CN219284221U - Flat plate film thickness detection device - Google Patents

Flat plate film thickness detection device Download PDF

Info

Publication number
CN219284221U
CN219284221U CN202320173094.7U CN202320173094U CN219284221U CN 219284221 U CN219284221 U CN 219284221U CN 202320173094 U CN202320173094 U CN 202320173094U CN 219284221 U CN219284221 U CN 219284221U
Authority
CN
China
Prior art keywords
film thickness
detection
detection platform
linear moving
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202320173094.7U
Other languages
Chinese (zh)
Inventor
涂东东
柴进
黄鸿杰
彭建林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Manst Technology Co Ltd
Original Assignee
Shenzhen Manst Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Manst Technology Co Ltd filed Critical Shenzhen Manst Technology Co Ltd
Priority to CN202320173094.7U priority Critical patent/CN219284221U/en
Application granted granted Critical
Publication of CN219284221U publication Critical patent/CN219284221U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The utility model provides a flat film thickness detection device, which belongs to the technical field of coating detection and comprises a detection platform, a first linear movement device, a supporting beam, a second linear movement device and a non-contact thickness measurement device, wherein the detection platform is provided with adsorption holes, and the first linear movement device is provided with two groups and is arranged on two sides of the top surface of the detection platform in parallel; the supporting cross beam is erected on the sliding blocks of the two groups of first linear moving devices; the second linear moving device is arranged on the supporting beam; the non-contact thickness measuring device is arranged on the sliding block of the second linear moving device, and is pointed to the detection platform. The product to be detected is placed on the detection platform and is adsorbed and fixed through the adsorption hole, the first linear moving device and the second linear moving device drive the non-contact thickness measuring device to move in two directions, the film thickness of each point of the product to be detected can be measured rapidly, and the detection efficiency and the detection precision are improved greatly.

Description

Flat plate film thickness detection device
Technical Field
The utility model relates to the technical field of coating detection, in particular to a flat plate film thickness detection device.
Background
In the lithium battery production link, the consistency of the battery needs to be controlled, and the density of the coated pole pieces needs to be consistent.
The method is characterized in that a doctor blade type coating mode, a roller coating transfer type coating mode and a slit coating extrusion coating mode are commonly adopted in domestic coating modes, an optical detection instrument is commonly adopted in a traditional mode for film thickness detection, a coated pole piece is cut into small pieces and clamped, a clamp is fixed, the small pieces are arranged on a detection platform of an optical thickness gauge for detection, the position of the pole piece or a detection probe needs to be manually adjusted for detecting different coordinates, and the detection method is high in labor time cost and low in detection efficiency.
Disclosure of Invention
Therefore, the utility model aims to solve the defects of high labor time cost and low detection efficiency caused by detecting the sampled pole piece through the optical thickness gauge in the prior art, thereby providing the flat plate film thickness detection device.
In order to solve the above technical problems, the present utility model provides a flat film thickness detection device, comprising:
the detection platform is provided with adsorption holes and is used for adsorbing and fixing a product to be detected which is placed on the detection platform;
the first linear moving device is provided with two groups and is arranged on two sides of the top surface of the detection platform in parallel;
the support cross beam is erected on the sliding blocks of the two groups of first linear moving devices;
the second linear moving device is arranged on the supporting beam;
and the non-contact thickness measuring device is arranged on the sliding block of the second linear moving device and points to the detection platform.
Optionally, the method further comprises:
the detection platform is arranged on the top surface of the rack;
the door plate is arranged on the outer side of the frame in a surrounding mode to form a cavity.
Optionally, the door plate is magnetically connected with the frame.
Optionally, a vibration-proof pad is arranged between the frame and the detection platform.
Optionally, the adsorption holes have a plurality of groups, the adsorption holes are connected with an external vacuum source through a connecting pipeline, and the connecting pipeline is arranged in the cavity.
Optionally, a switch valve is arranged on the connecting pipeline.
Optionally, the non-contact thickness measuring device is a laser thickness meter.
Optionally, the detection platform and the supporting beam are made of a grade marble material.
Optionally, the first linear motion device and the second linear motion device are both linear modules.
Optionally, the method further comprises:
the non-contact distance measuring device is provided with four groups, and the four groups are respectively arranged on four sides of the non-contact thickness measuring device.
The technical scheme of the utility model has the following advantages:
1. according to the flat film thickness detection device provided by the utility model, the product to be detected is placed on the detection platform and is adsorbed and fixed through the adsorption holes, and the first linear movement device and the second linear movement device drive the non-contact thickness measurement device to move in two directions, so that the film thickness of each point of the product to be detected can be rapidly measured, and the detection efficiency and the detection precision are greatly improved.
The product to be detected is fixed on the detection platform through adsorption, so that the measurement error caused by the fact that the product to be detected has warping is avoided, and the fixture is not required to be additionally arranged for fixing, and the fixing mode is convenient and fast. The first linear moving device is arranged on the top surface of the detection platform, the second linear moving device is arranged on the supporting beam, the door type structure arranged on the top surface of the detection platform is utilized to drive the non-contact thickness measuring device, the working stability is better, and the accuracy is higher.
2. The flat film thickness detection device provided by the utility model further comprises the frame and the door plate, wherein the top surface of the frame is used for placing the detection platform, the door plate encloses the frame to form a cavity, the circuit and the like can be arranged in the cavity, the door plate wraps the cavity, the circuit is prevented from being exposed, and the flat film thickness detection device is not attractive and has potential safety hazards.
3. In the flat film thickness detection device provided by the utility model, the door plate is connected with the rack through magnetic attraction, and can be detached by applying certain force, so that the device is convenient to install and detach.
4. In the flat film thickness detection device provided by the utility model, the vibration-proof pad is arranged between the frame and the detection platform for vibration reduction, so that the detection platform is prevented from shaking in the working process of the first linear movement device and the second linear movement device, and the detection result is prevented from being influenced.
5. In the flat film thickness detection device provided by the utility model, the adsorption holes are provided with a plurality of groups, can adsorb products to be detected with different sizes, are connected with an external vacuum source through the connecting pipeline, and are arranged in the cavity, so that the products can be better adsorbed after vacuumizing, and the stability of the products in working is ensured.
6. In the flat film thickness detection device provided by the utility model, the switching valves are arranged on the connecting pipelines, so that the on-off of the switching valves on different connecting pipelines can be controlled according to products to be detected with different sizes, and the universality is strong.
7. In the flat film thickness detection device provided by the utility model, the non-contact thickness measurement device is a laser thickness meter, and the laser thickness measurement has high precision and quick response time.
8. In the flat film thickness detection device provided by the utility model, the detection platform and the supporting cross beam are made of 00-grade marble, the flatness error is within 0.003mm, and the accuracy of film thickness detection is ensured.
9. In the flat film thickness detection device provided by the utility model, the first linear movement device and the second linear movement device are both linear modules, so that the repeated positioning accuracy is high, and the accurate positioning speed is high.
10. In the flat film thickness detection device provided by the utility model, the non-contact distance measuring device is arranged on the side surface of the non-contact thickness measuring device in the moving direction, when the first linear movement device or the second linear movement device moves to exceed the boundary range of a product to be detected, the non-contact distance measuring device is separated from the product, the measured distance is increased, then the first linear movement device or the second linear movement device changes the direction, the non-contact thickness measuring device is prevented from detecting outside the product, the non-contact thickness measuring device is suitable for products with different specifications and sizes, the moving parameters are not required to be adjusted according to different products, the degree of automation is high, and the detection efficiency is further improved.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a flat panel film thickness detection device according to an embodiment of the present utility model;
FIG. 2 is a schematic view of the structure of the detection platform in FIG. 1 placed on a rack;
fig. 3 is a schematic structural view of the frame in fig. 2.
Reference numerals illustrate:
1. a detection platform; 2. adsorption holes; 3. a product to be detected; 4. a first linear motion device; 5. a support beam; 6. a second linear movement device; 7. a non-contact thickness measuring device; 8. a frame; 9. a door panel; 10. a cavity; 11. a vibration-proof pad; 12. a non-contact distance measuring device.
Detailed Description
The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
In addition, the technical features of the different embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.
The flat plate film thickness detection device provided by the embodiment is used for measuring the film thickness of a coated flat plate, can be used for testing the film thickness detection of glass coating, and can also be used for the thickness of carrier coatings made of various hard materials.
As shown in fig. 1, a specific implementation manner of the flat film thickness detection device provided in this embodiment includes a detection platform 1, a first linear movement device 4, a supporting beam 5, a second linear movement device 6, and a non-contact thickness measurement device 7, where the detection platform 1 has an adsorption hole 2, and the adsorption hole 2 is configured to adsorb and fix a product 3 to be detected placed on the detection platform 1; the first linear moving devices 4 are provided with two groups, and the two groups of first linear moving devices 4 are arranged on two sides of the top surface of the detection platform 1 in parallel; the supporting beam 5 is erected on the sliding blocks of the two groups of first linear moving devices 4, the second linear moving devices 6 are arranged on the supporting beam 5, the first linear moving devices 4 and the second linear moving devices 6 form a portal structure, the operation is stable, the non-contact thickness measuring device 7 is arranged on the sliding blocks of the second linear moving devices 6, the non-contact thickness measuring device 7 points to the detection platform 1, and the non-contact thickness measuring device 7 detects the film thickness of a product 3 to be detected.
The product 3 to be detected is placed on the detection platform 1 and is adsorbed and fixed through the adsorption hole 2, the first linear moving device 4 and the second linear moving device 6 drive the non-contact thickness measuring device 7 to move in two directions, the film thickness of each point of the product to be detected can be measured rapidly, and the detection efficiency and the detection precision are improved greatly.
The product 3 to be detected is fixed on the detection platform 1 through adsorption, the problem that the product 3 to be detected has warpage to bring measuring errors is avoided, the fixture is not required to be additionally arranged for fixing, the fixing mode is convenient and fast, the first linear moving device 4 is arranged on the top surface of the detection platform 1, the second linear moving device 6 is arranged on the supporting beam 5, the portal structure arranged on the top surface of the detection platform 1 is utilized for driving the non-contact thickness measuring device 7, the working stability is better, and the accuracy is higher.
As shown in fig. 2 and 3, in the flat film thickness detection device provided in this embodiment, the flat film thickness detection device further includes a frame 8 and a door plate 9, the detection platform 1 is disposed on the top surface of the frame 8, the door plate 9 is disposed around the outside of the frame 8 to form a cavity 10, the frame 8 can be formed by welding square steel, and also can be made of other sections, so that the stability is good and the weight is light. The circuit and the like can be arranged in the cavity 10, the door plate 9 wraps the cavity 10, the circuit is prevented from being exposed, and the circuit is not attractive and has potential safety hazards.
In the flat film thickness detection device provided by the embodiment, the door plate 9 is magnetically attracted to the frame 8, and the door plate 9 can be detached by applying certain force, so that the installation and the detachment are convenient. In addition, as an alternative embodiment, the door panel 9 and the frame 8 may be connected by a hinge to form a rotation connection, so as to be convenient for opening and closing, or may be fixedly connected by a fastener such as a bolt.
As shown in fig. 3, in the flat film thickness detection device provided in this embodiment, a vibration-proof pad 11 is disposed between the frame 8 and the detection platform 1 to perform vibration absorption, and other types of vibration-absorbing members may be disposed, so as to avoid shaking of the detection platform 1 during the working process of the first linear movement device 4 and the second linear movement device 6, and influence on the detection result.
As shown in fig. 1, in the flat film thickness detection device provided in this embodiment, the adsorption holes 2 have a plurality of groups, the adsorption holes 2 are connected with an external vacuum source through a connection pipe, the connection pipe is disposed in the cavity 10, and the adsorption holes 2 and the connection pipe may be connected through threads. For example, 77 vacuum adsorption holes of 2mm are uniformly distributed on the detection platform 1, the distance between every two holes is 125mm, plates of different specifications can be adsorbed, when the plates are placed, the adsorption holes 2 are opened by vacuumizing, and air below the plates is extracted, so that the plates are firmly adsorbed on the detection platform 1.
Before the flat plate is placed, a small amount of alcohol or acetone is required to be dipped by dust-free cloth to be wiped in a vacuum area, the flat plate is placed after a while liquid volatilizes, when the flat plate is required to be taken down, a connecting pipeline is closed, rubber gloves are worn to lift the flat plate from the edge of glass, the flat plate cannot be rubbed on marble, and abrasion is avoided.
In the flat film thickness detection device provided by the embodiment, the on-off valve is arranged on the connecting pipeline, and according to products to be detected of different sizes, the on-off of the on-off valve on different connecting pipelines can be controlled, so that the universality is strong. In addition, the connecting pipeline can be provided with a regulating valve, and different adsorption force can be set according to different flat plates.
In the flat film thickness detection device provided by the embodiment, the non-contact thickness measurement device 7 is a laser thickness meter, and the laser thickness measurement has high precision and quick response time.
In the flat film thickness detection device provided by the embodiment, the detection platform 1 and the supporting beam 5 are made of 00-level marble, the flatness error is within 0.003mm, and the accuracy of film thickness detection is ensured.
As shown in fig. 1 and 2, in the flat film thickness detection device provided in this embodiment, the first linear movement device 4 and the second linear movement device 6 are both linear modules, and the repeated positioning accuracy reaches ±0.002mm, and the positioning accuracy is high, and the accurate positioning speed is fast. In addition, as an alternative embodiment, the first linear motion device 4 and the second linear motion device 6 may be other moving elements, for example, a screw drive, or an electric steel drive.
As shown in fig. 1, the flat film thickness detection device provided in this embodiment further includes a non-contact ranging device 12, where the non-contact ranging device 12 has four groups and is respectively disposed on four sides of the non-contact thickness measurement device 7. The non-contact distance measuring device 12 can be a laser distance measuring device, and the laser distance measuring device has high precision and high speed. When the first linear moving device 4 or the second linear moving device 6 moves to exceed the boundary range of the product 3 to be detected, the non-contact distance measuring device 12 is separated from the product, the measured distance is increased, then the first linear moving device 4 or the second linear moving device 6 changes the direction, the non-contact thickness measuring device 7 is prevented from detecting outside the product, products with different specifications and sizes are adapted, moving parameters are not required to be adjusted according to different products, the degree of automation is high, and the detection efficiency is further improved.
The detection process of the flat film thickness detection device comprises the following steps: the product 3 to be detected is placed on the detection platform 1, a switching valve on a corresponding connecting pipeline is opened, vacuum adsorption is carried out, the product 3 to be detected is fixed on the detection platform 1, then the first linear moving device 4 and the second linear moving device 6 work, the non-contact thickness measuring device 7 is driven to move, and film thickness detection at different points is carried out.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. And obvious variations or modifications thereof are contemplated as falling within the scope of the present utility model.

Claims (10)

1. A flat film thickness detection device is characterized by comprising:
the detection platform (1) is provided with an adsorption hole (2) for adsorbing and fixing a product (3) to be detected which is placed on the detection platform (1);
the first linear moving device (4) is provided with two groups and is arranged on two sides of the top surface of the detection platform (1) in parallel;
the supporting cross beam (5) is erected on the sliding blocks of the two groups of the first linear moving devices (4);
the second linear moving device (6) is arranged on the supporting cross beam (5);
and the non-contact thickness measuring device (7) is arranged on the sliding block of the second linear moving device (6), and the non-contact thickness measuring device (7) points to the detection platform (1).
2. The flat sheet film thickness detection apparatus according to claim 1, further comprising:
the detection platform (1) is arranged on the top surface of the frame (8);
the door plate (9) is arranged on the outer side of the frame (8) in a surrounding mode to form a cavity (10).
3. The flat film thickness detection apparatus according to claim 2, wherein the door plate (9) is magnetically connected to the frame (8).
4. The flat film thickness detection device according to claim 2, wherein a vibration-proof pad (11) is provided between the frame (8) and the detection platform (1).
5. The flat film thickness detection apparatus according to claim 2, wherein the adsorption holes (2) have a plurality of groups, the adsorption holes (2) are connected to an external vacuum source through a connection pipe provided in the cavity (10).
6. The apparatus according to claim 5, wherein the connection pipe is provided with an on-off valve.
7. The flat film thickness detection apparatus according to claim 1, wherein the noncontact thickness measuring device (7) is a laser thickness meter.
8. The flat film thickness detection apparatus according to claim 1, wherein the detection platform (1) and the support beam (5) are of class 00 marble material.
9. The flat film thickness detection apparatus according to claim 1, wherein the first linear motion device (4) and the second linear motion device (6) are each a linear module.
10. The flat sheet film thickness detection apparatus according to any one of claims 1 to 9, further comprising:
and the non-contact distance measuring device (12) is provided with four groups and is respectively arranged on four sides of the non-contact thickness measuring device (7).
CN202320173094.7U 2023-01-16 2023-01-16 Flat plate film thickness detection device Active CN219284221U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320173094.7U CN219284221U (en) 2023-01-16 2023-01-16 Flat plate film thickness detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320173094.7U CN219284221U (en) 2023-01-16 2023-01-16 Flat plate film thickness detection device

Publications (1)

Publication Number Publication Date
CN219284221U true CN219284221U (en) 2023-06-30

Family

ID=86912525

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320173094.7U Active CN219284221U (en) 2023-01-16 2023-01-16 Flat plate film thickness detection device

Country Status (1)

Country Link
CN (1) CN219284221U (en)

Similar Documents

Publication Publication Date Title
CN214503706U (en) Chip performance detection probe platform
CN103389052A (en) Vertical shape measuring device capable of compensating shaft system errors of wafer
CN207043581U (en) Positioner
CN204221197U (en) A kind of metal mask plate cutting equipment
CN108375582A (en) Automated optical detection equipment
CN106166712A (en) On-line grinding and detection integral system
CN104289816A (en) Metal mask plate cutting equipment
CN107702897A (en) The optical characteristics automatic measurement board of flat-panel monitor under high and low temperature environment
CN203298725U (en) Silicon rod geometric dimension measuring instrument
CN219284221U (en) Flat plate film thickness detection device
CN113649966B (en) Product positioning device
CN111077216A (en) Magnetic particle testing device for steel structure omnibearing detection
CN104289817A (en) Metal mask plate cutting equipment
CN204115748U (en) Probe apparatus for automatically lifting
CN212083498U (en) Wafer test bench
CN107214530B (en) Ultra-precise air floatation positioning platform
CN108871752A (en) The detection device and its detection method of door of railway vehicle rodless cylinder
CN110449379B (en) Online voice coil motor testing machine
CN203375951U (en) A vertical wafer shape measuring apparatus capable of compensating shaft system errors
CN112730448A (en) Graphite-attached black adhesive steel sheet edge glue overflow detection system
CN207255698U (en) A kind of ultraprecise air supporting locating platform
CN216115831U (en) High-precision measurement auxiliary device for mechanical design
CN218156729U (en) Inner hole defect automatic measuring device
CN220339315U (en) Wafer thickness detection device
CN220051763U (en) Maintenance and detection workbench convenient for fixing instruments and meters

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant