TW201843011A - Flange mechanism - Google Patents

Abstract

The present invention provides a flange mechanism to prevent cutting scraps from entering therein from a slight gap between a mounting hole of the fixed flange and a boss part of a mounter. According to the present invention, the flange mechanism comprises: the mounter fixed to the front end of a spindle supported to a spindle housing to be able to rotate so as to support an annular cutting blade; and a fixing flange to fix the cutting blade to the mounter. The mounter comprises: the cylindrical boss part to support the inner circumference of the cutting blade; a support flange part protruding to the outside in a diameter direction from the rear side of the cylindrical boss part to have a first support surface formed on the front surface side of an outer edge to support the cutting blade; and a cylindrical part integrally formed with the support flange part on the rear side of the support flange part and having an annual groove formed on an outer circumference. The support flange part includes a plurality of suction ports formed on a side facing the fixed flange, and the flange and cylindrical parts of the mounter have a plurality of suction paths communicating with the suction port and the annular groove. The fixed flange comprises: a flange part having a second support surface formed on the outer edge to hold the cutting blade with the first support surface of the support flange part; and a cap part to cover the boss part of the mounter integrally formed with the flange part.

Description

Flange mechanism

FIELD OF THE INVENTION The present invention relates to a flange mechanism for fixing a cutting blade to a front end of a main shaft.

BACKGROUND OF THE INVENTION A cutting device capable of precisely cutting a plate-shaped workpiece such as a semiconductor wafer, a package substrate, a ceramic substrate, or a glass substrate using a cutter is known. In a cutting device, a cutting tool having a mounting hole formed in the center is supported by a flange mechanism and fixed to a main shaft.

The flange mechanism is composed of a receiving flange portion (rear flange) fixed to the mounting seat of the main shaft, a fixing flange (front flange) provided with an installation hole into which the projection portion of the mounting seat can be inserted, and a fixing protrusion It is composed of a nut fixed to the mounting base, and the fixing flange and the nut must be detached when the cutter is replaced, which is a labor-intensive operation (see, for example, Japanese Patent Laid-Open No. 10-000555).

Therefore, in Japanese Patent Laid-Open Publication No. 2015-23222, a vacuum has been proposed to attract the fixed flange toward the mounting base, and the receiving flange portion and the fixed flange of the mounting base are used to hold and fix the cutting tool without the need of Flange mechanism of nut. Prior Art Literature Patent Literature

Patent Document 1: Japanese Patent Laid-Open No. 10-000555 Patent Document 2: Japanese Patent Laid-Open No. 2015-23222

SUMMARY OF THE INVENTION Although the problem to be solved by the invention can significantly reduce the number of man-hours required to replace a cutter by the flange mechanism disclosed in Patent Document 2, the following problems remain because the fixing flange is fixed by a vacuum. : The ambient gas containing cutting chips during the cutting process is attracted to the inside of the flange mechanism from a slight gap between the inner diameter of the fixed flange and the outer periphery of the boss portion, causing the chips to adhere to the inside of the flange mechanism. Or on the support surface (end face).

The present invention has been made in view of this point, and an object thereof is to provide a flange mechanism that can prevent chips from entering a protrusion from a slight gap between an installation hole of a fixed flange and a boss portion of a mount. The edge of the body. Means to solve the problem

According to the present invention, it is possible to provide a flange mechanism including a mounting base which is fixed to a front end of a main shaft rotatably supported by a main shaft housing and a fixing flange which supports a ring-shaped cutting tool. The flange is used to fix the cutter to the mounting seat. The flange mechanism is characterized in that: the mounting seat includes: a cylindrical boss portion supporting the inner periphery of the cutter; the flange portion is received from the The rear portion of the cylindrical boss portion protrudes outward in the radial direction, and has a first support surface supporting the cutting blade on the front surface side of the outer peripheral edge; and a cylindrical portion is connected to the receiving portion behind the receiving flange portion. The flange portion is integrally formed and has an annular groove on the outer periphery. The receiving flange portion has a plurality of suction openings on the side facing the fixed flange, and the receiving flange portion and the cylindrical portion of the mounting seat. A plurality of suction paths are formed on the suction port and the annular groove, and the fixed flange includes: a flange portion having, on an outer peripheral edge, the cutting portion to be clamped together with the first support surface of the receiving flange portion. The second support surface of the knife; and the cap portion, The flange portion is integrally formed and covers the convex portion of the mounting seat, and a negative pressure from a suction source is applied to the annular groove through a rotary joint fixed to the spindle housing, thereby using the suction port to The fixed flange is attracted toward the mounting base, and the cutting tool is clamped and fixed by the first supporting surface of the mounting base and the second supporting surface of the fixed flange. Invention effect

According to the flange mechanism of the present invention, since the mounting seat side is covered with the cap portion of the fixed flange, it is possible to prevent chips from passing through the mounting hole in the center of the fixed flange from the convex portion and the mounting hole of the mounting seat. When the gap invades the inside of the flange mechanism.

In addition, it has the convenience that the front end of the convex portion of the mounting base is fitted into the circular concave portion of the fixing flange, so that when the cutter is attached or detached, the fixing flange can be temporarily retained even when the fixing flange is not vacuumed Position the fixing flange temporarily on the mount.

Embodiments for Carrying Out the Invention Embodiments of the present invention will be described in detail below with reference to the drawings. Referring to FIG. 1, there is shown a perspective view of a cutting device including a flange mechanism according to an embodiment of the present invention. The flange mechanism is used in a cutting unit of a cutting device to fix a cutting blade to the front end of a main shaft.

As shown in FIG. 1, the cutting device 2 includes a device base 4 that supports each component. A rectangular opening 4a is formed on the upper surface of the device base 4 in the X-axis direction (processing feed direction).

An X-axis moving stage 6, an X-axis moving mechanism (not shown) that moves the X-axis moving stage 6 in the X-axis direction, and a dustproof and drip-proof cover 8 covering the X-axis moving mechanism are provided in the opening 4 a. . This X-axis moving mechanism includes a pair of X-axis guides (not shown) parallel to the X-axis direction, and an X-axis moving table 6 is slidably mounted on the X-axis guide.

A nut portion (not shown) is provided on the lower surface side of the X-axis moving stage 6, and an X-axis ball screw (not shown) parallel to the X-axis guide is screwed into the nut portion. An X-axis pulse motor (not shown) is connected to one end of the X-axis ball screw. When the X-axis ball screw is rotated by the X-axis pulse motor, the moving stage 6 moves along the X-axis guide in the X-axis direction.

The X-axis moving table 6 is provided with a work clamp table 10 for attracting and holding a workpiece. The work table 10 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis direction (vertical direction). The work table 10 is processed and fed in the X-axis direction by using the X-axis moving mechanism described above.

The front surface (upper surface) of the work chuck 10 is a holding surface 10a which attracts and holds a workpiece. This holding surface 10 a is connected to a suction source (not shown) through a flow path (not shown) formed inside the work clamp 10. Around the work clamp table 10, a jig 10 b for fixing an object to be processed is provided.

The object to be processed is, for example, a semiconductor wafer, and is attached to an adhesive tape held on the ring frame, and can be handled integrally with the ring frame. When a to-be-processed object is handled using a ring frame and an adhesive tape, the to-be-processed object can be protected from the shock etc. which arise at the time of conveyance. In addition, when the tape is expanded, the workpiece to be cut can be divided or the interval between the divided wafers can be widened. In addition, instead of using the ring frame and the tape, the workpiece may be cut and processed in a single method.

On the front corner of the device base 4 remote from the opening 4a, a protruding portion 12 protruding from the device base 4 to the side is provided. A space is formed inside the protruding portion 12, and a cassette lifter 16 is provided in the space. On the upper surface of the cassette elevator 16, a cassette 18 capable of accommodating a plurality of workpieces is placed.

A transfer unit (not shown) is provided at a position close to the opening 4 a to transfer the object to be processed to the work table 10. The workpiece to be pulled out from the cassette 18 by the transfer unit is placed on the holding surface 10 a of the work clamp table 10.

On the upper surface of the device base 4, a support structure 20 for supporting the cutting unit 14 for cutting a workpiece is arranged so as to protrude above the opening 4a. A cutting unit moving mechanism 22 that moves the cutting unit 14 in the Y-axis direction (index feeding direction) and the Z-axis direction is provided on the upper portion of the front surface of the support structure 20.

The cutting unit moving mechanism 22 is provided with a pair of Y-axis guides 24 arranged on the front surface of the support structure 20 and parallel to the Y-axis direction. A Y-axis moving plate 26 constituting the cutting unit moving mechanism 22 is slidably mounted on the Y-axis guide 24. A nut portion (not shown) is provided on the back side (rear surface side) of the Y-axis moving plate 26, and a Y-axis ball screw 28 parallel to the Y-axis guide 24 is screwed into the nut portion.

A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 28. When the Y-axis ball screw 28 is rotated by the Y-axis pulse motor, the Y-axis moving plate 26 moves along the Y-axis guide 24 in the Y-axis direction. A pair of Z-axis guides 30 are provided on the front surface (front surface) of the Y-axis moving plate 26 in parallel to the Z-axis direction. A Z-axis moving plate 32 is slidably mounted on the Z-axis guide 30.

A nut portion (not shown) is provided on the back side (rear surface side) of the Z-axis moving plate 32, and a Z-axis ball screw 34 parallel to the Z-axis guide 30 is screwed into the nut portion. A Z-axis pulse motor 36 is connected to one end portion of the Z-axis ball ball screw 34. When the Z-axis ball screw 34 is rotated by the Z-axis pulse motor 36, the Z-axis moving plate 32 moves in the Z-axis direction along the Z-axis guide 30.

A cutting unit 14 and an imaging unit 38 for processing a workpiece are fixed to a lower portion of the Z-axis moving plate 32. As long as the Y-axis moving plate 26 is moved in the Y-axis direction by the cutting unit moving mechanism 22, the cutting unit 14 and the imaging unit 38 can be fed in steps, and as long as the Z-axis moving plate 32 is moved in the Z-axis direction, The cutting unit 14 and the camera unit 38 are raised and lowered.

Reference numeral 40 denotes a cleaning unit, and the workpiece which has been subjected to cutting processing by the cutting unit 14 is transferred from the work bench 10 to the cleaning unit 40 by a transfer mechanism (not shown). The cleaning unit 40 includes a rotary table 42 that sucks and holds a workpiece in a cylindrical cleaning space. A rotary drive source such as a motor that rotates the rotary table 42 at a predetermined speed is connected to a lower portion of the rotary table 42.

Above the turntable 42, a spray nozzle 44 for spraying a cleaning fluid (typically, a two-fluid mixture of water and air) toward a workpiece is provided. When the cleaning fluid is sprayed from the spray nozzle 44 while the rotary table 42 holding the workpiece is rotated, the workpiece after the cutting process can be washed. The processed object washed by the washing unit 40 is stored in the cassette 18 by a transport mechanism (not shown).

Next, a flange structure according to an embodiment of the present invention will be described in detail with reference to FIGS. 2 and 3. Referring to FIG. 2, an exploded perspective view of a cutting unit 14 including a flange mechanism according to an embodiment of the present invention is shown. 3 is a cross-sectional view of a state where an annular cutting blade is fixed to a main shaft by a flange mechanism.

As shown in FIG. 2, a plurality of (in the present embodiment, four) screw holes 46 b are formed on the front end surface 46 a of the spindle housing 46 in which the spindle 48 is rotatably accommodated. The front end portion of the main shaft 48 protruding from the front end surface 46 a of the main shaft case 46 is formed in a push-out shape, and a screw hole 48 a is formed in the front end portion.

A rotary joint 50 is fixed to a front end surface 46 a of the main shaft case 46. The rotary joint 50 includes a cylindrical boss portion 50 a and a flange portion 50 b formed integrally with the outer periphery of the cylindrical boss portion 50 a.

A receiving hole 50c is formed inside the cylindrical boss portion 50a. The rotary joint 50 has a pipe piece 50d that communicates with one end to the receiving hole 50c, and the other end side of the pipe piece 50d is selectively connected to the suction source 70 through the electromagnetic switching valve 68 as shown in FIG.

The flange portion 50 b of the rotary joint 50 is formed with mounting holes 50 e corresponding to a plurality of screw holes 46 b that have been formed in the front end surface 46 a of the main shaft housing 46. The rotary joint 50 can be fixed to the front end surface 46a of the main shaft case 46 by inserting screws into these mounting holes 50e and screwing together the screw holes 46b formed in the front end surface 46a of the main shaft case 46.

52 is a mounting seat and includes a cylindrical boss portion 54, a receiving flange portion 56, and a cylindrical portion 58. The receiving flange portion 56 protrudes outward from the rear of the boss portion 54 in the radial direction, and A cylindrical first support surface 56 a is provided on the front surface side of the outer peripheral edge to support the cutter, and the cylindrical portion 58 is formed integrally with the receiving flange portion 56 behind the receiving flange portion 56.

A stepped mounting hole 60 is formed to cover the cylindrical boss portion 54, the receiving flange portion 56, and the cylindrical portion 58 of the mounting seat 52. The mounting hole 60 is formed in a push-out shape that fits into the push-out spindle 48 in the cylindrical portion 58.

A plurality of suction openings 64 are formed in the annular convex portion 56b of the receiving flange portion 56 of the mounting base 52 at predetermined intervals in the circumferential direction. Further, an annular groove 58a and a plurality of suction holes 58b communicating with the annular groove 58a are formed in the cylindrical portion 58 of the mounting seat 52. The plurality of suction holes 58b are defined in the circumferential direction with a predetermined interval therebetween. Formed at intervals.

As shown in FIG. 3, each suction port 64 is connected to a suction hole 58 b opened in the annular groove 58 a through a suction path 66 formed to substantially cross the mounting seat. The annular groove 58 a is selectively connected to the suction source 70 through the pipe 50 d and the electromagnetic switching valve 68.

The mounting hole 60 of the mounting base 52 is mounted on the main shaft 48 in the push-pull shape, and the screw 78 is screwed and locked to the screw hole 48 a formed at the front end of the main shaft 48 through the washer 76, as shown in FIG. 3. As shown, the mount 52 is fixed to the main shaft 48.

When a ring-shaped cutting tool 72 called a washer-type insert having a mounting hole 74 is mounted on the mounting base 52, as shown in FIG. 3, the mounting hole 74 of the cutting blade 72 is fitted into the mounting base. The ring-shaped convex portion 56b of 52. Next, the circular recessed portion 86 of the fixing flange 80 is fitted into the convex portion 54 of the mounting seat 52 to mount the fixing flange 80.

In this state, the annular cutting blade 72 is in a state of being sandwiched by the first support surface 56 a of the mounting seat 52 and the second support surface 82 a of the fixing flange 80. As shown in FIG. 3, when the electromagnetic switching valve 68 is switched to the communication position to connect the pipe fitting 50 d of the rotary joint 50 to the suction source 70, the negative pressure of the suction source 70 is transmitted through the annular groove formed in the mounting seat 52. 58a, the suction hole 58b, and the suction path 66 are conveyed to the suction port 64, and the fixed flange 80 is attracted toward the mounting seat 52 side, and the cutter 72 is attracted by the first support surface 56a of the mounting seat 52 and the fixing flange 80. The second support surface 82a is sandwiched and fixed by a stronger force.

In this state, a slight gap is provided between the annular projection 56b of the mounting seat 52 and the end surface 82b of the fixing flange 80, so the negative pressure attraction force will all work to attract the second support surface 82a. . Thereby, the cutting blade 72 can be firmly fixed by an attractive force.

In this embodiment, the flange mechanism is constituted by the mounting base 52 and the fixed flange 80. Since the fixing flange 80 is formed integrally with the flange portion 82 and the cap portion 84, when the fixing flange 80 is sucked and held as shown in FIG. 3, the convex portion 54 of the mounting seat 52 is fixedly convex. The cap portion 84 of the rim 80 is completely covered. Therefore, since there is no gap through which the ambient gas including the cutting chips can enter, it is possible to prevent the chips from adhering to the inside of the flange mechanism or the first and second support surfaces 56a and 82a.

In the cutting unit 14 of the present embodiment, in the cutting process of the workpiece by the cutter 72, the pipe 50d of the rotary joint 50 is connected to the suction source 70 at any time, so that the negative pressure generated at the suction port 64 is used. The suction force attracts the fixing flange 80 at any time, and the cutting blade 72 is firmly fixed by the first support surface 56a and the second support surface 82a for cutting.

In the case where cutting is to be interrupted to replace the cutting blade 72, the fixed flange 80 and the cutting blade 72 can be simply removed by switching the electromagnetic switching valve 68 to the blocking position to release the suction and holding of the fixed flange 80. .

Since the front end of the convex portion 54 of the mounting seat 52 is fitted into the circular recessed portion 86 of the fixing flange 80, the cutting flange 72 can be temporarily attached even when the cutting blade 72 is not fixed by the vacuum negative pressure. Since the fixing flange 80 is temporarily positioned on the mounting seat 52, it is convenient when attaching and detaching the cutter 72.

2‧‧‧ cutting device

4‧‧‧ device abutment

4a‧‧‧ opening

6‧‧‧X-axis mobile stage

8‧‧‧Dustproof and dripproof cover

10‧‧‧Work clamp

10a‧‧‧ keep face

10b‧‧‧Jig

12‧‧‧ protrusion

14‧‧‧ cutting unit

16‧‧‧ Cassette Lift

18‧‧‧ cassette

20‧‧‧ supporting structure

22‧‧‧ cutting unit moving mechanism

24‧‧‧Y-axis guide

26‧‧‧Y-axis moving plate

28‧‧‧Y-axis ball screw

30‧‧‧Z-axis guide

32‧‧‧Z axis moving plate

34‧‧‧Z-axis ball screw

36‧‧‧Z-axis pulse motor

38‧‧‧ camera unit

40‧‧‧washing unit

42‧‧‧Turntable

44‧‧‧jet nozzle

46‧‧‧ Spindle housing

46a‧‧‧front face

46b, 48a‧‧‧Thread hole

48‧‧‧ Spindle

50‧‧‧ Rotary Joint

50a‧‧‧ cylindrical protrusion

50b, 82‧‧‧ flange

50c‧‧‧Containment hole

50d‧‧‧Pipe Fittings

50e‧‧‧Mounting hole

52‧‧‧Mount

54‧‧‧ cylindrical protrusion

56‧‧‧ Accept flange

56a‧‧‧1st support surface

56b‧‧‧ annular projection

58‧‧‧Cylinder

58a‧‧‧annular groove

58b‧‧‧attraction hole

60, 74‧‧‧ installation holes

64‧‧‧ Attraction

66‧‧‧Attraction path

68‧‧‧ Solenoid Switching Valve

70‧‧‧ Attraction source

72‧‧‧ Cutter

76‧‧‧washer

78‧‧‧Screw

80‧‧‧ fixed flange (front flange)

82a‧‧‧ 2nd support surface

82b‧‧‧face

84‧‧‧ Cap

86‧‧‧ round recess

X, Y, Z‧‧‧ directions

FIG. 1 is a perspective view of a cutting device including a flange mechanism according to the present invention. FIG. 2 is an exploded perspective view showing a state where a ring-shaped cutting blade is fixed to a front end of a main shaft through a flange mechanism. 3 is a cross-sectional view of a state where an annular cutting blade is fixed to a distal end of a main shaft by a flange mechanism.

Claims (2)

A flange mechanism includes a mounting seat which is fixed to a front end of a main shaft rotatably supported by a main shaft housing and a fixing flange which supports a ring-shaped cutting tool. The blade is fixed to the mounting base, and the flange mechanism is characterized in that: the mounting base includes: a cylindrical convex portion that supports the inner periphery of the cutting blade; and the receiving flange portion is from the cylindrical convex portion The rear part of the rear part projects radially outward, and has a first support surface for supporting the cutter on the front surface side of the outer periphery; and a cylindrical part is formed integrally with the receiving flange part behind the receiving flange part, An annular groove is provided on the outer periphery, the receiving flange portion has a plurality of suction openings on a side facing the fixed flange, and the receiving flange portion and the cylindrical portion of the mounting seat are formed to communicate with each of the suctions. A plurality of suction paths of the mouth and the annular groove, the fixed flange includes: a flange portion having, on an outer periphery, a second support surface that holds the cutting blade together with the first support surface of the receiving flange portion; And a cap portion formed integrally with the flange portion The convex portion covering the mounting seat is passed through the rotary joint fixed to the spindle housing, so that a negative pressure from a suction source is applied to the annular groove, thereby the fixing flange is directed toward the mounting seat through the suction port. The cutting tool is sucked and clamped by the first support surface of the mounting base and the second support surface of the fixing flange. The flange mechanism according to claim 1, wherein the fixed flange has a circular recessed portion fitted into a front end of the convex portion of the mounting seat.