TW201623665A - Film forming apparatus - Google Patents

Abstract

The present invention provides a film deposition system that has high productivity. A plurality of rotational and revolutionary jigs (211) to (215) are tilted greatly, and a front side and a rear side of each pair of adjacent ones of (211) to (215) are overlapped. When the rotational and revolutionary jigs (211) to (215) are rotated around a main rotational axis (12) while each of the rotational and revolutionary jigs (211) to (215) is rotated around a jig rotational axis (29), film deposition material particles ejected from a film deposition source (15) reach substrates (26) held by the rotational and revolutionary jigs (211) to (215) to form thin films. Since the spaces between the rotational and revolutionary jigs (211) to (215) are small, the efficiency of use of the film deposition material (15b) is improved.

Description

Film forming device

The present invention relates to the technical field of a film forming apparatus for forming a film in a vacuum atmosphere, and more particularly to the technical field of a film forming apparatus using a self-revolving jig.

When a thin film is formed in a vacuum atmosphere, there is a one-piece film forming apparatus that forms a film on a substrate one at a time, and a batch type film forming apparatus that forms a plurality of substrates together, and batches In the film forming apparatus of the secondary type, it is known that a plurality of substrates are mounted on the transfer jig, and a film is formed while rotating from the revolving jig.

The reference numeral 102 in Fig. 10 is a vacuum film forming apparatus of the prior art, and a circular rail 116 fixed to the vacuum chamber 111 and a plurality (here, three units) are disposed inside the vacuum chamber 111. The self-revolving jigs 121 ₁ to 121 ₃ and the film forming source 115.

The self-revolving jigs 121 ₁ to 121 ₃ are flat disc-shaped or dome-shaped shapes that are curved like a part of a sphere, as shown in Fig. 11, on one side (concave in the case of bending), a plurality of pieces are mounted The film formation object is also the substrate 126.

A rotating shaft is disposed on a side of the opposite side of the respective turning jigs 121 ₁ to 121 ₃ (a convex surface in the case of bending), in which one end of the rotating shaft 127 is fixed at the center position, and in the other end, A walking wheel 122 is provided.

The traveling wheel 122 is disposed on the circular orbit 116, and is rotated along the center of the circular orbit 116 around the center of the circular orbit 116 by a moving device (not shown). When the force is applied, the traveling wheel 122 is rotated while rolling on the circular rail 116.

When the traveling wheel 122 rotates, the rotating shaft 127 and the self-propelling jigs 121 ₁ to 121 ₃ rotate around the central axis thereof.

When the traveling wheel 122 is traveling, the self-revolving jigs 121 ₁ to 121 ₃ are rotated around the center point of the traveling wheel 122.

When the rotation of the revolving jigs 121 ₁ to 121 ₃ is referred to as a rotation, the revolving jigs 121 ₁ to 121 ₃ are revolved while rotating.

The film formation source 115 is disposed below the rotation jigs 121 ₁ to 121 ₃ and has a container 115a and a film formation material 115b disposed inside the container 115a.

The vacuum evacuation device 117 is connected to the vacuum chamber 111, and after evacuating the inside of the vacuum chamber 111 to a vacuum atmosphere by the vacuum exhaust device 117, the film forming material 115b is heated by a heating device (not shown). If the vapor of the film forming material 115b occurs, the vapor, It is discharged from the film formation source 115 toward the inside of the vacuum chamber 111.

The plurality of substrates 126 are disposed in the respective revolution detecting jigs 121 ₁ to 121 _{3 so} as to face the film forming source 115.

The revolving jigs 121 ₁ to 121 ₃ are disposed separately from each other, and the substrate 126 is rotated from the film forming source 115 while being rotated and rotated together with the revolving jigs 121 ₁ to 121 ₃ . The vapor reaches the surface of the substrate 126 to grow a uniform film.

The self-revolving jigs 121 ₁ to 121 ₃ are flat disks or curved disks, and it is assumed that, as shown in Fig. 12, even if the outer circumferences of the adjacent self-revolving jigs 121 ₁ to 121 ₃ are in contact with each other, between the outer periphery of the outer periphery of the revolution from ₁₂₁₁ to 121 jig _3, and the revolution from the adjoining jig 121 ₁ to _1213, and will form a gap.

In the gap, the plurality of the self-revolving jigs 121 ₁ to 121 ₃ have a gap portion 100a surrounded by the outer circumference of the vicinity of the apex of each of the revolving jigs 121 ₁ to 121 ₃ , and are formed adjacent to each other. The gap portions 100b1 to 100b3 between the outer circumferences of the two self-propelling jigs 121 ₁ to 121 ₃ are partially discharged from the film formation source 115 through the gap portions 100a, 100b1 to 100b3, and do not contribute to film formation. The ground is consumed.

In the film forming apparatus using the self-propelling jig, for example, JP-A-57-70274 and JP-A-2002-164303, a technique for forming a film without a gap is, for example, JP-A-2012 Japanese Patent No. 224878, which is a technique for improving a device using a self-reducing jig, and is, for example, Japanese Patent No. 2762948, but has not been found. A film forming device for reducing the gap portion of the self-revolving jig.

[Patent Literature]

[Patent Document 1] Japanese Laid-Open Patent Publication No. SHO 57-70274

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2002-164303

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2012-224878

[Patent Document 4] Japanese Patent No. 2762948

The present invention has been made in an effort to solve the above problems of the prior art, and an object thereof is to provide a film forming apparatus which can reduce a gap portion and effectively utilize a film forming material.

In order to solve the above problems, the present invention includes a vacuum chamber, a circular orbit disposed in the vacuum chamber, and a film formation source for discharging the film forming material particles into the vacuum chamber, and a plurality of film formation sources. a plurality of self-revolving jigs of the substrate, a plurality of traveling wheels disposed on the circular orbit, and a jig mounting device for holding the plurality of self-revolving jigs, and the jig mounting device about the main axis of rotation a motor that rotates around, and a plurality of the self-revolving jigs are arranged in a circular shape along the circular orbit along the circular orbit, and the self-revolving jig is different from the other Walking wheel connection, the aforementioned fixture When the mounting device is rotated by the motor, the self-revolving jig is rotated around the main rotation axis by the rotation of the jig mounting device, and is separately connected to the self-revolving jig. The traveling wheel travels on the circular orbit while rotating around the axis of rotation of the wheel. The self-revolving jig is rotated about the rotation axis of the jig by the rotation of the traveling wheel, and is disposed on the traveling wheel. The substrate of the self-revolving jig is formed by adhering the film-forming material particles to the surface while rotating and rotating together with the self-revolving jig, wherein the self-revolving jig is each The first head side and the rear side side of the direction of the revolving movement are disposed so as to overlap with the adjacent other self-revolving jigs, and the portion of the self-revolving jig that overlaps the front side and the rear end side overlap Any one of the sides is located closer to the aforementioned main axis of rotation than the other overlapping self-revolving jigs of the overlap, and the other side is The other from the revolution in the fixture than the overlapping farther from the main axis of rotation.

Further, in the film forming apparatus of the present invention, the wheel rotation axis and the jig rotation axis are non-parallel.

Further, in the film forming apparatus of the present invention, the wheel shaft that is rotated about the wheel rotation axis by the rotation of the traveling wheel is fixed to the traveling wheel, and the jig shaft that rotates around the rotation axis of the jig is In the self-revolving jig, the driven gear provided on the wheel axle and the driven gear provided on the jig shaft are meshed, and the rotation of the movable gear is transmitted to the driven gear, and the driven gear is The jig shaft and the self-revolving jig are rotated.

Further, in the film forming apparatus of the present invention, the self-revolving jig is provided in five or more.

The use efficiency of the film forming material can be improved.

Even if the apparatus is not enlarged, the number of film substrates that can be formed by one film forming process can be increased.

Even if the diameter of the circular orbit is not increased, the inclination of the self-propelling jig can be increased and the incident angle of the particles of the film forming material can be reduced.

Since the incident angle is small, the film-forming material particles can reach the deep holes and the bottom surface of the groove formed on the surface of the substrate.

2‧‧‧ film forming device

5‧‧‧film source

11‧‧‧vacuum tank

12‧‧‧ main axis of rotation

13‧‧‧Motor

15‧‧‧film source

15a‧‧‧heating container

15b‧‧‧film forming materials

16‧‧‧round track

20‧‧‧ fixture mounting device

21, 21 ₁ ~ 21 ₆ ‧ ‧ self-revolution fixture

22‧‧‧Walking wheels

25‧‧‧Substrate retention department

26‧‧‧Substrate

27‧‧‧ Wheel axle

28‧‧‧ Wheel rotation axis

29‧‧‧ Fixture rotation axis

30‧‧‧天板

31‧‧‧ wrist

32‧‧‧ frame

33‧‧‧ Bridge

34‧‧‧Main rotation axis

36‧‧‧Active gear

37‧‧‧Activity gear

38‧‧‧ fixture shaft

100a, 100b1~100b3‧‧‧ gap part

111‧‧‧vacuum tank

115‧‧‧film source

115a‧‧‧ Container

115b‧‧‧film forming materials

116‧‧‧round track

117‧‧‧Vacuum exhaust

121 ₁ ~121 ₃ ‧‧‧From the revolutionary fixture

122‧‧‧Walking wheels

126‧‧‧Substrate

127‧‧‧Rotary axis

[Fig. 1] A film forming apparatus of an example of the present invention

[Fig. 2] A perspective view of the fixture mounting device

[Fig. 3] (a) and (b): a diagram for explaining the inside of the casing; (a): the case of the self-revolving jig of the disk, and (b) the case of the dome-shaped self-revolving jig.

[Fig. 4] A diagram for explaining the position of the substrate placed on the self-propelled jig

[Fig. 5] A diagram for explaining the arrangement of six self-revolving jigs

[Fig. 6] (a) and (b): A diagram for explaining a state in which a 4-inch substrate is placed on a self-propelled jig, (a): a plan view, and (b) a perspective view.

[Fig. 7] (a), (b): Description of the placement of a 5-inch substrate in self Diagram for the state of the revolutionary fixture, (a): top view, (b): perspective view

[Fig. 8] (a) and (b): A diagram for explaining a state in which a 6-inch substrate is placed on a self-propelled jig, (a): a plan view, and (b) a perspective view.

[Fig. 9] (a) and (b): A diagram for explaining a state in which an 8-inch substrate is placed on a self-propelled jig, (a): a plan view, and (b) a perspective view.

[Fig. 10] A film forming apparatus of the prior art

[Fig. 11] A diagram for explaining the state in which the substrate is placed in the state of the self-revolving jig

[Fig. 12] A diagram showing the state when the self-revolving jig is in close contact

<Example>

Fig. 1 is a view showing a film forming apparatus 2 of the present invention.

The film forming apparatus 2 has a vacuum chamber 11, and a circular rail 16 is disposed inside the vacuum chamber 11, and is fixed to the vacuum chamber 11.

Inside the vacuum chamber 11, five or more, that is, a plurality of (in the first figure, five) self-propelling jigs 21 ₁ to 21 ₅ are disposed, and each of the revolving jigs 21 ₁ to 21 ₅ The jig mounting device 20 is held.

The jig mounting device 20 is as shown in Fig. 2. The jig attachment device 20 is a main rotating shaft 34 having a top plate that is airtightly inserted into the vacuum chamber 11, and a top plate 30 and an upper portion that are disposed inside the vacuum chamber 11 and are attached to the lower end of the main rotating shaft 34. It is a wrist 31 provided on the top plate 30 and a frame 32 provided on the lower portion of the wrist 31.

In this example, the wrist 31 is fixed to the top 30 by the same number as the self-revolving jigs 21 ₁ to 21 ₅ .

The top plate 30 has a bridge plate 33 extending from the disk-shaped portion toward the center of the disk, and the lower end of the main rotating shaft 34 is fixed to the bridge plate 33 at the center of the disk.

The jig attachment device 20 is suspended inside the vacuum chamber 11 by the main rotating shaft 34.

The self-propelling jig 21 ₁ ~ 21 ₅ is a cross-sectional view located below the sky plate 30, as shown in Fig. 3 (a), although it is a disk-shaped shape or a sectional view as shown in Fig. 3 (b). The dome-shaped shape in which the central portion of the sphere is curved.

In each of the revolving jigs 21 ₁ to 21 ₅ , one end of a rod-shaped jig shaft 38 is provided at a center position of the revolving jigs 21 ₁ to 21 ₅ .

The central axis of the jig 38 is also the jig axis 29, which is the center position of the self-propelling jigs 21 ₁ to 21 ₅ , and the jig axis 38 is rotated about the jig axis 29 of the jig. The turning jig 21 ₁ ~ 21 ₅ also rotates around the jig axis 29 of the jig.

In this example, the jig axis 29 of the jig shaft 38 is perpendicular to the portion of the revolving jig 21 ₁ to 21 ₅ where the jig axis 38 is provided, and on the respective revolving jigs 21 ₁ to 21 ₅ Any position is rotated in a plane perpendicular to the axis of rotation 29 of the jig.

The other end of the jig 38 is inserted into the inside of the frame 32, and the weight of each of the revolving jigs 21 ₁ to 21 ₅ is supported by the jig 38 and the frame 32 by the jig mounting device 20. .

On the circular rail 16, a traveling wheel 22 whose one end is attached to the wheel axle 27 is disposed.

The other end of the wheel axle 27 is inserted into the frame 32, and the traveling wheel 22 is transmitted through the wheel axle 27 and the frame 32, and is pressed against the circular rail 16 by the jig attachment device 20.

The jig shaft 38 and the wheel axle 27 are rotatable with respect to the frame body 32, and the traveling wheel 22 is rotatable while being rolled while rolling on the circular rail 16.

A motor 13 is disposed outside the vacuum chamber 11.

The motor 13 is attached to the upper portion of the main rotating shaft 34, and rotates the main rotating shaft 34 around the central axis of the main rotating shaft 34, that is, the main rotating shaft 12.

The circular track 16 is laid in a circular shape, and the main axis of rotation 12 is a center point of the circular track 16 that passes perpendicularly to the plane of the circular track 16 position.

The wheel axle 27 and the traveling wheel 22 rotate about the same and common central axis, that is, the wheel axis of rotation 28, and the wheel axis of rotation 28 intersects the main axis of rotation 12.

Therefore, when the motor 13 is operated and the main rotating shaft 34 is rotated about the main rotation axis 12, the respective rotation jigs 21 ₁ to 21 ₅ are rotated around the main rotation axis 12 .

At this time, the traveling wheel 22 is in contact with the circular orbit 16 and is pressed against the circular orbit 16 by the revolving movement of the respective revolving jigs 21 ₁ to 21 ₅ so that the traveling wheels 22 are not on the circular orbit 16 Sliding scrolling. In other words, each of the traveling wheels 22 rotates around the main axis of rotation 12 along the circular orbit 16 while rotating around the wheel rotation axis 28 .

Further, the traveling wheel 22 may be rotated about the main rotation axis 12 and rotated about the wheel rotation axis 28 of the wheel axle 27, and the circular rail 16 may be vertical or inclined. .

The movable gear 36 is provided in a portion located inside the casing 32 of the wheel axle 27, and a driven gear 37 is provided in a portion of the casing 32 located inside the jig shaft 38.

The active gear 36 rotates around the wheel rotation axis 28 of the traveling wheel 22 and the wheel axle 27, and the driven gear 37 rotates around the jig rotation axis 29 of the jig shaft 38.

The movable gear 36 and the driven gear 37 are engaged, and when one rotates, the rotational force is transmitted to the other and the other is rotated.

Therefore, the jig mounting device 20 is the same direction of any one of the plurality of self-revolving jigs 21 ₁ to 21 ₅ , turning right (clockwise) or left (counterclockwise), with the main axis of rotation 12 being The center moves around together, and when the traveling wheel 22 is rotated about the main rotation axis 12 together with the self-propelling jigs 21 ₁ to 21 ₅ , the traveling wheel 22 rotates around the wheel rotation axis 28 by rotating The rotation of the wheel shaft 27 and the active gear 36 causes the driven gear 37, the jig shaft 38, and the self-propelling jigs 21 ₁ to 21 ₅ to rotate about the jig rotation axis 29 by the rotation of the movable gear 36.

A film formation source 15 is disposed in a position inside the vacuum chamber 11 from below the revolving jigs 21 ₁ to 21 ₅ .

Each of the revolving jigs 21 ₁ to 21 ₅ has one side facing downward obliquely, facing the film forming source 15, and the opposite side facing obliquely upward.

The jig shaft 38 is attached to a surface that faces obliquely upward, and as shown in FIG. 4, a plurality of substrate holding portions 25 are provided on the surface that faces obliquely downward.

In the case of the dome shape, as shown in Fig. 3(b), the substrate holding portion 25 is provided on the curved concave surface, and is inclined to face the film formation source 15.

4 is a surface showing the film formation source 15 from the rotation jigs 21 ₁ to 21 ₅ , and reference numeral 25 is a substrate holding portion holding the substrate 26.

Is held by the substrate holding portion 25, substrate 26, not from the revolving jig 21 ₁ to 21 ₅ from coming off, it becomes self-revolving jig ₂₁₁ ~ ₂₁₅ revolves and rotates together.

As will be described later, when the film-forming material particles discharged from the film formation source 15 reach the surface of the substrate 26, the film grows on the surface of the substrate.

The center position of the jig shaft 38 to which the respective revolving jigs 21 ₁ to 21 ₅ are mounted is located on the same circumference, and the revolving jigs 21 ₁ to 21 ₅ and the jig axis 38 are the jig axis 29 of the jig. The direction is not to intersect with the main axis of rotation 12, and as a result, the respective revolving jigs 21 ₁ to 21 ₅ are centered on the main axis of rotation 12, and when they are rotated together, the heads of the respective revolving jigs 21 ₁ to 21 ₅ The distance between the side and the main axis of rotation 12 and the distance between the rear tail side and the main axis of rotation 12 are different.

Therefore, in the present invention, when the respective rotation jigs 21 ₁ to 21 ₅ are arranged in a circular shape, the portions on the head side and the rear side of the respective rotation jigs 21 ₁ to 21 ₅ can be adjacent to each other. The other rear end portions of the self-propelling jigs 21 ₁ to 21 _{5 and} the front end side portions are arranged to overlap each other. According to this configuration, the respective revolving jigs 21 ₁ to 21 ₅ do not collide with each other. revolving jig distance between the center positions 21 ₁ to 21 _5, a diameter of ₂₁₁ - ₂₁₅ is shorter than that from the revolution close fixture.

In the overlap, the respective jigs 21 ₁ to 21 ₅ are disposed such that one of the leading side and the trailing side is closer to the main rotation axis 12 than the other side.

All of the self-revolving jigs 21 ₁ to 21 ₅ disposed along the circular rail 16 are such that the same side of the leading end side and the rear tail side are close to the main rotation axis 12 .

For example, in the film forming apparatus of Fig. 1, when the respective rotation jigs 21 ₁ to 21 _{5 are} seen from the top plate side of the vacuum chamber 11 and rotated clockwise, the heads of the respective rotation jigs 21 ₁ to 21 ₅ are advanced. The side is closer to the main axis of rotation 12 than the rear end side, and in the case of counterclockwise rotation, the leading side is closer to the main axis of rotation 12 than the trailing side.

The film formation source 15 is disposed at a position intersecting with the main rotation axis 12. Therefore, among the overlapping portions of the respective rotation jigs 21 ₁ to 21 ₅ , one of the leading side and the rear tail side is It is closer to the film forming source 15 than the adjacent self-revolving jigs 21 ₁ to 21 ₅ , and the other side is configured to be farther away from the film forming source 15 than the adjacent self-revolving jigs 21 ₁ to 21 ₅ . In the portion that is away from the arrangement, the portion overlapping the adjacent self-revolving jigs 21 ₁ to 21 ₅ is behind the film formation source 15 . The film-forming material particles discharged from the film formation source 15 are portions other than the portion that becomes the back portion, and do not reach the portion that becomes the back.

In the case where the film forming apparatus 2 of the first embodiment overlaps, when viewed from above, the clockwise leading side is away from the main rotation axis 12, so that the leading side is seen from the film forming source 15 and the rear side does not become. behind.

In the present invention, one of the self-revolving jigs 21 ₁ to 21 ₅ is one of the first-side portion and the rear-end portion, and the other portion is not behind.

In this embodiment, each of the revolving jigs 21 ₁ to 21 ₅ is disposed at the center of the surface of the substrate 26 so as not to be overlapped. Therefore, the self-revolving jigs 21 ₁ to 21 are disposed. _In any of the positions of the substrate 26 of the _fifth substrate, the rotation of the rotation jigs 21 ₁ to 21 ₅ with respect to the jig rotation axis 29 is a part of the surface of the substrate 26. At any position on the surface of the substrate 26 from the transfer fixtures 21 ₁ to 21 ₅ , the film-forming material particles discharged from the film formation source 5 can be reached.

Moreover, since the wheel axis of rotation 28 intersects the main axis of rotation 12 and the jig axis of rotation 29 does not intersect the main axis of rotation 12, the wheel axis of rotation 28 and the jig axis of rotation 29 do not become parallel (and also coincide).

<film formation method>

Next, a film forming method using this film forming apparatus 2 will be described.

In the film forming apparatus 2, since the revolving jigs 21 ₁ to 21 ₅ are detachably formed from the jig shaft 38, and the film forming apparatus 2 forms a film, first, the vacuum tank 11 is used. When the door is opened, the respective jigs 21 ₁ to 21 _{5 are} removed from the jig attachment device 20, taken out to the outside of the vacuum chamber 11, and the substrate 26 is attached to the substrate holding portion 25, and then mounted on the jig attachment device 20, Close the door.

In the vacuum chamber 11, a vacuum exhaust device 17 is connected, and when the vacuum exhaust device 17 is operated, the vacuum inside the vacuum chamber 11 is evacuated to a vacuum atmosphere, and the motor 13 is operated to rotate the respective jig 21 ₁ ~ 21 ₅ , rotates around the circumference of the main axis of rotation 12 (this is referred to as revolution), and rotates around the axis of rotation 29 of the jig (this is referred to as rotation).

The film formation source 15 has a container 15a and a film forming material 15b disposed in the container 15a, and the container 15a and the film forming material 15b are heated by a heating device (not shown) to heat the film forming material 15b. The evaporation of the film forming material 15b is started, and the vapor of the film forming material 15b, that is, the film forming material particles, is discharged from the film forming source 15 toward the inside of the vacuum chamber 11. Further, the film forming material 15b may be directly heated without heating the heating container 15a.

The film-forming material particles discharged to the inside of the vacuum chamber 11 are formed inside the vacuum chamber 11, and when reaching the surface of the substrate 26, the film grows at a portion where the film-forming material particles of the substrate 26 reach.

As described above, in the film forming apparatus 2 of the present invention, each of the revolving jigs 21 ₁ to 21 ₅ is disposed such that the inner first side and the rear side of the vacuum chamber 11 are overlapped, and two adjacent self-transfers are formed. The gap between the outer circumferences of the film forming apparatuses 21 ₁ to 21 ₅ is smaller than the gap between the self-revolving jigs of the film forming apparatus in which the outer circumferences of the respective revolving jigs are not overlapped.

Further, since the leading side and the trailing side are overlapped, even if the diameter of the circular rail 16 is not increased, the inclination of the respective turning jigs 21 ₁ to 21 ₅ downward is larger than that of the non-overlapping film forming apparatus. In other cases, the gap formed by the vicinity of the vertex position of the outer circumference of each of the revolving jigs 21 ₁ to 21 ₅ is smaller than that of the non-overlapping film forming apparatus.

In the case where the gap is large, since the amount of the film-forming material particles passing through the gap is small because the gap is small, the use efficiency of the film-forming material 15b disposed in the container 15a can be improved.

After the film has a predetermined thickness on the surface of the substrate 26, the inside of the vacuum chamber 11 is at atmospheric pressure, and the door is opened, and the substrate is taken out from the inside of the vacuum chamber 11 by the revolving jigs 21 ₁ to 21 _{5 to} complete the film formation. 26, the substrate 26 that has not been formed into a film is exchanged, and is placed inside the vacuum chamber 11, and a film forming process is performed.

<Other film forming devices>

FIG 5, is a self-overlapping revolving jig 21 ₁ to 21 ₆ when the six self-revolving jig to the head side 21 ₁ to 21 ₆ and the rear trailing side is disposed to overlap the vacuum chamber deposition apparatus, from When the number of the revolving jigs 21 ₁ to 21 ₆ is increased, the gap surrounded by the portion near the vertex of each of the outer circumferences 21 ₁ to 21 ₆ becomes small.

<The diameter of the substrate and the relationship between the revolving jig>

Tables 1 and 2 below are numerical values obtained when a disc-shaped substrate of 4, 5, 6, or 8 inches is mounted on a self-revolving jig provided in a film forming apparatus to form a film, and each unit is obtained. The number of substrates that can be filmed at the time (number of processed/time).

Table 1 is a numerical value of a conventional film forming apparatus in which three self-propelled jigs are arranged without overlapping.

Table 2 shows the numerical values of the film forming apparatus of the present invention in which five self-propelled jigs are arranged to overlap each other. The size of the vacuum chamber of this apparatus is the same as that of the vacuum forming apparatus of the film forming apparatus of Table 1.

In Tables 1 and 2, the numerical value of the item of "processing number/time" is the number of substrates which can be processed by the film forming apparatus in one hour.

The items of "exhaust time", "filming time", "boost time", and "total time" are the values for "processing number/time", and the unit is "minutes".

The total number of "substrates" is the total number of the total number of self-propelled jigs placed in the vacuum chamber, and the "total time" item is the number of substrates in the "total number of substrates" item. The time required for processing.

The item of "total number of substrates" in Table 2 is the value of "the total number of substrates" of the film forming apparatus of Table 2 for the same size of the substrate, and the value of the "total number of substrates" of the film forming apparatus of Table 1 From the obtained values, it is understood that the film forming apparatus of Table 2 is 11% or more larger than the film forming apparatus of Table 1.

The item of the "overlap loss" in Table 2 is the ratio of the area of the entire part to the back of the revolving jig, and the value of the item of the "film formation time" is related to the same size. In the "film formation time" of Table 1, the value of the value of "1" is added to the value of the item of "overlap loss", and the item of "film formation time" of Table 2 is disclosed.

The "productivity ratio" in Table 2 is the film forming apparatus of Table 2. The ratio of the number of substrates that can be processed in one hour to the number of substrates that can be processed in one hour of the film forming apparatus of Table 1, and the numerical value is the "number of processed/times" of the substrate of the same size as in Table 2. The value is divided by the value of the item of "Processing the number/time" in Table 1.

The value obtained by subtracting "1" from the "total substrate ratio" and the "productivity ratio" is the ratio of the mounting substrate of the present invention in Table 2 to the film forming apparatus of Table 1, and the ratio of the mounting substrate can be processed. The ratio of the substrates, as can be seen from Table 2, the larger the diameter of the substrate, the more the productivity ratio increases.

In the following Table 3, the number of the self-propelled jigs is three, and the film forming apparatus of the prior art is equipped with 10 substrates per one piece, and the number of self-reducing jigs in the vacuum tank of the same size is Sixth, the productivity of the film forming apparatus of the present invention in which eight substrates are mounted per one piece is improved by 1.5 times.

Further, Fig. 6 (a), (b) to Fig. 9 (a) and (b) show the arrangement of the 4, 5, 6, and 8 inch substrates 26 disclosed in Table 2 in the self-revolving jig. FIG. 6( a ) to FIG. 9( a ) are plan views of a surface opposite to the surface facing the film formation source 15 , and FIG. 6 is a view showing a relationship between the substrate 26 and the revolving jig 21 . ) ~ Figure 9 (b) is a perspective view.

A curved self-propelling jig 21 is used here.

<Other>

In the above, the case where the number of the revolving jigs 21 ₁ to 21 ₅ is _five is not limited to five, and a part of the leading end side and the rear side side are overlapped, and four or more film forming apparatuses are provided from the revolving jig. It is included in the present invention. However, it is preferable to increase the use efficiency of the film forming material 15b by five or more.

Further, in the above example, the film formation source 15 is a film formation source of a vacuum vapor deposition device that causes particles of the film formation material composed of the vapor of the film formation material 15b. However, in the present invention, the sputtering source is formed. The film source is a sputtering target which is disposed on the electrode, and a sputtering target is sputtered in a vacuum atmosphere by applying a voltage to the electrode, and the sputtered particles discharged from the sputtering target are used as a film forming material. Particles can also be used.

In the above example, the active gear and the driven gear are used, but a device in which the active gear and the driven gear are coupled by a belt or another device is used, and the self-revolving jig of the overlap is centered on the central axis by the rotation of the traveling wheel. Rotation is included in the present invention.

2‧‧‧ film forming device

11‧‧‧vacuum tank

13‧‧‧Motor

15‧‧‧film source

15a‧‧‧heating container

15b‧‧‧film forming materials

16‧‧‧round track

17‧‧‧Vacuum exhaust

20‧‧‧ fixture mounting device

21 ₁ ~ 21 ₅ ‧‧‧From the revolutionary fixture

22‧‧‧Walking wheels

26‧‧‧Substrate

27‧‧‧ Wheel axle

30‧‧‧天板

31‧‧‧ wrist

32‧‧‧ frame

33‧‧‧ Bridge

34‧‧‧Main rotation axis

Claims (4)

A film forming apparatus comprising: a vacuum chamber; a circular orbit disposed in the vacuum chamber; and a film forming source for discharging the film forming material particles into the vacuum chamber; and a plurality of substrates in which a plurality of substrates are disposed a self-propelling jig, a plurality of traveling wheels disposed on the circular orbit, and a jig attachment device for holding the plurality of self-revolving jigs, and a motor for rotating the jig attachment device around a main axis of rotation a plurality of the self-revolving jigs are disposed on the inner side of the circular orbit along the circular orbits in a circular shape, and the self-revolving jigs are respectively connected to the other traveling wheels. When the jig attachment device is rotated by the motor, the self-revolving jig is rotated around the circumference of the main rotation axis by the rotation of the jig attachment device, and the respective self-transfer The traveling wheel having the connection travels on the circular orbit while rotating around the axis of rotation of the wheel, and the self-revolution is performed by the rotation of the traveling wheel. The substrate is rotated around the axis of rotation of the jig, and the substrate disposed on the self-revolving jig is rotated and rotated together with the self-revolving jig, and the film-forming material particles are adhered thereto. Surface, forming a film, The self-revolving jig is disposed on the leading side and the trailing side of the direction of the revolving movement, and is disposed to overlap with another adjacent self-propelling jig, and the self-revolving jig is provided by the foregoing One of the side overlapping portions and the portion overlapping the rear end side is located closer to the main rotation axis than the other overlapping self-revolving jigs that overlap, and the other side is located at another ratio The aforementioned self-propelling jig is further away from the aforementioned main axis of rotation. The film forming apparatus of claim 1, wherein the wheel rotation axis and the jig rotation axis are non-parallel. The film forming apparatus of claim 1, wherein the wheel shaft that is rotated about the wheel rotation axis by the rotation of the traveling wheel is fixed in the traveling wheel and rotates around the rotation axis of the jig The jig shaft is fixed to the self-propelling jig, and the active gear provided on the wheel axle and the driven gear provided on the jig shaft are meshed, and the rotation of the movable gear is transmitted to the driven gear. The jig shaft and the self-revolving jig are rotated by the driven gear. The film forming apparatus according to any one of claims 1 to 3, wherein the self-revolving jig is provided in five or more.