TW201713577A - Thin substrate cassette capable of preventing scratching of a glass substrate during picking and placing to increase production yield - Google Patents

Abstract

This invention relates to a thin substrate cassette, comprising at least one rear support rack and a plurality of rear support bars, wherein the rear support racks are disposed at a rear side of the thin substrate cassette; and the rear support bars are arranged, at interval, and disposed on each rear support rack with rear ends fixed to the rear support rack and longitudinal cantilever arms protruding in the thin substrate cassette respectively for supporting a middle part of the glass substrate. The rear support bars have a front inclined surface extending from a front end thereof toward a rear part, making the front end forming a conic shape. The front inclined surface is disposed thereon with at least one sealing member for sealing (closure) thereof. Accordingly, compared with a conventional equal-cross-section rear support bars, the conic rear support bars have a larger net space between upper and lower rear support bars, capable of preventing scratching of a glass substrate during picking and placing, so as to achieve the efficacy of great increasing the production yield of the glass substrate.

Description

Thin substrate card

The invention relates to a cassette for a thin substrate, in particular to a slope which is arranged before the front end of the rear support rod is extended, so that the clear space between the upper and lower rear support rods is large, so that the glass substrate is taken. It is not easy to scratch when put.

The commonly used substrate cassette is to carry a liquid crystal glass substrate for transport to avoid chipping or fragmentation of the glass substrate during transportation, but as the demand for thinning of the substrate is increasing, for example, the size of the glass substrate is becoming larger and larger. However, the thickness is made thinner and thinner, and care must be taken during transportation, regardless of whether the size of the glass substrate is increased or not, and the thinned glass substrate is subjected to the lateral direction of the left and right sides of the cassette. Supported by the side support rods, the middle part will be warped downward (ie, the amount of sag) due to its own gravity, which in turn causes the middle portion of the thinned glass substrate to be damaged due to the serious sag.

In order to improve the disadvantage that the glass substrate is severely sagged due to thinning of the glass substrate, a rear branch is added to the middle portion of the frame of the conventional substrate cassette. The struts support the intermediate portion of the glass substrate by a plurality of mutually parallel support bars to avoid downward warpage. However, after the rear support bar is added to the rear support bar, since the space between the upper and lower rear support bars is too small, the airflow generated by the mechanical arm carrying the thinned substrate is disturbed, and the substrate of the upper and lower layers is easily The problem of scratching during pick-and-place is greatly increased. Therefore, how to make the thinned glass substrate less likely to be damaged during pick-and-place process is an urgent problem to be solved in the industry.

In view of this, the inventor of the present invention has been engaged in the manufacturing development and design experience of related products for many years. After detailed design and careful evaluation of the above objectives, the present invention has finally become practical.

The main object of the present invention is to provide a cassette for a thin substrate, which is designed to have a sloped front surface of the front end of the support rod after the cassette is used for the thin substrate, so that the upper and lower rear support rods are clean. The space is large, so that the glass substrate is less likely to be scratched when it is taken and placed.

In order to achieve the above object, the invention relates to a card substrate for a thin substrate, which mainly comprises: at least one rear support frame and a plurality of rear support bars; wherein the rear support frames are disposed on a rear side of a thin substrate card; The rear support bars are arranged on the rear support frames at intervals, and the rear end (ie, the limit end) is fixed on the rear support frame, and the longitudinal cantilever is protruded in the thin substrate for supporting the glass. An intermediate portion of the substrate, wherein the rear support bar has a bevel structure extending from a front end portion thereof to the rear portion; thereby, the net space between the upper and lower rear support bars can be increased, and When the glass substrate is loaded/unloaded, it is easily disturbed by the airflow between the glass substrates, and the surface of the glass substrate is inadvertently scratched.

For the sake of the examination, the reviewer can make a further understanding and understanding of the purpose, shape, structure and function of the present invention. The embodiment is combined with the diagram and is described in detail as follows:

11‧‧‧Upper frame

12‧‧‧ Lower frame

13‧‧‧ side support plate

14‧‧‧Side support rod

20‧‧‧ rear support frame

30‧‧‧ Rear support rod

10‧‧‧Card for thin substrate

WS‧‧‧ accommodating space

31‧‧‧ front bevel

301‧‧‧ rear slotting

32‧‧‧Sliding convex

B‧‧‧Longitudinal oblique length

D‧‧‧Longitudinal support length

A‧‧‧ leading edge thickness

C‧‧‧ total thickness

33‧‧‧Connecting Department

304‧‧‧ back end parts

3041‧‧‧ Groove

302‧‧‧ hollow tube

303‧‧‧Seal

331‧‧‧First screw hole

333‧‧‧Second screw hole

334‧‧‧ Third screw hole

335‧‧‧4nd screw hole

336‧‧‧ring boss

332‧‧‧Sloping surface

21‧‧‧Perforation

22‧‧‧ screws

15‧‧‧Upper cover

16‧‧‧ Backboard

161‧‧‧Folding

162‧‧‧Horizontal reinforcing plate

17‧‧‧ front baffle

34‧‧‧Back baffle

18‧‧‧Electrical parts

19‧‧‧ diagonal strut

191‧‧‧ fitting groove

111‧‧‧Reinforcement Department

141‧‧‧Contacts

143‧‧‧Riveted buckle

131‧‧‧ Inside recess

132‧‧‧Connecting block

1321‧‧‧ recessed part

1322‧‧‧Bevel

80‧‧‧Knowledge cross-section support rod

E‧‧‧sag

G‧‧‧ clean space

F‧‧‧sag

H‧‧‧ Space

Fig. 1 is a perspective view showing the appearance of a cassette for a thin substrate of the present invention.

Fig. 2 is a side view of the support frame and the rear support bar after the jam for the thin substrate of the present invention.

Fig. 3 is an enlarged schematic view showing the front end of the support rod after the cassette for the thin substrate of the present invention.

4A is a schematic view showing the assembly of the rear end of the support rod after the cassette for the thin substrate of the present invention.

FIG. 4B is an assembled view showing another embodiment of the rear end of the support rod after the cassette for the thin substrate of the present invention.

Fig. 4C is a schematic view showing the adjustment of the inclination angle of the support rod after the present invention.

Fig. 5 is a schematic view showing the back side of the cassette for a thin substrate of the present invention.

Fig. 6 is an enlarged schematic view showing the side support plate of the cassette for a thin substrate of the present invention.

Fig. 7 is a perspective exploded view of the support rod after the cassette for the thin substrate of the present invention.

Fig. 8 is a schematic view showing the use of the support frame and the rear support bar after the card is used for the thin substrate of the present invention.

The present invention relates to a "slack for a thin substrate", which is shown in FIG. 1 and includes an upper frame 11 and a lower frame 12, a plurality of side support plates 13 facing each other, and a plurality of side support bars 14, At least one rear support frame 20 and a plurality of rear support bars 30.

The upper frame 11 is provided on the upper side of the thin substrate cassette 10, and the lower frame 12 is provided on the lower side of the thin substrate cassette 10.

The rear support frame 20 is disposed on the rear side of the thin substrate cassette 10 and is located between the upper and lower frames 11, 12.

The side support plates 13 are disposed on both sides of the thin substrate cassette 10 and located between the upper and lower frames 11 and 12, which are defined together with the rear support frame 20 and the upper and lower frames 11 and 12. An accommodating space WS for accommodating the glass substrate; as shown in FIG. 6 , an inner concave portion 131 is disposed on both sides of each of the side support plates 13 , and the concave design is adopted to reduce the drag coefficient during transportation. An inner concave portion 1321 is disposed at a center of the connecting block 132 of the side supporting plate 13 and the upper and lower frames 11 and 12, and the bottom portion of the inner concave portion 1321 has a slope 1322 with a slope of 5 to 45 degrees. 1322 is designed to be hydrophobic and has a fast row when washed The function of water.

The side support bars 14 are arranged at intervals from top to bottom. The front and rear side support plates 13 are supported, and the front end thereof is protruded toward the accommodating space WS to laterally support (or laterally support) the left and right portions of the glass substrate.

The rear support bars 30 are arranged at intervals from top to bottom. The support frame 20 is provided with a front end protruding toward the opening of the thin substrate by the cassette 10 to support (or longitudinally support) the glass substrate.

Please refer to FIGS. 1 and 2, each of the rear support bars 30 has a The longitudinal support length has a slope 31 extending from the front end of the rear support bar 30 to the rear portion along the longitudinal support length.

The rear support bars 30 are arranged at intervals from top to bottom, so that each A plurality of rear positioning grooves 301 are arranged between the support rods 30, and each of the rear positioning grooves 301 is for accommodating the middle portion of each of the glass substrates, and the rear end (or the limiting end) of the rear support rods 30 is It is fixed to the rear support frame 20, and its front end (or free end) protrudes toward the opening of the thin substrate by the cassette 10, and supports the glass substrate later.

By the composition of the above components, please refer to the figures 1 and 2, In use, the space of the front surface of each rear support groove 301 can be increased through the design of the front bevel 31 of each of the rear support bars 30, so that the lower glass substrate is clamped when the support bracket (not shown) is clamped (not shown) After that, while moving up and exiting at the same time, the airflow inside the cassette is disturbed due to the process, so that the upper glass substrate and the support rod 30 are simultaneously oscillated up and down after the lower glass substrate is carried, thereby causing the lower glass. The substrate is scratched; or the underlying glass substrate is clamped The disturbance causes the upper glass substrate to be scratched. Therefore, the design of the inclined surface 31 of the rear support bar 30 prevents the upper glass substrate or the support bar 30 from inadvertently scratching the pick-up bracket after the upper glass substrate is carried. Lower glass substrate.

Please refer to the figures of the rear support bar 30 as shown in Figures 2 and 3. The surface is further provided with at least one longitudinally arranged anti-slip protrusions 32, and each of the anti-slip protrusions 32 and the glass substrate can be in point-to-point contact, line contact or surface contact. The point-to-point contact can reduce the abrasion of the glass substrate, the line contact and the surface contact can increase the adhesion of the glass substrate, and can have a better anti-slip effect; the anti-slip protrusion 32 can be integrally formed with the rear support rod 30; The anti-slip projections 32 are arranged at equal intervals on each of the rear support bars 30. The arrangement of the anti-slip projections 32 at equal intervals can better support the formation of the glass substrate.

Each of the anti-slip protrusions 32 has a friction system with a contact surface greater than 0.8. The number has a roughened surface with a friction coefficient greater than 0.8, which can effectively reduce the disturbance of the airflow between the glass substrates when loading and unloading the glass substrate, and the glass substrate in the accommodating space WS is easy to generate. The risk of being offset or being scratched.

As described above, the anti-slip projection 32 has a large friction coefficient. Materials of 0.8, such as: rubber, fluorine rubber, silicone rubber or polyurethane (PU) plastic.

Please refer to the second and third figures, the longitudinal of each of the rear support bars 30. The support length is set to be 20% to 100% of the longitudinal length of the glass substrate, so that the rear support bar 30 can effectively support the depression of the glass substrate.

Please refer to FIG. 2 again, the longitudinal front of the front bevel 31 The oblique length B is equal to 10% to 90% of the longitudinal support length D of the rear support bar 30; and the front edge thickness A of the front bevel 31 is equal to 10% to 90% of the total thickness C of the rear support bar 30 to avoid carrying the upper layer. After the downward load of the glass substrate, the support rod 30 is inadvertently scratched by the leading edge of the lower glass substrate; and the loading and unloading of the glass substrate by the pick-and-place support (not shown) can be effectively reduced. It is susceptible to disturbance of the airflow between the glass substrates, and the upper surface of the underlying glass substrate is inadvertently scratched.

Please refer to Figure 7, the rod system of the rear support rod 30 is compared. The carbon fiber composite hollow tube 302 is formed by a low-cost pultrusion method, and the front end of the hollow tube 302 is further provided with a front inclined surface 31 by a simple secondary processing (milling and grinding method), so that the front end of the hollow tube 302 is tapered. The tube 302 is provided with a rough surface on both sides and the top of the front bevel, and is sealed (sealed) on the front bevel 31 by at least one mouth piece 303 to prevent water from infiltrating, so that the water is waterproof and hydrophobic when cleaned. The material of the rod of the rear support rod 30 is a carbon fiber composite material, which has the advantages of light weight, small vibration, fatigue resistance and corrosion resistance.

Please refer to FIG. 7 again, the sealing member 303 can be a bottom. The cover of the part, the sides and the front end, or a cover plate with a bottom and a front end, which utilizes a bonding component (eg, adhesive bonding, AB adhesive bonding, fitting engagement, card groove bonding, screw bonding, riveting) The method is combined with the gap of the inclined surface 31 of the hollow tube 302, and is firmly bonded to the front inclined surface 31 by the static friction generated by the rough surface of the front end of the hollow tube 302; the bonding element is an adhesive When bonding or AB glue is bonded, moisture can be prevented from entering the hollow tube 302, which has the function of waterproofing.

Please refer to FIG. 7 again, the sealing member 303 can be a bottom. a cover portion of the side portion, the front side and the front end, or a cover plate having a bottom portion and a front end portion, which can be inserted into the notch of the front bevel 31 of the hollow tube 302 by the rear end thereof, and coupled to the front bevel 31 .

Please refer to FIG. 7 again, the hollow tube 302 is combined with a rear end. The rear end member 304 is made of a high-strength metal material (for example, aluminum material), and the rear end member 304 is inserted into the rear end of the hollow tube 302 to reinforce the rear end of the hollow tube 302. The surface of the rear end member 304 is provided with a rough surface, and the surface is provided with a plurality of spaced-apart grooves 3041. The rear end member 304 is bonded by an adhesive element (eg, adhesive bonding, AB adhesive bonding). , the fitting method, the splicing, the screwing, the staking, etc.) are combined in the rear end of the hollow tube 302, and the frictional force generated by the rough surface and the grooves 3041 makes it firmly Bonded into the rear end of the hollow tube 302.

Please refer to FIG. 7 again, the hollow tube 302 is combined with a rear end. The rear end member 304 is made of a high-strength metal material (for example, aluminum material), and the rear end member 304 is inserted into the rear end of the hollow tube 302 to reinforce the rear end of the hollow tube 302. The surface of the rear end member 304 is provided with a rough surface, and the surface is provided with a plurality of grooves 3041 arranged at intervals. Each of the grooves 3041 is sleeved with an O-ring, and the rear end member 304 is sleeved. The insertion is incorporated into the rear end of the hollow tube 302, and is coupled to the rear end of the hollow tube 302, so that the O-ring is used to block moisture. Into, but has the function of waterproofing.

Please refer to the rear end of each of the rear support bars 30 as shown in FIG. 4A (or The end of the end piece 304 is provided with a connecting portion 33. The connecting portion 33 is provided with a first screw hole 331 at a center of one side of the rear support frame 20, such as an upper left corner or a lower left corner. The second screw hole 333 is disposed on the other side of the second screw hole 333 (eg, the upper right corner or the lower right corner), and the third screw hole 333 is opposite to the second screw hole 333 and the third screw hole 334. The other end (such as the upper end or the lower end) is provided with a fourth screw hole 335, and an inclined surface 332 is respectively arranged in the upper, lower, left and right directions at the center of the surface; and the rear support frame 20 is correspondingly snail A plurality of matching through holes 21 are formed in the positions of the holes 331, 333, 334, and 335, and the plurality of screws 22 are inserted into the through holes 21 and screwed onto the screw holes 331, 333, 334, and 335. The rear end of the support rod 30 is fixed on the rear support frame 20, and the design of each of the inclined surfaces 332 can adjust the screw holes 331, 333, 334, and 335 to be tightly tightened, and the rear support can be adjusted. The angle of inclination of the rod 30 in the up, down, left and right directions (as shown in Fig. 4C) is adjusted to the optimum angle for supporting the glass substrate.

Please refer to the rear end of each of the rear support bars 30 as shown in FIG. 4B (or The end of the end piece 304 is provided with a connecting portion 33. The connecting portion 33 is provided with a first screw hole 331 at a center of one side of the rear support frame 20, such as an upper left corner or a lower left corner. The second screw hole 333 is disposed on the other side of the second screw hole 333 (eg, the upper right corner or the lower right corner), and the third screw hole 333 is opposite to the second screw hole 333 and the third screw hole 334. The other end (such as the upper end or the lower end) is provided with a fourth screw hole 335, and a ring-shaped boss 336 is disposed at the center of the surface, the ring The type boss 336 is provided with an inclined surface which is inclined to the periphery, and the inclined surface has an inclination angle of between 0.5 and 2 degrees; and the rear support frame 20 is at a position corresponding to the screw holes 331, 333, 334 and 335. A plurality of matching through holes 21 are provided, and the plurality of screws 22 are inserted into the through holes 21 and screwed onto the screw holes 331, 333, 334, and 335, so that the rear end of the rear support bar 30 is fixed to the rear support. The frame 20 can be adjusted by the ring boss 336 to adjust the screw holes 331, 333, 334 and 335 to tighten, and the rear support bar 30 can be adjusted upward, downward, left and right. The tilt angle of the direction (as shown in Figure 4C) is adjusted to the optimum angle of the supporting glass substrate.

Please refer to the top surface of the thin plate for the thin substrate 10 as shown in FIG. An upper cover 15 is disposed to prevent the upper dust or falling objects from falling onto the surface of the glass substrate in the accommodating space WS by blocking the upper cover 15; as shown in FIG. 5, A back plate 16 is disposed on the back surface of the thin-plate substrate 10 to prevent the dust from entering the accommodating space WS during the transportation of the transporting device. The left and right sides of the back plate 16 are respectively provided with a folded edge 161, thereby enhancing The strength of the back plate 16 is such that the upper cover 15 and the back plate 16 block dust from entering the surface of the glass substrate in the accommodating space WS, so that the cleanliness of the glass substrate can be greatly improved by 5% to 10%, thereby improving The manufacturing yield of the glass substrate; the back surface of the rear support frame 20 is fixed with a plurality of lateral reinforcing plates 162 from top to bottom, thereby reinforcing the strength of the rear support frame 20 and the rear support bar 30 to support the glass substrate.

Please refer to the first figure, the front end of the cassette 10 for thin substrates. A front baffle 17 is disposed at a position corresponding to each side support bar 14 at the left and right sides of the opening, and the front baffle 17 is located in front of the side support bar 14 and has a height slightly higher than the side support The height of the strut 14 is at least 0.1 mm to 10 mm, and the height of the preferred embodiment is 1 mm to 3 mm. The material of the front baffle 17 is carbon fiber composite material, so that the front baffle 17 can block the support on the side support bar 14. The front end of the glass substrate prevents the glass substrate from slipping out of the thin substrate cassette 10 from the opening during transportation.

Please refer to Figure 2 again, each of the rear support frames 20 corresponds to A rear baffle 34 is disposed on the rear end (or the limiting end) of the rear support bar 30. The rear baffle 34 is made of a plastic material, which can block the rear end of the glass substrate supported on the rear support bar 30, thereby preventing the glass substrate from being transported. The rear end directly collides with the rear support frame 20 to cause damage.

Referring to FIG. 1 again, a conductive member 18 is mounted on the bottom of the lower frame 12 of the cassette 10 for the thin substrate. The conductive member 18 is made of a conductive material or an antistatic material, such as ultra high molecular weight polyethylene. The impedance of the conductive material is 10 ¹ ~ 10 ⁶ ohm / square, and the antistatic material is 10 ⁶ ~ 10 ¹² ohm / square, which can discharge the static electricity generated by the glass substrate in the accommodating space WS, and guide the card for the thin substrate匣10, to prevent static electricity from penetrating the glass substrate, improve the production yield, and buffer the impact force during transportation to avoid damage to the glass substrate.

Please refer to FIG. 1 again, the two of the thin substrate cards 10 The side edges are respectively provided with a diagonal strut 19, and the front end of the diagonal strut 19 is lower and the rear end is joined to the side supporting plates 13 with a certain inclination. The joint of the diagonal strut 19 and the side supporting plate 13 A fitting groove 191 is provided, and the fitting groove 191 is engaged with each side support plate 13 , and each diagonal strut 19 is locked to each side support plate 13 by screws (or the upper frame 11 and the side support plate 13 ). , or the lower frame 12, the side support plate 13, or the upper frame 11, under On the frame 12), the diagonal stays 19 are fixed to the both sides of the thin substrate cassette 10 to generate a moment in the anti-counterclock rotation direction, thereby preventing the thin substrate cassette 10 from being forwardly deformed.

Please refer to FIG. 1 again, the thin substrate is on the cassette 10 A reinforcing portion 111 having a relatively thick thickness is provided at the rear end of the frame 11, and the reinforcing force of the reinforcing portion 111 of the thick shape prevents the upper frame 11 from sagging and deforming.

Please refer to Figures 1 and 6 again, the side support bars 14 are The riveting clasp 143 is fixed to the side support plates 13 by means of riveting, and the riveting manner of the riveting clasps 143 can increase the assembly speed of the side support bars 14 and increase the assembly speed by 30% to 40%.

The contact portion of the front end of the side support bar 14 and the glass substrate is provided with a contact portion 141. The contact portion 141 is made of a conductive material or an antistatic material, for example, ultra high molecular weight polyethylene, and the impedance of the conductive material is 10 ¹ ~ 10 ⁶ Ohm/square, antistatic material is 10 ⁶ ~ 10 ¹² ohm / square; when the contact portion 141 is in contact with the glass substrate, the static electricity generated by the glass substrate can be guided away, thereby preventing electrostatic breakdown of the glass substrate, thereby improving production. rate.

Please refer to Figure 8 for the thin substrate with the cassette 10 because of the height limit. It is economical to accommodate a large number of glass substrates at the same height, but it needs to have both strength requirements, so the height of the support rods should not be too thick, which affects the glass substrate to be taken into the clear space; The rear support bar 80 has no front bevel at its front end, and when the glass substrate is supported rearward, a sag amount E is generated, and because of the equal section, the tip end invades the lower clear space G (as shown in Fig. 8). , The net space occupied by the glass substrate is large, and the clearance space G between the upper and lower rear support bars 80 is too small (for example, only 28 mm), so that the airflow generated when the glass substrate is transported by the robot arm is easily disturbed. The problem that the glass substrate of the upper and lower layers of the cassette is scratched during pick-and-place is greatly increased, and the front end of the conventional support rod 80 has a large self-weight inertia, a large amplitude of vibration, and a long time to converge; otherwise, the present invention uses the same material. The rear support rod 30 of the hollow tube under the dosage is stronger than the other sections, and the front end of the rear support rod 30 has a slope 31 extending from the front end of the rear support rod 30 to the rear portion, so that the front end thereof has a tapered shape. When carrying the same weight, the amount of sag F is generated, and because the front end has a tapered relationship, the tip end is still within the projected area (as shown in Fig. 8) to allow the upper and lower rear support rods 30 to When the space H is large (for example, 35 mm), when the glass substrate is transported by the robot arm, the glass substrate enters a large space (for example, 35 mm is maintained), so that the glass substrate is less likely to be scratched when being taken and placed, so Reaching the life of the glass substrate A substantial increase in the efficiency of yield.

From the above detailed description, it will be apparent to those skilled in the art that the present invention can achieve the foregoing objects, and in accordance with the provisions of the Patent Law, the patent application is filed. However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto; therefore, the simple equivalent changes and modifications made in accordance with the scope of the present invention and the contents of the invention are modified. All should remain within the scope of the invention patent.

10‧‧‧Card for thin substrate

11‧‧‧Upper frame

12‧‧‧ Lower frame

13‧‧‧ side support plate

14‧‧‧Side support rod

20‧‧‧ rear support frame

30‧‧‧ Rear support rod

WS‧‧‧ accommodating space

15‧‧‧Upper cover

16‧‧‧ Backboard

161‧‧‧Folding

17‧‧‧ front baffle

18‧‧‧Electrical parts

19‧‧‧ diagonal strut

191‧‧‧ fitting groove

111‧‧‧Reinforcement Department

141‧‧‧Contacts

Claims (35)

A card for a thin substrate, comprising: an upper frame and a lower frame respectively disposed on the lower side and the lower side of the thin substrate cassette; at least one rear support frame, wherein the rear support frame is disposed on the thin substrate card a rear side of the crucible and located between the upper and lower frames; a plurality of side support plates facing each other, the side support plates being disposed on both sides of the thin substrate cassette and between the upper and lower frames, The rear support frame and the upper and lower frames together form a receiving space for accommodating the glass substrate; a plurality of side support bars are arranged on the side support plates from top to bottom and the front ends thereof are connected to each other The accommodating space protrudes to laterally support the glass substrate; the plurality of rear support bars are arranged on the rear support frame from top to bottom and the front end thereof is open to the opening of the thin substrate Projecting a glass substrate in a backward direction; wherein the rod of the rear support rod is a hollow tube having a longitudinal support length extending in a direction from the front end of the rear support rod to a rear portion of the rear support rod Before the bevel, make the hollow The front end is formed into a tapered shape, and the front inclined surface is provided with at least one mouth piece for sealing (sealing); wherein the rear end of the hollow tube is combined with a rear end piece, and the rear end piece is made of high strength material, A rear end member is inserted into the rear end of the hollow tube to enhance the strength of the hollow tube. The sheet for a thin substrate according to claim 1, wherein each of the rear support rods is further provided with at least one longitudinally arranged anti-slip projection. The thin plate for a substrate according to claim 2, wherein the anti-slip projection has a friction coefficient of a contact surface greater than 0.8. The sheet for a thin substrate according to claim 3, wherein the anti-slip projection is integrally formed with the rear support rod. The thin-plate substrate cartridge of claim 4, wherein the non-slip projections are arranged at equal intervals on each of the rear support bars. The sheet for a thin substrate according to claim 5, wherein the anti-slip protrusion is a rubber having a coefficient of friction, a fluorine rubber, a silicone rubber or a polyurethane (PU) plastic. The thin-plate substrate cassette of claim 1, wherein the longitudinal support length of each of the rear support bars is 20% to 100% of the longitudinal length of the glass substrate. The thin plate for a substrate according to claim 7, wherein the longitudinal slope of the front bevel is equal to 10% to 90% of the longitudinal support length of the rear support bar. For example, the thin plate for a substrate of the seventh aspect of the patent application, wherein the front bevel has an oblique thickness equal to 10% to 90% of the total thickness of the rear support bar. The thin plate for a substrate according to claim 7, wherein the longitudinal slope of the front bevel is equal to 10% to 90% of the longitudinal support length of the rear support bar, and the front bevel is equal to the rear support bar. 10% to 90% of the total thickness. For example, in the thin substrate for the seventh aspect of the patent application, the hollow tube of the rear support rod is made of a carbon fiber composite material. For example, the thin substrate for the first application of the patent scope, wherein An upper cover is provided on the top surface of the thin substrate. The thin-film substrate cartridge of claim 1, wherein the back surface of the thin-film substrate is further provided with a back plate. For example, in the thin substrate for the first aspect of the patent application, the back surface of the rear support frame is provided with a plurality of lateral reinforcing plates from top to bottom. For example, in the thin substrate for the first aspect of the patent application, the front and rear sides of the front end opening of the thin substrate are provided with a front baffle at a position corresponding to each side support bar, and the front baffle is located at the side. The front of the support rod is at a height slightly higher than the height of the side support rod by at least 0.1 mm to 10 mm. For example, in the thin substrate for the fifteenth aspect of the patent application, the front baffle is located in front of the side support bar, and the height thereof is slightly higher than the height of the side support bar by 1 mm to 3 mm. For example, in the thin substrate for the first aspect of the patent application, the rear support frame is provided with a rear baffle on the rear end of the corresponding rear support bar, and the rear baffle is made of plastic material. For example, the thin substrate for the first aspect of the patent application, wherein the thin substrate is provided with a conductive member at the bottom of the lower frame, and the conductive member is made of a conductive material or an antistatic material. The thin-film substrate cartridge of claim 1, wherein the thin substrate has a thicker reinforcing portion at a rear end of the upper frame. The cassette for a thin substrate according to claim 1, wherein the side support rods are fixed to each of the side support plates by riveting and fastening. The cartridge for a thin substrate according to claim 1, wherein a contact portion of the front end of the side support rod and the glass substrate is provided with a contact portion. The contact material is made of conductive material or antistatic material. The card substrate for a thin substrate according to claim 1, wherein an inner concave portion is provided on both side edges of each of the side support plates. The thin-plate substrate cassette of claim 1, wherein a central portion of each of the side support plates and the upper and lower frames is provided with an inner concave portion, and the bottom portion of the inner concave portion has a slope. The cartridge for a thin substrate according to claim 1, wherein the sealing member is a cover having a bottom portion, two side edges and a front end, or a cover plate having a bottom portion and a front end portion, which are coupled to the hollow by a coupling member. The notch on the bevel before the tube. The invention relates to the thin substrate for the first aspect of the patent application, wherein the sealing member is a bottom, a side edge and a front end cover, or a bottom and a front cover, which are combined with the rear end. And on the front bevel on the notch of the inclined surface of the hollow tube. For example, the thin plate for a substrate of the first aspect of the patent application, wherein the rear end member is made of a metal material having high strength. The cassette for a thin substrate according to claim 26, wherein the surface of the rear end member is provided with a rough surface, and the rear end member is coupled to the rear end of the hollow tube by a bonding member, and is produced by the rough surface thereof. Static friction so that it is firmly bonded to the rear end of the hollow tube. The cassette for a thin substrate according to claim 26, wherein the surface of the rear end member is provided with a rough surface, the rear end member is inserted into the rear end of the hollow tube, and is coupled to the rear end of the hollow tube. on. The thin-film substrate cartridge of claim 27 or 28, wherein the rear end member is provided with a plurality of grooves arranged at intervals on the surface. The cartridge for thin substrate according to claim 1, wherein a rear end of each of the rear support bars is provided with a connecting portion at the end of the end member, and the connecting portion is provided with a plurality of screw holes on one side of the corresponding rear support frame. And an inclined surface is respectively arranged in the upper, lower, left and right directions at the center of the surface; and the rear support frame is provided with a matching perforation at a position corresponding to the screw hole, and the plurality of screws are inserted into the through hole and The screw is screwed onto the screw holes to fix the rear end of the rear support rod to the rear support frame. The cartridge for thin substrate according to claim 1, wherein a rear end of each of the rear support bars is provided with a connecting portion at the end of the end member, and the connecting portion is provided with a plurality of screw holes on one side of the corresponding rear support frame. And a ring-shaped boss is arranged at the center of the face; and the rear support frame is provided with a matching perforation at a position corresponding to the screw hole, and the plurality of screws are inserted into the through hole and screwed onto the screw holes , the rear end of the rear support rod is fixed on the rear support frame. The shackle for a thin substrate according to the first aspect of the invention, wherein the two sides of the thin substrate are respectively provided with a diagonal struts, and a joint groove is provided at a joint of the diagonal struts and the side support plates. The brackets are engaged with the side support plates, and the diagonal stays are locked to the side support plates by screws, so that the diagonal stays are fixed on the sides of the thin substrate jam. . The shackle for a thin substrate according to the first aspect of the invention, wherein the two sides of the thin substrate are respectively provided with a diagonal struts, and a joint groove is provided at a joint of the diagonal struts and the side support plates. The brackets are engaged with the side support plates, and the diagonal stays are locked to the upper frame and the side support plates by screws, so that the diagonal stays are fixed on both sides of the thin substrate On the side. The invention relates to a card for a thin substrate according to the first aspect of the patent application, wherein the side edges of the thin substrate are respectively provided with a diagonal strut, the diagonal strut and the side support The engaging portion of the plate is provided with a fitting groove, and the engaging groove is engaged with each side supporting plate, and each diagonal strut is fixed to the lower frame and the side supporting plate by screws, so that the inclined strut is fixed. It is disposed on both sides of the thin plate for the thin substrate. The shackle for a thin substrate according to the first aspect of the invention, wherein the two sides of the thin substrate are respectively provided with a diagonal struts, and a joint groove is provided at a joint of the diagonal struts and the side support plates. The brackets are engaged with the side support plates, and the diagonal stays are fixed to the upper frame and the lower frame by screws, so that the diagonal stays are fixed on the sides of the thin substrate. on.