TW201718738A - 氣霧沈積奈米微粒於基材上之裝置及方法 - Google Patents
氣霧沈積奈米微粒於基材上之裝置及方法 Download PDFInfo
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- TW201718738A TW201718738A TW105120670A TW105120670A TW201718738A TW 201718738 A TW201718738 A TW 201718738A TW 105120670 A TW105120670 A TW 105120670A TW 105120670 A TW105120670 A TW 105120670A TW 201718738 A TW201718738 A TW 201718738A
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- 239000000758 substrate Substances 0.000 title claims abstract description 112
- 238000000151 deposition Methods 0.000 title claims abstract description 93
- 239000002105 nanoparticle Substances 0.000 title claims abstract description 83
- 238000000034 method Methods 0.000 title claims abstract description 37
- 239000000443 aerosol Substances 0.000 claims abstract description 65
- 230000008021 deposition Effects 0.000 claims abstract description 60
- 239000000463 material Substances 0.000 claims abstract description 58
- 230000005686 electrostatic field Effects 0.000 claims abstract description 28
- 238000004519 manufacturing process Methods 0.000 claims abstract description 10
- -1 polyhexamethylene Polymers 0.000 claims description 60
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 51
- 239000002041 carbon nanotube Substances 0.000 claims description 36
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 36
- 229920000642 polymer Polymers 0.000 claims description 30
- 239000002109 single walled nanotube Substances 0.000 claims description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 18
- 229920001577 copolymer Polymers 0.000 claims description 16
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 15
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 15
- 229920002313 fluoropolymer Polymers 0.000 claims description 11
- 150000001336 alkenes Chemical class 0.000 claims description 10
- 239000010408 film Substances 0.000 claims description 10
- 230000005661 hydrophobic surface Effects 0.000 claims description 10
- 229920000052 poly(p-xylylene) Polymers 0.000 claims description 10
- 238000007639 printing Methods 0.000 claims description 10
- 239000003989 dielectric material Substances 0.000 claims description 8
- 230000005684 electric field Effects 0.000 claims description 8
- 238000005538 encapsulation Methods 0.000 claims description 8
- 239000004811 fluoropolymer Substances 0.000 claims description 8
- 239000002071 nanotube Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 8
- 238000012546 transfer Methods 0.000 claims description 8
- 239000004793 Polystyrene Substances 0.000 claims description 6
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000004809 Teflon Substances 0.000 claims description 6
- 229920006362 Teflon® Polymers 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 239000002127 nanobelt Substances 0.000 claims description 6
- 239000002135 nanosheet Substances 0.000 claims description 6
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims description 6
- 239000004417 polycarbonate Substances 0.000 claims description 6
- 229920000515 polycarbonate Polymers 0.000 claims description 6
- 229920002223 polystyrene Polymers 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 6
- 229910052582 BN Inorganic materials 0.000 claims description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical group N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 5
- JHWNWJKBPDFINM-UHFFFAOYSA-N Laurolactam Chemical compound O=C1CCCCCCCCCCCN1 JHWNWJKBPDFINM-UHFFFAOYSA-N 0.000 claims description 5
- 239000004677 Nylon Substances 0.000 claims description 5
- 229920000299 Nylon 12 Polymers 0.000 claims description 5
- 229920002302 Nylon 6,6 Polymers 0.000 claims description 5
- 239000002033 PVDF binder Substances 0.000 claims description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 5
- 229920001328 Polyvinylidene chloride Polymers 0.000 claims description 5
- 239000004699 Ultra-high molecular weight polyethylene Substances 0.000 claims description 5
- RJGDLRCDCYRQOQ-UHFFFAOYSA-N anthrone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3CC2=C1 RJGDLRCDCYRQOQ-UHFFFAOYSA-N 0.000 claims description 5
- 229920005549 butyl rubber Polymers 0.000 claims description 5
- 239000011852 carbon nanoparticle Substances 0.000 claims description 5
- 229920002301 cellulose acetate Polymers 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims description 5
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 5
- 239000002073 nanorod Substances 0.000 claims description 5
- 239000002077 nanosphere Substances 0.000 claims description 5
- 229920001778 nylon Polymers 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 5
- 229910052698 phosphorus Inorganic materials 0.000 claims description 5
- 239000011574 phosphorus Substances 0.000 claims description 5
- 229920001084 poly(chloroprene) Polymers 0.000 claims description 5
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 5
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 5
- 229920002098 polyfluorene Polymers 0.000 claims description 5
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 5
- 239000011118 polyvinyl acetate Substances 0.000 claims description 5
- 229920002689 polyvinyl acetate Polymers 0.000 claims description 5
- 239000005033 polyvinylidene chloride Substances 0.000 claims description 5
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 5
- ITRNXVSDJBHYNJ-UHFFFAOYSA-N tungsten disulfide Chemical compound S=[W]=S ITRNXVSDJBHYNJ-UHFFFAOYSA-N 0.000 claims description 5
- 229920000785 ultra high molecular weight polyethylene Polymers 0.000 claims description 5
- MHZGKXUYDGKKIU-UHFFFAOYSA-N Decylamine Chemical compound CCCCCCCCCCN MHZGKXUYDGKKIU-UHFFFAOYSA-N 0.000 claims description 4
- 239000000020 Nitrocellulose Substances 0.000 claims description 4
- 239000004816 latex Substances 0.000 claims description 4
- 229920000126 latex Polymers 0.000 claims description 4
- 229920001220 nitrocellulos Polymers 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000011800 void material Substances 0.000 claims description 4
- 239000004743 Polypropylene Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 230000005660 hydrophilic surface Effects 0.000 claims description 3
- 229920001155 polypropylene Polymers 0.000 claims description 3
- 239000004800 polyvinyl chloride Substances 0.000 claims description 3
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 3
- 239000001294 propane Substances 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 claims 6
- 239000003822 epoxy resin Substances 0.000 claims 3
- 229920000647 polyepoxide Polymers 0.000 claims 3
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical class CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 claims 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 claims 1
- 229940088594 vitamin Drugs 0.000 claims 1
- 229930003231 vitamin Natural products 0.000 claims 1
- 235000013343 vitamin Nutrition 0.000 claims 1
- 239000011782 vitamin Substances 0.000 claims 1
- 230000008901 benefit Effects 0.000 description 31
- 239000007789 gas Substances 0.000 description 29
- 238000013461 design Methods 0.000 description 10
- 239000000976 ink Substances 0.000 description 8
- 239000010410 layer Substances 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 238000009472 formulation Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000003570 air Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000011084 recovery Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000001052 transient effect Effects 0.000 description 3
- IXQGCWUGDFDQMF-UHFFFAOYSA-N 2-Ethylphenol Chemical compound CCC1=CC=CC=C1O IXQGCWUGDFDQMF-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- YLQWCDOCJODRMT-UHFFFAOYSA-N fluoren-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C2=C1 YLQWCDOCJODRMT-UHFFFAOYSA-N 0.000 description 2
- 229910021389 graphene Inorganic materials 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 229920001600 hydrophobic polymer Polymers 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000012454 non-polar solvent Substances 0.000 description 2
- 229920006284 nylon film Polymers 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000001856 aerosol method Methods 0.000 description 1
- 229920005603 alternating copolymer Polymers 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229920001400 block copolymer Polymers 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000002238 carbon nanotube film Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- XUCNUKMRBVNAPB-UHFFFAOYSA-N fluoroethene Chemical compound FC=C XUCNUKMRBVNAPB-UHFFFAOYSA-N 0.000 description 1
- 238000004770 highest occupied molecular orbital Methods 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002048 multi walled nanotube Substances 0.000 description 1
- 239000002074 nanoribbon Substances 0.000 description 1
- 239000006199 nebulizer Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920002959 polymer blend Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000002094 self assembled monolayer Substances 0.000 description 1
- 239000013545 self-assembled monolayer Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229920006301 statistical copolymer Polymers 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/08—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means
- B05B12/082—Arrangements for controlling delivery; Arrangements for controlling the spray area responsive to condition of liquid or other fluent material to be discharged, of ambient medium or of target ; responsive to condition of spray devices or of supply means, e.g. pipes, pumps or their drive means responsive to a condition of the discharged jet or spray, e.g. to jet shape, spray pattern or droplet size
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/035—Discharge apparatus, e.g. electrostatic spray guns characterised by gasless spraying, e.g. electrostatically assisted airless spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B12/00—Arrangements for controlling delivery; Arrangements for controlling the spray area
- B05B12/16—Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling the spray area
- B05B12/20—Masking elements, i.e. elements defining uncoated areas on an object to be coated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/025—Discharge apparatus, e.g. electrostatic spray guns
- B05B5/0255—Discharge apparatus, e.g. electrostatic spray guns spraying and depositing by electrostatic forces only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/08—Plant for applying liquids or other fluent materials to objects
- B05B5/10—Arrangements for supplying power, e.g. charging power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B5/00—Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
- B05B5/16—Arrangements for supplying liquids or other fluent material
- B05B5/1608—Arrangements for supplying liquids or other fluent material the liquid or other fluent material being electrically conductive
- B05B5/1616—Arrangements for supplying liquids or other fluent material the liquid or other fluent material being electrically conductive and the arrangement comprising means for insulating a grounded material source from high voltage applied to the material
- B05B5/165—Arrangements for supplying liquids or other fluent material the liquid or other fluent material being electrically conductive and the arrangement comprising means for insulating a grounded material source from high voltage applied to the material by dividing the material into discrete quantities, e.g. droplets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/007—Processes for applying liquids or other fluent materials using an electrostatic field
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
- B05D1/04—Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
- B05D1/04—Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field
- B05D1/045—Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field on non-conductive substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
- B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/159—Carbon nanotubes single-walled
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/06—Coating with compositions not containing macromolecular substances
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L25/00—Compositions of, homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Compositions of derivatives of such polymers
- C08L25/18—Homopolymers or copolymers of aromatic monomers containing elements other than carbon and hydrogen
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6757—Thin-film transistors [TFT] characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
- H10K10/471—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only organic materials
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
- H10K85/221—Carbon nanotubes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2601/00—Inorganic fillers
- B05D2601/20—Inorganic fillers used for non-pigmentation effect
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Materials Engineering (AREA)
- Nanotechnology (AREA)
- Organic Chemistry (AREA)
- Polymers & Plastics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Composite Materials (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thin Film Transistor (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Electrostatic Spraying Apparatus (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562199675P | 2015-07-31 | 2015-07-31 | |
| CA2899255A CA2899255A1 (en) | 2015-07-31 | 2015-07-31 | Apparatus and method for aerosol deposition of nanoparticles on a substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201718738A true TW201718738A (zh) | 2017-06-01 |
Family
ID=57937673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105120670A TW201718738A (zh) | 2015-07-31 | 2016-06-30 | 氣霧沈積奈米微粒於基材上之裝置及方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20190001360A1 (OSRAM) |
| EP (1) | EP3328921A4 (OSRAM) |
| JP (1) | JP2018534120A (OSRAM) |
| KR (1) | KR20180040599A (OSRAM) |
| CN (1) | CN108026304A (OSRAM) |
| CA (2) | CA2899255A1 (OSRAM) |
| TW (1) | TW201718738A (OSRAM) |
| WO (1) | WO2017021794A1 (OSRAM) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102023106B1 (ko) * | 2017-02-20 | 2019-09-20 | 광운대학교 산학협력단 | 용액 공정 기반 고품질 질화 붕소 박막 제조 및 소자 적용 방법 |
| FI129565B (en) * | 2019-04-24 | 2022-04-29 | Canatu Oy | Apparatuses and method for oriented deposition |
| CN112570217A (zh) * | 2019-09-27 | 2021-03-30 | 深圳市向宇龙自动化设备有限公司 | 一种多功能快速点胶系统 |
| US11530479B2 (en) | 2019-10-18 | 2022-12-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Atomic layer deposition tool and method |
| KR102278712B1 (ko) * | 2019-10-28 | 2021-07-16 | 광운대학교 산학협력단 | 실온에서 에어로졸 증착에 의한 페로브스카이트-유도 초민감도와 고안정 습도 센서 시스템 |
| GB2598964B (en) * | 2020-09-22 | 2024-12-25 | Brian King Andrew | Methods and apparatus for inducing chemical reactions using electro-statics |
| CN113478809B (zh) * | 2021-07-06 | 2023-05-30 | 上海科技大学 | 微纳结构的增材制造方法 |
| CN113387357A (zh) * | 2021-07-22 | 2021-09-14 | 江西理工大学 | 一种MXene褶皱纳米球的制备方法 |
| JP7505472B2 (ja) | 2021-10-28 | 2024-06-25 | トヨタ自動車株式会社 | 電極の製造方法および電極の製造装置 |
| CN113941462A (zh) * | 2021-11-17 | 2022-01-18 | 秦皇岛泰治医疗科技有限公司 | 一种用于口罩生产光触媒喷涂设备 |
| CN114054293A (zh) * | 2021-11-17 | 2022-02-18 | 珠海格力智能装备有限公司 | 一种基于嵌入式的喷胶控制系统及其使用方法 |
| CN114602747A (zh) * | 2022-04-12 | 2022-06-10 | 吉水县伟兵信息科技有限公司 | 一种装修用瓷砖涂胶装置 |
| KR102612286B1 (ko) * | 2022-04-22 | 2023-12-12 | 한국과학기술원 | 정전분무 노즐 필름 |
| CN115488003B (zh) * | 2022-09-27 | 2024-11-22 | 康佳集团股份有限公司 | 一种工件喷胶装置 |
| KR102885888B1 (ko) * | 2023-01-04 | 2025-11-17 | 한국에너지기술연구원 | 섬유 코팅 장치 |
| US12617672B2 (en) * | 2023-05-08 | 2026-05-05 | United States Of America As Represented By The Secretary Of The Army | On-demand scalable nano-scale 3D printing system |
| CN118109807B (zh) * | 2024-03-05 | 2024-10-18 | 浙江绿岛科技有限公司 | 一种用于金属件表面形成致密防护层的气雾剂 |
| FI131846B1 (en) * | 2024-09-20 | 2026-01-08 | Canatu Finland Oy | Method of preparing free-standing film of harm-structures and apparatus |
| CN120518328B (zh) * | 2025-07-22 | 2026-03-06 | 电子科技大学 | 微纳小球自组装掩膜制备随机网栅透明导电薄膜的方法 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4064295A (en) * | 1973-11-06 | 1977-12-20 | National Research Development Corporation | Spraying atomized particles |
| JPH06106096A (ja) * | 1992-09-29 | 1994-04-19 | Tokyo Ohka Kogyo Co Ltd | 静電塗装装置 |
| US20040101619A1 (en) * | 2000-03-30 | 2004-05-27 | Carlo Camorani | Object decoration |
| JP2004160388A (ja) * | 2002-11-14 | 2004-06-10 | Matsushita Electric Ind Co Ltd | 薄膜の作成方法と作成装置 |
| US7232771B2 (en) * | 2003-11-04 | 2007-06-19 | Regents Of The University Of Minnesota | Method and apparatus for depositing charge and/or nanoparticles |
| CN1293649C (zh) * | 2004-01-08 | 2007-01-03 | 西安交通大学 | 一种用于场发射显示器阴极的大面积碳纳米管薄膜制备方法 |
| US20060280866A1 (en) * | 2004-10-13 | 2006-12-14 | Optomec Design Company | Method and apparatus for mesoscale deposition of biological materials and biomaterials |
| JP2006142159A (ja) * | 2004-11-17 | 2006-06-08 | Kawasaki Heavy Ind Ltd | 微粒子分散複合薄膜形成方法および形成装置 |
| US7674671B2 (en) * | 2004-12-13 | 2010-03-09 | Optomec Design Company | Aerodynamic jetting of aerosolized fluids for fabrication of passive structures |
| JP2008529772A (ja) * | 2005-02-14 | 2008-08-07 | ザ ユニバーシティ オブ ノッティンガム | 重合膜の堆積 |
| JP2008043944A (ja) * | 2006-07-21 | 2008-02-28 | Matsushita Electric Ind Co Ltd | 微粒子の製造方法及び装置 |
| EP2106903A1 (de) * | 2008-02-22 | 2009-10-07 | Hermes Schleifkörper GmbH | Verfahren zum Aufstreuen abriebhemmender Werkstoffe und Vorrichtung hierzu |
| JP2011100879A (ja) * | 2009-11-06 | 2011-05-19 | National Institute Of Advanced Industrial Science & Technology | 化合物半導体薄膜及びその製造方法、並びに太陽電池 |
| KR101214044B1 (ko) * | 2010-11-22 | 2012-12-20 | 한국세라믹기술원 | 전계방출용 ｃｎｔ-금속 혼합막 제조 방법 |
| EP2766130B1 (en) * | 2011-10-12 | 2020-07-08 | 1366 Technologies Inc. | Apparatus and process for depositing a thin layer of resist on a substrate |
| US8658256B2 (en) * | 2012-06-20 | 2014-02-25 | The Boeing Company | Methods of coating substrates with electrically charged conductive materials, electrically conductive coated substrates, and associated apparatuses |
| JP2014063849A (ja) * | 2012-09-20 | 2014-04-10 | Mitsubishi Chemicals Corp | 有機半導体素子及びその製造方法、並びに薄膜の製造方法 |
| DE102012113124A1 (de) * | 2012-12-27 | 2014-07-03 | Ev Group E. Thallner Gmbh | Sprühdüseneinrichtung und Verfahren zum Beschichten |
| US10201809B2 (en) * | 2013-07-05 | 2019-02-12 | Nitto Denko Corporation | Photocatalyst sheet |
| FI20135903L (fi) * | 2013-09-09 | 2015-03-10 | Beneq Oy | Laite ja menetelmä aerosolin valmistamiseksi ja kohdistinosa |
| FI125920B (en) * | 2013-09-09 | 2016-04-15 | Beneq Oy | A method of coating a substrate |
| US8940562B1 (en) * | 2014-06-02 | 2015-01-27 | Atom Nanoelectronics, Inc | Fully-printed carbon nanotube thin film transistor backplanes for active matrix organic light emitting devices and liquid crystal displays |
| KR20180068332A (ko) * | 2015-11-12 | 2018-06-21 | 코넬 유니버시티 | 공기 제어식 전자분무 제조 및 그 생성물 |
-
2015
- 2015-07-31 CA CA2899255A patent/CA2899255A1/en not_active Abandoned
-
2016
- 2016-06-14 KR KR1020187006016A patent/KR20180040599A/ko not_active Ceased
- 2016-06-14 CN CN201680053463.1A patent/CN108026304A/zh active Pending
- 2016-06-14 WO PCT/IB2016/053502 patent/WO2017021794A1/en not_active Ceased
- 2016-06-14 US US15/748,947 patent/US20190001360A1/en not_active Abandoned
- 2016-06-14 EP EP16832379.8A patent/EP3328921A4/en not_active Withdrawn
- 2016-06-14 CA CA2994365A patent/CA2994365A1/en not_active Abandoned
- 2016-06-14 JP JP2018504818A patent/JP2018534120A/ja active Pending
- 2016-06-30 TW TW105120670A patent/TW201718738A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP2018534120A (ja) | 2018-11-22 |
| EP3328921A4 (en) | 2019-08-21 |
| KR20180040599A (ko) | 2018-04-20 |
| US20190001360A1 (en) | 2019-01-03 |
| CA2899255A1 (en) | 2017-01-31 |
| WO2017021794A1 (en) | 2017-02-09 |
| CA2994365A1 (en) | 2017-02-09 |
| CN108026304A (zh) | 2018-05-11 |
| EP3328921A1 (en) | 2018-06-06 |
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