TW201544230A - Cutting apparatus - Google Patents

Abstract

The subject of this invention is to provide a cutting apparatus which can stabilize the detection precision of the cutting blade of a blade detection means. The solution is a cutting apparatus comprising a chuck table having a holding surface for holding a workpiece; a cutting feed means disposed on the apparatus base and moving the chuck table in the cutting feed direction; a portal frame crossing the cutting feed means and erected on the apparatus base and provided with an opening for allowing the movement of the chuck table; a cutting means fixed on the portal frame while being movable in the cutting feed direction and cutting a processed object held by the chuck table with the cutting blade; and a blade detection means for detecting the position in the cutting feed direction of the cutting blade. The blade detection means is composed by a support member extending laterally toward the chuck table and fixed to the pillar portion of the portal frames and a blade detection mechanism attached to the front end of the support member and having a light emitting portion and a light receiving portion.

Description

Cutting device Field of invention

The invention relates to a cutting device.

Background of the invention

A cutting device for cutting a workpiece such as a semiconductor wafer, a resin substrate, a ceramic substrate, or a glass substrate by a cutting means supported by a gantry frame erected on a device base is widely known (refer to, for example, the patent document) 1). The cutting device is provided with a blade detecting means for detecting the position of the front end (lower end) of the cutting insert in the cutting feed direction, and is detectable by the blade detecting means according to the reference position (the holding surface height of the working chuck) The difference between the positions is calculated as the position of the front end of the cutting insert (see, for example, Patent Document 2). The blade detecting means is provided to stand on the side of the work chuck of the workpiece and is erected on the base of the work chuck on which the work chuck is mounted.

Prior technical literature Patent literature

Patent Document 1: Japanese Patent Laid-Open No. 2001-298002

Patent Document 2: Japanese Patent Laid-Open No. 2001-298001

Summary of invention

However, in the cutting device in which the blade detecting means is erected on the working chuck base, since the working chuck base moves in the cutting feed direction, heat is affected by heat generation of the driving portion or heat generation of the rotating shaft. The working chuck base itself is subjected to temperature changes, and there is a doubt that the accuracy of the blade detecting means becomes unstable. Moreover, especially in a device having two spindles, two detection means are required for rapid detection, and if two detection means are erected on the base of the working clamp, the occupation area of the apparatus body is directly caused. (footprint) expanded. Further, in the cutting device of Patent Document 1 in which the blade detecting means is erected from the apparatus base so as to penetrate the top surface of the apparatus main body, since the blade detecting means penetrates the top surface of the apparatus main body, the cutting fluid flows into the apparatus. Concerns in the body.

The present invention has been made in view of the above, and it is an object of the invention to provide a cutting apparatus capable of ensuring the accuracy of cutting blade detection of a blade detecting means.

In order to solve the above problems and achieve the object, the present invention is a cutting device including a work chuck, a cutting feed means, a door frame, a cutting means, and a blade detecting means, the work chuck having a holding surface for holding a workpiece, The cutting feed means is disposed on the base of the apparatus and moves the working clamping table in a cutting feed direction parallel to the holding surface, and the gantry frame is erected on the base of the apparatus across the cutting feed means and Having an opening that allows the movement of the working table, the cutting means is capable of being cut perpendicular to the holding surface The moving in the feeding direction is fixed on the door frame, and the workpiece held by the working clamping table is cut by the cutting blade, and the blade detecting means can detect the position of the cutting blade in the cutting feed direction, and is characterized by: The blade detecting means is constituted by a supporting member and a blade detecting mechanism which is fixed to a column portion of a portal frame which is erected on the base of the device and extends toward a side of the working clamping table, and the blade detecting mechanism is mounted The front end portion of the support member is provided and has a light emitting portion and a light receiving portion.

Further, in the above cutting apparatus, preferably, the cutting means has a cutting fluid supply means for supplying the cutting fluid to the workpiece, and the cutting feed means is fixed to both sides of the cutting feed direction of the work chuck And covering the serpentine portion of the cutting feed means, and a water tank extending along the cutting feed means and receiving the cutting fluid guided by the serpentine portion to be protected from the adhesion of the cutting fluid, the supporting member The blade detecting mechanism is supported through the side wall of the water tank.

Further, preferably, in the above cutting device, the support member penetrates the side wall of the water tank with a gap, and the gap between the water tank and the support member is sealed by a seal ring fitted to the outer periphery of the support member.

According to the present invention, since the blade detecting means is fixed to the column portion of the door frame erected on the apparatus base and extends toward the side of the work chuck, the blade detecting means is fixed to the work chuck base or the like. The thermal influence of heat generation of the drive unit or heat generation of the rotating shaft can be made smaller than in the case of the movable portion. Therefore, according to the present invention, it is possible to obtain an effect of ensuring the accuracy of detection of the cutting insert of the blade detecting means.

1-1, 1-2‧‧‧ cutting device

10‧‧‧Carton lifts

11‧‧‧Carmen

2‧‧‧ device body

20‧‧‧Working table

20a‧‧‧ Keep face

21‧‧‧Frame chuck

22‧‧‧θ axis rotation means

23‧‧‧Waterproof cover

3‧‧‧Device base

30‧‧‧ cutting means

31‧‧‧ cutting inserts

32‧‧‧ Spindle

33‧‧‧Shell

34‧‧‧Nozzles (feeding fluid supply means)

35‧‧‧Photography

40‧‧‧ cutting feed means

41‧‧‧Cutting feed mobile abutment

42‧‧‧The Snake Department

43‧‧‧Water tank

43a‧‧‧ Sidewall

43b‧‧‧ bottom

43c‧‧‧ inner wall

43d‧‧‧Drainage tube

43e, 43g‧‧‧ plug holes

43f‧‧‧ platen

43h‧‧‧ Sealing member

50‧‧‧Door frame

50a‧‧‧ pillar

50b‧‧ ‧ Beam Department

50c‧‧‧ openings

60‧‧‧Divided feeding means

61‧‧‧Divided feed mobile abutment

70‧‧‧ cut-in means of feeding

71‧‧‧cut into the mobile abutment

80‧‧‧ Washing means

81‧‧‧Rotating table

90‧‧‧ Blade detection means

91‧‧‧Support members

91a‧‧‧Support

91b‧‧‧ mounting hole

92‧‧‧blade testing agency

92a‧‧‧Lighting Department

92b‧‧‧Receiving Department

92c‧‧‧Support table

92d‧‧‧ Cover

92e‧‧‧Hinges

F‧‧‧Ring frame

R‧‧‧Seal ring

Ra‧‧‧ annular lip

Rb‧‧‧Installation hole

S1, S2‧‧‧Architecture

T‧‧‧Adhesive tape

W‧‧‧Processed objects

X, Y, Z‧‧ Direction

Fig. 1 is a view showing an example of the configuration of a cutting device according to a first embodiment.

Fig. 2 is a view showing a device base of the cutting device of the first embodiment;

Fig. 3 is a view showing a cutting feed means of the cutting device of the first embodiment;

Fig. 4 is a view showing a blade detecting means fixed to a base of the apparatus of the cutting apparatus of the first embodiment;

Fig. 5 is a view showing an example of the configuration of a blade detecting means of the cutting device of the first embodiment.

Figure 6 is a cross-sectional view of the seal ring of the blade detecting means shown in Figure 5.

FIG. 7 is a view showing a state in which the support member of the blade detecting device penetrates the tank side wall with a gap in the cutting device according to the first embodiment.

FIG. 8 is a view showing a state in which the support member of the blade detecting device penetrates the tank side wall with a gap in the cutting device according to the second embodiment.

Form for implementing the invention

The embodiment (embodiment) for carrying out the invention will be described in detail with reference to the drawings. The present invention is not limited to the invention described in the following embodiments. Further, among the constituent elements described below, those which are easily conceivable by those having ordinary knowledge in the technical field or substantially the same things are included. Further, the configurations described below can be combined as appropriate. Further, various omissions, substitutions, and changes may be made without departing from the scope of the invention.

[Embodiment 1]

Fig. 1 is a view showing an example of the configuration of a cutting device according to a first embodiment. Fig. 2 is a view showing a device base of the cutting device of the first embodiment; Fig. 3 is a view showing a cutting feed means of the cutting device of the first embodiment; Fig. 4 is a view showing a blade detecting means fixed to a base of a device of the cutting device of the first embodiment; Fig. 5 is a view showing an example of the configuration of a blade detecting means of the cutting device of the first embodiment. Figure 6 is a cross-sectional view of the seal ring of the blade detecting means shown in Figure 5. FIG. 7 is a view showing a state in which the support member of the blade detecting device penetrates the tank side wall with a gap in the cutting device according to the first embodiment. In addition, in FIG. 4, one of the two blade detecting means 90 is omitted and shown.

The cutting device 1-1 shown in Fig. 1 is a processing device that performs a cutting process on the workpiece W. As shown in FIGS. 1 to 2, the cutting device 1-1 includes a cassette elevator 10, a work chuck 20, a cutting means 30, a cutting feed means 40, a door frame 50, an indexing means 60, and a cutting-in The feeding means 70, the washing means 80, and the blade detecting means 90 are constituted. In the present embodiment, the cutting device 1-1 performs cutting processing on the workpiece W that is adhered to the opening of the annular frame F through the adhesive tape T.

Here, the workpiece W is not particularly limited, and may be a semiconductor wafer or an optical device wafer in which a semiconductor device or an optical device is formed, an inorganic material substrate, a ductile resin material substrate, a ceramic substrate or a glass plate, or a liquid crystal display driver. Various electronic parts and various processing materials. In the present embodiment, the workpiece W is formed in a disk shape. Moreover, the cutting feed direction is orthogonal to the rotation axis of the cutting insert 31 and is protected by the working chuck 20 The direction in which the faces 20a are held in parallel is a direction orthogonal to the vertical direction. The indexing feed direction is the direction of the rotation axis of the cutting insert 31 and is a direction orthogonal to the vertical direction. The cutting feed direction is a direction orthogonal to the holding surface 20a of the work chuck 20 and is a vertical direction. In the present embodiment, the cutting feed direction is a direction corresponding to the X-axis direction shown in the same drawing, and the index feeding direction is a direction corresponding to the Y-axis direction shown in the same figure, and the cutting feed direction is equivalent. The direction of the Z-axis direction shown in the figure.

The cassette elevator 10 supports the cassette 11 that can accommodate a plurality of workpieces W in a vertical direction with respect to the apparatus main body 2.

The work chuck 20 is formed in a disk shape and has a holding surface 20a that holds the workpiece W. Further, the work chuck 20 can relatively move the apparatus body 2 in the cutting feed direction. The holding surface 20a is an upper end surface of the working chuck 20 in the vertical direction and is formed flat with respect to the horizontal plane. The holding surface 20a is made of, for example, porous ceramics, and can hold and hold the workpiece W by the negative pressure of the vacuum suction source (not shown). The work chuck 20 is provided with a plurality of frame chucks 21. A plurality of frame chucks 21 are chucks for holding the fixed annular frame F.

Further, as shown in FIGS. 3 and 4, the work chuck 20 is fixed to the cutting feed base 41 which will be described later by the cutting feed means 40 by the θ-axis rotating means 22. Further, a waterproof cover 23 is provided below the cutting feed direction of the work chuck 20. The waterproof cover 23 is a cover for preventing the cutting fluid supplied from the nozzle 34 described later by the cutting means 30 from penetrating into the apparatus body 2.

The cutting means 30 is a means for cutting the workpiece W held by the work chuck 20 by the cutting insert 31. The cutting means 30, as shown in Figure 1, is The index feeding means 60 and the cutting feed means 70 are fixed to the portal frame 50 so as to be movable in the cutting feed direction orthogonal to the holding surface 20a. The cutting means 30 has two of the work chucks 20 sandwiched in the index feed direction. The cutting means 30 includes a cutting insert 31, a rotating shaft 32, a casing 33, a nozzle 34, and an image pickup means 35. The cutting insert 31 is an extremely thin disc-shaped cutting stone formed in a ring shape. The main shaft 32 detachably mounts the cutting insert 31. The casing 33 has a drive source such as a motor, and supports the main shaft 32 so as to be rotatable about a rotation axis about the index feed direction. The casing 33 is supported by the cut-in feed moving base 71 which will be described later by the cutting feed means 70. The nozzle 34 is a cutting fluid supply means for supplying the cutting fluid to the workpiece W. The imaging means 35 is a means for capturing a planned cutting line (also referred to as a scribe line) of the workpiece W held by the work chuck 20, and is an image having a CCD (Charge Coupled Device) image sensor or the like. Component camera.

The cutting feed means 40 is a means for moving the work chuck 20 in the cutting feed direction. The cutting feed means 40 is constituted by, for example, a pulse motor, a ball screw, a guide rail, or the like, and allows the cutting feed moving base 41 to relatively move the apparatus main body 2 in the cutting feed direction. That is, the cutting feed of the moving base 41 allows the working chuck 20 to relatively move the apparatus body 2 in the cutting feed direction.

Here, the apparatus base 3 is a base that supports the cutting feed means 40 and the portal frame 50. The device base 3 is disposed in the device body 2. The apparatus base 3, as viewed in the vertical direction, as shown in Fig. 2, is formed in a cross shape which is extendable in the cutting feed direction and the index feed direction. At the device On the base 3, a door frame 50 is erected and a cutting feed means 40 is provided. The apparatus base 3 is composed of, for example, a cast piece cast into a cross shape. Therefore, the device base 3 is not easily deformed by the influence of heat.

Further, as shown in Figs. 1 to 2, the cutting feed means 40 can be protected from the adhesion of the cutting fluid by the flexible tube portion 42 and the water tank 43.

The coil portion 42 is a repetitive structure having a convex fold and a concave fold, so-called bellows. The coil portion 42 is disposed so as to sandwich the waterproof cover 23 in the cutting feed direction, and is fixed to both end portions of the waterproof cover 23 in the cutting feed direction. The flexible tube portion 42 is fixed to the waterproof cover 23 at one end in the cutting feed direction, and the other end portion is fixed to the apparatus body 2. That is, the serpentine portion 42 is fixed to both sides of the cutting direction of the work chuck 20 in the cutting feed direction, and is covered by the cutting feed means 40 in the cutting feed direction. The coil portion 42 can expand and contract in accordance with the movement of the work chuck 20 in the cutting feed direction in the cutting feed direction. In the serpentine tube portion 42, the cutting fluid supplied from the nozzle 34 of the cutting means 30 flows downward from the both end portions in the index feeding direction to the lower side in the vertical direction, and the cutting fluid is guided to the water tank 43.

As shown in FIG. 1, the water tank 43 is provided in an opening formed in the top surface of the apparatus main body 2. The water tank 43 is detachably fixed to the apparatus body 2. The water tank 43 is made of, for example, stainless steel or the like. The water tank 43 is covered by the waterproof cover 23 and the flexible tube portion 42. The water tank 43 has a rectangular shape which is formed in the cutting feed direction and has a width wider than the index feed direction in accordance with the movement range of the cutting direction of the work chuck 20 in the vertical direction. That is, the water tank 43 is formed into a rectangular shape extending along the cutting feed means 40.

Further, as shown in FIGS. 3 to 4, the water tank 43 is formed in a vertical direction as shown in FIG. 3 to FIG. 4, and is formed integrally with the side wall 43a surrounding the work chuck 20 so as to face each other in the indexing feed direction. The two side walls 43a and the bottom wall 43a each extending toward the working table 20 in the cutting feed direction on the side of the cassette lifter 10, and the inner wall 43c which is erected from the bottom portion 43b facing the side wall 43a. That is, the water tank 43 is formed in a U-shape as viewed in the vertical direction, and is formed in a groove shape that can receive the cutting fluid guided through the flexible tube portion 42. The water tank 43 can discharge the received cutting fluid to the outside through the discharge pipe 43d connected to the bottom portion 43b. That is, the water tank 43 can receive the cutting fluid guided by the flexible tube portion 42 to protect the cutting feed means 40 from being adhered by the cutting fluid.

The two side walls 43a facing each other in the indexing feed direction are respectively formed with insertion holes 43e through which the support member 91 to be described later with the gap between the blade detecting means 90. As shown in FIG. 4, the insertion hole 43e is formed to be larger than the outer diameter of the support portion 91a to be described later of the support member 91. Further, it is preferable that the diameter of the insertion hole 43e is such a size that the water tank 43 is deformed without being affected by the heat of the cutting/feeding means 40 or the like, and does not interfere with the support portion 91a.

The gantry frame 50 is a frame that supports the cutting means 30 so as to be movable in the indexing feed direction and the plunging feed direction, respectively. The door frame 50, as shown in Fig. 2, is erected on the apparatus base 3 across the cutting feed means 40 in the indexing feed direction. The portal frame 50 is formed by casting a gate-shaped cast block or the like using, for example, the same material as the apparatus base 3. Therefore, the portal frame 50 is not easily deformed by the influence of heat. Again, the door frame The frame 50 integrally has a pair of column portions 50a which are erected by the apparatus base 3 at intervals in the index feeding direction, and a beam portion 50b which is horizontally bridged between the upper end portions of the pair of column portions 50a in the vertical direction. . The gantry frame 50 includes an opening 50c surrounded by a pair of column portions 50a and a beam portion 50b, and is opened to be wider than the waterproof cover 23 in the indexing feed direction, and to be larger than the work gantry 20 in the vertical direction. The holding surface 20a is still above. That is, the portal frame 50 includes an opening 50c that allows the working chuck 20 to move in the cutting feed direction.

The index feeding means 60 is means for moving the cutting means 30 in the indexing feed direction. The index feeding means 60 is constituted by, for example, a pulse motor, a ball screw, a guide rail, or the like, and can cause the indexing feed moving base 61 to relatively move the apparatus body 2 in the indexing feed direction. The index feeding means 60 is supported by the door frame 50 and supports the cutting feed means 70.

The cutting feed means 70 is means for moving the cutting means 30 in the cutting feed direction. The cutting feed means 70 is configured to include, for example, a pulse motor, a ball screw, a guide rail, and the like, and allows the cut-in feed moving base 71 to relatively move the apparatus body 2 in the cutting feed direction. The cutting feed means 70 is supported by the index feeding means 60 and supports the cutting means 30. That is, the cutting feed base 71 is cut, and the cutting means 30 is fixed to the portal frame 50 so as to be movable in the cutting feed direction by the index feeding means 60. Further, the cutting feed means 70 can detect the relative position of the cutting means 30 to the apparatus body 2 by means of a cut feed position detecting means including, for example, a linear ruler and a sensor.

The cleaning means 80 is a means for holding and cleaning the workpiece W cut by the cutting means 30 by the rotary table 81.

The blade detecting means 90 is means for detecting the end portion (the lower end portion in the vertical direction) of the cutting insert 31 in the cutting feed direction after setting the reference position. The blade detecting means 90 is provided with two collets 20 in the indexing feed direction. The blade detecting means 90 is constituted by a support member 91 and a blade detecting mechanism 92 as shown in FIG. Here, the reference position is the upper end surface of the working chuck 20 in the vertical direction, that is, the position in the vertical direction of the holding surface 20a. In addition, the reference position is set, for example, when the cutting feed position detecting means detects the position in the vertical direction when the holding surface 20a and the cutting insert 31 are brought into contact.

As shown in FIG. 4, the support member 91 is detachably fixed to the column portion 50a of the portal frame 50 by a structural member S1 such as a bolt or a screw. The support member 91 extends in the indexing feed direction from the column portion 50a side to the work chuck 20 side in parallel with the horizontal direction. That is, the support member 91 is fixed to the column portion 50a of the portal frame 50 which is erected on the apparatus base 3, and extends toward the side of the work chuck 20. In the present embodiment, the support member 91 extends toward the side of the side wall 43a on which the insertion hole 43e is formed. Further, the support member 91 has a support portion 91a that supports the blade detecting mechanism 92, and a mounting hole 91b to which the structural member S1 can be attached.

The support portion 91a is formed in a columnar shape by extending from one end portion of the support member 91 on the tank 43 side in the index feeding direction. The support portion 91a is inserted into the insertion hole 43e of the side wall 43a of the water tank 43 with a gap. That is, the support member 91 penetrates the side wall 43a of the water tank 43, and supports the blade detecting mechanism 92. Further, a seal ring R is fitted to the outer circumference of the support portion 91a.

The seal ring R is an elastic member such as a rubber having elasticity Composition. The sealing ring R, also known as a V-shaped sealing ring. As shown in FIGS. 4 to 6, the seal ring R is formed in an annular shape and has an annular lip Ra which is watertightly adhered to the side wall 43a. The annular lip Ra is slidably adhered to the side wall 43a. Further, it is preferable that the annular lip Ra is deformed by the heat of the cutting feed means 40 or the like, and the water tank 43 is deformed in a watertight manner in conformity with the deformation of the side wall 43a. The mounting hole Rb of the seal ring R is formed to be smaller than the outer diameter of the support portion 91a. The seal ring R can be stretched such that the diameter of the mounting hole Rb is larger than the outer diameter of the support portion 91a, and is fitted to the support portion 91a. Therefore, as shown in FIG. 7, the gap between the water tank 43 and the support member 91 can be sealed by the seal ring R fitted to the outer periphery of the support member 91.

The blade detecting mechanism 92 detects the position of the front end of the cutting insert 31 (the position of the lower end in the vertical direction) in the cutting feed direction. As shown in FIG. 5, the blade detecting mechanism 92 is mounted on the front end portion of the support member 91, that is, the support portion 91a, and has the light-emitting portion 92a and the light-receiving portion facing each other in the indexing feed direction. Part 92b. The blade detecting mechanism 92 detects the leading end position of the cutting insert 31 by causing the cutting insert 31 to enter between the light emitting portion 92a and the light receiving portion 92b in the cutting feed direction. Further, the blade detecting mechanism 92 is fixed to the support table 92c. The support base 92c is detachably attached to the support portion 91a. On the support table 92c, the cover 92d covering the light-emitting portion 92a and the light-receiving portion 92b is provided so as to be openable through the hinge 92e. The cover 92d is a cover for preventing adhesion of cutting fluid and chips. The cover 92d is opened when detecting the position of the front end of the cutting insert 31, and is closed when the workpiece W is subjected to cutting.

Next, the basics of the cutting apparatus 1-1 constructed as above will be explained. action. Further, in the case of the present embodiment, the workpiece W in which the planned cutting line is formed in a lattice shape is subjected to cutting processing. Further, in the present embodiment, the reference position is measured in advance, and the position (front end detection position) in the cutting feed direction when the blade detecting mechanism 92 detects the position of the front end of the cutting insert 31, and the position is detected based on the reference position and the leading end. The difference is that the front end position of the cutting insert 31 detected by the blade detecting mechanism 92 is corrected to correspond to the reference position in the cutting step.

The cutting device 1-1 can take out the workpiece W accommodated in the cassette 11 and transfer it to the work chuck 20 according to an instruction from the operator. At this time, in the cutting device 1-1, the leading end position of the cutting insert 31 is detected by the blade detecting mechanism 92. Further, in the cutting device 1-1, even if the water tank 43 is deformed by a heat influence from the cutting feed means 40 or the like (about several tens of μm), the insertion hole 43e does not interfere with the support portion 91a.

The cutting device 1-1 ejects the cutting fluid from the nozzle 34, rotates the cutting insert 31 at a high speed, performs cutting feed by the cutting feed means 70, and performs cutting feed by the cutting feed means 40, and prepares the cutting. The line is cut. At this time, in the cutting device 1-1, the cutting fluid is guided from the flexible tube portion 42 to the water tank 43, and is discharged from the discharge pipe 43d to the outside after being received by the water tank 43. Further, in the cutting device 1-1, even if the water tank 43 is deformed due to the thermal influence from the cutting feed means 40 or the like, the annular lip Ra of the seal ring R is deformed in conformity, and the seal ring R can be used. The gap between the water tank 43 and the support member 91 is sealed to suppress leakage of the cutting fluid into the apparatus body 2.

After the cutting device 1-1 cuts all the cutting lines in the same direction, the cutting line can be rotated by the θ-axis rotating means 22 in response to the uncut cutting line. The work chuck 20 is rotated, the cutting fluid is ejected from the nozzles 34, and the uncut cutting line is cut by the cutting insert 31. At this time, in the cutting device 1-1, the gap between the water tank 43 and the support member 91 is sealed by the seal ring R, and the cutting fluid is prevented from leaking into the apparatus body 2.

In the cutting device 1-1, after the workpiece W is cut by the cutting insert 31, the workpiece W can be transferred from the work chuck 20 to the rotary table 81 of the cleaning device 80, and washed and dried. The workpiece W. Further, the cutting device 1-1 can transport the workpiece W that has been washed and dried from the turntable 81 to the cassette 11 and be housed in the cassette 11.

In the cutting device 1-1, for example, when a predetermined number of workpiece W is cut, when the material of the workpiece W is changed, or when the type of the workpiece W is changed, The front end position of the cutting insert 31 is detected by the blade detecting mechanism 92, and the front end position of the cutting insert 31 is corrected to correspond to the reference position.

As described above, the cutting apparatus 1-1 according to the first embodiment is a casting structure base 3 and a door frame 50 which are not easily deformed by heat, and the support portion 91 of the blade detecting means 90 is fixed. The column portion 50a of the portal frame 50 which is erected from the apparatus base 3 is passed through the insertion hole 43e of the side wall 43a of the water tank 43 with a gap therebetween. In other words, the cutting apparatus 1-1 according to the first embodiment fixes the blade detecting means 90 to the door frame 50 which is less likely to cause thermal influence, and suppresses interference of the water tank 43 with the blade detecting means 90. Therefore, even if deformation (about several tens of μm) is generated in the water tank 43 by the heat influence from the cutting feed means 40 or the like, the interference of the water tank 43 with the blade detecting means 90 can be suppressed. Therefore, according to the real According to the cutting apparatus 1-1 of the first embodiment, the detection accuracy of the cutting insert 31 of the blade detecting means 90 can be stabilized.

Further, according to the cutting apparatus 1-1 of the first embodiment, the seal ring R is fitted to the support portion 91a that penetrates the insertion hole 43e of the water tank 43 with a gap, and the annular lip Ra of the seal ring R is made. The side wall 43a is contacted in such a manner as to conform to the deformation of the heat of the water tank 43 to watertightly seal the gap between the water tank 43 and the support portion 91a. Therefore, according to the cutting apparatus 1-1 of the first embodiment, it is possible to suppress the leakage of the cutting fluid from the insertion hole 43e into the apparatus main body 2.

Further, according to the cutting apparatus 1-1 of the first embodiment, by fixing the blade detecting means 90 to the portal frame 50, even if the space required for fixing the member for the blade detecting means 90 is not provided in the apparatus main body 2, It does not matter, so that an increase in the occupied area (set area) of the cutting device 1-1 itself can be suppressed.

[Embodiment 2]

Next, the cutting device 1-2 of the second embodiment will be described with reference to the drawings. FIG. 8 is a view showing a state in which the support member of the blade detecting device penetrates the tank side wall with a gap in the cutting device according to the second embodiment.

The cutting device 1-2 of the second embodiment is different from the cutting device 1-1 of the first embodiment in that the support member 91 of the blade detecting means 90 is inserted through the side wall 43a of the water tank 43 and the pressure plate 43f with a gap therebetween. . In addition, the description of the configuration, operation, and effect common to the above-described Embodiment 1-1 will be omitted as much as possible.

In the cutting device 1-2 shown in Fig. 8, the support member 91 of the blade detecting means 90 is penetrated through the side wall 43a of the water tank 43 and the pressure plate. 43f.

The support member 91 is fixed to the column portion 50a of the portal frame 50 through the structural member S1, and extends from the column portion 50a side toward the side wall 43a side of the water tank 43. The support member 91 is an insertion hole 43e that penetrates the side wall 43a with a gap, and penetrates the pressure plate 43f with a gap between the support portion 91a. That is, the support member 91 penetrates the pressure plate 43f with a gap.

The insertion hole 43e is formed to be larger than the outer diameter of the support member 91. The aperture of the insertion hole 43e is preferably such that the operator can easily attach and detach the size of the support member 91 to the column portion 50a through the insertion hole 43e. The insertion hole 43e can be formed, for example, in a rectangular shape or the like which is long in the cutting feed direction, so that the operator can easily attach and detach the support member 91 to the column portion 50a through the insertion hole 43e. In the insertion hole 43e, the support member 91 is penetrated with a gap.

The pressing plate 43f can be formed in a flat plate shape larger than the diameter of the insertion hole 43e of the side wall 43a. The pressing plate 43f is detachably fixed to the inner surface of the side wall 43a (the surface facing the inner wall 43c) by the structural member S2 such as a bolt or a screw. The pressure plate 43f has an insertion hole 43g through which the support member 91 penetrates with a gap. The insertion hole 43g is formed to be larger than the outer diameter of the support portion 91a. The diameter of the insertion hole 43g is preferably such a size that it does not interfere with the support portion 91a even when the water tank 43 itself is deformed by the thermal influence of the cutting feed means 40 or the like. In the insertion hole 43g, the support portion 91a is penetrated with a gap. The insertion hole 43g can be hermetically sealed from the support portion 91a by the seal ring R fitted to the support portion 91a.

Further, the pressing plate 43f holds the sealing member 43h between the side wall 43a and the side wall 43a. The sealing member 43h is for watertight between the pressure plate 43f and the side wall 43a A ground-sealed component, also known as an O-ring. The structural member S2 is locked in a state where the sealing member 43h is sandwiched between the pressing plate 43f and the side wall 43a, whereby the pressure plate 43f and the side wall 43a can be hermetically sealed.

Next, in the cutting device 1-2 configured as described above, the operation of replacing the blade detecting means 90 will be described.

The operator performs an instruction input for switching the operation mode of the cutting device 1-2 from the machining mode to the maintenance mode, and stops the operation of the cutting device 1-2, and then removes the flexible tube portion 42. At this time, in the cutting device 1-2, the cutting fluid remaining on the flexible tube portion 42 is guided to the water tank 43, and is discharged to the outside by the discharge pipe 43d after being received by the water tank 43.

Next, the operator removes the blade detecting mechanism 92 from the support portion 91a, and detaches the seal ring R from the support portion 91a, and then releases the structural member S2 to detach the pressure plate 43f and the sealing member 43h from the side wall 43a. Next, the operator can loosen the structural member S1 through the insertion hole 43e of the side wall 43a, and detach the support member 91 from the column portion 50a of the portal frame 50.

Thereafter, the operator can lock the structural member S1 through the insertion hole 43e of the side wall 43a to fix the support member 91 to the column portion 50a. Next, the operator can pass the support portion 91a through the insertion hole 43g of the pressure plate 43f with a gap, sandwich the sealing member 43h between the pressure plate 43f and the side wall 43a, and lock the structural member S2. At this time, in the cutting device 1-2, the sealing member 43h is held between the pressure plate 43f and the side wall 43a, and the pressure plate 43f and the side wall 43a are hermetically sealed.

Next, the operator can fit the seal ring R to the support portion 91a and bring the annular lip Ra of the seal ring R into contact with the pressure plate 43f. At this time, in the cutting device In 1-2, the pressure plate 43f and the support portion 91a are hermetically sealed by the seal ring R. Next, the operator can mount the serpentine portion 42 after attaching the blade detecting mechanism 92 to the support portion 91a.

As described above, according to the cutting device 1-2 of the second embodiment, in addition to the effect of the cutting device 1-1 of the first embodiment, the insertion hole 43e of the side wall 43a is formed so that the operator can easily be in the column. Since the size of the blade detecting means 90 is attached and detached to the portion 50a, maintenance such as replacement of the blade detecting means 90 can be easily performed.

Further, according to the cutting apparatus 1-2 of the second embodiment, the pressure plate 43f which can seal the watertightly between the side wall 43a and the sealing member 43h is provided, and the insertion hole 43g of the pressure plate 43f and the support are supported by the seal ring R. The gap between the portions 91a is watertightly sealed. Therefore, according to the cutting apparatus 1-2 of the second embodiment, it is possible to prevent the cutting fluid from leaking into the apparatus main body 2 by the respective insertion holes 43e and 43g.

Further, in the first embodiment, the cutting device 1-1 is a facing dual dicer that faces the cutting inserts 31, but is not limited thereto, and may be, for example. A so-called parallel dual dicer that arranges the two main shafts 32 at intervals in the cutting feed direction may be a cutter having one cutting means 30.

Further, in the first embodiment, the cutting device 1-1 performs cutting processing on the workpiece W supported by the opening of the annular frame F through the adhesive tape T, but the invention is not limited thereto. It is also possible, for example, that the workpiece W is not adhered to the adhesive tape T.

20‧‧‧Working table

3‧‧‧Device base

30‧‧‧ cutting means

40‧‧‧ cutting feed means

43‧‧‧Water tank

50‧‧‧Door frame

50a‧‧‧ pillar

50b‧‧ ‧ Beam Department

50c‧‧‧ openings

60‧‧‧Divided feeding means

70‧‧‧ cut-in means of feeding

90‧‧‧ Blade detection means

Claims (3)

A cutting device is a cutting device comprising a working clamping table, a cutting feeding device, a door frame, a cutting device and a blade detecting device, wherein the working clamping table has a holding surface capable of holding a workpiece, and the cutting feeding means is configured And moving the aforementioned clamping table in a cutting feed direction parallel to the holding surface, the gantry being erected on the base of the device across the cutting and feeding means and having an allowable The opening for moving the clamping table, the cutting means is fixed on the door frame in such a manner as to be movable in a cutting feed direction orthogonal to the holding surface, and is processed by the cutting blade to cut the working clamping table The blade detecting means can detect the position of the cutting insert in the cutting infeed direction, wherein the blade detecting means is constituted by a supporting member and a blade detecting mechanism, and the supporting member is fixedly disposed on the device base The column portion of the aforementioned portal frame extends toward the side of the working clamping table, and the blade detecting mechanism is installed The distal end portion of the support member and having a light emitting portion and a light receiving portion. The cutting device according to claim 1, wherein the cutting means has a cutting fluid supply means for supplying a cutting fluid to the workpiece, and the cutting feed means is fixed to the cutting feed direction of the work chuck. Both sides and covering the aforementioned cutting feed means a serpentine tube portion, and a grooved water tank extending along the cutting feed means and capable of receiving the cutting fluid guided by the serpent tube portion, protected from adhesion of the cutting fluid, the support member penetrating through the water tank The side wall supports the aforementioned blade detecting mechanism. The cutting device according to claim 2, wherein the support member penetrates a side wall of the water tank with a gap, and seals a gap between the water tank and the support member by a seal ring fitted to an outer circumference of the support member.