TW201712927A - A method of making a multilayer structure - Google Patents

A method of making a multilayer structure

Info

Publication number
TW201712927A
TW201712927A TW105107545A TW105107545A TW201712927A TW 201712927 A TW201712927 A TW 201712927A TW 105107545 A TW105107545 A TW 105107545A TW 105107545 A TW105107545 A TW 105107545A TW 201712927 A TW201712927 A TW 201712927A
Authority
TW
Taiwan
Prior art keywords
multilayer structure
substrate
composite
providing
making
Prior art date
Application number
TW105107545A
Other languages
English (en)
Other versions
TWI618283B (zh
Inventor
Deyan Wang
xiu-yan Wang
Shaoguang Feng
Qiao-Wei Li
qing-qing Pang
Iii Peter Trefonas
Zhijian Lu
Hongyu Chen
Original Assignee
Rohm & Haas Elect Mat
Dow Global Technologies Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm & Haas Elect Mat, Dow Global Technologies Llc filed Critical Rohm & Haas Elect Mat
Publication of TW201712927A publication Critical patent/TW201712927A/zh
Application granted granted Critical
Publication of TWI618283B publication Critical patent/TWI618283B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22—Electrodes
    • H01G11/30—Electrodes characterised by their material
    • H01G11/32—Carbon-based
    • H01G11/36—Nanostructures, e.g. nanofibres, nanotubes or fullerenes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/20—Graphite
    • C01B32/205—Preparation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
    • B05D1/005—Spin coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • B05D3/0254—After-treatment
    • B05D3/0272—After-treatment with ovens
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/20—Graphite
    • C01B32/21—After-treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22—Electrodes
    • H01G11/30—Electrodes characterised by their material
    • H01G11/32—Carbon-based
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22—Electrodes
    • H01G11/30—Electrodes characterised by their material
    • H01G11/32—Carbon-based
    • H01G11/34—Carbon-based characterised by carbonisation or activation of carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22—Electrodes
    • H01G11/30—Electrodes characterised by their material
    • H01G11/46—Metal oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/84—Processes for the manufacture of hybrid or EDL capacitors, or components thereof
    • H01G11/86—Processes for the manufacture of hybrid or EDL capacitors, or components thereof specially adapted for electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/005—Electrodes
    • H01G4/008—Selection of materials
    • H01G4/0085—Fried electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/362—Composites
    • H01M4/366—Composites as layered products
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/58—Selection of substances as active materials, active masses, active liquids of inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy; of polyanionic structures, e.g. phosphates, silicates or borates
    • H01M4/583—Carbonaceous material, e.g. graphite-intercalation compounds or CFx
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/13—Energy storage using capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Geology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nanotechnology (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Paints Or Removers (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Electric Double-Layer Capacitors Or The Like (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Ceramic Products (AREA)
TW105107545A 2015-09-29 2016-03-11 製造多層結構之方法 TWI618283B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
??PCT/CN2015/091039 2015-09-29
PCT/CN2015/091039 WO2017054120A1 (en) 2015-09-29 2015-09-29 Method of making multilayer structure

Publications (2)

Publication Number Publication Date
TW201712927A true TW201712927A (en) 2017-04-01
TWI618283B TWI618283B (zh) 2018-03-11

Family

ID=58422579

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105107545A TWI618283B (zh) 2015-09-29 2016-03-11 製造多層結構之方法

Country Status (6)

Country Link
US (1) US20180286598A1 (zh)
JP (1) JP2018538231A (zh)
KR (1) KR102082145B1 (zh)
CN (1) CN107949893B (zh)
TW (1) TWI618283B (zh)
WO (1) WO2017054120A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180282165A1 (en) * 2017-03-28 2018-10-04 Rohm And Haas Electronic Materials Llc Method of forming a multilayer structure
CN110232989A (zh) * 2019-05-30 2019-09-13 王奉瑾 一种石墨烯导电结构体的制备方法
CN114050123A (zh) * 2021-10-29 2022-02-15 上海新昇半导体科技有限公司 一种soi晶圆及其最终处理方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4951837B2 (ja) * 2001-09-28 2012-06-13 住友化学株式会社 オレフィン重合用固体触媒成分、オレフィン重合用触媒およびオレフィン重合体の製造方法
CN101522809B (zh) * 2006-10-13 2011-10-26 日东纺绩株式会社 含金属醇盐缩合产物、有机硅烷化合物和硼化合物的聚合物组合物
DE102007041820A1 (de) * 2007-09-03 2009-03-05 Universität Bielefeld Graphitschichten
US8257867B2 (en) * 2008-07-28 2012-09-04 Battelle Memorial Institute Nanocomposite of graphene and metal oxide materials
US9017867B2 (en) * 2009-08-10 2015-04-28 Battelle Memorial Institute Self assembled multi-layer nanocomposite of graphene and metal oxide materials
US9359675B2 (en) * 2010-04-22 2016-06-07 Basf Se Producing two-dimensional sandwich nanomaterials based on graphene
CN102254582B (zh) * 2010-05-18 2013-05-15 国家纳米科学中心 一种石墨烯基导电材料及其制备方法
CN101857221A (zh) * 2010-05-21 2010-10-13 哈尔滨工业大学 高效率制备石墨烯复合物或氧化石墨烯复合物的方法
US9761380B2 (en) * 2010-07-29 2017-09-12 Nokia Technologies Oy Apparatus and associated methods
JP2012087010A (ja) * 2010-10-20 2012-05-10 Kri Inc グラフェン薄膜の製造法及び透明導電材料
US8795774B2 (en) * 2012-09-23 2014-08-05 Rohm And Haas Electronic Materials Llc Hardmask
KR101515991B1 (ko) * 2012-11-21 2015-04-30 삼화콘덴서공업주식회사 티탄계 산화물 복합체 제조방법
US9136123B2 (en) * 2013-01-19 2015-09-15 Rohm And Haas Electronic Materials Llc Hardmask surface treatment
US9296879B2 (en) * 2013-09-03 2016-03-29 Rohm And Haas Electronic Materials Llc Hardmask
CN103647064B (zh) * 2013-12-19 2016-08-31 北京师范大学 一种石墨烯包覆介孔碳基金属氧化物及其制备方法和用途
JP2018535170A (ja) * 2015-09-29 2018-11-29 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ 黒鉛状炭素シートを作製する方法

Also Published As

Publication number Publication date
CN107949893A (zh) 2018-04-20
US20180286598A1 (en) 2018-10-04
CN107949893B (zh) 2019-11-15
KR20180044989A (ko) 2018-05-03
KR102082145B1 (ko) 2020-02-27
JP2018538231A (ja) 2018-12-27
TWI618283B (zh) 2018-03-11
WO2017054120A1 (en) 2017-04-06

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees