CN111230673A - Double-shaft double-gantry dicing saw with horizontally-arranged Y-axis guide rails - Google Patents

Double-shaft double-gantry dicing saw with horizontally-arranged Y-axis guide rails Download PDF

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Publication number
CN111230673A
CN111230673A CN202010054916.0A CN202010054916A CN111230673A CN 111230673 A CN111230673 A CN 111230673A CN 202010054916 A CN202010054916 A CN 202010054916A CN 111230673 A CN111230673 A CN 111230673A
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CN
China
Prior art keywords
axis
axle
double
guide rails
module
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Withdrawn
Application number
CN202010054916.0A
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Chinese (zh)
Inventor
朱晔
陈旻皓
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Wuxi Lido Technology Co Ltd
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Wuxi Lido Technology Co Ltd
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Priority to CN202010054916.0A priority Critical patent/CN111230673A/en
Publication of CN111230673A publication Critical patent/CN111230673A/en
Withdrawn legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/02—Frames; Beds; Carriages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B24B41/061—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064—Devices for the automatic drive or the program control of the machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/024—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with the stock carried by a movable support for feeding stock into engagement with the cutting blade, e.g. stock carried by a pivoted arm or a carriage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/029—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a plurality of cutting blades

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)

Abstract

The invention relates to a double-shaft double-gantry dicing saw with horizontally arranged Y-axis guide rails, which comprises a base, wherein an X-axis module is arranged on the base, an R-axis module is arranged on the X-axis module, double gantries are arranged on the base positioned on two sides of the X-axis module, two Y-axis modules are arranged at the tops of two cross beams of the double gantries along a Y axis, the two Y-axis modules are symmetrically arranged relative to the X-axis module, a Z-axis module is arranged on each Y-axis module, a main shaft assembly extending into a gap between the double gantries and positioned on the R-axis module is arranged at the lower part of each Z-axis module, and the two main shaft assemblies and the two Z-axis modules are symmetrical relative to. The invention adopts a symmetrical double-module structure, improves the structural stability, reduces the influence of thermal stress deformation, improves the positioning and processing precision, greatly improves the cutting efficiency and saves the cost.

Description

Double-shaft double-gantry dicing saw with horizontally-arranged Y-axis guide rails
Technical Field
The invention relates to the technical field of gantry scribing machines, in particular to a double-shaft double-gantry scribing machine with a horizontally arranged Y-axis guide rail.
Background
The structural form of the existing abrasive wheel scribing machine is divided into two different designs of a cantilever type and a gantry type. The equipment for processing small-sized workpieces such as 4-6 inches of wafers is mostly cantilever type, and the main shaft of the equipment is suspended above the turntable; and the equipment of processing jumbo size work piece more than 8 cun is mostly the planer-type, and its Y axle strides on the X axle through fixed portal frame, has avoided the main shaft to hang the condition on the revolving stage, therefore has higher rigidity and structural stability than the cantilever type.
Divide into unipolar and biax two kinds in current gantry structure scribing machine, biax scribing machine has higher efficiency, can balance cutting stress during the biax cutting, and better control collapses the limit. The Y-axis guide rail layout fixed on the portal frame is that two guide rails are arranged on the side face of the portal frame in parallel, and the structural scheme of side mounting suspension is adopted, because the Y-axis guide rail assembly is mounted in a side direction, the gravity center is inclined to one side, the structural stress is completely lateral stress, the structural rigidity is influenced, and the structural stress is unbalanced.
Because many application occasions of the dicing saw need higher precision, for example, the cutting of silicon wafers requires that the positioning precision within a 200mm stroke is within 2um, the precision of an equipment system can be hard to be considered by factors such as structural strength, part deformation, vibration, heat influence and the like, and the structure is easy to deform and has unstable precision risk due to unbalanced structural stress, vibration and the like; the structure puts high quality requirements on transmission parts and fastening parts, and increases the production cost; the structure adopts a single gantry non-centrosymmetric structure, and has great influence on the stability of the system structure due to heat influence and vibration; when the structure moves in a double shaft mode, the influence of factors such as structural strength, part deformation, vibration, heat influence and the like is more obvious than that of a single shaft.
Disclosure of Invention
The applicant aims at the defects in the prior art and provides a double-shaft double-gantry dicing saw with a horizontally arranged Y-axis guide rail, which is reasonable in structure, so that the overall structural stability of the dicing saw is improved, and the influence of factors such as thermal deformation, vibration and thermal influence on processing is reduced.
The technical scheme adopted by the invention is as follows:
the utility model provides a two longmen structure scribers of biax that Y axle guide rail level was arranged, includes the base, is equipped with X axle module on the base, installs R axle subassembly on the X axle module, is located to be equipped with two longmen shelves on the base of X axle module both sides, and two crossbeam tops of two longmen shelves are equipped with two Y axle modules along the Y axle, two Y axle modules are symmetrical about X axle module and are set up, install Z axle module on every Y axle module, and the lower part of Z axle module is equipped with and stretches into interval between the two longmen shelves, is located main shaft assembly on the R axle subassembly, two main shaft assembly, two Z axle modules all are symmetrical about X axle module.
As a further improvement of the above technical solution:
the mounting structure of two Y axle modules does: including locating two Y axle guide rails at two crossbeam tops respectively, there are two Y axle slip tables on two Y axle guide rails through slider assembly slidable mounting respectively, through Z to the support mounting on the top surface of every Y axle slip table Z axle module, its structure is: including locating along the parallel interval of Z axle Z has the Z axle slip table to two Z guide rails of support side through slider assembly slidable mounting on the guide rail to two Z, Z axle slip table bottom has the portion of transversely bending along the Y axle extension, installs the cutting main shaft through the main shaft connecting seat on its bottom surface.
Two Y-axis screw rods which are symmetrically arranged are arranged at the top of the cross beam on one side, one end of each Y-axis screw rod is in transmission connection with a Y-axis motor, the other end of each Y-axis screw rod is fixed through a bearing support, and Y-axis nuts connected with the bottoms of the two Y-axis sliding tables are respectively screwed on the two Y-axis screw rods.
The structure of the X-axis module is as follows: including X to the bottom plate, X is to installing two parallel intervals along the X of X axle extension to the X on the bottom plate to the guide rail, and two X are to the X of having fixed R axle subassembly to the slip table through slider assembly slidable mounting on the guide rail.
The structure of the R shaft component is as follows: the vacuum ceramic vacuum cup comprises a triangular level adjusting plate, wherein the triangular level adjusting plate is connected with a direct-drive rotary motor, and a vacuum ceramic suction cup is installed at the output end of the direct-drive rotary motor.
An X-direction lead screw is arranged on the X-direction bottom plate between the two X-direction guide rails, is connected with the X-direction sliding table through a lead screw nut screwed with the X-direction lead screw, and one end of the X-direction lead screw is in transmission connection with an X-direction motor.
And a Z-direction motor is arranged on the Z-direction support between the two Z-direction guide rails, an output shaft of the Z-direction motor is in transmission connection with a Z-direction lead screw, and a Z-direction nut assembly connected with the Z-direction sliding table is screwed on the Z-direction lead screw.
The invention has the following beneficial effects:
the invention has compact and reasonable structure and convenient operation. The Y-axis guide rail is horizontally arranged, the pressure applied on the Y-axis guide rail is positive pressure which is consistent with the gravity direction, lateral force and torque are avoided, the Y-axis guide rail is the best use condition of the stress condition of the linear guide rail, and the stress of the whole structure is stable. The Y-axis module, the Z-axis module and the spindle assembly are symmetrically arranged in a double-module structure, the structure operates stably, the double-module structure performs cutting operation simultaneously, excellent structural stability can be kept, positioning accuracy is kept, and machining efficiency is improved. The dicing saw needs higher precision in many application occasions, for example, the cutting of a silicon wafer requires that the positioning precision within a 200mm stroke is within 2um, and the factors such as structural strength, part deformation, vibration, thermal influence and the like can all find the precision of an equipment system hard; meanwhile, the structure is stressed stably, so that the requirements on the quality and rigidity of transmission parts and fastening parts are reduced, and the production cost is saved.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is another view of fig. 1.
FIG. 3 is a schematic view of the mounting structure of the Y-axis module of the present invention.
FIG. 4 is a schematic view of an installation structure of the Z-axis module of the present invention.
Fig. 5 is a schematic structural view of a Z-axis module driving part according to the present invention.
FIG. 6 is a schematic structural view of the spindle assembly of the present invention.
FIG. 7 is a schematic structural diagram of an X-axis module according to the present invention.
Fig. 8 is a schematic view of the installation of the R-axis group of the present invention.
Wherein: 1. a base; 2. an X-axis module; 3. a Y-axis module; 4. an R shaft assembly; 5. a spindle assembly; 6. a Z-axis module; 7. a double gantry frame; 201. an X-direction motor; 202. an X-direction guide rail; 203. an X-direction sliding table; 204. an X-direction bottom plate; 205. an X-direction screw rod; 401. a vacuum ceramic chuck; 402. a direct-drive rotary motor; 403. a triangular horizontal adjusting plate; 310. a Y-axis lead screw; 302. a Y-axis guide rail; 303. a Y-axis sliding table; 304. a Y-axis motor; 309. a Y-axis nut; 311. a bearing support; 501. a main shaft connecting seat; 502. cutting the main shaft; 601. a Z-axis sliding table; 602. a Z-direction bracket; 603. a Z-direction motor; 604. a Z-direction guide rail; 605. a Z-direction screw rod; 606. and a Z-direction nut component.
Detailed Description
The following describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1 and 2, the double-shaft double-gantry dicing saw with horizontally arranged Y-axis guide rails of the embodiment includes a base 1, an X-axis module 2 is disposed on the base 1, an R-axis module 4 is mounted on the X-axis module 2, a double-gantry 7 is disposed on the base 1 on two sides of the X-axis module 2, two Y-axis modules 3 are disposed on two beam tops of the double-gantry 7 along a Y axis, the two Y-axis modules 3 are symmetrically disposed with respect to the X-axis module 2, a Z-axis module 6 is mounted on each Y-axis module 3, a main shaft assembly 5 is disposed on a lower portion of the Z-axis module 6 and extends into a gap between the double-gantry 7, and the main shaft assembly 5 is disposed on the R-axis module 4, and the two main shaft assemblies 5 and the two Z-axis modules 6 are.
As shown in fig. 3 to 6, the mounting structure of the two Y-axis modules 3 is: including locating two Y axle guide rails 302 at two crossbeam tops respectively, there are two Y axle slip tables 303 through slider assembly slidable mounting respectively on two Y axle guide rails 302, through Z to support 602 installation Z axle module 6 on the top surface of every Y axle slip table 303, its structure is: including locating two Z guide rails 604 to support 602 side along the parallel interval of Z axle, have Z axle slip table 601 through slider assembly slidable mounting on two Z guide rails 604, Z axle slip table 601 bottom has horizontal portion of bending along the extension of Y axle, installs cutting main shaft 502 through main shaft connecting seat 501 on its bottom surface.
A Z-direction motor 603 is arranged on the Z-direction bracket 602 between the two Z-direction guide rails 604, the output shaft of the Z-direction motor 603 is in transmission connection with a Z-direction screw rod 605, and a Z-direction nut component 606 connected with the Z-axis sliding table 601 is screwed on the Z-direction screw rod 605.
As shown in fig. 3, two Y-axis screws 310 are symmetrically arranged at the top of the cross beam on one side, one end of each Y-axis screw 310 is in transmission connection with a Y-axis motor 304, the other end of each Y-axis screw is fixed by a bearing support 311, and Y-axis nuts 309 connected with the bottoms of the two Y-axis sliding tables 303 are respectively screwed on the two Y-axis screws 310.
As shown in fig. 7, the X-axis module 2 has the following structure: the X-direction sliding mechanism comprises an X-direction bottom plate 204, wherein two X-direction guide rails 202 which are parallel and extend along an X axis at intervals are arranged on the X-direction bottom plate 204, and an X-direction sliding table 203 for fixing an R-axis assembly 4 is arranged on the two X-direction guide rails 202 in a sliding mode through a sliding block assembly.
As shown in fig. 8, the R-shaft assembly 4 has the structure: the vacuum ceramic vacuum cup comprises a triangular level adjusting plate 403, wherein the triangular level adjusting plate 403 is connected with a direct-drive rotary motor 402, and a vacuum ceramic suction cup 401 is installed at the output end of the direct-drive rotary motor 402.
An X-direction screw rod 205 is arranged on an X-direction bottom plate 204 positioned between the two X-direction guide rails 202, and is connected with the X-direction sliding table 203 through a screw rod nut screwed with the X-direction screw rod 205, and one end of the X-direction screw rod 205 is in transmission connection with an X-direction motor 201.
In the implementation process of the invention, a workpiece to be cut is placed on a vacuum ceramic sucker 401, the levelness of the vacuum ceramic sucker 401 is adjusted through a triangular level adjusting plate 403, the workpiece is driven by a direct-drive rotary motor 402 to rotate around an R axis (parallel to a Z axis), meanwhile, the axis of a cutting spindle 502 of a spindle assembly 5 butted above the vacuum ceramic sucker 401 is parallel to a Y axis, and a blade in front of the cutting spindle 502 rotates around the axis of the cutting spindle 502 to cut and process the workpiece.
The Y-axis module 3, the Z-axis module 6 and the main shaft module 5 are symmetrically arranged into a double-module structure by the X-axis module 2, the structure is stable in operation and high in positioning accuracy, and the double-module structure can be used for simultaneously cutting, so that excellent structural stability can be maintained, and the positioning accuracy can be maintained. The double gantry frame 7 is of a symmetrical structure, is small in thermal deformation influence, is not easy to deform, shake and the like, and has unstable precision, and meanwhile, due to the fact that the structure is stable in stress, the requirements on the quality and rigidity of transmission parts and fastening parts are reduced, and production cost is reduced.
The above description is intended to be illustrative and not restrictive, and the scope of the invention is defined by the appended claims, which may be modified in any manner within the scope of the invention.

Claims (7)

1. The utility model provides a two gantry structure scribers of biax that Y axle guide rail level was arranged which characterized in that: including base (1), be equipped with X axle module (2) on base (1), install R axle subassembly (4) on the X axle module (2), be located to be equipped with two portal (7) on base (1) of X axle module (2) both sides, be equipped with two Y axle modules (3) along the Y axle on two crossbeams in the top of two portal (7), two Y axle modules (3) are about X axle module (2) symmetry setting, install Z axle module (6) on every Y axle module (3), and the lower part of Z axle module (6) is equipped with and stretches into interval department between two portal (7) two crossbeams, is located main shaft assembly (5) on R axle subassembly (4), two main shaft assembly (5), two Z axle modules (6) all are symmetrical about X axle module (2).
2. The double-shaft double-gantry dicing saw with the horizontally arranged Y-axis guide rails according to claim 1, wherein: the mounting structure of two Y axle modules (3) does: including two Y axle guide rails (302) of locating two crossbeam tops respectively, have two Y axle slip tables (303) through slider assembly slidable mounting respectively on two Y axle guide rails (302), install to support (602) through Z on the top surface of every Y axle slip table (303) Z axle module (6), its structure is: including locating along the parallel interval of Z axle Z has Z axle slip table (601) to two Z of support (602) side to guide rail (604) through slider assembly slidable mounting on two Z to guide rail (604), Z axle slip table (601) bottom has horizontal portion of bending along the extension of Y axle, installs cutting main shaft (502) through main shaft connecting seat (501) on its bottom surface.
3. The double-shaft double-gantry dicing saw with the horizontally arranged Y-axis guide rails according to claim 2, wherein: two Y-axis screw rods (310) symmetrically arranged are mounted at the top of the cross beam on one side, one end of each Y-axis screw rod (310) is in transmission connection with a Y-axis motor (304), the other end of each Y-axis screw rod is fixed through a bearing support (311), and Y-axis nuts (309) connected with the bottoms of the two Y-axis sliding tables (303) are respectively screwed on the two Y-axis screw rods (310).
4. The double-shaft double-gantry dicing saw with the horizontally arranged Y-axis guide rails according to claim 2, wherein: the structure of the X-axis module (2) is as follows: the X-direction sliding table comprises an X-direction bottom plate (204), wherein two X-direction guide rails (202) which are parallel and spaced and extend along an X axis are arranged on the X-direction bottom plate (204), and an X-direction sliding table (203) for fixing an R shaft assembly (4) is arranged on the two X-direction guide rails (202) in a sliding mode through a sliding block assembly.
5. The double-shaft double-gantry dicing saw with the horizontally arranged Y-axis guide rails according to claim 4, wherein: the structure of the R shaft assembly (4) is as follows: the vacuum ceramic vacuum cup comprises a triangular level adjusting plate (403), wherein the triangular level adjusting plate (403) is connected with a direct-drive rotary motor (402), and a vacuum ceramic suction cup (401) is installed at the output end of the direct-drive rotary motor (402).
6. The double-shaft double-gantry dicing saw with the horizontally arranged Y-axis guide rails according to claim 4, wherein: an X-direction lead screw (205) is arranged on an X-direction bottom plate (204) between the two X-direction guide rails (202), the X-direction lead screw is connected with the X-direction sliding table (203) through a lead screw nut screwed with the X-direction lead screw, and one end of the X-direction lead screw (205) is in transmission connection with an X-direction motor (201).
7. The double-shaft double-gantry dicing saw with the horizontally arranged Y-axis guide rails according to claim 2, wherein: and a Z-direction motor (603) is arranged on a Z-direction bracket (602) positioned between the two Z-direction guide rails (604), an output shaft of the Z-direction motor is in transmission connection with a Z-direction screw rod (605), and a Z-direction nut assembly (606) connected with the Z-direction sliding table (601) is screwed on the Z-direction screw rod (605).
CN202010054916.0A 2020-01-17 2020-01-17 Double-shaft double-gantry dicing saw with horizontally-arranged Y-axis guide rails Withdrawn CN111230673A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010054916.0A CN111230673A (en) 2020-01-17 2020-01-17 Double-shaft double-gantry dicing saw with horizontally-arranged Y-axis guide rails

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Application Number Priority Date Filing Date Title
CN202010054916.0A CN111230673A (en) 2020-01-17 2020-01-17 Double-shaft double-gantry dicing saw with horizontally-arranged Y-axis guide rails

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114074380A (en) * 2022-01-19 2022-02-22 沈阳和研科技有限公司 Scribing device
CN118106873A (en) * 2024-03-14 2024-05-31 哈尔滨工业大学 A high-rigidity five-axis linkage ultra-precision grinding machine tool
CN119407974A (en) * 2024-12-25 2025-02-11 上海倍弗仑半导体设备有限公司 A semi-automatic double-blade dicing machine for 8-inch semiconductor wafers

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Publication number Priority date Publication date Assignee Title
JP2003220535A (en) * 2002-01-22 2003-08-05 Mori Seiki Co Ltd Work transfer device for machine tools
US20040090126A1 (en) * 2002-11-07 2004-05-13 Chin-Mou Hsu Structure for symmetrically disposed linear motor operated tool machine
CN200977604Y (en) * 2006-11-02 2007-11-21 福裕事业股份有限公司 Body structure of door type processing machine
CN201415278Y (en) * 2009-03-28 2010-03-03 广州市敏嘉制造技术有限公司 Double-beam planer type milling machine
CN105047555A (en) * 2014-04-23 2015-11-11 株式会社迪思科 Cutting apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003220535A (en) * 2002-01-22 2003-08-05 Mori Seiki Co Ltd Work transfer device for machine tools
US20040090126A1 (en) * 2002-11-07 2004-05-13 Chin-Mou Hsu Structure for symmetrically disposed linear motor operated tool machine
CN200977604Y (en) * 2006-11-02 2007-11-21 福裕事业股份有限公司 Body structure of door type processing machine
CN201415278Y (en) * 2009-03-28 2010-03-03 广州市敏嘉制造技术有限公司 Double-beam planer type milling machine
CN105047555A (en) * 2014-04-23 2015-11-11 株式会社迪思科 Cutting apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114074380A (en) * 2022-01-19 2022-02-22 沈阳和研科技有限公司 Scribing device
CN114074380B (en) * 2022-01-19 2022-04-22 沈阳和研科技有限公司 Scribing device
CN118106873A (en) * 2024-03-14 2024-05-31 哈尔滨工业大学 A high-rigidity five-axis linkage ultra-precision grinding machine tool
CN119407974A (en) * 2024-12-25 2025-02-11 上海倍弗仑半导体设备有限公司 A semi-automatic double-blade dicing machine for 8-inch semiconductor wafers

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