CN203298725U - Silicon rod geometric dimension measuring instrument - Google Patents
Silicon rod geometric dimension measuring instrument Download PDFInfo
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- CN203298725U CN203298725U CN2013203672590U CN201320367259U CN203298725U CN 203298725 U CN203298725 U CN 203298725U CN 2013203672590 U CN2013203672590 U CN 2013203672590U CN 201320367259 U CN201320367259 U CN 201320367259U CN 203298725 U CN203298725 U CN 203298725U
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Abstract
The utility model relates to a silicon rod geometric dimension measuring instrument, which comprises a fixed framework, a calibration block calibrating device fixed on the fixed framework, a vertically-arranged optocoupler, a silicon rod protective plate lifting device, a detection platform lifting device, a workbench adjusting device, an industrial control computer, a switch box, an air switch, a display device, a silicon rod protective plate assembly, a detection platform assembly comprising a measurement camera and a workbench assembly used for placing the silicon rod, wherein the silicon rod protective plate assembly and the detection platform assembly can perform reciprocating motion under the driving of respective lifting device in a direction of gravity; and the silicon rod can perform transverse, longitudinal and circumferential rotary motion under the driving of the workbench adjusting device. The silicon rod geometric dimension measuring instrument has the advantages that: a method of machine vision is utilized for one-time measurement of the contour dimension and surface defects of the silicon rod, the silicon rod geometric dimension measuring instrument has the advantages of high precision, high efficiency and good repeatability without any potential damage to the silicon rod surface; and the silicon rod geometric dimension measuring instrument realizes the moving of the platforms driven by a motor with low rated power through the design of a pulley block, thereby being more economical.
Description
Technical field
The utility model relates to a kind of precise detection device of silicon rod physical dimension, especially relates to a kind of silicon rod physical dimension measuring instrument.
Background technology
Along with the expanding day in international photovoltaic market, find a kind of not only precisely but also efficiently non-contact measurement method become more and more important.At first, many traditional measuring methods can't be taken into account precision and efficiency, and often along with the rising of precision, efficiency linearly descends.Secondly, in order to realize full-scale measurement, usually measured object is fixed on a precision rotation platform or translation stage, measurement mechanism is measured the local configuration size of testee at every turn, finally various piece is stitched together.But large-scale precision universal stage or translation stage are expensive, and order lacks place and the condition of installing in many application scenarioss.Moreover, the traditional measurement system is in order to improve precision, often adopt the devices such as probe and testee directly to come in contact the acquisition overall size, this is restricted with regard to the application that makes measuring system, although the contact while measuring on the one hand between probe and measured object is very little, but when measuring the article of quality softness, still may produce measuring error, the radius of tips of probes also can not be zero, therefore can't measure the fine feature of some complex surface.Contact type measurement brings damage may for the measured object surface, and last, many traditional measuring systems are helpless to the measurement of measured object surface imperfection.
The utility model content
The utility model be mainly solve that prior art is existing can't be in the situation that harmless, to the technical matters of physical dimension, angle and the disposable measurement of surface imperfection of measured object; Provide a kind of can be to silicon rod physical dimension and the disposable measurement of surface imperfection, and manually compare, precision is higher, efficiency is faster, and is reproducible, for the silicon rod surface also without any latent lesion; And can realize with the more movement of the stepper motor driving platform of small rated power, more cost effective a kind of silicon rod physical dimension measuring instrument.
Above-mentioned technical matters of the present utility model is mainly solved by following technical proposals:
A kind of silicon rod physical dimension measuring instrument, is characterized in that, comprises fixed frame; Be fixed on calibrating block calibrating installation on fixed frame, perpendicular dress optocoupler, silicon rod fender jacking gear, detection platform jacking gear, worktable adjusting gear, the industrial computer be used to controlling whole silicon rod physical dimension measuring instrument, switch enclosure, the air switch with the industrial computer electrical connection, the display device that is connected with industrial computer, silicon rod fender assembly, detection platform assembly and be used to placing the table assembly of tested silicon rod; Described silicon rod fender assembly is driven by silicon rod fender jacking gear and can be reciprocating at vertical direction; Described detection platform assembly is driven by the detection platform jacking gear and can be reciprocating at vertical direction; Silicon rod can drive the lower motion horizontal, vertical and that rotate in a circumferential direction of doing by table assembly.
At above-mentioned a kind of silicon rod physical dimension measuring instrument, described detection platform assembly comprises a detection platform and at least eight of being arranged on detection platform circumferentially arrange the detection camera assembly that eight surfaces of silicon rod are measured; Described detection platform jacking gear comprises two detection platform pulleys that are arranged on detection platform, the elevating screw nut that is fixed on detection platform and the elevating screw that coordinates with the elevating screw nut, two pulley blockss that coordinate with two detection platform pulleys, detection platform balancing weight and the plastics drag chain that is fixed together with detection platform; Each pulley blocks comprises and is fixed on support bracket fastened three pulleys and a single-sheaved block and is fixed on the detection platform balancing weight pulley on the detection platform balancing weight; Described detection platform pulley and corresponding pulley blocks are contacted by a flexible steel wire; Described elevating screw is driven by motor.
At above-mentioned a kind of silicon rod physical dimension measuring instrument, described table assembly comprise the worktable vertical rod, be used to place tested silicon rod and stand on silicon rod mounting table in the worktable vertical rod, be fixed on vertical adjustment platform in the worktable vertical rod, be arranged on vertical adjustment platform below and with the fixing horizontal adjustment platform of vertical adjustment platform, be arranged on horizontal adjustment platform below and adjust platform with the fixing rotation of horizontal adjustment platform; Rotation is adjusted platform and is fixed on fixed frame by the worktable support frame.
At above-mentioned a kind of silicon rod physical dimension measuring instrument, described silicon rod fender assembly comprises a silicon rod fender, is arranged on the guide rail on the silicon rod fender and with guide rail, coordinates the silicon rod mobile platform that can move forward and backward, and described silicon rod fender jacking gear comprises the first fixed frame pulley, fender counterweight pulley, the first fender pulley, the second fender pulley, the second fixed frame pulley, the 3rd fixed frame pulley, the 3rd fender pulley, the 4th fender pulley, the 4th fixed frame pulley and fixed frame single-sheaved block; Described the first fixed frame pulley, the second fixed frame pulley, the 3rd fixed frame pulley and the 4th fixed frame pulley all are fixed on fixed frame, and described the first fender pulley, the second fender pulley, the 3rd fender pulley, the 4th fender pulley all are fixed on fender; Described fender counterweight pulley is fixed on the fender balancing weight; Article one, wire rope is through the first fixed frame pulley, fender counterweight pulley, the first fender pulley, the second fender pulley, the second fixed frame pulley, the 3rd fixed frame pulley, the 3rd fender pulley, the 4th fender pulley, the 4th fixed frame pulley and be connected with electric pushrod; Another wire rope is connected with the 4th fixed frame pulley after fixed frame single-sheaved block, the first fender pulley, the second fender pulley, the second fixed frame pulley, the 3rd fixed frame pulley, the 3rd fender pulley, the 4th fender pulley.
At above-mentioned a kind of silicon rod physical dimension measuring instrument, described detection camera assembly comprises that measuring camera, distance measuring sensor, strip source, one vertically moves platform and a transverse shifting platform;
Described vertically move platform comprise a vertical platform, vertically screw mandrel, the vertical motor that drives vertical screw mandrel, the vertical screw mandrel bearing that coordinates with vertical screw mandrel, for sensitization web joint, the line slide rail of fixing strip source, be arranged on the linear slider in line slide rail; Described vertical platform and linear slider are fixed;
The shaft coupling that described transverse shifting platform comprises a horizontal platform, cross motor, connect with cross motor, the cross lead screw that connects with the shaft coupling output terminal, the cross lead screw bearing that coordinates with cross lead screw and with the fixing screw mandrel shaft block of cross lead screw bearing; Described line slide rail is fixed on screw mandrel shaft block; Described cross lead screw is fixed on detection platform by the screw mandrel support;
A kind of silicon rod physical dimension measuring instrument above-mentioned, also comprise two axle fixed blocks that are fixed on detection platform, on described axle fixed block, is fixed with the axle supporting seat; Two end and one of them axle fixed blocks that connect axle are fixed, and the other end is fixed with another axle fixed block after passing screw mandrel shaft block.
Therefore, the utlity model has following advantage: 1. can be to silicon rod physical dimension and the disposable measurement of surface imperfection, and manually compare, precision is higher, efficiency is faster, and is reproducible, for the silicon rod surface also without any latent lesion; 2. by the design of pulley blocks, also can realize with the more movement of the stepper motor driving platform of small rated power, more economically.
The accompanying drawing explanation
Fig. 1 is a kind of perspective view of the present utility model.
Fig. 2 is the structural representation of detection platform in the utility model.
Fig. 3 is silicon rod fender assembly structural representation in the utility model.
Fig. 4 is Working table structure schematic diagram in the utility model.
Fig. 5 is camera calibration schematic diagram in the utility model.
Fig. 6 is the local enlarged diagram of detection camera assembly in the utility model.
Embodiment
Below by embodiment, and by reference to the accompanying drawings, the technical solution of the utility model is described in further detail.in figure, fixed frame 1, calibrating block calibrating installation 2, perpendicular dress optocoupler 3, worktable adjusting gear 4, industrial computer 5, switch enclosure 6, air switch 7, display device 8, detection platform 9, silicon rod 10, detection platform pulley 11, elevating screw nut 12, elevating screw 13, detection platform balancing weight 14, plastics drag chain 15, detection platform balancing weight pulley 16, worktable vertical rod 17, silicon rod mounting table 18, vertically adjust platform 19, laterally adjust platform 20, platform 21 is adjusted in rotation, worktable support frame 22, silicon rod fender 23, silicon rod mobile platform 24, the first fixed frame pulley 25, fender counterweight pulley 26, the first fender pulley 27, the second fender pulley 28, the second fixed frame pulley 29, the 3rd fixed frame pulley 30, the 3rd fender pulley 31, the 4th fender pulley 32, the 4th fixed frame pulley 33, measure camera 34, distance measuring sensor 35, strip source 36, vertical motor 38, vertical screw mandrel bearing 39, sensitization web joint 40, line slide rail 41, linear slider 42, cross motor 43, shaft coupling 44, cross lead screw 45, cross lead screw bearing 46, screw mandrel shaft block 47, screw mandrel support 48, axle fixed block 49, connect axle 50, fender balancing weight 51, electric pushrod 52, fixed frame single-sheaved block 53, block 54, single-sheaved block 55, guide pillar 56, axle supporting seat 57, vertical platform 58, horizontal platform 59.
Embodiment:
As shown in Figure 1, the utility model comprises fixed frame 1; Be fixed on calibrating block calibrating installation 2 on fixed frame 1, perpendicular dress optocoupler 3, silicon rod fender jacking gear, detection platform jacking gear, worktable adjusting gear 4, the industrial computer 5 be used to controlling whole silicon rod physical dimension measuring instrument, switch enclosure 6, the air switch 7 with industrial computer 5 electrical connections, the display device 8 that is connected with industrial computer 5, silicon rod fender assembly, detection platform assembly and be used to placing the table assembly of tested silicon rod; Silicon rod fender assembly is driven by silicon rod fender jacking gear and can be reciprocating at vertical direction; The detection platform assembly is driven by the detection platform jacking gear and can be reciprocating at vertical direction; Silicon rod can drive the lower motion horizontal, vertical and that rotate in a circumferential direction of doing by table assembly.Wherein, at fixed frame 1 Si Ge angle, top, be designed with four hangers, facilitate lifting and the movement of whole silicon rod physical dimension optical detector, angle, four of 1 bottoms of fixed frame is designed with four and adjusts pin, final stage in lifting can play buffer action, instrument is when working stage, and adjusting pin also can increase the stability of instrument, noise reduction.Calibrating block calibrating installation 2 be in silicon rod 10 directly over, eight side faces at calibrating block calibrating installation 2 have respectively two crosses to demarcate, the incipient stage of measuring, detection platform 9 rises to calibrating block calibrating installation 2 and flushes along the axis of silicon rod 10, eight camera lens on detection platform 9 are demarcated and are aimed at cross, and the assurance camera is measured the same cross section of silicon rod 10.Whether perpendicular dress optocoupler 3 monitoring calibrating block calibrating installations 2 and silicon rod 10 are in working position; industrial computer 5 is control centers of instrument; control whole the operation of a machine; air switch 7 its overload protective functions; switch enclosure 6 is unlatching and the parking of control machine; in emergency circumstances press switch enclosure 6 emergency off push-button topmost, Accident prevention occurs.Display device 8 shows every geometric parameter and each surface condition of silicon rod 10 in real time, facilitates the workman to detect.
As shown in Figure 2 and Figure 6, the detection platform assembly comprises a detection platform 9 and eight of being arranged on detection platform 9 circumferentially arrange the detection camera assembly that eight surfaces of silicon rod 10 are measured; The detection platform jacking gear comprises two detection platform pulleys 11 that are arranged on detection platform 9, the elevating screw nut 12 that is fixed on detection platform 9 and the elevating screw 13 that coordinates with elevating screw nut 12, two pulley blockss that coordinate with two detection platform pulleys 11, detection platform balancing weight 14 and the plastics drag chain 15 that is fixed together with detection platform 9; Design by pulley blocks can help elevating screw 13 to realize the rise and fall of detection platform 9, reduces the load of servomotor in jacking system; The specific design of pulley blocks is: each pulley blocks comprises three pulleys and a single-sheaved block 55 that is fixed on fixed support 1 and is fixed on the detection platform balancing weight pulley 16 on detection platform balancing weight 14; Detection platform pulley 11 and corresponding pulley blocks are contacted by a flexible steel wire; Elevating screw 13 is driven by motor.In detection platform 9 lifting process; the design of pulley blocks make detection platform balancing weight 14 can balance the weight of detection platform 9, reduce load, simultaneously; the plastics drag chain 15 that is fixed together with detection platform 9 can play traction and the effect of protecting, and prevents unexpected the generation.
As shown in Figure 3, silicon rod fender assembly comprises a silicon rod fender 23, is arranged on the guide rail on silicon rod fender 23 and with guide rail, coordinates the silicon rod mobile platform 24 that can move forward and backward; Described silicon rod fender jacking gear comprises the first fixed frame pulley 25, fender counterweight pulley 26, the first fender pulley 27, the second fender pulley 28, the second fixed frame pulley 29, the 3rd fixed frame pulley 30, the 3rd fender pulley 31, the 4th fender pulley 32, the 4th fixed frame pulley 33 and fixed frame single-sheaved block 53; Described fixed frame single-sheaved block 53, the first fixed frame pulley 25, the second fixed frame pulley 29, the 3rd fixed frame pulley 30 and the 4th fixed frame pulley 33 all are fixed on fixed frame, and described the first fender pulley 27, the second fender pulley 28, the 3rd fender pulley 31, the 4th fender pulley 32 all are fixed on fender; Described fender counterweight pulley 26 is fixed on fender balancing weight 51; Article one, wire rope is connected with electric pushrod 52 through the first fixed frame pulley 25, fender counterweight pulley 26, the first fender pulley 27, the second fender pulley 28, the second fixed frame pulley 29, the 3rd fixed frame pulley 30, the 3rd fender pulley 31, the 4th fender pulley 32, the 4th fixed frame pulley 33; Another wire rope is connected with the 4th fixed frame pulley 33 after fixed frame single-sheaved block 53, the first fender pulley 27, the second fender pulley 28, the second fixed frame pulley 29, the 3rd fixed frame pulley 30, the 3rd fender pulley 31, the 4th fender pulley 32.
Measure while starting, silicon rod 10 is placed on silicon rod mobile platform 24, along the direction away from block 54, move to measuring position; then silicon rod fender 23 drops to position shown in Figure 3; silicon rod 10 drops in the worktable vertical rod 17 in Fig. 4, adjusts the attitude of silicon rod 10, measures.
As shown in Figure 4, table assembly comprise worktable vertical rod 17, be used to place tested silicon rod and stand on silicon rod mounting table 18 in worktable vertical rod 17, be fixed on vertical adjustment platform 19 in worktable vertical rod 17, be arranged on vertical adjustment platform 19 belows and with the fixing horizontal adjustment platform 20 of vertical adjustment platform 19, be arranged on horizontal adjustment platform 20 belows and adjust platform 21 with the fixing rotation of horizontal adjustment platform 20; Rotation is adjusted platform 21 and is fixed on fixed frame 1 by worktable support frame 22.
Vertically adjust platform 19, platform 21 is adjusted in rotation, laterally adjusts platform 20 and from three aspects, adjusts the attitude of silicon rod 10, is alignd with the calibrating block calibrating installation in Fig. 1 in eight planes of silicon rod 10, is convenient to measure.The movement of three adjustment platforms is all to rely on motor that power is provided.Whole worktable is fixed on the fixed frame 1 in Fig. 1 by worktable support frame 22, guarantees machine run stability.
Vertically adjustment platform 19 and the horizontal platform 20 of adjusting are all assembled by screw pair, drive motor and transmission gear, and rotation adjustment platform 21 comprises a rotation platform, and rotation platform is driven by motor and driving gear set.
As shown in Figure 5, the detection camera assembly comprise measure camera 34, distance measuring sensor 35, strip source 36, one vertically move platform and a transverse shifting platform; Vertically move platform comprise a vertical platform 58, vertically screw mandrel, drive vertical screw mandrel vertical motor 38, with drive vertical screw mandrel bearing 39 that vertical screw mandrel coordinates, for sensitization web joint 40, the line slide rail 41 of fixing strip source 36, be arranged on the interior linear slider 42 of line slide rail 41; Described vertical platform 58 is fixing with linear slider 42; The shaft coupling 44 that the transverse shifting platform comprises a horizontal platform 59, cross motor 43, connect with cross motor 43, the cross lead screw 45 that connects with shaft coupling 44 output terminals, the cross lead screw bearing 46 that coordinates with cross lead screw 45 and with the fixing screw mandrel shaft block 47 of cross lead screw bearing 46; Described line slide rail 41 is fixed on screw mandrel shaft block 47; Described cross lead screw 45 is fixed on detection platform 9 by screw mandrel support 48.
In addition, two axle fixed blocks 49 are fixed on detection platform 9, on axle fixed block 49, are fixed with axle supporting seat 57; Two end and one of them axle fixed blocks 49 that connect axles 50 are fixing, and the other end passes screw mandrel shaft block 47 afterwards and another axle fixed block 49 is fixed.
In order to guarantee measuring accuracy, the cross motor of measuring two groups of relative cameras of silicon rod chord length is fixed on a fixed head, vertically motor also is fixed on a plate, horizontal and vertical when mobile at camera like this, guarantee that each camera lens is at same plane, also increase simultaneously the stability while moving.
Specific embodiment described herein is only to the explanation for example of the utility model spirit.The utility model person of ordinary skill in the field can make various modifications or supplements or adopt similar mode to substitute described specific embodiment, but can't depart from spirit of the present utility model or surmount the defined scope of appended claims.
although this paper has more used fixed frame 1, calibrating block calibrating installation 2, perpendicular dress optocoupler 3, worktable adjusting gear 4, industrial computer 5, switch enclosure 6, air switch 7, display device 8, detection platform 9, silicon rod 10, detection platform pulley 11, elevating screw nut 12, elevating screw 13, detection platform balancing weight 14, plastics drag chain 15, detection platform balancing weight pulley 16, worktable vertical rod 17, silicon rod mounting table 18, vertically adjust platform 19, laterally adjust platform 20, platform 21 is adjusted in rotation, worktable support frame 22, silicon rod fender 23, silicon rod mobile platform 24, the first fixed frame pulley 25, fender counterweight pulley 26, the first fender pulley 27, the second fender pulley 28, the second fixed frame pulley 29, the 3rd fixed frame pulley 30, the 3rd fender pulley 31, the 4th fender pulley 32, the 4th fixed frame pulley 33, measure camera 34, distance measuring sensor 35, strip source 36, vertical motor 38, vertical screw mandrel bearing 39, sensitization web joint 40, line slide rail 41, linear slider 42, cross motor 43, shaft coupling 44, cross lead screw 45, cross lead screw bearing 46, screw mandrel shaft block 47, screw mandrel support 48, axle fixed block 49, connect axle 50, fender balancing weight 51, electric pushrod 52, fixed frame single-sheaved block 53, block 54, single-sheaved block 55, guide pillar 56, axle supporting seat 57, vertical platform 58, horizontal platform 59 terms such as grade, but do not get rid of the possibility of using other term.Using these terms is only in order to describe more easily and explain essence of the present utility model; They are construed to any additional restriction is all contrary with the utility model spirit.
Claims (6)
1. a silicon rod physical dimension measuring instrument, is characterized in that, comprises fixed frame (1), be fixed on the calibrating block calibrating installation (2) on fixed frame (1), perpendicular dress optocoupler (3), silicon rod fender jacking gear, the detection platform jacking gear, worktable adjusting gear (4), for controlling the industrial computer (5) of whole silicon rod physical dimension measuring instrument, switch enclosure (6), the air switch (7) that is electrically connected to industrial computer (5), the display device (8) that is connected with industrial computer (5), silicon rod fender assembly, detection platform assembly and be used to placing the table assembly of tested silicon rod, described silicon rod fender assembly is driven by silicon rod fender jacking gear and can be reciprocating at vertical direction, described detection platform assembly is driven by the detection platform jacking gear and can be reciprocating at vertical direction, silicon rod can drive the lower motion horizontal, vertical and that rotate in a circumferential direction of doing by table assembly.
2. a kind of silicon rod physical dimension measuring instrument according to claim 1, it is characterized in that, described detection platform assembly comprises a detection platform (9) and at least eight of being arranged on detection platform (9) circumferentially arrange the detection camera assembly that eight surfaces of silicon rod (10) are measured; Described detection platform jacking gear comprises two the detection platform pulleys (11) that are arranged on detection platform (9), the elevating screw nut (12) that is fixed on detection platform (9) and the elevating screw (13) that coordinates with elevating screw nut (12), two pulley blockss that coordinate with two detection platform pulleys (11), detection platform balancing weight (14) and the plastics drag chain (15) that is fixed together with detection platform (9); Each pulley blocks comprises three pulleys and a single-sheaved block (55) that is fixed on fixed support (1) and is fixed on the detection platform balancing weight pulley (16) on detection platform balancing weight (14); Described detection platform pulley (11) and corresponding pulley blocks are contacted by a flexible steel wire; Described elevating screw (13) is driven by motor.
3. a kind of silicon rod physical dimension measuring instrument according to claim 2, it is characterized in that, described table assembly comprises worktable vertical rod (17), for placing tested silicon rod and standing on the silicon rod mounting table (18) in worktable vertical rod (17), be fixed on the vertical adjustment platform (19) in worktable vertical rod (17), the horizontal adjustment platform (20) that is arranged on vertical adjustment platform (19) below and fixes with vertical adjustment platform (19), be arranged on horizontal adjustment platform (20) below and adjust platform (21) with the rotation that horizontal adjustment platform (20) is fixed, rotation is adjusted platform (21) and is fixed on fixed frame (1) by worktable support frame (22).
4. a kind of silicon rod physical dimension measuring instrument according to claim 3, it is characterized in that, described silicon rod fender assembly comprises a silicon rod fender (23), be arranged on the guide rail on silicon rod fender (23) and with guide rail, coordinate the silicon rod mobile platform (24) that can move forward and backward, described silicon rod fender jacking gear comprises the first fixed frame pulley (25), fender counterweight pulley (26), the first fender pulley (27), the second fender pulley (28), the second fixed frame pulley (29), the 3rd fixed frame pulley (30), the 3rd fender pulley (31), the 4th fender pulley (32), the 4th fixed frame pulley (33) and fixed frame single-sheaved block (53), described fixed frame single-sheaved block (53), the first fixed frame pulley (25), the second fixed frame pulley (29), the 3rd fixed frame pulley (30) and the 4th fixed frame pulley (33) all are fixed on fixed frame, and described the first fender pulley (27), the second fender pulley (28), the 3rd fender pulley (31), the 4th fender pulley (32) all are fixed on fender, described fender counterweight pulley (26) is fixed on fender balancing weight (51), article one, wire rope is connected with electric pushrod (52) through the first fixed frame pulley (25), fender counterweight pulley (26), the first fender pulley (27), the second fender pulley (28), the second fixed frame pulley (29), the 3rd fixed frame pulley (30), the 3rd fender pulley (31), the 4th fender pulley (32), the 4th fixed frame pulley (33), another wire rope is connected with the 4th fixed frame pulley (33) after fixed frame single-sheaved block (53), the first fender pulley (27), the second fender pulley (28), the second fixed frame pulley (29), the 3rd fixed frame pulley (30), the 3rd fender pulley (31), the 4th fender pulley (32).
5. a kind of silicon rod physical dimension measuring instrument according to claim 4, it is characterized in that, described detection camera assembly comprises that measuring camera (34), distance measuring sensor (35), strip source (36), one vertically moves platform and a transverse shifting platform;
Described vertically move platform comprise a vertical platform (58), vertically screw mandrel, the vertical motor (38) that drives vertical screw mandrel, the vertical screw mandrel bearing (39) that coordinates with vertical screw mandrel, for sensitization web joint (40), the line slide rail (41) of fixing strip source (36), be arranged on the interior linear slider (42) of line slide rail (41); Described vertical platform and linear slider (42) are fixing;
6. a kind of silicon rod physical dimension measuring instrument according to claim 5, is characterized in that, also comprises two the axle fixed blocks (49) that are fixed on detection platform (9), on described axle fixed block (49), is fixed with axle supporting seat (57); Two end and one of them axle fixed blocks (49) that connect axles (50) are fixing, and the other end passes screw mandrel shaft block (47) afterwards and another axle fixed block (49) is fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203672590U CN203298725U (en) | 2013-06-25 | 2013-06-25 | Silicon rod geometric dimension measuring instrument |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203672590U CN203298725U (en) | 2013-06-25 | 2013-06-25 | Silicon rod geometric dimension measuring instrument |
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| CN203298725U true CN203298725U (en) | 2013-11-20 |
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| CN2013203672590U Expired - Fee Related CN203298725U (en) | 2013-06-25 | 2013-06-25 | Silicon rod geometric dimension measuring instrument |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103292702A (en) * | 2013-06-25 | 2013-09-11 | 湖北工业大学 | Geometric dimension measuring instrument of silicon rod |
| CN103913417A (en) * | 2014-03-20 | 2014-07-09 | 浙江晶盛机电股份有限公司 | Crystal orientation detection device of single crystal silicon rod and crystal orientation detection method thereof |
| CN104236465A (en) * | 2014-09-15 | 2014-12-24 | 成都嘉陵华西光学精密机械有限公司 | Machine for detecting tightening degree and center height of screw |
| CN105269815A (en) * | 2014-07-25 | 2016-01-27 | 瑞安市麦田网络科技有限公司 | 3d printer |
| CN106501259A (en) * | 2016-11-17 | 2017-03-15 | 苏州襄行智能科技有限公司 | A kind of steel wire automatic measurement testing equipment |
| CN110779919A (en) * | 2019-10-21 | 2020-02-11 | 大同新成新材料股份有限公司 | Intelligent detection equipment is used in production of chip silicon of convenient dismantlement |
-
2013
- 2013-06-25 CN CN2013203672590U patent/CN203298725U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103292702A (en) * | 2013-06-25 | 2013-09-11 | 湖北工业大学 | Geometric dimension measuring instrument of silicon rod |
| CN103292702B (en) * | 2013-06-25 | 2015-12-09 | 湖北工业大学 | A kind of silicon rod physical dimension measuring instrument |
| CN103913417A (en) * | 2014-03-20 | 2014-07-09 | 浙江晶盛机电股份有限公司 | Crystal orientation detection device of single crystal silicon rod and crystal orientation detection method thereof |
| CN103913417B (en) * | 2014-03-20 | 2016-08-03 | 浙江晶盛机电股份有限公司 | A kind of silicon single crystal rod crystal orientation detection device and crystal orientation detection method thereof |
| CN105269815A (en) * | 2014-07-25 | 2016-01-27 | 瑞安市麦田网络科技有限公司 | 3d printer |
| CN105269815B (en) * | 2014-07-25 | 2018-11-02 | 瑞安市麦田网络科技有限公司 | 3d printer |
| CN104236465A (en) * | 2014-09-15 | 2014-12-24 | 成都嘉陵华西光学精密机械有限公司 | Machine for detecting tightening degree and center height of screw |
| CN106501259A (en) * | 2016-11-17 | 2017-03-15 | 苏州襄行智能科技有限公司 | A kind of steel wire automatic measurement testing equipment |
| CN110779919A (en) * | 2019-10-21 | 2020-02-11 | 大同新成新材料股份有限公司 | Intelligent detection equipment is used in production of chip silicon of convenient dismantlement |
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