JP6460763B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus for cutting a plate-like object such as a semiconductor wafer.

  A semiconductor wafer in which devices such as ICs are formed in a plurality of regions partitioned by dividing lines called streets is divided into a plurality of semiconductor chips corresponding to each device by, for example, a cutting apparatus equipped with a cutting blade. Embedded in electronic devices.

  By the way, when the wear of the cutting blade described above progresses to a certain extent, the amount of cutting becomes insufficient, and a plate-like object such as a semiconductor wafer cannot be appropriately cut. Therefore, in recent years, a cutting apparatus including a detection mechanism that optically detects the state of the cutting blade has been proposed (see, for example, Patent Document 1).

JP 2009-83072 A

  This detection mechanism is provided on a blade cover that covers the cutting blade, and can detect the state of the cutting blade in real time even during cutting of a plate-like object. However, in this detection mechanism, the detection accuracy tends to decrease due to the influence of a working fluid (pure water or the like) sprayed on the cutting blade during cutting.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a cutting apparatus capable of detecting the state of a cutting blade with high accuracy.

According to the present invention, an annular cutting blade that is rotatably attached to the tip of the spindle, a blade cover that covers the cutting blade, blade detection means that is provided on the blade cover and detects the cutting blade, A cutting fluid supply means for supplying a processing fluid to the cutting blade, wherein the blade detection means has a light emitting window facing a first surface perpendicular to the rotation axis of the cutting blade. And a light emitting portion disposed on the first surface side of the cutting blade, a second surface opposite to the first surface, and a light receiving window facing the light emitting window, on the second surface side of the cutting blade. A detection block that detects a position of a radial end portion of the cutting blade, and a machining liquid removal block adjacent to the detection block on the upstream side in the rotation direction of the cutting blade And including The machining fluid removal block is formed with a groove along the circumferential direction of the cutting blade into which the end of the cutting blade can enter, and the groove has an opening through which the end of the cutting blade enters. A bottom portion that faces the outer peripheral surface of the cutting blade and is narrower than the opening, and is inclined with respect to the first surface and the second surface of the cutting blade and between the opening and the bottom. has a side wall portion covering the end portion of the cutting blade, and from the opening toward the bottom portion is formed to the width of the narrowed tapered, the bottom portion, the side surface of the working fluid removal block A plurality of through-holes communicating with the outside are formed along the groove, and machining fluid that enters the groove as the cutting blade rotates gathers at the bottom along the side wall and passes through the through-hole. characterized in that it is discharged from the side surface of the liquid removal block outside Cutting device is provided.

  In the present invention, air is sprayed from the bottom toward the opening at a position closer to the detection block than the through hole at the bottom to prevent the mist-like processing liquid from entering the detection block. It is preferable that an air injection port is formed.

  The cutting apparatus according to the present invention includes blade detection means including a machining liquid removal block adjacent to the detection block on the upstream side in the rotation direction of the cutting blade. The machining liquid removal block is provided with a groove into which the end of the cutting blade can enter, and a through-hole communicating with the outside of the machining liquid removal block is formed at the bottom of the groove.

  Therefore, the machining liquid that enters the groove as the cutting blade rotates is discharged to the outside of the machining liquid removal block through the through hole. That is, most of the machining fluid is discharged to the outside before reaching the detection block located downstream in the rotation direction of the cutting blade. Therefore, according to the cutting device of the present invention, it is possible to detect the state of the cutting blade with high accuracy while suppressing the influence of the machining fluid on the detection block.

It is a figure which shows a cutting device typically. FIG. 2A is a diagram schematically illustrating a configuration example of the cutting unit, and FIG. 2B is a diagram schematically illustrating a configuration example of the detection block. FIG. 3A and FIG. 3B are diagrams schematically illustrating a configuration example of the machining liquid removal block. It is a figure which shows typically the structural example of the process liquid removal block provided with the through-hole which concerns on a modification.

  Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a diagram schematically showing a cutting apparatus according to the present embodiment. As shown in FIG. 1, the cutting device 2 includes a base 4 that supports each structure.

  A rectangular opening 4 a that is long in the X-axis direction (front-rear direction) is formed on the upper surface of the base 4. In this opening 4a, there are provided an X-axis moving table 6, an X-axis moving mechanism (not shown) for moving the X-axis moving table 6 in the X-axis direction, and a dustproof and drip-proof cover 8 that covers the X-axis moving mechanism. Yes.

  The X-axis movement mechanism includes a pair of X-axis guide rails (not shown) parallel to the X-axis direction, and an X-axis movement table 6 is slidably installed on the X-axis guide rails. A nut portion (not shown) is provided on the lower surface side of the X-axis moving table 6, and an X-axis ball screw (not shown) parallel to the X-axis guide rail is screwed to the nut portion.

  An X-axis pulse motor (not shown) is connected to one end of the X-axis ball screw. By rotating the X-axis ball screw with the X-axis pulse motor, the X-axis moving table 6 moves in the X-axis direction along the X-axis guide rail.

  On the X-axis moving table 6, a chuck table 10 for sucking and holding a plate-like object (not shown) to be processed is provided. The plate-like object is, for example, a disk-shaped semiconductor wafer, a sapphire substrate, or the like, and is supported by an annular frame via a dicing tape attached to the lower surface side. Around the chuck table 10, four clamps 12 for holding and fixing the annular frame from four directions are provided.

  The chuck table 10 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis parallel to the Z-axis direction (vertical direction). Further, when the X-axis moving table 6 is moved in the X-axis direction by the X-axis moving mechanism, the chuck table 10 is processed and fed.

  The upper surface of the chuck table 10 is a holding surface 10a for sucking and holding a plate-like object. The holding surface 10 a is connected to a suction source (not shown) through a flow path (not shown) formed inside the chuck table 10.

  On the upper surface of the base 4, a gate-type support structure 16 that supports the cutting unit 14 is disposed so as to straddle the opening 4 a. A cutting unit moving mechanism 18 that moves the cutting unit 14 in the Y-axis direction (left-right direction) and the Z-axis direction (vertical direction) is provided on the upper front surface of the support structure 16.

  The cutting unit moving mechanism 18 includes a pair of Y-axis guide rails 20 arranged on the front surface of the support structure 16 and parallel to the Y-axis direction. A Y-axis moving plate 22 constituting the cutting unit moving mechanism 18 is slidably installed on the Y-axis guide rail 20.

  A nut portion (not shown) is provided on the back surface side (rear surface side) of the Y-axis moving plate 22, and a Y-axis ball screw 24 parallel to the Y-axis guide rail 20 is screwed to the nut portion. Yes. A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 24. If the Y-axis ball screw 24 is rotated by the Y-axis pulse motor, the Y-axis moving plate 22 moves in the Y-axis direction along the Y-axis guide rail 20.

  A pair of Z-axis guide rails 26 parallel to the Z-axis direction are provided on the surface (front surface) of the Y-axis moving plate 22. A Z-axis moving plate 28 is slidably installed on the Z-axis guide rail 26.

  A nut portion (not shown) is provided on the back surface side (rear surface side) of the Z-axis moving plate 28, and a Z-axis ball screw 30 parallel to the Z-axis guide rail 26 is screwed into the nut portion. Yes. A Z-axis pulse motor 32 is connected to one end of the Z-axis ball screw 30. When the Z-axis ball screw 30 is rotated by the Z-axis pulse motor 32, the Z-axis moving plate 28 moves in the Z-axis direction along the Z-axis guide rail 26.

A cutting unit 14 for cutting a plate-like object is provided below the Z-axis moving plate 28. In addition, a camera 34 that images the upper surface side of the plate-like object is installed at a position adjacent to the cutting unit 14. If the Y-axis moving plate 22 is moved in the Y-axis direction by the cutting unit moving mechanism 18 described above, the cutting unit 14 and the camera 34 are indexed and the Z-axis moving plate 28 is moved in the Z-axis direction to cut. The unit 14 and the camera 34 are moved up and down.

  The cutting unit 14 includes an annular cutting blade 36 attached to one end side (tip portion) of a spindle (not shown) that constitutes a rotation axis parallel to the Y-axis direction. A rotation drive source (not shown) such as a motor is connected to the other end side of the spindle, and rotates the cutting blade 36 attached to the spindle.

  FIG. 2A is a diagram schematically illustrating a configuration example of the cutting unit 14. The cutting blade 36 is fixed so as to be sandwiched between a pair of flanges 38 attached to one end side of the spindle. The cutting blade 36 is a so-called washer blade, and is formed in an annular shape by mixing abrasive grains with a binder, for example. As the cutting blade 36, a so-called hub blade in which a cutting blade is provided on the outer periphery of a disk-shaped support base may be used.

  As shown in FIG. 2A, the cutting blade 36 of the present embodiment rotates in the clockwise rotation direction A by the rotational force transmitted from a rotational drive source such as a motor. The outer periphery of the cutting blade 36 is covered with a blade cover 40 except for the lower part. The rear part of the blade cover 40 is constituted by a first machining liquid supply block 42.

  A pair of substantially L-shaped nozzles (working fluid supply means) 42 a sandwiching the lower portion of the cutting blade 36 is fixed to the lower end of the first working fluid supply block 42. A processing liquid such as pure water is supplied to the nozzle 42 a from a processing liquid supply source 44 through a connector 42 b provided on the upper part of the first processing liquid supply block 42.

  A plurality of slits (not shown) are formed on the inner surface of the nozzle 42 a facing the cutting blade 36. The cutting blade 36 is cooled and cleaned by the processing liquid supplied from the processing liquid supply source 44 through the plurality of slits of the nozzle 42a.

  On the other hand, the front portion of the blade cover 40 is constituted by a second machining liquid supply block 46. A supply hole (not shown) for supplying the machining fluid to the cutting blade 36 is formed on the rear surface side of the second machining fluid supply block 46.

  The supply hole is connected to the machining liquid supply source 44 via a connector 46 a provided at the upper part of the second machining liquid supply block 46. The cutting blade 36 is cooled and cleaned by the machining fluid supplied from the machining fluid supply source 44 through the supply hole.

  A blade detection mechanism (blade detection means) 48 for detecting the state of the cutting blade 36 is provided at a position between the first machining fluid supply block 42 and the second machining fluid supply block 46.

  The blade detection mechanism 48 includes a central detection block 48a, and a first machining fluid supply block 42 and a machining fluid removal block 48b sandwiched between the detection blocks 48a. That is, the machining fluid removal block 48b is adjacent to the upstream side in the rotation direction A of the cutting blade 36 with respect to the detection block 48a.

  FIG. 2B is a diagram schematically illustrating a configuration example of the detection block 48a. As shown in FIG. 2B, the detection block 48a includes a light emitting portion 52 disposed on the first surface 36a side perpendicular to the rotation axis of the cutting blade 36, and a second opposite to the first surface 36a. And a light receiving portion 54 disposed on the surface 36b side.

  The light emitting unit 52 includes, for example, a light source 52 a and a light emitting window 52 b that guides light emitted from the light source 52 a to the cutting blade 36. The light emitting window 52 b faces the first surface 36 a of the cutting blade 36. However, the light emitting unit 52 is not necessarily limited to the above-described configuration as long as it is configured to be able to irradiate the first surface 36a of the cutting blade 36 with light.

  The light receiving unit 54 includes, for example, a light receiving window 54a that receives light from the light emitting unit 52, a mirror 54b that reflects light transmitted through the light receiving window 54a, and a lens 54c that collects and reflects the light reflected by the mirror 54b. , And an image sensor 54d that images an image formed by the lens 54c. The light receiving window 54a faces the second surface 36b of the cutting blade 36 and the light emitting window 52b, and receives light from the light emitting window 52b not blocked by the cutting blade 36.

  A display device 56 is connected to the image sensor 54d. The display device 56 displays an image formed based on the light received by the light receiving window 54a. Based on the formed image, the operator can detect the position of the end portion in the radial direction of the cutting blade 36 in real time, for example.

  However, the light receiving unit 54 is not necessarily limited to the above-described configuration. For example, instead of acquiring an image of the cutting blade 36, the light receiving unit 54 may be configured to detect the intensity of light that is not blocked by the cutting blade 36.

  3A and 3B are diagrams schematically illustrating a configuration example of the machining liquid removal block 48b. As shown in FIGS. 3A and 3B, a groove 58 is formed along the circumferential direction of the cutting blade 36 on the cutting blade 36 side of the machining fluid removal block 48b. The groove 58 is formed in a manner that allows the cutting blade 36 to enter.

  The opening 58a located on one end (lower end) side in the depth direction of the groove 58 is formed to have a predetermined width (length in the rotation axis direction of the cutting blade 36) into which the end of the cutting blade 36 can enter. . On the other hand, the width of the bottom 58b located on the other end (upper end) side in the depth direction of the groove 58 is narrower than the width of the opening 58a. The outer peripheral surface 36c of the cutting blade 36 faces the bottom portion 58b.

  Between the opening 58a and the bottom 58b, a side wall 58c inclined with respect to the first surface 36a and the second surface 36b of the cutting blade 36 is provided, and the end of the cutting blade 36 is the side wall. 58c. As described above, the groove 58 is formed in a tapered shape having a width that decreases from the opening 58a toward the bottom 58b.

  A plurality of through holes 60 are formed in the bottom 58b of the groove 58 so as to communicate with the outside of the machining liquid removal block 48b. The machining fluid that has been scattered along with the rotation of the cutting blade 36 and has entered the groove 58 gathers at the bottom 58b along the side wall 58c, and passes through the through hole 60 to form the machining fluid removal block 48b as shown in FIG. It is discharged from the side.

  The machining fluid flows from the upstream side in the rotation direction A toward the downstream side as the cutting blade 36 rotates. Therefore, by forming the tapered groove 58 and the through hole 60 in the upstream processing liquid removal block 48b as in this embodiment, the processing liquid reaching the downstream detection block 48a can be sufficiently reduced.

  As shown in FIG. 3A, an air injection port 62 is provided at the bottom 58b of the groove 58 at a position downstream of the through hole 60 (on the detection block 48a side). The air injection port 62 is connected to an air supply source 64. By supplying air from the air supply source 64 and generating an air flow from the bottom 58b to the opening 58a, it is possible to prevent the mist-like machining liquid from entering the detection block 48a.

  As described above, the cutting apparatus 2 according to the present embodiment includes the blade detection mechanism (blade detection means) 48 including the machining liquid removal block 48b adjacent to the detection block 48a on the upstream side in the rotation direction A of the cutting blade 36. It has. The machining liquid removal block 48b is provided with a groove 58 into which the end of the cutting blade 36 can enter, and a bottom hole 58b of the groove 58 is formed with a through hole 60 that communicates with the outside of the machining liquid removal block 48b. Yes.

  Therefore, the machining fluid that enters the groove 58 as the cutting blade 36 rotates is discharged to the outside of the machining fluid removal block 48 b through the through hole 60. That is, most of the machining fluid is discharged to the outside before reaching the detection block 48 a located downstream in the rotation direction A of the cutting blade 36. Therefore, according to the cutting device 2 according to the present embodiment, it is possible to detect the state of the cutting blade 36 with high accuracy while suppressing the influence of the machining fluid on the detection block 48a.

  An air injection port 62 is provided on the bottom 58b of the groove 58 at a position closer to the detection block 48a than the through hole 60, so that the intrusion of a mist-like processing liquid into the detection block 48a can be prevented. Therefore, the influence of the machining fluid on the detection block 48a can be further suppressed, and the state of the cutting blade 36 can be detected with higher accuracy.

  In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the above embodiment, the plurality of through holes 60 are formed, but the machining liquid removal block 48b may have only one through hole. Further, the shape of the through hole is not particularly limited. For example, in the above embodiment, the through hole opened in a circular shape is formed, but a through hole opened in a slit shape or the like may be formed.

  Furthermore, the shape of the inner surface of the through hole is not particularly limited. FIG. 4 is a diagram schematically illustrating a configuration example of the machining liquid removal block 48b including the through hole according to the modification. In FIG. 4, a through hole 70 having a smooth inner surface without corners is provided in the machining liquid removal block 48b. In this case, since the resistance to the flow of the machining liquid is reduced, it is easy to discharge the machining liquid to the outside of the machining liquid removal block 48b.

  In addition, the configurations, methods, and the like according to the above-described embodiments can be appropriately modified and implemented without departing from the scope of the object of the present invention.

DESCRIPTION OF SYMBOLS 2 Cutting device 4 Base 4a Opening 6 X-axis moving table 8 Dust-proof drip-proof cover 10 Chuck table 10a Holding surface 12 Clamp 14 Cutting unit 16 Support structure 18 Cutting unit moving mechanism 20 Y-axis guide rail 22 Y-axis moving plate 24 Y-axis Ball screw 26 Z-axis guide rail 28 Z-axis moving plate 30 Z-axis ball screw 32 Z-axis pulse motor 34 Camera 36 Cutting blade 36a First surface 36b Second surface 36c Outer peripheral surface 38 Flange 40 Blade cover 42 First machining fluid supply block 42a Nozzle (working fluid supply means)
42b coupling tool 44 machining fluid supply source 46 second machining fluid supply block 46a coupling tool 48 blade detection mechanism (blade detection means)
48a Detection block 48b Processing liquid removal block 52 Light emitting part 52a Light source 52b Light emitting window 54 Light receiving part 54a Light receiving window 54b Mirror 54c Lens 54d Image sensor 56 Display device 58 Groove 58a Opening part 58b Bottom part 58c Side wall part 60, 70 Through hole 62 Air injection Port 64 Air supply source A Direction of rotation

Claims (2)

An annular cutting blade rotatably attached to the tip of the spindle, a blade cover covering the cutting blade, blade detecting means provided on the blade cover for detecting the cutting blade, and a working fluid on the cutting blade A machining fluid supply means for supplying
The blade detecting means includes
A light emitting portion having a light emitting window opposed to a first surface perpendicular to the rotation axis of the cutting blade and disposed on the first surface side of the cutting blade; and a second surface opposite to the first surface And a light receiving portion that has a light receiving window facing the light emitting window and is disposed on the second surface side of the cutting blade, and a detection block that detects a position of a radial end portion of the cutting blade,
A machining fluid removal block adjacent to the detection block on the upstream side in the rotational direction of the cutting blade,
In the machining fluid removal block, a groove is formed along the circumferential direction of the cutting blade into which the end of the cutting blade can enter,
The groove includes an opening into which the end of the cutting blade enters, a bottom portion facing the outer peripheral surface of the cutting blade and narrower than the opening, the first surface and the second of the cutting blade. A side wall portion that is inclined with respect to the surface and covers the end portion of the cutting blade between the opening portion and the bottom portion, and is formed in a tapered shape having a width that decreases from the opening portion toward the bottom portion. Has been
In the bottom portion, a plurality of through holes are formed along the groove to communicate with the outside on the side surface of the machining liquid removal block.
A cutting apparatus in which the machining liquid that enters the groove as the cutting blade rotates gathers at the bottom along the side wall and is discharged from the side surface of the machining liquid removal block through the through hole. .   An air injection port that prevents air from entering the detection block by injecting air from the bottom toward the opening at a position closer to the detection block than the through hole. The cutting apparatus according to claim 1, wherein: is formed.