JP5849471B2 - Substrate holding frame and substrate transfer method using the same - Google Patents

Description

  The present invention relates to a substrate holding frame for placing one of the rigid rectangular substrates, and a substrate transfer method for transferring or storing a plurality of the substrate holding frames in a stacked state. The present invention relates to a substrate holding frame suitable for transporting and storing plate-like objects such as plastic, various members for flat display panels, and intermediate products, and a substrate transport method using the same.

In recent years, a thin glass substrate used for a liquid crystal display or the like has been increased in size for the purpose of mass production by a large display or a multi-face manufacturing method. On the other hand, the manufacturing process of the liquid crystal display panel is often divided into a plurality of processes until reaching the final product. Therefore, it is necessary to temporarily store a plurality of substrates in process (including glass substrates and intermediate processed products) and transport them to the next process. In that case, the substrates are compactly stored without cracks, scratches or contamination. Thus, there is a need for a substrate holding frame that can be transported and a substrate transport method.
Conventionally, in such a case, a method of storing a plurality of substrates in a single box is usually employed (for example, Patent Document 1). However, since a thin substrate with a large area is easily bent, it is adjacent in the box. There was a risk that the substrates to be touched would be damaged. Further, in the above method, there is a problem that the density of storing the substrate is reduced because it is necessary to leave a space for inserting a jig or the like in order to take out the substrate from the box.
In order to solve such a problem, there is provided a method in which a single substrate is bent and stored in a tray or a frame, and a plurality of such trays or frames are stacked. This is provided with a support frame for supporting the lower surface of the peripheral edge of the glass substrate, and the contact material provided on the lower surface of the support frame is held in contact with and held on the upper surface of the peripheral edge of the glass substrate. However, since the contact material is in direct contact with the substrate, there is a problem that distortion occurs in the contact portion due to vibration, and the substrate is likely to be stained, scratched, or cracked.
Further, in Patent Document 3, a rectangular plate and a rigid plate-like object are set in a horizontal direction, and a plurality of sheets are stacked in a state where the plate-like object is placed on the upper side and held. Thus, a tray for transportation or storage used for transportation or storage is provided. In this case, in the inner region of the frame part, the plate-like object end movement restricting member provided on the back of the plate-like object holding part comes into contact with the upper side of the plate-like object end and moves upward of the end part. However, since there is no restriction on the swing in the surface direction of the substrate due to vibration during transportation, the substrate will jump off the plate-like object end movement restricting member, It is thought that there is a problem that cracks occur.

JP-A-2-295150 JP 2006-168749 A JP 2008-155995 A

  The present invention does not use a method in which a presser plate or the like is brought into direct contact with the substrate, and the substrate is bounced, cracked, scratched or soiled even when the substrate is swung in the surface direction during transportation. It is an object of the present invention to provide a substrate holding frame and a substrate transfer method using the same.

In order to achieve such an object, the substrate holding frame of the present invention is a substrate holding frame for mounting one of the rigid rectangular substrates and mounting the substrate. In a state where a plurality of stacked parts are used for transportation or storage, a frame part, a substrate support part protruding around the inside of the frame part, and a substrate holding member attached to the substrate support part The frame portion is composed of a pair of two opposing straight sides and the other two sides whose central portion is curved downward in the vertical direction, and is rectangular in plan view. The cross section in the orthogonal direction is rectangular and has a thickness in the vertical direction, and is formed so that the upper and lower surfaces of the upper and lower vertical frame portions are in surface contact with each other when a plurality of substrate holding frames are stacked. Yes.
The vertical upper surface of the substrate holding member is a region for aligning the endmost portion of the substrate when the substrate is placed, and is in the surface direction of the substrate when the substrate is transported. The substrate end braking region is a region including the swing range of the substrate endmost portion, and the substrate holding member has a thickness smaller than the thickness of the frame portion in a cross section perpendicular to the side of the frame portion. The surface on the lower side in the vertical direction of the substrate holding member has a convex portion disposed along the side of the frame portion at the end closest to the frame portion, and the surface of the substrate holding member An upper surface of the substrate placed on the upper surface in the vertical direction and a lower surface in the vertical direction of the substrate holding member of the substrate holding frame stacked on the upper surface contact each other at a portion corresponding to the substrate edge braking region. The shape is such that the substrate is held with a gap.
Further, when the substrate is placed on the substrate holding frame, the substrate holding member has a length c along the curved side of the substrate and a direction along the curved side of the substrate. When the length of the swing range of the substrate endmost portion when the substrate swings is a, it is disposed on the lower surface of the substrate holding member provided on the linear one side of the frame portion. From the end surface in the frame portion inner side direction of the convex portion to the end surface in the frame portion inner side direction of the convex portion disposed on the lower surface of the substrate holding member provided on the side facing the linear side. The length x along the substrate is x = c + a, and the length y from the convex end surface of the region on the lower surface in the vertical direction of the substrate holding member corresponding to the substrate end braking region is y Is formed so as to exceed at least the swing range a.
That is, the present invention is a substrate holding frame that is held by a substrate holding member that is shaped so as to have a gap without coming into contact with the upper surface of the substrate without contacting the substrate directly with a holding plate or the like, The area where the substrate is placed, that is, the length x from the convex portion to the convex portion of the bottom surface of the two substrate holding members provided on the two opposite sides of the frame is the same as the size of the substrate. Rather than making the size of the substrate larger than the swinging range of the substrate endmost portion, the range of the region having a gap between the lower surface of the substrate holding member and the upper surface of the substrate is set to the endmost portion of the substrate. By exceeding the rocking range, it is possible to prevent distortion at the end of the substrate with respect to vibration during transportation and to jump off the substrate holding member, thereby reducing cracks and scratches on the substrate. Characterized by the substrate holding frame Is shall. Further, in the present invention, the swing range of the endmost portion of the substrate is such that the base material is placed on the substrate holding frame, and the substrate holding frame placed on the substrate is stacked on the pallet. It is characterized in that it is obtained from the displacement in the surface direction of the substrate endmost part measured in an actual transport state or in a state where vibration is applied by a vibration tester.

  Further, in the present invention, there is provided a substrate transport method using the substrate holding frame, wherein a length of a side of the substrate is on a vertical upper surface of the substrate holding member of the substrate holding frame. After aligning the side of c so as to match the curved side of the frame portion of the substrate holding frame and so that the endmost part of the substrate is included in the substrate end braking region, The substrate is placed on the substrate holding frame by bringing the peripheral edge of the substrate into contact with the substrate holding frame, and the substrate holding frame is placed on the pallet. Another substrate holding frame obtained in the same manner is placed on the upper and lower substrate holding frames on the substrate holding substrate holding frame stacked on the pallet. Make sure that the upper and lower surfaces of the body frame are in surface contact with each other and overlap the sides of the frame. In the cross section in the direction in which the substrate holding member is mounted, the upper surface of the substrate placed on the upper surface in the vertical direction of the substrate holding member, and the lower surface in the vertical direction of the substrate holding member of the substrate holding frame to be stacked above are Substrates stacked with a plurality of substrate holding frames stacked by repeating the substrate holding frame stacking step by stacking with a gap so as not to contact at a portion corresponding to the substrate edge braking region. After the holding frame assembly is formed, the substrate holding frame assembly is moved as a unit.

According to the substrate holding frame of the present invention, it comprises a frame portion, a substrate support portion protruding around the inside of the frame portion, and a substrate holding member attached to the substrate support portion. It consists of a pair of two opposing straight sides and the other two sides whose center is curved downward in the vertical direction, and is rectangular in plan view, and the frame is orthogonal to the sides of the frame The cross section in the direction is rectangular and has a thickness in the vertical direction, and the upper and lower surfaces of the upper and lower frame parts in the vertical direction are formed so as to be in surface contact with each other when a plurality of substrate holding frames are stacked. The upper surface in the vertical direction of the substrate holding member is a region for aligning the endmost portion of the substrate when the substrate is placed, and the substrate in the surface direction of the substrate when the substrate is transported A substrate end braking region which is a region including a swing range of the outermost portion, and the frame portion The substrate holding member has a thickness that is smaller than the thickness of the frame portion, and the surface on the lower side in the vertical direction of the substrate holding member is along the side of the frame portion at the end closest to the frame portion. An upper surface of the substrate that is disposed on the upper surface in the vertical direction of the substrate holding member, and a lower surface in the vertical direction of the substrate holding member of the substrate holding frame that is stacked on the upper surface. To the substrate placed on the stacked substrate holding frame by having a shape that holds the substrate with a gap without contacting at a portion corresponding to the substrate edge braking region. In the vertical direction of the substrate, and the oscillation on the substrate end braking region caused by the substrate's uppermost surface being swung at the upper surface of the substrate holding member due to bending of the substrate. Vibration and oscillation are braked and converged at Reducing the departure from the holding member, the effect of preventing the resulting cracks scratches and dirt.
Further, in the substrate holding frame, the length of one side of the substrate placed on the substrate holding frame is c, and the edge of the substrate when the substrate swings in the same direction as the side. When the length of the swinging range is a, the vertical portion is arranged on the lower surface in the vertical direction from the end surface of the convex portion inside the frame portion to the substrate holding member of the side of the frame portion facing the side. The length x along the substrate to the end surface in the frame portion inside direction of the convex portion to be provided is x = c + a, and the vertical direction lower side of the substrate holding member corresponding to the substrate end braking region By forming the length y of the region on the surface from the end surface of the convex portion so as to exceed at least the swinging range a, the substrate endmost portion is in a portion corresponding to the substrate end portion braking region. In addition to contacting the upper and lower surfaces of a predetermined gap, swinging is controlled while also contacting the end surface of the convex portion. It has been an effect of preventing cracks and scratches and dirt of the substrate.

  According to the invention, the substrate holding member has a section corresponding to the substrate end portion braking region in a cross section in a direction perpendicular to the side of the frame portion, toward a side farther from the side closer to the frame portion. Due to the shape having a uniform thickness or a gradually decreasing thickness, the upper surface in the vertical direction of the substrate holding member, and the lower surface in the vertical direction of the substrate holding member of the substrate holding frame stacked above In the region corresponding to the substrate end portion braking region, a uniform gap or a gradually increasing gap is formed from the side close to the frame portion of the substrate holding member to the side far from the frame portion, and the vertical direction to the substrate As a result, not only the vibration but also the oscillation in the surface direction to the substrate converges and is braked, thereby reducing the detachment of the base material from the substrate holding member and preventing the occurrence of cracks, scratches and dirt.

  According to the invention, the substrate holding member has a section corresponding to the substrate end portion braking region in a cross section in a direction perpendicular to the side of the frame portion, toward a side farther from the side closer to the frame portion. A thickness having a uniform thickness or a thickness that gradually decreases, and a thickness that extends beyond a region corresponding to the substrate end braking region to the end of the substrate holding member toward the far side from the frame portion The substrate end braking region between the upper surface in the vertical direction of the substrate holding member and the lower surface in the vertical direction of the substrate holding member of the substrate holding frame that is stacked on the upper side of the substrate holding member. In the region corresponding to the substrate holding member, a uniform gap or a gradually increasing gap is formed from the side close to the frame portion to the side far from the frame portion, and further beyond the region corresponding to the substrate edge braking region. Far from the frame A gap that gradually increases from the frame to the end of the substrate holding member toward the far side is formed so that not only vertical vertical vibration on the substrate but also surface oscillation on the substrate converges. And is effective in preventing cracks, scratches and dirt from being released from the substrate holding member without being detached from the substrate holding member. Further, the region beyond the portion corresponding to the substrate edge braking region is deformed. This has the effect of preventing cracks, scratches and dirt caused by the contact of the substrate with the tip of the substrate holding member.

  Further, according to the present invention, the substrate support portion and the substrate holding member protruding from the two straight sides of the frame portion are inclined downward in the vertical direction along the shape of the curved side of the frame portion. Thus, when the substrate holding frames are stacked, the shape of the substrate becomes a smooth shape along the curved shape from the peripheral edge of the substrate held in the gap between the upper and lower substrate holding members to the central portion of the substrate. Distortion due to bending or the like near the tip of the member can be reduced.

  Further, according to the present invention, the substrate holding frame is formed by attaching a plurality of substrate holding members to the substrate support portion, so that the substrate holding member can be processed by processing the frame portion or the substrate support portion. Therefore, the thickness accuracy of the substrate holding member and the flatness of the surface can be easily realized. In addition, there is an effect that a damaged one can be replaced. Further, by replacing the substrate holding member with a position changed from the frame portion of the convex portion arranged on the lower surface in the vertical direction of the substrate holding member, the opposing frame from the end surface of the convex portion inside the frame portion. Since the length along the substrate up to the end surface of the convex part of the substrate holding member on the side of the part can be changed, the size of the frame part itself can be changed even for substrates with slightly different sizes and swing ranges. There is an effect that can adapt without changing.

  Further, according to the present invention, the substrate holding frame has a fitting portion that protrudes from the frame portion to be inclined downward in the vertical direction around the inner side between the frame portion and the substrate support portion. Even when a plurality of substrate holding frames are stacked, there is an effect that the position is adjusted by fitting according to the inclination even if some positional deviation occurs.

  In addition, according to the present invention, it is possible to smoothly crawl up by a robot arm or the like having a claw portion that hangs on the handgrip portion by having a handgrip portion on at least a pair of opposing two sides of the frame portion. There is an effect that the substrate holding frame can be moved while suppressing the vibration.

  According to the substrate transport method of the present invention, the substrate holding frame is used to place the substrate endmost portion in alignment with the substrate end braking region of the substrate holding member, and the substrate placement Stacked the substrate holding frame on the pallet, and further, the upper surface of the substrate placed on the upper surface of the substrate holding member, and the lower surface of the substrate holding member of the substrate holding frame to be stacked above, A plurality of stacked substrate holding frame assemblies are formed so as to have a gap so as not to contact at a portion corresponding to the substrate edge braking region, and the substrate holding frame assembly is moved as a unit to directly hold the substrate on the substrate. Do not use a method that touches and holds the board, and transport and store the board by reducing the occurrence of board bouncing, cracks, scratches, and dirt even when the board is swung in the surface direction. There is an effect that becomes possible.

It is the top view which shows the frame for board | substrate holding | maintenance, a front view, and a side view. It is sectional drawing which shows an example of the part of the frame for board | substrate holding | maintenance of FIG. It is sectional drawing which shows the positional relationship of the board | substrate edge part braking area | region and related part in a board | substrate holding frame. It is sectional drawing which shows an example of the part of the frame for board | substrate holding | maintenance of FIG. It is sectional drawing which shows the other example of the part of the frame for board | substrate holding | maintenance of FIG. It is sectional drawing which shows the other example of the part of the frame for board | substrate holding | maintenance of FIG. It is sectional drawing which shows the other example of the part of the frame for board | substrate holding | maintenance of FIG. It is explanatory drawing which shows the frame for board | substrate holding which has several board | substrate holding members. It is sectional drawing which shows an example of the frame for board | substrate holding | maintenance which provided the fitting part. It is sectional drawing which shows an example of the frame for board | substrate holding | maintenance which provided the handle part. It is a perspective view which shows a part of flow of the process of a board | substrate conveyance method. It is a perspective view which shows the frame assembly for board | substrate holding | maintenance in the process of a board | substrate conveyance method. It is sectional drawing which shows the part of the board | substrate holding frame in the process of a board | substrate conveyance method.

  An embodiment of the present invention will be described first with respect to a substrate holding frame, and then a substrate transport method using the substrate holding frame based on the drawings. Since there are various modes (1 to 8), the embodiment of the substrate holding frame will be sequentially described below.

A. Substrate holding frame An embodiment of a substrate holding frame will be described with reference to FIGS.

(Aspect 1)
1A and 1B are diagrams showing a substrate holding frame 1, wherein FIG. 1A is a plan view, FIG. 1B is a front view, and FIG. 1C is a side view.
As shown in the plan view of FIG. 1A, the substrate holding frame 1 is a frame having a rectangular outer shape.
Moreover, as shown in FIG. 1B and FIG. 1C, the frame portion 2 has a pair of two opposing straight sides and two other sides having a predetermined shape and a central portion curved downward in the vertical direction. Consists of sides. Here, the area K on the inner peripheral side from the frame 2 is an open space area. The central region K may be an opening or may have a belt-like auxiliary support member straddling two opposing sides of the frame portion.
As shown in FIG. 1A, the substrate holding frame 1 is adjacent to the substrate support portion 3 protruding from the frame portion 2 to the inner peripheral side (the solid line on the inner peripheral side of the frame portion 2 in FIG. 1A). And a substrate holding member 4 attached to the inner peripheral side of the substrate support 3.
Further, in the inner peripheral area of the frame portion 2 of the substrate holding member 4 in FIG. 1A, the substrate end braking region 5 (on the side smaller than the larger square shown by the two-dot chain line in FIG. 1A). And the portion between the smaller square and the larger side).
FIG. 2 is a cross-sectional view taken along lines AA and BB in FIG. In this figure, a frame portion 2, a substrate support portion 3 protruding from the frame portion 2, and a substrate holding member 4 attached to the tip of the substrate support portion 3 are shown. Here, the positional relationship between the substrate support unit 3 and the substrate holding member 4 depends on the method of attaching to the substrate support unit 3 and the substrate holding member 4. The case where it is comprised so that the board | substrate support part 3 may penetrate toward (a part pinched | interposed by the dotted line) toward this is also shown.
Further, as shown in FIG. 2, the lower surface in the vertical direction of the substrate holding member 4 has a shape having a cross section having a uniform thickness on the side far from the side close to the frame 2. Further, the substrate holding member 4 has a convex portion 6 that protrudes downward in the vertical direction at a portion close to the frame portion 2. The convex portion 6 functions as a stopper for preventing the rocking of the endmost portion of the substrate placed when the substrate holding frames are stacked.
Here, in the present specification, the upper side in the vertical direction and the lower side in the vertical direction refer to the upper side in the vertical direction with respect to the horizontal plane, with the plane including two linear sides facing each other of the frame portion of the substrate holding frame being horizontal. Let's say the lower side.

FIG. 3 is a cross-sectional view taken along the line CC in FIG. 1A in a state where the substrate holding frames (the substrate 10 is already placed) are stacked in two stages. The substrate holding member 4 has a shape shown in FIG. 7 as an example. In addition, the central area of the frame is omitted, and the left and right are shown close to each other.
In the aspect 1, as shown in FIG. 3, the substrate holding of the opposite side (right side in the figure) from the end surface in the inner direction of the frame part 2 of the convex part 6 of the substrate holding member 4 (upper left side in the figure). The length x along the substrate to the end surface in the inner direction of the convex portion 6 of the member 4 is c, the length of the curved side of the substrate 10, and the swing range of the endmost portion of the substrate obtained by a predetermined test method. If the length is a, the relational expression is x = c + a.
Further, as shown in FIG. 3, there is a gap t between the upper surface of the substrate 10 placed on the upper surface of the lower substrate holding member 4 and the lower surface of the substrate holding member 4 stacked above.
Although FIG. 3 shows a state at a certain point when the substrate is placed, when the substrate is transported, the substrate has the substrate end direction from the end surface of the convex portion 6 to the length of the swing range a. And has a gap t in that region.
The gap width of the gap t is greater than 0 and less than or equal to 4 times the thickness of the base material, and preferably equal to or more than 3 times the thickness of the substrate so that the vertical and vertical surface directions of the substrate When an impact or vibration is applied to the substrate, the peripheral edge of the substrate is reduced from coming out of the substrate holding member by contacting the surfaces of the upper and lower substrate holding members and braking and converging the vibrations and swings. It has the effect of preventing the substrate from being cracked, scratched or soiled.
Further, in the direction orthogonal to the side of the frame portion 2 of the substrate holding member 4 corresponding to the region where the gap t is uniform from the convex portion 6 on the lower surface of the substrate holding member 4 toward the front end side of the substrate holding member 4. If the length of a region having a uniform thickness in the cross section is y, y exceeds at least the swing range a.
The substrate end braking region 5 is provided on the upper surface of the lower substrate holding member 4 in the two-stage substrate holding frame shown in FIG. 3 and corresponds to the region y on the lower surface of the upper substrate holding member 4. This is a region and therefore exceeds the swing range a.
Further, the substrate holding frame 4 is designed so that the substrate end braking region 5 on the upper surface of the upper substrate holding member 4 is stacked in the same manner as the substrate holding member 4 to be further stacked. It has a similar position.

(Aspect 2)
Next, Embodiment 2 of the present invention will be described with reference to FIG. 4 is a cross-sectional view taken along lines AA and BB in FIG.
In aspect 2, as shown in the partial cross-sectional view of FIG. 4, the shape of the substrate holding member 4 is different from the cross-sectional shape of the substrate holding member of FIG. The thickness is gradually reduced. Thus, except for this point, the substrate holding frame is the same as in Embodiment 1.

(Aspect 3)
Next, Embodiment 3 of the present invention will be described based on FIG. FIG. 5 is a cross-sectional view of a portion along line AA and line BB in FIG.
In aspect 3, as shown in the partial cross-sectional view of FIG. 5, the shape of the substrate holding member 4 is different from the cross-sectional shape of the substrate holding member 4 of FIG. The thickness is uniform in the board edge braking region 5 toward the substrate, and the thickness gradually decreases from the region corresponding to the substrate edge braking region to the end of the substrate holding member 4 toward the side farther from the frame 2. It has been made to. Except for this point, the substrate holding frame is the same as in Embodiment 1.

(Aspect 4)
Next, aspect 4 of the present invention will be described with reference to FIG. FIG. 6 is a cross-sectional view of a portion along line AA and line BB in FIG.
In the aspect 4, as shown in the partial cross-sectional view of FIG. 6, the shape of the substrate holding member 4 is different from the cross-sectional shape of the substrate holding member 4 of FIG. The thickness gradually decreases from the side closer to the far side to the far side, and further, the thickness extends beyond the region corresponding to the substrate end braking region to the end of the substrate holding member 4 toward the far side from the frame portion 2. The thickness gradually changes.
Except for this point, the substrate holding frame is the same as in Embodiment 1.

(Aspect 5)
Next, Embodiment 5 of the present invention will be described with reference to FIG. FIG. 7 is a cross-sectional view of a portion along line AA in FIG.
In aspect 5, the shape of the substrate holding member taken along line AA in FIG. 1A is the same as the cross-sectional shape of substrate holding member 4 in FIG. 6 in aspect 4 as shown in the partial cross-sectional view in FIG. However, the substrate support portion 3 protrudes from the frame portion 2 inwardly and along the shape of the curved side of the frame portion 2 so as to incline downward in the vertical direction, and the substrate holding member 4 is mounted on the extension. It is different in point.
Except for this point, the substrate holding frame is the same as in Embodiment 4.
By tilting the substrate holding member in this way, when the substrate holding frames 1 are stacked, the peripheral edge of the substrate is held along the shape of the gap between the upper and lower substrate holding members 4. The central portion of the substrate has a shape along the curved shape, and depending on the curvature rate of the substrate, a sharp bend may occur between the peripheral portion of the substrate and the central portion, and this distortion can be reduced. it can.

(Aspect 6)
Next, Embodiment 6 of the present invention will be described with reference to FIG.
Aspect 6 is a substrate holding frame body in which a plurality of substrate holding members 4 are dispersed and attached to the substrate support portion 3. Except for this point, the substrate holding frame body is the same as in Embodiments 1 to 5.
FIG. 8A is a plan view showing the substrate holding frame 1 in which a plurality of substrate holding members 4 are attached to the substrate supporting portion 3, and the substrate supporting portion 3 is partially interposed between the substrate holding members 4. Exposed.
FIG. 8B is an enlarged perspective view showing a portion of the substrate holding frame 1 where the substrate holding member 4 is attached to the substrate support portion 3 protruding from the frame portion 2. As shown in FIG. 8B, the substrate holding member 4 is processed so that its cross section appears in a U shape, and has a structure fitted into the substrate support portion 3. The upper surface of the substrate holding member 4 and the lower surface of the substrate holding member 4 are shaped to have a smooth surface.

(Aspect 7)
Next, the aspect 7 of this invention is demonstrated based on Fig.9 (a) and (b).
The aspect 7 is the board | substrate holding frame 1 which has the fitting part 7, and is the same board | substrate holding frame as the aspects 1-6 except this point.
FIG. 9A is a cross-sectional view showing the portion of the substrate holding frame having the fitting portion 7 and the state of the fitting. The substrate holding member 4 has a shape shown in FIG. 7 as an example.
As shown in FIG. 9A, each fitting portion 7 of the three-stage substrate holding frame (the two-stage substrate holding frames in the lower part of the figure are stacked) Between the board support part 3, it is formed to project from the frame part 2 so as to be inclined downward in the vertical direction on the inner side surrounded by the frame part 2, and on the vertical upper side surface and the vertical lower side of the fitting part 7. The surface has a similar surface shape. Then, as shown in the lower part of FIG. 9A, the stacked two-stage substrate holding frames are fitted in the fitting portions 7 on the surfaces of the upper and lower substrate holding frames 1.
FIG. 9B is a cross-sectional view showing the substrate holding frame 1 having the fitting portion 7 having a shape different from that in FIG. The substrate holding member 4 has a shape shown in FIG. 7 as an example.
As shown in FIG. 9B, the fitting portion 7 projects in two vertically and vertically from the frame portion 2, and the upper fitting portion 7 extends vertically downward from the frame portion 2. It is formed so as to project in an inclined manner, and has a substrate support part 3 on its extension. The lower fitting part 7 projects from the lower side in the vertical direction of the frame part 2 and can be fitted with the upper fitting part 7. It has a shape.
Although not illustrated, in FIG. 9B, the lower fitting portion 7 protruding from the lower side in the vertical direction has the substrate support portion 3 on its extension, and the upper fitting portion 7 is a frame. It is also possible to project from the upper side in the vertical direction of the portion 2 and to have a shape that can be fitted to the lower fitting portion 7.
Thus, the fitting portion 7 is formed so as to protrude from the frame portion 2 to the inner peripheral side, so that it does not receive the load of the substrate holding frame body 1 and the substrate 10 directly, so deformation due to the load is less likely to occur. Further, since the fitting portion 7 is formed so as to be inclined and protrude downward in the vertical direction, even when a slight positional deviation occurs when stacking the substrate holding frames 1, the fitting portion 7 is fitted and adjusted in accordance with the inclination. Have

(Aspect 8)
Next, the aspect 8 of this invention is demonstrated based on FIG. FIG. 9 is a cross-sectional view showing a portion of the substrate holding frame having the handle portion 8 used in the present invention. The substrate holding member 4 has a shape shown in FIG. 7 as an example.
Aspect 8 is the substrate holding frame 1 having the handle portion 8, and is the same substrate holding frame as in aspects 1 to 7 except for this point.
The handle portion 8 is formed so as to protrude at least around the outer side of the opposing two-side frame portion 2, and may be formed along the entire length of the side portion or may be formed separately at important points. Good.

B. Substrate Transport Method Next, an embodiment of a substrate transport method using the substrate holding frame will be described with reference to FIGS.

First, as shown in FIG. 11A, the side of the substrate 10 having a length c is curved at the upper side in the vertical direction of the substrate holding frame 1 in the frame portion 2 of the substrate holding frame. Alignment is performed so that the edge of the substrate 10 is included in the substrate edge braking region 5 provided on the upper surface of the substrate holding member 4 so as to match the side. Here, the lower surface of the substrate holding member that is stacked on the substrate end braking region on the upper surface of the substrate holding member so as to quickly shift to a stable state after the substrate is placed on the substrate holding frame. It is preferable that the substrate endmost portion is aligned somewhere in the range from the position corresponding to the convex end surface to the length of the swinging range. In addition, it is preferable to align the endmost part of the substrate with the center of swinging of the swinging range in order to quickly shift to a stable state after the substrate is placed on the substrate holding frame.
Then, at least one of the substrate 10 and the substrate holding frame 1 is moved in the vertical direction so that both can be brought close to each other. In FIG. 11A, an arrow is described so that the substrate 10 can approach the substrate holding frame 1, but conversely, even if the substrate holding frame 1 approaches the substrate 10. Good.
Here, the substrate edge braking region 5 is indicated by a single two-dot chain line in FIG. Actually, it has a width, and will be described with reference to FIG. 1. On the side smaller than the larger square shown by the two-dot chain line in the front view of the substrate holding frame 1 in FIG. This corresponds to the portion between the smaller square and the larger side.
Then, the peripheral portion of the substrate 10 is brought into contact with the upper surface of the substrate holding member 4, and the substrate 10 is placed on the substrate holding frame 1.
Next, as shown in FIG. 11B, the substrate holding frame body 1 on which the substrate 10 obtained in the above process is placed is stacked on the pallet 20.
Next, as shown in FIG. 11 (c), another substrate 10 obtained in the same manner is placed on the substrate holding frame 1 on which the substrates 10 stacked on the pallet 20 are placed. The finished substrate holding frame 1 is brought into surface contact so that the upper and lower surfaces of the frame portions of the upper and lower substrate holding frames overlap each other. At this time, in the cross section in the direction orthogonal to the side of the frame portion 2, the upper surface of the substrate 10 placed on the upper surface in the vertical direction of the substrate holding member 4 and the substrate holding frame body 1 stacked above. The substrate holding frames 1 are stacked such that there is a gap between the substrate holding member 4 and the lower surface in the vertical direction without contacting the portion corresponding to the substrate edge braking region 5.
As described above, in the step of stacking the substrate holding frame 1 on which the substrate is placed on the pallet 20 or the substrate holding frame 1 on which the substrate is placed, the substrate holding frame on which the substrate 10 has been placed. It is possible to use means for gripping and moving the body 1 with a robot arm, aligning it directly above the pallet 20 or the substrate holding frame body 1 on which the substrate is placed, and moving it downward and stacking it.
Next, as shown in FIG. 12, the substrate holding frame assembly 100 is formed by repeating the process of stacking the substrate holding frame 1 on which the substrate 10 is placed a plurality of times.
Next, the substrate holding frame assembly 100 is moved to the next step as a unit. Depending on the purpose, the substrate holding frame assembly 100 is packed, stored and transported.
Furthermore, the process demonstrated above is demonstrated based on FIG.
FIG. 13A is a cross-sectional view in a direction orthogonal to the side of the frame portion 2. The substrate holding member 4 has a shape shown in FIG. 7 as an example.
As shown in FIG. 13 (a), a substrate support member 3 protruding from the frame portion 2 and a substrate holding member 4 are formed on the extension thereof, and a substrate end braking region 5 is provided above the substrate holding member 4. Have. Above the substrate holding member 4, the substrate 10 is aligned so that the end e of the substrate 10 is included in the substrate end braking region 5 of the substrate holding member 4.
As described above, in the process of placing the substrate 10 on the substrate holding frame 1, the substrate 10 is horizontally moved by the conveyor and stopped at the point where the substrate 10 is transferred to the substrate holding frame 1. For holding the substrate, a plurality of pins projecting vertically from the gap between the pins hold the substrate 10 by controlling the height of each pin to a height corresponding to the curved state of the substrate holding frame, and stand by just below the substrate delivery point. A means for gripping the frame body 1 with a robot arm and moving it upward in the vertical direction to pick up the substrate 10 can be used.
FIG. 13B shows a state in which the substrate holding frame body 1 on which the substrate is placed is stacked in two stages, and further, the substrate holding frame body 1 on which the substrate is placed is aligned to be stacked. It is sectional drawing of the direction orthogonal to the edge | side of the frame part 2 which shows these. The substrate holding member 4 has a shape shown in FIG. 7 as an example.
As shown in FIG. 13 (b), the substrate holding frame 1 on which the substrate 10 has been placed is X-1, X-2, X-3 as a combination thereof, and is already on X-1. In this situation, X-2 is stacked, and X-3 is aligned above X-2. At this time, the method of stacking X-3 on X-2 is as follows: between the substrate 10 placed on the upper surface of the substrate holding member 4 of X-2 and the lower surface of the substrate holding member 4 of X-2. In the region corresponding to the predetermined substrate edge portion braking region 5, the substrate is stacked while holding the peripheral edge of the substrate so that the substrate does not contact the back surface of the substrate holding member 4. In addition, since the gap is inevitably generated in the planned thickness of the substrate, if the overlapping position of the frame body 1 is not shifted, no special attention is required for the formation of the gap.

  Hereinafter, materials and manufacturing methods of each part of the substrate holding frame of the present invention will be described.

1. Substrate-holding frame (a) Frame portion The frame portion of the substrate-holding frame body used in the present invention forms a skeleton structure of the substrate-holding frame body, and the frame portion is on the side of the frame portion. The cross-sectional shape in the orthogonal direction is a rectangular shape, which becomes an overlapping part when stacking a plurality of substrate holding frames, and the upper surface and the lower surface of the frame portion of the substrate holding frame vertically above and below each other It is formed so as to be stacked in surface contact. Therefore, the frame portion has a function of giving strength and accuracy to the substrate holding frame itself.
In addition, the frame portion can include a substrate holding member protruding to the inner periphery thereof, a substrate holding member and a fitting portion extending beyond the substrate supporting portion, and a handle portion protruding outward.
Even if the central region surrounded by the substrate holding member provided on the inner peripheral side from the frame portion is an open space, there is nothing, and the substrate is supported across the two opposite sides of the frame portion. You may have auxiliary support members, such as a strip | belt shape for supporting to.
Here, in the case where the auxiliary support member is provided in the central region inside the frame portion, when the substrate is placed and receives an impact or vibration from the outside, the auxiliary support member applies the impact or vibration. Absorbing can reduce the jumping and swinging of the substrate. On the other hand, since the auxiliary support member is in direct contact with the upper surface of the central portion of the substrate, cracks, scratches and dirt are likely to occur due to impact and vibration.
Also, if the central area inside the frame is a space area and there is nothing, the central part of the board does not have anything in direct contact with the top surface of the board, so cracks or scratches are applied when impact or vibration is applied. And the occurrence of dirt can be suppressed. Further, since the structure of the frame portion is simple, there is an advantage that it is easy to manufacture. On the other hand, when the size of the substrate becomes so large that vibration and swing due to bending cannot be controlled when an impact or vibration is applied, cracks, scratches, and dirt are likely to occur.
Further, the shape of the frame portion is such that a pair of two opposing sides is linear and the remaining two sides are curved. As the shape of the curved frame member, an arc shape, a parabolic shape, or a predetermined curvature rate can be adopted.
In addition, as a method of creating a frame portion, a method is used in which a frame member is produced by a molding method or the like using the above-mentioned materials on each of the four sides, and the frame member is connected at four corners to form a rectangular frame portion. Can be used. In this case, the connection of the four corners is a method in which the ends of the frame members are fitted into the connection member such as a resin from two directions and indirectly connected, or a method in which the frame members are directly joined to each other at the four corners by welding or the like. You can do it.
In addition, such a frame portion needs to be formed of a material having structural strength, and is made of a material such as metal, plastic, or the like having a high strength and light weight. Preferably, for example, aluminum, duralumin, reinforced plastic, etc. Can be mentioned. Furthermore, it is preferable that the structure of the frame portion is hollow for weight reduction.

(B) Substrate Support Unit The substrate support unit in the substrate holding frame used in the present invention protrudes around the inside of the frame unit, and places and supports the peripheral edge of the substrate via the substrate holding member. .
As a material for the substrate support portion, a metal such as aluminum or duralumin, reinforced plastic, or the like, which is the same material as the frame portion, is used.
As a method for creating the substrate support portion, a molding method or the like can be used. Preferably, it is preferable to form the frame portion in a hollow shape and simultaneously perform extrusion molding.

(C) Substrate holding member The substrate holding member used in the present invention is attached to the substrate support, and directly places the peripheral edge of the substrate, and stacks the substrate holding frames obtained in the same manner. The lower surface (referred to as the lower surface) in the vertical direction of the upper substrate holding frame has a gap sandwiched between the upper surface (referred to as the upper surface) in the vertical direction of the substrate holding member of the lower substrate holding frame. To form.
The shape of the substrate holding member is such that a predetermined region has a certain thickness from the side close to the frame portion to the inside in the cross section in the thickness direction orthogonal to the side of the frame portion, or from the side close to the frame portion. A predetermined region having a certain thickness toward the far side and further decreasing in thickness toward the center side is suitable for holding without contact with the substrate.
Further, the substrate holding member may be attached to or detached from the substrate support portion, or may be dispersed to a plurality of substrate holding members and attached to the substrate support portion. Depending on the size of the substrate holding frame, a substrate holding member having a width of 5 to 10 cm in a direction perpendicular to the frame portion and a length of 10 to 25 cm in a direction along the frame portion is provided on one side of the frame portion. About 20 can be attached.
Various methods can be used for attaching the substrate holding member to the substrate support portion. For example, the cross-sectional shape of the substrate holding member is processed into a U-shape and the substrate supporting portion is fitted, or the upper surface portion and the lower surface portion of the substrate holding member are divided into two parts. A method of fitting and fixing the upper surface portion of the substrate holding member from the upper side of the substrate support portion and the lower surface portion of the substrate holding member from the lower side of the substrate support portion to the provided through hole can be adopted.
And by enabling the attachment of the substrate holding member to the substrate support portion in this way,
Since the processing of the substrate holding member can be performed separately from the processing of the frame portion and the substrate support portion, it is possible to easily realize the accuracy of the thickness of the substrate holding member and the flatness of the surface. Damaged ones can also be replaced. In addition, by changing the position of the convex portion disposed on the lower surface in the vertical direction of the substrate holding member from the end surface of the convex portion on the inner side of the frame portion, the side facing the side is changed. Since the length along the substrate up to the end surface in the frame portion inner side of the convex portion disposed on the lower surface in the vertical direction on the substrate holding member on the side of the frame portion can be changed, the size of the frame structure can be reduced. It can be applied to substrates with different sizes and swing ranges without changing.
In addition, as the material of the substrate holding member, aluminum or duralumin which is the same material as the frame portion, a form in which a cushion material is provided on the surface of the substrate support portion from the surface of vibration suppression, In particular, it is preferably made of a thermoplastic resin. Among thermoplastic resins, vinyl chloride resin, polyethylene, polystyrene, ABS resin, acrylic resin, polypropylene, polycarbonate, polyamide, polyacetal, polybutylene terephthalate, modified polyphenylene ether, and polyether ether ketone are particularly desirable. In addition, as long as it has the same function, the material of the substrate holding member is not limited to these.

1) Upper surface of substrate holding member The upper surface of the substrate holding member used in the present invention is a substrate holding frame placed on a horizontal plane that includes two opposing straight sides of the frame, In the substrate holding frame transport method in which a plurality of the substrate holding frames are stacked, the substrate holding frame is positioned on the upper surface in the vertical direction.
And the upper surface of a board | substrate holding member places the board | substrate by making the peripheral part of a board | substrate contact the surface. Further, on the upper surface of the substrate holding member, in order to place the substrate, the substrate holding member has a region that defines a predetermined range as a substrate edge braking region inward from the frame portion.
Further, the upper surface of the substrate holding member has a flat portion, and the surface thereof is preferably mirror-finished. If the surface of the substrate holding member is rough, the peripheral edge of the substrate is placed on the surface of the substrate holding member, and the edge of the substrate jumps up and down due to vibration applied when transported and stored. By doing so, the material of the substrate holding member is transferred, causing the substrate surface to be contaminated. In addition, the unevenness on the surface of the substrate holding member may cause cracks or scratches on the substrate.

2) Lower surface of substrate holding member The lower surface of the substrate holding member in the present invention is a substrate holding frame body in which a substrate is placed and stored in a horizontal direction on a substrate holding frame body, and a plurality of the substrate holding frame bodies are stacked. In the carrying method, the substrate holding member is located on the lower surface in the vertical direction.
The lower surface of the substrate holding member forms a gap sandwiched between the lower surface of the substrate holding frame and the upper surface of the substrate holding member when the substrates are stacked on the same type of substrate holding frame. Therefore, the substrate holding member has a predetermined uniform thickness from the side closer to the frame portion to the side farther from the side closer to the frame portion, or a thickness that gradually decreases within a predetermined range in the cross section in the thickness direction orthogonal to the side of the frame portion. If so, the gap between the lower substrate holding frame and the upper surface of the substrate holding member is a predetermined uniform gap from the side closer to the frame part to the side farther, or gradually within a predetermined range. A gap that becomes larger is formed.
In addition, a predetermined gap is provided so that the upper surface of the substrate placed on the upper surface of the substrate holding member and the lower surface of the substrate holding member of the substrate holding frame stacked above do not contact at a portion corresponding to the substrate edge braking region. And holding the peripheral portion of the substrate without contact.
Here, when the substrate holding frames are stacked, the gap between the upper and lower substrate holding members is sandwiched between the lower surface of the upper substrate holding frame and the upper surface of the substrate holding member of the lower substrate holding frame. If the gap of the region corresponding to the substrate end braking region is greater than the thickness of the substrate to be placed and not more than 5 times the thickness of the substrate, the back surface of the upper substrate holding frame on the substrate is Without being in contact with each other, the substrate can be held with reduced jumping and detachment due to vibration. More preferably, it is good to set it as 2 to 3 times the thickness of a base material. That is, the gap between the upper surface of the substrate placed on the upper surface in the vertical direction of the substrate holding member and the lower surface of the substrate holding member of the substrate holding frame that is stacked above exceeds 0, and the thickness of the base material It is 4 times or less, and preferably is equal to or greater than the thickness of the substrate and is 3 times or less.
Further, the lower surface of the substrate holding member has a convex portion at the endmost portion near the frame portion. The convex portions are arranged in parallel to the sides of the frame portion, and may be continuous or discontinuous.
The convex part functions as a stopper that stops when the substrate end moves to the maximum due to vibration during substrate transport, and the upper and lower substrates are stacked when the substrate holding frames are stacked. The range between the holding members and surrounded by the end surface of the convex portion inside the frame portion is larger than the size of the substrate, and is the range that can be moved to the maximum when the substrate end portion is moved to vibration.
Therefore, by changing the position of the convex part from the frame part, the length between the convex part end face on the lower surface of the substrate holding member and the convex part end face on the opposite frame part side is changed, so that the size of the substrate is changed. And the change in the swing range of the substrate.

3) Substrate Edge Braking Area The substrate edge braking area in the present invention is located on the upper surface of the substrate holding member and places the peripheral edge of the substrate, and the substrate holding member of the substrate holding frame that is stacked thereon. This is a region where there is a gap between the lower surface of the substrate and the upper surface of the substrate, and the vibration and oscillation of the substrate are damped.
Specifically, if the size of the substrate, the shape of the substrate holding frame and the substrate holding member, and the swing range of the substrate are determined, it can be obtained as follows.
The relationship between the substrate, the substrate holding frame, and the substrate holding member is provided on the opposite side from the end surface of the convex portion of the bottom surface of the substrate holding member provided on one side of the frame portion in the frame portion inner direction. The length x along the substrate to the convex end surface of the lower surface of the substrate holding member is c, the length of the curved side of the substrate along the direction from the opposing convex end surface to the convex end surface, c, When the swing range of the substrate end is a, the following relational expression is obtained.
x = c + a
Further, there is a gap between the upper surface of the substrate placed on the upper surface of the substrate holding member and the lower surface of the substrate holding member stacked on the substrate holding member, and the substrate holding member from the convex portion on the lower surface of the substrate holding member When the length of a region having a uniform thickness or a gradually decreasing thickness in a cross section in a direction orthogonal to the side of the frame portion of the substrate holding member corresponding to the region having a gap toward the tip end of the substrate is y, Is at least exceeding the swing range a.
From the above conditions, the substrate edge braking region is a region corresponding to the region y on the lower surface of the substrate holding member that is provided on the upper surface of the substrate holding member and stacked thereon.
Therefore, the end closest to the frame portion of the base end braking region corresponds to the end of the convex portion of the bottom surface of the substrate holding member stacked on the inside of the frame portion, and the length from the position exceeds the swing range a. It will be a thing.
When the substrate holding member is inclined downward in the vertical direction from the frame portion, the position of the extreme end of the substrate end braking region on the frame side differs depending on the inclination angle.
In addition, the substrate edge braking region on the upper surface of the substrate holding member has a similar position because the substrate holding frame is designed so that the substrate holding member to be further stacked is necessarily stacked similarly. Thus, it is possible to align the substrate.
Here, the rocking range of the substrate end varies depending on the substrate, the substrate holding frame, and the substrate transport conditions. First, prepare the substrate holding frame shape and substrate holding member shape corresponding to the size of the substrate, and then place the substrate in a curved shape on the substrate holding frame. The substrate holding frame (including the substrate) is stacked on a pallet (including the vibration preventing pallet) with a practical number of stages (for example, 100) to form a substrate holding frame assembly. In this state, the substrate holding frame is subjected to a vibration test (transport test using a track or the like) according to an actual transport state and an appropriate vibration condition (for example, ASTM track level 3) on a vibration test machine vibration table. In a state where vibration is applied to the body assembly, the displacement in the surface direction of the substrate is measured, and the swing range of the substrate endmost portion on the upper surface of the substrate holding member is obtained. The maximum width of the displacement is the swing range except for a particularly large displacement. Also, it is preferable to determine the swing range by measuring the displacement under a plurality of conditions close to the actual transport conditions, and the substrate will be bounced, cracked or scratched even when the substrate is swung in the surface direction during transport. It is possible to more stably reduce the occurrence of contamination.

(D) Fitting part The fitting part of the board | substrate holding frame used for this invention can be provided in frame part itself, the outer side of a frame part, or the inner side of a frame part.
Of these, in the case of projecting inwardly surrounded by the frame portion of the frame portion, the fitting portion is formed to project inward from the frame portion, so that it directly receives the load on the substrate holding frame and the substrate. Since there is no deformation due to the load, the fitting portion is formed so as to protrude downward in the vertical direction, so that even if there is a slight misalignment when stacking the substrate holding frames, it follows the inclination. And has a function of fitting and adjusting the position. Furthermore, there is an advantage that the substantially sealed inside of the frame portion is maintained in a state where the substrate holding frames are stacked, and the accumulation of dust and the like is reduced.
In addition, the fitting portion projects inward along the surface on the upper side in the vertical direction of the frame portion with a certain thickness and is bent and extended downward in the vertical direction, and along the surface on the lower side in the vertical direction of the frame portion. It is possible to fit when stacking the upper and lower substrate holding frames by forming them so that they can be fitted to the surface of the shape that protrudes inward with a certain thickness, bent downward in the vertical direction and extended. .
Here, a fitting part (having a substrate support part on the extension) projecting inward with a certain thickness along the vertical upper surface of the frame part, and a vertical lower surface of the frame part It can be provided so as to have two fitting portions and a fitting portion having a shape to be fitted with an upper fitting portion protruding inward with a certain thickness. In this case, if the structure that protrudes inward with a certain thickness along the upper surface in the vertical direction of the frame and bends and extends downward in the vertical direction is part of the substrate support, Since the portion is covered with the substrate support portion, there are advantages such as reduction of accumulation of dust and the like in the bent portion.
The fitting part protruding from the lower side in the vertical direction has a substrate support part on its extension, and the lower fitting part protrudes from the upper side in the vertical direction of the frame part, and can be fitted to the upper fitting part. It is also possible.

(E) Handle part The handle part of the board | substrate holding frame used for this invention can be provided in the outer side of a frame part, or frame part itself. In the case of the outside of the frame portion, it is formed to extend with a certain thickness on the outside of at least two opposing sides of the frame portion. The handle portion is a portion to be gripped by a robot arm or the like, and need not be provided along the entire length of the side, and may have a length corresponding to the grip portion.
In addition, it is preferable that the surface on the upper side in the vertical direction of the handle portion is in the same plane as the surface of the substrate support portion protruding to the inside of the frame portion, and there is an advantage of reducing dust accumulation due to the absence of the uneven portion. .

(Example)
The following glass substrates were used.
・ Board size: 1500mm x 1800mm
・ Thickness of substrate: 0.7 mm
Next, the following substrate holding frame was prepared.
・ Shape of substrate holding frame:
The short side of the frame part was curved in a circular arc shape with the lowest point at the center (the length of the curved part up to the lowest point in the vertical direction was 100 mm), and the long side was linear. In the plan view, it is a quadrangle, and the central region surrounded by the substrate holding member provided on the inner peripheral side from the frame portion is assumed to be an opening and nothing.
The board holding frame was provided with a fitting portion (see Aspect 7, FIG. 9B) and a handle portion (see Aspect 8, FIG. 10).
・ Oscillation range measurement:
Using the above substrate and substrate holding frame, the swing range was determined from the displacement in the surface direction of the substrate end measured by a vibration test (transport test using a track etc.) according to the actual transport state. . Oscillation range at the end of the substrate: a is a = 10mm (± 5mm from the oscillation center)
Here, the shape of the substrate holding member has a uniform thickness of 30 mm from the convex end surface of the lower surface of the substrate holding member to the side far from the frame, and further the end of the substrate holding member toward the side far from the frame. A shape in which the thickness is gradually reduced from the end face of the convex part to 50 mm. As for the substrate holding members provided on the two straight sides of the frame portion, those which are inclined downward in the vertical direction along the shape of the curved side of the frame portion 2 (see aspects 6, 6 and 7) are used. did.
-Shape of substrate holding member:
The thickness is uniform from the end surface of the convex portion on the lower surface of the substrate holding member to 11 mm farther from the frame portion, and the thickness gradually increases from the frame portion to the end portion of the substrate holding member (50 mm from the end surface of the convex portion). Thinning shape. The substrate holding members provided on the two straight sides of the frame portion were inclined vertically downward along the shape of the curved side of the frame portion 2 at an angle of 15 degrees from the horizontal plane. (Refer to Aspect 6, FIG. 6, and FIG. 7)
From the above items, the substrate holding frame was formed so as to have the following relationship.
-Relationship between the substrate holding frame and the substrate (see FIG. 3):
The length x from the end surface in the frame portion inside direction of the convex portion on the lower surface of the substrate holding member on one side of the frame portion to the end surface in the frame portion inner direction of the convex portion on the lower surface of the substrate holding member is x = c + a = 1500 + 10 = 1510 mm.
The gap between the upper and lower parts of the two substrate holding members is a uniform gap of 1.4 mm up to 11 mm from the side corresponding to the substrate edge braking region to the side far from the frame, and further to the substrate edge The gap increases from the portion corresponding to the portion braking region to the end of the substrate holding member toward the far side from the frame portion.
・ The board edge braking area is the length from the position corresponding to the convex end face of the lower surface of the substrate holding member to be stacked on the upper surface of the substrate holding member (position of 1 mm from the frame side on this substrate holding member). Was 11 mm, and included the rocking range of 10 mm at the end of the substrate, that is, the rocking range exceeded 10 mm.
Then, using the substrate holding frame, the substrate transfer method was executed according to the following process (see FIGS. 11 and 12).
First, it swings from a position corresponding to the convex end face of the lower surface of the substrate holding member to be stacked thereon (position of 1 mm from the frame side on the substrate holding member) in the substrate edge braking region on the upper surface of the substrate holding member. The shortest side of the short side of the substrate was aligned so that it was within the range of the range, and the peripheral edge of the substrate was placed on the substrate holding member. Here, on the upper surface of the substrate holding member, the substrate is placed at a position 5 mm in length from a position corresponding to the convex end surface of the lower surface of the substrate holding member to be stacked (position of 1 mm from the frame side in this substrate holding member). The outermost edge portion was aligned and the peripheral edge portion of the substrate was placed on the substrate holding member.
Next, the substrate holding frames obtained above are stacked on a pallet, and the substrate holding frames obtained in the same manner are stacked on the pallet to obtain a 100-stage substrate holding frame. A body mass was obtained.
As a result of observing the substrate holding state by applying vibration to the substrate holding frame assembly with a vibration tester that reproduces the actual substrate transport conditions, the substrate is detached from the substrate holding part due to splashing or vibration. There were no breaks or scratches on the substrate.

(Comparative example)
In the above-described embodiment, the conditions are all the same except that the swing range is 20 mm (± 10 mm from the swing center).
As a result, since the substrate end braking region does not include the swing range, even if the substrate end is aligned with the substrate end braking region and the substrate is placed on the upper surface of the substrate holding member, the vibration test is performed. It was confirmed that the substrate was separated from the region of the gap width: 1.4 mm surrounded by the substrate holding members by splashing or vibration, and the substrate was cracked or scratched.

  The present invention relates to a substrate holding frame for mounting one of rigid rectangular substrates, and a substrate transfer method for transferring or storing a plurality of the substrate holding frames stacked, in particular, glass or It can be used for transporting and storing plate-like objects such as plastic, flat display panel members and intermediate products.

DESCRIPTION OF SYMBOLS 1 Substrate holding frame 2 Frame portion 3 Substrate support portion 4 Substrate holding member 5 Substrate edge braking region 6 Protruding portion 7 Fitting portion 8 Handle portion 10 Substrate 20 Pallet 100 Substrate holding frame assembly

Claims (8)

A substrate holding frame for mounting one of the rigid rectangular substrates, and a substrate holding frame used for transportation or storage in a state where a plurality of the substrates are stacked and stacked. There,
A frame part, a substrate support part projecting around the inside of the frame part, and a substrate holding member attached to the substrate support part,
The frame part is composed of a pair of two opposing straight sides and the other two sides whose central part is curved downward in the vertical direction, and is rectangular in plan view.
The frame portion has a rectangular cross section in a direction perpendicular to the side of the frame portion and has a thickness in the vertical direction, and when the plurality of substrate holding frame bodies are stacked, It is formed so that the lower surfaces are in surface contact with each other,
The upper surface in the vertical direction of the substrate holding member is a region for aligning the endmost portion of the substrate when the substrate is placed, and the substrate in the surface direction of the substrate when the substrate is transported The substrate end braking region, which is a region including the swing range of the outermost portion, and the substrate holding member has a thickness smaller than the thickness of the frame portion in a cross section perpendicular to the side of the frame portion. Have
The surface on the lower side in the vertical direction of the substrate holding member has a convex part disposed along the side of the frame part at the endmost part near the frame part,
The upper surface of the substrate placed on the upper surface in the vertical direction of the substrate holding member and the lower surface in the vertical direction of the substrate holding member of the substrate holding frame stacked on the upper side in the substrate end braking region. It is a shape that holds the substrate with a gap without contacting at the corresponding part,
When the substrate is placed on the substrate holding frame, the length of the curved side of the substrate is c, and the substrate is swung in the direction along the curved side of the substrate. If the length of the swing range of the substrate end is a,
Provided on the side facing the linear side from the end surface in the frame part inside direction of the convex part disposed on the lower surface of the substrate holding member provided on the linear side of the frame part The length x along the substrate to the end surface in the frame portion inner side direction of the convex portion disposed on the lower surface of the substrate holding member is x = c + a, and the length corresponding to the substrate end braking region is A substrate holding frame, wherein a length y of the region on the lower surface in the vertical direction of the substrate holding member from the end surface of the convex portion exceeds at least the swinging range.   2. The substrate holding frame according to claim 1, wherein a portion of the substrate holding member that corresponds to the substrate end braking region in a cross-section in a direction orthogonal to the side of the frame portion is closer to the frame portion. A frame for holding a substrate, characterized in that it has a uniform thickness toward the far side or a thickness gradually decreasing.   2. The substrate holding frame according to claim 1, wherein a portion of the substrate holding member that corresponds to the substrate end braking region in a cross-section in a direction orthogonal to the side of the frame portion is closer to the frame portion. The substrate holding member has a uniform thickness toward the far side or a shape that gradually decreases in thickness, and beyond the region corresponding to the substrate end braking region toward the far side from the frame portion A substrate holding frame, characterized in that the thickness gradually decreases to the end of the substrate.   The substrate holding frame according to any one of claims 1 to 3, wherein a substrate support portion and a substrate holding member projecting from two straight sides of the frame portion are curved in the frame portion. A frame for holding a substrate, wherein the frame is inclined downward along the shape of the side in the vertical direction.   5. The substrate holding frame according to claim 1, wherein a plurality of substrate holding members are attached to the substrate support portion. .   6. The substrate holding frame according to claim 1, wherein the substrate holding frame projects between the frame portion and the substrate support portion so as to incline downward in the vertical direction around the inside from the frame portion. A substrate holding frame having a fitting portion.   The substrate holding frame according to any one of claims 1 to 6, wherein the frame holding portion has a handle portion on at least a pair of two opposing sides of the frame portion. Frame body. A substrate carrying method using the substrate holding frame according to any one of claims 1 to 7,
On the upper surface of the substrate holding member in the vertical direction of the substrate holding frame, the side having the side c of the substrate is aligned with the curved side of the frame portion of the substrate holding frame. And after aligning the endmost part of the substrate so as to be included in the substrate edge braking region,
Bringing the substrate into contact with the peripheral edge of the substrate and placing the substrate on the substrate holding frame to form a substrate holding frame holding substrate;
Stacking the substrate holding frame on which the substrate has been placed on a pallet;
On the substrate mounting frame holding body stacked on the pallet, another substrate mounting substrate holding frame obtained in the same manner is attached to the frame portion of the upper and lower substrate holding frame bodies. In the cross section in a direction perpendicular to the side of the frame portion, the upper surface and the lower surface are placed in contact with each other and overlap with each other, and above the upper surface of the substrate placed on the upper surface in the vertical direction of the substrate holding member. Stacking the substrate holding frame to be stacked so that there is a gap so that the surface on the lower side in the vertical direction of the substrate holding member does not contact the portion corresponding to the substrate end braking region;
After the substrate holding frame body stacking step, by repeating the substrate holding frame body stacking step, a substrate holding frame body stack in which a plurality of substrate holding frame bodies are stacked,
A substrate transfer method, wherein the substrate holding frame assembly is moved as a unit.

Images