TW201716211A - Embossing tool and method for preparation thereof - Google Patents

Embossing tool and method for preparation thereof Download PDF

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Publication number
TW201716211A
TW201716211A TW105127782A TW105127782A TW201716211A TW 201716211 A TW201716211 A TW 201716211A TW 105127782 A TW105127782 A TW 105127782A TW 105127782 A TW105127782 A TW 105127782A TW 201716211 A TW201716211 A TW 201716211A
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gold
alloy
layer
mold
embossing tool
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TW105127782A
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Chinese (zh)
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TWI620651B (en
Inventor
義明 康
杜貴 黎
蕪 李
唐納德A 裘茲
哈南 劉
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電子墨水加州股份有限公司
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Priority claimed from US14/841,560 external-priority patent/US9919553B2/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/38Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
    • B29C33/40Plastics, e.g. foam or rubber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/42Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/021Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer

Abstract

An embossing tool is prepared by: forming a mold (51, 52) having a non-planar mold surface defining the external form of the embossing tool; depositing a layer (53) of gold or an alloy thereof over the mold surface; depositing a base metal (54) over the layer (53) of gold or alloy thereof to form a layer of base metal having a substantially flat surface remote from the mold surface; and removing the mold (51, 52) from the layers (53, 54) of gold or alloy thereof and base metal to form an embossing tool having a three-dimensional structure on one side and a substantially flat surface on the other.

Description

壓花工具及其製備方法 Embossing tool and preparation method thereof

本發明係關於一種壓花(embossing)工具,一種用於製備這種壓花工具的組合件(assembly),和一種用於製備這種壓花工具的方法。 The present invention relates to an embossing tool, an assembly for preparing such an embossing tool, and a method for preparing such an embossing tool.

壓花工具通常由鎳、銅、合金或其他類型的複合材料製成。鎳是最廣泛使用的用於壓花機製造的材料。 Embossing tools are typically made of nickel, copper, alloy or other types of composite materials. Nickel is the most widely used material for the manufacture of embossing machines.

存在一些與當前可得的壓花工具有關的問題,尤其是壓花後固化的材料或熱壓花的材料從壓花工具的釋放不完全。 There are some problems associated with currently available embossing tools, particularly the incomplete release of embossed cured material or hot embossed material from the embossing tool.

有許多用於使壓花工具的表面改性以降低壓花工具的表面與固化的或熱壓花的材料之間的黏著性的方法。這些方法可包括矽烷塗布、矽氧烷樹脂塗布、PTFE(聚四氟乙烯)塗布或鎳-PTFE複合鍍敷。不幸的是,它們全部都不能得到令人滿意的結果。 There are a number of methods for modifying the surface of an embossing tool to reduce the adhesion between the surface of the embossing tool and the cured or hot embossed material. These methods may include decane coating, decane resin coating, PTFE (polytetrafluoroethylene) coating or nickel-PTFE composite plating. Unfortunately, none of them can achieve satisfactory results.

可經由濕塗將矽氧烷樹脂和PTFE施加到壓花工具的表面。然而,在乾燥和固化後,在微結構表面上的塗層的厚度均勻性差,這可能改變在壓花工具上得到的微結構的形狀。 The decane resin and PTFE can be applied to the surface of the embossing tool via wet coating. However, after drying and curing, the thickness uniformity of the coating on the microstructured surface is poor, which may change the shape of the microstructure obtained on the embossing tool.

當壓花工具的表面上的微結構具有高的深寬比(aspect ratio)時,經由物理氣相沉積(PVD)或化學氣相沉積(CVD)的PTFE塗層已經表現出分散能力(throwing power)差,還表現出覆蓋不均勻。此外,PTFE塗層的耐久性和機械強度差是另外的顧慮,尤其是如果壓花工具需要廣泛地用於大量生產時。 When the microstructure on the surface of the embossing tool has a high aspect ratio, the PTFE coating via physical vapor deposition (PVD) or chemical vapor deposition (CVD) has exhibited a throwing power (throwning power) ) Poor, also showing uneven coverage. In addition, the durability and mechanical strength of the PTFE coating are an additional concern, especially if the embossing tool needs to be widely used in mass production.

可藉由電鍍或無電鍍(electro-less plating)方法將鎳-PTFE複合塗層施加到壓花工具的表面。然而,最小的塗層厚度通常是幾微米。因此,如果壓花工具在其表面上具有小尺寸的微結構,尤其是窄槽,那麼這種塗層可能徹底改變微結構的輪廓和深寬比,使得壓花工作困難得多。 The nickel-PTFE composite coating can be applied to the surface of the embossing tool by electroplating or electro-less plating. However, the minimum coating thickness is typically a few microns. Therefore, if the embossing tool has a small-sized microstructure on its surface, especially a narrow groove, such a coating may completely change the contour and aspect ratio of the microstructure, making the embossing work much more difficult.

公開的第2016/0059442號美國專利申請和第104129779號臺灣申請描述了一種在其表面上具有微結構的壓花工具,使得用貴金屬或貴金屬合金塗布微結構的表面。該工具是藉由首先使用傳統光刻技術形成微結構,然後用貴金屬或貴金屬合金塗布這些微結構而製備。本發明係關於用於形成壓花工具的該方法的變型,和關於在該方法的過程中製備的結構。 U.S. Patent Application Serial No. 2016/0059442 and the Japanese Application No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. No. Publication No. The tool is prepared by first forming a microstructure using conventional photolithographic techniques and then coating the microstructures with a noble metal or precious metal alloy. The present invention relates to variations of the method for forming an embossing tool, and to structures prepared during the process.

因此,本發明提供了一種用於製備壓花工具的方法,所述方法包括:a)形成具有限定所述壓花工具的外形的非平面模具表面的模具;b)在所述模具表面上塗布金或其合金層; c)在所述金或其合金層上鍍敷卑金屬(base metal),以形成具有遠離所述模具表面的基本上平整的表面的卑金屬層;和d)從所述金或其合金層和所述卑金屬層移除所述模具,以形成一側具有三維結構而另一側具有基本上平整的表面的壓花工具。在一個實施方式中,隨後將步驟d)中製備的所述壓花工具包裹在滾筒上。所述模具可以藉由以下形成:在基材上塗布光阻材料,將所述光阻材料暴露於輻射,和移除所述光阻的曝光的區域或未曝光的區域。 Accordingly, the present invention provides a method for preparing an embossing tool, the method comprising: a) forming a mold having a non-planar mold surface defining the contour of the embossing tool; b) coating the surface of the mold Gold or its alloy layer; c) plating a base metal on the gold or alloy layer thereof to form a base metal layer having a substantially flat surface away from the surface of the mold; and d) from the gold or alloy layer thereof The mold is removed from the base metal layer to form an embossing tool having a three-dimensional structure on one side and a substantially flat surface on the other side. In one embodiment, the embossing tool prepared in step d) is subsequently wrapped on a drum. The mold can be formed by coating a photoresist material on a substrate, exposing the photoresist material to radiation, and removing exposed or unexposed regions of the photoresist.

本發明還提供了一種用於製備壓花工具的組合件,所述組合件包括:具有非平面模具表面的模具;設置在所述模具表面上並且貼合所述模具表面的金或其合金層;和遠離所述模具表面而在所述金或其合金層的相對側上的卑金屬層,所述卑金屬層具有與所述金或其合金層接觸的三維結構,和在其遠離所述金或其合金層的一側上的基本上平整的表面。 The present invention also provides an assembly for preparing an embossing tool, the assembly comprising: a mold having a non-planar mold surface; a gold or alloy layer disposed on the mold surface and conforming to the mold surface And a base metal layer on the opposite side of the gold or alloy layer thereof away from the mold surface, the base metal layer having a three-dimensional structure in contact with the gold or alloy layer thereof, and at a distance therefrom A substantially flat surface on one side of the gold or its alloy layer.

11‧‧‧壓花工具 11‧‧‧ embossing tools

12‧‧‧可固化壓花組成物或可熱壓花材料 12‧‧‧curable embossing composition or heat embossable material

21‧‧‧壓花滾筒或套筒 21‧‧‧embossing roller or sleeve

22‧‧‧感光材料 22‧‧‧Photosensitive materials

23‧‧‧光源 23‧‧‧Light source

24‧‧‧光罩 24‧‧‧Photomask

25‧‧‧圖案化感光材料 25‧‧‧ patterned photosensitive materials

26‧‧‧鍍敷材料 26‧‧‧ plating materials

31‧‧‧貴金屬或其合金 31‧‧‧ precious metals or alloys thereof

41‧‧‧基材層或基材 41‧‧‧Substrate layer or substrate

42‧‧‧感光材料 42‧‧‧Photosensitive materials

43‧‧‧導電種晶層 43‧‧‧Electrical seed layer

44‧‧‧金屬或合金、鍍敷的材料、金屬片 44‧‧‧Metal or alloy, plated material, sheet metal

51‧‧‧基材 51‧‧‧Substrate

52‧‧‧感光材料 52‧‧‧Photosensitive materials

53‧‧‧金或其合金層、金或合金塗層 53‧‧‧ Gold or its alloy layer, gold or alloy coating

54‧‧‧鍍敷的材料、金屬片 54‧‧‧ Plated materials, metal sheets

圖1A和圖1B示出了一般的壓花方法。 1A and 1B show a general embossing method.

圖2示出了用於在壓花工具的表面上形成微結構的習知技術的方法。 Figure 2 illustrates a prior art method for forming a microstructure on the surface of an embossing tool.

圖3是貫穿如前文提到的US 2016/0059442中描述的習知技術的壓花工具的橫截面,所述壓花工具具有三維微結構和鍍敷於其表面上的貴金屬(例如金)。 Figure 3 is a cross section through an embossing tool of the prior art described in the above-mentioned US 2016/0059442, which has a three-dimensional microstructure and a precious metal (e.g., gold) plated on its surface.

圖4示出了前文提到的US 2016/0059442中描述的用於形成壓花工具的方法。 Figure 4 illustrates a method for forming an embossing tool as described in the aforementioned US 2016/0059442.

圖5示出了本發明的用於形成壓花工具的方法。 Figure 5 illustrates a method of forming an embossing tool of the present invention.

圖6A是顯示由使用傳統壓花工具的壓花製程製造的物體的表面的照片。 Figure 6A is a photograph showing the surface of an object manufactured by an embossing process using a conventional embossing tool.

圖6B是顯示由使用本發明的壓花工具的壓花製程製造的物體的表面的照片。 Figure 6B is a photograph showing the surface of an object manufactured by an embossing process using the embossing tool of the present invention.

圖1A和圖1B示出了使用壓花工具(11)的壓花製程,在壓花工具(11)表面上有三維微結構(被圈出的)。如圖1B中所示,在將壓花工具(11)施加到可固化壓花組成物或可熱壓花材料(12),並且所述壓花組成物固化(例如通過輻射)或可熱壓花材料藉由熱和壓力變得有壓花之後,將固化的或熱壓花的材料從壓花工具釋放(見圖1B)。然而,使用傳統壓花工具時,由於固化的或熱壓花的材料與壓花工具的表面之間的不希望的強黏著性,固化的或熱壓花的材料有時不能從工具完全釋放。在這種情況下,可能有一些固化的或熱壓花的材料被轉移至壓花工具的表面或黏在壓花工具的表面上,在由該方法形成的物體上留下不均勻的表面。 Figures 1A and 1B show an embossing process using an embossing tool (11) having a three-dimensional microstructure (circled) on the surface of the embossing tool (11). As shown in Figure 1B, the embossing tool (11) is applied to the curable embossed composition or the heat embossable material (12), and the embossed composition is cured (e.g., by radiation) or hot compressible After the flower material becomes embossed by heat and pressure, the cured or hot embossed material is released from the embossing tool (see Figure 1B). However, when conventional embossing tools are used, the cured or hot embossed material sometimes cannot be completely released from the tool due to the undesired strong adhesion between the cured or hot embossed material and the surface of the embossing tool. In this case, there may be some cured or hot embossed material that is transferred to the surface of the embossing tool or to the surface of the embossing tool, leaving an uneven surface on the object formed by the method.

如果該物體形成於諸如透明導電層或聚合物層的支撐層上,則該問題甚至更明顯。如果固化的或熱壓花的材料與支撐層之間的黏著性比固化的或熱壓花的材料與壓花工具的表面之間的黏著性更弱,那麼固化 的或熱壓花的材料從壓花工具釋放的過程就可能導致物體從支撐層分離。 This problem is even more pronounced if the object is formed on a support layer such as a transparent conductive layer or a polymer layer. If the adhesion between the cured or hot embossed material and the support layer is weaker than the adhesion between the cured or hot embossed material and the surface of the embossing tool, then curing The release of the hot or embossed material from the embossing tool may result in the separation of the object from the support layer.

在一些情況下,物體可形成於堆疊層上,而在這種情況下,如果任何兩個相鄰的層之間的黏著性比固化的或熱壓花的材料與壓花工具的表面之間的黏著性更弱,那麼固化的或熱壓花的材料從壓花工具釋放的過程就可以導致這兩個層之間的分裂。 In some cases, an object may be formed on the stacked layer, in which case if the adhesion between any two adjacent layers is between the cured or hot embossed material and the surface of the embossing tool The adhesion is weaker, and the process of releasing the cured or hot embossed material from the embossing tool can result in splitting between the two layers.

當固化的壓花組成物或熱壓花的材料不能很好地黏附至某些支撐層時,上文描述的這些問題尤其會被顧慮。例如,如果支撐層是聚合物層,則在它們中的一個是親水的而另一個是疏水的情況下,聚合物層與固化的或熱壓花的壓花組成物之間的黏著性弱。因此,優選的是,壓花組成物和支撐層兩者都是疏水的,或者兩者都是親水的。 These problems described above are particularly a concern when the cured embossed composition or the hot embossed material does not adhere well to certain support layers. For example, if the support layer is a polymer layer, the adhesion between the polymer layer and the cured or hot embossed embossing composition is weak in the case where one of them is hydrophilic and the other is hydrophobic. Therefore, it is preferred that both the embossing composition and the support layer are hydrophobic or both are hydrophilic.

作為實例,用於形成壓花層或支撐層的合適的疏水組成物可以包括熱塑性材料、熱固性材料或其前驅物。熱塑性材料或熱固性材料前驅物的實例可以是多官能丙烯酸酯或甲基丙烯酸酯、多官能乙烯基醚、多官能環氧化物和其寡聚物或聚合物。 As an example, a suitable hydrophobic composition for forming an embossed layer or a support layer can include a thermoplastic material, a thermoset material, or a precursor thereof. Examples of thermoplastic or thermoset precursors can be multifunctional acrylates or methacrylates, polyfunctional vinyl ethers, polyfunctional epoxides, and oligomers or polymers thereof.

用於形成壓花層或支撐層的合適的親水性組成物可以包括極性寡聚物或聚合物材料。如在第7,880,958號美國專利中所描述的,這樣的極性寡聚物或聚合物材料可以選自由以下組成的群組:具有至少一個諸如硝基(-NO2)、羥基(-OH)、羧基(-COO)、烷氧基(-OR,其中R是烷基)、鹵素(例如氟、氯、溴或碘)、氰基(-CN) 和磺酸基(sultanate)(-SO3)等的基團的寡聚物或聚合物。極性聚合物材料的玻璃化轉變溫度優選在約100℃以下,且更優選在約60℃以下。合適的極性寡聚物或聚合物材料的具體實例可包括但不限於,聚乙烯醇、聚丙烯酸、聚(甲基丙烯酸2-羥基乙酯)、多羥基官能化的聚酯丙烯酸酯(諸如BOE 1025,Bomar Specialties Co,Winsted,CT)或烷氧基化丙烯酸酯,諸如乙氧基化壬基苯酚丙烯酸酯(例如,SR504,Sartomer Company),乙氧基化三羥甲基丙烷三丙烯酸酯(例如,SR9035,Sartomer Company)或乙氧基化季戊四醇四丙烯酸酯(例如,來自Sartomer Company的SR494)。 Suitable hydrophilic compositions for forming the embossed layer or support layer can include polar oligomers or polymeric materials. Such a polar oligomer or polymeric material may be selected from the group consisting of having at least one such as a nitro group (-NO 2 ), a hydroxyl group (-OH), a carboxyl group, as described in U.S. Patent No. 7,880,958. (-COO), alkoxy (-OR, wherein R is alkyl), halogen (such as fluorine, chlorine, bromine or iodine), cyano (-CN) and sultanate (-SO 3 ), etc. The oligomer or polymer of the group. The glass transition temperature of the polar polymeric material is preferably below about 100 °C, and more preferably below about 60 °C. Specific examples of suitable polar oligomers or polymeric materials can include, but are not limited to, polyvinyl alcohol, polyacrylic acid, poly(2-hydroxyethyl methacrylate), polyhydroxy-functional polyester acrylate (such as BOE) 1025, Bomar Specialties Co, Winsted, CT) or alkoxylated acrylates such as ethoxylated nonylphenol acrylate (eg SR504, Sartomer Company), ethoxylated trimethylolpropane triacrylate ( For example, SR9035, Sartomer Company) or ethoxylated pentaerythritol tetraacrylate (for example, SR494 from Sartomer Company).

方法1:method 1:

圖2示出了一種用於在壓花工具的表面上形成微結構的習知技術的方法。 Figure 2 illustrates a prior art method for forming microstructures on the surface of an embossing tool.

本文使用的術語“壓花工具”可以是壓花套筒(embossing sleeve)、壓花滾筒(embossing drum)或其他形式的壓花工具。雖然僅有壓花套筒的製備示於圖2中,但該方法也可以用於製備壓花滾筒。術語“壓花”滾筒或套筒指的是在其外表面上具有三維微結構的滾筒或套筒。使用術語“壓花滾筒”,以將其與在外表面上不具有三維微結構的平滑滾筒(plain drum)區別開。 The term "embossing tool" as used herein may be an embossing sleeve, an embossing drum, or other form of embossing tool. Although only the preparation of the embossing sleeve is shown in Figure 2, the method can also be used to prepare an embossing cylinder. The term "embossing" drum or sleeve refers to a drum or sleeve having a three-dimensional microstructure on its outer surface. The term "embossing cylinder" is used to distinguish it from a plain drum that does not have a three-dimensional microstructure on the outer surface.

可以直接將壓花滾筒用作壓花工具。當將壓花套筒用於壓花時,通常將其安裝在平滑滾筒上,以允許壓花套筒轉動。 The embossing cylinder can be used directly as an embossing tool. When an embossing sleeve is used for embossing, it is typically mounted on a smoothing cylinder to allow the embossing sleeve to rotate.

壓花滾筒或套筒(21)通常是由導電材料形成的,所述導電材料如金屬(例如鋁、銅、鋅、鎳、鉻、鐵、鈦或鈷等)、由上述金屬中的任何金屬得到的合金、或不銹鋼。可以使用不同的材料形成滾筒或套筒。例如,滾筒或套筒的中心可以由不銹鋼形成,並且將鎳層夾在不銹鋼和最外層之間,最外層可以是銅層。 The embossing cylinder or sleeve (21) is typically formed from a conductive material such as a metal (eg, aluminum, copper, zinc, nickel, chromium, iron, titanium, or cobalt, etc.), from any of the foregoing metals The resulting alloy, or stainless steel. Different materials can be used to form the drum or sleeve. For example, the center of the drum or sleeve may be formed of stainless steel and sandwich the nickel layer between the stainless steel and the outermost layer, and the outermost layer may be a copper layer.

供選擇地所述壓花滾筒或套筒(21)可由其外表面上具有導電塗層或導電種晶層(seed layer)的非導電材料形成。 Alternatively the embossing cylinder or sleeve (21) may be formed from a non-conductive material having a conductive coating or a conductive seed layer on its outer surface.

在滾筒或套筒(21)的外表面上塗布感光材料(22)之前,如圖2的步驟B中所示,可使用精密研磨和拋光以確保滾筒或套筒的外表面的光滑度。 Prior to coating the photosensitive material (22) on the outer surface of the drum or sleeve (21), as shown in step B of Figure 2, precision grinding and polishing can be used to ensure the smoothness of the outer surface of the drum or sleeve.

在步驟B中,將感光材料(22),例如光阻,塗布在滾筒或套筒(21)的外表面上。感光材料可以是正型(positive tone)、負型(negative tone)或雙重型(dual tone)。感光材料也可以是化學增幅型光阻(chemically amplified photoresist)。可以使用浸塗、噴塗或環塗(ring coating)進行塗布。在乾燥和/或烘烤後,感光材料經歷暴露於輻射源,如步驟C中所示。 In step B, a photosensitive material (22), such as a photoresist, is coated on the outer surface of the drum or sleeve (21). The photosensitive material may be a positive tone, a negative tone, or a dual tone. The photosensitive material may also be a chemically amplified photoresist. Coating can be carried out using dip coating, spray coating or ring coating. After drying and/or baking, the photosensitive material is exposed to a source of radiation as shown in step C.

供選擇地,感光材料(22)可以是乾膜光阻(其通常是有市售的),其被層壓到滾筒或套筒(21)的外表面上。當使用乾膜時,也可將其暴露於如下文所描述的輻射源。 Alternatively, the photosensitive material (22) may be a dry film photoresist (which is typically commercially available) that is laminated to the outer surface of the drum or sleeve (21). When a dry film is used, it can also be exposed to a radiation source as described below.

在步驟C中,使用合適的光源(23),例如IR、UV、電子束或鐳射,以對塗布於滾筒或套筒(21)上 的感光材料或層壓於滾筒或套筒(21)上的乾膜光阻(22)進行曝光。光源可以是連續光或者脈衝光。任選地使用光罩(24)以限定待形成的三維微結構。根據微結構,曝光可以是步進式、連續式或其組合。 In step C, a suitable light source (23), such as IR, UV, electron beam or laser, is applied to the roller or sleeve (21). The photosensitive material or the dry film photoresist (22) laminated on the drum or sleeve (21) is exposed. The light source can be continuous light or pulsed light. A photomask (24) is optionally used to define a three-dimensional microstructure to be formed. Depending on the microstructure, the exposure can be stepwise, continuous, or a combination thereof.

曝光之後顯影之前,感光材料(22)可經歷曝光後處理,例如烘烤。根據感光材料的類型,藉由使用顯影劑來移除曝光的區域或未曝光的區域。顯影之後沉積(例如電鍍、無電鍍、物理氣相沉積、化學氣相沉積或濺射沉積)之前,在其外表面上具有圖案化感光材料(25)的滾筒或套筒(如步驟D中所示)可經歷烘烤或全面曝光。圖案化感光材料的厚度優選大於待形成的三維微結構的深度或高度。 The photosensitive material (22) may undergo post-exposure treatment, such as baking, prior to development after exposure. The exposed or unexposed areas are removed by using a developer depending on the type of the photosensitive material. A roller or sleeve having a patterned photosensitive material (25) on its outer surface prior to deposition (eg, electroplating, electroless plating, physical vapor deposition, chemical vapor deposition, or sputter deposition) after development (as in step D) Show) can undergo baking or full exposure. The thickness of the patterned photosensitive material is preferably greater than the depth or height of the three-dimensional microstructure to be formed.

可以將金屬或合金(例如,鎳、鈷、鉻、銅、鋅或由上述金屬中的任何金屬得到的合金)電鍍和/或無電鍍於滾筒或套筒上。將鍍敷材料(26)沉積在滾筒或套筒的外表面上未被圖案化感光材料覆蓋的區域中。沉積厚度優選小於感光材料的厚度,如步驟E中所示。藉由調節鍍敷條件,例如陽極與陰極(即滾筒或套筒)之間的距離(如果使用電鍍),滾筒或套筒的轉動速度和/或鍍敷溶液的循環,可將沉積物在整個滾筒或套筒區域上的厚度變化控制為小於1%。 A metal or alloy (e.g., nickel, cobalt, chromium, copper, zinc, or an alloy derived from any of the foregoing metals) may be plated and/or electroless plated onto the drum or sleeve. The plating material (26) is deposited on the outer surface of the drum or sleeve in a region that is not covered by the patterned photosensitive material. The deposited thickness is preferably less than the thickness of the photosensitive material as shown in step E. The deposit can be deposited throughout the plating conditions by adjusting the plating conditions, such as the distance between the anode and the cathode (ie, the drum or sleeve) (if plating is used), the rotational speed of the drum or sleeve, and/or the circulation of the plating solution. The thickness variation on the drum or sleeve area is controlled to be less than 1%.

供選擇地,在使用電鍍以沉積鍍敷材料(26)的情況下,藉由在陰極(即滾筒或套筒)與陽極之間插入非導電厚度均勻器(thickness uniformer),可以控制沉積物在滾筒或套筒的整個表面上的厚度變化,如第8,114,262號美國專利中所描述的。 Alternatively, where electroplating is used to deposit the plating material (26), the deposit can be controlled by inserting a non-conductive thickness uniformer between the cathode (ie, the drum or sleeve) and the anode. The thickness variation on the entire surface of the drum or sleeve is as described in U.S. Patent No. 8,114,262.

在鍍敷後,可藉由剝離劑(例如有機溶劑或水溶液)剝離圖案化感光材料(25)。可以任選地採用精密拋光,以確保沉積物(26)在整個滾筒或套筒上的可接受的厚度變化和粗糙度。 After plating, the patterned photosensitive material (25) can be peeled off by a release agent such as an organic solvent or an aqueous solution. Precision polishing can optionally be employed to ensure acceptable thickness variations and roughness of the deposit (26) over the entire drum or sleeve.

圖2的步驟F示出了貫穿具有在其上形成的三維圖案微結構的壓花滾筒或套筒的橫截面。 Step F of Figure 2 shows a cross section through an embossing cylinder or sleeve having a three-dimensional pattern microstructure formed thereon.

如上述US 2016/0059442中所述,已經發現,如果用貴金屬或其合金塗布壓花工具的表面,則壓花工具可以具有改善的釋放性能。換句話說,作為在壓花工具的表面上形成三維微結構之後的後處理步驟,可以將貴金屬或其合金(31)塗布於壓花工具的整個表面上,如圖3中所示。 As described in the above-mentioned US 2016/0059442, it has been found that if the surface of the embossing tool is coated with a noble metal or an alloy thereof, the embossing tool can have improved release properties. In other words, as a post-processing step after forming a three-dimensional microstructure on the surface of the embossing tool, a noble metal or alloy thereof (31) can be applied to the entire surface of the embossing tool, as shown in FIG.

術語“貴金屬”可以包括金、銀、鉑、鈀和其他更不常見的金屬,諸如釕、銠、鋨或銥。在這些貴金屬中,本發明人已經發現金及其合金在降低固化的或熱壓花的材料與壓花工具的表面之間的黏附力方面是最有效的。當固化的或熱壓花的材料具有以下成分中的一種或多種時,該優點尤其明顯:聚丙烯酸酯、聚甲基丙烯酸甲酯(PMMA)、聚甲基丙烯酸乙酯(PEMA)、聚碳酸脂(PC)、聚氯乙烯(PVC)、聚苯乙烯(PS)、聚酯、聚醯胺、聚胺甲酸酯、聚烯烴、聚乙烯縮丁醛和其共聚物。在這些固化的或熱壓花的材料中,特別優選基於丙烯酸酯或甲基丙烯酸酯的聚合物。 The term "noble metal" may include gold, silver, platinum, palladium, and other less common metals such as ruthenium, osmium, iridium or osmium. Among these precious metals, the inventors have found that gold and its alloys are most effective in reducing the adhesion between the cured or hot embossed material and the surface of the embossing tool. This advantage is especially pronounced when the cured or hot embossed material has one or more of the following ingredients: polyacrylate, polymethyl methacrylate (PMMA), polyethyl methacrylate (PEMA), polycarbonate Fat (PC), polyvinyl chloride (PVC), polystyrene (PS), polyester, polyamide, polyurethane, polyolefin, polyvinyl butyral and copolymers thereof. Among these cured or heat-embossed materials, polymers based on acrylate or methacrylate are particularly preferred.

在本發明中,也可以使用一種或多種貴金屬和非貴金屬的合金。合金中合適的非貴金屬可以包括 但不限於,銅、錫、鈷、鎳、鐵、銦、鋅或鉬。在合金中,也可以存在多於一種的貴金屬和/或多於一種的非貴金屬。合金中非貴金屬的總重量百分比可以在0.001%-50%的範圍內,優選在0.001%-10%的範圍內。 In the present invention, an alloy of one or more noble metals and non-precious metals may also be used. Suitable non-precious metals in the alloy may include But not limited to, copper, tin, cobalt, nickel, iron, indium, zinc or molybdenum. More than one precious metal and/or more than one non-noble metal may also be present in the alloy. The total weight percentage of non-noble metals in the alloy may range from 0.001% to 50%, preferably from 0.001% to 10%.

可以藉由電鍍、化學沉積、濺射塗膜或氣相沉積實現貴金屬或合金的塗布。在一個實施方式中,可以在30-70℃的溫度下和在3-8的pH範圍內使用基於氰化物的中性金、酸性硬金或金衝擊鍍電解質(gold strike plating electrolytes)。可以在40-70℃的溫度下和在0.1-3的pH範圍內用酸性氯化物電解質鍍敷鉑和鈀。一些貴金屬或其合金的鹼性電解質可商購得到,且也可用於本發明。 Coating of the noble metal or alloy can be achieved by electroplating, chemical deposition, sputter coating or vapor deposition. In one embodiment, cyanide-based neutral gold, acid hard gold or gold strike plating electrolytes may be used at a temperature of 30-70 ° C and a pH range of 3-8. Platinum and palladium may be plated with an acid chloride electrolyte at a temperature of 40-70 ° C and a pH range of 0.1-3. Alkaline electrolytes of some precious metals or alloys thereof are commercially available and can also be used in the present invention.

表面上的貴金屬或其合金優選具有次微米級厚度,因此其不導致對微結構的輪廓的任何顯著改變。貴金屬或其合金的厚度可以在0.001-10微米的範圍內,優選在0.001-3微米的範圍內。 The noble metal or alloy thereof on the surface preferably has a sub-micron thickness so that it does not result in any significant change in the profile of the microstructure. The thickness of the noble metal or alloy thereof may range from 0.001 to 10 microns, preferably from 0.001 to 3 microns.

方法2:Method 2:

供選擇地,如上述US 2016/0059442中所描述的,三維微結構可以在平整基材上形成,如圖4中所示。 Alternatively, as described in the above-referenced US 2016/0059442, a three-dimensional microstructure can be formed on a flat substrate, as shown in FIG.

在圖4的步驟A中,將感光材料(42)塗布於基材層(41)(例如玻璃基材)上。如上所述,感光材料可以是正型、負型或雙重型。感光材料也可以是化學增幅型光阻。可以使用浸塗、噴塗、狹縫模頭塗布或旋轉塗布進行塗布。在乾燥和/或烘烤之後,使感光材料藉由光罩(未示出)暴露於合適的光源(未示出)。 In step A of Fig. 4, a photosensitive material (42) is applied onto a substrate layer (41) (e.g., a glass substrate). As described above, the photosensitive material may be of a positive type, a negative type or a double type. The photosensitive material may also be a chemically amplified photoresist. Coating can be carried out using dip coating, spray coating, slot die coating or spin coating. After drying and/or baking, the photosensitive material is exposed to a suitable light source (not shown) by a photomask (not shown).

供選擇地,感光材料(42)可以是被層壓於基材(41)上的乾膜光阻(其通常是可商購的)。也可將乾膜暴露於如上所述的光源。 Alternatively, the photosensitive material (42) may be a dry film photoresist (which is generally commercially available) laminated to a substrate (41). The dry film can also be exposed to a light source as described above.

在步驟B中,在曝光後,根據感光材料的類型,藉由使用顯影劑來移除感光材料的曝光區域或未曝光區域。在顯影後在步驟C之前,具有剩餘的感光材料(42)的基材層(41)可以經歷烘烤或全面曝光。剩餘的感光材料的厚度應當與待形成的三維微結構的深度或高度相同。 In step B, after exposure, depending on the type of photosensitive material, the exposed or unexposed areas of the photosensitive material are removed by using a developer. Prior to development, prior to step C, the substrate layer (41) having the remaining photosensitive material (42) may undergo baking or full exposure. The thickness of the remaining photosensitive material should be the same as the depth or height of the three-dimensional microstructure to be formed.

在步驟C中,將導電種晶層(43)塗布於剩餘的感光材料(42)上和基材(41)上未被感光材料佔據的區域中。導電種晶層通常由銀形成。 In step C, a conductive seed layer (43) is applied to the remaining photosensitive material (42) and to the substrate (41) in a region not occupied by the photosensitive material. The conductive seed layer is typically formed of silver.

在步驟D中,將金屬或合金(44)(例如,鎳、鈷、鉻、銅、鋅或由上述金屬中的任何金屬得到的合金)電鍍和/或無電鍍於被導電種晶層覆蓋的表面上,並且進行鍍敷製程直到在圖案化的感光材料上有足夠的鍍敷的材料厚度(h)。圖4中的厚度(h)優選為25-5000微米,且更優選為25-1000微米。 In step D, a metal or alloy (44) (eg, nickel, cobalt, chromium, copper, zinc, or an alloy derived from any of the foregoing metals) is electroplated and/or electrolessly plated over the layer of conductive seed layer On the surface, and a plating process is performed until there is sufficient plating material thickness (h) on the patterned photosensitive material. The thickness (h) in Fig. 4 is preferably from 25 to 5000 μm, and more preferably from 25 to 1000 μm.

在鍍敷後,將鍍敷的材料(44)與被剝落的基材層(41)分離。感光材料(42)連同導電種晶層(43)一起被移除。可以藉由剝離劑(例如有機溶劑或水溶液)將感光材料移除。可以藉由酸性溶液(例如含硫/含氮混合物)或可商購的化學剝離劑將導電種晶層(43)移除,只留下一側具有三維結構且另一側平整的金屬片(44)。 After plating, the plated material (44) is separated from the exfoliated substrate layer (41). The photosensitive material (42) is removed along with the conductive seed layer (43). The photosensitive material can be removed by a stripper such as an organic solvent or an aqueous solution. The conductive seed layer (43) can be removed by an acidic solution (e.g., a sulfur/nitrogen-containing mixture) or a commercially available chemical stripper, leaving only a metal sheet having a three-dimensional structure on one side and a flattened side on the other side ( 44).

可將精密拋光應用於金屬片(44),此後,可以直接使用平滑的墊片(shim)用於壓花。供選擇地,可以將其安裝(例如包裹)在外表面上具有三維微結構的滾筒上,以形成壓花工具。 Precision polishing can be applied to the metal sheet (44), after which a smooth shim can be used directly for embossing. Alternatively, it can be mounted (e.g., wrapped) on a roller having a three-dimensional microstructure on the outer surface to form an embossing tool.

如上文所述,貴金屬或其合金最終被塗布在壓花工具的整個表面上。如上所述,金或其合金相比其他貴金屬和合金是優選的。 As described above, the noble metal or its alloy is finally coated on the entire surface of the embossing tool. As mentioned above, gold or its alloys are preferred over other precious metals and alloys.

方法3:Method 3:

圖5示出了本發明的方法。該方法與圖4的方法類似,但經過簡化。圖5的步驟A和步驟B與圖4的相對應步驟相同。然而,在圖5的步驟C中,塗布金或其合金層(53)而不是諸如銀的導電種晶層。 Figure 5 illustrates the method of the invention. This method is similar to the method of Figure 4, but is simplified. Steps A and B of FIG. 5 are the same as the corresponding steps of FIG. However, in step C of FIG. 5, gold or its alloy layer (53) is coated instead of a conductive seed layer such as silver.

因此,在圖5的步驟E中,在將鍍敷的材料(54)從基材(51)分離之後,只有感光材料(52)需要被移除,金或合金塗層(53)與在一側上具有三維結構,而另一側上是平整表面的金屬片(54)保留在一起。 Thus, in step E of Figure 5, after the plated material (54) is separated from the substrate (51), only the photosensitive material (52) needs to be removed, the gold or alloy coating (53) and A metal sheet (54) having a three-dimensional structure on the side and a flat surface on the other side remains together.

可以直接使用金屬片用於壓花。供選擇地,可將其安裝於滾筒上。在本發明的該方法中,不需要有單獨的塗布步驟以在壓花工具的表面上形成金或合金層。 Metal sheets can be used directly for embossing. Alternatively, it can be mounted on a drum. In this method of the invention, there is no need for a separate coating step to form a gold or alloy layer on the surface of the embossing tool.

本發明的壓花工具適用於如第6,930,818號美國專利中所描述的微壓花方法。微壓花方法製造被間隔壁分開的杯狀微胞(microcells),諸如MICROCUPS(註冊商標)。這些微胞可填充有包含分散於溶劑或溶劑混合物中的帶電粒子的電泳流體。填充的微 胞形成電泳顯示膜。當夾在電極層之間時,電泳顯示膜形成電泳裝置。 The embossing tool of the present invention is suitable for use in the microembossing process as described in U.S. Patent No. 6,930,818. The microembossing method produces cup-shaped microcells separated by partition walls, such as MICROCUPS (registered trademark). These micelles may be filled with an electrophoretic fluid comprising charged particles dispersed in a solvent or solvent mixture. Filled micro The cells form an electrophoretic display membrane. When sandwiched between the electrode layers, the electrophoretic display film forms an electrophoretic device.

實施例Example

實施例1Example 1

在該實施例中,製備了兩種壓花工具(即陽模)。這些模具依據上文所述的方法中的一種由鎳形成。 In this embodiment, two embossing tools (i.e., male molds) were prepared. These molds are formed from nickel in accordance with one of the methods described above.

這些鎳模具中的一種的表面未處理。在50℃的溫度和pH5下,進一步用基於氰化物的鍍金電解質對形成的其他鎳模具進行電鍍,以在其表面上得到具有0.5微米的厚度的金塗層。 The surface of one of these nickel molds was untreated. The other nickel mold formed was further electroplated with a cyanide-based gold plating electrolyte at a temperature of 50 ° C and pH 5 to obtain a gold coating having a thickness of 0.5 μm on the surface thereof.

為了測試這兩種壓花模具,製備基於水的聚合物層流體和壓花組成物。聚合物層流體是根據第7,880,958號美國專利製備的,並且其具有聚乙烯醇作為主要成分。該壓花組成物是根據第7,470,386號美國專利製備的,並且其具有多官能丙烯酸酯作為主要成分。 To test the two embossing dies, a water-based polymer layer fluid and an embossing composition were prepared. The polymer layer fluid is prepared according to U.S. Patent No. 7,880,958, which has polyvinyl alcohol as a main component. The embossing composition is prepared according to U.S. Patent No. 7,470,386, which has a polyfunctional acrylate as a main component.

首先使用3號Meyer刮塗棒(drawdown bar)將聚合物流體塗布在PET(聚對苯二甲酸乙二酯)基材上。乾燥的聚合物層具有0.5微米的厚度。 The polymer fluid was first coated onto a PET (polyethylene terephthalate) substrate using a No. 3 Meyer drawdown bar. The dried polymer layer has a thickness of 0.5 microns.

用甲乙酮(MEK)稀釋壓花組成物,然後將其塗在PET基材的聚合物層側上,目標乾燥厚度25微米。 The embossed composition was diluted with methyl ethyl ketone (MEK) and then applied to the polymer layer side of the PET substrate with a target dry thickness of 25 microns.

使用這兩種壓花模具,在160℉(71℃)下在50psi(350kPa)的壓力下用通過PET基材背面的UV曝光(0.068J/cm2,Fusion UV,D燈)分別地對塗層進行乾燥和壓花。 Using these two embossing dies, the UV exposure (0.068 J/cm 2 , Fusion UV, D lamp) through the back of the PET substrate was applied separately at 160 °F (71 ° C) under a pressure of 50 psi (350 kPa). The layers are dried and embossed.

圖6A是藉由使用鎳壓花模具製備的膜的表面的顯微照片。可以看出,因為固化的材料與鎳金屬之間的強黏附力,得到的膜上的一些固化的材料已經被轉移至鎳模具或黏在鎳模具上,在得到的膜上留下不均勻的表面。 Figure 6A is a photomicrograph of the surface of a film prepared by using a nickel embossing mold. It can be seen that due to the strong adhesion between the cured material and the nickel metal, some of the cured material on the resulting film has been transferred to the nickel mold or adhered to the nickel mold, leaving unevenness on the resulting film. surface.

使用鍍金的鎳模具時,固化的壓花材料與金金屬表面完全分開,在得到的膜上留下光滑的表面,如圖6B中所示。這是由於以下事實:鍍金的表面降低了模具表面與固化的材料之間的黏附力,使得模具更容易從固化的材料釋放。 When a gold plated nickel mold is used, the cured embossed material is completely separated from the gold metal surface leaving a smooth surface on the resulting film, as shown in Figure 6B. This is due to the fact that the gold-plated surface reduces the adhesion between the mold surface and the cured material, making the mold easier to release from the cured material.

實施例2Example 2

在該實施例中,製備了幾種壓花工具(即陽模)。這些模具根據上文所述的方法中的一種由鎳形成。用與實施例1中使用的電解質浴(electrolyte bath)相同的電解質浴以0.5微米的金對形成的鎳模具中的一個進一步進行電鍍。 In this embodiment, several embossing tools (i.e., male molds) were prepared. These molds are formed from nickel according to one of the methods described above. One of the formed nickel molds was further plated with 0.5 μm gold in the same electrolyte bath as the electrolytic bath used in Example 1.

對形成的鎳模具中的三個進一步進行矽烷表面處理。就矽烷處理而言,將聚二甲基矽氧烷(Gelest,Inc.)添加到95%正丙醇和5%DI水的混合物中,預先用乙酸將該混合物調到pH 4.5。分別製備0.25%、1%和2wt%的三種濃度的聚二甲基矽氧烷溶液。將鎳模具分別浸入不同濃度的矽烷溶液中10分鐘,然後在100℃下烘烤過夜,以在微結構的表面上得到矽烷塗層。 Three of the formed nickel molds were further subjected to a decane surface treatment. For the decane treatment, polydimethyl methoxyoxane (Gelest, Inc.) was added to a mixture of 95% n-propanol and 5% DI water, and the mixture was previously adjusted to pH 4.5 with acetic acid. Three concentrations of polydimethyloxane solution were prepared at 0.25%, 1%, and 2% by weight, respectively. The nickel molds were separately immersed in different concentrations of decane solution for 10 minutes and then baked at 100 ° C overnight to obtain a decane coating on the surface of the microstructure.

壓花測試材料和條件與實施例1中所使用者相同。使用鍍金的鎳模具時,所有的固化的壓花材料 完全地從金金屬表面分離。然而,無論處理溶液中的聚二甲基矽氧烷濃度如何,得到的膜上的固化的壓花材料多於約50%的區域已經被轉移至經矽烷處理的鎳模具表面或黏在經矽烷處理的鎳模具表面上。 The embossing test materials and conditions were the same as those of the user in Example 1. All cured embossed materials when using gold-plated nickel molds Completely separated from the gold metal surface. However, regardless of the concentration of polydimethyl siloxane in the treatment solution, more than about 50% of the cured embossed material on the resulting film has been transferred to the surface of the decane-treated nickel mold or to the decane. The surface of the treated nickel mold.

該實施例顯示固化的材料從鍍金的表面比從矽烷處理的表面更容易釋放。 This example shows that the cured material is more easily released from the gold plated surface than from the decane treated surface.

Claims (17)

一種用於製備壓花工具的方法,所述方法包括:a)形成具有限定所述壓花工具的外形的非平面模具表面的模具;b)在所述模具表面上沉積金或其合金層;c)在所述金或其合金層上沉積卑金屬,以形成具有遠離所述模具表面的基本上平整的表面的卑金屬層;和d)從所述金或其合金層和所述卑金屬層移除所述模具,以形成一側具有三維結構而另一側具有基本上平整的表面的壓花工具。 A method for preparing an embossing tool, the method comprising: a) forming a mold having a non-planar mold surface defining an outer shape of the embossing tool; b) depositing a layer of gold or an alloy thereof on the surface of the mold; c) depositing a base metal on the gold or alloy layer thereof to form a base metal layer having a substantially flat surface away from the surface of the mold; and d) from the gold or alloy layer thereof and the base metal The layer removes the mold to form an embossing tool having a three-dimensional structure on one side and a substantially flat surface on the other side. 如請求項1所述的方法,其中然後將步驟d)中製備的所述壓花工具包裹在滾筒上。 The method of claim 1 wherein the embossing tool prepared in step d) is then wrapped on a drum. 如請求項1所述的方法,其中所述模具藉由以下而形成:在基材上塗布光阻材料,將所述光阻材料暴露於輻射,和移除所述光阻的曝光的區域或未曝光的區域。 The method of claim 1, wherein the mold is formed by coating a photoresist material on a substrate, exposing the photoresist material to radiation, and removing an exposed region of the photoresist or Unexposed area. 如請求項1所述的方法,其中所述金合金包含金和以下中的一種或多種:銅、錫、鈷、鎳、鐵、銦、鋅和鉬。 The method of claim 1, wherein the gold alloy comprises one or more of gold and the following: copper, tin, cobalt, nickel, iron, indium, zinc, and molybdenum. 如請求項4所述的方法,其中所述合金中的非貴金屬的總重量在0.001-50%的範圍內。 The method of claim 4, wherein the total weight of the non-noble metals in the alloy is in the range of 0.001-50%. 如請求項4所述的方法,其中所述合金中的非貴金屬的總重量在0.001-10%的範圍內。 The method of claim 4, wherein the total weight of the non-noble metals in the alloy is in the range of 0.001 to 10%. 如請求項1所述的方法,其中所述金或其合金層具有0.001-10微米的厚度。 The method of claim 1 wherein the gold or alloy layer thereof has a thickness of from 0.001 to 10 microns. 如請求項1所述的方法,其中所述金或其合金層具有0.001-3微米的厚度。 The method of claim 1, wherein the gold or alloy layer thereof has a thickness of 0.001-3 microns. 如請求項1所述的方法,其中所述卑金屬包括鎳、鈷、鉻、銅和鋅中的任一種或多種。 The method of claim 1, wherein the base metal comprises any one or more of nickel, cobalt, chromium, copper, and zinc. 如請求項1所述的方法,其中所述卑金屬層的最小厚度在25-5000微米的範圍內。 The method of claim 1 wherein the base metal layer has a minimum thickness in the range of 25-5000 microns. 如請求項1所述的方法,其中所述卑金屬層的最小厚度在25-1000微米的範圍內。 The method of claim 1 wherein the base metal layer has a minimum thickness in the range of 25-1000 microns. 一種用於製備壓花工具的組合件(assembly),所述組合件包括:具有非平面模具表面的模具;設置在所述模具表面上和並且貼合所述模具表面的金或其合金層;和遠離所述模具表面且在所述金或其合金層的相對側上的卑金屬層,所述卑金屬層具有與所述金或其合金層接觸的三維結構,並具有在其遠離所述金或其合金層的一側上的基本上平整的表面。 An assembly for preparing an embossing tool, the assembly comprising: a mold having a non-planar mold surface; a layer of gold or an alloy thereof disposed on the surface of the mold and attached to the surface of the mold; And a base metal layer remote from the mold surface and on the opposite side of the gold or alloy layer thereof, the base metal layer having a three-dimensional structure in contact with the gold or alloy layer thereof and having a distance away from the A substantially flat surface on one side of the gold or its alloy layer. 如請求項12所述的組合件,其中所述金合金包含金和以下中的一種或多種:銅、錫、鈷、鎳、鐵、銦、鋅和鉬。 The assembly of claim 12, wherein the gold alloy comprises one or more of gold and the following: copper, tin, cobalt, nickel, iron, indium, zinc, and molybdenum. 如請求項12所述的組合件,其中所述合金中的非貴金屬的總重量在0.001-50%的範圍內。 The assembly of claim 12, wherein the total weight of the non-noble metals in the alloy is in the range of 0.001-50%. 如請求項12所述的組合件,其中所述金或其合金層具有在0.001-10微米範圍內的厚度。 The assembly of claim 12, wherein the gold or alloy layer thereof has a thickness in the range of 0.001 to 10 microns. 如請求項12所述的組合件,其中所述卑金屬包含鎳、鈷、鉻、銅和鋅中的任一種或多種。 The assembly of claim 12, wherein the base metal comprises any one or more of nickel, cobalt, chromium, copper, and zinc. 如請求項1所述的組合件,其中所述卑金屬層的最小厚度在25-5000微米的範圍內。 The assembly of claim 1 wherein the base metal layer has a minimum thickness in the range of 25-5000 microns.
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