TWI384272B - Cassette for receiving substrate - Google Patents
Cassette for receiving substrate Download PDFInfo
- Publication number
- TWI384272B TWI384272B TW096137975A TW96137975A TWI384272B TW I384272 B TWI384272 B TW I384272B TW 096137975 A TW096137975 A TW 096137975A TW 96137975 A TW96137975 A TW 96137975A TW I384272 B TWI384272 B TW I384272B
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- TW
- Taiwan
- Prior art keywords
- glass substrate
- end portion
- support
- substrate
- groove
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/066—Transporting devices for sheet glass being suspended; Suspending devices, e.g. clamps, supporting tongs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
Description
本發明是有關於一種能夠收納並移動顯示器玻璃基板的基板收納匣，特別是有關於一種能夠收納並移動直立狀態之玻璃基板的基板收納匣。The present invention relates to a substrate housing that can accommodate and move a display glass substrate, and more particularly to a substrate housing that can accommodate and move a glass substrate in an upright state.
近年來，隨著顯示器的逐漸大型化，用於平板顯示器(flat panel display)的玻璃基板(glass substrate)(即，液晶顯示器(liquid crystal display)面板、電漿顯示器(plasma display)面板等)的尺寸已增大。因此使用基板收納匣來收納並移動多個大尺寸玻璃基板。In recent years, with the gradual enlargement of displays, glass substrates for flat panel displays (ie, liquid crystal display panels, plasma display panels, etc.) The size has increased. Therefore, a plurality of large-sized glass substrates are accommodated and moved using the substrate housing cassette.
典型基板收納匣的外觀包括上面牆壁、下面牆壁、側面牆壁以及後面牆壁，且側面牆壁包括支撐杆，可水平承載玻璃基板。The appearance of a typical substrate storage cassette includes an upper wall, a lower wall, a side wall, and a rear wall, and the side wall includes a support bar that horizontally carries the glass substrate.
由於玻璃基板隨著玻璃基板的增大而加重，所以玻璃基板的中央部分會因玻璃基板或用來支撐玻璃基板的支撐杆的凹陷而向下變形。Since the glass substrate is aggravated as the glass substrate is increased, the central portion of the glass substrate is deformed downward by the glass substrate or the recess of the support rod for supporting the glass substrate.
如果玻璃基板的中央部分凹陷，且如上所述發生變形，那麼用來移動玻璃基板以裝載此玻璃基板的機械手臂的插入空間就可能減小。因此基板收納匣中不能裝載許多玻璃基板。If the central portion of the glass substrate is recessed and deformed as described above, the insertion space of the robot arm for moving the glass substrate to load the glass substrate may be reduced. Therefore, many glass substrates cannot be loaded in the substrate housing cassette.
此外，如果玻璃基板的中央部分發生嚴重變形，那麼玻璃基板可能會損壞。Further, if the central portion of the glass substrate is severely deformed, the glass substrate may be damaged.
再者，由於玻璃基板是被水平承載，所以玻璃基板上 可能會堆積雜質(即，灰塵等)。Furthermore, since the glass substrate is horizontally carried, the glass substrate is Impurities (ie, dust, etc.) may accumulate.
因此本發明的一觀點是提供一種能夠防止大尺寸基板發生變形的基板收納匣。Therefore, an aspect of the present invention is to provide a substrate housing that can prevent deformation of a large-sized substrate.
此外，本發明的一觀點是提供一種能夠容易且穩定地收納並保存基板的基板收納匣。Further, an aspect of the present invention provides a substrate housing cassette that can easily and stably store and store a substrate.
再者，本發明的一觀點是提供一種能夠防止基板上堆積雜質(即，灰塵等)的基板收納匣。Furthermore, an aspect of the present invention is to provide a substrate housing cassette capable of preventing accumulation of impurities (i.e., dust, etc.) on a substrate.
在以下的描述中將會部分列舉本發明的額外觀點與/或優點，且其一部分將藉由描述而變得明顯易懂，或可藉由本發明之實踐而加以瞭解。Additional aspects and/or advantages of the inventions will be set forth in part in the description in the description.
本發明的上述與/或其他觀點提供一種收納並移動多個玻璃基板的匣子，其包括：一對相對的側表面；上表面與下表面，形成於側表面的上端部分與下端部分；前表面與後表面，形成於側表面的前端部分與後端部分；一支撐構件，安裝在下表面上，以支撐玻璃基板的下端部分；一導引構件(guide member)，安裝在上表面，以引導正在收納的玻璃基板；以及一固定構件(fixing member)，安裝在後表面，以將玻璃基板固定於其被收納之狀態。依據本發明的一觀點，玻璃基板是被垂直收納的。The above and/or other aspects of the present invention provide a tweezers for housing and moving a plurality of glass substrates, including: a pair of opposite side surfaces; upper and lower surfaces, upper and lower end portions formed on the side surfaces; front surface And a rear surface formed at a front end portion and a rear end portion of the side surface; a support member mounted on the lower surface to support the lower end portion of the glass substrate; a guide member mounted on the upper surface to guide the The stored glass substrate; and a fixing member are attached to the rear surface to fix the glass substrate in a state in which it is housed. According to one aspect of the invention, the glass substrate is vertically received.
依據本發明的一觀點，支撐構件包括：一主體；一支撐槽部件，形成於主體的上端部分中，使玻璃基板能夠在其被插入的狀態下運動；一喇叭口部件(flare part)，形成於支撐槽部件的前端部分，支撐槽部件的兩側以喇叭口 方式傾斜；以及一傾斜部件，從支撐槽部件的前端部分向下傾斜。According to an aspect of the invention, the support member includes: a main body; a support groove member formed in the upper end portion of the main body to enable the glass substrate to be moved in a state in which it is inserted; a flare part is formed At the front end portion of the support groove member, the bell groove is provided on both sides of the support groove member The method is inclined; and a tilting member is inclined downward from the front end portion of the support groove member.
依據本發明的一觀點，支撐構件更包括一滾筒(roller)，安裝在支撐槽部件中，支撐玻璃基板的同時執行滾轉運動來移動玻璃基板。According to an aspect of the invention, the support member further includes a roller mounted in the support groove member to perform a tumbling motion while moving the glass substrate while supporting the glass substrate.
依據本發明的一觀點，此滾筒包括一橡膠構件或塑膠構件。According to one aspect of the invention, the drum comprises a rubber member or a plastic member.
依據本發明的一觀點，導引構件包括：一主體；一導引槽部件，形成於主體的下端部分中，使玻璃基板能夠在其被插入的狀態下運動；以及一喇叭口部件，形成於支撐槽部件的前端部分，支撐槽部件的兩側以喇叭口方式傾斜。According to an aspect of the invention, a guiding member includes: a main body; a guiding groove member formed in a lower end portion of the main body to enable the glass substrate to be moved in a state in which it is inserted; and a bell mouth member formed on The front end portion of the support groove member is inclined at both sides of the support groove member by a bell mouth.
依據本發明的一觀點，固定構件包括：一主體；一固定槽部件，形成於主體的前端部分，以插入玻璃基板；一喇叭口部件，形成於支撐槽部件的前端部分，支撐槽部件的兩側以喇叭口方式傾斜；以及一彈性支撐構件，當玻璃基板插入固定槽部件時，彈性支撐構件彈性地支撐此玻璃基板的兩側，從而固定此玻璃基板。According to an aspect of the invention, a fixing member includes: a main body; a fixing groove member formed at a front end portion of the main body to insert the glass substrate; a bell mouth member formed at a front end portion of the support groove member, and two supporting groove members The side is inclined by a bell mouth; and an elastic supporting member that elastically supports both sides of the glass substrate when the glass substrate is inserted into the fixing groove member, thereby fixing the glass substrate.
依據本發明的一觀點，主體包括一收納槽，此收納槽與固定槽部件相通，且收納彈性支撐構件的一部分。According to an aspect of the invention, the main body includes a receiving groove that communicates with the fixing groove member and houses a portion of the elastic supporting member.
依據本發明的一觀點，彈性支撐構件是藉由對薄金屬板執行塑性變形(plastic deformation)而形成，所以彈性支撐構件具有彈性，且彈性支撐構件包括：一鉤狀部件，收納在收納槽中；以及一支撐部件，當玻璃基板插入固定槽部件時，此支撐部件彈性地支撐玻璃基板的側面。According to one aspect of the present invention, the elastic support member is formed by performing a plastic deformation on the thin metal plate, so the elastic support member has elasticity, and the elastic support member includes: a hook member housed in the receiving groove And a supporting member that elastically supports the side surface of the glass substrate when the glass substrate is inserted into the fixing groove member.
為讓本發明之上述和其他目的、特徵和優點能更明顯易懂，下文特舉較佳實施例，並配合所附圖式，作詳細說明如下。The above and other objects, features and advantages of the present invention will become more <RTIgt;
下面將詳細參照本發明之實施例，其範例繪示於所附圖式中，圖式中相同的參考數字代表相同的元件。描述這些實施例是為了參照圖形來解釋本發明。The embodiments of the present invention are described in detail with reference to the accompanying drawings. These embodiments are described to explain the present invention with reference to the drawings.
如圖1所繪示，依據本發明之一實施例的基板收納匣包括一正六面體形狀的主體框架10。As shown in FIG. 1, a substrate housing cassette according to an embodiment of the present invention includes a body frame 10 in the shape of a regular hexahedron.
主體框架10包括：一對側表面20a與20b；下表面30與上表面40，形成於側表面20a與20b的下端部分與上端部分；以及前表面50與後表面60，形成於側表面20a與20b的前端部分與後端部分。The main body frame 10 includes: a pair of side surfaces 20a and 20b; a lower surface 30 and an upper surface 40 formed at a lower end portion and an upper end portion of the side surfaces 20a and 20b; and a front surface 50 and a rear surface 60 formed on the side surface 20a and The front end portion and the rear end portion of 20b.
側表面20a與20b垂直於下表面30與上表面40。此外，側表面20a與20b垂直於前表面50與後表面60。側表面20a與20b、下表面30與上表面40以及前表面50與後表面60分別包括開啟部件21a、21b、31、41、51與61。The side surfaces 20a and 20b are perpendicular to the lower surface 30 and the upper surface 40. Further, the side surfaces 20a and 20b are perpendicular to the front surface 50 and the rear surface 60. The side surfaces 20a and 20b, the lower surface 30 and the upper surface 40, and the front surface 50 and the rear surface 60 respectively include opening members 21a, 21b, 31, 41, 51 and 61.
形成於下表面30中的開啟部件31中橫向安裝著多個底部框架32，形成於上表面40中的開啟部件41中橫向安裝著多個頂部框架42，以及形成於後表面60中的開啟部件61中橫向安裝著多個後部框架62。本實施例中所描述的是開啟部件31、41及61中分別安裝著成對的框架32、42及62，不過開啟部件中也可安裝一個、三個或者更多框架。A plurality of bottom frames 32 are laterally mounted in the opening member 31 formed in the lower surface 30, and a plurality of top frames 42 are laterally mounted in the opening member 41 formed in the upper surface 40, and opening members formed in the rear surface 60 A plurality of rear frames 62 are laterally mounted in the 61. It is described in this embodiment that the pair of frames 32, 42 and 62 are respectively mounted in the opening members 31, 41 and 61, but one, three or more frames may be mounted in the opening member.
每個底部框架32包括多個支撐構件33，當玻璃基板15被收納到主體框架10中時，或者當玻璃基板15從主體框架10中被取出時，這些支撐構件33支撐玻璃基板15下端部分的同時還可穩定地移動玻璃基板15。Each of the bottom frames 32 includes a plurality of support members 33 that support the lower end portion of the glass substrate 15 when the glass substrate 15 is housed in the main body frame 10 or when the glass substrate 15 is taken out from the main body frame 10. At the same time, the glass substrate 15 can be stably moved.
每個頂部框架42包括多個導引構件43，當玻璃基板15被收納到主體框架10中時，或者當玻璃基板15從主體框架10中被取出時，這些導引構件43支撐玻璃基板15上端部分的同時還可引導玻璃基板15。Each of the top frames 42 includes a plurality of guiding members 43 that support the upper end of the glass substrate 15 when the glass substrate 15 is housed in the main body frame 10 or when the glass substrate 15 is taken out from the main body frame 10. The glass substrate 15 can also be guided at the same time.
此外，每個後部框架62包括多個固定構件63，當玻璃基板15被收納到主體框架10中時，這些固定構件63可固定此玻璃基板15的一端。Further, each of the rear frames 62 includes a plurality of fixing members 63 that can fix one end of the glass substrate 15 when the glass substrate 15 is housed in the main body frame 10.
支撐構件33、導引構件43或固定構件63是以相同的間隔來安裝。The support member 33, the guide member 43, or the fixing member 63 are mounted at the same interval.
圖2是安裝在底部框架32上的用來支撐玻璃基板15下端部分的支撐構件33的放大立體圖。2 is an enlarged perspective view of the support member 33 mounted on the bottom frame 32 for supporting the lower end portion of the glass substrate 15.
如圖2所繪示，支撐構件33包括一實質上為長方體的主體34，此主體34的下端部分是由底部框架32來支撐。As shown in FIG. 2, the support member 33 includes a substantially rectangular parallelepiped body 34, the lower end portion of which is supported by the bottom frame 32.
主體34的上端部分包括一支撐槽部件35，使玻璃基板15能夠在其被插入支撐槽部件35的狀態下運動。支撐槽部件35的前端部分包括：一喇叭口部件36，支撐槽部件的兩側以喇叭口方式傾斜，使支撐槽部件35之入口加寬；以及一傾斜部件37，向下傾斜。The upper end portion of the main body 34 includes a support groove member 35 to enable the glass substrate 15 to be moved in a state where it is inserted into the support groove member 35. The front end portion of the support groove member 35 includes a bell mouth member 36 on both sides of the support groove member inclined in a bell mouth manner to widen the entrance of the support groove member 35, and a tilt member 37 which is inclined downward.
支撐構件33包括喇叭口部件36與傾斜部件37來引導玻璃基板15，使玻璃基板15能夠順利插入支撐槽部件35。 支撐槽部件35包括一滾筒38，此滾筒38在支撐玻璃基板15的同時執行滾轉運動，使玻璃基板15能夠順利地前後運動。滾筒38包括轉軸(rotational shaft)38a，在滾筒38兩側，且此轉軸38a可旋轉著支撐在主體34上。較佳的是，滾筒38包括橡膠構件或塑膠構件，以避免支撐並移動玻璃基板15時此玻璃基板15發生滑動，且避免玻璃基板15損壞。The support member 33 includes the bell mouth member 36 and the tilting member 37 to guide the glass substrate 15 so that the glass substrate 15 can be smoothly inserted into the support groove member 35. The support groove member 35 includes a roller 38 that performs a tumbling motion while supporting the glass substrate 15, so that the glass substrate 15 can be smoothly moved back and forth. The drum 38 includes a rotational shaft 38a on either side of the drum 38, and the shaft 38a is rotatably supported on the body 34. Preferably, the roller 38 includes a rubber member or a plastic member to prevent the glass substrate 15 from slipping when the glass substrate 15 is supported and moved, and to avoid damage to the glass substrate 15.
圖3是安裝在頂部框架42上的用來支撐並引導玻璃基板15上端部分的導引構件43的放大立體圖。3 is an enlarged perspective view of the guide member 43 mounted on the top frame 42 for supporting and guiding the upper end portion of the glass substrate 15.
導引構件43支撐並引導玻璃基板15的上端部分，且當垂直收納玻璃基板15時，與支撐構件33合作來避免此玻璃基板15側向傾斜。The guiding member 43 supports and guides the upper end portion of the glass substrate 15, and cooperates with the supporting member 33 to prevent the glass substrate 15 from being laterally inclined when the glass substrate 15 is vertically housed.
導引構件43包括一實質上為長方體的主體44，且此主體44的上端部分是由頂端框架42來支撐。The guiding member 43 includes a body 44 that is substantially rectangular parallelepiped, and the upper end portion of the body 44 is supported by the top end frame 42.
主體44的下端部分包括一導引槽部件45，使玻璃基板15能夠在其上端部分被插入的狀態下運動。導引槽部件45的前端部分包括一喇叭口部件46，支撐槽部件的兩側以喇叭口方式傾斜。The lower end portion of the main body 44 includes a guide groove member 45 to enable the glass substrate 15 to be moved in a state where the upper end portion thereof is inserted. The front end portion of the guide groove member 45 includes a bell mouth member 46, and both sides of the support groove member are inclined in a bell mouth manner.
由於導引槽部件45在其前端部分包括喇叭口部件46，所以導引槽部件45能夠引導玻璃基板15，使玻璃基板15的末端部分能夠輕易插入導引槽部件45。Since the guide groove member 45 includes the bell mouth member 46 at the front end portion thereof, the guide groove member 45 can guide the glass substrate 15 so that the end portion of the glass substrate 15 can be easily inserted into the guide groove member 45.
圖4與圖5是安裝在後部框架62上的用來固定玻璃基板15之一端的固定構件63的放大立體圖。4 and 5 are enlarged perspective views of the fixing member 63 mounted on the rear frame 62 for fixing one end of the glass substrate 15.
當玻璃基板15被完全收納到主體框架10中時，固定 構件63固定玻璃基板15的末端部分，使玻璃基板15能夠被穩定地收納在玻璃基板15的收納匣中。When the glass substrate 15 is completely received in the main body frame 10, it is fixed The member 63 fixes the end portion of the glass substrate 15 so that the glass substrate 15 can be stably accommodated in the housing case of the glass substrate 15.
如圖4所繪示，固定構件63包括實質上為長方體的主體64，且此主體64的後表面是由後部框架62來支撐。As shown in FIG. 4, the fixing member 63 includes a body 64 that is substantially rectangular parallelepiped, and the rear surface of the body 64 is supported by the rear frame 62.
固定構件63包括一固定槽部件65，在固定構件63的前端部分，使玻璃基板15能夠插入。此固定槽部件65的前端部分包括一喇叭口部件66，支撐槽部件的兩側以喇叭口方式傾斜，使玻璃基板15能夠輕易插入固定槽部件65。The fixing member 63 includes a fixing groove member 65 at the front end portion of the fixing member 63 to allow the glass substrate 15 to be inserted. The front end portion of the fixing groove member 65 includes a bell mouth member 66, and both sides of the support groove member are inclined in a bell mouth manner, so that the glass substrate 15 can be easily inserted into the fixing groove member 65.
固定槽部件65包括一對彈性支撐構件70，以彈性地支撐玻璃基板15兩側，使玻璃基板15固定在基板收納匣上。The fixing groove member 65 includes a pair of elastic supporting members 70 to elastically support both sides of the glass substrate 15 to fix the glass substrate 15 to the substrate housing.
如圖5所繪示，固定構件63的主體64包括具有預定深度的收納槽67，在固定槽部件65的兩側，用來收納彈性支撐構件70。As shown in FIG. 5, the main body 64 of the fixing member 63 includes a housing groove 67 having a predetermined depth for accommodating the elastic supporting member 70 on both sides of the fixing groove member 65.
彈性支撐構件70的一部分被收納到收納槽67中，此彈性支撐構件70是藉由對薄金屬板執行塑性變形而形成的，所以具有彈性。此外，彈性支撐構件70的截面是鐘形，其中央部分凸出。彈性支撐構件70被收納到收納槽67中，且包括：鉤狀部件71，以避免彈性支撐構件70從收納槽67上脫離；以及支撐部件72，當玻璃基板15插入固定槽部件65時粘在玻璃基板15的側面以彈性地支撐此玻璃基板15。A part of the elastic supporting member 70 is housed in the housing groove 67 which is formed by performing plastic deformation on the thin metal plate, and thus has elasticity. Further, the elastic support member 70 has a bell shape in cross section, and a central portion thereof is convex. The elastic support member 70 is housed in the accommodation groove 67, and includes: a hook member 71 to prevent the elastic support member 70 from being detached from the accommodation groove 67; and a support member 72 that is stuck when the glass substrate 15 is inserted into the fixing groove member 65 The side surface of the glass substrate 15 elastically supports the glass substrate 15.
支撐部件72具有半圓形，所以當玻璃基板15插入固定槽部件65時能夠順利地插入彈性支撐構件70之間。較 佳的是，一對支撐部件72之間的間隔窄於玻璃基板15的厚度，使支撐部件72能夠彈性地支撐玻璃基板15。The support member 72 has a semicircular shape, so that the glass substrate 15 can be smoothly inserted between the elastic support members 70 when inserted into the fixing groove member 65. More Preferably, the interval between the pair of support members 72 is narrower than the thickness of the glass substrate 15, so that the support member 72 can elastically support the glass substrate 15.
當玻璃基板15插入固定槽部件65，然後插入一對彈性支撐構件70之間時，此彈性支撐構件70被玻璃基板15的兩側擠開。當彈性支撐構件70如上所述被玻璃基板15的兩側推進收納槽67時，彈性支撐構件70之鉤狀部件71之間的距離變寬。然後，彈性支撐構件70產生彈力以使彈性支撐構件70恢復其原始狀態，以致於彈性支撐構件70的支撐部件72附著在波璃基板15之兩側以支撐玻璃基板15。因此，玻璃基板15能夠固定在基板收納匣上。When the glass substrate 15 is inserted into the fixing groove member 65 and then inserted between the pair of elastic supporting members 70, the elastic supporting member 70 is squeezed by both sides of the glass substrate 15. When the elastic supporting member 70 is pushed into the housing groove 67 by both sides of the glass substrate 15 as described above, the distance between the hook members 71 of the elastic supporting member 70 is widened. Then, the elastic supporting member 70 generates an elastic force to return the elastic supporting member 70 to its original state, so that the supporting member 72 of the elastic supporting member 70 is attached to both sides of the glass substrate 15 to support the glass substrate 15. Therefore, the glass substrate 15 can be fixed to the substrate housing cassette.
如上所述，即使玻璃基板15是以直立狀態被收納到匣子中，此玻璃基板15的下端部分與上端部分也可分別藉由多個支撐構件33與導引構件43來支撐，且玻璃基板15的一端藉由固定構件63來固定。因此，能夠穩定地將玻璃基板15收納到基板收納匣中。As described above, even if the glass substrate 15 is housed in the raft in an upright state, the lower end portion and the upper end portion of the glass substrate 15 can be supported by the plurality of support members 33 and the guide member 43, respectively, and the glass substrate 15 is supported. One end is fixed by a fixing member 63. Therefore, the glass substrate 15 can be stably accommodated in the substrate housing cassette.
當玻璃基板15被收納到匣子中或從匣子中被取出時，是使用自動機器，例如機械手臂。且當玻璃基板15已經被收納到匣子中時，一堆疊器(stacker)(沒有繪示)運送此匣子，使多個玻璃基板可被穩定地運送到想要的位置。When the glass substrate 15 is housed in or removed from the tweezers, an automatic machine such as a robot arm is used. And when the glass substrate 15 has been accommodated in the die, a stacker (not shown) transports the die so that the plurality of glass substrates can be stably transported to a desired position.
圖6是依據本發明之另一實施例的基板收納匣的立體圖。Figure 6 is a perspective view of a substrate housing cassette in accordance with another embodiment of the present invention.
如圖6所繪示，開啟部件41具有一蓋子45，在主體框架10的上表面上。由於主體框架10的上表面40如上所 述被封閉，所以能夠避免灰塵從主體框架10的上端部分進入。因此，可減少玻璃基板15上的雜質量，例如灰塵。As shown in FIG. 6, the opening member 41 has a cover 45 on the upper surface of the main body frame 10. Since the upper surface 40 of the main body frame 10 is as above The description is closed, so that it is possible to prevent dust from entering from the upper end portion of the main body frame 10. Therefore, the amount of impurities such as dust on the glass substrate 15 can be reduced.
雖然圖中只繪示了形成於主體框架10之上表面40中的開啟部件41具有蓋子45，不過除了形成於前表面50中的開啟部件51之外，剩餘開啟部件也可具有蓋子。Although only the opening member 41 formed in the upper surface 40 of the main body frame 10 has the cover 45, the remaining opening member may have a cover in addition to the opening member 51 formed in the front surface 50.
如上所述，在依據本發明的基板收納匣中，由於玻璃基板是以直立狀態被收納到匣子中，所以能夠避免玻璃基板的中央部分發生變形。由於玻璃基板不會變形，所以可確保玻璃基板之間有足夠的工作空間。此外，由於使用滾筒來支撐玻璃基板的底面，所以能夠容易地收納與取出玻璃基板。As described above, in the substrate housing cassette according to the present invention, since the glass substrate is housed in the gusset in an upright state, deformation of the central portion of the glass substrate can be avoided. Since the glass substrate is not deformed, it is ensured that there is sufficient working space between the glass substrates. Further, since the bottom surface of the glass substrate is supported by the roller, the glass substrate can be easily housed and taken out.
依據本發明，由於玻璃基板的下表面、上表面以及後表面都被支撐，所以能夠穩定地收納與保存玻璃基板。According to the invention, since the lower surface, the upper surface, and the rear surface of the glass substrate are supported, the glass substrate can be stably stored and stored.
此外，由於玻璃基板處於直立狀態，所以能夠減少堆積在玻璃基板上的雜質量(即，灰塵等)。Further, since the glass substrate is in an upright state, it is possible to reduce the amount of impurities (ie, dust, etc.) deposited on the glass substrate.
雖然本發明已以較佳實施例揭露如上，然其並非用以限定本發明，任何熟習此技藝者，在不脫離本發明之精神和範圍內，當可作些許之更動與潤飾，因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.
10‧‧‧主體框架10‧‧‧ Mainframe
15‧‧‧玻璃基板15‧‧‧ glass substrate
20a、20b‧‧‧側表面20a, 20b‧‧‧ side surface
30‧‧‧下表面30‧‧‧ lower surface
32‧‧‧底部框架32‧‧‧ bottom frame
33‧‧‧支撐構件33‧‧‧Support members
34、64‧‧‧主體34, 64‧‧‧ subjects
35‧‧‧支撐槽部件35‧‧‧Support trough parts
36、46、66‧‧‧喇叭口部件36, 46, 66‧‧‧ bell mouth parts
37‧‧‧傾斜部件37‧‧‧ tilting parts
38‧‧‧滾筒38‧‧‧Roller
38a‧‧‧轉軸38a‧‧‧ shaft
40‧‧‧上表面40‧‧‧ upper surface
42‧‧‧頂部框架42‧‧‧Top frame
43‧‧‧導引構件43‧‧‧Guide members
45‧‧‧導引槽部件45‧‧‧ Guide groove parts
50‧‧‧前表面50‧‧‧ front surface
60‧‧‧後表面60‧‧‧Back surface
62‧‧‧後部框架62‧‧‧ rear frame
63‧‧‧固定構件63‧‧‧Fixed components
65‧‧‧固定槽部件65‧‧‧Fixed trough components
67‧‧‧收納槽67‧‧‧ Storage trough
70‧‧‧彈性支撐構件70‧‧‧elastic support members
71‧‧‧鉤狀部件71‧‧‧ hook parts
72‧‧‧支撐部件72‧‧‧Support parts
21a、21b、31、41、51、61‧‧‧開啟部件21a, 21b, 31, 41, 51, 61‧‧‧ Open parts
圖1是依據本發明之較佳實施例的基板收納匣的立體圖。1 is a perspective view of a substrate housing cassette in accordance with a preferred embodiment of the present invention.
圖2是依據本發明之較佳實施例的圖1所示之基板收納匣中安裝的支撐構件的立體圖。2 is a perspective view of a support member mounted in the substrate storage pocket of FIG. 1 in accordance with a preferred embodiment of the present invention.
圖3是依據本發明之較佳實施例的圖1所示之基板收納匣中安裝的導引構件的立體圖。3 is a perspective view of a guide member mounted in the substrate storage pocket of FIG. 1 in accordance with a preferred embodiment of the present invention.
圖4是依據本發明之較佳實施例的圖1所示之基板收納匣中安裝的固定構件的立體圖。4 is a perspective view of a fixing member mounted in the substrate housing cassette of FIG. 1 in accordance with a preferred embodiment of the present invention.
圖5是依據本發明之較佳實施例的圖4所示之固定構件的截面圖。Figure 5 is a cross-sectional view of the fixing member of Figure 4 in accordance with a preferred embodiment of the present invention.
圖6是依據本發明之另一實施例的基板收納匣的立體圖。Figure 6 is a perspective view of a substrate housing cassette in accordance with another embodiment of the present invention.
10‧‧‧主體框架10‧‧‧ Mainframe
15‧‧‧玻璃基板15‧‧‧ glass substrate
20a、20b‧‧‧側表面20a, 20b‧‧‧ side surface
30‧‧‧下表面30‧‧‧ lower surface
32‧‧‧底部框架32‧‧‧ bottom frame
33‧‧‧支撐構件33‧‧‧Support members
40‧‧‧上表面40‧‧‧ upper surface
42‧‧‧頂部框架42‧‧‧Top frame
43‧‧‧導引構件43‧‧‧Guide members
50‧‧‧前表面50‧‧‧ front surface
60‧‧‧後表面60‧‧‧Back surface
62‧‧‧後部框架62‧‧‧ rear frame
63‧‧‧固定構件63‧‧‧Fixed components
21a、21b、31、41、51、61‧‧‧開啟部件21a, 21b, 31, 41, 51, 61‧‧‧ Open parts
Claims (7)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020060130061A KR101263252B1 (en) | 2006-12-19 | 2006-12-19 | Cassette For Receiving Substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200827820A TW200827820A (en) | 2008-07-01 |
| TWI384272B true TWI384272B (en) | 2013-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096137975A TWI384272B (en) | 2006-12-19 | 2007-10-11 | Cassette for receiving substrate |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4696102B2 (en) |
| KR (1) | KR101263252B1 (en) |
| TW (1) | TWI384272B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010129674A (en) * | 2008-11-26 | 2010-06-10 | Shin Etsu Polymer Co Ltd | Substrate storage container, clamp hand, and method of taking out substrate |
| KR101044206B1 (en) * | 2008-12-15 | 2011-06-29 | 삼성전기주식회사 | A basket for supporting a substrate |
| JP2013033772A (en) * | 2009-10-29 | 2013-02-14 | Yodogawa Hu-Tech Kk | Plate body storage cassette and usage thereof |
| KR101178286B1 (en) * | 2010-08-17 | 2012-08-30 | 주식회사 엠엠테크 | cassette for etching of glass |
| KR101182200B1 (en) * | 2010-11-18 | 2012-09-14 | (주) 청심이엔지 | Substrate slimming apparatus |
| KR101386596B1 (en) * | 2012-10-29 | 2014-04-17 | 서효석 | Glass fixing apparatus |
| KR101302191B1 (en) * | 2013-03-14 | 2013-09-02 | 박미예 | Cassette for thin plate tempered glass giving a summary |
| KR101455938B1 (en) * | 2013-07-16 | 2014-11-03 | 주식회사 에스비비테크 | The glasses etching machine for glasses clamp |
| KR102428369B1 (en) * | 2015-08-19 | 2022-08-02 | 삼성디스플레이 주식회사 | System for transferring substrate |
| JP6652418B2 (en) * | 2016-03-16 | 2020-02-26 | 日本板硝子株式会社 | Glass plate holder and glass plate transfer device |
| JP7183997B2 (en) * | 2019-08-29 | 2022-12-06 | Ａｇｃ株式会社 | Glass substrate processing method |
| KR102253417B1 (en) * | 2019-11-04 | 2021-05-18 | 주식회사 아이티엔티 | Magazine for Semiconductor Inspection Equipment |
| CN115384856B (en) * | 2022-09-13 | 2023-12-22 | 河南汇达印通科技股份有限公司 | Placement piece, boxing device, whole box photosensitive material plate and boxing method |
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| JP2005317826A (en) * | 2004-04-30 | 2005-11-10 | Dainippon Printing Co Ltd | Vertical housing type cassette and substrate housing system comprising it |
| TW200540528A (en) * | 2004-04-12 | 2005-12-16 | Sharp Kk | Lighting device for display |
| TWM296236U (en) * | 2006-03-17 | 2006-08-21 | Eclat Forever Machinery Co Ltd | Roller structure of delivering apparatus |
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2006
- 2006-12-19 KR KR1020060130061A patent/KR101263252B1/en active IP Right Grant
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- 2007-09-21 JP JP2007245028A patent/JP4696102B2/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200540528A (en) * | 2004-04-12 | 2005-12-16 | Sharp Kk | Lighting device for display |
| JP2005317826A (en) * | 2004-04-30 | 2005-11-10 | Dainippon Printing Co Ltd | Vertical housing type cassette and substrate housing system comprising it |
| TWM296236U (en) * | 2006-03-17 | 2006-08-21 | Eclat Forever Machinery Co Ltd | Roller structure of delivering apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4696102B2 (en) | 2011-06-08 |
| KR101263252B1 (en) | 2013-05-10 |
| TW200827820A (en) | 2008-07-01 |
| KR20080056907A (en) | 2008-06-24 |
| JP2008150113A (en) | 2008-07-03 |
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