CN112230454B - Method and device for preventing substrate from being scratched - Google Patents
Method and device for preventing substrate from being scratched Download PDFInfo
- Publication number
- CN112230454B CN112230454B CN202010999103.9A CN202010999103A CN112230454B CN 112230454 B CN112230454 B CN 112230454B CN 202010999103 A CN202010999103 A CN 202010999103A CN 112230454 B CN112230454 B CN 112230454B
- Authority
- CN
- China
- Prior art keywords
- substrate
- moving unit
- preset height
- placing table
- table top
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a method and a device for avoiding scratching a substrate, which comprises the following steps: driving the moving unit at the side edge of the substrate to rise to a first preset height from the placing table top, so as to drive the side edge of the substrate to rise to the first preset height from the placing table top; then the moving unit at the inner side of the substrate is driven to lift from the placing table surface, so that the inner side of the substrate is driven to lift from the placing table surface. According to the invention, the outer side of the substrate is lifted firstly, and then the inner side of the substrate is lifted, so that the substrate can be slowly separated from the placing table from the edge to the center, and the vibration caused when the substrate is separated from the placing table at the same time is avoided, thereby avoiding the situation that the substrate is scratched due to the vibration and the friction of the table, and further improving the product quality of the substrate.
Description
Technical Field
The invention relates to the field of substrate control methods and devices, in particular to a method and a device for avoiding substrate scratching.
Background
In the drying process of the liquid crystal panel etching machine, after the glass substrate passes through each process of the etching chamber, the glass substrate is thinned and has visible scratch abnormality, as shown in fig. 1. The microcosmic scratch direction is parallel to the long side, and the poor density is high. The scratching direction of the large substrate is parallel to the short side and is 540 mm-590 mm away from the two sides. The liquid crystal substrate is easily processed.
Disclosure of Invention
Therefore, it is desirable to provide a method and an apparatus for preventing substrate from being scratched, so as to solve the problem of substrate scratching.
In order to achieve the above object, the present invention provides a method for preventing a substrate from being scratched, which is used for a controller of a mobile unit, comprising the steps of:
driving the moving unit at the side edge of the substrate to rise to a first preset height from the placing table top, so as to drive the side edge of the substrate to rise to the first preset height from the placing table top;
then the moving unit at the inner side of the substrate is driven to lift from the placing table surface, so that the inner side of the substrate is driven to lift from the placing table surface.
Further, the side edges are two opposite sides of the substrate, one of the two sides is provided with a plurality of moving units, and the moving unit on one side comprises a first moving unit located outside and a second moving unit located in the middle, so that the step of driving the moving unit on the side edge of the substrate to rise to a first preset height from the placing table surface so as to drive the side edge of the substrate to rise to the first preset height from the placing table surface comprises the following steps:
driving the first moving unit to ascend to a first preset height from the placing table top, so as to drive the four corners of the substrate to ascend to the first preset height from the placing table top;
then drive first mobile unit and second mobile unit simultaneously and rise, second mobile unit rises to the second from placing the mesa and predetermines the height to drive the middle lifting of base plate side and predetermine the height to the second, first mobile unit rises to first predetermine the height and predetermine the height with the second, thereby drives the base plate four corners and lifts to first predetermine the height and predetermine the height with the second.
Furthermore, the inner moving units are arranged to form a straight line and are parallel to one side of the substrate and are arranged at the right middle position.
Further, the method also comprises the following steps:
the inner side moving unit and the side moving unit are driven to the same height.
Further, the method also comprises the following steps:
driving the moving units on the inner side and the outer side of the substrate to a third preset height so that the substrate is arranged at the third preset height;
driving the moving unit at the inner side of the substrate to descend firstly so that the inner side of the substrate is placed on the placing table top;
then the moving unit on the outer side of the substrate is driven to descend so that the outer side of the substrate is placed on the placing table.
Further, the method also comprises the following steps:
the side edges are two opposite sides of the substrate, one of the two sides is respectively provided with a plurality of moving units, the moving unit at one side comprises a first moving unit positioned at the outer edge and a second moving unit positioned at the middle, and then the step of driving the moving unit at the outer side of the substrate to descend so that the outer side of the substrate is placed on the placing table top comprises the following steps:
driving the first moving unit to move to a third preset height and driving the second moving unit to move to a fourth preset height, wherein the fourth preset height is smaller than the third preset height;
and then the first moving unit and the second moving unit are driven to descend simultaneously, so that the second moving unit firstly arrives at the placing table top, and the first moving unit then descends to the placing table top.
Further, the moving unit is a suction cup on the upper surface of the substrate or a thimble on the lower surface of the substrate.
The invention provides a device for avoiding substrate scratching, which comprises a placing table top, a moving unit and a controller, wherein the placing table top is used for placing a substrate, the controller is connected with the moving unit, and the controller is used for executing the method of any one embodiment of the invention.
Be different from prior art, above-mentioned technical scheme is through lifting the outside of base plate earlier, then lifts the inboard of base plate for the base plate can be followed the edge and slowly break away from the table surface of placing to the center, brings the vibration when avoiding the base plate to break away from simultaneously and place the table surface, thereby avoids the vibration of base plate and the condition that the mesa friction formed the scratch, thereby has promoted the product quality of base plate.
Drawings
FIG. 1 is a schematic diagram of a photo of a substrate scratch according to the background art;
FIG. 2 is a schematic diagram of the distribution of the moving units relative to the substrate according to one embodiment;
FIG. 3 is a schematic diagram showing the improvement of the present invention;
FIG. 4 is a photograph showing the improved substrate of the present invention without scratches.
Description of reference numerals:
1. a substrate; 2. and placing the table top.
Detailed Description
To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.
Referring to fig. 1 to 4, the present embodiment provides a method for preventing a substrate from being scratched, so as to solve the problem of substrate scratching. In the implementation process of the invention, after the inventor researches the scratching phenomenon of the substrate, the inventor finds that in the dry etching process of the substrate, the substrate is scratched because of friction between the surface of the electrode and the back surface of the substrate caused by slight shaking phenomenon at the jacking moment of the ejector pin in the process of jacking the substrate to separate from the bottom electrode plate after the substrate process is finished. In order to avoid the transmission of the jitter phenomenon, after a plurality of experiments and researches, the inventor adopts a mode of controlling the thimble of the panel to move to solve the problem. Specifically, a method for preventing a substrate from being scratched is developed for a controller of a mobile unit, comprising the steps of: driving the moving unit at the side edge of the substrate to rise to a first preset height from the placing table top, so as to drive the side edge of the substrate to rise to the first preset height from the placing table top; then the moving unit at the inner side of the substrate is driven to lift from the placing table surface, so that the inner side of the substrate is driven to lift from the placing table surface.
The moving unit is used to drive the substrate 1 to move, such as a suction cup on the upper surface of the substrate or an ejector pin on the lower surface of the substrate. The embodiment of the invention takes a thimble as an illustration. The thimble can be arranged in the placing table-board 2 and then can lift up and jack up the substrate 1, and the substrate 1 can be square. The location of the mobile unit may be as shown in fig. 2 a, B, C. Where a and B are at the sides of the substrate 1 and C is at the inner side of the substrate. After the manufacture is finished, the substrate 1 is placed on a placing table surface 2 (namely an electrode of a dry etching machine), and a moving unit, namely an ejector pin, is placed in the table surface. Then, when the substrate is to be lifted, the outer thimble is first lifted slowly, for example, by 10mm (the parameters of the present invention are merely used as examples). At the moment, two sides of the substrate can be lifted firstly, only the middle of the substrate is contacted with the table top (the contact area can be determined according to multiple experiments of different substrates), and then the moving unit in the middle of the substrate is lifted. Therefore, the situation that the substrates between the moving units are subjected to multiple bending to generate shaking and scratching when the substrates are lifted together can be avoided. As shown in fig. 4, the substrate moved by the method of the present invention has no scratch.
When the substrate is relatively large, the substrate needs to be lifted in different areas, so that the conditions of shaking and scratching are avoided. As shown in fig. 2 and 3, the side edges are two opposite sides of the substrate, and one of the two sides is respectively provided with a plurality of moving units, where the moving unit on one side includes a first moving unit a located at an outer edge (i.e. at two ends of the side edge) and a second moving unit B located at a middle (middle of the side edge), and then the step "driving the moving unit on the side edge of the substrate to rise to a first preset height from the placing table top, so as to drive the side edge of the substrate to rise to the first preset height from the placing table top" includes the following steps: driving the first moving unit to ascend to a first preset height (for example, 10mm) from the placing table top (as shown in the modified figure 3), so as to drive the four corners of the substrate to ascend to the first preset height from the placing table top; then drive first mobile unit and second mobile unit simultaneously and rise, second mobile unit rises to second preset height (21mm) from placing the mesa to drive the middle lifting of base plate side to second preset height, first mobile unit rises to first preset height and second preset height (21mm +10mm is 31mm), thereby drives base plate four corners lifting to first preset height and second preset height. Thus, when the substrate is lifted, the substrate is sequentially separated from the placing table from the edge to the inside to form a concave shape until only the middle part of the substrate is contacted with the placing table, and finally the middle part is lifted by the inner side moving unit C. Therefore, shaking and scratching can be avoided.
Preferably, the inner moving units are arranged to form a straight line and parallel to one side of the substrate, and are positioned at the middle position. When the outer side of the substrate rises, only the middle part of the substrate is contacted with the placing table. The intermediate position can be lifted by the moving means C, and the substrate can be lifted.
Finally, in order to facilitate the movement of the substrate, the substrate formed in the concave shape is reformed into a flat shape. The inner moving unit and the side moving unit are driven to the same height so that the substrate is formed in a planar shape.
The above embodiments include a substrate lift process. Further, the method also comprises the following steps of: driving the moving units (e.g., a and B positions) inside (e.g., C position) and outside the substrate to a third preset height (e.g., 10mm) such that the substrate is disposed at the third preset height; driving the moving unit at the inner side of the substrate to descend firstly so that the inner side of the substrate is placed on the placing table top; then the moving unit on the outer side of the substrate is driven to descend so that the outer side of the substrate is placed on the placing table. Therefore, the contact position of the substrate and the placing table surface extends from the middle of the substrate to the two sides, and shaking and scratching are avoided.
For larger substrates, the substrate may be lowered in regions. The invention further comprises the following steps: the side edges are two opposite sides of the substrate, one of the two sides is respectively provided with a plurality of moving units, the moving unit at one side comprises a first moving unit positioned at the outer edge and a second moving unit positioned at the middle, and then the step of driving the moving unit at the outer side of the substrate to descend so that the outer side of the substrate is placed on the placing table top comprises the following steps: driving the first moving unit to move to a third preset height (31mm) and driving the second moving unit to move to a fourth preset height (31mm-10mm), wherein the fourth preset height is smaller than the third preset height; and then the first moving unit and the second moving unit are driven to descend simultaneously, so that the second moving unit firstly arrives at the placing table top, and the first moving unit then descends to the placing table top. Therefore, the descending of the large-area substrate can be realized by descending in different areas, certainly, for larger substrate area, more moving units and batch descending or ascending of the moving units from inside to outside can be adopted, and the shaking and scratching of the substrate can be avoided.
When there are A, B, C three positions of the mobile unit, the controller may include both the up and down control modes when moving. The manner of control can be simplified as shown in the following table. Of course, in all embodiments of the present invention, the moving speed of the mobile units may be relatively slow, and the moving speed of each mobile unit should be consistent.
The invention provides a device for avoiding substrate scratching, which comprises a placing table top, a moving unit and a controller, wherein the placing table top is used for placing a substrate, the controller is connected with the moving unit, and the controller is used for executing the method of any one embodiment of the invention. Such a device can be made as a moving device for dry etching, thereby achieving a scratch-free movement of the substrate.
It should be noted that, although the above embodiments have been described herein, the invention is not limited thereto. Therefore, based on the innovative concepts of the present invention, the technical solutions of the present invention can be directly or indirectly applied to other related technical fields by making changes and modifications to the embodiments described herein, or by using equivalent structures or equivalent processes performed in the content of the present specification and the attached drawings, which are included in the scope of the present invention.
Claims (4)
1. A method for preventing scratching of a substrate for a controller of a mobile unit, comprising the steps of:
driving the moving unit at the side edge of the substrate to rise to a first preset height from the placing table top, so as to drive the side edge of the substrate to rise to the first preset height from the placing table top;
then the moving unit at the inner side of the substrate is driven to lift from the placing table surface, so that the inner side of the substrate is driven to lift from the placing table surface;
the inboard mobile unit is arranged and is formed the straight line and be on a parallel with one side of base plate, and places the positive intermediate position in, the side is the relative both sides of base plate, one side in both sides respectively is provided with a plurality of mobile units, the mobile unit of one side includes the first mobile unit that is in the outside and is in the second mobile unit in the centre, then step "the mobile unit of drive base plate side rises to first preset height from placing the mesa to drive the base plate side and rise to first preset height from placing the mesa" includes the following step:
driving the first moving unit to ascend to a first preset height from the placing table top, so as to drive the four corners of the substrate to ascend to the first preset height from the placing table top;
then, the first moving unit and the second moving unit are driven to ascend simultaneously, the second moving unit ascends to a second preset height from the placing table board so as to drive the middle of the side edge of the substrate to ascend to the second preset height, and the first moving unit ascends to the first preset height plus the second preset height so as to drive the four corners of the substrate to ascend to the first preset height plus the second preset height;
further comprising the step of descending: driving the moving units on the inner side and the outer side of the substrate to a third preset height so that the substrate is arranged at the third preset height;
driving the moving unit at the inner side of the substrate to descend firstly so that the inner side of the substrate is placed on the placing table top;
then the moving unit on the outer side of the substrate is driven to descend so that the outer side of the substrate is placed on the placing table top; the step of driving the moving unit at the outer side of the substrate to descend so that the outer side of the substrate is placed on the placing table includes the steps of:
driving the first moving unit to move to a third preset height and driving the second moving unit to move to a fourth preset height, wherein the fourth preset height is smaller than the third preset height;
and then the first moving unit and the second moving unit are driven to descend simultaneously, so that the second moving unit descends to the placing table top firstly, and the first moving unit descends to the placing table top later.
2. The method of claim 1, wherein the substrate is scratched, and the method further comprises: further comprising the steps of:
the inner side moving unit and the side moving unit are driven to the same height.
3. The method of claim 1, wherein the substrate is scratched: the moving unit is a sucker on the upper surface of the substrate or an ejector pin on the lower surface of the substrate.
4. An apparatus for preventing scratching of a substrate, comprising a placing table for placing the substrate, a moving unit, and a controller connected to the moving unit for performing the method of any one of claims 1 to 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010999103.9A CN112230454B (en) | 2020-09-22 | 2020-09-22 | Method and device for preventing substrate from being scratched |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010999103.9A CN112230454B (en) | 2020-09-22 | 2020-09-22 | Method and device for preventing substrate from being scratched |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112230454A CN112230454A (en) | 2021-01-15 |
| CN112230454B true CN112230454B (en) | 2022-08-09 |
Family
ID=74108860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010999103.9A Active CN112230454B (en) | 2020-09-22 | 2020-09-22 | Method and device for preventing substrate from being scratched |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112230454B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008047414A (en) * | 2006-08-15 | 2008-02-28 | Sony Corp | Method and device of electricity removal of insulating base plate |
| WO2010011088A2 (en) * | 2008-07-24 | 2010-01-28 | (주)미래컴퍼니 | Apparatus and method for manufacturing solar cell panel |
| CN103693438A (en) * | 2013-12-18 | 2014-04-02 | 京东方科技集团股份有限公司 | Supporting device for substrate and substrate conveying method thereof |
| TW201713577A (en) * | 2015-10-15 | 2017-04-16 | Chung King Enterprise Co Ltd | Thin substrate cassette capable of preventing scratching of a glass substrate during picking and placing to increase production yield |
| CN208223765U (en) * | 2018-05-04 | 2018-12-11 | 成都嘉晨科技有限公司 | Vibration tong |
| CN111422823A (en) * | 2020-04-30 | 2020-07-17 | 苏州华兴源创科技股份有限公司 | Substrate stripping device and method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7210896B2 (en) * | 2018-04-23 | 2023-01-24 | 東京エレクトロン株式会社 | SUBSTRATE PLACEMENT DEVICE AND SUBSTRATE PLACEMENT METHOD |
-
2020
- 2020-09-22 CN CN202010999103.9A patent/CN112230454B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008047414A (en) * | 2006-08-15 | 2008-02-28 | Sony Corp | Method and device of electricity removal of insulating base plate |
| WO2010011088A2 (en) * | 2008-07-24 | 2010-01-28 | (주)미래컴퍼니 | Apparatus and method for manufacturing solar cell panel |
| CN103693438A (en) * | 2013-12-18 | 2014-04-02 | 京东方科技集团股份有限公司 | Supporting device for substrate and substrate conveying method thereof |
| TW201713577A (en) * | 2015-10-15 | 2017-04-16 | Chung King Enterprise Co Ltd | Thin substrate cassette capable of preventing scratching of a glass substrate during picking and placing to increase production yield |
| CN208223765U (en) * | 2018-05-04 | 2018-12-11 | 成都嘉晨科技有限公司 | Vibration tong |
| CN111422823A (en) * | 2020-04-30 | 2020-07-17 | 苏州华兴源创科技股份有限公司 | Substrate stripping device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112230454A (en) | 2021-01-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4270434B2 (en) | Substrate transfer device, substrate removal method, and substrate storage method | |
| US10319614B2 (en) | Wafer leveling device | |
| KR20130090829A (en) | Substrate processing apparatus and substrate processing method | |
| CN108315721B (en) | Film forming machine and method for adjusting deflection of substrate in film forming process | |
| US8593613B2 (en) | LCD exposure stage device and exposure system | |
| JP2003128279A (en) | Plate member taking-out hand and plate member taking- out method | |
| CN112230454B (en) | Method and device for preventing substrate from being scratched | |
| CN106654065A (en) | Stripping device used for substrate of flexible screen and manufacturing method of flexible screen | |
| CN216006008U (en) | Vacuum coating chamber and vacuum coating equipment | |
| JP2009147042A (en) | Substrate receiving method and substrate stage device | |
| KR20090029583A (en) | Apparatus for preventing subside of substrate and method thereof | |
| KR101688842B1 (en) | Substrate processing apparatus | |
| CN111267280B (en) | Automatic overturning device and method for I-shaped stringer core mold | |
| CN113832445A (en) | Vacuum coating chamber, vacuum coating equipment and workpiece conveying method thereof | |
| KR101135355B1 (en) | Substrate lifting apparatus | |
| KR101362458B1 (en) | Lift pin module and apparatus for manufacturing of FPD including the same | |
| KR100832802B1 (en) | Substrate processing apparatus and method for driving lift pin of the same | |
| KR101259424B1 (en) | Method and apparatus of laminating sheets | |
| TW202143366A (en) | Inclination platform, substrate transfer device, and substrate transfer method with which the surface of the substrate in transfer will not be damaged due to residual chemical liquid for protecting the quality of the transferred substrate | |
| CN218447864U (en) | Transfer mechanism of silicon chip | |
| KR100980024B1 (en) | Panel supporting apparatus | |
| CN217459255U (en) | Thinning device | |
| KR20070119379A (en) | Lift assembly for flat panel display device | |
| CN218101219U (en) | Jacking platform and support plate taking system | |
| CN220148576U (en) | Mechanism for rapid inserting sheet of glass |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |