TW201903307A - Closing device, vacuum system with closing device and method for operating a closing device - Google Patents

Abstract

A closing device (100, 200), particularly for closing an opening of a vacuum chamber, is provided. The closing device includes: a flange (110) to be provided at a vacuum chamber and comprising an opening (112); a blocking device (120, 220) configured to close the opening (112); a first magnetic device (130) configured to generate a magnetic closing force between the flange (110) and the blocking device (120) for transferring at least a part of the blocking device from an open position (I) to a closed position (II); and a magnetic levitation system (150) configured to contactlessly transport the blocking device (120) along a guiding structure in a first direction (T) parallel to the flange (110), wherein the magnetic levitation system comprises a second magnetic device (160) configured to stabilize the blocking device (120) in a second direction (X) transverse to the first direction (T).

Description

Closing device, vacuum system with closing device, and method for operating a closing device

Several embodiments of the present disclosure relate to a closing device, and more particularly to a closing device for closing an opening between a first pressure region and a second pressure region using a vacuum seal. More specifically, a closing device for closing an opening in a vacuum chamber is described. Several embodiments are more related to a vacuum system including a vacuum chamber and a closing device. The closing device is used to close an opening of a vacuum chamber by a vacuum sealing method. Several embodiments are more related to a method of operating a closing device, and more particularly to a method of closing an opening in a vacuum chamber.

Lock valves, gate valves, gates, and other closing devices can be used to shut off the vacuum system relative to the atmospheric environment using a vacuum seal, or to separate several areas of the vacuum system with mutually different pressures. For example, a gate valve or another closing device can be used as a closable door of a vacuum chamber, or as a closable passage between two vacuum zones to transfer a substrate or Other objects are transferred into the vacuum chamber, transferred out of the vacuum chamber, or transferred between two vacuum regions of the vacuum chamber. In the closed position of the closing device, the two areas with different pressures are separated from each other by the blocking device. The blocking device is, for example, a lid of a closing device, a paddle, or a closing plate.

The closing device may include a flange, usually a stationary element, connected to the vacuum chamber or integrally formed with the wall of the vacuum chamber, wherein the flange is provided with an opening, and the flange wall surrounds the opening. The closing device may further include a movable blocking device such as a cover, which is assembled to close the opening of the flange by using a vacuum seal. In the closed position of the cover, the cover can be placed on the sealing surface of the flange, and the sealing surface of the flange surrounds the opening so that the opening is sealed. In the open position of the cover, an opening can be used to pass a component such as a substrate or a mask through the opening.

For example, for optical, electronic, or optoelectronic applications such as displays and / or organic light emitting diode (OLED) devices, substrate sizes have continued to increase. Therefore, it would be advantageous to provide a closing device with a large opening. The large openings are assembled to convey a large area substrate through the large openings in the open position. For example, the opening of the closing device may have an area of 0.5 m ² or more.

A related factor of the closing device is the deformation of the cover and the flange, for example, when the sealing surface of the flange is pressed in the closed state of the cover. The result of the deformation may be a non-uniform pressure between the cover and the flange, especially a non-uniform pressure on the sealing element. Therefore, a high closing force may be required. High closing forces may instead cause particles to be generated in the vacuum system, for example due to friction between the flange and the cover. The generation of particles may negatively affect the quality of the vacuum. Furthermore, the tiny particles in the vacuum deposition system may negatively affect the deposition results, as some particles may be attached to the substrate.

Similarly, during the closing movement of the cover, relative movement between the elastic sealing element and the cover may cause particles to be generated.

Therefore, it would be advantageous to provide a closing device for the vacuum chamber. The closing device is assembled to also reliably close large openings, while at the same time reducing particles generated by friction in the vacuum chamber.

In view of the above, a closing device, a vacuum system, and a method for operating a closing device are proposed.

According to an aspect of the present disclosure, a closing device is proposed. The closing device includes a flange disposed in a vacuum chamber and including an opening; a blocking device assembled to close the opening; a first magnetic device assembled to generate a magnetic closing force between the flange and the blocking device For transferring the blocking device or a part of the blocking device from an open position to a closed position; and a magnetic levitation system assembled to be non-contact along a guide structure in a first direction parallel to the flange The ground transmission blocking device, wherein the magnetic levitation system includes a second magnetic device, which is assembled to stabilize the blocking device in a second direction, and the second direction is transverse to the first direction.

In some embodiments, the flange with the opening may be integrally formed in a vacuum chamber or connected to the vacuum chamber. Therefore, the opening of the flange may be formed inside an opening of a vacuum chamber or an opening in an external wall.

According to other aspects of this disclosure, a vacuum system is proposed. The vacuum system includes a vacuum chamber; a flange disposed inside one of the vacuum chambers or an external wall and including an opening; a blocking device assembled to close the opening; a first magnetic device assembled to produce a A magnetic closing force between the flange and the blocking device for transmitting the blocking device or a part of the blocking device from an open position to a closed position; and a magnetic levitation system assembled to be parallel to one of the flanges first The blocking device is transmitted in a non-contact manner in a direction, wherein the magnetic levitation system includes a second magnetic device, which is assembled to stabilize the blocking device in a second direction, and the second direction is transverse to the first direction.

In some embodiments, the vacuum system may include at least one deposition source, such as a steam source, configured to deposit one or more layers on a substrate under sub-atmospheric conditions in the vacuum system.

According to other aspects of the present disclosure, a method for operating a shutdown device is proposed. The method includes contactlessly transmitting a blocking device to a flange in a first direction, wherein the flange is provided in a vacuum chamber and includes an opening; and a second magnetic device is used to magnetically in a second direction. A ground-stabilizing blocking device, the second direction is transverse to the first direction; and a first magnetic device is used to generate a magnetic closing force between the flange and the blocking device for transmitting the blocking device or a part of the blocking device from an open position In the closed position, the blocking device is sealed in the closed position to open the hole.

Other aspects, advantages, and features of this disclosure will become clearer through the description and accompanying drawings. In order to have a better understanding of the above and other aspects of the present invention, the following specific examples are described in detail below in conjunction with the accompanying drawings:

Detailed reference will now be made in several embodiments, one or more examples of which are shown in the drawings. The examples are provided by way of illustration and are not meant to be limiting. For example, features illustrated or described as part of one embodiment may be used in or combined with any other embodiment to obtain yet other embodiments. This means that this disclosure includes such adjustments and changes.

In the description below the drawings, the same reference numerals refer to the same or similar elements. Only the differences in the individual embodiments are described. Unless stated otherwise, the description of one part or aspect in one embodiment is also applied to the corresponding part or aspect in another embodiment.

FIG. 1A is a cross-sectional view of the closing device 100 according to the embodiment described in the open position (I). The blocking device 120 is disposed in front of the opening 112 of the flange 110 in the open position, but The opening 112 is not closed in a vacuum tight manner. FIG. 1B illustrates a cross-sectional view of the closing device 100 in FIG. 1A in the closed position (II). The blocking device 120 is in the closed position to close the opening 112 in a vacuum tight manner.

A "closing device" as used herein can be understood as a configuration that is assembled to open and close an opening between two areas. These two zones are maintained at different pressures, such as the internal space and environment of the vacuum chamber. The closing device is, for example, but not limited to, a gate valve, a lock valve, a gate lock, or a door. The door is, for example, a sliding door of a vacuum system.

A "blocking device" as used herein can be understood as a movable element which is used to close the opening in a vacuum tight manner. For example, the blocking device may be assembled or may include a movable plate, cover, or paddle.

The flange 110 may include a counterplate for blocking the device 120. In particular, the flange 110 may have a sealing surface surrounding the opening 112, wherein the blocking device 120 may be pulled toward the sealing surface of the flange 110 in the closed position (II) of the closing device. The sealing element is, for example, an elastic seal, which can act between the blocking device 120 and the flange 110 in the closed position (II).

For example, at least one sealing element may be disposed in the sealing surface of the flange 110, wherein the at least one sealing element may include a sealing ring surrounding the opening 112. When the blocking device 120 is moved toward the sealing surface of the flange, the at least one sealing element can be pressed against the surface of the blocking device 120 so that the opening 112 is sealed (see FIG. 1B). In some embodiments, at least one sealing element may be disposed in the sealing surface of the blocking device facing the sealing surface of the flange.

The flange 110 can be attached to a vacuum chamber (not shown in FIG. 1A), so that the openings of the flange 110 are provided in the outer wall or the inner wall of the vacuum chamber. In some embodiments, the flange 110 may be integrally formed with the vacuum chamber. For example, the flange may be a wall section of a vacuum chamber surrounding an opening in the chamber.

The closing device 100 includes a blocking device 120 that is movable relative to the flange 110. In particular, the blocking device 120 can be transferred between the open position (I) shown in FIG. 1A and the closed position (II) shown in FIG. 1B. The blocking device is sealed in the closed position in a vacuum-tight manner. hole. The movement of the blocking device from the open position to the closed position may be in a direction that is perpendicular to the flange, for example, the sealing surface perpendicular to the flange. More particularly, when the blocking device and the flange are oriented parallel to each other, the blocking device can be moved toward the sealing surface to a closed position. Therefore, the sealing element can be evenly pressed in one of the directions of the vertical flange, so that particles generated by the relative movement under the frictional contact between the flange and the blocking device can be reduced or avoided.

The blocking device 120 may be oriented vertically in nature. That is, the main orientation of the blocking device 120 may be an essentially vertical orientation, where "essentially vertical" may include an offset of +/- 20 ° from the axis of gravity. Therefore, the flange 110 may also be oriented vertically in nature. For example, the opening 112 may be an opening in a sidewall of the vacuum chamber. In other embodiments, the blocking device 120 and the flange 110 may be oriented substantially horizontally. For example, the opening 112 may be an opening in a top wall of the vacuum chamber.

The closing device 100 further includes a first magnetic device 130. The first magnetic device 130 is assembled to generate magnetic force between the flange 110 and the blocking device 120, and is used to transfer the blocking device 120 (or at least a part of the blocking device) from the open position in FIG. 1A to the closing of FIG. 1B. position. The magnetic force between the flange 110 and the blocking device 120 may be an attractive magnetic force, and the blocking device is pulled toward the sealing surface of the flange.

In some embodiments, the first magnetic device 130 includes one or more magnets, especially electromagnets, which can be disposed on the flange 110 so that the blocking device 120 can be pulled toward the sealing surface of the flange by a magnetic closing force. The magnetic closing force may be generated by one or more magnets. The direction of the magnetic closing force is indicated by the two left arrows in Figure 1B. In particular, the first magnetic device 130 may include several magnets. These magnets are arranged on the flange 110 and are dispersedly disposed around the opening. For example, four or more magnets may be respectively disposed on the flange and adjacent to the opening.

The first magnetic device 130 may be a controllable magnet device, which is assembled to generate a controllable magnetic closing force. For example, an actively controlled magnet device may be provided. In particular, the strength of the magnetic field generated by the first magnetic device may be variable depending on, for example, the distance between the blocking device and the flange and / or the pressure difference on both sides of the blocking device. In some embodiments, the first magnetic device 130 can be assembled to selectively generate an attractive or repulsive force between the blocking device and the flange, so that the blocking device can be selectively opened and closed by the first magnetic device 130. In other embodiments, the first magnetic device 130 can be assembled to provide only attraction between the blocking device and the flange for closing the blocking device.

The magnetic closing force can act in one of the directions that are essentially perpendicular to the flange, that is, perpendicular to the sealing surface of the flange. This direction is also referred to hereinafter as the second direction (X). In the open position (I) shown in FIG. 1A, the distance between the blocking device and the flange may be a small distance, for example, 1 cm or less, especially 5 mm or less. The first magnetic device 130 can be assembled for transferring the blocking device or at least a part of the blocking device from the open position to a distance of 1 cm or less, particularly 5 mm or less to the closed position. Uniform deformation of the sealing element that can act between the blocking device and the flange can be achieved, and particle generation can be reduced due to friction.

The second direction (X) is generally horizontal, and the flanges are generally oriented substantially vertically. However, it is also feasible to close the horizontally oriented flange with a blocking device that moves between an open position and a closed position in a substantially vertical direction.

The blocking device 120 may include a closing plate that is assembled to compress against the sealing surface of the flange. The closing plate may be made at least partially of a magnetic material, such as a ferrous metal, in particular steel. Furthermore, the closing plate may be rigid and stiff elements to reduce deformation of the blocking device in the closing position (II).

The closing device 100 further includes a magnetic levitation system 150 that is assembled to non-contactly convey the blocking device 120 along the guide structure in a first direction (T), the first direction (T) being parallel to the flange 110. The magnetic levitation system includes a second magnetic device 160 assembled to stabilize the blocking device 120 in a second direction (X), which is transverse to the first direction (T), and particularly perpendicular to the first direction (T). . The first direction (T) and the second direction (X) are generally horizontal in nature. However, other embodiments are possible.

Therefore, the blocking device 120 is movable in at least two directions: the blocking device can be transported away from the flange in a direction between the closed position (II) and the open position (I), that is, perpendicular to the flange, and The blocking device can be conveyed in a first direction substantially parallel to the flange by a magnetic levitation system in a non-contact manner. The transmission of the blocking device in the first direction (T) can be performed in a manner similar to a sliding door.

Figures 2A and 2B show front views of the closing device 100 of Figures 1A and 1B viewed from the right. In FIG. 2A, the blocking device 120 has been moved to the side by the magnetic suspension system 150 being conveyed in the first direction (T) relative to the flange 110. Therefore, the opening 112 of the flange 110 is no longer covered by the blocking device 120, so that the object can move through the opening 112 in a smooth manner. For example, an object such as a substrate or a mask can be loaded into the vacuum chamber or leave the vacuum chamber through the opening 112. The position shown in Figure 2A may thus also be referred to as the "loading position".

In FIG. 2B, the blocking device 120 is disposed in front of the opening 112 and blocks the opening. The position depicted in Figure 2B may thus be referred to as a "blocking position." 1A and 1B are sectional views showing the closing device 100 in the blocking position.

The guiding structure may include several tracks or rails for guiding the blocking device 120 in a non-contact manner in the first direction (T). The first direction (T) is a direction perpendicular to the paper surface of FIG. 1A and parallel to the paper surface of FIG. 2A. For example, the upper rail 182 may be disposed at least partially above the blocking device 120, and at least one side guide rail may be disposed on both sides of the blocking device. The at least one side guide rail is, for example, an upper side guide rail and a lower side guide rail. The second magnetic device 160 may be disposed along the at least one guide rail, and the third magnetic device may be disposed on the upper rail to support the blocking device. The upper rail 182 and / or the at least one side guide rail may have a length in the first direction (T), which is longer than the width of the opening 112 in the first direction (T), especially 50 cm, More especially 75 cm long. For example, the blocking device 120 may transmit a distance of 20 cm or more, especially 30 cm or more, along the guide structure in the first direction (T). In the position shown in Figure 2B, the opening 112 can be completely blocked.

The magnetic levitation system 150 is assembled to non-contactly support the blocking device to the guide structure, and to transfer the blocking device non-contact along the guide structure in a first direction (T), which is parallel to the first direction (T) Flange 110. For example, in FIG. 1A, the blocking device 120 is supported by the guide structure in a non-contact manner, for example, it is supported below the upper rail 182 and below between the side guide rails. Therefore, when the blocking device 120 is conveyed in the first direction (T), there is no mechanical contact between the blocking device and the guide structure and / or no mechanical contact with another stationary element of the vacuum chamber, so that the frictional contact due to the blocking device The resulting particles can be further reduced. The non-contact conveying system of the blocking device is particularly advantageous in the case where the blocking device is fitted close to a channel inside the vacuum system, and the channel is exemplified as a channel between two vacuum chambers.

The second magnetic device 160 can be assembled to stabilize the blocking device 120 in the second direction (X), and the second direction (X) can extend perpendicular to the first direction (T). That is, the second magnetic device 160 can be assembled to stabilize the blocking device 120 in a direction perpendicular to the transmission direction of the blocking device 120.

Using the second magnetic device 160 to stabilize the blocking device in a second direction (X) perpendicular to the conveying direction may provide several advantages. For example, the distance between the blocking device and the flange may be appropriately maintained during the transmission of the blocking device while providing non-contact transmission. Furthermore, by stabilizing the side of the blocking device, a parallel orientation of the blocking device relative to the sealing surface of the flange can be obtained and maintained. The non-contact magnetic side stabilization system of the blocking device is more advantageous because it can reduce particle generation and achieve high positioning accuracy.

In some embodiments, the second magnetic device 160 may be assembled to support the blocking device at a predetermined distance from the flange during transmission in the first direction (T). For example, the second magnetic device 160 may provide stability on both sides. That is, if the blocking device is easy to move away from the flange during the transfer, the second magnetic device may force the blocking device to return to the flange, and if the blocking device is easy to move during the transfer too close to the flange, the second magnetic device The device can force the blocking device away from the flange toward the equilibrium position shown in Figure 1A. The second magnetic device 160 can be assembled to act on the blocking device by magnetic force.

In some embodiments, the second magnetic device 160 includes a plurality of magnets, such as an electromagnet and / or a permanent magnet. Permanent magnets can be advantageous because no electricity is required. For example, the permanent magnet can act on the blocking device from two opposite sides to stabilize the blocking device along the guide structure during the transfer during the equilibrium position shown in FIG. 1A.

In some embodiments that can be combined with other implementations described herein, the second magnetic device 160 includes a passive magnetic stabilization device. A passive magnetic stabilization device can be understood as a magnetic device that is not actively controlled. For example, no output parameter is controlled based on the input parameters. The output parameter is, for example, a current, and the input parameter is, for example, a distance. Instead, the passive magnetic stabilization device can stably block the device at a predetermined distance without any feedback control.

In some embodiments, the second magnetic device 160 may include a permanent magnet 165 of the first group and a permanent magnet 166 of the second group. The first group of permanent magnets 165 is fixed to one side of the blocking device 120. The permanent magnets 166 of the second group are fixed to the guide structure, for example, fixed to the side guide portion of the guide structure. The first group of permanent magnets 165 on the blocking device may face the second group of permanent magnets 166 on the side guide portion to generate a repulsive force between the first group of permanent magnets 165 and the second group of permanent magnets 166 . In particular, the poles of the same polarity (north pole or south pole) of the permanent magnets of the first and second groups may face each other to generate a repulsive force.

In some embodiments, the guiding structure may include a first side guiding portion 168 and a second side guiding portion 169. The first side guide portion 168 is disposed on the first side of the blocking device 120, and the second side guide portion 169 is disposed on the second side of the blocking device. The second side is opposite to the first side, of which the second group The permanent magnet of the permanent magnet 166 is attracted to both the first side guide portion 168 and the second side guide portion 169. Furthermore, the permanent magnets of the first group of permanent magnets 165 can be attracted to two opposite sides of the blocking device 120. Therefore, the blocking device 120 can be forced into a balanced position between the first side guide portion 168 and the second side guide portion 169 by magnetic forces acting in opposite directions on both sides of the blocking device.

In FIG. 1A, a polar pole (for example, the South Pole) is shown with a horizontal hatching, and a polar pole of the opposite polarity (for example, the North Pole) is shown with a vertical hatching. As can be seen in Figure 1A, poles of the same polarity face each other on the first side of the blocking device, so that the blocking device is forced to leave the first side guide portion 168, and poles of the same polarity are on the second side of the blocking device. The side faces face each other, so that the blocking means is also forced to leave the second side guide portion 169. Therefore, the blocking device can be stabilized at the center position between the first and second side guide portions.

In some embodiments that can be combined with other embodiments described herein, the second magnetic device 160 may include a lower magnetic stabilization device 162 to stabilize the lower portion of the blocking device 120. For example, the bottom edge of the blocking device 120 may protrude into the U-shaped guide track 167 of the guide structure, as shown in FIG. 1A. The U-shaped guide track may include a first side guide portion 168 and a second side guide portion 169. The first side guide portion 168 has a permanent magnet on the first side of the blocking device. The second side guide portion 169 has a permanent magnet and is located on the second side of the blocking device. The permanent magnets arranged on both sides of the blocking device force the blocking device into a balanced position, which may correspond to a U-shaped guide track between the first side guide portion 168 and the second side guide portion 169 Central location between 167.

The upper magnetic stabilization device 161 may be alternatively or additionally provided to stabilize the upper portion of the blocking device 120 in the second direction (X). Similar to the lower magnetic stabilizer 162, the upper magnetic stabilizer 161 may include a first side guide portion 168 and a second side guide portion 169, wherein the blocking device 120 may be disposed on the first side guide portion 168 and the second Between the side guide portions 169, they can be forced to an equilibrium position by the magnetic force acting on the blocking device 120 from both sides.

By providing the upper and lower magnetic stabilization devices, the orientation of the blocking device 120 can be appropriately set accurately. For example, the vertical orientation of the blocking device can be ensured.

In some embodiments that can be combined with other embodiments described herein, the permanent magnets 165 of the first group and the permanent magnets 166 of the second group may be disposed on both sides of the blocking device 120 to produce a vertical upward direction. Magnetic effect. The magnetic effect can force the blocking device 120 upward, so that a part of the weight of the blocking device 120 can be carried by the second magnetic device 160. In short, the blocking device 120 is forced from both sides to a balanced position between the first side guide portion 168 and the second side guide portion 169 due to the vertical upward movement in the middle. On the contrary, the magnetic force is released.

The vertical force effect of the second magnetic device 160 can be increased by providing a first permanent magnet. The first permanent magnet is fixed to the blocking device 120 at a first height. The first height is different from the second height of the second permanent magnet fixed on the guide structure. For example, as shown in FIG. 1A, the first permanent magnet system fixed to the blocking device 120 is arranged slightly higher than the second permanent magnet fixed to the guide structure to obtain a magnetic force acting vertically.

In some embodiments, both the lower magnetic stabilization device 162 and the upper magnetic stabilization device 161 can provide a vertical force effect, as shown in FIG. 1A.

In some embodiments, the second magnetic device 160 can be assembled to generate a vertical magnetic force acting on the blocking device 120. The perpendicular magnetic force can carry 10% or more, especially 20% or more, more particularly 50% or more of the weight of the blocking device 120. For example, the permanent magnet of the second magnetic device 160 may be assembled to carry a weight of the blocking device 120 of 20 kg or more, especially 50 kg or more. It may be advantageous to provide a permanent magnet that carries at least a portion of the weight of the carrier blocking device, as there is no need to provide a power supply for the permanent magnet.

The magnetic closing force of the first magnetic device 130 can pull the blocking device 120 away from the equilibrium position shown in FIG. 1A and toward the flange 110 to the closed position shown in FIG. 1B.

In some embodiments that can be combined with other embodiments described herein, the second magnetic device 160 can be assembled to transfer the blocking device from the closed position (II) to the open position (I). In particular, the first magnetic device 130 may be assembled to generate a magnetic closing force to close the blocking device, and the second magnetic device 160 may be assembled to generate a magnetic force to open the blocking device. In order to transfer the blocking device 120 from the closed position (II) to the open position (I), the magnetic closing force of the first magnetic device 130 can be reduced or closed, so that the magnetic stabilization force of the second magnetic device 160 can move the blocking device away from the flange 110. And to the equilibrium position shown in Figure 1A. The equilibrium position corresponds to the open position (I).

Since the second magnetic device 160 may be a passive magnetic stabilization device including a permanent magnet, no additional power may be required to open the blocking device. For opening the blocking device, reducing or closing the magnetic closing device is sufficient.

In some embodiments that can be combined with other embodiments described herein, the magnetic levitation system 150 may include a third magnetic device 180 that is assembled to non-contactly support the blocking device to the guide structure. The third magnetic device 180 may be at least partially disposed above the blocking device 120 and may generate a perpendicular magnetic force. The vertical magnetic force can pull the blocking device 120 upward. In particular, the blocking device 120 may be suspended below the guide rail 182 above the guide structure via magnetic pulling force. The magnetic pulling force is generated by the third magnetic device 180.

The third magnetic device 180 may include several active magnetic bearings 184. For example, the coil of the active magnetic bearing 184 may be integrated into the blocking device 120 and / or the coil of the active magnetic bearing 184 may be integrated into a guiding structure, such as a track 182 above the guiding structure.

In the embodiment of FIGS. 1A and 1B, the active magnetic bearing 184 is integrated in the guide structure. The head part of the blocking device 120 disposed under the active magnetic bearing 184 can be pulled toward the active magnetic bearing 184. The third magnetic device 180 can carry at least a portion of the weight of the blocking device. As already explained above, other parts of the weight of the blocking device can be carried by the vertical magnetic effect generated by the second magnetic device 160. In other embodiments, the entire weight of the blocking device 120 can be carried by the third magnetic device 180.

Active magnetic bearing 184 can be understood as an actively controlled magnetic actuator. For example, the output parameters can be controlled based on the input parameters. The output parameter is, for example, the current supplied to the active magnetic bearing. The input parameter is distance, for example, the distance between the blocking device 120 and the guide structure. In particular, the distance between the upper rail 182 and the blocking device 120 can be measured by a distance sensor, and the magnetic field strength of the active magnetic bearing can be set according to the measured distance. The magnetic field strength may increase in the case where the distance is higher than a predetermined threshold, and the magnetic field strength may decrease in the case where the distance is lower than the threshold. Active magnetic bearings 184 can be controlled in closed loop or feedback control. The magnetic counterpart may be attached to the head member of the blocking device 120 and attracted by the active magnetic bearing 184 in the upper rail 182.

Therefore, the blocking device 120 can be favorably supported and conveyed in the guide structure in a non-contact floating state, because in a vacuum system, for example, particles that generate particles can be reduced or avoided.

In some embodiments, each active magnetic bearing 184 may include a magnetic actuator and a distance sensor. The distance sensor is used to measure the distance between the blocking device and the guide structure. The magnetic actuator may be based on the measured distance. Control, especially in control loops or feedback loops.

When the active magnetic bearing 184 acts in a very hard direction of the blocking device 120, especially in a substantially vertical direction, the oscillation of the blocking device 120 that may be excited by active control may be reduced. On the other hand, the blocking device may be more flexible in the second direction (X). However, when the second magnetic device 160 that provides side stabilization of the blocking device is assembled as a passive magnetic stabilization device, the oscillations excited in the side direction can be reduced or avoided. Therefore, accurate non-contact transmission of the blocking device becomes feasible without the risk of oscillating.

Several active magnetic bearings 184 may be disposed along the guide structure in the first direction (T), as shown in FIGS. 2A and 2B. For example, three, five, ten or more active magnetic bearings may be provided. In some embodiments, the distance between two adjacent active magnetic bearings may be smaller than the width dimension of the blocking device 120 in the first direction (T), so that at least two active magnetic bearings may be at any time during the transfer Engaged in the blocking device.

In some embodiments, the blocking device 120 is assembled as a closing plate and is suspended non-contactly below the upper rail 182 of the guide structure, wherein the active magnetic bearings 184 are attached to the upper rail 182. In particular, the blocking device 120 itself can be a pure passive element, that is, it can be a medium that can be transmitted without providing, for example, power to the blocking device 120. For example, as shown in FIG. 1A, the active components of the first magnetic device 130 and the third magnetic device 180 may be integrated in the flange 110 and the guide structure, respectively, and the blocking device 120 may include pure passive components. For example, it is the permanent magnet 165 of the first group. It is advantageous to provide a movable blocking device as a passive element, because it may not be necessary to provide a movable medium supply device for the blocking device, such as a drag chain.

The magnetic levitation system 150 can be assembled to transfer the entire blocking device from the open position (I) to the closed position (II). In particular, the blocking device 120 can form a monolithic or rigid component, such as a metal plate or a metal paddle, which can be transferred between the open position (I) and the closed position (II) as a whole, and can be magnetic The suspension system 150 is transported as a whole in the first direction (T).

In other embodiments, the blocking device 120 may include several components that are movable relative to each other, wherein the sub-assembly of the components may move between a part of the blocking device 120 between an open position and a closed position. Stay still during this time. By way of example, the blocking means may comprise a closing sheet, movably supported relative to the carrier. The carrier is, for example, a frame or a cart. The carrier and the closing plate can be transferred in the first direction (T) by the magnetic suspension system 150 in a combined manner, but the closing plate can be transferred in the second direction (X) by the first magnetic device 130 without transferring the carrier.

In some embodiments that can be combined with other embodiments described herein, the magnetic levitation system 150 may further include a driver 170 for moving the blocking device 120 along the guide structure in the first direction (T). The driver may be a linear motor and may drive the blocking device 120 non-contact along the driving structure. Other contactless drives may be provided additionally or alternatively.

FIG. 2A is a front view of the closing device 100 in FIG. 1A. The blocking device 120 has been conveyed to the left of the opening 112 relative to the flange 110 in a manner similar to a sliding door, so that the opening 112 is in the loading position. The object can be loaded through the opening 112 in the loading position. FIG. 2B illustrates the closing device 100 of FIG. 1A, wherein the closing device 100 is disposed in front of the opening 112 and covers the opening.

The magnetic levitation system is provided for the non-contact transmission blocking device 120 in the first direction (T). The magnetic levitation system includes a third magnetic device 180 and a second magnetic device 160. The second magnetic device 160 may include a passive magnetic stabilization device to stabilize the blocking device 120 in the second direction (X). The second magnetic device 160 may optionally include an upper magnetic stabilization device 161 and a lower magnetic stabilization device 162. The third magnetic device 180 can be assembled for actively stabilizing the vertical position of the blocking device 120. The third magnetic device may be disposed at least partially above the blocking device. The third magnetic device 180 can be assembled to carry at least a portion of the weight of the blocking device 120 and maintain a predetermined vertical position of the blocking device 120.

Furthermore, the driver 170 for driving the blocking device 120 in the first direction (T) is shown in FIGS. 2A and 2B. The driver 170 may be disposed on one side of the blocking device 120. Alternatively, the driver 170 may be disposed above and below the blocking device 120, for example, integrated in the upper track 182 or the bottom track of the guide structure.

FIG. 3A shows a front view of the closing device 200 in the closed position according to the embodiment described here, the blocking device 220 is closed in the closed position and the opening 112 of the flange 110 is sealed (drawn in dashed lines in FIG. 3A示). FIG. 3B shows a front view of the closing device 200 in FIG. 3A. The blocking device 220 has been transferred to the loading position in the previous view. Objects can be loaded through the opening 112 in the loading position.

FIG. 4 is a cross-sectional view of the closing device 200 in FIG. 3A. The upper part of the closing device 200 and the lower part of the closing device 200 are shown in an enlarged view.

The closing device 200 is similar to the closing device 100 in FIGS. 1A and 1B, so that reference can be made to the above description, and is not repeated here.

In particular, the blocking device 220 is assembled so as to be transmitted by the magnetic levitation system in the first direction (T) between the positions shown in Figs. 3A and 3B. The magnetic levitation system includes a second magnetic device 160 and a third magnetic device 180. The second magnetic device 160 is assembled to stabilize the blocking device 220 in a second direction (X), and the second direction (X) is transverse to the first direction (T). The third magnetic device 180 is fitted to support the blocking device. In some embodiments, the third magnetic device 180 is at least partially disposed above the blocking device 220, so that the blocking device can be non-contactly supported below the third magnetic device 180 by a magnetic supporting force. In some embodiments, the second magnetic device 160 is disposed on two opposite sides of the blocking device 220 to provide stabilization of the magnetic side of the blocking device in the second direction (X). The second direction (X) may be a horizontal direction perpendicular to the first direction (T).

The third magnetic device 180 can be assembled as an actively controlled device, especially an active magnetic bearing 184 controlled in a feedback loop, so that the predetermined vertical position of the blocking device 220 can be maintained.

The second magnetic device 160 can be assembled as a passive magnetic stabilization device, an active magnetic stabilization device, or a mixed active and passive magnetic stabilization device. For example, a passive magnetic stabilization device may be provided to stabilize the low part of the blocking device 220, and an active magnetic stabilization device may be provided to stabilize the head part of the blocking device 220 in the second direction (X), or vice versa. In other embodiments, a passive magnetic stabilization device may be provided to stabilize the low component of the blocking device 220, and other passive magnetic stabilization devices may be provided to stabilize the head component of the blocking device 220 in the second direction (X), similar to Example in Figure 1A.

In some embodiments, the active magnetic bearing 184 of the third magnetic device 180 may be integrated into the blocking device, particularly the head member 222 of the blocking device 220. The upper track 182 can be assembled as a pure passive track, such as a simple metal track, without a magnetic actuator for active control. In particular, the active element of the third magnetic device 180 may be integrated into the blocking device 220, particularly the head member 222 of the blocking device.

The medium supply device may be configured to provide a head member 222 for supplying a medium to the blocking device, such as power, a control signal, and / or a cooling fluid. The media supply device can be assembled as a brake chain.

In some embodiments, the blocking device can transmit a distance of 20 cm or more and 1 m or less in the first direction (T). With acceptable complexity due to the limited length of the transmission path, it may be feasible to provide a media supply device such as a brake chain. The medium supply device is used to supply the supply medium to the blocking device during the transfer.

In some embodiments, the active magnetic bearing 228 of the active magnetic side stabilization device may be integrated into the blocking device, particularly the head member 222 of the blocking device 220. For example, as shown in FIG. 4, the head member 222 of the blocking device may include an active magnetic bearing 184 of the third magnetic device and an active magnetic bearing 228 of the second magnetic device 160. The active magnetic bearing 184 of the third magnetic device provides a supporting force in a vertical direction. The active magnetic bearing 228 of the second magnetic device 160 provides active-side stability in the horizontal direction.

In some embodiments, the head member 222 of the blocking device 220 can be shaped so that the sensitivity of the head member 222 to the excited oscillation in more than one direction is reduced. For example, the head member may be a block-shaped metal element having a thickness of 5 cm or more, especially 10 cm or more, in at least two directions. The at least two directions are exemplified by a vertical direction and at least one side direction. For example, the cross-sectional shape of the head member 222 may be rectangular or substantially square, with a minimum thickness of 5 cm.

In particular, the position of the head member 222 can be actively stabilized in the vertical direction by the active magnetic bearing 184, and can be actively stabilized in the second direction (X) by the active magnetic bearing 228, where the thickness of the head member 222 is vertical. And the second direction may be 5 cm or more. With said active stabilization, the excitation of oscillations can be reduced.

In some embodiments, the driving electronics used to drive the blocking device in the first direction (T) may be integrated into the blocking device, particularly the head member 222 of the blocking device. The driving electronics are, for example, the driving electronics of the active magnetic bearing 184 and / or the driving electronics of the driver 170. The upper track 182 may be a passive element, such as a simple metal track.

In particular, as shown in FIG. 4, a linear actuator 170 may be provided to drive the blocking device 220 along the guide structure in the first direction (T). The coil unit of the driver 170 may be integrated in the head member 222, wherein the coil unit of the driver 170 may be guided in the magnet track of the upper track 182, in particular, wherein the magnet track includes a permanent magnet and is arranged along the first direction (T).

In some embodiments that can be combined with other embodiments described herein, the blocking device 220 may include a low member 221 and a head member 222. The lower part 221 and the head part 222 are movable relative to each other. The low member 221 may be disposed below the head member 222 and suspended from the head member 222 via a mechanical connector. For example, the head member 222 and the low member 221 may be connected via a flexible connecting member 225, such as a hinge connecting member. Therefore, the head member 222 can be vibrationally decoupled from the low member 221, so that the potential oscillation of the head member due to the active stabilization of the head member can reduce the effect on the low member.

The magnetic levitation system can be assembled to transport both the head member 222 and the low member 221 together in the first direction (T), as shown in Figures 3A and 3B. On the other hand, transferring the blocking device 220 from the open position (I) toward the flange 110 to the closed position (II) may include moving the low member 221 of the blocking device toward the flange 110 without moving the head member 222. For example, the head member may be held in place, and only the low member 221 may be attracted toward the flange 110 by the first magnetic device 130. The flexible connection 225 between the head member 222 and the lower member 221 may provide a transition toward the flanged lower member 221 between the open position (I) and the closed position (II).

The second magnetic device 160 shown in FIG. 4 may include a lower magnetic stabilization device 162, which may be similar to the lower magnetic stabilization device 162 in FIG. 1A, so that reference can be achieved through the above embodiments, and is not repeated here.

According to other embodiments described herein, the vacuum system 300 is provided. A vacuum system 300 according to several embodiments described herein is shown in FIG. 5. The vacuum system 300 includes a vacuum chamber 101 (partially shown), and in particular several vacuum chambers or vacuum modules that can be connected to each other. The closeable channel or the lock channel can be set between some vacuum chambers or between the vacuum chamber and the atmospheric environment. A closing device according to any of the embodiments described herein may be provided to close one or more of the aisles, transits, locks or other openings of the vacuum system. FIG. 5 illustrates a part of the wall of the vacuum chamber 101 of the exemplary vacuum system.

The deposition source, particularly one or more vapor sources, sputtering sources, and chemical vapor deposition (CVD) sources, may be disposed in at least one vacuum chamber of the vacuum system 300. The coated substrate may be transferred through a vacuum system, for example, between a vacuum chamber containing a deposition source and an adjacent vacuum chamber. By providing a vacuum system with one or more closing devices according to the embodiments described herein, particle generation in the vacuum system can be reduced, and deposition results can be improved.

The flange 110 having the opening 112 is disposed on an inner wall or an outer wall of the vacuum chamber 101. The flange 110 may be fixed to the vacuum chamber. Moreover, a blocking device 120 such as a cover or a paddle is provided to close the opening 112. The blocking device 120 can be transmitted by the first magnetic device 130 between the open position and the closed position shown in FIG. 5. The blocking means seals the opening in the closed position. The first magnetic device 130 is assembled to generate a magnetic closing force between the flange 110 and the blocking device 120 to transfer the blocking device or a part of the blocking device from the open position to the closed position. Furthermore, a magnetic levitation system 150 is installed in a non-contact transmission blocking device 120 in a first direction (T) parallel to the flange 110, wherein the first direction (T) may be perpendicular to the paper surface of FIG. 5 Direction. The magnetic levitation system includes a second magnetic device 160 assembled to stabilize the blocking device in a second direction (X) during transmission by the magnetic levitation system. The second direction (X) is transverse to the first direction (T).

The closing device of the embodiment shown in FIG. 5 may include some or all of the features of the closing device 100 of FIG. 1A and / or the closing device 200 of FIG. 3A, so that reference can be made to the above description without repeating it.

FIG. 5 illustrates the first magnetic device 130 and the flange 110 in more detail. The flange 110 may include a sealing surface 114, wherein an elastic sealing element 115 may be disposed in the sealing surface 114. For example, the elastic sealing element 115 may be a sealing ring provided in a groove formed in the sealing surface 114. In the closed position, the blocking device 120 presses the elastic sealing element 115, and the elastic sealing element 115 can surround the opening 112.

The sealing surface 114 may be substantially planar. In the open position, the substantially flat reverse side of the blocking device 120 may be disposed at a short distance from one of the sealing surfaces 114. The second direction (X) may be substantially perpendicular to the sealing surface 114. It is also possible to provide an elastic sealing element in the opposite side of the blocking device 120.

The magnetic closing force generated by the magnets 131 of the first magnetic device 130 may act in the second direction (X), that is, perpendicular to the sealing surface 114. The blocking device 120 may include a magnetic counterpart 132 that may be pulled toward the flange 110 by a magnetic closing force. The magnetic counterpart 132 is, for example, an iron or steel portion or a permanent magnet portion. Alternatively, the entire closing plate of the blocking device 120 may be made of a magnetic material such as steel. Such magnets 131 may include electromagnets, particularly coils. By adjusting the current flowing through the coil, the magnetic closing force can be appropriately applied, that is, based on the measured pressure difference or based on the measured distance.

In some embodiments, the first magnetic device 130 includes a distance sensor 135 for measuring the distance between the flange 110 and the blocking device 120. Therefore, the magnetic closing force can be controlled according to the distance measured by the distance sensor 135. The distance between the sealing surface 114 of the flange 110 and the blocking device 120 in the closed position can be accurately controlled, for example during venting of the vacuum chamber, for example to avoid the flange and the blocking device in the closed position Direct metal contact.

One or more control loops 136 coupled to the magnets 131 and one or more distance sensors may be provided. The control loop 136 may include a setpoint generator 137 connected to the distance sensor 135. The setpoint generator 137 compares the measured distance value with a preset distance setpoint. The preset distance setpoint can be set by the central controller. Individual comparison signals can be provided to the controller 139, and the controller 139 generates control signals to the magnets 131 via the amplifier 138. The enlarged control signal is set so that the predetermined distance between the blocking device 120 and the flange 110 can be maintained by the magnetic closing force generated by the magnets 131. The electronic components of the control loop 136 can be assembled into an integrated circuit, for example, provided on a single board. The space requirement of the first magnetic device 130 can be reduced.

Several control loops 136 can be set, so that the distance between the blocking device 120 and the flange 110 can be accurately set at several positions around the opening 112. Particle generation can be reduced, and uniform pressing of the elastic sealing element 115 can be achieved.

In some embodiments, the magnets 131 provided as electromagnets on the flange may be assembled to generate a variable attractive force between the blocking device 120 and the flange 110. The repulsive force between the blocking device 120 and the flange 110 may be a magnetic stabilizing force generated by the second magnetic device 160. The second magnetic device 160 may be a passive magnetic stabilizing device, including a permanent magnet, configured to slide along each side of the first direction (T). The permanent magnet of the second magnetic device 160 can force the blocking device into an equilibrium position from two opposite sides. The equilibrium position is shown in FIG. 5. The second magnetic device 160 may include an upper magnetic stabilization device 161 and a lower magnetic stabilization device 162, which are assembled to force the blocking device into an equilibrium position.

FIG. 6 shows a flowchart of a method of operating a shutdown device according to the embodiments described herein.

In block 610, the blocking device 120 is conveyed non-contact in a first direction (T), the first direction (T) is parallel to the flange 110, wherein the flange is disposed in the vacuum chamber and includes an opening. During transmission, the blocking device 120 is magnetically stabilized in the second direction (X) by the second magnetic device 160, the second direction (X) is transverse to the first direction (T), especially perpendicular to the first direction (T ). During transfer, the blocking device may have a substantially vertical orientation.

The blocking device 120 can be transferred from the loading position to the blocking position in a manner similar to a sliding door. The blocking device 120 is in the loading position and does not block the opening. The blocking device is arranged in the blocking position in front of the opening at a short distance from the sealing surface of the flange. In the loading position, objects such as substrates can be loaded through openings. In the blocking position, the blocking device may be in a certain orientation parallel to the orientation of the flange, especially at a short distance in front of the opening in the vertical orientation. Examples of close distances are 1 cm or less.

In block 620, the magnetic closing force is generated between the flange 110 and the blocking device 120 using the first magnetic device 130 to transfer the blocking device or a portion of the blocking device from the open position (I) to the closed position (II). ). The blocking means is sealed in the closed position (II) to the opening.

In particular, when the blocking device 120 has been transferred to the blocking position in front of the opening, the first magnetic device 130 may be activated, so that the blocking device is pulled toward the sealing surface of the flange to seal the opening with a vacuum tight manner.

In the selected block 630, the closing device is opened by transmitting the blocking device from the closed position (II) to the open position (I). The blocking device 120 can transmit the magnetic stabilizing force generated by the second magnetic device 160 to the open position.

In particular, by reducing or closing the magnetic closing force of the first magnetic device 130, the blocking device 120 can be brought from the closed position to the open position, so that the magnetic stabilizing force of the second magnetic device 160 can be perpendicular to one of the flanges. Move the blocking device to the equilibrium position. The blocking device is supported by the second magnetic device 160 in the balanced position.

Then, optionally, the blocking device 120 may be non-contactly transferred to the loading position in the first direction (T) by the magnetic levitation system. The first direction (T) is parallel to the flange. The object can pass through the opening in the loading position.

The second magnetic device 160 may be a passive magnetic stabilization device or may include a passive magnetic stabilization device. Passive magnetic stabilization devices may not require active control and / or power.

Therefore, magnetic gate valves are provided in accordance with several embodiments described herein. The movement of the blocking device of the valve in both the first direction (T) and the second direction (X) can be completely non-contact and thus frictionless. The only contact of the blocking device with the stationary structure may be in contact with the flange in the closed position, in particular with the elastic sealing element of the flange.

In some embodiments, the blocking device may have a height of 1 m or more, especially 1.5 m or more in the vertical direction. In some embodiments, the blocking device may have a width of 30 cm or more, especially 40 cm or more in the first direction (T). The opening of the flange may have a cross-sectional area of 0.5 m² or more, especially 1 m² or more.

The blocking device 120 may include a closing sheet made at least partially of metal. The closing plate may be made at least partially of aluminum to reduce the weight of the closing plate. The closing plate may include iron as a magnetic material, and in particular steel as a magnetic material. Magnetic materials interact with one or more magnetic devices. For example, the blocking device may be an aluminum plate with a steel portion to interact with the first magnetic device 130, the second magnetic device 160, the third magnetic device 180, and / or the driver 170.

Especially when the second magnetic device 160 includes a passive magnetic guide based on a permanent magnet, the second magnetic device 160 can be used for one or more of the following purposes: (i) stabilization in the middle side of the second direction perpendicular to the conveying direction Blocking device; (ii) reducing the oscillation of the excitation blocking device in a direction, the blocking device having a lot of potential characteristic frequencies in this direction (eigenfrequencies); (iii) partly by generating a magnetic effect in the vertical direction Compensate the weight of the blocking device; (iv) use the magnetic stabilization force generated by the second magnetic device to open the blocking device.

The linear actuator may be provided for driving the blocking device in a sliding motion along the guide structure in the first direction (T). The linear driver may include a driving coil and a permanent magnet. The driving coil is attached to the guide structure. The permanent magnet follows the blocking device.

In summary, although the present invention has been disclosed as above with the embodiments, it is not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention pertains can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the scope of the attached patent application.

100, 200‧‧‧ Close device

101‧‧‧vacuum chamber

110‧‧‧ flange

112‧‧‧ opening

114‧‧‧Seal surface

115‧‧‧ Elastic sealing element

120, 220‧‧‧ blocking device

130‧‧‧The first magnetic device

131‧‧‧magnet

132‧‧‧ Magnetic counterpart

135‧‧‧Distance sensor

136‧‧‧Control loop

137‧‧‧Setpoint generator

138‧‧‧amplifier

139‧‧‧controller

150‧‧‧ Magnetic Levitation System

160‧‧‧Second magnetic device

161‧‧‧ Upper magnetic stabilizer

162‧‧‧ Lower magnetic stabilizer

165‧‧‧Group 1 permanent magnet

166‧‧‧ Permanent magnets of the second group

167‧‧‧U-shaped guide track

168‧‧‧First side guide

169‧‧‧Second side guide

170‧‧‧Driver

180‧‧‧ third magnetic device

182‧‧‧ on track

184, 228‧‧‧ Active Magnetic Bearing

221‧‧‧low parts

222‧‧‧Headpiece

225‧‧‧ Flexible connector

300‧‧‧vacuum system

610, 620, 630 ‧‧‧ blocks

T‧‧‧First direction

X‧‧‧ second direction

I‧‧‧ open position

II‧‧‧Closed position

In order to make the above-mentioned features of this disclosure more understandable, a more specific description, briefly summarized above, may refer to several embodiments. The attached drawings relate to several embodiments of the disclosure and are described below. Exemplary embodiments are shown in the drawings and described in detail below. Figure 1A shows a sectional view of the closing device according to some embodiments described herein in the open position (I); Figure 1B shows a sectional view of the closing device of Figure 1A in the closed position (II) The blocking device is the opening of the sealing flange in the closed position; Figure 2A shows a front view of the closing device of Figure 1A, where the blocking device has been transferred to a position far from the hole; Figure 2B shows Figure 1A A front view of the closing device, wherein the blocking device is arranged before the opening; FIG. 3A shows a front view of the closing device according to some embodiments described herein in the closed position (II); FIG. 3B shows Fig. 3A shows the front view of the closing device, in which the closing device has been transferred away from the opening; Fig. 4 shows the sectional view of the closing device in Fig. 3A, in which the upper part and the lower part are additionally drawn to enlarge FIG. 5 is a cross-sectional view of a closing device according to some embodiments described herein; and FIG. 6 is a flowchart of a method of operating a closing device according to embodiments described herein.

Claims (19)

A closing device (100, 200), comprising: a flange (110) provided in a vacuum chamber (101) and including an opening (112); a blocking device (120, 220) assembled to close the opening A hole (112); a first magnetic device (130) assembled to generate a magnetic closing force between the flange (110) and the blocking device (120) for transmitting the blocking from an open position (I) The device or part of the blocking device to a closed position (II); and a magnetic levitation system (150), assembled to run along a guide in a first direction (T) parallel to the flange (110) A lead structure transmits the blocking device (120) in a non-contact manner, wherein the magnetic levitation system includes a second magnetic device (160) assembled to stabilize the blocking device (120) in a second direction (X), and the second The direction (X) is transverse to the first direction (T). The closing device according to item 1 of the patent application scope, wherein the second magnetic device (160) includes a passive magnetic stabilization device. The closing device according to item 1 of the patent application scope, wherein the second magnetic device (160) includes a first group of permanent magnets (165) and a second group of permanent magnets (166). A permanent magnet is fixed on at least one side of the blocking device (120), and the second group of permanent magnets is fixed on the guide structure. The closing device according to item 1 of the scope of patent application, wherein the second magnetic device (160) includes at least one of an upper magnetic stabilization device (161) and a lower magnetic stabilization device (162), and the upper magnetic stabilization device is used for To stabilize an upper portion of the blocking device, the lower magnetic stabilization device is used to stabilize a lower portion of the blocking device. The closing device according to item 1 of the patent application scope, wherein the second magnetic device (160) is assembled to transfer the blocking device from the closing position (II) to the opening position (I). The closing device according to any one of claims 1 to 5, wherein the magnetic levitation system (150) further includes a third magnetic device (180), which is equipped to support the blocking device non-contactly to the guide. The indexing structure includes a plurality of active magnetic bearings (184). The closing device according to item 6 of the patent application scope, wherein the third magnetic device (180) includes a magnetic actuator and a distance sensor, and the distance sensor is used to measure the blocking device (120) and the A distance between the guide structures, wherein the magnetic actuator is controlled by a control loop. The closing device according to item 6 of the patent application scope, wherein the blocking device (120) is assembled to be suspended below one of the upper rails (182) of the guide structure, wherein the active magnetic bearings (184) are attached Attached to the upper rail (182). The closing device according to item 6 of the patent application scope, wherein the active magnetic bearings (184) are integrated in the blocking device (220). The closing device according to item 9 of the patent application scope, wherein the active magnetic bearings (184) are integrated in a head part (222) of the blocking device. The closing device according to any one of claims 1 to 5, wherein the magnetic levitation system further includes a driver (170) for moving along the guide structure in the first direction (T). The blocking device (120). The closing device according to item 11 of the patent application scope, wherein the driver (170) is a linear motor. The closing device according to any one of claims 1 to 5, wherein the first magnetic device (130) is assembled to transfer the entire blocking device (120) from the opening position (I) to the closing Location (II). The closing device according to item 13 of the patent application scope, wherein the blocking device (120) forms a rigid component. The closing device according to any one of claims 1 to 5, wherein the blocking device (220) includes a low part (221) and a head part (222), the low part and the head part being opposite to each other Movable, wherein transferring the blocking device (220) from the open position (I) to the closed position (II) includes moving the low part (221) toward the flange (110) without moving the head part (222) . The closing device according to item 15 of the scope of patent application, wherein the low part (221) and the head part (222) are movable relative to each other via a flexible connecting member (225). A vacuum system includes: a vacuum chamber (101); a flange (110) disposed inside one or an external wall of the vacuum chamber (101) and including an opening (112); a blocking device ( 120), assembled to close the opening; a first magnetic device (130), assembled to generate a magnetic closing force between the flange (110) and the blocking device (120), from an open position ( I) conveying the blocking device or a part of the blocking device to a closed position (II); and a magnetic levitation system (150) assembled in a first direction (T) parallel to the flange (110) The non-contact transmission of the blocking device (120), wherein the magnetic levitation system includes a second magnetic device (160), assembled to stabilize the blocking device in a second direction (X), the second direction (X) Transverse to the first direction (T). A method of operating a closing device (100, 200), comprising: non-contact transferring a blocking device (120) to a flange (110) in a first direction (T), wherein the flange is provided in a A vacuum chamber (101) and including an opening (112); a second magnetic device (160) is used to magnetically stabilize the blocking device (120) in a second direction (X), the second direction (X) Transverse to the first direction (T); and using a first magnetic device (130) to generate a magnetic closing force between the flange (110) and the blocking device (120), for use from an open position (I ) Transfer the blocking device or a part of the blocking device to a closed position (II), and the blocking device seals the opening in the closed position (II). The method according to item 18 of the scope of patent application, further comprising: using a magnetic force to transmit the blocking device from the closed position (II) to the open position (I), the magnetic force is generated by the second magnetic device (160) .