TW202045301A - Flange mechanism capable of reducing contamination on a communication passage - Google Patents

Abstract

The object of the present invention provides a flange mechanism capable of further reducing contamination on a communication passage for sucking and fixing than a conventional one. The present invention provides a flange mechanism, in which a cutting blade having a mounting hole in the center part and a cutting edge in the outer peripheral part is mounted on a spindle serving as a rotating shaft. The flange mechanism includes a cylindrical boss portion, which has a front side inserted into the mounting hole of the cutting blade and a rear side to which the spindle is fixed; and a flange portion, which extends in the radial direction from the rear side of the boss portion and is provided with a supporting surface formed to be abutted by the cutting blade. The supporting surface is provided with a suction hole for sucking and fixing the cutting blade, and a communication passage connecting the suction hole with a suction source. The communication passage is equipped with a switching valve that also communicates with a fluid supply source to switch connection with the fluid supply source and the suction source. The fluid supply source supplies a fluid for cleaning the communication passage.

Description

Flange mechanism

The invention relates to a flange mechanism equipped with a cutting blade.

The following technology is known: a communication path communicating with a suction source is provided in a flange portion installed on the main shaft, and a space between the flange portion, the base of the cutting blade, or the pressing flange of the cutting blade is generated Negative pressure is used to install the cutting blade on the spindle (see Patent Documents 1, 2 and 3). Prior art literature Patent literature

Patent Document 1: Japanese Patent Application Publication No. 2018-075688 Patent Document 2: Japanese Patent Application Publication No. 2018-144168 Patent Document 3: Japanese Patent Laid-Open No. 2015-023222

Problems to be solved by the invention

In the case of suction and fixed cutting blades, there is a problem that waste enters the suction and fixed communication path. If the communication path becomes dirty, it cannot be sucked normally, and the cutting blade may fall off during processing and cause damage to the processed object.

The present invention was made in view of the above-mentioned problems, and its object is to provide a flange mechanism that can reduce dirt on a communication passage that is sucked and fixed more than before. Means to solve the problem

In order to solve the above-mentioned problems and achieve the objective, the flange mechanism of the present invention is a flange mechanism in which a cutting blade having an installation hole in the center part and a cutting edge in the outer peripheral part is installed on the main shaft that becomes the rotating shaft. It is characterized by: A cylindrical boss, the front side is inserted into the mounting hole of the cutting blade, and the main shaft is fixed on the rear side; and The flange portion extends in the radial direction from the rear side of the boss portion, and the front surface is provided with a support surface for the cutting blade to abut, In addition, the support surface is provided with a suction hole for sucking and fixing the cutting blade, and a communication path connecting the suction hole with the suction source, and the communication path is provided with a fluid supply source that is also connected to the fluid supply source and switchable with the fluid supply source and the suction In the switching valve connected to the source, the fluid supply source is to supply the cleaning fluid of the communication path.

In addition, in order to solve the above-mentioned problems and achieve the objective, the flange mechanism of the present invention is a flange mechanism in which a disc-shaped cutting blade with a mounting hole in the center portion is mounted on a main shaft that becomes a rotating shaft. It is characterized by :have: A cylindrical boss portion, the front side is inserted into the mounting hole of the cutting blade, and the main shaft is fixed on the rear side; A fixing flange portion extending in the radial direction from the rear side of the boss portion, and having a supporting surface on the front surface for the cutting blade to abut; and The pressing flange portion is provided with a recess or hole installed on the boss portion, and the cutting blade is clamped between the fixing flange portion, and In addition, the support surface is provided with a suction hole that sucks and fixes the pressing flange portion, and a communication path that communicates the suction hole with the suction source, and the communication path is also provided in communication with the fluid supply source so as to be switchable with the fluid supply source, and In the switching valve connected to the suction source, the fluid supply source is to supply the cleaning fluid of the communication path. Invention effect

The invention of this application can reduce the dirt of the suction and fixed communication path more than before.

The form used to implement the invention

The form (embodiment) for implementing the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. In addition, the constituent elements described below include constituent elements that can be easily imagined by a person having ordinary knowledge in the relevant technical field or are substantially the same. In addition, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes can be made in various configurations without departing from the scope of the present invention.

[Embodiment 1] The flange mechanism 1 of Embodiment 1 of the present invention will be explained based on the drawings. Fig. 1 is a perspective view showing a configuration example of a cutting device 100 provided with a flange mechanism 1 of the first embodiment. 2 is an exploded perspective view showing a configuration example of the cutting unit 120 provided with the flange mechanism 1 of the first embodiment. 3 is a cross-sectional view showing a configuration example of the cutting unit 120 provided with the flange mechanism 1 of the first embodiment.

The flange mechanism 1 of the first embodiment constitutes the cutting device 100 shown in FIG. 1. The cutting device 100 is a device that cuts the workpiece 200. In the first embodiment, the workpiece 200 cut by the dicing device 100 is a wafer such as a disc-shaped semiconductor wafer or an optical device wafer having a base material such as silicon, sapphire, and gallium. The to-be-processed object 200 has the device 203 formed in a region of the flat front surface 201 divided by a plurality of planned dividing lines 202 formed in a lattice shape. The workpiece 200 has an adhesive tape 210 attached to the back 204 on the back side of the front surface 201, and a ring frame 211 is attached to the outer edge of the adhesive tape 210. Furthermore, in the present invention, the workpiece 200 may be a rectangular package substrate, a ceramic plate, a glass plate, or the like having a plurality of devices sealed by resin.

As shown in FIG. 1, the cutting device 100 includes a work chuck table 110 that can be rotated about an axis by a rotating drive source by sucking and holding a workpiece 200 on a holding surface 111, and a work chuck table 110 that is held on the work chuck table 110. The cutting unit 120 for cutting the workpiece 200, an X-axis moving unit not shown that moves the work clamp table 110 in the X-axis direction, a Y-axis moving unit 130 that moves the cutting unit 120 in the Y-axis direction, and A Z-axis moving unit 140 that moves the cutting unit 120 in the Z-axis direction. In addition, the cutting device 100 includes a cleaning unit 150 that cleans the processed object 200 after cutting, a cassette 160 that houses the processed object 200 before and after cutting, a cassette 160, a work clamp table 110, and a cleaning unit. A conveying unit (not shown) that conveys the workpiece 200 between 150 and a control unit 170 that is a computer that controls each component.

In the cutting device 100, the conveying unit takes out one sheet of the to-be-processed object 200 from the cassette 160 and places it on the holding surface 111 of the work chuck table 110. The cutting device 100 sucks and holds the workpiece 200 on the holding surface 111 of the work chuck 110, and while supplying cutting water from the cutting unit 120 to the workpiece 200, it uses an X-axis moving unit, a rotation drive source, and a Y-axis. The moving unit 130 and the Z-axis moving unit 140 relatively move the work clamp table 110 and the cutting unit 120 along the planned dividing line 202, and the cutting unit 120 cuts the planned dividing line 202 of the workpiece 200. After the cutting device 100 cuts all the planned dividing lines 202 of the processed object 200, the processed object 200 is cleaned by the cleaning unit 150 and stored in the cassette 160.

As shown in FIG. 2, the cutting unit 120 of the cutting device 100 is formed in a cylindrical shape and is provided so as to be movable in the Y-axis direction and the Z-axis direction by the Y-axis moving unit 130 and the Z-axis moving unit 140. The main shaft housing 121 and the main shaft 122 rotatably provided in the main shaft housing 121 around an axis parallel to the Y-axis direction. Moreover, as shown in FIG. 1, the cutting unit 120 includes a cutting blade 124 fixed to the front end of the main shaft 122, a blade cover 125, and a drawing of a suction source 18 (see FIG. 3) that sucks the cutting blade 124 toward the main shaft 122. The rotary joint 10 shown in 2 and 3 and the flange mechanism 1 that attracts and fixes the cutting blade 124 to the tip of the main shaft 122 by the suction force from the rotary joint 10.

The main shaft 122 is rotatably supported by the main shaft housing 121. The front end of the main shaft 122 protrudes outward from one end of the main shaft housing 121. A motor (not shown) for rotating the main shaft 122 is connected to the base end of the main shaft 122. As shown in FIG. 2, the front end of the main shaft 122 is tapered so that the outer diameter gradually decreases toward the front end. The main shaft 122 is rotatably accommodated in the main shaft housing 121 in a state where the front end is exposed.

The cutting blade 124 is fixed to the front end of the main shaft 122 through the flange mechanism 1 and is rotated by the main shaft 122 as a rotating shaft, thereby cutting the workpiece 200. As shown in FIG. 2, in the first embodiment, the cutting blade 124 is a so-called hub-shaped blade and has a base formed of a metal such as aluminum alloy and having a mounting hole 124-3 to form an annular disk shape. The base 124-1 and the annular cutting edge 124-2 provided on the outer periphery of the base 124-1 and protruding from the outer periphery of the base 124-1.

The mounting hole 124-3 is a hole for fixing the cutting blade 124 to the flange mechanism 1. The cutting edge 124-2 is formed of abrasive grains such as diamond or CBN (Cubic Boron Nitride), and a bonding material (bonding material) such as metal or resin, and is formed to a predetermined thickness. As shown in FIG. 3, the cutting edge 124-2 is fixed to the outer peripheral edge of the side surface of the flat side of the base 124-1, and protrudes in the outer peripheral direction from the outer edge of the base 124-1.

As shown in Figure 1, the blade cover 125 has the following structure: fixed to the spindle housing 121, and covering the upper part of the cutting blade 124 and at least one side in the X-axis direction, and by the cutting water nozzle installed at the lower end, and In the cutting process, cutting water that is a machining fluid is supplied to the cutting blade 124 and the workpiece 200.

2 and 3, the rotary joint 10 includes a cylindrical boss portion 11, a flange portion 12 integrally formed on the outer periphery of the cylindrical boss portion 11, and a cylindrical boss portion 11 The inner accommodating hole 13, a pipe 14 provided with one end connected to the accommodating hole 13, and a plurality of mounting holes 15 formed in the flange portion 12.

The rotary joint 10 is formed by inserting a plurality of screws into each mounting hole 15 and screwing and locking the end 121-1 on the front end side of the spindle housing 121. Each screw hole is formed at a position corresponding to each mounting hole 15 121-2 is thereby fixed to the end 121-1 on the front end side of the spindle housing 121.

As shown in Figure 3, the accommodating hole 13 has an inner diameter that is almost the same as the outer diameter of the cylindrical portion 4 of the flange mechanism 1 described later, and the outer circumference 4-1 of the cylindrical portion 4 can be rotated around the Y axis Fits without gaps. The communicating hole in the accommodating hole 13 that communicates with one end of the tube 14 is accompanied by the rotation of the outer circumference 4-1 of the cylindrical portion 4 around the Y axis, and is at a predetermined rotation angle with respect to the cylindrical portion described later The suction hole 4-2 of 4 is connected.

As shown in FIG. 3, the other end of the tube 14 is selectively connected to the suction source 18 and the fluid supply source 19 through the switching valve 17. The switching valve 17 is electrically connected to the control unit 170 shown in FIG. 1 for information communication, and the connection destination of the pipe 14 can be switched between the suction source 18 and the fluid supply source 19 by the control unit 170 The action.

The suction source 18 sucks and fixes the cutting blade 124 by sucking the gas inside the communication path 6 described later. The fluid supply source 19 removes dirt from the communication path 6 by supplying the cleaning fluid of the communication path 6 inside the communication path 6.

As shown in Figures 2 and 3, the flange mechanism 1 includes: a cylindrical boss portion 2 that extends in the front and rear direction, that is, in the Y-axis direction; and a disc-shaped flange portion 3 from the rear side of the boss portion 2. That is, the +Y direction side extends outward in the radial direction of the boss portion 2 and is integrally formed; and the cylindrical portion 4 protrudes from the rear side of the flange portion 3 and is integrally formed. In the flange mechanism 1, the boss portion 2, the flange portion 3, and the cylindrical portion 4 overlap each other with their respective central axes and are arranged in the Y-axis direction.

The flange mechanism 1 has an installation hole 5 formed on the inner side. The mounting hole 5 is formed in a tapered shape such that the inner diameter gradually decreases toward the tip end, and the base end side is fitted to the outer periphery of the front end of the main shaft 122 without a gap. The flange mechanism 1 is fixed to the front end of the main shaft 122 by inserting a screw 129 into the installation hole 5 through a washer 128, and screwing and locking the screw hole 122-1 formed at the front end of the main shaft 122.

The boss portion 2 can be provided with a base 124-1 of the cutting blade 124. Specifically, as shown in FIGS. 2 and 3, the boss portion 2 can be inserted into the mounting hole 124-3 of the base 124-1 of the cutting blade 124, and the outer peripheral side from the mounting hole 124-3 The base 124-1 of the cutting blade 124 is supported on the inner peripheral side.

As shown in FIGS. 2 and 3, the cylindrical portion 4 has an outer circumference 4-1 and a plurality of suction holes 4-2 arranged on the outer circumference 4-1 and spaced at predetermined intervals in the circumferential direction. The cylindrical portion 4 is fitted into the accommodating hole 13 without any gap in a rotatable manner around the Y axis.

The flange portion 3 has: an annular support surface 3-1 formed on the radially outer side of the front-facing surface; and an annular concave portion 3-2 that surrounds the boss portion 2 on the radially inner side of the front-facing surface Formed from the outer periphery. As shown in FIG. 3, the support surface 3-1 is for abutting against the back side (rear side) of the base 124-1 of the cutting blade 124, that is, the surface side in the +Y direction, and supports the abutted surface side.

As shown in FIG. 3, the annular recessed part 3-2 is formed by being recessed in the +Y direction more than the support surface 3-1. As shown in FIGS. 2 and 3, a suction hole 3-3 is formed in the ring-shaped recess 3-2. As shown in Fig. 3, the suction hole 3-3 penetrates the communication path 6 formed in the flange portion 3 and the cylindrical portion 4 of the flange mechanism 1, the suction hole 4-2 of the cylindrical portion 4, and the rotary joint 10. The pipe 14 and the switching valve 17 communicate with the suction source 18 and the fluid supply source 19 in a mutually switchable manner.

When the suction hole 3-3 communicates with the suction source 18, the suction from the rotary joint 10 sucks the back side of the base 124-1 of the cutting blade 124 toward the support surface 3-1, thereby sucking and fixing the cutting Blade 124. When the suction hole 3-3 is in communication with the fluid supply source 19, the cleaning fluid is supplied from the rotary joint 10 to remove the dirt on the back side of the annular recess 3-2 and the base 124-1 of the cutting blade 124. The dirt is removed and washed together with the dirt on the communication path 6.

The flange mechanism 1, the rotary joint 10, the switching valve 17, the suction source 18, and the fluid supply source 19 constitute the flange system 20 of the first embodiment. The flange system 20 connects the suction hole 3-3 of the flange part 3 and the communication path 6 with the suction source 18 of the flange part 3 in the flange mechanism 1 through the rotary joint 10 and the switching valve 17, and becomes the flange part 3 The supporting surface 3-1 sucks and fixes the back side of the base 124-1 on which the cutting blade 124 is fixed. The flange system 20 connects the suction hole 3-3 of the flange portion 3 of the flange mechanism 1 and the communication path 6 with the fluid supply source 19 through the rotary joint 10 and the switching valve 17, thereby connecting the communication path 6 A cleaning mode that removes and cleans dirt. The flange system 20 switches the suction fixing mode and the washing mode by switching the switching valve 17. Furthermore, the washing mode is performed with the cutting blade 124 removed.

Furthermore, although the flange system 20 is configured to include the rotary joint 10 in the present embodiment, the present invention is not limited to this, and the communication path 6 and the switching valve 17 may be connected by replacing the rotary joint 10 with other structures , Connectivity.

In this embodiment, although the suction hole 3-3 is formed in the annular recess 3-2, the present invention is not limited to this. For example, it may be formed between the support surface 3-1 and the annular recess 3-2. The drop area or the position where the outer circumference of the boss portion 2 opens toward the annular recess 3-2.

Since the flange mechanism 1 of the first embodiment has the above structure, it can be switched between the suction fixing mode and the washing mode by switching the switching valve 17. The aforementioned suction fixing mode is the suction hole 3-3 and the communication path 6 and the suction In the mode in which the source 18 communicates, the aforementioned washing mode is a mode in which the suction hole 3-3 and the communication path 6 communicate with the fluid supply source 19. Therefore, the flange mechanism 1 of the first embodiment has the following effects: it is possible to clean the suction-fixed communication path 6 by washing, and the dirt of the suction-fixed communication path 6 can be reduced more than before.

[Embodiment 2] The flange mechanism 1-2 of Embodiment 2 of the present invention will be explained based on the drawings. 4 is an exploded perspective view showing a configuration example of the cutting unit 220 provided with the flange mechanism 1-2 of the second embodiment. 5 is a cross-sectional view showing a configuration example of the cutting unit 220 provided with the flange mechanism 1-2 of the second embodiment. In addition, in FIGS. 4 and 5, the same reference numerals are given to the same parts as in the first embodiment, and the description thereof is omitted.

As shown in FIG. 4, the cutting unit 220 of the second embodiment includes a spindle housing 221 and a spindle 222. The spindle housing 221 is installed movably in the Y-axis direction and the Z-axis direction almost like the first embodiment. The main shaft 222 is rotatably installed in the main shaft housing 221 around an axis parallel to the Y-axis direction. In addition, the cutting unit 220 of the second embodiment is shown in FIG. 4 and includes a cutting blade 224 fixed to the tip of the main shaft 222, a blade cover 125 similar to the first embodiment, and a suction blade 224 that sucks the cutting blade 224 in the direction of the main shaft 222 The rotary joint 10 connected to the suction source 18 and the flange mechanism 1-2 of the second embodiment in which the cutting blade 224 is sucked and fixed to the tip of the main shaft 222 by the suction force from the rotary joint 10.

The main shaft housing 221 and the main shaft 222 of the second embodiment are in the main shaft housing 121 and the main shaft 122 of the first embodiment, and the installation objects are changed to the flange mechanism 1-2 and the cutting blade 224 of the second embodiment. In this case, a modified configuration is added to the shape, etc., and the basic configuration is the same as in the first embodiment.

The cutting blade 224 is fixed to the front end of the main shaft 222 through the flange mechanism 1-2, and is rotated by the main shaft 222 as a rotating shaft, thereby cutting the workpiece 200. In the second embodiment, the cutting blade 224 is a so-called hubless blade, and as shown in FIG. 4, it has a disc shape (circular ring shape) and has a mechanism for fixing the cutting blade 224 to the flange in the center. The hole of 2 is the installation hole 224-1. The cutting blade 224 is formed of the same material as the cutting edge 124-2 of the cutting blade 124 of the first embodiment to the same predetermined thickness.

In the second embodiment, the rotary joint 10 is fixed to the end 221-1 on the front end side of the spindle housing 221 in the same manner as in the first embodiment. In the second embodiment, the accommodating hole 13 of the rotary joint 10 is as shown in FIG. 5, and the inner diameter is almost the same as the outer diameter of the cylindrical portion 34 of the flange mechanism 1-2 described later, and the cylindrical portion 34 is provided with The outer periphery is fitted with no gap in a manner rotatable around the Y axis. The communicating hole in the accommodating hole 13 that communicates with one end of the tube 14 is a ring that penetrates the cylindrical portion 34 described later at a predetermined rotation angle along with the rotational movement of the outer circumference of the cylindrical portion 34 around the Y axis. The groove 34-1 communicates with the suction hole 34-2.

As shown in FIGS. 4 and 5, the flange mechanism 1-2 of the second embodiment includes a mounting seat 30 and a pressing flange portion 40. The mounting seat 30 is provided with: a cylindrical boss portion 32 extending in the front and rear direction, that is, in the Y-axis direction; a disc-shaped fixing flange portion 33, which faces the boss portion from the rear side of the boss portion 32, that is, the +Y direction side The radial direction of 32 extends outward and is formed integrally; and the cylindrical portion 34 is formed integrally protruding from the rear side of the fixed flange portion 33. In the mounting seat 30, the boss portion 32, the fixed flange portion 33, and the cylindrical portion 34 overlap each other with their central axes and are arranged in the Y-axis direction.

The mounting seat 30 is formed with a mounting hole 35 on the inner side. The mounting hole 35 is formed in a tapered shape such that the inner diameter of the base end gradually decreases toward the tip end, and is fitted to the outer periphery of the front end of the main shaft 222 without a gap. The mounting seat 30 inserts the front end of the main shaft 222 into the mounting hole 35, and screwed and locked a lock nut 229 with a thread groove formed on the inner circumference from the front, that is, the -Y direction side, to the thread formed at the front end of the main shaft 222 The groove 222-1 is thereby fixed to the front end of the main shaft 222.

As shown in FIGS. 4 and 5, the boss portion 32 is a mounting hole 41 into which a pressing flange portion 40 described later is inserted, and supports the pressing flange portion 40 from the inner peripheral side of the mounting hole 41 on the outer peripheral side.

As shown in FIGS. 4 and 5, the cylindrical portion 34 has an annular groove 34-1 provided on the outer circumference, and a plurality of annular grooves 34-1 provided in the annular groove 34-1 and arranged at predetermined intervals in the circumferential direction. Suction hole 34-2. The cylindrical portion 34 is fitted into the accommodating hole 13 so as to be rotatable about the Y axis without any gap. Furthermore, the annular groove 34-1 may not be provided, and only the suction hole 34-2 may be formed.

The fixing flange portion 33 has: an annular support surface 33-1 formed on the radially outer side of the front-facing surface; and an annular recess 33-2 surrounding the boss portion on the radially inner side of the front-facing surface 32 is formed on the periphery. As shown in FIG. 5, the ring-shaped recess 33-2 is formed by being recessed in the +Y direction more than the support surface 33-1.

The pressing flange portion 40 is a member for pressing the cutting blade 224 by covering the cutting blade 224 arranged on the boss portion 32 of the mounting seat 30 from the front side and attaching it to the boss portion 32.

Specifically, as shown in FIGS. 4 and 5, the pressing flange portion 40 has a mounting hole 41 formed on the inner side. The mounting hole 41 is fitted into the outer periphery of the boss portion 32 of the mounting seat 30 without a gap. The pressing flange portion 40 is installed and fixed to the mounting hole 41 by inserting the boss portion 32 of the mounting seat 30 into the mounting hole 41 and being attracted toward the rear side, that is, the +Y direction side by the suction force from the rotary joint 10. The boss portion 32 of the mounting seat 30.

As shown in FIG. 5, the pressing flange portion 40 has a fitting convex portion 43 formed at the center of the surface on the back side (rear side), that is, on the +Y direction side, and a ring shape formed on the radially outer side of the fitting convex portion 43. On the outer periphery of the fitting convex portion 43, the first support surface 42 and the annular second support surface 44 of the inner diameter of the cutting blade contact. The fitting convex portion 43 of the pressing flange portion 40 is a stepped portion formed between the support surface 33-1 and the annular concave portion 33-2 that is fitted into the fixing flange portion 33 of the mounting seat 30. The fitting convex portion 43 can be fitted in the stepped portion between the support surface 33-1 and the annular concave portion 33-2.

In the flange mechanism 1-2 of the second embodiment, the boss portion 32 of the mounting seat 30 and the mounting hole 41 of the pressing flange portion 40 are inserted into the mounting hole 224-1 of the cutting blade 224 in this order, and the fitting The convex portion 43 is fitted into the gap between the support surface 33-1 and the annular recess 33-2, thereby clamping the cutting blade 224 between the support surface 33-1 and the first support surface 42.

As shown in FIGS. 4 and 5, a suction hole 33-3 is formed in the annular recess 33-2. As shown in FIG. 5, the suction hole 33-3 penetrates the communication path 36 formed in the fixed flange portion 33 and the cylindrical portion 34 of the flange mechanism 1-2, and the annular groove 34-1 of the cylindrical portion 34. The suction hole 34-2, the pipe 14 of the rotary joint 10, and the switching valve 17 communicate with the suction source 18 and the fluid supply source 19 in a mutually switchable manner.

When the suction hole 33-3 communicates with the suction source 18 with the cutting blade 224 sandwiched between the support surface 33-1 and the first support surface 42, the suction force from the rotary joint 10 presses the flange The second support surface 44 on the back side of the portion 40 is attracted toward the annular recess 33-2, whereby the back side of the cutting blade 224 is pressed toward the support surface 33-1 by pressing the first support surface 42 of the flange portion 40, and The fixed cutting blade 224 is attracted indirectly. When the suction hole 33-3 is in communication with the fluid supply source 19, the cleaning fluid is supplied from the rotary joint 10, so that the dirt on the annular recess 33-2 and the dirt on the communication path 36 can be removed and washed.

The flange mechanism 1-2, the rotary joint 10, the switching valve 17, the suction source 18, and the fluid supply source 19 constitute the flange system 50 of the second embodiment. The flange system 50 connects the suction hole 33-3 of the fixed flange portion 33 of the flange mechanism 1-2 and the communication path 36 with the suction source 18 through the rotary joint 10 and the switching valve 17, and becomes a fixed convex The supporting surface 33-1 of the rim 33 sucks and fixes the back side of the cutting blade 224 in a suction fixing mode. The flange system 50 connects the suction hole 33-3 of the fixed flange portion 33 of the flange mechanism 1-2 and the communication path 36 with the fluid supply source 19 through the rotary joint 10 and the switching valve 17, and becomes a connecting The cleaning mode in which the dirt in the passage 36 is removed and cleaned. The flange system 50 switches the suction fixing mode and the washing mode by switching the switching valve 17. Furthermore, the washing mode is performed with the cutting blade 224 removed.

Furthermore, although the flange system 50 is configured to include the rotary joint 10 in the present embodiment, the present invention is not limited to this, and the communication path 36 and the switching valve 17 may be connected by replacing the rotary joint 10 with other structures , Connectivity.

In this embodiment, although the suction hole 33-3 is formed in the ring-shaped recess 33-2, the present invention is not limited to this. For example, it may be formed between the support surface 33-1 and the ring-shaped recess 33-2. Drop area.

Since the flange mechanism 1-2 of the second embodiment has the above structure, it can be switched between the suction fixing mode and the washing mode by switching the switching valve 17. The aforementioned suction fixing mode is the suction hole 33-3 and the communication path 36 In the mode of communicating with the suction source 18, the aforementioned washing mode is a mode in which the suction hole 33-3 and the communication passage 36 communicate with the fluid supply source 19. Therefore, the flange mechanism 1-2 of the second embodiment has the same effect as the flange mechanism 1 of the first embodiment: the suction and fixation communication path 36 can be cleaned, and the suction fixation is reduced more than before. The connecting path 36 is dirty.

[Embodiment 3] The flange mechanism 1-3 of Embodiment 3 of the present invention will be explained based on the drawings. 6 is an exploded perspective view showing a configuration example of the cutting unit 320 provided with the flange mechanism 1-3 of the third embodiment. FIG. 7 is a cross-sectional view showing a configuration example of a cutting unit 320 provided with a flange mechanism 1-3 of the third embodiment. In addition, in FIGS. 6 and 7, the same reference numerals are assigned to the same parts as in the first and second embodiments, and the description is omitted.

As shown in FIG. 6, the cutting unit 320 of the third embodiment is provided with a spindle housing 321 and a spindle 322. The spindle housing 321 moves in the Y-axis direction and the Z-axis direction almost the same as the first and second embodiments. It is freely installed, and the aforementioned spindle 322 is rotatably installed in the spindle housing 321 around an axis parallel to the Y-axis direction. In addition, the cutting unit 320 of the third embodiment is shown in FIG. 6 and includes a cutting blade 324 fixed to the tip of the main shaft 322, a blade cover 125 similar to the first embodiment, and a suction blade 324 that sucks the cutting blade 324 toward the main shaft 322 The rotary joint 10 to which the suction source 18 is connected, and the flange mechanism 1-3 of the third embodiment in which the cutting blade 324 is sucked and fixed to the tip of the main shaft 322 by the suction force from the rotary joint 10.

The main shaft housing 321 and the main shaft 322 of the third embodiment are in the main shaft housing 121 and the main shaft 122 of the first embodiment, and the installed objects are changed to the flange mechanism 1-3 and the cutting blade 324 of the third embodiment. In this case, a modified configuration is added to the shape, etc., and the basic configuration is the same as in the first embodiment.

The cutting blade 324 is fixed to the front end of the main shaft 322 through the flange mechanism 1-3, and is rotated by the main shaft 322 as a rotating shaft, thereby cutting the workpiece 200. The cutting blade 324 is a so-called hubless blade similar to the cutting blade 224 of the second embodiment, and has a mounting hole 324-1.

In the third embodiment, the rotary joint 10 is fixed to the end 321-1 on the front end side of the spindle housing 321 in the same manner as in the first and second embodiments. In Embodiment 3, the accommodating hole 13 of the rotary joint 10 is as shown in FIG. 7, and its inner diameter is almost the same as the outer diameter of the cylindrical portion 64 of the flange mechanism 1-3 described later, and the cylindrical portion 64 The outer periphery is fitted with no gap in a manner rotatable around the Y axis. The communicating hole in the accommodating hole 13 that communicates with one end of the tube 14 is accompanied by the rotational movement of the outer circumference of the cylindrical portion 64 around the Y axis, and penetrates the ring of the cylindrical portion 64 described later at a predetermined rotation angle The groove 64-1 communicates with the suction hole 64-2.

As shown in FIGS. 6 and 7, the flange mechanism 1-3 of the third embodiment includes a mounting seat 60 and a pressing flange portion 70. The mounting seat 60 is provided with a cylindrical boss portion 62 extending in the front and rear direction, that is, in the Y-axis direction; a disc-shaped fixing flange portion 63, which faces the boss portion from the rear side of the boss portion 62, that is, the +Y direction side The radial direction of 32 extends outward to be integrally formed; and the cylindrical portion 64 is integrally formed to protrude from the rear side of the fixed flange portion 63. In the mounting seat 60, the boss portion 62, the fixed flange portion 63, and the cylindrical portion 64 overlap each other with their respective central axes and are arranged in the Y-axis direction.

The mounting seat 60 is formed with a mounting hole 65 on the inner side. The mounting hole 65 is formed in a tapered shape so that the inner diameter gradually decreases toward the tip end, and the base end side is fitted to the outer periphery of the front end of the main shaft 322 without a gap. The mounting seat 60 can be fixed to the front end of the main shaft 322 by inserting the screw 329 into the installation hole 65 through the washer 328, and screwed and locked to the screw hole 322-1 formed at the front end of the main shaft 322.

As shown in FIGS. 6 and 7, the boss portion 62 is fitted into the circular recess 71-3 of the pressing flange portion 70 described later, and the outer peripheral side supports the pressing from the inner peripheral side of the circular recess 71-3 Flange 70.

As shown in FIGS. 6 and 7, the cylindrical portion 64 has the same annular groove 64-1 as the annular groove 34-1 of the second embodiment, and the same plural number of suction holes 34-2 as the second embodiment. A suction hole 64-2. Furthermore, the annular groove 64-1 may not be provided, and only the suction hole 64-2 may be formed.

The fixing flange portion 63 has an annular support surface 63-1, an annular concave groove 63-2, and an annular convex portion 63-3 shown in FIG. The support surface 63-1 is formed in a ring shape on the radially outer side of the front-facing surface of the fixing flange portion 63. The annular convex portion 63-3 is formed around the outer circumference of the boss portion 62 on the inner side in the radial direction of the front-facing surface of the fixing flange portion 63. The annular concave groove 63-2 is formed to cover the area between the support surface 63-1 and the annular convex portion 63-3.

As shown in FIG. 7, the ring-shaped recess 63-2 is formed by being recessed in the +Y direction more than the supporting surface 63-1. The annular convex portion 63-3 is formed to protrude in the -Y direction than the supporting surface 63-1.

The pressing flange portion 70 is a member for pressing the cutting blade 324 by covering the cutting blade 324 arranged on the boss portion 62 of the mounting seat 60 from the front side and attaching it to the boss portion 62.

Specifically, as shown in FIGS. 6 and 7, the pressing flange portion 70 includes a flange portion 71 and a cap portion 72. The flange portion 71 is formed in a disc shape, and the outer diameter is formed to have the same size as the fixed flange portion 63. The cap portion 72 is formed in a disk shape so as to cover the attachment hole formed in the center of the flange portion 71 from the front side, which is the same as the attachment hole 41 of the second embodiment.

As shown in FIG. 7, the pressing flange portion 70 has a support surface 71-1, an end surface 71-2, and a circular recess 71-3. The support surface 71-1 is formed in a ring shape on the radially outer side of the back side (rear side) of the flange portion 71, that is, the surface on the +Y direction side. The end surface 71-2 is formed in a ring shape on the inner side in the radial direction than the support surface 71-1 on the back side of the flange portion 71. The circular recess 71-3 is formed in a cylindrical shape by the inner peripheral surface of the mounting hole of the flange portion 71 and the surface on the back side of the cap portion 72. The support surface 71-1 is formed to protrude in the +Y direction than the end surface 71-2. The circular recess 71-3 is formed by being recessed in the -Y direction more than the end surface 71-2.

The circular concave portion 71-3 of the pressing flange portion 70 is fitted to the outer periphery of the boss portion 62 of the mounting seat 60 without a gap. The pressing flange portion 70 is installed by fitting the boss portion 62 of the mounting seat 60 into the circular recess 71-3 and being attracted toward the rear side, that is, the +Y direction side by the suction force from the rotary joint 10, A boss portion 62 fixed to the mounting seat 60 is provided.

By installing and fixing the pressing flange portion 70 to the boss portion 62 of the mounting seat 60, the supporting surface 63-1 and the supporting surface 71-1 will face each other in the Y-axis direction, and the annular groove 63-2 and The annular convex portion 63-3 and the end surface 71-2 face each other in the Y-axis direction.

In the flange mechanism 1-3 of the third embodiment, the mounting hole 324-1 of the cutting blade 324 is fitted to the outer circumferential surface of the annular convex portion 63-3 of the mounting seat 60, and the cutting blade 324 The pressing flange portion 70 is installed and fixed to the boss portion 62 of the mounting seat 60, and the cutting blade 324 is clamped between the supporting surface 63-1 and the supporting surface 71-1.

As shown in FIGS. 6 and 7, a suction hole 63-4 is formed in the annular convex portion 63-3. As shown in FIG. 7, the suction hole 63-4 penetrates the communication path 66 formed in the fixing flange portion 63 and the cylindrical portion 64 of the flange mechanism 1-3, and the annular groove 64-1 of the cylindrical portion 64. The suction hole 64-2, the pipe 14 of the rotary joint 10, and the switching valve 17 communicate with the suction source 18 and the fluid supply source 19 in a mutually switchable manner.

When the suction hole 63-4 communicates with the suction source 18 with the cutting blade 324 sandwiched between the supporting surface 63-1 and the supporting surface 71-1, the suction force from the rotary joint 10 presses the flange The end surface 71-2 on the back side of the portion 70 is attracted toward the annular convex portion 63-3, whereby the back side of the cutting blade 324 is pressed toward the support surface 63-1 by pressing the support surface 71-1 of the flange portion 70, and The fixed cutting blade 324 is attracted indirectly. When the suction hole 63-4 is in communication with the fluid supply source 19, the cleaning fluid is supplied from the rotary joint 10, so that the dirt on the annular convex portion 63-3 and the dirt on the communication path 66 can be removed and washed.

The flange mechanism 1-3, the rotary joint 10, the switching valve 17, the suction source 18, and the fluid supply source 19 constitute the flange system 80 of the third embodiment. The flange system 80 connects the suction hole 63-4 of the fixed flange portion 63 of the flange mechanism 1-3 and the communication path 66 with the suction source 18 through the rotary joint 10 and the switching valve 17, and becomes a fixed convex The supporting surface 63-1 of the edge portion 63 sucks and fixes the back side of the cutting blade 324 in a suction fixing mode. The flange system 80 connects the suction hole 63-4 of the fixed flange portion 63 of the flange mechanism 1-3 and the communication path 66 with the fluid supply source 19 through the rotary joint 10 and the switching valve 17, and becomes a connecting The cleaning mode in which the dirt in the passage 66 is removed and cleaned. The flange system 80 switches the suction fixing mode and the washing mode by switching the switching valve 17. Furthermore, the washing mode is performed with the cutting blade 324 removed.

Furthermore, although the flange system 80 is configured to include the rotary joint 10 in this embodiment, the present invention is not limited to this, and it is also possible to connect the communication path 66 and the switching valve 17 by replacing the rotary joint 10 with other structures , Connectivity.

In this embodiment, although the suction hole 63-4 is formed in the annular convex portion 63-3, the present invention is not limited to this. For example, it may be formed on the outer periphery of the boss portion 62 toward the annular convex portion 63- 3 The location of the opening.

Since the flange mechanism 1-3 of the third embodiment has the above structure, it can be switched between the suction fixing mode and the washing mode by switching the switching valve 17. The aforementioned suction fixing mode is the suction hole 63-4 and the communication path 66 In the mode of communicating with the suction source 18, the aforementioned washing mode is a mode in which the suction hole 63-4 and the communication path 66 communicate with the fluid supply source 19. Therefore, the flange mechanism 1-3 of the third embodiment, like the flange mechanism 1 of the first embodiment and the flange mechanism 1-2 of the second embodiment, exerts the following functions and effects: the communication path can be fixed by washing and suction 66, and reduce the dirt of the suction fixed communication path 66 more than before.

In addition, this invention is not limited to the invention of the said embodiment. That is, various modifications can be made and implemented without departing from the gist of the present invention.

1,1-2,1-3: Flange mechanism 2, 32, 62: boss 3: Flange 3-1, 33-1, 63-1, 71-1: support surface 3-2, 33-2: Ring recess 3-3, 4-2, 33-3, 34-2, 63-4, 64-2: suction hole 4, 34, 64: Cylinder part 4-1: outer circumference 5,35,41,65,124-3,224-1,324-1: mounting hole 6, 36, 66: connecting path 10: Rotary joint 11: Cylindrical boss 12, 71: Flange 13: receiving hole 14: pipe fittings 15: mounting hole 17: Switching valve 18: Attraction source 19: fluid supply source 20, 50, 80: flange system 30, 60: Mounting seat 33, 63: Fixed flange 34-1, 64-1: ring groove 40, 70: Press the flange part 42: The first supporting surface 43: Fitting convex part 44: 2nd supporting surface 63-2: Annular groove 63-3: Ring convex 71-2: end face 71-3: Round recess 72: Cap 100: Cutting device 110: work clamp 111: keep face 120, 220, 320: cutting unit 121,221,321: Spindle housing 121-1, 221-1, 321-1: end 121-2,122-1,322-1: screw hole 122,222,322: Spindle 124,224,324: cutting blade 124-1: Abutment 124-2: Cutting edge 125: blade cover 128,328: washers 129,329: Screw 130: Y axis moving unit 140: Z axis moving unit 150: Washing unit 160: film cassette 170: control unit 200: processed objects 201: front 202: Splitting the scheduled line 203: Device 204: Back 210: Adhesive tape 211: Ring Frame 222-1: thread groove 229: lock nut X, Y, Z: direction

Fig. 1 is a perspective view showing a configuration example of a cutting device equipped with a flange mechanism of the first embodiment. Fig. 2 is an exploded perspective view showing a configuration example of a cutting unit equipped with a flange mechanism of the first embodiment. Fig. 3 is a cross-sectional view showing a configuration example of a cutting unit equipped with a flange mechanism of the first embodiment. Fig. 4 is an exploded perspective view showing a configuration example of a cutting unit equipped with a flange mechanism of the second embodiment. Fig. 5 is a cross-sectional view showing a configuration example of a cutting unit equipped with a flange mechanism of the second embodiment. Fig. 6 is an exploded perspective view showing a configuration example of a cutting unit equipped with a flange mechanism of the third embodiment. Fig. 7 is a cross-sectional view showing a configuration example of a cutting unit equipped with a flange mechanism of the third embodiment.

1: Flange mechanism

2: convex seat

3: Flange

3-1: Support surface

3-2: Ring recess

3-3: Suction hole

4: Cylinder part

4-1: outer circumference

4-2: Suction hole

5,124-3: Installation hole

6: Connecting road

10: Rotary joint

11: Cylindrical boss

12: Flange

13: receiving hole

14: pipe fittings

17: Switching valve

18: Attraction source

19: fluid supply source

20: Flange system

120: cutting unit

121: Spindle housing

121-1: End

122: Spindle

122-1: screw hole

124: cutting blade

124-1: Abutment

124-2: Cutting edge

128: Washer

129: Screw

X, Y, Z: direction

Claims (2)

A flange mechanism in which a cutting blade with a mounting hole in the center part and a cutting edge at the outer periphery is mounted on a main shaft that becomes a rotating shaft. The aforementioned flange mechanism is characterized in: have: A cylindrical boss, the front side is inserted into the mounting hole of the cutting blade, and the main shaft is fixed on the rear side; and The flange portion extends in the radial direction from the rear side of the boss portion, and the front surface is provided with a support surface for the cutting blade to abut, In addition, the support surface is provided with a suction hole for sucking and fixing the cutting blade, and a communication path connecting the suction hole with the suction source, The communication path is provided with a switching valve that also communicates with a fluid supply source to switch the connection with the fluid supply source and the suction source, and the fluid supply source supplies cleaning fluid for the communication path. A flange mechanism in which a disc-shaped cutting blade with a mounting hole in the center is mounted on a main shaft that becomes a rotating shaft. The characteristics of the aforementioned flange mechanism are: have: A cylindrical boss portion, the front side is inserted into the mounting hole of the cutting blade, and the main shaft is fixed on the rear side; A fixing flange portion extending in the radial direction from the rear side of the boss portion, and having a supporting surface on the front surface for the cutting blade to abut; and The pressing flange portion is provided with a recess or hole installed on the boss portion, and the cutting blade is clamped between the fixing flange portion, and In addition, the support surface is provided with a suction hole for sucking and fixing the pressing flange portion, and a communication path connecting the suction hole with the suction source, and The communication path is provided with a switching valve that also communicates with a fluid supply source to switch the connection with the fluid supply source and the suction source, and the fluid supply source supplies cleaning fluid for the communication path.

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