CN110549507B - Scribing machine height measurement method, height measurement device and scribing machine - Google Patents
Scribing machine height measurement method, height measurement device and scribing machine Download PDFInfo
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- CN110549507B CN110549507B CN201910750184.6A CN201910750184A CN110549507B CN 110549507 B CN110549507 B CN 110549507B CN 201910750184 A CN201910750184 A CN 201910750184A CN 110549507 B CN110549507 B CN 110549507B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
Abstract
The invention relates to a scribing machine height measurement method, a height measurement device and a scribing machine, wherein the scribing machine comprises a workbench, a workpiece bearing disc, a main shaft, a height measurement device and a control system, wherein the height measurement device is arranged beside the workpiece bearing disc on the workbench to avoid a workpiece on the workpiece bearing disc; the height measuring device comprises a height measuring body and a contact detection device, wherein the height measuring body is provided with a height measuring surface which is used for contacting with the scribing cutter so as to measure the height of the scribing cutter; the contact detection device is in signal connection with the control system and used for detecting the contact between the scribing blade and the height measuring body and sending a signal to the control system when the scribing blade is in contact with the height measuring body. In the process of scribing the workpiece, the scribing cutter can be moved to the height measuring device at any time for height measurement, the height of the scribing cutter is adjusted according to the height measurement result, scribing precision is guaranteed, scribing efficiency is improved, and the problem that the continuity of cutting work cannot be realized and scribing efficiency is low due to the fact that the height measurement of the workpiece cannot be carried out in the process of cutting the workpiece by the conventional scribing machine is solved.
Description
Technical Field
The invention relates to a scribing machine height measurement method, a height measurement device and a scribing machine.
Background
A dicing saw is important processing equipment in the technical field of semiconductor packaging processing, a grinding wheel dicing saw is frequently used in the market at present, a diamond dicing blade rotating at a high speed on the grinding wheel dicing saw can be continuously worn in the using process, and if the height of the dicing blade is not adjusted, the cutting depth on a workpiece can be gradually reduced. In order to ensure the accuracy of the measurement result, the abrasion degree of the scribing cutter needs to be detected on line, and the height of the main shaft relative to the workbench is adjusted according to the abrasion amount of the scribing cutter, so that scribing cutters in the current market are provided with height measuring devices for measuring the height of the scribing cutter, the height of the scribing cutter is measured through the height measuring devices, the height of the scribing cutter is adjusted in time, and the relative position of the scribing cutter and a workpiece is guaranteed to be unchanged during processing as far as possible.
For example, chinese patent application publication No. CN106671302A, publication No. 2017.05.17, discloses a dicing saw parameter measuring device, which includes a worktable for bearing a wafer or a silicon wafer, a cutter body, a main shaft connected to the cutter body, a moving mechanism for driving the main shaft to move downward to make the cutter body contact with the worktable, and a recorder for recording the horizontal height of the worktable when the cutter body contacts with the worktable, wherein the workbench is a workpiece bearing disc for bearing wafers or silicon wafers, the workpiece bearing disc is arranged on the workbench of the scribing machine when in use, the workpiece bearing disc and the cutter body are both required to be provided with a conductive part, before scribing a wafer or a silicon wafer, a conductive loop formed by a workpiece bearing disc and a blade is used for measuring a reference zero position, a contact detection device used for detecting the contact of the blade and the workpiece bearing disc is connected between the workpiece bearing disc and the blade, and the contact detection device comprises a detection circuit which enables the workpiece bearing disc to form a signal transmission loop when the workpiece bearing disc is contacted with the blade. In the use, can pull down the back with the work piece, utilize the height measurement mode of contact to carry out the height measurement to the cutter body, the position of adjustment cutter body. The height measurement mode can not be used continuously after the edge of the workpiece bearing disc has more tool marks after multiple times of measurement, the workpiece bearing disc needs to be replaced, the measurement cost is higher, the workpiece needs to be detached during each measurement, the height measurement can not be carried out during the process of cutting the workpiece, the continuity of the cutting work can not be realized, and the problem of low scribing efficiency is caused.
Disclosure of Invention
The invention aims to provide a height measurement method of a scribing machine, which aims to solve the problems that the continuity of cutting work cannot be realized and the scribing efficiency is low because the height of a workpiece cannot be measured in the process of cutting the workpiece by the conventional scribing machine; in addition, the invention also aims to provide a scribing machine height measuring device; in addition, the invention also aims to provide a dicing saw.
In order to achieve the purpose, the technical scheme of the scribing machine height measurement method is as follows: the height measurement of the scribing knife is realized by detecting the contact between the scribing knife and a height measurement device arranged beside a workpiece on a worktable of the scribing machine.
The invention has the beneficial effects that: carry out the height finding to the scribing cutter through the height finding device that sets up at the work piece side, in the work piece course of working, because the height finding device sets up at the work piece side, can move the scribing cutter to height finding device department at any time and carry out the height finding to the scribing cutter, adjust the height of scribing cutter according to the height finding result, when guaranteeing the scribing precision, scribing efficiency has been improved, in addition, also can avoid external environment's interference through contacting the height finding with the height finding device, improve the height finding precision, the unable cutting work continuity that can't realize that the height finding led to the fact the work piece at the cutting work piece in-process of present scribing machine has been solved, and then cause the problem that scribing efficiency is low.
Furthermore, after the scribing knife of the scribing machine is contacted with the height measuring device to complete height measurement, the scribing knife directly and horizontally moves to the position above the workpiece on the workpiece bearing disc of the scribing machine, and then moves downwards until the scribing depth requirement is met, and then the workpiece is scribed. The moving error of the scribing knife is reduced, and the processing precision is improved.
The technical scheme of the dicing saw comprises the following steps:
the dicing saw includes:
a work table;
the workpiece bearing disc is arranged on the workbench;
the main shaft is used for installing and driving the scribing cutter;
the scribing machine also comprises a height measuring device and a control system, wherein the height measuring device is arranged beside the workpiece bearing disc on the workbench to avoid the workpiece on the workpiece bearing disc;
the height measuring device comprises:
the height measuring body is provided with a height measuring surface which is used for being in contact with the scribing cutter so as to measure the height of the scribing cutter;
and the contact detection device is in signal connection with the control system and is used for detecting the contact between the scribing blade and the height measuring body and sending a signal to the control system by being triggered when the scribing blade is in contact with the height measuring body.
The invention has the beneficial effects that: the height measuring device is arranged beside the workpiece bearing disc on the workbench of the scribing machine to avoid workpieces, the scribing cutter can be moved to the height measuring device at any time to measure the height in the process of scribing the workpieces, the height of the scribing cutter is adjusted according to a height measuring result, scribing precision is guaranteed, scribing efficiency is improved, and the problem that the continuity of cutting work cannot be realized due to the fact that the height of the workpieces cannot be measured in the process of cutting the workpieces by the existing scribing machine is solved, and further scribing efficiency is low is solved. In addition, in the height measurement process, the contact between the height measurement body and the scribing cutter is detected through the contact detection device, a signal is sent to the control system after the contact detection device is triggered, and the control system can calculate the position of the scribing cutter according to the signal and adjust the height of the scribing cutter. The interference of external environment can be avoided through the mode height finding with the contact of height finding body, improves height finding precision.
Furthermore, a feed space for the scribing cutter to directly and horizontally move to the upper part of the workpiece on the workpiece bearing disc after the height of the scribing cutter is measured by the height measuring device is arranged on the workbench. The moving error of the scribing knife is reduced, and the processing precision is improved.
The height measuring device is further optimized, in order to improve the dismounting efficiency of the height measuring body, the height measuring device comprises a mounting seat fixed on a workbench, the height measuring body is detachably fixed on the mounting seat, the height measuring body is pressed on the mounting seat through a pressing cap in threaded connection with the mounting seat, the pressing cap comprises a threaded connection section in threaded connection with the mounting seat and a pressing section used for pressing the height measuring body, the pressing section and the threaded connection section are arranged along the axial direction of the pressing cap, and the pressing section is provided with an inner flange for pressing the height measuring body. The height measuring body is compressed through the pressing cap, and the height measuring body is convenient to replace.
The assembly relation of the height measuring body and the pressure cap is further improved, in order to reduce the replacement frequency of the height measuring body, a step which is in compression fit with the inner flange is arranged on the height measuring body, and the top of the height measuring body extends out of the top opening of the pressure cap so that the height measuring surface of the top of the height measuring body is higher than the top surface of the pressure cap. The height measuring surface is higher than the top surface of the pressure cap, so that the interference between the pressure cap and the scribing cutter can be avoided, the effective area of the height measuring sheet is increased, and the replacement frequency of the height measuring body is reduced.
The assembly relation of the height measuring body and the pressing cap is further optimized, in order to guarantee the position precision of the height measuring body, an elastic positioning sleeve which is arranged between the pressing section and the mounting seat and used for positioning the height measuring body is arranged on the inner side of the pressing section, and the elastic positioning sleeve comprises a mounting section assembled on the pressing section and a positioning section which is arranged on the upper side of the mounting section and is sleeved on the periphery of the height measuring body after being expanded. The elastic positioning sleeve ensures the position precision of the height measuring body and reduces the requirement on the processing precision of the pressing cap.
The elastic positioning sleeve is further improved, the outer peripheral surface of the positioning section gradually inclines outwards from top to bottom, the inner peripheral surface of the positioning section gradually inclines outwards from top to bottom, the wall thickness of the positioning section gradually increases from top to bottom, and the elastic positioning sleeve is easy to deform and convenient to mount.
The contact detection device is further optimized and comprises an acceleration sensor which is triggered when the scribing blade is in contact with the height measuring body in the mounting seat through sealing of the sealing body, vibration can be transmitted between the acceleration sensor and the height measuring body, and the control system judges that the height measuring body is in contact with the scribing blade through detecting the vibration of the height measuring body. The contact between the height measuring body and the scribing cutter is detected through the acceleration sensor, the method is suitable for conductive and non-conductive scribing cutters, and the application range is wide.
The technical scheme of the scribing knife height measuring device comprises the following steps:
scribing machine height finding device includes:
the mounting seat is fixedly arranged beside the workpiece bearing disc on the workbench of the dicing saw so as to avoid the workpiece on the workpiece bearing disc;
the height measuring body is detachably fixed on the mounting seat and is provided with a height measuring surface which is used for being in contact with the scribing cutter so as to measure the height of the scribing cutter;
and the contact detection device is used for detecting the contact between the scribing knife and the height measuring body, and is in signal connection with a control system of the scribing machine to be triggered to send a signal to the control system when the scribing knife is in contact with the height measuring body.
The invention has the beneficial effects that: the mounting seat is fixedly arranged beside the workpiece bearing disc on the workbench of the scribing machine to avoid workpieces, the scribing cutter can be moved to the height measuring device at any time to measure the height in the process of scribing the workpieces, the height of the scribing cutter is adjusted according to a height measuring result, scribing precision is guaranteed, scribing efficiency is improved, and the problem that the continuity of cutting work cannot be realized due to the fact that the height of the workpieces cannot be measured in the process of cutting the workpieces by the existing scribing machine is solved, and further scribing efficiency is low is solved. In addition, in the height measurement process, the contact between the height measurement body and the scribing cutter is detected through the contact detection device, a signal is sent to the control system after the contact detection device is triggered, and the control system can calculate the position of the scribing cutter according to the signal and adjust the height of the scribing cutter. The interference of external environment can be avoided through the mode height finding with the contact of height finding body, improves height finding precision.
The height measuring body is further optimized in connection relation with the mounting seat, the height measuring body is pressed on the mounting seat through a pressing cap in threaded connection with the mounting seat, the pressing cap comprises a threaded connection section in threaded connection with the mounting seat and a pressing section used for pressing the height measuring body, the pressing section and the threaded connection section are arranged along the axial direction of the pressing cap, and the pressing section is provided with an inner flange pressing the height measuring body. The height measuring body is compressed through the pressing cap, and the height measuring body is convenient to replace.
The assembly relation of the height measuring body and the pressing cap is further improved, the height measuring body is provided with a step which is in compression fit with the inner flange, and the top of the height measuring body extends out of the top opening of the pressing cap so that the height measuring surface of the top of the height measuring body is higher than the top surface of the pressing cap. The height measuring surface is higher than the top surface of the pressing cap, so that the interference between the pressing cap and the scribing cutter can be avoided, and the effective area of the height measuring sheet is increased.
The assembly relation of the height measuring body and the pressing cap is further optimized, an elastic positioning sleeve which is arranged between the pressing section and the mounting seat and used for positioning the height measuring body is arranged on the inner side of the pressing section, and the elastic positioning sleeve comprises a mounting section assembled on the pressing section and a positioning section which is arranged on the upper side of the mounting section and is sleeved on the periphery of the height measuring body after being expanded. The elastic positioning sleeve ensures the position precision of the height measuring body and reduces the requirement on the processing precision of the pressing cap.
The elastic positioning sleeve is further improved, the outer peripheral surface of the positioning section gradually inclines outwards from top to bottom, the inner peripheral surface of the positioning section gradually inclines outwards from top to bottom, the wall thickness of the positioning section gradually increases from top to bottom, and the elastic positioning sleeve is easy to deform and convenient to mount.
The contact detection device is further optimized and comprises an acceleration sensor which is triggered when the scribing blade is in contact with the height measuring body in the mounting seat through the sealing body in an encapsulating mode, vibration can be transmitted between the acceleration sensor and the height measuring body, and the contact between the height measuring body and the scribing blade is judged through the vibration of the detected height measuring body. The contact between the height measuring body and the scribing cutter is detected through the acceleration sensor, the method is suitable for conductive and non-conductive scribing cutters, and the application range is wide.
Drawings
FIG. 1 is a schematic diagram of a stage in an embodiment of a dicing saw of the present invention;
FIG. 2 is a cross-sectional view of a stage in an exemplary embodiment of a dicing saw of the invention;
FIG. 3 is a diagram of the height measurement of the height measuring device in the exemplary embodiment of the dicing saw of the present invention;
FIG. 4 is a schematic diagram of a height measurement device in an embodiment of the dicing saw of the present invention;
FIG. 5 is a cross-sectional view of a height measurement device in an embodiment of a dicing saw of the present invention;
FIG. 6 is another cross-sectional view of a height measurement device in an exemplary embodiment of a dicing saw of the invention;
FIG. 7 is a schematic view of the assembly of the height gauge of the height measuring device with the sensor mounting housing in an embodiment of the dicing saw of the present invention;
FIG. 8 is a schematic diagram of a flexible locating sleeve in an exemplary embodiment of a dicing saw of the invention;
in the figure: 1. a wiring terminal; 2. a work table; 21. a waterproof sheet; 22. an X-direction sliding block; 3. a workpiece carrier tray; 31. a workpiece bearing surface; 4. connecting a sensor; 5. a scribing knife; 6. a height measuring device; 61. a height measuring body; 611. measuring the height surface; 612. an annular projection; 62. an acceleration sensor; 63. a sensor mounting housing; 631. installing a flange; 64. a sensor base; 641. a base wire passing hole; 642. an insulating protective sleeve; 65. a sensor holder; 651. a fixed seat wire passing hole; 66. pressing the cap; 661. a threaded connection section; 662. a compacting section; 663. an inner flange; 664. a ring groove; 67. installing a shell adjusting bolt; 68. connecting sleeves; 681. connecting sleeve flanges; 69. a bearing plate adjusting bolt; 70. a wafer; 71. fixing the bolt; 72. an elastic positioning sleeve; 721. an installation section; 722. a positioning section; 73. a base fixing bolt; 74. and (5) sealing rings.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1 to 8, the dicing saw of the present invention includes a frame, a worktable 2, and a workpiece bearing tray 3 disposed on the worktable 2, wherein the workpiece bearing tray 3 has a workpiece bearing surface 31 for bearing a workpiece to be cut, the workpiece bearing tray 3 in this embodiment is a ceramic tray, and the workpiece to be cut is a wafer 70 fixed on the ceramic tray by vacuum adsorption, so as to ensure stability of the workpiece during cutting. The main shaft moving mechanism and the main shaft arranged on the main shaft moving mechanism are arranged on the frame, the main shaft is used for installing and driving the scribing cutter 5, the main shaft moving mechanism is used for driving the main shaft to move along the Z direction and the Y direction, the workbench 2 is assembled on the frame of the scribing machine in the X direction, and the frame is provided with the workbench moving mechanism for driving the workbench 2 to move, wherein the main shaft, the main shaft moving mechanism, the workbench moving mechanism and the workpiece bearing disc 3 are all the prior art, and detailed description is omitted here. The scribing machine also comprises a control system which is in control connection with the workbench moving mechanism and the main shaft moving mechanism and is used for controlling the movement of the main shaft and the workbench 2 and further controlling the position of the scribing knife 5.
The height measuring device 6 is arranged on the workbench 2, as shown in fig. 4, 6 and 7, the height measuring device 6 comprises a mounting seat fixed on the workbench 2, a height measuring body 61 is pressed on the mounting seat, the height measuring body 61 is provided with a height measuring surface 611 which is flush with the working bearing surface 31 and is used for contacting with the scribing cutter 5 to measure the height of the scribing cutter 5, and the height measuring body 61 in the embodiment is sheet-shaped.
The mounting seat is further provided with an acceleration sensor which transmits vibration with the height measuring body 61, the acceleration sensor is triggered when the scribing blade 5 contacts with the height measuring body 61 and is in signal connection with the control system so as to send a signal to the control system after being triggered, vibration can be transmitted between the acceleration sensor and the height measuring body 61 in the embodiment, the height measuring body 61 can vibrate when the scribing blade 5 contacts with the height measuring body 61, the acceleration sensor is triggered and sends a signal to the control system after being triggered, the control system detects the vibration of the height measuring body 61 according to the signal of the acceleration sensor and further judges that the height measuring body 61 contacts with the scribing blade 5, a processor of the control system calculates parameters of the scribing blade 5 according to the received signals, and height parameters of the axis of the scribing blade, namely height parameters of the main shaft, are obtained through calculation.
The mounting base comprises a sensor mounting shell 63, a sensor base 64 fixed at the bottom of the sensor mounting shell 63 and a sensor fixing base 65 fixed at the bottom of the sensor base 64, wherein the sensor base 64 and the sensor fixing base 65 are fixed through a base fixing bolt 73. The height measuring body 61 is detachably press-mounted on the top of the sensor mounting shell 63, and a leveling mechanism is arranged between the sensor base 64 and the sensor mounting shell 63 for facilitating alignment of the workpiece bearing surface 31 and the height measuring surface 611, and is used for leveling a supporting surface of the sensor mounting shell for supporting the height measuring body, namely the top surface of the sensor mounting shell 63 in the embodiment.
Specifically, in order to facilitate the detachment and installation of the height measuring body 61, the height measuring body 61 is press-fitted on the sensor mounting case 63 through a press cap 66 in threaded connection with the sensor mounting case 63, and an external thread in threaded connection with the press cap 66 is provided on the outer peripheral surface of the sensor mounting case 63. The pressing cap 66 comprises a threaded connection section 661 in threaded connection with the sensor mounting shell 63 and a pressing section 662 for pressing the height measuring body 61, the pressing section 662 and the threaded connection section 661 are arranged along the axial direction of the pressing cap, an annular protrusion 612 is arranged on the periphery of the height measuring body 61, and the annular protrusion 612 and the outer peripheral surface of the height measuring body form two annular steps. The height measuring body 61 is provided with a horizontal symmetrical plane, the height measuring body 61 is vertically symmetrical about the horizontal symmetrical plane, the height measuring body 61 is provided with two height measuring surfaces 611, one of the two height measuring surfaces 611 is positioned at the top, the other height measuring surface is positioned at the bottom, the height measuring surfaces 611 are used for supporting and matching with the sensor mounting shell 63 when positioned at the bottom, and the height measuring surfaces 611 are used for contacting with the scribing cutter 5 to measure the height when positioned at the top. After the number of times of use of one height measurement surface 611 reaches the upper limit, the same height measurement body 61 can be continuously used by replacing the height measurement surface, the service life of the height measurement body is prolonged, the number of the height measurement bodies is reduced, and the cost is reduced. In other embodiments, only one height measuring surface can be arranged, and the height measuring sheet needs to be replaced when the height measuring surface cannot meet the requirements after being used for a period of time.
The pressing section 662 is provided with an inner flange 663 which is press-fitted with an annular step on the height measuring body 61 to press the height measuring body 61, and the height measuring body 61 is press-fitted on the top surface of the sensor mounting case 63 by the inner flange 663 cooperating with the annular protrusion 612. The part of the height-measuring body 61 on the upper side of the annular protrusion 612 extends out of the top opening of the pressure cap 66, so that the height-measuring surface 611 on the height-measuring body 61 is higher than the top surface of the pressure cap 66.
In this embodiment, the worktable 2 is provided with a feeding space for the scribing cutter 5 to directly and horizontally move to the upper part of the wafer 70 on the workpiece tray after the height measurement by the height measurement device. After the scribing knife 5 contacts with the height measuring body 61 of the height measuring device to complete height measurement, the scribing knife 5 is controlled to directly and horizontally move to the position above the workpiece on the workpiece bearing disc 3 through the operation control of the control system, and then the scribing is carried out on the workpiece after the scribing knife moves downwards to meet the scribing depth requirement according to the height measurement result. In the process of height measurement, the scribing cutter 5 does not need to move upwards, so that the moving error is reduced, and the scribing precision is improved.
In other embodiments, when the height measuring body has a larger volume, the top surface of the pressing cap may also be slightly higher than the height of the height measuring surface of the height measuring body, and at this time, in order to avoid damage to the saw blade, the contact point of the saw blade on the height measuring surface should be close to the middle position during height measurement. In other embodiments, when the top surface of the pressing cap may also be slightly higher than the height of the height measuring surface of the height measuring body, a notch for the saw blade to pass through may be provided on the pressing cap in order to enable the saw blade to directly and horizontally move to above the wafer.
In the present embodiment, the sensor mounting case 63 has a cylindrical shape with a closed top, and can provide a sufficiently large supporting surface for supporting the height indicator 61. In addition, the acceleration sensor is sealed in the sensor mounting shell 63 through the sealant 622, and the top seal of the sensor mounting shell 63 is also convenient for filling the sealant 622 to package the acceleration sensor.
As shown in fig. 5, 6 and 7, an elastic positioning sleeve 72 for positioning the height indicator 61 is disposed between the pressing section and the mounting seat inside the pressing section 662, and in this embodiment, the elastic positioning sleeve 72 is made of rubber. As shown in fig. 8, the elastic positioning sleeve 72 includes an installation section 721 assembled on the pressing section 662 and a positioning section 722 sleeved on the periphery of the height measuring body after expansion, the outer peripheral surface of the positioning section 722 gradually inclines outwards from top to bottom, the inner peripheral surface of the positioning section 722 gradually inclines outwards from top to bottom, the wall thickness of the positioning section 722 gradually increases from top to bottom, during the installation process of the elastic positioning sleeve 72, the installation section 721 is tightly fitted with the pressing section 662 of the pressing cap 66, the elastic positioning sleeve 72 can move up and down along with the pressing cap 66, the positioning section 722 gradually expands, and under the action of the elastic positioning sleeve 72, the height measuring body 61 is kept coaxial with the elastic positioning sleeve 72, so as to ensure the position of the height measuring body. The wall thickness of the positioning section 722 gradually increases from top to bottom, so that the elastic positioning sleeve 72 can be conveniently installed. In this embodiment, the pressing section 662 of the pressing cap 66 is provided with an annular groove 664 inside, the elastic positioning sleeve 72 is disposed in the annular groove 664, the mounting section 721 is tightly fitted to the bottom of the annular groove 664, and the bottom side surface of the annular groove 664 is in axial stop fit with the bottom end surface of the elastic positioning sleeve 72, so as to prevent the elastic positioning sleeve 72 from coming off from the bottom of the annular groove. The top side of the annular groove 664 is arranged on the inner flange 663, and the inner flange 663 limits the elastic positioning sleeve 72 from being separated from the top of the annular groove 664. In other embodiments, the installation section of the elastic locating sleeve can be provided with an annular bulge, the inner side of the pressing cap is provided with an installation groove matched with the annular bulge, the elastic locating sleeve is installed through the matching of the annular bulge and the installation groove, and the locating end and the inner side of the pressing section keep a deformation interval. In other embodiments, the elastic locating sleeve may not act on the annular boss, for example, when the outer peripheral dimension of the height measuring body is larger than the circumferential dimension of the sensor housing, the elastic locating sleeve may act on the part below the annular boss.
Leveling mechanism is including setting up three installation shell adjusting bolt 67 on sensor installation shell 63, sensor installation shell 63 is the tube-shape, sensor installation shell 63 bottom is equipped with mounting flange 631, be equipped with on mounting flange 631 and fix sensor installation shell 63 fixing bolt 71 on sensor base 64, still be equipped with three and installation shell adjusting bolt 67 threaded connection's screw hole on mounting flange 631, three installation shell adjusting bolt 67 bottom top is on sensor base 64 top surface, can adjust the interval between sensor base 64 and the mounting flange 631 through installation shell adjusting bolt 67, realize the leveling of sensor installation shell 63 top surface, also can realize through installation shell adjusting bolt 67 when needing to carry out high small adjustment to height finding body 61.
In this embodiment, the workbench 2 is provided with the waterproof plate 21, the sensor fixing base 65 is provided with the connecting sleeve 68 sleeved on the sensor base 64, the sensor base 64 is fixed on the top surface of the sensor fixing base 65, the bottom end of the connecting sleeve 68 is provided with a connecting sleeve flange 681, the connecting sleeve flange 681 is fixed on the top surface of the sensor fixing base 65 through a bolt, and the waterproof plate 21 is clamped between the connecting sleeve flange 681 and the sensor fixing base 65. To further improve the waterproof performance, a seal ring 74 is provided between the connection sleeve 68 and the sensor base 64.
The base wire passing hole 641 and the fixing seat wire passing hole 651 which are butted on the sensor base 64 and the sensor fixing seat 65 are connected, the sensor connecting wire 4 connected with the acceleration sensor sequentially passes through the wire passing holes in the sensor base 64 and the sensor fixing seat 65, and a wire outlet of the fixing seat wire passing hole 651 is positioned below the waterproof plate 21, so that the sensor connecting wire 4 is prevented from contacting water, and the waterproof performance is improved.
Acceleration sensor in this embodiment passes through sealed encapsulation 622 in sensor installation shell 63, as shown in fig. 7, acceleration sensor's binding post 1 stretches out sealed encapsulation 622 and stretches into in the sensor base 64, in order to prevent binding post 1 and the contact of sensor base 64, the base is crossed and is equipped with insulating protective sheath 642 in the line hole 641, insulating protective sheath 642 and the pore wall laminating of line hole 641 are crossed to the base, in the top of insulating protective sheath 642 stretches into sensor installation shell 63, binding post 1 stretches into in the insulating protective sheath 642.
The X-direction guide rail extending in the X direction is arranged on the rack, the workbench 2 comprises an X-direction sliding block 22 arranged on the X-direction guide rail in a sliding mode, and the workpiece bearing disc 3 is arranged on the X-direction sliding block 22, as shown in fig. 3, a bearing disc height adjusting mechanism arranged at the bottom of the workpiece bearing disc 3 is arranged on the workbench 2 and comprises three bearing disc adjusting bolts 69, the workpiece bearing disc 3 can be leveled and heightened through the bearing disc adjusting bolts 69, and the workpiece bearing surface 31 of the workpiece bearing disc 3 can be aligned to the height measurement surface 611 conveniently.
When the height measuring device of the scribing machine is assembled, the top surface of the sensor mounting shell is firstly adjusted to be horizontal by the mounting shell adjusting bolt 67 to ensure that the flatness error is within an allowable range, then the workpiece bearing surface 31 of the bearing plate is aligned with the height measuring surface 611 by adjusting the bearing plate adjusting bolt 69, and instruments such as a dial indicator or a micrometer are adopted for detection during adjustment. When the scribing cutter 5 needs to be subjected to height measurement, the main shaft is moved above the height measurement device 6 according to the program setting, then the scribing cutter 5 arranged on the main shaft keeps rotating at a high speed, meanwhile, the main shaft moves downwards slowly, vibration is generated after the scribing cutter 5 touches the height measurement body 61, the acceleration sensor is triggered and sends a signal, the signal is fed back to the host machine through a signal converter and a processor of the control system, the diameter parameter and the height of the scribing cutter 5 are obtained, and the height parameter of the main shaft can be obtained through the operation of the processor. During height measurement, the scribing knife 5 should be quickly lifted after touching the height measurement body 61, so that the scribing knife and the main shaft are prevented from being damaged due to excessive downward movement.
The height measuring device 6 of the dicing saw is arranged outside the workpiece bearing disc 3, and can directly measure the height on the height measuring device 6 when being used for the first time, so that the workpiece bearing disc 3 cannot be damaged, the height can be measured in the workpiece processing process, and the working continuity is ensured. Because the scribing knife 5 directly contacts the upper surface of the height measuring device 6, the height measuring device 6 does not need to be cleaned and dried, and meanwhile, the scribing knife 5 does not need to be conductive, so that the main shaft is also applicable to the scribing knife 5 with poor conductivity or insulation, and the compatibility of the main shaft is better. The position of the scribing blade 5 on the height measuring body 61 is continuously updated during height measurement, and meanwhile, the height measuring body 61 can be replaced at any time, so that the scribing blade 5 is prevented from touching the same position during height measurement to cause measurement errors.
The height measuring body in the embodiment is made of stainless steel materials, and in other embodiments, the height measuring body can also be made of other materials such as magnesium alloy and ceramics.
The height measuring body in other embodiments can also be directly fixed on the workbench through fixing pieces such as fixing bolts and clamps, and at the moment, the acceleration sensor is directly installed on the workbench, but the requirement that the acceleration sensor and the height measuring body can transmit vibration is met. The height measuring body can also be fixed in a vacuum adsorption mode or fixed by gluing.
The height measuring body in other embodiments can also be fixed on the sensor mounting shell through fasteners such as screws and the like; in other embodiments, when the machining precision of the mounting seat and the height measuring body meets the requirement, the sensor mounting shell and the sensor base can be integrally arranged without arranging a leveling mechanism.
In other embodiments, the acceleration sensor and the height measuring sheet may also be directly mounted on the workbench, for example, a hole is formed in the workbench, the acceleration sensor is encapsulated in the hole, and then the height measuring sheet is fixed on the workbench; of course, also can integrative setting the fixed block on the workstation, acceleration sensor and height measurement body are fixed on the fixed block, and acceleration sensor and height measurement body are fixed respectively at the top surface and the side of fixed block, and when acceleration sensor self sealed level was higher, need not set up the sensor installation shell and protect, only need guarantee acceleration sensor and height measurement body can transmit the vibration can.
In other embodiments, the mounting seat of the height measuring device may also be a mounting block detachably fixed on the workbench, and the acceleration sensor and the height measuring body are fixed on the top surface and the side surface of the mounting block respectively.
In other embodiments, the elastic locating sleeve can be omitted in the compressing section, so that the method is suitable for occasions with low requirement on the position precision of the height measuring body, or the position of the height measuring body is recalibrated after the position of the height measuring body is determined.
In other embodiments, the acceleration sensor may be fixed in the sensor mounting case by means of adhesive fixation or screw fixation.
In other embodiments, the sensor base may also be directly fixed to other structural members such as a waterproof board of the workbench, and at this time, the acceleration sensor and the sensor connection line connected thereto need to have a higher waterproof level, for example, a waterproof sealing sleeve is disposed at a connection point between the connection terminal and the sensor connection line.
In the above embodiments, the acceleration sensor forms a contact detection device for detecting contact between the dicing blade and the height measuring body, in other embodiments, the height measuring body of the height measuring device may be a conductive body, and at this time, the dicing blade of the dicing saw must also meet the conductive requirement, and at this time, the contact detection device may adopt a contact detection device disclosed in publication No. CN106671302A, that is, the contact detection between the dicing blade and the height measuring body is performed through a detection circuit.
In the above embodiments, after the height measuring body is installed, the height measuring surface is flush with the workpiece bearing surface on the workpiece bearing plate.
In the embodiment of the height measuring device of the dicing saw, the structure of the height measuring device of the dicing saw is the same as that of the height measuring device in the embodiment of the dicing saw, and the detailed description is omitted.
According to the specific embodiment of the scribing machine height measurement method, the height of the scribing machine is measured through the height measurement device arranged on the worktable of the scribing machine and beside the workpiece, and the scribing knife of the scribing machine directly moves horizontally to the position above the workpiece on the workpiece bearing disc after the height measurement of the height measurement device, and then moves downwards to meet the scribing depth requirement and then scribes the workpiece. The dicing saw introduced in the above embodiment of the dicing saw can be used for implementing the method, and details are not described again. In other embodiments, after the height of the height measuring device is measured, the dicing blade of the dicing saw may be lifted upwards for a certain distance, moved to a position above the workpiece on the workpiece bearing plate, and then moved downwards until the dicing depth requirement is met, and then the workpiece is diced.
Claims (5)
1. A dicing saw, comprising:
a work table;
the workpiece bearing disc is arranged on the workbench;
the main shaft is used for installing and driving the scribing cutter;
the scribing machine is characterized by further comprising a height measuring device and a control system, wherein the height measuring device is arranged beside the workpiece bearing disc on the workbench to avoid the workpiece on the workpiece bearing disc;
the height measuring device comprises:
the height measuring body is provided with a height measuring surface which is used for being in contact with the scribing cutter so as to measure the height of the scribing cutter;
the contact detection device is in signal connection with the control system and is used for detecting the contact between the scribing cutter and the height measuring body and sending a signal to the control system when the scribing cutter is in contact with the height measuring body;
the height measuring device comprises a mounting seat fixed on the workbench, the height measuring body is detachably fixed on the mounting seat, the height measuring body is pressed on the mounting seat through a pressing cap in threaded connection with the mounting seat, the pressing cap comprises a threaded connection section in threaded connection with the mounting seat and a pressing section for pressing the height measuring body, the pressing section and the threaded connection section are axially arranged along the pressing cap, the pressing section is provided with an inner flange for pressing the height measuring body, the height measuring body is provided with a step in pressing fit with the inner flange, and the top of the height measuring body extends out of the top opening of the pressing cap so that the height measuring surface of the top of the height measuring body is higher than the top surface of the pressing cap;
the inner side of the pressing section is provided with an elastic positioning sleeve which is positioned between the pressing section and the mounting seat and used for positioning the height measuring body, the elastic positioning sleeve comprises a mounting section assembled on the pressing section and a positioning section which is positioned on the upper side of the mounting section and is expanded and then sleeved on the periphery of the height measuring body, the outer peripheral surface of the positioning section is gradually inclined outwards from top to bottom, the inner peripheral surface of the positioning section is gradually inclined outwards from top to bottom, and the wall thickness of the positioning section is gradually increased from top to bottom;
in the installation process of the elastic positioning sleeve, the installation section is tightly matched with the pressing section of the pressing cap, the elastic positioning sleeve can move up and down along with the pressing cap, the positioning section gradually expands, and the height measuring body is kept coaxial with the elastic positioning sleeve under the action of the elastic positioning sleeve, so that the position of the height measuring body is ensured; the inner side of the compression section of the compression cap is provided with an annular groove, the elastic positioning sleeve is arranged in the annular groove, the mounting section is tightly matched with the bottom of the annular groove, the side face of the bottom of the annular groove is in axial stop fit with the end face of the bottom end of the elastic positioning sleeve, the elastic positioning sleeve is prevented from being separated from the bottom of the annular groove, the side face of the top of the annular groove is arranged on the inner flange, and the inner flange limits the elastic positioning sleeve to be separated from the top of the annular groove.
2. The dicing saw according to claim 1, wherein the table is provided with a feed space for the dicing blade to move horizontally directly above the workpiece on the workpiece carrier tray after the height of the height measuring device is measured.
3. The dicing saw according to claim 1 or 2, wherein the contact detection device comprises an acceleration sensor triggered when the dicing blade contacts the height finder by a sealing body encapsulated in the mounting seat, vibration can be transmitted between the acceleration sensor and the height finder, and the control system judges that the height finder contacts the dicing blade by detecting the vibration of the height finder.
4. Scribing machine height finding device includes:
the mounting seat is fixedly arranged beside the workpiece bearing disc on the workbench of the dicing saw so as to avoid the workpiece on the workpiece bearing disc;
the height measuring body is detachably fixed on the mounting seat and is provided with a height measuring surface which is used for being in contact with the scribing cutter so as to measure the height of the scribing cutter;
the contact detection device is used for detecting the contact between the scribing knife and the height measuring body, and is in signal connection with a control system of the scribing machine to be triggered to send a signal to the control system when the scribing knife is in contact with the height measuring body;
the height measuring device comprises a mounting seat fixed on the workbench, the height measuring body is detachably fixed on the mounting seat, the height measuring body is pressed on the mounting seat through a pressing cap in threaded connection with the mounting seat, the pressing cap comprises a threaded connection section in threaded connection with the mounting seat and a pressing section for pressing the height measuring body, the pressing section and the threaded connection section are axially arranged along the pressing cap, the pressing section is provided with an inner flange for pressing the height measuring body, the height measuring body is provided with a step in pressing fit with the inner flange, and the top of the height measuring body extends out of the top opening of the pressing cap so that the height measuring surface of the top of the height measuring body is higher than the top surface of the pressing cap;
the inner side of the pressing section is provided with an elastic positioning sleeve which is positioned between the pressing section and the mounting seat and used for positioning the height measuring body, the elastic positioning sleeve comprises a mounting section assembled on the pressing section and a positioning section which is positioned on the upper side of the mounting section and is expanded and then sleeved on the periphery of the height measuring body, the outer peripheral surface of the positioning section is gradually inclined outwards from top to bottom, the inner peripheral surface of the positioning section is gradually inclined outwards from top to bottom, and the wall thickness of the positioning section is gradually increased from top to bottom;
in the installation process of the elastic positioning sleeve, the installation section is tightly matched with the pressing section of the pressing cap, the elastic positioning sleeve can move up and down along with the pressing cap, the positioning section gradually expands, and the height measuring body is kept coaxial with the elastic positioning sleeve under the action of the elastic positioning sleeve, so that the position of the height measuring body is ensured; the inner side of the compression section of the compression cap is provided with an annular groove, the elastic positioning sleeve is arranged in the annular groove, the mounting section is tightly matched with the bottom of the annular groove, the side face of the bottom of the annular groove is in axial stop fit with the end face of the bottom end of the elastic positioning sleeve, the elastic positioning sleeve is prevented from being separated from the bottom of the annular groove, the side face of the top of the annular groove is arranged on the inner flange, and the inner flange limits the elastic positioning sleeve to be separated from the top of the annular groove.
5. The scribing machine height measurement device according to claim 4, wherein the contact detection device comprises an acceleration sensor which is triggered when the scribing blade is contacted with the height measuring body through a sealing body encapsulated in the mounting seat, vibration can be transmitted between the acceleration sensor and the height measuring body, and the contact between the height measuring body and the scribing blade is judged through detecting the vibration of the height measuring body.
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| CN114290549A (en) * | 2021-12-21 | 2022-04-08 | 江苏京创先进电子科技有限公司 | Leveling mechanism and leveling method for worktable of scribing machine |
| CN114406879B (en) * | 2022-01-14 | 2023-03-21 | 深圳特斯特半导体设备有限公司 | Automatic scribing machine suitable for cluster type distribution |
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