TW200827820A - Cassette for receiving substrate - Google Patents

Cassette for receiving substrate Download PDF

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Publication number
TW200827820A
TW200827820A TW096137975A TW96137975A TW200827820A TW 200827820 A TW200827820 A TW 200827820A TW 096137975 A TW096137975 A TW 096137975A TW 96137975 A TW96137975 A TW 96137975A TW 200827820 A TW200827820 A TW 200827820A
Authority
TW
Taiwan
Prior art keywords
substrate
glass substrate
end portion
groove
support
Prior art date
Application number
TW096137975A
Other languages
Chinese (zh)
Other versions
TWI384272B (en
Inventor
Sang-Il Hong
Yun-Jin Jung
Jeong-Hun Park
Byung-Gi Jung
Jung-Hyeon Kim
Sung Wook Kang
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of TW200827820A publication Critical patent/TW200827820A/en
Application granted granted Critical
Publication of TWI384272B publication Critical patent/TWI384272B/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/066—Transporting devices for sheet glass being suspended; Suspending devices, e.g. clamps, supporting tongs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Nonlinear Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

A cassette for receiving a substrate receives therein a glass substrate in an upright state. The cassette used to stack substrates includes support members installed on a bottom surface thereof, guide members installed at a top surface, and fixing members installed at a rear surface, such that a glass substrate in an upright state is received. The deformation of the glass substrate is prevented, and the collection of dust on the glass substrate is prevented.

Description

200827820 25719pif 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種能夠收納並移動顯示器玻璃基板 • 的基板收納匣，特別是有關於一種能夠收納並移動直立狀 • 悲之玻璃基板的基板收納！。 【先前技術】 近年來，隨著顯示器的逐漸大型化，用於平板顯示器 〇 ( Panel disPlay )的玻璃基板（glass substrate)(即， 液曰日頒不益（liquid crystal display )面板、電漿顯矛哭 (plasma display)面板等）的尺寸已增大。因此使用基板 收納匣來收納並移動多個大尺寸玻璃基板。 典型基板收納匣的外觀包括上面牆壁、下面牆壁、侧 面牆壁以及後面牆壁，且側面牆壁包括支撐杆，可水平承 載玻璃基板。 由於玻璃基板隨著玻璃基板的增大而加重，所以玻璃 I 基板的中央部分會因玻璃基板或用來支撐玻璃基板的支撐 U 杆的凹陷而向下變形。 & 如果玻璃基板的中央部分凹陷，且如上所述發生變 形，那麼用來移動玻璃基板以裝載此玻璃基板的機械手^ • 的插入空間就可能減小。因此基板收納中不能装載呼多 玻增基板。 此外，如果玻璃基板的中央部分發生嚴重變形，那麼 玻璃基板可能會損壞。 再者’由於玻璃基板是被水平承載，所以玻璃基板上 5 Ο ο 200827820 257l9pif 可能會堆積雜質（即，灰塵等）。 【發明内容】 因此本發明的一觀點是提供 發生變形的基板收納厘。 大尺寸基板 收納明的一觀點是提供一種能夠容易且穩定地 收、、内亚保存基板的基板收納匣。 ㈣：者s T月的一觀點是提供一種能夠防止基板上堆 積減貝（即，灰塵等）的基板收納匣。 J以ΤΓ崎將會部分列舉本發明的額外觀點與/ 二二” 二、部分將藉由描述而變得明顯易懂，或可藉 由本鲞明之實踐而加以瞭解。 〆 射ίί明的上述與/或其他觀點提供一種收納並移動多 :=板的£子，其包括:―對相對的侧表 面 於侧表面的上端部分與下端部分;前表面 :盖件二壯：成：側表面的前端部分與後端部分；-支樓 i引構ίΤ ·τ、面上’以支撐破璃基板的下端部分；-¥引構fr (_e member)，安 板;以及一固定構件㈣ :ί:ίΓ:玻璃基板固定於其被收納之狀態。依據 本金月的U，玻璃基板是被垂直收納的。 依據本發明的一觀點，支 撐槽部件’形成於主體的上端邻^匕括.主脰，一支 成於支撐槽部件的前端部分(驗_)，形 支樓槽。卩件的兩侧以制Π八口 6 200827820 257】9pif 斜；Μ—傾斜部件，從切槽部件的前端部分向 依據本發明的一觀點， (roller)，安裝在支 支件更包括-滾筒 行滾轉運動來移動玻璃基板。支撐破璃基板的同時執 構件。豕林明的—觀點，此滾筒包括-橡雜件或塑膠 Ο ο =本^的—觀點，導引構件包括：―主體； 其被插入的的:rr，使玻一 ^ 槽部件的前端部分，部件，形成於支撐 定栌邻株u的减點，固定構件包括：-主體…固 •Γ口部件3主體的前端部分，以插入玻璃基板;-的兩側以•八槽部件的前端部分，支撐槽部件 基板插入固定檜部;時斜二=支撑構件’當玻璃 基板的兩側，_定此件彈性地玻璃 依據本發明的一觀點,± ^ A, J. 與固定槽部件相通，且收納槽，此收納槽 分站丄通收納弹性支撐構件的一部分。 板執性支撐構件是藉由對薄金屬 支標構件具有彈性二:形成’所以彈性 收納在收納槽中;以及一支ΐ::件;括:-釣狀部件， 彳LU + 支撐°卩件，當玻璃基板插入固定 曰精％，此續部件·地找麵基板的側面。 7 200827820 25719pif 為讓本卷月之上述和其他目的、特徵和優點能更明顯 易懂，下讀舉較佳實_，並配合觸圖式，作詳細說 明如下。 、 【實施方式】 、下面將詳細芩照本發明之實施例，其範例繪示於所附 圖式中’圖式中相同的參考數字代表相同的元件。描述這 些實施例是為了參照圖形來解釋本發明。200827820 25719pif IX. OBJECTS OF THE INVENTION: 1. Field of the Invention The present invention relates to a substrate storage cassette capable of housing and moving a display glass substrate, and more particularly to a glass substrate capable of accommodating and moving an upright shape. Substrate storage! . [Prior Art] In recent years, with the gradual enlargement of displays, glass substrates for panel disPlay (i.e., liquid crystal display panels, plasma displays) The size of the plasma display panel, etc. has increased. Therefore, a plurality of large-sized glass substrates are accommodated and moved by using the substrate housing cassette. The appearance of a typical substrate storage cassette includes an upper wall, a lower wall, a side wall, and a rear wall, and the side wall includes a support bar for horizontally supporting the glass substrate. Since the glass substrate is aggravated as the glass substrate is increased, the central portion of the glass I substrate is deformed downward by the glass substrate or the recess for supporting the U-bar of the glass substrate. & If the central portion of the glass substrate is recessed and deformed as described above, the insertion space of the robot for moving the glass substrate to load the glass substrate may be reduced. Therefore, the Huodu glass-enhanced substrate cannot be loaded during substrate storage. Further, if the central portion of the glass substrate is severely deformed, the glass substrate may be damaged. Furthermore, since the glass substrate is horizontally loaded, impurities (i.e., dust, etc.) may accumulate on the glass substrate 5 Ο ο 200827820 257l9pif. SUMMARY OF THE INVENTION It is therefore an aspect of the present invention to provide a substrate accommodation PCT which is deformed. Large-sized substrate The viewpoint of storage is to provide a substrate storage cassette which can easily and stably collect and store the substrate in the interior of Asia. (4): One point of view of the month is to provide a substrate storage cassette capable of preventing stacking (ie, dust, etc.) on the substrate. J. Izaki will partially cite some of the additional ideas and/or two or two of the present invention. 2. Partially, it will be apparently understood by the description, or can be understood by the practice of the present invention. / or other points of view provide a storage and movement of more: = board, which includes: "the upper end portion and the lower end portion of the opposite side surface to the side surface; the front surface: the cover member two strong: into: the front end of the side surface Part and back end part; - branch i guiding structure Τ τ τ, surface 'to support the lower end of the glass substrate; - ¥ fringe fr (_e member), the board; and a fixed member (four): ί: Γ The glass substrate is fixed in a state in which it is housed. According to the U of the present month, the glass substrate is vertically stored. According to an aspect of the invention, the support groove member 'is formed on the upper end of the main body. A front end part of the support trough component (test _), the shape of the branch groove. The sides of the 以 以 以 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 2008 According to an aspect of the invention, (roller), installed in the support and more The roller-rolling movement is performed to move the glass substrate. The supporting member is supported while supporting the glass substrate. In view of the fact that the roller includes a rubber or plastic material, the guide member includes : "The main body; the inserted: rr, the front end portion of the glass-shaped groove member, the member, formed at the reduction point of the support stator, the fixing member includes: - the main body ... the solid mouth portion 3 main body The front end portion is inserted into the glass substrate; the two sides are provided with the front end portion of the eight-slot member, and the support groove member substrate is inserted into the fixed crotch portion; the time oblique two = the support member' is on both sides of the glass substrate, According to an aspect of the invention, the ground glass is in contact with the fixing groove member, and accommodates a groove, and the receiving groove sub-station passes through a part of the elastic supporting member. The plate supporting support member is made of a thin metal The support member has elasticity two: forming 'so elastically received in the receiving groove; and one ΐ:: piece; including: - fishing-like member, 彳LU + support ° 卩, when the glass substrate is inserted into the fixed 曰%%, this Continued parts · Ground side of the substrate. 7 20082 7820 25719pif In order to make the above and other purposes, features and advantages of this volume more obvious and easy to understand, the following reading is better _, and in conjunction with the touch pattern, the details are as follows: [Embodiment], below will be detailed The same reference numerals are used to refer to the same elements in the drawings. The embodiments are described with reference to the drawings.

Ο 如圖1所繪不，依據本發明之一實施例的基板收納匣 包括一正六面體形狀的主體框架1〇。 ，體框架10包括：一對侧表面2此與2〇b ;下表面 與上表面40,形成於侧表面2〇a與2〇b的下端部分盥上端 部分；=及前表面50與後表面60，形成於側表面20a與 20b的前端部分與後端部分。 侧表面20a與20b垂直於下主二t ^ 从，丨史二, 直於下表面30與上表面40。此 外，侧表面20a與20b垂直於铪主工μ 矣& j表面50與後表面60。侧 表面20a與20b、下表面3〇盎 後表面60分別包括開啟部件、=40以及丽表面50與 形成於下表面30中的開啟;與I 底部框架32,形成於上表面4〇 1中橫向安裝著多個 裝著多個頂部框架42 ’以及形的啟部件41中橫向安 件61中橫向安装著多個後部框？。於後表面6〇中的開啟部 的是開啟部件31、41及61中分^ ^ °本實施例中所描述 42及62，不過開啟部件中也可1壯安裝著成對的框架32、 架。 文裴〜個、三個或者更多框 8 200827820 25719pif 每個底部框架32包括多個支撐構件33，當玻璃基板 15被收納到主體框架1〇中時，或者當玻璃基板15從主體 框架10中被取出時，這些支撐構件支撐玻璃基板 下端部分的同時還可穩定地移動玻璃基板15。 ο 每個頂部框架42包括多個導引構件43，當玻璃基板 15被收納到主體框架1〇中時，或者當玻璃基板15從主體 框架10中被取出時，這些導引構件43支撐玻璃基板15 上端部分的同時還可引導玻璃基板15。 上此外，每個後部框架62包括多個固定構件63，當玻 璃基板15被收納到主體框架1〇中時，這些固定構件幻 可固疋此玻璃基板15的一端。 間隔=件33、導引搆件43或固定構件63是以相同的 主體=2此戶="34 包括一實質上為長方體的 主體34的上端部分包部框架32來支撐。 板15能夠在其被插入支部件35，使玻璃基 槽部件％的前端部分包括的 =下運動。支樓 見，以及一傾斜邱株37人 日卩件％之入口加 w 向下傾斜。 支撐構件33包括喇。八〇邱杜 玻璃基板！5,使玻璃基板15能_=斜部件37來引導 匕約順利插入支撐槽部件35。 9 200827820 25719pif 摩槽部仵允邑祜〆，α〜1〔珉'肉刈在支撐玻璃基板 的同時執行滚轉運動’使玻璃基板15能夠順利地前後 勢。滚筒38包括轉釉（National shaft) 38a，在滾筒38 » — . I 4-i A » Ο O _ -CrT i 4#· -W IflJi» >1 . 支撐槽部件35包括/滚筒38，此滾筒38在支撐玻璃基板 15 運動。滚筒38包括犄γ uumsnart) Ma，在滾筒38 基板15 損壞。 兩侧，且此轉軸38a f獻轉著支撐在主體34上。較佳的是， 滾筒38包括橡膠構件戒塑膠構件，以避免支撐並移動玻璃 時此玻璃基板15發生滑動，且避免玻璃基板15 Ο ο 圖3是安裝在頂部框架42上的用來支撐並引導玻璃基 板15上端部分的導引構件43的放大立體圖。 土 導引構件43支撐並引導破璃基板15的上端部分，且 當垂直收納玻璃基板丨5時，舆支撐構件％合作 玻璃基板15侧向傾斜。 t兄此 導引構件43包括一實質上為長方 主體44的上端部分是由頂端框架42來支擇。版且此 主體44的下端部分包括— 板15能夠在其上端部分被插入==5':使_基 45的前端部分包括-味M 口部件46；；下=，引槽部件 制口八口方式傾斜。 支樓払邛件的兩側以 46，::口能= 板15的末端部分 插=破璃基板15，使破璃基 圖4與圖5是安】:易^入料槽部件45。 板15之1的固定構^ t框架62上的用來固定_基 當破衫拓的放大立體圖。 _反^完全收納到主體框架料 10 200827820 25719pif 構件63固定玻璃基板15的末端部分，使玻璃基板i5能夠 被穩定地收納在玻璃基板15的收納匣中。 ^如圖4所繪示，固定構件63包括實質上為長方體的主 版64，且此主體64的後表面是由後部框架62來支撐。 ^山固定構件63包括一固定槽部件65，在固定構件幻的 部分，使玻璃基板15能夠插入。此固定槽部件幻的 珂端部分包括一喇队口部件6 6，支撐槽部件的兩侧以喇口八 ) 方式傾斜’使玻璃基板15能夠輕易插入固定槽部件。 ^ 口疋槽部件65包括一對彈性支撐構件，以彈性地 支撐破璃基板15兩侧，使玻璃基板15固定在基板收納匣 上0 、处如圖5所繪示，固定構件63的主體64包括具有預定 ^度的收納槽67，在固定槽部件65的兩侧，用來收納 性支撐構件70。 彈性支撐構件70的一部分被收納到收納槽67中，此 Ο 彈眭支撐構件70是藉由對薄金屬板執行塑性變形而形成 2，所以具有彈性。此外，彈性支撐構件70的截面是鐘形， "中央部分凸出。彈性支撐構件70被收納到收納槽67中， 且包括·鉤狀部件71，以避免彈性支撐構件7〇從收納槽 =上脫離；以及支撐部件72，當玻璃基板15插入固定槽 ^ $件65時粘在玻璃基板15的侧面以彈性地支撐此玻璃基 板15。 〜翁支撐部件72具有半圓形，所以當玻璃基板 15插入固 疋才9 "卩件65時能夠順利地插入彈性支撐構件70之間。較 200827820 25719pif 佳的是 文得邵件72 > ρ弓^ 戸_ _ 又間的間隔窄於玻璃基板15的 厗度，使又撐部件72能夠彈性 當玻璃基板15插入固定如玻禹基板15。 性支_牛70之間時，此’然後插入一對彈 的兩側播開。當彈性支撐構件:冓件70被破璃基板15 的兩侧推進收納槽67時，彈性 3斤述被玻璃基板15 之間的距離變寬。然後，彈件70之釣狀部件71 ο ο ^ 70 ^ ^ -H- 支撐構件7〇產生彈力以使彈 ! 生支接構件70恢復其原始狀態 的支撐部件72附著在破 绞於料支掠構件7〇 之兩側以支撐玻璃基板 15。因此，玻喊板15能_定在基板收練上。 早中如ϋΓ使玻喊板15是以直域11被收納到£ 子中，此朗基板15的下端部分與上端部分也 Π禮:件33與導引構件43來支禮，且破璃基板'5 63來固定。因此，能夠穩定地將玻璃 基板15收納到基板收納匣中。 當玻壤基板15被收納到£子中或從£子中被取出 時，是使用自動機器’例如機械手臂。且當破璃基板15 已經被收納職子中時，-堆疊器（stacker)(沒有给干） 運送此匠子，使多個玻璃基板可被穩定地運送到想要曰的位 置。 圖6是依據本發明之另一實施例的基板收幢的立體 圖。 如圖6所繪示，開啟部件41具有一蓋子45，在主體 框架1〇的上表面上。由於主體框架10的上表面4〇如上所 12 200827820 25719pif 述被封閉，所以能夠避免灰塵從主體框架1〇的上端部分進 入。因此，可減少玻璃基板15上_質量，例如灰塵。 雖然圖中只繪示了形成於主體_ 1Q之上表面4〇中 關啟部件41具有蓋子45,不過除了形成於前表面別中 • 的開啟部件51之外，剩餘開啟部件也可具有苗子。 如上所述，在依據本發明的基板收納由於玻璃 基板是以直立狀態被收納到E子中，所以能夠避免玻璃基 〇 板的中央部分發生變形。由於玻璃基板不會變形，所以可 確保玻璃基板之間有足夠的工作空間。此外，由於使用滾 筒來支撐玻璃基板的底面，所以能夠容易地收納與取出玻 璃基板。 依據本舍明，由於玻璃基板的下表面、上表面以及後 表面都被支撐，所以能夠穩定地收納與保存玻璃基板。 此外，由於玻璃基板處於直立狀態，所以能夠減少雄 積在玻璃基板上的雜質量（即，灰塵等）。 雖然本發明已以較佳實施例揭露如上，然其並非用以 0 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 和範圍内，當可作些許之更動與潤飾，因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 _ 【圖式簡單說明】 _ 圖1是依據本發明之較佳實施例的基板收納歴的立體 圖。 圖2是依據本發明之較佳實施例的圖1所示之基板收 納匣中安裝的支撐構件的立體圖。 13 200827820 25719pif 圖3是依據本發明之較佳實施例的圖1所示之基板收 納匣中安裝的導引構件的立體圖。 圖4是依據本發明之較佳實施例的圖1所示之基板收 - 納匣中安裝的固定構件的立體圖。 . 圖5是依據本發明之較佳實施例的圖4所示之固定構 件的截面圖。 圖6是依據本發明之另一實施例的基板收納匣的立體 圖。 C) 【主要元件符號說明】 10 ··主體框架 15 :玻璃基板 20a、20b ··侧表面 30 :下表面 32 :底部框架 33 :支撐構件 34、64 :主體 〇 35 :支撐槽部件 36、46、66 :。刺。八口部件 37 :傾斜部件 38 :滚筒 38a ··轉軸 40 ··上表面 42 :頂部框架 43 :導引構件 14 200827820 25719pif 45 :導引槽部件 50 :前表面 60 :後表面 62 :後部框架 63 :固定構件 65 :固定槽部件 67 :收納槽 70 :彈性支撐構件 71 :鉤狀部件 72 :支撐部件 21a、21b、31、41、51、61 :開啟部件As shown in Fig. 1, the substrate housing unit according to an embodiment of the present invention includes a body frame 1〇 in the shape of a regular hexahedron. The body frame 10 includes: a pair of side surfaces 2 and 2〇b; a lower surface and an upper surface 40 formed at the lower end portion of the side surfaces 2〇a and 2〇b; the upper surface 50 and the rear surface 60, formed at the front end portion and the rear end portion of the side surfaces 20a and 20b. The side surfaces 20a and 20b are perpendicular to the lower main body, and are perpendicular to the lower surface 30 and the upper surface 40. Further, the side surfaces 20a and 20b are perpendicular to the surface 50 and the rear surface 60 of the 铪 铪 amp amp. The side surfaces 20a and 20b and the lower surface 3's rear surface 60 respectively include an opening member, =40, and a glazing surface 50 and an opening formed in the lower surface 30; and an I bottom frame 32 formed in the upper surface 4〇1 in the lateral direction A plurality of rear frames are laterally mounted in the lateral members 61 in which a plurality of top frames 42' and a plurality of top frames 42' are mounted. . The opening portion in the rear surface 6〇 is the opening members 31, 41 and 61 which are described in the embodiment 42 and 62, but the opening member can also be mounted with a pair of frames 32 and a frame. .裴 个 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 When taken out, these support members support the lower end portion of the glass substrate while stably moving the glass substrate 15. Each of the top frames 42 includes a plurality of guiding members 43 that support the glass substrate when the glass substrate 15 is housed in the main body frame 1 or when the glass substrate 15 is taken out from the main body frame 10 The glass substrate 15 can also be guided at the same time as the upper end portion. Further, each of the rear frames 62 includes a plurality of fixing members 63 which are fixed to one end of the glass substrate 15 when the glass substrate 15 is housed in the main body frame 1B. The spacer = member 33, the guiding member 43 or the fixing member 63 is supported by the same main body = 2 this household = & 34 including the upper end portion of the main body 34 of the main body 34. The plate 15 can be inserted into the branch member 35 to move the lower end portion of the glass base member %. See the branch building, and a tilted Qiuzhu 37 people. The support member 33 includes a la. Gossip Qiu Du Glass substrate! 5. The glass substrate 15 can be guided by the slanting member 37 to be smoothly inserted into the support groove member 35. 9 200827820 25719pif The grooving section allows the glass substrate 15 to smoothly move forward and backward, allowing the glass substrate 15 to perform a rolling motion while supporting the glass substrate. The drum 38 includes a national shaft 38a at the drum 38». I 4-i A » Ο O _ -CrT i 4#· -W IflJi» >1. The support groove member 35 includes /roller 38, The drum 38 moves on the supporting glass substrate 15. The drum 38 includes 犄γ uumsnart) Ma, which is damaged on the substrate 15 of the drum 38. On both sides, the shaft 38a is rotatably supported on the main body 34. Preferably, the roller 38 includes a rubber member or a plastic member to avoid sliding of the glass substrate 15 when supporting and moving the glass, and avoiding the glass substrate 15 图 ο FIG. 3 is mounted on the top frame 42 for supporting and guiding An enlarged perspective view of the guiding member 43 at the upper end portion of the glass substrate 15. The soil guiding member 43 supports and guides the upper end portion of the glass substrate 15, and when the glass substrate 5 is vertically accommodated, the crucible supporting member % cooperates with the glass substrate 15 to be laterally inclined. The upper end portion of the guiding member 43 including a substantially rectangular main body 44 is selected by the top end frame 42. And the lower end portion of the main body 44 includes a plate 15 which can be inserted at its upper end portion == 5': the front end portion of the base 45 includes a taste M port member 46; lower =, the groove member has a mouthpiece The way is tilted. Both sides of the branch member are 46,:: port energy = the end portion of the plate 15 is inserted = the glass substrate 15 so that the glass base is shown in Fig. 4 and Fig. 5: the inlet groove member 45. An enlarged perspective view of the fixed frame 22 of the panel 15 for fixing the base. _Reversely housed in the main frame material 10 200827820 25719pif The member 63 fixes the end portion of the glass substrate 15 so that the glass substrate i5 can be stably accommodated in the housing case of the glass substrate 15. As shown in Fig. 4, the fixing member 63 includes a main body 64 of a substantially rectangular parallelepiped shape, and the rear surface of the main body 64 is supported by the rear frame 62. The mountain fixing member 63 includes a fixing groove member 65 into which the glass substrate 15 can be inserted in the magical portion of the fixing member. The sinuous end portion of the fixing groove member includes a squash member 6 6 which is inclined at both sides of the support groove member so that the glass substrate 15 can be easily inserted into the fixing groove member. The mouth groove member 65 includes a pair of elastic supporting members to elastically support both sides of the glass substrate 15 so that the glass substrate 15 is fixed to the substrate receiving pocket 0, as shown in Fig. 5, the main body 64 of the fixing member 63 The accommodation groove 67 having a predetermined degree is included on both sides of the fixing groove member 65 for accommodating the support member 70. A part of the elastic supporting member 70 is housed in the housing groove 67, and the magazine supporting member 70 is formed by performing plastic deformation on the thin metal plate, so that it has elasticity. Further, the elastic support member 70 has a bell shape in cross section, and the central portion is convex. The elastic supporting member 70 is housed in the housing groove 67, and includes a hook member 71 to prevent the elastic supporting member 7 from being detached from the receiving groove =; and the supporting member 72 when the glass substrate 15 is inserted into the fixing groove 65 It is adhered to the side of the glass substrate 15 to elastically support the glass substrate 15. The arm support member 72 has a semicircular shape, so that the glass substrate 15 can be smoothly inserted between the elastic support members 70 when it is inserted into the holder. More preferably than 200827820, 25719pif is that the text of the piece 72 > ρ bow ^ 戸 _ _ is further narrower than the twist of the glass substrate 15, so that the rest member 72 can be elasticized when the glass substrate 15 is inserted and fixed, such as the glass substrate 15 . When the sex branch is between the cows 70, this is then inserted into the sides of a pair of bullets to spread. When the elastic supporting member: the tongue 70 is pushed by the both sides of the glass substrate 15 into the housing groove 67, the distance between the glass substrates 15 is increased by the elasticity. Then, the fishing member 71 of the elastic member 70 ο ο ^ ^ ^ ^ - H - the supporting member 7 〇 generates an elastic force to cause the supporting member 72 of the original supporting member 70 to return to its original state to be attached to the broken material. Both sides of the member 7 are supported to support the glass substrate 15. Therefore, the glass board 15 can be set on the substrate. In the early morning, the glass plate 15 is received in the direct field 11 and the lower end portion and the upper end portion of the substrate 15 are also smashed: the member 33 and the guiding member 43 are used for the ceremony, and the glass substrate is broken. '5 63 to fix. Therefore, the glass substrate 15 can be stably accommodated in the substrate housing cassette. When the glass substrate 15 is stored in or taken out of the sheet, an automatic machine such as a robot arm is used. And when the frit substrate 15 has been stored in the job, the stacker (not dry) transports the trader so that the plurality of glass substrates can be stably transported to the position where the crucible is desired. Figure 6 is a perspective view of a substrate housing in accordance with another embodiment of the present invention. As shown in Fig. 6, the opening member 41 has a cover 45 on the upper surface of the main body frame 1A. Since the upper surface 4 of the main body frame 10 is closed as described above, it is possible to prevent dust from entering from the upper end portion of the main body frame 1〇. Therefore, the quality of the glass substrate 15 such as dust can be reduced. Although the drawing only shows that the closing member 41 has a cover 45 formed on the upper surface 4 of the main body _ 1Q, the remaining opening member may have a seed except for the opening member 51 formed on the front surface. As described above, in the substrate storage according to the present invention, since the glass substrate is housed in the E state in an upright state, deformation of the central portion of the glass base plate can be avoided. Since the glass substrate is not deformed, it is ensured that there is sufficient working space between the glass substrates. Further, since the bottom surface of the glass substrate is supported by the roller, the glass substrate can be easily accommodated and taken out. According to the present invention, since the lower surface, the upper surface, and the rear surface of the glass substrate are supported, the glass substrate can be stably stored and stored. Further, since the glass substrate is in an upright state, it is possible to reduce the amount of impurities (i.e., dust, etc.) which are accumulated on the glass substrate. Although the present invention has been described above by way of a preferred embodiment, it is not intended to limit the invention, and those skilled in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a substrate housing cassette in accordance with a preferred embodiment of the present invention. Figure 2 is a perspective view of a support member mounted in the substrate receiving pocket of Figure 1 in accordance with a preferred embodiment of the present invention. 13 200827820 25719pif FIG. 3 is a perspective view of a guide member mounted in the substrate receiving cassette of FIG. 1 in accordance with a preferred embodiment of the present invention. Figure 4 is a perspective view of a fixing member mounted in the substrate receiving and receiving device of Figure 1 in accordance with a preferred embodiment of the present invention. Figure 5 is a cross-sectional view of the fixed member of Figure 4 in accordance with a preferred embodiment of the present invention. Figure 6 is a perspective view of a substrate housing cassette in accordance with another embodiment of the present invention. C) [Description of main component symbols] 10 · Main frame 15: Glass substrates 20a, 20b · Side surface 30: Lower surface 32: Bottom frame 33: Support members 34, 64: Main body 35: Support groove members 36, 46 66: thorn. Eight-port member 37: Tilt member 38: Roller 38a · Rotary shaft 40 · Upper surface 42: Top frame 43: Guide member 14 200827820 25719pif 45 : Guide groove member 50: Front surface 60: Rear surface 62: Rear frame 63 : fixing member 65 : fixing groove member 67 : receiving groove 70 : elastic supporting member 71 : hook member 72 : supporting member 21 a , 21 b , 31 , 41 , 51 , 61 : opening member

1515

Claims (1)

200827820 25719pif 十、申請專利範圍： 1·一種基板收納匣，能、， 所述基板收納更包括· ϋ欠肩並移動多個玻璃基板， 一對相對的側表面； 端部分Γ 表面开乂成於所述侧表面的上端部分與下 别表面與後表面，形成、 ο ο 端部分； 述側表面的前端部分與後 支撐構件，安裝在所述 的下端部分； 1面上，支撐所述玻璃基板 導引構件，安裝在所述上 述玻璃基板；以及 、，引導正在收納的所 固定構件，安裝在所述後 定於所述玻璃基板被收納之狀態，h將所述破璃基板固 垂直地收納。 、”中所述破璃基板是被 2.如申請專利範圍第1項 述支撐構件包括： R之基板收其中所 主體； j支擇槽部件，形成於所述主體的上端部分中 玻璃基板在其被插入之狀態下運動； 处 • 口部件，賴於所述切槽部件的前端部分 所述支擇槽部件的兩侧以喇队口方式傾斜形成.以及由 斜。傾斜部件，從所述支撐槽部件的所述前端部^向下傾 16 200827820 25719pif 、、〔如申請專利範圍第2項所述之基板收納匣， 述支撐構件更包括滾筒，所述滾筒安裝在所述支撑二:所 二芙^撐所述玻璃基板的同時執行滾轉運動以移 其中所 其中所 、、i如申請專利範圍第3項所述之基板收納匣 述滾筒包括橡膠構件或塑膠構件。 〇 υ 一 5·如申請專利範圍第丨項所述之基板收納匣 述導引構件包括： 主體； 使所述 +導引槽構件，形成於所述主體的下端部分中 玻璃基板在其被插入之狀態下運動；以及 ，八口縣，形成於所述支撐槽部件的前端部分，由 所处又撐槽部件的兩側以喇叭口方式傾斜形成。 6.如申請專利範圍第！項所述之基板收_， 述固定構件包括·· ，、 主體； 形成於所述主體的前端部分’使所述玻 2口部件’形成於所述支擇槽部件的前端部分，由 所巧撑槽部件的兩側以•八口方式傾斜形成，·以及 彈/·生支撐構件’虽所述破璃基板插入所述固定槽部件 時，=雜支料件雜地支#所述破璃基板的兩側， 從而固定所述玻璃基板。 7.如申請專利範圍第6項所述之基板收納其中所 200827820 25719pif 述主k包括收納槽，所述收納槽與所述固定槽部件相通， 且收納所述彈性支撐構件的一部分。 ^如中請專利範圍第7項所述之基板收納匣，其中所 ^，使得由對薄金—塑性變形而形成 Ο 構件具謂性，且所_性支據構 件；2=板:收納在所述收嶋 件彈性地支樓所述破‘=二槽部件時，所述支撐部 Ο 18200827820 25719pif X. Patent Application Range: 1. A substrate storage device, wherein the substrate storage further comprises: a plurality of glass substrates, a pair of opposite side surfaces; and an end portion Γ An upper end portion of the side surface and a lower surface and a rear surface are formed, and an end portion; a front end portion of the side surface and a rear support member are mounted on the lower end portion; and a surface supports the glass substrate The guiding member is attached to the glass substrate; and the fixed member that is being stored is guided, and the glass substrate is placed in the state after being mounted, and the glass substrate is vertically stored. . The glass substrate according to the first aspect of the invention includes: a substrate of R received by the body; a spacer groove member formed in the upper end portion of the body; Moving in the state of being inserted; the mouth member, depending on the front end portion of the grooving member, the both sides of the sizing groove member are formed obliquely in a lap style, and the slanting member is The front end portion of the support groove member is downwardly inclined. The base member storage device according to claim 2, wherein the support member further includes a roller, and the roller is mounted on the support 2: The substrate is arranged to perform a tumbling motion while the glass substrate is being moved to move the substrate, and the substrate storage drum described in claim 3 includes a rubber member or a plastic member. The substrate accommodation description guiding member according to the above aspect of the invention, comprising: a main body; wherein the + guiding groove member is formed in a lower end portion of the main body, wherein the glass substrate is And the eight-port county is formed at the front end portion of the supporting trough member, and is formed by the bellows on both sides of the supporting trough member. 6. As claimed in the patent item The substrate member _, the fixing member includes a body, and the front end portion of the body is formed in the front end portion of the body to form a front end portion of the groove member. Both sides of the member are formed obliquely in an eight-port manner, and the elastic/supporting member is inserted into the fixing groove member, and the two pieces of the glass substrate are mixed with the miscellaneous material. The substrate is fixed to the side of the glass substrate. 7. The substrate storage according to claim 6 of the invention, wherein the main body k includes a receiving groove, the receiving groove is in communication with the fixing groove member, and the receiving portion is A portion of the elastic support member. The substrate storage device according to the seventh aspect of the invention, wherein the substrate is formed by a thin gold-plastic deformation, and the member is said to be a member; 2=board : accommodating the support portion Ο 18 when the receiving member elastically branches the broken ‘= two-slot member
TW096137975A 2006-12-19 2007-10-11 Cassette for receiving substrate TWI384272B (en)

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KR1020060130061A KR101263252B1 (en) 2006-12-19 2006-12-19 Cassette For Receiving Substrate

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JP2010129674A (en) * 2008-11-26 2010-06-10 Shin Etsu Polymer Co Ltd Substrate storage container, clamp hand, and method of taking out substrate
KR101044206B1 (en) * 2008-12-15 2011-06-29 삼성전기주식회사 A basket for supporting a substrate
JP2013033772A (en) * 2009-10-29 2013-02-14 Yodogawa Hu-Tech Kk Plate body storage cassette and usage thereof
KR101178286B1 (en) * 2010-08-17 2012-08-30 주식회사 엠엠테크 cassette for etching of glass
KR101182200B1 (en) * 2010-11-18 2012-09-14 (주) 청심이엔지 Substrate slimming apparatus
KR101386596B1 (en) * 2012-10-29 2014-04-17 서효석 Glass fixing apparatus
KR101302191B1 (en) * 2013-03-14 2013-09-02 박미예 Cassette for thin plate tempered glass giving a summary
KR101455938B1 (en) * 2013-07-16 2014-11-03 주식회사 에스비비테크 The glasses etching machine for glasses clamp
KR102428369B1 (en) * 2015-08-19 2022-08-02 삼성디스플레이 주식회사 System for transferring substrate
JP6652418B2 (en) * 2016-03-16 2020-02-26 日本板硝子株式会社 Glass plate holder and glass plate transfer device
JP7183997B2 (en) * 2019-08-29 2022-12-06 Ａｇｃ株式会社 Glass substrate processing method
KR102253417B1 (en) * 2019-11-04 2021-05-18 주식회사 아이티엔티 Magazine for Semiconductor Inspection Equipment
CN115384856B (en) * 2022-09-13 2023-12-22 河南汇达印通科技股份有限公司 Placement piece, boxing device, whole box photosensitive material plate and boxing method

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TWM296236U (en) * 2006-03-17 2006-08-21 Eclat Forever Machinery Co Ltd Roller structure of delivering apparatus

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TWI384272B (en) 2013-02-01
JP4696102B2 (en) 2011-06-08

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