CN114290549A - Leveling mechanism and leveling method for worktable of scribing machine - Google Patents
Leveling mechanism and leveling method for worktable of scribing machine Download PDFInfo
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- CN114290549A CN114290549A CN202111573059.6A CN202111573059A CN114290549A CN 114290549 A CN114290549 A CN 114290549A CN 202111573059 A CN202111573059 A CN 202111573059A CN 114290549 A CN114290549 A CN 114290549A
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- workbench
- adjusting
- leveling mechanism
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- main shaft
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- 230000007246 mechanism Effects 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 11
- 238000000926 separation method Methods 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 25
- 230000020347 spindle assembly Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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Abstract
The application relates to the field of wafer processing mechanisms, in particular to a leveling mechanism and a leveling method for a scribing machine workbench. The lifting piece is the adjusting sleeve, has seted up on the base and has held the chamber, and adjusting sleeve one end sets up and is holding the intracavity, other end and mounting panel threaded connection. This application has the convenience and adjusts the position of workstation, promotes the cutting accuracy of wafer, reduces the condemned effect of wafer.
Description
Technical Field
The application relates to the field of wafer processing mechanisms, in particular to a leveling mechanism and a leveling method for a scribing machine workbench.
Background
A dicing saw is a precise numerical control cutting device and is mainly used for cutting integrated circuit boards, solar cells and the like. When the wafers are produced, a dicing saw is also used to cut a large number of interconnected wafers into individual pieces.
The conventional cutting method is to horizontally place a wafer on a workbench, drive a main shaft of a dicing saw to drive a cutting knife to rotate at a high speed, and cut the wafer. At the moment, the main bearing of the cutting knife is horizontally arranged, and the axis of the main bearing and the center line of the wafer are on the same vertical plane.
When the main shaft or the motor is damaged, the motor below the main shaft or the workbench needs to be removed, and errors can occur during reinstallation, so that the deviation occurs between the main shaft and the workbench. Wafer dicing is a very delicate operation, and small deviations can also result in wafer scrap.
Disclosure of Invention
In order to adjust the position of the workbench conveniently, improve the cutting precision of wafers and reduce the scrappage of the wafers, the application provides a leveling mechanism and a leveling method of a scribing machine workbench.
On the one hand, the application provides a leveling mechanism of scribing machine workstation, adopts following technical scheme:
the leveling mechanism comprises a base, wherein a mounting plate is arranged on the base, a plurality of lifting pieces are arranged on the mounting plate at intervals and penetrate through the mounting plate to be connected with the base, and a workbench is arranged on the mounting plate.
By adopting the technical scheme, the gaps between different parts of the mounting plate and the base are adjusted through the plurality of lifting pieces, so that the top surface of the workbench is aligned with the axis of the main shaft, the cutting precision of the wafer is improved, and the wafer scrapping is reduced.
Optionally, the lifting piece is an adjusting sleeve, a containing cavity is formed in the base, one end of the adjusting sleeve is arranged in the containing cavity, and the other end of the adjusting sleeve is in threaded connection with the mounting plate.
Through adopting above-mentioned technical scheme, the cover can be adjusted to the height of mounting panel to the rotating, and is more convenient to the altitude mixture control of the different positions of mounting panel.
Optionally, a gasket is arranged between the adjusting sleeve and the inner bottom surface of the accommodating cavity.
Through adopting above-mentioned technical scheme, the gasket reduces the friction of adjusting collar and base to the direct contact of separation adjusting collar and base, reduces the wearing and tearing of adjusting collar and base, increase of service life.
Optionally, a separation sleeve is arranged in the adjusting sleeve, a fastening bolt is arranged in the separation sleeve, and the fastening bolt is in threaded connection with the base.
Through adopting above-mentioned technical scheme, separate the cover and separate fastening bolt and adjusting collar, mutually noninterfere when adjusting collar and fastening bolt rotate makes things convenient for rotating fastening bolt to press from both sides the mounting panel and the adjusting collar clamp tightly on the base, conveniently fastens the adjusting collar.
Optionally, a plurality of first anti-loosening elements are arranged between the fastening bolt and the separation sleeve.
Through adopting above-mentioned technical scheme, first locking piece promotes the pretightning force to the adjusting collar, and the adjusting collar is not hard up to need overcome bigger pretightning force, promotes the stability after the adjusting collar accomplishes the mounting panel and adjusts.
Optionally, the adjusting sleeve has a recess on one end inner wall in the mounting plate, a cushion block is arranged on the mounting plate, a connecting ring is arranged on one surface of the cushion block facing the adjusting sleeve, the connecting ring is in threaded connection with the adjusting sleeve, and threads on the connecting ring are opposite to threads on the outer wall of the adjusting sleeve.
Through adopting above-mentioned technical scheme, the cushion blocks through go-between and adjusting collar threaded connection and blocks that the adjusting collar further deepens to the mounting panel under the exogenic action, promotes the stability of adjusting collar after accomplishing the mounting panel location.
Optionally, a plurality of yielding holes are formed in the mounting plate, each yielding hole is internally provided with a second anti-loosening piece, and the second anti-loosening pieces are sleeved on the connecting rings.
Through adopting above-mentioned technical scheme, the pretightning force that the locking piece increase adjusting collar of second received, and bigger pretightning force needs to be overcome in the adjusting collar rotation, promotes the stability of adjusting collar completion mounting panel after adjusting.
Optionally, a rotating assembly for rotating the workbench is arranged on the mounting plate.
Through adopting above-mentioned technical scheme, the runner assembly drives the workstation and rotates, conveniently measures the positioning accuracy of workstation different positions, promotes the precision to the workstation leveling.
On the other hand, the application also provides a leveling method of the workbench of the scribing machine, which adopts the following technical scheme:
a leveling method of a scribing machine workbench is based on the leveling mechanism of the scribing machine workbench, and comprises the following steps:
if the measured data exceeds the design error range, the error between the main shaft and the top surface of the workbench is large, and the workbench needs to be adjusted;
if the measured data is within the design error range, the error between the main shaft and the top surface of the workbench is small, and the workbench does not need to be adjusted;
and 3, repeating the step 1 and the step 2 for multiple times until the measurement result of each measurement device is within the design error range.
By adopting the technical scheme, the workbench is supported by adopting a multi-point supporting mode, when the workbench is adjusted, the top surface of the workbench can be adjusted by adjusting the height of the supporting point, and the top surface of the workbench is repeatedly measured and determined by the dial indicator for multiple times, so that the deviation between the top surface of the workbench and the axis of the spindle is further reduced, the cutting precision of the wafer is improved, and the wafer scrap rate is reduced.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the gaps between different parts of the mounting plate and the base are adjusted through the plurality of lifting pieces, so that the top surface of the workbench is aligned with the axis of the main shaft, the cutting precision of the wafer is improved, and the scrappage of the wafer is reduced;
2. through rotating the workbench for many times, the deviation between different parts of the top surface of the workbench and the axis of the main shaft is measured, the adjustment precision of the top surface of the workbench is improved, the cutting precision of the wafer is improved, and the wafer scrap rate is reduced.
Drawings
FIG. 1 is a schematic diagram showing the positional relationship between a spindle and a table.
Fig. 2 is a schematic view of the overall structure of the embodiment.
Fig. 3 is an exploded view showing the structure of the elevating member.
Fig. 4 is a sectional view showing the structure of the lifter.
Description of reference numerals: 101. a spindle assembly; 102. a table assembly; 1. a base; 2. a work table; 41. mounting a plate; 42. an adjusting sleeve; 43. fastening a bolt; 44. a separation sleeve; 45. a first anti-loosening element; 46. cushion blocks; 47. a connecting ring; 48. a second anti-loosening element; 49. a gasket; 5. a rotating assembly; 51. a drive member; 52. an inner disc; 6. an accommodating chamber; 7. a yielding groove; 8. a hole of abdication; 9. and (5) a dial indicator.
Detailed Description
The present application is described in further detail below with reference to figures 1-4.
Referring to fig. 1, a dicing saw includes a frame 103, a spindle assembly 101 and a table assembly 102, where the spindle assembly 101 is disposed on the frame 103, and when wafer dicing is performed, a wafer is placed on the table assembly 102, and the spindle assembly 101 moves toward the table assembly 102 to drive a dicing blade to dice the wafer on the table assembly 102. When the axis of the spindle is deviated from the top surface of the table assembly 102 (as shown by the dashed line), the cutting error is too large, and the wafer is easily scrapped.
Referring to fig. 2 and 3, the leveling mechanism of the scribing machine workbench comprises a base 1, a clamping groove is formed in the base 1, a mounting plate 41 is arranged in the clamping groove, three lifting pieces are arranged on the mounting plate 41 at intervals, the three lifting pieces are arranged on the mounting plate 41 at intervals in a triangular shape, and the three lifting pieces penetrate through the mounting plate 41 and are connected with the base 1. The heights of different positions of the mounting plate 41 are adjusted by adjusting the lifting of the three lifting pieces.
Referring to fig. 2 and 3, a rotating assembly 5 is arranged on the mounting plate 41, the rotating assembly 5 includes a driving member 51 and an inner disc 52, the driving member 51 is fixed on the mounting plate 41, the driving member 51 is a motor in this embodiment, an output shaft of the motor is vertically arranged upward, the inner disc 52 is coaxially fixed on the output shaft of the motor, and the workbench 2 is fixed on the inner disc 52. The motor operates to rotate the inner disc 52, which in turn rotates the table 2. By rotating the workbench 2, the cutting path of the wafer is at different positions on the top surface of the workbench 2, the deviation between the different positions on the top surface of the workbench 2 and the axis of the main shaft is adjusted within a design error range, the leveling precision of the workbench 2 is improved, the cutting precision of the wafer is improved, and the condition that the wafer is scrapped is reduced.
Referring to fig. 3 and 4, the lifting member is specifically an adjusting sleeve 42, the base 1 is provided with an accommodating cavity 6, one end of the adjusting sleeve 42 is arranged in the accommodating cavity 6, and the other end of the adjusting sleeve 42 is in threaded connection with the mounting plate 41. The adjusting sleeve 42 is rotated to control the length of the adjusting sleeve 42 in the mounting plate 41, so as to adjust the heights of different positions of the mounting plate 41. Adjusting collar 42 bottom surface and hold and be equipped with gasket 49 between the interior bottom surface of chamber 6, gasket 49 separation adjusting collar 42 and base 1's friction is favorable to keeping the precision of base 1 and the smoothness that holds the chamber 6 inner wall, reduces base 1 and adjusting collar 42's wearing and tearing, increase of service life.
Referring to fig. 3 and 4, a separation sleeve 44 is inserted into the adjustment sleeve 42, the separation sleeve 44 and the adjustment sleeve 42 can rotate relatively, a fastening bolt 43 is arranged in the separation sleeve 44, and the fastening bolt 43 is in threaded connection with the base 1. After the adjusting sleeve 42 completes the height adjustment of the mounting plate 41, the fastening bolt 43 is rotated to clamp the base 1 and the mounting plate 41, so as to improve the stability of the connection between the mounting plate 41 and the base 1. Meanwhile, the fastening bolt 43 provides a larger pre-tightening force to clamp the base 1 and the mounting plate 41, the positions of the mounting plate 41 and the base 1 are relatively fixed, the adjusting sleeve 42 can be prevented from driving the mounting plate 41 to be away from the base 1 (assuming that the adjusting sleeve 42 rotates counterclockwise) due to external forces such as equipment operation, and after the adjusting sleeve 42 is lifted to complete adjustment, the positioning stability of the mounting plate 41 and the base 1 is improved.
Referring to fig. 3 and 4, a first anti-loosening element 45 is disposed between the fastening bolt 43 and the mounting plate 41, the first anti-loosening element 45 is specifically a disc spring, the disc spring is sleeved on the separation sleeve 44, and two disc springs are provided and are in involution arrangement. When the fastening bolt 43 is connected with the base 1, the two disc springs are clamped, and under the action of elasticity of the disc springs, thrust of the fastening bolt 43 and the mounting plate 41 exists, so that the pre-tightening force on the mounting plate 41 is further improved, and the positioning stability of the mounting plate 41 and the base 1 is further improved.
Referring to fig. 3 and 4, the mounting plate 41 is provided with a spacer 46, and a coupling ring 47 is integrally formed on a bottom surface of the spacer 46. The inner wall of one end of the adjusting sleeve 42 in the mounting plate 41 is provided with an annular yielding groove 7, and the outer wall of the connecting ring 47 is in threaded connection with the inner wall of the yielding groove 7. The threads on the outer wall of the coupling ring 47 are oppositely threaded to the threads on the outer wall of the adjustment sleeve 42. Because the equipment still has the condition that leads to adjusting sleeve 42 to drive mounting panel 41 and be close to base 1 when operation (supposing adjusting sleeve 42 clockwise rotation this moment), because cushion 46 accomplishes with adjusting sleeve 42 and is connected the back, has great supporting force to mounting panel 41, increase the pretightning force to adjusting sleeve 42, adjusting sleeve 42 is difficult to clockwise rotate under the exogenic action, adjusting sleeve 42 is difficult to anticlockwise rotation, also is difficult to clockwise rotation, has promoted the stability after adjusting sleeve 42 accomplishes the location greatly.
Referring to fig. 3 and 4, the mounting plate 41 is provided with a yielding hole 8, the yielding holes 8 and the adjusting sleeves 42 are arranged in a one-to-one correspondence manner, each yielding hole 8 is internally provided with a second anti-loosening element 48, each second anti-loosening element 48 is a disc spring, the disc spring is sleeved on the connecting ring 47, and one end of the disc spring with a larger opening diameter faces upwards. The dish spring increase is to the pretightning force of adjusting collar 42, and when adjusting collar 42 carried out clockwise turning, more pretightning force need overcome, has further promoted the stability after adjusting collar 42 accomplishes the location.
The implementation principle of the embodiment of the application is as follows: after the main shaft and the workbench 2 are installed, the main shaft is driven to move, cutting simulation is carried out, meanwhile, the relative position of the top surface of the workbench 2 and the main shaft is measured, and if the deviation is overlarge, the adjusting sleeve 42 is rotated according to the deviation to level the top surface of the workbench 2. The motor operates to drive the workbench 2 to rotate, and the workbench 2 is comprehensively leveled through changing positions for many times.
The embodiment of the application also provides a leveling method of the workbench of the scribing machine, which is implemented by using the leveling mechanism of the workbench of the scribing machine, and comprises the following steps:
with reference to fig. 1 and 2, in step 1, a measuring device, specifically a dial indicator, is arranged on a main shaft, the main shaft is moved to make the dial indicator move linearly on the top surface of a workbench, data measured by the dial indicator are recorded, and the data are compared with a design error range;
if the measured data exceeds the design error range, the error between the main shaft and the top surface of the workbench is large, and the workbench needs to be adjusted;
if the measured data is within the design error range, the error between the main shaft and the top surface of the workbench is small, and the workbench does not need to be adjusted.
And 2, when the workbench needs to be adjusted, rotating the adjusting sleeve at the corresponding position according to the measurement result, and adjusting the heights of different positions of the top surface of the workbench to enable the projection of the top surface of the workbench on the vertical surface to be parallel to the projection of the axis of the main shaft on the vertical surface.
And 3, repeating the step 1 and the step 2 for a plurality of times until each measurement result of the dial indicator is within a design error range, and finishing the leveling of the workbench.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (9)
1. The utility model provides a levelling mechanism of scriber workstation, includes base (1), its characterized in that: be equipped with mounting panel (41) that are used for setting up workstation (2) on base (1), the interval is equipped with a plurality of lifters on mounting panel (41), and is a plurality of the lifter runs through mounting panel (41) and is connected with base (1).
2. The leveling mechanism of the saw bench of claim 1, wherein: the lifting piece is an adjusting sleeve (42), a containing cavity (6) is formed in the base (1), one end of the adjusting sleeve (42) is arranged in the containing cavity (6), and the other end of the adjusting sleeve is in threaded connection with the mounting plate (41).
3. The leveling mechanism of the saw bench of claim 2, characterized in that: a gasket (49) is arranged between the adjusting sleeve (42) and the inner bottom surface of the containing cavity (6).
4. The leveling mechanism of the saw bench of claim 2, characterized in that: a separation sleeve (44) is arranged in the adjusting sleeve (42), a fastening bolt (43) is arranged in the separation sleeve (44), and the fastening bolt (43) is in threaded connection with the base (1).
5. The leveling mechanism of the saw bench of claim 4, wherein: a plurality of first anti-loosening pieces (45) are arranged between the fastening bolts (43) and the separating sleeves (44).
6. The leveling mechanism of the saw bench of claim 2, characterized in that: adjust cover (42) and seted up groove (7) of stepping down on the one end inner wall in mounting panel (41), be equipped with cushion (46) on mounting panel (41), cushion (46) are equipped with go-between (47) towards the one side of adjusting cover (42), go-between (47) and adjusting cover (42) threaded connection, screw thread on go-between (47) is revolved to opposite with the screw thread on adjusting cover (42) outer wall.
7. The leveling mechanism of the saw bench of claim 6, wherein: seted up a plurality of holes of stepping down (8) on mounting panel (41), every it all is equipped with second anti-loosening element (48) in hole of stepping down (8), second anti-loosening element (48) cover is established on go-between (47).
8. The leveling mechanism of the saw bench of claim 1, wherein: and a rotating assembly (5) used for rotating the workbench (2) is arranged on the mounting plate (41).
9. A leveling method of a scribing machine workbench is based on the leveling mechanism of the scribing machine workbench of any one of claims 1 to 8, and is characterized in that: the method comprises the following steps:
step 1, arranging a measuring device on a main shaft, moving the main shaft to enable the measuring device to move linearly on the top surface of a workbench, recording data measured by the measuring device, and comparing the data with a design error range;
if the measured data exceeds the design error range, the error between the main shaft and the top surface of the workbench is large, and the workbench needs to be adjusted;
if the measured data is within the design error range, the error between the main shaft and the top surface of the workbench is small, and the workbench does not need to be adjusted;
step 2, when the workbench needs to be adjusted, adjusting the plurality of lifting pieces, and adjusting the heights of different positions of the top surface of the workbench to enable the projection of the top surface of the workbench on the vertical surface to be parallel to the projection of the axis of the main shaft on the vertical surface;
and 3, repeating the step 1 and the step 2 for multiple times until the measurement result of each measurement device is within the design error range.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111573059.6A CN114290549A (en) | 2021-12-21 | 2021-12-21 | Leveling mechanism and leveling method for worktable of scribing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111573059.6A CN114290549A (en) | 2021-12-21 | 2021-12-21 | Leveling mechanism and leveling method for worktable of scribing machine |
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| CN114290549A true CN114290549A (en) | 2022-04-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202111573059.6A Pending CN114290549A (en) | 2021-12-21 | 2021-12-21 | Leveling mechanism and leveling method for worktable of scribing machine |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09223650A (en) * | 1996-02-15 | 1997-08-26 | Nikon Corp | Aligner |
| CN102554632A (en) * | 2010-12-17 | 2012-07-11 | 北京中电科电子装备有限公司 | Leveling device and scribing machine |
| CN105223969A (en) * | 2015-09-29 | 2016-01-06 | 河南科技大学 | A kind of sensor mounting adjustment system and laser instrument leveling benchmark device |
| CN109596096A (en) * | 2018-11-23 | 2019-04-09 | 中国船舶重工集团公司第七六研究所 | A kind of fast leveling method of mounting platform |
| CN109817558A (en) * | 2019-01-21 | 2019-05-28 | 北京华卓精科科技股份有限公司 | A kind of simple adjustment structure of crystal column surface posture and its adjusting method for matching optics focal depth range |
| CN110370823A (en) * | 2019-07-26 | 2019-10-25 | 河南奥德利数码科技有限公司 | A kind of printing machine platform leveling structure and leveling method |
| CN110549507A (en) * | 2019-08-14 | 2019-12-10 | 郑州光力瑞弘电子科技有限公司 | Scribing machine height measurement method, height measurement device and scribing machine |
| CN112108902A (en) * | 2020-08-31 | 2020-12-22 | 西安精雕精密机械工程有限公司 | Leveling structure and leveling method |
| CN214237569U (en) * | 2020-11-09 | 2021-09-21 | 沈阳仪表科学研究院有限公司 | Be used for scriber theta pivot levelling device |
-
2021
- 2021-12-21 CN CN202111573059.6A patent/CN114290549A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09223650A (en) * | 1996-02-15 | 1997-08-26 | Nikon Corp | Aligner |
| CN102554632A (en) * | 2010-12-17 | 2012-07-11 | 北京中电科电子装备有限公司 | Leveling device and scribing machine |
| CN105223969A (en) * | 2015-09-29 | 2016-01-06 | 河南科技大学 | A kind of sensor mounting adjustment system and laser instrument leveling benchmark device |
| CN109596096A (en) * | 2018-11-23 | 2019-04-09 | 中国船舶重工集团公司第七六研究所 | A kind of fast leveling method of mounting platform |
| CN109817558A (en) * | 2019-01-21 | 2019-05-28 | 北京华卓精科科技股份有限公司 | A kind of simple adjustment structure of crystal column surface posture and its adjusting method for matching optics focal depth range |
| CN110370823A (en) * | 2019-07-26 | 2019-10-25 | 河南奥德利数码科技有限公司 | A kind of printing machine platform leveling structure and leveling method |
| CN110549507A (en) * | 2019-08-14 | 2019-12-10 | 郑州光力瑞弘电子科技有限公司 | Scribing machine height measurement method, height measurement device and scribing machine |
| CN112108902A (en) * | 2020-08-31 | 2020-12-22 | 西安精雕精密机械工程有限公司 | Leveling structure and leveling method |
| CN214237569U (en) * | 2020-11-09 | 2021-09-21 | 沈阳仪表科学研究院有限公司 | Be used for scriber theta pivot levelling device |
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Application publication date: 20220408 |