TW201704490A - Copper alloy material and method for producing same - Google Patents

Copper alloy material and method for producing same Download PDF

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TW201704490A
TW201704490A TW105112094A TW105112094A TW201704490A TW 201704490 A TW201704490 A TW 201704490A TW 105112094 A TW105112094 A TW 105112094A TW 105112094 A TW105112094 A TW 105112094A TW 201704490 A TW201704490 A TW 201704490A
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mass
copper alloy
alloy material
compound particles
ratio
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TWI695075B (en
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Yoshito Fujii
Takemi Isomatsu
Masaru Higuchi
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Furukawa Electric Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21BROLLING OF METAL
    • B21B3/00Rolling materials of special alloys so far as the composition of the alloy requires or permits special rolling methods or sequences ; Rolling of aluminium, copper, zinc or other non-ferrous metals
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/02Alloys based on copper with tin as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/04Alloys based on copper with zinc as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/05Alloys based on copper with manganese as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/06Alloys based on copper with nickel or cobalt as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/08Alloys based on copper with lead as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C9/00Alloys based on copper
    • C22C9/10Alloys based on copper with silicon as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/002Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working by rapid cooling or quenching; cooling agents used therefor
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/08Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of copper or alloys based thereon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B21MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21BROLLING OF METAL
    • B21B3/00Rolling materials of special alloys so far as the composition of the alloy requires or permits special rolling methods or sequences ; Rolling of aluminium, copper, zinc or other non-ferrous metals
    • B21B2003/005Copper or its alloys
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working

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  • Mechanical Engineering (AREA)
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  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
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  • Crystallography & Structural Chemistry (AREA)
  • Conductive Materials (AREA)

Abstract

The present invention provides: a copper alloy material which exhibits good heat resistance in addition to high strength, high electrical conductivity and good bending workability; and a method for producing same. This copper alloy material is characterized by having an alloy composition that contains 0.05-1.2 mass % of Ni, 0.01-0.15 mass % of P and 0.05-2.5 mass % of Sn, with the remainder comprising Cu and unavoidable impurities, and is characterized in that when a surface of the material is observed using an FE-SEM after electrolytic polishing, the number of compound particles having particle diameters of 5-30 nm is 20 particles/[mu]m2 or more and the number of compound particles having particle diameters of greater than 30 nm is 1 particle/[mu]m2 or less in a field of view having an area measuring 1[mu]m x 1[mu]m.

Description

銅合金材料及其製造方法 Copper alloy material and method of manufacturing same

本發明係關於銅合金材料及其製造方法,特別是關於可用於半導體裝置的導線架為首的電氣電子元件的銅合金材料及其製造方法。 The present invention relates to a copper alloy material and a method of manufacturing the same, and more particularly to a copper alloy material for an electric and electronic component such as a lead frame usable for a semiconductor device, and a method of manufacturing the same.

使用於IC或LSI等的半導體裝置的導線架,係藉由將銅合金材料壓製加工所形成,此時,會在材料中殘留加工形變。當該加工形變殘留時,則在進行後端步驟的蝕刻時,會發生材料的彎曲,而降低導線架的導線間隔的尺寸精度。因此,通常會對壓製加工後的導線架施以400~450℃的熱處理,去除加工形變,但已知銅合金的結晶組織會在該熱處理時再結晶化,而有降低銅合金材料的強度的趨勢。因此,使用於導線架的電子機器用銅合金材料,需要具備即使進行上述熱處理,強度亦不會下降的特性(耐熱性)。 The lead frame used in a semiconductor device such as an IC or an LSI is formed by press working a copper alloy material, and at this time, processing distortion remains in the material. When the processing deformation remains, the bending of the material occurs when the etching of the back end step is performed, and the dimensional accuracy of the wire spacing of the lead frame is lowered. Therefore, the wire frame after press working is usually subjected to a heat treatment at 400 to 450 ° C to remove the processing deformation. However, it is known that the crystal structure of the copper alloy is recrystallized during the heat treatment, and the strength of the copper alloy material is lowered. trend. Therefore, the copper alloy material for an electronic device used for the lead frame needs to have a property (heat resistance) that does not deteriorate in strength even when the heat treatment is performed.

此外,對導線架銅合金材料,賦予為了使其適用於小型化的元件的高強度,及用於抑制元件發熱的高導電率,亦要求兼具提高元件成型的自由度的良好的彎曲加工性。 In addition, the lead frame copper alloy material is required to have high strength for use in miniaturization of components, and high electrical conductivity for suppressing heat generation of the element, and also requires good bending workability for improving the degree of freedom in element molding. .

滿足如此要求的銅合金材料,有Cu-Ni-Sn-P系合金被廣泛的提供。Cu-Ni-Sn-P系合金,係藉由使Ni-P系的化合物析出,而能兼具高強度、高導電率及良好的彎曲加工性。 Cu-Ni-Sn-P alloys are widely available for satisfying such requirements. The Cu-Ni-Sn-P alloy can have high strength, high electrical conductivity, and good bending workability by precipitating a Ni-P-based compound.

在專利文獻1~9,探討藉由控制析出物的尺寸及分佈,加上抗拉強度、導電率、彎曲加工性,兼具彈性、耐應力緩和特性、壓製加工性、耐腐蝕性、鍍敷性、焊錫沾濕性、耐遷移性、熱間加工性等的各式各樣的特性。 Patent Literatures 1 to 9 discuss the combination of the size and distribution of precipitates, tensile strength, electrical conductivity, and bending workability, as well as elasticity, stress relaxation resistance, press workability, corrosion resistance, and plating. Various properties such as properties, solder wettability, migration resistance, and hot workability.

[先行技術文獻] [Advanced technical literature]

[專利文獻] [Patent Literature]

專利文獻1:日本特開平4-154942號公報 Patent Document 1: Japanese Patent Laid-Open No. 4-145942

專利文獻2:日本特開平4-236736號公報 Patent Document 2: Japanese Laid-Open Patent Publication No. Hei-4-236736

專利文獻3:日本特開平10-226835號公報 Patent Document 3: Japanese Laid-Open Patent Publication No. Hei 10-226835

專利文獻4:日本特開2000-129377號公報 Patent Document 4: Japanese Laid-Open Patent Publication No. 2000-129377

專利文獻5:日本特開2000-256814號公報 Patent Document 5: Japanese Laid-Open Patent Publication No. 2000-256814

專利文獻6:日本特開2001~262255號公報 Patent Document 6: JP-A-2001-262255

專利文獻7:日本特開2001~262297號公報 Patent Document 7: JP-A-2001-262297

專利文獻8:日本特開2006-291356號公報 Patent Document 8: Japanese Laid-Open Patent Publication No. 2006-291356

專利文獻9:日本特開2007-100111號公報 Patent Document 9: JP-A-2007-100111

Cu-Ni-Sn-P系合金,雖係兼具高強度、高導電率及良好的彎曲加工性的優良的合金系統,但對於壓製加工後的導線架所進行的400~450℃的熱處理的耐熱性,無法說很充分。 The Cu-Ni-Sn-P alloy is an excellent alloy system with high strength, high electrical conductivity and good bending workability, but is heat treated at 400 to 450 ° C for the lead frame after press working. Heat resistance cannot be said to be sufficient.

在專利文獻1~9,均嘗試各式各樣的材料特性的改良,但並沒法著眼於耐熱性的提升者。 In Patent Documents 1 to 9, attempts have been made to improve various material properties, but there is no way to focus on the improvement of heat resistance.

有鑑於上述情形,本發明的目標係在於提供除了 高強度、高導電率及良好的彎曲加工性,更兼具良好的耐熱性的銅合金材料及其製造方法。 In view of the above circumstances, the object of the present invention is to provide A copper alloy material having high strength, high electrical conductivity, good bending workability, and good heat resistance, and a method for producing the same.

本發明者們,對用於以導線架為首的電氣電子元件之Cu-Ni-Sn-P系合金進行研究,發現具有:含有Ni為0.05~1.2質量%、P為0.01~0.15質量%及Sn為0.05~2.5質量%的合金組成,將電解研磨之後的材料表面以FE-SEM觀察,在1μm×1μm的視野面積中,粒徑為5~30nm的化合物粒子的個數比例為20個/μm2以上,粒徑超過30nm的化合物粒子的個數比例為1個/μm2以下,不僅可得具備高強度、高導電率及良好的彎曲加工性,亦可兼具更良好的耐熱性的銅合金材料,而完成本發明。 The inventors of the present invention have studied Cu-Ni-Sn-P alloys for electric and electronic components including lead frames, and have found that Ni contains 0.05 to 1.2% by mass, P is 0.01 to 0.15% by mass, and Sn The composition of the alloy is 0.05 to 2.5% by mass, and the surface of the material after electrolytic polishing is observed by FE-SEM. In the field of view of 1 μm × 1 μm, the ratio of the number of compound particles having a particle diameter of 5 to 30 nm is 20 / μm. In the case of 2 or more, the ratio of the number of the compound particles having a particle diameter of more than 30 nm is 1 piece/μm 2 or less, and copper having high strength, high electrical conductivity, and good bending workability, and having better heat resistance can be obtained. The alloy material is completed to complete the present invention.

即,本發明的要點構成,係如下所示。 That is, the main points of the present invention are as follows.

(1)一種銅合金材料,其特徵在於:具有:含有Ni為0.05~1.2質量%、P為0.01~0.15質量%及Sn為0.05~2.5質量%,剩餘部分係由Cu及不可避免的雜質組成的合金組成,將電解研磨之後的材料表面以FE-SEM觀察,在1μm×1μm的視野面積中,粒徑為5~30nm的化合物粒子的個數比例為20個/μm2以上,粒徑超過30nm的化合物粒子的個數比例為1個/μm2以下。 (1) A copper alloy material comprising: Ni containing 0.05 to 1.2% by mass, P being 0.01 to 0.15% by mass, and Sn being 0.05 to 2.5% by mass, and the balance being composed of Cu and unavoidable impurities The alloy composition was observed by FE-SEM on the surface of the material after electrolytic polishing. In the field of view of 1 μm × 1 μm, the ratio of the number of compound particles having a particle diameter of 5 to 30 nm was 20 / μm 2 or more, and the particle diameter exceeded The number ratio of the compound particles of 30 nm is 1 / μm 2 or less.

(2)一種銅合金材料,其具有:含有Ni為0.05~1.2質量%、P為0.01~0.15質量%及Sn為0.05~2.5含有質量%,進一步含有選自由Fe、Zn、Pb、Si、Mg、Zr、Cr、Ti、Mn及Co之至少1成分,Fe為0.001~0.1質量%、Zn為0.001~0.5質量%、Pb為0.001~0.05質量%、Si為0.001~0.1質量%、Mg為 0.001~0.3質量%、Zr為0.001~0.15質量%、Cr為0.001~0.3質量%、Ti為0.001~0.05質量%、Mn為0.001~0.2質量%及Co為0.001~0.2是質量%,且將Mg、Zr、Cr、Ti、Mn及Co含有2以上時,合計含量為0.001~0.5質量%,剩餘部分係由Cu及不可避免的雜質所組成的合金組成,將電解研磨之後的材料表面以FE-SEM觀察,在1μm×1μm的視野面積中,粒徑為5~30nm的化合物粒子的個數比例為20個/μm2以上,粒徑超過30nm的化合物粒子的個數比例為1個/μm2以下。 (2) A copper alloy material comprising: Ni to 0.05 to 1.2% by mass, P of 0.01 to 0.15% by mass, and Sn of 0.05 to 2.5% by mass, further containing Fe, Zn, Pb, Si, Mg selected from the group consisting of Fe, Zn, Pb, Si, and Mg At least one component of Zr, Cr, Ti, Mn, and Co, Fe is 0.001 to 0.1% by mass, Zn is 0.001 to 0.5% by mass, Pb is 0.001 to 0.05% by mass, Si is 0.001 to 0.1% by mass, and Mg is 0.001. ~0.3 mass%, Zr is 0.001 to 0.15 mass%, Cr is 0.001 to 0.3 mass%, Ti is 0.001 to 0.05 mass%, Mn is 0.001 to 0.2 mass%, and Co is 0.001 to 0.2 mass%, and Mg, When Zr, Cr, Ti, Mn, and Co are contained in an amount of 2 or more, the total content is 0.001 to 0.5% by mass, and the remainder is composed of an alloy composed of Cu and unavoidable impurities, and the surface of the material after electrolytic polishing is FE-SEM. In the field of view of 1 μm × 1 μm, the ratio of the number of the compound particles having a particle diameter of 5 to 30 nm is 20 / μm 2 or more, and the ratio of the number of the compound particles having a particle diameter of more than 30 nm is 1 / μm 2 or less. .

(3)如上述(1)或(2)所述的銅合金材料,其中含有Sn為0.05~0.5質量%,抗拉強度為400MPa以上,導電率為50%IACS以上。 (3) The copper alloy material according to the above (1) or (2), which contains Sn in an amount of 0.05 to 0.5% by mass, a tensile strength of 400 MPa or more, and a conductivity of 50% IACS or more.

(4)如上述(1)或(2)所述的銅合金材料,其中含有Sn為超過0.5質量%,2.5質量%以下,抗拉強度為500MPa以上,導電率為25%IACS以上。 (4) The copper alloy material according to the above (1) or (2), which contains Sn in an amount of more than 0.5% by mass and 2.5% by mass or less, a tensile strength of 500 MPa or more, and a conductivity of 25% IACS or more.

(5)一種銅合金材料的製造方法,其係製造上述(1)至(4)之任何一項所述的銅合金材料的方法,其特徵在於:包含:下述(a)~(e)的步驟: (5) A method for producing a copper alloy material, which is the method for producing the copper alloy material according to any one of the above (1) to (4), characterized by comprising the following (a) to (e) A step of:

(a)到300℃為止的冷卻速度為30℃/分以上的熔解鑄造步驟。 (a) A melting casting step at a cooling rate of up to 300 ° C of 30 ° C / min or more.

(b)以5℃/分以上升溫,以600~1000℃保持30分鐘~10小時的均質化熱處理步驟。 (b) A homogenization heat treatment step of raising the temperature at 5 ° C / min or more and maintaining at 600 to 1000 ° C for 30 minutes to 10 hours.

(c)到300℃為止的冷卻速度為30℃/分以上的熱間壓延步驟。 (c) A heat-to-heat rolling step of a cooling rate of up to 300 ° C of 30 ° C / min or more.

(d)加工率為80%以上的冷間壓延步驟。 (d) A cold rolling step in which the working ratio is 80% or more.

(e)以350~600℃保持5秒~10小時的退火步驟。 (e) An annealing step of maintaining a temperature of 350 to 600 ° C for 5 seconds to 10 hours.

根據本發明,藉由具有:含有Ni為0.05~1.2質量%、P為0.01~0.15質量%及Sn為0.05~2.5質量%,剩餘部分係由Cu及不可避免的雜質組成的合金組成,將電解研磨之後的材料表面以FE-SEM觀察,在1μm×1μm的視野面積中,粒徑為5~30nm的化合物粒子的個數比例為20個/μm2以上,粒徑超過30nm的化合物粒子的個數比例為1個/μm2以下,可得加上高強度、高導電率及良好的彎曲加工性,兼具更良好的耐熱性的銅合金材料。 According to the present invention, the electrolysis is composed of an alloy containing 0.05 to 1.2 mass% of Ni, 0.01 to 0.15 mass% of P, and 0.05 to 2.5% by mass of Sn, and the balance being composed of Cu and unavoidable impurities. The surface of the material after the polishing was observed by FE-SEM. In the field of view of 1 μm × 1 μm, the ratio of the number of compound particles having a particle diameter of 5 to 30 nm was 20 / μm 2 or more, and the number of compound particles having a particle diameter of more than 30 nm was observed. The number ratio is one piece/μm 2 or less, and a copper alloy material having high strength, high electrical conductivity, and good bending workability and having better heat resistance can be obtained.

第1圖係將本發明的銅合金材料(實施例14)電解研磨後的表面,以FE-SEM之倍率:50000倍觀察時的SEM照片。 Fig. 1 is a SEM photograph of the surface of the copper alloy material of the present invention (Example 14) after electrolytic polishing, observed at a magnification of FE-SEM: 50,000 times.

第2圖係將比較例22之電解研磨後的表面,以FE-SEM倍率:50000倍觀察時的SEM照片。 Fig. 2 is a SEM photograph of the surface after electrolytic polishing of Comparative Example 22, observed at an FE-SEM magnification: 50,000 times.

以下,詳細說明關於本發明的銅合金材料的較佳的實施態樣。 Hereinafter, preferred embodiments of the copper alloy material of the present invention will be described in detail.

(銅合金材料的成分組成) (Component composition of copper alloy materials)

本發明的銅合金材料的基本組成,含有Ni為0.05~1.2質量%、P為0.01~0.15質量%及Sn為0.05~2.5質量%,剩餘部分係Cu及不可避免的雜質。 The basic composition of the copper alloy material of the present invention contains Ni in an amount of 0.05 to 1.2% by mass, P in an amount of 0.01 to 0.15% by mass, and Sn in an amount of 0.05 to 2.5% by mass, and the balance being Cu and unavoidable impurities.

[必須含有成分] [must contain ingredients]

(Ni:0.05~1.2質量%) (Ni: 0.05 to 1.2% by mass)

Ni係固溶於母相,且藉由與P形成化合物,增加強度的 元素。此外,Ni係與P生成化合物,藉由使該生成物析出,提升導電率的同時具有提升耐熱性的效果。但是,Ni含量未滿0.05質量%時,則無法充分發揮該效果,此外,若超過1.2質量%,則導電率會顯著地下降。因此,Ni含量為0.05~1.2質量%,以0.10~1.00質量%為佳,以0.10~0.40質量%更佳。 Ni is solid-solubilized in the parent phase and increases strength by forming a compound with P. element. Further, the Ni-based and P-forming compounds have an effect of improving the heat resistance while precipitating the product by increasing the conductivity. However, when the Ni content is less than 0.05% by mass, the effect cannot be sufficiently exhibited, and if it exceeds 1.2% by mass, the electrical conductivity is remarkably lowered. Therefore, the Ni content is 0.05 to 1.2% by mass, preferably 0.10 to 1.00% by mass, more preferably 0.10 to 0.40% by mass.

(P:0.01~0.15質量%) (P: 0.01 to 0.15 mass%)

P係藉由與Ni生成化合物,而貢獻於增加強度、導電率的上升、及提升耐熱性的元素。但是,P的含量未滿0.01質量%時,則無法充分得到該效果,此外,超過0.15質量%時,則會引起導電率的下降,且生成粗大(例如粒徑超過30nm)的化合物粒子使彎曲加工性下降,而減少細微(例如粒徑為5~30nm)化合物的生成比例而使耐熱性下降、加工性下降。因此P的含量為0.01~0.15質量%,以0.01~0.10質量%為佳,以0.05~0.10質量%更佳。 P is an element that increases the strength, the electrical conductivity, and the heat resistance by forming a compound with Ni. However, when the content of P is less than 0.01% by mass, the effect cannot be sufficiently obtained, and when it exceeds 0.15 mass%, the electrical conductivity is lowered, and coarse (for example, a particle diameter of more than 30 nm) compound particles are formed to be bent. The workability is lowered, and the formation ratio of a fine (for example, a particle diameter of 5 to 30 nm) is reduced to lower the heat resistance and to lower the workability. Therefore, the content of P is 0.01 to 0.15 mass%, preferably 0.01 to 0.10 mass%, more preferably 0.05 to 0.10 mass%.

(Sn:0.05~2.5質量%) (Sn: 0.05~2.5% by mass)

Sn係藉由固溶於母相,貢獻於增加強度及提升耐熱性的元素。但是,Sn的含量未滿0.05質量%時,則無法充分得到該效果,此外,超過2.5質量%,則會引起導電率的下降、熱間加工性的惡化。因此,Sn的含量為0.05~2.5質量%。再者,抗拉強度與導電率之中,特別重視導電率時,將Sn的含量限定於0.05~0.5質量%,則抗拉強度可為400MPa以上,而具備50%IACS以上的高導電率之點為佳,此外,特別重視抗拉強度時,將Sn的含量限定於0.5質量%以上2.5質量%以下,則可以25%IACS以上的導電率,而具備500MPa以上的高抗拉強 度之點而佳。 Sn is a solid solution in the mother phase and contributes to an element that increases strength and improves heat resistance. However, when the content of Sn is less than 0.05% by mass, the effect cannot be sufficiently obtained, and when it exceeds 2.5% by mass, the electrical conductivity is lowered and the hot workability is deteriorated. Therefore, the content of Sn is 0.05 to 2.5% by mass. Further, among the tensile strength and the electrical conductivity, when the conductivity is particularly limited, the content of Sn is limited to 0.05 to 0.5% by mass, and the tensile strength may be 400 MPa or more, and the high electrical conductivity of 50% IACS or more is obtained. In addition, when the tensile strength is particularly limited to 0.5% by mass or more and 2.5% by mass or less, the electrical conductivity of 25% IACS or more can be obtained, and the high tensile strength of 500 MPa or more can be obtained. The point is better.

[任意添加成分] [optional addition]

在本發明,必須含有上述Ni、P及Sn作為基本組成,亦可進一步含有選自由Fe、Zn、Pb、Si、Mg、Zr、Cr、Ti、Mn及Co之中的至少1成分。 In the present invention, it is necessary to contain the above-mentioned Ni, P, and Sn as a basic composition, and further contain at least one component selected from the group consisting of Fe, Zn, Pb, Si, Mg, Zr, Cr, Ti, Mn, and Co.

(Fe:0.001~0.1質量%) (Fe: 0.001 to 0.1% by mass)

Fe係藉由與P形成化合物,而貢獻於增加強度,提升耐熱性的元素,為發揮該效果,Fe的含量以0.001質量%以上為佳。惟,Fe的含量較0.1質量%多,則材料變得容易帶有磁性,而材料若帶有磁性,則使導線架傳送信號的傳達特性有劣化之虞。因此,Fe的含量,以0.001~0.1質量%為佳,以0.001~0.05質量%為佳,進一步以0.001~0.01質量%更佳。 In order to exhibit the effect, the content of Fe is preferably 0.001% by mass or more in order to exhibit an effect by forming a compound with P and contributing to an element which increases strength and improves heat resistance. However, when the content of Fe is more than 0.1% by mass, the material tends to be magnetic, and if the material is magnetic, the transmission characteristics of the lead frame transmission signal are deteriorated. Therefore, the content of Fe is preferably 0.001 to 0.1% by mass, more preferably 0.001 to 0.05% by mass, still more preferably 0.001 to 0.01% by mass.

(Zn:0.001~0.5質量%) (Zn: 0.001 to 0.5% by mass)

Zn係藉由固溶於母相而貢獻於增加強度、提升焊錫沾濕性、提升鍍敷性的元素,為發揮該效果,Zn的含量以0.001質量%以上為佳。惟,Zn的含量較0.5質量%多時,則有降低導電率的趨勢。因此,Zn的含量,以0.001~0.5質量%為佳,以0.01~0.5質量%較佳,進一步以0.1~0.5質量%更佳。 Zn is an element which contributes to increase strength, improve solder wettability, and improve plating property by being dissolved in the mother phase. In order to exhibit this effect, the content of Zn is preferably 0.001% by mass or more. However, when the content of Zn is more than 0.5% by mass, there is a tendency to lower the electrical conductivity. Therefore, the content of Zn is preferably 0.001 to 0.5% by mass, more preferably 0.01 to 0.5% by mass, still more preferably 0.1 to 0.5% by mass.

(Pb:0.001~0.05質量%) (Pb: 0.001 to 0.05% by mass)

Pb係貢獻於提升壓製加工性的元素,為發揮該效果,Pb的含量為0.001質量%以上較佳。惟,即使Pb的含量較0.05質量%多時,亦無法確認效果能進一步提升,此外,由近年的環境保護的觀點而言,極力抑制Pb含量為佳。因此,Pb的含量以0.001~0.05質量%為佳,以0.001~0.01質量%更佳。 Pb contributes to an element which improves press workability, and in order to exhibit this effect, it is preferable that the content of Pb is 0.001% by mass or more. However, even when the content of Pb is more than 0.05% by mass, it is not possible to confirm that the effect can be further improved. Further, from the viewpoint of environmental protection in recent years, it is preferable to suppress the Pb content as much as possible. Therefore, the content of Pb is preferably 0.001 to 0.05% by mass, more preferably 0.001 to 0.01% by mass.

(Si:0.001~0.1質量%) (Si: 0.001 to 0.1% by mass)

Si係貢獻於增加強度的元素,為發揮該效果,Si的含量以0.001質量%以上為佳。惟,Si的含量較0.1質量%多,則有使導電率下降,或生成粗大的化合物使彎曲加工性劣化之虞。因此,Si的含量以0.001~0.1質量%為佳,以0.01~0.1質量%更佳。 The Si system contributes to an element which increases the strength, and in order to exhibit this effect, the content of Si is preferably 0.001% by mass or more. However, when the content of Si is more than 0.1% by mass, the electrical conductivity is lowered, or a coarse compound is formed to deteriorate the bending workability. Therefore, the content of Si is preferably 0.001 to 0.1% by mass, more preferably 0.01 to 0.1% by mass.

(Mg:0.001~0.3質量%) (Mg: 0.001 to 0.3% by mass)

Mg係貢獻於增加強度及提升耐熱性的元素。此外,例如,在電子元件的彈簧接點等,貢獻於提升耐應力緩和特性。為發揮該等效果,使Mg的含量為0.001質量%以上為佳。惟,Mg的含量較0.3質量%多時,則有使導電率下降,或在鑄造時形成不純物之虞。因此,Mg的含量,以0.001~0.3質量%為佳,以0.01~0.3質量%更佳。 The Mg system contributes to an element that increases strength and improves heat resistance. Further, for example, the spring contact of the electronic component or the like contributes to the improvement of the stress relaxation resistance. In order to exert such effects, the content of Mg is preferably 0.001% by mass or more. However, when the content of Mg is more than 0.3% by mass, the electrical conductivity may be lowered or an impurity may be formed during casting. Therefore, the content of Mg is preferably 0.001 to 0.3% by mass, more preferably 0.01 to 0.3% by mass.

(Zr:0.001~0.15質量%) (Zr: 0.001 to 0.15 mass%)

Zr係貢獻於增加強度及提升耐熱性的元素。此外,例如,在電子元件的彈簧接點等,貢獻於提升耐應力緩和特性。為發揮該等效果,使Zr的含量為0.001質量%以上為佳。惟,Zr的含量較0.15質量%多,則有使導電率下降,或在熱間加工時破裂之虞。因此,Zr的含量,以0.001~0.15質量%為佳,以0.01~0.1質量%更佳。 The Zr system contributes to elements that increase strength and improve heat resistance. Further, for example, the spring contact of the electronic component or the like contributes to the improvement of the stress relaxation resistance. In order to exert such effects, the content of Zr is preferably 0.001% by mass or more. However, when the content of Zr is more than 0.15% by mass, there is a possibility that the conductivity is lowered or cracked during hot processing. Therefore, the content of Zr is preferably 0.001 to 0.15 mass%, more preferably 0.01 to 0.1 mass%.

(Cr:0.001~0.3質量%) (Cr: 0.001 to 0.3% by mass)

Cr係貢獻於增加強度及提升耐熱性的元素,為發揮該效果,Cr的含量以0.001質量%以上為佳。惟,Cr的含量較0.3質量%多時,則有因在鑄造時出現晶出物而使彎曲加工性下降 之虞。因此,Cr的含量以0.001~0.3質量%為佳,以0.01~0.3質量%更佳。 The Cr-based element contributes to an element which increases strength and improves heat resistance, and in order to exhibit this effect, the Cr content is preferably 0.001% by mass or more. However, when the content of Cr is more than 0.3% by mass, there is a decrease in bending workability due to occurrence of crystal grains during casting. After that. Therefore, the content of Cr is preferably 0.001 to 0.3% by mass, more preferably 0.01 to 0.3% by mass.

(Ti:0.001~0.05質量%) (Ti: 0.001 to 0.05% by mass)

Ti係貢獻於增加強度及提升耐熱性的元素。此外,例如,在電子元件的彈簧接點等,貢獻於提升耐應力緩和特性。為發揮該等效果,Ti的含量以0.001質量%以上為佳。惟,Ti的含量較0.05質量%多時,則有使導電率下降,或鑄塊表面的鑄肌異常之虞。因此,Ti的含量以0.001~0.05質量%為佳,以0.01~0.05質量%更佳。 The Ti system contributes to elements that increase strength and improve heat resistance. Further, for example, the spring contact of the electronic component or the like contributes to the improvement of the stress relaxation resistance. In order to exert such effects, the content of Ti is preferably 0.001% by mass or more. However, when the content of Ti is more than 0.05% by mass, the electrical conductivity may be lowered or the cast muscle on the surface of the ingot may be abnormal. Therefore, the content of Ti is preferably 0.001 to 0.05% by mass, more preferably 0.01 to 0.05% by mass.

(Mn:0.001~0.2質量%) (Mn: 0.001 to 0.2% by mass)

Mn係貢獻於增加強度或提升耐熱性、提升熱間加工性的元素,為發揮該效果,Mn的含量以0.001質量%以上為佳。惟,Mn的含量較0.2質量%多時,則有使導電率下降之虞。因此,Mn的含量,以0.001~0.2質量%為佳,以0.01~0.2質量%更佳。 Mn is an element which contributes to the increase in strength, the heat resistance, and the heat-intermediate workability. In order to exhibit this effect, the content of Mn is preferably 0.001% by mass or more. However, when the content of Mn is more than 0.2% by mass, the electrical conductivity is lowered. Therefore, the content of Mn is preferably 0.001 to 0.2% by mass, more preferably 0.01 to 0.2% by mass.

(Co:0.001~0.2質量%) (Co: 0.001 to 0.2% by mass)

Co係貢獻於增加強度或提升熱間加工性的元素,為發揮該效果,Co的含量以0.001質量%以上為佳。惟,Co的含量較0.2質量%多時,則有使導電率下降之虞。因此,Co的含量,以0.001~2質量%為佳,以0.01~0.2質量%更佳。 Co is contributed to an element which increases strength or improves inter-heat processability, and in order to exhibit this effect, the content of Co is preferably 0.001% by mass or more. However, when the content of Co is more than 0.2% by mass, the electrical conductivity is lowered. Therefore, the content of Co is preferably 0.001 to 2% by mass, more preferably 0.01 to 0.2% by mass.

(含有2種以上的Mg、Zr、Cr、Ti、Mn及Co時的合計含量:0.001~0.5質量%) (Total content when two or more types of Mg, Zr, Cr, Ti, Mn, and Co are contained: 0.001 to 0.5% by mass)

Mg、Zr、Cr、Ti、Mn及Co,係藉由與P形成化合物,貢獻於增加強度及提升耐熱性。該等元素的添加量以0.001~0.5質量%為佳,以0.01~0.5質量%較佳,進一步以0.1~0.5質量% 更佳。較0.5質量%大時,有使導電率下降,生成粗大的化合物而使彎曲加工性惡化之虞。 Mg, Zr, Cr, Ti, Mn, and Co contribute to increase strength and improve heat resistance by forming a compound with P. The amount of the elements added is preferably 0.001 to 0.5% by mass, more preferably 0.01 to 0.5% by mass, further preferably 0.1 to 0.5% by mass. Better. When it is larger than 0.5% by mass, the electrical conductivity is lowered to form a coarse compound, and the bending workability is deteriorated.

(化合物粒子) (compound particles)

在本發明,藉由將電解研磨之後的材料表面以FE-SEM觀察,在1μm×1μm的視野面積中,粒徑為5~30nm的化合物粒子的個數比例為20個/μm2以上,粒徑超過30nm的化合物粒子的個數比例為1個/μm2以下,可得除了高強度、高導電率及良好的彎曲加工性,且兼備良好的耐熱性的銅合金材料。在此所謂「化合物粒子」,係指在鑄造時形成的不純物或結晶物,在鑄造凝固後形成的析出物的總稱。此外,化合物粒子的粒徑,係指長邊的長度的意思。1μm×1μm的視野面積中,粒徑為5~30nm的細微化合物粒子的個數比例為20個/μm2以上時,由於可藉由細微化合物粒子得到充分的鎖磁力效果而抑制再結晶,可得良好的耐熱性。另一方面,細微化合物粒子的個數比例較20個/μm2少時,無法得到良好耐熱性。此外,藉由使粒徑超過30nm的粗大的化合物粒子的個數比例為1個/μm2以下,可得良好的彎曲加工性。粗大的化合物粒子的個數比例超過1個/μm2,則粗大的化合物粒子會成為破壞起點,而使彎曲加工性顯著地劣化。再者,此時,若形成多數粗大的化合物粒子,則由於細微化合物粒子的個數比例有減少的趨勢,故有使耐熱性劣化之虞。先前,化合物粒子的分散狀態,大多係使用穿透式電子顯微鏡(TEM)觀察,以視野中的個數與面積率表現,惟該等的數值依存於試驗片的厚度。但是,將用於TEM的試驗片製作成同樣的厚度是困難的,加上即使以相同試驗片 測定,亦有因測定回數而得到稍微不同的結果的可能性。因此,在本發明,使用不依試驗片厚度的場發射掃描式電子顯微鏡(FE-SEM)評估化合物粒子的個數比例。 In the present invention, the surface ratio of the material after electrolytic polishing is observed by FE-SEM, and the ratio of the number of compound particles having a particle diameter of 5 to 30 nm is 20 / μm 2 or more in a field of view of 1 μm × 1 μm. When the ratio of the number of the compound particles having a diameter of more than 30 nm is one piece/μm 2 or less, a copper alloy material having high strength, high electrical conductivity, and good bending workability and excellent heat resistance can be obtained. The term "compound particles" as used herein refers to a general term for precipitates formed after solidification by casting, which are impurities or crystals formed during casting. Further, the particle diameter of the compound particles means the length of the long side. In the field of view of 1 μm × 1 μm, when the number ratio of the fine compound particles having a particle diameter of 5 to 30 nm is 20 pieces/μm 2 or more, recrystallization can be suppressed by obtaining a sufficient magnetic lock effect of the fine compound particles. Good heat resistance. On the other hand, when the ratio of the number of fine compound particles is less than 20 / μm 2 , good heat resistance cannot be obtained. In addition, by setting the ratio of the number of coarse compound particles having a particle diameter of more than 30 nm to 1 / μm 2 or less, good bending workability can be obtained. When the ratio of the number of the coarse compound particles exceeds 1 / μm 2 , the coarse compound particles become a fracture origin, and the bending workability is remarkably deteriorated. In addition, in this case, when a large number of coarse compound particles are formed, the ratio of the number of fine compound particles tends to decrease, so that heat resistance is deteriorated. Previously, the dispersion state of the compound particles was mostly observed by a transmission electron microscope (TEM), and the number of fields and the area ratio were expressed, but the values depended on the thickness of the test piece. However, it is difficult to prepare the test piece for TEM to have the same thickness, and even if it is measured by the same test piece, there is a possibility that a slightly different result is obtained by measuring the number of times. Therefore, in the present invention, the number ratio of the compound particles was evaluated using a field emission scanning electron microscope (FE-SEM) which did not depend on the thickness of the test piece.

(銅合金材料的製造方法) (Manufacturing method of copper alloy material)

接著,說明關於本發明的錫合金材料的製造方法。 Next, a method of producing the tin alloy material of the present invention will be described.

本發明的銅合金材料,通常係藉由進行熔解鑄造-均質化熱處理-熱間壓延-冷間壓延-退火-修飾壓延而製造。在各步驟之間,按照需要,亦可適當地進行面削、拋光研磨、酸洗、脫脂等。此外,冷間壓延與退火,亦可重複進行數次,亦可進一步在修飾壓延之後施以低溫退火。在本發明的製造方法,重點在於,在熔解鑄造、均質化熱處理及熱間壓延中,極力不使粗大的化合物粒子生成,並在之後的冷間壓延及退火生成較多的細微析出物。本發明的製造方法,雖與先前的步驟數程度相當,但藉由將各個步驟條件適當地調整,可實現材料特性的提升。 The copper alloy material of the present invention is usually produced by performing melt casting-homogenization heat treatment-heat-calendering-cold rolling-annealing-modification calendering. Between each step, face cutting, buffing, pickling, degreasing, and the like may be appropriately performed as needed. In addition, the cold rolling and annealing may be repeated several times, or may be further subjected to low temperature annealing after the modified calendering. In the production method of the present invention, in the melt casting, the homogenization heat treatment, and the heat-to-heat rolling, coarse compound particles are not generated as much as possible, and a large number of fine precipitates are formed in the subsequent cold rolling and annealing. Although the manufacturing method of the present invention is equivalent to the number of previous steps, the material properties can be improved by appropriately adjusting the respective step conditions.

<熔解鑄造> <melt casting>

熔解鑄造,以一般的方法實施即可,在本發明,鑄造時,至300℃為止的冷卻以30℃/分以上的冷卻速度進行,以抑制冷卻時的結晶及析出,而抑制生成粗大的化合物粒子之觀點而佳。上述冷卻速度較30℃/分小時,則無法充分抑制冷卻時的結晶及析出,而有容易生成粗大的化合物粒子的趨勢。 In the present invention, at the time of casting, cooling to 300 ° C is performed at a cooling rate of 30 ° C /min or more to suppress crystallization and precipitation during cooling, thereby suppressing formation of a coarse compound. The idea of particles is good. When the cooling rate is less than 30 ° C / min, crystals and precipitation during cooling cannot be sufficiently suppressed, and coarse compound particles tend to be formed.

<均質化熱處理> <Homogenization heat treatment>

均質化熱處理,係使熔解鑄造所生成的粗大化合物粒子固溶於母相,作成固溶狀態而實施。均質化熱處理,以600~1000 ℃保持30分鐘~10小時為佳。先前,並未重視均質化熱處理的升溫速度,但在本發明,為得既定的材料組織,特別需要將升溫速度控制在5℃/分以上,以10℃/分以上為佳。升溫速度較5℃/分小時,則在熔解鑄造中形成的粗大的化合物粒子會在升溫時成長,在之後的均質化熱處理,便無法將粗大的化合物粒子充分溶解於母相而容易殘存,使最終特性的彎曲加工性惡化。此外,由於細微化合物粒子的個數比例亦會減少,故耐熱性亦會劣化。滿足保持溫度未滿600℃及保持時間未滿30分鐘的至少一方時,容易殘存對母相固溶不全的粗大的化合物粒子,而有使最終特性的彎曲加工性劣化之虞,此外,保持溫度超過1000℃時,在連續的熱間壓延步驟,有發生熱間加工破裂之虞。再者,由固溶化的效果飽和,或在實際的製造時間限制的觀點而言,保持時間的上限以10小時為佳。 The homogenization heat treatment is carried out by solid-dissolving the coarse compound particles produced by the melt casting in the mother phase and in a solid solution state. Homogenization heat treatment, 600~1000 It is better to keep °C for 30 minutes to 10 hours. Conventionally, the temperature increase rate of the homogenization heat treatment has not been emphasized. However, in the present invention, in order to obtain a predetermined material structure, it is particularly preferable to control the temperature increase rate to 5 ° C /min or more, preferably 10 ° C / min or more. When the temperature rise rate is lower than 5 ° C / min, the coarse compound particles formed during the melt casting are grown at the time of temperature rise, and after the homogenization heat treatment, the coarse compound particles are not sufficiently dissolved in the matrix phase, and it is easy to remain. The bending workability of the final characteristics deteriorates. Further, since the ratio of the number of fine compound particles is also reduced, heat resistance is also deteriorated. When at least one of the retention temperature of less than 600 ° C and the retention time of less than 30 minutes is satisfied, it is easy to remain coarse compound particles which are insoluble in the matrix phase, and the bending property of the final properties is deteriorated, and the temperature is maintained. When it exceeds 1000 ° C, in the continuous hot-rolling step, there is a possibility that the inter-heat processing is broken. Further, the upper limit of the holding time is preferably 10 hours from the viewpoint of the effect of solid solution or from the viewpoint of actual production time limitation.

<熱間壓延> <Thermal calendering>

熱間壓延,以550~950℃實施為佳。在本發明,特別是需要以30℃/分以上的冷卻速度冷卻到300℃。到300℃為止的冷卻速度較30℃/分小時,則容易在冷卻期間析出粗大的化合物粒子,對最終特性造成不良影響。 The heat is calendered and is preferably carried out at 550 to 950 °C. In the present invention, in particular, it is required to be cooled to 300 ° C at a cooling rate of 30 ° C / min or more. When the cooling rate up to 300 ° C is 30 ° C / min, it is easy to precipitate coarse compound particles during cooling, which adversely affects the final properties.

<冷間壓延> <cold rolling>

熱間壓延後的冷間壓延,以80%以上的加工率實施為佳。加工率在80%以下時,則無法在材料內均勻地導入形變,而在之後的退火析出細微化合物粒子時,在材料內出現析出狀態差之虞。 The inter-column rolling after hot rolling is preferably carried out at a processing rate of 80% or more. When the working ratio is 80% or less, the deformation cannot be uniformly introduced into the material, and when the fine compound particles are precipitated and precipitated later, a difference in precipitation state occurs in the material.

<退火> <annealing>

退火,係以350~600℃保持5秒~10小時為佳。較上述範圍低溫、時間較短時,則不能充分地析出細微化合物粒子,而有降低強度及導電率之虞,此外,較上述範圍高溫、時間較長時,則會析出粗大的化合物粒子,而有使彎曲加工性劣化及耐熱性劣化之虞。 Annealing is preferably carried out at 350 to 600 ° C for 5 seconds to 10 hours. When the temperature is lower than the above range and the time is short, the fine compound particles are not sufficiently precipitated, and the strength and the electrical conductivity are lowered. Further, when the temperature is higher than the above range and the time is long, coarse compound particles are precipitated. There is a problem in that the bending workability is deteriorated and the heat resistance is deteriorated.

<修飾壓延> <modified calendering>

修飾壓延的加工率並無特別限定,為得良好的彎曲加工性,以60%以下為佳。 The processing rate of the modified rolling is not particularly limited, and is preferably 60% or less in order to obtain good bending workability.

<低溫退火> <Low temperature annealing>

壓延之後,亦可以250~400℃實施2秒~5小時的低溫退火。藉由低溫退火,可提升材料的彈性及耐應力緩和特性。較上述範圍低溫、時間較短時,則有無法得到低溫退火的效果之虞,此外,較上述範圍高溫、時間較長時,則細微化合物粒子會粗大成長,而有對彎曲加工性及耐熱性造成不良影響之虞。此外,材料進行再結晶,而有無法得到所期望的強度之虞。 After calendering, low temperature annealing for 2 seconds to 5 hours can also be carried out at 250 to 400 °C. By low temperature annealing, the elasticity and stress relaxation properties of the material can be improved. When the temperature is lower than the above range and the time is short, the effect of low-temperature annealing cannot be obtained. Further, when the temperature is higher than the above range and the time is long, the fine compound particles are coarsely grown, and the bending workability and heat resistance are obtained. The cause of adverse effects. In addition, the material undergoes recrystallization, and there is a fear that the desired strength cannot be obtained.

本發明的銅合金材料,藉由控制具有既定合金組成的Cu-Ni-Sn-P系銅合金中的化合物粒子的尺寸及數量,除了可得高強度、高導電率及良好的彎曲加工性,並且可兼具耐熱性。因此,本發明的銅合金材料適合用於以導線架為首的電氣電子元件。 The copper alloy material of the present invention, in addition to obtaining high strength, high electrical conductivity and good bending workability, by controlling the size and number of compound particles in a Cu-Ni-Sn-P based copper alloy having a predetermined alloy composition, And it can have both heat resistance. Therefore, the copper alloy material of the present invention is suitable for use in electrical and electronic components including lead frames.

實施例 Example

以下,基於實施例更詳細地說明本發明,惟本發明不應限定於該等。 Hereinafter, the present invention will be described in more detail based on examples, but the present invention should not be limited thereto.

(實施例1~26及比較例1~22) (Examples 1 to 26 and Comparative Examples 1 to 22)

以下,基於實施例更詳細地說明本發明,惟本發明不應限定於該等。 Hereinafter, the present invention will be described in more detail based on examples, but the present invention should not be limited thereto.

將合金成分溶解,以30℃/分以上的冷卻速度冷卻至300℃而鑄造,製作第1表所示成分組成的鑄塊之後,以第2表所示的升溫速度升溫,以600~1000℃保持30分鐘至10小時實施均質化熱處理,接著,實施熱間壓延。在熱間壓延之後,以第2表所示的冷卻速度冷卻至300℃,之後,以面削去除表面氧化層,以80%以上的加工率實施冷間壓延。之後進一步以350~600℃實施退火5秒~10小時,接著,以60%以下的加工率施以修飾壓延,最後以250~400℃進行2秒~5小時的低溫退火,製造板厚0.5mm的銅合金材料。 The alloy component is dissolved, and is cast at a cooling rate of 30 ° C /min or more to 300 ° C to be cast, and an ingot having the composition shown in the first table is produced, and then heated at a temperature increase rate shown in Table 2 to 600 to 1000 ° C. The homogenization heat treatment is carried out for 30 minutes to 10 hours, and then, the inter-heat rolling is performed. After the inter-heat rolling, the film was cooled to 300 ° C at a cooling rate shown in Table 2, and then the surface oxide layer was removed by surface cutting, and cold rolling was performed at a processing ratio of 80% or more. Thereafter, the annealing is further performed at 350 to 600 ° C for 5 seconds to 10 hours, and then, the modified rolling is performed at a processing rate of 60% or less, and finally, the low temperature annealing is performed at 250 to 400 ° C for 2 seconds to 5 hours to produce a plate thickness of 0.5 mm. Copper alloy material.

對如此製造的供試材,實施下述評估。 The following evaluation was carried out on the test materials thus produced.

(組織觀察) (Organizational observation)

由製造的各銅合金材料(供試材)採取的試驗片(尺寸:20mm×20mm)的表面的20μm,以磷酸系水溶液電解研磨之後,藉由FE-SEM,將材料表面,以10000~100000倍觀察。觀察,係將任意1μm×1μm的範圍,觀察3視野,計測存在於該視野範圍內的粒徑5~30nm的細微化合物粒子的個數及粒徑超過30nm的粗大化合物粒子的個數。之後,將量測的個數,換算為1μm×1μm(1μm2)視野面積當量的個數比例。換算的個數比例係四捨五入,細微化合物粒子以整數表示,粗大的化合物粒子則顯示到小數點第二位的數字。 20 μm of the surface of the test piece (size: 20 mm × 20 mm) taken from each of the produced copper alloy materials (test materials), and electrolytically polished with a phosphate aqueous solution, and the surface of the material was 10,000 to 100,000 by FE-SEM. Double observation. In the observation, the range of 1 μm × 1 μm was observed, and the three fields of view were observed, and the number of fine compound particles having a particle diameter of 5 to 30 nm and the number of coarse compound particles having a particle diameter of more than 30 nm were measured in the field of view. Thereafter, the number of measurements was converted into a ratio of the number of fields of view of 1 μm × 1 μm (1 μm 2 ). The ratio of the number of conversions is rounded off, the fine compound particles are represented by integers, and the coarse compound particles are displayed to the second digit of the decimal point.

(抗拉強度的測定) (Measurement of tensile strength)

抗拉強度,係由各供試材,將JIS Z2241:2011的附屬書B 所規定的5號試驗片,延著壓延平行方向切出採取3支,遵照JIS Z2241:2011所規定的「金屬材料抗拉試驗方法」測定3支。將該等抗拉強度的平均值示於第2表。 Tensile strength, from each test material, will be attached to JIS Z2241:2011 The test piece No. 5 which was prescribed was cut out in the parallel direction of the rolling, and three pieces were taken, and three pieces were measured in accordance with the "Metal material tensile test method" prescribed in JIS Z2241:2011. The average value of these tensile strengths is shown in the second table.

(導電率的測定) (Measurement of conductivity)

在保持在20℃(±0.5℃)的恆溫漕中,以四點探針法測量比電阻值,由測量的比電阻值算出導電率。再者,探針間距為100mm。 The specific resistance was measured by a four-point probe method while maintaining a constant temperature of 20 ° C (± 0.5 ° C), and the conductivity was calculated from the measured specific resistance value. Furthermore, the probe pitch is 100 mm.

(彎曲加工性) (bending workability)

基於JCBA T307:2007,實施彎曲試驗。將板幅10mm的試驗片,在彎曲軸呈與壓延方向垂直的方向(G.W.方向)及平行的方向(B.W.方向),分別以內側彎曲半徑0.5mm,進行彎曲角度90°的W彎曲。在以導線架為首的電氣電子元件,由於假定會有向G.W.方向及B.W.方向的兩方向的彎曲加工,故將彎曲後的彎曲部頂點的表面以光學顯微鏡觀察,在G.W.方向與B.W.方向的任一方均沒有發生破裂者評估為加工性良好(A),發生者評估為加工性不良(D)。將該評估結果示於第2表。 The bending test was carried out based on JCBA T307:2007. The test piece having a plate width of 10 mm was bent in a direction perpendicular to the rolling direction (G.W. direction) and a parallel direction (B.W. direction) with a bending radius of 0.5 mm on the inner side and a bending angle of 90°. In the electric and electronic component including the lead frame, since the bending process in both the GW direction and the BW direction is assumed, the surface of the curved apex of the curved portion is observed by an optical microscope, and the GW direction and the BW direction are used. Those who did not have rupture on one side were evaluated as having good workability (A), and those who were found to have poor workability (D). The evaluation results are shown in the second table.

(耐熱性) (heat resistance)

耐熱性,係將試驗片投入升溫至450℃的鹽浴中,經過5分鐘後取出進行水冷之熱處理,將熱處理後的硬度除熱處理前的硬度之值在0.8以上時評估為良好(A),未滿0.8者評估為耐熱性不良(D)。將該評估結果示於第2表。再者,硬度,係基於JIS Z2244:2009所規定的維克斯硬度試驗的試驗方法測定。此外,熱處理後的材料,由於與鹽浴接觸的表面形成披膜,故以酸洗去除之後測定硬度。 In the heat resistance, the test piece was placed in a salt bath heated to 450 ° C, and after 5 minutes, it was taken out and subjected to water-cooling heat treatment, and the hardness after the heat treatment was evaluated as good (A) except that the value of the hardness before the heat treatment was 0.8 or more. Those who are less than 0.8 are evaluated as poor heat resistance (D). The evaluation results are shown in the second table. In addition, the hardness is measured based on the test method of the Vickers hardness test prescribed by JIS Z2244:2009. Further, since the material after the heat treatment formed a film on the surface in contact with the salt bath, the hardness was measured after pickling and removing.

由第1表及第2表所示結果,可知Sn濃度在0.05~0.5質量%的範圍的實施例1~13的任一者,抗拉強度在432~492MPa且均為400MPa以上,導電率為50~77%IACS且均為50%IACS以上,而得到良好的彎曲加工性(A)及良好的耐熱性(A)。相對於此,第1表所示成分組成在本發明的範圍外的比較例1~9以及第2表所示製造條件在本發明的範圍外的比較例10及11的任一者,在抗拉強度、導電率、彎曲加工性、耐熱性及製造性中,至少一個較差。 From the results shown in the first table and the second table, it is understood that any of Examples 1 to 13 having a Sn concentration of 0.05 to 0.5% by mass has a tensile strength of 432 to 492 MPa and both of them are 400 MPa or more, and the electrical conductivity is 50 to 77% IACS and both of them are 50% IACS or more, and good bending workability (A) and good heat resistance (A) are obtained. On the other hand, in Comparative Examples 1 to 9 in which the component compositions shown in Table 1 are outside the range of the present invention, and Comparative Examples 10 and 11 in which the production conditions shown in the second table are outside the range of the present invention, At least one of tensile strength, electrical conductivity, bending workability, heat resistance, and manufacturability is inferior.

此外,Sn濃度在超過0.5質量%、2.5質量%以下的範圍的實施例14~26的任一者,均抗拉強度在512~593MPa而為500MPa以上,導電率在27~38%IACS而為25%IACS以上,得到良好的彎曲加工性(A)及良好的耐熱性(A)。相對於此,第1表所示成分組成在本發明的範圍外的比較例12~20以及第2表所示的製造條件在本發明的範圍外的比較例21及22的任一者,在抗拉強度、導電率、彎曲加工性、耐熱性及製造性中,至少一個較差。 Further, in any of Examples 14 to 26 in which the Sn concentration is in a range of more than 0.5% by mass and 2.5% by mass or less, the tensile strength is 512 to 593 MPa and 500 MPa or more, and the electrical conductivity is 27 to 38% IACS. 25% IACS or more, good bending workability (A) and good heat resistance (A) were obtained. On the other hand, in Comparative Examples 12 to 20 in which the component compositions shown in the first table are outside the range of the present invention, and the comparative examples 21 and 22 in which the manufacturing conditions shown in the second table are outside the range of the present invention, At least one of tensile strength, electrical conductivity, bending workability, heat resistance, and manufacturability is inferior.

此外,第1圖及第2圖係分別將實施例14及比較例22的銅合金材料的電解研磨後的表面,以FE-SEM觀察時的SEM照片。相對於第1圖所示實施例14的銅合金材料之分散的細微化合物粒子,可知第2圖所示比較例22的銅合金材料,化合物粒子變得較粗大。 In addition, FIG. 1 and FIG. 2 are SEM photographs of the surface after electrolytic polishing of the copper alloy materials of Example 14 and Comparative Example 22, respectively, observed by FE-SEM. With respect to the fine compound particles dispersed in the copper alloy material of Example 14 shown in Fig. 1, it was found that the copper alloy material of Comparative Example 22 shown in Fig. 2 had coarser compound particles.

【產業上的可利用性】 [Industrial availability]

根據本發明,可提供除了高強度、高導電率及良好的彎曲加工性,兼具更良好的耐熱性的銅合金材料。本發明 的銅合金材料,特別是可適用於半導體裝置所使用的導線架為首的電氣電子元件。 According to the present invention, it is possible to provide a copper alloy material which has better heat resistance than high strength, high electrical conductivity, and good bending workability. this invention The copper alloy material, in particular, is suitable for electrical and electronic components such as lead frames used in semiconductor devices.

Claims (5)

一種銅合金材料,其特徵在於:具有:含有Ni為0.05~1.2質量%、P為0.01~0.15質量%及Sn為0.05~2.5質量%,剩餘部分係由Cu及不可避免的雜質所形成的合金組成,將電解研磨之後的材料表面以FE-SEM觀察,在1μm×1μm的視野面積中,粒徑為5~30nm的化合物粒子的個數比例為20個/μm2以上,粒徑超過30nm的化合物粒子的個數比例為1個/μm2以下。 A copper alloy material characterized by having an alloy containing Ni to 0.05 to 1.2% by mass, P of 0.01 to 0.15% by mass, and Sn of 0.05 to 2.5% by mass, and the balance being formed of Cu and unavoidable impurities. In the composition, the surface of the material after electrolytic polishing was observed by FE-SEM. In the field of view of 1 μm × 1 μm, the ratio of the number of compound particles having a particle diameter of 5 to 30 nm was 20 / μm 2 or more, and the particle diameter was over 30 nm. The number ratio of the compound particles is 1 / μm 2 or less. 一種銅合金材料,其特徵在於:具有:含有Ni為0.05~1.2質量%、P為0.01~0.15質量%及Sn為0.05~2.5質量%,進一步含有選自由Fe、Zn、Pb、Si、Mg、Zr、Cr、Ti、Mn及Co之至少1成分,Fe為0.001~0.1質量%、Zn為0.001~0.5質量%、Pb為0.001~0.05質量%、Si為0.001~0.1質量%、Mg為0.001~0.3質量%、Zr為0.001~0.15質量%、Cr為0.001~0.3質量%、Ti為0.001~0.05質量%、Mn為0.001~0.2質量%及Co為0.001~0.2質量%,且在含有2種以上的Mg、Zr、Cr、Ti、Mn及Co時,其合計含量為0.001~0.5質量%,剩餘部分係由Cu及不可避免的雜質所形成的合金組成,將電解研磨之後的材料表面以FE-SEM觀察,在1μm×1μm的視野面積中,粒徑為5~30nm的化合物粒子的個數比例為20個/μm2以上,粒徑超過30nm的化合物粒子的個數比例為1個/μm2以下。 A copper alloy material characterized by comprising: Ni-containing 0.05 to 1.2% by mass, P being 0.01 to 0.15% by mass, and Sn being 0.05 to 2.5% by mass, further containing Fe, Zn, Pb, Si, Mg, At least one component of Zr, Cr, Ti, Mn, and Co, Fe is 0.001 to 0.1% by mass, Zn is 0.001 to 0.5% by mass, Pb is 0.001 to 0.05% by mass, Si is 0.001 to 0.1% by mass, and Mg is 0.001. 0.3% by mass, Zr is 0.001 to 0.15% by mass, Cr is 0.001 to 0.3% by mass, Ti is 0.001 to 0.05% by mass, Mn is 0.001 to 0.2% by mass, and Co is 0.001 to 0.2% by mass, and two or more kinds thereof are contained. When Mg, Zr, Cr, Ti, Mn and Co are present, the total content thereof is 0.001 to 0.5% by mass, and the remainder is composed of an alloy formed of Cu and unavoidable impurities, and the surface of the material after electrolytic polishing is FE- SEM observation showed that the ratio of the number of compound particles having a particle diameter of 5 to 30 nm was 20 / μm 2 or more, and the ratio of the number of compound particles having a particle diameter of more than 30 nm was 1 / μm 2 in a field of view of 1 μm × 1 μm. the following. 如申請專利範圍第1或2項所述的銅合金材料,其中含有Sn為0.05~0.5質量%,抗拉強度為400MPa以上,導電率 為50%IACS以上。 The copper alloy material according to claim 1 or 2, wherein the Sn content is 0.05 to 0.5% by mass, the tensile strength is 400 MPa or more, and the electrical conductivity is It is 50% IACS or more. 如申請專利範圍第1或2項所述的銅合金材料,其中含有Sn為超過0.5質量%,且為2.5質量%以下,抗拉強度為500MPa以上,導電率為25%IACS以上。 The copper alloy material according to claim 1 or 2, which contains Sn in an amount of more than 0.5% by mass and 2.5% by mass or less, a tensile strength of 500 MPa or more, and a conductivity of 25% IACS or more. 一種銅合金材料的製造方法,其係製造申請專利範圍第1至4項之任何一項所述的銅合金材料的方法,其特徵在於:包含下述(a)~(e)的步驟:(a)到300℃為止的冷卻速度為30℃/分以上的熔解鑄造步驟;(b)以5℃/分以上升溫,以600~1000℃保持30分鐘~10小時的均質化熱處理步驟;(c)到300℃為止的冷卻速度為30℃/分以上的熱間壓延步驟;(d)加工率為80%以上的冷間壓延步驟;以及(e)以350~600℃保持5秒~10小時的退火步驟。 A method for producing a copper alloy material, which is a method for producing a copper alloy material according to any one of claims 1 to 4, characterized in that it comprises the following steps (a) to (e): a) a cooling casting step at a cooling rate of 300 ° C or higher of 30 ° C / min or more; (b) a homogenization heat treatment step of raising the temperature at 5 ° C / min or more and maintaining at 600 to 1000 ° C for 30 minutes to 10 hours; a cooling rate of 300 ° C / min or more to the inter-heat rolling step; (d) a cold rolling step of 80% or more; and (e) holding at 350 to 600 ° C for 5 seconds to 10 hours Annealing step.
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