TWI771788B - light source device - Google Patents

Abstract

The subject of the present invention is to efficiently replace the discharge lamp. The light source device 30 of the present invention is used to emit light for the discharge lamp 1 having a glass tube with an anode and a cathode disposed inside, and caps 28 and 26 disposed on the anode side and the cathode side, respectively, with respect to the light-emitting portion, and includes: The storage portion 54 for storing the discharge lamp 1, the support member 33 for detachably supporting the base portion 26 of the discharge lamp 1, and the lamp for detachably connecting the cable 24 to the discharge lamp 1 supported by the support member 33 The clamp mechanism 52 of the mouth portion 28 holds the cap portion 28 in a state where the support of the cap portion 26 by the support member 33 and the connection of the cap portion 28 by the cable 24 of the clamp mechanism 52 is released. 1. The lamp conveying system 56 conveyed between the storage unit 54 and the support member 33.

Description

light source device

The present invention relates to a discharge lamp, a method for manufacturing the discharge lamp, a method for replacing the discharge lamp, and a method for lighting the discharge lamp, a light source device provided with the discharge lamp, an exposure device provided with the light source device, and a device manufacturing method using the exposure device.

In the lithography process of manufacturing various components (liquid crystal display components or semiconductor components, etc.), it is used to transfer the pattern formed on the photomask to the substrate (glass plate or semiconductor wafer, etc.) coated with photosensitive material. Among the exposure apparatuses such as a single-exposure type projection exposure apparatus and a scanning exposure type projection exposure apparatus, there is an exposure apparatus equipped with an exposure light source device composed of a discharge lamp such as an ultra-high pressure mercury lamp and a condenser lens.

In a conventional light source device, a flange portion and a step portion are provided on one side of the lamp cap of the discharge lamp, and in a state where the surface of the base portion provided with the opening is placed on the flange portion, the flange portion is placed in the opening. The step portion is biased downward by a lever member or the like to fix the discharge lamp (for example, refer to Patent Document 1). Moreover, when the use time of the discharge lamp for exposure apparatus exceeds the allowable time set in advance, there exists a possibility that exposure performance (resolution etc.) may deteriorate due to the fall of illuminance. Therefore, in the past, when the cumulative use time of the discharge lamp exceeded its allowable time, the discharge lamp was manually replaced by an operator with an unused discharge lamp. Prior Art Document [Patent Document 1] International Publication No. 2007/066947 Pamphlet

The problem to be solved by the invention

Due to the high temperature of the discharge lamp in use of the exposure apparatus, when an operator wanted to manually replace the discharge lamp, he had to wait, for example, 30 minutes or more after the discharge lamp was turned off. Therefore, the downtime of the exposure apparatus is long, and the throughput (productivity) of the exposure process is low.

In addition, in recent scanning exposure type exposure apparatuses, in order to improve productivity, it is required to illuminate a wider illumination area of the photomask with exposure light and to scan the photomask at a higher speed. Therefore, it is necessary to supply light with higher illuminance from the light source device. For this purpose, for example, a plurality of discharge lamps may be provided, and light from the plurality of discharge lamps may be combined and used. However, when the light source device has a plurality of discharge lamps, since the frequency of replacement of the discharge lamps increases, the downtime of the exposure device may become longer, thereby inhibiting the improvement of productivity. means of solving problems

A first aspect of the present invention provides a light source device that includes a glass member having a first electrode and a second electrode for forming a light-emitting portion provided inside, and a first electrode provided on the glass member opposite to the light-emitting portion, respectively. The discharge lamp of the first base member and the second base member on the electrode side and the second electrode side emits light, characterized by comprising: a storage part for storing the discharge lamp; A support portion for detachably supporting a cap member; a connecting portion for detachably connecting a member for transmitting electric power to the first cap member of the discharge lamp supported by the support portion; and In a state in which the support of the second lamp cap member by the support portion and the connection of the power transmitting member to the first cap member by the connecting portion are released, the discharge lamp is held by the first cap member in the first cap member. A conveyance part that conveys between the storage part and the support part.

A second aspect provides a method for replacing a discharge lamp for replacing a discharge lamp having a glass member forming a light-emitting portion, and a first base member and a second base member provided so as to sandwich the glass member, comprising: : the action of making the surface contact the connected part of the first lamp cap member of the discharge lamp and the member that transmits electric power to be detached from the connected part; the action of making the second cap member of the discharge lamp detachable from the supporting member an operation; and an operation of holding the held portion including the non-planar portion or the inclined portion of the first base member of the discharge lamp, and transporting the discharge lamp to the storage portion.

A third aspect provides a method of lighting a discharge lamp comprising lighting a discharge lamp having a glass member forming a light-emitting portion, and a first base member and a second base member provided so as to sandwich the glass member, It includes: the action of bringing the member that transmits electric power into contact with the connected portion of the first base member of the discharge lamp; the action of supporting the second base member of the discharge lamp with a support member capable of supplying electric power; and The electric power is supplied to the discharge lamp through the power transmitting member and the supporting member to light the discharge lamp.

A fourth aspect provides a discharge lamp including a glass member in which a first electrode and a second electrode for forming a light-emitting portion are provided inside, and the first electrode and the first electrode are respectively provided on the glass member with respect to the light-emitting portion. The first lamp cap member and the second cap member on the side of the two electrodes, characterized in that the first cap member has a member for transmitting electric power that can be contacted and can be contacted with the member in order to reduce electrical contact resistance with the member. The connected part in which the members are in surface contact, and the held part including the non-planar part or the inclined part which can be held by the conveying part.

A fifth aspect provides a method of manufacturing a discharge lamp according to an aspect of the present invention, which includes: manufacturing the glass member having one end connected to the conductive member; manufacturing the covering member in which the connected portion and the held portion are formed an action; and an action of fixing the covering member so as to cover the conductive member on one end side of the glass member.

A sixth aspect provides a method of manufacturing a discharge lamp according to an aspect of the present invention, comprising: preparing the glass member provided at one end of the first conductive member electrically connected to the first electrode or the second electrode; preparing An operation of forming the second conductive member with the connected portion and the held portion; and an operation of connecting the second conductive member to the first conductive member on one end side of the glass member.

A seventh aspect provides an exposure apparatus including the light source device of the aspect of the present invention, an illumination system for illuminating a mask with light emitted from the discharge lamp of the light source device, and an image of a pattern of the mask projected on a substrate. Projection optics.

An eighth aspect provides a device manufacturing method comprising: forming a pattern of a photosensitive layer on a substrate using the exposure apparatus of the aspect of the present invention, and processing the substrate on which the pattern is formed.

[First Embodiment] Hereinafter, the first embodiment of the present invention will be described with reference to FIGS. 1 to 12 . In FIG. 1, the schematic structure of the exposure apparatus EX provided with the light source apparatus 30 of this embodiment is shown. The exposure apparatus EX is, for example, a scanning exposure type projection exposure apparatus. In FIG. 1 , a light source device 30 includes a discharge lamp 1 composed of an arc discharge type ultra-high pressure mercury lamp, a support member 33 for holding the cathode-side base portion 26 of the discharge lamp 1 , and a pull-out portion 36 of the movable support member 33 (refer to 4(B) ), the drive unit 34 for fixing and releasing the base portion 26 to the support member 33 , and the elliptical mirror 2 (condensing mirror) arranged so as to surround the glass tube 25 (bulb) of the discharge lamp 1 and a box-shaped lamp box 31 that accommodates the discharge lamp 1 and the elliptical mirror 2 during exposure (when the discharge lamp 1 is used). During exposure, the light-emitting portion in the glass tube 25 of the discharge lamp 1 is arranged, for example, in the vicinity of the first focus of the elliptical mirror 2 .

In addition, the light source device 30 includes a flexible cable 24 detachably connected to the anode-side base portion 28 of the discharge lamp 1 and connected to the cathode-side base portion 26 of the discharge lamp 1 through a support member 33 A flexible cable 23, a power supply unit 20 for supplying electric power (current) to the discharge lamp 1 through the cables 23, 24 to cause the discharge lamp 1 to emit light, and a fully automatic replacement device 50 for replacing the used discharge lamp 1 . The replacement device 50 includes a clamp mechanism 52 for attaching and detaching the cable 24 to and from the anode side cap portion 28 , a storage portion 54 for storing the discharge lamp 1 , and a lamp transport for transporting the discharge lamp 1 between the support member 33 and the storage portion 54 . The system 56 , and the box-shaped case 51 that accommodates the storage part 54 and the lamp conveying system 56 .

In addition, as shown in FIG.4(B), the support member 33 is actually a substantially cylindrical metal (conductive) member in which the ring-shaped flange part was formed in the upper part. The support member 33 is fixed to the center of the pull-out portion 36 supported so as to be movable along the guide 41 on the inner surface of the lamp box 31 through the flange portion, as will be described later, and the support member 33 and the pull-out portion 36 are electrically insulated from each other. In addition, a drive unit 34 for the base portion 26 is provided on the bottom surface of the pull-out portion 36 .

In FIG. 1 , the light source device 30 includes a power supply unit 20 , a drive unit 34 , and a light source control system 32 that controls the operation of the lamp conveying system 56 and the like. The light source control system 32 monitors the accumulated use time of the discharge lamp 1, and when the accumulated use time reaches a preset allowable time, even the replacement device 50 is activated to replace the used discharge lamp 1 with an unused discharge lamp. The detailed configuration and operation of the light source device 30 will be described later.

The exposure apparatus EX includes an illumination optical system 13 for illuminating the mask M using the exposure light IL selected from the light beams supplied from the light source device 30, and projects an image of the pattern of the mask M on the mask M under the irradiation of the exposure light IL. Projection optical system PL on the surface of plate P (photosensitive substrate) composed of glass substrate with resist, mask stage MST for moving mask M, substrate stage PST for moving plate P, and overall control including light source device 30. The main control system 14 constituted by a computer for the overall operation of the exposure apparatus.

For example, the exposure apparatus EX is an exposure apparatus for manufacturing liquid crystal display elements, and the main body of the exposure apparatus EX (including the part of the mask stage MST, the projection optical system PL, and the substrate stage PST) is installed in a box-shaped cavity located in a manufacturing plant Inside the chamber (not shown), the light source device 30 is provided on the roof RT of the chamber. The light source device 30 supplies the information of the intention to the main control system 14 when the accumulated usage time of the discharge lamp 1 reaches the allowable time. Accordingly, the main control system 14 stops the exposure operation of the exposure device EX until the information that the replacement of the discharge lamp 1 is completed is supplied from the light source device 30 . Hereinafter, the axis parallel to the optical axis AX of the projection optical system PL is taken as the Z axis, and the X axis parallel to the paper surface of FIG. Take the Y-axis perpendicular to the paper for description.

The luminous flux emitted from the discharge lamp 1 is converged near the second focal point by the elliptical mirror 2 , and then passes near the shutter (not shown) to be incident on the reflector 3 for bending the light path as divergent light. The reflector 3 is also accommodated in the light box 31 . The light beam reflected by the reflector 3 passes through the light-transmitting window member 4 of the light box 31 and enters the interference filter 5, and the interference filter 5 selects only the light rays composed of a predetermined glow line (for example, the i-line with a wavelength of 365 nm). Exposure light IL. Further, as the exposure light IL, in addition to the i-line, a g-line, an h-line, a mixed light thereof, or the like, or a glow line of a lamp other than a mercury lamp, etc. may be used. The selected exposure light IL is incident on the fly-eye lens 6 (optical integrator), and a plurality of secondary apertures are formed on variable aperture diaphragms (hereinafter, referred to as illumination σ diaphragms) 7 arranged on the output surface of the fly-eye lens 6 . light source. The exposure light IL after passing through the variable σ diaphragm 7 is incident on the mask shade (variable field diaphragm) 9 via the first relay lens 8 . The arrangement surface of the mask shade 9 is substantially conjugate with the pattern surface of the mask M, and the opening shape of the mask shade 9 is set by the driving device 9a, thereby defining the illumination area on the mask M. Further, in order to prevent unnecessary exposure light from being irradiated on the plate P during the stepwise movement of the plate P, the stage control system 15 can open and close the mask shutter 9 through the drive device 9a.

The exposure light IL passing through the mask shade 9 illuminates the pattern area of the pattern surface of the mask M through the second relay lens 10 , the mirror 11 for bending the optical path of the exposure light IL, and the condenser lens 12 . The illumination optical system 13 is constituted by an interference filter 5 , a fly-eye lens 6 , a variable σ diaphragm 7 , relay lenses 8 and 10 , a mask shade 9 , a reflector 11 , and a condenser lens 12 . The light beam from the light source device 30 passes through the illumination optical system 13 as exposure light IL to illuminate the elongated illumination region of the mask M (mask), for example, in the Y direction. The pattern in the illumination area of the mask M is projected on the exposure area (and the illumination area) of an illumination area of the plate P at a projection magnification β (β is, for example, equal magnification, magnification, or reduction magnification) through the projection optical system PL. optically conjugated regions). Moreover, as the projection optical system PL, a plurality of projection optical systems, for example, a multi-projection optical system arranged in two rows in the Y direction, etc. may be used. When using such a plurality of projection optical systems, the exposure light IL from the illumination optical system 13 is arranged to illuminate a plurality of illumination regions on the pattern surface of the mask M in parallel.

The mask M is held on the upper surface of the mask stage MST which can be finely moved in the X direction, the Y direction and the rotation direction around the Z axis on a mask base (not shown). The position of the mask stage MST is measured with high precision by a laser interferometer 18R that irradiates a laser beam for measurement to the movable mirror 17R fixed here, and the measured value is supplied to the stage control system 15 and the host. Control system 14. Based on the measured values and control information from the main control system 14, the stage control system 15 controls the position of the photomask stage MST through a drive system 19R including a linear motor or the like.

On the other hand, the plate P is held on the upper surface of the substrate stage PST through a plate holder (not shown), and the substrate stage PST is mounted on a base member (not shown) so as to be movable in the X and Y directions. superior. The position of the substrate stage PST is measured with high precision by a laser interferometer 18W that irradiates a laser beam for measurement to a movable mirror 17W fixed here, and the measured value is supplied to the stage control system 15 and the main control Department 14. Based on the measured value and the control information from the main control system 14, the stage control system 15 controls the position of the substrate stage PST (plate P) through a drive system 19W including a linear motor or the like.

During the exposure of the plate P, the operation of moving each irradiation area of the plate P to the front of the exposure area of the projection optical system PL by the substrate stage PST is repeated in a step & scan method (step movement) , while using the light beam from the light source device 30 to pass through the illumination optical system 13 to illuminate the mask M, and to move the mask M and the plate P in the X direction (scanning direction) in synchronization with the projection optical system PL, so as to display the pattern of the mask M. The image is exposed to a full-scale action of one irradiated area of the plate P (scanning exposure). Accordingly, the image of the pattern of the mask M is transferred to each irradiation area of the plate P. As shown in FIG.

In addition, in order to perform alignment in advance during this exposure, for example, an aerial image measuring unit 22 for detecting the position of an alignment mark formed on the mask M is provided inside the substrate stage PST, and an aerial image measuring unit 22 is provided on the side surface of the projection optical system PL. There is an alignment system 21 for detecting the position of alignment marks attached to each irradiation area of the plate P. As shown in FIG. The detection signals of the aerial image measurement section 22 and the alignment system 21 are supplied to the alignment signal processing system 16, which processes the detection signals, for example, to obtain the alignment information of the mask M and the board The information on the arrangement of each irradiation area of the sheet P is supplied to the main control system 14 . The main control system 14 performs alignment of the mask M and position control of the plate P during exposure based on the information. In this way, high overlapping precision can be obtained during overlapping exposure.

Next, the structure of the light source device 30 of the present embodiment, the replacement operation of the discharge lamp 1 using the light source device 30, and the like will be described in detail. FIG. 2(A) shows the discharge lamp 1 of the light source device 30 in FIG. 1 . In FIG. 2(A) , the discharge lamp 1 includes a glass tube 25 composed of a bulb portion 25a and two rod-shaped portions 25b and 25c fixed in a substantially symmetrical cylindrical shape that sandwiches the bulb portion 25a, and is connected to a rod-shaped portion 25b. The cathode-side base portion 26 at the end portion and the anode-side base portion 28 connected to the end portion of the rod-shaped portion 25c whose diameter gradually decreases toward the other outer side, for example. An anode EL1 and a cathode EL2 for forming a light-emitting portion are fixed to face each other in the bulb portion 25a, and the cathode EL2 and the anode EL1 are electrically connected to the base portions 26 and 28, respectively. The base portions 26 and 28 are formed of a metal (eg, brass, etc.) having good electrical conductivity and thermal conductivity. The base portion 26 , the glass tube 25 , and the base portion 28 are arranged along a straight line passing through the center of the light-emitting portion along the central axis of the rod-shaped portions 25 b and 25 c connecting the glass tube 25 . The direction parallel to the straight line connecting the central axes of the rod-shaped portions 25b and 25c is the longitudinal direction L of the discharge lamp 1 .

The base portions 26 and 28 are basically used as power receiving terminals for supplying power to the cathode EL2 and the anode EL1 from the power supply portion 20 of FIG. 1 through the cables 23 and 24 . In addition to this, the base portion 26 also serves as a supported portion for supporting the glass tube 25 (the discharge lamp 1 ) with the support member 33 (see FIG. 4(B) ). In addition, the base portions 26 and 28 are each formed with concavo-convex portions (portions with larger surface areas) that effectively dissipate heat conducted from the glass tube 25 .

Further, in the cap portion 26 on the cathode side, an annular band-shaped flange portion 26a (contact portion) having an outer diameter approximately twice the outer diameter of the rod-shaped portion 25b is formed in order from the rod-shaped portion 25b toward the open end side. and the predetermined part of the position in the longitudinal direction L), the cylindrical shaft part 26b (the fitting part or the predetermined part of the position) whose outer diameter is slightly larger than the outer diameter of the rod-shaped part 25b, the outer diameter of which is larger than the outer diameter of the shaft part 26b The small cylindrical small-diameter portion 26k and the cylindrical fixing portion 26h whose outer diameter is slightly smaller than that of the shaft portion 26b or whose outer shape is substantially the same as the shaft portion 26b. The chamfered part 26e is formed in the boundary part of the axial part 26b and the small diameter part 26k, and the chamfered part 26i is also formed in the open end side of the fixed part 26h. Also, the outer shape of the cylindrical shaft portion 26b may be substantially the same as the outer shape of the rod-shaped portion 25b. The small diameter portion 26k is formed by providing a concave portion (segment portion) 26f between the shaft portion 26b and the fixing portion 26h in a direction intersecting with the longitudinal direction L of the discharge lamp 1 . When the discharge lamp 1 is placed on the support member 33 shown in FIG. 4(B) , the flange portion 26 a abuts on the step portion surrounding the central opening of the support member 33 and becomes the longitudinal direction L of the light emitting portion of the glass tube 25 For the positioning reference (first direction), the shaft portion 26b is fitted into the opening, and serves as a positioning reference within a plane orthogonal to the longitudinal direction L of the light-emitting portion.

Moreover, in the fixed part 26h, the pressed surface 26g is formed by the recessed part 26f. The pressed surface 26g is a plane perpendicular to the longitudinal direction L. As shown in FIG. The drive unit 34 shown in FIG. 4(B) includes a lever 38 for urging the fixing portion 26h (pressed surface 26g ) of the cap portion 26 downward (-Z direction) when the discharge lamp 1 is supported by the support member 33 . The tension coil spring 39 for urging the fixed portion 26h to rotate the lever 38 counterclockwise, and the driving of an air cylinder or an electromagnetic cylinder for releasing the fixation of the lever 38 to the cap portion 26 and rotating the lever 38 in the clockwise direction Section 40. When the discharge lamp 1 is fixed to the support member 33 and supported, it is only necessary to release the clockwise rotation of the lever 38 by the drive part 40, and when the discharge lamp 1 is taken out from the support member 33, it is only necessary to use the drive part 40 to rotate the lever 38. 38 can be rotated clockwise. Moreover, as the drive unit 34, the mechanism described in the international publication 2007/066947 pamphlet can also be used.

In FIG. 2(A), for example, on the surface of the shaft portion 26b of the cap portion 26, a spiral groove portion 26d is formed from the flange portion 26a to the chamfered portion 26e. The cooling effect of the discharge lamp 1 can be improved by supplying, for example, a cooling gas from the outside to this groove portion 26d. Of course, the groove portion 26d is not necessarily provided. In this case, the heat generated in the discharge lamp 1 flows through the base portion 26 to the support member 33 having a large surface area and a large heat capacity, so that the temperature rise of the discharge lamp 1 can be suppressed. In addition, in order to improve the cooling effect of the discharge lamp 1, the cooled gas may be sent from an air blower (not shown) into the opening of the fixing portion 26h of the base portion 26 of the support member 33 of FIG. 4(B) inserted into the opening. .

2(C) is a cross-sectional view taken along the line CC of the discharge lamp 1 of FIG. 2(A) , as shown in FIG. 2(C), the flange portion 26a of the base portion 26 is formed with, for example, 90° intervals. Two openings 27A, 27B (positioning parts). In response to this, two pins (not shown) are provided on the surface of the support member 33 in FIG. 4(B) on which the flange portion 26 a is placed. When the discharge lamp 1 is placed on the support member 33, the two pins are inserted through the openings 27A and 27B of the flange portion 26a, thereby positioning around the axis in the longitudinal direction L of the discharge lamp 1. The relative angle between these openings 27A and 27B and the anode-side base portion 28 is set to an angle (predetermined angle) at which the base portion 28 and the cable 24 are easily connected. In addition, the shape of the cathode side base part 26 may be arbitrary. As the base portion 26 , for example, only a flange portion 26a and a shaft portion 26b may be used, and a recessed portion into which the front end portion of the lever 38 of the drive unit 34 can be inserted into the shaft portion 26b may be used.

FIG. 2(B) shows the anode side cap portion 28 of FIG. 2(A). In FIGS. 2(A) and (B), the anode-side base portion 28 has a maximum diameter formed with the rod-shaped portion 25c in order from the rod-shaped portion 25c side of the glass tube 25 of the discharge lamp 1 to the open end side. The heat dissipation portion 28i of the plurality of annular belt-shaped heat dissipation fins 28j having substantially the same outer diameter includes three flat portions formed at substantially equal angular intervals around the straight line passing through the center of the glass tube 25 in the portion where the plurality of heat dissipation fins 28j are formed. 28f, 28g, and 28h are grasped portions 28e (held portions), and substantially triangular column-shaped terminal portions 28a (connected portions) formed with two V-shaped flat portions 28b, 28c. At approximately the center of the flat portions 28f, 28g, and 28h of the grasped portion 28e, there are provided pins 86a for inserting the lamp transport system 56 when the discharge lamp 1 is clamped by the lamp transport system 56 (refer to FIG. 9(B) ) The small holes h1, h2, h3.

In addition, the cap portion 28 of the present embodiment is connected to the rod-shaped portion 25c provided in the glass tube 25 by bolts (not shown) provided in the plurality of openings 28k in the plane of the end portion of the grasped portion 28e. The end part, the metal rod part (not shown) electrically connected to the anode EL1. Therefore, the base portion 28 can be removed after the discharge lamp 1 is used, and the removed base portion 28 can be reused when manufacturing a new discharge lamp 1 . In addition, the base portion 28 may be integrated with the glass tube 25 by adhering or welding.

FIG. 5 shows a state in which the cable 24 is connected to the anode side cap portion 28 . In FIG. 5 , a metal (conductive) member having a V-shaped groove portion 66a formed at the same angle as the plane portions 28b and 28c of the terminal portion 28a of the cap portion 28 is connected to the end portion of the cable 24 (hereinafter, called the power supply block) 66. In addition, the power supply block 66 is fixed to the lower end of the L-shaped reference lever 67, the reference lever 67 is rotatably connected to the L-shaped driving lever 69 through the connecting pin P51, and the lower end of the driving lever 69 is connected to the L-shaped driving lever 69 through the connecting pin. P52 is rotatably fixed with a roller 70 . A recessed portion 28d large enough to accommodate the roller 70 is formed on the flat surface portions 28b and 28c of the terminal portion 28a of the base portion 28 and the opposite side (rear surface) (see FIG. 2(B) ).

Here, the reason why the concave portion 28d (recess) is provided on the rear surface of the triangular columnar terminal portion 28a is that when the light emitted from the discharge lamp 1 is condensed by the elliptical mirror 2, the roller 70 does not block the condensed light as much as possible. Because of light. Therefore, for example, when the roller 70 is miniaturized, it is not necessary to provide the concave portion 28d. In addition, in order to reduce the stress acting on the discharge lamp 1 as much as possible (in order to increase the flexibility of the reference lever 67 and the drive lever 69 ) when the power supply block 66 is connected to the terminal portion 28 a as described later, further The reference lever 67 and the driving lever 69 are formed as thin as possible so as to reduce the light shielding amount of the light condensed by the elliptical mirror 2 as much as possible. In addition, in FIG. 5, although the reference lever 67 is connected by two L-shaped members at both ends (the other end is not shown), the reference lever 67 may be formed of a single L-shaped member, or It does not have to be L-shaped.

The clamp mechanism 52 is constituted by the power supply block 66 , the reference lever 67 and the drive lever 69 . The other end sides of the reference lever 67 and the drive lever 69 are each formed elongated as shown in FIG. 4(B) . In a state where the groove portion 66a of the power supply block 66 is pressed against the flat portions 28b and 28c of the terminal portion 28a of the cap portion 28, the roller 70 of the front end portion of the driving lever 69 is inserted into the concave portion 28d of the terminal portion 28a, and the The driving lever 69 rotates counterclockwise around the connecting pin P51 (fulcrum), that is, the terminal portion 28 a can be firmly sandwiched between the roller 70 and the power supply block 66 by the lever principle. In this state, since the power (current) of the cable 24 can be supplied to the base portion 28 through the power supply block 66 with a small resistance, the power loss can be reduced. In addition, when the cable 24 (power supply block 66 ) is removed from the base portion 28 (terminal portion 28 a ), the drive lever 69 may be rotated clockwise.

In FIG. 2(B), the terminal portion 28a of the cap portion 28 can reduce the resistance (contact resistance) between the terminal portion 28a of the cap portion 28 and the power supply block 66 by the V-shaped flat portions 28b and 28c, and can accommodate the clamping mechanism due to the provided The concave portion 28d of the roller 70 of 52 can be connected to the power supply block 66 stably. In addition, the roller 70 may not be provided at the front end of the driving lever 69, but the shape of the front end may be formed into an arc shape, and the arc part may be in close contact with the concave portion 28d.

Moreover, the shape of the terminal part 28a of the anode side cap part 28 is not limited to the shape of FIG. 2(B), and may be various shapes as shown in FIGS. In addition, FIG.3(A) shows the terminal part 28a of the cap part 28 of FIG.2(B) for abbreviation. In addition, in FIG.3(A)-(E), A1-E1 is a top view of a terminal part, respectively, A2-E2 is a side view of a terminal part, respectively. First, as shown in the base portion 28A of FIG. 3(B) , the terminal portion 28Aa may have a trapezoidal cross-sectional shape. In this case, the two plane portions 28Ab and 28Ac of the terminal portion 28Aa that are inclined symmetrically to each other contact the groove portion 66a of the power supply block 66 of the clamp mechanism 52 of FIG. The concave portion of the roller 70. The same below.) is close to the front end of the driving lever 69 of the clamp mechanism 52 (or the roller 70. The same is below).

Moreover, as shown in the base part 28B of FIG.3(C), the cross-sectional shape of the terminal part 28Ba may be a polygonal shape more than a quadrangle. In the example of FIG. 3(C) , the cross-sectional shape of the terminal portion 28Ba is substantially a regular pentagonal shape, and the two plane portions 28Bb and 28Bc of the terminal portion 28Ba that are inclined symmetrically to each other contact the groove portion 66a of the power supply block 66, and these two The front end portion of the drive lever 69 is in close contact with the back surface portion 28Bd.

Moreover, as shown in the base part 28C of FIG.3(D), the cross-sectional shape of the terminal part 28Ca may be a substantially regular hexagonal shape. In this case, the two plane portions 28Cb and 28Cc of the terminal portion 28Ca that are inclined symmetrically to each other contact the groove portion 66a of the power supply block 66 , and the opposite rear portion 28Cd abuts the front end of the drive lever 69 . In this case, in the central portion of the three surfaces 28Cf, 28Cg, and 28Ch arranged on the other side of the terminal portion 28Ca, there are provided pins 86a (refer to FIG. 9(B)) for inserting the pins 86a (see FIG. Small hole portions h1, h2, h3. Accordingly, the terminal portion 28Ca can also be used as the grasped portion.

Moreover, as shown in the base part 28D of FIG.3(E), the cross-sectional shape of the terminal part 28Da may be a substantially circular shape. In this case, the groove corresponding to the power supply block 66A has the shape of the side surface of a substantially cylindrical column. The groove portion 66a of the power supply block 66A is brought into contact with one half of the terminal portion 28Da, and the front end of the drive lever 69 is brought into close contact with a recess (not shown) provided on the other half of the terminal portion 28Da. As described above, the shape of the terminal portion 28a of the anode-side base portion 28 may be arbitrary.

In addition, in FIGS. 4(A) and (B) referred to below, for convenience of explanation, the shapes of the base portions 26 and 28 of the discharge lamp 1 are shown in a simplified manner. Next, FIG. 4(A) is a plan view showing the inside of the light box 31 and the housing 51 of the light source device 30 of FIG. 1 , and FIG. 4(B) is a side view of the light source device 30 of FIG. 4(A). 4(A), (B) and FIG. 6(A), (B) to which reference is made below, etc., the support member 33 and the pull-out portion that support the lamp box 31, the case 51, the discharge lamp 1, etc. are shown in cross-section 36 et al.

4(A) and (B), the lamp box 31 is divided into a lower case 31A that accommodates the discharge lamp 1, and an upper case 31B that accommodates the reflector 3 and is provided with a window member 4 on the side surface. An opening 31Ab for passing light from the discharge lamp 1 is provided on the adjacent surfaces of the casings 31A and 31B, and a side surface in the +X direction of the lower casing 31A is provided for passing the discharge lamp 1 and the like when the discharge lamp 1 is replaced. Opening portion 31Aa. The case 51 of the replacement device 50 is provided on the side surface of the lower case 31A in the +X direction, and the side surface of the case 51 facing the opening 31Aa is provided with an opening 51a for allowing the discharge lamp 1 and the like to pass therethrough.

A window portion 51b for carrying out and carrying the discharge lamp 1 is provided on the side surface in the +X direction of the housing 51 , and the window portion 51b is opened and closed by a door (hereinafter, referred to as a lamp replacement door) 45 . The casing 51 of the replacement device 50 and the lower case 31A are connected by a connecting member or the like not shown in order to avoid displacement of the positional relationship. A storage portion 54 for the discharge lamp 1 is provided near the window portion 51 b at the end in the +X direction in the case 51 , and a lamp conveying system 56 is arranged in the upper portion of the case 51 . In addition, although not shown in the figure, the case 51 is provided with an external air intake port and a filter for removing dust and the like from the captured external air.

In addition, a pair of guides 41 are provided parallel to the X direction so as to oppose the two side surfaces in the Y direction of the lower case 31A, and a pull-out portion 36 that can move in the X direction along the guides 41 is arranged. The central portion of the outlet portion 36 supports the discharge lamp 1 through the support member 33 . In addition, as the guide 41, for example, a telescopic (multi-stage) guide mechanism can be used. In addition, an elliptical mirror 2 having a circular opening 2 a (see FIG. 4(A) ) is provided in the pull-out portion 36 so as to surround the discharge lamp 1 , and the upper portion of the lower case 31A is covered and connected to the base of the discharge lamp 1 . In the form of the clamp mechanism 52 of the portion 28, a light shielding member 42 having a shape like the side surface of a truncated cone is arranged. An opening (not shown) for passing the discharge lamp 1 and the clamp mechanism 52 when the discharge lamp 1 is replaced is provided on the +X direction side surface of the light shielding member 42 .

Further, the replacement device 50 also has a pull-out portion in addition to the drive unit 34 for the cathode-side cap portion 26, the clamp mechanism 52 for the anode-side cap portion 28, the storage portion 54, and the lamp transport system 56. A pull-out drive unit 60 pulled out from the lower case 31A through the openings 31Aa, 51a to the chassis 51 side, and a drive unit 72 for clamping and releasing the cap 28 by the clamping mechanism 52 . As shown in FIG. 4(A) , the pull-out drive unit 60 has guides 61 arranged along the X direction on the bottom surface of the casing 51 on the −Y direction side rather than a line parallel to the X axis passing through the center of the lower case 31A. A base 62 capable of moving in the X direction along the guide 61, a drive unit 63 such as a ball screw system, a belt drive system, or a linear motor system that drives the base 62 in the X direction along the guide 61, and a connecting member 43. The connecting member 43 is connected to the front end portion 62a of the base 62 whose end portion in the −X direction protrudes in the +Y direction and the Z direction, and the protrusion provided at the center portion in the Y direction at the end portion in the +X direction of the pull-out portion 36 . The connected portion 36c.

By moving the base 62 in the +X direction along the guide 61 with the driving portion 63 of the pulling-out driving unit 60 , the pulling-out portion 36 in the lower case 31A can be moved (pulled out) to the discharge supported by the pulling-out portion 36 . The lamp 1 enters the position inside the housing 51 . In addition, since the pull-out portion 36 is supported by the guide 41 and the pull-out portion 36 can move smoothly in the X direction along the guide 41 , the load of the pull-out portion 36 hardly acts on the base 62 . Therefore, as the pull-out drive unit 60, instead of the mechanism using the guide 61, a mechanism for moving the pull-out portion 36 in the X direction only by, for example, an air cylinder or the like may be used.

In addition, the driving unit 72 for driving the clamping mechanism 52 of the base portion 28 of the discharge lamp 1 is fixed on the upper surface of the base 62 and inclined slightly (for example, about 15 degrees) in the clockwise direction with respect to the X-axis (hereinafter, A guide 73 arranged in the retraction direction D) of the clamp mechanism 52 (refer to FIG. 4(A) ), and a flat movable table mounted on the guide 73 so as to be movable in the retraction direction D through two sliders 74 75. A drive unit 77 such as an air cylinder or an electromagnetic cylinder that drives the movable table 75 in the retracting direction D relative to the base 62, and a support member 65 fixed to the upper surface of the movable table 75 and elongated in the Z direction. Further, the -X-direction end on the upper surface of the movable table 75 is fixed to the Z-direction elongated relay member 64 , the upper portion of the relay member 64 is connected to the other end of the cable 24 , and the Z-direction central portion of the relay member 64 is connected. The other end of the cable 23 connected to the support member 33 is connected through the opening provided in the pull-out portion 36 . The cables 23 and 24 are further connected to the power supply part 20 of FIG. 1 through a flexible extension cable (not shown).

FIG. 7(A) shows the detailed configuration of the clamp mechanism 52 and the drive unit 72 . In FIG. 7(A), the +X direction end of the reference lever 67 of the clamp mechanism 52 is able to move in the direction D1 (one axis direction) parallel to the retraction direction D of FIG. 4(A) through the short linear guide 71H. ) is supported on the upper end of the support member 65 in a micro-movement manner. Further, the driving unit 72 has a tension coil spring 68 whose one end is fixed to the bottom near the +X direction end of the reference lever 67 to pull the +X direction end of the driving lever 69 upward, and one end is fixed to the upper surface of the movable table 75. A drive unit 76 such as an air cylinder or an electromagnetic cylinder that displaces the +X direction end of the drive lever 69 downward (-Z direction). One end of the driving part 76 is connected to the movable table 75 through a rotatable joint 76a. The front end of the movable member of the driving portion 76 and the end of the driving lever 69 are connected through a rotatable joint 76b. For example, a so-called U-joint may be used for the joint 76a, and a so-called joint joint may be used for the joint 76b.

In the state shown in FIG. 7(A), since the driving portion 76 does not act on the end of the driving lever 69, the tension coil spring 68 acts on the driving lever 69 with a counterclockwise force relative to the reference lever 67. . Accordingly, the roller 70 provided at the end of the driving lever 69 in the -X direction urges the terminal portion 28a of the cap portion 28 toward the power supply block 66, so that the terminal portion 28a is stably held by the power supply block 66 and the roller 70. At this time, even if the distance between the movable table 75 and the discharge lamp 1 deviates from the target value, the deviation amount will be offset by the reference lever 67 moving in the movable direction D1 through the linear guide 71H. In addition, the linear guide 71H does not need to be provided as long as the entire movable table 75 can move in the X direction.

Next, when the clamping mechanism 52 is released from the clamping of the terminal portion 28a, as shown in FIG. 7(B), the end portion of the driving lever 69 is pulled downward by the driving portion 76, so that the roller 70 is moved to a lower position than the terminal. The position of the high part 28a. At this time, although the position of the end of the driving lever 69 is in the vicinity of the discharge lamp 1, the driving portion 76 is slightly rotated by the joint 76a, so that the stress that deforms the driving lever 69 does not act. In this state, the clamp mechanism 52 and the cable 24 can be separated from the cap portion 28 by moving the movable table 75 in the direction indicated by the arrow A2 in the retracting direction D by the driving portion 77 shown in FIG. 4(B) . .

In addition, the lamp conveying system 56 includes three claws 86 for grasping the grasped portion 28e of the anode-side base portion 28 of the discharge lamp 1 from above, a grasping claw opening and closing mechanism 85 for opening and closing these claw portions 86, and a grasping discharge A Z-axis drive mechanism 84 that moves the lamp 1 up and down (Z direction), a revolving shaft 83 that makes the Z-axis drive mechanism 84 revolve around an axis parallel to the Z-axis, and a support portion 82 that supports the revolving shaft 83 on the top of the housing 51 .

9(A) is a plan view showing a state in which the gripped portion 28e of the cap portion 28 is gripped by the three claws 86 , and FIG. 9(B) is a side view of FIG. 9(A). As shown in Fig. 9(A) , small pins 86a are provided on the surfaces of the three claw portions 86 facing the grasped portion 28e, respectively. When the discharge lamp 1 is held by the lamp conveying system 56, the pins 86a of the three claw portions 86 are positioned so that the holes h1, h2, h3 of the flat portions 28f, 28g, and 28h of the held portion 28e are opposed to each other. The gripping claw opening and closing mechanism 85 is held. In this state, as shown in FIG. 9(B) , the three pawls 86 are moved (closed) in the center direction by the grasping pawl opening and closing mechanism 85, and the three pins 86a are inserted into the corresponding holes h1, h2, h3, and further The three claw portions 86 are closed until the flat portions of the three claw portions 86 contact the corresponding flat portions 28f, 28g, and 28h. In addition, since the three claw portions 86 are connected to the grip claw opening and closing mechanism 85 through a spring mechanism (not shown) that can be displaced in the radial direction, respectively, stress that deforms the cap portion 28 does not act.

In FIGS. 4(A) and (B), the storage unit 54 includes a plurality of (6 in FIG. 4(A) ) on which used discharge lamps 1 and unused discharge lamps 1 (hereinafter, referred to as discharge lamps 1N) are loaded. The opening 79a (see FIG. 11 ) is provided as a concentric rotatable rotary disk 79 and a drive unit 80 for rotating the rotary disk 79 . The number of the openings 79a is the number of the discharge lamps 1, 1N that can be stored in the rotary disk 79, and the number of the discharge lamps 1, 1N that can be stored is arbitrary. The discharge lamp 1 or 1N is inserted into the front end portion of the cathode side base portion 26 of the discharge lamp 1 or 1N through these openings 79a, and the discharge lamp 1 or 1N is placed by its own weight through the flange portion 26a of the base portion 26 (see FIG. 1(A) ). on the rotating disk 79.

As shown in FIG. 11 , corresponding to the plurality of openings 79 a on the side surface of the rotary disk 79 , positioning members 87 each having a concave portion in the center and having a semicircular cross-section are provided. A leaf spring portion 88 that can be deformed in the radial direction of the rotary disk 79 is arranged on the convex portion of the concave portion of the member 87 . By rotating the rotary disk 79 around the rotation shaft 79b, and stopping the rotation of the rotary disk 79 when the positioning member 87 is engaged with the leaf spring portion 88 (elastic member), the opening 79a can be positioned correctly with the lamp conveying system 56. The position where the discharge lamp 1 or 1N is received and delivered between. In addition, although not shown, in order to be able to locate the direction of the lamp (around the Z axis), a pin or the like to be fitted into the holes 27A and 27B of FIG. 2(C) is provided in the vicinity of the opening 79a.

Hereinafter, in the light source device 30 of the present embodiment, an operation example when the discharge lamp 1 is replaced using the replacement device 50 will be described. The replacement action is controlled by the light source control system 32 . First, as shown in FIG. 4(A) , an operator (not shown) opens the lamp replacement door 45 of the housing 51 of the replacement device 50 , and inserts the cap portion 26 of the unused discharge lamp 1N into the turntable of the storage portion 54 . The opening 79a of 79 is attached to the rotary disk 79 (supplement of the discharge lamp) through the flange portion 26a of the base portion 26 of the discharge lamp 1N. The rotary disk 79 can be manually rotated when the power is turned off. As explained with reference to FIG. 11 , the rotary disk 79 can be rotated to make the predetermined positioning member 87 engage with the plate spring portion 88 , that is, it can be manually set and rotated correctly. The rotation angle of the disk 79. In addition, the lamp is provided so that the rotary disk 79 can be rotated electrically.

Further, the replenishment of the discharge lamp is preferably performed in a state where the power supply from the power supply unit 20 of FIG. 1 is stopped and the discharge lamp 1 in the lower casing 31A of FIG. 4(B) is turned off. However, it is also possible to take measures to prevent the light of the discharge lamp 1 from leaking to the outside in the lower case 31A, and to form the rotary disk 79 with an insulating material, so that the discharge lamp 1 can be lit in contact with the rotary disk 79 during the lighting of the discharge lamp 1. Light replacements are performed in between. For example, in FIG. 4(A), six discharge lamps 1 and 1N may be installed (supplemented) on the rotary table 79, and a space may be left on the rotary table 79 for recycling the used lamps. 4(A) and (B) show the state where the discharge lamp 1 is placed in the lamp box 31 , so five discharge lamps 1N are provided on the rotary disk 79 . After that, the lamp replacement door 45 is closed.

After that, the discharge lamp 1 can be replaced with the discharge lamp 1N at any time point (for example, when the plate P is replaced or when the apparatus is maintained). Alternatively, when the cumulative use time of the discharge lamp 1 reaches the allowable time, the light source control system 32 may send the information of the intention to the main control system 14, and the main control system 14 may stop the exposure operation of the exposure device EX. The light source control system 32 stops the power supply from the power supply unit 20 to the discharge lamp 1 and extinguishes the discharge lamp 1 , and then operates the replacement device 50 to replace the discharge lamp 1 with the discharge lamp 1N stored in the storage unit 54 .

That is, first, in FIG. 4(B) , the pull-out portion 36 that integrally supports the discharge lamp 1 and the elliptical mirror 2 in the lamp box 31 is pulled out and the drive unit 60 is pulled out to the +X direction as indicated by the arrow A1 the given position. As a result, the pull-out portion 36 is pulled out to the position shown in FIG. 6(B). At this time, together with the pull-out portion 36 , the clamp mechanism 52 , the relay member 64 , and the drive unit 72 are also pulled out integrally to the inside of the case 51 in the +X direction. Moreover, FIG.6(A) is a top view which shows the partial cross section of the pull-out part 36 and the replacement|exchange apparatus 50 of FIG.6(B). In addition, in FIG. 8, FIG. 10(B), etc. referred to below, in order to avoid the complexity of the drawing, illustration of a part of the plurality of discharge lamps 1N is omitted.

Next, as explained with reference to FIG. 7(B), the drive lever 69 of the clamp mechanism 52 is pulled downward by the drive portion 76 of the drive unit 72, so that the terminal of the base portion 28 of the discharge lamp 1 is forcefully pulled. The portion 28a is pressed against the roller 70 of the power supply block 66 and rotates about the connecting pin P51 (fulcrum), so that the roller 70 is separated from the terminal portion 28a and positioned higher than the terminal portion 28a. After that, the movable table 75 supporting the clamp mechanism 52 and the driving portion 76 is retracted in the retracting direction D in the direction indicated by the arrow A2 by the driving portion 77 (see FIG. 4(B) ). At this time, the roller 70 passes over the cap portion 28 .

After that, as shown in FIG. 8 , the lever 38 is rotated clockwise by the driving portion 40 of the driving unit 34 to release the clamp of the fixing portion 26h of the cathode side cap portion 26 . Accordingly, the base portion 26 can be pulled out from the support member 33 . In addition, in order to avoid the complexity of the drawing, in FIG. 10(B) and the like referred to below, the illustration of the drive unit 34 for the base portion 26 is omitted. In addition, the clamp release of the cathode side base part 26 may be performed before the clamp release of the anode side base part 28 .

Next, the revolving shaft 83 of the lamp conveying system 56 is revolved to move the grip claw opening and closing mechanism 85 above the base portion 28 of the discharge lamp 1 . And as indicated by the arrow A3, the Z-axis drive mechanism 84 of the lamp conveying system 56 lowers the gripping claw opening and closing mechanism 85, and the gripping claw opening and closing mechanism 85 grips the lamp mouth by closing the three claw portions 86 on the bottom surface. The grasped portion 28e of 28 (see FIG. 9(B) ). After that, as shown by arrow A5 in FIG. 10(B) , the claw portion 86 holding the discharge lamp 1 is raised by the Z-axis drive mechanism 84 . At this time, the discharge lamp 1 is raised to a position higher than the upper surface of the draw-out portion 36 (ie, higher than the upper surface of the elliptical mirror 2 ) at the lower end of the cathode side base portion 26 of the discharge lamp 1 .

After that, as shown by arrow A6 in FIG. 10(A) , the gripping claw opening and closing mechanism 85 holding the discharge lamp 1 is rotated about 180 degrees by the revolving shaft 83 to move the discharge lamp 1 above the rotary disk 79 . At this time, the rotary disk 79 is rotated by the drive part 80 of the storage part 54, and the empty opening 79a of the rotary disk 79 is moved below the grip claw opening and closing mechanism 85 (discharge lamp 1). In this state, the gripping claw opening and closing mechanism 85 is lowered to accommodate the front end of the base portion 26 of the discharge lamp 1 in the opening 79a, and then the claw portion 86 is released, and the used discharge lamp 1 is placed on the turntable. Location A7 at 79.

After that, the gripping claw opening and closing mechanism 85 of the lamp conveying system 56 is raised, the rotary disk 79 is rotated about 60 degrees as indicated by the arrow A8, and the unused discharge lamp 1N at the position A9 is moved below the gripping claw opening and closing mechanism 85 . After that, the grasping claw opening and closing mechanism 85 is lowered again, and the grasped portion 28e of the cap portion 28 of the unused discharge lamp 1N is grasped by the claw portion 86, and then the grasping claw opening and closing mechanism 85 is raised. And by the opposite action when the discharge lamp 1 is taken out, as indicated by the dotted arrow B1, the gripping claw opening and closing mechanism 85 is rotated about 180 degrees by the revolving shaft 83, as indicated by the dotted arrow B2 in FIG. 10(B) . Then, the holding claw opening and closing mechanism 85 for holding the discharge lamp 1N is lowered, and the cathode side base portion 26 of the discharge lamp 1N is placed on the support member 33 . Then, as shown by the broken line arrow B3 in FIG. 8 , the gripping claw opening and closing mechanism 85 is raised, and as shown in FIG.

Further, as shown in FIG. 7(B), the movable table 75 supporting the clamp mechanism 52 is moved in the direction indicated by the arrow B4 (the direction of approaching the discharge lamp 1N) along the retracting direction D by the driving part 77 of FIG. 8 . , so that the power supply block 66 is in contact with the terminal portion 28a of the base portion 28 of the discharge lamp 1N. After that, the movable part is pushed out by the driving part 76 (in the case of an air cylinder, the suction force is gradually weakened), and the lever 69 is driven to rotate around the connecting pin P51 by the force of the tension coil spring 68, and the roller 70 contacts the terminal part 28a to rotate The terminal portion 28 a is pressed against the power supply block 66 . As a result, the power supply to the anode side cap portion 28 can be performed without loss of power. In addition, the clamping of the base portion 26 on the cathode side may be performed after the clamping of the base portion 28 on the anode side.

At this time, since the cathode side base portion 26 of the discharge lamp 1N is fixed to the support member 33 by the drive unit 34 (see FIG. 6(B) ), it is assumed that the position of the power supply block 66 in the retracted direction D is fixed. If the position of the power supply block 66 relative to the anode side cap portion 28 is shifted, a large force is applied to the discharge lamp 1N, which may cause damage to the discharge lamp 1N. In order to prevent this from happening, in this embodiment, as shown in FIG. 7(A), the reference lever 67 on which the power supply block 66 is installed can be moved in the direction D1 (relative to the radial direction of the discharge lamp 1N) by the linear guide 71H, so The positioning error of the power supply block 66 can be corrected (absorbed). In addition, instead of the linear guide 71H, the movable table 75 may be movable in the direction D1.

In addition, the clamp mechanism 52 for the base portion 28 has low rigidity in the rotational direction and the revolving direction (the rotational direction about the axis parallel to the Z-axis) of the driving lever 69, and can be adjusted by the reference lever 67 and/or the driving lever 69. Deflection absorbs positioning errors in the rotational and convolutional directions. Furthermore, since the contact surface groove portion 66 a (see FIG. 5 ) of the power supply block 66 and the cap portion 28 is a V-shaped sectional shape that is fixed regardless of the position in the Z direction, even if there is a gap between the cap portion 28 and the power supply block 66 , the Positional shift in the Z direction is also not a problem.

As shown in FIG. 6(B) , when the clamping of the power supply block 66 of the clamping mechanism 52 is completed for the base portion 28 of the discharge lamp 1N, the driving unit 60 is pulled out, as shown by the dotted arrow in FIG. 4(B) . As shown in B5, by moving the base 62 in the -X direction, the pull-out portion 36 is returned to its original position in the lower case 31A. Accordingly, the used discharge lamp 1 is replaced with the unused discharge lamp 1N.

Next, an example of the manufacturing method of the discharge lamp 1 of this embodiment is demonstrated with reference to the flowchart of FIG. 32(B). First, in step 220 of FIG. 32(B) , as shown in FIG. 12 , the rod-shaped portion 25 b side of the glass tube 25 having the anode EL1 and the cathode EL2 (refer to FIG. 2(A) ) therein is manufactured (prepared) A metal rod-shaped base tube 226 (small base member) and a glass member (lamp body) provided with a metal rod-shaped base tube 228 (small base member) on the rod-shaped portion 25c side are provided. The cap tubes 228 and 226 are electrically connected to the anode EL1 and the cathode EL2, respectively. The cap tubes 228 and 226 are integrally fixed to the sealing portion of the glass tube 25 by welding or the like.

In the next step 222, the cathode-side base portion 26 and the anode-side base portion 28 are removed from the used discharge lamp 1 of FIG. 2(A). Moreover, the shapes of the base portions 26 and 28 of FIG. 12 are shown in a simplified manner compared with the base portions 26 and 28 of FIG. 2(A). In this case, for example, a small convex portion 228a for positioning is provided in the center of the end of the cap tube 228, and a plurality of screw holes 228b are provided around the convex portion 228a. Moreover, the hole part h4 which can accommodate the convex part 228a is formed in the center of the upper part of the inner surface of the cylindrical cap part 28, and a plurality of openings 28k for bolts are formed at positions corresponding to the screw holes 228b. In the upper part of the opening 28k, the recessed part (non-penetrating hole) which can accommodate the head of the bolt BA1 is formed.

In addition, a small-diameter fitting portion 226b is provided at the end portion 226a of the cap tube 226, and a plurality of screw holes 226c are formed on the end surface of the fitting portion 226b. In addition, a short cylindrical connecting portion 26p that can be fitted into the fitting portion 226b is provided on the upper portion of the flange portion 26a of the cap portion 26, and a bolt is formed on the bottom surface of the flange portion 26a at a position corresponding to the screw hole 226c A plurality of openings 26q are used. A concave portion that can accommodate the head of the bolt BA2 is formed at the end of the opening 26q.

Next, in step 224 , the base portion 28 is connected to the base tube 228 through a plurality of bolts BA1 , and the base portion 26 is connected to the base tube 226 through a plurality of bolts BA2 to complete the discharge lamp 1 . Moreover, in step 222, in order to remove the base parts 28 and 26 from the used discharge lamp 1, it is only necessary to loosen the bolts BA1 and BA2, respectively.

According to this method of manufacturing the discharge lamp 1, since the base portions 26 and 28 removed from the discharge lamp 1 after use can be reused, the number of manufacture of the base portions 26 and 28 having complicated shapes can be reduced and the discharge lamp 1 can be suppressed. the manufacturing cost. Furthermore, instead of reusing the base parts 26 and 28 (in other words, the base parts 26 and 28 are removed from the discharge lamp 1 after use), for example, at least one of the base parts 26 and 28 manufactured separately may be prepared. The discharge lamp 1 is configured by attaching this to the lamp body (the base tubes 226 and 228 ). Furthermore, when at least one of the base parts 26 and 28 is reused, instead of reusing the whole base parts 26 and 28, only at least a part of the base parts 26 and 28 (for example, the terminal parts 28a, 28, At least one of the grasped portion 28e and the heat dissipation portion 28i).

12, a space is provided between the side surface of the cap tube 228 and the inner surface of the cap portion 28, for example, through a flexible tube (tube, not shown) arranged in parallel with the cable 24 By injecting, for example, high-pressure air into the space, heat dissipation (lamp cooling) of the discharge lamp 1 being lit can be efficiently performed. In addition, in order to prevent the bolts from loosening when the cap tubes 228 and 226 are combined with the cap parts 28 and 26, the bolt locking and the injection of the heat-resistant adhesive can be used in combination.

In addition, the connection of the base tubes 228 and 226 and the base parts 28 and 26 may not be bolted, but the base tubes 228 and 226 may be integrally formed with the base parts 28 and 26 by welding or the like. In addition, in the example of FIG. 12, although both sides of the base part 26 and 28 are removable, for example, the base part 26 on the cathode side may be formed integrally with the base tube 226, for example. Furthermore, when the base portions 26 and 28 of the used discharge lamp 1 are no longer used, the cathode side base portion 26 and the anode side base portion 28 can be formed integrally with the base tubes 226 and 228, respectively.

As described above, the exposure apparatus EX of the present embodiment includes the light source device 30 . The light source device 30 includes a glass tube 25 (glass member) having an anode EL1 (first electrode) and a cathode EL2 (second electrode) for forming a light-emitting portion, and a glass tube 25 (glass member) provided in the light-emitting portion, respectively. A light source device that emits light from the discharge lamp 1 in the base portion 28 (first base member) and base portion 26 (second base member) on the anode EL1 side and the cathode EL2 side of 25 . In addition, the light source device 30 includes a storage portion 54 for storing the discharge lamp 1 , a support member 33 (support portion) that detachably supports the base portion 26 of the discharge lamp 1 , and a support member 33 (support portion) for supporting the discharge lamp 1 supported by the support member 33 . The cap portion 28 is connected to a clamp mechanism 52 (connecting portion) in which the power supply block 66 (member that transmits power) of the cable 24 is detachably connected, and the cap portion 26 is supported and used by the support member 33 A lamp conveying system 56 (conveying portion) that holds the cap portion 28 to convey the discharge lamp 1 between the storage portion 54 and the support member 33 in a state in which the connection of the clamp mechanism 52 to the power supply block 66 of the cap portion 28 is released. .

According to the light source device 30 of the present embodiment, since the clamp mechanism 52 is provided to detachably connect the power supply block 66 (the end of the cable 24 ) to the cap portion 28 of the discharge lamp 1 When the discharge lamp 1 is taken out from the support member 33, the power supply block 66 is removed from the cap portion 28 by the clamp mechanism 52, and when the unused discharge lamp 1 is attached to the support member 33, the power supply is supplied by the clamp mechanism 52. The block 66 is connected to the base portion 28, so that the discharge lamp 1 can be replaced efficiently.

Moreover, when the temperature of the used discharge lamp 1 is high, since the discharge lamp 1 can be replaced without waiting for the temperature of the discharge lamp 1 to drop, the lamp replacement time can be shortened. In addition, the clamp mechanism 52 of the light source device 30 and the lamp conveying system 56 (the replacement device 50) can be installed in a conventional light source device (a device that supports the cap portion on the cathode side of the discharge lamp by a predetermined support member with only a few modifications). ). By using the discharge lamp 1 of the present embodiment in the light source device thus modified, the discharge lamp can be replaced efficiently and automatically.

In addition, in the clamp mechanism 52 of the present embodiment, since the connecting pin P51 (fulcrum) is provided in the vicinity of the action point where the end portion (roller 70) of the driving lever 69 contacts the terminal portion 28a of the cap portion 28, the tension coil is provided. The position of the spring 68 and the position (point of force) at which the driving part 76 is pulled into the driving lever 69 are arranged outside the lamp box 31 (elliptical mirror 2 ), so that a large force for clamping the lamp mouth part 28 can be easily obtained using a large space . In addition, since the drive unit 72 of the clamp mechanism 52 is arranged outside the lamp box 31, the clamp mechanism 52 can be operated from a place away from the lamp box 31, so the clamp mechanism 52 and the drive unit 72 can be installed in conventional The light source device of knowledge.

Further, the discharge lamp 1 of the present embodiment includes a glass tube 25 (glass member) in which an anode EL1 and a cathode EL2 for forming a light-emitting portion are provided, and the glass tube 25 is provided on the anode EL1 side and The base part 28 and the base part 26 on the cathode EL2 side. The lamp socket portion 28 can be contacted with the power supply block 66 (the member that transmits power) connected with the cable 24, and has a flat surface portion that can be in surface contact with the power supply block 66 in order to reduce the contact resistance with the power supply block 66 The terminal parts 28a (connected parts) of 28b and 28c, and the grasped part 28e (held part) including the non-planar parts (hole parts h1, h2, h3) which can be held by the lamp transport system 56 (transportation part).

According to this discharge lamp 1, when used in the light source device 30 of the present embodiment, the power supply block 66 connected to the cable 24 can be easily grounded to the terminal portion 28a by the clamp mechanism 52 (connecting portion), and The lamp conveyance system 56 holds the gripped portion 28e and conveys the discharge lamp 1 efficiently. Moreover, since the non-planar part including the hole parts h1, h2, h3 into which the pin 86a of the claw part 86 is inserted is provided in the to-be-grip part 28e, for example, the discharge lamp 1 can be conveyed safely. In addition, instead of providing the non-planar portion, for example, an inclined portion whose cross-sectional area decreases as it goes downward may be provided on the grasped portion 28e. The discharge lamp 1 can also be safely conveyed by holding the inclined portion with the claw portion 86 .

Further, the exposure apparatus EX of the present embodiment includes the above-mentioned light source device 30 , an illumination optical system 13 (illumination system) for illuminating the mask M with light (exposure light IL) emitted from the discharge lamp 1 of the light source device 30 , and Under the irradiation of exposure light IL, the image of the pattern of the mask M is projected on the projection optical system PL of the plate P (substrate). According to the exposure apparatus EX, since the replacement time of the discharge lamp 1 can be shortened, the productivity of the exposure process can be improved.

Further, the replacement method of the discharge lamp of the present embodiment, as shown in the flowchart of FIG. 32(A), includes making the surface contact the terminal portion 28a ( Step 202 in which the power supply block 66 to which the cable 24 is connected is detached from the terminal portion 28a, the cathode side base portion 26 of the discharge lamp 1 can be detached from the support member 33 by the drive unit 34 (the base portion is released) 26) of step 204, and the holding part 28e (holding part) including the non-planar part of the base part 28 of the discharge lamp 1 is held by the lamp conveying system 56 to convey the discharge lamp 1 to the storage part 54. Step 206.

According to this replacement method, the discharge lamp 1 can be carried out efficiently. In addition, this replacement method includes transferring the discharge lamp 1N to the cap portion 26 of the discharge lamp 1N by the held portion 28e of the cap portion 28 of the unused discharge lamp 1N held in the storage portion 54 by the lamp conveying system 56. Step 208 of the position supported by the supporting member 33 , Step 210 of clamping the base portion 26 of the discharge lamp 210 to the supporting member 33 by the drive unit 34 , and the clamping mechanism 52 to connect the cable 24 . Step 212 of surface-contacting the power supply block 66 (using the power supply block 66 to clamp the base portion 28 ) to the terminal portion 28 a of the base portion 28 of the discharge lamp 1N. Accordingly, it is possible to efficiently install the unused discharge lamp 1N on the support member 33 .

In addition, the lighting method of the discharge lamp 1 of the present embodiment includes the step 212 of bringing the power supply block 66 connected with the cable 24 into surface contact with the terminal part 28a (connected part) of the anode side base part 28 of the discharge lamp 1N , Step 210 of supporting the base 26 of the discharge lamp 1N by the supporting member 33 capable of supplying electric power, and step 214 of supplying electric power to the discharge lamp 1N through the cable 24 and the supporting member 33 to turn on the discharge lamp 1N. According to this lighting method, since the terminal portion 28a is in surface contact with the power supply block 66, the discharge lamp 1 can be lighted with a small power loss. After that, in step 214, light from the discharge lamp 1 is used for exposure by the exposure apparatus EX.

In addition, the above-described embodiment can be modified as follows. First of all, although the above-described embodiment uses the cable 24 to supply power to the power supply block 66, the method of supplying power to the power supply block 66 (discharge lamp 1) may not use the cable 24, but the reference lever 67 and the power supply block 66 (conducted ) to proceed. In addition, the power supply block 66 may be configured to supply not only electric power but also compressed air for cooling the base portion 28 to the discharge lamp 1 .

Furthermore, as shown in FIG. 7(A), the clamp mechanism 52 of the power supply block 66 of the above-described embodiment is provided with a reference lever 67 to prevent the force from the clamp mechanism drive unit 72 from acting on the discharge lamp 1. A linear guide 71H that is slightly moved in the radial direction D1 of 1. On the other hand, as shown in the clamp mechanism 52A of the modified example of FIG. 13(A) and (B), the front end portion of the reference lever 67 may also be fixed to extend in the Z direction parallel to the power supply block 66, and the lower end portion has The L-shaped guide 71S that can support the protrusion of the power supply block 66 is provided between the guide 71S and the power supply block 66 so that the power supply block 66 can be slightly moved in the Z direction relative to the guide 71S as indicated by the arrow A10. Linear lead 71V.

According to the clamping mechanism 52A of this modification, for example, when the discharge lamp 1 is thermally expanded during use of the discharge lamp 1, the base portion 28 of the discharge lamp 1 can be integrated with the power supply block 66 through the linear guide 71V opposite to the guide 71S. Since it is displaced in the +Z direction, the stress acting on the discharge lamp 1 can be reduced. Therefore, the output of the light beam supplied from the light source device 30 can be more stabilized.

In addition, in order to ensure the contact between the terminal portion 28a of the base portion 28 of the discharge lamp 1 and the power supply block 66 to reduce the contact resistance, for example, the surface ( Contact surface) is provided with a plurality of concave and convex patterns (so-called contacts). According to this, even if the surface of the V-shaped groove portion 66 a is worn by the repeated replacement of the discharge lamp 1 by the so-called contact follow, the connection between the base portion 28 and the power supply block 66 can be reliably carried out continuously. electrical contact.

7(A), although the clamp mechanism drive unit 72 is configured to open and close the reference lever 67 and the drive lever 69 of the clamp mechanism 52 up and down (Z direction), the the vertical direction of the long side) to open and close. With this configuration, the clamp mechanism 52 does not need to retract the roller 70 at the front end of the drive lever 69 to a position higher than the cap portion 28 when the clamp mechanism 52 is moved in the X direction by the drive portion 77 . That is, only the opening and closing operation of the clamp mechanism 52 is performed, and there is no constituent member of the clamp mechanism 52 above the discharge lamp 1, so that the discharge lamp 1 can be conveyed in the Z direction.

Furthermore, in the above-described embodiment and its modifications, the drive unit 34 of the cathode side base portion 26 of the discharge lamp 1 and the clamp mechanism drive unit 72 of the clamp mechanism 52A of the base portion 28 shown in FIG. 13(B) , each with independent drive units. On the other hand, as in the modification shown in FIG. 14(A), the drive unit may be shared. In FIG. 14(A) , one end of the wire 89D is fixed to the front end of the driving lever 69 of the clamp mechanism 52A in the +X direction instead of the driving section 76 , and the other end of the wire 89D is supported through the lower part of the support member 65 The pulley 89C, which is rotatable about an axis parallel to the Y axis, extends in the +X direction. The other end of the wire rope 89D is fixed to the front end of the movable rod 89A of the linear actuator 76 through a cylindrical mounting member 89B. The linear actuator 76 is fixed on the base 62 and can drive the movable rod 89A in the X direction along the guide 61 of the base 62 (refer to FIG. 4(B) ).

The movable table 75A of the fixed support member 65 is placed on the guide 73 so as to be movable in the X direction through the slider 74 . A long hole 75Aa long in the X direction is provided at the +X direction end of the movable table 75A, and a part of the mounting member 89B is inserted into the long hole 75Aa. Moreover, the rod 89G extended in the -X direction, the cantilever support equipped with the roller 89F at the front-end|tip of the -X direction is attached to the -X direction end part of the movable table 75A. Moreover, the movable table 75A is biased in the −X direction from the end portion in the −X direction of the base 62 by the tension coil spring 89E, and the movable table 75A is pressed from the −X direction at the position shown in FIG. 14(A) . stop at the stopper (not shown). The tension of the tension coil spring 89E is set to be larger than that of the tension coil spring 68 for driving the drive lever 69 of the clamp mechanism 52A.

Further, one end portion 38Aa of the U-shaped lever 38A is in contact with the fixing portion 26h of the cathode side cap portion 26 of the discharge lamp 1, and this end portion 38Aa is energized by the tension coil spring 39 whose one end is fixed in the support member 33. toward the fixed portion 26h side. The clamp mechanism 34A of the cap portion 26 is constituted by the lever 38A and the tension coil spring 39 . In a state where the discharge lamp 1 is fixed to the support member 33, the roller 89F at the front end of the rod 89G is located between the end 38Aa and the other end 38Ab of the lever 38A. The wire rope 89D, the pulley 89C, the linear actuator 76L, the movable table 75A, the tension coil spring 89E, the rod 89A, etc., constitute the driving unit 72A for driving the clamp mechanisms 52A and 34A.

Next, the operation of the drive unit 72A will be described. FIG. 14(A), as shown in FIG. 6(B) , shows a state in which the support member 33 supporting the discharge lamp 1 is pulled out of the lamp box 31 by the pull-out drive unit 60 . In this state, the mounting member 89B at the front end of the movable rod 89A of the linear actuator 76L is located in the vicinity of the -X direction end of the movable range in the long hole 75Aa. Next, when the movable rod 89A of the linear actuator 76L is driven in the +X direction, the wire rope 89D is pulled downward through the pulley 89C, as shown in FIG. 14(B), the +X direction end of the driving lever 69 of the clamp mechanism 52A The lower part is lowered, and the clamping of the lamp socket part 28 by the power supply block 66 and the roller 70 is released.

When the movable rod 89A of the linear actuator 76L is further driven in the +X direction, the mounting member 89B at the front end of the movable rod 89A contacts the inner surface on the +X direction side of the elongated hole 75Aa, and the wire 89D is not stretched, but is instead attached. The member 89B moves in the +X direction while continuously pulling the movable table 75A. As a result, the entire clamp mechanism 52A and the support member 65 located on the movable table 75A move in the +X direction, and the clamp mechanism 52A is retracted from above the discharge lamp 1 . In addition, during the retreat of the movable table 75A in the +X direction, or at the end of the retreat, as shown in FIG. 15 , the roller 89F attached to the front end of the rod 89G of the movable table 75A contacts the other end of the lever 38A of the cathode side clamp mechanism 34A. The lever 38A is rotated by the portion 38Ab, and the clamping of the support member 33 of the cathode side base portion 26 is released.

After that, as shown in FIG. 10(B) , the discharge lamp 1 is replaced by the lamp transport system 56 . After the discharge lamp 1 is replaced, the cathode side base portion 26 is clamped by an action opposite to the above-mentioned action, and the power supply block 66 of the clamp mechanism 52A contacts the base portion of the discharge lamp 1 due to the movement of the movable table 75A in the -X direction. 28. Next, the end of the driving lever 69 is raised to clamp the cap portion 28 with the roller 70 and the power supply block 66 again.

By using the drive unit 72A as described above, the release and retraction of the clamp mechanism 52A, the release of the clamp mechanism 34A, and the reverse operation can be performed by one linear actuator 76L (driving part). action. That is, since three operations are controlled by one actuator, the manufacturing cost can be reduced. Of course, the number of actuators can be, for example, two.

In the above description, since the force for pulling the driving lever 69 of the clamp mechanism 52A is set to be weaker than the force for sliding the movable table 75A in the +X direction, the movable table 75A does not move in the +X direction until the pulling of the driving lever 69 is completed. . However, any mechanism may be used as long as the above-mentioned series of operations can be completed.

[Second Embodiment] Next, the second embodiment will be described with reference to FIGS. 16 to 18 . The light source device of the present embodiment is also used to supply illumination light for exposure to the illumination optical system 13 of the exposure device EX of FIG. 1 . In the above-described first embodiment, the drive unit 72 of the clamp mechanism for driving the anode side cap portion 28 of the discharge lamp 1 is supported by the movable table 75 that pulls out the drive unit 60, but in this embodiment, it is Set the drive unit in the light box. In addition, in FIGS. 16-18, the part corresponding to FIG.4(A), (B) is given the same code|symbol, and the detailed description is abbreviate|omitted.

FIG. 16 shows a light source device 30A of this embodiment. The light source device 30A includes a clamp mechanism 52B that clamps the anode-side base portion 28 of the discharge lamp 1 , a drive unit 72B that drives the clamp mechanism 52B, a storage portion 54 of the discharge lamp 1 and a lamp transport system 56A. In FIG. 16, a flat base member 75B is fixed to the end in the -X direction of the lower casing 31A of the lamp box 31 through a support base 75C, and a square end of the drive lever 69 is supported on the upper surface of the base member 75B through the drive portion 76. One end of the reference lever 67A is supported on the upper surface of the support table 75C through the support member 65, the power supply block 66 is fixed to the front end of the other end of the reference lever 67A, and the roller 70 is mounted on the front end of the other end of the driving lever 69. A tension coil spring 68 that pulls up the end of the drive lever 69 in the -X direction is installed between the bottom of the upper case 31B and the drive lever 69 . Further, between the upper surface of the support member 65 and the end of the reference lever 67A in the -X direction, a linear guide 71H (not shown in FIG. 16 . See FIG. 7(A)).

In the present embodiment, the discharge lamp 1 is supported by the support member 33 at an angle of 180 degrees with respect to the case of FIG. 2(A). The power supply block 66 contacts the flat surfaces 28b and 28c (see FIG. 2(B) ) on the −X direction side of the terminal portion 28a of the anode-side base portion 28 of the discharge lamp 1 , and releases the force of the driving portion 76 , thereby driving the lever. 69 is rotated clockwise by the force of the tension coil spring 68, so that the roller 70 at the front end of the driving lever 69 urges the back of the terminal part 28a in the -X direction, so as to clamp the terminal part 28a between the power supply block 66 and the roller. between 70. The reference lever 67A, the drive lever 69 and the roller 70 constitute the clamp mechanism 52B, and the drive unit 72B for the clamp mechanism 52B is constituted by the drive portion 76 , the support member 65 and the tension coil spring 68 .

In addition, the relay member 64A is fixed on the upper surface of the base member 75B, the other end of the cable 24 connected to the power supply block 66 is connected to the upper part of the relay member 64A, and the other end is connected to the support member 33, which is flexible and has a sufficient length. The other end of the cable (not shown) is connected to the lower part of the relay member 64A, and the cable 24 and the like are connected to a power source (not shown) through an extension cable (not shown). Further, the light shielding member 42A located above the discharge lamp 1 in the lower case 31A is provided with an opening (not shown) at the end portion in the +X direction for passing the discharge lamp 1, and at the end portion in the −X direction is provided with a clip for arranging The opening of the clamp mechanism 52B (not shown). Moreover, since the driving unit 34 (refer to FIG. 4(B) ) that clamps the cathode side base portion 26 of the discharge lamp 1 to the supporting member 33 is the same as that of the first embodiment, the driving unit is omitted in FIG. 16 and the like. 34 icon.

Further, in the housing 51 of the replacement device 50A, a guide 61, a base 62A, a connecting member 43 connecting the front end portion 62Aa of the base 62A protruding in the Z direction and the pull-out portion 36, and a drive portion are provided. 63 of the pull-out drive unit 60A. Further, in the case 51, there is provided an elongated support member 90A provided on the bottom surface, an X-axis guide member 90B fixed on the upper end of the support member 90A and elongated in the X direction, and the X-axis guide member 90B is supported to be movable in the X direction. The X-axis driving mechanism 90X, the Z-axis driving mechanism 84 supported by the X-axis driving mechanism 90X, the gripping claw opening and closing mechanism 85 provided at the lower end of the Z-axis driving mechanism 84, and the plurality of claws 86 provided on the gripping claw opening and closing mechanism 85 The lamp transport system 56A. A storage portion 54 of the discharge lamp 1 is also provided in the housing 51 . The replacement device 50A is constituted including the pull-out drive unit 60A, the lamp transport system 56A, and the storage unit 54 . Other than that, the structure is the same as that of the light source device of FIG. 4(B).

In the present embodiment, when the discharge lamp 1 is replaced, first, as shown in FIG. 17 , the end portion of the driving lever 69 of the clamp mechanism 52B is pulled down by the driving portion 76 of the driving unit 72B in the direction indicated by the arrow A21, so that the The roller 70 of the front end portion of the drive lever 69 is separated from the anode side cap portion 28 . After that, the pull-out drive unit 60A pulls out the pull-out portion 36 in the +X direction to a predetermined position in the casing 51 . Next, as indicated by the arrow A23, the gripping claw opening and closing mechanism 85 and the claw portion 86 of the lamp transport system 56A are lowered in the −Z direction to grip the anode-side base portion 28, and the clamp of the cathode-side base portion 26 is driven by the driving unit ( not shown) release. Moreover, you may release the clamp of the base part 26 before the nail|claw part 86 holds the base part 28. After that, as indicated by arrow A24, the gripping claw opening and closing mechanism 85 is raised, and the cathode side base portion 26 of the discharge lamp 1 is moved to a position higher than the elliptical mirror 2. As shown in FIG.

Thereafter, the X-axis drive mechanism 90X moves in the +X direction along the X-axis guide 90B, as indicated by arrow A25 , to move the grip claw opening and closing mechanism 85 to the position A27 above the rotary disk 79 of the storage portion 54 . Next, as indicated by arrow A26, the gripping claw opening and closing mechanism 85 is lowered, and the discharge lamp 1 is placed on the empty opening of the rotary disk 79. As shown in FIG. Next, the gripping claw opening and closing mechanism 85 is temporarily raised, and after the rotary disk 79 is rotated to move the unused discharge lamp 1N below the gripping claw opening and closing mechanism 85, the gripping claw opening and closing mechanism 85 is lowered again, and the unused discharge lamp 1N is raised and raised. .

After that, the discharge lamp 1N is set on the support member 33 by the reverse operation when the discharge lamp 1 is taken out, and the pull-out portion 36 is returned to the lower case 31A by pulling out the drive unit 60A. As shown in FIG. 16 , the driving unit 72B drives the clamping mechanism 52B to clamp the anode-side base 28 of the discharge lamp 1N, ie, the replacement of the discharge lamp 1 is completed.

According to the present embodiment, since the driving unit 72B of the clamp mechanism 52B of the anode side cap portion 28 does not have a sliding mechanism, the overall structure of the light source device 30A can be simplified, and the manufacturing cost can be reduced. In addition, since the cable 24 connected to the power supply block 66 for supplying power to the anode side cap portion 28 is not pulled out, the structure of the part driven by the pull-out drive unit 60A can be simplified.

In addition, the lamp conveying system 56A of the present embodiment uses the X-axis driving mechanism 90X and the Z-axis driving mechanism 84 to drive the gripping claw opening and closing mechanism 85 in a linear motion, so even if the discharge lamps 1 and 1N are close to the rotary disk 79, they are arranged along the circumference. , the positioning between the grip claw opening and closing mechanism 85 and the rotary disk 79 can also be easily performed.

The present embodiment can be modified as follows. First, instead of the lamp conveying system 56A of the present embodiment, the lamp conveying system 56 of the first embodiment, a multi-axis robot arm, or the like can be used. Moreover, as shown in the light source device 30B of the modification of FIG. 18, instead of the lamp conveyance system 56A, a convoluted lamp conveyance system 56B may be provided.

In FIG. 18, the lamp conveying system 56B includes an elongated support member 90C provided on the inner bottom surface of the housing 51, a revolving drive portion 90D fixed to the upper end of the support member 90C, and a revolving drive portion 90D revolving around an axis parallel to the Z axis. Part 90E, Z-axis drive mechanisms 84A, 84B fixed at both ends of the revolving part 90E that can move in the Z direction, gripping claw opening and closing mechanisms 85A, 85B provided at the lower ends of the Z-axis drive mechanisms 84A, 84B, and The opening and closing mechanisms 85A, 85B open and close the plurality of claws 86A, 86B. When the discharge lamp 1 is conveyed by the lamp conveying system 56B, for example, the holding claw opening and closing mechanism 85A on one side is used to grasp the lamp mouth 28 of the used discharge lamp 1 through the claw portion 86A, and the holding claw opening and closing mechanism 85B on the other side is used. The cap portion 28 of the unused discharge lamp 1N of the rotary disk 79 is grasped through the claw portion 86B.

Next, after the discharge lamps 1 and 1N are raised by the Z-axis driving mechanisms 84A and 84B, and the winding portion 90E is rotated 180 degrees by the winding driving portion 90D, the discharge lamps 1 and 1N are lowered by the Z-axis driving mechanisms 84A and 84B. That is, the discharge lamps 1 and 1N can be exchanged at high speed between the support member 33 and the rotary disk 79 . In the present embodiment, there is no clamping mechanism 52B diagonally above the discharge lamp 1 supported by the support member 33 in the housing 51. Therefore, when the claw portion 86A (or the grasping claw) of the grasping claw opening and closing mechanism 85A is rotated by the rotation of the winding portion 90E. Even if the claw portion 86B of the opening and closing mechanism 85B rotates in either the clockwise or counterclockwise direction, there is no possibility of contact with the clamp mechanism 52B.

[Third Embodiment] Hereinafter, the third embodiment will be described with reference to FIGS. 19(A) to 25(B). The light source device of the present embodiment is also used to supply illumination light for exposure to the illumination optical system 13 of the exposure device EX of FIG. 1 . The discharge lamp of this embodiment is different from the above-mentioned embodiment in the shape of the base portion on the anode side and the configuration of the clamping mechanism of the base portion. 19 (A) to FIG. 25 (B) and FIG. 2 (A) and FIG. 4 (A), (B) and FIG. 16 are assigned the same reference numerals and their detailed descriptions are omitted.

FIG. 19(A) shows the discharge lamp 1A of this embodiment. In FIG. 19(A), the discharge lamp 1A includes a glass tube 25A consisting of a bulb portion 25Aa and two cylindrical rod-shaped portions 25Ab and 25Ac fixed to sandwich the bulb portion 25Aa, and connected to one of them. The cathode side base part 126 at the end of the rod-shaped part 25Ab, and the anode-side base part 128 connected to the end part of the other rod-shaped part 25Ac. The base portions 128 and 126 are respectively electrically connected to the anode and the cathode (not shown) in the bulb portion 25Aa. The base portions 126 and 128 are made of metal having good electrical conductivity and thermal conductivity.

Further, in the cathode side cap portion 126, from the rod-shaped portion 25Ab to the open end side, a cylindrical connecting portion 126k having a diameter larger than that of the rod-shaped portion 25Ab and having an outer diameter equal to that of the rod-shaped portion 25Ab are sequentially formed. Ring-shaped flange portion 126a approximately twice as large, cylindrical shaft portion 126b having an outer diameter slightly larger than rod-shaped portion 25Ab, cylindrical small-diameter portion 126f having an outer diameter smaller than shaft portion 126b, and outer diameter slightly larger than shaft portion 126b A cylindrical fixing portion 126h, a chamfered portion 126i, and a small diameter portion 126f having a small diameter or a small front end portion 126j having an outer shape substantially the same as that of the shaft portion 126b. When the discharge lamp 1A is mounted on the support member 33 of FIG. 20(B) described later, the flange portion 126 a abuts on the step portion surrounding the opening in the center of the support member 33 . Moreover, the fixed part 126h can be clamped by the support member 33 of FIG. 20(B) by the drive unit 34 of FIG. 4(B). In addition, the illustration of the drive unit 34 is abbreviate|omitted in FIG.20(B).

Further, the anode-side base portion 128 includes a cylindrical connecting portion 128k whose outer diameter is slightly larger than the diameter of the rod-shaped portion 25Ac from the rod-shaped portion 25Ac side of the glass tube 25A of the discharge lamp 1A to the open end side in this order, A cylindrical intermediate portion 128m having an outer diameter substantially the same as that of the rod-shaped portion 25Ac, a heat dissipation portion 128i having a plurality of annular belt-shaped heat dissipation fins 128j formed thereon, and a terminal portion 128a. The terminal portion 128a has a conical side-shaped convex connecting portion 128b with a decreasing diameter, a cylindrical shaft portion 128c with a smaller diameter than the connecting portion 128k, a concave portion e1 with a decreasing diameter and a larger diameter, and a shaft portion in sequence toward the front end portion. 128c has a cylindrical front end portion 128d having substantially the same diameter, and a chamfered portion e2.

As shown in FIG. 19(B), in this embodiment, in order to detachably connect the cable 24 to the anode side cap portion 128, a member composed of a combination of a plurality of cylindrical members (hereinafter, referred to as a power supply socket) is used. ) 152. In FIG. 19(B) , the power supply socket 152 has a belt-shaped connecting portion 153 having a concave contact surface 153 a having the same shape as that of the connecting portion 128 b of the base portion 128 , and a cylindrical outer cylinder fixed to the upper portion of the connecting portion 153 . part 154, a step part 155a abutting on the flange part 154a at the front end of the outer cylinder part 154 and a push button switch part 155 having a cylindrical lower end arranged between the connection part 153 and the outer cylinder part 154; The compression coil spring 156 between the part 153 and the push button switch part 155 . The connection part 153, the outer cylinder part 154, and the inner cylinder part 155 are made of metal with good electrical conductivity and thermal conductivity.

The connecting portion 153 is fixed to the bottom surface of the outer cylindrical portion 154 with bolts (not shown), for example, a recess 154b is formed on the outer surface of the outer cylindrical portion 154 , and the end portion of the cable 24 is connected to the outer surface of the outer cylindrical portion 154 . Further, the connecting portion 153 has an inner surface 153b which is loosely fitted to the shaft portion 128c of the cap portion 128 and the front end portion 128d, and a plurality of openings h4 on which the balls (ball bearings) 157 are arranged respectively (see FIG. 24 ). ) of the fastener portion 153c. The concave portion at the lower end of the push button switch portion 155 is formed with a tapered portion 155b for releasing the ball 157 to the outside.

In the state shown in FIG. 19(B), the plurality of balls 157 held by the fastener portion 153c of the connecting portion 153 are accommodated in the recess e1 of the terminal portion 128a, and the compression coil spring 156 acts from the push button switch portion 155 to the connecting portion 153. The contact surface 153a of the connection part 153 is press-contacted to the connection part 128b of the terminal part 128a by a side biasing. At this time, the electric power (current) supplied to the cable 24 is supplied to the base portion 128 with a small resistance (contact resistance) through the outer cylinder portion 154 and the connecting portion 153 .

In addition, in the power supply socket 152 shown in FIG. 19(B), for example, a vent hole 154c is formed in the outer cylindrical portion 154, and the cooled electrical outlet can be cooled from the outside through an air duct (not shown) provided in the cable 24. Air is supplied to the vent hole 154c. This air is supplied to the space between the connection part 153 and the outer cylinder part 154, and the cap part 128 can be cooled efficiently. Also, the mechanism for supplying the cooled air can be omitted, and in this case, it is not necessary to provide the ventilation hole 154c. The mechanism for removing the power supply socket 152 from the base portion 128 and attaching the power supply socket 152 to the base portion 128 will be described later.

FIG. 20(A) is a partially cutaway top view showing the light source device 30C of the present embodiment, and FIG. 20(B) is a partially cutaway side view of FIG. 20(A). In FIG. 20(B), the support member 33 of the pull-out portion 36 fixed in the lower case 31A is provided with the flange portion 126a of the cathode side base portion 126 of the discharge lamp 1A, and the fixed portion 126h is driven by the driving unit 34 ( Referring to FIG. 4(B) , it is clamped by the supported member 33 . Further, a relay member 64 is fixed to the upper surface of the end portion in the +X direction of the pull-out portion 36 , one end of the cable 24 is connected to the front end of the relay member 64 , and the other end of the cable 24 is connected to the discharge lamp 1A through the power supply socket 152 The anode side cap portion 128 . In addition, the cable (not shown) connected to the support member 33 is also connected to the relay member 64 .

In addition, a pull-out drive unit 60A for pulling out the pull-out portion 36 toward the case 51 side, a storage portion 54 for storing the discharge lamp 1A and the unused discharge lamp 1A (hereinafter, referred to as discharge lamp 1AN) are provided in the casing 51, The lamp conveying system 56C and the mechanism for attaching and detaching the power supply socket 152 to the base portion 128 of the discharge lamp 1A (hereinafter, referred to as a drive unit for power supply socket replacement) 72C. The replacement device 50C of the light source device 30C is composed of the pull-out drive unit 60A, the storage unit 54 , the lamp conveyance system 56C, and the drive unit 72C. As shown in FIGS. 20(A) and (B) , the lamp conveying system 56C has an elongated support member 90A provided on the bottom surface with respect to the guide 61 on the −Y direction side, and an X long in the X direction fixed to the upper end of the support member 90A. The shaft guide 90B, the X-axis drive mechanism 90X supported by the X-axis guide 90B so as to be movable in the X direction, the Z-axis drive mechanism 84B supported by the X-axis drive mechanism 90X, and the lower end of the Z-axis drive mechanism 84B is gripped The grip portion 162 of the anode-side base portion 128 of the discharge lamp 1A.

In addition, the drive unit 72C for replacing the power supply socket has an elongated support member 90F provided on the +Y direction side with respect to the guide 61 on the bottom surface, and is connected to the support so as to be able to rotate within a range of approximately 30 degrees around an axis parallel to the Z axis. The winding portion 90G at the upper end of the member 90F, the Z-axis driving mechanism 84A provided in the receiving portion 90R at the front end of the winding portion 90G, and the base portion 128 of the discharge lamp 1A provided at the lower end of the Z-axis driving mechanism 84A for supplying the power supply socket 152 to the discharge lamp 1A. The attachment and detachment member (hereinafter, referred to as the grip) 160 .

In the present embodiment, when the discharge lamp 1A is replaced, the pull-out drive unit 60A pulls out the pull-out portion 36 supporting the discharge lamp 1A to the housing 51 as shown by arrow A31 in FIG. within a given location. Next, the handle portion 160 of the drive unit 72C that was originally standing by over the drawn discharge lamp 1A is lowered, and the power supply socket 152 is removed from the base portion 128 of the discharge lamp 1A, and only the power supply socket 152 is lifted.

Next, as indicated by arrow A38 in FIG. 25(A) , the winding portion 90G is wound around 30 degrees so that the grip portion 160 holding the power supply socket 152 is withdrawn from above the discharge lamp 1A. Then, in the lamp conveyance system 56C, the X-axis drive mechanism 90X is moved to the upper direction of the discharge lamp 1A as shown by arrow A36. Next, as shown in FIG. 25(B) , the grip portion 162 is lowered to the base portion 128 of the discharge lamp 1A by the Z-axis drive mechanism 84B, and the grip portion 162 holds, for example, the front end portion 128d of the base portion 128 (see FIG. 19(A)). After that, as indicated by arrow A37, after the discharge lamp 1A is raised away from the elliptical mirror 2, the discharge lamp 1A is placed in the storage part 54 using the lamp transport system 56C as in the example of FIG. The discharge lamp 1AN is placed on the support member 33 . Afterwards, the power supply socket 152 is installed on the base portion 128 of the discharge lamp 1AN by the driving unit 72C, and the pull-out portion 36 is returned to the lower casing 31A by pulling out the driving unit 60A, thus completing the replacement of the discharge lamp 1A.

Next, the configuration and the like of the grip portion 160 of the drive unit 72C of FIG. 21 according to the present embodiment will be described with reference to FIGS. 22(A) to 24 . As shown in FIG. 22(A) , the gripping portion 160 fixed to the lower end of the Z-axis drive mechanism 84A of the drive unit 72C has a grip portion 160 fixed to the Z-axis drive mechanism 84A and arranged at approximately equal angular intervals around an axis parallel to the Z-axis The first link portion 164 of the three arm portions 164a, 164b, 164c (164c is not shown) is fixed to the central bottom surface of the first link portion 164 to form three openings 166a at the center at equal angular intervals and can be driven in the center. The piston part 165 in the Z direction and the three substantially T-shaped second link parts 167A, 167B, and 167C (167C not shown) whose one end is provided in the opening 166a, respectively. Further, the grip portion 160 has three arms 164a, 164b, 164c connected to the three arm portions 164a, 164b, 164c through a rotatable fulcrum E1, etc., and three second link portions 167A, 167B, 167C through a rotatable fulcrum E4, etc. Each arm portion 169A, 169B, 169C (169C is not shown), and connected to the three arm portions 164a, 164b, 164c through a rotatable fulcrum E2, etc., and connected to the three second links through a rotatable fulcrum E3, etc. The three third link portions 168A, 168B, and 168C of the portions 167A, 167B, and 167C (168C are not shown). In addition, in the following description, the three arm parts 169A, 169B, 169C, etc. which are arrange|positioned at substantially equiangular intervals around the axis|shaft parallel to the Z-axis are called only arm parts 169A, 169B etc..

When the power supply socket 152 is removed from the base portion 128 of the discharge lamp 1A by the grip portion 160, the grip portion 160 is lowered as shown in FIG. The position of the concave portion 154b of the outer cylindrical portion 154 of the socket 152 stops the lowering of the grip portion 160 . Next, as shown by the arrow A32 in FIG. 23(A), when the central piston portion 165 is pressed down, the first link portion 164, the second link portion 167A, 167B, the third link portion 168A, In the operation of the link mechanism constituted by 168B, the front ends of the arm portions 169A and 169B move inward, and the convex portion of the front end hangs on the concave portion 154b of the outer cylinder portion 154 .

Next, as shown by the arrow A33 in FIG. 23(B), when the piston portion 165 pushes down the push button switch portion 155 of the power supply socket 152, the ball 157 in the power supply socket 152 will be along the tapered portion 155b of the push button switch portion 155 ( Referring to FIG. 24 ), move to the outside to release the clamp on the terminal portion 128 a of the cap portion 128 . At this time, since the above-mentioned link mechanism of the grip portion 160 is a so-called toggle mechanism, even if the piston portion 165 is greatly moved downward, the positions of the arm portions 169A and 169B are substantially unchanged. Therefore, while supporting the power supply socket 152 by the three arm portions 169A and 169B, the clamp of the power supply socket 152 to the base portion 128 can be released. Therefore, the force to press down the discharge lamp 1A is not generated.

After that, as shown by arrow A35 in FIG. 24, the Z-axis drive mechanism 84A of the drive unit 72C is driven to raise the grip portion 160 holding the power supply socket 152, that is, the power supply socket 152 can be moved upward from the base portion 128 of the discharge lamp 1A. Remove. Moreover, the power supply socket 152 can be attached to the base part 128 by the reverse operation of the above-mentioned operation.

In addition, the following modifications are possible in this embodiment. First, in the drive unit 72C for replacing the power supply socket of the present embodiment, although the winding portion 90G is provided as shown in FIG. 20(B) , the winding portion 90G may not be provided, and the Z-axis drive mechanism 84A and the grip portion 160 may be X-axis moves. In this case, when the pull-out portion 36 (discharge lamp 1A) is pulled out of the lower casing 31A, the pull-out portion 36 is temporarily stopped, the grip portion 160 is lowered by the Z-axis drive mechanism 84A, and the power supply socket 152 is connected to the power-supply socket 152 by the grip portion 160 . It is removed from the discharge lamp 1A, and the holding part 160 holding the power supply socket 152 is raised. After that, after the pull-out portion 36 is pulled out in the +X direction by the pull-out drive unit 60A, the discharge lamp 1A is replaced by the lamp transport system 56C. In this case, since it is not necessary to provide the winding portion 90G in the drive unit 72C, the manufacturing cost of the drive unit 72C can be reduced.

20(B), the Z-axis drive mechanism 84A for the grip portion 160 can be supported along with the Z-axis drive mechanism 84B for the grip portion 162 along the X-axis guide 90B of the lamp transport system 56C so as to be able to Move in the X direction. With this configuration, after removing the power supply socket 152 of the discharge lamp 1A with the gripping portion 160 , the gripping portion 160 can be moved to the upper side of the discharge lamp 1A after the gripping portion 160 is moved to the end in the −X direction along the Z-axis drive mechanism 84B. , to replace the discharge lamp 1A. Therefore, it is not necessary to stop the pull-out portion 36 (pull-out drive unit 60A) at two positions as in the above-mentioned modification. Therefore, as the drive part 63 of the pull-out drive unit 60A, for example, an air cylinder or the like can be used.

In addition, as a manufacturing method of the discharge lamp 1A, the same manufacturing method as the above-mentioned discharge lamp 1 can be used. That is, the discharge lamp 1A can be configured by preparing the lamp body (glass member) and the base portions 126 and 128, respectively, and connecting these to each other. At this time, the base parts 126 and 128 can be reused, for example, those removed from the used discharge lamp 1A. In addition, when at least one of the base parts 126 and 128 is reused, instead of reusing the whole base parts 126 and 128, only at least a part of the base parts 126 and 128 (for example, the terminal part 128a and the heat dissipation part) can be reused. 128i at least one part).

[The fourth embodiment] Next, the fourth embodiment will be described with reference to FIGS. 26(A) to 27 . The light source device of the present embodiment also uses illumination light for exposure to be supplied to the illumination optical system of the exposure device. The light source device of the present embodiment is provided with a plurality of (eg, three) lamp boxes, and the light emitted from the discharge lamps in the plurality of lamp boxes is combined and supplied to the illumination optical system of the exposure device. 26 (A) to FIG. 30 corresponding to FIG. 1 and FIG. 4 (A), (B) are assigned the same reference numerals, and detailed descriptions thereof are omitted.

FIGS. 26(A) and (B) are a plan view showing the exposure apparatus EXA of the present embodiment, respectively, and FIG. 27 is a side view showing a partial cutaway of the exposure apparatus EXA. In FIG. 26(A) , the illumination optical system and the exposure main body of the exposure apparatus EXA (the part excluding the light source apparatus 30 from the exposure apparatus EX of FIG. 1 ) are arranged in a box-shaped chamber 92 . The exposure apparatus EXA includes a light source device 30D. The light source device 30D includes first, second, and third light boxes 29A, 29B, and 29C installed radially on the roof RT of the chamber 92, and synthesizes the light beams emitted from the light boxes 29A, 29B, and 29C installed on the roof RT. Then, it is supplied to the combining part 93 of the lighting optical system (not shown) in the lower layer, the replacement device 50D for replacing the used discharge lamps 1 in the lamp boxes 29A to 29C, and the storage part for storing the discharge lamps 1 and the unused discharge lamps 1N 54. The storage portion 54 is covered with a protective cover (not shown).

Lamp boxes 29A to 29C each have a lower case 31A that accommodates the discharge lamp 1 and the elliptical mirror 2 in use shown in FIG. 26(A) and (B), only the lower case 31A of the light boxes 29A to 29C is shown. When the lamp boxes 29A to 29C are in use, the anode-side base portion 28 of the discharge lamp 1 is connected to the power supply block 66 of the cable 24 by the clamp mechanism 52 shown in FIG. 4(B) , respectively.

Further, the replacement device 50D includes housings 51A, 51B, and 51C arranged close to the lamp boxes 29A, 29B, and 29C, respectively, and a discharge lamp 1 that is arranged in the housings 51A to 51C to support the discharge lamps 1 in the corresponding lamp boxes 29A to 29C, respectively. The part 36 is pulled out to the pull-out drive unit 60 of FIG. 4(B) in the casings 51A to 51C. The heights of the cabinets 51A to 51C are substantially the same as the height of the lower casing 31A (see FIG. 27 ), and an openable and closeable protective cover (not shown) is provided on the upper surfaces of the cabinets 51A to 51C. Further, the replacement device 50D includes the drive units of FIG. 4(B) arranged in the casings 51A to 51C, respectively, for releasing the clamping of the anode side cap portion 28 of the drawn discharge lamp 1 by the clamping mechanism 52 . 72C. The drive unit 34 of FIG. 4(B) is respectively arranged in the casings 51A to 51C to release the clamp of the cathode side lamp mouth portion 26 of the discharge lamp 1 that has been pulled out, and is used to replace the drive unit 34 pulled out to the casing. The lamp conveyance system 56D of the used discharge lamp 1 supported by the pull-out part 36 (support member 33) of 51A-51C.

Further, the lamp transport system 56D includes a support column 90H provided near the cabinet 51C of the roof RT, a Y-axis drive unit 90I supported by the support column 90H and extended in the Y direction, a winding drive unit 90D driven by the Y-axis drive unit 90I in the Y direction, A revolving portion 90E revolving around an axis parallel to the Z-axis by a revolving drive portion 90D, Z-axis drive mechanisms 84A and 84B fixed to both ends of the revolving portion 90E, and a gripping pawl opening and closing mechanism 85A connected to the lower ends of the Z-axis drive mechanisms 84A and 84B and 85B, and a plurality of claw portions 86A and 86B opened and closed by the grasping claw opening and closing mechanisms 85A and 85B. The Y-axis drive unit 90I drives the winding drive unit 90D in the Y direction by, for example, a ball screw method, a linear motor method, or the like. As described above, since the lamp conveying system 56D includes the two gripping claw opening and closing mechanisms 85A and 85B, the two discharge lamps 1 (or the unused discharge lamps 1N) can be simultaneously gripped. In addition, in order to adjust the rotation angle of the discharge lamps 1 and 1N, a rotation shaft (not shown) may be provided between the Z-axis drive mechanisms 84A and 84B and the gripping claw opening and closing mechanisms 85A and 85B.

Further, as shown in FIG. 27 , the light source device 30D includes an elevator 95 provided on the side surface of the chamber 92, and an elevator 94 that ascends and descends between a position P7 close to the first floor in the elevator 95 and a position P6 close to the roof RT . The storage portion 54 (the drive portion 80 and the rotary disk 79 ) is provided on the upper surface of the lift portion 94 .

In this embodiment, for example, when replacing the discharge lamps 1 in the lamp boxes 29B and 29C, as shown in FIG. Next, for example, after gripping the unused discharge lamp 1N in the storage part 54 by the gripping claw opening and closing mechanism 85A and the claw portion 86A on one side of the lamp conveying system 56D, the gripping claw opening and closing mechanism 85A is raised. Then, as shown by the dotted line in FIG. 26(B), the revolving portion 90E of the lamp conveying system 56D is moved to the upper side of the housing 51B, and the discharge lamp 1N in the housing 51B is gripped by the other gripping claw opening and closing mechanism 85B and the claw portion 86B. and the discharge lamp 1N held by one of the gripping claw opening and closing mechanism 85A and the claw portion 86A is installed in the pull-out portion 36 (support member 33 ) of the housing 51B. At this time, the operation of the clamp mechanism 52 to release the clamp of the cap portion 28 of the discharge lamp 1 is the same as that of the first embodiment.

After that, as shown by the solid line in FIG. 26(B) , the revolving portion 90E of the lamp conveying system 56D is moved to the upper side of the housing 51C, and the discharge lamp 1 in the housing 51C is gripped by the gripping claw opening and closing mechanism 85A and the claw portion 86A on one side. Then, the gripping claw opening and closing mechanisms 85A and 85B are raised to move the winding portion 90E above the storage portion 54 , and the two used discharge lamps 1 held by the claw portions 86A and 86B are placed on the turntable 79 of the storage portion 54 . After that, the unused discharge lamp 1N of the rotary disk 79 is held by one of the holding claw opening and closing mechanism 85A and the claw portion 86A, the winding portion 90E is moved to the upper side of the casing 51C, and the discharge lamp 1 is placed on the pull-out portion in the casing 51 After 36 , the pull-out portions 36 in the housings 51B and 51C are returned to the lower shells 31A of the lamp boxes 29B and 29C, thus completing the replacement of the discharge lamps 1 in the lamp boxes 29B and 29C with the unused discharge lamps 1N. The replacement of the discharge lamp 1 in the lamp box 29A is performed in the same manner.

Moreover, when the used discharge lamps 1 in the rotary disk 79 of the storage part 54 become many, as shown in FIG. The operator opens the lamp replacement door 45A on the first floor of the elevator 95, collects the used discharge lamps 1 on the rotary disk 79, and replenishes the unused discharge lamps 1N. After that, the storage part 54 is moved to the position P6 close to the roof RT by the elevator 95, and the plurality of discharge lamps 1 in the light source device 30D can be replaced.

According to this embodiment, since the operator can replenish and collect the discharge lamps at only one place for the plurality of lamp boxes 29A to 29C, the efficiency is good. Furthermore, since the pair of gripping claw opening and closing mechanisms 85A and 85B and the claw portions 86A and 86B are provided, even if the traveling distance of the winding portion 90E along the Y-axis driving portion 90I is long, the discharge lamp can be replaced in a short time.

In addition, in the housings 51A to 51C corresponding to the light boxes 29A to 29C, only the drive unit 72C for the pull-out drive unit 60 and the clamp mechanism 52 only needs to be installed, so that the installation area of the roof RT of the chamber 92 can be reduced, even if Even in a narrow roof RT, the light source device 30D can be easily installed.

In addition, in order to further shorten the replacement time of the discharge lamps, the number of the rotary disks 79 for storing the discharge lamps and the number of the lamp transport systems 56D can be increased to shorten the lamp replacement time. In addition, the rotating disk for replenishing the discharge lamp and the rotating disk for recycling may be provided separately.

In addition, the Y-axis drive unit 90I (the traveling axis of the lamp conveying system 56D) arranged to traverse above the plurality of lamp boxes 29A to 29C may be attached to the roof RT through a plurality of pillars, or may be arranged separately from the chamber 92 from, for example, a factory The top is supported by overhanging. In addition, the lamp boxes 29A to 29C may be provided together at positions separated from the chamber 92 .

[Fifth Embodiment] Next, the fifth embodiment will be described with reference to FIGS. 28 to 31(B). In the above-described embodiment, although the cathode-side base portions 26 and 126 of the discharge lamps 1 and 1A are positioned and fixed to the support member 33, the anode-side base portions 28 and 128 are carried by the lamp conveying systems 56 and 56C, etc. However, when the shape accuracy of the discharge lamps 1 and 1A is low, there is a possibility that the caps 28 and 128 cannot be held by the claws 86 or the gripping part 160 . When the shape accuracy of the discharge lamps 1 and 1A is low, the manipulators must have a compliance function (compliance, flexibility) in order to be able to hold the caps 28 and 128 with the gripper 86 or the gripper 160 or the like. Therefore, the present embodiment provides a discharge lamp holding mechanism having flexibility with respect to the positional relationship with the discharge lamp, and a discharge lamp having a cap having a shape suitable for holding by the holding mechanism. The discharge lamp and the holding mechanism can be used for, for example, the discharge lamp 1 and the lamp transport system 56 in the light source device 30 of FIG. 4(B) , respectively. 28 to 31(B), the parts corresponding to those in FIGS. 19(A) and (B) are assigned the same reference numerals and detailed descriptions thereof are omitted.

FIG. 28 shows the discharge lamp 1B of this embodiment. In FIG. 28 , the discharge lamp 1B includes a glass tube 25A, a cathode-side base portion 126 connected to the end of one rod-shaped portion 25Ab of the glass tube 25A, and an end portion of the other rod-shaped portion 25Ac connected to the glass tube 25A. Anode side cap portion 128A. The base portions 128A and 126 are respectively electrically connected to the anode and the cathode (not shown) in the bulb portion 25Aa of the glass tube 25A. The base portions 126 and 128A are made of metal with good electrical conductivity and thermal conductivity.

In addition, in the anode-side base portion 128A, a cylindrical connecting portion 128Ak having an outer diameter slightly larger than the diameter of the rod-shaped portion 25Ac, an outer A cylindrical intermediate portion 128Am having a diameter substantially the same as that of the rod-shaped portion 25Ac, a heat dissipation portion 128Ai having a plurality of annular belt-shaped heat dissipation fins 128Aj formed, and a partial spherical belt having a radius slightly larger than that of the heat dissipation fins 128Aj part 128Ae (held part or grasped part), and terminal part 128Aa of the same shape as the terminal part 128a of FIG.2(A). The ball band portion 128Ae is a shape in which both ends of the spherical body in the longitudinal direction of the discharge lamp 1B are symmetrically cut out on a plane perpendicular to the longitudinal direction. The height of the ball belt 128Ae (the length in the longitudinal direction of the discharge lamp 1B) is set to approximately 2/3 of the radius of the sphere. The base portion 128A is integrally formed of a metal (eg, brass) having good thermal conductivity and electrical conductivity. Moreover, the cap part 128A may be formed by connecting the parts (the ball band part 128Ae, the terminal part 128Aa) which were manufactured individually.

FIG. 29(A) is a partially cutaway plan view showing the hand 85D as the gripping mechanism of the present embodiment, and FIG. 29(B) is a partially cutaway front view of FIG. 29(A). In addition, FIG. 29(A) is also a cross-sectional view taken along line AA of FIG. 29(B). 29(A) and (B), the Z axis is taken along the longitudinal direction of the supported discharge lamp 1B, and the orthogonal directions in the plane perpendicular to the Z axis are taken as the X axis and the Y axis. In addition, the rotation directions around the axes parallel to the X-axis, the Y-axis, and the Z-axis are also referred to as θx, θy, and θz directions, respectively. Moreover, as shown in FIG. 29(B), the hand 85D of this embodiment can be attached to the Z-axis drive mechanism 84 of the lamp conveying system 56 of FIG.

In FIGS. 29(A) and (B), the hand 85D is provided with a compliance mechanism (a flexible mechanism) in the X-direction and the Y-direction. The hand 85D has a box-shaped casing 172 fixed to the bottom of the Z-axis drive mechanism 84 and having a rectangular parallelepiped open downward, and a rectangular frame-shaped casing 172 fixed to the lower end of the casing 172 and having the same outer shape as the casing 172 and a lower height. Frame member 173a. The thickness (width in the XY plane) of the frame member 173 a is the same on the entire circumference (except the corners), and the thickness is thicker than the thickness of the side surface of the casing 172 .

In addition, a rectangular flat lower plate 173b having a circular hole in the center is fixed to the bottom surface of the frame member 173a. The lower plate 173b is formed of, for example, metal (stainless steel, etc.). In addition, inside the casing 172 on the upper surface of the frame member 173a, with a slight gap with the inner surface of the casing 172, a flat upper plate 177 having a rectangular shape in plan view, a thin thickness and a circular hole in the center is disposed. The upper plate 177 is formed of, for example, synthetic resin (plastic or the like). The hole diameter of the upper plate 177 is substantially equal to the hole diameter of the lower plate 173b.

A plurality of compression coil springs 180 are mounted in a compressed state between the ceiling inside the casing 172 and the upper surface of the upper plate 177, and the upper plate 177 is press-contacted to the frame member 173a from above with a predetermined force. Moreover, the guide rod 181 is provided in the compression coil spring 180 . The hand 85D has a plurality of (for example, three) fingers 86D extending in the Z direction through the disk-shaped mounting member 175 at the lower end, which can be viewed from a top view by an opening and closing device (not shown) in the mounting member 175 , The opening and closing of a plurality of fingers 86D are performed radially synchronously (same speed and same distance).

On the upper surface of the attachment member 175, a cylindrical member 174 extending in the vertical direction (Z direction) is attached. The cylindrical member 174 may be a cylindrical member. The cylindrical member 174 is provided with a rectangular flange portion 174a in a plan view at an intermediate position in the Z direction. The cylindrical member 174 (the flange portion 174a ) is formed of, for example, a metal (aluminum alloy or the like). The diameter of the cylindrical portion of the flange portion 174a of the clamping cylindrical member 174 is smaller than the hole diameters of the lower plate 173b and the upper plate 177, and the outer shape of the flange portion 174a is wider than the hole diameters of the lower plate 173b and the upper plate 177. The upper plate 177 and the lower plate 173b sandwich the rectangular flange portion 174a of the cylindrical member 174 from above and below, and the cylindrical portion of the cylindrical member 174 is inserted through the holes of the upper plate 177 and the lower plate 173b. The upper and lower end portions of the cylindrical member 174 are a head portion 174b and a connecting portion 174c having a larger diameter than the central cylindrical portion.

The thickness (Z-direction width) of the flange portion 174a is thinner than the thickness (Z-direction width) of the frame member 173a. Therefore, there is a gap between the upper plate 177 and the lower plate 173b where the flange portion 174a can be displaced in the Z direction. The cylindrical member 174 including the flange portion 174a may be a part of the mounting member 175, or an actuator or the like for opening and closing the fingers 86D may be attached to the bottom of the cylindrical member 174.

Furthermore, as shown in FIG. 29(A), between the upper plate 177 and the lower plate 173b, a rectangular shape in plan view is arranged so as to enclose the flange portion 174a, the thickness in the Z direction is smaller than the thickness of the frame member 173a, and the thickness is smaller than that of the frame member 173a. The flange portion 174a is a small rectangular frame-shaped member (hereinafter, referred to as a small frame-shaped member) 173c having substantially the same thickness. The length of the small frame-shaped member 173c (the length of the longer one (Y direction) among the opposing sides) is set to be slightly shorter than the length (inner dimension in the Y direction) between the opposing parallel inner surfaces of one side of the frame member 173a, The width of the small frame-shaped member 173c (the length of the shorter of the opposite sides (X direction)) is set to be the length between the inner surfaces parallel to the opposite side of the frame member 173a (inner dimension in the X direction) full short. Also, the width in the X direction (inner dimension in the X direction) of the rectangular hole of the small frame-shaped member 173c is set to be slightly longer than the length in the X direction of the flange portion 174a, and the length in the Y direction of the rectangular hole of the small frame-shaped member 173c (Y The inner dimension in the direction) is set sufficiently longer than the Y-direction length of the flange portion 174a. Therefore, the flange portion 174a (that is, the cylindrical member 174) can move in the X direction together with the small frame-shaped member 173c (the small frame-shaped member 173c is pushed by the flange portion 174a), and the flange portion 174a can move along the small frame The inner wall surface of the shaped member 173c moves in the Y direction. In addition, the rotation of the flange portion 174a in the θz direction is restricted by the X-direction inner wall and the Y-direction outer wall of the small frame-shaped member 173c.

Further, one end of the tension coil spring 179 is attached to the portion of the cylindrical member 174 higher than the upper surface of the upper plate 177 through three or more bar-shaped members 178 arranged radially as shown in FIG. 29(B). The other end of the tension coil spring 179 is radially and slightly stretched, and is installed on the top of the casing 172 outside the installation position of the one end side of the tension coil spring 179 (in a plan view, the cylindrical member 174 the outer side in the radial direction of the center). Therefore, the cylindrical member 174 is given a radially upward pulling force, and stays at the center position by the balance with the force of the tension coil spring 179 pulling in the opposite direction. At this time, the finger 86D attached to the cylindrical member 174 through the mounting member 175 is in a state of not holding anything, and the upper surface of the flange portion 174a is lightly contacted by the weight of the mounting member 175 and the finger 86D itself. The manner of the plate 177 determines the strength and installation angle of the tension coil spring 179 . In addition, at this time, the force of compressing the coil springs 180 is determined to such an extent that the upper plate 177 is not pulled upward by the force of the plurality of compressing coil springs 180 .

As a result, the cylindrical member 174 (that is, the mounting member 175 and the finger portion 86D) suspended by the tension coil spring 179 is restrained by the frictional resistance between the flange portion 174a and the upper plate 177 made of synthetic resin. vibration and prevents horizontal movement from being hindered by a low coefficient of friction.

The inner side of the finger portion 86D is formed into a concave shape along the curvature of the surface (fittable) of the ball band portion 128Ae of the base portion 128 of the discharge lamp 1B of FIG. 28 . A cylindrical guide block 176 is fixed to the center of the root portion of the plurality of fingers 86D on the bottom surface of the mounting member 175. The height of the guide block 176 in the Z direction is adjusted from the front end of the guide block 176 to the recess provided in the fingers 86D. The distance from the center of curvature to the Z direction is substantially the same as the distance from the front end of the base portion 128 of the discharge lamp 1B to the center of the ball band portion 128Ae in the Z direction (longitudinal direction of the discharge lamp 1B). Therefore, when the finger 86D is closed in a state where the guide block 176 is in contact with the front end of the base portion 128A of the discharge lamp 1B, the concave portion of the finger 86D is fitted into the ball band portion 128Ae of the discharge lamp 1B, and can be held securely. Discharge lamp 1B. Of course, the guide block 176 can also be omitted.

Next, the discharge lamp 1B and the hand 85D according to the present embodiment will be described in detail, and the discharge that is automatically held and displaced in the six-degree-of-freedom directions (X, Y, Z directions and θx, θy, and θz directions) relative to the hand 85D will be described in detail. Action of Lamp 1B. As shown in FIG. 30(A) , the anode-side base portion 128A of the discharge lamp 1B is, for example, inclined in the θy direction from the design transfer position and shifted in the +X direction. The hand 85D is moved to the target position in the X direction and the Y direction above the discharge lamp 1B by the drive mechanism in the X direction and the Y direction not shown (eg, the revolving shaft 83 in FIG. 4(B) ). Next, the mounting member 175 opens the plurality of fingers 86D (open state), and the Z-axis drive mechanism 84 lowers the fingers 86D to the holding position of the discharge lamp 1B. When the front end portion of the base portion 128A of the discharge lamp 1B contacts the height of the guide block 176 provided in the central portion of the mounting member 175, the hand 85D is stopped from descending, and the finger portion 86D starts to close.

At this time, when the Z-direction length of the discharge lamp 1B is longer than the target length, the hand portion 85D continues to descend after the guide block 176 contacts the base portion 128A. At this time, in order to prevent the guide block 176 from pressing the discharge lamp 1B downward (-Z direction), the flange portion 174a pushes the upper plate 177 upward (+Z direction) against the force of the plurality of compression coil springs 180 . As a result, a large force is not generated on the discharge lamp 1B. On the other hand, when the Z direction length of the discharge lamp 1B is shorter than the target length, the center position of the curvature of the recessed portion of the finger portion 86D and the center position of the ball band portion 128Ae of the base portion 128A are shifted in the Z direction. When the finger portion 86D is closed in this state, the edge provided below the concave portion of the finger portion 86D contacts the lower portion of the Z-direction center of the ball belt portion 128Ae. After that, when the finger portion 86D is further closed, the flange portion 174a originally in contact with the upper plate 177 can move downward due to the force of the tension coil spring 179 and move downward by the gap between the lower plate 173b and the finger portion 86D. Guided by the curved surface of the strap portion 128Ae and moved downward, the recessed portion of the finger portion 86D is fitted with the surface of the strap portion 128Ae, and the finger portion 86D is in close contact with the strap portion 128Ae.

This is because the concave portion provided in the finger portion 86D clamps the ball belt portion 128Ae to produce a centripetal action, so that the finger portion 86D can be moved downward by the gap between the flange portion 174a and the lower plate 173b. In addition, in the finger portion 86D, considering the situation when the discharge lamp 1B is short, the hand portion 85D is constantly moved in the −Z direction by the Z-axis drive mechanism 84 compared with the target height, and the guide block 176 contacts the base portion of the lamp. The closing action of the fingers 86D may be performed after the front end of the 128A.

When the finger portion 86D performs the closing operation, as shown in FIG. 30(B) , the base portion 128A is inclined, so that the finger portion 86D on the +X direction side comes into contact with the base portion earlier than the finger portion 86D on the −X direction side. 128A, but the fingers 86D on the +X direction side are further synchronously closed so that the fingers 86D on the −X direction side also contact the base portion 128A, as shown in FIG. The reaction force is generated in the hand 85D, and a force that pushes the whole body in the +X direction is generated. As a result, the cylindrical member 174 originally kept in balance by the balance of the force with the tension coil spring 179 and the friction between the flange portion 174a and the upper plate 177 is better than the balance force with the tension coil spring 179 and The frictional force between the flange portion 174a and the upper plate 177 enables the ball band portion 128Ae of the cap portion 128A to be securely grasped by the three fingers 86D while being easily moved in the +X direction. At this time, even if the cap portion 128A is inclined in the θx, θy, and θz directions and the spherical surface of the ball band portion 128Ae is displaced, the shape does not change, so that the fingers 86D can surely hold the lamp even without the flexibility in the rotational direction. Mouth 128A.

Next, as shown in FIG. 31(B), when the finger portion 86D holds the base portion 128A of the discharge lamp 1B and drives the Z-axis drive mechanism 84 to lift the discharge lamp 1B with the hand 85D, the coil spring 179 is stretched by the tension of the coil spring 179. When a force is applied obliquely upward, the flange portion 174a originally in contact with the upper plate 177 moves downward due to the weight of the discharge lamp 1B, and the flange portion 174a contacts the lower plate 173b. Since the friction coefficient between the lower plate 173b and the flange portion 174a is large, the finger portion 86D overcomes the centripetal force generated by the balance of the force of the tension coil spring 179, while maintaining the position biased in the +X direction (without compliance status) rises. As a result, by moving the hand 85D in the X direction and/or the Y direction, the discharge lamp 1B can be moved to a target position (for example, the storage portion 54 of FIG. 4(B) ) regardless of the shape error of the discharge lamp 1B. above the rotating disk 79), and replace the discharge lamp 1B with an unused discharge lamp.

Furthermore, in the above-described embodiment, when a large upward force is generated in the finger portion 86D, the upper plate 177 is pressed downward by the compression coil spring 180 and is pushed up by the flange portion 174a to release the large force upward. function (buffer function). The mechanism for releasing the fingers 86D in the Z direction is not limited to this mechanism, and a mechanism for driving the entire hand 85D in the Z direction can be provided in the Z-axis drive mechanism 84 .

In addition, in the above-described embodiment, only the portion (ball band portion 128Ae) held by the finger portion 86D of the anode side cap portion 128A has been described, and the power supply block 66 at the end portion of the cable 24 shown in FIG. 4(B) is connected For example, when connecting to the terminal portion 128Aa of FIG. 28 , the shape of the terminal portion 128Aa may be the shape of the terminal portion 28a of FIG. 2(A) or the terminal portions 28Aa to 28Da of FIGS. 3(B) to (E) .

In addition, as a manufacturing method of the discharge lamp 1B, the same manufacturing method as the above-mentioned discharge lamps 1 and 1A can be used. That is, the discharge lamp 1B can be configured by preparing the lamp body (glass member) and the base portions 126 and 128A, respectively, and connecting these to each other. At this time, the base parts 126 and 128A may be, for example, removed from the used discharge lamp 1B and reused. In addition, when at least one of the base parts 126 and 128A is reused, instead of reusing the whole base parts 126 and 128A, only at least a part of the base parts 126 and 128A (for example, the terminal part 128Aa, the ball belt, etc.) can be reused. part 128Ae and at least one part of the heat dissipation part 128Ai).

In addition, although the replacement device 50 and the like of the above-described embodiments perform the replacement of the discharge lamps 1, 1A, 1B, etc. in a fully automatic manner, for example, only the clamp mechanism 52 and the drive unit 72 may be used, and the pulling may be performed manually. The pull-out of the outlet 36 and the transport of the discharge lamps 1, 1A, and 1B using the lamp transport system 56 and the like are part of the transport.

In addition, although the replacement device of each of the above-described embodiments performs lamp replacement (that is, installs (supplements) unused lamps and collects used lamps) with respect to each opening 79 a of the rotary disk 79 , it may be possible, for example, to be opposite to the driving unit 80 . The turntable 79 is detachable, and the lamp is exchanged together with the turntable 79 in a state where a lamp is provided (inserted) in the opening 79a of the turntable 79 . In this case, the turntable 79 can be used as a carrier for transporting the lamps.

Liquid crystal elements such as liquid crystal display elements can be produced by forming predetermined patterns (circuit patterns, electrode patterns, etc.) on a substrate (sheet P) using the exposure apparatuses of the above-described embodiments or the exposure methods using these exposure apparatuses. Hereinafter, an example of this manufacturing method will be described with reference to steps S401 to S404 in FIG. 33 .

In step S401 (pattern forming step) of FIG. 33 , first, a coating step of coating a resist on an exposure target substrate to prepare a photosensitive substrate (sheet P), and using the above-mentioned exposure apparatus to form a mask pattern for a liquid crystal display element is performed. An exposure step of transfer exposure to the photosensitive substrate, and a development step of developing the photosensitive substrate. A predetermined photoresist pattern is formed on the substrate by a lithography process including the coating step, the exposure step and the developing step. After the lithography process, a predetermined pattern including a plurality of electrodes and the like is formed on the substrate through an etching step of using the photoresist pattern as a photomask for processing, a photoresist lift-off step, and the like. The lithography process and the like are performed a plurality of times depending on the number of layers on the plate P.

In the second step S402 (the color filter forming step), by arranging groups of three fine filters corresponding to red R, green G, and blue B into a matrix, or by arranging red R, green G, blue Groups of multiple filters in the form of three strips of B are arranged in the direction of the horizontal scanning lines to form color filters. In the next step S403 (unit assembly step), liquid crystal is injected between the plate having the predetermined pattern obtained in step S401 and the color filter obtained in step S402 to manufacture a liquid crystal panel (liquid crystal cell).

In the subsequent step S404 (module assembling step), components such as circuits and backlights for performing display operations are installed on most of the liquid crystal panels (liquid crystal cells) assembled in the above-mentioned manner to complete the liquid crystal display element. According to the manufacturing method of the above-mentioned liquid crystal display element, since the discharge lamp can be exchanged efficiently in the exposure apparatus, high productivity can be obtained.

In addition, the present invention is not limited to the application to the process of liquid crystal display elements, but can also be widely applied to the process of display devices such as plasma displays, as well as photographic elements (CCD, etc.), micromachines, MEMS (Microelectromechanical Systems: Micromotors) system), the process of various components such as thin-film magnetic heads and semiconductor components using ceramic wafers as substrates.

In addition, the light source device of the above-described embodiment can be applied to a projection exposure device (step & repeat) system in addition to the scanning exposure type projection exposure device (scanner, etc.) of the step-and-scan method. machine, etc.) exposure light source. In addition, the light source device of the above-mentioned embodiment can also be applied to a light source device of an exposure device of a proximity method or a contact method that does not use a projection optical system, or a light source of a machine other than the exposure device.

As described above, the present invention is not limited to the above-described embodiments, and various configurations are possible without departing from the gist of the present invention.

In addition, the disclosures in the above-mentioned publications, international publication pamphlets, U.S. Patents, or U.S. Patent Application Publications described in this application are used as a part of the descriptions in this specification. In addition, all the disclosure contents of Japanese Patent Application No. 2014-070609 filed on March 28, 2014, including the specification, the scope of the application, the drawings and the abstract, are incorporated herein by reference.

1, 1A, 1B: discharge lamps 1N: Unused discharge lamp 2: Oval mirror 2a: Opening 3: Bending mirror 4: Window components 5: Interference filter 6: Fly eye lens 7: Variable aperture diaphragm 8: 1st relay lens 9: Photomask Blinds 10: 2nd relay lens 11: Reflector 12: Condenser lens 13: Lighting Optical System 14: Main control system 17R, 17W: Moving mirror 18R, 18W: Laser Interferometer 19R, 19W: drive train 20: Power Department 21: Alignment system 22: Aerial image measurement department 23, 24: cable 25, 25A: glass tube 25a, 25Aa: Bulb part 25b, 25c, 25Ab, 25Ac: rod-shaped portion 26, 126: Cathode side lamp mouth 26a: Flange 26b: Shaft 26d: Groove 26e, 26i: Corner removal 26f: Recess (segment) 26g: pressed surface 26h: Fixed part 26k: Small diameter section 26p: Links 26q: opening 27A, 27B: Opening (positioning part) 28, 128, 128A: Anode side cap 28A, 28D: Lamp mouth 28a, 28Aa, 28Ba, 28Ca, 28Da: Terminal part 28b, 28c, 28Ab, 28Ac, 28Bb, 28Bc, 28Cb, 28Cc: flat part 28d, 28Ad, 28Bd, 28Cd: Recess 28e: Controlled Department 28f, 28g, 28h, 28Cf, 28Cg, 28Ch: flat part 28i, 128i, 128Ai: heat sink 28j, 128j, 128Aj: heat sink 29A, 29B, 29C: 1st to 3rd light boxes 30, 30A, 30B, 30D: Light source device 31: Lightbox 31A, 31B: Shell 31Aa: Opening 31Ab: Opening 32: Light source control system 33: Supporting member 34: Drive unit 34A: Clamp Mechanism 36: Pull out 36c: The linked part 38, 38A: Leverage 38Aa: end 39: Coil Spring 40: Drive Department 41: Guide 42: Shading member 43: Connecting components 45, 45A: Lamp replacement door 50, 50C: Replacement device 51, 51A～51C: Chassis 51a: Opening 51b: Window 52, 52A, 52B: Clamp mechanism 54: Storage Department 56, 56A, 56B, 56C, 56D: Lamp conveying system 60, 60A: Pull out the drive unit 61: Guide 62, 62A: Abutment 62a, 62Aa: front end 63: Drive Department 64: Relay component 65: Support member 66, 66A: Power supply block 66a: Groove 67: Benchmark Leverage 68: Tension Coil Spring 69: Drive Lever 70: Roller 71, 71H, 71V: Linear guide 71S: Guide 72, 72A, 72B: The drive unit of the clamp mechanism 72C: Drive unit for power socket replacement 73: Guide 74: Slider 75, 75A: movable table 75Aa: long hole 75B: Base member 75C: Support table 76: Drive Department 76a, 76b: Connector 76L: Linear Actuator 77: Drive Department 79: Rotary table 79a: Opening 79b: Rotary axis 80: Drive Department 82: Support part 83: Swirl shaft 84, 84A, 84B: Z-axis drive mechanism 85, 85A, 85B: Claw opening and closing mechanism 85D: Hand 86, 86A, 86B: Claws 86a: Pin 86D: Fingers 87: Components for positioning 88: Leaf spring part 89A: Movable lever 89B: Mounting components 89C: Pulley 89D: Wire rope 89E: Extension Coil Spring 89F: Roller 89G: Rod 90B: X-axis guide 90C: Supporting members 90D: Winding drive part 90E: convoluted part 90F: Supporting members 90G: convoluted part 90I: Y-axis drive part 90R: Storage Department 90X: X-axis drive mechanism 92: Chamber 94: Lifting Department 95: Lift 126a: Flange 126b, 128c: Shaft 126h: Fixed part 126i: Cornering 126j, 128d: Front end 126k, 128k, 128Ak: Connector 128Ae: Ball Belt 128a: Terminal part 128b: Connection part 128m, 128Am: middle part 152: Power socket 153: Links 153a: Contact surface 153c: Fasteners 154: Outer cylinder 154a: Flange 154c: Vent hole 155: Button switch part 155a: Stage difference 155b: Tapered part 156: Compression coil spring 160, 162: Grip 164: 1st link part 164a, 164b, 164c: wrist 165: Piston Department 166a: Opening 167A, 167B, 167C: Second link part 168A, 168B, 168C: 3rd link part 169A, 169B, 169C: Arm 172: Basket 173a: Frame member 173b: Lower plate 173c: Small frame member 174: Cylinder member 174a: Flange 174b: head 175: Installation components 176: Boot Block 177: Upper Board 178: Rod member 179: Tension Coil Spring 180: Compression coil spring 181: Guide rod 226, 228: Lamp mouth tube 226a: End 226b: Clamping part 226c: screw hole 228a: small convex part 228b: screw hole e2: remove corners EL1: Anode EL2: Cathode EX: Exposure Device h1, h2, h3, h4: holes IL: Exposure light M: photomask MST: Photomask Stage P: plate PL: Projection Optical System PST: Substrate Stage RT: Roof

1 : is a figure which shows the schematic structure of the exposure apparatus of 1st Embodiment. [Fig. 2] (A) is a view showing the discharge lamp in Fig. 1, (B) is an enlarged perspective view showing the anode side cap portion of Fig. 2(A), (C) is along CC in Fig. 2(A) Line profile. [Fig. 3] (A) is a view of the anode side cap part viewed from two directions, (B), (C), (D), and (E) are viewed from two directions. The first, the second, and the first Figures of the anode side caps of the third and fourth modified examples. [ FIG. 4 ] (A) is a partially cutaway top view showing the light source device in FIG. 1 , and (B) is a partially cutaway side view showing the light source device in FIG. 4(A). [ Fig. 5 ] is a perspective view showing an anode side cap portion and a clamp mechanism of the discharge lamp. [FIG. 6] (A) is a partially cut-away top view showing the light source device in the moving sliding portion, and (B) is a partially cut-away side view showing the light source device of FIG. 5(A). 7] (A) is a figure which shows the state which clamped the anode side base part of a discharge lamp, (B) is a figure which shows the state which released the clamp of the base part. [ FIG. 8 ] A side view showing a partial cutaway of the light source device. [ Fig. 9] (A) is a plan view showing a state in which the anode-side base portion is held by the lamp gripping claws, and (B) is a side view of Fig. 9(A) . [ FIG. 10 ] (A) is a partially cutaway top view showing the light source device in the mobile discharge lamp, and (B) is a partially cutaway side view showing the light source device of FIG. 10(A). [ Fig. 11 ] A diagram showing a positioning portion of the lamp storage rotary disk. [Fig. 12] is an exploded view showing a partial cutaway of a discharge lamp in production. [ Fig. 13 ] (A) is a plan view showing a part of the clamp mechanism of the anode-side base portion of a modification, and (B) is a side view of Fig. 13(A). [ Fig. 14 ] (A) is a partially cut-away side view showing the clamp mechanism of the anode-side base part of another modification, and (B) is a part showing a state where the clamp of the anode-side base part is removed Cutaway side view. [ Fig. 15 ] It is a partially cutaway side view showing a state in which the clamp of the cathode side cap portion is removed. [ Fig. 16 ] It is a partially cut-away side view showing the light source device of the second embodiment. [ Fig. 17 ] is a partially cutaway side view showing a state in which the sliding portion is pulled out. [ Fig. 18] Fig. 18 is a partially cutaway side view showing a light source device according to a modification of the second embodiment. 19] (A) is a figure which shows the discharge lamp of 3rd Embodiment, (B) is a sectional view which shows the state which clamped the anode side base part of FIG. 19(A). [Fig. 20] (A) is a partially cutaway top view showing the light source device of the third embodiment, and (B) is a partially cutaway side view showing the light source device of Fig. 20(A). [ Fig. 21 ] is a partially cutaway side view showing a state in which the sliding portion is pulled out. [ Fig. 22 ] (A) is a partially enlarged cross-sectional view showing the power supply socket engaged with the anode side cap and the socket holding portion, and (B) is a partially enlarged cross-sectional view showing the state where the power supply socket is held by the socket holding portion . [FIG. 23] (A) is a partially enlarged cross-sectional view showing the operation for removing the power supply socket engaged with the base portion, and (B) is a partially enlarged cross-sectional view showing the state immediately before the power supply socket is removed. [ Fig. 24 ] is a partially enlarged cross-sectional view showing a state in which the power supply socket engaged with the base portion is removed. [Fig. 25] (A) is a partially cutaway top view showing the light source device of the third embodiment, and (B) is a partially cutaway side view showing the light source device of Fig. 25(A) . 26 ] (A) is a plan view showing the main part of the exposure apparatus according to the fourth embodiment, and (B) is a plan view showing the main part in a state in which the discharge lamp is being replaced. [ Fig. 27 ] It is a partially cut-away side view showing the exposure apparatus according to the fourth embodiment. Fig. 28 is a view showing a discharge lamp according to the fifth embodiment. [ Fig. 29] (A) is a cross-sectional view showing the holding mechanism for lamp replacement according to the fifth embodiment, and (B) is a cross-sectional view of the holding mechanism in Fig. 29(A) viewed from the front. [Fig. 30] (A) is a diagram showing the main part of the discharge lamp and the lamp replacement hand, and (B) is a diagram showing the main part of the state immediately before the anode side cap is held by the hand. [Fig. 31](A) is a diagram showing the main part in a state where the anode side cap is held by the hand, and (B) is a diagram showing the main part in a state where the anode side cap is lifted by the hand. [ Fig. 32 ] (A) is a flowchart showing an example of a discharge lamp replacement method, and (B) is a flowchart showing an example of a discharge lamp manufacturing method. [ Fig. 33 ] It is a flowchart showing an example of the manufacture of electronic components.

1: Discharge lamp

1N: Unused discharge lamp

2: Oval mirror

2a: Opening

3: Bending mirror

26: Cathode side lamp port

26a: Flange

26h: Fixed part

28: Anode side cap

28a: Terminal part

30: Light source device

31: Lightbox

31A, 31B: Shell

31Aa: Opening

31Ab: Opening

33: Supporting member

34: Drive unit

36: Pull out

36c: The linked part

38: Leverage

39: Coil Spring

40: Drive Department

41: Guide

42: Shading member

43: Connecting components

45: Light Replacement Door

50: Replacement device

51: Chassis

51a: Opening

51b: Window

52: Clamp mechanism

54: Storage Department

56: Light conveying system

60: Pull out the drive unit

61: Guide

62: Abutment

62a: front end

63: Drive Department

64: Relay component

65: Support member

66: Power supply block

67: Benchmark Leverage

68: Tension Coil Spring

69: Drive Lever

70: Roller

72: Drive unit of clamp mechanism

73: Guide

74: Slider

75: Movable table

76: Drive Department

77: Drive Department

79: Rotary table

79a: Opening

80: Drive Department

82: Support part

83: Swirl shaft

84: Z-axis drive mechanism

85: Claw opening and closing mechanism

86: Claws

Claims (5)

A light source device for causing a discharge lamp to emit light, the discharge lamp having: a glass member provided with a first electrode and a second electrode for forming a light-emitting portion inside; and a first base member and a second base member , respectively provided on the first electrode side and the second electrode side of the glass member relative to the light-emitting portion; the light source device is provided with: a storage portion for storing the discharge lamp; a support portion for supporting the second electrode of the discharge lamp a cap member; a conveying part that conveys the discharge lamp in the storage part to the supporting part; and a connecting part that connects the member for transmitting electric power to the discharge lamp conveyed by the conveying part and supported by the supporting part the first cap member. The light source device according to claim 1, wherein the conveying part holds the first cap member and conveys the discharge lamp. The light source device of claim 1 or 2, wherein the support portion has a support member that supports the second cap member, and a fixing portion that fixes the second cap member to the support member; the connecting portion enables the transmission The member for electric power is connected to the first base member of the discharge lamp in which the second base member is fixed to the support member by the fixing portion. The light source device of claim 1 or 2, wherein the support portion has a support member for supporting the second base member, and the first base member for connecting the first base member to the discharge lamp to which the power transmitting member is connected. 2. The fixing part for fixing the lamp cap components. The light source device according to claim 1 or 2, comprising a drive unit that connects the power transmitting member to the connection portion of the first base member of the discharge lamp, and the second member that supports the discharge lamp The support portion of the cap member moves.

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