TW201732910A - Chuck platform capable of preventing clogging caused by intrusion of liquid - Google Patents

Abstract

To provide a chuck platform capable of preventing clogging caused by intrusion of liquid. A chucking platform (10, 38) is provided on a processing device (2) for processing a plate-like workpiece (11), the chucking platform is used for holding a workpiece unit (1) composed of a workpiece, an annular frame (15) surrounding the workpiece, and an adhesive tape which is attached to the workpiece and the frame. The chuck platform comprises a main body part (42) having a holding surface (42a) for sucking and holding the workpiece through the adhesive tape; and a frame support part (48) which is on the outer side to support the frame. The frame support part is formed to have a smaller outer diameter than that of the frame, and if the frame support part is overlaid by the frame in such a way that the outer edge (15a) of the frame protrudes toward the outside of the frame support part, the upper portion of the main body part and the frame support part will be entirely covered by the workpiece unit.

Description

Chuck platform

The present invention relates to a chuck table for attracting and holding a sheet-like workpiece.

In a processing apparatus that processes a workpiece such as a semiconductor wafer or a package substrate, for example, a chuck platform that sucks and holds a workpiece under a vacuum (vacuum) is provided. By sucking and holding the workpiece by the chuck platform, the workpiece can be processed with sufficiently high precision.

In recent years, in order to facilitate the handling of workpieces before and after processing, there is an increasing opportunity to form a workpiece unit (frame unit) which is attached to an adhesive tape having a larger diameter than the workpiece. The processed object is formed by fixing a ring-shaped frame to the outer edge portion of the adhesive tape. In this case, the chuck platform is configured to be able to hold the entire workpiece unit (for example, refer to Patent Document 1).

[Previous Technical Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2010-21464

In the processing of the workpiece, in order to promote the discharge of machining chips or the cooling of each part, a machining liquid such as pure water is generally supplied to the workpiece and the tool. However, since there is a slight gap between the workpiece unit and the chuck platform, the machining fluid containing the machining waste is sucked into the gap, and the chuck platform (especially the negative pressure transmission path) is easily blocked. The problem.

The present invention has been made in view of the above problems, and an object thereof is to provide a chuck platform capable of preventing clogging caused by a liquid intruding from a gap.

According to an aspect of the present invention, a chuck platform is provided which is provided in a processing apparatus for processing a plate-shaped workpiece, and holds a frame and a ring-shaped frame surrounding the workpiece, And a chuck platform attached to the workpiece and the workpiece unit formed of the adhesive tape of the frame, characterized in that the main body has a main body portion that is held by the adhesive tape to hold and hold the workpiece. And the frame support portion supports the frame outside the body portion; the frame support portion is formed to have an outer diameter smaller than the frame, and the outer edge of the frame protrudes toward the outer side of the frame support portion When the frame is overlapped with the frame supporting portion, the entire upper surface of the main body portion and the frame supporting portion is covered by the workpiece unit.

In one aspect of the invention, preferably, the frame supporting portion further includes a magnetic force generating portion, and when the frame is formed of a ferromagnetic material, the frame is held by magnetic attraction.

Further, in an aspect of the invention, preferably, the frame supporting portion extends outward from a position lower than the holding surface of the outer peripheral side surface of the main body portion, between the frame supporting portion and the holding surface Formed a height difference.

Further, in an aspect of the invention, it is preferable that a part of the frame supporting portion is cut away.

A chuck platform according to an aspect of the present invention includes a main body portion having a holding surface for holding a workpiece and a frame supporting portion having a smaller outer diameter than the frame. Therefore, the outer edge of the frame protrudes toward the outer side of the frame supporting portion. When the frame is superposed on the frame supporting portion, the entire upper surface of the main body portion and the frame supporting portion is covered by the workpiece unit.

As a result, the liquid supplied to the workpiece unit becomes difficult to flow to the frame support portion, and the intrusion of the liquid into the gap between the workpiece unit and the frame support portion can be prevented. That is to say, according to the chuck platform of one aspect of the present invention, it is possible to prevent clogging of the holding surface caused by the liquid intruding from the gap.

2‧‧‧Cutting device (processing device)

4‧‧‧Abutment

4a, 4b‧‧‧ openings

6‧‧‧X-axis mobile platform

8‧‧‧Dust-proof drip shield

10,38‧‧‧Chuck platform

12‧‧‧Cutting unit (processing unit)

14‧‧‧Support structure

16‧‧‧Cutting unit moving mechanism

18‧‧‧Y-axis guide

20‧‧‧Y-axis moving board

22‧‧‧Y-axis ball screw

24‧‧‧Z-axis guide

26‧‧‧Z-axis moving board

28‧‧‧Z-axis ball screw

30‧‧‧Z-axis pulse motor

32‧‧‧Camera (shooting unit)

34‧‧‧Cutting knife

35‧‧‧Nozzles

36‧‧‧cleaning unit

40‧‧‧ nozzle

42‧‧‧ Body Department

42a‧‧‧ Keep face

42b‧‧‧ peripheral side

44‧‧‧ frame

44a‧‧‧ openings

44b‧‧‧ pathway

46‧‧‧Attraction board

48‧‧‧Box support

48a‧‧‧Outer edge

48b‧‧ Center

48c‧‧‧distance

48d‧‧‧Resection

50‧‧‧ Magnet (magnetic generation unit)

1‧‧‧Processed material unit (frame unit)

11‧‧‧Processed objects

13‧‧‧Adhesive tape

15‧‧‧ box

15a‧‧‧ outer edge

15b‧‧ Centre

15c‧‧‧distance

[Fig. 1] A schematic diagram showing a configuration example of a cutting device having a chuck platform Stereo picture.

Fig. 2 is a schematic plan view showing a configuration example of a workpiece unit.

Fig. 3 is a schematic plan view showing a configuration example of a chuck platform.

[Fig. 4] Fig. 4(A) is a schematic plan view showing a state in which a workpiece unit is held by a chuck platform, and Fig. 4(B) is a model in which a workpiece to be sucked and held on a chuck platform is cut. A schematic partial cross-sectional side view.

An embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a schematic perspective view showing a configuration example of a cutting device including a chuck platform of the embodiment. Further, in the present embodiment, the cutting device is described as an example, but the processing device of the present invention may be a grinding device, a polishing device, or the like.

As shown in Fig. 1, a cutting device (processing device) 2 is provided with a base 4 that supports each structure. On the upper surface of the base 4, a long rectangular opening 4a is formed in the X-axis direction (front-rear direction, processing feed direction). In the opening 4a, an X-axis moving platform 6, an X-axis moving mechanism (not shown) for moving the X-axis moving platform 6 in the X-axis direction, and a dust drip-proof cover 8 covering the X-axis moving mechanism are provided.

The X-axis moving mechanism has one of an X-axis guide rail (not shown) parallel to the X-axis direction, and the X-axis moving platform 6 is slidably attached to the X-axis guide rail. On the lower side of the X-axis moving platform 6, a nut portion (not shown) is provided, in which the X-axis ball parallel to the X-axis guide is screwed Screw (not shown).

An X-axis pulse motor (not shown) is connected to one end of the X-axis ball screw. The X-axis ball screw is rotated by the X-axis pulse motor, whereby the X-axis moving platform 6 moves in the X-axis direction along the X-axis guide.

On the X-axis moving platform 6, a chuck platform 10 that sucks and holds the workpiece unit (frame unit) 1 is provided. The chuck table 10 is coupled to a rotary drive source (not shown) such as a motor and rotates about a rotation axis parallel to the Z-axis direction (vertical direction). Further, the chuck table 10 is processed and fed in the X-axis direction by the above-described X-axis moving mechanism. Details regarding the chuck platform 10 will be described later.

Fig. 2 is a schematic plan view showing a configuration example of the workpiece unit 1. The workpiece unit 1 includes a plate-shaped workpiece 11 . The workpiece 11 is, for example, a circular semiconductor wafer made of a semiconductor material such as tantalum, and the upper surface (surface) side is divided into a plurality of predetermined dividing lines (streets) arranged in a lattice pattern. region.

On the lower surface (back surface) side of the workpiece 11, an adhesive tape 13 having a larger diameter than the workpiece 11 is attached. An annular frame 15 is fixed to the outer edge portion of the adhesive tape 13. In other words, one piece of the adhesive tape 13 is attached to the workpiece 11 and the frame 15, and the workpiece 11 is supported by the frame 15 via the adhesive tape 13.

In the present embodiment, a circular semiconductor wafer made of a semiconductor material such as germanium is formed as the workpiece 11, but the material, shape, and the like of the workpiece 11 are not limited. For example, a package base can also be used. A plate, a ceramic substrate, a glass substrate, a resin substrate, a metal substrate, or the like is used as the workpiece 11.

On the upper surface of the base 4, a gate-shaped support structure 14 that supports a cutting unit (machining unit) 12 that cuts the workpiece 11 is disposed so as to straddle the opening 4a. A cutting unit moving mechanism 16 that moves the cutting unit 12 in the Y-axis direction (left-right direction; indexing feed direction) and the Z-axis direction is provided on the front upper portion of the support structure 14.

The cutting unit moving mechanism 16 includes a pair of Y-axis guide rails 18 disposed on the front surface of the support structure 14 and parallel to the Y-axis direction. A Y-axis moving plate 20 constituting the cutting unit moving mechanism 16 is slidably attached to the Y-axis guide rail 18.

A nut portion (not shown) is provided on the back side (rear side) of the Y-axis moving plate 20, and a Y-axis ball screw 22 parallel to the Y-axis guide rail 18 is screwed to the nut portion. A Y-axis pulse motor (not shown) is connected to one end portion of the Y-axis ball screw 22. When the Y-axis pulse motor 22 rotates the Y-axis ball screw 22, the Y-axis moving plate 20 moves in the Y-axis direction along the Y-axis guide rail 18.

On the surface (front surface) of the Y-axis moving plate 20, a pair of Z-axis guide rails 24 are provided in parallel with the Z-axis direction. A Z-axis moving plate 26 is slidably mounted on the Z-axis guide rail 24.

A nut portion (not shown) is provided on the back side (rear side) of the Z-axis moving plate 26, and a Z-axis ball screw 28 parallel to the Z-axis guide 24 is screwed to the nut portion. At one end of the Z-axis ball screw 28, A Z-axis pulse motor 30 is coupled. When the Z-axis pulse motor 28 rotates the Z-axis ball screw 28, the Z-axis moving plate 26 moves in the Z-axis direction along the Z-axis guide 24.

In the lower portion of the Z-axis moving plate 26, a cutting unit 12 for cutting the workpiece 11 is provided. Further, at a position adjacent to the cutting unit 12, a camera (photographing unit) 32 that photographs the upper surface side of the workpiece 11 is provided. By cutting the unit moving mechanism 16, when the Y-axis moving plate 20 is moved in the Y-axis direction, the cutting unit 12 and the camera 32 are indexed, and if the Z-axis moving plate 26 is moved in the Z-axis direction, the cutting unit 12 And the camera 32 is raised and lowered.

The cutting unit 12 is provided with an annular cutter 34 attached to one end side of a spindle constituting a rotation axis parallel to the Y-axis direction. A rotary drive source (not shown) such as a motor is coupled to the other end side of the mandrel, and the cutter blade 34 attached to the spindle is rotated. Further, in the vicinity of the dicing blade 34, a nozzle 35 for supplying a cutting liquid (working fluid) such as pure water to the dicing blade 34 and the workpiece 11 is disposed.

At a position adjacent to the opening 4a, a circular opening 4b is formed. In the opening 4b, a washing unit 36 that washes the workpiece 11 is disposed. The cleaning unit 36 includes a chuck table 38 that sucks and holds the workpiece unit 1, and a nozzle 40 that ejects the fluid for washing toward the workpiece 11. The chuck table 38 is coupled to a rotary drive source (not shown) such as a motor and rotates about a rotation axis parallel to the Z-axis direction. Details regarding the chuck platform 38 will be described later.

When the workpiece is processed by the cutting device 2 configured as described above When the cutting process is performed, first, the workpiece unit 1 is carried in and held on the chuck table 10. Next, the chuck table 10 is moved and rotated relative to the cutting unit 12, and the position of the cutter blade 34 is fitted to the extension line of the planned dividing line to be processed.

Thereafter, the cutter blade 34 is lowered to a height at which it can come into contact with the workpiece 11 and rotated, and the cutting liquid is supplied while the chuck table 10 is moved in parallel with respect to the planned dividing line of the workpiece. In this way, the workpiece 11 can be cut along the line to be divided. The workpiece 11 after the cutting process is carried out, for example, from the chuck table 10, and is washed by the cleaning unit 36.

3 is a schematic plan view showing a configuration example of the chuck platforms 10, 38.

The chuck platforms 10, 38 are provided with a body portion 42. The main body portion 42 includes a disk-shaped frame body 44 formed of a metal such as stainless steel or aluminum. A circular opening 44a is formed in the central portion of the upper surface of the frame 44, and an attraction plate 46 conforming to the shape of the opening 44a is fitted in the opening 44a.

The suction plate 46 is formed in a plate shape by a porous material, for example, and the upper surface thereof is a holding surface 42a that sucks and holds the workpiece 11 via the adhesive tape 13 . The opening 44a is connected to a suction source (not shown) through a passage 44b (see FIG. 4(B)) formed inside the casing 44. By applying a negative pressure (vacuum) of the suction source to the suction plate 46, an attractive force for attracting the workpiece 11 is generated on the holding surface 42a.

A frame supporting portion 48 for supporting the frame 15 is provided on the outer peripheral side surface 42b of the main body portion 42 (the side surface of the frame body 44). This frame support 48 is formed into a plate shape using, for example, a metal such as stainless steel or aluminum. Further, a magnet (magnetic force generating portion) 50 that generates a magnetic force is disposed in the frame supporting portion 48. When the frame 11 is made of a ferromagnetic material, the frame 11 can be held by the magnetic force of the magnet 50. Further, as the magnet 50, any of an electromagnet and a permanent magnet can be used.

The frame support portion 48 is typically formed in an annular shape in which the outer edge 48a side is partially cut away. The distance 48c from the outer edge 48a of the frame supporting portion 48 to the center 48b is smaller than the distance 15c from the outer edge 15a to the center 15b of the frame 15 constituting the workpiece unit 1. That is, the frame supporting portion 48 is formed to have an outer diameter smaller than the frame 15.

In this manner, the outer diameter of the frame supporting portion 48 is made smaller than the frame 15, whereby the entire upper surface of the main body portion 42 and the frame supporting portion 48 can be covered by the workpiece unit 1. In other words, since the workpiece unit 1 can function as an umbrella, it is particularly difficult to invade the liquid (the cutting fluid or the cleaning fluid) supplied to the upper surface of the workpiece unit 1 to be processed. The gap between the object unit 1 and the frame support portion 48.

Further, the frame supporting portion 48 extends outward from a position lower than the holding surface 42a of the outer circumferential side surface 42b (see FIG. 4(B)), and a level difference is formed between the holding surface 42a and the frame supporting portion 48. Therefore, even if the liquid is immersed in the gap between the workpiece unit 1 and the frame supporting portion 48 following the adhesive tape 13 or the like, most of the liquid will drip in the gap between the height difference and the adhesive tape 13, without climbing up. Height difference. That is, the intrusion of the liquid can be prevented by the height difference, so that the liquid hardly reaches the holding surface 42a.

Further, since a part of the frame supporting portion 48 is cut off, the probability of the liquid intruding into the gap between the workpiece unit 1 and the frame supporting portion 48 becomes lower, and the liquid that has entered the gap is also easily passed through the cutout portion 48d. It is discharged. In the present embodiment, the four deep cut portions 48d reaching the main body portion 42 from the outer edge 48a are provided at substantially equal intervals, but the shape, number, arrangement, and the like of the cut portions 48 can be arbitrarily changed.

Fig. 4(A) is a schematic plan view showing a state in which the workpiece unit 1 is held by the chuck platforms 10, 38. As shown in FIG. 4(A), when the outer peripheral edge 15a of the frame 15 protrudes toward the outer side of the frame supporting portion 48, the frame 15 is superposed on the frame supporting portion 48, and the upper surface of the main body portion 42 and the frame supporting portion 48 are provided. The whole is covered by the workpiece unit 1.

Fig. 4(B) is a schematic partial cross-sectional side view showing a state in which the workpiece 11 sucked and held on the chuck table 10 is cut. As shown in FIG. 4(B), when the rotary cutter 34 is cut into the workpiece 11, the cutting liquid 21 is supplied to the workpiece 11 and the cutter blade 34.

As described above, the entire upper surface of the main body portion 42 and the frame support portion 48 are covered by the workpiece unit 1. Therefore, the workpiece unit 1 realizes the function as an umbrella for the cutting liquid 21. In this manner, the cutting liquid 21 is less likely to adhere to the frame supporting portion 48 and the like which are covered by the workpiece unit 1, and the cutting liquid 21 is prevented from entering the gap between the workpiece unit 1 and the frame supporting portion 48.

As described above, the chuck platforms 10 and 38 of the present embodiment include the main body portion 42 having the holding surface 42a for holding the workpiece 11 and the frame supporting portion 48 having an outer diameter smaller than the frame 15, so that the frame 15 is of When the outer edge 15a protrudes toward the outer side of the frame supporting portion 48, the frame 15 is superposed on the frame supporting portion 48, and the entire upper surface of the main body portion 42 and the frame supporting portion 48 is covered by the workpiece unit 1.

As a result, the liquid supplied to the workpiece unit 1 becomes difficult to flow to the frame supporting portion 48, and the intrusion of the liquid into the gap between the workpiece unit 1 and the frame supporting portion 48 can be prevented. In other words, according to the chuck platforms 10 and 38 of the present embodiment, clogging of the holding surface 42a by the liquid intruding from the gap can be prevented.

Further, the present invention is not limited to the description of the above embodiments, and can be implemented in various modifications. For example, in the above-described embodiment, the frame supporting portion 48 of the frame 15 is adsorbed and held by the magnet (magnetic force generating portion) 50. However, the frame supporting portion 48 may be configured to be attracted by a vacuum (vacuum). Hold box 15.

Further, in the above-described embodiment, a cutting device (processing device) 2 is provided which includes the chuck table 10 for holding the workpiece unit 1 during cutting processing (processing) and the workpiece unit 1 during cleaning. The chuck platform 38, but the use aspect of the chuck platform of the present invention is not particularly limited. For example, it is also possible to use only one chuck platform of the present invention to constitute a processing apparatus.

The structures, methods, and the like of the above-described embodiments can be appropriately modified and implemented without departing from the scope of the invention.

1‧‧‧Processed material unit (frame unit)

10,38‧‧‧Chuck platform

11‧‧‧Processed objects

12‧‧‧Cutting unit (processing unit)

13‧‧‧Adhesive tape

15‧‧‧ box

15a‧‧‧ outer edge

21‧‧‧ cutting fluid

34‧‧‧Cutting knife

42‧‧‧ Body Department

42a‧‧‧ Keep face

42b‧‧‧ peripheral side

44‧‧‧ frame

44a‧‧‧ openings

44b‧‧‧ pathway

46‧‧‧Attraction board

48‧‧‧Box support

48a‧‧‧Outer edge

48d‧‧‧Resection

50‧‧‧ Magnet (magnetic generation unit)

Claims (4)

A chucking platform provided in a processing device for processing a plate-shaped workpiece, and holding the workpiece, a ring-shaped frame surrounding the workpiece, and attached to the workpiece and the workpiece The chuck platform of the workpiece unit formed by the adhesive tape of the frame, comprising: a main body portion having a holding surface for sucking and holding the workpiece through the adhesive tape; and a frame supporting portion on the body The outer side of the portion supports the frame; the frame support portion is formed to have an outer diameter smaller than the frame, and if the outer edge of the frame protrudes toward the outer side of the frame support portion, the frame is superposed on the frame support portion. The main body portion and the entire upper surface of the frame support portion are covered by the workpiece unit. The chuck platform according to claim 1, wherein the frame support portion further includes a magnetic force generating portion, and when the frame is formed of a ferromagnetic material, the frame is held by magnetic attraction. The chuck platform according to claim 1 or 2, wherein the frame support portion extends outward from a position lower than the holding surface of the outer peripheral side surface of the main body portion, and the frame support portion A height difference is formed between the holding surface and the holding surface. The chuck platform of claim 1 or 2, wherein a portion of the frame support portion is cut away.