CN219957413U - X-ray diffraction appearance phase Instrument and sample stage device thereof - Google Patents
X-ray diffraction appearance phase Instrument and sample stage device thereof Download PDFInfo
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- CN219957413U CN219957413U CN202321278716.9U CN202321278716U CN219957413U CN 219957413 U CN219957413 U CN 219957413U CN 202321278716 U CN202321278716 U CN 202321278716U CN 219957413 U CN219957413 U CN 219957413U
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- ray diffraction
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- 238000002441 X-ray diffraction Methods 0.000 title claims abstract description 43
- 238000012360 testing method Methods 0.000 claims abstract description 27
- 230000000149 penetrating effect Effects 0.000 claims abstract description 7
- 239000011148 porous material Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Abstract
The utility model discloses an X-ray diffraction phase appearance instrument and a sample stage device thereof. The first sample stage is provided with a first through hole penetrating through the upper surface and the lower surface of the first sample stage. The second sample platform is used for bearing samples and is arranged at the first through hole in a lifting mode. Through the lift second sample platform, with the sample lift of different thickness to the assigned position, need not adjust X ray emitter's position, X ray diffraction appearance looks appearance just can test the sample of different thickness, easy operation has improved work efficiency, has also ensured the accuracy of test result simultaneously.
Description
Technical Field
The utility model relates to the technical field of sample bearing devices, in particular to an X-ray diffraction phase appearance instrument and a sample table device thereof.
Background
With the development of semiconductors and the large use of near-perfect crystalline materials, however, various defects such as dislocations present in the crystal can severely impact device performance. The X-ray diffraction phase appearance instrument can be used for nondestructively detecting microscopic structural defects on the surfaces and the interiors of the crystal materials and devices, and obtaining the form, the quantity and the evolution process of various defects, and has important significance for researching the growth conditions, the physical properties and the crystal quality of crystals.
For conventional wafers, workers typically use an X-ray diffraction profilometer to test a sample, while current X-ray diffraction profilometers are capable of both transmission and reflection mode testing, typically the distance between the sample stage of the X-ray diffraction profilometer and the X-ray emitter is fixed and the thickness of the sample is required to be less than 1mm. However, when the thickness of the sample is greater than 1mm, the distance between the sample stage and the X-ray emitter is fixed, so that the distance between the sample and the X-ray emitter does not meet the test condition, and the X-ray diffraction phase appearance instrument cannot perform the reflection mode test on the sample.
Thus, there is a need for improvements in existing sample stage devices.
Disclosure of Invention
The utility model aims to provide an X-ray diffraction phase appearance instrument and a sample stage device thereof, wherein a second sample stage can lift samples with different thicknesses to a specified position so that the X-ray diffraction phase appearance instrument can test the samples with different thicknesses.
The utility model adopts the following technical scheme:
a sample stage apparatus for an X-ray diffraction phase appearance apparatus, comprising:
the device comprises a first sample table, a second sample table and a first test piece, wherein a first through hole penetrating through the upper surface and the lower surface of the first sample table is formed in the first sample table;
the second sample platform is used for bearing samples and is arranged at the first through hole in a lifting mode.
Preferably, the sample stage device further comprises a driving assembly, the driving assembly comprises a fixed block and a rotary handle, the fixed block is arranged at the first through hole, the rotary handle can penetrate through the fixed block in a lifting mode, and the rotary handle is used for driving the second sample stage to lift.
Preferably, an external thread is provided on the outer wall of the rotary handle, a second through hole penetrating through the upper surface and the lower surface of the fixed block is provided on the fixed block, an internal thread corresponding to the external thread is provided on the inner wall of the second through hole, and part of the rotary handle is arranged in the second through hole, so that the second sample stage is driven to lift by rotating the rotary handle.
Preferably, the driving assembly further comprises a connecting shaft, the connecting shaft is arranged between the second sample stage and the rotary handle, the connecting shaft is at least partially positioned in the second through hole, and the rotary handle is rotated so that the rotary handle drives the second sample stage to lift through the connecting shaft.
Preferably, a first guiding part is arranged on the connecting shaft, a second guiding part is arranged in the second through hole, and the first guiding part and the second guiding part are matched to guide the connecting shaft to move only axially.
Preferably, the first guide portion is a groove, and the second guide portion is a protrusion; alternatively, the first guide portion is a protrusion, and the second guide portion is a groove.
Preferably, the driving assembly further comprises an elastic member, one end of the elastic member abuts against the connecting shaft, and the other end of the elastic member abuts against the rotating handle.
Preferably, the second through hole comprises a first section hole and a second section hole, the first section hole is close to the second sample stage, and the aperture of the first section hole is smaller than that of the second section hole;
the connecting shaft is in an inverted T shape as a whole, the diameter of one end, close to the rotary handle, of the connecting shaft is larger than the aperture of the first section of hole and smaller than or equal to the aperture of the second section of hole, and the diameter of one end, close to the second sample stage, of the connecting shaft is smaller than the aperture of the first section of hole.
Preferably, a support rod is arranged on one surface of the second sample stage, facing the fixed block, and is connected with the driving assembly, and the diameter of the second sample stage is smaller than or equal to the aperture of the first through hole.
An X-ray diffraction phase appearance comprising a sample stage apparatus of an X-ray diffraction phase appearance as claimed in any one of the preceding claims.
Compared with the prior art, the utility model has the beneficial effects that at least:
according to the X-ray diffraction phase appearance instrument and the sample stage device thereof, samples with different thicknesses are lifted to the specified positions by lifting the second sample stage, the positions of the X-ray emitters are not required to be adjusted, the X-ray diffraction phase appearance instrument can test the samples with different thicknesses, the operation is simple, the working efficiency is improved, and meanwhile, the accuracy of test results is ensured.
Drawings
Fig. 1 is a schematic structural view of a sample stage device according to an embodiment of the present utility model without a connecting shaft.
FIG. 2 is a cross-sectional view of a sample stage device according to an embodiment of the present utility model without a connecting shaft.
Fig. 3 is an exploded view of the sample stage device according to the embodiment of the present utility model without the connecting shaft.
Fig. 4 is a schematic structural view of a sample stage device according to an embodiment of the present utility model when a connecting shaft is provided.
FIG. 5 is a cross-sectional view of a sample stage apparatus according to an embodiment of the present utility model with a connecting shaft.
FIG. 6 is an exploded view of a sample stage device according to an embodiment of the present utility model with a connecting shaft.
In the figure: 100. a sample stage device; 1. a first sample stage; 10. a first through hole; 11. a first mounting hole; 2. a second sample stage; 20. a support rod; 3. a drive assembly; 30. a fixed block; 301. a second through hole; 3011. a second guide part; 3012. a first section of aperture; 3013. a second section of hole; 302. a second mounting hole; 31. rotating the handle; 32. a connecting shaft; 321. a first guide part; 322. a first portion; 323. a second portion; 33. an elastic member.
Detailed Description
Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus a repetitive description thereof will be omitted.
The words expressing the positions and directions described in the present utility model are described by taking the drawings as an example, but can be changed according to the needs, and all the changes are included in the protection scope of the present utility model.
Referring to fig. 1 to 6, the present utility model provides a sample stage apparatus 100 of an X-ray diffraction phase appearance apparatus, comprising a first sample stage 1 and a second sample stage 2. The sample stage device 100 in this embodiment can be applied to an X-ray diffraction phase appearance.
Specifically, the first sample stage 1 is provided with a first through hole 10 penetrating through the upper and lower surfaces of the first sample stage 1, the first sample stage 1 is substantially rectangular, and the first sample stage 1 is mounted on an X-ray diffraction phase appearance instrument and is kept at a certain distance from an X-ray emitter (not shown) of the X-ray diffraction phase appearance instrument. The first through-hole 10 is preferably located at an intermediate position of the first sample stage 1, and the shape of the first through-hole 10 is, for example, circular, square, or the like, and in this embodiment, the shape of the first through-hole 10 is circular. The X-ray diffraction phase appearance instrument is provided with a transmission mode test and a reflection mode test, when the transmission mode test is performed, a sample is placed on the first sample table 1, the thickness of the sample is less than 1mm, and the X-ray diffraction phase appearance instrument can penetrate through the sample to test the inside of the sample; in the reflection mode test, a sample is placed on the first sample table 1, the thickness of the sample is less than 1mm, and the X-ray diffraction appearance phase instrument performs the reflection mode test on the surface of the sample. When the thickness of the sample is greater than 1mm, the distance from the surface of the sample to the X-ray emitter exceeds the required range of the instrument, and the X-ray diffraction phase appearance instrument cannot perform reflection mode test on the surface of the sample or the test result has great errors.
The second sample stage 2 is used for carrying a sample, and the second sample stage 2 is arranged at the first through hole 10 in a lifting manner. The shape of the bearing surface of the second sample stage 2 is, for example, circular, square, etc., and in this embodiment, the shape of the bearing surface of the second sample stage 2 is circular. The diameter of the second sample stage 2 is smaller than or equal to the aperture of the first through hole 10, so that the second sample stage 2 can be lifted and lowered through the first through hole 10, and the requirements of samples with different thicknesses can be met. When testing samples with different thicknesses, the samples are placed on the second sample table 2, and the samples with different thicknesses can be kept at a certain distance from the X-ray emitter by adjusting the position of the second sample table 2 so as to meet the testing conditions of the X-ray diffraction appearance phase instrument, so that the X-ray diffraction appearance phase instrument can test the samples with different thicknesses in a reflection mode, and when the samples with different thicknesses are tested, the position of the X-ray emitter is not required to be adjusted, only the position of the second sample table 2 is required to be adjusted, the operation is simple, the working efficiency is improved, the testing accuracy is ensured, and the damage to the X-ray emitter due to the adjustment of the position of the X-ray emitter can be avoided. The initial position of the second sample stage 2 is preferably such that the upper surface of the second sample stage 2 is flush with the upper surface of the first sample stage 1.
In a specific embodiment, the sample stage device 100 further includes a driving component 3, where the driving component 3 is used to drive the second sample stage 2 to lift. Specifically, the driving assembly 3 includes a fixed block 30 and a rotary handle 31, the fixed block 30 is disposed at the first through hole 10, the fixed block 30 may be partially disposed in the first through hole 10 or disposed under the first through hole 10, and in this embodiment, the fixed block 30 is disposed under the first through hole 10. The rotary handle 31 passes through the fixed block 30 in a lifting manner, and the rotary handle 31 is used for driving the second sample table 2 to lift, so that the second sample table 2 drives the sample to lift, and the distance from the sample to the X-ray emitter is met.
The second sample stage 2 may be directly connected to the rotary handle 31, or the side of the second sample stage 2 facing the fixed block 30 may be provided with a support rod 20, and the support rod 20 is connected to the rotary handle 31. When the second sample stage 2 is provided with the support rod 20 towards the one side of the fixed block 30, the support rod 20 can be provided with external threads when being connected with the rotary handle 31, the rotary handle 31 is provided with a concave part, and the concave part is provided with internal threads corresponding to the external threads of the support rod 20, so that the installation and the disassembly between the support rod 20 and the rotary handle 31 are convenient. Through rotating the rotary handle 31, the rotary handle 31 drives the second sample platform 2 to lift, so that the operation is simple, the adjusting speed is high, and the working efficiency of personnel is improved.
External threads are further arranged on the outer wall of at least part of the rotary handle 31, a second through hole 301 penetrating through the upper surface and the lower surface of the fixed block 30 is formed in the fixed block 30, internal threads corresponding to the external threads are arranged on the inner wall of the second through hole 301, part of the rotary handle 31 is arranged in the second through hole 301, part of the rotary handle 31 is exposed out of the second through hole 301, and therefore a person can conveniently rotate the rotary handle 31, and the second sample stage 2 is driven to lift by rotating the rotary handle 31.
The first sample table 1 is further provided with a first mounting hole 11, an internal thread (not shown) may be provided in the first mounting hole 11, a second mounting hole 302 corresponding to the first mounting hole 11 may be provided in the fixed block 30, an internal thread (not shown) may be provided in the second mounting hole 302, and the first mounting hole 11 and the second mounting hole 302 may be connected by a screw (not shown). The screw is used for stably fixing the fixed block 30 on the first sample table 1, and is convenient to detach and simple to operate. When the X-ray diffraction phase appearance needs to be tested in transmission mode, the fixing block 30 can be quickly removed, the fixture block 30 can be quickly installed when the X-ray diffraction phase appearance requires transmission mode testing. The number of the first mounting holes 11 is preferably four, and the four corners are distributed, the number and the distribution positions of the second mounting holes 302 correspond to those of the first mounting holes 11, and the four corners of the first mounting holes 11 and the second mounting holes 302 can ensure that the fixing block 30 is connected with the first sample table 1 more stably.
In a specific embodiment, the driving assembly 3 further includes a connecting shaft 32, the connecting shaft 32 is disposed between the second sample stage 2 and the rotary handle 31, the connecting shaft 32 is at least partially located in the second through hole 301, and the rotary handle 31 is rotated to enable the rotary handle 31 to drive the second sample stage 2 to lift through the connecting shaft 32. When can avoid rotating rotatory handle 31 like this, rotatory handle 31 drives second sample platform 2 rotatory, and second sample platform 2 then drives the sample and rotate, has guaranteed that the sample can not change in the position on second sample platform 2, has avoided readjusting the position of sample on second sample platform 2 after the adjustment sample height, has reduced personnel's operation procedure, has increaseed work efficiency, also has avoided the personnel to contact the sample again and has led to the fact the sample damage or pollute the sample and influence the test result simultaneously. The second sample stage 2 may be directly connected to the connection shaft 32, or the second sample stage 2 may be provided with a support rod 20 on a surface facing the fixed block 30, and the support rod 20 is connected to the connection shaft 32. When the second sample platform 2 is provided with the bracing piece 20 towards the one side of fixed block 30, when bracing piece 20 is connected with connecting axle 32, can be provided with the external screw thread on the bracing piece 20, be provided with the concave part on the connecting axle 32, the concave part is provided with the internal screw thread that corresponds with the external screw thread of bracing piece 20, makes things convenient for the installation and dismantlement between bracing piece 20 and the connecting axle 32 like this.
Preferably, the connecting shaft 32 is provided with one or more first guiding parts 321, the second through holes 301 are provided with one or more second guiding parts 3011, and the first guiding parts 321 and the second guiding parts 3011 cooperate to guide the connecting shaft 32 to move only in the axial direction. The first guide portion 321 may be a groove and extend in the axial direction of the connection shaft 32, and the second guide portion 3011 may be a protrusion and extend in the axial direction of the connection shaft 32; alternatively, the first guide portion 321 may be a protrusion and extend in the axial direction of the connection shaft 32, and the second guide portion 3011 may be a groove and extend in the axial direction of the connection shaft 32. Through the cooperation of first guide part 321 and second guide part 3011, when rotating rotatory handle 31, connecting axle 32 can not rotate along with rotatory handle 31, second sample platform 2 also can not rotate along with rotatory handle 31, further ensured the position of sample on second sample platform 2, avoided adjusting the position of sample on second sample platform 2 after the sample height again, reduced personnel operation steps, improved work efficiency, also avoided the personnel to contact the sample again and cause the sample to damage or pollute the sample and influence the test result simultaneously.
Preferably, the second through hole 301 includes a first section hole 3012 and a second section hole 3013, the first section hole 3012 being close to the second sample stage 2, and the aperture of the first section hole 3012 being smaller than the aperture of the second section hole 3013. The connecting shaft 32 is in an inverted T shape as a whole, the diameter of one end of the connecting shaft 32 close to the rotary handle 31 is larger than the aperture of the first section hole 3012 and smaller than or equal to the aperture of the second section hole 3013, and the diameter of one end of the connecting shaft 32 close to the second sample stage 2 is smaller than the aperture of the first section hole 3012. The T-shaped connecting shaft 32 has a first portion 322 and a second portion 323, the first portion 322 having a diameter close to the second sample stage 2, the second portion 323 being close to the rotary handle 31, the first portion 322 having a diameter smaller than the second portion 323. The first portion 322 can pass through the first section hole 3012 along the axial direction of the connecting shaft 32, the second portion 323 is arranged in the second section hole 3013, and the connecting shaft 32 can slide in the second section hole 3013 along the axial direction of the connecting shaft 32, because the diameter of the second portion 323 is larger than the aperture of the first section hole 3012, the connecting shaft 32 can be prevented from falling off from the fixed block 30 through the second through hole 301, and the second sample stage 2 is prevented from falling off along with the connecting shaft 32, so that sample damage is avoided.
The driving unit 3 may further include an elastic member 33, one end of the elastic member 33 being in contact with the connection shaft 32, and the other end of the elastic member 33 being in contact with the rotation handle 31. The elastic member 33 is, for example, a spring, and the elastic member 33 can further prevent the connecting shaft 32 from driving the second sample stage 2 to rotate when the rotating handle 31 is rotated, and can play a role in buffering, so that the stability of movement between the rotating handle 31 and the connecting shaft 32 is improved.
The first sample stage 1 may be provided with a measuring device (not shown), for example a height gauge, for measuring the size of the second sample stage 2 raised or lowered. The measurement of the throughput-side apparatus can acquire the ascending or descending dimension of the second sample stage 2, and can further accelerate the adjustment speed and accuracy. The driving assembly 3 can further comprise a motor (not shown), the motor is used for driving the second sample platform 2 to lift, so that the position of the second sample platform 2 is automatically adjusted, the working efficiency is improved, the motor adjusting precision is higher, and the accuracy of experimental data is improved.
The utility model also provides an X-ray diffraction phase appearance instrument, which comprises the sample stage device 100. The X-ray diffraction phase appearance instrument also comprises an X-ray emitter, the position of the X-ray emitter is fixedly arranged, and by adjusting the position of the second sample stage 2, the X-ray diffraction phase appearance instrument can realize the reflection mode test of samples with different thicknesses without adjusting the position of the X-ray emitter.
While embodiments of the present utility model have been shown and described, it will be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that changes, modifications, substitutions and alterations may be made therein by those of ordinary skill in the art without departing from the spirit and scope of the utility model, all such changes being within the scope of the appended claims.
Claims (10)
1. A sample stage apparatus for an X-ray diffraction phase appearance apparatus, comprising:
the device comprises a first sample table, a second sample table and a first test piece, wherein a first through hole penetrating through the upper surface and the lower surface of the first sample table is formed in the first sample table;
the second sample platform is used for bearing samples and is arranged at the first through hole in a lifting mode.
2. The stage apparatus of an X-ray diffraction phase apparatus of claim 1 further comprising a drive assembly including a fixed block disposed at the first through hole and a rotary handle passing through the fixed block in a liftable manner, the rotary handle being for driving the second stage to rise and fall.
3. The sample stage device of an X-ray diffraction phase appearance instrument according to claim 2, wherein an external thread is provided on an outer wall of the rotary handle, a second through hole penetrating through an upper surface and a lower surface of the fixed block is provided on the fixed block, an internal thread corresponding to the external thread is provided on an inner wall of the second through hole, a part of the rotary handle is provided in the second through hole, and the rotary handle is rotated to drive the second sample stage to lift.
4. The X-ray diffraction phase apparatus of claim 3 wherein the drive assembly further comprises a connecting shaft disposed between the second sample stage and the rotating handle, the connecting shaft being at least partially disposed within the second through hole, the rotating handle being rotated to cause the rotating handle to drive the second sample stage up and down via the connecting shaft.
5. The sample stage device of an X-ray diffraction phase appearance instrument according to claim 4, wherein a first guiding portion is provided on the connecting shaft, a second guiding portion is provided in the second through hole, and the first guiding portion and the second guiding portion cooperate to guide the connecting shaft to move only in an axial direction.
6. The sample stage device of an X-ray diffraction phase appearance apparatus of claim 5 wherein the first guide is a groove and the second guide is a protrusion; alternatively, the first guide portion is a protrusion, and the second guide portion is a groove.
7. The sample stage device of an X-ray diffraction phase apparatus according to claim 4, wherein the drive assembly further comprises an elastic member, one end of the elastic member is abutted against the connecting shaft, and the other end of the elastic member is abutted against the rotary handle.
8. The sample stage device of an X-ray diffraction phase appearance apparatus of claim 4, wherein the second through hole comprises a first section hole and a second section hole, the first section hole being adjacent to the second sample stage, the first section hole having a smaller pore size than the second section hole;
the connecting shaft is in an inverted T shape as a whole, the diameter of one end, close to the rotary handle, of the connecting shaft is larger than the aperture of the first section of hole and smaller than or equal to the aperture of the second section of hole, and the diameter of one end, close to the second sample stage, of the connecting shaft is smaller than the aperture of the first section of hole.
9. The sample stage device of an X-ray diffraction phase appearance instrument according to claim 2, wherein a support rod is arranged on one surface of the second sample stage facing the fixed block, the support rod is connected with the driving assembly, and the diameter of the second sample stage is smaller than or equal to the aperture of the first through hole.
10. An X-ray diffraction phase appearance comprising a sample stage device of an X-ray diffraction phase appearance according to any of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321278716.9U CN219957413U (en) | 2023-05-24 | 2023-05-24 | X-ray diffraction appearance phase Instrument and sample stage device thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321278716.9U CN219957413U (en) | 2023-05-24 | 2023-05-24 | X-ray diffraction appearance phase Instrument and sample stage device thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219957413U true CN219957413U (en) | 2023-11-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321278716.9U Active CN219957413U (en) | 2023-05-24 | 2023-05-24 | X-ray diffraction appearance phase Instrument and sample stage device thereof |
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| Country | Link |
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| CN (1) | CN219957413U (en) |
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2023
- 2023-05-24 CN CN202321278716.9U patent/CN219957413U/en active Active
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