from irradiating the plate P, the stage control system 15 can open and close the mask curtain 9 through the driving device 9a.

The exposure light IL of the mask 9 passes through the second relay lens 10, the reflector 11 and the condenser lens 12 for bending the light path of the exposure light IL to illuminate the pattern area of the pattern surface of the mask M. An interference filter 5, a fly-eye lens 6, a variable σ diaphragm 7, relay lenses 8, 10, a mask 9, a mirror 11, and a condenser lens 12 are included to constitute an illumination optical system 13. The light beam from the light source device 30 passes through the illumination optical system 13 to illuminate the elongated illumination area of the mask M (reticle), for example, in the Y direction as the exposure light IL. The pattern in the illumination area of the mask M passes through the projection optical system PL and is projected on the exposure area (and the illumination area) of an illuminated area of the plate P at a projection magnification β (β is, for example, equal magnification, magnification, or reduction magnification). Optically conjugated region, domain). As the projection optical system PL, a plurality of projection optical systems such as a multi projection optical system arranged in two rows in the Y direction may be used. When using such a plurality of projection optical systems, the exposure light IL from the illumination optical system 13 is a plurality of illuminated areas on the pattern surface of the illumination mask M side by side.

The photomask M is held on a photomask stage MST that can be moved on the photomask base (not shown) in the X direction, the Y direction, and the rotation direction about the Z axis. The position of the photomask stage MST is measured with high accuracy by a laser interferometer 18R that irradiates a measuring laser beam fixed to the moving mirror 17R. The measured value is supplied to the stage control system 15 and the main unit. Control system 14. Based on the measured value and the control information from the main control system 14, the stage control system 15 controls the position of the photomask stage MST through a drive system 19R including a linear motor or the like.

On the other hand, the plate P is held on the substrate stage PST through a plate holder (not shown), and the substrate stage PST is mounted on a base member (not shown) so as to be movable in the X and Y directions. on. The position of the substrate stage PST is measured with high precision by a laser interferometer 18W that irradiates a moving mirror 17W fixed thereto with a laser beam for measurement. This measurement value is supplied to the stage control system 15 and the main control. Department 14. Based on the measured value and control information from the main control system 14, the stage control system 15 controls the position of the substrate stage PST (plate P) through a drive system 19W including a linear motor or the like.

During the exposure of the plate P, the operation of moving each irradiation area of the plate P to the front of the exposure area of the projection optical system PL using the substrate stage PST is repeated in a step & scan manner (step movement) Synchronize the mask M and the plate P in the X direction (scanning direction) with the projection optical system PL while illuminating the mask M with the light beam from the light source device 30 through the illumination optical system 13 to pattern the mask M The image is exposed to a full motion (scanning exposure) of an illuminated area of the plate P. Accordingly, the image of the pattern of the photomask M is transferred to each irradiation area of the plate P.

In this exposure, alignment is performed in advance. For example, an aerial image measuring unit 22 is provided inside the substrate stage PST to detect the position of the alignment mark formed on the mask M. The aerial image measuring unit 22 is provided on the side of the projection optical system PL. An alignment system 21 is provided for detecting the positions of the alignment marks attached to the respective irradiation areas of the plate P. The detection signals of the aerial image measurement unit 22 and the alignment system 21 are supplied to the alignment signal processing system 16, and the alignment signal processing system 16 processes, for example, these detection signals to obtain the alignment information and plate of the mask M. The arrangement information of each irradiation area of the sheet P is supplied to the main control system 14. The main control system 14 controls the alignment of the mask M and the position control of the plate P during exposure based on the information. In this way, it is possible to obtain high overlap accuracy during the overlap exposure.

Next, the configuration of the light source device 30 and the replacement operation of the discharge lamp 1 using the light source device 30 in this embodiment will be described in detail. FIG. 2 (A) shows the discharge lamp 1 of the light source device 30 in FIG. In FIG. 2 (A), the discharge lamp 1 includes a glass tube 25 composed of a bulb portion 25a and two rod-shaped portions 25b and 25c fixed in a substantially symmetrical cylindrical shape, and connected to a rod-shaped portion 25b. The cathode-side mouthpiece portion 26 at one end portion and the anode-side mouthpiece portion 28 connected to, for example, the end portion of the rod-shaped portion 25c having a gradually decreasing diameter toward the other side. An anode EL1 and a cathode EL2, which are used to form a light-emitting portion, are fixed to face each other in the bulb portion 25a. The cathode EL2 and the anode EL1 are electrically connected to the lamp mouth portions 26 and 28, respectively. The lamp mouth portions 26 and 28 are formed of a metal (for example, brass) having good electrical and thermal conductivity. The mouthpiece portion 26, the glass tube 25, and the mouthpiece portion 28 are arranged along a central axis of the rod-shaped portions 25b, 25c connecting the glass tube 25 through a straight line through the center of the light-emitting portion. The direction parallel to the straight line connecting the central axes of the rod-shaped portions 25 b and 25 c is the longitudinal direction L of the discharge lamp 1.

The lamp mouth sections 26 and 28 are basically power receiving terminals for supplying power to the cathode EL2 and the anode EL1 from the power supply section 20 in FIG. 1 through the cables 23 and 24. In addition, the mouthpiece part 26 is also a supported part for supporting the glass tube 25 (discharge lamp 1) with the support member 33 (refer FIG. 4 (B)). In addition, in the lamp mouth portions 26 and 28, uneven portions (portions with an increased surface area) for efficiently dissipating heat conducted from the glass tube 25 are formed.

Further, in the lamp mouth portion 26 on the cathode side, an annular band-shaped flange portion 26a (abutting portion) having an outer diameter of approximately twice the outer diameter of the rod-shaped portion 25b is sequentially formed from the rod-shaped portion 25b to the open end side. And the specified portion of the position in the longitudinal direction L), the cylindrical shaft portion 26b (the fitting portion or the specified portion of the position) having an outer diameter slightly larger than that of the rod-shaped portion 25b, and the outer diameter of the shaft portion 26b The small cylindrical small-diameter portion 26k and the cylindrical fixing portion 26h having an outer diameter slightly smaller than that of the shaft portion 26b or an outer shape slightly the same as the shaft portion 26b. A chamfered portion 26e is formed at the boundary between the shaft portion 26b and the small-diameter portion 26k, and a chamfered portion 26i is also formed on the open end side of the fixed portion 26h. The outer shape of the cylindrical shaft portion 26b may be substantially the same as the outer shape of the rod-shaped portion 25b. The small-diameter portion 26k is formed by providing a recessed portion (segment portion) 26f between the shaft portion 26b and the fixed portion 26h in a direction crossing the longitudinal direction L of the discharge lamp 1. When the discharge lamp 1 is placed on the support member 33 in FIG. 4 (B), the flange portion 26a abuts the stepped portion that surrounds the central opening of the support member 33, and becomes the long side direction L of the light-emitting portion of the glass tube 25. The positioning reference (first direction) is a positioning reference in which the shaft portion 26b is fitted in the opening and is in a plane orthogonal to the longitudinal direction L of the light-emitting portion.

Further, in the fixed portion 26h, a pressed surface 26g is formed by the recessed portion 26f. The pressed surface 26g is a plane perpendicular to the longitudinal direction L. The drive unit 34 in FIG. 4 (B) includes a lever 38 that biases the fixing portion 26h (pressed surface 26g) of the lamp mouth portion 26 downward (-Z direction) when the discharge lamp 1 is supported by the support member 33. A tension coil spring 39 that rotates the lever 38 counterclockwise in the direction of the energizing fixing portion 26h, and a drive such as a cylinder or an electromagnetic cylinder that rotates the lever 38 in a clockwise direction to release the fixing of the lever 38 to the lamp mouth portion 26 Department 40. When the discharge lamp 1 is fixed to the support member 33 for support, it is only necessary to release the clockwise rotation of the lever 38 by the driving unit 40, and when the discharge lamp 1 is removed from the support member 33, the lever 40 is only required to be driven by the driving unit 40. 38 can be rotated clockwise. As the drive unit 34, a mechanism described in International Publication No. 2007/066947 may be used.

In FIG. 2 (A), for example, a spiral groove portion 26d is formed on the surface of the shaft portion 26b of the mouthpiece portion 26 from the flange portion 26a to the chamfered portion 26e. The cooling effect of the discharge lamp 1 can be improved by supplying, for example, a cooling gas to the groove portion 26d from the outside. Of course, the groove portion 26d is not necessarily provided. In this case, the heat generated in the discharge lamp 1 flows through the mouthpiece portion 26 to the support member 33 having a large surface area and a large heat capacity, so that the temperature rise of the discharge lamp 1 can be suppressed. In addition, in order to improve the cooling effect of the discharge lamp 1, the cooled gas may be sent from a blower (not shown) into the opening of the fixing portion 26h of the lamp mouth portion 26 of the support member 33 of FIG. 4 (B). .

FIG. 2 (C) is a cross-sectional view taken along the CC line of the discharge lamp 1 of FIG. 2 (A). As shown in FIG. 2 (C), flange portions 26a of the lamp mouth portion 26 are formed at, for example, 90 ° intervals. Two openings 27A and 27B (positioning portions). In response to this, two pins (not shown) are provided on the surface on which the flange portion 26 a is placed on the support member 33 in FIG. 4 (B). When the discharge lamp 1 is placed on the support member 33, the two pins are inserted through the openings 27A and 27B of the flange portion 26a, thereby positioning around the axis in the longitudinal direction L of the discharge lamp 1. The relative angle between the openings 27A and 27B and the anode-side lamp mouth portion 28 is set to an angle (predetermined angle) in which the lamp mouth portion 28 and the cable 24 are easily connected. The shape of the cathode-side mouthpiece 26 may be arbitrary. As the mouthpiece portion 26, for example, a member including only the flange portion 26a and the shaft portion 26b, and a recessed portion in which the front end portion of the lever 38 of the drive unit 34 can be inserted into the shaft portion 26b may be used.

Fig. 2 (B) shows the anode-side lamp mouth portion 28 of Fig. 2 (A). In FIGS. 2 (A) and 2 (B), the anode-side lamp mouth portion 28 is provided with a maximum diameter formed from the rod-shaped portion 25c in order from the rod-shaped portion 25c side of the glass tube 25 of the discharge lamp 1 to the open end side. The plurality of radiating fins 28j having substantially the same outer diameter have a plurality of radiating portions 28i, and a flat portion including three portions of the plurality of radiating fins 28j formed at approximately equal angular intervals around a straight line passing through the center of the glass tube 25. The gripped portions 28e (retained portions) of 28f, 28g, and 28h, and the substantially triangular column-shaped terminal portions 28a (connected portions) in which two V-shaped flat portions 28b and 28c are formed. At approximately the center of the flat portions 28f, 28g, and 28h of the held portion 28e, pins 86a for inserting the lamp conveying system 56 when the discharge lamp 1 is held by the lamp conveying system 56 are provided (see FIG. 9 (B)). Small hole parts h1, h2, h3.

In addition, the lamp mouth portion 28 of this embodiment is connected to the rod-shaped portion 25c provided in the glass tube 25 by bolts (not shown) provided in a plurality of openings 28k in the plane of the end portion of the held portion 28e. The end portion is a metal rod portion (not shown) electrically connected to the anode EL1. Therefore, the lamp mouth portion 28 can be removed after the discharge lamp 1 is used, and the removed lamp mouth portion 28 can be reused when a new discharge lamp 1 is manufactured. In addition, the lamp mouth portion 28 may be integrated by being adhered or welded to the glass tube 25.

FIG. 5 shows a state where the cable 24 is connected to the anode-side mouthpiece portion 28. In FIG. 5, a metal (conductive) member (hereinafter, referred to as a V-shaped groove portion 66 a having a V-shaped groove portion 66 a formed at the same angle as the flat portions 28 b and 28 c of the terminal portion 28 a of the light mouth portion 28 is connected to the end of the cable 24 (hereinafter, Weigh the power supply block) 66. In addition, the power supply block 66 is fixed to the lower end of the L-shaped reference lever 67, and the L-shaped driving lever 69 is rotatably connected to the reference lever 67 through a connecting pin P51. The P52 is rotatably fixed with a roller 70. A recessed portion 28d (see FIG. 2 (B)) is formed on the flat surface portions 28b and 28c of the terminal portion 28a of the lamp mouth portion 28 and the opposite surface (back surface) to accommodate the roller 70.

Here, the reason why the concave portion 28d (concave) is provided on the back surface of the triangular columnar terminal portion 28a is to prevent the roller 70 from shielding the condensed light as much as possible when the light emitted from the discharge lamp 1 is collected by the elliptical mirror 2. Cause of light. Therefore, for example, when miniaturizing the roller 70, it is not necessary to provide the recessed portion 28d. As described later, when the power supply block 66 is connected to the terminal portion 28a, in order to reduce the stress acting on the discharge lamp 1 as much as possible (in order to increase the flexibility of the reference lever 67 and the driving lever 69), and further The shading amount of light collected by the elliptical mirror 2 is reduced as much as possible, and the reference lever 67 and the driving lever 69 are formed as thin as possible. In addition, in FIG. 5, although the reference lever 67 connects both ends of the two L-shaped members (the other end is not shown), the reference lever 67 may be formed of one L-shaped member, or It may not be L-shaped.

The power supply block 66, the reference lever 67 and the driving lever 69 constitute a clamp mechanism 52. The other ends of the reference lever 67 and the driving lever 69 are formed to be elongated, as shown in FIG. 4 (B). In a state where the groove portion 66a of the power supply block 66 is closely pressed against the flat portions 28b and 28c of the terminal portion 28a of the lamp mouth portion 28, the roller 70 at the front end portion of the drive lever 69 is inserted into the recess portion 28d of the terminal portion 28a and The driving lever 69 rotates counterclockwise around the connecting pin P51 (fulcrum), that is, the terminal portion 28a can be stably clamped between the roller 70 and the power supply block 66 with a strong force by the lever principle. In this state, since the electric power (current) of the cable 24 can be supplied to the bulb portion 28 through the power supply block 66 with a small resistance, the power loss can be reduced. In addition, when the cable 24 (power supply block 66) is removed from the socket portion 28 (terminal portion 28a), the driving lever 69 may be rotated in the clockwise direction.

In FIG. 2 (B), the terminal portion 28a of the lamp mouth portion 28 can reduce the resistance (contact resistance) with the power supply block 66 by the V-shaped flat portions 28b and 28c, and because it is provided with a clamp mechanism The recess 28d of the roller 70 of the 52 can be stably connected to the power supply block 66. In addition, instead of providing the roller 70 at the front end of the driving lever 69, the shape of the front end portion can be formed into an arc shape, and the arc-shaped portion can be brought into close contact with the recessed portion 28d.

The shape of the terminal portion 28a of the anode-side mouthpiece portion 28 is not limited to the shape shown in FIG. 2 (B), and may have various shapes as shown in FIGS. 3 (B), (C), (D), and (E). In addition, FIG. 3 (A) shows the terminal part 28a of the lamp mouth part 28 of FIG. 2 (B) briefly. In FIGS. 3 (A) to (E), A1 to E1 are top views of the terminal portions, and A2 to E2 are side views of the terminal portions, respectively. First, as shown in the lamp mouth portion 28A of FIG. 3 (B), the terminal portion 28Aa may have a trapezoidal cross-sectional shape. In this case, the two planar portions 28Ab and 28Ac inclined symmetrically with respect to the terminal portion 28Aa contact the groove portions 66a of the power supply block 66 of the clamp mechanism 52 of FIG. The concave portion of the roller 70. The same applies hereinafter.) It is close to the front end of the driving lever 69 of the clamp mechanism 52 (or the roller 70. The same applies below).

Further, as shown in the lamp mouth portion 28B of FIG. 3 (C), the cross-sectional shape of the terminal portion 28Ba may be a polygon having a quadrangular shape or more. In the example of FIG. 3 (C), the cross-sectional shape of the terminal portion 28Ba is approximately a regular pentagonal shape, and the two planar portions 28Bb and 28Bc of the terminal portion 28Ba are symmetrically inclined to each other. The rear surface portion 28Bd is in close contact with the front end portion of the driving lever 69.

Further, as shown in the lamp mouth portion 28C of FIG. 3 (D), the cross-sectional shape of the terminal portion 28Ca may be a substantially regular hexagonal shape. In this case, the two planar portions 28Cb, 28Cc which are symmetrically inclined to the terminal portion 28Ca contact the groove portions 66a of the power supply block 66, and the opposite rear surface portions 28Cd are in close contact with the front end portion of the driving lever 69. In this case, the central portions of the three surfaces 28Cf, 28Cg, and 28Ch, which are arranged on the other side of the terminal portion 28Ca, are provided with pins 86a (see FIG. 9 (B)) for inserting the lamp transport system 56 respectively. Small holes h1, h2, h3. According to this, the terminal portion 28Ca can also serve as a grasped portion.

Further, as shown in the lamp mouth portion 28D of FIG. 3 (E), the cross-sectional shape of the terminal portion 28Da may be substantially circular. In this case, the groove corresponding to the power supply block 66A has the shape of a substantially cylindrical side surface. The groove portion 66a of the power supply block 66A is brought into contact with one half surface side of the terminal portion 28Da, and the front end portion of the driving lever 69 is brought into close contact with a recessed portion (not shown) provided on the other half surface side of the terminal portion 28Da. As described above, the shape of the terminal portion 28 a of the anode-side mouthpiece portion 28 may be arbitrary.

In addition, in FIGS. 4A and 4B and the like referred to below, for convenience of explanation, the shapes of the mouth portions 26 and 28 of the discharge lamp 1 are simplified for display. Next, FIG. 4 (A) is a plan view showing the interior of the light box 31 and the case 51 of the light source device 30 of FIG. 1, and FIG. 4 (B) is a side view showing the light source device 30 of FIG. 4 (A). In addition, in FIGS. 4 (A) and (B) and FIGS. 6 (A) and (B) referred to below, the support member 33 and the pull-out portion that support the light box 31, the case 51, the discharge lamp 1, and the like are shown in cross sections. 36 etc.

In FIGS. 4 (A) and 4 (B), the light box 31 is divided into a lower case 31A that houses the discharge lamp 1, and an upper case 31B that houses the reflecting mirror 3 and is provided with a window member 4 on the side. Openings 31Ab are provided on the adjacent surfaces of the cases 31A and 31B to allow light from the discharge lamp 1 to pass through, and the side of the + X direction of the lower case 31A is provided to allow the discharge lamp 1 and the like to pass when the discharge lamp 1 is replaced Openings 31Aa. A housing 51 of the replacement device 50 is provided on the side of the + X direction of the lower case 31A, and an opening 51a is provided on the side of the housing 51 facing the opening 31Aa to allow the discharge lamp 1 and the like to pass through.

A window portion 51b for carrying out and loading the discharge lamp 1 is provided on the side of the + X direction of the case 51. The window portion 51b is opened and closed by a door (hereinafter, referred to as a lamp replacement door) 45. The case 51 and the lower case 31A of the replacement device 50 are connected by a connecting member or the like (not shown) in order to avoid positional deviation. A storage portion 54 for the discharge lamp 1 is provided near the window portion 51b of the + X-direction end portion in the case 51, and a lamp transporting system 56 is disposed in the upper portion of the case 51. Also, although not shown, the casing 51 is provided with a filter for extracting outside air and removing dust and the like from the outside air.

In addition, a pair of guides 41 ′ are provided in parallel to the X direction so as to face the two sides in the Y direction of the lower case 31A, and a pull-out portion 36 that is movable along the guide 41 in the X direction is arranged. A central portion of the exit portion 36 supports the discharge lamp 1 through a support member 33. As the guide 41, for example, a guide mechanism of a telescopic type (multi-stage type) can be used. In addition, an elliptical mirror 2 with a circular opening 2a (see FIG. 4 (A)) is provided in the pull-out portion 36 so as to surround the discharge lamp 1, and the upper part of the lower case 31A is covered to cover the lamp mouth connected to the discharge lamp 1. As a mode of the clamp mechanism 52 of the portion 28, a light shielding member 42 having a shape such as a side surface of a truncated cone is arranged. An opening (not shown) is provided on the + X-direction side of the light shielding member 42 to allow the discharge lamp 1 and the clamp mechanism 52 to pass through when the discharge lamp 1 is replaced.

In addition, the replacement device 50 has a pull-out section in addition to the drive unit 34 for the cathode-side bezel section 26, the clamp mechanism 52 for the anode-side bezel section 28, the storage section 54, and the lamp transfer system 56. 36 is a pull-out drive unit 60 that is pulled out from the lower case 31A through the openings 31Aa and 51a to the case 51 side, and a drive unit 72 that performs the clamp mechanism 52 to clamp the lamp mouth portion 28 and release it. As shown in FIG. 4 (A), the pull-out drive unit 60 has a guide member 61 arranged in the X direction on the -Y side and a bottom surface inside the chassis 51 than a straight line parallel to the X axis through the center of the lower case 31A. A base 62 capable of moving along the guide 61 in the X direction, a driving part 63 that drives the base 62 along the guide 61 in the X direction, such as a ball screw method, a belt drive method, or a linear motor method, and a connecting member 43. The connecting member 43 is connected to the front end portion 62a of the -X direction side end portion of the base 62 protruding in the + Y direction and the Z direction, and the + X direction end portion of the pull-out portion 36 is provided in the Y direction central portion. The convex to-be-connected part 36c.

With the drive portion 63 of the pull-out drive unit 60 moving the base 62 in the + X direction along the guide 61, the pull-out portion 36 in the lower case 31A can be moved (pulled out) to be supported by the pull-out portion 36. The position where the discharge lamp 1 enters the case 51. In addition, since the pull-out portion 36 is supported by the guide 41 and the pull-out portion 36 can move smoothly along the guide 41 in the X direction, the load of the pull-out portion 36 hardly acts on the base 62. Therefore, instead of the mechanism using the guide 61 as the pull-out driving unit 60, a mechanism that moves the pull-out portion 36 in the X direction only by, for example, an air cylinder or the like may be used.

In addition, the driving unit 72 that drives the clamp mechanism 52 of the lamp mouth portion 28 of the discharge lamp 1 has an upper surface fixed to the base 62 and inclined slightly (for example, about 15 degrees) in the clockwise direction (hereinafter, The guide 73 arranged in the retracting direction D) (refer to FIG. 4 (A)) of the clamp mechanism 52 is referred to as a flat movable table placed on the guide 73 so as to be movable in the retracting direction D through the two sliders 74. 75. A driving unit 77 such as an air cylinder or an electromagnetic cylinder that drives the movable table 75 in the retreating direction D relative to the base table 62, and a support member 65 that is fixed on the movable table 75 and is elongated in the Z direction. Further, the -X direction end portion on the movable table 75 is fixed to the Z-direction slender relay member 64, the upper end of the relay member 64 is connected to the other end of the cable 24, and the relay member 64 is in the Z-direction center The other end of the cable 23 connected to the support member 33 is connected through an opening provided in the pull-out portion 36. The cable wires 23 and 24 are further connected to the power supply unit 20 of FIG. 1 through a flexible extension cable (not shown).

FIG. 7 (A) shows the detailed structure of the clamp mechanism 52 and the drive unit 72. In FIG. 7 (A), the + X-direction end of the reference lever 67 of the clamp mechanism 52 passes through the short linear guide 71H to move in a movable direction D1 (one axis) parallel to the retraction direction D of FIG. 4 (A). Direction) is supported on the upper end of the support member 65 by means of fine movement. In addition, the driving unit 72 has a tension coil spring 68 having one end fixed to the bottom of the + X direction end of the reference lever 67 and pulling the + X direction end of the driving lever 69 upward, and one end fixed to the movable table 75 The driving portion 76 such as an air cylinder or an electromagnetic cylinder that can move the + X direction end portion of the driving lever 69 downward (-Z direction). One end of the driving portion 76 is connected to the movable table 75 through a rotatable joint 76a. The front end portion of the movable element of the driving portion 76 and the end portion of the driving lever 69 are connected by a rotatable joint 76b. For example, the joint 76a may be a so-called U-joint, and the joint 76b may be a so-called knuckle joint.

In the state of FIG. 7 (A), since the driving portion 76 does not apply a force to the end of the driving lever 69, the tension of the coil spring 68 will act on the driving lever 69 in a counterclockwise direction relative to the reference lever 67. . Accordingly, the roller 70 provided at the end in the −X direction of the driving lever 69 forces the terminal portion 28 a of the lamp mouth portion 28 to the power supply block 66 side, so the terminal portion 28 a is stably held by the power supply block 66 and the roller 70. At this time, even if the distance between the movable stage 75 and the discharge lamp 1 deviates from the target value, the deviation amount will be offset by the reference lever 67 moving through the linear guide 71H to the movable direction D1. If the movable table 75 can be moved in the X direction as a whole, the linear guide 71H may not be provided.

Next, when the clamp of the terminal portion 28a by the clamp mechanism 52 is released, as shown in FIG. 7 (B), the end of the driving lever 69 is pulled downward by the driving portion 76, so that the roller 70 is moved to the terminal. The position of the part 28a is high. At this time, although the position of the end portion of the drive lever 69 is near the discharge lamp 1, the joint 76a slightly rotates the drive unit 76 due to this, so that no stress is applied to deform the drive lever 69. In this state, by moving the movable table 75 along the retreating direction D in the direction shown by arrow A2 with the driving portion 77 of FIG. 4 (B), the clamp mechanism 52 and the cable 24 can be separated from the lamp mouth portion 28. .

In addition, the lamp transport system 56 includes three claw portions 86 that hold the held portion 28e of the anode side mouth portion 28 of the discharge lamp 1 from above, a claw opening and closing mechanism 85 that opens and closes the claw portions 86, and a holding discharge. A Z-axis driving mechanism 84 that moves the lamp 1 up and down (Z direction), a winding shaft 83 that rotates the Z-axis driving mechanism 84 about an axis parallel to the Z axis, and a support portion 82 that supports the winding shaft 83 on the top of the case 51.

FIG. 9 (A) is a plan view showing a state in which the grip portion 28e of the mouthpiece portion 28 is held by the three claw portions 86, and FIG. 9 (B) is a side view of FIG. 9 (A). As shown in FIG. 9 (A), small pins 86a are provided on the surfaces of the three claw portions 86 facing the gripped portion 28e. When the discharge lamp 1 is held by the lamp transporting system 56, the pins 86a of the three claw portions 86 are positioned so as to face the hole portions h1, h2, and h3 of the flat portions 28f, 28g, and 28h of the held portion 28e, respectively. Grasping claw opening and closing mechanism 85. In this state, as shown in FIG. 9 (B), the three claw portions 86 are moved (closed) toward the center by the holding claw opening and closing mechanism 85, and the three pins 86a are inserted into the corresponding hole portions h1, h2, h3, and further The three claw portions 86 are closed until the flat portions of the three claw portions 86 contact the corresponding flat portions 28f, 28g, and 28h. In addition, since the three claw portions 86 are each connected to the holding claw opening and closing mechanism 85 through a spring mechanism (not shown) that can be displaced in the radial direction, there is no stress acting to deform the mouthpiece portion 28.

In FIGS. 4 (A) and (B), the storage unit 54 includes a plurality of discharge lamps 1 that are used up and unused discharge lamps 1 (hereinafter, referred to as discharge lamps 1N) (6 in FIG. 4 (A)). The openings 79 a (see FIG. 11) are provided as a concentric rotatable rotary disk 79 and a driving part 80 for rotating the rotary disk 79. The number of the openings 79a is the number of the discharge lamps 1, 1N that can be stored in the rotary disk 79, and the number of the discharge lamps 1, 1N that can be stored is arbitrary. The front end of the cathode lamp portion 26 of the discharge lamp 1 or 1N is inserted into these openings 79a. The discharge lamp 1 or 1N passes through the flange portion 26a (see FIG. 1 (A)) of the lamp portion 26 and is placed under its own weight.于 转盘 79。 Rotating disk 79.

As shown in FIG. 11, a plurality of openings 79 a corresponding to a plurality of openings 79 a on the side of the rotary disk 79 are provided with positioning members 87 each having a recess in the center and a semi-circular cross-section. The convex portion of the concave portion of the member 87 is provided with a leaf spring portion 88 that is deformable in the radial direction of the rotary disk 79. Rotating the rotating disk 79 around the rotating shaft 79b, and stopping the rotation of the rotating disk 79 when the positioning member 87 is engaged with the leaf spring portion 88 (elastic member), the position of the opening 79a can be accurately positioned with the lamp conveying system 56 The receiving position of the discharge lamp 1 or 1N is performed in between. Also, although not shown, a pin or the like fitted with the holes 27A, 27B in FIG. 2 (C) is provided near the opening 79a in a direction (around the Z axis) where the lamp can be positioned.

Hereinafter, an example of the operation of the light source device 30 according to this embodiment when the discharge lamp 1 is replaced by the replacement device 50 will be described. This replacement operation is controlled by the light source control system 32. First, as shown in FIG. 4 (A), an operator (not shown) opens the lamp replacement door 45 of the case 51 of the replacement device 50, and inserts the lamp mouth portion 26 of the unused discharge lamp 1N into the rotating disk of the storage portion 54 The opening 79a of 79 is attached to the rotary disk 79 through the flange portion 26a of the mouth portion 26 of the discharge lamp 1N (supplement of the discharge lamp). The rotary disk 79 can be manually rotated when the power is turned off. As described with reference to FIG. 11, the rotary disk 79 can rotate a predetermined positioning member 87 to the leaf spring portion 88 by manually setting the rotary member 79 correctly. Rotation angle of disk 79. In addition, the lamp is provided so that the rotary disk 79 can be rotated electrically.

The supplement of the discharge lamp is preferably performed in a state where the power supply from the power supply unit 20 in FIG. 1 is stopped and the discharge lamp 1 in the lower case 31A in FIG. 4 (B) is turned off. However, it is also possible to take a measure that the light of the discharge lamp 1 in the inner case 31A does not leak to the outside, and the rotating disk 79 is formed of an insulating material, so that the discharge lamp 1 can be connected with the rotating disk 79 in the lighting of the discharge lamp 1. Replace the lamp from time to time. For example, in FIG. 4 (A), six discharge lamps 1, 1N may be provided (supplemented) on the rotary disk 79, and a space may be left on the rotary disk 79 for recycling the used lamps. 4 (A) and 4 (B) show a situation in which the discharge lamp 1 is placed in the light box 31. Therefore, five discharge lamps 1N are provided on the rotary plate 79. After that, the lamp replacement door 45 is closed.

After that, the discharge lamp 1 can be replaced with the discharge lamp 1N at any time (for example, when the plate P is replaced or when the device is maintained). Alternatively, when the accumulated usage time of the discharge lamp 1 reaches the allowable time, the light source control system 32 sends the information of the intention to the main control system 14, and the main control system 14 may stop the exposure operation of the exposure device EX. The light source control system 32 stops power supply to the discharge lamp 1 from the power supply unit 20 and extinguishes the discharge lamp 1, and then operates the replacement device 50 to replace the discharge lamp 1 with the discharge lamp 1N stored in the storage unit 54.

That is, first, in FIG. 4 (B), the pull-out portion 36 of the discharge lamp 1 and the oval mirror 2 will be integrally supported in the light box 31 to pull out the drive unit 60 to + X as shown by the arrow A1. The predetermined position of the direction. As a result, the pull-out portion 36 is pulled out to the position shown in FIG. 6 (B). At this time, together with the pull-out portion 36, the clamp mechanism 52, the relay member 64, and the driving unit 72 are also pulled out to the inside of the casing 51 in the + X direction as a whole. 6 (A) is a plan view showing a partial cross section of the pull-out portion 36 and the replacement device 50 of FIG. 6 (B). In addition, in FIGS. 8 and 10 (B) and the like referred to below, in order to avoid intricate drawings, illustration of one part of the plurality of discharge lamps 1N is omitted.

Secondly, as described with reference to FIG. 7 (B), the driving portion 76 of the driving unit 72 pulls the driving lever 69 of the clamp mechanism 52 downward, so that the terminals of the lamp mouth portion 28 of the discharge lamp 1 are originally strongly forced. The roller 70 pressed by the portion 28 a against the power supply block 66 rotates around the connecting pin P51 (fulcrum) as an axis, so that the roller 70 is separated from the terminal portion 28 a and is positioned higher than the terminal portion 28 a. Thereafter, the movable stage 75 supporting the clamp mechanism 52 and the driving unit 76 is retracted in the retreating direction D in the direction indicated by arrow A2 by the driving unit 77 (see FIG. 4 (B)). At this time, the roller 70 passes above the nozzle portion 28.

Thereafter, as shown in FIG. 8, the lever 38 is rotated clockwise by the driving portion 40 of the driving unit 34 to release the clamp of the fixing portion 26 h of the cathode-side lamp mouth portion 26. Thereby, the mouthpiece part 26 can be pulled out from the support member 33. In addition, in order to avoid intricate drawings, the illustration of the driving unit 34 for the lamp mouth portion 26 is omitted in Fig. 10 (B) and the like referred to below. In addition, the clamp of the cathode-side lamp opening portion 26 may be released before the clamp of the anode-side lamp opening portion 28 is released.

Next, the rotation shaft 83 of the lamp conveyance system 56 is rotated to move the holding claw opening and closing mechanism 85 above the lamp mouth portion 28 of the discharge lamp 1. And as shown by arrow A3, the Z-axis driving mechanism 84 of the lamp conveying system 56 lowers the gripping claw opening and closing mechanism 85, and the gripping claw opening and closing mechanism 85 holds the mouth portion by closing the three claws 86 on the bottom surface thereof. 28 is held by 28e (refer to FIG. 9 (B)). Thereafter, as shown by an arrow A5 in FIG. 10 (B), the claw portion 86 holding the discharge lamp 1 is raised by the Z-axis driving mechanism 84. At this time, the discharge lamp 1 is raised to a position where the lower end of the cathode-side lamp mouth portion 26 of the discharge lamp 1 is higher than the upper surface of the pull-out portion 36 (that is, higher than the upper surface of the oval mirror 2).

Thereafter, as shown by the arrow A6 in FIG. 10 (A), the holding claw opening and closing mechanism 85 holding the discharge lamp 1 is rotated by about 180 degrees by the winding shaft 83, so that the discharge lamp 1 is moved above the rotating disk 79. At this time, the driving section 80 of the storage section 54 rotates the rotary disk 79, and the empty opening 79a of the rotary disk 79 moves below the gripping claw opening and closing mechanism 85 (discharge lamp 1). In this state, the holding claw opening and closing mechanism 85 is lowered, and the claw portion 86 is released after the front end portion of the lamp mouth portion 26 of the discharge lamp 1 is housed in the opening 79a, and the used discharge lamp 1 is placed on the rotating disk. Position 79 at A7.

After that, the holding claw opening and closing mechanism 85 of the lamp conveying system 56 is raised, and as shown by the arrow A8, the rotary disk 79 is rotated about 60 degrees, so that the unused discharge lamp 1N at the position A9 is moved below the holding claw opening and closing mechanism 85. . After that, the gripping claw opening and closing mechanism 85 is lowered again, and the gripped portion 28e of the lamp mouth portion 28 of the unused discharge lamp 1N is gripped by the claw portion 86, and then the gripping claw opening and closing mechanism 85 is raised. As shown by the dotted arrow B1, the holding claw opening and closing mechanism 85 is rotated about 180 degrees by the rotation shaft 83, as shown by the dotted arrow B1, as shown by the dotted arrow B2 in FIG. 10 (B). Then, the holding claw opening and closing mechanism 85 for holding the discharge lamp 1N is lowered, and the cathode-side lamp mouth portion 26 of the discharge lamp 1N is placed on the support member 33. Thereafter, as shown by a dotted arrow B3 in FIG. 8, the gripping claw opening-closing mechanism 85 is raised, and as shown in FIG. 6 (B), the cathode-side mouthpiece portion 26 is clamped to the support member 33 by the driving unit 34.

Further, by the driving unit 77 of FIG. 8, as shown in FIG. 7 (B), the movable stage 75 supporting the clamp mechanism 52 is moved in the direction of retraction D toward the direction shown by the arrow B4 (the direction approaching the discharge lamp 1N). So that the power supply block 66 is in contact with the terminal portion 28 a of the mouth portion 28 of the discharge lamp 1N. After that, the movable portion is pushed out by the driving portion 76 (in the case of an air cylinder, the suction force is gradually reduced). The lever 69 is driven by the force of the tension coil spring 68 to rotate around the connecting pin P51. The terminal portion 28 a is pressed against the power supply block 66. As a result, power can be supplied to the anode-side lamp mouth portion 28 without loss of power. The clamping of the cathode-side mouthpiece portion 26 can be performed after the clamping of the anode-side mouthpiece portion 28.

At this time, the cathode-side lamp mouth portion 26 of the discharge lamp 1N is fixed to the support member 33 by the driving unit 34 (see FIG. 6 (B)). Therefore, it is assumed that the position of the power supply block 66 in the retreating direction D is fixed. When the position of the power supply block 66 relative to the anode-side lamp mouth portion 28 is shifted, a strong force is applied to the discharge lamp 1N and the discharge lamp 1N may be damaged. To prevent this from happening, in this embodiment, as shown in FIG. 7 (A), the reference lever 67 on which the power supply block 66 is mounted can be moved in the direction D1 (the radius direction relative to the discharge lamp 1N) by the linear guide 71H. The positioning error of the power supply block 66 can be corrected (absorbed). Instead of the linear guide 71H, the movable table 75 may be made movable in the direction D1.

In addition, the clamp mechanism 52 for the lamp mouth portion 28 has low rigidity in the rotation direction and the winding direction of the driving lever 69 (the direction of rotation about an axis parallel to the Z axis), and the reference lever 67 and / or the driving lever 69 can be used. Deflection absorbs positioning errors in the rotation direction and the winding direction. Moreover, the contact surface groove portion 66a (see FIG. 5) of the contact surface between the power supply block 66 and the lamp mouth portion 28 is a fixed V-shape whose cross-sectional shape is not affected by the position in the Z direction. Position shift in the Z direction is not a problem.

As shown in FIG. 6 (B), when the clamp of the power supply block 66 of the clamp mechanism 52 is used for the lamp mouth portion 28 of the discharge lamp 1N, the drive unit 60 is pulled out, as shown by the dotted arrow in FIG. 4 (B). As shown in B5, the base 62 is moved in the -X direction, so that the pull-out portion 36 is returned to the original position in the lower case 31A. Accordingly, the used discharge lamp 1 is replaced with the unused discharge lamp 1N.

Next, an example of a method for manufacturing the discharge lamp 1 according to this embodiment will be described with reference to a flowchart of FIG. 32 (B). First, in step 220 of FIG. 32 (B), as shown in FIG. 12, the rod-shaped portion 25b side of the glass tube 25 provided with the anode EL1 and the cathode EL2 (see FIG. 2 (A)) is manufactured (prepared). A metal rod-shaped cap tube 226 (small cap member) is provided, and a glass member (lamp body) of a metal rod-shaped cap tube 228 (small cap member) is provided on the rod-shaped portion 25c side. The nozzle tubes 228 and 226 are electrically connected to the anode EL1 and the cathode EL2, respectively. The mouthpiece tubes 228 and 226 are respectively integrally fixed to the sealing portions of the glass tube 25 by welding or the like.

In the next step 222, the cathode-side lamp port portion 26 and the anode-side lamp port portion 28 are removed from the used discharge lamp 1 in FIG. 2 (A). In addition, the shapes of the lamp mouth portions 26 and 28 in FIG. 12 are simplified compared with the lamp mouth portions 26 and 28 in FIG. 2 (A). In this case, for example, a small convex portion 228a for positioning is provided in the center of the end portion of the lamp tube 228, and a plurality of screw holes 228b are provided around the convex portion 228a. Further, a hole portion h4 capable of accommodating the convex portion 228a is formed in the center of the upper portion of the inner surface of the cylindrical lamp mouth portion 28, and a plurality of openings 28k for bolts are formed at positions corresponding to the screw holes 228b. In the upper part of the opening 28k, a recessed portion (not a through hole) that can receive the head of the bolt BA1 is formed.

In addition, a small-diameter fitting portion 226b is provided at an end portion 226a of the lamp nozzle tube 226, and a plurality of screw holes 226c are formed on an end surface of the fitting portion 226b. In addition, a short cylindrical connecting portion 26p that can be fitted into the fitting portion 226b is provided on the upper portion of the flange portion 26a of the lamp mouth portion 26, and a bolt is formed on the bottom surface of the flange portion 26a at a position corresponding to the screw hole 226c. Use multiple openings 26q. A recessed portion capable of accommodating the head of the bolt BA2 is formed at an end portion of the opening 26q.

Next, in step 224, the lamp mouth portion 28 is connected by a plurality of bolts BA1 to cover the lamp mouth tube 228, and the lamp mouth portion 26 is connected by a plurality of bolts BA2 at the lamp mouth tube 226, thereby completing the discharge lamp 1. Further, in step 222, in order to remove the lamp mouth portions 28 and 26 from the used discharge lamp 1, it is only necessary to loosen the bolts BA1 and BA2, respectively.

According to this manufacturing method of the discharge lamp 1, since the lamp port portions 26 and 28 removed from the used discharge lamp 1 can be reused, the number of manufacturing of the lamp port portions 26 and 28 with complicated shapes can be reduced, and the discharge lamp 1 can be suppressed. Manufacturing costs. In addition, instead of reusing the lamp mouth portions 26 and 28 (in other words, removing the lamp mouth portions 26 and 28 from the used discharge lamp 1), for example, at least one of the lamp mouth portions 26 and 28 prepared separately is prepared, This is mounted on a lamp body (lamp mouth tubes 226, 228) to constitute the discharge lamp 1. When at least one of the lamp mouth portions 26 and 28 is reused, it is possible to replace the entire reuse of the lamp mouth portions 26 and 28 and reuse only at least a part of the lamp mouth portions 26 and 28 (for example, the terminal portion 28a, At least one of the gripped portion 28e and the heat radiation portion 28i).

In the example of FIG. 12, a space is provided between the side surface of the light mouth tube 228 and the inner surface of the light mouth portion 28. For example, a flexible tube (tube, not shown) arranged in parallel with the cable 24 is provided. ) By injecting high-pressure air into the space, for example, heat radiation (lamp cooling) of the discharge lamp 1 during lighting can be efficiently performed. In addition, when the lamp mouth tubes 228 and 226 are combined with the lamp mouth portions 28 and 26, in order to prevent the bolts from loosening, bolts can be locked together with injection of a heat-resistant adhesive.

In addition, the combination of the caps 228, 226 and the caps 28, 26 may not be bolted, but the caps 228, 226 and the caps 28, 26 may be integrally formed by welding or the like. In addition, in the example of FIG. 12, although both of the mouthpiece portions 26 and 28 are detachable, for example, the cathode-side mouthpiece portion 26 may be integrally formed with the mouthpiece tube 226. When the lamp mouth portions 26 and 28 of the used discharge lamp 1 are no longer used, the cathode-side lamp mouth portion 26 and the anode-side lamp mouth portion 28 may be integrally formed with the lamp mouth tubes 226 and 228, respectively.

As described above, the exposure apparatus EX of this embodiment includes the light source device 30. The light source device 30 includes a glass tube 25 (glass member) having an anode EL1 (first electrode) and a cathode EL2 (second electrode) for forming a light-emitting portion, and a glass tube provided to the light-emitting portion. 25 is a light source device that emits light from the discharge lamp 1 on the anode EL1 side and the cathode EL2 side of the lamp port portion 28 (first lamp port member) and the lamp port portion 26 (second lamp port member). In addition, the light source device 30 includes a storage unit 54 that stores the discharge lamp 1, a support member 33 (support portion) that supports the mouthpiece portion 26 of the discharge lamp 1 in a detachable manner, and a portion of the discharge lamp 1 that is supported by the support member 33. The lamp mouth portion 28 is connected to the power supply block 66 (a member for transmitting power) of the cable 24, and the clamp mechanism 52 (connection portion) is detachably connected, and the support member 33 supports and uses the lamp mouth portion 26. With the clamp mechanism 52 disconnecting the power supply block 66 to the lamp mouth portion 28, the lamp mouth portion 28 is held to transport the lamp transport system 56 (transportation portion) of the discharge lamp 1 between the storage portion 54 and the support member 33. .

According to the light source device 30 of this embodiment, the clamp mechanism 52 is provided to connect the power supply block 66 (the end portion of the cable 24) to the lamp mouth portion 28 of the discharge lamp 1 in a detachable manner. When the discharge lamp 1 is taken out from the support member 33, the power supply block 66 is removed from the lamp mouth portion 28 by the clamp mechanism 52. When the unused discharge lamp 1 is mounted on the support member 33, power is supplied by the clamp mechanism 52 The block 66 is connected to the lamp mouth portion 28, so that the discharge lamp 1 can be replaced efficiently.

In addition, when the temperature of the used discharge lamp 1 is high, the discharge lamp 1 can be replaced without waiting for the temperature of the discharge lamp 1 to decrease, so the lamp replacement time can be shortened. In addition, the clamp mechanism 52 and the lamp transporting system 56 (replacement device 50) of the light source device 30 can be installed in a conventional light source device (a device that supports the mouth portion of the cathode side of the discharge lamp with a predetermined support member) with a little modification. ). The light source device thus modified uses the discharge lamp 1 of this embodiment, that is, the discharge lamp can be replaced automatically and efficiently.

In addition, the clamp mechanism 52 of the present embodiment is provided with a connecting pin P51 (fulcrum) near the point where the end portion (roller 70) of the driving lever 69 contacts the terminal portion 28a of the lamp mouth portion 28, and a tension coil is provided. The position of the spring 68 and the position (force point) of the driving lever 69 pulled into the driving lever 69 by the driving portion 76 are arranged outside the light box 31 (ellipsoidal mirror 2), so that a large force can be easily obtained using a large space for the clamp light mouth portion 28 . In addition, because the driving unit 72 of the clamp mechanism 52 is arranged outside the light box 31, and the clamp mechanism 52 can be operated from a place away from the light box 31, the clamp mechanism 52 and the drive unit 72 can be installed in Xi Know the light source device.

The discharge lamp 1 of this embodiment includes a glass tube 25 (glass member) provided with an anode EL1 and a cathode EL2 for forming a light-emitting portion, and an anode EL1 and a light-emitting portion provided on the anode EL1 side of the glass tube 25, respectively. The mouthpiece portion 28 and the mouthpiece portion 26 on the cathode EL2 side. The lamp mouth portion 28 can be contacted by the power supply block 66 (a member for transmitting power) connected to the cable 24, and in order to reduce the contact resistance with the power supply block 66, there is a flat portion provided with a surface contact with the power supply block 66 The terminal portions 28a (to-be-connected portions) of 28b and 28c, and the held portions 28e (to-be-held portions) including non-planar portions (hole portions h1, h2, h3) that can be held by the lamp transfer system 56 (transfer portion).

According to this discharge lamp 1, when the light source device 30 of this embodiment is used, the power supply block 66 connected to the cable 24 can be easily brought into ground contact with the terminal portion 28a by the clamp mechanism 52 (connection portion), and The lamp transporting system 56 holds the discharge lamp 1 efficiently by the held portion 28e. Moreover, since the non-planar part including the hole parts h1, h2, and h3 of the pin 86a inserted in the claw part 86 is provided in the to-be-held part 28e, the discharge lamp 1 can be conveyed safely. In addition, instead of providing the non-planar portion, an inclined portion having a smaller cross-sectional area, for example, may be provided in the grasped portion 28e. By holding this inclined portion with the claw portion 86, the discharge lamp 1 can also be transported safely.

The exposure device EX of this embodiment includes the light source device 30 described above, an illumination optical system 13 (illumination system) that illuminates the mask M with light (exposure light IL) emitted from the discharge lamp 1 of the light source device 30, and The projection optical system PL projects the image of the pattern of the mask M on the plate P (substrate) under the exposure light IL. According to the exposure device EX, since the replacement time of the discharge lamp 1 can be shortened, the productivity of the exposure process can be improved.

Moreover, as shown in the flowchart of FIG. 32 (A), the replacement method of the discharge lamp of this embodiment includes a terminal portion 28a (which is in contact with the anode-side lamp mouth portion 28 of the discharge lamp 1 by the clamp mechanism 52) ( Step 202 in which the power supply block 66 to which the cable 24 is connected is detached from the terminal portion 28a, and the cathode side socket portion 26 of the discharge lamp 1 is detachable from the support member 33 by the drive unit 34 (the socket portion is released) Step 26 of the clamp 26), and the held portion 28e (the held portion) including the non-planar portion of the lamp mouth portion 28 of the discharge lamp 1 held by the lamp transfer system 56 transfers the discharge lamp 1 to the storage portion 54. Step 206.

According to this replacement method, the discharge lamp 1 can be carried out efficiently. In addition, this replacement method includes the gripped portion 28e of the unused discharge lamp 1N of the discharge port 1N held in the storage unit 54 by the lamp transfer system 56. The discharge lamp 1N can be transferred to the discharge port 26 of the discharge lamp 1N. Step 208 of the position supported by the support member 33, step 210 of clamping the lamp mouth portion 26 of the discharge lamp 210 to the support member 33 by the drive unit 34, and the connection of the cable 24 by the clamp mechanism 52 Step 212 of the power supply block 66 making surface contact (using the power supply block 66 to clamp the lamp mouth portion 28) on the terminal portion 28a of the lamp mouth portion 28 of the discharge lamp 1N. According to this, it is possible to efficiently set the unused discharge lamp 1N to the supporting member 33.

In addition, the lighting method of the discharge lamp 1 of this embodiment includes a step 212 of bringing the power supply block 66 connected to the cable 24 into surface contact with the terminal portion 28a (the connected portion) of the anode-side mouth portion 28 of the discharge lamp 1N. Step 210 of supporting the mouthpiece 26 of the discharge lamp 1N with a supporting member 33 capable of supplying power, and step 214 of supplying electric discharge light 1N to the discharge lamp 1N through the cable 24 and the supporting member 33. According to this lighting method, since the terminal portion 28a is in surface contact with the power supply block 66, the discharge lamp 1 can be lit with a small power loss. Thereafter, in step 214, the light from the discharge lamp 1 is used for exposure with the exposure device EX.

The above embodiment can be modified as follows. First, although the above-mentioned embodiment uses the cable 24 to supply power to the power supply block 66, the method of supplying power to the power supply block 66 (discharge lamp 1) can also use the reference lever 67 and the power supply block 66 (conduction without using the cable 24). ) To proceed. In addition, the power supply block 66 is not limited to electric power, and it can be made into the compressed air for cooling the lamp | ramp opening part 28 to the discharge lamp 1.

In addition, as shown in FIG. 7 (A), the clamp mechanism 52 of the power supply block 66 of the above embodiment prevents the force from the clamp mechanism drive unit 72 from acting on the discharge lamp 1. The linear guide 71H that moves slightly in the radial direction D1 of 71. In contrast, as shown in the clamp mechanism 52A of the modified example of FIGS. 13 (A) and (B), the front end of the reference lever 67 can also be fixed to extend parallel to the power supply block 66 in the Z direction, and the lower end has An L-shaped guide 71S capable of supporting the protruding portion of the power supply block 66. Between this guide 71S and the power supply block 66, a guide for moving the power supply block 66 relative to the guide 71S in the Z direction as shown by arrow A10 is provided. 71V linear guide.

According to the clamp mechanism 52A of this modification, for example, when the thermal expansion of the discharge lamp 1 occurs during the use of the discharge lamp 1, since the lamp mouth portion 28 of the discharge lamp 1 can be integrated with the power supply block 66, the linear guide 71V is opposed to the guide 71S. Displacement in the + Z direction can reduce the stress on the discharge lamp 1. Therefore, the output of the light beam supplied from the light source device 30 can be stabilized.

In addition, in order to reliably contact the terminal portion 28a of the lamp mouth portion 28 of the discharge lamp 1 with the power supply block 66 to reduce the contact resistance, for example, the surface of the V-shaped groove portion 66a (see FIG. 5) of the power supply block 66 ( (Contact surface) is provided with a plurality of uneven patterns (so-called contacts). According to this, by the so-called contact follow, even if the surface of the V-shaped groove portion 66a is worn repeatedly by replacing the discharge lamp 1 repeatedly, the gap between the lamp mouth portion 28 and the power supply block 66 can be surely and continuously performed. The electrical contact.

The clamp mechanism driving unit 72 of FIG. 7 (A) is configured to open and close the reference lever 67 and the drive lever 69 of the clamp mechanism 52 in the vertical direction (Z direction), but it can also be made left and right (with the discharge lamp 1). (Long direction perpendicular to the direction) opening and closing. With this configuration, when the clamp mechanism 52 is moved in the X direction by the driving portion 77, it is not necessary to retract the roller 70 at the front end of the driving lever 69 to a position higher than the lamp mouth portion 28. That is, since only the opening and closing operation of the clamp mechanism 52 is performed, and there is no constituent member of the clamp mechanism 52 above the discharge lamp 1, the discharge lamp 1 can be transported in the Z direction.

Further, in the above embodiment and its modification, the driving unit 34 of the cathode-side lamp mouth portion 26 of the discharge lamp 1 and the clamp mechanism drive unit 72 of the clamp mechanism 52A of the lamp mouth portion 28 shown in FIG. 13 (B) , Each with independent drive. On the other hand, as shown in the modified example shown in FIG. 14 (A), the driving unit may be shared. In FIG. 14 (A), one end portion of the steel cable 89D is fixed to the + X direction front end portion of the driving lever 69 of the clamp mechanism 52A, and the other end portion of the steel cable 89D is penetrated below the support member 65. A pulley 89C supported so as to be rotatable about an axis parallel to the Y axis extends in the + X direction. The other end of the steel cable 89D is fixed to the front end of the movable rod 89A of the linear actuator 76 through a cylindrical mounting member 89B. The linear actuator 76 is fixed on the base 62 and can drive the movable rod 89A in the X direction along the guide 61 (see FIG. 4 (B)) of the base 62.

The movable table 75A of the fixed support member 65 is placed on the guide 73 through the slider 74 so as to be movable in the X direction. A long hole 75Aa that is long in the X direction is provided at the + X direction end of the movable table 75A, and a part of the mounting member 89B is inserted into the long hole 75Aa. Further, a cantilever-supported rod 89G extending in the -X direction and equipped with a roller 89F at the front end of the -X direction is attached to an end portion in the -X direction of the movable table 75A. In addition, the movable table 75A is biased toward the -X direction from the -X direction end portion of the base table 62 by a tension coil spring 89E, and the movable table 75A is pressed from the -X direction at the position shown in Fig. 14 (A). Rest on the stopper (not shown). The tension coil spring 89E is set to have a higher tension than the tension coil spring 68 for driving the driving lever 69 of the clamp mechanism 52A.

Further, one end portion 38Aa of the lever 38A of the “ㄈ” shape is in contact with the fixing portion 26h of the cathode-side lamp mouth portion 26 of the discharge lamp 1, and this end portion 38Aa is energized by a tension coil spring 39 whose one end is fixed in the support member 33. To the fixed portion 26h side. The clamp mechanism 34A that includes the lever 38A and the tension coil spring 39 supports the lamp mouth portion 26. In a state where the discharge lamp 1 is fixed to the support member 33, a roller 89F at the front end of the lever 89G is located between the end portion 38Aa and the other end portion 38Ab of the lever 38A. The drive unit 72A, which includes a cable 89D, a pulley 89C, a linear actuator 76L, a movable table 75A, a tension coil spring 89E, a lever 89A, and the like, constitutes a driving clamp mechanism 52A and 34A.

Next, the operation of the drive unit 72A will be described. FIG. 14 (A) and FIG. 6 (B) show a state where the support member 33 supporting the discharge lamp 1 is pulled out of the lamp box 31 by the pull-out driving unit 60. In this state, the mounting member 89B at the front end of the movable rod 89A of the linear actuator 76L is located near the end in the −X direction of the movable range in the long hole 75Aa. Next, when the movable rod 89A of the linear actuator 76L is driven in the + X direction, the cable 89D is pulled downward through the pulley 89C, as shown in FIG. 14 (B). The + X of the driving lever 69 of the clamp mechanism 52A The direction end portion is lowered, and the clamp between the power supply block 66 and the roller 70 on the lamp mouth portion 28 is released.

When the movable rod 89A of the linear actuator 76L is further driven in the + X direction, the mounting member 89B at the front end of the movable rod 89A contacts the inner surface of the + X direction side of the long hole 75Aa. Although the cable 89D will not be stretched any more, Instead, the mounting member 89B continues to move in the + X direction while pulling the movable table 75A. As a result, the clamp mechanism 52A and the support member 65 on the movable stage 75A as a whole move in the + X direction, and the clamp mechanism 52A retracts from above the discharge lamp 1. Moreover, as shown in FIG. 15, during the retreat of the movable stage 75A toward the + X direction, or at the end of the retreat, as shown in FIG. The end portion 38Ab rotates the lever 38A to release the clamp on the support member 33 of the cathode-side bulb portion 26.

Thereafter, as shown in FIG. 10 (B), the discharge lamp 1 is replaced with a lamp transfer system 56. After the discharge lamp 1 is replaced, the cathode-side lamp mouth portion 26 is clamped by the action opposite to that described above. As the movable stage 75A moves to the -X direction, the power supply block 66 of the clamp mechanism 52A contacts the lamp mouth portion of the discharge lamp 1. 28. Secondly, the end of the driving lever 69 rises and clamps the lamp mouth portion 28 with the roller 70 and the power supply block 66 again.

As described above, by using the drive unit 72A, the clamp mechanism 52A can be released and retracted, and the clamp mechanism 34A can be released with a single linear actuator 76L (drive unit). action. That is, since three operations are controlled by one actuator, manufacturing costs can be reduced. Of course, the number of actuators may be, for example, two.

In the above description, since the force of the driving lever 69 of the clamp mechanism 52A is set to be weaker than the force of sliding the movable table 75A in the + X direction, the movable table 75A does not go to + X until the driving lever 69 is pulled. Move in the direction. However, as long as it is a structure capable of performing the above-mentioned series of actions, it is not necessary to use any mechanism.

    [Second Embodiment]    

Next, a second embodiment will be described with reference to FIGS. 16 to 18. The light source device of this embodiment is also used to supply illumination light for exposure to the illumination optical system 13 of the exposure device EX of FIG. 1. In the above-mentioned first embodiment, although the driving unit 72 of the clamp mechanism for driving the anode-side mouth portion 28 of the discharge lamp 1 is supported by the movable table 75 that pulls out the driving unit 60, in this embodiment, it is The driving unit is set in a light box. In FIGS. 16 to 18, portions corresponding to FIGS. 4A and 4B are given the same reference numerals, and detailed descriptions thereof are omitted.

FIG. 16 shows a light source device 30A of this embodiment. The light source device 30A includes a clamp mechanism 52B that clamps the anode-side mouthpiece 28 of the discharge lamp 1, a drive unit 72B that drives the clamp mechanism 52B, a storage unit 54, and a lamp transport system 56A of the discharge lamp 1. In FIG. 16, a flat-shaped base member 75B is fixed to the end in the −X direction in the lower case 31A of the light box 31 through a support base 75C, and one side of the driving lever 69 is supported on the top of the base member 75B through a drive portion 76. One of the ends of the reference lever 67A is supported by the supporting member 65 on the support base 75C. The power supply block 66 is fixed to the front end of the other end of the reference lever 67A, and the roller 70 is installed at the front end of the other end of the drive lever 69. A tension coil spring 68 is provided between the bottom of the upper case 31B and the driving lever 69 to pull up the -X-direction end of the driving lever 69. A linear guide 71H (not shown in FIG. 16) for supporting the reference lever 67A to move slightly in the -X direction is disposed between the upper surface of the support member 65 and the end portion in the -X direction of the reference lever 67A. 7 (A)).

In the present embodiment, the discharge lamp 1 is supported by the support member 33 at an angle of 180 degrees with respect to the case of FIG. 2 (A). The power supply block 66 contacts the planar portions 28b and 28c of the -X direction side of the terminal portion 28a of the anode-side lamp mouth portion 28 of the discharge lamp 1 (see Fig. 2 (B)), and relaxes the force of the driving portion 76, thereby enabling the driving lever. 69 By the force of the tension coil spring 68 rotating in the clockwise direction, the roller 70 at the front end of the driving lever 69 forces the back of the terminal portion 28a in the -X direction, thereby clamping the terminal portion 28a between the power supply block 66 and the roller Between 70. The clamp mechanism 52B is composed of the reference lever 67A, the drive lever 69, and the roller 70, and the drive unit 72B for the clamp mechanism 52B is composed of the drive portion 76, the support member 65, and the tension coil spring 68.

In addition, the relay member 64A is fixed on the base member 75B, the other end of the cable 24 connected to the power supply block 66 is connected to the upper part of the relay member 64A, and the one end is connected to the support member 33, which is flexible and has a sufficient length. The other end of the cable (not shown) is connected to the lower part of the relay member 64A, and the cable 24 and the like are connected to a power supply section (not shown) through an extension cable (not shown). Further, the light shielding member 42A located above the discharge lamp 1 in the lower case 31A is provided with an opening (not shown) at the end of the + X direction through which the discharge lamp 1 passes, and is provided at the end of the -X direction for disposition An opening (not shown) in the clamp mechanism 52B. Since the cathode side mouthpiece 26 of the discharge lamp 1 is clamped to the drive unit 34 (see FIG. 4 (B)) of the support member 33, the drive unit 34 is the same as that of the first embodiment. Therefore, in FIG. 16 and the like, the drive unit is omitted. Illustration of 34.

In the case 51 of the replacement device 50A, a guide 61, a base 62A, a connecting member 43 connecting the front end portion 62Aa of the base 62A protruding in the Z direction and the pull-out portion 36, and a drive portion are provided. The pull-out drive unit 60A of 63. Further, in the case 51, an X-axis guide 90B including an elongated support member 90A provided on the bottom surface, an X-axis guide 90B fixed to the upper end of the support member 90A and extending in the X direction is provided, and the X-axis guide 90B is supported to be movable in the X direction. The X-axis driving mechanism 90X, the Z-axis driving mechanism 84 supported by the X-axis driving mechanism 90X, a gripping claw opening and closing mechanism 85 provided at the lower end of the Z-axis driving mechanism 84, and a plurality of claw portions 86 provided at the gripping claw opening and closing mechanism 85 The lamp transport system is 56A. A storage unit 54 for the discharge lamp 1 is also provided in the chassis 51. The replacement device 50A includes a pull-out drive unit 60A, a lamp transport system 56A, and a storage unit 54. The other components are the same as those of the light source device in FIG. 4 (B).

In the present embodiment, when the discharge lamp 1 is replaced, first, as shown in FIG. 17, the end of the driving lever 69 of the clamp mechanism 52B is pulled down by the driving portion 76 of the driving unit 72B in the direction shown by the arrow A21, so that The roller 70 at the front end of the driving lever 69 is separated from the anode-side mouthpiece 28. After that, the pull-out driving unit 60A pulls the pull-out portion 36 in the + X direction to a predetermined position in the chassis 51. Next, as shown by arrow A23, the gripping claw opening and closing mechanism 85 and claw portion 86 of the lamp transporting system 56A are lowered in the -Z direction to grip the anode-side lamp port portion 28, and the clamps of the cathode-side lamp port portion 26 are driven by the drive unit ( (Not shown). In addition, the clamp of the lamp | ramp part 26 may be released before the claw part 86 grips the lamp | ramp part 28. Thereafter, as shown by an arrow A24, the holding claw opening and closing mechanism 85 is raised, and the cathode-side lamp mouth portion 26 of the discharge lamp 1 is moved to a position higher than the elliptical mirror 2.

Then, as shown by arrow A25, the X-axis driving mechanism 90X moves along the X-axis guide 90B in the + X direction, and moves the gripping claw opening and closing mechanism 85 to a position A27 above the rotary disk 79 of the storage unit 54. Next, as shown by an arrow A26, the gripping claw opening-closing mechanism 85 is lowered, and the discharge lamp 1 is placed in the empty opening of the rotary plate 79. Next, the holding claw opening and closing mechanism 85 temporarily rises, and after the rotating disk 79 rotates to move the unused discharge lamp 1N below the holding claw opening and closing mechanism 85, the holding claw opening and closing mechanism 85 is lowered again, and the unused discharge lamp 1N is raised. .

Thereafter, the discharge lamp 1N is set on the support member 33 by an operation opposite to that when the discharge lamp 1 is carried out, and the pull-out portion 36 is returned to the lower case 31A by the pull-out drive unit 60A. As shown in FIG. 16, the driving unit 72B drives the clamping mechanism 52B to clamp the anode-side lamp mouth portion 28 of the discharge lamp 1N, and the replacement of the discharge lamp 1 is completed.

According to this embodiment, since the drive unit 72B of the clamp mechanism 52B of the anode-side lamp mouth portion 28 does not have a sliding mechanism, the overall configuration of the light source device 30A is simplified, and the manufacturing cost can be reduced. In addition, since the cable 24 connected to the power supply block 66 that supplies power to the anode-side lamp mouth portion 28 is not pulled out, the configuration of a portion driven by the pull-out drive unit 60A can be simplified.

In addition, the lamp conveying system 56A of this embodiment uses the X-axis driving mechanism 90X and the Z-axis driving mechanism 84 to drive the holding claw opening and closing mechanism 85 in a linear motion. Therefore, even if the discharge lamps 1 and 1N approach the rotating disk 79 and are arranged along the circumference The positioning between the gripping claw opening and closing mechanism 85 and the rotary disk 79 can also be easily performed.

This embodiment can be modified as follows.

First, instead of the lamp transport system 56A of this embodiment, the lamp transport system 56 of the first embodiment, a multi-axis robot arm, or the like may be used.

Further, instead of the lamp transporting system 56A, as shown in a light source device 30B according to a modification of FIG. 18, a spiral-type lamp transporting system 56B may be provided.

In FIG. 18, the lamp transport system 56B includes an elongated support member 90C provided on the inner bottom surface of the chassis 51, a winding drive portion 90D fixed to the upper end of the support member 90C, and a winding drive by the winding drive portion 90D around an axis parallel to the Z axis. 90E, Z-axis driving mechanisms 84A, 84B fixed at both ends of the winding portion 90E and capable of moving in the Z direction, holding claw opening and closing mechanisms 85A, 85B provided at the lower ends of the Z-axis driving mechanisms 84A, 84B, and the holding claws The opening and closing mechanisms 85A and 85B open and close a plurality of claw portions 86A and 86B. When the discharge lamp 1 is transported by the lamp transport system 56B, for example, the lamp mouth portion 28 of the used discharge lamp 1 is grasped by the one claw opening and closing mechanism 85A through the claw portion 86A, and the other claw opening and closing mechanism 85B is used. The mouth portion 28 of the unused discharge lamp 1N of the rotary disk 79 is grasped by the claw portion 86B.

Next, the discharge lamps 1 and 1N are raised through the Z-axis driving mechanisms 84A and 84B, and the winding section 90E is rotated 180 degrees by the winding driving section 90D, and then the discharge lamps 1 and 1N are lowered through the Z-axis driving mechanisms 84A and 84B. That is, the discharge lamp 1 and 1N can be exchanged at a high speed between the support member 33 and the rotating disk 79. In this embodiment, there is no clamp mechanism 52B diagonally above the discharge lamp 1 supported by the support member 33 in the case 51. Therefore, the claw portion 86A (or the claw) of the holding claw opening and closing mechanism 85A (or the holding claw) is rotated by the rotation of the rotation portion 90E. The claw portion 86B of the opening and closing mechanism 85B is rotated in either the clockwise or counterclockwise direction, and there is no risk of contact with the clamp mechanism 52B.

    [Third Embodiment]    

Hereinafter, a third embodiment will be described with reference to Figs. 19 (A) to 25 (B). The light source device of this embodiment is also used to supply illumination light for exposure to the illumination optical system 13 of the exposure device EX of FIG. 1. In the discharge lamp of this embodiment, the shape of the mouth portion of the anode side and the configuration of the clamp mechanism of the mouth portion are different from the above embodiment. In addition, in FIGS. 19 (A) to 25 (B), parts corresponding to those in FIGS. 2 (A) and 4 (A), (B), and FIG. 16 are given the same reference numerals, and detailed descriptions thereof are omitted.

FIG. 19 (A) shows the discharge lamp 1A of this embodiment. In FIG. 19 (A), the discharge lamp 1A includes a glass tube 25A composed of a bulb portion 25Aa and two cylindrical rod portions 25Ab and 25Ac fixed to hold the bulb portion 25Aa. The cathode-side mouthpiece portion 126 at the end of the rod-shaped portion 25Ab and the anode-side mouthpiece portion 128 connected to the end of the other rod-shaped portion 25Ac. The lamp mouth portions 128 and 126 are electrically connected to an anode and a cathode (not shown) in the bulb portion 25Aa, respectively. The lamp mouth portions 126 and 128 are made of a metal having good electrical and thermal conductivity.

In addition, at the cathode-side lamp mouth portion 126, a cylindrical connecting portion 126k having a diameter larger than that of the rod-shaped portion 25Ab is sequentially formed from the rod-shaped portion 25Ab to the open end side. The double-ring-shaped flange portion 126a, the cylindrical shaft portion 126b having a slightly larger outer diameter than the rod portion 25Ab, the cylindrical small diameter portion 126f having a smaller outer diameter than the shaft portion 126b, and the outer diameter being slightly smaller than the shaft portion 126b The cylindrical fixing portion 126h, the chamfered portion 126i, and the small-diameter portion 126f, each having a small or substantially the same shape as the shaft portion 126b, have a small front end portion 126j. When the discharge lamp 1A is placed on the support member 33 of FIG. 20 (B) described later, the flange portion 126 a abuts on a stepped portion that surrounds an opening in the center of the support member 33. The fixing portion 126h can be clamped by the driving unit 34 in FIG. 4 (B) and the support member 33 in FIG. 20 (B). The illustration of the drive unit 34 is omitted in FIG. 20 (B).

In addition, the anode-side lamp mouth portion 128 has a cylindrical connecting portion 128k having a slightly larger diameter than the rod-shaped portion 25Ac from the rod-shaped portion 25Ac side of the glass tube 25A of the discharge lamp 1A to the open end side, A cylindrical intermediate portion 128m having an outer diameter substantially the same as the diameter of the rod-shaped portion 25Ac, a heat-radiating portion 128i in which a plurality of ring-shaped heat-radiating fins 128j are formed, and a terminal portion 128a. The terminal portion 128a has a side-shaped convex connecting portion 128b with a tapered diameter, a cylindrical shaft portion 128c with a diameter smaller than the connecting portion 128k, a concave portion e1 with a decreasing diameter and a larger diameter, and a shaft portion in this order toward the front end. 128c has a cylindrical front end portion 128d and a chamfered portion e2 having substantially the same diameter.

As shown in FIG. 19 (B), in this embodiment, in order to detachably connect the cable 24 to the anode side mouth portion 128, a member (hereinafter, referred to as a power supply socket) composed of a plurality of cylindrical members is used in combination. ) 152. In FIG. 19 (B), the power supply socket 152 has a ring-shaped connection portion 153 having a concave contact surface 153a having the same shape as the connection portion 128b of the lamp mouth portion 128, and a cylindrical outer tube fixed to the upper portion of the connection portion 153. A portion 154, a push button switch portion 155 having a cylindrical shape at the lower end disposed between the connection portion 153 and the outer tube portion 154 and having a stepped portion 155a in contact with the flange portion 154a at the front end of the outer tube portion 154, and attached to the connection A compression coil spring 156 between the portion 153 and the button switch portion 156. The connecting portion 153, the outer tube portion 154, and the inner tube portion 155 are made of a metal having good electrical and thermal conductivity.

The connection portion 153 is fixed to the bottom surface of the outer tube portion 154 with, for example, a bolt (not shown), a recessed portion 154b is formed on the outer surface of the outer tube portion 154, and an end portion of the cable 24 is connected to the outer surface of the outer tube portion 154. In addition, the connecting portion 153 has an inner surface 153b that is loosely fitted to the shaft portion 128c and the front end portion 128d of the mouthpiece portion 128, and a plurality of openings h4 (refer to the figure) in which a ball (ball bearing) 157 is arranged, respectively. 24) Fastener portion 153c. A recessed portion 155b is formed at the lower end of the button switch portion 155 to release the ball 157 to the outside. A small recessed portion 155d is formed on the recessed portion so as to be in contact with the front end portion 128d of the mouthpiece portion 128.

In the state shown in FIG. 19 (B), the plurality of balls 157 held by the fastener portion 153c of the connection portion 153 are accommodated in the recessed portion e1 of the terminal portion 128a, and the compression coil spring 156 acts from the button switch portion 155 to the connection portion 153. On the side, the contact surface 153a of the connection portion 153 is crimped to the connection portion 128b of the terminal portion 128a. At this time, the electric power (current) supplied to the cable 24 is supplied to the lamp mouth portion 128 through the outer tube portion 154 and the connection portion 153 with a small resistance (contact resistance).

Moreover, in the power supply socket 152 of FIG. 19 (B), for example, a vent hole 154c is formed in the outer tube portion 154, and the cooled air can be cooled from the outside through an air supply pipe (not shown) provided in the cable 24. Air is supplied to the vent hole 154c. This air is supplied to the space between the connection portion 153 and the outer tube portion 154, and the lamp mouth portion 128 can be efficiently cooled. Further, the mechanism for supplying the cooled air may be omitted, and in this case, it is not necessary to provide the vent hole 154c. The mechanism for removing the power supply socket 152 from the lamp opening portion 128 and mounting the lamp opening portion 128 will be described later.

FIG. 20 (A) is a partially cut-away plan view showing the light source device 30C of this embodiment, and FIG. 20 (B) is a partially cut-away side view of FIG. 20 (A). In FIG. 20 (B), the support member 33 of the pull-out portion 36 fixed in the lower case 31A is provided with a flange portion 126a of the cathode-side lamp mouth portion 126 of the discharge lamp 1A, and the fixing portion 126h is driven by the drive unit 34 ( (See FIG. 4 (B)) The clamped member 33 is clamped. A relay member 64 is fixed on the + X direction end of the pull-out portion 36. One end of the cable 24 is connected to the front end of the relay member 64, and the other end of the cable 24 is connected to the discharge lamp through the power supply socket 152. 1A's anode side mouth portion 128. In addition, a cable (not shown) connected to the support member 33 is also connected to the relay member 64.

Further, a pull-out drive unit 60A that pulls the pull-out portion 36 toward the chassis 51 side, a storage unit 54 that stores the discharge lamp 1A, and an unused discharge lamp 1A (hereinafter referred to as the discharge lamp 1AN) are provided in the case 51, The lamp transport system 56C and the mechanism (hereinafter, referred to as a power supply socket replacement drive unit) 72C for attaching and detaching the power outlet 152 to the lamp mouth portion 128 of the discharge lamp 1A. The replacement device 50C including the pull-out driving unit 60A, the storage unit 54, the lamp transporting system 56C, and the driving unit 72C constitutes the light source device 30C. As shown in FIGS. 20 (A) and 20 (B), the lamp conveying system 56C has an elongated support member 90A provided on the bottom surface opposite to the guide 61 on the -Y direction side, and an X long in the X direction fixed to the upper end of the support member 90A. A shaft guide 90B, an X-axis drive mechanism 90X supported by the X-axis guide 90B to be movable in the X direction, a Z-axis drive mechanism 84B supported by the X-axis drive mechanism 90X, and a lower end of the Z-axis drive mechanism 84B The holding portion 162 of the anode side mouth portion 128 of the discharge lamp 1A.

In addition, the drive unit 72C for replacement of the power supply socket is provided with an elongated support member 90F provided on the + Y direction side of the guide 61 on the bottom surface, and is connected to the axis parallel to the Z axis within a range of approximately 30 degrees. The spiral portion 90G at the upper end of the support member 90F, the Z-axis driving mechanism 84A provided in the accommodating portion 90R at the front end of the spiral portion 90G, and the lamp mouth portion provided at the lower end of the Z-axis driving mechanism 84A for the power supply socket 152 to the discharge lamp 1A 128 attachment / detachment member (hereinafter, referred to as a holding portion) 160.

In this embodiment, when the discharge lamp 1A is replaced, as in the first embodiment, as shown by an arrow A31 in FIG. 21, the pull-out driving unit 60A pulls out the pull-out portion 36 supporting the discharge lamp 1A to the case 51. Within the given position. Secondly, the holding portion 160 of the driving unit 72C, which was originally standby above the drawn discharge lamp 1A, was lowered, and the power supply socket 152 was removed from the lamp mouth portion 128 of the discharge lamp 1A, and only the power supply socket 152 was raised.

Next, as shown by an arrow A38 in FIG. 25 (A), the turning portion 90G is turned about 30 degrees to withdraw the holding portion 160 holding the power supply socket 152 from above the discharge lamp 1A. After that, in the lamp transfer system 56C, the X-axis driving mechanism 90X is moved above the discharge lamp 1A as shown by an arrow A36. Next, as shown in FIG. 25 (B), the Z-axis drive mechanism 84B lowers the holding portion 162 to the mouth portion 128 of the discharge lamp 1A, and the holding portion 162 holds, for example, the front end portion 128d of the mouth portion 128 (see FIG. 19 (A)). After that, as shown by arrow A37, after the discharge lamp 1A is raised away from the elliptical mirror 2, the discharge lamp 1A is placed in the storage unit 54 using the lamp transfer system 56C as in the example of FIG. 17, and the unused ones are stored from the storage unit 54 The discharge lamp 1AN is placed on a support member 33. After that, the power supply socket 152 is installed in the lamp mouth portion 128 of the discharge lamp 1AN by the driving unit 72C, and the pull-out unit 36 is returned to the lower case 31A by pulling out the driving unit 60A, and the replacement of the discharge lamp 1A is completed.

Next, the structure and the like of the holding portion 160 of the driving unit 72C of FIG. 21 in this embodiment will be described with reference to FIGS. 22 (A) to 24. As shown in FIG. 22 (A), the holding portion 160 fixed to the lower end of the Z-axis driving mechanism 84A of the driving unit 72C is fixed to the Z-axis driving mechanism 84A and is arranged at approximately equal angular intervals around an axis parallel to the Z-axis. The first link portion 164 of the three wrist portions 164a, 164b, and 164c (164c not shown) and the central bottom surface fixed to the first link portion 164 are formed at three openings 166a at equal angular intervals in the center and can be driven at The Z-direction piston portion 165 and one end portion are provided in three substantially T-shaped three second link portions 167A, 167B, and 167C (not shown in the figure) of the opening 166a. Further, the holding portion 160 has a 3 which is connected to the three wrist portions 164a, 164b, and 164c through a rotatable fulcrum E1 and the like, and is connected to the three second link portions 167A, 167B, and 167C through a rotatable fulcrum E4 and the like. The arms 169A, 169B, and 169C (169C not shown) are connected to the three wrists 164a, 164b, and 164c through a pivotable fulcrum E2, and are connected to the three second links through a pivotable fulcrum E3. The three third link portions 168A, 168B, and 168C of the portions 167A, 167B, and 167C (168C not shown). In the following description, the three arm portions 169A, 169B, 169C, and the like, which are arranged at approximately equal angular intervals around an axis parallel to the Z axis, are simply referred to as the arm portions 169A, 169B, and the like.

When the power supply socket 152 is removed from the lamp mouth portion 128 of the discharge lamp 1A by the grip portion 160, as shown in FIG. 22 (B), the grip portion 160 is lowered, and the convex portions at the front ends of the arm portions 169A and 169B face the power supply. The recessed portion 154 b of the outer tube portion 154 of the socket 152 stops the lowering of the grip portion 160. Next, as shown by arrow A32 in FIG. 23 (A), when the central piston portion 165 is depressed, the first link portion 164, the second link portions 167A, 167B, and the third link portion 168A, The operation of the link mechanism composed of 168B moves the front ends of the arm portions 169A and 169B inward, and the convex portion of the front end is hung on the concave portion 154b of the outer tube portion 154.

Next, as shown by arrow A33 in FIG. 23 (B), when the piston portion 165 presses the button switch portion 155 of the power supply socket 152, the ball 157 in the power supply socket 152 follows the tapered portion 155b of the button switch portion 155 ( (Refer to FIG. 24) Move outward to release the clamp on the terminal portion 128a of the mouthpiece portion 128. At this time, since the above-mentioned link mechanism of the holding portion 160 is a so-called toggle mechanism, even if the piston portion 165 moves substantially downward, the positions of the arm portions 169A and 169B remain substantially unchanged. Therefore, while the power supply socket 152 is supported by the three arm portions 169A and 169B, the clamp between the power supply socket 152 and the lamp mouth portion 128 can be released. Therefore, no downward force is generated on the discharge lamp 1A.

Thereafter, as shown by the arrow A35 in FIG. 24, the Z-axis driving mechanism 84A of the drive driving unit 72C raises the holding portion 160 holding the power supply socket 152, that is, the power supply socket 152 can be moved upward from the lamp mouth portion 128 of the discharge lamp 1A. Take off. In addition, the power supply socket 152 can be attached to the lamp mouth portion 128 by an operation opposite to the above-mentioned operation.

The present embodiment can be modified as follows.

First, although the driving unit 72C for replacing the power supply socket of this embodiment is provided with a winding portion 90G as shown in FIG. 20 (B), the Z-axis driving mechanism 84A and the holding portion 160 may be provided without the winding portion 90G. X axis movement. In this case, when the pull-out portion 36 (discharge lamp 1A) is pulled out of the lower case 31A, the pull-out portion 36 is temporarily stopped, the holding portion 160 is lowered by the Z-axis driving mechanism 84A, and the power supply socket 152 is held by the holding portion 160 It is detached from the discharge lamp 1A, and the holding part 160 holding the power supply socket 152 is raised. After that, after the pull-out portion 36 is pulled out in the + X direction by the pull-out drive unit 60A, the discharge lamp 1A is replaced by the lamp transfer system 56C. In this case, since it is not necessary to provide the winding portion 90G in the driving unit 72C, the manufacturing cost of the driving unit 72C can be reduced.

In FIG. 20 (B), the Z-axis driving mechanism 84A for the holding section 160 can be supported along the X-axis guide 90B of the lamp conveying system 56C together with the Z-axis driving mechanism 84B for the holding section 162. Move in X direction. With this configuration, after the power supply socket 152 of the discharge lamp 1A is removed by the holding portion 160, the holding portion 160 can be moved to the end in the -X direction along the Z-axis driving mechanism 84B, and then the holding portion 162 can be moved above the discharge lamp 1A. To replace the discharge lamp 1A. Therefore, it is not necessary to stop the pull-out portion 36 (the pull-out drive unit 60A) at two positions as in the above-mentioned modification. Therefore, as the drive section 63 of the pull-out drive unit 60A, for example, an air cylinder or the like can be used.

Moreover, as a manufacturing method of the discharge lamp 1A, the same manufacturing method as the said discharge lamp 1 can be used. That is, the lamp body (glass member) and the mouthpiece portions 126 and 128 are separately prepared, and these are connected to each other to form the discharge lamp 1A. At this time, the lamp mouth portions 126 and 128 can be reused, for example, those removed from the used discharge lamp 1A. In addition, when at least one of the lamp mouth portions 126 and 128 is reused, it is possible to replace the entire reuse of the lamp mouth portions 126 and 128 and reuse only at least a part of the lamp mouth portions 126 and 128 (for example, the terminal portion 128a and the heat radiation portion). 128i).

    [Fourth Embodiment]    

Next, a fourth embodiment will be described with reference to Figs. 26 (A) to 27. The light source device of this embodiment also uses an illumination optical system for an exposure device to supply illumination light for exposure. The light source device according to this embodiment includes a plurality of (for example, three) light boxes, and the light emitted from the discharge lamps in the plurality of light boxes is synthesized and supplied to an illumination optical system of an exposure device. In addition, in FIGS. 26 (A) to 30, parts corresponding to those in FIGS. 1 and 4 (A) and (B) are given the same reference numerals, and detailed descriptions thereof are omitted.

26 (A) and (B) are respectively a plan view showing the exposure device EXA of the present embodiment, and FIG. 27 is a partially cut-away side view showing the exposure device EXA. In FIG. 26 (A), the illumination optical system and the exposure main body portion of the exposure device EXA (the portion excluding the light source device 30 from the exposure device EX of FIG. 1) are arranged in a box-shaped chamber 92. The exposure device EXA includes a light source device 30D. The light source device 30D is provided with first, second, and third light boxes 29A, 29B, and 29C arranged radially on the roof RT of the chamber 92, and beams emitted from the light boxes 29A, 29B, and 29C installed on the roof RT are combined. It is then supplied to the synthesis unit 93 of the lower-level illumination optical system (not shown), the replacement device 50D for replacing the used discharge lamp 1 in the light boxes 29A to 29C, and the storage unit for storing the discharge lamp 1 and the unused discharge lamp 1N. 54. The storage unit 54 is covered with a protective cover (not shown).

The light boxes 29A to 29C each include a lower case 31A that houses the discharge lamp 1 and the elliptical mirror 2 in use as shown in FIG. 4 (B), and an upper case 31B that is provided with the reflector 3 and the window member 4 (see FIG. 27). In addition, in FIGS. 26 (A) and (B), only the lower and middle cases 31A of the light boxes 29A to 29C are shown. When the light boxes 29A to 29C are used, the anode-side lamp mouth portion 28 of the discharge lamp 1 is connected to the power supply block 66 of the cable 24 by the clamp mechanism 52 of FIG. 4 (B).

In addition, the replacement device 50D is provided with enclosures 51A, 51B, and 51C arranged close to the light boxes 29A, 29B, and 29C, respectively, and are respectively arranged in the enclosures 51A to 51C to pull out the discharge lamps 1 supporting the corresponding light boxes 29A to 29C. The part 36 is pulled to the pull-out drive unit 60 of FIG. 4 (B) in the cases 51A to 51C. The heights of the cases 51A to 51C are substantially the same as the height of the lower case 31A (refer to FIG. 27), and an open-close protection cover (not shown) is provided on the upper surfaces of the cases 51A to 51C. In addition, the replacement device 50D is provided with a drive unit shown in FIG. 4 (B), which is disposed in the housings 51A to 51C to release the clamps of the anode-side lamp mouth portion 28 of the discharge lamp 1 being pulled out by the clamp mechanism 52. 72C, the drive unit 34 shown in FIG. 4 (B), which is arranged in the cases 51A to 51C to release the clamps of the cathode side lamp port 26 of the discharge lamp 1 being pulled out, and to replace the case being pulled out to the case The lamp transport system 56D of the used discharge lamp 1 supported by the pull-out portion 36 (supporting member 33) of 51A to 51C is 56D.

In addition, the lamp transport system 56D includes a pillar 90H provided in the chassis 51C near the roof RT, a Y-axis driving portion 90I supported by the pillar 90H and extending in the Y direction, a winding driving portion 90D driven in the Y direction by the Y-axis driving portion 90I, The winding portion 90E, which is rotated by the winding driving portion 90D around an axis parallel to the Z axis, the Z-axis driving mechanisms 84A and 84B fixed at both ends of the winding portion 90E, and the holding claw opening and closing mechanism 85A connected to the lower ends of the Z-axis driving mechanisms 84A and 84B. And 85B, and a plurality of claw portions 86A and 86B that are opened and closed by the holding claw opening and closing mechanisms 85A and 85B. The Y-axis driving section 90I drives the winding driving section 90D in the Y direction by, for example, a ball screw method or a linear motor method. As described above, since the lamp transport system 56D is provided with two holding claw opening and closing mechanisms 85A and 85B, two discharge lamps 1 (or unused discharge lamps 1N) can be held at the same time. In addition, in order to adjust the rotation angle of the discharge lamps 1 and 1N, a rotation shaft (not shown) may be provided between the Z-axis driving mechanisms 84A and 84B and the gripping claw opening and closing mechanisms 85A and 85B.

As shown in FIG. 27, the light source device 30D includes an elevator 95 provided on the side of the chamber 92, and an elevator portion 94 for raising and lowering between a position P7 near the first floor in the elevator 95 and a position P6 near the roof RT. . A storage section 54 (a driving section 80 and a rotary disk 79) is provided on the upper surface of the lifting section 94.

In the present embodiment, for example, when the discharge lamp 1 in the lamp boxes 29B and 29C is replaced, as shown in FIG. 26 (A), the pull-out portion 36 supporting the discharge lamp 1 is pulled into the cases 51B and 51C. Next, for example, after holding the unused discharge lamp 1N of the storage unit 54 by the holding claw opening and closing mechanism 85A and the claw portion 86A in one of the lamp conveying systems 56D, the holding claw opening and closing mechanism 85A is raised. After that, as shown by the dotted line in FIG. 26 (B), the coiled portion 90E of the lamp conveying system 56D is moved above the case 51B, and the other claw opening and closing mechanism 85B and the claw portion 86B are used to hold the discharge lamp 1N in the case 51B. The discharge lamp 1N held by one of the holding claw opening and closing mechanism 85A and the claw portion 86A is provided in the pull-out portion 36 (support member 33) of the case 51B. The operation of the clamp mechanism 52 at this time to release the clamp of the lamp mouth portion 28 of the discharge lamp 1 is the same as that of the first embodiment.

After that, as shown by the solid line in FIG. 26 (B), the coiled portion 90E of the lamp transport system 56D is moved above the case 51C, and the discharge lamp 1 in the case 51C is held by one of the claw opening and closing mechanisms 85A and 86A. The holding claw opening and closing mechanisms 85A and 85B are raised, the winding portion 90E is moved above the storage portion 54, and the two used discharge lamps 1 held by the claw portions 86A and 86B are placed on the rotating disk 79 of the storage portion 54. After that, the unused discharge lamp 1N of the rotary disk 79 is held by one of the claw opening and closing mechanism 85A and the claw portion 86A, and the winding portion 90E is moved above the case 51C, and the discharge lamp 1 is placed in the pull-out portion of the case 51 After 36, the pull-out portion 36 in the cases 51B and 51C is returned to the lower case 31A of the light boxes 29B and 29C, and the replacement of the discharge lamp 1 in the light boxes 29B and 29C with the unused discharge lamp 1N is completed. The replacement of the discharge lamp 1 in the light box 29A is performed in the same manner.

When the number of used discharge lamps 1 on the rotating disk 79 in the storage unit 54 increases, as shown in FIG. 27, the storage unit 54 is moved to the position P7 on the first floor by the elevator 95. And the operator opens the lamp replacement door 45A on the first floor of the elevator 95, recovers the used discharge lamp 1 of the rotary disk 79 and supplements the unused discharge lamp 1N. After that, the storage unit 54 is moved to the position P6 close to the roof RT by the elevator 95, so that the plurality of discharge lamps 1 in the light source device 30D can be replaced.

According to this embodiment, the operator can perform supplementation and recovery of the discharge lamps at only one place to the plurality of light boxes 29A to 29C, so the efficiency is high. In addition, since a pair of holding claw opening and closing mechanisms 85A and 85B and claw portions 86A and 86B are provided, even if the running distance of the winding portion 90E along the Y-axis driving portion 90I is long, the discharge lamp can be replaced in a short time.

In addition, in the cases 51A to 51C corresponding to each of the light boxes 29A to 29C, only the drive unit 72C for the pull-out drive unit 60 and the clamping mechanism 52 need to be installed, so the installation area of the roof RT of the chamber 92 can be reduced, even if Even a narrow roof RT can easily install the light source device 30D.

In addition, in order to further shorten the replacement time of the discharge lamp, the number of the rotating disk 79 storing the discharge lamp and the number of the lamp transporting system 56D can be increased to shorten the lamp replacement time. In addition, a rotating disk for replenishing the discharge lamp and a rotating disk for recycling can be provided separately.

In addition, the Y-axis driving unit 90I (traveling axis of the lamp transport system 56D) disposed across a plurality of light boxes 29A to 29C can be installed on the roof RT through a plurality of pillars, and can also be arranged separately from the chamber 92, such as a factory The top is supported in a pendant manner. In addition, the light boxes 29A to 29C may be provided together at a position separated from the chamber 92.

    [Fifth Embodiment]    

Next, a fifth embodiment will be described with reference to FIGS. 28 to 31 (B). In the above-mentioned embodiment, the anode-side mouthpieces 28 and 128 are transported by the lamp-carrying system 56 and 56C while the cathode-side mouthpieces 26 and 126 of the discharge lamps 1 and 1A are positioned and fixed to the support member 33. The claws 86, the grips 160, and the like are gripped, but when the shape accuracy of the discharge lamps 1 and 1A is low, there is a possibility that the mouth portions 28 and 128 cannot be gripped by the claws 86 or the grips 160 and the like. When the shape accuracy of the discharge lamps 1 and 1A is low, in order to be able to hold the mouth portions 28 and 128 by a robot such as the claw portion 86 or the holding portion 160, the robot must have a compliance function (compliance, flexibility). Therefore, the present embodiment provides a holding mechanism for a discharge lamp having flexibility in the positional relationship with the discharge lamp, and a discharge lamp having a mouthpiece shape suitable for being held by such a holding mechanism. The discharge lamp and the holding mechanism are respectively a discharge lamp 1 and a lamp transfer system 56 which can be used in, for example, the light source device 30 in FIG. 4 (B). The parts corresponding to FIGS. 19 (A) and (B) in FIGS. 28 to 31 (B) are given the same reference numerals and detailed descriptions thereof are omitted.

Fig. 28 shows a discharge lamp 1B according to this embodiment. In FIG. 28, the discharge lamp 1B includes a glass tube 25A, a cathode-side lamp mouth portion 126 connected to one end of the rectangular rod-shaped portion 25Ab of the glass tube 25A, and an end portion of the other rod-shaped portion 25Ac connected to the glass tube 25A. Anode side mouthpiece 128A. The lamp mouth portions 128A and 126 are electrically connected to an anode and a cathode (not shown) in the bulb portion 25Aa of the glass tube 25A, respectively. The lamp mouth portions 126 and 128A are made of a metal having excellent electrical and thermal conductivity.

In addition, a cylindrical connecting portion 128Ak having an outer diameter slightly larger than the diameter of the rod-shaped portion 25Ac is formed in order from the rod-shaped portion 25Ac side of the discharge lamp 1B toward the open end side of the anode-side lamp mouth portion 128A. A cylindrical intermediate portion 128Am having a diameter substantially the same as the diameter of the rod-shaped portion 25Ac, a radiating portion 128Ai in which a plurality of ring-shaped radiating fins 128Aj are formed, and a partial ball band having a sphere having a slightly larger radius than the radiating fins 128Aj The portion 128Ae (the held portion or the held portion) and the terminal portion 128Aa having the same shape as the terminal portion 128a of FIG. 2 (A). The ball band portion 128Ae has a shape in which both ends of the sphere in the longitudinal direction of the discharge lamp 1B are symmetrically cut out on a plane perpendicular to the longitudinal direction. The height of the ball strip 128Ae (the length in the long-side direction of the discharge lamp 1B) is set to about 2/3 of the radius of the ball. The mouthpiece portion 128A is integrally formed of a metal (for example, brass) having good thermal conductivity and electrical conductivity. Moreover, each part (ball band part 128Ae, terminal part 128Aa) manufactured separately may be connected, and the mouthpiece part 128A may be formed.

FIG. 29 (A) is a plan view showing a part of the hand portion 85D as a holding mechanism in this embodiment, and FIG. 29 (B) is a front view showing a part of FIG. 29 (A). In addition, FIG. 29 (A) is a cross-sectional view taken along line AA in FIG. 29 (B). 29 (A) and (B), the Z-axis is taken along the long side direction of the discharge lamp 1B supported, and the X-axis and Y-axis are taken as orthogonal directions in a plane perpendicular to the Z-axis. The directions of rotation about axes parallel to the X-axis, Y-axis, and Z-axis are also referred to as θ x, θ y, and θ z directions, respectively. Further, as shown in FIG. 29 (B), the hand portion 85D of this embodiment can be mounted on the Z-axis driving mechanism 84 of the lamp transporting system 56 of FIG. 4 (B) instead of the gripping claw opening and closing mechanism 85, for example.

In FIGS. 29 (A) and (B), the hand 85D is provided with a compliance mechanism (a mechanism having flexibility) in the X direction and the Y direction. The hand portion 85D has a box-shaped casing 172 fixed to the Z-axis driving mechanism 84 at a bottom surface and opening downward, and a rectangular frame-shaped lower shape fixed to the lower end of the casing 172 and having the same shape as the casing 172. Frame member 173a. The thickness (width in the XY plane) of the frame member 173a is the same throughout the entire circumference (except the corners), and its thickness is thicker than the thickness of the side surface of the casing 172.

Further, a rectangular flat plate-shaped lower plate 173b having a circular hole in the center is fixed to the bottom surface of the frame member 173a. The lower plate 173b is formed of, for example, a metal (such as stainless steel). Further, a flat plate-shaped upper plate 177 that is rectangular in plan view, has a thin thickness, and has a circular hole in the center is arranged inside the housing 172 on the upper surface of the frame member 173a with a slight gap between the inside of the housing 172. The upper plate 177 is formed of, for example, a synthetic resin (plastic or the like). The aperture of the upper plate 177 is substantially equal to the aperture of the lower plate 173b.

A plurality of compression coil springs 180 are mounted between the top of the inside of the casing 172 and the top of the upper plate 177 in a compressed state. The upper plate 177 is crimped to the frame member 173a with a predetermined force from above. A guide bar 181 is provided on the compression coil spring 180. The hand 85D has a plurality of (for example, three) fingers 86D extending through the disc-shaped mounting member 175 at the lower end portion and extending in the Z direction. The opening and closing device (not shown) in the mounting member 175 can be used in a plan view. The radial fingers 86D are opened and closed simultaneously (same speed and same distance).

A cylindrical member 174 extending in the vertical direction (Z direction) is mounted on the mounting member 175. The cylindrical member 174 may be a cylindrical member. A rectangular flange portion 174a is provided at a middle position in the Z direction of the cylindrical member 174 in a plan view. The cylindrical member 174 (the flange portion 174a) is formed of, for example, a metal (such as an aluminum alloy). The diameter of the cylindrical portion holding the flange portion 174a of the cylindrical member 174 is smaller than the apertures of the lower plate 173b and the upper plate 177, and the width of the outer shape of the flange portion 174a is larger than the apertures of the lower plate 173b and the upper plate 177. The upper plate 177 and the lower plate 173b sandwich the rectangular flange portion 174a of the cylindrical member 174 from above and below, and the cylindrical portion of the cylindrical member 174 is inserted into the hole of the upper plate 177 and the lower plate 173b. The upper and lower end portions of the cylindrical member 174 are a head portion 174 b and a connecting portion 174 c having a larger diameter than the middle cylindrical portion.

The thickness (Z-direction width) of the flange portion 174a is thinner than the thickness (Z-direction width) of the frame member 173a. Therefore, there is a gap between the upper plate 177 and the lower plate 173b in which the flange portion 174a can be displaced in the Z direction. The cylindrical member 174 including the flange portion 174a may be a part of the mounting member 175, or an actuator or the like for opening and closing the finger portion 86D may be mounted on the bottom of the cylindrical member 174.

Further, as shown in FIG. 29 (A), between the upper plate 177 and the lower plate 173b, the flange portion 174a is included, a rectangular shape in plan view and the thickness in the Z direction is smaller than the thickness of the frame member 173a, and A small rectangular frame-shaped member (hereinafter, referred to as a small frame-shaped member) 173c having a substantially equal thickness in the flange portion 174a. The length of the small frame-shaped member 173c (the length of the opposite side, the longer one (in the Y direction)) is set to be slightly shorter than the length between the opposite inner surfaces of the frame member 173a (the inner dimension in the Y direction). , The width of the small frame-shaped member 173c (the length of the opposite side, the shorter one (X direction)) is set to be the length of the inner surface parallel to the opposite side of the other side of the frame member 173a (within the X direction) Size) is sufficiently short. In addition, the width in the X direction (the inner dimension in the X direction) of the rectangular hole of the small frame-shaped member 173c is set to be slightly longer than the length in the X direction of the flange portion 174a, and the length in the Y direction (Y The inner dimension) is set to be sufficiently longer than the length in the Y direction of the flange portion 174a. Therefore, the flange portion 174a (that is, the cylindrical member 174) can be moved in the X direction together with the small frame-shaped member 173c (the small frame-shaped member 173c is pushed by the flange portion 174a), and the flange portion 174a can be moved along the small frame. The inner wall surface of the shaped member 173c moves in the Y direction. In addition, the flange portion 174 a is restricted by the X-direction inner wall and the Y-direction outer wall of the small frame-shaped member 173 c, and rotation in the θ z direction is restricted.

Further, as shown in FIG. 29 (B), a portion of the cylindrical member 174 above the upper plate 177 is provided with one end of a tensile coil spring 179 through three or more rod-shaped members 178 arranged radially. The other end of the tension coil spring 179 is in a radial and slightly stretched state, and is mounted on the top of the casing 172 outside the mounting position of one end side of the tension coil spring 179 (in a plan view, a cylindrical member 174 is used). Outside the center in the radial direction). Therefore, a radial upward diagonal force is applied to the cylindrical member 174, and the cylindrical member 174 stays at the center position by being balanced with the force of the tension coil spring 179 which is pulled in the opposite direction. At this time, the finger portion 86D mounted on the cylindrical member 174 through the mounting member 175 is better than the weight of the mounting member 175 and the finger portion 86D without holding anything, and touches the upper portion of the flange portion 174 a gently. The manner of the plate 177 determines the strength and installation angle of the tensile coil spring 179. At this time, the force of the compression coil spring 180 is determined to the extent that the upper plate 177 is not pulled upward with the force of the plurality of compression coil springs 180.

As a result, the cylindrical member 174 (that is, the mounting member 175 and the finger portion 86D) suspended by the tensile coil spring 179 is suppressed by the frictional resistance between the flange portion 174a and the synthetic resin upper plate 177, thereby suppressing Vibration prevents movement in the horizontal direction by a low coefficient of friction.

The inside of the finger portion 86D is formed into a concave shape along the curvature (fittable) of the surface of the ball band portion 128Ae of the lamp mouth portion 128 of the discharge lamp 1B of FIG. 28. A cylindrical guide block 176 is fixed to the center of the root portion of the plurality of fingers 86D on the bottom surface of the mounting member 175. The height in the Z direction of the guide block 176 is adjusted from the front end of the guide block 176 to the recess provided on the finger 86D. The distance from the center of curvature to the Z direction is approximately the same as the distance from the front end of the mouth portion 128 of the discharge lamp 1B to the center of the ball band portion 128Ae in the Z direction (longer direction of the discharge lamp 1B). Therefore, when the guide block 176 is in contact with the front end of the lamp mouth portion 128A of the discharge lamp 1B, when the finger portion 86D is closed, the recessed portion of the finger portion 86D is fitted into the ball band portion 128Ae of the discharge lamp 1B and can be reliably held. Discharge lamp 1B. Of course, the guide block 176 may be omitted.

Next, the discharge lamp 1B and the hand 85D of the present embodiment will be described in detail, and the grip is automatically offset relative to the hand 85D in 6 degrees of freedom (X, Y, Z directions and θ x, θ y, θ z directions). The operation of the discharge lamp 1B. As shown in FIG. 30 (A), the anode-side mouthpiece 128A of the discharge lamp 1B is, for example, inclined toward the θ y direction from the design transfer position and shifted in the + X direction. The hand 85D is moved to a target position in the X direction and the Y direction above the discharge lamp 1B by a driving mechanism in the X direction and the Y direction (for example, the winding shaft 83 in FIG. 4 (B)). Next, the mounting member 175 opens the plurality of fingers 86D (in an open state) and lowers the fingers 86D to the holding position of the discharge lamp 1B by the Z-axis driving mechanism 84. The front end of the discharge port 1A of the discharge lamp 1B contacts the height of the guide block 176 provided at the central portion of the mounting member 175, stops the lowering of the hand 85D, and the finger 86D starts to close.

At this time, when the length in the Z direction of the discharge lamp 1B is longer than the target length, the hand portion 85D also continues to fall after the guide block 176 contacts the lamp mouth portion 128A. At this time, in order to avoid the guide block 176 from pressing the discharge lamp 1B downward (-Z direction), the flange portion 174a pushes the upper plate 177 upward (+ Z direction) by a force of a plurality of compression coil springs 180. As a result, no large force is generated in the discharge lamp 1B. On the other hand, when the length in the Z direction of the discharge lamp 1B is shorter than the length of the target, the center position of the curvature of the recessed portion of the finger 86D and the center position of the ball portion 128Ae of the lamp mouth portion 128A may be staggered in the Z direction. When the finger part 86D is closed in this state, the edge provided below the recessed part of the finger part 86D will contact the lower part of the Z-direction center of the ball band part 128Ae. After that, if the finger portion 86D is further closed, the flange portion 174a originally contacting the upper plate 177 can move downward from the lower plate 173b because it can overcome the force of the tension coil spring 179. Therefore, the finger portion 86D is Guided by the curved surface of the ball band portion 128Ae and moving downward, the recessed portion of the finger portion 86D is fitted to the surface of the ball band portion 128Ae, and the finger portion 86D is closely attached to the ball band portion 128Ae.

This is because the concave portion provided in the finger portion 86D holds the ball band portion 128Ae to cause a centripetal action, so that the finger portion 86D can be moved downward to divide the gap between the flange portion 174a and the lower plate 173b. In addition, considering the short-time situation of the discharge lamp 1B at the finger 86D, the Z-axis driving mechanism 84 moves the hand 85D to the -Z direction at a constant height from the target height, and the guide block 176 contacts the lamp mouth portion It is also possible to perform the closing action of the finger 86D after the front end of 128A.

When the finger 86D is closed, as shown in FIG. 30 (B), the light mouth portion 128A is inclined, so although the finger portion 86D on the + X direction side contacts the light mouth before the finger portion 86D on the -X direction side. Part 128A, but further close the finger part 86D synchronously so that the finger part 86D on the -X direction side also contacts the light mouth part 128A, as shown in Fig. 31 (A), the finger part 86D on the + X direction side receives the light from the light mouth The reaction force of the part 128A generates a force in the hand 85D that pushes the whole in the + X direction. As a result, the cylindrical member 174 that was originally balanced by the balance with the force of the tension coil spring 179 and the friction between the flange portion 174a and the upper plate 177 will exceed the balance force with the tension coil spring 179 and The frictional force between the flange portion 174a and the upper plate 177 can surely hold the ball band portion 128Ae of the mouthpiece portion 128A with three fingers 86D while easily moving in the + X direction. At this time, even if the lamp mouth portion 128A is inclined in the directions of θ x, θ y, and θ z, and the spherical surface of the spherical belt portion 128Ae is displaced, its shape will not change. Therefore, the finger portion 86D can be reliably made without the flexibility in the rotation direction. Ground to hold the mouthpiece 128A.

Next, as shown in FIG. 31 (B), when the finger portion 86D holds the mouth portion 128A of the discharge lamp 1B and drives the Z-axis drive mechanism 84 to lift the discharge lamp 1B with the hand 85D, the coil spring 179 is stretched On the other hand, the force diagonally upward is applied, and the flange portion 174a originally contacting the upper plate 177 moves downward due to the weight of the discharge lamp 1B, and the flange portion 174a contacts the lower plate 173b. Because the friction coefficient between the lower plate 173b and the flange portion 174a is large, the finger portion 86D exceeds the centripetal force generated by the balance of the force of the tension coil spring 179, while maintaining a position biased to the + X direction (no compliance) State) rise. As a result, by moving the hand 85D in the X direction and / or the Y direction, the discharge lamp 1B can be moved to the target position regardless of the shape error of the discharge lamp 1B (for example, the storage unit 54 in FIG. 4 (B)) (Above the rotating disk 79), replace the discharge lamp 1B with an unused discharge lamp.

In the above-mentioned embodiment, when a large upward force is generated by the finger portion 86D, the upper plate 177 is pressed downward by the compression coil spring 180 and pushed up by the flange portion 174a to release the large force upward. Function (buffer function). The mechanism for releasing the finger 86D in the Z direction is not limited to such a mechanism, and a mechanism for driving the entire hand 85D in the Z direction may be provided in the Z-axis driving mechanism 84.

In the above-mentioned embodiment, although only the portion (ball band portion 128Ae) held by the finger portion 86D of the anode side mouth portion 128A is described, the power supply block 66 at the end of the cable 24 in FIG. 4 (B) is described. For example, if the terminal portion 128Aa is connected to FIG. 28, the shape of the terminal portion 128Aa may be the shape of the terminal portion 28a of FIG. 2 (A) or the terminal portions 28Aa to 28Da of FIGS. 3 (B) to (E). .

Moreover, as a manufacturing method of the discharge lamp 1B, the same manufacturing method as the said discharge lamp 1 and 1A can be used. That is, the lamp body (glass member) and the mouthpiece portions 126 and 128A are separately prepared, and these are connected to each other to form the discharge lamp 1B. At this time, the lamp mouth portions 126 and 128A can be reused, for example, by removing them from the used discharge lamp 1B. When at least one of the lamp mouth portions 126 and 128A is reused, it is possible to reuse only at least a part of the lamp mouth portions 126 and 128A (for example, the terminal portion 128Aa, the ball band) instead of reusing the entire lamp mouth portions 126 and 128A. At least one of the part 128Ae and the heat radiation part 128Ai).

In addition, although the replacement devices 50 and the like of each of the above-mentioned embodiments perform the replacement of the discharge lamps 1, 1A, 1B, and the like in a fully automatic manner, for example, only the clamp mechanism 52 and the drive unit 72 may be used, and the manual operation may be used for pulling. The part 36 is pulled out and part of the discharge lamp 1, 1A, 1B is transported using the lamp transport system 56 or the like.

In addition, although the replacement device of each of the above-mentioned embodiments replaces the lamp with respect to each of the openings 79a of the rotary disk 79 (that is, sets (supplements) the unused lamp and recycles the used lamp), it may also be, for example, relatively to the driving unit 80 The rotating disk 79 is made detachable, and the lamp is replaced with the rotating disk 79 in a state where a lamp (inserted) is provided in the opening 79 a of the rotating disk 79. In this case, the rotary disk 79 can be used as a carrier for transporting the lamp.

The exposure device of each of the above embodiments or the exposure method using these exposure devices can be used to form a predetermined pattern (circuit pattern, electrode pattern, etc.) on a substrate (plate P) to manufacture a liquid crystal element such as a liquid crystal display element. Hereinafter, an example of this manufacturing method will be described with reference to steps S401 to S404 in FIG. 33.

In step S401 (pattern forming step) of FIG. 33, first, a coating step of applying a resist on the substrate to be exposed to prepare a photosensitive substrate (plate P) is performed, and a mask pattern for a liquid crystal display element is used using the exposure apparatus described above. An exposure step of transferring the exposure onto the photosensitive substrate, and a developing step of developing the photosensitive substrate. A predetermined photoresist pattern is formed on the substrate by a lithography process including the coating step, exposure step, and development step. After this lithography process, a predetermined pattern including a large number of electrodes and the like is formed on the substrate through an etching step, a photoresist peeling step, and the like of the photoresist pattern as a processing mask. The lithography process and the like are performed a plurality of times on the number of layers on the viewing plate P.

In the next step S402 (color filter forming step), the majority of the three fine filters corresponding to red R, green G, and blue B are arranged in a matrix, or red R, green G, and blue are arranged. The group of the three stripe-shaped plural filters is arranged in the direction of the horizontal scanning line, thereby forming a color filter. In the next step S403 (unit assembly step), liquid crystal is injected between a plate having a predetermined pattern obtained in step S401 and a color filter obtained in step S402 to manufacture a liquid crystal panel (liquid crystal cell).

In the following step S404 (module assembly step), most of the liquid crystal panels (liquid crystal units) assembled in the above manner are mounted with components such as a circuit for performing a display operation and a backlight to complete a liquid crystal display element. According to the method for manufacturing a liquid crystal display element described above, since the discharge lamp can be efficiently replaced in the exposure device, high productivity can be obtained.

In addition, the present invention is not limited to the application to the manufacturing process of liquid crystal display elements, and can also be widely applied to the manufacturing process of display devices such as plasma displays, as well as photographic elements (CCD, etc.), micromachines, and MEMS (Microelectromechanical Systems: micromotors). System), thin-film magnetic heads using semiconductor wafers as substrates, and various components such as semiconductor components.

In addition, the light source device of the above embodiment can be applied to a projection exposure device (step and repeat) method (step and repeat) method in addition to the stepwise scan type projection exposure device (scanner, etc.) described above. Light source, etc.). In addition, the light source device of the above embodiment can also be applied to a light source device of an exposure device that does not use a proximity method or a contact method of a projection optical system, or a light source of a device other than the exposure device.

As described above, the present invention is not limited to the above-mentioned embodiments, and may have various configurations without departing from the gist of the present invention.

In addition, the disclosure in the above-mentioned gazette, international publication pamphlets, U.S. patents, or U.S. patent application publication specifications described in this application is referred to as a part of the description in this specification. In addition, all the disclosures of Japanese Patent Application No. 2014-070609 filed on March 28, 2014, including the description, the scope of patent application, the illustration, and the abstract, are incorporated herein by reference.

Claims (17)

    A method for replacing a discharge lamp, which comprises replacing a discharge lamp of a supporting member installed in an exposure device, the discharge lamp comprising: a glass member covering a light-emitting part including an anode and a cathode opposite to each other in a predetermined direction; The first light mouth member on one side of the glass member and the second light mouth member provided on the other side include: connecting the connected portion with the first light mouth member of the discharge lamp, and An operation of disengaging a member transmitting power from the exposure device to the light emitting portion from the connected portion; an operation of disengaging the second mouthpiece member of the discharge lamp from the support member; and the first holding the discharge lamp Operation of the held portion of the cap member to transport the discharge lamp from the support member to the storage portion.         For example, the replacement method of the first scope of the patent application includes: holding the held portion of the first lamp mouth member of the unused discharge lamp in the storage unit, and transferring the unused discharge lamp to the unused discharge An operation of a position where the second lamp mouth member of the lamp can be supported by the supporting member; an operation of supporting the second lamp mouth member of the unused discharge lamp by the supporting member; Movement of the member in contact with the connected portion of the first nozzle member of the unused discharge lamp.         A method for lighting a discharge lamp, which illuminates a discharge lamp of a support member installed in an exposure device, the discharge lamp comprising: a glass member covering a light-emitting part including an anode and a cathode that are oppositely provided in a predetermined direction; The first cap member provided on one side of the glass member and the second cap member provided on the other side include: the discharge lamp holding the first cap member, from the storage unit to the Operation of supporting member conveyance; operation of connecting a member transmitting power to the connected portion of the first lamp mouth member of the discharge lamp; supporting the second lamp mouth member of the discharge lamp by the supporting member capable of supplying power An action; and an action of supplying electric power to the discharge lamp through the member transmitting power and the supporting member to light the discharge lamp.         For example, in the method of lighting a discharge lamp according to item 3 of the scope of patent application, in the conveying operation, the conveying section is maintained in the predetermined direction in the predetermined direction. , Transport the discharge lamp.         A discharge lamp, a support member mounted in an exposure device, comprising: a glass member covering a light-emitting portion including a first electrode and a second electrode opposite to each other in a predetermined direction; and a glass member provided on the glass with respect to the light-emitting portion, respectively. The first and second nozzle members of the first electrode side and the second electrode side of the member, and the first nozzle member includes a member for transmitting electric power from the exposure device to the light emitting unit. A connected part to be connected; and a held part that can be held by a conveying part.         For example, the discharge lamp of the fifth scope of the patent application, wherein the connected portion of the first lamp mouth member includes two plane portions arranged in a crosswise manner.         For example, the discharge lamp according to item 5 of the patent application, wherein the connected portion of the first lamp mouth member includes a substantially axisymmetric surface.         For example, the discharge lamp according to any one of claims 5 to 7, wherein a hole portion capable of engaging with a protruding portion of a transporting portion is formed in the held portion of the first lamp mouth member.         For example, the discharge lamp according to any one of claims 5 to 7, wherein the held portion of the first lamp mouth member has an axisymmetric portion that can be held by a carrying portion and has a spherical surface.         For example, the discharge lamp according to any one of claims 5 to 7, wherein the first lamp mouth member is provided with a heat sink between the glass member and the connected portion and the held portion.         For example, the discharge lamp according to any one of claims 5 to 10, wherein the second lamp mouth member has a flange portion that can be placed on the support member and a small diameter section having a smaller cross-sectional area than the flange portion. And a stepped portion with a larger cross-sectional area than the small diameter portion.         A method for manufacturing a discharge lamp according to any one of claims 5 to 11 including: an operation of manufacturing the glass member having a conductive member connected at one end thereof; and manufacturing and forming the connected portion and the held portion A movement of the covering member; and a movement of fixing the covering member so as to cover the conductive member on one end side of the glass member.         A discharge lamp, which is mounted on an exposure device and includes a glass member having a light-emitting portion having first and second electrodes opposite to each other in a predetermined direction, and a glass member provided on the glass member with respect to the light-emitting portion, respectively. The first mouthpiece member and the second mouthpiece member of the first electrode side and the second electrode side, and the first mouthpiece member includes a member for transmitting electric power from the exposure device to the light emitting unit; A to-be-connected portion; and a to-be-held portion provided in the predetermined direction at a position different from the to-be-connected portion and held by a carrying portion that carries the discharge lamp into the exposure device.         For example, the discharge lamp according to item 13 of the patent application, wherein the held portion is disposed closer to the glass member side than the connected portion in the predetermined direction.         For example, the discharge lamp according to item 13 or 14 of the scope of patent application, wherein the connected portion has a contact surface that is in contact with the surface of the component.         For example, the discharge lamp according to any one of claims 13 to 15, wherein the held portion includes a flat portion and a non-flat portion.         For example, the discharge lamp according to item 16 of the patent application, wherein the non-flat portion includes an inclined portion or a hole portion.