TW201634540A - Method for preparation of polyimide film using porous particles and polyimide film having low permittivity - Google Patents

Method for preparation of polyimide film using porous particles and polyimide film having low permittivity Download PDF

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TW201634540A
TW201634540A TW105101245A TW105101245A TW201634540A TW 201634540 A TW201634540 A TW 201634540A TW 105101245 A TW105101245 A TW 105101245A TW 105101245 A TW105101245 A TW 105101245A TW 201634540 A TW201634540 A TW 201634540A
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porous particles
polyimide film
particles
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porous
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TWI593726B (en
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趙成一
李吉男
金聖原
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韓國愛思開希可隆Pi股份有限公司
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    • C08G73/1067Wholly aromatic polyimides, i.e. having both tetracarboxylic and diamino moieties aromatically bound
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    • C08J2379/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
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Abstract

The present invention provides a method for preparation of polyimide film by using porous particles and to a polyimide film having a low permittivity produced by the method, wherein the polyimide film contains porous particles having an average diameter of 10 [mu]m or less and a true density of 95% or less relative to the true density of the material itself of the porous particles, thereby enabling the polyimide film to have a lower permittivity than those of conventional polyimide films. Therefore, the polyimide film can be advantageously used in the manufacture of electric/electronic devices and components requiring a low permittivity such as printed circuit boards.

Description

用於使用多孔質粒子來製備聚醯亞胺之方法及具有低介電常數之聚醯亞胺膜 Method for preparing polyimine using porous particles and polyimine film having low dielectric constant 發明領域 Field of invention

本發明係有關於用於藉由使用多孔質粒子來製備聚醯亞胺之方法及依據該方法製造的具有低介電常數之聚醯亞胺膜。 The present invention relates to a method for producing a polyimine by using a porous particle and a polyimide film having a low dielectric constant produced according to the method.

發明背景 Background of the invention

概略言之,聚醯亞胺(PI)樹脂係指藉下述製備的高耐熱性樹脂,經由芳香族二酐與芳香族二胺或芳香族二異氰酸酯之溶液聚合而獲得聚醯胺酸衍生物,及然後,聚醯胺酸衍生物於高溫進行環閉合及脫水而將其醯亞胺化。 In short, polyimine (PI) resin refers to a high heat resistant resin prepared by the following method, and a polyglycine derivative is obtained by solution polymerization of an aromatic dianhydride with an aromatic diamine or an aromatic diisocyanate. And then, the poly-proline derivative is subjected to ring closure and dehydration at a high temperature to imidize the oxime.

聚醯亞胺樹脂為不可溶性且不可熔性的超高耐熱樹脂。由於就抗熱氧化性、耐熱性、抗輻射性、低溫特性、及化學品抗性而言具有優異特性故,已經寬廣用於多種工業,例如,作為於汽車、航空、及太空領域使用的先進耐熱性材料,及作為用於介電被覆層、被覆膜、及半導體及TFT-LCD用的電極鈍化膜的電子材料。 Polyimine resins are ultra-high heat resistant resins that are insoluble and infusible. It has been widely used in a variety of industries due to its excellent properties in terms of resistance to thermal oxidation, heat resistance, radiation resistance, low temperature properties, and chemical resistance, for example, as advanced in automotive, aerospace, and space applications. A heat resistant material and an electronic material used as a dielectric coating layer, a coating film, and an electrode passivation film for a semiconductor and a TFT-LCD.

近年來,隨著高資訊社會中要求電子裝置儲存大量資訊且快速地處理與傳輸此等資訊,用在此等裝置的聚醯亞胺樹脂也需具有高效能,特別具有低介電常數及低耗散因數作為期望的電氣性質以便因應高頻率。 In recent years, with the high information society requiring electronic devices to store large amounts of information and to process and transmit such information quickly, the polyimine resins used in such devices also need to have high performance, especially low dielectric constant and low. The dissipation factor is taken as the desired electrical property in order to respond to high frequencies.

提出降低聚醯亞胺樹脂的介電常數之意圖。舉例言之,於日本專利公開案第2000-44719號中,親水性聚合物分散於聚醯亞胺樹脂前驅物,其可溶解於有機溶劑,該親水性聚合物藉燒結或藉溶劑萃取去除而於該聚醯亞胺樹脂前驅物內形成孔隙,藉此製造多孔質聚醯亞胺樹脂。於其中孔隙係藉去除親水性聚合物而生成的此種方法中,當孔隙形成時,理想上其中該親水性聚合物分散且分開於該聚醯亞胺樹脂前驅物中的該微結構維持不變。然而,於該親水性聚合物係藉燒結或藉溶劑萃取而去除之後,當孔隙係藉醯亞胺化形成時,孔隙將變平坦化或堵塞,使得孔隙度低於理想值,結果導致介電常數的減低不充分。 The intention of lowering the dielectric constant of the polyimide resin is proposed. For example, in Japanese Patent Laid-Open Publication No. 2000-44719, a hydrophilic polymer is dispersed in a polyimide precursor resin which is soluble in an organic solvent which is removed by sintering or solvent extraction. A pore is formed in the polyimide precursor of the polyimide to thereby produce a porous polyimide resin. In the method in which the pores are formed by removing the hydrophilic polymer, when the pores are formed, it is desirable that the microstructure in which the hydrophilic polymer is dispersed and separated from the precursor of the polyimide resin is not maintained. change. However, after the hydrophilic polymer is removed by sintering or solvent extraction, when the pores are formed by imidization, the pores will be flattened or clogged, causing the porosity to be lower than the ideal value, resulting in dielectric The reduction in the constant is not sufficient.

韓國專利案第1299652號揭示於可撓性金屬層合物之製備中使用含氟聚合物粒子之方法。然而,該等含氟聚合物粒子於製備過程期間未能良好分散。 Korean Patent No. 1299652 discloses a method of using fluoropolymer particles in the preparation of a flexible metal laminate. However, the fluoropolymer particles did not disperse well during the preparation process.

為了解決前述問題,發明人藉發展一種用於經由採用多孔質粒子以實現空氣的電氣特性而具有比較習知聚醯亞胺膜的介電常數更低的介電常數之聚醯亞胺膜之製備方法而完成了本發明。本發明也改良於聚醯亞胺膜之製備中多孔質粒子的分散及澱積現象。 In order to solve the aforementioned problems, the inventors have developed a method for preparing a polyimine film having a lower dielectric constant of a dielectric constant than a conventional polyimide film by using porous particles to achieve electrical characteristics of air. The present invention has been completed. The present invention is also improved in the dispersion and deposition of porous particles in the preparation of a polyimide film.

發明概要 Summary of invention

本發明之目的係提出一種用於藉由使用多孔質粒子來製備聚醯亞胺之方法及藉該方法製造的具有低介電常數之聚醯亞胺膜。 SUMMARY OF THE INVENTION The object of the present invention is to provide a process for preparing a polyimine by using a porous particle and a polyimide film having a low dielectric constant produced by the method.

本發明提出一種用來製備聚醯亞胺膜之方法,包含:1)製備聚醯亞胺前驅物;2)將該聚醯亞胺前驅物與含多孔質粒子的醯亞胺化試劑混合而形成凝膠膜;及3)加熱處理該凝膠膜以將其醯亞胺化, 其中該等多孔質粒子具有10微米或以下的平均直徑及相對於該等多孔質粒子的材料本身之真密度(或粒子密度)為95%或以下的真密度。 The invention provides a method for preparing a polyimide film comprising: 1) preparing a polyimide precursor; 2) mixing the polyimide precursor with a ruthenium reagent containing a porous particle; Forming a gel film; and 3) heat treating the gel film to imidize the ruthenium thereof, Wherein the porous particles have an average diameter of 10 μm or less and a true density (or particle density) of 95% or less with respect to the material of the porous particles themselves.

本發明也提出一種具有多孔質粒子的聚醯亞胺膜,其中該等多孔質粒子具有10微米或以下的平均直徑及相對於該等多孔質粒子的材料本身之真密度為95%或以下的真密度。 The present invention also provides a polyimide film having porous particles having an average diameter of 10 μm or less and a true density of 95% or less with respect to the material of the porous particles themselves. True density.

依據本發明,使用多孔質粒子可製造具有極低介電常數的聚醯亞胺膜,因此可優異地用於電子裝置的內部絕緣體、減震材料、及電路板。 According to the present invention, a porous polyimide particle can be used to produce a polyimide film having an extremely low dielectric constant, and thus can be excellently used for an internal insulator of an electronic device, a shock absorbing material, and a circuit board.

圖1為依據本發明之聚醯亞胺膜的橫剖面之掃描電子顯微術(SEM)照片。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a scanning electron micrograph (SEM) photograph of a cross section of a polyimide film according to the present invention.

圖2為顯示於其中多孔質粒子係分散於依據本發明之聚醯亞胺膜的表面上的狀態之SEM照片。 Fig. 2 is a SEM photograph showing a state in which a porous particle daughter system is dispersed on the surface of a polyimide film according to the present invention.

圖3為顯示圖2中之該等粒子的狀態之放大SEM照片。 Figure 3 is an enlarged SEM photograph showing the state of the particles in Figure 2.

較佳實施例之詳細說明 Detailed description of the preferred embodiment

本發明提出一種用來製備聚醯亞胺膜之方法,該方法包含:1)製備聚醯亞胺前驅物;2)將該聚醯亞胺前驅物與含多孔質粒子的醯亞胺化試劑混合而形成凝膠膜;3)加熱處理該凝膠膜以將其醯亞胺化,其中該等多孔質粒子具有10微米或以下的平均直徑及相對於該等多孔質粒子的材料本身之真密度為95%或以下的真密度。 The invention provides a method for preparing a polyimide film, which comprises: 1) preparing a polyimide precursor; 2) using the polyimide precursor with a ruthenium reagent containing porous particles Mixing to form a gel film; 3) heat treating the gel film to imidize the ruthenium thereof, wherein the porous particles have an average diameter of 10 μm or less and true to the material of the porous particles themselves A true density of 95% or less.

用來製備依據本發明之聚醯亞胺膜之方法包含製備聚醯亞胺前驅物。 The method for preparing a polyimide film according to the present invention comprises preparing a polyimide precursor.

於本發明中使用的聚醯亞胺前驅物可以是藉其醯亞胺化而變成聚醯亞胺樹脂的任何物質。舉例言之,可以是藉習知方法製造的聚醯胺酸,於其中酸二酐成分與二胺成分係於有機溶劑之存在下共聚合。 The polyimine precursor used in the present invention may be any substance which becomes a polyimine resin by its imidization. For example, it may be a polyamic acid produced by a conventional method in which an acid dianhydride component and a diamine component are copolymerized in the presence of an organic solvent.

酸二酐成分及二胺成分各自可合宜地選自於習用於聚醯胺酸的製造者。 The acid dianhydride component and the diamine component are each suitably selected from those conventionally used in the manufacture of polyaminic acid.

酸二酐成分之實例可包括,但非限制性,聯苯四羧酸二酐或其衍生物、均苯四酸二酐(PMDA)、3,3’,4,4’-二苯甲酮四羧酸酐、及對-伸苯基-貳-偏苯三酸二酐。 Examples of the acid dianhydride component may include, but are not limited to, biphenyltetracarboxylic dianhydride or a derivative thereof, pyromellitic dianhydride (PMDA), 3,3',4,4'-benzophenone Tetracarboxylic anhydride, and p-phenyl-indole-trimellitic dianhydride.

二胺成分之實例可包括,但非限制性,對-伸苯基二胺(pPDA)、二胺基苯基醚、鄰-伸苯基二胺、間-伸苯基二胺、4,4-二胺基二苯基醚(ODA)、3,4-二胺基二苯基醚、及2,4-二胺基二苯基醚。 Examples of the diamine component may include, but are not limited to, p-phenylenediamine (pPDA), diaminophenyl ether, o-phenylenediamine, m-phenylenediamine, 4,4. - Diaminodiphenyl ether (ODA), 3,4-diaminodiphenyl ether, and 2,4-diaminodiphenyl ether.

酸二酐成分與二胺成分可以1:0.9至1:1.1之莫耳比混合。 The acid dianhydride component and the diamine component may be mixed in a molar ratio of 1:0.9 to 1:1.1.

有機溶劑之實例可包括,但非限制性,N,N’-二甲基甲醯胺(DMF)、N,N’-二甲基乙醯胺(DMAc)、及N-甲基-吡咯啶酮(NMP)。 Examples of the organic solvent may include, but are not limited to, N,N'-dimethylformamide (DMF), N,N'-dimethylacetamide (DMAc), and N-methyl-pyrrolidine. Ketone (NMP).

用來製備依據本發明之聚醯亞胺膜之方法包含將該聚醯亞胺前驅物與含多孔質粒子的醯亞胺化試劑混合而形成凝膠膜。 The method for preparing a polyimine film according to the present invention comprises mixing the polyimine precursor with a hydrazide-containing reagent containing a porous particle to form a gel film.

首先,醯亞胺化試劑與聚醯亞胺樹脂亦即聚醯胺酸均勻混合,及多孔質粒子均勻地分散且混合於其中,而製造用於醯亞胺化之樹脂。 First, a ruthenium imidization reagent is uniformly mixed with a polyimine resin, that is, poly-proline, and a porous particle is uniformly dispersed and mixed therein to produce a resin for quinone imidization.

醯亞胺化試劑可以是常用於化學固化的任何物質。醯亞胺化試劑可以是例如選自於由下列所組成的群組:脫水劑、催化劑、極性有機溶劑、及其組合。較佳地,醯亞胺化試劑可以是脫水劑、催化劑、與極性有機溶劑之混合液。 The quinone imidization reagent can be any material commonly used for chemical curing. The guanidine imidization reagent can be, for example, selected from the group consisting of a dehydrating agent, a catalyst, a polar organic solvent, and combinations thereof. Preferably, the hydrazide reagent may be a mixture of a dehydrating agent, a catalyst, and a polar organic solvent.

更明確言之,醯亞胺化試劑可以是包含下列之混合液:脫水劑諸如乙酐;催化劑諸如選自於由吡啶、β-甲基吡啶、異喹啉、及其混合物所組成的群組;及極性有機溶劑選自於由N-甲基-吡咯啶酮、二甲基甲醯胺、二甲基乙 醯胺、及其混合物所組成的群組。 More specifically, the guanidine imidization reagent may be a mixture comprising: a dehydrating agent such as acetic anhydride; and a catalyst such as selected from the group consisting of pyridine, β-methylpyridine, isoquinoline, and mixtures thereof. And the polar organic solvent is selected from N-methyl-pyrrolidone, dimethylformamide, dimethyl a group of indoleamines, and mixtures thereof.

以100份重量比聚醯亞胺前驅物為基準,醯亞胺化試劑可以30至70份重量比,較佳地40至55份重量比之數量使用。醯亞胺化試劑之用量可取決於聚醯亞胺前驅物之類型及欲形成的聚醯亞胺膜之厚度等而改變。 The quinone imidization reagent may be used in an amount of from 30 to 70 parts by weight, preferably from 40 to 55 parts by weight, based on 100 parts by weight of the polyimine precursor. The amount of the quinone imidization reagent may vary depending on the type of the polyimide precursor, the thickness of the polyimide film to be formed, and the like.

多孔質粒子可具有10微米或以下,較佳地1至10微米,或1至7微米,或2至5微米之平均直徑。 The porous particles may have an average diameter of 10 microns or less, preferably 1 to 10 microns, or 1 to 7 microns, or 2 to 5 microns.

又,多孔質粒子可具有,相對於組成不包含孔隙的該等多孔質粒子之材料本身的真密度,95%或以下,較佳地30%至95%,更佳地50%至90%的真密度。 Further, the porous particles may have a true density of 95% or less, preferably 30% to 95%, more preferably 50% to 90%, relative to the material itself of the porous particles which do not contain pores. True density.

「真密度」一詞於此處使用係指計算為一粒子的每單位體積之重量的該粒子本身之密度。粒子之「材料本身」一詞係指組成該等粒子其中不存在有孔隙的材料。 The term "true density" as used herein refers to the density of the particles themselves calculated as the weight per unit volume of a particle. The term "material itself" of particles refers to the materials that make up the particles in which no voids are present.

以膜之總重為基準,該等多孔質粒子可占2至30重量%,較佳地5至20重量%,或例如,5至10重量%之數量。若該等多孔質粒子之數量為30重量%或以下,則聚醯亞胺膜之機械性質將不會受損。若該等多孔質粒子之數量為2重量%或以上,則聚醯亞胺膜之介電常數可能減低。 The porous particles may comprise from 2 to 30% by weight, preferably from 5 to 20% by weight, or, for example, from 5 to 10% by weight, based on the total weight of the film. If the amount of the porous particles is 30% by weight or less, the mechanical properties of the polyimide film will not be impaired. If the amount of the porous particles is 2% by weight or more, the dielectric constant of the polyimide film may be lowered.

多孔質粒子為具有微孔的粒子,其可為空心或介孔性粒子,及係選自於由二氧化矽、氧化鋁、二氧化鈦、沸石、及其混合物所組成的群組。空心二氧化矽可為較佳。 The porous particles are particles having micropores, which may be hollow or mesoporous particles, and are selected from the group consisting of ceria, alumina, titania, zeolites, and mixtures thereof. Hollow ceria can be preferred.

多孔質粒子可就此添加。又,因較佳地多孔質粒子係均勻地分散及混合於用於醯亞胺化之樹脂故,多孔質粒子可分散於極性有機溶劑及以分散液或膠體形式添加。 Porous particles can be added as such. Further, since the porous particles are preferably uniformly dispersed and mixed in the resin for quinone imidization, the porous particles can be dispersed in a polar organic solvent and added as a dispersion or a colloid.

然後,醯亞胺化試劑均勻混合入聚醯胺酸內,及多孔質粒子係均勻地分散及混合於其中。然後,該用於醯亞胺化之樹脂可成形為凝膠膜。 Then, the hydrazide reagent is uniformly mixed into the polyaminic acid, and the porous particle system is uniformly dispersed and mixed therein. Then, the resin for oxime imidization can be formed into a gel film.

更明確言之,該用於醯亞胺化之樹脂可施用至撐體上(例如,不鏽鋼板、玻璃板、鋁箔、循環式不鏽鋼帶、或不鏽鋼轉鼓等)及然後接受第一加熱處理及乾燥,藉此製造部分經化學方式醯亞胺化之凝膠膜。 More specifically, the resin for hydrazide can be applied to a support (for example, a stainless steel plate, a glass plate, an aluminum foil, a circulating stainless steel belt, or a stainless steel drum, etc.) and then subjected to a first heat treatment and Drying, thereby producing a partially chemically imidized gel film.

用於部分醯亞胺化的第一加熱處理可於100℃至200℃之溫度進行歷時5至15分鐘。 The first heat treatment for partial oxime imidization can be carried out at a temperature of from 100 ° C to 200 ° C for 5 to 15 minutes.

用來製備依據本發明之聚醯亞胺膜之方法包含加熱處理凝膠膜以將其醯亞胺化。 The method for preparing a polyimide film according to the present invention comprises heat-treating a gel film to imidize its oxime.

然後,如上製備的部分經化學方式醯亞胺化之凝膠膜可自撐體移除,及接受第二加熱處理用於其完全醯亞胺化。 Then, the partially chemically imidized gel film prepared as above can be removed from the support and subjected to a second heat treatment for its complete oxime imidization.

用於完全醯亞胺化的第二加熱處理可於250℃至850℃之溫度進行歷時5至25分鐘。第二加熱處理較佳地係於恆定張力下進行以消除於薄膜生成期間已經產生的內部殘餘應力。 The second heat treatment for complete hydrazine imidization can be carried out at a temperature of from 250 ° C to 850 ° C for 5 to 25 minutes. The second heat treatment is preferably carried out under constant tension to eliminate internal residual stress that has been generated during film formation.

依據本發明之一實施例,本發明提出一種用於聚醯亞胺膜之製備之方法,該方法包含:製備聚醯胺酸作為聚醯亞胺前驅物;混合該聚醯胺酸與醯亞胺化試劑,多孔質粒子均勻地分散於其中,而獲得用於醯亞胺化之樹脂;將該用於醯亞胺化之樹脂施用至撐體上而形成凝膠膜;接著為該凝膠膜之第一加熱處理及乾燥;及將該凝膠膜接受 第二加熱處理而製造該聚醯亞胺膜,其中該等多孔質粒子具有10微米或以下的平均直徑及相對於該等多孔質粒子的材料本身之真密度為95%或以下的真密度。 According to an embodiment of the present invention, the present invention provides a method for preparing a polyimide film, the method comprising: preparing poly-proline as a polyimide precursor; mixing the polyamic acid with the ruthenium An aminating agent in which a porous particle is uniformly dispersed to obtain a resin for quinone imidization; the resin for quinone imidization is applied to a support to form a gel film; followed by the gel First heat treatment and drying of the film; and accepting the gel film The polyimine film is produced by a second heat treatment, wherein the porous particles have an average diameter of 10 μm or less and a true density of 95% or less with respect to the material itself of the porous particles.

同時,本發明提出一種具有多孔質粒子的聚醯亞胺膜,其中該等多孔質粒子具有10微米或以下的平均直徑及相對於該等多孔質粒子的材料本身之真密度為95%或以下的真密度。 Meanwhile, the present invention provides a polyimide film having porous particles having an average diameter of 10 μm or less and a true density of 95% or less with respect to the material of the porous particles themselves. True density.

更明確言之,包含多孔質粒子的聚醯亞胺膜可以是得自用於聚醯亞胺化之樹脂的一種聚醯亞胺膜,該用於聚醯亞胺化之樹脂係從聚醯胺酸及含多孔質粒子的醯亞胺化試劑製備,其中該等多孔質粒子具有10微米或以下的平均直徑及相對於該等多孔質粒子的材料本身之真密度為95%或以下的真密度。 More specifically, the polyimine film comprising the porous particles may be a polyimine film obtained from a resin for polyimidization, and the resin for polyamidation is from polyamine. The preparation of an acid and a ruthenium-containing reagent containing a porous particle having an average diameter of 10 μm or less and a true density of 95% or less with respect to the material itself of the porous particles .

依據本發明之聚醯亞胺膜具有薄抵5微米至200微米之厚度。 The polyimide film according to the present invention has a thickness of 5 μm to 200 μm.

又,依據本發明之聚醯亞胺膜具有於1GHz為3.0或以下的介電常數,較佳地,2.0至2.9的低介電常數,及具有低於0.002,較佳地,0.0005至0.001的耗散因數。如此,依據本發明之聚醯亞胺膜可優異地用於電子裝置的內部絕緣體、減震材料、及電路板。 Further, the polyimide film according to the present invention has a dielectric constant of 3.0 or less at 1 GHz, preferably a low dielectric constant of 2.0 to 2.9, and has a dielectric constant of less than 0.002, preferably 0.0005 to 0.001. Dissipation factor. Thus, the polyimide film according to the present invention can be excellently used for internal insulators, shock absorbing materials, and circuit boards of electronic devices.

發明模式 Invention mode

後文中將藉參照實施例以細節描述本發明。下列實施例意圖進一步例示本發明而非限制其範圍。 The invention will be described in detail below with reference to the embodiments. The following examples are intended to further illustrate the invention and not to limit its scope.

[製備例] [Preparation example] 製備例1:聚醯胺酸溶液之製備 Preparation Example 1: Preparation of Polyproline Solution

320克二甲基甲醯胺(DMF)進給至0.5升反應器內,溫度設定於20℃。然後27.59克二胺基二苯基醚(ODA)添加至其中及溶解。其後,20.03克均苯四甲酸二酐(PMDA)添加至其中兩次及溶解。當溶解完成時,3.97克對-伸苯基二胺(pPDA)添加至反應器及允許其反應30分鐘。然後溶液經取樣而測量其分子量。當反應完成時,反應器溫度升高至30℃,及然後1.00克pPDA添加至其中而將[二胺]:[酸二酐]之莫耳比調整至1:1。一旦原料之添加完成時,允許所得混合物於40℃反應歷時充分時間,例如2小時而獲得聚醯胺酸溶液。 320 g of dimethylformamide (DMF) was fed into a 0.5 liter reactor at a temperature of 20 °C. Then 27.59 g of diaminodiphenyl ether (ODA) was added to it and dissolved. Thereafter, 20.03 g of pyromellitic dianhydride (PMDA) was added thereto twice and dissolved. When the dissolution was completed, 3.97 g of p-phenylenediamine (pPDA) was added to the reactor and allowed to react for 30 minutes. The solution was then sampled to measure its molecular weight. When the reaction was completed, the reactor temperature was raised to 30 ° C, and then 1.00 g of pPDA was added thereto to adjust the molar ratio of [diamine]: [acid dianhydride] to 1:1. Once the addition of the starting materials is complete, the resulting mixture is allowed to react at 40 ° C for a sufficient period of time, for example 2 hours, to obtain a polyaminic acid solution.

製備例2:含多孔質粒子之醯亞胺化試劑之製備(1) Preparation Example 2: Preparation of hydrazine imidation reagent containing porous particles (1)

13.4克空心二氧化矽之分散液(DMF液體混合物含有6%固體含量,空心二氧化矽:商品名VHSN-1000,貝克善鋼公司(BAEKSAN STEEL CO.,LTD.)製造,粒子平均直徑:3微米,及粒子平均孔隙直徑:200奈米)添加至一混合溶液含有2.8克β-甲基吡啶(熔點144℃)作為用於醯亞胺化試劑中之固化催化劑,21.2克乙酐作為脫水劑,及13.4克DMF作為極性有機溶劑,然後該混合物經攪拌而獲得50.8克含多孔質粒子之醯亞胺化試劑。 13.4 g of hollow cerium oxide dispersion (DMF liquid mixture contains 6% solids content, hollow cerium oxide: trade name VHSN-1000, manufactured by BAEKSAN STEEL CO., LTD., average particle diameter: 3 Micron, and average particle diameter of the particles: 200 nm) added to a mixed solution containing 2.8 g of β-methylpyridine (melting point 144 ° C) as a curing catalyst for the ruthenium iodide reagent, 21.2 g of acetic anhydride as a dehydrating agent And 13.4 g of DMF was used as a polar organic solvent, and then the mixture was stirred to obtain 50.8 g of a hydrazide-containing reagent containing a porous particle.

製備例3:含多孔質粒子之醯亞胺化試劑之製備(2) Preparation Example 3: Preparation of hydrazine imidation reagent containing porous particles (2)

26.7克空心二氧化矽之分散液(DMF液體混合物含有6%固體含量,空心二氧化矽:商品名VHSN-1000,貝克善鋼公司製造,粒子平均直徑:6微米,及粒子平均孔隙 直徑:200奈米)添加至一混合溶液含有2.8克β-甲基吡啶(熔點144℃)作為用於醯亞胺化試劑中之固化催化劑,21.2克乙酐作為脫水劑,及0.9克DMF作為極性有機溶劑,然後該混合物經攪拌而獲得51.6克含多孔質粒子之醯亞胺化試劑。 26.7 g of hollow cerium oxide dispersion (DMF liquid mixture contains 6% solids content, hollow cerium oxide: trade name VHSN-1000, manufactured by Baker Steel, average particle diameter: 6 microns, and average particle porosity Diameter: 200 nm) added to a mixed solution containing 2.8 g of β-methylpyridine (melting point 144 ° C) as a curing catalyst for the ruthenium iodide reagent, 21.2 g of acetic anhydride as a dehydrating agent, and 0.9 g of DMF as A polar organic solvent was then stirred to obtain 51.6 g of a hydrazide-containing reagent containing a porous particle.

製備例4:含無孔隙二氧化矽粒子之醯亞胺化試劑之製備(1) Preparation Example 4: Preparation of an oxime imidization reagent containing non-porous ceria particles (1)

13.3克球狀二氧化矽之分散液(DMF液體混合物含有6%固體含量,球狀二氧化矽:商品名KEP-250,日本觸媒公司(NIPPON SHOKUBAI CO.,LTD.)製造,粒子平均直徑:3微米,及無孔隙)添加至一混合溶液含有2.8克β-甲基吡啶(熔點144℃)作為用於醯亞胺化試劑中之固化催化劑,21.2克乙酐作為脫水劑,及13.4克DMF作為極性有機溶劑,然後該混合物經攪拌而獲得50.8克含球狀二氧化矽粒子之醯亞胺化試劑。 13.3 g of spheroidal cerium oxide dispersion (DMF liquid mixture contains 6% solid content, spherical cerium oxide: trade name KEP-250, manufactured by Nippon Catalyst Co., Ltd. (NIPPON SHOKUBAI CO., LTD.), average particle diameter : 3 μm, and no pores) added to a mixed solution containing 2.8 g of β-methylpyridine (melting point 144 ° C) as a curing catalyst for the ruthenium iodide reagent, 21.2 g of acetic anhydride as a dehydrating agent, and 13.4 g DMF was used as a polar organic solvent, and then the mixture was stirred to obtain 50.8 g of a ruthenium imidization reagent containing spherical cerium oxide particles.

製備例5:含無孔隙二氧化矽粒子之醯亞胺化試劑之製備(2) Preparation Example 5: Preparation of ruthenium imidization reagent containing non-porous ceria particles (2)

26.7克球狀二氧化矽之分散液(DMF液體混合物含有6%固體含量,球狀二氧化矽:商品名KEP-250,日本觸媒公司製造,粒子平均直徑:3微米,及無孔隙)添加至一混合溶液含有2.8克β-甲基吡啶(熔點144℃)作為用於醯亞胺化試劑中之固化催化劑,21.2克乙酐作為脫水劑,及0.9克DMF作為極性有機溶劑,然後該混合物經攪拌而獲得51.6克含球狀二氧化矽粒子之醯亞胺化試劑。 26.7 g of spheroidal cerium oxide dispersion (DMF liquid mixture containing 6% solid content, spherical cerium oxide: trade name KEP-250, manufactured by Nippon Shokubai Co., Ltd., average particle diameter: 3 μm, and no pores) added The mixed solution contains 2.8 g of β-methylpyridine (melting point 144 ° C) as a curing catalyst for the hydrazide reagent, 21.2 g of acetic anhydride as a dehydrating agent, and 0.9 g of DMF as a polar organic solvent, and then the mixture 51.6 g of a ruthenium imidization reagent containing spherical cerium oxide particles was obtained by stirring.

製備例6:含無孔隙含氟聚合物粒子之醯亞胺化試劑之 製備 Preparation Example 6: ruthenium imidization reagent containing non-porous fluoropolymer particles preparation

26.7克聚四氟乙烯(PTFE)分散液(大金工業公司(DAIKIN Industries,Ltd.)製造,DMF液體混合物含有6%固體含量,含氟聚合物粒子:平均粒子直徑22微米及無孔隙)添加至一混合溶液含有2.8克異喹啉(熔點242℃)作為用於醯亞胺化試劑中之固化催化劑,21.2克乙酐作為脫水劑,及0.9克DMF作為極性有機溶劑,然後該混合物經攪拌而獲得51.6克含有含氟聚合物粒子之醯亞胺化試劑。 26.7 g of polytetrafluoroethylene (PTFE) dispersion (manufactured by DAIKIN Industries, Ltd., DMF liquid mixture containing 6% solid content, fluoropolymer particles: average particle diameter 22 μm and no pores) added The mixed solution contained 2.8 g of isoquinoline (melting point 242 ° C) as a curing catalyst for the ruthenium iodide, 21.2 g of acetic anhydride as a dehydrating agent, and 0.9 g of DMF as a polar organic solvent, and then the mixture was stirred. 51.6 g of a ruthenium amide containing fluoropolymer particles were obtained.

製備例7:不含粒子之醯亞胺化試劑之製備 Preparation Example 7: Preparation of an imidization reagent containing no particles

3.3克β-甲基吡啶(熔點144℃)作為用於醯亞胺化試劑中之固化催化劑,21.5克乙酐作為脫水劑,及25.2克DMF作為極性有機溶劑,經混合且經攪拌而獲得50克醯亞胺化試劑。 3.3 g of β-methylpyridine (melting point 144 ° C) as a curing catalyst for the ruthenium iodide reagent, 21.5 g of acetic anhydride as a dehydrating agent, and 25.2 g of DMF as a polar organic solvent, mixed and stirred to obtain 50 Azyl imidization reagent.

[實施例] [Examples] 實施例1:其中使用多孔質粒子的聚醯亞胺膜之製備(1) Example 1: Preparation of Polyimine Film Using Porous Particles (1)

100克製備例1獲得的聚醯胺酸聚合溶液與50.8克製備例2獲得的醯亞胺化試劑混合,該混合物施用至不鏽鋼板上及於烤爐內以熱風於120℃乾燥3分鐘而製備凝膠膜。 100 g of the polylysine polymerization solution obtained in Preparation Example 1 was mixed with 50.8 g of the hydrazide reagent obtained in Preparation Example 2, and the mixture was applied to a stainless steel plate and dried in an oven at 120 ° C for 3 minutes with hot air to prepare. Gel film.

如此製備的凝膠膜自不鏽鋼板移開及以框架針銷固定。該凝膠膜固定至其上的該框架於450℃接受加熱處理歷時7分鐘。然後自框架移開該膜,藉此獲得具有25微米平均厚度之聚醯亞胺膜。 The gel film thus prepared was removed from the stainless steel plate and fixed with a frame pin. The frame to which the gel film was fixed was subjected to heat treatment at 450 ° C for 7 minutes. The film was then removed from the frame, thereby obtaining a polyimide film having an average thickness of 25 microns.

如上製備的聚醯亞胺膜之剖面的SEM照片係顯 示於圖1。 The SEM photograph of the cross section of the polyimide film prepared as above Shown in Figure 1.

實施例2:其中使用多孔質粒子的聚醯亞胺膜之製備(2) Example 2: Preparation of a polyimide film using porous particles (2)

重複實施例1之相同程序而獲得具有25微米平均厚度之聚醯亞胺膜,但使用51.6克製備例3獲得的醯亞胺化試劑替代製備例2獲得的醯亞胺化試劑除外。 The same procedure as in Example 1 was repeated to obtain a polyimide film having an average thickness of 25 μm, except that 51.6 g of the oxime imidization reagent obtained in Preparation Example 3 was used instead of the ruthenium reagent obtained in Preparation Example 2.

比較例1:其中使用無孔隙粒子的聚醯亞胺膜之製備(1) Comparative Example 1: Preparation of a polyimide film using non-porous particles (1)

重複實施例1之相同程序而獲得具有25微米平均厚度之聚醯亞胺膜,但使用50.8克製備例4獲得的醯亞胺化試劑替代製備例2獲得的醯亞胺化試劑除外。 The same procedure as in Example 1 was repeated to obtain a polyimide film having an average thickness of 25 μm, except that 50.8 g of the oxime imidization reagent obtained in Preparation Example 4 was used instead of the ruthenium reagent obtained in Preparation Example 2.

比較例2:其中使用無孔隙粒子的聚醯亞胺膜之製備(2) Comparative Example 2: Preparation of a polyimide film using non-porous particles (2)

重複實施例1之相同程序而獲得具有25微米平均厚度之聚醯亞胺膜,但使用51.6克製備例5獲得的醯亞胺化試劑替代製備例2獲得的醯亞胺化試劑除外。 The same procedure as in Example 1 was repeated to obtain a polyimide film having an average thickness of 25 μm, except that 51.6 g of the oxime imidization reagent obtained in Preparation Example 5 was used instead of the ruthenium reagent obtained in Preparation Example 2.

比較例3:其中使用無孔隙含氟聚合物粒子的聚醯亞胺膜之製備 Comparative Example 3: Preparation of a polyimide film in which non-porous fluoropolymer particles were used

重複實施例1之相同程序而獲得具有25微米平均厚度之聚醯亞胺膜,但使用51.6克製備例6獲得的醯亞胺化試劑替代製備例2獲得的醯亞胺化試劑除外。 The same procedure as in Example 1 was repeated to obtain a polyimide film having an average thickness of 25 μm, except that 51.6 g of the quinone imidization reagent obtained in Preparation Example 6 was used instead of the quinone imidization reagent obtained in Preparation Example 2.

比較例4:其中未使用粒子的聚醯亞胺膜之製備 Comparative Example 4: Preparation of a polyimide film in which no particles were used

重複實施例1之相同程序而獲得具有25微米平均厚度之聚醯亞胺膜,但使用50.0克製備例7獲得的醯亞胺化試劑替代製備例2獲得的醯亞胺化試劑除外。 The same procedure as in Example 1 was repeated to obtain a polyimide film having an average thickness of 25 μm, except that 50.0 g of the oxime imidization reagent obtained in Preparation Example 7 was used instead of the ruthenium reagent obtained in Preparation Example 2.

實驗例1:密度比之測量 Experimental Example 1: Measurement of density ratio

於本發明中於聚醯亞胺膜之製備中添加的粒子 之真密度(A)及此等粒子的材料本身之真密度(B)係根據標準(KS M 6020:2010)測定。組成實施例1及2中使用的空心二氧化矽及比較例1及2中使用的球狀二氧化矽的材料之天然二氧化矽的真密度係使用購自日本觸媒公司的產品(型號名稱:KEP-250)測量。 Particles added in the preparation of the polyimide film in the present invention The true density (A) and the true density (B) of the materials of these particles are determined according to the standard (KS M 6020:2010). The true density of the natural cerium oxide constituting the hollow cerium oxide used in Examples 1 and 2 and the spherical cerium oxide used in Comparative Examples 1 and 2 was a product purchased from Nippon Shokubai Co., Ltd. (model name) :KEP-250) Measurement.

然後,多孔質粒子的真密度對材料本身的真密度之比(%)係藉下式1計算,及結果顯示於下表1。 Then, the ratio (%) of the true density of the porous particles to the true density of the material itself was calculated by the following formula 1, and the results are shown in Table 1 below.

[式1]密度比=多孔質粒子的真密度(A)/材料本身的真密度(B)x100% [Formula 1] Density ratio = true density of porous particles (A) / true density of material itself (B) x 100%

實驗例2:多孔質粒子之平均直徑之測量 Experimental Example 2: Measurement of the average diameter of porous particles

本發明中使用的多孔質粒子之平均直徑係使用雷射繞射粒徑分析儀(島津製作所(SHIMADZU Corp.),型號名稱SALD-2201)測量,及測得的多孔質粒子之平均直徑係顯示於下表1。 The average diameter of the porous particles used in the present invention is measured using a laser diffraction particle size analyzer (SHIMADZU Corp., model name SALD-2201), and the average diameter of the measured porous particles is shown. In the following table 1.

實驗例3:膜中粒子含量之測量 Experimental Example 3: Measurement of particle content in a film

於實施例1及2及比較例1至4中製備的聚醯亞胺膜中之粒子含量係透過灰分(ASH)方法測量。於灰分方法中,粒子含量係自膜於坩堝爐內於900℃燃燒3小時後於坩堝爐內剩餘的殘餘物重量進行測量。測得的粒子含量(重量%)係顯示於下表1。 The particle content in the polyimide film prepared in Examples 1 and 2 and Comparative Examples 1 to 4 was measured by an ash (ASH) method. In the ash method, the particle content was measured from the weight of the residue remaining in the crucible after the film was burned at 900 ° C for 3 hours in a crucible furnace. The measured particle content (% by weight) is shown in Table 1 below.

實驗例4:膜中多孔質粒子之分散概況的觀察 Experimental Example 4: Observation of Dispersion Profile of Porous Particles in Membranes

於依據實施例1的聚醯亞胺膜中多孔質粒子之分散概況係使用掃描電子顯微鏡FE-SEM(吉爾(JEOL)製造, 型號名稱:JSM-6700F)觀察及顯示為SEM影像。 The dispersion profile of the porous particles in the polyimide film according to Example 1 was produced using a scanning electron microscope FE-SEM (JEOL). Model name: JSM-6700F) Observed and displayed as SEM image.

本發明之依據實施例1的聚醯亞胺膜之剖面的SEM照片係顯示於圖1。 An SEM photograph of a cross section of the polyimide film according to Example 1 of the present invention is shown in Fig. 1.

又,圖2顯示於聚醯亞胺膜表面上多孔質粒子的分散狀態,及圖3為顯示其放大視圖的照片。 Further, Fig. 2 shows a state in which the porous particles are dispersed on the surface of the polyimide film, and Fig. 3 is a photograph showing an enlarged view thereof.

如圖2中顯示,用於依據本發明之聚醯亞胺膜的多孔質粒子係均勻地分散遍布該膜,指示良好的分散狀態。 As shown in Fig. 2, the porous particle sub-system for the polyimide film according to the present invention was uniformly dispersed throughout the film, indicating a good dispersion state.

實驗例5:介電常數及耗散因數之測量 Experimental Example 5: Measurement of dielectric constant and dissipation factor

於實施例1及2及比較例1至4中製備的聚醯亞胺膜的介電常數及耗散因數係使用得自奇賽技術公司(Keysight Technologies,Inc.)的裂柱介電共振器(SPDR)測定。測得的介電常數及耗散因數係顯示於下表1。 The dielectric constant and dissipation factor of the polyimide films prepared in Examples 1 and 2 and Comparative Examples 1 to 4 were based on a split-substrate dielectric resonator from Keysight Technologies, Inc. (SPDR) assay. The measured dielectric constant and dissipation factor are shown in Table 1 below.

於如上表1中顯示,發現含有多孔質空心二氧化矽粒子的依據實施例1及2的聚醯亞胺膜具有3或以下的低介電常數。 As shown in the above Table 1, it was found that the polyimide film according to Examples 1 and 2 containing porous hollow ceria particles had a low dielectric constant of 3 or less.

又,發現就低介電常數及低耗散因數而言,依據實施例1及2的聚醯亞胺膜具有優異的電氣性質,即便與比較例1至4,其具有大於95%之密度比或含有含氟聚合物粒子或絲毫也不含粒子,比較時亦復如此。據此,此等聚醯亞胺膜適合用於要求低介電常數的電氣/電子裝置及組件諸如印刷電路板的製造。 Further, it was found that the polyimide film according to Examples 1 and 2 has excellent electrical properties in terms of low dielectric constant and low dissipation factor, and even with Comparative Examples 1 to 4, it has a density ratio of more than 95%. It also contains fluoropolymer particles or does not contain particles at all, as is the case. Accordingly, such polyimide films are suitable for use in the manufacture of electrical/electronic devices and components requiring low dielectric constant such as printed circuit boards.

Claims (6)

一種用於聚醯亞胺膜之製備方法,該方法包含:1)製備聚醯亞胺前驅物;2)將該聚醯亞胺前驅物與含多孔質粒子的醯亞胺化試劑混合而形成凝膠膜;及3)加熱處理該凝膠膜以將其醯亞胺化,其中該等多孔質粒子具有10微米或以下的平均直徑及相對於該等多孔質粒子的材料本身之真密度為95%或以下的真密度。 A method for preparing a polyimide film, comprising: 1) preparing a polyimide precursor; 2) mixing the polyimine precursor with a ruthenium reagent containing a porous particle to form a gel film; and 3) heat treating the gel film to imidize the ruthenium, wherein the porous particles have an average diameter of 10 μm or less and a true density of the material itself relative to the porous particles True density of 95% or less. 如請求項1之方法,其中該等多孔質粒子具有1至10微米的平均直徑及相對於該等多孔質粒子的材料本身之真密度為30%至95%的真密度。 The method of claim 1, wherein the porous particles have an average diameter of from 1 to 10 μm and a true density of from 30% to 95% with respect to the material itself of the porous particles. 如請求項1之方法,其中以聚醯亞胺膜之總重為基準,該等多孔質粒子為2至30重量%之用量。 The method of claim 1, wherein the porous particles are used in an amount of from 2 to 30% by weight based on the total weight of the polyimide film. 如請求項1之方法,其中該等多孔質粒子為空心或介孔性粒子且係選自於由二氧化矽、氧化鋁、二氧化鈦、沸石、及其混合物所組成的群組。 The method of claim 1, wherein the porous particles are hollow or mesoporous particles and are selected from the group consisting of cerium oxide, aluminum oxide, titanium dioxide, zeolites, and mixtures thereof. 一種含有多孔質粒子的聚醯亞胺膜,其中該等多孔質粒子具有10微米或以下的平均直徑及相對於該等多孔質粒子的材料本身之真密度為95%或以下的真密度。 A polyimine film comprising porous particles, wherein the porous particles have an average diameter of 10 μm or less and a true density of 95% or less with respect to the material itself of the porous particles. 如請求項5之聚醯亞胺膜,其中該聚醯亞胺膜具有於1GHz為3.0或以下的介電常數。 The polyimine film according to claim 5, wherein the polyimide film has a dielectric constant of 3.0 or less at 1 GHz.
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