CN110487151B - Dicing saw, contact height measuring device of dicing saw and height measuring method of dicing saw - Google Patents
Dicing saw, contact height measuring device of dicing saw and height measuring method of dicing saw Download PDFInfo
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- CN110487151B CN110487151B CN201910750183.1A CN201910750183A CN110487151B CN 110487151 B CN110487151 B CN 110487151B CN 201910750183 A CN201910750183 A CN 201910750183A CN 110487151 B CN110487151 B CN 110487151B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
- G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
- G01B5/061—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness height gauges
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Abstract
The invention relates to a dicing saw, a contact height measuring device of the dicing saw and a height measuring method of the dicing saw. The scribing machine comprises a workbench, a workpiece bearing disc, a main shaft, a height measuring device and a control system, wherein the height measuring device is arranged on the workbench or the workpiece bearing disc; the height measuring device comprises a height measuring body and an acceleration sensor, wherein the height measuring body is provided with a height measuring surface which is used for being in contact with the scribing cutter to measure the height, the acceleration sensor is triggered when the scribing cutter is in contact with the height measuring body and can transmit vibration with the height measuring body, and the control system judges that the height measuring body is in contact with the scribing cutter through detecting the vibration of the height measuring body. Compared with the existing height measuring device, the height measuring device on the scribing machine completes height measurement through the detection and matching of the height measuring body and the acceleration sensor, a conductive loop is not required to be formed, the requirement on the conductivity of the scribing knife is avoided, and the problem that the existing scribing machine cannot be suitable for an insulating scribing knife and is small in application range is solved.
Description
Technical Field
The invention relates to a dicing saw, a contact height measuring device of the dicing saw and a height measuring method of the dicing saw.
Background
A dicing saw is important processing equipment in the technical field of semiconductor packaging processing, a grinding wheel dicing saw is frequently used in the market at present, a diamond dicing blade rotating at a high speed on the grinding wheel dicing saw can be continuously worn in the using process, and if the height of the dicing blade is not adjusted, the cutting depth on a workpiece can be gradually reduced. In order to ensure the accuracy of the measurement result, the abrasion degree of the scribing cutter needs to be detected on line, and the height of the main shaft relative to the workbench is adjusted according to the abrasion amount of the scribing cutter, so that scribing cutters in the current market are provided with height measuring devices for measuring the height of the scribing cutter, the height of the scribing cutter is measured through the height measuring devices, the height of the scribing cutter is adjusted in time, and the relative position of the scribing cutter and a workpiece is guaranteed to be unchanged during processing as far as possible.
For example, chinese patent application publication No. CN106671302A, publication No. 2017.05.17 discloses a parameter measuring device for a dicing saw, which includes a worktable for bearing a wafer or a silicon wafer, a cutter body disposed on the worktable, a spindle connected to the cutter body, a moving mechanism for driving the spindle to move downward and further contact the cutter body with the worktable, and a recorder for recording the horizontal height of the worktable when the spindle is connected to the cutter body and the worktable, wherein the worktable is a workpiece bearing disc for bearing a wafer or a silicon wafer, the workpiece bearing disc is disposed on the worktable of the dicing saw when in use, both the workpiece bearing disc and the cutter body need to be provided with a conductive part, and before the wafer or the silicon wafer is diced, a conductive loop formed by the worktable and a blade is used to measure a reference zero position. In the use, can pull down the back with the work piece, utilize the height measurement mode of contact to carry out the height measurement to the cutter body, the position of adjustment cutter body. The height measurement mode can not be used continuously after the edge of the workpiece bearing disc has more tool marks after multiple times of measurement, the workpiece bearing disc needs to be replaced, the measurement cost is higher, the workpiece needs to be detached during each measurement, and the measurement efficiency is low.
The traditional non-contact height measurement is that light rays penetrate along the axial direction of a scribing knife, the high-speed rotating blade shields the light rays to measure the abrasion degree of the blade, when the measuring method is used for measuring for the first time, a reference zero position needs to be measured through the contact between the scribing knife and a working bearing disc, and then the abrasion amount of the scribing knife is measured and compared with the zero position, so that the data of the scribing knife is obtained. For example, chinese patent No. CN207303045U, granted No. 2018.05.01, discloses a non-contact height measuring device for a dicing saw, which opens a protective cover during non-contact height measurement, dries the end face of an optical fiber sensor by gas ejected from two gas jet bent pipes, washes away water mist in an opposite emission region, and after the gas jet is finished, a moving mechanism carrying a dicing blade reaches a predetermined height measurement starting position, and then slowly approaches the opposite emission region of the optical fiber sensor to perform height measurement. The height measuring device also needs to measure the reference zero position through the conductive contact between the scribing knife and the work bearing disc, and both the scribing knife and the work bearing disc need to meet the conductive requirement and cannot be suitable for an insulating scribing knife.
Disclosure of Invention
The invention aims to provide a scribing machine height measuring device, which solves the problem that the current scribing machine height measuring device needs a scribing knife to be conductive, so that the application range is small; in addition, the invention also aims to provide a dicing saw to solve the problem of small application range caused by the fact that the existing dicing saw cannot be suitable for an insulating dicing knife; in addition, the invention also aims to provide a scribing machine height measurement method to solve the problem of small application range caused by the fact that the conventional scribing machine cannot be applied to an insulating scribing knife.
In order to achieve the purpose, the technical scheme of the dicing saw comprises the following steps:
a work table;
the workpiece bearing disc is arranged on the workbench;
a main shaft;
the scribing machine also comprises a height measuring device and a control system, wherein the height measuring device is arranged on the workbench or the workpiece bearing disc;
the height measuring device comprises:
the height measuring body is provided with a height measuring surface which is used for being in contact with the scribing cutter to measure the height;
the acceleration sensor is triggered when the scribing cutter is in contact with the height measuring body, vibration can be transmitted between the acceleration sensor and the height measuring body, and the control system judges that the height measuring body is in contact with the scribing cutter through detecting the vibration of the height measuring body.
The invention has the beneficial effects that: when the scribing machine is used, the scribing knife is in contact with the height measuring surface of the height measuring body, the acceleration sensor is triggered to send a signal to the control system, and the parameters of the scribing knife are obtained after the signal is processed by the control system. Compared with the existing height measuring device, the height measuring device on the scribing machine completes height measurement through the detection and matching of the height measuring body and the acceleration sensor, a conductive loop is not required to be formed, the requirement on the conductivity of the scribing knife is avoided, and the problem that the existing scribing machine cannot be suitable for an insulating scribing knife and is small in application range is solved.
The height measuring device is further optimized, in order to facilitate installation of the height measuring body, the height measuring device comprises a mounting seat fixed on the workbench, the height measuring body is detachably fixed on the mounting seat, and the acceleration sensor is fixed on the mounting seat. The height measuring body is detachably fixed on the mounting seat, so that the height measuring body can be replaced after being used for a period of time.
When the mounting seat is arranged, in order to facilitate the replacement of the height measuring body, the height measuring body is pressed on the mounting seat through a pressing cap in threaded connection with the mounting seat, the pressing cap comprises a threaded connection section in threaded connection with the mounting seat and a pressing section for pressing the height measuring body, the pressing section and the threaded connection section are axially arranged along the pressing cap, and the pressing section is provided with an inner flange for pressing the height measuring body. The height measuring body is compressed through the pressing cap, and the height measuring body is convenient to replace.
When the pressure cap is arranged, the assembling relation between the height measuring body and the pressure cap is improved, the height measuring body is provided with a step which is in compression fit with the inner flange, and the top of the height measuring body extends out of the top opening of the pressure cap so that the height measuring surface at the top of the height measuring body is higher than the top surface of the pressure cap. The height measuring surface is higher than the top surface of the pressing cap, so that the interference between the pressing cap and the scribing cutter can be avoided, and the effective area of the height measuring body is increased.
Further, under the prerequisite of pressing cap open-top is stretched out at the top of height finding body, in order to reduce cost, height finding body has horizontal symmetry plane, and height finding body is symmetry about horizontal symmetry plane from top to bottom, height finding body is equipped with two parallel height finding faces, and one of two height finding faces is in the top, and another is in the bottom, is used for supporting the cooperation with the mount pad when height finding face is in the bottom, is used for when being in the top and contacts the height finding with the scribing cutter. The height measurement body is provided with two height measurement faces, when one of the height measurement face is used for a plurality of times and cannot be used, the other height measurement face can be used in reverse, the using number of the height measurement body is reduced, the cost is reduced, and the height measurement body is symmetrically arranged and is also convenient to process.
Furthermore, as an improved scheme of the pressing cap, an elastic positioning sleeve which is arranged between the pressing section and the mounting seat and used for positioning the height measuring body is arranged on the inner side of the pressing section, and the elastic positioning sleeve comprises a mounting section assembled on the pressing section and a positioning section which is arranged on the upper side of the mounting section and is sleeved on the periphery of the height measuring body after being expanded. The elastic positioning sleeve ensures the position precision of the height measuring body and reduces the requirement on the processing precision of the pressing cap.
The elastic positioning sleeve is further optimized, the outer peripheral surface of the positioning section gradually inclines outwards from top to bottom, the inner peripheral surface of the positioning section gradually inclines outwards from top to bottom, the wall thickness of the positioning section gradually increases from top to bottom, and the elastic positioning sleeve is easy to deform and convenient to mount.
Furthermore, in order to facilitate the assembly of the elastic positioning sleeve, an annular groove is formed in the inner side of the pressing section and located on the lower side of the inner flange, and the elastic positioning sleeve is arranged in the annular groove.
The mounting base is further optimized, the mounting base comprises a sensor mounting shell, the acceleration sensor is fixed in the sensor mounting shell, and the height measuring body is detachably fixed at the top of the sensor mounting shell, so that the acceleration sensor is convenient to detect, and meanwhile, the height measuring body is also convenient to mount.
Further, under the sensor installation shell prerequisite that sets up, sensor installation shell top is sealed, and acceleration sensor passes through the seal embedment in the sensor installation shell, altimeter body pressure equipment is on sensor installation shell top surface, and sensor installation shell top seals, makes things convenient for the sensor installation, can provide great installation face installation altimeter body simultaneously.
Furthermore, on the premise of arranging the sensor mounting shell, the mounting seat comprises a sensor base fixed at the bottom of the sensor mounting shell, a leveling mechanism is arranged between the sensor base and the sensor mounting shell, and the leveling mechanism is used for leveling a supporting surface of a supporting height measuring body on the sensor mounting shell. The leveling mechanism can reduce the requirements on the machining and mounting precision of the sensor mounting shell, and ensure that the height measuring surface can be parallel or parallel to the workpiece bearing surface on the workpiece bearing plate.
Further, when setting up the sensor base, acceleration sensor passes through the seal embedment in the sensor installation shell, is equipped with the sensor line hole that passes through that supplies the sensor line that acceleration sensor is connected on the sensor base, acceleration sensor's binding post stretches out the seal and stretches into the line downthehole of crossing of sensor base, cross the downthehole insulating protective cover that stretches into in the sensor installation shell that is equipped with, binding post stretches into in the insulating protective cover. And the wiring terminal is protected, and the wiring terminal is prevented from being mistakenly contacted with the sensor base.
As a further optimization scheme for the installation seat, the installation seat comprises a sensor base fixed at the bottom of a sensor installation shell, a sensor fixing seat fixed with the sensor base is arranged on the workbench, a connecting sleeve is arranged on a peripheral sealing sleeve of the sensor base, a connecting sleeve flange fixed with the sensor fixing seat is arranged at the bottom of the connecting sleeve, a waterproof plate is clamped between the connecting sleeve flange and the sensor fixing seat, line passing holes for passing through sensor connecting lines connected with an acceleration sensor are formed in the sensor fixing seat and the sensor base, the line passing holes in the sensor fixing seat and the sensor base are communicated with each other, a line outlet in the line passing holes in the sensor fixing seat is located at the lower side of the waterproof plate, a waterproof sealing effect between the height measuring device and the workbench is guaranteed, and the sensor connecting lines.
As a further optimization scheme for the height measuring body, the height measuring body is provided with two parallel height measuring surfaces, one of the two height measuring surfaces is located at the top, the other height measuring surface is located at the bottom, the height measuring surface is used for supporting and matching with the mounting base when located at the bottom, the height measuring body is in contact with the scribing cutter to measure the height when located at the top, the height measuring body is provided with the two height measuring surfaces, when one of the height measuring surfaces is used for a plurality of times and cannot be used, the other height measuring surface can be used in a reverse mode, the using number of the height measuring body is reduced, the cost is reduced, and the height measuring body is symmetrical and convenient to process.
The invention relates to a technical scheme of a scribing machine height measuring device, which comprises the following steps:
scribing machine height finding device includes:
the mounting seat is fixedly arranged on a workbench or a workpiece bearing disc of the dicing saw;
the height measuring body is detachably fixed on the mounting seat and is provided with a height measuring surface used for being in contact with the scribing cutter to measure the height;
and the acceleration sensor is fixed on the mounting seat, is triggered when the scribing cutter is in contact with the height measuring body, can transmit vibration with the height measuring body, and judges that the height measuring body is in contact with the scribing cutter according to the detection result of the acceleration sensor by detecting the vibration of the height measuring body.
The invention has the beneficial effects that: when the height measuring device is used, the scribing knife is in contact with the height measuring surface of the height measuring body, the acceleration sensor is triggered to send a signal to the control system, and the parameters of the scribing knife are obtained after the signal is processed by the control system. Compared with the existing height measuring device, the height measuring device on the scribing machine completes height measurement through the detection and matching of the height measuring body and the acceleration sensor, a conductive loop is not required to be formed, the requirement on the conductivity of the scribing knife is avoided, and the problem that the existing scribing machine cannot be suitable for an insulating scribing knife and is small in application range is solved.
Furthermore, in order to facilitate the replacement of the height measuring body, the height measuring body is pressed on the mounting seat through a pressing cap in threaded connection with the mounting seat, the pressing cap comprises a threaded connection section in threaded connection with the mounting seat and a pressing section for pressing the height measuring body, the pressing section and the threaded connection section are axially arranged along the pressing cap, and the pressing section is provided with an inner flange for pressing the height measuring body. The height measuring body is compressed through the pressing cap, and the height measuring body is convenient to replace.
When the pressure cap is arranged, the assembling relation between the height measuring body and the pressure cap is improved, the height measuring body is provided with a step which is in compression fit with the inner flange, and the top of the height measuring body extends out of the top opening of the pressure cap so that the height measuring surface at the top of the height measuring body is higher than the top surface of the pressure cap. The height measuring surface is higher than the top surface of the pressing cap, so that the interference between the pressing cap and the scribing cutter can be avoided, and the effective area of the height measuring body is increased.
Further, under the prerequisite of pressing cap open-top is stretched out at the top of height finding body, in order to reduce cost, height finding body has horizontal symmetry plane, and height finding body is symmetry about horizontal symmetry plane from top to bottom, height finding body is equipped with two parallel height finding faces, and one of two height finding faces is in the top, and another is in the bottom, is used for supporting the cooperation with the mount pad when height finding face is in the bottom, is used for when being in the top and contacts the height finding with the scribing cutter. The height measurement body is provided with two height measurement faces, when one of the height measurement face is used for a plurality of times and cannot be used, the other height measurement face can be used in reverse, the using number of the height measurement body is reduced, the cost is reduced, and the height measurement body is symmetrically arranged and is also convenient to process.
Furthermore, as an improved scheme of the pressure cap, an elastic positioning sleeve which is arranged between the compression section and the mounting seat and used for positioning the height measuring body is arranged on the inner side of the compression section, and the elastic positioning sleeve comprises a mounting section assembled on the compression section and a positioning section which is arranged on the upper side of the mounting section and is sleeved on the periphery of the height measuring body after being expanded. The elastic positioning sleeve ensures the position precision of the height measuring body and reduces the requirement on the processing precision of the pressing cap.
The elastic positioning sleeve is further optimized, the outer peripheral surface of the positioning section gradually inclines outwards from top to bottom, the inner peripheral surface of the positioning section gradually inclines outwards from top to bottom, the wall thickness of the positioning section gradually increases from top to bottom, and the elastic positioning sleeve is easy to deform and convenient to mount.
Furthermore, in order to facilitate the assembly of the elastic positioning sleeve, an annular groove is formed in the inner side of the pressing section and located on the lower side of the inner flange, and the elastic positioning sleeve is arranged in the annular groove.
The mounting base is further optimized, the mounting base comprises a sensor mounting shell, the acceleration sensor is fixed in the sensor mounting shell, and the height measuring body is detachably fixed at the top of the sensor mounting shell, so that the acceleration sensor is convenient to detect, and meanwhile, the height measuring body is also convenient to mount.
Further, under the sensor installation shell prerequisite that sets up, sensor installation shell top is sealed, and acceleration sensor passes through the seal embedment in the sensor installation shell, altimeter body pressure equipment is on sensor installation shell top surface, and sensor installation shell top seals, makes things convenient for the sensor installation, can provide great installation face installation altimeter body simultaneously.
Furthermore, on the premise of arranging the sensor mounting shell, the mounting seat comprises a sensor base fixed at the bottom of the sensor mounting shell, a leveling mechanism is arranged between the sensor base and the sensor mounting shell, and the leveling mechanism is used for leveling a supporting surface of a supporting height measuring body on the sensor mounting shell. The leveling mechanism can reduce the requirements on the machining and mounting precision of the sensor mounting shell, and ensure that the height measuring surface can be parallel or parallel to the workpiece bearing surface on the workpiece bearing plate.
Further, when setting up the sensor base, acceleration sensor passes through the seal embedment in the sensor installation shell, is equipped with the sensor line hole that passes through that supplies the sensor line that acceleration sensor is connected on the sensor base, acceleration sensor's binding post stretches out the seal and stretches into the line downthehole of crossing of sensor base, cross the downthehole insulating protective cover that stretches into in the sensor installation shell that is equipped with, binding post stretches into in the insulating protective cover. And the wiring terminal is protected, and the wiring terminal is prevented from being mistakenly contacted with the sensor base.
As a further optimization scheme for the height measuring body, the height measuring body is provided with two parallel height measuring surfaces, one of the two height measuring surfaces is located at the top, the other height measuring surface is located at the bottom, the height measuring surface is used for supporting and matching with the mounting base when located at the bottom, the height measuring body is in contact with the scribing cutter to measure the height when located at the top, the height measuring body is provided with the two height measuring surfaces, when one of the height measuring surfaces is used for a plurality of times and cannot be used, the other height measuring surface can be used in a reverse mode, the using number of the height measuring body is reduced, the cost is reduced, and the height measuring body is symmetrical and convenient to process.
The invention relates to a technical scheme of a scribing machine height measurement method, which comprises the following steps: the height measurement method of the dicing saw comprises the following steps: the vibration of the height measuring body used for being in contact with the scribing blade for height measurement is detected through the acceleration sensor, and the contact between the height measuring body and the scribing blade is judged according to the detection result of the acceleration sensor, so that the height measurement of the scribing blade is realized.
The height measurement method of the scribing machine completes height measurement through the detection and matching of the height measurement body and the acceleration sensor, a conductive loop does not need to be formed, the conductive performance of the scribing knife is not required, and the problem of small application range caused by the fact that the conventional scribing machine cannot be suitable for an insulating scribing knife is solved.
Drawings
FIG. 1 is a schematic diagram of a stage in an embodiment of a dicing saw of the present invention;
FIG. 2 is a cross-sectional view of a stage in an exemplary embodiment of a dicing saw of the invention;
FIG. 3 is a diagram of the height measurement of the height measuring device in the exemplary embodiment of the dicing saw of the present invention;
FIG. 4 is a schematic diagram of a height measurement device in an embodiment of the dicing saw of the present invention;
FIG. 5 is a cross-sectional view of a height measurement device in an embodiment of a dicing saw of the present invention;
FIG. 6 is another cross-sectional view of a height measurement device in an exemplary embodiment of a dicing saw of the invention;
FIG. 7 is a schematic view of the assembly of the height body of the height measuring device and the sensor mounting case of the embodiment of the dicing saw of the present invention;
FIG. 8 is a schematic diagram of a flexible locating sleeve in an exemplary embodiment of a dicing saw of the invention;
in the figure: 1. a wiring terminal; 2. a work table; 21. a waterproof sheet; 22. an X-direction sliding block; 3. a workpiece carrier tray; 31. a workpiece bearing surface; 4. connecting a sensor; 5. a scribing knife; 6. a height measuring device; 61. a height measuring body; 611. measuring the height surface; 612. an annular projection; 62. an acceleration sensor; 63. a sensor mounting housing; 631. installing a flange; 64. a sensor base; 641. a base wire passing hole; 642. an insulating protective sleeve; 65. a sensor holder; 651. a fixed seat wire passing hole; 66. pressing the cap; 661. a threaded connection section; 662. a compacting section; 663. an inner flange; 664. a ring groove; 67. installing a shell adjusting bolt; 68. connecting sleeves; 681. connecting sleeve flanges; 69. a bearing plate adjusting bolt; 70. a wafer; 71. fixing the bolt; 72. an elastic positioning sleeve; 721. an installation section; 722. a positioning section; 73. a base fixing bolt; 74. and (5) sealing rings.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1 to 8, the dicing saw of the present invention includes a frame, a worktable 2, and a workpiece bearing tray 3 disposed on the worktable 2, wherein the workpiece bearing tray 3 has a workpiece bearing surface 31 for bearing a workpiece to be cut, the workpiece bearing tray 3 in this embodiment is a ceramic tray, and the workpiece to be cut is a wafer 70 fixed on the ceramic tray by vacuum adsorption, so as to ensure stability of the workpiece during cutting. The main shaft moving mechanism and the main shaft arranged on the main shaft moving mechanism are arranged on the frame, the main shaft is used for installing and driving the scribing cutter 5, the main shaft moving mechanism is used for driving the main shaft to move along the Z direction and the Y direction, the workbench 2 is assembled on the frame of the scribing machine in the X direction, and the frame is provided with the workbench moving mechanism for driving the workbench 2 to move, wherein the main shaft, the main shaft moving mechanism, the workbench moving mechanism and the workpiece bearing disc 3 are all the prior art, and detailed description is omitted here. The scribing machine also comprises a control system which is in control connection with the workbench moving mechanism and the main shaft moving mechanism and is used for controlling the movement of the main shaft and the workbench 2 and further controlling the position of the scribing knife 5.
The height measuring device 6 is arranged on the workbench 2, as shown in fig. 4, 6 and 7, the height measuring device 6 comprises a mounting seat fixed on the workbench 2, a height measuring body 61 is pressed on the mounting seat, the height measuring body 61 is provided with a height measuring surface 611 which is flush with the working bearing surface 31 and is used for contacting with the scribing cutter 5 to measure the height of the scribing cutter 5, and the height measuring body 61 in the embodiment is sheet-shaped.
The mounting seat is further provided with an acceleration sensor which transmits vibration with the height measuring body 61, the acceleration sensor is triggered when the scribing blade 5 contacts with the height measuring body 61 and is in signal connection with the control system so as to send a signal to the control system after being triggered, vibration can be transmitted between the acceleration sensor and the height measuring body 61 in the embodiment, the height measuring body 61 can vibrate when the scribing blade 5 contacts with the height measuring body 61, the acceleration sensor is triggered and sends a signal to the control system after being triggered, the control system detects the vibration of the height measuring body 61 according to the signal of the acceleration sensor and further judges that the height measuring body 61 contacts with the scribing blade 5, a processor of the control system calculates parameters of the scribing blade 5 according to the received signals, and height parameters of the axis of the scribing blade, namely height parameters of the main shaft, are obtained through calculation.
The mounting base comprises a sensor mounting shell 63, a sensor base 64 fixed at the bottom of the sensor mounting shell 63 and a sensor fixing base 65 fixed at the bottom of the sensor base 64, wherein the sensor base 64 and the sensor fixing base 65 are fixed through a base fixing bolt 73. The height measuring body 61 is detachably press-mounted on the top of the sensor mounting shell 63, and a leveling mechanism is arranged between the sensor base 64 and the sensor mounting shell 63 for facilitating alignment of the workpiece bearing surface 31 and the height measuring surface 611, and is used for leveling a supporting surface of the sensor mounting shell for supporting the height measuring body, namely the top surface of the sensor mounting shell 63 in the embodiment.
Specifically, in order to facilitate the detachment and installation of the height measuring body 61, the height measuring body 61 is press-fitted on the sensor mounting case 63 through a press cap 66 in threaded connection with the sensor mounting case 63, and an external thread in threaded connection with the press cap 66 is provided on the outer peripheral surface of the sensor mounting case 63. The pressing cap 66 comprises a threaded connection section 661 in threaded connection with the sensor mounting shell 63 and a pressing section 662 for pressing the height measuring body 61, the pressing section 662 and the threaded connection section 661 are arranged along the axial direction of the pressing cap, an annular protrusion 612 is arranged on the periphery of the height measuring body 61, and the annular protrusion 612 and the outer peripheral surface of the height measuring body form two annular steps. The height measuring body 61 is provided with a horizontal symmetrical plane, the height measuring body 61 is vertically symmetrical about the horizontal symmetrical plane, the height measuring body 61 is provided with two parallel height measuring surfaces 611, one of the two height measuring surfaces 611 is arranged at the top, the other one of the two height measuring surfaces is arranged at the bottom, the height measuring surface 611 is used for supporting and matching with the sensor mounting shell 63 when being arranged at the bottom, and the height measuring surface 611 is used for contacting with the scribing cutter 5 to measure the height when being arranged at the top. After the number of times of use of one height measurement surface 611 reaches the upper limit, the same height measurement body 61 can be continuously used by replacing the height measurement surface, the service life of the height measurement body is prolonged, the number of the height measurement bodies is reduced, and the cost is reduced. In other embodiments, only one height measuring surface may be provided, and the height measuring body needs to be replaced when the height measuring surface is used for a period of time and cannot meet the requirements.
The pressing section 662 is provided with an inner flange 663 which is in pressing fit with an annular step on the height measuring body 61 to press the height measuring body 61, and the part of the height measuring body 61, which is positioned at the upper side of the annular bulge 612, extends out of the top opening of the pressing cap 66 to ensure that the height measuring surface 611 on the height measuring body 61 is higher than the top surface of the pressing cap 66.
In this embodiment, the worktable 2 is provided with a feeding space for the scribing cutter 5 to directly and horizontally move to the upper part of the wafer 70 on the workpiece tray after the height measurement by the height measurement device. After the scribing knife 5 contacts with the height measuring body 61 of the height measuring device to complete height measurement, the scribing knife 5 is controlled to directly and horizontally move to the position above the workpiece on the workpiece bearing disc 3 through the operation control of the control system, and then the scribing is carried out on the workpiece after the scribing knife moves downwards to meet the scribing depth requirement according to the height measurement result. In the process of height measurement, the scribing cutter 5 does not need to move upwards, so that the moving error is reduced, and the scribing precision is improved.
In other embodiments, when the height measuring body has a larger volume, the top surface of the pressing cap may also be slightly higher than the height of the height measuring surface of the height measuring body, and at this time, in order to avoid damage to the saw blade, the contact point of the saw blade on the height measuring surface should be close to the middle position during height measurement.
In the present embodiment, the sensor mounting case 63 has a cylindrical shape with a closed top, and can provide a sufficiently large supporting surface for supporting the height indicator 61. In addition, the acceleration sensor is sealed in the sensor mounting shell 63 through the sealant 622, and the top seal of the sensor mounting shell 63 is also convenient for filling the sealant 622 to package the acceleration sensor.
As shown in fig. 5, 6 and 7, an elastic positioning sleeve 72 for positioning the height indicator 61 is disposed between the pressing section and the mounting seat inside the pressing section 662, and in this embodiment, the elastic positioning sleeve 72 is made of rubber. As shown in fig. 8, the elastic positioning sleeve 72 includes an installation section 721 assembled on the pressing section 662 and a positioning section 722 sleeved on the periphery of the height measuring body after expansion, the outer peripheral surface of the positioning section 722 gradually inclines outwards from top to bottom, the inner peripheral surface of the positioning section 722 gradually inclines outwards from top to bottom, the wall thickness of the positioning section 722 gradually increases from top to bottom, during the installation process of the elastic positioning sleeve 72, the installation section 721 is tightly fitted with the pressing section 662 of the pressing cap 66, the elastic positioning sleeve 72 can move up and down along with the pressing cap 66, the positioning section 722 gradually expands, and under the action of the elastic positioning sleeve 72, the height measuring body 61 is kept coaxial with the elastic positioning sleeve 72, so as to ensure the position of the height measuring body. The wall thickness of the positioning section 722 gradually increases from top to bottom, so that the elastic positioning sleeve 72 can be conveniently installed. In this embodiment, the pressing section 662 of the pressing cap 66 is provided with an annular groove 664 inside, the elastic positioning sleeve 72 is disposed in the annular groove, the mounting section 721 is tightly fitted to the bottom of the annular groove 664, and the bottom side surface of the annular groove 664 is in axial stop fit with the bottom end surface of the elastic positioning sleeve 72, so as to prevent the elastic positioning sleeve 72 from coming off from the bottom of the annular groove. The top side of the annular groove 664 is arranged on the inner flange 663, and the inner flange 663 limits the elastic positioning sleeve 72 from being separated from the top of the annular groove 664. In other embodiments, the installation section of the elastic locating sleeve can be provided with an annular bulge, the inner side of the pressing cap is provided with an installation groove matched with the annular bulge, the elastic locating sleeve is installed through the matching of the annular bulge and the installation groove, and the locating end and the inner side of the pressing section keep a deformation interval. In other embodiments, the elastic locating sleeve may not act on the annular boss, for example, when the outer peripheral dimension of the height measuring body is larger than the circumferential dimension of the sensor housing, the elastic locating sleeve may act on the part below the annular boss.
Leveling mechanism is including setting up three installation shell adjusting bolt 67 on sensor installation shell 63, sensor installation shell 63 is the tube-shape, sensor installation shell 63 bottom is equipped with mounting flange 631, be equipped with on mounting flange 631 and fix sensor installation shell 63 fixing bolt 71 on sensor base 64, still be equipped with three and installation shell adjusting bolt 67 threaded connection's screw hole on mounting flange 631, three installation shell adjusting bolt 67 bottom top is on sensor base 64 top surface, can adjust the interval between sensor base 64 and the mounting flange 631 through installation shell adjusting bolt 67, realize the leveling of sensor installation shell 63 top surface, also can realize through installation shell adjusting bolt 67 when needing to carry out high small adjustment to height finding body 61.
In this embodiment, the workbench 2 is provided with the waterproof plate 21, the sensor fixing base 65 is provided with the connecting sleeve 68 sleeved on the sensor base 64, the sensor base 64 is fixed on the top surface of the sensor fixing base 65, the bottom end of the connecting sleeve 68 is provided with a connecting sleeve flange 681, the connecting sleeve flange 681 is fixed on the top surface of the sensor fixing base 65 through a bolt, and the waterproof plate 21 is clamped between the connecting sleeve flange 681 and the sensor fixing base 65. To further improve the waterproof performance, a seal ring 74 is provided between the connection sleeve 68 and the sensor base 64.
The base wire passing hole 641 and the fixing seat wire passing hole 651 which are connected in a butt joint mode are arranged on the sensor base 64 and the sensor fixing seat 65, the sensor connecting wire 4 connected with the acceleration sensor sequentially passes through the wire passing holes in the sensor base 64 and the sensor fixing seat 65, and a wire outlet of the fixing seat wire passing hole 651 is located below the waterproof board 21, so that the sensor connecting wire 4 is prevented from contacting water, and the waterproof performance is improved.
Acceleration sensor in this embodiment passes through sealed encapsulation 622 in sensor installation shell 63, as shown in fig. 7, acceleration sensor's binding post 1 stretches out sealed encapsulation 622 and stretches into in the sensor base 64, in order to prevent binding post 1 and the contact of sensor base 64, the base is crossed and is equipped with insulating protective sheath 642 in the line hole 641, insulating protective sheath 642 and the pore wall laminating of line hole 641 are crossed to the base, in the top of insulating protective sheath 642 stretches into sensor installation shell 63, binding post 1 stretches into in the insulating protective sheath 642.
The X-direction guide rail extending in the X direction is arranged on the rack, the workbench 2 comprises an X-direction sliding block 22 arranged on the X-direction guide rail in a sliding mode, and the workpiece bearing disc 3 is arranged on the X-direction sliding block 22, as shown in fig. 3, a bearing disc height adjusting mechanism arranged at the bottom of the workpiece bearing disc 3 is arranged on the workbench 2 and comprises three bearing disc adjusting bolts 69, the workpiece bearing disc 3 can be leveled and heightened through the bearing disc adjusting bolts 69, and the workpiece bearing surface 31 of the workpiece bearing disc 3 can be aligned to the height measurement surface 611 conveniently.
When the height measuring device of the scribing machine is assembled, the top surface of the sensor mounting shell is firstly adjusted to be horizontal by the mounting shell adjusting bolt 67 to ensure that the flatness error is within an allowable range, then the workpiece bearing surface 31 of the bearing plate is aligned with the height measuring surface 611 by adjusting the bearing plate adjusting bolt 69, and instruments such as a dial indicator or a micrometer are adopted for detection during adjustment. When the scribing cutter 5 needs to be subjected to height measurement, the spindle is moved above the height measurement device 6 according to the program setting, then the scribing cutter 5 arranged on the spindle keeps rotating at a high speed, meanwhile, the spindle moves downwards slowly, vibration is generated after the scribing cutter 5 touches the height measurement body 61, the acceleration sensor is triggered and sends a signal, the signal is fed back to the host through the processor of the control system, the diameter parameter and the height of the scribing cutter 5 are obtained, and the height parameter of the spindle can be obtained through the operation of the processor. During height measurement, the scribing knife 5 should be quickly lifted after touching the height measurement body 61, so that the scribing knife and the main shaft are prevented from being damaged due to excessive downward movement.
The height measuring device 6 of the dicing saw is arranged outside the workpiece bearing disc 3, and can directly measure the height on the height measuring device 6 when being used for the first time, so that the workpiece bearing disc 3 cannot be damaged, the height can be measured in the workpiece processing process, and the working continuity is ensured. Because the scribing knife 5 directly contacts the upper surface of the height measuring device 6, the height measuring device 6 does not need to be cleaned and dried, and meanwhile, the scribing knife 5 does not need to be conductive, so that the main shaft is also applicable to the scribing knife 5 with poor conductivity or insulation, and the compatibility of the main shaft is better. The position of the scribing blade 5 on the height measuring body 61 is continuously updated during height measurement, and meanwhile, the height measuring body 61 can be replaced at any time, so that the scribing blade 5 is prevented from touching the same position during height measurement to cause measurement errors.
The height measuring body in the embodiment is made of stainless steel materials, and in other embodiments, the height measuring body can also be made of other materials such as magnesium alloy and ceramics.
The height measuring body in other embodiments can also be directly fixed on the workbench through fixing pieces such as fixing bolts and clamps, and at the moment, the acceleration sensor is directly installed on the workbench, but the requirement that the acceleration sensor and the height measuring body can transmit vibration is met. The height measuring body can also be fixed in a vacuum adsorption mode or fixed by gluing.
The height measuring body in other embodiments can also be fixed on the sensor mounting shell through fasteners such as screws and the like; in other embodiments, when the machining precision of the mounting seat and the height measuring body meets the requirement, the sensor mounting shell and the sensor base can be integrally arranged without arranging a leveling mechanism.
In other embodiments, the height measuring device may also be disposed on the workpiece bearing disc, the workpiece bearing disc is provided with a mounting hole, and the height measuring device is mounted in the mounting hole of the workpiece bearing disc, so that the height measuring surface is flush with the workpiece bearing surface on the workpiece bearing disc, and at this time, the height measuring cannot be achieved during scribing.
In other embodiments, the acceleration sensor and the height measuring body may also be directly mounted on the workbench, for example, a hole is formed in the workbench, the acceleration sensor is encapsulated in the hole, and then the height measuring body is fixed on the workbench; of course, also can integrative setting the fixed block on the workstation, acceleration sensor and height measurement body are fixed on the fixed block, and acceleration sensor and height measurement body are fixed respectively at the top surface and the side of fixed block, and when acceleration sensor self sealed level was higher, need not set up the sensor installation shell and protect, only need guarantee acceleration sensor and height measurement body can transmit the vibration can.
In other embodiments, the mounting seat of the height measuring device may also be a mounting block detachably fixed on the workbench, and the acceleration sensor and the height measuring body are fixed on the top surface and the side surface of the mounting block respectively.
In other embodiments, the elastic locating sleeve can be omitted in the compressing section, so that the method is suitable for occasions with low requirement on the position precision of the height measuring body, or the position of the height measuring body is recalibrated after the position of the height measuring body is determined.
In other embodiments, the acceleration sensor may be fixed in the sensor mounting case by means of adhesive fixation or screw fixation.
In other embodiments, the sensor base may also be directly fixed to other structural members such as a waterproof board of the workbench, and at this time, the acceleration sensor and the sensor connection line connected thereto need to have a higher waterproof level, for example, a waterproof sealing sleeve is disposed at a connection point between the connection terminal and the sensor connection line.
In the above embodiments, after the height measuring body is installed, the height measuring surface is flush with the workpiece bearing surface on the workpiece bearing plate.
In the embodiment of the height measuring device of the dicing saw, the structure of the height measuring device of the dicing saw is the same as that of the height measuring device in the embodiment of the dicing saw, and the detailed description is omitted.
According to the embodiment of the scribing machine height measurement method, the acceleration sensor is used for detecting the vibration of the height measurement body which is used for contacting with the scribing blade for height measurement, the contact between the height measurement body and the scribing blade is judged according to the detection result of the acceleration sensor, and the height measurement of the scribing blade is realized, wherein the scribing machine introduced in the embodiment of the scribing machine can be used for realizing the height measurement method, and the details are not repeated.
Claims (11)
1. A dicing saw, comprising:
a work table;
the workpiece bearing disc is arranged on the workbench;
a main shaft;
the scribing machine is characterized by further comprising a height measuring device and a control system, wherein the height measuring device is arranged on the workbench or the workpiece bearing disc;
the height measuring device comprises:
the height measuring body is provided with a height measuring surface which is used for being in contact with the scribing cutter to measure the height;
the acceleration sensor is triggered when the scribing cutter is in contact with the height measuring body, vibration can be transmitted between the acceleration sensor and the height measuring body, and the control system judges that the height measuring body is in contact with the scribing cutter by detecting the vibration of the height measuring body;
the height measuring device comprises a mounting seat fixed on the workbench, the height measuring body is detachably fixed on the mounting seat, and the acceleration sensor is fixed on the mounting seat;
the mounting seat comprises a sensor mounting shell, the acceleration sensor is fixed in the sensor mounting shell, and the height measuring body is detachably fixed at the top of the sensor mounting shell;
the mount pad is including fixing the sensor base in sensor installation shell bottom, be equipped with the sensor fixing base fixed with the sensor base on the workstation, the peripheral seal cover of sensor base is equipped with the adapter sleeve, the adapter sleeve bottom is equipped with the adapter sleeve flange fixed with the sensor fixing base, press from both sides between adapter sleeve flange and the sensor fixing base and be equipped with the waterproof board, all be equipped with on sensor fixing base and the sensor base and supply with the sensor line that acceleration sensor is connected and pass through the line hole, the line hole of crossing on sensor fixing base and the sensor base link up mutually, and the outlet of crossing the line hole on the sensor fixing base is in the waterproof board downside.
2. The dicing saw according to claim 1, wherein the height measuring body is press-fitted to the mounting base through a pressing cap threadedly coupled to the mounting base, the pressing cap including a threaded coupling portion threadedly coupled to the mounting base and a pressing portion for pressing the height measuring body, the pressing portion and the threaded coupling portion being axially arranged along the pressing cap, the pressing portion being provided with an inner flange for pressing the height measuring body.
3. The dicing saw according to claim 2, wherein the height measuring body is provided with a step which is in press fit with the inner flange, and the top of the height measuring body extends out of the top opening of the pressing cap so that the height measuring surface of the top of the height measuring body is higher than the top surface of the pressing cap.
4. The dicing saw of claim 3, wherein the height finding body has a horizontal plane of symmetry about which the height finding body is vertically symmetrical, the height finding body being provided with two parallel height finding faces, one at the top and the other at the bottom, the height finding face being adapted to engage with the mount support at the bottom and being adapted to contact the dicing saw for height finding at the top.
5. The dicing saw according to claim 2, 3 or 4, wherein an elastic positioning sleeve for positioning the height measuring body is arranged between the pressing section and the mounting seat on the inner side of the pressing section, and the elastic positioning sleeve comprises a mounting section assembled on the pressing section and a positioning section which is arranged on the upper side of the mounting section and is sleeved on the periphery of the height measuring body after being expanded.
6. The dicing saw according to claim 5, wherein the outer peripheral surface of the positioning section is gradually inclined outward from top to bottom, the inner peripheral surface of the positioning section is gradually inclined outward from top to bottom, and the wall thickness of the positioning section is gradually increased from top to bottom.
7. The dicing saw according to claim 5, wherein the pressing section has a ring groove formed on an inner side thereof and located on a lower side of the inner flange, and the elastic positioning sleeve is disposed in the ring groove.
8. The dicing saw according to any one of claims 1 to 4, wherein the sensor mounting case is sealed at the top, the acceleration sensor is encapsulated in the sensor mounting case by a sealing body, and the altimeter is press-fitted on the top surface of the sensor mounting case.
9. The dicing saw according to any one of claims 1 to 4, wherein the mounting base comprises a sensor base fixed to the bottom of the sensor mounting case, and a leveling mechanism is provided between the sensor base and the sensor mounting case, the leveling mechanism being configured to level a supporting surface of the sensor mounting case supporting the height measuring body.
10. The dicing saw according to claim 9, wherein the acceleration sensor is encapsulated in the sensor mounting case by the sealing body, the sensor base is provided with a wire passing hole for passing a sensor wire connected with the acceleration sensor, a wire connecting terminal of the acceleration sensor extends out of the sealing body and into the wire passing hole of the sensor base, an insulating protective sleeve extending into the sensor mounting case is arranged in the wire passing hole, and the wire connecting terminal extends into the insulating protective sleeve.
11. A dicing saw according to any one of claims 1 to 3, wherein the height finding body is provided with two parallel height finding faces, one at the top and the other at the bottom, the height finding face being adapted to engage with a mount support at the bottom and being adapted to contact the dicing blade for height finding at the top.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910750183.1A CN110487151B (en) | 2019-08-14 | 2019-08-14 | Dicing saw, contact height measuring device of dicing saw and height measuring method of dicing saw |
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| CN201910750183.1A CN110487151B (en) | 2019-08-14 | 2019-08-14 | Dicing saw, contact height measuring device of dicing saw and height measuring method of dicing saw |
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| CN110487151A CN110487151A (en) | 2019-11-22 |
| CN110487151B true CN110487151B (en) | 2020-12-29 |
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Address after: 450000 Zhengzhou City, Henan Province, west of the sixth industrial street of the airport, north of Huanghai Road Patentee after: Guangli Ruihong Electronic Technology Co.,Ltd. Address before: Room 229, 2nd floor, Yushan mansion, 100 meters east of the intersection of Zhenggang 6th Road and Zhenggang 2nd Street, HANGGANG District, Zhengzhou City, Henan Province, 450000 Patentee before: ZHENGZHOU GUANGLI RUIHONG ELECTRONIC TECHNOLOGY Co.,Ltd. |