CN110687700B - Insert structure and substrate loading cassette provided with same - Google Patents
Insert structure and substrate loading cassette provided with same Download PDFInfo
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- CN110687700B CN110687700B CN201810897688.6A CN201810897688A CN110687700B CN 110687700 B CN110687700 B CN 110687700B CN 201810897688 A CN201810897688 A CN 201810897688A CN 110687700 B CN110687700 B CN 110687700B
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- coupling
- insert structure
- reinforcing member
- substrate
- insertion portion
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
- H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides an insert structure and a cassette for loading a substrate with the insert structure. An insert structure according to an embodiment of the present invention is combined with a support bar combined with a rear frame of a cassette for loading a substrate to support the substrate, and includes: an insertion part inserted into the opening part connected with the hollow part of the support rod; a coupling part formed at one side of the insertion part and coupled to the rear frame; and a reinforcing member, wherein a part of the reinforcing member is embedded in the insertion portion at a joint portion of the insertion portion and the coupling portion.
Description
Technical Field
The invention relates to an insert structure of a support rod for supporting a substrate loading cassette.
Background
In general, in a process of manufacturing a liquid crystal panel of a liquid crystal display device, a Cassette (Cassette) is mainly used as a means capable of being temporarily stored in order to transfer substrates between individual processes. The cassette carries a plurality of substrates one by one, whereby a plurality of substrates can be transported at a time. Here, the cassette is provided with a plurality of support rods in the height direction, so that a plurality of substrates can be loaded in a spaced-apart manner.
The support rod is combined with the rear frame of the cassette through an insert structure. Here, one side of the insert structure is inserted into and combined with the hollow portion of the support rod, and the other side is combined with the rear frame.
At this time, one side of the support rod is combined with the rear frame of the cassette through the insert structure, and the other side of the support rod is arranged on the inner side of the cassette in the length direction in an unsupported state. In this case, since the length of the stay is long, a large load is applied to the coupling portion with the rear frame. At this time, the load applied to the supporting rod is transferred to the insert structure. Due to the load, the portion of the insert structure inserted into the support bar and the portion coupled to the rear frame may be cut or broken.
Thus, improvement of the cartridge is required so that the strength of the insert structure can be enhanced.
Prior art documents
Patent document
Patent document 1 korean granted patent No. 10-1300688B1
Disclosure of Invention
In order to solve the above-described problems of the prior art, an embodiment of the present invention provides an insert structure and a substrate loading cassette having the insert structure, so as to enhance the strength of a coupling portion between a support bar and a rear frame.
In order to solve the above problems, an insert structure according to an aspect of the present invention is an insert structure coupled to a support bar coupled to a rear frame of a substrate loading cassette to support a substrate, the insert structure including: an insertion part inserted into an opening part connected to the hollow part of the support rod; a coupling part formed at one side of the insertion part and coupled to the rear frame; and a reinforcing member, a part of which is embedded in the insertion portion at a joint portion of the insertion portion and the coupling portion.
In an embodiment, the insertion portion may include: an insertion portion main body made of aluminum; groove portions formed at both sides of the insertion portion main body at predetermined intervals and at predetermined depths; a step part formed at both ends of one side of the insertion part main body; and a through hole formed in at least one position of the step part.
In one embodiment, the reinforcing member is made of a stainless steel alloy and may have a rod shape.
In an embodiment, the reinforcing member may be formed integrally with the insertion portion by insert injection molding.
In one embodiment, one side of the reinforcing member may be buried in the insertion portion, and the other side may be formed to protrude toward the coupling portion side.
In an embodiment, a length of the reinforcing member disposed at the insertion portion side is longer or the same as a length of the reinforcing member disposed at the coupling portion side.
In an embodiment, a ratio of a length of the reinforcing member disposed at the insertion portion side to a length of the reinforcing member disposed at the coupling portion side is 1 to 1.2: 1.
In an embodiment, a sectional area of the reinforcing member is larger than a sectional area of the insertion portion main body at the groove portion.
In one embodiment, the reinforcing member is exposed to the outside at a groove portion closest to the coupling portion.
In one embodiment, the coupling portion includes: a first surface having a cross-sectional area wider than a longitudinal cross-sectional area of the insertion portion; a second surface coupled to the rear frame; an extension portion horizontally extending from the second surface toward the first surface; and an inclined surface formed to be inclined from the extension toward the first surface, and the second surface is formed to be open downward "
"font.
In one embodiment, a plurality of coupling grooves are formed on the second surface and the side surface of the coupling portion, respectively.
According to another aspect of the present invention, there is provided a cassette for loading substrates, comprising: putting the frame on; a lower frame; a plurality of side frames vertically coupled to both side portions of the upper frame and the lower frame; a plurality of rear frames coupled to rear sides of the upper frame and the lower frame in a vertical direction; a support rod having a hollow portion therein, a membrane filter at one side thereof, one side of the support rod being coupled to the rear frame, and the other side thereof being extended inward to support the substrate; and the insert structure inserted into the hollow portion of the support rod to couple the support rod to the rear frame.
In one embodiment, the membrane filter may include: a coupling member inserted into the coupling hole of the support bar and having a first hole; a thin film plate disposed at one side of the coupling member; and a cover part having a second hole communicating with the first hole, for fixing the film plate to the coupling member.
Effects of the invention
According to the insert structure and the substrate loading cassette including the insert structure of the embodiment of the present invention, the reinforcing member having a strength superior to that of the insert structure is embedded in the insert structure, so that the strength of the coupling portion between the support bar and the rear frame can be reinforced, and the substrate supported by the support bar can be prevented from being damaged.
According to the insert structure and the substrate loading cassette including the insert structure of the embodiment of the present invention, since the reinforcing member is disposed such that one side of the reinforcing member protrudes toward the coupling portion side of the insert structure, the load applied to the insert structure can be distributed by the reinforcing member, and thus the strength of the insert structure can be further enhanced.
Further, according to the insert structure and the substrate loading cassette including the insert structure of the embodiment of the present invention, the sectional area of the reinforcing member is formed to be larger than the sectional area of the recessed portion in the insert structure, so that the strength of the insert structure weakened by the formation of the recessed portion can be reinforced.
Drawings
Fig. 1 is a perspective view showing a cassette for substrate loading provided with an insert structure according to an embodiment of the present invention.
Fig. 2 is a perspective view illustrating a state in which the bracket and the support bar are combined in fig. 1.
Fig. 3 is a perspective view illustrating a state in which an insert structure and a support rod are combined according to an embodiment of the present invention.
Fig. 4 is a sectional view showing a state in which the tip member is incorporated in fig. 3.
Fig. 5 is a sectional view showing a state in which the membrane filter is incorporated in fig. 3.
Fig. 6 is a perspective view illustrating an insert structure according to an embodiment of the present invention.
Fig. 7 is a perspective view in the other direction of fig. 6.
Fig. 8 is a cross-sectional view of fig. 7.
Fig. 9 is a front view of the front portion of fig. 7.
In the figure:
1: cassette for loading substrate, 2: upper frame, 3: lower frame, 4: side frame, 5: rear frame, 6: reinforcing frame, 7: rod member, 10: support rod, 11: opening, 12: hollow portion, 13: insertion hole, 14: coupling hole, 20: tip member, 30: membrane filter, 31: coupling portion, 32: film plate, 33: cover portion, 100: insert structure, 110: coupling portion, 110 a: coupling portion main body, 111: rear face portion, 112: front face, 113: extension, 114: inclined surface, 115, 116: coupling groove, 117: space portion, 120: insertion portion, 120 a: insertion portion main body, 121: groove portion, 122 step portion, 123: through opening, 124: coupling groove, 130: reinforcing member
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present invention pertains can easily carry out the invention. The present invention may be embodied in various forms and is not limited to the embodiments described herein. In the drawings, parts that are not related to the description are omitted for the sake of clarity, and the same or similar components are denoted by the same reference numerals throughout the specification.
Hereinafter, an insert structure according to an embodiment of the present invention will be described in more detail with reference to the accompanying drawings. Fig. 1 is a perspective view illustrating a cassette for loading a substrate having an insert structure according to an embodiment of the present invention, and fig. 2 is a perspective view illustrating a state in which a holder and a support rod are coupled in fig. 1.
In describing the substrate loading cassette 1 according to the embodiment of the present invention, the direction in which the substrate is loaded in the cassette 1 (left direction in fig. 1) is defined as the front of the cassette 1, and the opposite direction is defined as the rear.
Referring to fig. 1, a cassette 1 for loading substrates according to an embodiment of the present invention may include: an upper frame 2, a lower frame 3, side frames 4, a rear frame 5, a reinforcing frame 6, a bar member 7, and a support bar 10.
The substrate loading cassette 1 can stably load the substrate in the process of loading the substrate and then re-loading the loaded substrate, thereby preventing the substrate from being defective in a series of production processes.
The upper frame 2 and the lower frame 3 may be formed in a plate shape, respectively. For example, the upper frame 2 and the lower frame 3 may be formed in a rectangular shape. In this case, a plurality of side frames 4 may be coupled to both side surfaces of the upper frame 2 and the lower frame 3 in order to vertically connect the upper frame 2 and the lower frame 3.
The plurality of side frames 4 are formed in a bar shape and can be arranged side by side with a space in the lateral direction of the upper frame 2 and the lower frame 3. Further, a plurality of bar members 7 are provided at predetermined intervals in the vertical direction on the plurality of side frames 4, and can support the peripheral edge portion of the square substrate. At this time, the interval at which the rod members 7 are arranged may be changed according to the thickness of the substrate to be loaded.
The bar member 7 is in the shape of a bar and can be disposed between the upper frame 2 and the lower frame 3. Here, the shape of the bar member 7 is not limited, but in order to prevent damage of the substrate, a shape that can minimize the contact portion of the substrate is preferable.
The reinforcing frame 6 may be coupled between the side frame 4, the upper frame 2 and the lower frame 3. Here, the reinforcing frame 6 may be formed in a bar shape. The reinforcing frame 6 is coupled to the side frame 4, i.e., one end is coupled to the lower frame 3 and the other end is coupled to the upper frame 2. In this case, the reinforcing frame 6 may be disposed in a diagonal direction of a predetermined angle. This prevents the upper frame 2 and the side frames 4 from sagging.
The upper frame 2 and the lower frame 3 are connected in the vertical direction, and a plurality of rear frames 5 may be coupled in the vertical direction at rear corners of the upper frame 2 and the lower frame 3 in order to provide support bars 10.
In this case, the rear frame 5 may be coupled to the insert structure 100 so that the support rod 10, which will be described later, is horizontally supported by the H-shaped longitudinal section. Here, the rear frame 5 may be formed with coupling grooves at predetermined intervals along the length direction of both sides and the front face. The rear frame 5 may be coupled to the insert structure 100 by the coupling grooves using coupling members.
According to fig. 2, support bars 10 are provided at predetermined intervals along the length direction of the rear frame 5 so that the substrate can be supported. The support bar 10 may be disposed between a plurality of bar members 7. This is because, when the both end portions of the substrate are supported only by the rod members 7, the central portion of the substrate may hang down and the substrate may collide with a robot or the like for loading or unloading the substrate in the substrate loading cassette 1, and the plurality of support rods 10 are disposed between the plurality of rod members 7 to prevent a risk that may occur.
For this reason, the support bar 10 may be disposed at the same height as the rod member 7. Therefore, the support rod 10 and the rod member 7 can support the substrate to be loaded in parallel to prevent downward bending.
Fig. 3 is a perspective view illustrating a state in which an insert structure and a support rod are combined according to an embodiment of the present invention, fig. 4 is a sectional view illustrating a state in which a nib member is combined in fig. 3, and fig. 5 is a sectional view illustrating a state in which a membrane filter is combined in fig. 3.
The insert structure 100 according to the embodiment of the present invention may be inserted into and coupled to the inside of the support pole 10 formed with the hollow portion 12.
Here, as shown in fig. 3, the hollow portion 12 is formed in the support rod 10, so that the material can be saved, and the drooping caused by the load of the support rod 10 itself can be minimized in consideration of the case where the support rod 10 becomes longer with the increase in the size of the base plate. Thus, when the support bar 10 sags, the supporting force of the substrate is reduced at the corresponding portion and the substrate sags, which may even cause the substrate to be damaged.
Also, the support bar 10 may be formed in a quadrangular pillar shape having a quadrangular section, but is not limited thereto, and the section may be formed in a circular shape, an elliptical shape, a polygonal shape, etc. In this case, when the cross-section of the support rod 10 is a square shape, the support rod contacts the substrate surface, and thus the tip member 20 may be further provided on the contact surface.
Here, the tip member 20 absorbs the impact generated in the support rod main body 10a when the substrate is mounted, and prevents the scratch from being generated in the substrate.
According to fig. 4, the tip member 20 may be inserted into and coupled to the insertion hole 13 formed in the support rod body 10 a. At this time, the tip member 20 has a cylindrical protrusion shape, and may be formed of a plastic material, but is not limited thereto. Here, the tip member 20 may be inserted at a position corresponding to the through opening 123 of the insertion part body 120 a.
For example, the tip member 20 may be formed in a hook shape. That is, the tip member 20 may include a circular head portion 21 and a pair of protrusions 22 formed from the head portion 21 toward both sides. The protrusion 22 may be formed separately from the head portion 21. At this time, the tip member 20 may be insertedly coupled to the insertion hole 13. That is, the tip member 20 can be inserted into the insertion hole 13 in a state where the protrusions 22 are compressed toward the space between the protrusions 22. At this time, the projection 22 returns to its original state and can be locked and fixed to the inside of the strut body 10a in the insertion hole 13.
In addition, the insert structure 100 according to an embodiment of the present invention may be fixed to an opening portion 11 formed at one end of the support pole 10. Here, the insert structure 100 may be formed to have a cross-section corresponding to the size of the opening portion 11 formed at one end of the support bar 10. So that the hollow 12 formed at the inside of the support pole 10 is completely sealed. This is because, if the hollow portion 12 is not sealed, the liquid flows into the hollow portion 12 and drops on the upper surface of the substrate to be loaded during the cleaning of the substrate loading cassette 1, thereby increasing the defective rate of the substrate.
Here, the support rod main body 10a may be formed of a Carbon Fiber Reinforced Plastic (CFRP), a carbon film, a glass reinforced film, an aramid film, and a metal thin film in a single layer or a plurality of layers. In this case, Carbon Fiber Reinforced Plastics (CFRP) are obtained by impregnating a woven fabric or a sheet made of carbon fibers having excellent specific strength (specific strength), rigidity (rigidity), and crack strength (rupture strength) with an epoxy resin and curing the impregnated fabric or sheet.
Also, the support pole 10 may be combined with the membrane filter 30 at one side. At this time, a coupling hole 14 may be formed at one side surface of the support rod main body 10a so that the membrane filter 30 can be inserted and fixed.
Referring to fig. 5, the membrane filter 30 may include a coupling member 31, a membrane plate 32, and a cover part 32.
The coupling member 31 may be inserted into the coupling hole 14 coupled to the support stick main body 10 a. For example, the coupling member 31 may be formed in a rivet shape. That is, the head portion 31b of the coupling member 31 is disposed outside the support rod main body 10a, and the main body is insertable into the hollow portion 12 of the support rod main body 10a through the coupling hole 14.
At this time, the coupling member 31 may be formed with a first hole 31a through a central portion thereof. Wherein the first hole 31a may be formed to be elongated to the head portion 31 b. Also, a stepped portion 31c wider than the diameter of the first hole 31a may be formed at the center of the head portion 31 b.
Here, the outer circumferential surface of the coupling member 31 and the inner circumferential surface of the coupling hole 14 are bonded to each other by at least one of thermal fusion, ultrasonic fusion, and adhesive, and thus, water can be prevented from flowing into the interior of the support pole 10. In this case, the adhesive may be an epoxy adhesive, but is not limited thereto, and may be formed of a urethane series or a silicon material.
The thin film plate 32 may be formed at one side of the coupling member 31. I.e. the membrane plate 32 may be arranged between the coupling member 31 and the cover 32. Here, the film plate 32 serves to block the inflow of moisture by ventilating. For example, the thin film plate 32 may be formed by laminating a nonwoven fabric (PP, PET) layer and a Polytetrafluoroethylene (PTFE) layer on top of each other.
The cover part 32 may fix the film plate 32 to the coupling member 31. The cover 32 may form a receiving portion 33a for receiving the head portion 31b of the coupling member 31. A stepped portion 33c corresponding to the stepped portion 31c of the coupling member 31 may be formed at one side of the receiving portion 33 a.
The lid portion 32 includes a second hole 33d communicating with the first hole 31a at the upper end portion 33 b. Here, the second hole 33d may be formed in a mesh shape. That is, the second hole 33d may be formed in plurality on one side of the upper end portion 33 b.
Here, in the drying process after the washing, the remaining water flows into the inside of the support rod during the washing due to a pressure difference between the inside and the outside of the support rod 10, which occurs when the inside air is cooled at a normal temperature and is contracted after being expanded, and the support rod 10 is provided with the membrane filter 30, so that the pressure difference between the inside and the outside of the support rod 10 is alleviated and the water can be prevented from flowing into the inside of the support rod.
In this way, the thin film plate 30 can not only prevent water from flowing into the inside hollow portion 12 of the holder main body 10a from the outside but also provide an air passage during the cleaning of the substrate loading cassette 1.
Fig. 6 is a perspective view showing an insert structure according to an embodiment of the present invention, fig. 7 is a perspective view in another direction of fig. 6, fig. 8 is a sectional view of fig. 7, and fig. 9 is a front view of a front surface part of fig. 7.
Referring to fig. 6 to 9, an insert structure 100 according to an embodiment of the present invention may include a coupling portion 110, an insertion portion 120, and a reinforcing member 130.
The coupling portion 110 is integrally formed with the insertion portion 120 and is joined to the rear frame 5. The coupling part 110 may include a coupling part main body 110a, a rear part 111, a front part 112, an extension part 113, and an inclined surface 114.
The coupling body 110a may be made of a non-ferrous metal such as an aluminum alloy. Here, the coupling part main body 110a may be formed with a plurality of coupling grooves 115 at both side surfaces thereof.
The rear surface portion 111 is a portion coupled to the insertion portion 120 at one side of the coupling portion main body 110a, and may have a cross-sectional area wider than a longitudinal cross-sectional area of the insertion portion 120. Referring to fig. 6 and 7, the rear surface portion 111 may be formed with a height and width greater than those of the insertion portion 120.
Front face112 is a part joined to the rear frame 5 on the other side of the coupling part body 110a, and may be formed to be open to the lower side "
"font. At this time, the front part 112 may be formed to be greater than the height of the rear part 111.
Referring to fig. 8 and 9, the surface where front part 112 is coupled to rear frame 5 is formed "
The lower side of the "letter" may be formed with a space 117. Here, the space part 117 may be formed to a predetermined depth toward the inside of the coupling part main body 110 a. I.e. of the front face 112 "
The "letter-shaped portion" may be formed in a side wall form of the space portion 117.
The extension portion 113 may be horizontally extended from the front portion 112 toward the rear portion 111. Here, the coupling part main body 110a may form a plurality of coupling grooves 116 at an inner side corresponding to the extension 113. I.e. extension 113 can be from front part 112 "
The letter-shaped face is formed to be elongated by a length corresponding to the depth of the coupling groove 116.
The inclined surface 114 may be formed to be inclined from the extension portion 113 toward the rear surface portion 111. In fig. 6 and 7, the inclined surfaces 114 may be formed at upper and lower portions of the coupling part main body 110 a. This allows a load to be distributed to the portion where the coupling portion 110 and the insertion portion 120 are joined, and thus, the joining strength between the coupling portion 110 and the insertion portion 120 can be improved.
The insertion portion 120 is inserted into and fixed to the opening 11 connected to the hollow portion 12 of the support bar 10. The insertion part 120 may include an insertion part main body 120a, a groove part 121, a step part 122, and a penetration opening 123.
The insertion portion main body 120a may be made of a non-ferrous metal such as an aluminum alloy.
The groove portions 121 are formed at both sides of the insertion portion main body 120a at predetermined intervals and at predetermined depths. Here, the groove portion 121 serves as a coring (coring) function of the insertion portion main body 120a, and prevents formation of air bubbles when the insert structure 100 is injection molded.
The stepped portions 122 may be formed at both ends of the upper end side of the insertion part main body 120 a. That is, the stepped part 122 may be formed at an upper side corner of the insertion part main body 120a in a length direction. The stepped portion may be filled with an adhesive such as an epoxy adhesive for bonding the insert structure 100 and the leg bar 10.
More specifically, before the insert structure 100 is inserted into the opening portion 11 of the support rod 10, an adhesive may be applied to the outer circumferential surface of the insert structure 100. Here, when the insert structure 100 is inserted into the support stick 10, the insert structure 100 may be coupled to the support stick 10 by an adhesive applied between the outer circumferential surface of the insertion portion 120 and the inner surface of the support stick 10, that is, the inner circumferential surface of the hollow portion 12.
At this time, the adhesive between the outer circumferential surface of the insertion portion 120 and the inner surface of the support pole 10 is partially pushed in the horizontal direction to fill the stepped portion 122. When an adhesive is applied, the adhesive may fill the stepped portion 122.
In this way, the step 122 is filled with the adhesive, so that the coupling force between the insert structure 100 and the support rod 10 can be more firmly fixed.
The through opening 123 may be formed at least one position of the stepped part 122. Here, the through hole 123 may be formed at a position where the tip member 20 is coupled to the support rod 10.
Thus, in a state where the insertion portion 120 is inserted into and coupled to the opening 11 of the support pole 10, the tip member 20 coupled to the insertion portion body 120a is coupled to the support pole 10 so as not to interfere with the insertion portion body 120 a.
The reinforcing member 130 may be embedded in the insertion portion 120 at a joint portion of the coupling portion 110 and the insertion portion 120. Referring to fig. 8, a part of the reinforcing member 130 is embedded in the coupling groove 124 of the insertion part body 120a, and the other part may be formed to protrude toward the coupling part 110 side.
Here, the reinforcing member 130 may be formed of a different material from the insertion part 120. As an example, the reinforcing member 130 may be made of stainless steel (SUS) alloy, and may have a bar shape. That is, the insertion portion 120 may be made of aluminum and have the hollow portion 12 for light weight, and conversely, the reinforcing member 130 may be made of stainless steel (SUS) alloy and may be formed in a solid bar shape for strength reinforcement.
Thus, the reinforcing member 130 can reinforce the coupling strength between the coupling part 110 and the insertion part 120, and as a result, the strength of the coupling portion between the support bar 10 and the rear frame 5 can be reinforced.
The reinforcing member 130 may be formed integrally with the insertion part 120 by insert injection molding. In this case, one side of the reinforcing member 130 is embedded in the insertion portion 120, and the other side thereof may be formed to protrude toward the space portion 117 of the coupling portion 110. Here, the reinforcing member 130 may be disposed such that the other side does not separate from the space portion 117.
Further, the length of the reinforcing member 130 disposed on the insertion portion 120 side of the reinforcing member 130 is longer than or equal to the length of the reinforcing member 130 disposed on the coupling portion 110 side. In this case, the length of the reinforcing member 130 disposed on the insertion portion 120 side is preferably not more than 20% of the length of the reinforcing member 130 disposed on the coupling portion 110 side. For example, the reinforcing member 130 may be formed in a range of 1 to 1.2: 1.
Here, when the length of the reinforcing member 130 disposed on the insertion portion 120 side is smaller than the length of the reinforcing member 130 disposed on the coupling portion 110 side, the reinforcing strength effect by the reinforcing member 130 may be reduced, and when it exceeds 20%, further strength reinforcing effect by the reinforcing member 130 does not occur, which may cause unnecessary material loss.
Thus, the reinforcing member 130 can distribute the load generated by the substrate mounted on the support pole 10 to the insertion portion 120 and the coupling portion 110. Therefore, the reinforcing member 130 may further improve the bonding strength of the insertion part 120 and the coupling part 110.
Referring to fig. 7, the reinforcing member 130 may have a sectional area greater than that of the insertion portion body 120a at the groove portion 121. That is, the groove part 121 of one side of the reinforcing member 130 closest to the coupling part 110 may be exposed to the outside through the groove part 121. Thereby, the strength of the insert structure 100 weakened by the groove portions 121 can be enhanced.
With the above-described structure, according to the insert structure 100 of the embodiment of the present invention, since the strength of the coupling portion between the support bar and the rear frame can be enhanced, it is possible to prevent the damage of the mounted substrate. Further, since the insert structure 100 can distribute the load of the insert structure by the reinforcing member, the strength of the insert structure can be further enhanced. Also, the insert structure 100 may reinforce the strength of the insert structure weakened by the formation of the grooves.
Although one embodiment of the present invention has been described above, the present invention is not limited to the embodiment described above, and a person skilled in the art of the present invention who understands the idea of the present invention can easily create other embodiments by adding, changing, deleting, adding, etc. components within the same technical idea, and these embodiments are within the idea of the present invention.
Claims (10)
1. An insert structure combined with a support rod combined with a rear frame of a cassette for loading a substrate to support the substrate, comprising:
an insertion part inserted into an opening part connected to the hollow part of the support rod;
a coupling part formed at one side of the insertion part and coupled to the rear frame; and
a reinforcing member, a part of which is embedded in the insertion portion at a joint portion of the insertion portion and the coupling portion,
the insertion portion includes:
an insertion portion main body made of aluminum;
groove portions formed at both sides of the insertion portion main body at predetermined intervals and at predetermined depths;
the coupling part is formed on the surface combined with the rear frame
A character form, a space part is formed at the lower side of the character form,
one side of the reinforcing member is embedded in the insertion portion, and the other side of the reinforcing member is formed so as to protrude toward the space portion,
a sectional area of the reinforcing member is larger than a sectional area of the insertion portion main body at the groove portion,
the reinforcing member is exposed to the outside at a groove portion closest to the coupling portion.
2. The insert structure according to claim 1, wherein the insert portion further comprises:
a step part formed at both ends of one side of the insertion part main body; and
and the through hole is formed in at least one position of the step part.
3. The insert structure as in claim 2, wherein the stiffening member is made of a stainless steel alloy and has a rod shape.
4. The insert structure as claimed in claim 2, wherein the reinforcing member is formed integrally with the insert portion by insert injection molding.
5. The insert structure according to claim 2, wherein a length of the reinforcing member disposed on the insertion portion side is longer than or the same as a length of the reinforcing member disposed on the coupling portion side.
6. The insert structure according to claim 5, wherein a ratio of a length of the reinforcing member disposed on the insertion portion side to a length of the reinforcing member disposed on the coupling portion side is 1 to 1.2: 1.
7. The insert structure as in claim 1, wherein the coupling portion comprises:
a first surface having a cross-sectional area wider than a longitudinal cross-sectional area of the insertion portion;
a second surface coupled to the rear frame;
an extension portion horizontally extending from the second surface toward the first surface; and
and an inclined surface formed to be inclined from the extension portion toward the first surface.
8. The insert structure according to claim 7, wherein a plurality of coupling grooves are formed in the second surface and the side surfaces of the coupling portions, respectively.
9. A cassette for loading a substrate, comprising:
putting the frame on;
a lower frame;
a plurality of side frames vertically coupled to both side portions of the upper frame and the lower frame;
a plurality of rear frames coupled to rear sides of the upper frame and the lower frame in a vertical direction;
a support rod having a hollow portion therein, a membrane filter at one side thereof, one side of the support rod being coupled to the rear frame, and the other side thereof being extended inward to support the substrate; and
the insert structure according to any one of claims 1 to 8, which is inserted into the hollow portion of the support rod and couples the support rod to the rear frame.
10. The cassette for substrate loading according to claim 9, wherein the thin film filter comprises:
a coupling member inserted into the coupling hole of the support bar and having a first hole;
a thin film plate disposed at one side of the coupling member; and
a cover portion having a second hole communicating with the first hole for fixing the thin film plate to the coupling member.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2018-0078354 | 2018-07-05 | ||
| KR1020180078354A KR101944718B1 (en) | 2018-07-05 | 2018-07-05 | Insert structure and cassette for loading substrate with the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110687700A CN110687700A (en) | 2020-01-14 |
| CN110687700B true CN110687700B (en) | 2022-05-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810897688.6A Active CN110687700B (en) | 2018-07-05 | 2018-08-08 | Insert structure and substrate loading cassette provided with same |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101944718B1 (en) |
| CN (1) | CN110687700B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7228697B2 (en) | 2019-03-12 | 2023-02-24 | アブソリックス インコーポレイテッド | Packaging substrate and semiconductor device including the same |
| JP7254930B2 (en) | 2019-03-12 | 2023-04-10 | アブソリックス インコーポレイテッド | Packaging substrate and semiconductor device including the same |
| WO2020185020A1 (en) * | 2019-03-12 | 2020-09-17 | 에스케이씨 주식회사 | Loading cassette for substrate including glass and substrate loading method to which same is applied |
| KR102515304B1 (en) | 2019-03-29 | 2023-03-29 | 앱솔릭스 인코포레이티드 | Packaging glass substrate for semiconductor, packaging substrate for semiconductor, and semiconductor device |
| WO2021040178A1 (en) | 2019-08-23 | 2021-03-04 | 에스케이씨 주식회사 | Packaging substrate and semiconductor device comprising same |
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| CN1136609C (en) * | 1999-09-06 | 2004-01-28 | 淀川化成株式会社 | Long rib for box and box for plate use |
| CN101654175A (en) * | 2008-08-20 | 2010-02-24 | 奇美电子股份有限公司 | Substrate cartridge structure |
| KR20100041453A (en) * | 2008-10-14 | 2010-04-22 | 주식회사 톱텍 | Glass transporting system |
| CN105353542A (en) * | 2015-10-16 | 2016-02-24 | 苏州尚牙电子有限公司 | Support rod and substrate-receiving box equipped with same |
| TW201713577A (en) * | 2015-10-15 | 2017-04-16 | Chung King Enterprise Co Ltd | Thin substrate cassette capable of preventing scratching of a glass substrate during picking and placing to increase production yield |
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|---|---|---|---|---|
| JPS60121012A (en) * | 1983-12-05 | 1985-06-28 | Kubota Ltd | Manufacture of built-up roll |
| TWI310850B (en) * | 2003-08-01 | 2009-06-11 | Foxsemicon Integrated Tech Inc | Substrate supporting rod and substrate cassette using the same |
| KR101126889B1 (en) * | 2010-05-31 | 2012-03-20 | 에스비리모티브 주식회사 | Battery pack |
| KR101300688B1 (en) | 2011-05-04 | 2013-08-26 | (주)케이엠 | A support bar for substrate-loading cassette and the manufacturing method thereof |
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2018
- 2018-07-05 KR KR1020180078354A patent/KR101944718B1/en active IP Right Grant
- 2018-08-08 CN CN201810897688.6A patent/CN110687700B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1136609C (en) * | 1999-09-06 | 2004-01-28 | 淀川化成株式会社 | Long rib for box and box for plate use |
| CN101654175A (en) * | 2008-08-20 | 2010-02-24 | 奇美电子股份有限公司 | Substrate cartridge structure |
| KR20100041453A (en) * | 2008-10-14 | 2010-04-22 | 주식회사 톱텍 | Glass transporting system |
| TW201713577A (en) * | 2015-10-15 | 2017-04-16 | Chung King Enterprise Co Ltd | Thin substrate cassette capable of preventing scratching of a glass substrate during picking and placing to increase production yield |
| CN105353542A (en) * | 2015-10-16 | 2016-02-24 | 苏州尚牙电子有限公司 | Support rod and substrate-receiving box equipped with same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110687700A (en) | 2020-01-14 |
| KR101944718B1 (en) | 2019-02-01 |
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