CN103913417B - A kind of silicon single crystal rod crystal orientation detection device and crystal orientation detection method thereof - Google Patents
A kind of silicon single crystal rod crystal orientation detection device and crystal orientation detection method thereof Download PDFInfo
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Abstract
The present invention relates to field of crystal growth furnace, it is desirable to provide a kind of silicon single crystal rod crystal orientation detection device and crystal orientation detection method thereof.Detection device in this silicon single crystal rod crystal orientation is for detecting the crystal orientation of clamping circular single crystal silicon rod on butt workbench, including support, support arm, crystal orientation detection sensor stand, cylinder, fixing guard shield, lifting guard shield, crystal orientation detection sensor；The crystal orientation detection method of this silicon single crystal rod crystal orientation detection device includes step: operation cylinder, opens source of the gas, starts crystal orientation detection sensor and calculate circular single crystal silicon rod surface and send distance minima a little to laser, and this distance minima is the crystal orientation of crystal bar.The present invention can detect the crystal orientation of the crystal bar being clamped on workbench automatically, uses contactless measurement, accuracy of detection is high, response soon, the shortest, can automatically control；Simple in construction, old low, is not required to manually participate in, it is adaptable to the Automatic Control of silicon single crystal rod streamline job shop.
Description
Technical field
The present invention is about field of crystal growth furnace, particularly to a kind of silicon single crystal rod crystal orientation detection device and crystal orientation detection method thereof.
Background technology
In solar module production process, more and more applied because it has the high feature of photoelectric transformation efficiency as the raw material of solar module with monocrystal silicon.
When producing solar battery sheet, first have to cut into the silicon single crystal rod that monocrystal growing furnace grows the short pole of certain length, the square rod becoming corner to be circular arc through butt, grinding process post-treatment short pole the most again, last again by square rod cutting flakiness, these thin slices have just become solar battery sheet after subsequent treatment.During monocrystalline silicon round rod is processed into square rod, it is desirable to four crest lines of silicon single crystal rod are retained in four vertex positions of square rod, the purpose of do so is to ensure that the crystal orientation of crystal bar meets the technological requirement of cell piece.
In prior art, it is that crystal orientation typically judges by human eye on the table by viscous for crystal bar, excises the rim charge of non-crystal bar crest line position the most again, this judge that the detection method precision in crystal orientation is low, efficiency is low, and operator are required height by naked eyes.From now on, crystal bar processing will take continuous-flow type operation, crystal bar from blocking, butt, grinding, including the logistics between these operations etc., process all automatically completes, it is not necessary to manual intervention.At this moment, after crystal bar loads butting machine, how could automatically detect the crystal orientation of crystal bar thus judge that butt position becomes problem demanding prompt solution.
Summary of the invention
Present invention is primarily targeted at and overcome deficiency of the prior art, it is provided that the crystal orientation detection device in a kind of crystal orientation that can automatically detect the crystal bar being clamped on workbench and detection method thereof.For solving above-mentioned technical problem, the solution of the present invention is:
There is provided a kind of silicon single crystal rod crystal orientation detection device, for detecting the crystal orientation of clamping circular single crystal silicon rod on butt workbench, including support, support arm, crystal orientation detection sensor stand, cylinder, fixing guard shield, lifting guard shield, crystal orientation detection sensor；
Support arm is fixed on support, fixing guard shield is arranged on supporting walls, detection sensor in crystal orientation is arranged on fixing guard shield by crystal orientation detection sensor stand, detection sensor in crystal orientation is for by measuring the circular single crystal silicon rod surface distance to measurement zero point, and the crystal orientation carrying out circular single crystal silicon rod judges；
The middle part of fixing guard shield is provided with hole, cylinder one end is arranged on support arm, the other end is through the hole fixed in the middle part of guard shield, and be connected with lifting guard shield by the piston rod of cylinder, piston rod drives lifting guard shield to move up and down, to complete to lift the opening and closing of guard shield, when lifting guard shield is closed, crystal orientation can detect sensor wrap in lifting guard shield by moving down of lifting guard shield, lifting guard shield when opening, can make detection sensor in crystal orientation expose in lifting guard shield by the upper shifting of lifting guard shield.
As further improving, described cylinder is the double acting single piston rod cylinder with guide post.
As further improving, described crystal orientation detection sensor is laser range sensor.
As further improving, described silicon single crystal rod crystal orientation detection device is additionally provided with air jet pipe and air jet pipe bracing frame, and air jet pipe is fixed on cylinder by air jet pipe bracing frame；Air jet pipe connects source of the gas, and source of the gas, for being passed through compressed air in air jet pipe, the tube wall of air jet pipe has gas outlet, and alignment crystal orientation, gas outlet detection sensor, for clearing up the pollutant at crystal orientation detection sensor Laser emission mouth.
As further improving, the tube wall of described air jet pipe has 6 gas outlets.
As further improving, described source of the gas uses pressure to be the compressed air of 0.5MPa.
As further improving, described support arm is fixed with support by screw.
Crystal orientation detection method based on described a kind of silicon single crystal rod crystal orientation detection device is provided, specifically includes following step:
(1) circular single crystal silicon rod being loaded butt workbench, and make circular single crystal silicon rod start at the uniform velocity to rotate, the central axis of circular single crystal silicon rod is center of rotation；
(2) operation cylinder, makes the piston rod of cylinder stretch out, and drives lifting guard shield to rise, and exposes crystal orientation detection sensor；
(3) open source of the gas, make compressed air spray at the gas outlet of air jet pipe, blow the pollutant at crystal orientation detection sensor Laser emission mouth off；
(4) starting crystal orientation detection sensor, make crystal orientation detection sensor emission laser be irradiated to the surface of circular single crystal silicon rod, the surface that can measure circular single crystal silicon rod sends distance F a little to laser；Circular single crystal silicon rod rotates a circle around central axis, and the used time is T, is located in T time, and per interval Δ t measures once, then the n-th measured value is F(n Δ t), and wherein Δ t is for measuring time interval,
To recordAfter individual data carry out high-pass filtering, calculated minimum Fmin, if Fmin=F is (n0Δ t), then minima F (n0Δ t) meets formula:
F(n0Δt)-F[(n0-1) Δ t] ＜ 0, and F [(n0+1)Δt]-F(n0Δ t) ＞ 0
Wherein, n0Represent n-th0Individual measurement point, the measurement point that i.e. minima Fmin is corresponding；
Circular single crystal silicon rod surface sends distance minima Fmin a little to laser, it is also round the maximum at shape silicon single crystal rod surface distance circular single crystal silicon rod center, and the crystal orientation of circular single crystal silicon rod is macroscopically showing as four crest lines of crystal bar surface upper process, the position on circular single crystal silicon rod corresponding to the Fmin therefore recorded is the crystal orientation of crystal bar；
(5) operation cylinder, makes the piston rod of cylinder regain, and drives lifting guard shield to move down, and covers crystal orientation detection sensor.
Compared with prior art, the invention has the beneficial effects as follows:
Can automatically detect the crystal orientation of the crystal bar being clamped on workbench, use contactless measurement, accuracy of detection is high, response soon, the shortest, can automatically control；Simple in construction, old low, is not required to manually participate in, it is adaptable to the Automatic Control of silicon single crystal rod streamline job shop.
Accompanying drawing explanation
Fig. 1 is the three-dimensional shaft mapping of the present invention.
Fig. 2 is the air jet pipe schematic diagram of the present invention.
Fig. 3 is the work process schematic diagram of the present invention.
Reference in figure is: 1 support；2 fix guard shield；3 support arms；4 cylinders；5 lifting guard shields；6 air jet pipe bracing frames；7 air jet pipes；8 crystal orientation detection sensors；9 crystal orientation detection sensor stands；10 circular single crystal silicon rods.
Detailed description of the invention
With detailed description of the invention, the present invention is described in further detail below in conjunction with the accompanying drawings:
A kind of silicon single crystal rod crystal orientation detection device as shown in Figure 1, for detecting the crystal orientation of clamping circular single crystal silicon rod 10 on butt workbench, including support 1, support arm 3, crystal orientation detection sensor stand 9, cylinder 4, fixing guard shield 2, lifting guard shield 5, crystal orientation detection sensor 8, air jet pipe 7 and air jet pipe bracing frame 6.
Support arm 3 is fixed by screws on support 1, and fixing guard shield 2 is arranged on supporting walls 3, and crystal orientation detection sensor 8 is arranged on fixing guard shield 2 by crystal orientation detection sensor stand 9.Crystal orientation detection sensor 8 is for by measuring circular single crystal silicon rod 10 surface distance to measurement zero point, and the crystal orientation carrying out circular single crystal silicon rod 10 judges, the sensor 8 of crystal orientation detection here uses laser range sensor.
The middle part of fixing guard shield 2 is provided with hole, cylinder 4 one end is arranged on support arm 3, and the other end is through the hole fixed in the middle part of guard shield 2, and is connected with lifting guard shield 5 by the piston rod of cylinder 4, piston rod drives lifting guard shield 5 to move up and down, to complete to lift the opening and closing of guard shield 5.Lifting guard shield 5 is when closing, and crystal orientation can be detected sensor 8 is covered in lifting guard shield 5 by moving down of lifting guard shield 5；When lifting guard shield 5 is opened, detection sensor 8 in crystal orientation can be made to expose in lifting guard shield 5 by the upper shifting of lifting guard shield 5.Here cylinder 4 uses the double acting single piston rod cylinder with guide post.
Air jet pipe 7 is fixed on cylinder 4 by air jet pipe bracing frame 6, and air jet pipe 7 connects source of the gas, and source of the gas is for being passed through compressed air in air jet pipe 7, and source of the gas uses pressure to be the compressed air of 0.5MPa.As in figure 2 it is shown, have 6 gas outlets on the tube wall of air jet pipe 7, alignment crystal orientation, gas outlet detection sensor 8, for clearing up the pollutant at crystal orientation detection sensor 8 Laser emission mouth.
Crystal orientation detection method based on described a kind of silicon single crystal rod crystal orientation detection device, refers to shown in Fig. 3, specifically includes following step:
(1) circular single crystal silicon rod 10 loading butt workbench, and make circular single crystal silicon rod 10 start with certain angular velocity rotation, the central axis of circular single crystal silicon rod 10 is center of rotation；
(2) operation cylinder 4, makes the piston rod of cylinder 4 stretch out, and drives lifting guard shield 5 to rise, and exposes crystal orientation detection sensor 8；
(3) open source of the gas, make compressed air spray at the gas outlet of air jet pipe 7, blow the pollutant at crystal orientation detection sensor 8 Laser emission mouth off；
(4) starting crystal orientation detection sensor 8, make crystal orientation detection sensor 8 launch laser and be irradiated to the surface of circular single crystal silicon rod 10, the surface that can measure circular single crystal silicon rod 10 sends distance F a little to laser；Circular single crystal silicon rod 10 rotates a circle around central axis, and the used time is T, is located in T time, and per interval Δ t measures once, then the n-th measured value is F(n Δ t), and wherein Δ t is for measuring time interval,
To recordAfter individual data carry out high-pass filtering, calculated minimum Fmin, if Fmin=F is (n0Δ t), then minima F (n0Δ t) meets formula:
F(n0Δt)-F[(n0-1) Δ t] ＜ 0, and F [(n0+1)Δt]-F(n0Δ t) ＞ 0
Wherein, n0Represent n-th0Individual measurement point, the measurement point that i.e. minima Fmin is corresponding.
Circular single crystal silicon rod 10 surface sends distance minima Fmin a little to laser, it is also round the maximum at shape silicon single crystal rod 10 surface distance circular single crystal silicon rod 10 center, and the crystal orientation of circular single crystal silicon rod 10 is macroscopically showing as four crest lines of crystal bar surface upper process, the position on circular single crystal silicon rod 10 corresponding to the Fmin therefore recorded is the crystal orientation of crystal bar；
(5) operation cylinder 4, makes the piston rod of cylinder 4 regain, and drives lifting guard shield 5 to move down, and covers crystal orientation detection sensor 8, it is to avoid crystal orientation detection sensor 8 is contaminated.
It is only the specific embodiment of the present invention finally it should be noted that listed above.It is clear that the invention is not restricted to above example, it is also possible to there is many variations.All deformation that those of ordinary skill in the art can directly derive from present disclosure or associate, are all considered as protection scope of the present invention.
Claims (7)
1. a silicon single crystal rod crystal orientation detection device, for detecting the crystal orientation of clamping circular single crystal silicon rod on butt workbench, it is characterized in that, including support, support arm, crystal orientation detection sensor stand, cylinder, fixing guard shield, lifting guard shield, crystal orientation detection sensor；
Support arm is fixed on support, fixing guard shield is arranged on supporting walls, detection sensor in crystal orientation is arranged on fixing guard shield by crystal orientation detection sensor stand, detection sensor in crystal orientation is for by measuring the circular single crystal silicon rod surface distance to measurement zero point, and the crystal orientation carrying out circular single crystal silicon rod judges；
The middle part of fixing guard shield is provided with hole, cylinder one end is arranged on support arm, the other end is through the hole fixed in the middle part of guard shield, and be connected with lifting guard shield by the piston rod of cylinder, piston rod drives lifting guard shield to move up and down, to complete to lift the opening and closing of guard shield, when lifting guard shield is closed, crystal orientation can detect sensor wrap in lifting guard shield by moving down of lifting guard shield, lifting guard shield when opening, can make detection sensor in crystal orientation expose in lifting guard shield by the upper shifting of lifting guard shield；
Described cylinder is the double acting single piston rod cylinder with guide post.
A kind of silicon single crystal rod crystal orientation detection device the most according to claim 1, it is characterised in that described crystal orientation detection sensor is laser range sensor.
A kind of silicon single crystal rod crystal orientation detection device the most according to claim 2, it is characterised in that described silicon single crystal rod crystal orientation detection device is additionally provided with air jet pipe and air jet pipe bracing frame, and air jet pipe is fixed on cylinder by air jet pipe bracing frame；Air jet pipe connects source of the gas, and source of the gas, for being passed through compressed air in air jet pipe, the tube wall of air jet pipe has gas outlet, and alignment crystal orientation, gas outlet detection sensor, for clearing up the pollutant at crystal orientation detection sensor Laser emission mouth.
A kind of silicon single crystal rod crystal orientation detection device the most according to claim 3, it is characterised in that have 6 gas outlets on the tube wall of described air jet pipe.
A kind of silicon single crystal rod crystal orientation detection device the most according to claim 3, it is characterised in that described source of the gas uses pressure to be the compressed air of 0.5MPa.
6. detect device according to a kind of silicon single crystal rod crystal orientation described in claim 1 to 5 any one, it is characterised in that described support arm is fixed with support by screw.
7. detect the crystal orientation detection method of device based on a kind of silicon single crystal rod crystal orientation described in claim 3, it is characterised in that specifically include following step:
(1) circular single crystal silicon rod being loaded butt workbench, and make circular single crystal silicon rod start at the uniform velocity to rotate, the central axis of circular single crystal silicon rod is center of rotation；
(2) operation cylinder, makes the piston rod of cylinder stretch out, and drives lifting guard shield to rise, and exposes crystal orientation detection sensor；
(3) open source of the gas, make compressed air spray at the gas outlet of air jet pipe, blow the pollutant at crystal orientation detection sensor Laser emission mouth off；
(4) starting crystal orientation detection sensor, make crystal orientation detection sensor emission laser be irradiated to the surface of circular single crystal silicon rod, the surface that can measure circular single crystal silicon rod sends distance F a little to laser；Circular single crystal silicon rod rotates a circle around central axis, and the used time is T, is located in T time, per interval Δ t measure once, then the n-th measured value be F (n Δ t), wherein Δ t for measure time interval,
To recordAfter individual data carry out high-pass filtering, calculated minimum Fmin, if Fmin=F is (n0Δ t), then minima F (n0Δ t) meets formula:
F(n0Δt)-F[(n0-1) Δ t] ＜ 0, and F [(n0+1)Δt]-F(n0Δ t) ＞ 0
Wherein, n0Represent n-th0Individual measurement point, the measurement point that i.e. minima Fmin is corresponding；
Circular single crystal silicon rod surface sends distance minima Fmin a little to laser, it is also round the maximum at shape silicon single crystal rod surface distance circular single crystal silicon rod center, and the crystal orientation of circular single crystal silicon rod is macroscopically showing as four crest lines of crystal bar surface upper process, the position on circular single crystal silicon rod corresponding to the Fmin therefore recorded is the crystal orientation of crystal bar；
(5) operation cylinder, makes the piston rod of cylinder regain, and drives lifting guard shield to move down, and covers crystal orientation detection sensor.
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| CN106222745B (en) * | 2016-09-29 | 2019-04-19 | 宜昌南玻硅材料有限公司 | A kind of detection zone-melted silicon single crystal stick and its drawing method |
| CN110006839A (en) * | 2019-05-06 | 2019-07-12 | 西安奕斯伟硅片技术有限公司 | A kind of detection device and detection method |
| CN111618724A (en) * | 2020-04-16 | 2020-09-04 | 江苏京创先进电子科技有限公司 | Non-contact height measuring device for scribing machine |
| CN117352428A (en) * | 2023-10-09 | 2024-01-05 | 中环领先半导体材料有限公司 | Crystal orientation deviation detection method and system and silicon wafer processing method |
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| US6362487B1 (en) * | 1998-06-18 | 2002-03-26 | WACKER SILTRONIC GESELLSCHAFT FüR HALBLEITERMATERIALIEN AG | Method and device for nondestructive detection of crystal defects |
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| CN102791425A (en) * | 2011-01-28 | 2012-11-21 | 新东工业株式会社 | Grinding/polishing device for polygonal column member and grinding/polishing method |
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